JP2011021909A5 - - Google Patents

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Publication number
JP2011021909A5
JP2011021909A5 JP2009164928A JP2009164928A JP2011021909A5 JP 2011021909 A5 JP2011021909 A5 JP 2011021909A5 JP 2009164928 A JP2009164928 A JP 2009164928A JP 2009164928 A JP2009164928 A JP 2009164928A JP 2011021909 A5 JP2011021909 A5 JP 2011021909A5
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JP
Japan
Prior art keywords
encoder scale
scale according
encoder
substrate
phase grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009164928A
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English (en)
Japanese (ja)
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JP2011021909A (ja
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Publication date
Application filed filed Critical
Priority to JP2009164928A priority Critical patent/JP2011021909A/ja
Priority claimed from JP2009164928A external-priority patent/JP2011021909A/ja
Publication of JP2011021909A publication Critical patent/JP2011021909A/ja
Publication of JP2011021909A5 publication Critical patent/JP2011021909A5/ja
Pending legal-status Critical Current

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JP2009164928A 2009-07-13 2009-07-13 エンコーダ用スケール、及びエンコーダ装置 Pending JP2011021909A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009164928A JP2011021909A (ja) 2009-07-13 2009-07-13 エンコーダ用スケール、及びエンコーダ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009164928A JP2011021909A (ja) 2009-07-13 2009-07-13 エンコーダ用スケール、及びエンコーダ装置

Publications (2)

Publication Number Publication Date
JP2011021909A JP2011021909A (ja) 2011-02-03
JP2011021909A5 true JP2011021909A5 (https=) 2012-10-04

Family

ID=43632133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009164928A Pending JP2011021909A (ja) 2009-07-13 2009-07-13 エンコーダ用スケール、及びエンコーダ装置

Country Status (1)

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JP (1) JP2011021909A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013065753A1 (ja) * 2011-10-31 2013-05-10 日本精工株式会社 トルク検出装置及び電動パワーステアリング装置
JP2014119446A (ja) * 2012-12-17 2014-06-30 Mitsutoyo Corp 光学エンコーダ用の照明部
JP6138621B2 (ja) * 2013-07-31 2017-05-31 株式会社ミツトヨ エンコーダ用スケール及びその製造方法
JP7196033B2 (ja) * 2019-07-30 2022-12-26 株式会社ミツトヨ スケールおよびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116039A (ja) * 1988-10-26 1990-04-27 Canon Inc 情報記録媒体
JPH03140823A (ja) * 1989-10-26 1991-06-14 Sony Magnescale Inc ホログラムスケール及びその製造方法
JPH0594866U (ja) * 1992-05-20 1993-12-24 株式会社トーツヤ 透明ホログラム
JP2008292406A (ja) * 2007-05-28 2008-12-04 Mitsutoyo Corp 光電式エンコーダ

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