JP2011054783A - Organic piezoelectric film and method and apparatus for manufacturing the same, and micromachine device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic piezoelectric film that can efficiently perform electric power conversion, namely, has superior piezoelectric characteristics in a low-frequency range by sufficiently harvesting artificially generated loss energy of low frequency of pressure variation, such as a voice and vibrations, and a method for manufacturing the same. <P>SOLUTION: The method for manufacturing the organic piezoelectric film includes: a coating process of forming a thin film 10 of a material liquid, prepared by dissolving particles of a fluorine-based organic resin exhibiting piezoelectric effect in a solvent, on a substrate 30 by coating the substrate 30 with the material liquid; and a heating process of orienting and solidifying the particles of the fluorine-based organic resin 10 by applying a predetermined electric field in a direction orthogonal to the thin film of the material liquid with a voltage generating device 70 before the material liquid is completely solidified while vaporizing the solvent away by heating the thin film 10 of the material liquid in an oxygen-free atmosphere. The organic piezoelectric film is further manufactured by using the manufacturing method. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a piezo organic film, a manufacturing method thereof, a manufacturing apparatus, and a micromachine device, and more particularly to a piezoelectric organic film that generates power by harvesting artificially generated low-frequency loss energy, a manufacturing method and a manufacturing apparatus thereof, and The present invention relates to a micromachine device using the piezo organic film.

  Energy harvesting (energy harvesting), that is, harvesting loss energy around you (harvesting), has been done for a long time, for example, natural energy such as wind power and sunlight. There is power generation using.

On the other hand, the loss energy generated artificially is not attracting much attention because the energy that can be harvested, that is, the output obtained by power generation, is not high, and approaches to energy problems and CO ₂ reduction in recent years. Many of them are interested in the research and development of power generation large-scale equipment and fuel cells using natural energy.

  Here, when considering the supply of electric power to portable electronic devices that have been used in recent years, it is noticed that the loss is extremely large from the viewpoint of the use of energy. That is, the energy obtained by thermal power generation with a conversion efficiency from fossil fuel of about 30% is lost in transmission lines and transformers, and further lost in voltage conversion adapters. Charged.

  In the current situation where electricity obtained from such extremely large losses is used, harvesting artificial loss energy, which has been less of a concern, is one approach to energy and environmental issues. It can be said that this is a preferable direction.

  As a specific example of the artificial loss energy, for example, in a mobile phone which is a representative product of the above-described portable electronic device, voice when talking, vibration when moving, when pressing a button For example, the operation of hitting a keyboard on a personal computer can be given.

  On the other hand, in these portable electronic devices, considering the extension of the battery life as the biggest issue, studies are being made on reducing the power consumption of the device and extending the life of the secondary battery.

  In such a study, it is very preferable to apply the artificial loss energy harvesting technique described above because the life of the battery can be further extended.

  However, each of the above-described artificial loss energy is generally at a low frequency of 1000 Hz or less, and such artificial loss energy at a low frequency of 1000 Hz or less is harvested to efficiently convert power. It is said that the piezoelectric method is more effective than the electromagnetic induction method.

  As an example, for example, a power generation device using a piezo organic film is attached to a shoe, and power is generated using pressure fluctuations applied as a person walks, and the portable device is charged (Patent Document 1). .

  There has also been an invention in which a power generation device using a piezo-organic film is attached to a case, power is generated using pressure fluctuation applied in accordance with a person's grip and the like, and supplied to a secondary battery (Patent Document 2).

JP 2004-96980 A Japanese Patent Laid-Open No. 2005-12980

  However, the current state of the piezo organic film used in Patent Document 1 and Patent Document 2 is excellent in response to a high frequency of 1000 Hz or higher, but has low response to a low frequency of 1000 Hz or less. For this reason, in these piezo organic films, it is difficult to sufficiently harvest the loss energy in the low frequency region having a frequency of 1000 Hz or less, and the piezoelectric stress constant g31 having a low value (when converting from mechanical energy to electrical energy). Only a constant indicating the generation potential).

  Therefore, artificially generated loss energy with low frequency of pressure fluctuations such as voice and vibration can be harvested (harvested) and converted into power efficiently, that is, with piezoelectric characteristics in the low frequency range. It has been desired to realize an excellent piezo organic film and a manufacturing method thereof.

  The present inventor has intensively studied to solve the above problems, and increases the piezoelectric stress constant g31 in the low frequency region by applying a voltage when the precursor of the piezo organic film is heated to form a film. The present inventors have found that this can be done and have completed the present invention. The invention of each claim will be described below.

The invention described in claim 1
A coating step in which a raw material liquid in which particles of a fluorine-based organic resin that exhibits a piezoelectric effect are dissolved in a solvent is applied to a substrate, and a thin film of the raw material liquid is formed on the substrate;
While the raw material liquid thin film is heated in an oxygen-free atmosphere to evaporate and remove the solvent, a predetermined electric field is applied in a direction perpendicular to the raw material liquid thin film before the raw material liquid is completely solidified. And a heating step in which the particles of the fluorine-based organic resin are oriented and solidified.

  In order to obtain a piezoelectric organic film having excellent piezoelectric characteristics in the low frequency region described above, the present inventor conducted various experiments on the production conditions. As a result, as in the conventional method for producing a piezo organic film, the raw material liquid in which the particles of the fluorine-based organic resin are dissolved is not simply heated and solidified, but the raw material liquid is heated in an atmosphere free of oxygen. On the other hand, it has been found that a piezoelectric organic film having a high piezoelectric stress coefficient g31 in a low frequency region of 1000 Hz or less can be obtained by aligning and solidifying the particles of a fluorine-based organic resin by applying an electric field.

  In conducting the experiment specifically, the residual polarization value Pr was measured instead of the piezoelectric stress coefficient g31. As described above, the piezoelectric property of the piezo organic film is evaluated by measuring the remanent polarization value Pr instead of directly measuring the piezoelectric stress coefficient g31. The remanent polarization value Pr is equal to the piezoelectric stress coefficient g31. Since there is a positive correlation and it is not easy to directly measure the piezoelectric stress coefficient g31, the residual polarization value Pr, which is relatively easy to measure, is used instead. That is, a piezo organic film having a large remanent polarization value Pr can be said to be a piezo organic film having a high piezoelectric stress coefficient g31 and excellent piezoelectric characteristics.

  In the present invention, it is possible to obtain a piezo organic film having a large remanent polarization value Pr even in a region where the frequency of pressure fluctuation is low, that is, having a high direct piezoelectric stress coefficient g31, without providing many complicated processes. It is possible to sufficiently harvest artificial loss energy having a low frequency of pressure fluctuation and efficiently convert power.

  As the “fluorine-based organic resin exhibiting a piezo effect”, PVDF (Poly-Vinylidene DiFluoride) and its derivative fluororesin can be preferably used.

  As derivatives of PVDF, for example, PVDF-TeFE (polyvinylidene fluoride and tetrafluoroethylene copolymer: Poly-Vinylidene DiFluoride and TetraFluoroethylene), PVDF-TrFE (polyvinylidene fluoride and ethylene trifluoride) Combined: Poly-VinylideneDiFluoride and TriFluoroEthylene) and the like.

PZT (Pb (Zr, Ti) O ₃ ), which is generally cited as a representative piezo material, has excellent responsiveness to high frequencies (1000 Hz or more), but low responsiveness to low frequencies (1000 Hz or less). In addition, the above-mentioned fluorine-based organic resin has a piezoelectric stress constant g31 that is 20 times higher than that of PZT, and can be sufficiently piezoelectric even in a low frequency range of 0.1 to 1000 Hz. An excellent piezoelectric organic film can be obtained. Moreover, since these fluorine-type organic resins do not contain lead like PZT, they do not adversely affect the environment.

  The “particles” in the present claims are not particularly limited to the particle diameter, shape, or distribution thereof, and may be any particles that are oriented by applying an electric field.

  The “solvent” is not particularly limited as long as it is a solvent that can provide a raw material liquid that can dissolve the above-mentioned fluorine-based organic resin particles and apply them to a substrate. An example of a preferred solvent is a mixed solvent of methyl ethyl ketone and dimethylacetamide.

  As the “substrate”, a silicon crystal substrate is preferable, but a ceramic substrate, a quartz substrate, a plastic substrate, and the like are also preferable.

The reason for “heating in an oxygen-free atmosphere” is that there is a risk of deteriorating the polarization characteristics of the obtained piezoelectric organic film if there is a peak related to oxygen. Although the pressure refers to heating in an atmosphere of 10 ⁻² Pa or less, the oxygen partial pressure may be somewhat higher as long as the effect of the present invention is exhibited.

  “Heating” in the present claims refers to heating at a temperature for evaporating the solvent and a temperature for solidifying the particles of the fluorinated organic resin, and is appropriately determined depending on the material. Specifically, heating at a temperature of 100 to 200 ° C. as the temperature for evaporating the solvent and 300 ° C. or lower as the temperature for solidifying the particles of the fluorinated organic resin can be given as an example. As a specific heating means, heater heating from the lower part may be used, but lamp heating from the upper part may be used.

  In addition, “before the raw material solution is completely solidified” refers to a time when the orientation of the fluorine-based organic resin particles is possible by applying an electric field, and the electric field may be applied from the start of the heating step. .

  The term “solidification” includes not only the fixing of the fluorine-based organic resin particles but also the case where the fluorine-based organic resin is solidified by melting.

  The thickness of the “piezo organic film” is preferably about 0.1 to 5 μm, but is not limited, and may be about 5 to 50 μm depending on the application.

The invention described in claim 2
The method for producing a piezo organic film according to claim 1, wherein the fluorine-based organic resin is PVDF-TeFE.

  Among the above-mentioned fluorine-based organic resins, PVDF-TeFE is particularly preferable because a piezoelectric organic film having a large remanent polarization value Pr, that is, a high piezoelectric stress coefficient g31 can be obtained. This material is preferable because it is a raw material of Teflon (registered trademark) and is inexpensive and easily available.

The invention according to claim 3
3. The method for manufacturing a piezo organic film according to claim 1, wherein the predetermined electric field is 0.5 to 2 MV / m. 4.

  When an electric field of 0.5 MV / m or more is applied, the fluorine-based organic resin particles can be preferably oriented, which is preferable. However, application of an electric field exceeding 2 MV / m is not preferable because a problem of loss of orientation occurs.

The invention according to claim 4
A piezoelectric organic film manufactured using the method for manufacturing a piezoelectric organic film according to claim 1.

  The piezo organic film according to the present invention is a piezo organic film having a large remanent polarization value Pr in a low frequency region of 1000 Hz or less, and therefore provides a piezo organic film having a high piezoelectric stress coefficient g31 and excellent piezoelectric characteristics. Can do.

The invention described in claim 5
When the remanent polarization value Pr at a frequency of 1 Hz is a and the remanent polarization value Pr at a frequency of 10 Hz is b, the piezoelectric organic film obtained by heating and solidifying the raw material liquid in which the particles of the fluorine-based organic resin are heated is not oriented.
The piezoelectric organic film is characterized in that a remanent polarization value Pr at a frequency of 1 Hz is 3a or more and a remanent polarization value Pr at a frequency of 10 Hz is 2b or more.

  A conventional piezoelectric organic film obtained by heating a raw material solution in which particles of a fluorine-based organic resin are heated and solidified without being oriented has a small remanent polarization value Pr in a low frequency region and can obtain a high piezoelectric stress coefficient g31. Can not. On the other hand, the piezoelectric organic film according to the present invention has a large remanent polarization value Pr in the low frequency region, and can obtain a high piezoelectric stress coefficient g31.

  This difference is prominent in the remanent polarization values Pr at frequencies of 1 Hz and 10 Hz, which are relatively frequently used when using artificial loss energy. When the remanent polarization value Pr at a frequency of 1 Hz of a conventional piezo organic film is a and the remanent polarization value Pr at a frequency of 10 Hz is b, the remanent polarization value Pr at a frequency of 1 Hz is 3a or more and the remanent polarization value Pr at a frequency of 10 Hz is If the piezo organic film according to the present invention is 2b or more, the difference from the piezoelectric characteristics of the conventional piezo organic film becomes remarkable, and it is possible to efficiently convert the loss energy to power by exhibiting excellent piezoelectric characteristics. A piezo-organic film can be provided.

The invention described in claim 6
A coating means for applying a raw material solution in which particles of a fluorine-based organic resin exhibiting a piezoelectric effect are dissolved in a solvent, to form a thin film of the raw material solution on the substrate;
While the raw material liquid thin film is heated in an oxygen-free atmosphere to evaporate and remove the solvent, a predetermined electric field is applied in a direction perpendicular to the raw material liquid thin film before the raw material liquid is completely solidified. And a heating means for orienting and solidifying the particles of the fluorine-based organic resin.

  By using the piezo organic film manufacturing apparatus according to the present invention, there is provided a piezo organic film excellent in piezoelectric characteristics having a large remanent polarization value Pr in a low frequency region of 1000 Hz or less, that is, a high piezoelectric stress coefficient g31. be able to.

The invention described in claim 7
A micromachine device characterized by being formed using the piezoelectric organic film according to claim 4 or 5 as a piezoelectric material.

  Since this is a micromachine device using a piezoelectric organic film having a large residual polarization value Pr in a low frequency region of 1000 Hz or less, that is, having a high piezoelectric stress coefficient g31, as a piezoelectric material, an artificial loss having a low pressure fluctuation frequency.・ Enough energy can be harvested for efficient power conversion. As a result, the battery life of an electronic device such as a mobile phone or a portable personal computer equipped with such a micromachine device can be extended.

  According to the present invention, artificially generated loss energy having a low frequency of pressure fluctuation such as voice and vibration can be sufficiently harvested (harvested), and power can be efficiently converted, that is, in a low frequency region. A piezoelectric organic film having excellent piezoelectric characteristics and a method for producing the same can be provided. By using such a piezo organic film, it is possible to provide a micromachine device capable of sufficiently harvesting artificially generated loss energy having a low pressure fluctuation frequency and efficiently converting power. .

It is a figure which shows an example of a structure of the apparatus which manufactures the piezoelectric organic film | membrane of this invention. It is a figure which shows the relationship between the residual polarization value of a piezoelectric organic film of an Example and a comparative example, and a frequency. It is a circuit block diagram of the electric power generating apparatus using a piezo organic film. It is a figure which shows typically the structure of the electric power generating apparatus for microphones of the mobile phone using a piezo organic film. It is a figure which shows a mode that the electric power generating apparatus of embodiment of this invention was integrated in the keyboard of a mobile telephone.

  Hereinafter, the present invention will be described in order based on embodiments. Note that the present invention is not limited to the following embodiments. Various modifications can be made to the following embodiments within the same and equivalent scope as the present invention.

[1] Production and characterization of piezo organic film Production of Piezoelectric Membrane (1) Example This example relates to a production method based on the present invention of a piezo organic membrane made of PVDF-TeFE.
I. Piezo Organic Film Manufacturing Apparatus First, a manufacturing apparatus used for manufacturing a piezo organic film according to this embodiment will be described with reference to FIG. FIG. 1 is a diagram showing an example of the configuration of an apparatus for producing a piezo organic film of the present invention. In FIG. 1, 10 is a piezo organic film or a precursor thereof, 30 is a substrate, 70 is a voltage generator, 71 is an upper wire, 72 is a lower wire, 73 is a switch, 74 is a ground, 75 is an upper electrode, 76 is a lower electrode, 78 is a rotating shaft, 79 is a spacer (side cup), 80 is a chamber (manufacturing container), 83 Is a nozzle, 87 is a vacuum pump, and 89 is a nitrogen supply system.

  The lower electrode 76 is a circular copper plate, the lower part of the center electrode is supported by the rotating shaft 78, the substrate 30 is installed on the upper surface, and the spacer 79 is installed on the outer periphery thereof. The lower electrode 76 can be rotated up to 6000 rpm with the substrate 30 and the spacer 79 fixed on the upper surface, and can be heated up to 300 ° C.

  The upper electrode 75 is connected to the positive electrode of the voltage generator 70 via the switch 73 and the upper electric wire 71, and the lower electrode 76 is connected to the negative electrode (ground 74) of the voltage generator 70 via the lower electric wire 72 and the rotating shaft 78. Connected with. Further, the upper electrode 75 can be attached to and detached from the upper end surface of the spacer 79 having a height of 5 mm by moving it horizontally. The upper electrode 75 is brought directly above the lower electrode 76 so that an electric field of 1 MV / m can be applied between the upper electrode 75 and the lower electrode 76. Although FIG. 1 shows the case where the upper electrode 75 is positive and the lower electrode 76 is negative, the positive and negative may be reversed.

  The piezo organic film or its precursor 10 is heated to a predetermined temperature via the substrate 30 by the lower electrode 76. An infrared heater 85 (lamp) indicated by a broken line is provided above the lower electrode 76 and the upper electrode 75. Alternatively, a small hole may be formed, and the piezo organic film on the substrate 30 facing the upper electrode 75 or the precursor 10 thereof may be lamp-heated from above the upper electrode 75.

B. Production of Piezoelectric Film Next, production of a piezo organic film will be described for each step.
a. Step 1: Gas replacement step in the chamber First, as shown in FIG. 1A, the upper electrode 75 is moved to the left, and the upper surface of the lower electrode 76 is opened. Air was exhausted with a vacuum pump 87 to make a vacuum of about 10 ⁻⁴ Torr, then N ₂ was introduced from the nitrogen supply system 89 to make the inside of the chamber 80 an oxygen-free atmosphere.

b. Step 2: Spin coating film forming process Next, while the lower electrode 76 is rotated at 5000 rpm, the PVDF-TeFE raw material liquid is sprayed from the nozzle 83 onto the upper surface of the substrate 30 on the lower electrode 76 to make the raw material liquid thin and uniform. The precursor 10 of the piezo organic film was formed by spin coating. The raw material solution was obtained by dissolving 4 g of PVDF-TeFE powder in 100 cc of a solvent (a mixed solvent of methyl ethyl ketone and dimethylacetamide, 1 to 3).

c. Step 3: Heating Step Next, the nozzle 83 was housed, the lower electrode 76 was heated, and the precursor 10 was heated at 80 ° C. to substantially evaporate the solvent component. At this time, by continuing the introduction and discharge of N ₂ , the evaporated solvent, oxygen in the solvent, and the like were quickly discharged out of the chamber 80. Since the solvent evaporates to some extent in the spin coat film forming step, the solvent component can be substantially evaporated without heating.

d. Step 4: Electric field application process Next, while the precursor 10 is heated at 180 ° C. by the lower electrode 76, before the precursor 10 is solidified, the upper electrode 75 is moved to the right as shown in FIG. The switch 73 was closed so as to face the lower electrode 76, and an electric field of 1 MV / m was applied between the upper electrode 75 and the lower electrode 76. And it heated under application of an electric field in this way, and solidified completely, aligning the particle | grains or molecule | numerator in the precursor 10 orientated. Thus, a piezo organic film 10 made of PVDF-TeFE having a thickness of 0.5 μm was produced.

(2) Comparative Example A piezo organic film was produced in the same manner as in Example except that no electric field was applied.

2. Evaluation of Characteristics of Piezoelectric Organic Films of Examples and Comparative Examples Next, evaluation methods and evaluation results of characteristics of the piezoelectric organic films of Examples and Comparative Examples will be described.
(1) Evaluation method By using a dielectric measuring device to enter the state of current-voltage measurement mode, the relationship between the remanent polarization value Pr of the piezoelectric organic films of the examples and comparative examples and the frequency of pressure fluctuation is measured. The characteristics of the organic film were evaluated.

(2) Evaluation Results FIG. 2 is a diagram showing the relationship between the remanent polarization value Pr and the frequency of the piezo organic films of the example and the comparative example. The remanent polarization value Pr (au) is plotted on the vertical axis, and the horizontal axis Shows the frequency (Hz) in logarithmic memory. In FIG. 2, the solid line is the piezo organic film of the example, and the broken line is the piezo organic film of the comparative example.

  In FIG. 2, the remanent polarization value Pr of the piezo organic film of the example is three times or more than the remanent polarization value Pr of the piezo organic film of the comparative example, particularly in a low frequency region of several Hz to 0.1 Hz. It can be seen that it is extremely large. For this reason, it is presumed that the piezoelectric stress constant g31 is excellent in proportion to the remanent polarization value Pr and the power generation by the piezoelectric effect is also good.

  In the examples, the piezo organic film having such excellent characteristics could be produced because the film was solidified under application of an electric field, and in addition, it was produced in an oxygen-free atmosphere. is there.

[2] Embodiment relating to application of piezo organic film Next, an embodiment relating to application of the piezo organic film of the present invention will be described.
1. Application example of power generation device using piezoelectric organic film and sound collecting unit (microphone) of mobile phone First, an application example of the power generation device and the power generation device to a microphone of a mobile phone will be described. FIG. 3 is a circuit configuration diagram of a power generation device (generator) 31 using the piezo organic film of the present invention. A Pt thin film is vapor-deposited on both sides of the piezo organic film 10, and necessary elements are connected to produce a power generation apparatus using the piezo organic film as shown in FIG. In FIG. 3, 21 and 22 are a top electrode and a bottom electrode made of a Pt thin film, 23 is a diode bridge, 24 is a capacitor (C), and 25 is an output terminal portion.

  An example in which the power generation device is applied to a microphone of a mobile phone is shown in FIG. FIG. 4 is a diagram schematically showing the configuration of a power generator for a microphone of a mobile phone using the piezoelectric organic film of the present invention, where (a) is an enlarged sectional view of the micro drum and (b) is a micro drum. Sectional drawing and top view, (c) is a figure which shows typically the structure of a connection of an electric power generating apparatus, load, and a battery. In FIG. 4, 32 is a power generation device, 33 is a micro drum, 28 is a silicon support, 91 is a battery, and 92 is a load.

  As shown in FIG. 4 (a), the micro drum 33 has a bottom electrode 22, a piezo organic film 10, and a top surface of a support 28 having a thin portion with a diameter d of 0.2 to 1 mm. The top electrode 21 is laminated in order. The bottom electrode 22 and the top electrode 21 are both circular as shown in the plan view of (b), and output protrusions are provided toward the lower side and the right side of the drawing, respectively.

  The power generation device 32 efficiently generates electric power by vibrations of several tens to 1000 Hz of sound waves of the piezo organic film 10 that accompany conversation, and efficiently recovers artificial energy that originally becomes loss as electric power. In the case of voice, since there is residual vibration of the membrane, power generation continues even after the conversation is interrupted.

  In addition, various types are conceivable when performing power generation by voice, but in the case of a structure that generates power while vibrating and holding the periphery like a micro drum film shown in FIG. For this, it is preferable that the membrane pressure is thin. For this reason, it is preferable that the thickness of each layer as well as the piezo organic film 10 is about 0.1 to 5 μm in an environment where there is no problem of strength such as exposure to a gust of wind.

  The diameter of the micro-drum film-shaped piezo organic film 10 is preferably about 0.2 to 1 mm, depending on the equipment to be mounted, from the viewpoint of converting sound vibration into energy.

  As shown in (c), the power generation device 32 is provided with a plurality of micro drums 33 and is connected to a battery 91 and a load 92. The electric power generated by the power generation device 32 is mainly fed back to the battery 91 and stored, and then fed back to the load 92.

2. Next, an example of application to a keyboard of a mobile phone will be described. FIG. 5 is a diagram illustrating a state in which the power generation device according to the embodiment of the present invention is incorporated in a keyboard of a mobile phone. In FIG. 5, 40 is a keyboard, 41 is a keyboard top bottom plate (including electrodes) made of insulating resin, 42 is a piezo power generation unit incorporating the power generation device of the above embodiment, and 43 is insulating resin. It is a keyboard lower bottom plate (including electrodes).

  The mobile phone keyboard 40 of the present embodiment incorporates the power generation device of the present invention between a keyboard upper bottom plate (including electrodes) 41 made of insulating resin and a keyboard lower bottom plate (including electrodes) 43 made of insulating resin. The piezo power generation unit 42 is sandwiched. Therefore, every time the user operates a key on the keyboard 40, specifically, every time the key is pressed with a finger, an appropriate pressing force is applied in the direction indicated by the white arrow on the piezo organic film (not shown). Works. Furthermore, as shown in FIG. 3, the piezo organic film used has a particularly large remanent polarization value in a low frequency region of 1 to several tens Hz corresponding to pressing of the key. As a result, the piezoelectric stress constant g31 is superior to a power generation device using a conventional piezoelectric organic film, and power is generated efficiently.

  In the case of generating power by pressing a key, the thickness of the piezo organic film 10 is preferably about 20 to 40 μm from the viewpoint of strength. In order not to reduce the power generation efficiency, the piezo organic film 10 is preferably provided separately for each of a plurality of, for example, 4 to 9 keys divided into groups instead of one for all keys.

10 Piezo Organic Film (Precursor)
21 Top electrode 22 Bottom electrode 23 Diode bridge 24 Capacitance 25 Output terminal portion 28 Support body 30 Substrate 31, 32 Power generation device 33 Micro drum 40 Keyboard 41 Keyboard upper bottom plate (including electrodes)
42 Piezo power generation unit 43 Keyboard bottom plate (including electrodes)
70 Voltage generator 71 Upper wire 72 Lower wire 73 Switch 74 Ground 75 Upper electrode 76 Lower electrode 78 Rotating shaft 79 Spacer 80 Chamber 83 Nozzle 85 Infrared heater 87 Vacuum pump 89 Nitrogen supply system 91 Battery 92 Load d Diameter

Claims (7)

A coating step in which a raw material liquid in which particles of a fluorine-based organic resin that exhibits a piezoelectric effect are dissolved in a solvent is applied to a substrate, and a thin film of the raw material liquid is formed on the substrate;
While the raw material liquid thin film is heated in an oxygen-free atmosphere to evaporate and remove the solvent, a predetermined electric field is applied in a direction perpendicular to the raw material liquid thin film before the raw material liquid is completely solidified. And a heating step of aligning and solidifying the particles of the fluorine-based organic resin, and a method for producing a piezo organic film.   The method for producing a piezo organic film according to claim 1, wherein the fluorinated organic resin is PVDF-TeFE.   The method for producing a piezo organic film according to claim 1 or 2, wherein the predetermined electric field is 0.5 to 2 MV / m.   A piezo organic film manufactured using the method for manufacturing a piezo organic film according to claim 1. When the remanent polarization value Pr at a frequency of 1 Hz is a and the remanent polarization value Pr at a frequency of 10 Hz is b, the piezoelectric organic film obtained by heating and solidifying the raw material liquid in which the particles of the fluorine-based organic resin are heated is not oriented.
A piezoelectric organic film characterized in that a remanent polarization value Pr at a frequency of 1 Hz is 3a or more and a remanent polarization value Pr at a frequency of 10 Hz is 2b or more. A coating means for applying a raw material solution in which particles of a fluorine-based organic resin exhibiting a piezoelectric effect are dissolved in a solvent, to form a thin film of the raw material solution on the substrate;
While the raw material liquid thin film is heated in an oxygen-free atmosphere to evaporate and remove the solvent, a predetermined electric field is applied in a direction perpendicular to the raw material liquid thin film before the raw material liquid is completely solidified. And a heating means for orienting and solidifying the particles of the fluorinated organic resin.   A micromachine device, wherein the piezoelectric organic film according to claim 4 or 5 is used as a piezoelectric material.

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