JP2011003199A - Method, apparatus, and program for superimposing and displaying design image and picked-up image - Google Patents

Abstract

PROBLEM TO BE SOLVED: To superimpose and display an image picked up from a back side and a design image easily as well as to superimpose them by easily correcting a strain of the picked-up image having the strain and positioning it with the design image.SOLUTION: The method for superimposing and displaying the design image and the picked-up image includes: a strain correction process for correcting the strain of the picked-up image (step S2); an alignment process for adjusting a position of the design image and a position of the picked-up image (step S3); and a display process for superimposing the design image on the picked-up image so as to display them (step S1). The strain correction process includes a first strain correction process wherein the picked-up image is rotated such that a first axis parallel to a vertical axis or a horizontal axis of the design image is aligned parallel to a vertical axis or a horizontal axis of the picked-up image, and a second strain correction process wherein a second axis parallel to the first axis on the design image is indicated by the picked-up image and one of two regions divided by the first axis by fixing one point on the second axis on the picked-up image, which is on a second axis side, is moved in proportion to a distance from the first axis in a direction orthogonal to the first axis.

Description

  The present invention relates to a method for superimposing and displaying a design image obtained from design data and an actual captured image, and more particularly to a method for aligning both images, a display device, and a display program.

  Conventionally, for example, in LSI failure analysis, a failure simulator or the like is used to logically narrow down the location (logic failure candidate) that is causing the LSI failure and search for the logical failure candidate name using a layout viewer or the like. By displaying, logic failure candidates have been confirmed in the layout.

  When there is a physical abnormality in the LSI, the failure location can be physically narrowed down by an analysis device such as an emission microscope, an OBIRCH analysis device, a FIB (Field Ion Beam) device, or a SEM (Secondary Electron Microscopic) device. For example, an emission microscope can acquire an image in which a heat generation point is detected, and an OBIRCH analyzer can acquire an image in which an OBIRCH reaction is detected. The SEM apparatus and FIB apparatus can acquire an actual image of the LSI.

  If it is found that a physical abnormality location discovered by the analysis device has caused a logical abnormality, the physical abnormality location discovered there can be identified as the cause of the LSI failure. Therefore, if a layout image (design image) displaying logic failure candidates and an analysis image (photographed image) obtained by the analysis device can be simply superimposed, the failure location can be easily identified. For example, Patent Document 1 describes that alignment between a layout image and an analysis image obtained by an analysis device such as an electron beam tester is performed.

Japanese Patent Laid-Open No. 10-163283

  When analyzing and displaying an analysis image (photographed image), the analysis image is distorted compared to the actual product, such as when an analysis image perpendicular to the LSI cannot be obtained or when the image flows during shooting. There may be. For this reason, the method as described in Patent Document 1 may not be able to be aligned well. As LSI miniaturization progresses, it may become difficult to identify a failure location due to this minute misalignment or the like.

  A display method in a display device that displays a design image and a photographed image according to one aspect (side surface) of the present invention in an overlapping manner is that a quadrilateral connecting four points is a rectangle parallel to the vertical axis and the horizontal axis in the design image. Distortion that corrects the distortion of the photographed image so that the four points designated on the photographed image are the rectangles connecting the four points in the photographed image become a rectangle parallel to the vertical axis and the horizontal axis. An alignment step of aligning the position of the design image and the photographic image by performing at least one of the left and right inversion, upside down inversion, movement, rotation, enlargement, and reduction for at least one of the design image and the photographic image; and A display step of displaying the design image and the photographed image in an overlapping manner, wherein the distortion correction step is such that a first axis parallel to the vertical axis or the horizontal axis in the design image is designated on the photographed image, and the first axis Image taken so that is parallel to the vertical or horizontal axis A first distortion correction step to be rotated, and a second axis parallel to the first axis in the design image is designated on the photographed image, and the second axis is parallel to the first axis on the photographed image. 1 point in the second axis is fixed, and the region on the second axis side of the region divided by the first axis is moved in the direction orthogonal to the first axis in proportion to the distance from the first axis. A second distortion correction step is included.

  In addition, a display device that displays a design image and a photographed image according to another aspect of the present invention in an overlapping manner is a four-pointed quadrangular shape that is a rectangle parallel to the vertical and horizontal axes in the design image. A distortion correction unit that corrects the distortion of the captured image so that the four points designated on the captured image become a rectangle parallel to the vertical axis and the horizontal axis, the quadrilateral connecting the four points in the captured image; An alignment unit that aligns the position of the design image and the photographed image by performing at least one of the horizontal and vertical inversion, movement, rotation, enlargement, and reduction for at least one of the design image and the photographed image, and the design image A display unit that superimposes and displays the captured image, and the distortion correction unit is configured such that a first axis parallel to the vertical axis or the horizontal axis in the design image is designated on the captured image, and the first axis is the vertical axis or A first distortion correction unit that rotates a captured image so as to be parallel to the horizontal axis; A second axis parallel to the first axis is specified on the photographed image in the measured image, and one point in the second axis is fixed on the photographed image so that the second axis is parallel to the first axis. A second distortion correction unit configured to move a photographed image in a direction orthogonal to the first axis in a region perpendicular to the first axis in a region divided into two by the first axis in proportion to the distance from the first axis. It is out.

  Furthermore, according to another aspect of the present invention, there is provided a program in which a display device includes a computer and causes the computer to execute the display method or causes the computer to function as the display device.

  According to the present invention, with respect to the superimposed display of the design image and the photographed image, the photographed image is distorted, for example, when the photographed image is not photographed from a vertical position or when the image flows during photographing. Can be easily aligned with the design image.

It is a flowchart which shows the process sequence of the overlay display method of the design image and picked-up image of one Example of this invention. It is a block diagram at the time of comprising using the computer about the display apparatus in one Example of this invention. It is an example of correction | amendment of the picked-up image in the distortion correction process of one Example of this invention. It is an example of designation | designated of the alignment point in the position alignment process of one Example of this invention. It is an example of the superposition display of the design image and the picked-up image in one Example of this invention. It is an example of the 1st distortion correction process in one Example of this invention. It is an example of the 2nd distortion correction process in the reference example of this invention. It is an example of the 2nd distortion correction process in one Example of this invention. It is an example of the 3rd distortion correction process in the reference example of this invention. It is an example of the 3rd distortion correction process in one Example of this invention. It is an example of the 4th distortion correction process in one Example of this invention. It is an example of the cross cursor in one Example of this invention. It is another example of the cross cursor in one Example of this invention. It is another example of the cross cursor in one Example of this invention. It is an example which rotates and correct | amends in the 2nd distortion correction process in the reference example of this invention. It is an example which rotates and correct | amends in the 2nd distortion correction process in one Example of this invention. It is an example which rotates and correct | amends in the 3rd distortion correction process in the reference example of this invention.

Embodiments of the present invention will be described with reference to the drawings.
A display method in a display device that displays a design image and a captured image in an overlapped manner according to an embodiment of the present invention includes a distortion correction step of correcting distortion of the captured image, an alignment step of aligning the position of the design image and the captured image, And a display step of displaying the design image and the photographed image in an overlapping manner.

  In the distortion correcting step, the four points that form a rectangle connecting the four points are rectangles parallel to the vertical axis and the horizontal axis in the design image, and the four points designated on the photographed image are the above four points in the photographed image. This includes processing for correcting distortion of the captured image so that the quadrangular shape connecting the dots becomes a rectangle parallel to the vertical axis and the horizontal axis. The above-described processing includes, for example, processing for correcting the quadrangle ab-c-d in FIG. 3 to a quadrangle a′-b′-c′-d ′, and more specifically, disclosed in FIGS. Has been.

  In addition, the alignment process for aligning the position of the design image and the photographed image is performed by performing at least one of the design image and the photographed image by performing one or more of horizontal inversion, upside down inversion, movement, rotation, enlargement, and reduction. Processing for aligning the position of the image and the captured image is included.

  In this alignment step, from the three points designated in the design image and the three points designated in the photographed image corresponding to each, it is determined whether the photographed image is reversed with respect to the design image. When the image is reversed, the design image or the photographed image may be subjected to left / right reversal or vertical reversal to correct the front / back reversal.

  For example, when an LSI is mounted by a flip chip method, or in order to prevent the detection signal from being affected by the upper layer wiring, an analysis image may have to be acquired from the back surface of the LSI. In that case, if the layout image is turned upside down and then superimposed on the analysis image, an overlay elephant in the same direction as the image seen at the time of analysis cannot be obtained. In such a case, whether the photographed image is photographed on the front side or the back side, the design image is designated by designating three points on the design image and correspondingly designating three points on the photographed image. It is possible to automatically determine whether or not the photographed image and the photographed image are reversed, and the orientation of the design image and the photographed image can be automatically aligned. Specifically, the three points (1, 2 and 3) designated in the design image (layout image) in FIG. 4 and the three points (1 ′, 2) designated in the photographed image (analysis image) corresponding to each. '3'), it is determined whether the photographed image is reversed with respect to the design image. If it is reversed, the design image or the photographed image is reversed left and right or upside down to align the position. Can do. This alignment step may be performed automatically except for the designation of three points, but an operator may input an instruction as necessary.

  Further, the display process for displaying the design image and the photographed image in a superimposed manner displays the photographed image in which the distortion is corrected by the distortion correction process and the alignment process and the design image and the position are aligned with the design image. Includes processing. An example of the superimposed image is shown in FIG. In the peripheral part of FIG. 5, only the design image is displayed, and in the center part, the photographed image is displayed on the design image.

In addition, if the display process finally displays distortion-corrected and position-aligned images, the display process may be performed by superimposing a captured image and a design image before distortion correction and alignment. May be included. Therefore, as shown in FIG. 1, the display process may be performed prior to the distortion correction process and the position alignment process.
Hereinafter, it will be described in detail with reference to the drawings in accordance with embodiments.

[Whole process]
First, the overall processing flow of the display method in the display device that displays the design image and the photographed image in a superimposed manner according to the first embodiment of the present invention will be described. FIG. 1 is a flowchart showing a processing procedure of a display method in a display device that displays a design image and a captured image in a superimposed manner according to the first embodiment of the present invention. In FIG. 1, first, a design image and a photographed image are displayed in an overlapping manner (display step S1). At this stage, if the captured image is distorted, distortion correction of the captured image is performed (distortion correction step S2).

  In the distortion correction, as shown in FIG. 3A, a drawing before distortion correction designates four points on the photographed image in which a quadrilateral connecting the four points in the design image becomes a rectangle parallel to the vertical axis and the horizontal axis. . In the layout design of a semiconductor integrated circuit, wirings and gates are usually arranged and wired in the vertical axis and horizontal axis directions. Therefore, if the target photographic image is a photographic image of a semiconductor integrated circuit, the operator can easily recognize the direction of the vertical axis or the horizontal axis in the design image by visually confirming the wiring and gate arrangement and wiring direction. . Therefore, it is easy to designate four points on the photographed image in which a quadrilateral connecting the four points in the design image becomes a rectangle parallel to the vertical axis and the horizontal axis. In the distortion correction process, a quadrangle (a-b-c-d in FIG. 3) in which four points are designated on the photographed image is converted into a rectangle (a ′ in FIG. 3) parallel to the vertical and horizontal axes in the photographed image. -B'-c'-d ').

  Further, in addition to the distortion correction step, alignment for aligning the positions of the design image and the captured image is performed (position alignment step S3). In this position alignment, arbitrary three points (for example, “1”, “2”, “3” in FIG. 4B) that are not on one straight line on the design image (layout image) are designated. Further, three points indicating the same position as the above three points are designated on the photographed image (analysis image) (for example, “1 ′”, “2 ′”, “3 ′” in FIG. 4A). The order in which these three points are designated is the same order on the design image and the photographed image. By determining whether the order of specifying these three points is specified clockwise or counterclockwise, whether the design image and the captured image are the same or different, the front and back of the design image and the captured image are reversed. It is determined whether or not. For example, in the design image of FIG. 4B, “1”, “2”, and “3” are designated counterclockwise, whereas in the photographed image of FIG. 4A, “1 ′” “2”. Since “” and “3” are specified in the clockwise direction, it can be automatically confirmed that the front and back sides are reversed between the design image and the photographed image. In this case, either the design image or the photographed image is reversed left and right or upside down, and further position alignment is performed. From FIG. 4, the left and right sides of the photographed image are reversed, the design image or the photographed image is moved in the horizontal and vertical directions, and enlarged and reduced to match the positions of the design image and the photographed image. It should be noted that here, the result is the same if the captured image is inverted upside down and rotated 180 degrees instead of reversing the left and right of the captured image. In FIG. 5, the design image is displayed as a whole, and the photographed image is displayed so as to overlap only at the center.

  Note that the correction for aligning the front and back of the design image and the photographed image may be performed once for the design image or the photographed image once upside down or horizontally reversed. Further, in the position alignment process, in addition to aligning the front and back, it may be reversed upside down and horizontally reversed instead of rotating 180 degrees.

  Finally, the distortion of the photographed image is corrected, the design image and the photographed image are aligned, the superimposed image as shown in FIG. 5 is displayed, and the process ends.

[Use cross cursor]
In addition, in the designation of the quadrangle vertex or the correction axis in the distortion correction process and the designation of the alignment point in the position alignment process, designation is performed while displaying a cross cursor that is a line parallel to the horizontal and vertical directions of the design image. By doing so, the alignment point in a design image can be designated correctly. In addition, the alignment point of the captured image corresponding to the design image can be easily recognized. Further, when designating the correction axis, by designating the design image while displaying the horizontal and vertical cross cursors, it becomes possible to easily recognize the deviation of the correction axis from the horizontal or vertical direction.

  Some examples of cross cursors are shown in FIGS. The cross cursor is displayed as a line parallel to the vertical and horizontal axes of the design image. The cross cursor is a line such as a solid line or a dotted line, and can be changed to a color that can be easily identified. In FIG. 12, the cross cursor 12 is displayed by the intersection of a line perpendicular to the screen and a horizontal line. In FIG. 13, the cross cursor 13 is displayed by a dotted line. Furthermore, in FIG. 14, the cross cursor 14 is displayed by four arrows and points indicating their intersections.

[Details of distortion correction]
Next, details of the distortion correction will be described with reference to FIGS. 6 to 11 and FIGS. 15 to 17. The distortion correction process of this embodiment is composed of a maximum of four axis correction processes. In each axis correction process, two points of the photographed image are first designated, and a straight line passing through these two points is used as a correction axis. Further, distortion correction is performed by rotating and moving the correction axis so as to be parallel to the vertical or horizontal axis of the design image.

(First distortion correction step)
In the first axis correction, as shown in FIG. 6, the photographed image is rotated so that the correction axis 5 is vertical or horizontal around one point in a straight line passing through two designated points. The two points are specified by looking at the photographed image and specifying two points that are in a horizontal or vertical positional relationship on the design image with a cross cursor. When the captured image is an LSI layout pattern, two points that are in a horizontal or vertical positional relationship on the design image can be easily recognized from the arrangement of wirings and gates. If there is no distortion in the photographed image, the distortion correction process can be completed only by the first distortion correction process.

(Second distortion correction step)
In the second axis correction, when the second correction axis (hereinafter referred to as the second axis) intersects with the first correction axis (hereinafter referred to as the first axis) in the captured image, FIG. As shown in the figure, the photographic image is translated and moved in a direction parallel to the first axis 5 so that the second axis 6 is orthogonal to the first axis 5 around the intersection g of the first axis 5 and the second axis 6. Rotate the captured image.

  In the case of translation, all the captured images are moved in a direction parallel to the first axis so that the second axis 6 is orthogonal to the first axis 5. The distance to translate is proportional to the distance from the first axis, as can be easily understood from FIG.

  The case where the captured image is rotated so that the second axis 6 is orthogonal to the first axis 5 will be described with reference to FIG. The angle at which the second axis is rotated in order to be orthogonal to the first axis 5 around the intersection g between the first axis 5 and the second axis 6 is defined as θ. Further, regarding the coordinates of each point of the photographed image, the angle from the first axis of each point when expressed in polar coordinates with the g axis as the center and the direction of the first axis being 0 ° is α. Then, each point of the photographed image is rotated by α * θ / (90 ° + θ) around the point g. That is, in FIG. 15, the points b and c are rotated to the points b 'and c'.

  Note that the coordinates of the photographic image after correction are not exactly the same between the case of translation and the case of rotation, but if the distortion is not large, the difference is not a practical problem. In addition, for example, it may be possible to select one in the initial setting of the display device and select the other as an option for the translation or the rotation. It is also possible to use both translation and rotation, rotate half the angle for rotating the second axis, and translate the other half.

  Next, when the second axis 6 does not intersect the first axis 5 in the photographed image, as shown in FIG. 8, the first axis among the intersections i and h of the boundary between the second axis 6 and the photographed image. The first axis so that the second axis and the first axis are parallel to the area on the second axis 6 side of the area divided by the first axis 5 with the intersection h at a distance as the center. The captured image is moved in an orthogonal direction by an amount proportional to the distance from the first axis. Further, the amount of movement is also proportional to the distance from the perpendicular drawn from the intersection h to the first axis 5. As a result, among the regions divided by the first axis 5, the region on the second axis 6 side is compressed or expanded in a direction perpendicular to the first axis 5 in proportion to the distance from the perpendicular. .

In addition, when the second axis 6 does not intersect the first axis 5 in the photographic image, the movement of the photographic image is also centered on the point h instead of being translated in a direction perpendicular to the first axis. It is also possible to rotate. This rotational movement will be described with reference to FIG. First, let θ be the angle at which the second axis 6 is rotated about the point h until it is parallel to the first axis 5. Next, polar coordinates centered on the point h are considered for each point of the captured image. Let us consider a circle centered on point h with a distance from point h to point x as a radius, assuming that the point to be moved on the captured image is point x. The intersection of this circle and the first axis 5 is x ″. Then, the angle of rotation about the point x around the point h is
∠xhx ′ = θ · ∠xhx ″ / ∠ahx ″ (1) Note that ∠xhx ′ is a movement angle around the h point of the x point. Further, ∠xhx ″ is an angle formed by a straight line connecting the x point and the h point and a straight line connecting the x ″ point and the h point. Further, ∠ahx ″ is an angle formed between the second axis 6 and a straight line connecting the points x ″ and h.

  When a point to be moved on the photographed image (assumed to be y point) is close to h point and a circle whose radius is the distance to y point with h point as the center does not intersect with first axis 5 In the equation (1), the calculation may be performed by replacing the x ″ point with the intersection (y ″ in FIG. 16) between the boundary of the captured image and the first axis.

  In the above case, as in the case where the second axis and the first axis intersect, the translation and rotation can be arbitrarily selected, or both can be used in combination.

  The second axis is also designated by designating an axis that is orthogonal or parallel to the first axis in the design image using a cross cursor on the photographed image. When the second axial correction described above has a distortion that does not cause a practical problem, the distortion correction can be completed by the second axial correction.

(Third distortion correction process case 1: the third axis is orthogonal to the first and second axes)
In the third axis correction, when the first axis 5 and the second axis 6 are parallel, as shown in FIG. 10, the third correction axis 7 (hereinafter referred to as the third axis) and the first axis 5 ( Alternatively, the captured image is translated in a direction parallel to the first axis 5 so that the third axis 7 is orthogonal to the first axis 5 (or the second axis 6) around the intersection j of the second axis 6). . Here, whether the intersection point j between the third axis 7 and the first axis 5 or the intersection point between the third axis 7 and the second axis 6 is selected can be arbitrarily selected. The operator may select it, or the display device may select it automatically. In the third axial correction, it is possible to rotate in place of the parallel movement or in combination with the parallel movement. In the case of rotation, in FIG. 10, a photographed image in a region sandwiched between the first axis 5 and the second axis 6 may be rotated around the intersection j between the first axis 5 and the third axis 7.

(Third distortion correction process case 2: the third axis is parallel to one of the first and second axes and orthogonal to the other)
If the first axis 5 and the second axis 6 are orthogonal in the third axis correction, and the third axis 7 and the first axis 5 (or the second axis 6) intersect in the captured image, FIG. As shown in FIG. 3, the third axis of the region divided by the second axis 6 (or the first axis 5) about the intersection k between the third axis 7 and the first axis 5 (or the second axis 6) is the third axis. In the direction orthogonal to the second axis 6 (or the first axis 5), the third axis 7 and the second axis 6 (or the first axis 5) are parallel to the region on the 7 side. The photographed image is moved by an amount proportional to the distance from the two axes 6 (or the first axis 5). At this time, among the regions divided by the second shaft 6, the region on the third shaft 7 side is compressed or expanded in a direction orthogonal to the second shaft.

  In addition, when rotating a picked-up image in this case, about the area | region on the 3rd axis side among the area | regions divided by the axis | shaft parallel to a 3rd axis | shaft among a 1st axis | shaft and a 2nd axis | shaft, it is 1st. Of the axis and the second axis, the photographed image is rotated around the intersection of the third axis and the axis orthogonal to the third axis. Here, the rotation of the captured image will be described in more detail with reference to the drawings. FIG. 17 is a diagram for explaining how to rotate the photographed image in this case. The angle at which the third axis is rotated is α. For the points a and b in the captured image 21, the angles formed by the straight line from the point k and the first axis are β and γ, respectively. Then, the point a may be rotated by α * β / (90 + α), and the point b may be rotated by α * γ / (90−α). The positions of the points a and b after the rotation are indicated by a 'and b', respectively.

(Third distortion correction process case 3: the third axis is parallel to one of the first and second axes and orthogonal to the other)
In the third axis correction, when the first axis and the second axis are orthogonal to each other and the third axis does not intersect the first axis and the second axis in the photographed image, the third axis is changed to the first axis (or Select whether to be parallel or orthogonal to the second axis). When the third axis is parallel to the first axis (or the second axis), among the intersections of the boundaries between the third axis and the captured image, the intersection that is closer to the first axis (or the second axis) The third axis and the first axis (or second axis) are parallel to the region on the third axis side of the region divided by the first axis (or second axis). In addition, the photographed image is moved by an amount proportional to the distance from the first axis (or the second axis) in a direction orthogonal to the first axis (or the second axis). At this time, of the region divided by the first axis (or the second axis), the region on the third axis side is compressed or expanded in a direction orthogonal to the first axis.

  In the case where the third axis is orthogonal to the first axis (or the second axis), among the intersections of the boundaries between the third axis and the photographed image, an intersection that is closer to the second axis (or the first axis) is selected. As a center, the third axis and the second axis (or the first axis) are parallel to the region on the third axis side of the region divided by the second axis (or the first axis). The photographed image is moved by an amount proportional to the distance from the second axis (or the first axis) in a direction orthogonal to the second axis (or the first axis). At this time, among the regions divided by the second axis (or the first axis), the region on the third axis side is compressed or expanded in a direction perpendicular to the second axis.

  In the third distortion correction process case 3, in the design image, a third axis that is parallel to one of the first axis and the second axis and is orthogonal to the other is designated on the photographed image, and the first axis and the second axis When the axis parallel to the third axis on the design image is taken as the parallel axis, one point in the third axis is fixed and parallel so that the third axis is parallel to the parallel axis on the photographed image. The third distortion correction process case 2 is the same as moving the captured image in proportion to the distance from the parallel axis in the direction perpendicular to the parallel axis in the area divided into two by the axis. It is. Case 3 differs only in the difference between whether the parallel axis is the first axis or the second axis and where the center (fixed point) of the third axis is when moving the captured image. It is. When the third distortion correction described above has a distortion that does not cause a practical problem, the distortion correction can be completed by the third axis correction.

(Fourth distortion correction step)
In the fourth axis correction, as shown in FIG. 11, two axes in which a parallel correction axis is set among the first axis 5 to the third axis 7 and the fourth correction axis 8 (hereinafter referred to as the fourth axis). Of the area divided by the axis where the parallel correction axis is not set from the 1st axis to the 3rd axis (hereinafter referred to as the counter axis). Among these, the captured image is moved by an amount proportional to the distance from the opposing axis in a direction orthogonal to the opposing axis so that the fourth axis and the opposing axis are parallel to the region on the fourth axis 8 side. By this movement, the region on the fourth axis side among the regions divided by the opposing axis of the captured image is compressed or expanded in the direction orthogonal to the opposing axis. Further, in the fourth movement, instead of the parallel movement, it is possible to select a rotational movement or to use both the parallel movement and the rotational movement. In the case of rotating, the fourth region of the two regions of the captured image divided by the opposing axis is the region on the fourth axis side and sandwiched by the two axes orthogonal to the opposing axis. What is necessary is just to rotate centering | focusing on the intersection with the axis | shaft which cross | intersects an axis | shaft.

  With the above processing, even when an image flows at the time of shooting or the image has distortion compared to the real object, a portion surrounded by a maximum of four correction axes can be easily corrected to a rectangle.

[Modification of Example 1]
The distortion correction process according to the first embodiment of the present invention can be variously modified. In particular, the third distortion correction step and the fourth distortion correction step can be modified as follows.

(Third distortion correction process case 2 modification)
In the third axis correction, when the first axis and the second axis are orthogonal to each other and the third axis and the first axis (or the second axis) intersect in the captured image, the third axis and the captured image Among the intersections of the boundaries, the third axis and the second axis (or the second axis (or the first axis) with respect to the region on the third axis side in the region divided by the second axis (or the first axis) The photographed image is moved by an amount proportional to the distance from the second axis (or the first axis) in a direction orthogonal to the second axis (or the first axis) so that the first axis is parallel to the first axis. Also good. In the third distortion correction process case 2 described with reference to FIG. 9, the photographed image is moved around the intersection of the first axis and the third axis. However, in this modification, the third axis, the photographed image, The difference is that the captured image is moved around the intersection of the boundaries. In either case, only the point on the third axis that is fixed (moved around the center) is different, and in this case, the portion surrounded by the correction axis is easily corrected to a rectangle. can do.

(Third distortion correction process case 3 modification)
In the third axis correction, when the first axis and the second axis are orthogonal to each other and the third axis does not intersect the first axis and the second axis in the captured image, the third axis is changed to the first axis (or Select whether to be parallel or orthogonal to the second axis).

  When the third axis is parallel to the first axis (or the second axis), among the intersections of the boundaries between the third axis and the captured image, the intersection that is farther from the first axis (or the second axis) The third axis and the first axis (or second axis) are parallel to the region on the third axis side of the region divided by the first axis (or second axis). In addition, the photographed image is moved by an amount proportional to the distance from the first axis (or the second axis) in a direction orthogonal to the first axis (or the second axis). In the third distortion correction process case 3, the photographed image is moved centering on the intersection having a short distance, but in this modification, the photographed image is moved centering on the intersection having a long distance.

  When the third axis is orthogonal to the first axis (or the second axis), an intersection that is farther from the second axis (or the first axis) among the intersections of the boundaries between the third axis and the photographed image is selected. As a center, the third axis and the second axis (or the first axis) are parallel to the region on the third axis side of the region divided by the second axis (or the first axis). The photographed image is moved by an amount proportional to the distance from the second axis (or the first axis) in a direction orthogonal to the second axis (or the first axis). In the third axis correction case 4, the translation is performed centering on the intersection having a short distance, but this modification is different in that the translation is performed centering on the intersection having a long distance. Even in this case, the portion surrounded by the correction axis can be easily corrected to a rectangle.

(Third Distortion Correction Process Case 3 Modification 2)
According to yet another modification, in the third axis correction, when the first axis and the second axis are orthogonal and the third axis does not intersect the first axis and the second axis in the captured image, One of the intersections between the third axis and the boundary of the captured image is selected.

  If the distance between the selected intersection and the first axis (or the second axis) is closer than the distance between the unselected intersection and the first axis (or the second axis), the selected intersection is the center. The third axis and the first axis (or the second axis) are parallel to the third axis side of the area divided by the first axis (or the second axis). The photographed image is moved by an amount proportional to the distance from the first axis (or the second axis) in a direction orthogonal to one axis (or the second axis).

  If the distance between the selected intersection and the first axis (or second axis) is greater than the distance between the unselected intersection and the first axis (or second axis), the selected intersection is the center. The third axis and the second axis (or the first axis) are parallel to the third axis side of the region divided by the second axis (or the first axis). The photographed image is moved by an amount proportional to the distance from the second axis (or the first axis) in a direction orthogonal to the two axes (or the first axis).

  That is, in the third axial correction case 3 modification 2, if the intersection with the distance closer to the first axis is selected from the intersections of the third axis and the boundary of the photographed image, the third axis becomes the first The third axis is corrected to be parallel to the second axis if the far intersection point is selected. Even in this case, the portion surrounded by the correction axis can be easily corrected to a rectangle.

(Third Distortion Correction Process Case 3 Modification 3)
According to yet another modification, in the third axis correction, when the first axis and the second axis are orthogonal and the third axis does not intersect the first axis and the second axis in the captured image, One of the intersections between the third axis and the boundary of the captured image is selected.

  If the distance between the selected intersection and the first axis (or second axis) is greater than the distance between the unselected intersection and the first axis (or second axis), the selected intersection is the center. The third axis and the first axis (or the second axis) are parallel to the third axis side of the area divided by the first axis (or the second axis). The photographed image is moved by an amount proportional to the distance from the first axis (or the second axis) in a direction orthogonal to one axis (or the second axis).

  If the distance between the selected intersection and the first axis (or the second axis) is closer than the distance between the unselected intersection and the first axis (or the second axis), the selected intersection is the center. The third axis and the second axis (or the first axis) are parallel to the third axis side of the region divided by the second axis (or the first axis). The photographed image is moved by an amount proportional to the distance from the second axis (or the first axis) in a direction orthogonal to the two axes (or the first axis).

  That is, in the third axis correction case 3 modification 3, if the intersection with the farther distance from the first axis is selected from the intersections of the third axis and the boundary of the captured image, the third axis becomes the first The third axis is corrected so as to be parallel to the second axis when the closest intersection is selected. Even in this case, the portion surrounded by the correction axis can be easily corrected to a rectangle.

(Fourth Distortion Correction Process Modification)
Further, according to another modification of the first embodiment, in the fourth distortion correction step, an area that is divided into two by the opposing axis with respect to one of the intersections of the boundaries between the fourth axis and the photographed image. The captured image is moved by an amount proportional to the distance from the opposing axis in a direction orthogonal to the opposing axis so that the fourth axis and the opposing axis are parallel to the region on the fourth axis side. That is, in this modification of the fourth distortion correction step, the inclination of the fourth axis is corrected around the intersection of the boundary between the fourth axis and the captured image instead of the intersection of the fourth axis and the other axis. ing. Even in this case, the portion surrounded by the correction axis can be easily corrected to a rectangle.

  Next, an embodiment in which the display device of the present invention includes a computer and causes the computer to execute the display method of the present invention, and an embodiment of a program that causes the computer to function as the display device will be described.

  FIG. 2 is a block diagram when the display device of the present invention is configured using a computer. The display device according to the second embodiment includes an external data acquisition unit P3 for acquiring a design image and a photographed image from the outside, a CPU: P4, and an instruction for executing superimposed display of the design image and the photographed image. Are input unit P1, output unit P2, and storage unit P5. The storage unit P5 may include an auxiliary storage device such as a hard disk, a magnetic storage medium such as a CD and a DVD, and an optical storage medium in addition to the main storage device such as a cache and a semiconductor memory.

  The storage unit P5 displays the distortion correction processing step for correcting the distortion of the photographed image described in the first embodiment, the alignment step for aligning the design image and the photographed image, and the design image and the photographed image superimposed on each other. A display program P6 for causing the CPU: P4 to execute the display process is stored. Design image data P7 and photographed image data P8 acquired from the outside are also stored in the storage unit P5.

  The output unit P2 displays a cross cursor that is a line parallel to the horizontal and vertical directions of the design image when specifying the correction axis in the distortion correction process and the alignment point in the position alignment process. The design image and the photographed image are displayed in an overlapping manner. And the input part P1, CPU: P4, the memory | storage part P5, the external data acquisition part P3, and the output part P2 are respectively connected by the bus line.

  In the second embodiment, according to the display program P6, the CPU P4 performs the distortion correction process based on the coordinate data of the four points designated by the operator from the input unit P1 or the coordinates of the four axes, and the captured image data. Update P8. Further, according to the display program P6, the CPU P4 performs the alignment process based on the alignment coordinate data designated by the operator from the input unit P1, and updates the design image data P7 and the captured image data P8. Further, the CPU P4 displays the updated design image data P7 and the photographed image data P8 on the display of the computer from the output unit P2 according to the display program P6, and performs a display process. The processing contents of the distortion correction process, alignment process, and display process are the same as those in the first embodiment. In the update process of the design image data P7 and the captured image data P8 described above, the data before the update may be left, or may be deleted from the computer if not necessary.

  The computer in which the display program is installed functions as a display device having a distortion correction unit, an alignment unit, and a display unit. This computer may be a general engineering workstation or personal computer having an external interface function such as an output unit such as a display, an input unit such as a keyboard or a mouse, an auxiliary storage device such as a DVD or a CD-ROM, and an Internet connection. . The display program can be installed in the computer via a storage medium such as a semiconductor memory, a magnetic storage device, an optical storage device, or the Internet.

  As described above, according to each of the embodiments described above, for example, in the failure analysis of an LSI, even when an image is flowing at the time of shooting or the image is distorted as compared with the actual one, the coordinate system of the layout is used. Specify the axis of the analysis image to be vertical or horizontal, and correct the specified axis to the direction of the coordinate axis of the layout. Since LSI wiring and gates are basically arranged vertically or horizontally with respect to the coordinate axis of the layout, the analyst can easily specify the correction axis.

  Also, the layout image and the corresponding three points of the analysis image are designated, and it is automatically determined whether the analysis image is reversed with respect to the layout image from the three points of the layout image and the analysis image. As a result, the layout (design image) can be automatically corrected in the same direction as the analysis image, regardless of whether the analysis image (captured image) is captured on the front surface or the back surface.

  Further, according to each of the above embodiments, in the failure analysis of an LSI, if it is found that a physical abnormality location discovered by the analysis device has caused a logical abnormality, the physical abnormality location discovered there is detected in the LSI. The cause of the failure can be identified. Therefore, since the layout image displaying the logic failure candidates and the analysis image obtained by the analysis device can be easily superimposed, the failure location can be easily identified.

  The present invention has been described with reference to the embodiments. However, the present invention is not limited to the configurations of the above embodiments, and various modifications that can be made by those skilled in the art within the scope of the present invention. Of course, modifications are included.

  For example, the distortion correction step may specify three points in the photographed image and correct the photographed image so that the triangle connecting these three points becomes a right triangle. Alternatively, a triangle may be designated in the photographed image, and the photographed image may be corrected so that the triangle becomes a right triangle.

1, 2, 3, 4, 11, 21 Photographed image (analysis image)
5 Correction axis (first axis)
6 Correction axis (second axis)
7 Correction axis (3rd axis)
8 Correction axis (4th axis)
10 Design image (layout image)
12, 13, 14 Cross cursor S1 Display step S2 Distortion correction step S3 Position alignment step P1 Input unit P2 Output unit P3 External data acquisition unit P4 CPU (Central Processing Unit)
P5 Storage unit P6 Display program P7 Design image data P8 Photographed image data a, b, c, d Square vertex a ′, b ′, c ′, d ′ before distortion correction Quadrangle vertex g after distortion correction Intersection point h between the first axis and the second axis, i intersection point k, j between the second axis and the boundary of the captured image, intersection point l between the first axis and the third axis m intersection point m between the third axis and the fourth axis Intersection of axis 4 and axis 4

Claims (18)

A display method for a display device that displays a design image and a photographed image in an overlapping manner,
The quadrangular shape connecting the four points is the four points that form a rectangle parallel to the vertical axis and the horizontal axis in the design image, and the quadrangular shape connecting the four points in the captured image is the four points specified on the captured image. A distortion correction step of correcting distortion of the captured image so as to be a rectangle parallel to the vertical axis and the horizontal axis;
An alignment process for aligning the position of the design image and the photographed image by performing at least one of the design image and the photographed image by performing one or more of right / left inversion, upside down inversion, movement, rotation, enlargement, and reduction,
A display step of displaying the design image and the photographed image in an overlapping manner;
Including
The distortion correction step includes
A first distortion correction step in which a first axis parallel to the vertical or horizontal axis in the design image is designated on the captured image, and the captured image is rotated so that the first axis is parallel to the vertical or horizontal axis;
In the design image, a second axis parallel to the first axis is specified on the photographed image, and one point in the second axis is fixed on the photographed image so that the second axis is parallel to the first axis. A display method including a second distortion correction step of moving a region on the second axis side out of the region divided into two by the first axis in a direction orthogonal to the first axis in proportion to the distance from the first axis. . In the second distortion correction step,
In addition to moving in the direction orthogonal to the first axis in proportion to the distance from the first axis, or in addition to moving in the direction orthogonal to the first axis in proportion to the distance from the first axis And
With the one point in the second axis as the h point, polar coordinates centered on the h point are considered, and the angle of rotation of the second axis around the h point until it is parallel to the first axis is θ, which is the object to be moved The point before moving the point is x, the point after moving is x ', the distance from the point h to the point x is the radius, and the intersection of the circle and the first axis is x ", the point x The movement angle around the point h is ∠xhx ′, and the angle between the straight line connecting the x point and the h point and the straight line connecting the x ″ point and the h point is ∠xhx ″, the x ″ point and the h point. When the angle between the connecting straight line and the second axis is ∠ahx ″,
∠xhx '= θ ・ ∠xhx "/ ∠ahx"
The display method according to claim 1, wherein the display is rotated around the point h so as to satisfy   In the distortion correction step, in the design image, two axes parallel to the vertical axis and two axes parallel to the horizontal axis are designated on the photographed image, and the four points are designated by a quadrilateral partitioned by the four axes. Item 3. A display method according to item 1 or 2.   In the distortion correction step, a third axis orthogonal to the first axis and the second axis in the design image is designated on the photographed image, and the third axis is orthogonal to the first axis on the photographed image. The photographed image is translated in a direction parallel to the first axis, and / or the photographed image is rotated around the intersection of the first axis and the third axis so that the third axis is orthogonal to the first axis. The display method according to claim 1, further comprising a third distortion correction step.   In the distortion correction step, a fourth axis that partitions the rectangle parallel to the vertical axis and the horizontal axis together with the first to third axes in the design image is designated on the photographed image, and the first axis on the design image. When the axis parallel to the fourth axis among the third axes is taken as the opposing axis, the region on the fourth axis side in the region divided by the opposing axis is parallel to the opposing axis. 5. The display according to claim 4, further comprising a fourth distortion correction step of fixing one point in the fourth axis and moving the photographed image in a direction orthogonal to the opposing axis by a distance proportional to the processing from the opposing axis. Method.   The alignment step determines whether the photographed image is reversed with respect to the design image from the three points designated in the design image and the three points designated in the photographed image corresponding to each. The display method according to any one of claims 1 to 5, wherein when the image is reversed, the design image or the photographed image is reversed horizontally or vertically so as to correct the front and back inversion. The alignment step includes
When three points are specified, the order specified on the design image and the order specified on the photographic image are made to correspond one by one to determine whether the order in which the three points are specified is clockwise or counterclockwise. The display method according to claim 6, wherein when the image is rotated, the design image or the photographed image is flipped horizontally or vertically and the front and back are reversed.   8. The cross-cursor that is a line parallel to a horizontal direction and a vertical direction of a design image is displayed and designated in designation of an axis in the distortion correction step and designation of three points in the alignment step. How to display.   The program for causing the computer to execute the display method according to claim 1, wherein the display device includes a computer. A display device that displays a design image and a photographed image in an overlapping manner,
The quadrangular shape connecting the four points is the four points that form a rectangle parallel to the vertical axis and the horizontal axis in the design image, and the quadrangular shape connecting the four points in the captured image is the four points specified on the captured image. A distortion correction unit that corrects distortion of the captured image so as to be a rectangle parallel to the vertical axis and the horizontal axis;
An alignment unit that performs at least one of a design image and a photographed image by performing at least one of left-right reversal, upside-down reversal, movement, rotation, enlargement, and reduction, and aligning the position of the design image and the photographed image;
A display unit for displaying the design image and the photographed image in an overlapping manner;
Including
The distortion correction unit is configured to first rotate a photographed image so that a first axis parallel to a vertical axis or a horizontal axis in the design image is designated on the photographed image, and the first axis is parallel to the vertical axis or the horizontal axis. A distortion correction unit;
In the design image, a second axis parallel to the first axis is specified on the photographed image, and one point in the second axis is fixed on the photographed image so that the second axis is parallel to the first axis. A second distortion correction unit configured to move a photographed image in a direction orthogonal to the first axis in a region perpendicular to the first axis in a region divided into two by the first axis. Display device. The second distortion correction unit is
In addition to moving in the direction orthogonal to the first axis in proportion to the distance from the first axis, or in addition to moving in the direction orthogonal to the first axis in proportion to the distance from the first axis And
With the one point in the second axis as the h point, polar coordinates centered on the h point are considered, and the angle of rotation of the second axis around the h point until it is parallel to the first axis is θ, which is the object to be moved The point before moving the point is x, the point after moving is x ', the distance from the point h to the point x is the radius, and the intersection of the circle and the first axis is x ", the point x The movement angle around the point h is ∠xhx ′, and the angle between the straight line connecting the x point and the h point and the straight line connecting the x ″ point and the h point is ∠xhx ″, the x ″ point and the h point. When the angle between the connecting straight line and the second axis is ∠ahx ″,
∠xhx '= θ ・ ∠xhx "/ ∠ahx"
The display device according to claim 10, wherein the display device is rotated around the point h so as to satisfy the above condition.   In the distortion correction unit, two axes parallel to the vertical axis and two axes parallel to the horizontal axis are designated on the photographed image in the design image, and the four points are designated by a quadrilateral partitioned by the four axes. Item 12. The display device according to Item 10 or 11.   The distortion correction unit is configured so that a third axis orthogonal to the first axis and the second axis in the design image is designated on the captured image, and the third axis is orthogonal to the first axis on the captured image. The photographed image is translated in a direction parallel to the first axis, and / or the photographed image is rotated around the intersection of the first axis and the third axis so that the third axis is orthogonal to the first axis. The display device according to claim 10, further comprising a third distortion correction unit.   In the distortion correction unit, a fourth axis that partitions the rectangle parallel to the vertical axis and the horizontal axis together with the first to third axes in the design image is designated on the photographed image, and the first axis on the design image. When the axis parallel to the fourth axis among the third axes is taken as the opposing axis, the region on the fourth axis side in the region divided by the opposing axis is parallel to the opposing axis. The display device according to claim 13, further comprising: a fourth distortion correction unit that fixes one point in the fourth axis and moves the photographed image in a direction orthogonal to the opposing axis by a distance proportional to the processing from the opposing axis. .   The alignment unit determines whether the front and back of the photographed image is reversed with respect to the design image from the three points designated in the design image and the three points designated in the photographed image corresponding to each of the three points. The display device according to any one of claims 10 to 14, wherein when the image is reversed, the design image or the photographed image is reversed horizontally or vertically so as to correct the front and back inversion. The alignment unit is
When three points are specified, the order specified on the design image and the order specified on the photographic image are made to correspond one by one to determine whether the order in which the three points are specified is clockwise or counterclockwise. The display device according to claim 15, wherein the display image is reversed left and right or upside down with respect to the design image or the photographed image to correct the front and back inversion.   The cross-cursor that is a line parallel to the horizontal direction and the vertical direction of the design image is displayed and designated in the designation of the axis in the distortion correction unit and the designation of three points in the alignment step. Display device.   A program causing a computer to function as the display device according to any one of claims 10 to 17.

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