JP2011028970A - Luminaire for clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a luminaire for a clean room, for allowing easier maintenance work for replacing a light source, resulting in a shorter maintenance time for the whole clean room. <P>SOLUTION: The luminaire for the clean room includes an embedded casing 100 to be embedded in a ceiling TU of the clean room CR where semiconductor integrated circuit elements are manufactured, in an air tight manner, and a lighting unit 200 detachably mounted on the embedded casing 100 while being exposed to a ceiling surface TM of the clean room CR. The lighting unit 200 has a flat plate-like member 210 having a plurality of light emitting diodes, a unit frame 220 on which the plate-like member 210 is mounted, and a square translucent plate 230 having translucency, and mounted on the unit frame 220 while being opposed to the plate-like member 210. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a clean room lighting apparatus suitable for a clean room in which a semiconductor integrated circuit element or the like is manufactured.

  In a clean room where a semiconductor integrated circuit element or the like is manufactured, specifications that can ensure the cleanliness in the clean room are required. As such a clean room lighting fixture, a sealed structure is common. For example, the applicant of the present application states that “a container-shaped instrument main body having only the front surface opened, a light source accommodated in the instrument main body, a front glass having a shape covering the front opening of the instrument main body, and the front glass. In a lighting fixture having a front frame that is detachably attached to the fixture body, and the airtightness inside the fixture is maintained with the front glass and the front frame attached, radiation from the light source inside the fixture A hermetic luminaire in which titanium oxide or the like is applied to at least a part of a portion that is exposed to light. (Japanese Patent Laid-Open No. 09-306218) was developed.

  However, this sealed illuminating device has at least three stages of removal work for each front frame of the front glass, replacement work for the fluorescent lamp as a light source, and attachment work for each front frame of the front glass during maintenance such as replacement of the light source. Work was necessary.

JP 09-306218 A

However, this sealed luminaire requires a relatively long maintenance time because the above-described at least three steps of work are required. In addition, since the light source is directly touched by hand, it is necessary to clean the light source after replacing the light source.
Further, in the clean room, in addition to the maintenance work time of the lighting fixture, it is necessary to recover the cleanness in the clean room to a predetermined value after the maintenance work is completed. In other words, if the maintenance time of one lighting fixture is slightly increased, the maintenance time of the entire clean room is significantly increased.

  The present invention was devised in view of the above circumstances, and provides a clean room illuminator that can perform maintenance work for light source replacement more easily, and as a result, can shorten the maintenance time of the entire clean room. The purpose is to do.

  A clean room lighting apparatus according to the present invention includes an embedded housing that is embedded in an airtight state behind a clean room where a semiconductor integrated circuit element or the like is manufactured, and a clean room ceiling that is detachably attached to the embedded housing. And a lighting unit exposed on the surface.

  The lighting unit includes a flat plate-like member provided with a plurality of light-emitting diodes, a unit frame to which the plate-like member is attached, and a translucency attached to the unit frame and facing the substrate. A translucent plate.

  The plate-like member has a substrate on which a plurality of light-emitting diodes are mounted and a flat reflection plate to which the substrate is attached, and the surface of the reflection plate is a surface that reflects light from the light-emitting diodes Processing has been applied.

  The unit frame is attached to a frame body of a frame shape, a corner of a reflection plate of a plate-like member, a corner angle connected to the reflection plate, and an inner side of an outer frame of the frame body A pressing member attached to the frame body, and an edge portion of the translucent plate is sandwiched and fixed between the inner flange portion of the frame body and the pressing member.

  In the clean room lighting apparatus according to the present invention, since the maintenance for replacing the light source only needs to replace the illumination unit, the time required for the replacement work can be shortened. As a result, the non-operating time of the clean room for maintenance can be shortened. In addition, since the replacement work is easy, the time required to restore the cleanliness of the clean room can be shortened.

  In particular, the lighting unit includes a flat plate-like member provided with a plurality of light-emitting diodes, a unit frame to which the plate-like member is attached, and a translucent light attached to the unit frame and facing the substrate. Therefore, the illumination unit can be formed thinly, the transport time for maintenance can be shortened, and the transport space can be reduced. Further, since the light emitting diode that is the light source is not directly touched by hand, the oil of the hand does not adhere to the light source, and the conventional light source cleaning operation becomes unnecessary. This all leads to a reduction in maintenance time.

  Moreover, the number of parts can be reduced by unitizing the lighting unit.

It is a schematic sectional drawing which shows the internal structure of the principal part of the lighting fixture for clean rooms which concerns on embodiment of this invention. It is a schematic bottom face part of the plate-shaped member of the lighting fixture for clean rooms which concerns on embodiment of this invention. It is drawing of the corner angle of the lighting fixture for clean rooms which concerns on embodiment of this invention, Comprising: The figure (A) is a schematic plan view, The figure (B) is a schematic front view, The figure (C) is the figure. It is a schematic bottom. BRIEF DESCRIPTION OF THE DRAWINGS It is drawing of the frame main body of the lighting fixture for clean rooms which concerns on embodiment of this invention, Comprising: The figure (A) is a schematic plan view, The figure (B) is a schematic front view, The figure (C) is It is a rough expanded sectional view of the (alpha) part of the same figure (B). BRIEF DESCRIPTION OF THE DRAWINGS It is drawing of the pressing member of the lighting fixture for clean rooms which concerns on embodiment of this invention, Comprising: The figure (A) is a schematic front view of the type with which the spring attachment member was provided, The figure (B) is a spring attachment member. FIG. 4C is a schematic side view of a type without a spring mounting member, and FIG. 4D is a schematic side view of a type without a spring mounting member.

  FIG. 1 is a schematic cross-sectional view showing an internal structure of a main part of a clean room lighting apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic view of a plate-like member of the clean room lighting apparatus according to the embodiment of the present invention. FIG. 3 is a diagram of a corner angle of the clean room lighting apparatus according to the embodiment of the present invention, wherein FIG. 3 (A) is a schematic plan view, and FIG. 3 (B) is a schematic front view. FIG. 4C is a schematic bottom view, and FIG. 4 is a drawing of a frame body of the clean room lighting apparatus according to the embodiment of the present invention. FIG. ) Is a schematic front view, FIG. 5 (C) is a schematic enlarged cross-sectional view of a part α of FIG. 5 (B), and FIG. 5 is a drawing of a pressing member of the clean room lighting device according to the embodiment of the invention. (A) is a schematic front view of a type provided with a spring mounting member, and (B) is a spring removing type. A schematic side of the type member is provided view, and FIG. (C) are schematic front type no spring attachment member view, and FIG. (D) is a schematic side view of a type no spring attachment member.

  As shown in FIG. 1, a clean room lighting apparatus according to an embodiment of the present invention includes an embedded housing 100 embedded in an airtight state in a ceiling TU of a clean room CR in which a semiconductor integrated circuit element or the like is manufactured. The illumination unit 200 is detachably attached to the embedded housing 100 and exposed to the ceiling surface TM of the clean room CR.

  The embedded casing 100 is formed by bending, welding, or the like of a metal plate, and is formed in a rectangular parallelepiped shape with an open bottom portion. A drive circuit for driving a light emitting diode (not shown) as a light source, a power supply unit 300 such as a transformer, and the like are attached to the inner upper surface 130.

A flange portion 110 facing outward is formed at the peripheral portion of the embedded housing 100. This flange portion 110 is bent upward at the end. A packing material 120 is attached to the flange portion 110. This packing material 120 is for maintaining the airtight state inside the clean room CR in a state where the embedded casing 100 is fitted in the mounting opening TK opened on the ceiling surface TM of the clean room CR.
In addition, a total of four attachment locking members 150 for detachably attaching the illumination unit 200 described later are attached to two opposing inner side surfaces 140 of the embedded housing 100 in a state of facing each other.

  The embedded casing 100 configured in this manner is fitted into the mounting opening TK formed in the ceiling surface TM, and is fixed to the ceiling surface TM with the flange portion 110 slightly protruding from the ceiling surface TM. The packing material 120 is in close contact with the peripheral edge of the mounting opening TK on the ceiling surface TM, and further maintains the airtight state inside the clean room CR by combining the packing material 221D.

  On the other hand, the illumination unit 200 detachably attached to the embedded housing 100 includes a flat plate-like member 210 provided with a plurality of light emitting diodes, and a unit frame 220 to which the plate-like member 210 is attached. The unit frame 220 has a square-shaped translucent plate 230 having translucency facing the plate-like member 210.

  The plate-like member 210 includes a substrate 211 on which a plurality of light emitting diodes are mounted, and a flat reflector 212 on which a plurality of substrates 211 (12 in FIG. 2) are attached. The surface of the plate 212 is subjected to surface treatment for reflecting light from the light emitting diode. The number and arrangement pattern of the substrates 211 are changed according to the size of the reflecting plate 212 and the required illuminance.

  The substrate 211 is formed by mounting a plurality of light emitting diodes in a chip state and electrically connecting each light emitting diode in advance. As shown in FIG. 1, the light emitting diode mounted on the substrate 211 is connected to the power supply line 260 of the power supply unit 300 by a connector 270.

  The reflection plate 212 is, for example, a surface treatment that reflects light by applying a white paint on an aluminum plate, and is formed in a substantially square shape so as to correspond to the embedded housing 100. Yes. At the four corners of the reflection plate 212, short grooves 212A directed toward the center are formed. In addition, a total of four cutouts 212B for passing a spring mounting member 224 (to be described later) for detachably mounting the lighting unit 200 to the embedded housing 100 are formed on two opposite sides in a state of facing each other. ing.

  The unit frame 220 is attached to a frame-shaped frame body 221, a corner of the reflection plate 212 of the plate-like member 210, a corner angle 222 connected to the reflection plate 212, and the frame Two types of pressing members 223A and 223B attached to the inner side of the outer frame portion 221A of the main body 221 are provided, and the light transmitting plate 230 is formed by the inner flange portion 221B of the frame main body 221 and the pressing members 223A and 223B. The edge portion is sandwiched and fixed.

  The frame body 221 is formed by bending a metal plate, welding, or the like, and is formed by bending the outer frame portion 221A and the end of the outer frame portion 221A inward. It has a flange portion 221B and an outer flange portion 221C formed by bending outward from the inner flange portion 221B. A packing material 221D that is in close contact with the flange portion 110 facing outward is attached to the peripheral portion of the embedded casing 100 on the upper surface portion of the outer flange portion 221C.

  The inside of the outer frame portion 221A is opened as an opening that is slightly larger than the reflector 212. Therefore, the reflecting plate 212, that is, the plate-like member 210 is attached to the frame body 221 of the unit frame 220 through the corner angle 222.

  The corner angle 222 is attached to the four corners of the reflection plate 212 of the plate-like member 210 and connects the plate-like member 210 and the frame body 221. As shown in FIG. 3, the corner angle 222 has a connecting portion 222A bent in the vertical direction from two orthogonal sides of a substantially right triangle, and a circular spacer 222B is attached to the inner side. .

  The connecting portion 222A is connected to the outer frame portion 221A with a screw 400. The spacer 222B has two disk portions opposed to each other via a shaft portion, and the gap between the two disk portions is set to be slightly larger than the thickness dimension of the reflecting plate 212. Further, the shaft portion is set to be slightly narrower than the grooves 212A at the four corners of the reflection plate 212.

  The pressing members 223A and 223B sandwich the four edge portions of the translucent plate 230 with the inner flange portion 221B, and are configured as a long object having a substantially L shape in side view as a whole. As shown in FIGS. 5A and 5B, the pressing member 223 </ b> A is a type provided with a spring mounting member 224 for mounting the mounting spring member 250. Further, the holding member 223B is of a type that does not have the spring mounting member 224.

  Two pressing members 223A and 223B are used. That is, the pressing member 223A provided with the spring mounting member 224 corresponds to the side where the notch 212B of the reflecting plate 212 is provided, and the pressing member 223B without the spring mounting member 224 is the notch of the reflecting plate 212. This corresponds to the side where the part 212B is not provided.

  The translucent plate 230 is, for example, tempered glass or polycarbonate, and a packing material 231 is attached to four edges.

  As described above, in the illumination unit 200, the reflecting plate 212 and the light transmitting plate 230 are integrally provided.

The lighting unit 200 having the plate-like member 210, the unit frame 220, and the light transmitting plate 230 described above is assembled in the following procedure.
First, corner angles 222 are attached to the four corners of the plate-like member 210, that is, the reflector 212 to which the substrate 211 is attached, using grooves 212A. Packing material 231 is attached in advance to the four edges of the light transmitting plate 230.

  The translucent plate 230 is placed on the inner flange portion 221B of the frame body 221 and the four edges of the translucent plate 230 are pressed by the pressing plates 223A and 223B. At this time, the pressing plate 223A provided with the spring mounting member 224 corresponds to the notch 212B of the plate-like member 210, and the pressing plate 223B without the spring mounting member 224 corresponds to the portion without the notch 212B.

  In addition, a substantially reverse C-shaped attachment spring member 250 whose center is the loop portion 251 is attached to the spring attachment member 224.

  Next, the plate member 210 is assembled to the frame body 221 together with the corner angle 222 so that the connecting portion 222A of the corner angle 222 is positioned outside the outer frame portion 221A of the frame body 221. Then, the connecting portion 222A, the frame main body 221 and the pressing plate 223A are connected by the screw 400. Note that the holding plate 223B is also connected to the outer frame portion 221A of the frame body 221 with screws (not shown).

  Thereby, the lighting unit 200 is completed at the same time as the unit frame 220 is completed.

  On the other hand, the embedded housing 100 is embedded in a mounting opening TK opened on the ceiling surface TM of the clean room CR by a bolt or the like (not shown). The clean room CR and the ceiling back TU are blocked by the packing materials 120 and 221D, and the airtight state inside the clean room CR is maintained.

  The lighting unit 200 is attached to the embedded casing 100 by fitting the mounting spring member 250 into the mounting locking member 150 from below in the embedded casing 100. The outer flange portion 221 </ b> C of the frame body 221 covers and hides the flange portion 110 of the embedded housing 100.

The replacement of the lighting unit 200 can be performed by only two steps of the removal operation and the mounting operation of the lighting unit 200.
That is, while removing the illumination unit 200 from the embedded housing 100 and removing the connector 270 of the power supply line 260 (that is, removing the illumination unit 200 from the power supply unit 300), the connector 270 of the new illumination unit 200 is removed. (That is, the lighting unit 200 is attached to the power supply unit 300) and the attachment spring member 250 can be replaced by only two stages of attachment work of fitting into the attachment locking member 150.

  Using this clean room lighting fixture, there are three stages of replacement work as in the past, that is, removal work for each front frame of the front glass, replacement work for the fluorescent lamp as the light source, and installation work for each front frame of the front glass. The number of work steps is less than that of the work, and therefore, the maintenance work for replacing the light source is easier, and as a result, the maintenance time for the entire clean room can be shortened.

DESCRIPTION OF SYMBOLS 100 Embedded housing | casing 200 Illumination unit 210 Plate-shaped member 220 Unit frame 230 Translucent plate 230
CR Cleanroom TM (clean room) ceiling TU (clean room) ceiling TK (clean room) mounting opening

Claims (4)

  An embedded housing that is embedded in an airtight state in a ceiling of a clean room in which a semiconductor integrated circuit element or the like is manufactured, and an illumination unit that is detachably attached to the embedded housing and exposed on the ceiling surface of the clean room. A lighting device for a clean room.   The lighting unit includes a flat plate-like member provided with a plurality of light-emitting diodes, a unit frame to which the plate-like member is attached, and a translucency attached to the unit frame and facing the substrate. The lighting device for a clean room according to claim 1, further comprising:   The plate-like member has a substrate on which a plurality of light-emitting diodes are mounted and a flat reflection plate to which the substrate is attached, and the surface of the reflection plate is a surface that reflects light from the light-emitting diodes The clean room lighting device according to claim 2, wherein the lighting device is treated.   The unit frame is attached to a frame body of a frame shape, a corner of a reflection plate of a plate-like member, a corner angle connected to the reflection plate, and an inner side of an outer frame of the frame body 4. A clean room according to claim 2, further comprising: a pressing member attached to the frame body, wherein the inner flange portion of the frame body and the pressing member sandwich and fix an edge of the translucent plate. Lighting equipment.

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