JP2011049136A - Method of manufacturing metal foil for high-pressure discharge lamp, high-pressure discharge lamp and display device - Google Patents

Method of manufacturing metal foil for high-pressure discharge lamp, high-pressure discharge lamp and display device Download PDF

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JP2011049136A
JP2011049136A JP2010005466A JP2010005466A JP2011049136A JP 2011049136 A JP2011049136 A JP 2011049136A JP 2010005466 A JP2010005466 A JP 2010005466A JP 2010005466 A JP2010005466 A JP 2010005466A JP 2011049136 A JP2011049136 A JP 2011049136A
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metal foil
pressure discharge
discharge lamp
knife edge
foil
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Atsushi Sakaguchi
淳 坂口
Yoshiki Kitahara
良樹 北原
Katsuhiro Ono
勝広 小野
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Panasonic Corp
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Panasonic Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal foil for a high-pressure discharge lamp, appropriate for manufacture of a lamp capable of restricting a breakage of a discharge container due to a crack. <P>SOLUTION: This method of manufacturing a metal foil for a high-pressure discharge lamp sealed inside of a seal part of a discharge container in the state that an electrode is connected to one end in the longitudinal direction and an external lead wire is connected to the other end includes: an electrolytic polishing process for performing electrolytic-polishing to at least a part of an outer peripheral edge of a foil piece as a precursor of the metal foil into a knife edge shape; and a chemical polishing process for performing chemical polishing to a surface of the part formed into a knife edge shape by the electrolytic polishing. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、高圧放電ランプ用金属箔の製造方法、当該金属箔を用いた高圧放電ランプ及び画像表示装置に関し、特に、金属箔の端縁部をナイフエッジ形状に加工する技術に関する。   The present invention relates to a method for manufacturing a metal foil for a high-pressure discharge lamp, a high-pressure discharge lamp using the metal foil, and an image display device, and more particularly to a technique for processing an edge of the metal foil into a knife edge shape.

高圧放電ランプの一例として、例えば、発光部と当該発光部に連設された封止部とからなるガラス製の放電容器を有し、前記発光部内の放電空間に発光物質として水銀が封入された高圧水銀ランプがある。当該ランプは、点灯中の水銀蒸気圧が10〜100[気圧](1〜10[MPa])と高圧であるため、高い気密性を必要とする。そこで、電極、金属箔及び外部リード線をこの順で接合してなる電極組立体を組み立て、当該電極組立体を封止部に封止する構造とすることで、主として前記金属箔の部分で電極組立体を気密に封止し、ランプの気密性を確保している。   As an example of a high-pressure discharge lamp, for example, it has a glass discharge container composed of a light emitting part and a sealing part connected to the light emitting part, and mercury is enclosed as a light emitting substance in the discharge space in the light emitting part. There is a high-pressure mercury lamp. Since the mercury vapor pressure during lighting is as high as 10 to 100 [atm] (1 to 10 [MPa]), the lamp needs high airtightness. Therefore, an electrode assembly formed by joining the electrode, the metal foil, and the external lead wire in this order is assembled, and the electrode assembly is sealed in the sealing portion. The assembly is hermetically sealed to ensure the hermeticity of the lamp.

近年、ランプ点灯中の水銀蒸気圧が200[気圧]程度にまで達する所謂超高圧放電ランプが製造されている。このような超高圧放電ランプでは、金属箔の端縁部をナイフエッジ形状に加工することで、電極組立体を封止する際の金属箔近傍のガラスへの応力集中を軽減し、金属箔近傍のガラスにクラックが発生するのを防止している。   In recent years, so-called ultra-high pressure discharge lamps have been manufactured in which the mercury vapor pressure during lamp operation reaches about 200 [atm]. In such an ultra-high pressure discharge lamp, the edge of the metal foil is processed into a knife edge shape to reduce stress concentration on the glass near the metal foil when sealing the electrode assembly, and in the vicinity of the metal foil. This prevents cracks from occurring in the glass.

特開2004−227970号公報JP 2004-227970 A

現在、ランプの高効率化を目的として、点灯中の水銀蒸気圧が300[気圧]を超えるような次世代の超高圧水銀ランプの開発が進められており、より耐圧性能が高くクラックが発生し難いランプ構造が求められている。しかしながら、上述のように金属箔の端縁部をナイフエッジ形状に加工するだけでは300[気圧]を超える超高圧に耐えることができず、金属箔近傍のガラスにクラックが発生し、放電容器が破損する。   Currently, for the purpose of increasing the lamp efficiency, the development of next-generation ultra-high pressure mercury lamps with mercury vapor pressure exceeding 300 [atmospheric pressure] is underway. A difficult lamp structure is required. However, as described above, simply processing the edge of the metal foil into a knife-edge shape cannot withstand an ultra-high pressure exceeding 300 [atm], causing cracks in the glass near the metal foil, fall into disrepair.

本発明は、上記の課題に鑑み、クラックに起因する放電容器の破損が起こり難いランプの製造に適した高圧放電ランプ用金属箔の製造方法を提供することを目的とする。本発明の他の目的は、放電容器の破損が起こり難く信頼性の高い高圧放電ランプを提供することにある。また、信頼性の高い高圧放電ランプを備えているためメンテナンスが容易な画像表示装置を提供することにある。   An object of this invention is to provide the manufacturing method of the metal foil for high pressure discharge lamps suitable for manufacture of the lamp | ramp with which the failure | damage of the discharge vessel resulting from a crack does not occur easily in view of said subject. Another object of the present invention is to provide a highly reliable high pressure discharge lamp in which the discharge vessel is hardly damaged. Another object of the present invention is to provide an image display device that is easy to maintain because it includes a high-pressure discharge lamp with high reliability.

上記目的を達成するため、本発明に係る高圧放電ランプ用金属箔の製造方法は、長手方向一端に電極が接合され他端に外部リード線が接合された状態で放電容器の封止部内に封止される高圧放電ランプ用金属箔の製造方法であって、前記金属箔の前駆体である箔片の外周縁部の少なくとも一部をナイフエッジ形状に電解研磨する電解研磨工程と、電解研磨によりナイフエッジ形状となった部分の表面を化学研磨する化学研磨工程とを含むことを特徴とする。   In order to achieve the above object, the method for producing a metal foil for a high-pressure discharge lamp according to the present invention is sealed in a sealing portion of a discharge vessel with an electrode bonded to one end in the longitudinal direction and an external lead wire bonded to the other end. A method for producing a metal foil for a high-pressure discharge lamp that is stopped by an electropolishing step in which at least a part of an outer peripheral edge of a foil piece that is a precursor of the metal foil is electropolished into a knife edge shape, and by electropolishing And a chemical polishing step of chemically polishing the surface of the portion having the knife edge shape.

本発明に係る高圧放電ランプは、放電空間を有する発光部及び当該発光部に連設された封止部からなる放電容器と、電極、金属箔及び外部リード線がこの順で接合されてなる一
対の電極組立体とを備え、前記封止部内に前記金属箔の全体が埋め込まれた状態で、前記封止部に前記一対の電極構造体が封止された高圧放電ランプであって、前記金属箔は、外周縁部の少なくとも一部がナイフエッジ形状であり、当該ナイフエッジ形状の部分の表面には、結晶粒からなる付着物を除去するための化学研磨が施されていることを特徴とする。
A high-pressure discharge lamp according to the present invention is a pair of a discharge vessel comprising a light emitting part having a discharge space and a sealing part connected to the light emitting part, an electrode, a metal foil, and an external lead wire joined in this order. A high-pressure discharge lamp in which the pair of electrode structures are sealed in the sealing portion in a state where the entire metal foil is embedded in the sealing portion. The foil is characterized in that at least a part of the outer peripheral edge has a knife edge shape, and the surface of the knife edge shaped part is subjected to chemical polishing for removing deposits made of crystal grains. To do.

本発明に係る画像表示装置は、上記高圧放電ランプを備えることを特徴とする。   An image display device according to the present invention includes the high-pressure discharge lamp.

本発明に係る高圧放電ランプ用金属箔の製造方法は、金属箔の前駆体である箔片の外周縁部の少なくとも一部をナイフエッジ形状に電解研磨する電解研磨工程と、電解研磨によりナイフエッジ形状となった部分の表面を化学研磨する化学研磨工程とを含むため、電解研磨後のナイフエッジ形状部分の表面に付着している付着物を除去することができる。したがって、当該方法で製造された金属箔は、ナイフエッジ形状部分の表面に付着物が少なく滑らかであり、ガラスとの密着性が良い。そのため、当該金属箔を用いて製造された高圧放電ランプは、封止部のガラスと金属箔との間に水銀蒸気等が入り込み難く、その結果クラックが生じ難いため信頼性が高い。   The method for producing a metal foil for a high-pressure discharge lamp according to the present invention includes an electropolishing step of electropolishing at least a part of an outer peripheral edge of a foil piece that is a precursor of the metal foil into a knife edge shape, and a knife edge by electropolishing. And a chemical polishing step of chemically polishing the surface of the shaped part, so that the deposits attached to the surface of the knife edge shaped part after the electropolishing can be removed. Therefore, the metal foil manufactured by the method is smooth with few deposits on the surface of the knife edge-shaped portion, and has good adhesion to glass. Therefore, the high-pressure discharge lamp manufactured using the metal foil is highly reliable because mercury vapor or the like hardly enters between the glass of the sealing portion and the metal foil, and as a result, cracks hardly occur.

本発明に係る高圧放電ランプは、金属箔の外周縁部の少なくとも一部がナイフエッジ形状であり、当該ナイフエッジ形状の部分の表面には結晶粒からなる付着物を除去するための化学研磨が施されているため、金属箔の縁部近傍においてクラックが発生し難く、放電容器の破損が起こり難い。
本発明に係る画像表示装置は、上記高圧放電ランプを備えているため、従来の画像表示装置に比べてランプの交換の回数が少なくて済み、メンテナンスが容易である。
In the high-pressure discharge lamp according to the present invention, at least a part of the outer peripheral edge of the metal foil has a knife edge shape, and chemical polishing for removing deposits made of crystal grains is performed on the surface of the knife edge shaped portion. Therefore, cracks hardly occur in the vicinity of the edge of the metal foil, and the discharge vessel is hardly damaged.
Since the image display apparatus according to the present invention includes the high-pressure discharge lamp, the number of lamp replacements is less than that of the conventional image display apparatus, and maintenance is easy.

第1の実施形態に係る高圧放電ランプを用いたランプユニットを示す平面図The top view which shows the lamp unit using the high pressure discharge lamp which concerns on 1st Embodiment. 本実施の形態に係る金属箔を示す図であって、(a)は平面図、(b)は正面図、(c)は右側面図、(d)は(a)におけるA−A線に沿った断面図、(e)は(a)におけるB−B線に沿った断面図It is a figure which shows the metal foil which concerns on this Embodiment, Comprising: (a) is a top view, (b) is a front view, (c) is a right view, (d) is the AA line in (a). Sectional drawing along, (e) is sectional drawing along the BB line in (a) 第2の実施形態に係る画像表示装置を示す一部破断斜視図The partially broken perspective view which shows the image display apparatus which concerns on 2nd Embodiment 第3の実施形態に係る画像表示装置を示す斜視図The perspective view which shows the image display apparatus which concerns on 3rd Embodiment. 電解研磨工程後であって化学研磨工程前における箔片のナイフエッジ形状部分を示す図であって、(a)は断面図、(b)は、(a)における矢印方向から見た表面状態の電子顕微鏡写真、(c)は、(b)において符号Gで示す範囲の表面状態を示す模式図It is a figure which shows the knife edge shape part of the foil piece after an electrolytic polishing process and before a chemical polishing process, (a) is sectional drawing, (b) is the surface state seen from the arrow direction in (a). Electron micrograph, (c) is a schematic diagram showing the surface state in the range indicated by symbol G in (b). 箔片のナイフエッジ形状部分の表面状態を示す電子顕微鏡写真Electron micrograph showing the surface state of the knife edge shape part of the foil piece 電解研磨についての実験結果を示す図The figure which shows the experimental result about electropolishing 化学研磨についての実験結果を示す図The figure which shows the experimental result about chemical polishing 電解研磨及び化学研磨を施した場合についての実験結果を示す図The figure which shows the experimental result about the case where electrolytic polishing and chemical polishing are applied 電解研磨及び化学研磨を施した場合についての実験結果を示す図The figure which shows the experimental result about the case where electrolytic polishing and chemical polishing are applied 電解研磨及び化学研磨を施した場合についての実験結果を示す図The figure which shows the experimental result about the case where electrolytic polishing and chemical polishing are applied 変形例1に係る金属箔を示す図であって、(a)は平面図、(b)は正面図、(c)は右側面図、(d)は(a)におけるA−A線に沿った断面図、(e)は(a)におけるB−B線に沿った断面図It is a figure which shows the metal foil which concerns on the modification 1, Comprising: (a) is a top view, (b) is a front view, (c) is a right view, (d) is along the AA line in (a). (E) is a sectional view taken along line BB in (a). 変形例2に係る金属箔を示す図であって、(a)は平面図、(b)は正面図、(c)は右側面図、(d)は(a)におけるA−A線に沿った断面図、(e)は(a)におけるB−B線に沿った断面図It is a figure which shows the metal foil which concerns on the modification 2, Comprising: (a) is a top view, (b) is a front view, (c) is a right view, (d) is along the AA line in (a). (E) is a sectional view taken along line BB in (a).

以下、本実施の形態に係る高圧放電ランプ用金属箔の製造方法、その金属箔を用いた高圧放電ランプ及び表示装置について、図面を参照しながら説明する。なお、各図面における部材の縮尺は実際のものとは異なる。また、本発明において、数値範囲を示す符号「〜」は、その両端の数値を含む。
[高圧放電ランプ]
図1は、第1の実施形態に係る高圧放電ランプを用いたランプユニットを示す平面図であって、内部の様子がわかるようにハウジングを切り欠いている。図1に示すように、ランプユニット100は、ハウジング101と、当該ハウジング101の内部に組み込まれた第1の実施形態に係る高圧放電ランプ102とを備える。
Hereinafter, a method for manufacturing a metal foil for a high pressure discharge lamp according to the present embodiment, a high pressure discharge lamp using the metal foil, and a display device will be described with reference to the drawings. In addition, the scale of the member in each drawing differs from an actual thing. In the present invention, the sign “˜” indicating a numerical range includes numerical values at both ends.
[High pressure discharge lamp]
FIG. 1 is a plan view showing a lamp unit using a high-pressure discharge lamp according to the first embodiment, in which a housing is cut away so that the inside can be seen. As shown in FIG. 1, the lamp unit 100 includes a housing 101 and a high-pressure discharge lamp 102 according to the first embodiment incorporated in the housing 101.

高圧放電ランプ102は、所謂ダブルエンド型の高圧水銀ランプであって、例えば石英ガラス製の放電容器110と、一対の電極組立体120とを備える。なお、高圧放電ランプはダブルエンド型に限定されず、例えば所謂シングルエンド型であっても良い。
放電容器110は、発光部111と、当該発光部111の両側に連設された一対の封止部112とを有する。発光部111は、例えば、外径が約12[mm]、内径が約5[mm]の略球状であって、内部に内容積が約0.1[cm]の放電空間113を有する。なお、発光部111の外径及び内径、並びに、放電空間113の内容積は上記に限定されず、高圧放電ランプ102の仕様により適宜変更可能である。
The high-pressure discharge lamp 102 is a so-called double-end type high-pressure mercury lamp, and includes a discharge vessel 110 made of, for example, quartz glass and a pair of electrode assemblies 120. The high-pressure discharge lamp is not limited to a double-end type, and may be a so-called single-end type, for example.
The discharge vessel 110 includes a light emitting unit 111 and a pair of sealing units 112 provided on both sides of the light emitting unit 111. For example, the light emitting unit 111 has a substantially spherical shape with an outer diameter of about 12 [mm] and an inner diameter of about 5 [mm], and has a discharge space 113 with an inner volume of about 0.1 [cm 3 ] inside. Note that the outer diameter and inner diameter of the light emitting unit 111 and the inner volume of the discharge space 113 are not limited to the above, and can be appropriately changed according to the specifications of the high-pressure discharge lamp 102.

放電空間113には、例えば、発光物質としての水銀が約0.3[mg/mm]、始動補助用としての希ガスが約30[kPa]、ハロゲン物質としての臭素(Br)が約10−7[μmol/mm]〜10−2[μmol/mm]封入されており、ランプ点灯中の水銀蒸気圧は300[気圧]程度になる。なお、発光物質は水銀に限定されず、アルカリ金属原子等であっても良い。希ガスとしては、アルゴン(Ar)、クリプトン(Kr)、キセノン(Xe)のいずれか又はそれらの少なくとも2種の混合ガス等が挙げられ、好適なのはアルゴンである。ハロゲン物質としては、ヨウ素(I)、臭素(Br)、塩素(Cl)のいずれか又はそれらの少なくとも2種の混合物質などが挙げられ、好適なのは臭素である。また、ランプ点灯中の水銀蒸気圧は300[気圧]程度に限定されず、それよりも低くても高くても構わない。 In the discharge space 113, for example, mercury as a luminescent material is about 0.3 [mg / mm 3 ], a rare gas as a starting aid is about 30 [kPa], and bromine (Br) as a halogen material is about 10 −7 [μmol / mm 3 ] to 10 −2 [μmol / mm 3 ] are enclosed, and the mercury vapor pressure during lamp operation is about 300 [atm]. Note that the light-emitting substance is not limited to mercury, and may be an alkali metal atom or the like. Examples of the rare gas include argon (Ar), krypton (Kr), xenon (Xe), or a mixed gas of at least two of them, and argon is preferable. Examples of the halogen substance include iodine (I), bromine (Br), chlorine (Cl), or a mixture of at least two of them, and bromine is preferable. Further, the mercury vapor pressure during lamp operation is not limited to about 300 [atm], and may be lower or higher than that.

一対の封止部112は、例えば、外径が約5.2[mm]、長さが約25[mm]の略円柱状であって、それぞれに電極組立体120が封止されている。一方の封止部112は、ハウジング101に例えばセメント等により固定されており、他方の封止部112は、ハウジング101内に位置する。なお、封止部112の外径、長さ及び形状は上記に限定されず、高圧放電ランプ102の仕様により適宜変更可能である。   The pair of sealing portions 112 are, for example, substantially cylindrical shapes having an outer diameter of about 5.2 [mm] and a length of about 25 [mm], and the electrode assembly 120 is sealed in each. One sealing portion 112 is fixed to the housing 101 with, for example, cement, and the other sealing portion 112 is located in the housing 101. The outer diameter, length, and shape of the sealing portion 112 are not limited to the above, and can be changed as appropriate according to the specifications of the high-pressure discharge lamp 102.

各電極組立体120は、電極130、金属箔140および外部リード線150を備え、それら電極130、金属箔140及び外部リード線150がこの順で例えば溶接などにより接合されたものであって、主として金属箔140の部分において封止部112に封止されている。
各電極130は、例えばタングステン製で棒状の電極軸131と、当該電極軸131の一端部に巻装され電極130の先端部を構成するタングステン製のコイル132とを有する。そして、互いの先端部が放電容器110の放電空間113内で対向し、且つ、先端部と反対側の端部が封止部112内に埋め込まれた状態で、略一直線上に並べて配設されている。一対の電極130の先端部間の間隔すなわち電極間距離は、例えば投射型の画像表示装置に用いられる高圧放電ランプの場合(所謂ショートアークタイプの高圧放電ランプの場合)、点光源に近づけるために、0.5[mm]〜2.0[mm]の範囲であることが好ましい。
Each electrode assembly 120 includes an electrode 130, a metal foil 140, and an external lead wire 150. The electrode 130, the metal foil 140, and the external lead wire 150 are joined in this order, for example, by welding. The metal foil 140 is sealed with the sealing portion 112.
Each electrode 130 has a rod-shaped electrode shaft 131 made of, for example, tungsten, and a tungsten coil 132 wound around one end of the electrode shaft 131 and constituting the tip of the electrode 130. The tip portions of the discharge vessel 110 are opposed to each other in the discharge space 113, and the end portion opposite to the tip portion is embedded in the sealing portion 112. ing. For example, in the case of a high-pressure discharge lamp used in a projection-type image display device (in the case of a so-called short arc type high-pressure discharge lamp), the distance between the tip portions of the pair of electrodes 130 is set close to a point light source. , 0.5 [mm] to 2.0 [mm] is preferable.

図2は、本実施の形態に係る金属箔を示す図であって、(a)は平面図、(b)は正面
図、(c)は右側面図、(d)は(a)におけるA−A線に沿った断面図、(e)は(a)におけるB−B線に沿った断面図である。
各金属箔140は、例えば、モリブデン製の略短冊状であって、図2(a)に示すように、長手方向の幅Lが約20[mm]、短手方向の幅Wが約1.5[mm]、図2(b)に示すように、肉厚tが約20[μm]である。なお、金属箔140の長手方向の幅L、短手方向の幅W、及び、肉厚tは、上記に限定されないが、長手方向の幅Lは10[mm]〜30[mm]、短手方向の幅Wは1.0[mm]〜2.0[mm]、肉厚tは10[μm]〜30[μm]の範囲であることが好ましい。
2A and 2B are diagrams showing a metal foil according to the present embodiment, where FIG. 2A is a plan view, FIG. 2B is a front view, FIG. 2C is a right side view, and FIG. 2D is A in FIG. Sectional view along line -A, (e) is a sectional view along line BB in (a).
Each metal foil 140 has, for example, a substantially strip shape made of molybdenum, and has a longitudinal width L of about 20 [mm] and a lateral width W of about 1. As shown in FIG. 5 [mm], as shown in FIG. 2B, the wall thickness t is about 20 [μm]. The width L in the longitudinal direction, the width W in the lateral direction, and the thickness t of the metal foil 140 are not limited to the above, but the width L in the longitudinal direction is 10 [mm] to 30 [mm]. The width W in the direction is preferably in the range of 1.0 [mm] to 2.0 [mm], and the thickness t is in the range of 10 [μm] to 30 [μm].

金属箔140の形状は、より具体的には、図2(a)に示すように、平面視において長方形の長手方向一方側(電極130が接合される側)の二隅を斜めに切り落としてなる略六角形であって、その略六角形の外周は、対向する一対の長辺141,142と、対向する一対の短辺143,144と、前記二隅を切り落とすことにより生じた2つの斜辺145,146とで構成され、長辺141,142の長さはいずれも約19[mm]、短辺143,144の長さは長い方が約1.5[mm]短い方が約0.7[mm]、斜辺145,146の長さはいずれも約1.0[mm]である。なお、前記長辺141,142、短辺143,144及び斜辺145,146の長さは上記に限定されない。   More specifically, as shown in FIG. 2A, the shape of the metal foil 140 is obtained by obliquely cutting off two corners on one side in the longitudinal direction of the rectangle (the side to which the electrode 130 is joined) in plan view. The substantially hexagonal outer periphery has a pair of opposing long sides 141 and 142, a pair of opposing short sides 143 and 144, and two oblique sides 145 generated by cutting off the two corners. 146, the long sides 141 and 142 are both about 19 [mm] long, and the short sides 143 and 144 are about 1.5 [mm] shorter and about 0.7 [shorter]. [Mm] and the lengths of the hypotenuses 145 and 146 are both about 1.0 [mm]. The lengths of the long sides 141 and 142, the short sides 143 and 144, and the oblique sides 145 and 146 are not limited to the above.

金属箔140は、電解研磨及び化学研磨がこの順で施されている。電解研磨が施されていることは、金属箔140の外周縁部の少なくとも一部がナイフエッジ形状に加工されているか否かにより確認できる。化学研磨が施されていることは、金属箔外周縁部付近にモリブデンの付着物が存在するか否かにより確認できる。
図2(b)〜(d)に示すように、金属箔140は、外周縁部の少なくとも一部、具体的には前記長辺141,142の近傍部分(金属箔140の短手方向両端縁部)が、ナイフエッジ形状に加工されている。このようなナイフエッジ形状にすることで、電極組立体120を封止する際の金属箔140近傍のガラスへの応力集中を軽減し、金属箔140近傍のガラスにクラックが発生し難い構造としている。なお、短手方向両端縁部のどちらか一方側のみがナイフエッジ形状に加工されていても良い。
The metal foil 140 is subjected to electrolytic polishing and chemical polishing in this order. Whether or not the electrolytic polishing is performed can be confirmed by whether or not at least a part of the outer peripheral edge of the metal foil 140 is processed into a knife edge shape. The chemical polishing can be confirmed by whether or not molybdenum deposits are present in the vicinity of the outer peripheral edge of the metal foil.
As shown in FIGS. 2B to 2D, the metal foil 140 includes at least a part of the outer peripheral edge, specifically, the vicinity of the long sides 141 and 142 (both edges in the short direction of the metal foil 140). Are processed into a knife edge shape. By adopting such a knife edge shape, stress concentration on the glass near the metal foil 140 when the electrode assembly 120 is sealed is reduced, and the glass near the metal foil 140 is less likely to crack. . In addition, only either one side edge part of a transversal direction may be processed into the knife edge shape.

一方、図2(b),(e)に示すように、短辺143,144の近傍部分(金属箔140の長手方向両端縁部)はナイフエッジ形状に加工されておらず、フラットな端面143a,144aを有する。
図1に戻って、金属箔140の長尺方向の一端部には電極130が接合され、他端部には外部リード線150が接合されている。そして、金属箔140の全体が封止部112内に埋め込まれている。このように、電極130と外部リード線150との間に金属箔140を介在させ、主に金属箔140の部分において電極組立体120を封止することで、放電空間113の気密性を確保している。
On the other hand, as shown in FIGS. 2B and 2E, the vicinity of the short sides 143 and 144 (longitudinal ends of the metal foil 140) are not processed into a knife edge shape, and the flat end surface 143a is not processed. , 144a.
Returning to FIG. 1, the electrode 130 is joined to one end of the metal foil 140 in the longitudinal direction, and the external lead wire 150 is joined to the other end. The entire metal foil 140 is embedded in the sealing portion 112. As described above, the metal foil 140 is interposed between the electrode 130 and the external lead wire 150, and the electrode assembly 120 is sealed mainly in the metal foil 140 portion, thereby ensuring the airtightness of the discharge space 113. ing.

外部リード線150は、金属箔140側の端部が封止部112内に埋め込まれており、金属箔140とは反対側の端部が封止部112から外部に導出されている。
ハウジング101は、反射部材160とレンズ部材170とを備える。反射部材160は、例えば、漏斗形状で内側に凹面状の反射面161を有するダイクロイック反射鏡であって、前記反射面161で高圧放電ランプ102の発光部111から発せられた光を照射方向(レンズ部材170側)に反射させる。
The external lead wire 150 has an end on the metal foil 140 side embedded in the sealing portion 112, and an end opposite to the metal foil 140 is led out from the sealing portion 112 to the outside.
The housing 101 includes a reflecting member 160 and a lens member 170. The reflecting member 160 is, for example, a dichroic reflecting mirror having a funnel shape and a concave reflecting surface 161 on the inside, and the light emitted from the light emitting unit 111 of the high-pressure discharge lamp 102 on the reflecting surface 161 is irradiated in the direction (lens Reflected on the member 170 side).

反射部材160の径の大きい方(照射方向側)の開口162には、当該開口162を塞ぐようにしてレンズ部材170が取り付けられており、それら反射部材160とレンズ部材170とは例えばシリコーン系の接着剤(図示しない)等により接着されている。また、反射部材160の径の小さい側(照射方向とは反対方向側)の開口163には、高圧放電ランプ102の一方の封止部112がハウジング101の内側から挿入されており、前記封止部112が前記反射部材160に例えばセメント103等により固定されている。   A lens member 170 is attached to the opening 162 having the larger diameter (irradiation direction side) of the reflecting member 160 so as to close the opening 162. The reflecting member 160 and the lens member 170 are made of, for example, a silicone-based member. Bonded with an adhesive (not shown) or the like. In addition, one sealing portion 112 of the high-pressure discharge lamp 102 is inserted from the inside of the housing 101 into the opening 163 on the small diameter side (opposite direction to the irradiation direction) of the reflecting member 160, and the sealing The portion 112 is fixed to the reflecting member 160 with, for example, cement 103 or the like.

反射部材160に固定されている方の封止部112から導出した外部リード線150は、ハウジング101の外部においてコネクタ(図示しない)のリード線104に接続スリーブ105を介して接続されている。一方、ハウジング101内に位置する方の封止部112から導出した外部リード線150は、反射部材160の反射面161に形成された貫通孔164を通ってハウジング101の外部へと導出され前記コネクタのリード線(図示しない)に接続されている。   The external lead wire 150 led out from the sealing portion 112 fixed to the reflecting member 160 is connected to the lead wire 104 of the connector (not shown) via the connection sleeve 105 outside the housing 101. On the other hand, the external lead wire 150 led out from the sealing portion 112 located in the housing 101 is led out to the outside of the housing 101 through the through hole 164 formed in the reflective surface 161 of the reflective member 160 and is connected to the connector. Connected to a lead wire (not shown).

[画像表示装置]
図3は、第2の実施形態に係る画像表示装置を示す一部破断斜視図であって、内部の様子がわかるように筐体の天板を取り除いている。図3に示すように、第2の実施形態に係る画像表示装置200は、前方に設置したスクリーン(図示しない)に向けて画像を投影する投射型のフロントプロジェクタであって、DLP(登録商標)方式を採用している。当該画像表示装置200は、筐体201内に、光源としてのランプユニット100、DMD(登録商標)や3色のカラーフィルタからなるカラーホイール(いずれも図示しない)等を有する光学ユニット202、前記DMD等を駆動制御する制御ユニット203、投射レンズ204、冷却ファンユニット205、及び、商用電源から供給される電力を前記制御ユニット203やランプユニット100に適した電力に変換して供給する電源ユニット206等が収納された構成を有する。
[Image display device]
FIG. 3 is a partially broken perspective view showing the image display apparatus according to the second embodiment, and the top plate of the housing is removed so that the inside can be seen. As shown in FIG. 3, the image display apparatus 200 according to the second embodiment is a projection-type front projector that projects an image toward a screen (not shown) installed in the front, and is a DLP (registered trademark). The method is adopted. The image display apparatus 200 includes a lamp unit 100 serving as a light source, an optical unit 202 having a DMD (registered trademark), a color wheel (not shown) including three color filters, and the like in the housing 201, the DMD. The control unit 203 for driving and controlling the projector, the projection lens 204, the cooling fan unit 205, the power supply unit 206 that converts the power supplied from the commercial power supply into power suitable for the control unit 203 and the lamp unit 100, and the like Is stored.

図4は、第3の実施形態に係る画像表示装置を示す斜視図である。図4に示すように、第3の実施形態に係る画像表示装置300は、投射型のリアプロジェクタであって、光源としてのランプユニット100、光学ユニット(図示しない)、投射レンズ(図示しない)及びミラー(図示しない)等が筐体301内に収納された構成であり、前記投射レンズから投射され前記ミラーで反射された画像が、透過式スクリーン302の裏側から投影されて画像を表示する。   FIG. 4 is a perspective view showing an image display apparatus according to the third embodiment. As shown in FIG. 4, the image display apparatus 300 according to the third embodiment is a projection-type rear projector, and includes a lamp unit 100 as a light source, an optical unit (not shown), a projection lens (not shown), and A mirror (not shown) or the like is housed in the housing 301, and an image projected from the projection lens and reflected by the mirror is projected from the back side of the transmissive screen 302 to display an image.

第2及び第3の実施形態に係る画像表示装置200,300は、放電容器110の破損が起こり難く信頼性の高い長寿命な高圧放電ランプ102を使用しているため、従来の画像表示装置に比べて高圧放電ランプ102の交換或いはランプユニット100の交換の回数が少なくて済み、メンテナンスが容易である。
[金属箔の製造方法]
本実施の形態に係る金属箔の製造方法は、研磨工程に特徴を有し、その点において従来の製造方法と相違する。その他の工程については基本的に従来の製造方法に準じている。以下では、研磨工程についてのみ詳細に説明し、その他の工程については省略又は簡略化して説明する。
Since the image display apparatuses 200 and 300 according to the second and third embodiments use the high-pressure discharge lamp 102 that is highly reliable and has a long life because the discharge vessel 110 is unlikely to be damaged, the conventional image display apparatus is used. In comparison, the number of times of replacement of the high-pressure discharge lamp 102 or the replacement of the lamp unit 100 is small, and maintenance is easy.
[Method for producing metal foil]
The manufacturing method of the metal foil according to the present embodiment is characterized by a polishing process, and is different from the conventional manufacturing method in that respect. Other processes basically conform to the conventional manufacturing method. Below, only a grinding | polishing process is demonstrated in detail, and it abbreviate | omits or demonstrates about another process.

本実施の形態に係る金属箔の製造方法では、まず、モリブデン箔板を切断して長方形の短冊状にし、前駆体としての箔片を得る。次に、箔片の端縁部を研磨工程により研磨して金属箔を得る。研磨工程には電解研磨工程と化学研磨工程とがあり、まず、電解研磨工程で箔片の端縁部をナイフエッジ形状に加工し、その後、化学研磨工程で電解研磨された部分すなわちナイフエッジ形状部分の表面から付着物を除去する。   In the metal foil manufacturing method according to the present embodiment, first, a molybdenum foil plate is cut into rectangular strips to obtain a foil piece as a precursor. Next, the edge part of a foil piece is grind | polished by a grinding | polishing process, and metal foil is obtained. The polishing process includes an electropolishing process and a chemical polishing process. First, the edge portion of the foil piece is processed into a knife edge shape in the electropolishing process, and then the portion electropolished in the chemical polishing process, that is, the knife edge shape. Remove deposits from the surface of the part.

電解研磨は、特定部位を選択的に研磨できるため、箔片の端縁部をナイフエッジ形状に加工するのに適しているが、ナイフエッジ形状部分の表面に付着物が発生する課題を有する。金属箔の表面に付着物が付着していると、その部分ではガラスとの密着性が悪くなるためガラスにクラックが発生し易い。水銀蒸気圧が200[気圧]程度の従来の高圧放電ランプであれば付着物が付着していてもクラックが発生することはなかったが、水銀蒸気圧が300[気圧]を超える場合は、付着物が付着しているとクラックが発生してしまう
ため付着物を除去する必要がある。
Electropolishing is suitable for processing the edge portion of a foil piece into a knife edge shape because a specific portion can be selectively polished, but has a problem that deposits are generated on the surface of the knife edge shape portion. If an adherent is attached to the surface of the metal foil, the adhesion to the glass deteriorates at that portion, so that the glass is likely to crack. In the case of a conventional high-pressure discharge lamp with a mercury vapor pressure of about 200 [atm], cracks did not occur even if adhering material adhered, but if the mercury vapor pressure exceeds 300 [atm], If the kimono is attached, cracks are generated, and thus the attached matter needs to be removed.

そこで、本実施の形態に係る製造方法では、電解研磨後、化学研磨によってナイフエッジ形状部分をさらに研磨して、表面から付着物を除去する。化学研磨は、研磨部分の表面を均一に研磨することができるため付着物の除去に適している。なお、化学研磨では箔片の端縁部をナイフエッジ形状に加工することはできないため、化学研磨だけでは目的とする金属箔は得られず、電解研磨が不可欠である。   Therefore, in the manufacturing method according to the present embodiment, after electrolytic polishing, the knife edge-shaped portion is further polished by chemical polishing to remove deposits from the surface. Chemical polishing is suitable for removing deposits because the surface of the polishing portion can be uniformly polished. In addition, since the edge part of a foil piece cannot be processed into a knife edge shape by chemical polishing, a target metal foil cannot be obtained only by chemical polishing, and electrolytic polishing is indispensable.

図5は、電解研磨工程後であって化学研磨工程前における箔片のナイフエッジ形状部分を示す図であって、(a)は断面図、(b)は、(a)における矢印方向から見た表面状態の電子顕微鏡写真、(c)は、(b)において符号Gで示す範囲の表面状態を示す模式図である。なお、箔片180における図5(a)に示す領域は、金属箔140における図2(d)の符号Fで示す領域に相当する。   5A and 5B are diagrams showing a knife edge shape portion of the foil piece after the electrolytic polishing step and before the chemical polishing step, where FIG. 5A is a cross-sectional view, and FIG. 5B is a view from the arrow direction in FIG. (C) is a schematic diagram showing a surface state in a range indicated by a symbol G in (b). In addition, the area | region shown to Fig.5 (a) in the foil piece 180 is corresponded to the area | region shown with the code | symbol F of FIG.2 (d) in the metal foil 140. FIG.

図5(a)に示すように、箔片180のナイフエッジ形状部分181の表面182には、モリブデンの結晶粒からなる付着物183が付着している。図5(b)の電子顕微鏡写真で灰色に写っているのがナイフエッジ形状部分181の表面182であり、白っぽい部分とその白っぽい部分で囲まれる内側の部分とが付着物183である。図5(a)及び(c)に示す付着物183の外周縁184は、図5(b)において表面182の灰色の部分と付着物183の白っぽい部分との境界に相当する。ナイフエッジ形状部分181の表面182を当該表面182と直交する方向から見た場合における付着物183の大きさは、外周縁184で囲まれる領域の面積である。なお、この面積は、表面182に垂直投影することにより形成される投影図をカバーする領域の面積を意味する。   As shown in FIG. 5A, the deposit 183 made of molybdenum crystal grains adheres to the surface 182 of the knife edge-shaped portion 181 of the foil piece 180. In the electron micrograph of FIG. 5B, the surface 182 of the knife-edge shaped portion 181 is shown in gray, and the whitish part and the inner part surrounded by the whitish part are the deposits 183. The outer peripheral edge 184 of the deposit 183 shown in FIGS. 5A and 5C corresponds to the boundary between the gray portion of the surface 182 and the whitish portion of the deposit 183 in FIG. The size of the deposit 183 when the surface 182 of the knife edge-shaped portion 181 is viewed from the direction orthogonal to the surface 182 is the area of the region surrounded by the outer peripheral edge 184. This area means the area of a region that covers a projection formed by vertical projection on the surface 182.

付着物183は、大きさが25[μm]以上のものが特にクラック発生の原因となるが、付着物とクラックとの関係を目視により確認すると、大きさ25[μm]以上の付着物183が存在しない場合、クラックが発生しないことが確認された。したがって、化学研磨により付着物183を溶かして小さくし或いは消滅させることで、大きさが25[μm]以上のものが存在しないことが好ましい。 The deposit 183 having a size of 25 [μm 2 ] or more causes cracks in particular, but when the relationship between the deposit and the crack is visually confirmed, the deposit having a size of 25 [μm 2 ] or more is observed. In the absence of 183, it was confirmed that no cracks occurred. Therefore, it is preferable that there is no particle having a size of 25 [μm 2 ] or more by dissolving or reducing the deposit 183 by chemical polishing.

図6は、箔片のナイフエッジ形状部分の表面状態を示す電子顕微鏡写真である。図6において箔片180の観測箇所C〜Eは、金属箔140における図2(a)の符号C〜Eで示す箇所に相当する。箔片180を化学研磨すると、研磨時間の経過と共に各観測箇所C〜Eのいずれにおいても付着物183の大きさ及び数量が減少し、当該付着物183が除去されていることがわかる。   FIG. 6 is an electron micrograph showing the surface state of the knife edge-shaped portion of the foil piece. In FIG. 6, the observation points C to E of the foil piece 180 correspond to the portions indicated by the symbols C to E in FIG. When the foil piece 180 is chemically polished, it can be seen that the size and quantity of the deposit 183 is reduced at any of the observation points C to E with the lapse of the polishing time, and the deposit 183 is removed.

以下に電解研磨工程についての詳細を説明する。電解研磨工程では、箔片を陽極とし陰極との間に電解研磨液を介して直流電流を流して前記箔片を研磨する。電界研磨強度は、直流電流の電流値と、直流電流を流す時間との積により決定される。電流値と時間の設定は基本的に自由であるが、これについては図7に示すような実験結果を得ている。
図7は、電解研磨についての実験結果を示す図である。実験用として、化学研磨を施さず電解研磨だけを施した金属箔を製造し、その金属箔を用いて高圧放電ランプを製造した。実験用の高圧放電ランプは、金属箔以外については第1の実施形態に係る高圧放電ランプ102と略同様の構成を有し、水銀蒸気圧は300[気圧]程度である。電解研磨は、電解研磨液に2[wt%]のNaOH(水酸化ナトリウム)水溶液を用い、電流値及び時間は種々設定した。
Details of the electrolytic polishing step will be described below. In the electrolytic polishing step, the foil piece is polished by passing a direct current through the electrolytic polishing solution between the foil piece as the anode and the cathode. The electropolishing strength is determined by the product of the current value of the direct current and the time during which the direct current is passed. The setting of the current value and the time is basically free, but for this, experimental results as shown in FIG. 7 are obtained.
FIG. 7 is a diagram showing experimental results for electropolishing. For experiment, a metal foil that was subjected only to electropolishing without chemical polishing was manufactured, and a high-pressure discharge lamp was manufactured using the metal foil. The experimental high-pressure discharge lamp has substantially the same configuration as the high-pressure discharge lamp 102 according to the first embodiment except for the metal foil, and the mercury vapor pressure is about 300 [atm]. In the electropolishing, a 2 [wt%] NaOH (sodium hydroxide) aqueous solution was used as the electropolishing liquid, and various current values and times were set.

そして、製造した各種高圧放電ランプを点灯させて破損の有無を調べた(n=10)。点灯時間100h以内で封止部を基点とする破損が起こった場合は「×」と評価し、100hを超え1000h以内で同様の破損が起こった場合は「△」と評価し、2000hま
で同様の破損が起こらなかった場合は「○」と評価した。なお、水銀蒸気圧が200[気圧]程度の高圧放電ランプについても同様の実験を行ったのでその実験結果を図7中のカッコ内に示す。
Then, various high-pressure discharge lamps that were manufactured were lit to check for damage (n = 10). If breakage occurs with the sealing portion as the starting point within the lighting time of 100 hours, it is evaluated as “X”, and if similar breakage occurs in excess of 100 h and within 1000 hours, it is evaluated as “Δ”, and the same applies until 2000 h. When damage did not occur, it was evaluated as “◯”. Since the same experiment was performed for a high-pressure discharge lamp having a mercury vapor pressure of about 200 [atm], the experimental result is shown in parentheses in FIG.

図7に示すように、水銀蒸気圧が300[気圧]程度の場合、電流値及び時間をどのように設定しても、評価が「○」になる高圧放電ランプはなかった。これは、化学研磨を施していないのが原因であり、水銀蒸気圧が300[気圧]程度の場合は、電解研磨だけでは不十分であることがわかる。
なお、水銀蒸気圧が200[気圧]程度の場合は、評価が「○」になる高圧放電ランプがあった。電解研磨強度が好適な範囲(電流値と時間との積が好適な範囲)であり金属箔の端縁部が好適にナイフエッジ形状に加工された場合に、評価が「○」になると考えられる。電界研磨強度が弱過ぎる、すなわち電流値と時間との積が小さ過ぎると、端縁部がナイフエッジ形状にならず破損が起こると考えられる。一方で、電解研磨強度が強過ぎる、すなわち電流値と時間との積が大き過ぎると、端縁部が研磨され過ぎて金属箔が薄くなり、電流集中によって破損が起こると考えられる。
As shown in FIG. 7, when the mercury vapor pressure was about 300 [atm], no high-pressure discharge lamp was evaluated as “◯” regardless of how the current value and time were set. This is because chemical polishing is not performed. When the mercury vapor pressure is about 300 [atm], it is understood that electrolytic polishing alone is insufficient.
In addition, when the mercury vapor pressure was about 200 [atm], there was a high-pressure discharge lamp with an evaluation of “◯”. When the electropolishing strength is in a suitable range (the product of the current value and time is preferred) and the edge of the metal foil is suitably processed into a knife edge shape, the evaluation is considered to be “◯”. . If the electropolishing strength is too weak, that is, if the product of the current value and the time is too small, it is considered that the edge portion does not have a knife edge shape and breakage occurs. On the other hand, if the electropolishing strength is too strong, that is, if the product of the current value and the time is too large, the edge portion is excessively polished, the metal foil becomes thin, and it is considered that damage is caused by current concentration.

電解研磨における電流値及び時間以外の条件としては、電解研磨液の種類、濃度及び温度などが考えられるが、それらの設定は自由である。基本的に、電解研磨液の種類、濃度及び温度などは電解研磨強度に大きな影響を与えないが、ナイフエッジ形状の仕上がり状態には影響する。なお、電解研磨液の種類としてはNaOH水溶液以外に、KOH水溶液等が考えられる。   As conditions other than the current value and time in electropolishing, the type, concentration, temperature, etc. of the electropolishing liquid can be considered, but these settings are free. Basically, the type, concentration, temperature, and the like of the electropolishing liquid do not greatly affect the electropolishing strength, but affect the finished state of the knife edge shape. In addition, as a kind of electropolishing liquid, KOH aqueous solution etc. can be considered besides NaOH aqueous solution.

以下に化学研磨工程についての詳細を説明する。化学研磨工程では、箔片を化学研磨液に浸漬させて前記箔片を研磨する。化学研磨強度は、化学研磨液の濃度及び箔片を浸漬させる時間との積により決定される。濃度と時間の設定は基本的に自由であるが、これについては図8に示すような実験結果を得ている。
図8は、化学研磨についての実験結果を示す図である。実験用として、電解研磨を施さず化学研磨だけを施した金属箔を製造し、その金属箔を用いて高圧放電ランプを製造した。実験用の高圧放電ランプは、金属箔以外については第1の実施形態に係る高圧放電ランプ102と略同様の構成を有し、水銀蒸気圧は300[気圧]程度である。化学研磨は、室温の過酸化水素水を用い、電流値及び時間は種々設定した。
Details of the chemical polishing step will be described below. In the chemical polishing step, the foil piece is immersed in a chemical polishing solution to polish the foil piece. The chemical polishing strength is determined by the product of the concentration of the chemical polishing solution and the time for dipping the foil piece. The setting of the concentration and time is basically free, but for this, experimental results as shown in FIG. 8 are obtained.
FIG. 8 is a diagram showing experimental results for chemical polishing. As an experiment, a metal foil that was subjected only to chemical polishing without electrolytic polishing was manufactured, and a high-pressure discharge lamp was manufactured using the metal foil. The experimental high-pressure discharge lamp has substantially the same configuration as the high-pressure discharge lamp 102 according to the first embodiment except for the metal foil, and the mercury vapor pressure is about 300 [atm]. For chemical polishing, hydrogen peroxide solution at room temperature was used, and the current value and time were variously set.

そして、製造した各高圧放電ランプを点灯させて破損の有無を調べた。評価基準は、電解研磨についての実験の場合と同様である。なお、水銀蒸気圧が200[気圧]程度の高圧放電ランプについても同様の実験を行ったのでその実験結果を図8中のカッコ内に示す。
図8に示すとおり、水銀蒸気圧が300[気圧]程度である場合は勿論のこと、水銀蒸気圧が200[気圧]程度である場合も、評価が「○」になる高圧放電ランプはなかった。これは、電解研磨を施していないのが原因であり、この結果から、化学研磨だけでは不十分であることがわかる。
Then, each manufactured high-pressure discharge lamp was turned on and examined for damage. The evaluation criteria are the same as in the experiment for electropolishing. Since the same experiment was conducted for a high-pressure discharge lamp having a mercury vapor pressure of about 200 [atm], the experimental result is shown in parentheses in FIG.
As shown in FIG. 8, not only when the mercury vapor pressure was about 300 [atm], but also when the mercury vapor pressure was about 200 [atm], there was no high-pressure discharge lamp with an evaluation of “◯”. . This is because the electropolishing is not performed, and it can be seen from this result that chemical polishing alone is insufficient.

化学研磨における濃度及び時間以外の条件としては、化学研磨液の種類及び温度などが考えられるが、それらの設定は自由である。化学研磨液の種類としては、過酸化水素水以外にフッ酸等が考えられる。また、沸騰していると研磨制御が難しくなるため、化学研磨液の温度は100℃未満が好ましく、常温がより好ましい。
図9は、電解研磨及び化学研磨を施した場合についての実験結果を示す図である。実験用として、電解研磨を施し更に化学研磨を施した金属箔を製造し、その金属箔を用いて高圧放電ランプを製造した。実験用の高圧放電ランプは、金属箔以外については第1の実施形態に係る高圧放電ランプ102と略同様の構成を有し、水銀蒸気圧は300[気圧]程度である。電解研磨の条件として、電解研磨液に2[wt%]のNaOH水溶液を用い、
電流値を200[mA]、時間を6[s]に設定した。化学研磨の条件として、化学研磨液には室温の過酸化水素水を用い、濃度x[wt%]及び時間t[min]は種々設定した。
As conditions other than the concentration and time in chemical polishing, the type and temperature of the chemical polishing liquid can be considered, but these settings are free. As the type of chemical polishing liquid, hydrofluoric acid or the like can be considered in addition to the hydrogen peroxide solution. Moreover, since it becomes difficult to control polishing if it is boiling, the temperature of the chemical polishing liquid is preferably less than 100 ° C., more preferably normal temperature.
FIG. 9 is a diagram showing experimental results when electrolytic polishing and chemical polishing are performed. For experiment, a metal foil subjected to electrolytic polishing and further subjected to chemical polishing was manufactured, and a high pressure discharge lamp was manufactured using the metal foil. The experimental high-pressure discharge lamp has substantially the same configuration as the high-pressure discharge lamp 102 according to the first embodiment except for the metal foil, and the mercury vapor pressure is about 300 [atm]. As electrolytic polishing conditions, a 2 wt% NaOH aqueous solution was used as the electrolytic polishing liquid,
The current value was set to 200 [mA] and the time was set to 6 [s]. As chemical polishing conditions, room temperature hydrogen peroxide was used as the chemical polishing solution, and the concentration x [wt%] and time t [min] were variously set.

そして、製造した各高圧放電ランプを点灯させて破損の有無を調べた。評価基準は、電解研磨についての実験の場合と同様である。図9中のカッコ内は、濃度x[wt%]と時間t[min]との積である。
図9に示すように、3≦x≦25、5≦t≦60、30≦xt≦300の条件を満たす場合に、水銀蒸気圧が300[気圧]程度であるにもかかわらず、評価が「○」の高圧放電ランプを得た。金属箔の端縁部がナイフエッジ形状に加工されており、且つ、その表面から付着物が除去されていたため、破損が起こらなかったと考えられる。t<5の場合や、xt<30の場合は、付着物が十分に除去できていないため破損が起こったと考えられる。t>60の場合や、xt>300の場合は、研磨により金属箔が薄くなり電流密度が大きくなり過ぎたため、或いは、研磨により金属箔が薄くなり箔切れを起こしたため、破損したと考えられる。なお、濃度x[wt%]は、濃過ぎると研磨時間の幅が狭くなるため研磨制御が難しくなり、薄過ぎると研磨時間が長くなり過ぎ非効率であるため、過酸化水素水の場合は、10[wt%]〜15[wt%]の範囲であることが好ましい。
Then, each manufactured high-pressure discharge lamp was turned on and examined for damage. The evaluation criteria are the same as in the experiment for electropolishing. The values in parentheses in FIG. 9 are the product of concentration x [wt%] and time t [min].
As shown in FIG. 9, when the conditions of 3 ≦ x ≦ 25, 5 ≦ t ≦ 60, and 30 ≦ xt ≦ 300 are satisfied, the evaluation is “ A high-pressure discharge lamp “○” was obtained. Since the edge part of metal foil was processed into the knife edge shape, and the deposit | attachment was removed from the surface, it is thought that the breakage did not occur. In the case of t <5 or xt <30, it is considered that the damage occurred because the deposits were not sufficiently removed. In the case of t> 60 or xt> 300, it is considered that the metal foil was thinned by polishing and the current density was excessively increased, or the metal foil was thinned by polishing and the foil was broken, so that it was considered damaged. If the concentration x [wt%] is too high, the polishing time width becomes narrow and polishing control becomes difficult, and if it is too thin, the polishing time becomes too long and inefficient. It is preferably in the range of 10 [wt%] to 15 [wt%].

図10及び図11は、電解研磨及び化学研磨を施した場合についての実験結果を示す図である。図10に係る実験では、電解研磨の条件として、5[wt%]のNaOH水溶液を用い、電流値を200[mA]、時間を6[s]に設定した。化学研磨の条件として、過酸化水素水を用い、濃度を3[wt%]、時間を15[min]に設定した。図11に係る実験では、電解研磨の条件として、5[wt%]のNaOH水溶液を用い、電流値を300[mA]、時間を2[s]に設定した。化学研磨の条件として、過酸化水素水を用い、濃度を3[wt%]、時間を10[min]に設定した。   10 and 11 are diagrams showing experimental results when electrolytic polishing and chemical polishing are performed. In the experiment according to FIG. 10, a 5 [wt%] NaOH aqueous solution was used as an electropolishing condition, the current value was set to 200 [mA], and the time was set to 6 [s]. As chemical polishing conditions, hydrogen peroxide water was used, the concentration was set to 3 [wt%], and the time was set to 15 [min]. In the experiment according to FIG. 11, a 5 [wt%] aqueous NaOH solution was used as an electropolishing condition, the current value was set to 300 [mA], and the time was set to 2 [s]. As chemical polishing conditions, hydrogen peroxide water was used, the concentration was set to 3 [wt%], and the time was set to 10 [min].

図10及び図11に示すように、電解研磨のみを施した場合(比較例1−1、比較例2)や、化学研磨後に電解研磨を施した場合(比較例1−2)は、高圧放電ランプの破損が起こったが、電解研磨後に化学研磨を施した場合(実施例1、実施例2)は、高圧放電ランプの破損は起こらず、本実施の形態に係る製造方法は水銀蒸気圧が300[気圧]程度の高圧放電ランプの製造に有効であることがわかる。   As shown in FIGS. 10 and 11, when only electrolytic polishing is performed (Comparative Example 1-1, Comparative Example 2), or when electrolytic polishing is performed after chemical polishing (Comparative Example 1-2), high-voltage discharge is performed. Although the lamp was damaged, when chemical polishing was performed after electrolytic polishing (Example 1 and Example 2), the high-pressure discharge lamp was not damaged, and the manufacturing method according to the present embodiment has a mercury vapor pressure. It turns out that it is effective for the manufacture of a high-pressure discharge lamp of about 300 [atm].

[変形例]
以上、本発明に係る高圧放電ランプ用金属箔の製造方法、高圧放電ランプ及び表示装置を実施の形態に基づいて具体的に説明してきたが、本発明の内容は、上記の実施の形態に限定されない。
<金属箔>
金属箔は、第1の実施形態に係る金属箔140のような形状に限定されず、例えば以下に示す変形例1及び変形例2に係る金属箔のような形状であっても良い。
[Modification]
As mentioned above, although the manufacturing method of the metal foil for high pressure discharge lamps which concerns on this invention, the high pressure discharge lamp, and the display apparatus were demonstrated concretely based on embodiment, the content of this invention is limited to said embodiment. Not.
<Metal foil>
The metal foil is not limited to the shape like the metal foil 140 according to the first embodiment, and may be the shape like the metal foil according to the following modified example 1 and modified example 2, for example.

図12は、変形例1に係る金属箔を示す図であって、(a)は平面図、(b)は正面図、(c)は右側面図、(d)は(a)におけるA−A線に沿った断面図、(e)は(a)におけるB−B線に沿った断面図である。
図12(a)に示すように、変形例1に係る金属箔440は、例えば、モリブデン製の略短冊状であって、平面視における形状が、長方形の長手方向一方側(電極が接合される側)の二隅を斜めに切り落とした略六角形であって、その略六角形の外周は、対向する一対の長辺441,442と、対向する一対の短辺443,444と、前記二隅を切り落とすことにより生じた2つの斜辺445,446とで構成される。
12A and 12B are diagrams showing a metal foil according to the first modification, in which FIG. 12A is a plan view, FIG. 12B is a front view, FIG. 12C is a right side view, and FIG. Sectional drawing along A line, (e) is sectional drawing along the BB line in (a).
As shown in FIG. 12A, the metal foil 440 according to Modification 1 is, for example, a substantially strip shape made of molybdenum, and the shape in plan view is one side in the longitudinal direction of the rectangle (the electrodes are joined). A substantially hexagonal shape with two corners on the side) cut off obliquely, and the outer periphery of the substantially hexagonal shape is formed by a pair of opposing long sides 441 and 442, a pair of opposing short sides 443 and 444, and the two corners It is composed of two hypotenuses 445 and 446 generated by cutting off.

図12(b)〜(d)に示すように、金属箔440は、長辺441,442の近傍部分
(金属箔440の短手方向両端縁部)がナイフエッジ形状に加工されており、さらに、図12(c)及び(e)に示すように、短辺443,444の近傍部分(金属箔440の長手方向両端縁部)もナイフエッジ形状に加工されている。このように長手方向両端縁部もナイフエッジ形状であるため、長手方向両端縁部近傍のガラスへの応力集中も軽減でき、よりクラックが生じ難い高圧放電ランプを得ることができる。さらに加えて、金属箔440は、図12(b)及び(c)に示すように、斜辺445,446の近傍部分もナイフエッジ形状に加工されている。そのため更にクラックが生じ難い。
As shown in FIGS. 12B to 12D, the metal foil 440 is processed in a knife edge shape in the vicinity of the long sides 441 and 442 (both ends in the short direction of the metal foil 440). 12 (c) and 12 (e), the vicinity of the short sides 443 and 444 (longitudinal end edges of the metal foil 440) is also processed into a knife edge shape. As described above, since both end edges in the longitudinal direction have a knife edge shape, stress concentration on the glass in the vicinity of both end edges in the longitudinal direction can be reduced, and a high-pressure discharge lamp that is less prone to crack can be obtained. In addition, as shown in FIGS. 12B and 12C, in the metal foil 440, the vicinity of the hypotenuses 445 and 446 is also processed into a knife edge shape. Therefore, it is hard to produce a crack further.

なお、長手方向両端縁部のどちらか一方側にのみがナイフエッジ形状に加工されていても良い。その場合は、ランプ点灯中高温になるためクラックが発生し易い電極側をナイフエッジ形状に加工することが効果的である。また、斜辺445,446の近傍部分についても、そのうちの一部のみをナイフエッジ形状に加工しても良い。
図13は、変形例2に係る金属箔を示す図であって、(a)は平面図、(b)は正面図、(c)は右側面図、(d)は(a)におけるA−A線に沿った断面図、(e)は(a)におけるB−B線に沿った断面図である。図13(a)に示すように、変形例2に係る金属箔540は、例えば、モリブデン製の略短冊状であって、平面視における形状が、対向する一対の長辺541,542と、対向する一対の短辺543,544とで構成される長方形である。
It should be noted that only one of the longitudinal end edges may be processed into a knife edge shape. In this case, it is effective to process the electrode side where cracks are likely to occur because the temperature is high during lamp operation into a knife edge shape. Further, only a part of the vicinity of the oblique sides 445 and 446 may be processed into a knife edge shape.
FIGS. 13A and 13B are diagrams showing a metal foil according to Modification Example 2, wherein FIG. 13A is a plan view, FIG. 13B is a front view, FIG. 13C is a right side view, and FIG. Sectional drawing along A line, (e) is sectional drawing along the BB line in (a). As shown in FIG. 13A, the metal foil 540 according to the modified example 2 is, for example, a substantially strip shape made of molybdenum, and the shape in plan view is opposed to a pair of long sides 541 and 542 facing each other. It is a rectangle composed of a pair of short sides 543 and 544.

図13(b)〜(d)に示すように、金属箔540の長辺541,542の近傍部分(短手方向両端縁部)はナイフエッジ形状に加工されている。なお、短辺543,544の近傍部分(長手方向両端縁部)もナイフエッジ形状に加工した構成であっても良く、その場合はガラスにクラックがより生じ難い構成とすることができる。
金属箔に関するその他の変形例としては、金属箔の外周縁に凹凸を設けることによって前記金属箔にアンカー効果を付加して耐圧性能を向上させることが考えられる。また、化学エッチングを施すと、前述した電解研磨後において金属箔外周縁部に発生するモリブデンの付着物を取り除くことができるという効果にくわえて、わずかに金属箔を酸化させることができるという効果も得られる。このように金属箔を酸化させると、金属箔がより石英ガラスとなじみやすくなるため、結果として、石英ガラスと金属箔との界面付近における破損の発生をより抑制することができる。
As shown in FIGS. 13B to 13D, the portions near the long sides 541 and 542 of the metal foil 540 (both ends in the short direction) are processed into a knife edge shape. In addition, the structure which processed the vicinity part (longitudinal direction both ends edge part) of the short sides 543 and 544 to the knife edge shape may be sufficient, and it can be set as the structure which a crack does not produce more easily in that case.
As another modification example of the metal foil, it is conceivable to improve the pressure resistance performance by adding an anchor effect to the metal foil by providing irregularities on the outer periphery of the metal foil. Further, when chemical etching is performed, in addition to the effect of removing molybdenum deposits generated on the outer peripheral edge of the metal foil after the above-described electropolishing, the metal foil can be slightly oxidized. can get. When the metal foil is oxidized in this way, the metal foil becomes more compatible with quartz glass, and as a result, the occurrence of breakage near the interface between the quartz glass and the metal foil can be further suppressed.

<製造方法>
電解研磨工程における、電解研磨の条件、すなわち、直流電流を流す電流値及び時間、並びに、電解研磨液の種類、濃度及び温度、等については、上記実施の形態に記載の条件に限定されない。
また、電解研磨は、交流電流を流して行ってもよい。この場合、流す電流値及び時間、並びに、電解研磨液の種類、濃度、等については、上記実施の形態に記載の直流電流と同様の条件を用いることができる。
なお、直流電流による電界研磨の場合、電解液の濃度勾配が発生しやすいため、一定の間隔で電解液を攪拌することが好ましい。一方、交流電流による電界研磨の場合、両極において気泡が発生しやすく、別途電解液を攪拌しなくとも電解液が攪拌されたような状態となり、電解液の濃度勾配を発生し難くすることができる。
また、化学研磨工程における、化学研磨の条件、すなわち、電解研磨液の種類、濃度及び温度、並びに、電解研磨液に浸漬させる時間等については、上記実施の形態に記載の条件に限定されない。なお、化学研磨する際に箔片を陽極として陰極との間に化学研磨液を介して微量の電流を流しても良い。ここで微量とは、箔片の外周縁部をナイフエッジ形状に加工することはできないが、表面の付着物は除去できる程度の値を意味する。
<Manufacturing method>
The electrolytic polishing conditions in the electrolytic polishing step, that is, the current value and time for applying a direct current, and the type, concentration and temperature of the electrolytic polishing liquid are not limited to the conditions described in the above embodiment.
Further, the electrolytic polishing may be performed by passing an alternating current. In this case, the same conditions as those of the direct current described in the above embodiment can be used for the current value and time to flow and the type and concentration of the electrolytic polishing liquid.
In the case of electropolishing with a direct current, a concentration gradient of the electrolytic solution is likely to occur. Therefore, it is preferable to stir the electrolytic solution at regular intervals. On the other hand, in the case of electropolishing with an alternating current, bubbles are likely to be generated at both electrodes, and the electrolyte solution is stirred without separately stirring the electrolyte solution, which can make it difficult to generate a concentration gradient of the electrolyte solution. .
In addition, the conditions for chemical polishing in the chemical polishing step, that is, the type, concentration and temperature of the electrolytic polishing liquid, the time for immersion in the electrolytic polishing liquid, and the like are not limited to the conditions described in the above embodiment. When chemical polishing is performed, a small amount of current may flow between the foil piece as an anode and a cathode through a chemical polishing liquid. Here, the trace amount means a value at which the outer peripheral edge of the foil piece cannot be processed into a knife edge shape, but the surface deposits can be removed.

上記実施の形態では、点灯中の水銀蒸気圧が300[気圧]程度の高圧放電ランプに適用する場合について詳細に説明したが、水銀蒸気圧が300[気圧]以下の高圧水銀ランプや、低圧水銀ランプについても適用することが可能である。また、水銀ランプ以外の他の放電ランプにも適用可能であり、例えば、金属ハロゲン化物を封入したメタルハライドランプなどの放電ランプに適用することもできる。   In the above embodiment, the case of applying to a high-pressure discharge lamp having a mercury vapor pressure of about 300 [atm] during lighting has been described in detail, but a high-pressure mercury lamp having a mercury vapor pressure of 300 [atm] or less, or low-pressure mercury. It can also be applied to lamps. Further, the present invention can be applied to other discharge lamps other than the mercury lamp, and for example, can be applied to a discharge lamp such as a metal halide lamp enclosing a metal halide.

102 高圧放電ランプ
111 発光部
112 封止部
110 放電容器
120 電極組立体
130 電極
140 金属箔
140’ 箔片
183 付着物
150 外部リード線
200,300 画像表示装置
DESCRIPTION OF SYMBOLS 102 High pressure discharge lamp 111 Light emission part 112 Sealing part 110 Discharge container 120 Electrode assembly 130 Electrode 140 Metal foil 140 'Foil piece 183 Adherence 150 External lead wire 200,300 Image display apparatus

Claims (5)

長手方向一端に電極が接合され他端に外部リード線が接合された状態で放電容器の封止部内に封止される高圧放電ランプ用金属箔の製造方法であって、
前記金属箔の前駆体である箔片の外周縁部の少なくとも一部をナイフエッジ形状に電解研磨する電解研磨工程と、電解研磨によりナイフエッジ形状となった部分の表面を化学研磨する化学研磨工程とを含むことを特徴とする高圧放電ランプ用金属箔の製造方法。
A method for producing a metal foil for a high-pressure discharge lamp that is sealed in a sealing portion of a discharge vessel with an electrode bonded to one end in the longitudinal direction and an external lead wire bonded to the other end,
Electrolytic polishing step of electrolytic polishing at least a part of the outer peripheral edge of the foil piece, which is a precursor of the metal foil, into a knife edge shape, and chemical polishing step of chemically polishing the surface of the knife edge shape portion by electrolytic polishing The manufacturing method of the metal foil for high pressure discharge lamps characterized by including these.
前記化学研磨工程では、過酸化水素水中に、前記箔片の少なくとも前記ナイフエッジ形状となった部分を浸漬させて化学研磨し、
前記過酸化水素水の濃度[wt%]をx、前記浸漬の時間[min]をtとした場合に、3≦x≦15、5<t<90、30<xt<400の条件を満たすことを特徴とする請求項1記載の高圧放電ランプ用金属箔の製造方法。
In the chemical polishing step, in the hydrogen peroxide water, at least the knife edge-shaped portion of the foil piece is immersed and chemically polished,
When the concentration [wt%] of the hydrogen peroxide solution is x and the immersion time [min] is t, the conditions of 3 ≦ x ≦ 15, 5 <t <90, and 30 <xt <400 are satisfied. The method for producing a metal foil for a high-pressure discharge lamp according to claim 1.
前記電解研磨工程では、前記箔片の外周縁部を全周に亘ってナイフエッジ形状に電解研磨することを特徴とする請求項1又は2に記載の高圧放電ランプ用金属箔の製造方法。   3. The method for producing a metal foil for a high-pressure discharge lamp according to claim 1, wherein in the electrolytic polishing step, the outer peripheral edge of the foil piece is electrolytically polished into a knife edge shape over the entire circumference. 放電空間を有する発光部及び当該発光部に連設された封止部からなる放電容器と、電極、金属箔及び外部リード線がこの順で接合されてなる一対の電極組立体とを備え、前記封止部内に前記金属箔の全体が埋め込まれた状態で、前記封止部に前記一対の電極構造体が封止された高圧放電ランプであって、
前記金属箔は、外周縁部の少なくとも一部がナイフエッジ形状であり、当該ナイフエッジ形状の部分の表面には、結晶粒からなる付着物を除去するための化学研磨が施されていることを特徴とする高圧放電ランプ。
A discharge vessel comprising a light emitting part having a discharge space and a sealing part connected to the light emitting part, and a pair of electrode assemblies in which electrodes, metal foil and external lead wires are joined in this order, A high pressure discharge lamp in which the pair of electrode structures are sealed in the sealing portion in a state where the entire metal foil is embedded in the sealing portion,
The metal foil is such that at least a part of the outer peripheral edge has a knife edge shape, and the surface of the knife edge shaped portion is subjected to chemical polishing for removing deposits made of crystal grains. High-pressure discharge lamp characterized.
請求項4に記載の高圧放電ランプを備えることを特徴とする画像表示装置。   An image display device comprising the high-pressure discharge lamp according to claim 4.
JP2010005466A 2009-07-29 2010-01-14 Method of manufacturing metal foil for high-pressure discharge lamp, high-pressure discharge lamp and display device Pending JP2011049136A (en)

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Publication number Priority date Publication date Assignee Title
JPH117918A (en) * 1997-06-11 1999-01-12 Patent Treuhand Ges Elektr Gluehlamp Mbh Molybdenum foil glass sealing part and electric lamp provided therewith
JPH11111226A (en) * 1997-09-30 1999-04-23 Ushio Inc Short arc type extra-high pressure discharge lamp
JP2002352775A (en) * 2001-05-28 2002-12-06 Quark Systems Co Ltd Excimer lamp, excimer irradiation device, and edge- cleaning method
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