JP2011023564A - Charged particle beam drawing apparatus, and charged particle beam drawing data generation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten an unnecessary wait time and a total processing time of a data processing section while alleviating an increase in total memory capacity needed for data processing in the data processing section. <P>SOLUTION: A charged particle beam drawing apparatus 10 which draws a pattern on a sample M with a charged particle beam 10a1b: divides cells of size larger than a first threshold included in drawing data D1 into a plurality of cells of size equal to or smaller than the first threshold; redefines cells having data amounts larger than a second threshold among the cells of size equal to or smaller than the first threshold as the cells including a plurality of figures of an array type and the cells including a plurality of figures of a non-array type; divides cells of size larger than a third threshold into a plurality of cells of size equal to or smaller than the third threshold among cells including a plurality of figures of the non-array type; and allocates a plurality of cells after those processings to a plurality of data processing sections 10b1e1, ..., to perform data processing on the plurality of cells in parallel. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a charged particle beam drawing apparatus in which a pattern corresponding to a figure included in drawing data is drawn on a drawing region on a sample by a charged particle beam.

  Furthermore, the present invention relates to a charged particle beam drawing data creation apparatus that creates drawing data for a charged particle beam drawing apparatus by performing data conversion processing on layout data.

  Conventionally, a plurality of cells are included in drawing data that is hierarchized into at least a figure hierarchy and a cell hierarchy, and a pattern corresponding to one or more figures included in each cell is sampled by a charged particle beam. A charged particle beam drawing apparatus for drawing in the upper drawing area is known. Examples of this type of charged particle beam drawing apparatus include those described in FIGS. 1 and 2 of Patent Document 1 (Japanese Patent Laid-Open No. 2008-218857).

  In the charged particle beam drawing apparatus described in FIG. 1 of Patent Document 1, layered drawing data input to the charged particle beam drawing apparatus is distributed to a plurality of data processing units (arithmetic units), and a plurality of data Data is processed in parallel by the processing unit (arithmetic unit).

  Specifically, in the charged particle beam drawing apparatus described in FIG. 1 of Patent Document 1, the drawing area on the sample is virtually divided into a plurality of block groups. Furthermore, among the drawing data, cells included in one block group are distributed to one data processing unit (arithmetic unit) and subjected to data processing. In addition, among the drawing data, cells included in other block groups are distributed to other data processing units (arithmetic units), and data processing is performed in parallel with data processing by one data processing unit (arithmetic unit). Is done.

  In addition, conventionally, at least a figure hierarchy and a cell hierarchy are hierarchized, a plurality of cells are included, and layout data including one or more figures in each cell is subjected to data conversion processing. A charged particle beam drawing data creation device for creating drawing data for a charged particle beam drawing device is known. Examples of this type of charged particle beam drawing data creation apparatus are described in FIG. 3 of Patent Document 2 (Japanese Patent Laid-Open No. 2009-10077), FIG. 2 of Patent Document 3 (Japanese Patent Laid-Open No. 2008-47722), and the like. There is something that was done.

  In the charged particle beam drawing data creation device described in FIG. 3 of Patent Document 2, the hierarchical layout data input to the charged particle beam drawing data creation device is sent to a plurality of data conversion processing units (data processing units). The data is distributed and subjected to data conversion processing in parallel by a plurality of data conversion processing units (data processing units).

JP 2008-218857 A JP 2009-10077 A JP 2008-47722 A

  By the way, in the charged particle beam drawing apparatus described in FIG. 1 of Patent Document 1, as described above, cells included in one block group are included in one block group among drawing data as one data processing unit (arithmetic unit). In the drawing data, cells included in other block groups are distributed to other data processing units (arithmetic units), and data processing by one data processing unit (arithmetic unit) is performed. Although the data processing is performed in parallel with each other, the size or data of the cells included in the drawing data is in a stage before the plurality of cells included in the drawing data are distributed to the plurality of data processing units (arithmetic units). Processing to change the amount is not executed.

  Moreover, in the charged particle beam drawing data creation apparatus described in FIG. 3 of Patent Document 2, as described above, the hierarchical layout data input to the charged particle beam drawing data creation apparatus is subjected to a plurality of data conversion processes. Although the data conversion processing is performed by the plurality of data conversion processing units (data processing units), the plurality of cells included in the layout data are converted into the plurality of data conversion processing units (data processing units). In the stage before being distributed to the data processing unit), the process of changing the size or the data amount of the cells included in the layout data is not executed.

  The present invention performs a process of appropriately changing the size or data amount of cells included in drawing data before the plurality of cells included in the drawing data are distributed to a plurality of data processing units. The charged particle beam that can reduce the wasteful waiting time (idle time) and the total processing time in the plurality of data processing units while reducing the increase in the total memory capacity required for the data processing in the plurality of data processing units An object is to provide a drawing apparatus.

  Furthermore, the present invention provides a process for appropriately changing the size or data amount of cells included in the layout data before the plurality of cells included in the layout data are distributed to the plurality of data conversion processing units. By executing this, the wasteful waiting time (idle time) and the total processing time in the plurality of data conversion processing units are reduced while reducing the increase in the total memory capacity required for the data conversion processing in the plurality of data conversion processing units. An object of the present invention is to provide a charged particle beam drawing data creation apparatus capable of performing the above.

According to one embodiment of the present invention, at least a graphic hierarchy and a cell hierarchy are hierarchized, a plurality of cells are included, and drawing data including one or more graphics is input to each cell. An input unit,
A first division processing unit that divides a cell having a size larger than the first threshold value into a plurality of cells having a size equal to or smaller than the first threshold value among the plurality of cells included in the drawing data input to the input unit. When,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold are classified into cells including a plurality of array-type figures and non-array-type figures. A first cell redefinition unit that redefines as a plurality of different cells by dividing into cells including
Dividing a cell having a size larger than the third threshold among a plurality of cells including a plurality of non-arrayed figures redefined by the first cell redefinition unit into a plurality of cells having a size equal to or smaller than the third threshold. A second division processing unit for processing;
A distribution unit that distributes a plurality of cells after processing by the first division processing unit, the first cell redefinition unit, and the second division processing unit to a plurality of data processing units;
A data processing module having a plurality of data processing units for processing data in parallel for a plurality of cells distributed by the distribution unit;
There is provided a charged particle beam drawing apparatus comprising: a drawing unit that draws a pattern corresponding to a figure included in drawing data in a drawing region on a sample by a charged particle beam.

Preferably, among cells including a plurality of array-type figures redefined by the first cell redefinition unit, a cell having a size larger than the third threshold is divided into a plurality of cells having a size equal to or smaller than the third threshold. When processing, when the total data amount of the plurality of cells after the division processing is larger than the fourth threshold times the data amount of the cells before the division processing,
Of cells including a plurality of array-type figures redefined by the first cell redefinition unit, a cell having a size larger than the third threshold is not divided into a plurality of cells having a size equal to or smaller than the third threshold. ,
Among cells including a plurality of array-type figures redefined by the first cell redefinition unit, when dividing a cell having a size larger than the third threshold into a plurality of cells having a size equal to or smaller than the third threshold, When the total data amount of the plurality of cells after the division processing is equal to or less than the fourth threshold value times the data amount of the cells before the division processing,
A cell having a size larger than the third threshold value among cells including a plurality of array-type figures redefined by the first cell redefinition unit is divided into a plurality of cells having a size equal to or smaller than the third threshold value. A three-division processing unit is provided.

  Alternatively, preferably, instead of providing the third division processing unit, a cell having a data amount equal to or greater than the fifth threshold among cells including a plurality of array-type figures redefined by the first cell redefinition unit. Per cell by dividing into at least a cell containing a first type graphic having a data amount less than the fifth threshold and a cell containing a second type graphic having a data amount less than the fifth threshold. A second cell redefinition unit is provided for redefining as a plurality of different cells having a data amount less than the fifth threshold.

According to another aspect of the present invention, drawing data is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and each cell includes one or more graphics. An input part to be input;
A first division processing unit that divides a cell having a size larger than the first threshold value into a plurality of cells having a size equal to or smaller than the first threshold value among the plurality of cells included in the drawing data input to the input unit. When,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. When the division processing into a plurality of cells having the size of, the total data amount of the plurality of cells after the division processing is larger than the fourth threshold value times the data amount of the cells before the division processing,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. Is not divided into a plurality of cells having the size of
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. When the division processing into a plurality of cells having the size of, the total data amount of the plurality of cells after the division processing is equal to or less than the fourth threshold value times the data amount of the cells before the division processing.
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. A second division processing unit that performs division processing into a plurality of cells having a size of
A distribution unit that distributes a plurality of cells after the division processing by the first division processing unit and the second division processing unit to a plurality of data processing units;
A data processing module having a plurality of data processing units for processing data in parallel for a plurality of cells distributed by the distribution unit;
There is provided a charged particle beam drawing apparatus comprising: a drawing unit that draws a pattern corresponding to a figure included in drawing data in a drawing region on a sample by a charged particle beam.

According to still another aspect of the present invention, layout data is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and each cell includes one or more graphics. An input section where
A first division processing unit that divides a cell having a size larger than the first threshold among a plurality of cells included in the layout data input to the input unit into a plurality of cells having a size equal to or smaller than the first threshold. When,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold are divided into cells including a plurality of array-type figures, and a plurality of non-array-type A first cell redefinition unit for redefining as a plurality of different cells by dividing into a cell including the figure of
Of cells including a plurality of non-arrayed figures redefined by the first cell redefinition unit, a cell having a size larger than the third threshold is divided into a plurality of cells having a size equal to or smaller than the third threshold. A second division processing unit;
A distribution unit that distributes a plurality of cells after processing by the first division processing unit, the first cell redefinition unit, and the second division processing unit to a plurality of data conversion processing units;
A data conversion processing module having a plurality of data conversion processing units for performing data conversion processing in parallel on a plurality of cells distributed by the distribution unit;
A charged particle beam drawing data creation device comprising: an output unit that outputs drawing data for a charged particle beam drawing device created by data conversion processing by a plurality of data conversion processing units of a data conversion processing module Is provided.

Preferably, among cells including a plurality of array-type figures redefined by the first cell redefinition unit, a cell having a size larger than the third threshold is divided into a plurality of cells having a size equal to or smaller than the third threshold. When processing, when the total data amount of the plurality of cells after the division processing is larger than the fourth threshold times the data amount of the cells before the division processing,
Of cells including a plurality of array-type figures redefined by the first cell redefinition unit, a cell having a size larger than the third threshold is not divided into a plurality of cells having a size equal to or smaller than the third threshold. ,
Among cells including a plurality of array-type figures redefined by the first cell redefinition unit, when dividing a cell having a size larger than the third threshold into a plurality of cells having a size equal to or smaller than the third threshold, When the total data amount of the plurality of cells after the division processing is equal to or less than the fourth threshold value times the data amount of the cells before the division processing,
A cell having a size larger than the third threshold value among cells including a plurality of array-type figures redefined by the first cell redefinition unit is divided into a plurality of cells having a size equal to or smaller than the third threshold value. A three-division processing unit is provided.

  Alternatively, preferably, instead of providing the third division processing unit, a cell having a data amount equal to or greater than the fifth threshold among cells including a plurality of array-type figures redefined by the first cell redefinition unit. Per cell by dividing into at least a cell containing a first type graphic having a data amount less than the fifth threshold and a cell containing a second type graphic having a data amount less than the fifth threshold. A second cell redefinition unit is provided for redefining as a plurality of different cells having a data amount less than the fifth threshold.

According to still another aspect of the present invention, layout data is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and each cell includes one or more graphics. An input section where
A first division processing unit that divides a cell having a size larger than the first threshold among a plurality of cells included in the layout data input to the input unit into a plurality of cells having a size equal to or smaller than the first threshold. When,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. When the division processing into a plurality of cells having the size of, the total data amount of the plurality of cells after the division processing is larger than the fourth threshold value times the data amount of the cells before the division processing,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. Is not divided into a plurality of cells having the size of
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. When the division processing into a plurality of cells having the size of, the total data amount of the plurality of cells after the division processing is equal to or less than the fourth threshold value times the data amount of the cells before the division processing.
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold and having a size larger than the third threshold are equal to or smaller than the third threshold. A second division processing unit that performs division processing into a plurality of cells having a size of
A distribution unit that distributes a plurality of cells after the division processing by the first division processing unit and the second division processing unit to a plurality of data conversion processing units;
A data conversion processing module having a plurality of data conversion processing units for performing data conversion processing in parallel on a plurality of cells distributed by the distribution unit;
A charged particle beam drawing data creation device comprising: an output unit that outputs drawing data for a charged particle beam drawing device created by data conversion processing by a plurality of data conversion processing units of a data conversion processing module Is provided.

  According to the present invention, it is possible to reduce wasteful waiting time (idle time) and total processing time in a plurality of data processing units while reducing an increase in total memory capacity required for data processing in the plurality of data processing units. it can.

  Furthermore, according to the present invention, the useless waiting time (idle time) and the total processing time in the plurality of data conversion processing units are reduced while the increase in the total memory capacity required for the data conversion processing in the plurality of data conversion processing units is alleviated. Can be reduced.

1 is a schematic configuration diagram of a charged particle beam drawing apparatus 10 according to a first embodiment. It is a detailed view of the control computer 10b1. It is a figure for demonstrating an example of the pattern P which can be drawn on the sample M by one shot of the charged particle beam 10a1b in the charged particle beam drawing apparatus 10 of 1st Embodiment. It is the figure which showed schematically an example of drawing data D1. It is a figure for demonstrating the drawing order by which the pattern corresponding to figure FG1, FG2, ... contained in drawing data D1 is drawn by charged particle beam 10a1b. FIG. 6 is a diagram for explaining in detail an example of a drawing order in which patterns P1, P2,... Corresponding to figures FG1, FG2,... Included in drawing data D1 are drawn by the charged particle beam 10a1b. It is the figure which showed an example of the drawing order by which the pattern P1 corresponding to the figure FG1 contained in the drawing data D1 is drawn by charged particle beam 10a1b. Is a diagram showing an example of the relationship between the stripe frames STR1, STR2, ... on the sample M, the small regions DPB1, DPB2, ..., and the cells CL1, CL2, CL3, CL4, CL5, CL6, ... . It is the figure which showed an example by which the cell CL1 is processed by the division | segmentation process part 10b1d1, 10b1d3, 10b1d4, and the cell redefinition part 10b1d2. It is the figure which showed an example of cell CL1a2 containing several array type figures FGA and FGB. It is the figure which showed an example of cell CL1a1 containing several non-array type figures FGC, FGD, FGE, FGF, FGG, FGH, FGI, FGJ. It is a figure showing an example of four non-array type cells CL1a1a, CL1a1b, CL1a1c, and CL1a1d generated by dividing the non-array type cell CL1a1. FIG. 5 is a diagram illustrating an example of four array-type cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d that are generated when the array-type cell CL1a2 is divided. FIG. 5 is a diagram illustrating an example of four array-type cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d that are generated when the array-type cell CL1a2 is divided. It is the figure which showed an example of the relationship between the data amount of cell CL1, and the total data amount of cell CL1a1a, CL1a1b, CL1a1c, CL1a1d, CL1a2, CL1b, CL1c, CL1d. It is the figure which showed an example by which the cell CL2 is processed by the division | segmentation process part 10b1d1, 10b1d3, 10b1d4, and the cell redefinition part 10b1d2. It is the figure which showed an example of the relationship between the data amount of cell CL2, and the total data amount of cell CL2a1a, CL2a1b, CL2a1c, CL2a1d, CL2a2, CL2b, CL2c, CL2d. It is the figure which showed an example by which the cell CL3 is processed by the division | segmentation process part 10b1d1, 10b1d3, 10b1d4, and the cell redefinition part 10b1d2. It is the figure which showed an example by which the cell CL3 is processed by the division | segmentation process part 10b1d1, 10b1d3, 10b1d4, and the cell redefinition part 10b1d2. It is the figure which showed an example of the relationship between the data amount of cell CL3, and the total data amount of cell CL3a1a, CL3a1b, ..., CL3g, CL3h. The data of the cells CL1a1a,..., CL1d, CL2a1a,..., CL2d, CL3a1a,..., CL3h are distributed by the distribution unit 10b1d5, and the data processing units 10b1e1, 10b1e2, and 10b1e3 It is the figure which showed the example etc. which are performed. It is a figure for demonstrating the data processing module 10b1j etc. of the charged particle beam drawing apparatus 10 of 4th Embodiment. It is a figure for demonstrating the data processing module 10b1k etc. of the charged particle beam drawing apparatus 10 of 5th Embodiment. It is a figure for demonstrating the data processing module 10b11 etc. of the charged particle beam drawing apparatus 10 of 6th Embodiment. It is detail drawing of the control computer 10b1 of the charged particle beam drawing apparatus 10 of 7th Embodiment. It is a figure showing an example by which cell CL1 is processed by division processing parts 10b1d1 and 10b1d3 and cell redefinition parts 10b1d2 and 10b1d6 of charged particle beam drawing apparatus 10 of a 7th embodiment. It is a figure showing an example of array type cell CL1a2a generated by redefining array type cell CL1a2 in cell redefinition part 10b1d6. It is a figure showing an example of array type cell CL1a2b generated by redefining array type cell CL1a2 in cell redefinition part 10b1d6. It is the figure which showed an example of the relationship between the data amount of cell CL1, and the total data amount of cell CL1a1a, CL1a1b, ..., CL1c, CL1d. The data of the cells CL1, CL2, CL3 are processed by the division processing units 10b1d1, 10b1d3 and the cell redefinition units 10b1d2, 10b1d6 of the charged particle beam drawing apparatus 10 of the seventh embodiment, and are distributed by the distribution unit 10b1d5. It is the figure which showed an example etc. in which data processing is carried out in parallel by 10b1e data processing part 10b1e1, 10b1e2, 10b1e3. It is detail drawing of the control computer 10b1 of the charged particle beam drawing apparatus 10 of 8th Embodiment. It is the figure which showed an example by which cell CL1 is processed by the division | segmentation process parts 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of 8th Embodiment. It is the figure which showed an example of the relationship between the data amount of cell CL1, and the total data amount of cell CL1a, CL1b, CL1c, CL1d. It is the figure which showed an example by which cell CL2 is processed by the division | segmentation process parts 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of 8th Embodiment. It is the figure which showed an example of the relationship between the data amount of cell CL2, and the total data amount of cell CL2a1, CL2a2, CL2a3, CL2a4, CL2b, CL2c, and CL2d. It is the figure which showed an example by which cell CL3 is processed by the division | segmentation process parts 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of 8th Embodiment. It is the figure which showed an example of the relationship between the data amount of cell CL3, and the total data amount of CL3a, CL3b, CL3c1, CL3c2, CL3c3, CL3c4, CL3d, CL3e, CL3f, CL3g, CL3h. Data in the cells CL1, CL2, CL3 are processed by the split processing units 10b1d1, 10b1d7 of the charged particle beam drawing apparatus 10 of the eighth embodiment, distributed by the distribution unit 10b1d5, and the data processing units 10b1e1, 10b1e2 of the data processing module 10b1e. , 10b1e3 is a diagram showing an example of data processing in parallel. 1 is a schematic configuration diagram of a charged particle beam drawing data creation device 20 of a first embodiment. It is a schematic block diagram of the charged particle beam drawing data preparation apparatus 20 of 2nd Embodiment. It is a schematic block diagram of the charged particle beam drawing data preparation apparatus 20 of 3rd Embodiment.

  A charged particle beam drawing apparatus according to a first embodiment of the present invention will be described below. FIG. 1 is a schematic configuration diagram of a charged particle beam drawing apparatus 10 according to the first embodiment. FIG. 2 is a detailed view of the control computer 10b1 shown in FIG. In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIG. 1, for example, a charged particle beam 10a1b is irradiated on a sample M such as a mask (blank), a wafer, etc. A drawing unit 10a for drawing a target pattern is provided.

  In the charged particle beam drawing apparatus 10 of the first embodiment, for example, an electron beam is used as the charged particle beam 10a1b. However, in the charged particle beam drawing apparatus 10 of the second embodiment, instead of the charged particle beam 10a1b, for example, It is also possible to use a charged particle beam other than an electron beam such as an ion beam.

  In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIG. 1, for example, a charged particle gun 10a1a and deflectors 10a1c, 10a1d, which deflect the charged particle beam 10a1b irradiated from the charged particle gun 10a1a, 10a1e and 10a1f and a movable stage 10a2a on which a sample M to be drawn by the charged particle beam 10a1b deflected by the deflectors 10a1c, 10a1d, 10a1e, and 10a1f is placed are provided in the drawing unit 10a.

  Specifically, in the charged particle beam drawing apparatus 10 according to the first embodiment, as shown in FIG. 1, for example, a movable stage in which a sample M is placed in a drawing chamber 10a2 constituting a part of the drawing unit 10a. 10a2a is arranged. For example, the movable stage 10a2a is configured to be movable in the X direction (left-right direction in FIG. 1) and the Y direction (front side-back side direction in FIG. 1).

  Furthermore, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIG. 1, for example, an optical barrel 10a1 constituting a part of the drawing unit 10a is provided with a charged particle gun 10a1a, a deflector 10a1c, 10a1d, 10a1e, 10a1f, lenses 10a1g, 10a1h, 10a1i, 10a1j, 10a1k, a first shaping aperture 10a1l, and a second shaping aperture 10a1m are arranged.

  Specifically, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, drawing data D1 corresponding to the entire drawing area DA (see FIG. 5) on the sample M. Is input to the control computer 10b1, is read by the reading module 10b1a and stored in the input buffer 10b1b. Next, for example, the drawing data D1 stored in the input buffer 10b1b is read from the input buffer 10b1b by the localizer (input data division module, distributor) 10b1d.

  Next, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, in the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 of the localizer 10b1d, the drawing data D1 (See FIG. 8), a process described in detail later is executed on the plurality of cells CL1, CL2, CL3, CL4, CL5, CL6,. Next, a plurality of cells CL1, CL2, CL3, CL4, CL5, CL6,... After the processing is executed are divided into small regions DPB1, DPB2,... (See FIG. 8) by the distribution unit 10b1d5 of the localizer 10b1d. The data is grouped and transferred to a plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6 of the data processing module 10b1e.

  Specifically, in the example shown in FIG. 2, for example, data relating to the cells CL1, CL2, CL3 (see FIG. 8) included in the small area DPB1 (see FIG. 8) is transferred to the data processing unit 10b1e1, by the distribution unit 10b1d5. 10b1e2 and 10b1e3 are sorted and transferred. In addition, data related to the cells CL4, CL5, and CL6 (see FIG. 8) included in the small area DPB2 (see FIG. 8) is sorted and transferred to the data processing units 10b1e4, 10b1e5, and 10b1e6 by the sorting unit 10b1d5.

  Next, in the charged particle beam drawing apparatus 10 according to the first embodiment, as illustrated in FIGS. 1 and 2, for example, data regarding the cells CL1, CL2, and CL3 (see FIG. 8) transferred to the data processing unit 10b1e1 is stored. The data processing unit 10b1e1 converts the drawing apparatus into internal format data D2. Further, the data related to the cells CL1, CL2, CL3 transferred to the data processing unit 10b1e2 is converted into the drawing apparatus internal format data D2 by the data processing unit 10b1e2 in parallel with the data processing by the data processing unit 10b1e1. Further, the data related to the cells CL1, CL2, CL3 transferred to the data processing unit 10b1e3 is converted into the drawing apparatus internal format data D2 by the data processing unit 10b1e3 in parallel with the data processing by the data processing units 10b1e1, 10b1e2. .

  Furthermore, in the charged particle beam drawing apparatus 10 according to the first embodiment, as shown in FIGS. 1 and 2, for example, data relating to the cells CL4, CL5, and CL6 (see FIG. 8) transferred to the data processing unit 10b1e4 is stored. In parallel with the data processing by the data processing units 10b1e1, 10b1e2, and 10b1e3, the data processing unit 10b1e4 converts the data into drawing apparatus internal format data D2. Further, the data related to the cells CL4, CL5, and CL6 transferred to the data processing unit 10b1e5 is converted into the drawing apparatus internal format data D2 by the data processing unit 10b1e5 in parallel with the data processing by the data processing units 10b1e1, 10b1e2, 10b1e3, and 10b1e4. Converted. Further, the data related to the cells CL4, CL5, and CL6 transferred to the data processing unit 10b1e6 is parallel to the data processing by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, and 10b1e5. Conversion processing to D2 is performed.

  Next, in the charged particle beam drawing apparatus 10 according to the first embodiment, as illustrated in FIGS. 1 and 2, for example, the data is generated by parallel data processing by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6. The drawing apparatus internal format data D2 is stored in the output buffer 10b1f. Next, for example, the rendering apparatus internal format data D2 stored in the output buffer 10b1f is transferred to the shot data generation unit 10b1g.

  Next, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, the drawing apparatus internal format data D2 transferred to the shot data generation unit 10b1g is converted into the shot data generation unit 10b1g. The shot data for irradiating the charged particle beam 10a1b for drawing the pattern on the sample M is generated.

  Specifically, in the charged particle beam drawing apparatus 10 according to the first embodiment, as illustrated in FIG. 2, for example, a distributed processing management module 10 b 1 c performs a localizer 10 b 1 d, a data processing module (converter module) 10 b 1 e, and a shot data generation unit. 10b1g and the like are managed.

  Next, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, shot data generated by the shot data generation unit 10b1g is sent to the deflection control unit 10b1h. Next, for example, the deflectors 10a1c, 10a1d, 10a1e, and 10a1f are controlled by the deflection controller 10b1h based on the shot data, and as a result, the charged particle beam 10a1b from the charged particle gun 10a1a is irradiated to a desired position on the sample M. Is done.

  Specifically, in the charged particle beam drawing apparatus 10 according to the first embodiment, as shown in FIGS. 1 and 2, for example, based on shot data generated by the shot data generation unit 10b1g, deflection is performed by the deflection control unit 10b1h. By controlling the blanking deflector 10a1c via the control circuit 10b2, the charged particle beam 10a1b irradiated from the charged particle gun 10a1a can, for example, enter the opening 10a1l ′ (see FIG. 3A) of the first shaping aperture 10a1l. The sample M is switched between being permeated and irradiated on the sample M, or not blocked by a part other than the opening 10a1l ′ of the first shaping aperture 10a1l, for example. That is, in the charged particle beam drawing apparatus 10 of the first embodiment, for example, the irradiation time of the charged particle beam 10a1b can be controlled by controlling the blanking deflector 10a1c.

  Further, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, based on the shot data generated by the shot data generation unit 10b1g, the deflection control circuit 10b1h performs a deflection control circuit. By controlling the beam size variable deflector 10a1d via 10b3, the charged particle beam 10a1b transmitted through the opening 10a1l ′ (see FIG. 3A) of the first shaping aperture 10a1l is changed into the beam size variable deflector 10a1d. Is deflected by. Next, a part of the charged particle beam 10a1b deflected by the beam size variable deflector 10a1d is transmitted through the opening 10a1m ′ (see FIG. 3A) of the second shaping aperture 10a1m. That is, in the charged particle beam drawing apparatus 10 according to the first embodiment, for example, the charge applied to the sample M is adjusted by adjusting the amount and direction of deflection of the charged particle beam 10a1b by the beam size variable deflector 10a1d. The size and shape of the particle beam 10a1b can be adjusted.

  FIG. 3 is a diagram for explaining an example of a pattern P that can be drawn on the sample M by one shot of the charged particle beam 10a1b in the charged particle beam drawing apparatus 10 of the first embodiment. In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 3A, for example, a pattern P (see FIG. 3A) is drawn on the sample M by the charged particle beam 10a1b. At this time, a part of the charged particle beam 10a1b irradiated from the charged particle gun 10a1a (see FIG. 1) is transmitted through, for example, a square opening 10a1l ′ (see FIG. 3A) of the first shaping aperture 10a1l. . As a result, the horizontal sectional shape of the charged particle beam 10a1b transmitted through the opening 10a1l 'of the first shaping aperture 10a1l becomes, for example, a substantially square shape. Next, a part of the charged particle beam 10a1b transmitted through the opening 10a1l ′ of the first shaping aperture 10a1l is allowed to pass through the opening 10a1m ′ (see FIG. 3A) of the second shaping aperture 10a1m.

  In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 3A, for example, the light passes through the opening 10a1l ′ (see FIG. 3A) of the first shaping aperture 10a1l. A horizontal cross section of the charged particle beam 10a1b transmitted through the opening 10a1m ′ (see FIG. 3A) of the second shaping aperture 10a1m by deflecting the charged particle beam 10a1b that has been squeezed by the deflector 10a1d (see FIG. 1). The shape can be, for example, a rectangle (square or rectangle) or, for example, a triangle.

  Furthermore, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 3A, for example, the light passes through the opening 10a1m ′ (see FIG. 3A) of the second shaping aperture 10a1m. By continuing to irradiate the squeezed charged particle beam 10a1b to a predetermined position on the sample M for a predetermined irradiation time, the aperture 10a1m ′ (see FIG. 3A) of the second shaping aperture 10a1m was transmitted. A pattern P (see FIG. 3A) having substantially the same shape as the horizontal sectional shape of the charged particle beam 10a1b can be drawn on the sample M.

  That is, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 3A, the aperture 10a1l ′ (see FIG. 3A) of the first shaping aperture 10a1l is transmitted. By controlling the amount and orientation of the charged particle beam 10a1b deflected by the deflector 10a1d (see FIG. 1) by the deflection control unit 10b1h (see FIG. 2), for example, FIG. 3 (B), FIG. 3 (C) 3 (D) and FIG. 3 (E), a roughly rectangular (square or rectangular) pattern P, FIG. 3 (F), FIG. 3 (G), FIG. 3 (H) and FIG. 3 (I). Can be drawn on the sample M by one shot of the charged particle beam 10a1b.

  Furthermore, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, based on the shot data generated by the shot data generation unit 10b1g, the deflection control circuit 10b1h performs a deflection control circuit. By controlling the main deflector 10a1e via 10b4, the charged particle beam 10a1b transmitted through the opening 10a1m ′ (see FIG. 3A) of the second shaping aperture 10a1m is deflected by the main deflector 10a1e. .

  Further, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, based on the shot data generated by the shot data generation unit 10b1g, the deflection control circuit 10b1h performs a deflection control circuit. By controlling the sub deflector 10a1f via 10b5, the charged particle beam 10a1b deflected by the main deflector 10a1e is further deflected by the sub deflector 10a1f. That is, in the charged particle beam drawing apparatus 10 of the first embodiment, for example, the sample M is irradiated by adjusting the amount and direction of deflection of the charged particle beam 10a1b by the main deflector 10a1e and the sub deflector 10a1f. The irradiation position of the charged particle beam 10a1b to be performed can be adjusted.

  Furthermore, in the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1 and 2, for example, based on shot data generated by the shot data generation unit 10b1g, a stage control circuit is provided by the stage control unit 10b1i. The movement of the movable stage 10a2a is controlled via 10b6.

  In the example shown in FIGS. 1 and 2, for example, the layout data (CAD data, design data) created by a semiconductor integrated circuit designer or the like is converted into a format for the charged particle beam drawing apparatus 10. The drawing data D1 is input to the control computer 10b1 of the charged particle beam drawing apparatus 10. In general, layout data (CAD data, design data) includes a large number of minute patterns, and the amount of layout data (CAD data, design data) is considerably large. Furthermore, generally, when layout data (CAD data, design data) or the like is converted to another format, the data amount of the converted data further increases. In view of this point, in the layout data (CAD data, design data) and the drawing data D1, data hierarchization is adopted to reduce the data amount.

  FIG. 4 is a diagram schematically showing an example of the drawing data D1 shown in FIGS. In the example shown in FIG. 4, the drawing data D1 (see FIGS. 1 and 2) applied to the charged particle beam drawing apparatus 10 of the first embodiment is, for example, a chip hierarchy CP, a frame lower than the chip hierarchy CP. It is hierarchized into a hierarchy FR, a block hierarchy BL lower than the frame hierarchy FR, a cell hierarchy CL lower than the block hierarchy BL, and a graphic hierarchy FG lower than the cell hierarchy CL.

  Specifically, in the example illustrated in FIG. 4, for example, a chip CP1 that is a part of the elements of the chip hierarchy CP corresponds to three frames FR1, FR2, and FR3 that are part of the elements of the frame hierarchy FR. Yes. Further, for example, a frame FR2 which is a part of the elements of the frame hierarchy FR corresponds to 18 blocks BL00,..., BL52 which are parts of the elements of the block hierarchy BL. Further, for example, the block BL21 which is a part of the elements of the block hierarchy BL corresponds to a plurality of cells CLA, CLB, CLC, CLD,. Further, for example, a cell CLA which is a part of the elements of the cell hierarchy CL corresponds to a large number of figures FG1, FG2,.

  In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIGS. 1, 2, and 4, a large number of figures FG1, FG2,... Included in the drawing data D1 (see FIGS. 1 and 2). A pattern corresponding to (see FIG. 4) is drawn on the drawing area DA (see FIG. 5) on the sample M (see FIG. 1) by the charged particle beam 10a1b (see FIG. 1).

  FIG. 5 is a diagram for explaining a drawing order in which patterns corresponding to the figures FG1, FG2,... Included in the drawing data D1 are drawn by the charged particle beam 10a1b. In the example shown in FIG. 5, the drawing area DA on the sample M is virtually divided into, for example, six strip-shaped stripe frames STR1, STR2, STR3, STR4, STR5, STR6.

  In the example shown in FIG. 5, for example, the charged particle beam 10a1b is scanned in the stripe frame STR1 from the right side of FIG. 5 to the left side of FIG. 5, and is included in the drawing data D1 (see FIGS. 1 and 2). A pattern corresponding to the figure (not shown) is drawn in the stripe frame STR1 by the charged particle beam 10a1b. Next, for example, the charged particle beam 10a1b is scanned from the left side of FIG. 5 toward the right side of FIG. 5 in the stripe frame STR2, and a large number of figures (not shown) included in the drawing data D1 (see FIGS. 1 and 2). A pattern corresponding to (1) is drawn in the stripe frame STR2 by the charged particle beam 10a1b. Similarly, the patterns P1, P2,... (See FIG. 6) corresponding to the large number of figures FG1, FG2,... (See FIG. 4) included in the drawing data D1 (see FIGS. 1 and 2) are charged. Drawing is performed in the stripe frames STR3, STR4, STR5 and STR6 by the particle beam 10a1b.

  Specifically, in the example shown in FIG. 5, for example, when a pattern is drawn in the stripe frame STR1, the movable stage 10a2a (see FIG. 1) moves from the left side of FIG. 5 to the right side of FIG. The movable stage 10a2a is controlled by the stage control unit 10b1i (see FIG. 2) via the stage control circuit 10b6 (see FIG. 1). Next, for example, before the pattern is drawn in the stripe frame STR2, the stage controller 10b1i is movable via the stage control circuit 10b6 so that the movable stage 10a2a moves from the upper side of FIG. 5 to the lower side of FIG. The stage 10a2a is controlled. Next, for example, when a pattern is drawn in the stripe frame STR2, the stage controller 10b1i is movable via the stage control circuit 10b6 so that the movable stage 10a2a moves from the right side of FIG. 5 to the left side of FIG. The stage 10a2a is controlled.

  FIG. 6 is a diagram for explaining in detail an example of the drawing order in which the patterns P1, P2,... Corresponding to the figures FG1, FG2,... Included in the drawing data D1 are drawn by the charged particle beam 10a1b.

  In the example shown in FIG. 6, for example, the areas in the stripe frames STR1, STR2, STR3, STR4, STR5, STR6 (see FIG. 5) are further subdivided by a plurality of rectangular virtual areas called subfields SFn, SFn + 1,. It is divided. Specifically, in the example shown in FIG. 6, for example, when the pattern P1 corresponding to the figure FG1 (see FIG. 4) included in the drawing data D1 (see FIG. 1) is drawn by the charged particle beam 10a1b, first, For example, the main deflector 10a1e (see FIG. 1) via the deflection control circuit 10b4 (see FIG. 1) by the deflection control unit 10b1h (see FIG. 1) so that the charged particle beam 10a1b is irradiated into the subfield SFn. Is controlled. Next, when the control of the main deflector 10a1e is completed, the sub-deflector 10a1f (FIG. 1) is transmitted by the deflection control unit 10b1h via the deflection control circuit 10b5 (see FIG. 1) so that the pattern P1 is drawn by the charged particle beam 10a1b. Control). Next, when the control of the sub deflector 10a1f is completed, irradiation by the deflection control unit 10b1h via the deflection control circuit 10b2 (see FIG. 1) is started so that irradiation of the charged particle beam 10a1b for drawing the pattern P1 is started. The ranking deflector 10a1c (see FIG. 1) is controlled. Next, when drawing of the pattern P1 by the charged particle beam 10a1b is completed, the blanking deflector 10a1c is controlled by the deflection control unit 10b1h via the deflection control circuit 10b2 so that the irradiation of the charged particle beam 10a1b is stopped. Next, for example, the sub-deflector 10a1f is controlled by the deflection control unit 10b1h via the deflection control circuit 10b5 so that the pattern P2 is drawn by the charged particle beam 10a1b, and the pattern P2 is drawn similarly to the pattern P1. Executed.

  Next, in the example shown in FIG. 6, for example, when drawing of all the patterns P1, P2,... In the subfield SFn is completed, the deflection control unit is configured so that the charged particle beam 10a1b is irradiated into the subfield SFn + 1. The main deflector 10a1e (see FIG. 1) is controlled by 10b1h (see FIG. 2) via the deflection control circuit 10b4 (see FIG. 1), and the patterns P11 and P12 are drawn in the same manner as the patterns P1 and P2. The

  FIG. 7 is a diagram showing an example of a drawing order in which the pattern P1 corresponding to the figure FG1 included in the drawing data D1 is drawn by the charged particle beam 10a1b. Specifically, FIG. 7 shows the charge necessary for drawing the pattern P1 corresponding to the figure FG1 included in the drawing data D1 on the sample M by the charged particle beam 10a1b in the charged particle beam drawing apparatus 10 of the first embodiment. It is a figure for demonstrating an example of the number of shots of particle beam 10a1b.

  In the charged particle beam drawing apparatus 10 of the first embodiment, for example, the pattern P1 (see FIG. 6) corresponding to the figure FG1 (see FIG. 4) included in the drawing data D1 (see FIGS. 1 and 2) has a maximum size. When the pattern P is larger than the pattern P (see FIG. 3B), a plurality of shots of the charged particle beam 10a1b (see FIG. 3A) are performed as shown in FIG. In other words, in the charged particle beam drawing apparatus 10 of the first embodiment, for example, when the pattern P1 corresponding to the figure FG1 included in the drawing data D1 is larger than the maximum size pattern P, the shot data generation unit 10b1g (see FIG. 2) causes the graphic FG1 included in the drawing data D1 to be data into a plurality of small graphics (not shown) corresponding to the patterns P1a, P1b, P1c, P1d, P1e, P1f, P1g, P1h, P1i. The above division processing (shot division processing) is performed, and shot data is generated.

  Specifically, in the example shown in FIG. 7, for example, first, as shown in FIG. 7A, the pattern of the maximum size is obtained by the first shot of the charged particle beam 10a1b (see FIG. 3A). A pattern P1a having the same shape as P (see FIG. 3B) is drawn on the sample M.

  More specifically, in the example shown in FIG. 7, for example, by the deflection control unit 10b1h (see FIG. 2) for positioning the charged particle beam 10a1b (see FIG. 3A) in the subfield SFn (see FIG. 6). When the control of the main deflector 10a1e (see FIG. 1) is completed, the deflection control unit based on the shot data so that the pattern P1a (see FIG. 7A) is drawn by the first shot of the charged particle beam 10a1b. The sub deflector 10a1f (see FIG. 1) is controlled by 10b1h. Next, blanking deflection is performed by the deflection control unit 10b1h based on the shot data so that a shot of the charged particle beam 10a1b for drawing the pattern P1a is started when the control of the sub deflector 10a1f by the deflection control unit 10b1h is completed. The device 10a1c (see FIG. 1) is controlled. Further, the deflection controller 10b1h based on the shot data causes the charged particle beam 10a1b having a horizontal sectional shape for drawing the pattern P1a to be emitted when the control of the sub deflector 10a1f by the deflection controller 10b1h is completed. The beam size variable deflector 10a1d (see FIG. 1) is controlled. Next, when the irradiation time of the charged particle beam 10a1b for drawing the pattern P1a is completed, the blanking deflector 10a1c is controlled by the deflection control unit 10b1h based on the shot data so that the irradiation of the charged particle beam 10a1b is stopped. Is done.

  Next, in the example shown in FIG. 7, for example, the pattern P1b (see FIG. 7B) is drawn by the second shot of the charged particle beam 10a1b (see FIG. 3A). Next, for example, the pattern P1c (see FIG. 7C) is drawn by the third shot of the charged particle beam 10a1b. Next, for example, a pattern P1d (see FIG. 7D) is drawn by a fourth shot of the charged particle beam 10a1b. Next, for example, the pattern P1e (see FIG. 7E) is drawn by the fifth shot of the charged particle beam 10a1b. Next, for example, the pattern P1f (see FIG. 7F) is drawn by the sixth shot of the charged particle beam 10a1b. Next, for example, the pattern P1g (see FIG. 7G) is drawn by the seventh shot of the charged particle beam 10a1b. Next, for example, the pattern P1h (see FIG. 7H) is drawn by the eighth shot of the charged particle beam 10a1b. Next, for example, the pattern P1i (see FIG. 7I) is drawn by the ninth shot of the charged particle beam 10a1b. As a result, in the example shown in FIG. 7, the pattern P1 corresponding to the figure FG1 (see FIG. 4) included in the drawing data D1 (see FIGS. 1 and 2) is drawn on the sample M.

  In the example shown in FIG. 7, a shot of a charged particle beam 10a1b (see FIG. 3A) for drawing patterns P1a, P1b, P1d, and P1e having the same shape as the maximum size pattern P (see FIG. 3B). It will be explained in an easy-to-understand manner that the pattern P1 cannot be drawn on the sample M even after four times, and nine shots of the charged particle beam 10a1b are necessary to draw the pattern P1 on the sample M. Therefore, four shots of the charged particle beam 10a1b for drawing the patterns P1a, P1b, P1d, and P1e having the same shape as the maximum size pattern P (see FIG. 3B) and the maximum size pattern P (FIG. 3). (See (B)) Shot division processing into five shots of the charged particle beam 10a1b for drawing smaller patterns P1c, P1f, P1g, P1h, P1i It has been. In the actual charged particle beam drawing apparatus 10, for example, shot division processing is executed so as to avoid drawing a minute pattern such as a pattern P <b> 1 i (see FIG. 7I). That is, for example, when the pattern P1 (see FIG. 7 (I)) is drawn by nine shots of the charged particle beam 10a1b, the pattern P1 is arranged in three columns in the horizontal direction in FIG. 7 and three columns in the vertical direction in FIG. A pattern divided into nine equal parts is drawn by one shot of the charged particle beam 10a1b.

  Specifically, in the charged particle beam drawing apparatus 10 according to the first embodiment, as shown in FIGS. 7A to 7I, the figure FG1 included in the drawing data D1 (see FIGS. 1 and 2). During the period in which the pattern P1 corresponding to (see FIG. 4) is drawn in the stripe frame STR3 (see FIGS. 5 and 6) on the sample M by the charged particle beam 10a1b (see FIG. 3A), for example, The movable stage 10a2a (see FIG. 2) is controlled by the stage controller 10b1i (see FIG. 2) so that the movable stage 10a2a (see FIG. 1) moves from the left side of FIG. 5 to the right side of FIG.

  8 to 21 describe in detail the processing in the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 shown in FIG. 2, which are characteristic parts of the charged particle beam drawing apparatus 10 of the first embodiment. It is a figure for doing. Specifically, FIG. 8 shows the relationship between the stripe frames STR1, STR2,... On the sample M, the small regions DPB1, DPB2,..., And the cells CL1, CL2, CL3, CL4, CL5, CL6,. It is the figure which showed an example. In the example shown in FIG. 8, for example, the stripe frame STR1 of the drawing area DA (see FIG. 5) on the sample M is virtually divided into a plurality of small areas DPB1, DPB2,. Further, for example, three cells CL1, CL2, and CL3 are included in the small region DPB1, and for example, three cells CL4, CL5, and CL6 are included in the small region DPB2.

  Specifically, in the example shown in FIG. 8, for example, first, among the drawing data D1 (see FIG. 2) stored in the input buffer 10b1b (see FIG. 2), 3 included in the small region DPB1 3 The data of the cells CL1, CL2, CL3 are read by the localizer 10b1d (see FIG. 2).

  FIG. 9 is a diagram showing an example in which the cell CL1 shown in FIG. 8 is processed by the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 shown in FIG. In the example shown in FIGS. 8 and 9A, next, for example, in the division processing unit 10b1d1 (see FIG. 2) of the localizer 10b1d (see FIG. 2), the size (specifically, the width dimension (see FIG. 9) of the cell CL1. It is determined whether or not (A) horizontal dimension) or height dimension (vertical dimension of FIG. 9A)) is greater than a first threshold (for example, A μm). In the example shown in FIGS. 8, 9A, and 9B, the size (specifically, the width dimension (the horizontal dimension in FIG. 9A)) and the height dimension (FIG. 9A) of the cell CL1. )) Is larger than the first threshold value (A μm), so that one cell CL1 (see FIG. 9A) has four cells CL1a having a size equal to or smaller than the first threshold value (A μm). , CL1b, CL1c, CL1d (see FIG. 9B).

  Next, in the example shown in FIGS. 8, 9A, 9B, and 9C, for example, in the cell redefinition unit 10b1d2 (see FIG. 2) of the localizer 10b1d (see FIG. 2), Is there a cell having a data amount larger than the second threshold (for example, B megabytes) in four cells CL1a, CL1b, CL1c, and CL1d (see FIG. 9B) having a size of one threshold (Aμm) or less? It is determined whether or not. In the examples shown in FIGS. 8, 9A, 9B, and 9C, for example, the cell CL1a having a data amount larger than the second threshold (B megabytes) (see FIG. 9B) Includes a cell CL1a2 (see FIG. 9C) including a plurality of array-type figures FGA and FGB (see FIG. 10A), and a plurality of non-array-type figures FGC, FGD, FGE, FGF, FGG, The cells are divided into cells CL1a1 (see FIG. 9C) including FGH, FGI, and FGJ (see FIG. 11A) and redefined as different cells CL1a1 and CL1a2.

  FIG. 10 is a diagram showing an example of a cell CL1a2 including a plurality of array type figures FGA and FGB. Specifically, FIG. 10A shows an example of the relationship between the cell CL1a2 and the figures FGA and FGB included in the cell CL1a2, and FIG. 10B shows the pattern data of the cell CL1a2 shown in FIG. FIG. In FIG. 10B, the number in parentheses represents the number of bytes. In the example shown in FIG. 10, for example, it has a width dimension (horizontal dimension in FIG. 10A) wA and a height dimension (vertical dimension in FIG. 10A) hA, and is at coordinates (xA, yA). The arranged figure FGA is repeated four times in the x direction (left and right direction in FIG. 10A) at a pitch px (the number of repetitions nx = 4), and the pitch py in the y direction (up and down direction in FIG. 10A). Are repeated four times (repetition count ny = 4), and are arranged in the cell CL1a2. That is, 16 figure FGAs are arranged in the cell CL1a2. The total amount of the 16 graphic FGA data is 16 bytes (see FIG. 10B).

  Further, in the example shown in FIG. 10, for example, it has a width dimension (horizontal dimension in FIG. 10A) wB and a height dimension (vertical dimension in FIG. 10A) hB, and coordinates (xB, yB ) Arranged in the x direction (left and right direction in FIG. 10A) at a pitch px (repetition number nx = 4) and in the y direction (up and down direction in FIG. 10A). It is repeated four times at the pitch py (repetition number ny = 4) and is arranged in the cell CL1a2. That is, 16 figures FGB are arranged in the cell CL1a2. The data amount of the 16 figure FGB data is 16 bytes in total (see FIG. 10B). That is, in the example shown in FIG. 10, the data amount of the cell CL1a2 pattern data is 36 bytes in total including the header.

  FIG. 11 is a diagram showing an example of a cell CL1a1 including a plurality of non-array type graphics FGC, FGD, FGE, FGF, FGG, FGH, FGI, and FGJ. Specifically, FIG. 11A shows an example of the relationship between the cell CL1a1 and the figures FGC,..., FGJ included in the cell CL1a1, and FIG. 11B shows the cell CL1a1 shown in FIG. It is the figure which showed pattern data. In FIG. 11B, the number in parentheses represents the number of bytes.

  In the example shown in FIG. 11, for example, a figure FGC having a width dimension (horizontal direction dimension in FIG. 11A) wC and a height dimension (vertical direction dimension in FIG. 11A) hC is the coordinates in the cell CL1a1 ( xC, yC). Furthermore, a figure FGD having a width dimension wD and a height dimension hD is arranged at coordinates (xD, yD) in the cell CL1a1. Further, a figure FGE having a width dimension wE and a height dimension hE is arranged at coordinates (xE, yE) in the cell CL1a1. Furthermore, a graphic FGF having a width dimension wF and a height dimension hF is arranged at coordinates (xF, yF) in the cell CL1a1. Further, a figure FGG having a width dimension wG and a height dimension hG is arranged at the coordinates (xG, yG) in the cell CL1a1. Furthermore, a figure FGH having a width dimension wH and a height dimension hH is arranged at coordinates (xH, yH) in the cell CL1a1. A figure FGI having a width dimension wI and a height dimension hI is arranged at coordinates (xI, yI) in the cell CL1a1. Furthermore, a figure FGJ having a width dimension wJ and a height dimension hJ is arranged at coordinates (xJ, yJ) in the cell CL1a1. That is, eight figures FGC, FGD, FGE, FGF, FGG, FGH, FGI, and FGJ are arranged in the cell CL1a1. The total amount of graphic FGC data is 8 bytes (see FIG. 11B). Similarly, the data amount of each of the figures FGD, FGE, FGF, FGG, FGH, FGI, and FGJ is 8 bytes in total (see FIG. 11B). That is, in the example shown in FIG. 11, the data amount of the cell CL1a1 pattern data is 68 bytes in total including the header.

  Next, in the examples illustrated in FIGS. 8, 9A, 9B, 9C, and 9D, for example, the division processing unit 10b1d3 (see FIG. 2) of the localizer 10b1d (see FIG. 2). 2), the size (specifically, the width dimension (the horizontal dimension in FIG. 9D)) or the height dimension of the non-array type cell CL1a1 redefined by the cell redefinition unit 10b1d2 (see FIG. 2). It is determined whether or not the vertical dimension in FIG. 9D is larger than a third threshold value (for example, C μm). In the example shown in FIGS. 8, 9A, 9B, 9C, 9D, and 9E, the size of the non-array cell CL1a1 (in detail, Since the width dimension (the horizontal dimension in FIG. 9D) and the height dimension (the vertical dimension in FIG. 9D) are larger than the third threshold value (C μm), one non-array cell CL1a1 (See FIG. 9D) is divided into four non-arrayed cells CL1a1a, CL1a1b, CL1a1c, and CL1a1d (see FIG. 9E) having a size equal to or smaller than the third threshold (C μm).

  FIG. 12 is a diagram illustrating an example of four non-array cells CL1a1a, CL1a1b, CL1a1c, and CL1a1d generated by dividing the non-array cell CL1a1. Specifically, FIG. 12A shows the relationship between the cell CL1a1a and the figures FGC and FGD included in the cell CL1a1a, and FIG. 12B shows the pattern data of the cell CL1a1a shown in FIG. It is a figure. FIG. 12C shows the relationship between the cell CL1a1b and the graphics FGE and FGF included in the cell CL1a1b, and FIG. 12D shows the pattern data of the cell CL1a1b shown in FIG. . FIG. 12E shows the relationship between the cell CL1a1c and the graphics FGG and FGH included in the cell CL1a1c, and FIG. 12F shows the pattern data of the cell CL1a1c shown in FIG. . FIG. 12G shows a relationship between the cell CL1a1d and the figures FGI and FGJ included in the cell CL1a1d, and FIG. 12H shows a pattern data of the cell CL1a1d shown in FIG. . In FIGS. 12B, 12D, 12F, and 12H, the numbers in parentheses represent the number of bytes.

  In the example shown in FIG. 12B, the data amount of the cell CL1a1a pattern data after the division processing by the division processing unit 10b1d3 (see FIG. 2) is 20 bytes in total including the header. In the example shown in FIG. 12D, the data amount of the cell CL1a1b pattern data after the division processing by the division processing unit 10b1d3 is 20 bytes in total including the header. Further, in the example shown in FIG. 12F, the data amount of the cell CL1a1c pattern data after the division processing by the division processing unit 10b1d3 is 20 bytes in total including the header. In the example shown in FIG. 12G, the data amount of the cell CL1a1d pattern data after the division processing by the division processing unit 10b1d3 is 20 bytes in total including the header. That is, in the example shown in FIGS. 11 and 12, the total data amount of the pattern data of the cells CL1a1a, CL1a1b, CL1a1c, and CL1a1d after the division processing by the division processing unit 10b1d3 is 80 bytes, and the division by the division processing unit 10b1d3 It slightly increases (by an increase in the number of pattern data headers) compared to the data amount (68 bytes) of the cell CL1a1 pattern data before processing.

  Next, in the examples shown in FIGS. 8, 9A, 9B, 9C, 9D, and 9E, for example, division of the localizer 10b1d (see FIG. 2) The size of the array type cell CL1a2 redefined by the cell redefinition unit 10b1d2 (see FIG. 2) in the processing unit 10b1d4 (see FIG. 2) (specifically, the width dimension (the horizontal dimension in FIG. 9E)) Alternatively, it is determined whether or not the height dimension (the vertical dimension in FIG. 9E) is greater than a third threshold value (for example, C μm). In the examples shown in FIGS. 8, 9A, 9B, 9C, 9D, 9E, and 9F, the size of the array type cell CL1a2 (Specifically, since the width dimension (the horizontal dimension in FIG. 9E) and the height dimension (the vertical dimension in FIG. 9E)) are larger than the third threshold value (C μm), one array Type cell CL1a2 (see FIG. 9E) is divided into four array type cells CL1a2a, CL1a2b, CL1a2c, CL1a2d (see FIG. 9F) having a size equal to or smaller than the third threshold (C μm). Whether or not to do so is considered.

  FIG. 13 and FIG. 14 are diagrams showing an example of four array-type cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d that are generated when the array-type cell CL1a2 is divided. Specifically, FIG. 13A shows the relationship between the cell CL1a2a and the figures FGA and FGB included in the cell CL1a2a, and FIG. 13B shows the pattern data of the cell CL1a2a shown in FIG. It is a figure. FIG. 13C shows the relationship between the cells CL1a2b and the graphics FGA and FGB included in the cell CL1a2b, and FIG. 13D shows the pattern data of the cell CL1a2b shown in FIG. . FIG. 14A is a diagram showing the relationship between the cell CL1a2c and the figures FGA and FGB included in the cell CL1a2c, and FIG. 14B is a diagram showing the pattern data of the cell CL1a2c shown in FIG. 14A. . FIG. 14C is a diagram showing the relationship between the cell CL1a2d and the figures FGA and FGB included in the cell CL1a2d, and FIG. 14D is a diagram showing the pattern data of the cell CL1a2d shown in FIG. . In FIG. 13B, FIG. 13D, FIG. 14B, and FIG. 14D, the numbers in parentheses represent the number of bytes.

  In the example shown in FIG. 13B, if the division processing of the array-type cell CL1a2 is executed by the division processing unit 10b1d4 (see FIG. 2), the data amount of the array-type cell CL1a2a pattern data after the division processing is The total is 36 bytes including the header. In the example shown in FIG. 13D, if the division processing unit 10b1d4 executes the division processing of the array type cell CL1a2, the data amount of the array type cell CL1a2b pattern data after the division processing includes the header. The total is 36 bytes. Further, in the example shown in FIG. 14B, if the division processing unit 10b1d4 executes the division processing of the array type cell CL1a2, the data amount of the array type cell CL1a2c pattern data after the division processing includes the header. The total is 36 bytes. In the example shown in FIG. 14D, if the division processing unit 10b1d4 executes the division processing of the array type cell CL1a2, the data amount of the array type cell CL1a2d pattern data after the division processing includes the header. The total is 36 bytes. That is, in the example shown in FIGS. 10, 13, and 14, if the division processing of the array type cell CL1a2 is executed by the division processing unit 10b1d4, the array type cells CL1a2a, CL1a2b, CL1a2c, CL1a2d after the division processing are executed. The total data amount of the pattern data is 144 bytes, which is four times the data amount (36 bytes) of the array type cell CL1a2 pattern data before the division processing by the division processing unit 10b1d4.

  In the charged particle beam drawing apparatus 10 according to the first embodiment, the cell is an array type cell redefined by the cell redefinition unit 10b1d2 (see FIG. 2) and has a size larger than a third threshold (for example, C μm). Is divided into a plurality of array type cells having a size equal to or smaller than the third threshold value (C μm) by the division processing unit 10b1d4 (see FIG. 2), the total data amount of the plurality of array type cells after the division processing Is larger than the fourth threshold value D times (for example, twice) the data amount of the array-type cell before the division processing, the division processing by the division processing unit 10b1d4 is not executed.

  In the charged particle beam drawing apparatus 10 of the first embodiment, the cell is an array type cell redefined by the cell redefinition unit 10b1d2 (see FIG. 2), and has a size larger than the third threshold (for example, C μm). When the division processing unit 10b1d4 (see FIG. 2) divides the cell having a plurality of array type cells having a size equal to or smaller than the third threshold (C μm), the total of the plurality of array type cells after the division processing When the data amount is equal to or less than a fourth threshold value D (for example, twice) the data amount of the array type cell before the division processing, the division processing by the division processing unit 10b1d4 is executed.

  As described above, in the example shown in FIGS. 10, 13, and 14, if the division processing of the array type cell CL1a2 is executed by the division processing unit 10b1d4 (see FIG. 2), the array type after the division processing is performed. The total data amount of the pattern data of the cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d increases to four times the data amount (36 bytes) of the array type cell CL1a2 pattern data before the division processing by the division processing unit 10b1d4. As shown in FIG. 9E and FIG. 9F, the division processing of the array type cell CL1a2 by the division processing unit 10b1d4 is not executed.

  That is, in the example shown in FIG. 9, the cell CL1 (see FIG. 9A) is processed by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2). A cell CL1a1a (see FIG. 9E) including a non-array graphic generated by the above, a cell CL1a1b including a non-array graphic (see FIG. 9E), and a cell including a non-array graphic CL1a1c (see FIG. 9E), a cell CL1a1d (see FIG. 9E) containing a non-array graphic, a cell CL1a2 (see FIG. 9E) containing an array graphic, and a cell CL1b (See FIG. 9E), the cell CL1c (see FIG. 9E), and the cell CL1d (see FIG. 9E) are sent to the sorting unit 10b1d5 (see FIG. 2).

  FIG. 15 shows an example of the relationship between the data amount of the cell CL1 shown in FIG. 9A and the total data amount of the cells CL1a1a, CL1a1b, CL1a1c, CL1a1d, CL1a2, CL1b, CL1c, and CL1d shown in FIG. FIG. Specifically, FIG. 15A shows the data amount of the cell CL1 before the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2) is executed. 15B shows the cells CL1a1a, CL1a1b, CL1a1c, CL1a1d, and CL1a2 after the processing by the division processing units 10b1d1, 10b1d3, and 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2) are executed. , CL1b, CL1c, and CL1d. FIG. 16 is a diagram showing an example in which the cell CL2 shown in FIG. 8 is processed by the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 shown in FIG.

  In the example shown in FIG. 8, FIG. 9 and FIG. 16A, after the processing of the cell CL1 (see FIG. 9) described above, for example, in the division processing unit 10b1d1 (see FIG. 2) of the localizer 10b1d (see FIG. 2). The size of the cell CL2 (specifically, the width dimension (the horizontal dimension in FIG. 16A) or the height dimension (the vertical dimension in FIG. 16A)) is larger than the first threshold (for example, A μm). It is determined whether or not. In the example shown in FIG. 8, FIG. 9, FIG. 16A and FIG. 16B, the size (specifically, width dimension (horizontal dimension in FIG. 16A)) and height dimension (FIG. 16) of the cell CL2. 16 (A) vertical dimension)) is larger than the first threshold value (A μm), so one cell CL2 (see FIG. 16A) has four cells having a size equal to or smaller than the first threshold value (A μm). Cell CL2a, CL2b, CL2c, CL2d (see FIG. 16B).

  Next, in the examples illustrated in FIGS. 8, 9, 16A, 16B, and 16C, for example, the cell redefinition unit 10b1d2 (see FIG. 2) of the localizer 10b1d (see FIG. 2). , Four cells CL2a, CL2b, CL2c, and CL2d (see FIG. 16B) having a size equal to or smaller than the first threshold (A μm) have cells having a data amount larger than the second threshold (for example, B megabytes). It is determined whether or not it exists. In the example shown in FIGS. 8, 9, 16A, 16B, and 16C, for example, the cell CL2a (FIG. 16B having a data amount larger than the second threshold (B megabytes)). )) Is divided into a cell CL2a2 (see FIG. 16C) including a plurality of array-type figures and a cell CL2a1 (see FIG. 16C) including a plurality of non-array-type figures. Redefined as cells CL2a1 and CL2a2.

  Next, in the examples illustrated in FIGS. 8, 9, 16A, 16B, 16C, and 16D, for example, the division processing unit 10b1d3 of the localizer 10b1d (see FIG. 2). In FIG. 2 (see FIG. 2), the size (specifically, the width dimension (the lateral dimension in FIG. 16D)) or the height of the non-array type cell CL2a1 redefined by the cell redefinition unit 10b1d2 (see FIG. 2) It is determined whether or not the height dimension (the vertical dimension in FIG. 16D) is greater than a third threshold value (for example, C μm). In the example shown in FIGS. 8, 9, 16A, 16B, 16C, 16D, and 16E, the size (details) of the non-array type cell CL2a1 is shown. Since the width dimension (dimension in the horizontal direction in FIG. 16D) and the height dimension (dimension in the vertical direction in FIG. 16D)) are larger than the third threshold value (C μm), one non-array type Cell CL2a1 (see FIG. 16D) is divided into four non-array cells CL2a1a, CL2a1b, CL2a1c, and CL2a1d (see FIG. 16E) having a size equal to or smaller than the third threshold (C μm). Is done.

  Next, in the examples shown in FIGS. 8, 9, 16A, 16B, 16C, 16D, and 16E, for example, the localizer 10b1d (see FIG. 2) ) Division processing unit 10b1d4 (see FIG. 2), the size (specifically, the left and right sides of the width dimension (FIG. 16E) of the array type cell CL2a2 redefined by the cell redefinition unit 10b1d2 (see FIG. 2)). It is determined whether or not the direction dimension) or the height dimension (the vertical dimension in FIG. 16E) is greater than a third threshold value (for example, C μm). In the example shown in FIGS. 8, 9, 16A, 16B, 16C, 16D, 16E, and 16F, an array type cell is used. Since the size of CL2a2 (specifically, the width dimension (the horizontal dimension in FIG. 16E) and the height dimension (the vertical dimension in FIG. 16E)) are larger than the third threshold value (C μm), 1 The array type cells CL2a2 (see FIG. 16E) are replaced with four array type cells CL2a2a, CL2a2b, CL2a2c, and CL2a2d (see FIG. 16F) having a size equal to or smaller than the third threshold (C μm). Whether or not to divide into two is considered.

  As described above, the charged particle beam lithography apparatus 10 according to the first embodiment is an array type cell redefined by the cell redefinition unit 10b1d2 (see FIG. 2), and has a third threshold value (for example, C μm). When a cell having a large size is divided by a division processing unit 10b1d4 (see FIG. 2) into a plurality of array type cells having a size equal to or smaller than a third threshold (C μm), a plurality of array type cells after the division processing are obtained. When the total data amount becomes larger than the fourth threshold D times (for example, twice) the data amount of the array type cell before the division processing, the division processing by the division processing unit 10b1d4 is not executed.

  Further, as described above, the charged particle beam drawing apparatus 10 according to the first embodiment is an array type cell redefined by the cell redefinition unit 10b1d2 (see FIG. 2), and has a third threshold (for example, C μm). ) When a cell having a larger size is divided into a plurality of array-type cells having a size equal to or smaller than the third threshold (C μm) by the division processing unit 10b1d4 (see FIG. 2), a plurality of array types after the division processing are obtained. When the total data amount of the cells is equal to or less than a fourth threshold value D (for example, twice) the data amount of the array type cell before the division processing, the division processing by the division processing unit 10b1d4 is executed.

  In the example shown in FIGS. 8, 9, 16A, 16B, 16C, 16D, 16E, and 16F, the division processing unit 10b1d4 is used. If the division processing of the array type cell CL2a2 (see FIG. 16E) is executed by (see FIG. 2), the array type cells CL2a2a, CL2a2b, CL2a2c, and CL2a2d after the division processing (FIG. 16F). The total data amount of the reference pattern data is larger than the fourth threshold D times (for example, twice) the data amount of the array type cell CL2a2 pattern data before the division processing by the division processing unit 10b1d4. The dividing process of the array type cell CL2a2 by 10b1d4 is not executed.

  That is, in the example shown in FIG. 16, the cell CL2 (see FIG. 16A) is processed by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2). A cell CL2a1a (see FIG. 16E) containing a non-array graphic generated by the above, a cell CL2a1b (see FIG. 16E) containing a non-array graphic, and a cell containing a non-array graphic CL2a1c (see FIG. 16E), a cell CL2a1d (see FIG. 16E) containing a non-array graphic, a cell CL2a2 (see FIG. 16E) containing an array graphic, and a cell CL2b (See FIG. 16E), the cell CL2c (see FIG. 16E), and the cell CL2d (see FIG. 16E) are sent to the sorting unit 10b1d5 (see FIG. 2).

  FIG. 17 shows an example of the relationship between the data amount of the cell CL2 shown in FIG. 16A and the total data amount of the cells CL2a1a, CL2a1b, CL2a1c, CL2a1d, CL2a2, CL2b, CL2c, and CL2d shown in FIG. FIG. Specifically, FIG. 17A shows the data amount of the cell CL2 before the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2) is executed. FIG. 17B shows the cells CL2a1a, CL2a1b, CL2a1c, CL2a1d, and CL2a2 after the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2) is executed. , CL2b, CL2c, and CL2d. 18 and 19 show an example in which the cell CL3 shown in FIG. 8 is processed by the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 shown in FIG.

  In the example shown in FIGS. 8, 9, 16 and 18A, for example, after the processing of the cells CL1 and CL2 (see FIGS. 9 and 16) described above, for example, the dividing process of the localizer 10b1d (see FIG. 2) In the portion 10b1d1 (see FIG. 2), the size of the cell CL3 (specifically, the width dimension (the horizontal dimension in FIG. 18A) or the height dimension (the vertical dimension in FIG. 18A)) is It is determined whether or not it is larger than one threshold (for example, A μm). In the example shown in FIG. 8, FIG. 9, FIG. 16, FIG. 18 (A) and FIG. 18 (B), the size (specifically, the width dimension (the lateral dimension in FIG. 18 (A)) and the height of the cell CL3. Since the dimension (the vertical dimension in FIG. 18A) is larger than the first threshold (A μm), one cell CL3 (see FIG. 18A) has a size equal to or smaller than the first threshold (A μm). The divided cells are divided into eight cells CL3a, CL3b, CL3c, CL3d, CL3e, CL3f, CL3g, and CL3h (see FIG. 18B).

  Next, in the examples illustrated in FIGS. 8, 9, 16, 18A, 18B, and 18C, for example, the cell redefinition unit 10b1d2 (see FIG. 2) of the localizer 10b1d (see FIG. 2). 2), eight cells CL3a, CL3b, CL3c, CL3d, CL3e, CL3f, CL3g, CL3h (see FIG. 18B) having a size equal to or smaller than the first threshold (A μm) It is determined whether there is a cell with a data amount greater than (B megabytes). In the examples shown in FIGS. 8, 9, 16, 18A, 18B, and 18C, for example, the cell CL3a (FIG. 18) having a data amount larger than the second threshold (B megabyte). 18 (B)) is divided into a cell CL3a2 (see FIG. 18C) containing a plurality of array-type figures and a cell CL3a1 (see FIG. 18C) containing a plurality of non-array-type figures. And redefined as different cells CL3a1 and CL3a2. Further, the cell CL3b (see FIG. 18B) having a data amount larger than the second threshold (B megabytes) is different from the cell CL3b2 (see FIG. 18C) including a plurality of array type figures, and the non-array type. The cell CL3b1 (see FIG. 18C) including a plurality of figures is redefined as different cells CL3b1 and CL3b2. Further, the cell CL3c (see FIG. 18B) having a data amount larger than the second threshold (B megabyte) is different from the cell CL3c2 (see FIG. 18C) including a plurality of array type figures, and the non-array type. And is redefined as different cells CL3c1 and CL3c2.

  Next, in the example shown in FIGS. 8, 9, 16, 18A, 18B, 18C, and 18D, for example, division of the localizer 10b1d (see FIG. 2) In the processing unit 10b1d3 (see FIG. 2), the size (specifically, the horizontal dimension of the width dimension (FIG. 18D) of the non-array type cell CL3a1 redefined by the cell redefinition unit 10b1d2 (see FIG. 2). ) Or height dimension (vertical direction dimension in FIG. 18D)) is determined whether it is larger than a third threshold (for example, C μm). In the example shown in FIGS. 8, 9, 16, 18A, 18B, 18C, 18D, and 18E, the non-array type cell CL3a1 is used. Since the size (specifically, the width dimension (the horizontal dimension in FIG. 18D) and the height dimension (the vertical dimension in FIG. 18D)) are larger than the third threshold (C μm), one size The four non-array cells CL3a1a, CL3a1b, CL3a1c, and CL3a1d (see FIG. 18E) have non-array-type cells CL3a1 (see FIG. 18D) having a size equal to or smaller than the third threshold value (C μm). It is divided into

  Further, in the examples shown in FIGS. 8, 9, 16, 18A, 18B, 18C, and 18D, for example, division of the localizer 10b1d (see FIG. 2) In the processing unit 10b1d3 (see FIG. 2), the size (specifically, the lateral dimension of the width dimension (FIG. 18D) of the non-array type cell CL3b1 redefined by the cell redefinition unit 10b1d2 (see FIG. 2). ) Or height dimension (vertical dimension in FIG. 18D)) is determined whether it is larger than a third threshold value (for example, C μm). In the example shown in FIG. 8, FIG. 9, FIG. 16, FIG. 18 (A), FIG. 18 (B), FIG. 18 (C), FIG. 18 (D), and FIG. Since the size (specifically, the width dimension (the horizontal dimension in FIG. 18D) and the height dimension (the vertical dimension in FIG. 18D)) are larger than the third threshold (C μm), one size The four non-array cells CL3b1a, CL3b1b, CL3b1c, and CL3b1d (see FIG. 18E) have non-array-type cells CL3b1 (see FIG. 18D) having a size equal to or smaller than the third threshold value (C μm). It is divided into

  Further, in the examples shown in FIGS. 8, 9, 16, 18A, 18B, 18C, and 18D, for example, division of the localizer 10b1d (see FIG. 2). In the processing unit 10b1d3 (see FIG. 2), the size (specifically, the horizontal dimension of the width dimension (FIG. 18D) of the non-array type cell CL3c1 redefined by the cell redefinition unit 10b1d2 (see FIG. 2). ) Or height dimension (vertical dimension in FIG. 18D)) is determined whether it is larger than a third threshold value (for example, C μm). In the example shown in FIG. 8, FIG. 9, FIG. 16, FIG. 18 (A), FIG. 18 (B), FIG. 18 (C), FIG. 18 (D) and FIG. Since the size (specifically, the width dimension (the horizontal dimension in FIG. 18D) and the height dimension (the vertical dimension in FIG. 18D)) are larger than the third threshold (C μm), one The four non-array cells CL3c1a, CL3c1b, CL3c1c, and CL3c1d (see FIG. 18E) have non-array-type cells CL3c1 (see FIG. 18D) having a size equal to or smaller than the third threshold (C μm). It is divided into

  Next, in the examples illustrated in FIGS. 8, 9, 16, 18, and 19A, for example, in the division processing unit 10b1d4 (see FIG. 2) of the localizer 10b1d (see FIG. 2), the cell redefinition unit 10b1d2 The size (specifically, the width dimension (the horizontal dimension in FIG. 19A)) or the height dimension (the vertical dimension in FIG. 19A) of the array type cell CL3a2 redefined by (see FIG. 2) ) Is larger than a third threshold value (for example, C μm). In the example shown in FIGS. 8, 9, 16, 18, 19A, and 19B, the size of the array-type cell CL3a2 (specifically, the width dimension (left and right of FIG. 19A) (Direction dimension) and height dimension (vertical direction dimension in FIG. 19A)) are larger than the third threshold (C μm), so that one array type cell CL3a2 (see FIG. 19A) It is examined whether or not to divide into four array-type cells CL3a2a, CL3a2b, CL3a2c, and CL3a2d (see FIG. 19B) having a size of 3 threshold values (C μm) or less.

  As described above, the charged particle beam lithography apparatus 10 according to the first embodiment is an array type cell redefined by the cell redefinition unit 10b1d2 (see FIG. 2), and has a third threshold value (for example, C μm). When a cell having a large size is divided by a division processing unit 10b1d4 (see FIG. 2) into a plurality of array type cells having a size equal to or smaller than a third threshold (C μm), a plurality of array type cells after the division processing are obtained. When the total data amount becomes larger than the fourth threshold D times (for example, twice) the data amount of the array type cell before the division processing, the division processing by the division processing unit 10b1d4 is not executed.

  Further, as described above, the charged particle beam drawing apparatus 10 according to the first embodiment is an array type cell redefined by the cell redefinition unit 10b1d2 (see FIG. 2), and has a third threshold (for example, C μm). ) When a cell having a larger size is divided into a plurality of array-type cells having a size equal to or smaller than the third threshold (C μm) by the division processing unit 10b1d4 (see FIG. 2), a plurality of array types after the division processing are obtained. When the total data amount of the cells is equal to or less than a fourth threshold value D (for example, twice) the data amount of the array type cell before the division processing, the division processing by the division processing unit 10b1d4 is executed.

  In the example shown in FIG. 8, FIG. 9, FIG. 16, FIG. 18, FIG. 19 (A), and FIG. Then, the total data amount of the pattern data of the array type cells CL3a2a, CL3a2b, CL3a2c, and CL3a2d after the division processing is the fourth data amount of the array type cell CL3a2 pattern data before the division processing by the division processing unit 10b1d4. Since it is larger than the threshold value D times (for example, 2 times), the division processing of the array type cell CL3a2 by the division processing unit 10b1d4 is not executed.

  Further, in the examples shown in FIGS. 8, 9, 16, 18, and 19A, for example, in the division processing unit 10b1d4 (see FIG. 2) of the localizer 10b1d (see FIG. 2), the cell redefinition unit 10b1d2 The size (specifically, the width dimension (the horizontal dimension in FIG. 19A)) or the height dimension (the vertical dimension in FIG. 19A) of the array type cell CL3b2 redefined by (see FIG. 2) ) Is larger than a third threshold value (for example, C μm). In the examples shown in FIGS. 8, 9, 16, 18, 19A, and 19B, the size of the array type cell CL3b2 (specifically, the width dimension (the left and right sides of FIG. 19A) Direction dimension) and height dimension (vertical direction dimension in FIG. 19A)) are larger than the third threshold value (C μm), so that one array type cell CL3b2 (see FIG. 19A) It is examined whether or not to divide into four array type cells CL3b2a, CL3b2b, CL3b2c, and CL3b2d (see FIG. 19B) having a size of three threshold values (C μm) or less.

  In the example shown in FIG. 8, FIG. 9, FIG. 16, FIG. 18, FIG. 19A, and FIG. 19B, the division processing of the array type cell CL3b2 is temporarily executed by the division processing unit 10b1d4 (see FIG. 2). Then, the total data amount of the pattern data of the array type cells CL3b2a, CL3b2b, CL3b2c, and CL3b2d after the division processing is the fourth data amount of the array type cell CL3b2 pattern data before the division processing by the division processing unit 10b1d4. Since the threshold value is larger than D times (for example, twice), the division processing of the array type cell CL3b2 by the division processing unit 10b1d4 is not executed.

  Further, in the examples shown in FIGS. 8, 9, 16, 18, and 19A, for example, in the division processing unit 10b1d4 (see FIG. 2) of the localizer 10b1d (see FIG. 2), the cell redefinition unit 10b1d2 The size (specifically, the width dimension (the horizontal dimension in FIG. 19A)) or the height dimension (the vertical dimension in FIG. 19A) of the array-type cell CL3c2 redefined by (see FIG. 2) ) Is larger than a third threshold value (for example, C μm). In the example shown in FIGS. 8, 9, 16, 18, 19A, and 19B, the size of the cell CL3c2 of the array type (specifically, the width dimension (left and right of FIG. 19A) Direction dimension) and height dimension (vertical direction dimension in FIG. 19A)) are larger than the third threshold value (C μm), so that one array type cell CL3c2 (see FIG. 19A) It is examined whether or not to divide into four array type cells CL3c2a, CL3c2b, CL3c2c, and CL3c2d (see FIG. 19B) having a size of 3 threshold values (Cμm) or less.

  In the example shown in FIG. 8, FIG. 9, FIG. 16, FIG. 18, FIG. 19A and FIG. 19B, the division processing of the array type cell CL3c2 is temporarily executed by the division processing unit 10b1d4 (see FIG. 2). Then, the total data amount of the pattern data of the array-type cells CL3c2a, CL3c2b, CL3c2c, and CL3c2d after the division processing is the fourth data amount of the array-type cell CL3c2 pattern data before the division processing by the division processing unit 10b1d4. Since it is larger than the threshold value D times (for example, 2 times), the division processing of the array type cell CL3c2 by the division processing unit 10b1d4 is not executed.

  That is, in the example shown in FIGS. 18 and 19, the cell CL3 (see FIG. 18A) is processed by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2). The cell CL3a1a (see FIG. 19A) including the non-array graphic generated by the processing, the cell CL3a1b (see FIG. 19A) including the non-array graphic, and the non-array graphic A cell CL3a1c (see FIG. 19A) including a cell, a cell CL3a1d (see FIG. 19A) including a non-array graphic, and a cell CL3a2 (see FIG. 19A) including an array graphic. A cell CL3b1a (see FIG. 19A) including a non-array graphic, a cell CL3b1b (see FIG. 19A) including a non-array graphic, and a non-array graphic Including a cell CL3b1c (see FIG. 19A), a cell CL3b1d including a non-array graphic (see FIG. 19A), a cell CL3b2 including an array graphic (see FIG. 19A), A cell CL3c1a (see FIG. 19A) including a non-array graphic, a cell CL3c1b (refer to FIG. 19A) including a non-array graphic, and a cell CL3c1c (FIG. 19) including a non-array graphic. (See (A)), a cell CL3c1d (see FIG. 19A) containing a non-array graphic, a cell CL3c2 (see FIG. 19A) containing an array graphic, and a cell CL3d (see FIG. 19 A)), cell CL3e (see FIG. 19A), cell CL3f (see FIG. 19A), cell CL3g (see FIG. 19A), and cell CL3h (FIG. 19A). Refer to) and the sorting unit 10 Sent to 1d5 (see FIG. 2).

  FIG. 20 shows the data amount of the cell CL3 shown in FIG. 18A and the cells CL3a1a, CL3a1b, CL3a1c, CL3a1d, CL3a2, CL3b1a, CL3b1b, CL3b1c, CL3b1d, CL3b2, CL3c1b, CL3c1c1c1c, CL3c1c1c1 , CL3c1d, CL3c2, CL3d, CL3e, CL3f, CL3g, and CL3h. Specifically, FIG. 20A shows the data amount of the cell CL3 before the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2) is executed. 20B shows cells CL3a1a, CL3a1b, CL3a1d, CL3a1d, and CL3a2 after the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 2) and the cell redefinition unit 10b1d2 (see FIG. 2) is executed. , CL3b1a, CL3b1b, CL3b1c, CL3b1d, CL3b2, CL3c1a, CL3c1b, CL3c1c, CL3c1d, CL3c2, CL3d, CL3e, CL3f, CL3g, and CL3h.

  21 shows data of the cells CL1a1a,..., CL1d shown in FIG. 15B, data of the cells CL2a1a,..., CL2d shown in FIG. 17B, and cells CL3a1a,. The CL3h data is distributed by the distribution unit 10b1d5 shown in FIG. 2, and the data processing units 10b1e1, 10b1e2, and 10b1e3 of the data processing module 10b1e shown in FIG. is there. Specifically, FIG. 21A is distributed by the distribution unit 10b1d5 of the charged particle beam drawing apparatus 10 of the first embodiment in which the processes in the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 are executed. The data of the cells CL1a1a,..., CL1d, the data of the cells CL2a1a,..., CL2d and the data of the cells CL3a1a, .., CL3h are processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3 of the data processing module 10b1e. It is the figure which showed an example. FIG. 21B shows the data of the cell CL1, the data of the cell CL2, and the data of the cell CL2 distributed by the distribution unit 10b1d5 of the conventional charged particle beam drawing apparatus in which the division processing units 10b1d1, 10b1d3, 10b1d4 and the cell redefinition unit 10b1d2 are not provided. It is the figure which showed an example in which the data of the cell CL3 are processed in parallel by the data processing part 10b1e1, 10b1e2, 10b1e3 of the data processing module 10b1e.

  In FIG. 21, during time t0 to time tA, data of cells CL1, CL2, and CL3 is processed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3 in the charged particle beam drawing apparatus 10 of the first embodiment. In the conventional charged particle beam drawing apparatus, data in cells CL1, CL2, and CL3 are processed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3. The total processing time required for this is shown. In addition, during the time ΔtA, the data processing unit 10b1e2 in the case where data of the cells CL1, CL2, CL3 is processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3 in the charged particle beam drawing apparatus 10 of the first embodiment. , 10b1e3, and the time ΔtB is obtained by parallelly processing data in the cells CL1, CL2, and CL3 by the data processing units 10b1e1, 10b1e2, and 10b1e3 in the conventional charged particle beam drawing apparatus. A wasteful waiting time (idle time) of the data processing unit 10b1e1 when processed is shown.

  In the charged particle beam drawing apparatus 10 of the first embodiment, the data amount of each of the cells CL1a1a, CL1a1b,..., CL3g, CL3h (see FIG. 21A) is small and preferably, roughly. To be uniform, a plurality of cells CL1a1a, CL1a1b,. CL3h is distributed to a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 2), and data processing is performed in parallel by the plurality of data processing units 10b1e1, 10b1e2, and 10b1e3.

  Therefore, according to the charged particle beam drawing apparatus 10 of the first embodiment, a plurality of cells CL1, CL2, CL3 (see FIG. 21B) having a large amount of data include a plurality of data processing units 10b1e1, 10b1e2, 10b1e3. Compared to the conventional charged particle beam drawing apparatus that is distributed (see FIG. 2) and processed in parallel by a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3, a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 2). ) Can be reduced (time ΔtA ← time ΔtB) (see FIG. 21) and total processing time (time t0 to time tA ← time t0 to time tB) (see FIG. 21).

  Furthermore, in the charged particle beam drawing apparatus 10 of the first embodiment, a cell CL1a2 (see FIGS. 9E and 10A) including a plurality of array-type figures is replaced with a plurality of array-type cells CL1a2a and CL1a2b. , CL1a2c, CL1a2d (see FIG. 9F, FIG. 13A, FIG. 13C, FIG. 14A, and FIG. 14C), a plurality of array-type cells after the division processing When the total data amount of CL1a2a, CL1a2b, CL1a2c, and CL1a2d greatly increases, the division processing unit 10b1d4 (see FIG. 2) does not execute the division processing of the cell CL1a2 including a plurality of array-type figures.

  Therefore, according to the charged particle beam drawing apparatus 10 of the first embodiment, the cell CL1a2 (see FIGS. 9E and 10A) including a plurality of array-type figures is a plurality of array-type cells CL1a2a. , CL1a2b, CL1a2c, CL1a2d (see FIG. 9F, FIG. 13A, FIG. 13C, FIG. 14A, and FIG. 14C) The total data amount of the subsequent cells CL1a1a, CL1a1b,..., CL1c, CL1d (see FIG. 15B) is larger than the data amount of the cell CL1 before the division processing (see FIG. 15A). The increase can be avoided.

  That is, according to the charged particle beam drawing apparatus 10 of the first embodiment, the total memory capacity required for data processing in the plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 2) is increased. The useless waiting time and the total processing time in the plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 can be reduced.

  In particular, in recent years, there is a tendency that the data amount of the drawing data D1 (see FIGS. 1 and 2) input to the charged particle beam drawing apparatus 10 (see FIG. 1) increases due to reasons described later, for example. Therefore, the charged particle beam drawing apparatus 10 of the first embodiment that can reduce the wasteful waiting time and the total processing time in the plurality of data processing units while reducing the increase in the total memory capacity necessary for data processing. , Considered very effective in the future.

  The reason why the data amount of the drawing data D1 (see FIGS. 1 and 2) input to the charged particle beam drawing apparatus 10 (see FIG. 1) increases is, for example, that the sample M (see FIG. 1) is used as a mask. In some cases, there is an optical proximity correction (Optical Proximity Correction). The transferred image of the mask pattern has a property of deforming with respect to the mask pattern, such as corner roundness, and this property is called an optical proximity effect. In the optical proximity effect correction, the deformation of the transfer image with respect to the mask pattern is predicted, and the mask pattern is deformed in advance. Specifically, for example, when the sample M shown in FIG. 5 is used as a mask, and many patterns drawn in the drawing area DA (see FIG. 5) on the sample M are used as mask patterns (translucent areas). In addition, the degree of the optical proximity effect related to the mask pattern located near the periphery of the drawing area DA is different from the degree of the optical proximity effect related to the mask pattern located near the center of the drawing area DA.

  If figures (patterns) having the same shape are arrayed in the entire drawing area DA and the optical proximity effect is not corrected, the data amount of the figure data is, for example, FIG. The data amount is relatively small like the data amount (16 bytes) of the graphic FGA data shown in FIG. However, when the optical proximity effect is corrected, as described above, the degree of the optical proximity effect related to the mask pattern located near the periphery of the drawing area DA and the mask pattern located near the center of the drawing area DA. Since it differs from the degree of the optical proximity effect, all figures cannot be represented by array pattern data as shown in FIG. 10B, and non-array as shown in FIG. 11B. It is necessary to express it with pattern data of type (flat type). As a result, when the optical proximity effect is corrected, the entire data amount of the drawing data D1 (see FIGS. 1 and 2) is increased as compared with the case where the optical proximity effect is not corrected. For this reason, as described above, it is possible to reduce the wasteful waiting time and the total processing time in the plurality of data processing units while reducing the increase in the total memory capacity necessary for the data processing. The charged particle beam drawing apparatus 10 of the embodiment is considered to be very effective.

  In the charged particle beam drawing apparatus 10 of the first embodiment, the drawing data D1 (see FIG. 2) is converted into the drawing apparatus internal format data D2 (see FIG. 2) by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 2). In the charged particle beam drawing apparatus 10 of the third embodiment, the cluster processing is executed by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6. At the same time, it is also possible to execute a process of converting the drawing data D1 into the drawing apparatus internal format data D2 (refer to paragraph [0053] of Japanese Patent Laid-Open No. 2008-85248, for example, regarding the cluster division process).

  FIG. 22 is a diagram for explaining the data processing module 10b1j of the charged particle beam drawing apparatus 10 according to the fourth embodiment. In the charged particle beam drawing apparatus 10 of the first embodiment, the drawing data D1 (see FIG. 2) is converted into drawing apparatus internal format data D2 (see FIG. 2) by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 2). In the charged particle beam drawing apparatus 10 of the fourth embodiment, the drawing data D1 is stored in the drawing apparatus by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6. A process of converting to the format data D2 is executed, and a shot division process as shown in FIG. 7 is executed by the data processing units 10b1j1, 10b1j2, 10b1j3, 10b1j4, 10b1j5, and 10b1j6 (see FIG. 22). The number of shots in the live frames STR1, STR2, STR3, STR4, STR5, and STR6 (see FIG. 5) is calculated. Based on the number of shots and the like, the charged particle beam 10a1b (see FIG. 5) uses the stripe frames STR1, STR2. , STR3, STR4, STR5, STR6, the moving speed of the movable stage 10a2a (see FIG. 1) when a pattern is drawn is calculated (for example, paragraph [0009] of Japanese Patent Laid-Open No. 2000-21747) reference).

  In the charged particle beam drawing apparatus 10 of the fourth embodiment, the cells CL1a1a, CL1a1b,... Generated by the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 22) and the cell redefinition unit 10b1d2 (see FIG. 22). The cells CL1a1a, CL1a1b,..., CL3g, CL3h (see FIG. 21A) are transferred to the data processing units 10b1e1, 10b1e2, 10b1e3 (see FIG. 2 and FIG. 21A) by the same method. , CL3g, and CL3h (see FIG. 21A) are distributed to the data processing units 10b1j1, 10b1j2, and 10b1j3 (see FIG. 22).

  FIG. 23 is a diagram for explaining the data processing module 10b1k and the like of the charged particle beam drawing apparatus 10 according to the fifth embodiment. In the charged particle beam drawing apparatus 10 of the first embodiment, the drawing data D1 (see FIG. 2) is converted into drawing apparatus internal format data D2 (see FIG. 2) by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 2). In the charged particle beam drawing apparatus 10 of the fifth embodiment, the drawing data D1 is stored inside the drawing apparatus by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6. Generated when the sample M (see FIG. 1) is used as a mask by the data processing units 10b1k1, 10b1k2, 10b1k3, 10b1k4, 10b1k5, and 10b1k6 (see FIG. 23) as well as the processing to convert to the format data D2. Proximity effect correction processing is performed to correct the proximity effect (see, for example, paragraph [0004] of Japanese Patent Laid-Open No. 2007-220728 regarding the proximity effect. For example, Japanese Patent Application Laid-Open No. 2007-220728 regarding the proximity effect correction processing. (See Equation 3 and Equation 4).

  In the charged particle beam drawing apparatus 10 of the fifth embodiment, the cells CL1a1a, CL1a1b, CL1a1c, CL1a1d, CL1a2,... (FIGS. 10A, 12A, 12C, and 12E) ), FIG. 12 (G) and FIG. 21 (A)), the figures FGA, FGB, FGC, FGD, FGE, FGF, FGG, FGH, FGI, FGJ,... (See FIG. 10 (A), The proximity effect correction processing for FIGS. 12A, 12C, 12E, and 12G) is performed by the data processing units 10b1k1, 10b1k2, 10b1k3, 10b1k4, 10b1k5, 10b1k6 (FIG. 23). And the corrected data is used in, for example, the shot data generation unit 10b1g (see FIG. 2).

  In the charged particle beam drawing apparatus 10 of the fifth embodiment, the cells CL1a1a, CL1a1b,... Generated by the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 23) and the cell redefinition unit 10b1d2 (see FIG. 23). The cells CL1a1a, CL1a1b,..., CL3g, CL3h (see FIG. 21A) are transferred to the data processing units 10b1e1, 10b1e2, 10b1e3 (see FIG. 2 and FIG. 21A) by the same method. , CL3g, CL3h (see FIG. 21A) are distributed to the data processing units 10b1k1, 10b1k2, 10b1k3 (see FIG. 23).

  FIG. 24 is a diagram for explaining the data processing module 10b1l and the like of the charged particle beam drawing apparatus 10 according to the sixth embodiment. In the charged particle beam drawing apparatus 10 of the first embodiment, the drawing data D1 (see FIG. 2) is converted into drawing apparatus internal format data D2 (see FIG. 2) by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 2). In the charged particle beam drawing apparatus 10 of the sixth embodiment, the drawing data D1 is stored in the drawing apparatus by the data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6. Generated when the sample M (see FIG. 1) is used as a mask by the data processing unit 10b11, 10b11, 10b11, 10b11, 10b11, 10b11, 10b116 (see FIG. 24) while the process of converting to the format data D2 is executed. A fog correction process for correcting the fog (fogging effect) is executed (for the fog (fogging effect), see, for example, paragraph [0004] of Japanese Patent Application Laid-Open No. 2007-220728. (See Formula 13 and Formula 14 in Japanese Unexamined Patent Publication No. 2007-220728).

  In the charged particle beam drawing apparatus 10 of the sixth embodiment, the target pattern corresponding to the shape of the figure FG1 (see FIG. 4) is the shape of the pattern P1 (see FIG. 6) actually drawn by fogging (fogging effect). In order to avoid deviation from the shape of the image, the fog correction processing is performed in the data processing units 10b11, 10b11, 10b11, 10b11, 10b11, 10b11 (see FIG. 24).

  Specifically, in the charged particle beam drawing apparatus 10 of the sixth embodiment, the cells CL1a1a, CL1a1b, CL1a1c, CL1a1d, CL1a2,... (FIGS. 10A, 12A, 12C, (See FIGS. 12 (E), 12 (G) and 21 (A)). The figures FGA, FGB, FGC, FGD, FGE, FGF, FGG, FGH, FGI, FGJ,. (A), FIG. 12 (A), FIG. 12 (C), FIG. 12 (E) and FIG. 12 (G)). The data corrected and performed by (see FIG. 24) is used, for example, in the shot data generation unit 10b1g (see FIG. 2).

  In the charged particle beam drawing apparatus 10 of the sixth embodiment, the cells CL1a1a, CL1a1b,... Generated by the processing by the division processing units 10b1d1, 10b1d3, 10b1d4 (see FIG. 23) and the cell redefinition unit 10b1d2 (see FIG. 23). The cells CL1a1a, CL1a1b,..., CL3g, CL3h (see FIG. 21A) are transferred to the data processing units 10b1e1, 10b1e2, 10b1e3 (see FIG. 2 and FIG. 21A) by the same method. , CL3g, and CL3h (see FIG. 21A) are distributed to the data processing units 10b11, 10b11, and 10b11 (see FIG. 24).

  FIG. 25 is a detailed view of the control computer 10b1 of the charged particle beam drawing apparatus 10 according to the seventh embodiment. In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIG. 2, the localizer 10b1b is provided with the division processing unit 10b1d4. However, in the charged particle beam drawing apparatus 10 of the seventh embodiment, instead. As shown in FIG. 25, a cell redefinition unit 10b1d6 is provided. FIG. 26 shows an example in which the cell CL1 shown in FIG. 8 is processed by the split processing units 10b1d1 and 10b1d3 and the cell redefinition units 10b1d2 and 10b1d6 of the charged particle beam drawing apparatus 10 of the seventh embodiment shown in FIG. It is.

  In the example shown in FIGS. 8 and 26A, for example, in the division processing unit 10b1d1 (see FIG. 25) of the localizer 10b1d (see FIG. 25), the size (specifically, the width dimension (see FIG. 26A) of the cell CL1. ) Horizontal dimension) or height dimension (vertical dimension in FIG. 26A)) is determined whether it is larger than a first threshold (for example, A μm). In the example shown in FIGS. 8, 26A, and 26B, the size (specifically, the width dimension (the horizontal dimension in FIG. 26A)) and the height dimension (FIG. 26A) of the cell CL1. )) Is larger than the first threshold value (A μm), so that one cell CL1 (see FIG. 26A) has four cells CL1a having a size equal to or smaller than the first threshold value (A μm). , CL1b, CL1c, and CL1d (see FIG. 26B).

  Next, in the examples shown in FIGS. 8, 26A, 26B, and 26C, for example, in the cell redefinition unit 10b1d2 (see FIG. 25) of the localizer 10b1d (see FIG. 25), Is there a cell having a data amount larger than the second threshold (for example, B megabytes) in the four cells CL1a, CL1b, CL1c, and CL1d (see FIG. 26B) having a size of one threshold (Aμm) or less? It is determined whether or not. In the examples shown in FIGS. 8, 26A, 26B, and 26C, for example, the cell CL1a having a data amount larger than the second threshold (B megabytes) (see FIG. 26B) Includes a cell CL1a2 (see FIG. 26C) including a plurality of array-type figures FGA and FGB (see FIG. 10A) and a plurality of non-array-type figures FGC, FGD, FGE, FGF, FGG, The cells are divided into cells CL1a1 (see FIG. 26C) including FGH, FGI, and FGJ (see FIG. 11A) and redefined as different cells CL1a1 and CL1a2.

  Next, in the examples illustrated in FIGS. 8, 26A, 26B, 26C, and 26D, for example, the division processing unit 10b1d3 (see FIG. 25) of the localizer 10b1d (see FIG. 25). (See FIG. 25), the size (specifically, the width dimension (the horizontal dimension in FIG. 26D)) or the height dimension of the non-array type cell CL1a1 redefined by the cell redefinition unit 10b1d2 (see FIG. 25). It is determined whether the vertical dimension in FIG. 26D is larger than a third threshold (for example, C μm). In the examples shown in FIGS. 8, 26A, 26B, 26C, 26D, and 26E, the size of the non-array type cell CL1a1 (in detail, Since the width dimension (the horizontal dimension in FIG. 26D) and the height dimension (the vertical dimension in FIG. 26D) are larger than the third threshold value (C μm), one non-array cell CL1a1 (See FIG. 26D) is divided into four non-array cells CL1a1a, CL1a1b, CL1a1c, and CL1a1d (see FIG. 26E) having a size equal to or smaller than the third threshold value (C μm).

  Next, in the example shown in FIGS. 8, 26A, 26B, 26C, 26D, and 26E, for example, the cell of the localizer 10b1d (see FIG. 25) In the redefinition unit 10b1d6 (see FIG. 25), the array type cell CL1a2 (see FIG. 10A and FIG. 26E) redefined by the cell redefinition unit 10b1d2 (see FIG. 25) has the fifth threshold value. It is determined whether or not the data amount is greater than (for example, E megabytes). In the example shown in FIGS. 8, 26A, 26B, 26C, 26D, 26E, and 26F, for example, an array type cell CL1a2 Is determined to have a data amount equal to or greater than the fifth threshold (E megabyte). As a result, the array type cell CL1a2 (see FIGS. 10A and 26E) having a data amount equal to or greater than the fifth threshold (E megabyte) has a data amount less than the fifth threshold (E megabyte). A cell CL1a2a (see FIG. 26 (F) and FIG. 27 (A)) including the first type of graphic FGA (see FIG. 10 (A) and FIG. 27 (A)) and less than the fifth threshold (E megabyte) By dividing into cells CL1a2b (see FIG. 26 (F) and FIG. 28 (A)) including the second type graphic FGB having a data amount (see FIG. 10 (A) and FIG. 28 (A)), 1 Redefined as a plurality of different cells CL1a2a, CL1a2b (see FIGS. 26 (F), 27 (A) and 28 (A)) having a data amount less than a fifth threshold (E megabyte) per cell.

  FIG. 27 is a diagram illustrating an example of an array type cell CL1a2a generated by redefining the array type cell CL1a2 in the cell redefinition unit 10b1d6. Specifically, FIG. 27A shows the relationship between the cell CL1a2a and the graphic FGA included in the cell CL1a2a, and FIG. 27B shows the pattern data of the cell CL1a2a shown in FIG. It is. In FIG. 27B, the numbers in parentheses represent the number of bytes. FIG. 28 is a diagram illustrating an example of an array type cell CL1a2b generated by redefining the array type cell CL1a2 in the cell redefinition unit 10b1d6. Specifically, FIG. 28A shows the relationship between the cell CL1a2b and the figure FGB included in the cell CL1a2b, and FIG. 28B shows the pattern data of the cell CL1a2b shown in FIG. It is. In FIG. 28B, the numbers in parentheses indicate the number of bytes.

  In the example shown in FIG. 27B, when the redefinition processing of the array type cell CL1a2 is executed by the cell redefinition unit 10b1d6 (see FIG. 25), the data amount of the array type cell CL1a2a pattern data after processing is The total is 20 bytes including the header. In the example shown in FIG. 28B, when the cell redefinition unit 10b1d6 (see FIG. 25) performs the redefinition processing of the array type cell CL1a2, the data amount of the processed array type cell CL1a2b pattern data However, the total is 20 bytes including the header. That is, in the example shown in FIGS. 10, 27, and 28, when the cell redefinition unit 10b1d6 performs the redefinition processing of the array type cell CL1a2, the pattern data of the array type cells CL1a2a and CL1a2b after the processing is executed. The total data amount is 40 bytes, which is substantially equal to the data amount (36 bytes) of the array-type cell CL1a2 pattern data before processing by the cell redefinition unit 10b1d6.

  That is, in the example shown in FIG. 26, the cell CL1 (see FIG. 26A) is processed by the division processing units 10b1d1, 10b1d3 (see FIG. 25) and the cell redefinition units 10b1d2, 10b1d6 (see FIG. 25). A cell CL1a1a (see FIG. 26F) including a non-array graphic generated by the above, a cell CL1a1b including a non-array graphic (see FIG. 26F), and a cell including a non-array graphic CL1a1c (see FIG. 26F), a cell CL1a1d (see FIG. 26F) containing a non-array graphic, a cell CL1a2a (see FIG. 26F) containing an array graphic, and an array type Cell CL1a2b (see FIG. 26F), cell CL1b (see FIG. 26F), cell CL1c (see FIG. 26F), and cell CL1d (see FIG. 26F). 26 (F) refer) and is sent to the sorting unit 10B1d5 (see FIG. 25).

  FIG. 29 shows the relationship between the data amount of the cell CL1 shown in FIG. 26A and the total data amount of the cells CL1a1a, CL1a1b, CL1a1c, CL1a1d, CL1a2a, CL1a2b, CL1b, CL1c and CL1d shown in FIG. It is the figure which showed an example. Specifically, FIG. 29A shows the data amount of the cell CL1 before the processing by the division processing units 10b1d1, 10b1d3 (see FIG. 25) and the cell redefinition units 10b1d2, 10b1d6 (see FIG. 25) is executed. FIG. 29B shows the cells CL1a1a, CL1a1b, CL1a1c, CL1a1d, and CL1a2a after the processing by the division processing units 10b1d1, 10b1d3 (see FIG. 25) and the cell redefinition units 10b1d2, 10b1d6 (see FIG. 25). , CL1a2b, CL1b, CL1c, and CL1d.

  30, the data of the cells CL1, CL2, and CL3 shown in FIG. 8 are processed by the division processing units 10b1d1 and 10b1d3 and the cell redefinition units 10b1d2 and 10b1d6 of the charged particle beam drawing apparatus 10 of the seventh embodiment, and the distribution unit 10b1d5. FIG. 6 is a diagram illustrating an example in which data processing is performed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3 of the data processing module 10b1e. Specifically, FIG. 30A shows that the data in the cells CL1, CL2, and CL3 shown in FIG. Processed by the definition units 10b1d2 and 10b1d6 (see FIG. 25), sorted by the sorting unit 10b1d5 (see FIG. 25), and by the data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 25) of the data processing module 10b1e (see FIG. 25). It is the figure which showed an example by which data processing is performed in parallel. FIG. 30B shows a distribution unit 10b1d5 (see FIG. 25) of a conventional charged particle beam drawing apparatus in which the division processing units 10b1d1, 10b1d3 (see FIG. 25) and the cell redefinition units 10b1d2, 10b1d6 (see FIG. 25) are not provided. ) Are processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3 (see FIG. 25) of the data processing module 10b1e (see FIG. 25). It is the figure which showed an example.

  In the example shown in FIG. 30A, the cell CL2a2 (see FIG. 16) including a plurality of types of array-type figures redefined by the cell redefinition unit 10b1d2 (see FIG. 25), and the fifth threshold ( For example, a cell CL2a2 having a data amount equal to or larger than E megabyte) includes a cell CL2a2a (see FIG. 25) including a predetermined type of graphic having a data amount less than the fifth threshold (E megabyte) by the cell redefinition unit 10b1d6 (see FIG. 25). 30 (A)) and a cell CL2a2b having a data amount less than the fifth threshold value (E megabyte) (see FIG. 30A), which includes a graphic of a type different from the type of graphic included in the cell CL2a2a. (Ref.) And redefined.

  In the example shown in FIG. 30A, a cell CL3a2 (see FIG. 18) including a plurality of types of array-type figures redefined by the cell redefinition unit 10b1d2 (see FIG. 25), A cell CL3a2 having a data amount equal to or greater than a threshold (for example, E megabytes) includes a cell CL3a2a including a predetermined type of graphic having a data amount less than a fifth threshold (E megabyte) by the cell redefinition unit 10b1d6 (see FIG. 25). (Refer to FIG. 30A) and a cell CL3a2b (FIG. 30 (FIG. 30) that includes a graphic of a type different from the type of graphic included in the cell CL3a2a and has a data amount less than the fifth threshold (E megabyte). A) see) and redefined.

  Furthermore, in the example shown in FIG. 30A, a cell CL3b2 (see FIG. 18) including a plurality of types of array-type figures redefined by the cell redefinition unit 10b1d2 (see FIG. 25), A cell CL3b2 having a data amount equal to or greater than a threshold (for example, E megabytes) includes a cell CL3b2a including a predetermined type of graphic having a data amount less than a fifth threshold (E megabyte) by the cell redefinition unit 10b1d6 (see FIG. 25). (Refer to FIG. 30A) and a cell CL3b2b (FIG. 30 (FIG. 30) that includes a graphic type different from the graphic type included in the cell CL3b2a and has a data amount less than the fifth threshold (E megabytes). A) see)) and redefined.

  In the example shown in FIG. 30A, a cell CL3c2 (see FIG. 18) including a plurality of types of array-type figures redefined by the cell redefinition unit 10b1d2 (see FIG. 25), A cell CL3c2 having a data amount equal to or greater than a threshold (for example, E megabytes) is included in the cell CL3c2a including a predetermined type of graphic having a data amount less than the fifth threshold (E megabyte) by the cell redefinition unit 10b1d6 (see FIG. 25). (Refer to FIG. 30A) and a cell CL3c2b (FIG. 30 (FIG. 30) that includes a graphic type different from the graphic type included in the cell CL3c2a and has a data amount less than the fifth threshold value (E megabyte). A) see)) and redefined.

  In FIG. 30A, at time t0 to time tA, the data processing units 10b1e1, 10b1e2, and 10b1e3 process the data in the cells CL1, CL2, and CL3 in parallel in the charged particle beam drawing apparatus 10 of the seventh embodiment. It shows the total processing time required to be performed. In the example shown in FIG. 30A, the data of the cells CL1, CL2, and CL3 are processed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3 in the charged particle beam drawing apparatus 10 of the seventh embodiment. The total processing time t0 to time tA required is that the data of the cells CL1, CL2, CL3 is processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3 in the charged particle beam drawing apparatus 10 of the first embodiment. Is substantially equal to the total processing time t0 to time tA (see FIG. 21A) required for the processing.

  In FIG. 30A, at time ΔtA, the data of the cells CL1, CL2, CL3 is processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3 in the charged particle beam drawing apparatus 10 of the seventh embodiment. In this case, useless waiting time (idle time) of the data processing units 10b1e2 and 10b1e3 is shown. In the example shown in FIG. 30A, in the charged particle beam drawing apparatus 10 of the seventh embodiment, data in the cells CL1, CL2, CL3 is processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3. The useless waiting time ΔtA of the data processing units 10b1e2 and 10b1e3 is determined by the data processing units 10b1e1, 10b1e2, and 10b1e3 in parallel with the data of the cells CL1, CL2, and CL3 in the charged particle beam drawing apparatus 10 of the first embodiment. This is almost equal to the useless waiting time ΔtA (see FIG. 21A) of the data processing units 10b1e2 and 10b1e3 when processed.

  In the charged particle beam drawing apparatus 10 of the seventh embodiment, the data amount of each of the cells CL1a1a, CL1a1b,..., CL3g, CL3h (see FIG. 30A) is small and preferably, roughly A plurality of cells CL1a1a, CL1a1b,..., CL3g, after the processing by the division processing units 10b1d1, 10b1d3 (see FIG. 25) and the cell redefining units 10b1d2, 10b1d6 (see FIG. 25) are performed so as to be uniform. CL3h is distributed to a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 25), and data processing is performed in parallel by the plurality of data processing units 10b1e1, 10b1e2, and 10b1e3.

  Therefore, according to the charged particle beam drawing apparatus 10 of the seventh exemplary embodiment, a plurality of cells CL1, CL2, CL3 (see FIG. 30B) having a large data amount include a plurality of data processing units 10b1e1, 10b1e2, 10b1e3. Compared to the conventional charged particle beam drawing apparatus that is distributed (see FIG. 25) and processed in parallel by a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3, a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 25). ) Can be reduced (time ΔtA ← time ΔtB) (see FIG. 30) and total processing time (time t0 to time tA ← time t0 to time tB) (see FIG. 30).

  Furthermore, in the charged particle beam drawing apparatus 10 of the seventh embodiment, a cell CL1a2 (see FIGS. 9E and 10A) including a plurality of array-type figures is replaced with a plurality of array-type cells CL1a2a and CL1a2b. , CL1a2c, CL1a2d (see FIG. 9F, FIG. 13A, FIG. 13C, FIG. 14A, and FIG. 14C), a plurality of array-type cells after the division processing In view of the possibility that the total data amount of CL1a2a, CL1a2b, CL1a2c, and CL1a2d may increase significantly, it has a data amount equal to or greater than a fifth threshold value (for example, E megabytes) and includes a plurality of types of arrays Data amount of the cell CL1a2 (see FIG. 10A and FIG. 26E) is less than the fifth threshold (E megabyte) by the cell redefinition unit 10b1d6 (see FIG. 25). Have different types of different cells CL1a2a including graphics, CL1a2b (FIG 26 (F), FIG. 27 (A) and FIG. 28 (A) refer) it is redefined as.

  Therefore, according to the charged particle beam drawing apparatus 10 of the seventh embodiment, as shown in FIGS. 9E and 9F, the cell CL1a2 including a plurality of array-type figures (see FIG. 9E). ) Is divided into a plurality of array type cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d (see FIG. 9F), a plurality of cells CL1a1a, CL1a1b,..., CL1c, CL1d after the division processing It can be avoided that the total amount of data (see FIG. 29B) greatly increases compared to the amount of data in the cell CL1 before division processing (see FIG. 29A).

  That is, according to the charged particle beam drawing apparatus 10 of the seventh embodiment, the total memory capacity required for data processing in the plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 25) is increased. The useless waiting time and the total processing time in the plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6 can be reduced.

  FIG. 31 is a detailed view of the control computer 10b1 of the charged particle beam drawing apparatus 10 according to the eighth embodiment. In the charged particle beam drawing apparatus 10 of the first embodiment, as shown in FIG. 2, the cell redefinition unit 10b1d2 and the division processing units 10b1d3 and 10b1d4 are provided in the localizer 10b1b, but the charging of the eighth embodiment In the particle beam drawing apparatus 10, instead, as shown in FIG. 31, a division processing unit 10b1d7 is provided. FIG. 32 is a diagram showing an example in which the cell CL1 shown in FIG. 8 is processed by the division processing units 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of the eighth embodiment shown in FIG.

  In the example shown in FIGS. 8 and 32A, for example, in the division processing unit 10b1d1 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the size (specifically, the width dimension (see FIG. 32A) of the cell CL1. ) Horizontal dimension) or height dimension (vertical dimension in FIG. 32A)) is determined whether it is larger than a first threshold (for example, A μm). In the example shown in FIGS. 8, 32A, and 32B, the size (specifically, the width dimension (the horizontal dimension in FIG. 32A)) and the height dimension (FIG. 32A) of the cell CL1. )) Is larger than the first threshold value (Aμm), so that one cell CL1 (see FIG. 32A) has four cells CL1a having a size equal to or smaller than the first threshold value (Aμm). , CL1b, CL1c, and CL1d (see FIG. 32B).

  Next, in the example illustrated in FIGS. 8, 32A, and 32B, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the first threshold (Aμm) or less. It is determined whether or not there are cells having a data amount larger than the second threshold (for example, B megabytes) in the four cells CL1a, CL1b, CL1c, and CL1d having the size (see FIG. 32B). In the example shown in FIGS. 8, 32A, and 32B, for example, the cell CL1a (see FIG. 32B) has a data amount larger than the second threshold (B megabyte), and the cell CL1b, It is determined that CL1c and CL1d (see FIG. 32B) do not have a data amount larger than the second threshold value (B megabyte).

  Next, in the examples shown in FIGS. 8, 32A, 32B, and 32C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the second It has a data amount larger than a threshold value (B megabytes), and has a size larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 32B)) or a height dimension (FIG. 32). (B) vertical dimension)) cell CL1a (see FIG. 32B) is larger than the third threshold (for example, C μm) (specifically, the width dimension (the horizontal dimension in FIG. 32B)). ) And a height dimension (vertical direction dimension in FIG. 32B)).

  In the charged particle beam drawing apparatus 10 according to the eighth embodiment, the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31) has a data amount larger than the second threshold (B megabytes), and the third A cell CL1a having a size (specifically, a width dimension (a horizontal dimension in FIG. 32B) or a height dimension (a vertical dimension in FIG. 32B)) larger than a threshold (for example, C μm) (FIG. 32 ( B)) is larger than the third threshold value (for example, C μm) (specifically, width dimension (horizontal dimension in FIG. 32B) and height dimension (vertical dimension in FIG. 32B))) Is divided into a plurality of cells that do not have a cell, the total data amount of the plurality of cells after the division processing is a fourth threshold value D times the data amount of the cell CL1a before the division processing (see FIG. 32B) (for example, 2 times) bigger The division process is not executed, and the total data amount of the plurality of cells after the division process is a fourth threshold value D times the data amount of the cell CL1a before the division process (see FIG. 32B) (for example, (2 times) or less, the division processing is executed.

  In the example shown in FIGS. 8, 32A, 32B, and 32C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the second threshold ( B has a data amount larger than B megabytes and has a size larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 32B)) or a height dimension (FIG. 32B). Cell CL1a (see FIG. 32 (B)) having a size larger than a third threshold (for example, C μm) (specifically, width dimension (horizontal dimension in FIG. 32B)) and height. When division processing is performed on a plurality of cells having no dimension (dimension in the vertical direction in FIG. 32B), the total data amount of the plurality of cells after the division processing is the cell CL1a before the division processing (FIG. 32B). 4th threshold value D times (see) For example, the division processing is not executed.

  FIG. 33 is a diagram showing an example of the relationship between the data amount of the cell CL1 shown in FIG. 32A and the total data amount of the cells CL1a, CL1b, CL1c, and CL1d shown in FIG. Specifically, FIG. 33A shows the data amount of the cell CL1 before the processing by the division processing units 10b1d1 and 10b1d7 (see FIG. 31) is executed, and FIG. 33B shows the division processing unit 10b1d1, The total data amount of the cells CL1a, CL1b, CL1c, and CL1d after the processing by 10b1d7 (see FIG. 31) is executed is shown. FIG. 34 is a diagram showing an example in which the cell CL2 shown in FIG. 8 is processed by the division processing units 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of the eighth embodiment shown in FIG.

  In the example shown in FIGS. 8 and 34A, for example, in the division processing unit 10b1d1 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the size of the cell CL2 (specifically, the width dimension (see FIG. 34A) ) Horizontal dimension) or height dimension (vertical dimension in FIG. 34A)) is determined whether it is larger than a first threshold (for example, A μm). In the example shown in FIGS. 8, 34A, and 34B, the size (specifically, the width dimension (the horizontal dimension in FIG. 34A)) and the height dimension (FIG. 34A) of the cell CL2. )) Is larger than the first threshold value (A μm), so that one cell CL2 (see FIG. 34A) has four cells CL2a having a size equal to or smaller than the first threshold value (A μm). , CL2b, CL2c, and CL2d (see FIG. 34B).

  Next, in the example illustrated in FIGS. 8, 34A, and 34B, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the first threshold (Aμm) or less. It is determined whether or not there are cells having a data amount larger than the second threshold value (for example, B megabytes) in the four cells CL2a, CL2b, CL2c, and CL2d having the size (see FIG. 34B). In the example shown in FIGS. 8, 34A, and 34B, for example, the cell CL2a (see FIG. 34B) has a data amount larger than the second threshold (B megabytes), and the cell CL2b, It is determined that CL2c and CL2d (see FIG. 34B) do not have a data amount larger than the second threshold value (B megabyte).

  Next, in the examples shown in FIGS. 8, 34A, 34B, and 34C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the second It has a data amount larger than a threshold value (B megabytes) and is larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 34B)) or a height dimension (FIG. 34). (B) vertical dimension)) cell CL2a (see FIG. 34B) is larger than the third threshold (eg, C μm) (specifically, the width dimension (the horizontal dimension in FIG. 34B)). ) And a height dimension (vertical dimension in FIG. 34B)) are examined.

  In the charged particle beam drawing apparatus 10 of the eighth embodiment, the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31) has a data amount larger than the second threshold (B megabytes), and the third A cell CL2a having a size (specifically, a width dimension (a horizontal dimension in FIG. 34B) or a height dimension (a vertical dimension in FIG. 34B)) larger than a threshold (for example, C μm) (see FIG. B)) is larger than the third threshold value (for example, C μm) (specifically, width dimension (horizontal dimension in FIG. 34B) and height dimension (vertical dimension in FIG. 34B))) Is divided into a plurality of cells CL2a1, CL2a2, CL2a3, CL2a4 (see FIG. 34C), a plurality of cells CL2a1, CL2a2, CL2a3, CL2a4 after the division processing Is greater than a fourth threshold value D times (for example, twice) the data amount of the cell CL2a (see FIG. 34B) before the division process, the division process is not executed and the division process is performed. When the total data amount of the subsequent cells CL2a1, CL2a2, CL2a3, CL2a4 is equal to or less than a fourth threshold value D (for example, twice) the data amount of the cell CL2a (see FIG. 34B) before the division processing. Then, the dividing process is executed.

  In the example shown in FIG. 8, FIG. 34 (A), FIG. 34 (B) and FIG. 34 (C), for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), B having a data amount larger than B megabytes and having a size larger than a third threshold (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 34B) or a height dimension (FIG. 34B)). Cell CL2a (see FIG. 34 (B)) having a size (specifically, width dimension (horizontal dimension in FIG. 34 (B)) and height larger than a third threshold (for example, C μm). When division processing is performed into a plurality of cells CL2a1, CL2a2, CL2a3, CL2a4 (see FIG. 34C) that do not have dimensions (the vertical dimension in FIG. 34B), the plurality of cells CL2a1, CL2a2 after the division processing , CL2a3, CL2a4 (see FIG. 34C) is determined to be less than or equal to a fourth threshold value D (for example, twice) the data amount of the cell CL2a (see FIG. 34B) before the division processing. Then, the dividing process is executed.

  FIG. 35 shows an example of the relationship between the data amount of the cell CL2 shown in FIG. 34A and the total data amount of the cells CL2a1, CL2a2, CL2a3, CL2a4, CL2b, CL2c, and CL2d shown in FIG. It is a figure. Specifically, FIG. 35A shows the data amount of the cell CL2 before the processing by the division processing units 10b1d1 and 10b1d7 (see FIG. 31) is executed, and FIG. 35B shows the division processing unit 10b1d1, FIG. The total data amount of the cells CL2a1, CL2a2, CL2a3, CL2a4, CL2b, CL2c, and CL2d after the process by 10b1d7 (see FIG. 31) is executed is shown. FIG. 36 is a diagram showing an example in which the cell CL3 shown in FIG. 8 is processed by the division processing units 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of the eighth embodiment shown in FIG.

  In the example shown in FIGS. 8 and 36A, for example, in the division processing unit 10b1d1 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the size of the cell CL3 (specifically, the width dimension (see FIG. 36A) ) Horizontal dimension) or height dimension (vertical dimension in FIG. 36A)) is determined whether it is larger than a first threshold (for example, A μm). In the example shown in FIGS. 8, 36A, and 36B, the size (specifically, the width dimension (the horizontal dimension in FIG. 36A)) and the height dimension (FIG. 36A) of the cell CL3. )) Is larger than the first threshold value (Aμm), so that one cell CL3 (see FIG. 36A) has eight cells CL3a having a size equal to or smaller than the first threshold value (Aμm). , CL3b, CL3c, CL3d, CL3e, CL3f, CL3g, and CL3h (see FIG. 36B).

  Next, in the example illustrated in FIGS. 8, 36A, and 36B, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the first threshold value (Aμm) or less. Eight cells having sizes CL3a, CL3b, CL3c, CL3d, CL3e, CL3f, CL3g, and CL3h (see FIG. 36B) have cells having a data amount larger than the second threshold (for example, B megabytes). It is determined whether or not. In the example shown in FIGS. 8, 36A, and 36B, for example, the cells CL3a, CL3b, and CL3c (see FIG. 36B) have a data amount larger than the second threshold (B megabytes). Then, it is determined that the cells CL3d, CL3e, CL3f, CL3g, and CL3h (see FIG. 36B) do not have a data amount larger than the second threshold (B megabytes).

  Next, in the examples illustrated in FIGS. 8, 36A, 36B, and 36C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the second It has a data amount larger than a threshold value (B megabytes), and has a size larger than a third threshold value (for example, C μm) (specifically, width dimension (horizontal dimension in FIG. 36B)) or height dimension (FIG. 36). The cell CL3a, CL3b, CL3c (see FIG. 36B) having a size (refer to FIG. 36B) is larger than the third threshold (for example, C μm) (specifically, the width dimension (FIG. 36B)). Whether or not to divide into a plurality of cells having no vertical dimension) and a height dimension (vertical dimension in FIG. 36B).

  In the charged particle beam drawing apparatus 10 of the eighth embodiment, the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31) has a data amount larger than the second threshold (B megabytes), and the third Cells CL3a, CL3b, CL3c having a size (specifically, a width dimension (horizontal dimension in FIG. 36B) or a height dimension (vertical dimension in FIG. 36B)) larger than a threshold (for example, C μm). (See FIG. 36B) is larger than the third threshold (for example, C μm) (specifically, the width dimension (the horizontal dimension in FIG. 36B)) and the height dimension (the upper and lower sides in FIG. 36B). When division processing is performed into a plurality of cells having no direction dimension)), the total data amount of the plurality of cells after the division processing is the data amount of the cells CL3a, CL3b, CL3c (see FIG. 36B) before the division processing. Is greater than the fourth threshold value D times (for example, twice), the division process is not executed, and the total data amount of the plurality of cells after the division process is the cells CL3a, CL3b, CL3c before the division process (see FIG. When the data amount is equal to or less than the fourth threshold value D times (for example, twice) of the data amount of 36 (B)), the division processing is executed.

  Specifically, in the examples shown in FIGS. 8, 36A, 36B, and 36C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), It has a data amount larger than the second threshold value (B megabyte) and is larger than the third threshold value (for example, C μm) (specifically, the width dimension (the horizontal dimension in FIG. 36B)) or the height dimension (FIG. 36). (B) vertical dimension)) cell CL3a (see FIG. 36B) is larger than the third threshold (for example, C μm) (specifically, the width dimension (the horizontal dimension in FIG. 36B)). ) And the height dimension (vertical direction dimension in FIG. 36B)), the total data amount of the plurality of cells after the division process is the cell CL3a (FIG. No. 36 (B)) It is determined that the threshold value is larger than D times (for example, twice), and the dividing process is not executed.

  Also, in the examples shown in FIGS. 8, 36A, 36B, and 36C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the second It has a data amount larger than a threshold value (B megabytes), and has a size larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 36B)) or a height dimension (FIG. 36B )) Cell CL3b (see FIG. 36B) having a size larger than a third threshold (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 36B)) and When division processing is performed on a plurality of cells having no height dimension (the vertical dimension in FIG. 36B), the total data amount of the plurality of cells after the division processing is the cell CL3b before the division processing (FIG. 36 ( The fourth threshold value of the data amount in (B) It is determined that the value is larger than D times (for example, twice), and the dividing process is not executed.

  Furthermore, in the examples shown in FIGS. 8, 36A, 36B, and 36C, for example, in the division processing unit 10b1d7 (see FIG. 31) of the localizer 10b1d (see FIG. 31), the second It has a data amount larger than a threshold value (B megabytes), and has a size larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 36B)) or a height dimension (FIG. 36B )) Cell CL3c (see FIG. 36B) having a size larger than a third threshold (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 36B)) and When division processing is performed into a plurality of cells CL3c1, CL3c2, CL3c3, and CL3c4 (see FIG. 36C) having no height dimension (the vertical dimension in FIG. 36B), a plurality of cells CL3c1 after the division processing are performed. , CL When the total data amount of 3c2, CL3c3, CL3c4 (see FIG. 36C) is equal to or less than a fourth threshold value D times (for example, twice) the data amount of the cell CL3c (see FIG. 36B) before the division processing. It is determined and the dividing process is executed.

  FIG. 37 shows the total amount of data in the cell CL3 shown in FIG. 36A and the cells CL3a, CL3b, CL3c1, CL3c2, CL3c3, CL3c4, CL3d, CL3e, CL3f, CL3g and CL3h shown in FIG. It is the figure which showed an example of the relationship with quantity. Specifically, FIG. 36A shows the data amount of the cell CL3 before the processing by the division processing units 10b1d1 and 10b1d7 (see FIG. 31) is executed, and FIG. 36B shows the division processing unit 10b1d1, FIG. The total data amount of the cells CL3a, CL3b, CL3c1, CL3c2, CL3c3, CL3c4, CL3d, CL3e, CL3f, CL3g, and CL3h after the processing by 10b1d7 (see FIG. 31) is executed is shown.

  In FIG. 38, the data of the cells CL1, CL2, and CL3 shown in FIG. 8 are processed by the division processing units 10b1d1 and 10b1d7 of the charged particle beam drawing apparatus 10 of the eighth embodiment, distributed by the distribution unit 10b1d5, and the data processing module 10b1e. It is the figure which showed an example etc. in which data processing is performed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3. Specifically, in FIG. 38A, the data of the cells CL1, CL2, and CL3 shown in FIG. 8 are processed by the division processing units 10b1d1 and 10b1d7 (see FIG. 31) of the charged particle beam drawing apparatus 10 of the eighth embodiment. FIG. 5 is a diagram showing an example in which data is distributed by the distribution unit 10b1d5 (see FIG. 31) and processed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 31) of the data processing module 10b1e (see FIG. 31). is there. FIG. 38B shows cells CL1, CL2, CL3 (see FIG. 31) sorted by a sorting unit 10b1d5 (see FIG. 31) of a conventional charged particle beam drawing apparatus that is not provided with the split processing units 10b1d1, 10b1d7 (see FIG. 31). 8) is a diagram illustrating an example in which data processing is performed in parallel by the data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 31) of the data processing module 10b1e (see FIG. 31).

  In FIG. 38A, at time t0 to time tA, data of cells CL1, CL2, CL3 is processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3 in the charged particle beam drawing apparatus 10 of the eighth embodiment. It shows the total processing time required to be performed. In the example shown in FIG. 38A, for example, in the charged particle beam drawing apparatus 10 of the eighth embodiment, the data of the cells CL1, CL2, CL3 are processed in parallel by the data processing units 10b1e1, 10b1e2, 10b1e3. In this case, the useless waiting time ΔtA of the data processing units 10b1e2 and 10b1e3 becomes zero.

  In the charged particle beam drawing apparatus 10 of the eighth embodiment, the division processing units 10b1d1 and 10b1d7 are configured so that the data amount of each of the cells CL1a, CL1b,. A plurality of cells CL1a, CL1b,..., CL3g, and CL3h after the processing according to FIG. Data processing is performed in parallel by the processing units 10b1e1, 10b1e2, and 10b1e3.

  Therefore, according to the charged particle beam drawing apparatus 10 of the eighth embodiment, a plurality of cells CL1, CL2, CL3 (see FIG. 38B) having a large amount of data include a plurality of data processing units 10b1e1, 10b1e2, 10b1e3. Compared to the conventional charged particle beam drawing apparatus that is distributed (see FIG. 38) and processed in parallel by a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3, a plurality of data processing units 10b1e1, 10b1e2, and 10b1e3 (see FIG. 38). ) In a wasteful waiting time (time ΔtA ← time ΔtB) (see FIG. 38) and total processing time (time t0 to time tA ← time t0 to time tB) (see FIG. 38) can be reduced.

  Furthermore, in the charged particle beam drawing apparatus 10 of the eighth embodiment, the second threshold value does not have a size larger than the first threshold value (for example, A μm) divided by the division processing unit 10b1d1 (see FIG. 31). Cells CL1a, CL2a, CL3a, CL3b having a larger data amount (for example, B megabytes) and larger than a third threshold value (for example, C μm) (FIGS. 32B, 34B, and 36) (See (B)) is divided into a plurality of cells having a size equal to or smaller than the third threshold value (C μm), the total data amount of the plurality of cells after the division processing becomes the cells CL1a, CL2a, CL3a, When the data amount of CL3b (see FIGS. 32 (B), 34 (B), and 36 (B)) is larger than a fourth threshold value D times (for example, twice), the dividing process is executed. No.

  Therefore, according to the charged particle beam drawing apparatus 10 of the eighth embodiment, it is avoided that the total data amount of the plurality of cells after the division processing is greatly increased compared to the data amount of the cells before the division processing. can do.

  That is, according to the charged particle beam drawing apparatus 10 of the eighth embodiment, the total memory capacity required for data processing in the plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, 10b1e6 (see FIG. 31) is increased. It is possible to reduce wasteful waiting time and total processing time in the plurality of data processing units 10b1e1, 10b1e2, 10b1e3, 10b1e4, 10b1e5, and 10b1e6.

    In the ninth embodiment, the first to eighth embodiments described above can be appropriately combined.

  Hereinafter, a first embodiment of a charged particle beam drawing data creation apparatus of the present invention will be described. FIG. 39 is a schematic configuration diagram of the charged particle beam drawing data creation device 20 of the first embodiment.

  Specifically, in the charged particle beam drawing data creation device 20 of the first embodiment, for example, layout data (CAD data, design data) D0 (see FIG. 39) created by a semiconductor integrated circuit designer or the like. 4 and at least a graphic hierarchy FG (see FIG. 4) and a cell hierarchy CL (see FIG. 4), and a plurality of cells CLA, CLB, CLC, CLD,. (See FIG. 4), and each cell CLA, CLB, CLC, CLD,... (See FIG. 4) has one or more figures (patterns) FG1, FG2,. The included layout data D0 (see FIG. 39) is input to the input unit 20a (see FIG. 39).

  Next, in the charged particle beam drawing data creation device 20 according to the first embodiment, for example, in the division processing unit 20b1d1 (see FIG. 39), the division processing unit 10b1d1 (see FIG. 2) for the drawing data D1 (see FIG. 2). A process similar to the process is performed on the layout data D0 (see FIG. 39). Specifically, among a plurality of cells included in the layout data D0 (see FIG. 39) input to the input unit 20a (see FIG. 39), a size larger than a first threshold (for example, A μm) (specifically, , A cell CL1 (see FIG. 9A) having a width dimension (a horizontal dimension in FIG. 9A) or a height dimension (a vertical dimension in FIG. 9A)) is divided into processing units 20b1d1 (FIG. 9). 39 (see Fig. 39) has a size larger than the first threshold value (Aµm) (specifically, a width dimension (a horizontal dimension in Fig. 9A) and a height dimension (a vertical dimension in Fig. 9A)). The cells are divided into a plurality of cells CL1a, CL1b, CL1c, and CL1d (see FIG. 9B).

  Next, in the charged particle beam drawing data creation device 20 of the first embodiment, for example, in the cell redefinition unit 20b1d2 (see FIG. 39), the cell redefinition unit 10b1d2 (see FIG. 2) for the drawing data D1 (see FIG. 2). A process similar to the process according to) is executed on the layout data D0 (see FIG. 39). Specifically, the size (specifically, the width dimension (the horizontal dimension in FIG. 9A)) and height larger than the first threshold (for example, A μm) divided by the division processing unit 20b1d1 (see FIG. 39). Among a plurality of cells CL1a, CL1b, CL1c, and CL1d (see FIG. 9B) that do not have dimensions (vertical dimension in FIG. 9A), the data amount is larger than the second threshold (for example, B megabytes). A cell CL1a (see FIG. 9B) having a cell CL1a2 (see FIG. 9C) including a plurality of array-type figures by a cell redefinition unit 20b1d2 (see FIG. 39) and a non-array type By dividing into cells CL1a1 (see FIG. 9C) including a plurality of figures, they are redefined as different cells CL1a1 and CL1a2 (see FIG. 9C).

  Next, in the charged particle beam drawing data creation device 20 of the first embodiment, for example, in the division processing unit 20b1d3 (see FIG. 39), the division processing unit 10b1d3 (see FIG. 2) for the drawing data D1 (see FIG. 2). A process similar to the process is performed on the layout data D0 (see FIG. 39). Specifically, the cell CL1a1 (see FIG. 9D) including a plurality of non-array-type figures redefined by the cell redefinition unit 20b1d2 (see FIG. 39), and has a third threshold (for example, C μm). A cell CL1a1 (see FIG. 9D) having a larger size (specifically, a width dimension (a horizontal dimension in FIG. 9D) or a height dimension (a vertical dimension in FIG. 9D)). The division processing unit 20b1d3 (see FIG. 39) has a size larger than the third threshold value (C μm) (specifically, the width dimension (the horizontal dimension in FIG. 9D)) and the height dimension (in FIG. 9D). Divided into a plurality of cells CL1a1a, CL1a1b, CL1a1c, and CL1a1d (see FIG. 9E) having no vertical dimension)).

  In the charged particle beam drawing data creation device 20 of the first embodiment, for example, in the division processing unit 20b1d4 (see FIG. 39), the division processing unit 10b1d4 (see FIG. 2) for the drawing data D1 (see FIG. 2). A process similar to the process is performed on the layout data D0 (see FIG. 39). Specifically, the cell CL1a2 (see FIG. 9E) including a plurality of array-type figures redefined by the cell redefinition unit 20b1d2 (see FIG. 39), and from a third threshold (for example, C μm) A cell CL1a2 (see FIG. 9E) having a large size (specifically, a width dimension (horizontal dimension in FIG. 9E) or a height dimension (vertical dimension in FIG. 9E)), A plurality of cells not having a size larger than the third threshold (C μm) (specifically, a width dimension (horizontal dimension in FIG. 9E) and a height dimension (vertical dimension in FIG. 9E)) When divided into CL1a2a, CL1a2b, CL1a2c, and CL1a2d (see FIG. 9F), the total data amount of the plurality of cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d (see FIG. 9F) after the divided processing is divided. in front The division processing unit 20b1d4 (see FIG. 39) determines whether or not the data amount of the cell CL1a2 (see FIG. 9E) exceeds the fourth threshold value D times (for example, twice).

  In the charged particle beam drawing data creation device 20 of the first embodiment, for example, the total data amount of the plurality of cells CL1a2a, CL1a2b, CL1a2c, and CL1a2d (see FIG. 9F) after the division processing is the same as that before the division processing. When the data amount of the cell CL1a2 (see FIG. 9E) is larger than the fourth threshold value D times (2 times), the division processing is not executed by the division processing unit 20b1d4 (see FIG. 39). On the other hand, the total data amount of the plurality of cells CL1a2a, CL1a2b, CL1a2c, CL1a2d (see FIG. 9F) after the division processing is the fourth data amount of the cell CL1a2 (see FIG. 9E) before the division processing. When the threshold value is D times (2 times) or less, the division processing is executed by the division processing unit 20b1d4 (see FIG. 39).

  In the example shown in FIG. 9, the size (specifically, the width dimension (the horizontal dimension in FIG. 9E) or the height dimension (the vertical dimension in FIG. 9E) larger than the third threshold (for example, C μm). ) Having a cell CL1a2 (see FIG. 9E) including a plurality of array-type figures having a size larger than the third threshold (C μm) by the division processing unit 20b1d4 (see FIG. 39). A plurality of cells CL1a2a, CL1a2b, CL1a2c, CL1a2d (see FIG. 9F) that do not have (the horizontal dimension in FIG. 9E) and the height dimension (the vertical dimension in FIG. 9E). Not divided.

  Next, in the charged particle beam drawing data creation device 20 of the first embodiment, for example, the processing by the division processing units 20b1d1, 20b1d3, 20b1d4 (see FIG. 39) and the cell redefinition unit 20b1d2 (see FIG. 39) is executed. The plurality of subsequent cells are transferred to the plurality of data conversion processing units 20b1e1, 20b1e2, 20b1e3, 20b1e4, 20b1e5, and 20b1e6 (see FIG. 39) of the data conversion processing module 20b1e (see FIG. 39) by the distribution unit 20b1d5 (see FIG. 39). Sorted.

  Next, in the charged particle beam drawing data creation device 20 of the first embodiment, for example, a plurality of data conversion processing units 20b1e1, 20b1e2, 20b1e3, 20b1e4, 20b1e5, 20b1e6 (see FIG. 39) of the data conversion processing module 20b1e (see FIG. 39). 39), the process of converting the format of the layout data D0 (see FIG. 39) into the format of the drawing data D1 (see FIG. 39) is executed in parallel.

  Next, in the charged particle beam drawing data creation device 20 of the first embodiment, for example, a plurality of data conversion processing units 20b1e1, 20b1e2, 20b1e3, 20b1e4, 20b1e5, 20b1e6 (see FIG. 39) of the data conversion processing module 20b1e (see FIG. 39). 39), the drawing data D1 (see FIG. 39) for the charged particle beam drawing apparatus 10 (see FIG. 1) created by the data conversion process is output via the output unit 20c (see FIG. 39).

  FIG. 40 is a schematic configuration diagram of the charged particle beam drawing data creation device 20 of the second embodiment. In the charged particle beam drawing data creation device 20 of the first embodiment, as shown in FIG. 39, a division processing unit 20b1d4 is provided. However, in the charged particle beam drawing data creation device 20 of the second embodiment, Instead, as shown in FIG. 40, a cell redefinition unit 20b1d6 is provided.

  In the charged particle beam drawing data creation device 20 of the second embodiment, for example, in the cell redefinition unit 20b1d6 (see FIG. 40), the cell redefinition unit 10b1d6 (see FIG. 25) for the drawing data D1 (see FIG. 25). A process similar to the process is performed on the layout data D0 (see FIG. 40). Specifically, the cell CL1a2 (see FIG. 26E) including a plurality of array-type figures redefined by the cell redefinition unit 20b1d2 (see FIG. 40), and having a fifth threshold (for example, E megabyte) The cell CL1a2 (see FIG. 26E) having the above data amount has at least the first type of data having a data amount less than the fifth threshold (E megabyte) by the cell redefinition unit 20b1d6 (see FIG. 40). A cell CL1a2a (see FIGS. 26 (F) and 27 (A)) including a graphic FGA (see FIG. 27 (A)) and a second type of graphic FGB having a data amount less than a fifth threshold (E megabyte) (See FIG. 28 (A)), which is divided into cells CL1a2b (see FIG. 26 (F) and FIG. 28 (A)) and having different amounts of data less than the fifth threshold (E megabyte) per cell. A plurality of cells CL1a2a, are redefined as CL1a2b (see FIG. 26 (F)).

  FIG. 41 is a schematic configuration diagram of the charged particle beam drawing data creation apparatus 20 of the third embodiment. In the charged particle beam drawing data creation device 20 of the first embodiment, as shown in FIG. 39, the division processing units 20b1d3 and 20b1d4 and the cell redefinition unit 20b1d2 are provided. However, the charged particles of the third embodiment are provided. Instead, in the beam drawing data creation device 20, as shown in FIG. 41, a division processing unit 20b1d7 is provided.

  In the charged particle beam drawing data creation device 20 of the third embodiment, for example, in the division processing unit 20b1d7 (see FIG. 41), the processing by the division processing unit 10b1d7 (see FIG. 31) for the drawing data D1 (see FIG. 31) is performed. Similar processing is performed on the layout data D0 (see FIG. 41). Specifically, in the division processing unit 20b1d7 (see FIG. 41), the four cells CL1a, CL1b, CL1c, CL1d (see FIG. 32B) having a size equal to or smaller than the first threshold (A μm) are transferred to the second cell. It is determined whether there is a cell having a data amount greater than a threshold (eg, B megabytes). In the example shown in FIGS. 32A, 32B, and 41, for example, the cell CL1a (see FIG. 32B) has a data amount larger than the second threshold (B megabyte), and the cell CL1b, It is determined that CL1c and CL1d (see FIG. 32B) do not have a data amount larger than the second threshold value (B megabyte).

  Next, in the examples illustrated in FIGS. 32A, 32B, 32C, and 41, for example, in the division processing unit 20b1d7 (see FIG. 41), data that is larger than the second threshold (B megabytes). And a size larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 32B) or a height dimension (vertical dimension in FIG. 32B)). ) Cell CL1a (see FIG. 32B) has a size (specifically, a width dimension (horizontal dimension in FIG. 32B)) and a height dimension (FIG. 32) larger than a third threshold (for example, C μm). It is examined whether or not to divide into a plurality of cells that do not have (B) vertical dimension)).

  In the charged particle beam drawing data creation device 20 of the third embodiment, the division processing unit 20b1d7 (see FIG. 41) has a data amount larger than the second threshold value (B megabytes), and from the third threshold value (for example, C μm). A cell CL1a (see FIG. 32B) having a large size (specifically, a width dimension (a horizontal dimension in FIG. 32B) or a height dimension (a vertical dimension in FIG. 32B)), A plurality of sizes that do not have a size larger than the third threshold (for example, C μm) (specifically, width dimension (horizontal dimension in FIG. 32B) and height dimension (vertical dimension in FIG. 32B)). When division processing is performed on cells, the total data amount of the plurality of cells after the division processing becomes larger than a fourth threshold value D (for example, twice) the data amount of the cell CL1a before division processing (see FIG. 32B). If the split process is executed If the total data amount of the plurality of cells after the division processing is equal to or less than the fourth threshold value D times (for example, twice) the data amount of the cell CL1a (see FIG. 32B) before the division processing, Split processing is executed.

  In the example shown in FIGS. 32A, 32B, 32C, and 41, for example, in the division processing unit 20b1d7 (see FIG. 41), a data amount larger than the second threshold (B megabytes) is obtained. Cell having a size larger than a third threshold value (for example, C μm) (specifically, a width dimension (horizontal dimension in FIG. 32B) or a height dimension (vertical dimension in FIG. 32B)) CL1a (see FIG. 32B) is larger than the third threshold value (for example, C μm) (specifically, the width dimension (the horizontal dimension in FIG. 32B)) and the height dimension (in FIG. 32B). When division processing is performed on a plurality of cells having no vertical dimension)), the total data amount of the plurality of cells after the division processing is the fourth data amount of the cell CL1a (see FIG. 32B) before the division processing. It is determined that the threshold value is greater than D times (for example, twice), The division process is not executed.

DESCRIPTION OF SYMBOLS 10 Charged particle beam drawing apparatus 10a Drawing part 10a1a Charged particle gun 10a1b Charged particle beam 10a1c, 10a1d Deflector 10a1e, 10a1f Deflector 10a2a Movable stage 10b Control part 10b1 Control computer 10b1a Reading module 10b1b Input buffer 10b1b Input buffer 10b1b Row processing management module 10b1d , 10b1d3 Division processing unit 10b1d4, 10b1d7 Division processing unit 10b1d2, 10b1d6 Cell redefinition unit 10b1d5 Distribution unit 10b1e Data processing module 10b1e1, 10b1e2 Data processing unit 10b1e3, 10b1e4 Data processing unit 10b1e5, 10b1e6 Data processing unit 10b1e6 Data processing unit 10b1f Part 10b1h deflection control part 10b i stage controller 10b2,10b3 deflection control circuit 10b4,10b5 deflection control circuit 10b6 stage control circuit

Claims (5)

An input unit that is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and is input with drawing data including one or more graphics in each cell;
A first division process of dividing a cell having a size larger than a first threshold among a plurality of cells included in the drawing data input to the input unit into a plurality of cells having a size equal to or smaller than the first threshold. And
Among the cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold are classified into cells including a plurality of array-type figures, and non-array-type A first cell redefinition unit for redefining as a plurality of different cells by dividing into a cell containing a graphic;
Among a plurality of cells including a plurality of non-arrayed figures redefined by the first cell redefinition unit, a cell having a size larger than a third threshold is changed to a plurality of cells having a size equal to or smaller than a third threshold. A second split processing unit for split processing;
A distribution unit that distributes a plurality of cells after processing by the first division processing unit, the first cell redefinition unit, and the second division processing unit to a plurality of data processing units;
A data processing module having a plurality of data processing units for processing data in parallel on the plurality of cells distributed by the distribution unit;
A charged particle beam drawing apparatus comprising: a drawing unit that draws a pattern corresponding to a figure included in drawing data in a drawing region on a sample by a charged particle beam. Dividing a cell having a size larger than a third threshold out of cells including a plurality of array-type figures redefined by the first cell redefinition unit into a plurality of cells having a size equal to or smaller than a third threshold When the total data amount of the plurality of cells after the division processing is larger than the fourth threshold value times the data amount of the cells before the division processing,
Of cells including a plurality of array-type figures redefined by the first cell redefinition unit, a cell having a size larger than a third threshold is divided into a plurality of cells having a size equal to or smaller than a third threshold. Without
Dividing a cell having a size larger than a third threshold out of cells including a plurality of array-type figures redefined by the first cell redefinition unit into a plurality of cells having a size equal to or smaller than a third threshold When the total data amount of the plurality of cells after the division processing is equal to or less than the fourth threshold value times the data amount of the cells before the division processing,
Of cells including a plurality of array-type figures redefined by the first cell redefinition unit, a cell having a size larger than the third threshold is divided into a plurality of cells having a size equal to or smaller than the third threshold. The charged particle beam drawing apparatus according to claim 1, further comprising a third division processing unit. An input unit that is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and is input with drawing data including one or more graphics in each cell;
A first division process of dividing a cell having a size larger than a first threshold among a plurality of cells included in the drawing data input to the input unit into a plurality of cells having a size equal to or smaller than the first threshold. And
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. When division processing into a plurality of cells having the following sizes, when the total data amount of the plurality of cells after the division processing is larger than the fourth threshold times the data amount of the cells before the division processing,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. Do not split into multiple cells with the following sizes,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. When division processing into a plurality of cells having the following sizes, when the total data amount of the plurality of cells after the division processing is less than or equal to the fourth threshold times the data amount of the cells before the division processing,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. A second division processing unit for performing division processing into a plurality of cells having the following sizes;
A distribution unit that distributes a plurality of cells after the division processing by the first division processing unit and the second division processing unit to a plurality of data processing units;
A data processing module having a plurality of data processing units for processing data in parallel on the plurality of cells distributed by the distribution unit;
A charged particle beam drawing apparatus comprising: a drawing unit that draws a pattern corresponding to a figure included in drawing data in a drawing region on a sample by a charged particle beam. An input unit that is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and each cell includes layout data including one or more graphics,
A first division process of dividing a cell having a size larger than the first threshold among a plurality of cells included in the layout data input to the input unit into a plurality of cells having a size equal to or smaller than the first threshold. And
Among the cells having a size equal to or smaller than the first threshold divided by the first division processing unit, cells having a data amount larger than the second threshold are classified into cells including a plurality of array-type figures, and non-array-type A first cell redefinition unit for redefining as a plurality of different cells by dividing into cells including a plurality of figures;
Dividing a cell having a size larger than a third threshold among a plurality of non-array-type figures redefined by the first cell redefinition unit into a plurality of cells having a size equal to or smaller than a third threshold A second division processing unit,
A distribution unit that distributes a plurality of cells after processing by the first division processing unit, the first cell redefinition unit, and the second division processing unit to a plurality of data conversion processing units;
A data conversion processing module having a plurality of data conversion processing units for performing data conversion processing in parallel on a plurality of cells distributed by the distribution unit;
Charged particle beam drawing data creation comprising: an output unit for outputting drawing data for a charged particle beam drawing apparatus created by data conversion processing by a plurality of data conversion processing units of the data conversion processing module apparatus. An input unit that is hierarchized into at least a graphic hierarchy and a cell hierarchy, includes a plurality of cells, and each cell includes layout data including one or more graphics,
A first division process of dividing a cell having a size larger than the first threshold among a plurality of cells included in the layout data input to the input unit into a plurality of cells having a size equal to or smaller than the first threshold. And
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. When division processing into a plurality of cells having the following sizes, when the total data amount of the plurality of cells after the division processing is larger than the fourth threshold times the data amount of the cells before the division processing,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. Do not split into multiple cells with the following sizes,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. When division processing into a plurality of cells having the following sizes, when the total data amount of the plurality of cells after the division processing is less than or equal to the fourth threshold times the data amount of the cells before the division processing,
Among cells having a size equal to or smaller than the first threshold divided by the first division processing unit, a cell having a data amount larger than the second threshold and having a size larger than the third threshold is determined as a third threshold. A second division processing unit for performing division processing into a plurality of cells having the following sizes;
A distribution unit that distributes a plurality of cells after the division processing by the first division processing unit and the second division processing unit to a plurality of data conversion processing units;
A data conversion processing module having a plurality of data conversion processing units for performing data conversion processing in parallel on a plurality of cells distributed by the distribution unit;
Charged particle beam drawing data creation comprising: an output unit for outputting drawing data for a charged particle beam drawing apparatus created by data conversion processing by a plurality of data conversion processing units of the data conversion processing module apparatus.

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