JP2011002490A - Photonic crystal, light reflecting device, light reflecting device assembly, and head-worn display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light reflecting device using a photonic crystal that achieves a further increased deflection angle and having a simple configuration and structure.SOLUTION: The light reflecting device 12 includes a two- or three-dimensional photonic crystal 10 which includes a light entrance face 13, a light reflection face 14 having a light reflecting film 15 formed thereon and reflecting incident light from the light entrance face 13, and a light exit face 16 allowing the light reflected on the light reflection face 14 to exit, and which includes pores 11 having an elliptic cross-sectional shape arrayed in the crystal. The array of the pores 11 has a face-centered placement, in which the array pitch PTof the pores 11 along the x-axis direction of the photonic crystal 10 is different from the array pitch PTof the pores 11 along the y-axis direction, and the dispersion plane in a wave number space shows a rectangular shape having an aspect ratio of 4 or more.

Description

  The present invention relates to a photonic crystal, a light reflecting device, a light reflecting device assembly, and a head-mounted display.

  In recent years, various applications using photonic crystals have been studied. One of them is a beam deflection technique using a super prism phenomenon. The beam deflection technology is expected to be applied to optical deflection elements, display devices, and printers. By using a photonic crystal, it is possible to realize a highly reliable optical component that is very small and has few movable parts.

  By the way, the super prism phenomenon is manifested only inside the photonic crystal. Therefore, in the light deflection element using the super prism phenomenon by the photonic crystal, if the light exit surface and the light incident surface of the photonic crystal are parallel, the incident angle to the photonic crystal and the photonic crystal Is equal to the emission angle from (see, for example, JP-A-2201-103439).

  For example, Japanese Patent Application Laid-Open No. 2006-251106 discloses an optical scanning device having a structure in which a light incident surface and a light emitting surface of a photonic crystal are flat and the light emitting surface and the light incident surface are not parallel. The optical scanning device includes a light source, a scanning unit that scans light from the light source, and a scanning range expansion unit that expands a scanning range of light scanned by the scanning unit. It is composed of a photonic crystal and a second photonic crystal. In this optical scanning device, by scanning the incident position from 0 to 84 mm, the emission position is scanned from 0 to 210 mm, and the scanning range can be expanded by 2.5 times.

JP2201-13439 JP 2006-251106 A

  However, in the technical field of a light reflection device, a light reflection device assembly incorporating such a light reflection device, a head-mounted display incorporating such a light reflection device assembly, etc., the emission angle relative to the incident angle of light There is a demand for further increasing the swing angle (light deflection angle), which is a ratio, than the technique disclosed in Japanese Patent Application Laid-Open No. 2006-251106. Further, in the optical scanning device disclosed in Japanese Patent Application Laid-Open No. 2006-251106, the scanning range expanding means is composed of a first photonic crystal and a second photonic crystal, and the structure of the scanning range expanding means, The configuration is complicated.

  Accordingly, an object of the present invention is to use a photonic crystal capable of achieving further expansion of the swing angle, a light reflecting device having such a simple structure and structure, and light incorporating such a light reflecting device. It is an object of the present invention to provide a reflection device assembly and a head-mounted display incorporating the light reflection device assembly.

The photonic crystal of the present invention for achieving the above object is a two-dimensional or more photonic crystal in which holes having an elliptical cross-sectional shape are arranged inside,
The arrangement of the holes is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal is different from the arrangement pitch PT _{y of the} holes along the y-axis direction.
The shape of the dispersion surface in the wave number space is a rectangle having an aspect ratio of 4 or more.

In order to achieve the above object, the light reflecting device of the present invention comprises:
A light incident surface, a light reflecting film is formed, a light reflecting surface on which light incident from the light incident surface is reflected, and a light emitting surface from which light reflected by the light reflecting surface is emitted,
It consists of two or more dimensional photonic crystals with vacancies whose cross-sectional shape is elliptical,
The arrangement of the holes is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal is different from the arrangement pitch PT _{y of the} holes along the y-axis direction. The shape of the dispersion surface in the wave number space is a rectangle having an aspect ratio of 4 or more.

In order to achieve the above object, a light reflecting device assembly of the present invention comprises:
(A) a light reflection device, and
(B) Mirror structure,
A light reflector assembly comprising:
The light reflecting device comprises the above-described light reflecting device of the present invention,
The mirror structure is
(A) Mirror main body, and a mirror provided with a light reflecting layer provided on the surface of the mirror main body,
(B) A plurality of support columns whose upper ends are fixed to the back surface of the mirror main body,
(C) a displacement member having one end fixed to the lower end of each column, and
(D) a support portion for fixing the other end of the displacement member;
Consists of.

To achieve the above object, the head-mounted display of the present invention is
(A) a spectacle-type frame to be worn on the observer's head; and
(B) an image display device,
A head-mounted display comprising:
The image display device
(B-1) an image generation device, and
(B-2) Light guide means attached to the image generation apparatus, in which light emitted from the image generation apparatus is incident, guided, and emitted toward the observer's pupil;
Consists of
The image generating device includes the light reflecting device assembly of the present invention. Here, the light emitted from the light source provided in the image generating device is specifically scanned and reflected by the mirror structure, enters the light reflecting device, is emitted from the light reflecting device, and is directed to the light guiding means. Incident. Alternatively, the light emitted from the light source provided in the image generating device is specifically incident on the light reflecting device, emitted from the light reflecting device, scanned / reflected by the mirror structure, and then applied to the light reflecting device. The light reenters, is emitted from the light reflection device, and enters the light guide.

In the photonic crystal, the light reflecting device, the light reflecting device assembly, or the head-mounted display of the present invention, holes having an elliptical cross-sectional shape are arranged inside the photonic crystal. The hole arrangement is face-centered, and the hole arrangement pitch PT _x along the x-axis direction of the photonic crystal is different from the hole arrangement pitch PT _y along the y-axis direction. The shape of the dispersion surface in the wave number space is a rectangle having an aspect ratio of 4 or more. In such a photonic crystal, since a uniform region of the dispersion surface is used, there is a large design margin for the incident angle and wavelength dispersion. Further, by setting the shape of the dispersion surface in the wave number space to an aspect ratio of 4 or more, it is possible to increase the swing angle (light deflection angle) enlargement ratio (ratio of exit angle / incident angle), for example, 4 times or more. it can. Moreover, by making the shape of the dispersion surface in the wave number space rectangular, it is possible to maintain linearity with respect to the relationship between the incident angle and the outgoing angle, and no matter where the light is incident, it is incident The relationship between the angle and the exit angle can be maintained in a certain relationship.

1A and 1B are a conceptual diagram of a photonic crystal of Example 1, and a schematic diagram of a light reflecting device of Example 1, respectively. 2A and 2B are graphs of a dispersion surface on the wave number space in the photonic crystal of Example 1, and the relationship between the incident angle and the emission angle in the light reflecting device of Example 1, respectively. It is a graph to show. (A) and (B) of FIG. 3 are the results of simulating the relationship between the swing angle expansion range and the swing angle expansion ratio in the light reflecting devices of Example 1 and Comparative Example 1, respectively, and the swing angle expansion range and swing. It is a graph which shows the result of having simulated the relationship of angular linearity. FIG. 4 is a diagram showing a result of simulating the relationship between the incident angle of incident light on the light incident surface of the light reflecting device and the outgoing angle of emitted light from the light emitting surface. FIGS. 5A and 5B are conceptual diagrams of the light reflecting device assemblies of Example 2 and Example 3, respectively. FIGS. 6A and 6B are a schematic partial end view of the mirror structure of Example 4 and a schematic view of the mirror structure of Example 4 as viewed from above. FIG. 7 is a diagram schematically illustrating the arrangement of the displacement members and the struts that constitute the mirror structure according to the fourth embodiment. FIG. 8 is a diagram illustrating a result of simulating the displacement state of the displacement member by structural calculation in the mirror structure according to the fourth embodiment. FIGS. 9A and 9B are diagrams schematically showing the disposition of the displacement member and the struts constituting the mirror structure of Example 5, and the state of displacement of the mirror and the displacement member, respectively. FIG. FIG. 10 is a diagram schematically illustrating the arrangement of the displacement members and the struts constituting the mirror structure according to the sixth embodiment. FIG. 11 is a diagram schematically illustrating the arrangement of the displacement members and the struts that constitute the mirror structure according to the seventh embodiment. FIGS. 12A and 12B are diagrams schematically showing the disposition of the displacement member and the struts constituting the mirror structure of Example 8, and the state of displacement of the mirror and the displacement member, respectively. FIG. FIG. 13 is a diagram schematically illustrating the arrangement of the displacement members and the struts that constitute the mirror structure according to the ninth embodiment. 14A and 14B are a schematic view of the mirror structure of Example 10 as viewed from above, and an enlarged view of a part of the mirror in the mirror structure of Example 10, respectively. It is a schematic diagram. FIGS. 15A and 15B are schematic partial end views of the mirror structure of Example 11 along arrows PP and QQ in FIG. 16, respectively. FIG. 16 is a diagram schematically illustrating the arrangement of the displacement members and the struts constituting the mirror structure according to the eleventh embodiment. FIG. 17 is a schematic view of the mirror structure of Example 11 as viewed from above. FIG. 18 is a schematic view of a modification of the mirror structure according to the eleventh embodiment as viewed from above. 19A to 19C are schematic partial end views of a displacement member and the like for explaining the method for manufacturing the mirror structure according to the fourth embodiment. 20 (A) to 20 (C) are schematic partial end views of a displacement member and the like for explaining the manufacturing method of the mirror structure of Example 4 following FIG. 19 (C). FIGS. 21A to 21C are schematic partial end views of a displacement member and the like for explaining the manufacturing method of the mirror structure of Example 4 following FIG. 20C. FIG. 22 is a schematic view of the head-mounted display in Example 12 as viewed from the front. FIG. 23 is a schematic view of the head-mounted display (provided that the frame is removed) in Example 12 as viewed from the front. FIG. 24 is a schematic view of the head-mounted display in Example 12 as viewed from above. FIG. 25 is a view of the state in which the head-mounted display in Example 12 is mounted on the observer's head from above (however, only the image display device is shown and the frame is not shown). FIG. 26 is a conceptual diagram of an image display device incorporated in a head mounted display in Example 12. FIGS. 27A and 27B are a conceptual diagram of an image display device incorporated in a head-mounted display in Example 13 and an enlarged view of a part of a reflective volume hologram diffraction grating, respectively. It is typical sectional drawing. FIG. 28 is a schematic view of the head-mounted display in Example 14 as viewed from the front. FIG. 29 is a schematic view of the head-mounted display in Example 14 (provided that the frame is assumed to be removed) as viewed from the front. FIG. 30 is a schematic view of the head-mounted display in Example 14 as viewed from above. FIG. 31 is a schematic diagram of a head mounted display in Example 15 as viewed from the front. FIG. 32 is a schematic view of the head-mounted display (provided that the frame is removed) in Example 15 as viewed from the front. FIG. 33 is a schematic view of the head-mounted display in Example 15 as viewed from above. FIG. 34 is a conceptual diagram of a display device to which the mirror structure of the present invention is applied.

Hereinafter, the present invention will be described based on examples with reference to the drawings. However, the present invention is not limited to the examples, and various numerical values and materials in the examples are examples. The description will be given in the following order. In the description of the photonic crystal, the coordinate system and coordinate axes are represented by lower case letters of the alphabet, the x axis, and the y axis. In the description of the mirror structure, the coordinate system and coordinate axes are represented by upper case letters of the alphabet, the X axis, and the Y axis. To express.
1. 1. General description of the photonic crystal, light reflecting device, light reflecting device assembly, and head-mounted display of the present invention Example 1 (photonic crystal of the present invention, light reflection device)
3. Example 2 (Light Reflector Assembly of the Present Invention)
4). Example 3 (another modification of Example 2)
5). Example 4 (mirror structure constituting the light reflecting device assembly of the present invention, mirror structure having the structure of 1A)
6). Example 5 (Modification of Example 4)
7). Example 6 (another modification of Example 4)
8). Example 7 (another modification of Example 4)
9. Example 8 (another modification of Example 4, the mirror structure having the configuration 1B)
10. Example 9 (another modification of Example 4)
11. Example 10 (another modification of Example 4)
12 Example 11 (mirror structure according to second embodiment)
13. Example 12 (head mounted display of the present invention)
14 Example 13 (Modification of Example 12)
15. Example 14 (another modification of Example 12)
16. Example 15 (another modification of Example 12 and others)
17. Example 16 (display device to which the light reflecting device assembly of the present invention is applied, etc.)

[Description of Photonic Crystal, Light Reflector, Light Reflector Assembly, and Head-Mounted Display of the Present Invention]
In the light reflection device assembly of the present invention or the head mounted display of the present invention,
PT _y > PT _x
The light incident surface of the light reflecting device is parallel to the y-axis,
The light exit surface of the light reflecting device is parallel to the x-axis,
The light emitted from the light source is reflected by the light reflecting layer of the mirror, enters the light incident surface of the light reflecting device, is reflected by the light reflecting surface, and can be emitted from the light emitting surface.

Alternatively, in the light reflecting device assembly of the present invention or the head mounted display of the present invention,
PT _y > PT _x
The light incident surface of the light reflecting device is parallel to the x-axis,
The light exit surface of the light reflecting device is parallel to the y-axis,
The light emitted from the light source enters the light incident surface of the light reflecting device, is reflected by the light reflecting surface, is emitted from the light emitting surface, is reflected by the light reflecting layer of the mirror, and is emitted by the light reflecting device. The light can be reincident from the surface, reflected by the light reflecting surface, and emitted from the light incident surface in a direction different from the incident direction from the light source to the light incident surface.

In the light reflecting device assembly of the present invention including the above preferred embodiment or the head mounted display of the present invention, or alternatively, in the light reflecting device of the present invention,
PT _y > PT _x
The magnitude of the wave vector in the x-axis direction of the incident light k _x, the magnitude of the wave vector and k _y in the y-axis direction, the value of _{(PT x · k x) /} (PT y · k y) m ( However, m is an integer of 2 or more), and when the angle formed by the x-axis direction and the light reflecting surface is θ,
tan (θ) = m (1)
It is desirable that the configuration satisfies the above. That is, a so that the value of _{(PT x · k x) /} (PT y · k y) is m, designed _{PT x, PT y, k x} , the value of k _y, and the formula (1) It is desirable to determine the angle θ to satisfy. Thus, when the light incident on the light reflecting device is reflected by the light reflecting surface, the difference between the angle before reflection and the angle after reflection can be 90 degrees. That is, the sum of the incident angle θ _I to the light reflecting surface and the exit angle θ _O from the light reflecting surface can be 90 degrees. However, the value of “m” is not limited to an integer.

Alternatively, in the light reflecting device assembly of the present invention, the head-mounted display of the present invention, or the light reflecting device of the present invention including the above preferred forms and configurations, or in the photonic crystal of the present invention. Therefore, the length of the long side of the dispersion surface is desirably (1/2) ^1/2 or more of the diameter of the dispersion surface in a vacuum, and thereby a larger swing angle can be achieved.

In the light reflection device assembly of the present invention or the head-mounted display of the present invention including the preferred form and configuration described above,
The mirror structure has four columns and four displacement members,
The upper end of each column is fixed around the center of gravity of the mirror,
Opposing first and third struts are disposed on the X axis in the mirror structure, and the remaining second and fourth struts are disposed on the Y axis in the mirror structure.
The lower end of the first support column is fixed to one end of the first displacement member, the lower end of the second support column is fixed to one end of the second displacement member, and the lower end of the third support column. The portion may be fixed to one end portion of the third displacement member, and the lower end portion of the fourth support column may be fixed to one end portion of the fourth displacement member. In addition, such an aspect is referred to as a “mirror structure according to the first aspect” for convenience. Here, the origin where the X axis and the Y axis intersect is preferably coincident with the center of gravity of the mirror.

And in the mirror structure according to the first aspect described above,
Along the X axis in the mirror structure, the other end of the third displacement member, one end of the third displacement member, one end of the first displacement member, and the other end of the first displacement member are Are arranged in this order,
Along the Y axis in the mirror structure, the other end of the fourth displacement member, one end of the fourth displacement member, one end of the second displacement member, and the other end of the second displacement member are The arrangement may be made in this order. Such a configuration is referred to as “a mirror structure having the configuration of 1A” for convenience.

That is, in the mirror structure having the configuration 1A, assuming Gaussian coordinates with the center of gravity of the mirror as the origin,
The fixed center coordinates of the first column are (X ₁ , 0),
The fixed center coordinates of the second column are (0, Y ₂ ),
The fixed center coordinates of the third column are (X ₃ , 0),
The fixed center coordinates of the fourth column are (0, Y ₄ ),
The fixed center coordinates of the other end of the first displacement member are (X ′ ₁ , Y ′ ₁ ),
The fixed center coordinates of the other end of the second displacement member are (X ′ ₂ , Y ′ ₂ ),
The fixed center coordinates of the other end of the third displacement member are (X ′ ₃ , Y ′ ₃ ),
When the fixed center coordinate of the other end of the fourth displacement member is (X ′ ₄ , Y ′ ₄ ),
X ′ ₃ <X ₃ <0 <X ₁ <X ′ ₁
Y ′ ₄ <Y ₄ <0 <Y ₂ <Y ′ ₂
Are in a relationship. still,
X ₁ = −X ₃
X ′ ₁ = −X ′ ₃
Y ' ₁ = Y' ₃
Y ₂ = −Y ₄
Y ′ ₂ = −Y ′ ₄
X ' ₂ = X' ₄
Is preferably satisfied.

Here, in the mirror structure having the configuration of 1A,
The outer shape of each displacement member is an isosceles triangle,
One end of the displacement member corresponds to the vicinity of the apex angle of the isosceles triangle,
The other end of the displacement member can be configured to correspond to the base of the isosceles triangle. However, the outer shape of each displacement member is not limited to an isosceles triangle, and may be an arbitrary shape such as a rectangle, a rectangle, or a trapezoid.

Alternatively, in the mirror structure having the configuration of the first 1A,
Each displacement member is composed of an isosceles triangle portion and a protruding portion protruding from the portion of the isosceles triangle portion corresponding to the apex angle of the isosceles triangle,
In the vicinity of the portion of the isosceles triangle corresponding to the apex angle of the isosceles triangle, a groove extending in parallel with the base of the isosceles triangle is provided,
One end of the displacement member is composed of a protrusion,
The other end portion of the displacement member can be configured by a portion of an isosceles triangle portion corresponding to the base of the isosceles triangle. And in such a structure, a groove part can also be set as the structure extended to the part of the isosceles triangle part corresponded to the base of an isosceles triangle. That is, the isosceles triangle portion corresponding to the apex angle of the isosceles triangle is connected, but other portions of the isosceles triangle portion are separated by the groove portion. However, the outer shape of each displacement member is not limited to such a pseudo isosceles triangle, and may be, for example, a pseudo rectangle, a pseudo rectangle, a pseudo trapezoid, or the like. By providing the groove portion in this way, a large swing angle can be realized with a smaller driving force.

  When performing raster scanning, it is preferable to rotate the mirror around the X axis at high speed based on resonance, and to rotate the mirror around the Y axis at low speed based on non-resonance. Therefore, a high natural frequency is required for the second displacement member and the fourth displacement member for causing the rotation of the mirror around the X axis at high speed, while the mirror around the Y axis at low speed is required. The first displacement member and the third displacement member for causing the rotation are required to have a large driving force that can obtain a large displacement even in non-resonance.

In order to cope with such a request, in the mirror structure having the configuration of 1A,
The first displacement member and the third displacement member have a meander structure,
It is preferable that the second displacement member and the fourth displacement member have a cantilever structure (plate spring structure, cantilever structure). In this case, the first displacement member and the third displacement member can be driven at a lower frequency than the second displacement member and the fourth displacement member. Further, in the mirror structure having the configuration 1A having such a configuration, the other end portion of the first displacement member is fixed to the support portion at two locations, and the other end portion of the third displacement member. A part can be set as the structure currently fixed to the support part in two places. That is, the other end portion of the first displacement member is fixed to the support portion at two locations of fixed center coordinates (X ′ ₁ , Y ′ ₁₁ ) and (X ′ ₁ , Y ′ ₁₂ ). The other end of the displacement member is fixed to the support at two locations of fixed center coordinates (X ′ ₃ , Y ′ ₃₁ ) and (X ′ ₁ , Y ′ ₃₂ ), and the other end of the second displacement member The portion is fixed to the support portion at one fixed central coordinate (X ′ ₂ , Y ′ ₂ ), and the other end of the fourth displacement member is fixed central coordinate (X ′ ₄ , Y ′ ₄ ). If it is fixed to the support part at one place,
X ′ ₁ = −X ′ ₃
Y _'11 = Y' ₃₁
Y _'12 = Y' ₃₂
Y ′ ₂ = −Y ′ ₄
X ' ₂ = X' ₄
Is preferably satisfied.

Alternatively, in the mirror structure according to the first aspect described above,
Along the X axis in the mirror structure, the other end of the third displacement member, one end of the first displacement member, one end of the third displacement member, and the other end of the first displacement member are Are arranged in this order,
Along the Y axis in the mirror structure, the other end of the fourth displacement member, one end of the second displacement member, one end of the fourth displacement member, and the other end of the second displacement member are The arrangement may be made in this order. Such a configuration is referred to as a “mirror structure of the 1B configuration” for convenience.

That is, in the mirror structure having the configuration 1B, assuming Gaussian coordinates with the center of gravity of the mirror as the origin,
The fixed center coordinates of the first column are (X ₁ , 0),
The fixed center coordinates of the second column are (0, Y ₂ ),
The fixed center coordinates of the third column are (X ₃ , 0),
The fixed center coordinates of the fourth column are (0, Y ₄ ),
The fixed center coordinates of the other end of the first displacement member are (X ′ ₁ , Y ′ ₁ ),
The fixed center coordinates of the other end of the second displacement member are (X ′ ₂ , Y ′ ₂ ),
The fixed center coordinates of the other end of the third displacement member are (X ′ ₃ , Y ′ ₃ ), and
When the fixed center coordinate of the other end of the fourth displacement member is (X ′ ₄ , Y ′ ₄ ),
X ′ ₃ <X ₁ <0 <X ₃ <X ′ ₁
Y ′ ₄ <Y ₂ <0 <Y ₄ <Y ′ ₂
Are in a relationship. still,
X ₃ = −X ₁
X ′ ₃ = −X ′ ₁
Y ' ₃ = Y' ₁
Y ₄ = −Y ₂
Y ′ ₄ = −Y ′ ₂
X ' ₄ = X' ₂
Is preferably satisfied.

  In the mirror structure according to the first aspect including the various configurations and forms described above, the region of the displacement member located on the other end side of the displacement member with respect to the portion of the displacement member to which the lower end portion of the column is fixed It can be set as the structure by which the hinge part is provided. Further, in the mirror structure according to the first aspect including the various configurations and forms described above including such a configuration, the other end portion of the displacement member is more than the portion of the displacement member to which the lower end portion of the column is fixed. The region of the displacement member located on the side may have a meander structure.

Furthermore, in the mirror structure according to the first aspect including the various configurations and forms described above,
A separation groove separated by a torsion bar is provided around the mirror portion to which the upper end of each column is fixed.
The part of the mirror to which the upper end of the first column is fixed and the other part of the mirror are connected by a first torsion bar extending along the X axis,
The part of the mirror to which the upper end of the second column is fixed and the other part of the mirror are connected by a second torsion bar extending along the Y axis,
The part of the mirror to which the upper end portion of the third column is fixed and the other part of the mirror are connected by a third torsion bar extending along the X axis,
The part of the mirror to which the upper end portion of the fourth column is fixed and the other part of the mirror can be connected by a fourth torsion bar extending along the Y axis.

Alternatively, in the light reflection device assembly of the present invention or the head-mounted display of the present invention including the preferred form and configuration described above,
The mirror structure has four columns and four displacement members,
The upper end of each column is fixed to the outer periphery of the mirror body,
The lower end of the first support column is fixed to one end of the first displacement member, the lower end of the second support column is fixed to one end of the second displacement member, and the lower end of the third support column. The portion may be fixed to one end portion of the third displacement member, and the lower end portion of the fourth support column may be fixed to one end portion of the fourth displacement member. In addition, such an aspect is referred to as a “mirror structure according to the second aspect” for convenience.

And in such a mirror structure according to the second aspect,
The mirror main body has a first side and a third side facing the first side extending in the X direction, and a second side and a fourth side facing the second side. Having a rectangular shape extending in the Y direction;
The upper end portion of the first support column is fixed in the vicinity of the fourth corner portion where the third side and the fourth side of the mirror main body portion intersect,
The upper end portion of the second support column is fixed in the vicinity of the third corner portion where the second side and the third side of the mirror body portion intersect,
The upper end portion of the third column is fixed in the vicinity of the second corner portion where the first side and the second side of the mirror main body portion intersect,
The upper end portion of the fourth support column is fixed in the vicinity of the first corner portion where the fourth side and the first side of the mirror main body portion intersect,
The other end of the first displacement member whose one end is fixed to the lower end of the first column, and the other end of the second displacement member whose one end is fixed to the lower end of the second column are , Is fixed to the part of the mirror main body corresponding to the first side,
The other end of the third displacement member with one end fixed to the lower end of the third column, and the other end of the fourth displacement member with one end fixed to the lower end of the fourth column are The mirror main body portion corresponding to the third side may be fixed.

  Here, assuming a Gaussian coordinate with the center of gravity of the mirror as the origin, and passing through the origin, the X direction in the mirror is the X axis, the origin is passed, and the Y direction in the mirror is the Y axis, the first in the mirror body The fixed position of the upper end of the column and the fixed position of the upper end of the second column in the mirror main body, the fixed position of the upper end of the third column in the mirror main unit, and the upper end of the fourth column in the mirror main unit The fixed position is located symmetrically with respect to the Y axis, the fixed position of the upper end of the first column in the mirror main body, the fixed position of the upper end of the fourth column in the mirror main unit, and the first position in the mirror main unit. It is desirable that the fixed position of the upper end portion of the second support column and the fixed position of the upper end portion of the third support column in the mirror main body are positioned symmetrically with respect to the X axis.

Further, when the length of the first side and the third side is L ₁ and the length of the second side and the fourth side is L ₂ , the upper end of the first column is the first of the mirror main body. 3 is fixed at the fourth corner “near” where the fourth side intersects with the fourth side is c ₁ · L along the X direction from the third side, the fourth side, and the fourth corner. ₁ apart boundary, and means that the upper end of the first strut in a region surrounded by the boundary at a distance c ₂ · L ₂ along the fourth corner portion in the Y direction is fixed . Similarly, the upper end portion of the second support column is fixed to the “near” third corner portion where the second side and the third side of the mirror main body portion intersect with each other. In a region surrounded by a side, a boundary separated by c ₁ · L ₁ along the X direction from the third corner, and a boundary separated by c ₂ · L ₂ along the Y direction from the third corner It means that the upper end part of the 2nd support | pillar is being fixed. Similarly, the upper end portion of the third support column is fixed to the second corner portion “near” where the first side and the second side of the mirror body portion intersect with each other. In a region surrounded by a side, a boundary separated by c ₁ · L ₁ along the X direction from the second corner, and a boundary separated by c ₂ · L ₂ along the Y direction from the second corner It means that the upper end portion of the third support column is fixed. Similarly, the upper end portion of the fourth column is fixed to the “near” first corner portion where the fourth side and the first side of the mirror main body portion intersect with each other. In a region surrounded by a side, a boundary separated by c ₁ · L ₁ along the X direction from the first corner, and a boundary separated by c ₂ · L ₂ along the Y direction from the first corner It means that the upper end portion of the fourth column is fixed. Here, c ₁ is any value within a range of 0 to 0.2, and c ₂ is preferably any value within a range of 0 to 0.2. However, the present invention is not limited to this. In some cases, the upper end portion of the support column may not be fixed near the corner portion of the mirror main body portion.

  In the mirror structure according to the second aspect including such a configuration, the first displacement member, the second displacement member, the third displacement member, and the fourth displacement member have a meander structure. It can be configured.

  In the mirror structure including the various configurations, forms, the first mode, and the second mode described above, the displacement member includes a bimorph type, a unimorph type, a monomorph type, or a stacked type (multimorph type) piezoelectric actuator. However, the present invention is not limited to this. In addition, the displacement member may be an electrostatic drive actuator, a heat drive actuator, or an electromagnetic wave composed of a magnetostrictive material having a Joule effect whose shape changes when a magnetic field is applied. A drive actuator, an electromagnetic drive actuator using magnetic torque, or an electrochemical drive actuator made of a polymer gel can also be used.

The light reflecting device assembly, head-mounted display, light reflecting device or photonic crystal (hereinafter collectively referred to simply as “the present invention”) of the present invention including the various preferred embodiments and configurations described above. 2) or more photonic crystal, that is, a material constituting the two-dimensional photonic crystal or the three-dimensional photonic crystal is transparent to incident light and has a high relative dielectric constant. A material (for example, a dielectric material) is preferably used. Specifically, for example, titanium oxide (TiO ₂ ), hafnium oxide (HfO ₂ ), tantalum pentoxide (Ta ₂ O ₅ ), zirconium oxide (ZrO) ₂ ) can be illustrated. The cross section of the hole is a cross section when the hole is cut in the xy plane. For example, air is filled in the air holes. The cross-sectional shape of the hole is elliptical, but the major axis (length: VD _L ) of the ellipse is parallel to the y axis, and the minor axis (length: VD _S ) is parallel to the x axis. This is preferable because the aspect ratio (k _y / k _x ) of the equal frequency surface in the wave number space can be increased. The holes extend inside the photonic crystal parallel to the z-axis. The arrangement of the holes is a face-centered arrangement. Here, the “face-centered arrangement” means, for example, four rectangular shapes each having a side parallel to the x-axis as a short side and a side parallel to the y-axis as a long side. This indicates a state in which a hole is arranged at the apex, and one more hole is arranged at the center of the rectangle. The light incident surface, the light reflecting surface, and the light emitting surface are flat surfaces, and the relationship between the incident angle and the emitting angle can be maintained in a predetermined relationship regardless of the position of the light incident surface. .

  The dispersion surface on the wave number space (which is a space composed of reciprocal lattice vectors, also called reciprocal lattice space) is also called an iso-frequency surface that determines the light propagation in the crystal, but its shape has an aspect ratio 4 or more rectangles. The long side of the rectangle is curved in a convex shape toward the center of the rectangle, and the short side of the rectangle may be curved in a convex shape in a direction away from the center of the rectangle. Is included. However, the smaller the curvature, the better.

In general, it is necessary to form an antireflection film on a light incident surface (light incident surface) and a light emitting surface (light emitting surface) in the photonic crystal. However, for the photonic crystal of the present invention, an antireflection film is not always necessary because a light transmittance of 70% or more can be secured without an antireflection film. However, when a higher light transmittance is required, an antireflection film may be formed. The antireflection film includes a silicon oxide film (SiO _x ), a silicon oxynitride film (SiON), a niobium oxide film (NbO _x ), a titanium nitride film (TiO ₂ ), a titanium oxynitride film (TiON), and a low refractive index material. And a high-refractive-index material (for example, a multi-layer multi-layer film composed of a silicon oxide film and a niobium oxide film, a multi-layer multi-layer film composed of a silicon oxide film and a titanium oxide film). The film may be formed by a physical vapor deposition method such as a coating method or a sputtering method, or a film-like antireflection film may be disposed (for example, adhered).

  Although the light reflecting film is formed on the light reflecting surface, the light reflecting film can be composed of a metal film or an alloy film, for example, various physical vapor deposition methods (PVD methods) and various chemicals. It can be formed by a chemical vapor deposition method (CVD method). Specific examples of the material constituting the light reflecting film include gold (Au), silver (Au), and aluminum (Al). Alternatively, a film-like light reflecting film may be disposed (for example, adhered) on the light reflecting surface.

  The unimorph type piezoelectric actuator constituting the displacement member in the mirror structure has, for example, a structure in which one piezoelectric material thin film that expands and contracts in the length direction is formed on a base layer (support structure) constituting the displacement member. . The bimorph type piezoelectric actuator has a structure in which, for example, two piezoelectric material thin films that expand and contract in the length direction are stacked via a base layer (support structure) constituting a displacement member, and one piezoelectric material When the thin film stretches, the other piezoelectric material thin film shrinks. There are two types of piezoelectric material thin films, a type in which the polarization directions are arranged symmetrically (series type), and a type in which the polarization directions are arranged asymmetrically (in the same direction) (parallel type). A laminated piezoelectric actuator has, for example, a structure in which a large number of piezoelectric material thin films that extend and contract in the length direction and a base layer are laminated. In the displacement member having these structures, one end of the displacement member is driven (moved up and down) by the movement of the piezoelectric material thin film that expands and contracts in the length direction. The base layer (support structure) can be constituted by, for example, a silicon layer, a silicon oxide layer, or a stacked structure of a silicon layer and a silicon oxide layer.

PZT [lead zirconate titanate, Pb (Zr, Ti) O ₃ ], which is a solid solution of PbZrO ₃ and PbTiO ₃ ; a PZT ceramic material in which Nb, Co, and Mn are added to PZT Ternary PZT ceramic material obtained by adding perovskite ABO ₃ to PZT; PbTiO ₃ ceramic material; LiNbO ₃ ceramic material; BaTiO ₃ such as BaTiO ₃ —SiO ₂ —Al ₂ O ₃ and BaTiO ₃ —Nb ₂ O ₅ Examples thereof include: ₃ series ceramic materials; magnesium-lead niobate [Pb (Mg, Nb) O ₃ ] series ceramic materials; ZnO; AlN.

The piezoelectric material thin film is, for example,
(1) Various physical vapor deposition methods (PVD method) such as sputtering method including RF magnetron sputtering method and laser ablation method using excimer laser etc.
(2) MOCVD method using an organic metal compound such as Pb (C ₂ H ₅ ) ₄ , Zr (DPM) ₄ , Ti (i-C ₃ H ₇ O) ₄ as a raw material (3) For example, acetic acid Lead [Pb (CH ₃ COOH) ₂ ], titanium isopropoxide [Ti (OCH (CH ₃ ) ₂ ) ₄ ] and zircon isopropoxide [Zr (OCH ₂ CH ₂ CH ₃ ) ₄ ] as metal raw materials A sol-gel method in which a piezoelectric material thin film is obtained by forming a film of the raw material solution by a spin coating method or the like and then heat-treating and densifying it. (4) Slurry a PZT ceramic material powder, and spin coating method Spin coating method (5) screen printing method (6) plating method, including composite method for forming a piezoelectric material thin film based on
(7) Hydrothermal synthesis method in which an aqueous solution of zirconium, titanium or the like is placed in a pressure vessel, and heated and pressurized to form a piezoelectric material thin film. (8) Submicron-sized raw material powder is mixed and mixed to form an aerosol. Then, it can be formed by an aerosol deposition method or the like for forming a piezoelectric material thin film by spraying.

A lower electrode is provided between the base layer (support structure) constituting the displacement member and the piezoelectric material thin film, and an upper electrode is provided on the piezoelectric material thin film. An example of the lower electrode is a Pt / Ti laminated structure. The Ti layer is in contact with the base layer, and the Ti layer functions as an adhesion layer. Moreover, platinum (Pt), gold (Au), ruthenium oxide (RuO _x ), iridium oxide (IrO _x ), or iridium oxide-hafnium (Ir—Hf—O-based material), Ru are used as the material constituting the upper electrode. , Ru ₂ / Ru laminated structure, Ir, IrO ₂ / Ir laminated structure, Pt, Pd, Pt / Ti laminated structure, Pt / Ta laminated structure, Pt / Ti / Ta laminated structure, La _0.5 Sr _0.5 Examples include CoO ₃ (LSCO), a laminated structure of Pt / LSCO, and YBa ₂ Cu ₃ O ₇ . The electrode can be formed by sputtering or pulsed laser ablation. The patterning of the electrode can be performed by, for example, an ion milling method or an RIE method.

  When the displacement member is composed of an electrostatic drive actuator, a movable electrode is provided on the displacement member, a drive electrode is provided below the displacement member, and the displacement member is moved by an electrostatic force generated between the movable electrode and the drive electrode of the displacement member. It may be driven (moved up and down).

  When the displacement member is composed of a thermally driven actuator, two types of material layers having different thermal expansion coefficients (for example, a laminated structure of Si layer and Au layer, a laminated structure of Si layer and Al layer, a polyimide layer having different thermal expansion coefficients) A thermal bimorph type having a laminated structure is formed, and a temperature change is caused by, for example, passing an electric current through these two kinds of material layers. As a result, the displacement member bends and thereby the displacement member is driven (moved up and down). Alternatively, if two beams with different thicknesses are combined into U-shapes at the tip and current is passed, the thin beam structure has a higher resistance value than the thick beam structure, resulting in more heat generation, resulting in displacement The member bends toward the thick beam structure, and the displacement member is driven (moved up and down). Alternatively, the displacement member may be made of a shape memory alloy made of, for example, an alloy of Ti and Ni.

  The light reflecting layer constituting the mirror can be composed of a metal film or an alloy film formed on the surface of the mirror main body (for example, various kinds of physical vapor deposition methods (PVD methods)). And various chemical vapor deposition methods (CVD methods). Specific examples of the material constituting the light reflection layer include gold (Au), silver (Au), and aluminum (Al). Specifically, the mirror main body can be constituted by, for example, a silicon layer, a silicon oxide layer, or a stacked structure of a silicon layer and a silicon oxide layer. The external shape of the mirror main body is essentially an arbitrary shape such as a circle, an ellipse, an oval (a combination of a semicircle and two line segments), a square, a rectangle, a rectangle including a trapezoid, and the like. be able to. Also, the outer shape of the light reflecting layer can be essentially any shape such as a circle, an ellipse, an oval, a square, a rectangle, a rectangle including a trapezoid, and the like. The mirror main body and the light reflecting layer may have the same, similar, or similar outer shape, or may have different outer shapes. Furthermore, the mirror main body and the light reflecting layer may be made larger, or the mirror main body may be made larger than the light reflecting layer. In some cases, the mirror main body portion may be composed of a light reflecting layer supporting portion and a movable frame surrounding the light reflecting layer supporting portion. In this case, a plurality of support columns are provided on the back surface of the movable frame near the four corners of the movable frame. What is necessary is just to fix an upper end part, and what is necessary is just to form integrally in the state which connected the movable frame and the light reflection layer support part. The strut is basically composed of a rigid body that does not expand and contract, and more specifically can be composed of, for example, silicon, silicon oxide, or a combination of silicon and silicon oxide. The cross-sectional shape of the column when the column is cut along a plane perpendicular to the axis of the column can be essentially any shape such as a circle, ellipse, oval, square, rectangle, trapezoid, and other rectangles. . As described above, the number of columns and displacement members is preferably four, but is not limited to this, and may be three or five or more.

  Although the upper end part of the support | pillar is being fixed to the back surface of a mirror main-body part, what is necessary is just to join a support | pillar and a mirror main-body part, for example with a well-known joining technique (bonding technique). Here, as a bonding technique (bonding technique), not only a method using an epoxy-based adhesive, an organic material such as BCB (Benzo-CycloButene), CYTOP, glass frit, water glass, etc., but also a solder layer, etc. Examples thereof include a method used as an adhesive layer, an anodic bonding method, a wafer direct bonding method including a method of treating a wafer surface with plasma such as oxygen, and a surface activated room temperature bonding method. Although the lower end part of the support | pillar is being fixed to the one end part of a displacement member, what is necessary is just to form a support | pillar on a displacement member specifically, for example. The other end portion of the displacement member is fixed to the support portion. Specifically, for example, the support portion may be formed on the other end portion of the displacement member. The torsion bar can be formed by processing a mirror based on a known processing method.

  The head-mounted display of the present invention may include one image display device (one eye type) or two (binocular type).

  In the head-mounted display of the present invention, the frame includes a front part disposed in front of the observer, two temple parts rotatably attached to both ends of the front part via hinges, and each temple part. It consists of a modern part attached to the tip, and it also has a nose pad. The frame and nose pad assembly has substantially the same structure as normal glasses except that there is no rim. The material constituting the frame can be composed of the same material as that constituting normal glasses such as metal, alloy, plastic, and a combination thereof.

  From the viewpoint of the design of the head-mounted display or the ease of mounting of the head-mounted display, the wiring (signal lines, power lines, etc.) from one or two image generation devices is connected to the temple section, And, it is desirable to extend from the front end of the modern part to the outside through the inside of the modern part and to be connected to an external circuit (control circuit). Further, each image generation device includes a headphone unit, and the headphone unit wiring from each image generation device is routed from the tip of the modern unit to the headphone unit via the inside of the temple unit and the modern unit. It is more desirable to have an extended form. Examples of the headphone unit include an inner ear type headphone unit and a canal type headphone unit. More specifically, the headphone part wiring preferably has a form extending from the tip part of the modern part to the headphone part so as to wrap around the back side of the auricle (ear shell).

  In the head-mounted display of the present invention, the imaging device can be configured to be attached to the central portion of the front portion. Specifically, the imaging device is configured by a solid-state imaging device and a lens made up of, for example, a CCD or a CMOS sensor. The wiring from the imaging device may be connected to one image display device through the back surface of the front portion, for example, and may be included in the wiring extending from the image generation device.

In the head-mounted display of the present invention, the light guide means is
(A) A light guide plate that is disposed on the center side of the observer's face as a whole, is incident on the light emitted from the image generation apparatus, is guided, and is emitted toward the observer's pupil;
(B) first deflecting means for deflecting the light incident on the light guide plate so that the light incident on the light guide plate is totally reflected inside the light guide plate; and
(C) a second deflecting means for deflecting the light propagated through the light guide plate by total reflection a plurality of times in order to emit the light propagated through the light guide plate by total reflection from the light guide plate;
It can be set as the form comprised from. The term “total reflection” means total internal reflection or total reflection inside the light guide plate. The same applies to the following.

  And in such a form in the head mounted display of this invention, the 1st deflection means reflects the light which injected into the light-guide plate; the 2nd deflection means propagated the inside of the light-guide plate by total reflection The light can be transmitted and reflected over a plurality of times. Furthermore, in this case, the first deflecting unit may function as a reflecting mirror, and the second deflecting unit may function as a semi-transmissive mirror.

  In such a configuration, the first deflecting means is made of, for example, a metal containing an alloy, and reflects light incident on the light guide plate (a kind of mirror) or light incident on the light guide plate. A diffraction grating (for example, a hologram diffraction grating film) to be diffracted can be used. Further, the second deflecting means can be constituted by a multilayer laminated structure in which a large number of dielectric laminated films are laminated, a half mirror, a polarization beam splitter, or a hologram diffraction grating film. The first deflecting unit and the second deflecting unit are disposed inside the light guide plate (incorporated inside the light guide plate), but in the first deflecting unit, the parallel light incident on the light guide plate is provided. The parallel light incident on the light guide plate is reflected or diffracted so that the light is totally reflected inside the light guide plate. On the other hand, in the second deflecting means, the parallel light propagated by total reflection inside the light guide plate is reflected or diffracted multiple times and emitted from the light guide plate in the state of parallel light.

  Alternatively, in such a form of the head-mounted display of the present invention, the first deflecting means diffracts the light incident on the light guide plate; the second deflecting means propagates through the light guide plate by total reflection. It is possible to adopt a configuration that diffracts the emitted light over a plurality of times. In this case, the first deflecting means and the second deflecting means can be formed of a diffraction grating element. Further, the diffraction grating element is composed of a reflection type diffraction grating element, or alternatively, a transmission type diffraction grating. Alternatively, one diffraction grating element can be a reflection type diffraction grating element, and the other diffraction grating element can be a transmission type diffraction grating element. An example of the reflective diffraction grating element is a reflective volume hologram diffraction grating. The first deflecting means composed of the reflective volume hologram diffraction grating is referred to as a “first diffraction grating member” for convenience, and the second deflecting means composed of the reflective volume hologram diffraction grating is referred to as “second diffraction grating member” for convenience. Sometimes called.

  Diffraction of P types of light having different P types (for example, P = 3, three types of red, green, and blue) wavelength bands (or wavelengths) from the first diffraction grating member or the second diffraction grating member. In order to cope with reflection, a P-layer diffraction grating layer composed of a reflective volume hologram diffraction grating can be laminated. Each diffraction grating layer is formed with interference fringes corresponding to one type of wavelength band (or wavelength). Alternatively, in order to cope with diffraction reflection of P types of light having different P types of wavelength bands (or wavelengths), P is applied to the first diffraction grating member or the second diffraction grating member formed of one diffraction grating layer. It can also be set as the structure in which the kind of interference fringe is formed. Alternatively, for example, the angle of view can be divided into three equal parts, and the first diffraction grating member or the second diffraction grating member can be configured by laminating diffraction grating layers corresponding to each angle of view. By adopting these configurations, the diffraction efficiency increases when the light having each wavelength band (or wavelength) is diffracted and reflected by the first diffraction grating member or the second diffraction grating member, and the diffraction acceptance angle is increased. Increase and optimization of the diffraction angle can be achieved.

  As a material constituting the first diffraction grating member and the second diffraction grating member, a photopolymer material can be cited. The constituent materials and basic structure of the first diffraction grating member and the second diffraction grating member made of the reflective volume hologram diffraction grating may be the same as those of the conventional reflective volume hologram diffraction grating. The reflection type volume hologram diffraction grating means a hologram diffraction grating that diffracts and reflects only + 1st order diffracted light. Interference fringes are formed on the diffraction grating member from the inside to the surface, and the method for forming the interference fringes itself may be the same as the conventional forming method. Specifically, for example, a member constituting the diffraction grating member is irradiated with object light from a first predetermined direction on one side to a member constituting the diffraction grating member (for example, photopolymer material), and at the same time Is irradiated with reference light from a second predetermined direction on the other side, and interference fringes formed by the object light and the reference light may be recorded inside the member constituting the diffraction grating member. By appropriately selecting the first predetermined direction, the second predetermined direction, the wavelength of the object light and the reference light, the desired pitch of the interference fringes on the surface of the diffraction grating member, the desired inclination angle of the interference fringes ( Slant angle) can be obtained. The inclination angle of the interference fringes means an angle formed between the surface of the diffraction grating member (or the diffraction grating layer) and the interference fringes. In the case where the first diffraction grating member and the second diffraction grating member are formed of a laminated structure of P-layer diffraction grating layers made of a reflective volume hologram diffraction grating, such a diffraction grating layer is laminated with a P-layer diffraction grating. After each layer is produced separately, the P diffraction grating layer may be laminated (adhered) using, for example, an ultraviolet curable adhesive. In addition, after producing a single diffraction grating layer using a photopolymer material having adhesiveness, the photopolymer material having adhesiveness is sequentially attached thereon to produce a diffraction grating layer, whereby the P layer A diffraction grating layer may be produced.

  Alternatively, in the head-mounted display of the present invention, the light guide means is disposed closer to the center of the observer's face than the image generating device, and the light emitted from the image generating device is incident thereon, and the observer's pupil It can be set as the form comprised from the semi-transmission mirror radiate | emitted toward. The light emitted from the image generating apparatus may be structured to propagate in the air and enter the semi-transmissive mirror, or, for example, a transparent member such as a glass plate or a plastic plate (specifically, described later) A structure may be adopted in which the light propagates through the inside of a member made of the same material as the material constituting the light guide plate and enters the semi-transmissive mirror. Note that the semi-transmissive mirror may be attached to the image generating apparatus through this transparent member, or the semi-transmissive mirror may be attached to the image generating apparatus through a member different from the transparent member.

In the head-mounted display of the present invention including the preferred form and configuration described above, the image generation device includes:
(B) Light source,
(B) a collimating optical system that collimates the light emitted from the light source;
(C) scanning means for scanning parallel light emitted from the collimating optical system; and
(D) a relay optical system that relays and emits parallel light scanned by the scanning means;
It can be set as the form comprised from.

  Here, the scanning means corresponds to the light reflecting device assembly of the present invention. That is, the parallel light emitted from the collimating optical system is scanned and reflected by the mirror structure constituting the light reflecting device assembly, enters the light reflecting device, is emitted from the light reflecting device, and passes through the relay optical system. Incident on the light guiding means. Alternatively, the parallel light emitted from the collimating optical system enters the light reflecting device, is emitted from the light reflecting device, is scanned and reflected by the mirror structure, reenters the light reflecting device, and is emitted from the light reflecting device. And enters the light guiding means. The number of mirror structures is, for example, 1.

  Examples of the light source in the image generating apparatus having such a configuration include a light emitting element, and specifically, a red light emitting element, a green light emitting element, a blue light emitting element, and a white light emitting element. Moreover, as a light emitting element, a semiconductor laser element, a solid state laser, and LED can be illustrated, for example. The number of pixels (virtual pixels) in the image generating apparatus having such a configuration may be determined based on the specifications required for the head-mounted display. As a specific value of the number of pixels (virtual pixels), 320 × 240, 640 × 480, 854 × 480, 1024 × 768, and 1920 × 1080. Further, when the light source is composed of a red light emitting element, a green light emitting element, and a blue light emitting element, it is preferable to perform color synthesis using, for example, a cross prism. What is necessary is just to comprise a relay optical system from a known relay optical system.

  In the image generating apparatus having such a configuration, the collimated optical system makes a plurality of parallel lights incident on the light guide plate. However, the request for such parallel light is that these lights are the light guide plate. This is based on the fact that the light wavefront information at the time of incidence on the light needs to be preserved even after being emitted from the light guide plate via the first deflecting means and the second deflecting means. Note that, in order to generate a plurality of parallel lights, specifically, for example, a light emitting portion in a cross prism may be positioned at a position (position) of a focal length in a collimating optical system. The collimating optical system has a function of converting pixel position information into angle information in the optical system of the light guide. As the collimating optical system, an optical system having a positive optical power as a whole, which is a single lens or a combination of a convex lens, a concave lens, a free-form surface prism, and a hologram lens, can be exemplified.

  The light guide plate has two parallel surfaces (a first surface and a second surface) extending parallel to the axis (Y ′ direction) of the light guide plate. When the surface of the light guide plate on which light is incident is the light guide plate entrance surface, and the surface of the light guide plate on which light is emitted is the light guide plate exit surface, the light guide plate entrance surface and the light guide plate exit surface are configured by the first surface. Alternatively, the light guide plate entrance surface may be configured by the first surface, and the light guide plate exit surface may be configured by the second surface. As a material constituting the light guide plate, glass containing optical glass such as quartz glass or BK7, or plastic material (for example, PMMA, polycarbonate resin, acrylic resin, amorphous polypropylene resin, styrene resin containing AS resin) ). The shape of the light guide plate is not limited to a flat plate, and may have a curved shape.

When the head-mounted display of the present invention is binocular,
The light guiding means is disposed on the center side of the observer's face as a whole than the image generating device,
A coupling member that couples the two image display devices;
The coupling member is attached to the observer-facing side of the central part of the frame located between the two pupils of the observer,
The projection image of the coupling member is preferably included in the projection image of the frame.

  In this way, the coupling member is structured to be attached to the central portion of the frame located between the two pupils of the observer, that is, the image display apparatus is directly attached to the frame. Otherwise, when the observer wears the frame on the head, the temple portion spreads outward, and as a result, even if the frame is deformed, the image generation apparatus Alternatively, the displacement (position change) of the light guide means does not occur or even if it occurs. Therefore, it is possible to reliably prevent the convergence angle of the left and right images from changing. In addition, since it is not necessary to increase the rigidity of the front portion of the frame, there is no increase in the weight of the frame, a decrease in design, and an increase in cost. Further, since the image display device is not directly attached to the eyeglass-type frame, it is possible to freely select the frame design and color according to the preference of the observer, and the restrictions imposed by the frame design There are few, and the freedom degree in design is high. In addition, the coupling member is disposed between the observer and the frame, and the projection image of the coupling member is included in the projection image of the frame. In other words, when the head-mounted display is viewed from the front of the observer, the coupling member is hidden by the frame. Therefore, high design and design can be given to the head-mounted display.

  Note that the coupling member is configured to be attached to the side facing the observer of the central part of the front part (corresponding to the bridge part in normal glasses) located between the two pupils of the observer. Is preferred.

  The two image display devices are coupled to each other by the coupling member. Specifically, the image generation device can be attached to each end of the coupling member so that the mounting state can be adjusted. In this case, it is preferable that each image generating device is located outside the observer's pupil. Furthermore, in such a configuration, the distance between the center of the mounting portion of one image generating apparatus and one end of the frame (one wisdom, armor) is α, and the end of the frame from the center of the coupling member When the distance to (one wisdom) is β, the distance between the attachment center of the other image generating apparatus and one end of the frame (one wisdom) is γ, and the length of the frame is L. 01 × L ≦ α ≦ 0.30 × L, preferably 0.05 × L ≦ α ≦ 0.25 × L, 0.35 × L ≦ β ≦ 0.65 × L, preferably 0.45 × It is desirable to satisfy L ≦ β ≦ 0.55 × L, 0.70 × L ≦ γ ≦ 0.99 × L, and preferably satisfy 0.75 × L ≦ γ ≦ 0.95 × L. Specifically, for example, the attachment of the image generating device to each end of the coupling member is provided with three through holes at each end of the coupling member, and screwed portions corresponding to the through holes are provided in the image generating device. The screw is passed through each through hole and screwed into a screwing portion provided in the image generating apparatus. A spring is inserted between the screw and the screwing portion. Thus, the mounting state of the image generating device (the inclination of the image generating device with respect to the coupling member) can be adjusted by the tightening state of the screws.

  Here, the attachment center of the image generation device is a projection image of the image generation device obtained when the image generation device and the frame are projected onto a virtual plane in a state where the image generation device is attached to the coupling member. A bisection point along the axial direction of the frame where the projected images of the frame overlap. The center of the coupling member refers to a bisector along the axial direction of the frame where the coupling member is in contact with the frame when the coupling member is attached to the frame. The frame length is the length of the projected image of the frame when the frame is curved. The projection direction is a direction perpendicular to the face of the observer.

  Alternatively, although the two image display devices are coupled by the coupling member, specifically, the coupling member may be configured to couple the two light guide means. In some cases, the two light guide means are integrally manufactured. In such a case, the coupling member is attached to the integrally manufactured light guide means. Is included in a form in which two light guide means are combined. Α ′ is the distance between the center of one image generation device and one end of the frame, and α ′ is the distance between the center of the other image generation device and one end of the frame is γ ′. The values are preferably the same as the values of α and γ described above. Note that the center of the image generation device means that the projection image of the image generation device obtained when the image generation device and the frame are projected onto the virtual plane in a state where the image generation device is attached to the light guide means. A bisection point along the axial direction of the frame where the projected images overlap.

  The shape of the coupling member is essentially arbitrary as long as the projection image of the coupling member is included in the projection image of the frame, and examples thereof include a rod shape and an elongated plate shape. Examples of the material constituting the coupling member include metals, alloys, plastics, and combinations thereof.

Example 1 relates to a photonic crystal and a light reflecting device of the present invention. A conceptual diagram of the photonic crystal of Example 1 is shown in FIG. 1A. The photonic crystal of Example 1 is a two-dimensional or more photo in which holes 11 having an elliptical cross section are arranged inside. Nick crystal 10. The arrangement of the holes 11 is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal 10 and the arrangement pitch PT _{y of the} holes along the y-axis direction are Is different. Further, as shown in FIG. 2A, the dispersion surface in the wave number space is a rectangle having an aspect ratio of 4 or more. In FIG. 2A, the x-direction length of the dispersion surface is denoted by D _x , and the y-direction length is denoted by D _y . Here, a rectangle having an aspect ratio of 4 or more means that the value of D _y / D _x is 4 or more. In FIG. 2A, a circle indicates a dispersion surface in a vacuum.

  Further, in the light reflecting device 12 of Example 1, a light incident surface 13 and a light reflecting film 15 are formed, and light incident from the light incident surface 13 is reflected, as shown schematically in FIG. The photonic crystal 10 (or photonic crystal body) of Example 1 provided with the light reflecting surface 14 and the light emitting surface 16 from which the light reflected by the light reflecting surface 14 is emitted. The light incident surface 13, the light reflecting surface 14, and the light emitting surface 16 are flat surfaces.

Here, in Example 1, the photonic crystal 10 is a two-dimensional photonic crystal and is made of titanium oxide (TiO ₂ ) having a refractive index of 2.5. The cross-sectional shape of the hole 11, that is, the cross-sectional shape when the hole 11 is cut in the xy plane is an ellipse. The air holes 11 are filled with air (refractive index: 1.0). In the cross-sectional shape of the hole 11, the long axis (length: VD _L ) of the ellipse is parallel to the y axis, and the short axis (length: VD _S ) is parallel to the x axis. The holes 11 extend inside the photonic crystal 10 in parallel with the z-axis. A hole 11 is arranged at each of four vertices of a rectangle having a side parallel to the x-axis as a short side and a side parallel to the y-axis as a long side, and one more hole 11 at the center of the rectangle. Is arranged. The photonic crystal 10 or the light reflecting device 12 itself can be produced by a known method.

In particular,
PT _y = 1.35PT _x
VD _L = 0.75PT _x
VD _S = 0.40PT _x
When the wavelength of incident light is 640 nm (red), PT _x = 198.4 μm, and when the wavelength of incident light is 520 nm (green), PT _x = 161.2 μm and the wavelength of incident light is 450 nm ( In the case of blue), PT _x = 139.5 μm.

Then, as shown in (A) in FIG. 2, in the photonic crystal 10, the length D _x of the long sides of the dispersion surface, the diameter of the dispersion surface in the vacuum (1/2) ^1/2 or more It is.

Furthermore, the size k _x of the wave vector in the x-axis direction of the incident light, the magnitude of the wave vector and k _y in the y-axis direction, the value of _{(PT x · k x) /} (PT y · k y) m (where m is an integer greater than or equal to 2), and the angle between the x-axis direction and the light reflecting surface 14 is θ,
tan (θ) = m (1)
Satisfied. In particular,
k _x = 1.70
k _y = 0.32
m = 4
θ = 76.0 (degrees)
It is. With such a configuration, when the light incident on the light reflecting device 12 is reflected by the light reflecting surface 14, the difference between the angle before reflection and the angle after reflection can be 90 degrees. That is, the sum of the incident angle θ _I to the light reflecting surface and the exit angle θ _O from the light reflecting surface can be 90 degrees.

The result of obtaining the relationship between the incident angle and the outgoing angle in the light reflecting device 12 of Example 1 is shown in the graph of FIG. Moreover, the result of simulating the relationship between the swing angle expansion range (unit: arbitrary) and the swing angle expansion ratio in the light reflecting device 12 of Example 1 is shown in FIG. 3A, and the swing angle expansion range (unit: arbitrary). FIG. 3B shows the result of simulating the relationship between and the swing angle linearity. Here, the swing angle expansion range is an incident light angle range in which the swing angle can be expanded with respect to a desired change in the incident light angle (± 10 degrees in the example of the first embodiment). If the radius of the equifrequency surface is R, it is expressed as follows.
D _y / (2R · sin10 °)
The swing angle enlargement ratio represents the ratio of the angle change of the emitted light to the angle change of the incident light, and is expressed by D _x / D _y in the wave number space. Furthermore, the swing angle linearity is an index indicating how linear the relationship between the incident light angle and the outgoing light angle is, and the boundary condition of the wave vector due to mirror reflection (the oblique line in FIG. 2A). Reference) and the maximum slope of the long side of the equal frequency surface. Note that a photonic crystal in which holes are arranged only at four vertices of a rectangle having a side parallel to the x axis as a short side and a side parallel to the y axis as a long side is used as the photonic crystal of Comparative Example 1. A similar simulation was performed. The results are shown in FIG. 3 (A) and (B). 3A and 3B, the results of Example 1 are indicated by black triangle marks, and the results of Comparative Example 1 are indicated by black rhombus marks. In addition, a desired range in each characteristic is indicated by a range indicated by “In spec”.

  From FIG. 2B, there is good linearity between the incident angle and the outgoing angle, and from FIG. 3A and FIG. 3B, the characteristics of the photonic crystal 10 of Example 1 are comparative examples. It can be seen that the characteristics are superior to those of photonic crystal No. 1.

Furthermore, the result of simulating the relationship between the incident angle of the incident light on the light incident surface 13 of the light reflecting device 12 and the outgoing angle of the outgoing light from the light outgoing surface 16 is shown in FIG. From FIG. 4, it can be seen that in the range of the incident angle from −10 degrees to +10 degrees, the emission angle is expanded to the range of −41 degrees to +42 degrees. That is, it can be seen that the enlargement ratio (ratio of exit angle / incident angle) of the swing angle (light deflection angle) is about four times. The larger the value of D _y / D _x, the larger the swing angle enlargement ratio, and the larger the value of D _x , the greater the swing angle enlargement range can be achieved. The closer the long side of a to the straight line, the better the linearity of the relationship between the incident angle and the outgoing angle.

  As described above, in the photonic crystal or the light reflecting device according to the first embodiment, since the uniform region of the dispersion surface is used, the design margin with respect to the incident angle and the wavelength dispersion is large. Further, since the shape of the dispersion surface in the wave number space is set to an aspect ratio of 4 or more, the enlargement ratio (the ratio of the emission angle / incident angle) of the swing angle (light deflection angle) can be increased to 4 times or more. Moreover, by making the shape of the dispersion surface in the wave number space rectangular, it is possible to maintain good linearity with respect to the relationship between the incident angle and the outgoing angle.

Example 2 relates to the light reflecting device assembly of the present invention. The light reflecting device assembly 17 of Example 2 whose conceptual diagram is shown in FIG.
(A) the light reflecting device 12, and
(B) Mirror structure 20A,
Is a light reflection device assembly. The light reflecting device 12 includes the light reflecting device 12 of the first embodiment described above.

On the other hand, the mirror structure 20A
(A) The mirror main body 23 and the mirror 21 including the light reflecting layer 22 provided on the surface of the mirror main body 23,
(B) A plurality of support columns 30 having an upper end 30A fixed to the back surface 24 of the mirror main body 23.
(C) Displacement member 40 in which one end 40A is fixed to lower end 30B of each support column 30, and
(D) a support portion 60 that fixes the other end portion 40B of the displacement member 40;
Consists of.

In the light reflecting device assembly 17 according to the second embodiment, as in the first embodiment, PT _y > PT _x is _satisfied . The light incident surface 13 of the light reflecting device 12 is parallel to the y axis, and the light emitting surface 16 of the light reflecting device 12 is parallel to the x axis. The light emitted from the light source is reflected by the light reflecting layer 22 of the mirror 21, enters the light incident surface 13 of the light reflecting device 12, is reflected by the light reflecting surface 14, and is emitted from the light emitting surface 16. .

Furthermore, when the angle of the mirror 21 is changed by | θ _M |, the angle of light incident on the mirror 21 and emitted from the mirror 21 changes by | 2θ _M |. Further, as described in the first embodiment, the enlargement ratio (the ratio of the emission angle / incident angle) of the swing angle (light deflection angle) is about four times. Accordingly, the light incident on the mirror 21 and finally emitted from the light reflecting device 12 changes by about | 8θ _M | when the angle of the mirror 21 changes by | θ _M |. Thus, in the light reflecting device assembly 17 of the second embodiment, a swing angle (light deflection angle) that is about eight times as large as the angle change of the mirror 21 can be obtained.

The third embodiment is a modification of the second embodiment. Even in the light reflecting device assembly 18 of the third embodiment whose conceptual diagram is shown in FIG. 5B, as in the first embodiment, there is a relationship of PT _y > PT _x . The light incident surface 13A of the light reflecting device 12A is parallel to the x axis, and the light emitting surface 16A of the light reflecting device 12A is parallel to the y axis. The light emitted from the light source enters the light incident surface 13A of the light reflecting device 12A, is reflected by the light reflecting surface 14A on which the light reflecting film 15A is formed, is emitted from the light emitting surface 16A, and is reflected on the mirror 21. Reflected by the light reflecting layer 22, re-entered from the light emitting surface 16A of the light reflecting device 12A, reflected by the light reflecting surface 14A, and light in a direction different from the incident direction from the light source to the light incident surface 13A. The light exits from the incident surface 13A.

For example, it is assumed that the mirror 21 is arranged in parallel with the y axis. In such a case, light incident on the light reflecting device 12 at an incident angle of −20 degrees is emitted from the light emitting surface 16A at an output angle of −5 degrees, reflected by the mirror 21, and incident on the light reflecting device 12 at an incident angle of +5. It re-enters from the light exit surface 16A at a degree. Finally, the light is emitted from the light reflecting device 12 at an emission angle of +20 degrees. Even in the third embodiment, when the angle of the mirror 21 is changed by | θ _M |, the light finally emitted from the light reflecting device 12 is about | 8θ _M | as in the second embodiment. ,Change. Thus, even in the light reflecting device assembly 18 of the third embodiment, a swing angle (light deflection angle) that is about eight times as large as the angle change of the mirror 21 can be obtained.

  Example 4 or Examples 5 to 11 to be described later relate to a mirror structure (two-dimensional MEMS scanner) constituting the light reflecting device assemblies 17 and 18 of Example 2 or Example 3.

  Example 4 relates to the mirror structure (two-dimensional MEMS scanner) according to the first aspect, and more specifically, to the mirror structure having the configuration of 1A. A schematic partial end view of the mirror structure of Example 4 and a schematic view of the mirror structure of Example 4 viewed from above are shown in FIGS. 6A and 6B, respectively. FIG. 7 schematically shows the arrangement of the displacement members and the struts constituting the mirror structure of Example 4.

As described in Example 2, the mirror structure 20A of Example 4 is as follows.
(A) Mirror main body 23 and a mirror 21 including a light reflecting layer 22 provided on the surface of the mirror main body 23,
(B) A plurality of support columns 30 having an upper end 30A fixed to the back surface 24 of the mirror main body 23.
(C) Displacement member 40 in which one end 40A is fixed to lower end 30B of each support column 30, and
(D) a support portion 60 that fixes the other end portion 40B of the displacement member 40;
Consists of.

  Here, the mirror structure 20A according to the fourth embodiment includes four support columns 30 and four displacement members 40, and the upper end portion 30A of each support column 30 is fixed around the center of gravity of the mirror 21, and is opposed to the first one. The first support column 31 and the third support column 33 are arranged on the X axis, and the remaining second support column 32 and the fourth support column 34 are arranged on the Y axis. In FIG. 7 and FIGS. 9 to 13 to be described later, the fixed center of each column 30 (31, 32, 33, 34) is indicated by “+”, and the center of gravity of the mirror 21 is set to four columns 30 (31. , 32, 33, 34). Furthermore, the fixed center of each displacement member 40 (41, 42, 43, 44) is arranged with a “+” mark at the center of the white square marked on the outside of the displacement member 40 (41, 42, 43, 44). And located adjacent to the part marked with a symbol. The lower end 30B of the first column 31 is fixed to one end 40A of the first displacement member 41, and the lower end 30B of the second column 32 is fixed to one end 40A of the second displacement member 42. The lower end 30B of the third column 33 is fixed to one end 40A of the third displacement member 43, and the lower end 30B of the fourth column 34 is fixed to one end 40A of the fourth displacement member 44. It is fixed to. The origin where the X axis and the Y axis intersect is coincident with the center of gravity of the mirror 21.

Then, along the X axis, the other end portion 40B of the third displacement member 43, one end portion 40A of the third displacement member 43, one end portion 40A of the first displacement member 41, and the first displacement member 41 are arranged. The other end portion 40B is arranged in this order. On the other hand, along the Y axis, the other end 40B of the fourth displacement member 44, one end 40A of the fourth displacement member 44, one end 40A of the second displacement member 42, and the second displacement member 42 are provided. The other end portion 40B is arranged in this order. That is, in the mirror structure 20A of Example 4, assuming Gaussian coordinates with the center of gravity of the mirror 21 as the origin,
The fixed center coordinates of the first column 31 are (X ₁ , 0),
The fixed center coordinates of the second support column 32 are (0, Y ₂ ),
The fixed center coordinate of the third column 33 is (X ₃ , 0),
The fixed center coordinates of the fourth column 34 are (0, Y ₄ ),
The fixed center coordinates of the other end portion 40B of the first displacement member 41 are (X ′ ₁ , Y ′ ₁ ),
The fixed center coordinates of the other end portion 40B of the second displacement member 42 are (X ′ ₂ , Y ′ ₂ ),
The fixed center coordinates of the other end 40B of the third displacement member 43 are (X ′ ₃ , Y ′ ₃ ),
When the fixed center coordinate of the other end portion 40B of the fourth displacement member 44 is (X ′ ₄ , Y ′ ₄ ),
X ′ ₃ <X ₃ <0 <X ₁ <X ′ ₁
Y ′ ₄ <Y ₄ <0 <Y ₂ <Y ′ ₂
Are in a relationship. Furthermore,
X ₁ = −X ₃
X ′ ₁ = −X ′ ₃
Y ' ₁ = Y' ₃
Y ₂ = −Y ₄
Y ′ ₂ = −Y ′ ₄
X ' ₂ = X' ₄
Satisfied.

  Further, in the mirror structure 20A of Example 4, the outer shape of each displacement member 40 (41, 42, 43, 44) is an isosceles triangle, and the displacement member 40 (41, 42, 43, 44). One end portion 40A corresponds to the vicinity of the apex angle of the isosceles triangle, and the other end portion 40B of the displacement member 40 (41, 42, 43, 44) corresponds to the base of the isosceles triangle.

In Example 4 or Examples 5 to 11 described later, the displacement member 40 is a unimorph type piezoelectric actuator, more specifically, a single piezoelectric material thin film 53 that expands and contracts in the length direction is displaced. It has a structure formed on base layers (support structures) 51 and 52 constituting the member 40. The one end portion 40A of the displacement member 40 is driven (moved up and down) by the movement of the piezoelectric material thin film 53 that expands and contracts in the length direction. Here, the piezoelectric material thin film 53 is made of PZT [lead zirconate titanate, Pb (Zr, Ti) O ₃ ], which is a solid solution of PbZrO ₃ and PbTiO ₃ . The base layer (support structure) has a laminated structure of a silicon layer 51 and a silicon oxide layer (specifically, an SiO ₂ layer) 52. The light reflecting layer 22 is composed of an aluminum (Al) layer. The mirror main body 23 is composed of a laminated structure of a silicon layer and a silicon oxide layer (specifically, an SiO ₂ layer). The support column 30 is composed of a silicon layer and a silicon oxide layer ( Specifically, it is composed of a combination with the SiO ₂ layer. The cross-sectional shape of the column 30 when the column is cut along a plane perpendicular to the axis of the column is circular. However, the present invention is not limited to this. Although the outer shapes of the mirror body 23 and the light reflection layer 22 are circular, the present invention is not limited to this, and the mirror body 23 and the light reflection layer 22 have the same size. It is not limited. A lower electrode (not shown) is provided between the base layer (support structure) constituting the displacement member 40 and the piezoelectric material thin film 53, and an upper electrode (not shown) is provided on the piezoelectric material thin film 53. Is provided. Here, the lower electrode has a Pt / Ti laminated structure. The Ti layer is in contact with the silicon layer 51 constituting the base layer, and the Ti layer functions as an adhesion layer. The upper electrode is made of platinum (Pt).

  Hereinafter, with reference to (A) to (C) of FIG. 19, (A) to (C) of FIG. 20, and (A) to (C) of FIG. 21, the manufacturing method of the mirror structure of Example 4 will be described. explain.

[Step-400]
First, an SOI substrate is prepared. This SOI substrate has a known three-layer structure of a support layer 80 made of a silicon semiconductor substrate, a silicon oxide layer (box layer) 52 made of SiO ₂ , and a silicon layer (active layer) 51. Examples of the thicknesses of the support layer 80, the silicon oxide layer (box layer) 52, and the silicon layer (active layer) 51 are 0.3 mm or more, 1 μm, and 30 μm, respectively. Then, a lower electrode, a piezoelectric material thin film 53, and an upper electrode are formed on the silicon layer (active layer) 51 by a known method (see FIG. 19A). Next, the upper electrode, the piezoelectric material thin film 53, and the lower electrode are patterned based on the known lithography technique and dry etching technique, and further, the silicon layer (active layer) 51 and the silicon oxide layer (box layer) 52 are patterned. Thus, the displacement member 40 can be obtained on the support layer 80 (see FIG. 19B). A part of the displacement member 40 extends on the support layer 80 as a kind of wiring.

[Step-410]
Thereafter, a resist layer 81 as a protective film is formed on the entire surface of the support layer 80 including the displacement member 40 based on a known method (see FIG. 19C), and based on a known lithography technique and dry etching technique. Then, by patterning the support layer 80 from the back surface, the support portion 60 and the support column 30 are obtained (see FIG. 20A). Thereafter, the remaining support layer 80 (support unit 60 and support column 30) is subjected to a thermal oxidation process to form an oxide film 82 on the surface of the support layer 80 (support unit 60 and support column 30) (FIG. 20B). reference). The oxide film 82 is illustrated only in FIGS. 20B to 20C and FIGS. 21A to 21C.

[Step-420]
On the other hand, another SOI substrate is prepared for mirror formation. This SOI substrate also has a known three-layer structure of a substrate 83 made of a silicon semiconductor substrate, a silicon oxide layer 84, and a silicon layer 85. Then, the silicon layer 85 and the oxide film 82 of the SOI substrate are overlapped and bonded by a known bonding technique (bonding technique) (see FIG. 20C and FIG. 21A). Note that the silicon oxide layer 84 and the silicon layer 85 are shown only in FIG. 20C and FIGS. 21A to 21C.

[Step-430]
Thereafter, for example, the substrate 83 is removed based on a wet etching method, and an aluminum layer 22 ′ is formed on the exposed silicon oxide layer 84 based on a known sputtering method (see FIG. 21B).

[Step-440]
Next, the aluminum layer 22 ′, the silicon oxide layer 84, and the silicon layer 85 are patterned based on the well-known lithography technique and dry etching technique to obtain the mirror 21 including the light reflecting layer 22 and the mirror main body 23. (See FIG. 21C).

[Step-450]
Thereafter, by removing the resist layer 81 and adhering the spacer 61, the mirror structure 20A of Example 4 shown in FIG. 6A and the like can be obtained.

  For example, if the one end portion 40A of the first displacement member 41 is displaced upward and the one end portion 40A of the third displacement member 43 is displaced downward, the mirror 21 moves downward on the left hand side in FIG. Can be obtained. That is, the mirror 21 can be rotated counterclockwise around the Y axis. Further, if the one end portion 40A of the first displacement member 41 is displaced downward and the one end portion 40A of the third displacement member 43 is displaced upward, the mirror 21 moves downward on the right hand side in FIG. Can be obtained. That is, the mirror 21 can be rotated clockwise around the Y axis. On the other hand, if the one end portion 40A of the second displacement member 42 is displaced upward and the one end portion 40A of the fourth displacement member 43 is displaced downward, the mirror 21 moves downward on the near side in FIG. Can be obtained. That is, the mirror 21 can be rotated in a certain direction around the X axis. Further, if the one end portion 40A of the second displacement member 42 is displaced downward and the one end portion 40A of the fourth displacement member 43 is displaced upward, the mirror 21 is moved upward in FIG. 6A. Can be obtained. That is, the mirror 21 can be rotated around the X axis in a direction opposite to a certain direction. Further, by independently controlling the upward or downward displacement of the first displacement member 41, the second displacement member 42, the third displacement member 43, and the fourth displacement member 44, the method of the mirror 21 is controlled. The line can be controlled in any direction. The rotation of the mirror around the X axis may be performed based on resonance or based on non-resonance. Similarly, the rotation of the mirror around the Y axis may be performed based on resonance or based on non-resonance.

  In the mirror structure 20A of Example 4, the outer shape of the mirror main body 23 and the light reflecting layer 22 is a circle having a diameter of 1.3 mm, the height of the column 30 is 400 μm, and the cross section of the column 30 is a circle having a diameter of 40 μm. The fixed center of the column 30 is 40 μm from the center (center of gravity) of the mirror 21, the length of the base of the isosceles triangle in the displacement member 40 is 2.0 mm, and the column 30 is fixed from the bottom of the isosceles triangle in the displacement member 40. FIG. 8 shows the result of simulating the displacement state of the displacement member 40 by structural calculation, assuming that the distance to the position is 1.0 mm. Note that sine waves of 80 volts and -80 volts were applied to the two electrodes in opposite phases. As a result of the simulation, the swing angle of the mirror 21 during resonance driving is ± 6.3 degrees and the resonance frequency is 23.4 kHz. For example, the characteristics that can be sufficiently used in a display device described later have been shown.

  In the mirror structure 20 </ b> A of the fourth embodiment, the upper ends 30 </ b> A of the plurality of columns 30 are fixed to the back surface 24 of the mirror main body 23, and the lower ends 30 </ b> B are connected to one end 40 </ b> A of the displacement member 40. The other end portion 40B of the displacement member 40 is fixed to the support portion 60. Then, by applying a voltage to the upper electrode and the lower electrode from a drive circuit (not shown) and expanding and contracting the piezoelectric material thin film 53, independent displacement of the plurality of displacement members 40 in the direction approaching the mirror 21 and the direction away from the mirror 21 is achieved. Can be generated. That is, since the displacement member 40 for rotating (driving) the mirror 21 and the support column 30 for supporting (holding) the mirror 21 are different structures, the driving force of the displacement member 40 is increased and the angle of the mirror 21 is increased. Both ease of displacement can be achieved. Further, since the mirror 21 and the support column 30 are connected, it is easy to operate the mirror 21 only in the rotation direction, and a structure for supporting the mirror 21 other than the support column 30 is not necessary. Therefore, despite the simple structure and configuration, the mirror 21 can be tilted at a larger angle by independent displacement of the plurality of displacement members 40 in the direction approaching the mirror 21 and the direction away from the mirror 21. Become. In addition, since each support column 30 is independently driven (moved up and down), it is difficult for crosstalk to occur when driving in two directions, the X direction and the Y direction. Further, if the design of the displacement member 40 that contributes to the rotation of the mirror 21 around a certain axis and the displacement member 40 that contributes to the rotation around another axis are performed independently, the mirror is suitable for a raster scan operation. The structure 20A can be easily realized. In the mirror structure 20A (two-dimensional MEMS scanner) that deflects the angle of the mirror 21, the structure such as the displacement member can be arranged below the mirror 21, so that the mirror structure 20A can be downsized. As a result, downsizing of the display device or the like can be realized. In this way, it is possible to realize a MEMS scanner that satisfies all three elements of small size, high speed, and large swing angle, which is difficult to realize with a conventional mirror structure.

  The fifth embodiment is a modification of the fourth embodiment. FIG. 9A schematically shows the arrangement of the displacement members and the struts constituting the mirror structure of Example 5, and FIG. 9B schematically shows the displacement state of the mirror and the displacement member. In the mirror structure according to the fifth embodiment, each displacement member 40 includes an isosceles triangular portion 40C and a protruding portion 40D protruding from the portion of the isosceles triangular portion 40C corresponding to the apex angle of the isosceles triangle. And the groove part 45 extended in parallel with the base of an isosceles triangle is provided in the vicinity of the part of the isosceles triangle part 40C applicable to the vertex angle of an isosceles triangle. Furthermore, one end portion 40A of the displacement member 40 is constituted by a projecting portion 40D, and the other end portion 40B of the displacement member 40 is constituted by a portion of an isosceles triangle portion 40C corresponding to the base of the isosceles triangle. Yes. In FIG. 9B, the groove 45 is indicated by a circle.

  By the way, when a structure like Example 4 is employ | adopted, the direction in which the mirror 21 inclines and the direction in which a displacement member displaces do not correspond. That is, for example, when the mirror 21 is tilted counterclockwise around the Y axis, the first displacement member 41 and the third displacement member 43 are opposite to the mirror 21, that is, clockwise around the Y axis. Rotate. Such a phenomenon is referred to as “rotation of the displacement member in the opposite direction” for convenience. As a result, undesired stresses may be generated at the connection portion between the displacement member 40 and the support column 30 and at the connection portion between the support column 30 and the mirror 21. This stress limits the driving of the mirror 21 and may cause damage to the connecting portion.

  In the fifth embodiment, by providing the groove 45 (joint structure), as shown in the conceptual diagram of FIG. 9B, the change in the angle of the support column 30 is more easily generated. Generation of undesired stress can be reduced. Therefore, a large swing angle can be realized with a smaller driving force, and a more reliable mirror structure can be obtained.

  The sixth embodiment is a modification of the fifth embodiment. In FIG. 10, arrangement | positioning of the displacement member 40 and the support | pillar 30 which comprise the mirror structure of Example 6 is shown typically. In the sixth embodiment, the groove 45 extends to a portion of the isosceles triangle portion 40C corresponding to the base of the isosceles triangle. That is, the portion of the isosceles triangle portion 40C corresponding to the apex angle of the isosceles triangle is connected, but the other portion of the isosceles triangle portion 40C is separated by the groove 45. That is, it has a structure in which two piezoelectric material thin films 53 are provided for one column 30.

For example, in FIG. 10, when the mirror 21 is tilted clockwise around the Y axis, the voltage applied to the piezoelectric material thin film 53 of the isosceles triangle portion 40 ₁ constituting the second displacement member 42 and the isosceles The voltage applied to the piezoelectric material thin film 53 of the triangular part 40 ₂ is slightly changed to displace the isosceles triangular part 40 ₁ further downward (−Z direction). Then, the protrusion 40D that constitutes the second displacement member 42 is further inclined clockwise around the Y axis, and as a result, the second support column 32 is similarly inclined. As described above, in the mirror structure according to the sixth embodiment, the mirror tilt (rotation) can be controlled more finely, the crosstalk around the X axis and the Y axis is less, and the mirror has a larger swing angle. A structure can be obtained.

  The seventh embodiment is also a modification of the fourth embodiment. In FIG. 11, arrangement | positioning of the displacement member 40 and the support | pillar 30 which comprise the mirror structure of Example 7 is shown typically.

  When performing a raster scan, the mirror 21 is rotated about the X axis at high speed based on resonance, and the mirror 21 is rotated about the Y axis at low speed based on non-resonance. A high natural frequency is required for the second displacement member 42 and the fourth displacement member 44 for causing the rotation of the mirror 21 around the X axis, while the rotation of the mirror 21 around the Y axis at a low speed is required. The first displacement member 41 and the third displacement member 43 for causing the movement are required to have a large driving force that can obtain a large displacement even in non-resonance.

  In the mirror structure of the seventh embodiment, the first displacement member 41 and the third displacement member 43 rotate the mirror 21 around the Y axis at a low speed, but a large driving force can be obtained. Has a meander structure. On the other hand, the second displacement member 42 and the fourth displacement member 44 have a cantilever structure (plate spring structure, cantilever structure) that enables the mirror 21 to rotate around the X axis at high speed. The first displacement member 41 and the third displacement member 43 are driven at a lower frequency than the second displacement member 42 and the fourth displacement member 44. Further, the other end portion 40B of the first displacement member 41 is fixed to the support portion 60 at two locations, and the other end portion 40B of the third displacement member 43 is fixed to the support portion 60 at two locations. Yes.

Specifically, the other end portion 40B of the first displacement member 41 is fixed to the support portion 60 at two locations of fixed center coordinates (X ′ ₁ , Y ′ ₁₁ ) and (X ′ ₁ , Y ′ ₁₂ ). The other end portion 40B of the third displacement member 43 is fixed to the support portion 60 at two locations of fixed center coordinates (X ′ ₃ , Y ′ ₃₁ ) and (X ′ ₁ , Y ′ ₃₂ ). The other end portion 40B of the second displacement member 42 is fixed to the support portion 60 at one fixed central coordinate (X ′ ₂ , Y ′ ₂ ), and the other end portion 40B of the fourth displacement member 44. Is fixed to the support portion 60 at one fixed central coordinate (X ′ ₄ , Y ′ ₄ ),
X ′ ₁ = −X ′ ₃
Y _'11 = Y' ₃₁
Y _'12 = Y' ₃₂
Y ′ ₂ = −Y ′ ₄
X ' ₂ = X' ₄
Satisfied.

  In the seventh embodiment, the second displacement member 42 and the fourth displacement member 44 that contribute to driving the mirror 21 around the X axis, and the first displacement member that contributes to driving the mirror 21 around the Y axis. By making the structures of 41 and the third displacement member 43 different, the raster scan operation of the mirror can be performed more easily. In addition, about the shape, structure, and structure of the 1st displacement member 41, the 2nd displacement member 42, the 3rd displacement member 43, and the 4th displacement member 44, it is limited to the shape, structure, and structure shown in FIG. Instead, it may be adapted to the specifications required for driving the displacement members 41, 42, 43, 44.

  Example 8 is a modification of Example 4, but relates to a mirror structure having the configuration 1B. FIG. 12A schematically shows the arrangement of the displacement member 40 and the column 30 constituting the mirror structure of Example 8, and the displacement state of the mirror 21 and the displacement member 40 is schematically shown in FIG. ).

  In the mirror structure according to the eighth embodiment, the other end portion 40B of the third displacement member 43, one end portion 40A of the first displacement member 41, and one end portion of the third displacement member 43 along the X axis. 40A and the other end 40B of the first displacement member 41 are arranged in this order, and the other end 40B of the fourth displacement member 44 and the second displacement member 42 of the second displacement member 42 are arranged along the Y axis. One end 40A, one end 40A of the fourth displacement member 44, and the other end 40B of the second displacement member 42 are arranged in this order.

That is, in the mirror structure of Example 8, assuming Gaussian coordinates with the center of gravity of the mirror 21 as the origin,
The fixed center coordinates of the first column 31 are (X ₁ , 0),
The fixed center coordinates of the second support column 32 are (0, Y ₂ ),
The fixed center coordinate of the third column 33 is (X ₃ , 0),
The fixed center coordinates of the fourth column 34 are (0, Y ₄ ),
The fixed center coordinates of the other end portion 40B of the first displacement member 41 are (X ′ ₁ , Y ′ ₁ ),
The fixed center coordinates of the other end portion 40B of the second displacement member 42 are (X ′ ₂ , Y ′ ₂ ),
The fixed center coordinates of the other end portion 40B of the third displacement member 43 are (X ′ ₃ , Y ′ ₃ ), and
When the fixed center coordinate of the other end portion 40B of the fourth displacement member 44 is (X ′ ₄ , Y ′ ₄ ),
X ′ ₃ <X ₁ <0 <X ₃ <X ′ ₁
Y ′ ₄ <Y ₂ <0 <Y ₄ <Y ′ ₂
Are in a relationship. still,
X ₃ = −X ₁
X ′ ₃ = −X ′ ₁
Y ' ₃ = Y' ₁
Y ₄ = −Y ₂
Y ′ ₄ = −Y ′ ₂
X ' ₄ = X' ₂
Satisfied.

By the way, as described in the fifth embodiment, as in the fourth embodiment,
X ′ ₃ <X ₃ <0 <X ₁ <X ′ ₁
Y ′ ₄ <Y ₄ <0 <Y ₂ <Y ′ ₂
In this relationship, “rotation of the displacement member in the opposite direction” occurs. On the other hand, in Example 8,
X ′ ₃ <X ₁ <0 <X ₃ <X ′ ₁
Y ′ ₄ <Y ₂ <0 <Y ₄ <Y ′ ₂
Therefore, the direction in which the mirror 21 is tilted coincides with the direction in which the displacement member is displaced. That is, for example, when the mirror 21 tilts counterclockwise around the Y axis, the first displacement member 41 and the third displacement member 43 also rotate in the same direction as the mirror 21, that is, counterclockwise around the Y axis. To do. As a result, no undesired stress is generated in the connecting portion between the displacement member 40 and the column 30 and the connecting portion between the column 30 and the mirror 21, and high reliability is achieved and a large swing angle is realized with a smaller driving force. A mirror structure can be obtained.

  The ninth embodiment is also a modification of the fourth embodiment. FIG. 13 schematically shows the arrangement of the displacement member 40 and the column 30 that constitute the mirror structure of the ninth embodiment.

  In the mirror structure according to the ninth embodiment, the region of the displacement member 40 located on the other end portion 40B side of the displacement member 40 with respect to the portion of the displacement member 40 to which the lower end portion 30B of the column 30 is fixed has a hinge. A portion 46 is provided. Alternatively, in the mirror structure according to the ninth embodiment, the region of the displacement member 40 located on the other end portion 40B side of the displacement member 40 from the portion of the displacement member 40 to which the lower end portion 30B of the support column 30 is fixed is as follows. , Having a meander structure. That is, the hinge part 46 has a meander structure.

  In the ninth embodiment, “rotation in the opposite direction of the displacement member” occurs as in the fourth embodiment. However, since the hinge portion 46 having the meander structure is provided, the influence of undesired stress is reduced. can do. In addition, since the displacement member corresponding to each column has a two-stage structure, a mirror structure with less crosstalk around the X axis and the Y axis and a larger swing angle can be obtained. Needless to say, the hinge portion 46 described in the ninth embodiment can be applied to a mirror structure of another embodiment if necessary or structurally possible.

  The tenth embodiment is also a modification of the fourth embodiment. 14A is a schematic view of the mirror structure of Example 10 as viewed from above, and FIG. 14A is a schematic view of a part of the mirror 21 in the mirror structure of Example 10 as viewed from an angle. Shown in B).

  In the mirror structure of the tenth embodiment, a separation groove 48 separated by a torsion bar 47 is provided around the portion of the mirror 21 to which the upper end portion 30A of each column 30 is fixed. The portion of the mirror 21 to which the upper end portion 30A of the first support column 31 is fixed and the other portion of the mirror 21 are connected by a first torsion bar 47 extending along the X axis, The portion of the mirror 21 to which the upper end portion 30A of the support column 32 is fixed and the other portion of the mirror 21 are connected by a second torsion bar 47 extending along the Y axis, and the upper end portion of the third support column 33. The part of the mirror 21 to which 30A is fixed and the other part of the mirror 21 are connected by a third torsion bar 47 extending along the X axis, and the upper end part 30A of the fourth column 34 is fixed. The part of the mirror 21 and the other part of the mirror 21 are connected by a fourth torsion bar 47 extending along the Y axis. That is, the projection image in the extending direction of the torsion bar 47 is orthogonal to the projection image of the rotation shaft in the rotation generated in the mirror 21 due to the displacement of the displacement member 40 provided corresponding to the torsion bar 47.

  As described in the fifth embodiment, for example, in a state where the mirror 21 is tilted counterclockwise around the Y axis, the first displacement member 41 and the third displacement member 43 are opposite to the mirror 21. That is, it rotates clockwise around the Y axis. That is, “rotation of the displacement member in the opposite direction” occurs. In the tenth embodiment, a separation groove 48 separated by a torsion bar 47 is provided around the portion of the mirror 21 to which the upper end portion 30A of each column 30 is fixed. Therefore, for example, even when the mirror 21 is tilted counterclockwise around the Y axis, the minute torsion bar 47 absorbs the tilt of the mirror 21, and the second column 32 and the fourth column 34 are Does not tilt so much counterclockwise. Thus, by providing a mechanism (specifically, a torsion bar 47) that can rotate the mirror 21 at the connecting portion between the mirror 21 and the support column 30, there is less crosstalk around the X axis and the Y axis. Thus, a mirror structure having a larger swing angle can be obtained. As the length of the torsion bar 47 increases, the generation of undesired stress due to the rotation of the displacement member in the opposite direction can be suppressed. However, if the length of the torsion bar 47 is too long, Since driving in the direction is also absorbed, it is necessary to set a suitable length.

  Example 11 is also a modification of Example 4, but relates to the mirror structure (two-dimensional MEMS scanner) according to the second aspect. FIGS. 15A and 15B show schematic partial end views of the mirror structure 20B of Example 11 along arrows PP and QQ in FIG. 16, respectively. Further, FIG. 16 schematically shows the arrangement of the displacement member 140 and the column 130 that constitute the mirror structure of the eleventh embodiment. Furthermore, the schematic diagram which looked at the mirror structure of Example 11 from the upper side is shown in FIG.

  The mirror structure 20B according to the eleventh embodiment includes four support columns 130 (131, 132, 133, 134) and four displacement members 140 (141, 142, 143, 144). And the upper end part 130A of each support | pillar 130 is being fixed to the outer peripheral part of the mirror main-body part 123, the lower end part 130B of the 1st support | pillar 131 is being fixed to the one end part 140A of the 1st displacement member 141, The lower end portion 130B of the second support column 132 is fixed to one end portion 140A of the second displacement member 142, and the lower end portion 130B of the third support column 133 is fixed to the one end portion 140A of the third displacement member 143. The lower end portion 130B of the fourth column 134 is fixed to one end portion 140A of the fourth displacement member 144. More specifically, the mirror main body 123 has a first side and a third side facing the first side extending in the X direction, and the second side and the second side. The opposed fourth sides have a rectangular shape extending in the Y direction. The upper end portion 130A of the first column 131 is fixed in the vicinity of the fourth corner portion where the third side and the fourth side of the mirror main body 123 intersect, and the upper end portion 130A of the second column 132 is fixed. Is fixed in the vicinity of the third corner where the second side and the third side of the mirror main body 123 intersect, and the upper end portion 130A of the third support column 133 is fixed to the first side of the mirror main body 123. Are fixed in the vicinity of the second corner where the second side intersects, and the upper end portion 130A of the fourth column 134 is the first corner where the fourth side and the first side of the mirror main body 123 intersect. The other end portion 140B of the first displacement member 141 is fixed to the lower end portion 130B of the first column 131, and the other end portion 140B of the second column 132 is fixed to the lower end portion 130B of the first column 131. Second displacement member to which part 140A is fixed The other end portion 140B of 42 is fixed to a portion of the mirror main body 123 corresponding to the first side, and a third displacement member 143 in which the one end portion 140A is fixed to the lower end portion 130B of the third support column 133. The other end portion 140B of the fourth displacement member 144 and the other end portion 140B of the fourth displacement member 144 fixed to the lower end portion 130B of the fourth column 134 are the mirror body portion 123 corresponding to the third side. It is fixed to the part.

  Here, assuming a Gaussian coordinate with the center of gravity of the mirror 121 as the origin, when passing through the origin, the X direction in the mirror 121 is taken as the X axis, the origin is taken, and the Y direction in the mirror 121 is taken as the Y axis, the mirror body 123 The fixed position of the upper end portion 130A of the first support column 131 in the mirror body, the fixed position of the upper end portion 130A of the second support column 132 in the mirror body 123, and the fixed position of the upper end portion 130A of the third support column 133 in the mirror body 123 The fixed position of the upper end portion 130A of the fourth column 134 in the mirror main body 123 is located symmetrically with respect to the Y axis. In addition, the fixed position of the upper end portion 130A of the first column 131 in the mirror main body 123, the fixed position of the upper end portion 130A of the fourth column 134 in the mirror main body 123, and the upper end of the second column 132 in the mirror main body 123. The fixing position of the portion 130A and the fixing position of the upper end portion 130A of the third support column 133 in the mirror main body 123 are located symmetrically with respect to the X axis.

More specifically, the length of the first side and the third side L _1, when the length of the second side and the fourth side was L _2, a third side, a fourth side , A boundary separated by c ₁ · L ₁ along the X direction from the fourth corner portion (indicated by a mark with “D” in the center of the white circle in FIG. 16), and the fourth corner portion The upper end portion 130A of the first support column 131 is fixed in a region surrounded by a boundary separated by c ₂ · L ₂ along the Y direction. Similarly, c ₁ · L along the X direction from the second side, the third side, and the third corner portion (indicated by a mark with “C” in the center of the white circle in FIG. 16) The upper end portion 130A of the second support column 132 is fixed in a region surrounded by a boundary separated by ₁ and a boundary separated from the third corner portion by c ₂ · L ₂ along the Y direction. Similarly, c ₁ · L along the X direction from the first side, the second side, and the second corner (indicated by a mark with “B” in the center of the white circle in FIG. 16). The upper end portion 130A of the third support column 133 is fixed in a region surrounded by a boundary separated by ₁ and a boundary separated from the second corner portion by c ₂ · L ₂ along the Y direction. Similarly, c ₁ · L along the X direction from the fourth side, the first side, and the first corner portion (indicated by the mark “A” in the center of the white circle in FIG. 16). ₁ apart boundary, and the upper end portion 130A of the fourth post 134 is fixed to a region surrounded by the boundary at a distance c ₂ · L ₂ along the first corner portion in the Y direction. Here, for example, c ₁ = 0.2 and c ₂ = 0.2.

  In the mirror structure 20B according to the eleventh embodiment, the first displacement member 141, the second displacement member 142, the third displacement member 143, and the fourth displacement member 144 are not limited. , Having a meander structure.

  Except for the points described above, the configuration and structure of the mirror structure 20B according to the eleventh embodiment can be the same as the configuration and structure of the mirror structure 20A according to the fourth embodiment.

  In addition, as shown in the schematic diagram which looked at the modification of the mirror structure of Example 11 from the upper part in FIG. 18, the mirror main-body part 123 surrounds the light reflection layer support part 123A and the light reflection layer support part 123A. The movable frame 123B may be configured. In this case, the upper ends of the plurality of columns 130 may be fixed to the movable frame back surface in the vicinity of the four corners of the movable frame 123B, and the movable frame 123B and the light reflection layer support 123A May be integrally formed in a connected state.

  Example 12 relates to a head mounted display (HMD) according to the present invention. In the head mounted display of the twelfth embodiment, the light reflecting device assembly described in the second to third embodiments and the mirror structure described in the fourth to eleventh embodiments are applied. .

  FIG. 22 shows a schematic view of the head mounted display in Example 12 as viewed from the front, and FIG. 22 shows a schematic view of the head mounted display (provided that the frame is removed) as viewed from the front. 23. FIG. 24 shows a schematic view of the head-mounted display viewed from above, and FIG. 25 shows a view of the head-mounted display mounted on the head of the observer 240 from above. Furthermore, FIG. 26 shows a conceptual diagram of an image display device incorporated in a head-mounted display in Example 12. In FIG. 25, only the image display device is shown for the sake of convenience, and the illustration of the frame is omitted. In FIG. 26 or FIG. 27 described later, an example in which the light reflection device assembly 17 is incorporated is shown. Yes.

The head mounted display in Example 12 is
(A) a glasses-type frame 210 attached to the head of the observer 240, and
(B) two image display devices 300,
It has.

Here, each image display device 300 includes:
(A) Light source 351,
(B) a collimating optical system 352 that collimates the light emitted from the light source 351;
(C) scanning means 353 for scanning the parallel light emitted from the collimating optical system 352, and
(D) a relay optical system 354 that relays and emits parallel light scanned by the scanning means 353;
It is composed of Note that the entire image generation apparatus 310 is housed in a housing 313 (indicated by a one-dot chain line in FIG. 26), and the housing 313 is provided with an opening (not shown). Then, light is emitted from the relay optical system 354. Each housing 313 is attached to the end portion of the coupling member 220 using screws or an adhesive (not shown). In addition, the light guide unit 320 is attached to the housing 313.

  The light source 351 includes a red light emitting element 351R that emits red light, a green light emitting element 351G that emits green light, and a blue light emitting element 351B that emits blue light. Each light emitting element includes a semiconductor laser element or a solid-state laser. The light of the three primary colors emitted from the light source 351 passes through the cross prism 355, color synthesis is performed, the optical path is unified, and enters the collimating optical system 352 having a positive optical power as a whole, It is emitted as parallel light. Then, the parallel light is reflected by the total reflection mirror 356, and scanning means 353 comprising the light reflecting device assemblies 17 and 18 described in the second to third embodiments for scanning the incident parallel light two-dimensionally. Thus, horizontal scanning and vertical scanning are performed, that is, raster scanning in the X direction and Y direction is performed to form a kind of two-dimensional image, and a virtual pixel is generated. Then, light from the virtual pixel passes through a relay optical system 354 including a known relay optical system, and a light beam that has been converted into parallel light enters the light guide unit 320.

In some cases, three types of light reflections optimized for red light emitted from the red light emitting element 351R, green light emitted from the green light emitting element 351G, and blue light emitted from the blue light emitting element 351B, respectively. (specifically, with respect to the wavelength of the incident light, for example, optimization of _{PT x, PT y, VD L} , VD S) provided with a device 12, furthermore, emitted from these three types of optical reflector 12 There may be provided a light combining means for unifying the optical paths of the red light, the green light and the blue light and outputting them to the relay optical system 354.

  As described above, the head-mounted display includes the coupling member 220 that couples the two image display devices 300. The coupling member 220 is on the side facing the viewer of the central portion 210C of the frame 210 located between the two pupils 241 of the viewer 240 (ie, between the viewer 240 and the frame 210), for example, a screw. (Not shown). Further, the projection image of the coupling member 220 is included in the projection image of the frame 210. That is, when the head-mounted display is viewed from the front of the observer 240, the coupling member 220 is hidden by the frame 210, and the coupling member 220 is not visually recognized.

Specifically, the distance between the attachment portion center 310A _C of one image generation device 310A and one end (one wisdom) 210A of the frame 210 is α, and the center 220 _C of the coupling member 220 is connected to one end of the frame ( The distance to 210A is β, the distance between the attachment center 310B _{C of} the other image generating device 310B and one end (one side) 210A of the frame is γ, and the length of the frame is L. When
α = 0.1 × L
β = 0.5 × L
γ = 0.9 × L
It is.

  The two image display devices 300 are coupled by the coupling member 220. Specifically, the image generation devices 310A and 310B are attached to the respective end portions of the coupling member 220 so that the mounting state can be adjusted. . Each of the image generation devices 310 </ b> A and 310 </ b> B is located outside the pupil 241 of the observer 240. Here, the attachment of the image generation device (specifically, the image generation devices 310A and 310B) to each end of the coupling member 220 is specifically, for example, penetrated through three positions at each end of the coupling member. A hole (not shown) is provided, and a tapped hole (screwed portion; not shown) corresponding to the through hole is provided in the image generating devices 310A and 310B, and a screw (not shown) is passed through each through hole. Then, they are screwed into holes provided in the image generating apparatuses 310A and 310B. A spring is inserted between the screw and the hole. Thus, the mounting state of the image generating device (the inclination of the image generating device with respect to the coupling member) can be adjusted by the tightening state of the screws. After installation, the screw is hidden by a lid (not shown). In FIG. 23, FIG. 29, and FIG. 32, the coupling members 220 and 230 are hatched to clearly show the coupling members 220 and 230.

  The frame 210 includes a front portion 210B disposed in front of the observer 240, two temple portions 212 rotatably attached to both ends of the front portion 210B via hinges 211, and tip portions of the temple portions 212. The connecting member 220 is a central portion 210C (ordinary glasses) of the front portion 210B located between the two pupils 241 of the observer 240. (Corresponding to the bridge part). A nose pad 214 is attached to the side of the coupling member 220 facing the observer 240. 24, 30 or 33, the nose pad 214 is not shown. The frame 210 and the coupling member 220 are made of metal, alloy, plastic, or a combination thereof, and the shape of the coupling member 220 is a curved rod shape. The shape of the coupling member 220 is essentially arbitrary as long as the projection image of the coupling member 220 is included in the projection image of the frame 210. For example, an elongated plate shape can be exemplified in addition to a rod shape. .

  Furthermore, a wiring (a signal line, a power supply line, etc.) 215 extending from one image generation apparatus 310A extends to the outside from the distal end portion of the modern portion 213 via the temple portion 212 and the inside of the modern portion 213. It is connected to a circuit (control circuit). Further, each of the image generation devices 310A and 310B includes a headphone unit 216, and a headphone unit wiring 217 extending from each of the image generation devices 310A and 310B is provided through the temple unit 212 and the modern unit 213. It extends from the front end of the modern part 213 to the headphone part 216. More specifically, the headphone section wiring 217 extends from the tip of the modern section 213 to the headphone section 216 so as to wrap around the auricle (ear shell). With such a configuration, the headphone unit 216 and the headphone unit wiring 217 are not randomly arranged, and a clean head-mounted display can be obtained.

  In addition, an image pickup device 218 composed of a solid-state image pickup device composed of a CCD or CMOS sensor and a lens (these are not shown) is attached to the central portion 210C of the front portion 210B. Specifically, a through hole is provided in the central portion 210C, and a concave portion is provided in a portion of the coupling member 220 that faces the through hole provided in the central portion 210C. 218 is arranged. The light incident from the through hole provided in the central portion 210C is condensed on the solid-state image sensor by the lens. A signal from the solid-state imaging device is sent to the image generation device 310A via a wiring (not shown) extending from the imaging device 218. Note that the wiring passes between the coupling member 220 and the front portion 210B, and is connected to one image generation device 310A. With such a configuration, it can be made difficult to visually recognize that the imaging device is incorporated in the head-mounted display.

In the twelfth embodiment, as shown in FIG. 26, the light guide means 320 into which the light beam converted into parallel light by the relay optical system 354 is incident, guided, and emitted is
(A) As a whole, it is disposed closer to the center of the face of the observer 240 than the image generating apparatus 310, the light emitted from the image generating apparatus 310 is incident, guided, and emitted toward the pupil 241 of the observer 240. Light guide plate 321,
(B) first deflecting means 330 for deflecting the light incident on the light guide plate 321 so that the light incident on the light guide plate 321 is totally reflected inside the light guide plate 321; and
(C) second deflecting means 340 for deflecting the light propagated in the light guide plate 321 by total reflection several times in order to emit the light propagated in the light guide plate 321 by total reflection from the light guide plate 321;
It is composed of

The first deflecting unit 330 and the second deflecting unit 340 are disposed inside the light guide plate 321. The first deflecting unit 330 reflects the light incident on the light guide plate 321, and the second deflecting unit 340 transmits and reflects the light propagated through the light guide plate 321 by total reflection over a plurality of times. To do. That is, the first deflecting unit 330 functions as a reflecting mirror, and the second deflecting unit 340 functions as a semi-transmissive mirror. More specifically, the first deflecting means 330 provided inside the light guide plate 321 is made of aluminum and is composed of a light reflecting film (a kind of mirror) that reflects the light incident on the light guide plate 321. . On the other hand, the second deflecting means 340 provided inside the light guide plate 321 is composed of a multilayer laminated structure in which a large number of dielectric laminated films are laminated. The dielectric laminated film is composed of, for example, a TiO ₂ film as a high dielectric constant material and an SiO ₂ film as a low dielectric constant material. A multilayer laminated structure in which a large number of dielectric laminated films are laminated is disclosed in JP-T-2005-521099. In the drawing, a six-layer dielectric laminated film is shown, but the present invention is not limited to this. A thin piece made of the same material as that constituting the light guide plate 321 is sandwiched between the dielectric laminated film and the dielectric laminated film. In the first deflecting means 330, the parallel light incident on the light guide plate 321 is reflected (or diffracted) so that the parallel light incident on the light guide plate 321 is totally reflected inside the light guide plate 321. . On the other hand, in the second deflecting unit 340, the parallel light propagated through the light guide plate 321 by total reflection is reflected (or diffracted) a plurality of times and emitted from the light guide plate 321 in the state of parallel light.

  The first deflecting means 330 cuts a portion 324 of the light guide plate 321 where the first deflecting means 330 is provided, thereby providing the light guide plate 321 with a slope on which the first deflecting means 330 is to be formed, and vacuuming the light reflecting film on the slope. After vapor deposition, the cut out portion 324 of the light guide plate 321 may be bonded to the first deflecting unit 330. The second deflecting unit 340 is formed by laminating a large number of the same material (for example, glass) as that constituting the light guide plate 321 and a dielectric laminated film (for example, a film can be formed by a vacuum deposition method). A multilayer laminated structure is manufactured, and a portion 325 provided with the second deflecting means 340 of the light guide plate 321 is cut out to form a slope, and the multilayer laminated structure is adhered to the slope and polished to adjust the outer shape. That's fine. In this way, the light guide unit 320 in which the first deflecting unit 330 and the second deflecting unit 340 are provided inside the light guide plate 321 can be obtained.

  The light guide plate 321 has two parallel surfaces (a first surface 322 and a second surface 323) extending in parallel with the axis of the light guide plate 321. The first surface 322 and the second surface 323 are opposed to each other. Then, parallel light enters from the first surface 322 corresponding to the light incident surface, propagates through the interior by total reflection, and then exits from the first surface 322 corresponding to the light exit surface.

  As described above, in the head-mounted display (HMD) according to the twelfth embodiment, the coupling member 220 couples the two image display devices 300, and the coupling member 220 includes the two pupils of the observer 240. It is attached to the central portion 210C of the frame 210 located between 241. That is, each image display device 300 is not directly attached to the frame 210. Accordingly, when the observer 240 wears the frame 210 on the head, the temple portion 212 is expanded outward, and as a result, even if the frame 210 is deformed, the deformation of the frame 210 causes the image to be deformed. The displacement (position change) of the generation devices 310A and 310B does not occur, or even a slight amount. Therefore, it is possible to reliably prevent the convergence angle of the left and right images from changing. In addition, since it is not necessary to increase the rigidity of the front portion 210B of the frame 210, there is no increase in the weight of the frame 210, a decrease in design, and an increase in cost. Further, since the image display device 300 is not directly attached to the eyeglass-type frame 210, the design and color of the frame 210 can be freely selected according to the preference of the observer. There are few restrictions on the design, and the degree of freedom in design is high. In addition, the coupling member 220 is hidden by the frame 210 when the head-mounted display is viewed from the front of the observer. Therefore, high design and design can be given to the head-mounted display.

The thirteenth embodiment is a modification of the twelfth embodiment. FIG. 27A shows a conceptual diagram of the image display device 400 incorporated in the head mounted display in the thirteenth embodiment. FIG. 27B is a schematic cross-sectional view showing an enlarged part of the reflective volume hologram diffraction grating. In the thirteenth embodiment, the image generation apparatus 310 has the same configuration and structure as the twelfth embodiment. The light guide unit 420 has a basic configuration and structure except that the configuration and structure of the first deflection unit and the second deflection unit are different.
(A) As a whole, it is disposed closer to the center of the face of the observer 240 than the image generating apparatus 310, the light emitted from the image generating apparatus 310 is incident, guided, and emitted toward the pupil 241 of the observer 240. Light guide plate 421,
(B) first deflection means for deflecting the light incident on the light guide plate 421 so that the light incident on the light guide plate 421 is totally reflected inside the light guide plate 421;
(C) second deflecting means for deflecting the light propagated in the light guide plate 421 by total reflection multiple times in order to emit the light propagated in the light guide plate 421 by total reflection from the light guide plate 421;
This is the same as the light guiding means 320 of the twelfth embodiment.

  In the thirteenth embodiment, the first deflecting means and the second deflecting means are disposed on the surface of the light guide plate 421 (specifically, the second surface 423 of the light guide plate 421). The first deflecting unit diffracts the light incident on the light guide plate 421, and the second deflecting unit diffracts the light propagated through the light guide plate 421 by total reflection over a plurality of times. Here, the first deflecting unit and the second deflecting unit include a diffraction grating element, specifically a reflective diffraction grating element, and more specifically a reflective volume hologram diffraction grating. In the following description, the first deflecting means composed of the reflective volume hologram diffraction grating is referred to as “first diffraction grating member 430” for convenience, and the second deflecting means composed of the reflective volume hologram diffraction grating is referred to as “first This is referred to as “2 diffraction grating member 440”.

  In Example 13, the first diffraction grating member 430 and the second diffraction grating member 440 are made of different P types (specifically, P = 3, and three types of red, green, and blue). In order to cope with diffraction reflection of P types of light having a wavelength band (or wavelength), a P-layer diffraction grating layer composed of a reflective volume hologram diffraction grating is laminated. Each diffraction grating layer made of a photopolymer material is formed with interference fringes corresponding to one type of wavelength band (or wavelength), and is produced by a conventional method. More specifically, a structure in which a diffraction grating layer that diffracts and reflects red light, a diffraction grating layer that diffracts and reflects green light, and a diffraction grating layer that diffracts and reflects blue light is stacked. The diffraction grating member 430 and the second diffraction grating member 440 include. The pitch of the interference fringes formed in the diffraction grating layer (diffractive optical element) is constant, the interference fringes are linear, and are parallel to the Z′-axis direction. The axial direction of the first diffraction grating member 430 and the second diffraction grating member 440 is defined as the Y′-axis direction, and the normal direction is defined as the X′-axis direction. Here, the Y′-axis direction of the first diffraction grating member 430 and the second diffraction grating member 440 corresponds to the X-axis direction of the mirror, and the Z′-axis direction of the first diffraction grating member 430 and the second diffraction grating member 440. Corresponds to the Y-axis direction of the mirror. 27A and 27B, the first diffraction grating member 430 and the second diffraction grating member 440 are shown as one layer. By adopting such a configuration, the diffraction efficiency increases when the light having each wavelength band (or wavelength) is diffracted and reflected by the first diffraction grating member 430 and the second diffraction grating member 440, and the diffraction acceptance angle. And the diffraction angle can be optimized.

  As described above, examples of the material constituting the first diffraction grating member 430 and the second diffraction grating member 440 include a photopolymer material. The constituent materials and the basic structure of the first diffraction grating member 430 and the second diffraction grating member 440 made of the reflective volume hologram diffraction grating may be the same as the constituent materials and structures of the conventional reflective volume hologram diffraction grating. . The reflection type volume hologram diffraction grating means a hologram diffraction grating that diffracts and reflects only + 1st order diffracted light. Interference fringes are formed on the diffraction grating member from the inside to the surface, and the method for forming the interference fringes itself may be the same as the conventional forming method. Specifically, for example, a member constituting the diffraction grating member is irradiated with object light from a first predetermined direction on one side to a member constituting the diffraction grating member (for example, photopolymer material), and at the same time Is irradiated with reference light from a second predetermined direction on the other side, and interference fringes formed by the object light and the reference light may be recorded inside the member constituting the diffraction grating member. By appropriately selecting the first predetermined direction, the second predetermined direction, the wavelength of the object light and the reference light, the desired pitch of the interference fringes on the surface of the diffraction grating member, the desired inclination angle of the interference fringes ( Slant angle) can be obtained. The inclination angle of the interference fringes means an angle formed between the surface of the diffraction grating member (or the diffraction grating layer) and the interference fringes. In the case where the first diffraction grating member 430 and the second diffraction grating member 440 are configured from a laminated structure of P-layer diffraction grating layers made of a reflective volume hologram diffraction grating, such a diffraction grating layer is laminated on the P-layer. After producing the diffraction grating layers separately, the P diffraction grating layers may be laminated (adhered) using, for example, an ultraviolet curable adhesive. In addition, after producing a single diffraction grating layer using a photopolymer material having adhesiveness, the photopolymer material having adhesiveness is sequentially attached thereon to produce a diffraction grating layer, whereby the P layer A diffraction grating layer may be produced.

  FIG. 27B is an enlarged schematic partial cross-sectional view of a reflective volume hologram diffraction grating. In the reflection type volume hologram diffraction grating, interference fringes having an inclination angle φ are formed. Here, the inclination angle φ refers to an angle formed between the surface of the reflective volume hologram diffraction grating and the interference fringes. The interference fringes are formed from the inside to the surface of the reflection type volume hologram diffraction grating. The interference fringes satisfy the Bragg condition. Here, the Bragg condition refers to a condition that satisfies the following formula (A). In equation (A), m is a positive integer, λ is the wavelength, d is the pitch of the grating plane (the interval in the normal direction of the imaginary plane including the interference fringes), and Θ is the angle of incidence of the incident on the interference fringes To do. In addition, when light enters the diffraction grating member at the incident angle ψ, the relationship among Θ, the tilt angle φ, and the incident angle ψ is as shown in Expression (B).

m · λ = 2 · d · sin (Θ) (A)
Θ = 90 °-(φ + ψ) (B)

  As described above, the first diffraction grating member 430 is disposed (adhered) to the second surface 423 of the light guide plate 421, and the parallel light incident on the light guide plate 421 from the first surface 422 is generated on the light guide plate 421. The parallel light incident on the light guide plate 421 is diffracted and reflected so as to be totally reflected inside. Furthermore, the second diffraction grating member 440 is disposed (adhered) to the second surface 423 of the light guide plate 421, and the parallel light propagated through the light guide plate 421 by total reflection is diffracted and reflected a plurality of times. Then, the light is emitted from the first surface 422 as parallel light from the light guide plate 421.

  Even in the light guide plate 421, parallel light of three colors of red, green, and blue is emitted after propagating through the interior by total reflection. At this time, since the light guide plate 421 is thin and the optical path traveling through the light guide plate 421 is long, the total number of reflections until reaching the second diffraction grating member 440 differs depending on the angle of view. More specifically, out of the parallel light incident on the light guide plate 421, the number of reflections of the parallel light incident at an angle in a direction approaching the second diffraction grating member 440 has an angle in a direction away from the second diffraction grating member 440. This is less than the number of reflections of parallel light incident on the light guide plate 421. This is parallel light that is diffracted and reflected by the first diffraction grating member 430, and parallel light incident on the light guide plate 421 with an angle in a direction approaching the second diffraction grating member 440 is opposite to this angle. This is because the angle formed with the normal line of the light guide plate 421 when the light propagating through the light guide plate 421 collides with the inner surface of the light guide plate 421 is smaller than the parallel light incident on the light guide plate 421. In addition, the shape of the interference fringes formed inside the second diffraction grating member 440 and the shape of the interference fringes formed inside the first diffraction grating member 430 are in a virtual plane perpendicular to the axis of the light guide plate 421. There is a symmetrical relationship.

  As described above, the head-mounted display in the thirteenth embodiment has substantially the same configuration and structure as the head-mounted display in the twelfth embodiment except that the light guide means 420 is different. Is omitted.

  Example 14 is also a modification of Example 12. FIG. 28 shows a schematic view of the head-mounted display in Example 14 as viewed from the front, and the head-mounted display in Example 14 (provided that the frame is removed) is viewed from the front. A schematic diagram is shown in FIG. FIG. 30 shows a schematic diagram of the head-mounted display in Example 14 as viewed from above.

  In the fourteenth embodiment, the light guiding unit is arranged closer to the center side of the face of the observer 240 than the image generating apparatuses 310A and 310B, and the light emitted from the image generating apparatuses 310A and 310B is incident thereon. It is composed of a semi-transmissive mirror 520 that emits toward 240 pupils 241. In the fourteenth embodiment, the light emitted from the image generating apparatuses 310A and 310B propagates through the inside of a transparent member 521 such as a glass plate or a plastic plate and enters the semi-transmissive mirror 520. However, it may have a structure that propagates in the air and enters the semi-transmissive mirror 520.

  Each of the image generation devices 310A and 310B is attached to both end portions of the coupling member 220 using, for example, screws. Further, a member 521 is attached to each of the image generation apparatuses 310A and 310B, and a semi-transmissive mirror 520 is attached to the member 521. The head-mounted display in Example 14 has substantially the same configuration and structure as the head-mounted display in Example 12 except for the above differences, and thus detailed description thereof is omitted.

  The fifteenth embodiment is also a modification of the twelfth embodiment. FIG. 31 shows a schematic view of the head-mounted display in Example 12 as viewed from the front, and the head-mounted display in Example 15 (provided that the frame is removed) as viewed from the front. A schematic diagram is shown in FIG. Moreover, the schematic diagram which looked at the head mounted display in Example 15 from upper direction is shown in FIG.

  In the head mounted display according to the fifteenth embodiment, unlike the twelfth embodiment, the bar-shaped coupling member 230 couples the two light guides 320 instead of coupling the two image generation devices 310A and 310B. ing. The two light guides 320 may be integrally manufactured, and the coupling member 230 may be attached to the integrally manufactured light guide 320.

Here, even in the head-mounted display according to the fifteenth embodiment, the coupling member 230 is attached to the central portion 210C of the frame 210 located between the two pupils 241 of the observer 240 using, for example, screws. Each image generation device 310 is located outside the pupil 241 of the observer 240. Each image generation device 310 is attached to an end portion of the light guide unit 320. When the distance from the center 230 _C of the coupling member 230 to one end of the frame 210 is β and the length of the frame 210 is L, β = 0.5 × L is satisfied. In the fifteenth embodiment, the α ′ and γ ′ values are the same as the α and γ values in the twelfth embodiment.

  In the fifteenth embodiment, the frame 210, each image display device 300, the image generation device 310, and the light guide means 320 are the frame 210, the image display device 300, the image generation device 310, and the light guide means described in the twelfth embodiment. It has the same configuration and structure as 320. Therefore, these detailed explanations are omitted. Further, the head-mounted display in Example 15 has substantially the same configuration and structure as the head-mounted display in Example 12 except for the above differences, and thus detailed description thereof is omitted.

  In addition, the configuration and structure in which the bar-shaped coupling member 230 in the fifteenth embodiment couples the two light guides 320 can be applied to the head mounted display described in the thirteenth to fourteenth embodiments.

  Example 16 is a light reflecting device assembly described in Examples 2 to 3, a display device to which the mirror structure described in Examples 4 to 11 is applied, and more specifically, an image display. Relates to the device. FIG. 34 is a conceptual diagram of a display device according to the sixteenth embodiment. In the display device of Example 16, for example, a light source composed of a light emitting element such as a semiconductor laser element or a solid-state laser, and a lens group for collimating light emitted from the light source as collimated light (shown as one lens in FIG. 34) The light reflecting device assemblies 17 and 18 described in the second to third embodiments, in which the parallel light emitted from the lens group is incident and the parallel light is raster scanned in the X direction and the Y direction, and the light reflection It is an image display device composed of a screen on which the light emitted from the device assemblies 17 and 18 collides, and finally displays an image, specifically, a projector for image display.

  The number of pixels in the display device may be determined based on specifications required for the image display device. As specific values of the number of pixels, 320 × 240, 640 × 480, 854 × 480, 1024 × 768, 1920 X1080 can be illustrated. The number of mirror structures is, for example, 1.

  When performing color display in a display device, the light source is a red light emitting element that emits red, a green light emitting element that emits green, a blue light emitting element that emits blue, and light emitted from these light emitting elements is a single light. The dichroic prism may be composed of the following dichroic prisms. Alternatively, the light source is composed of a single light emitting element that emits white light, and the white light emitted from the light emitting element is sequentially passed through the red, green, and blue color filters to obtain red, green, and blue. It is also possible to take out the three primary colors of light. Alternatively, the light source may be configured from one light emitting element that emits white light, a dichroic prism, and a narrow band filter that performs wavelength selection to extract the three primary colors of red, green, and blue light. However, the color display method is not limited to the method described above, and can be essentially any method. In addition, an organic EL (Electro Luminescence) light emitting element, an inorganic EL light emitting element, and a light emitting diode (LED) can also be used as the light source.

In some cases, three types of light reflecting devices 12 optimized for red light emitted from the red light emitting element, green light emitted from the green light emitting element, and blue light emitted from the blue light emitting element are provided. (specifically, with respect to the wavelength of the incident light, for example, optimization of _{PT x, PT y, VD L} , VD S) provided and, furthermore, red emitted from these three types of optical reflector 12 A light combining means for unifying the light paths of the light, the green light, and the blue light and emitting them to the screen may be provided.

  When performing a raster scan, as described above, it is preferable to rotate the mirror around the X axis at high speed based on resonance and to rotate the mirror around the Y axis at low speed based on non-resonance. In this case, the vertical scanning of the display device is performed by rotating the mirror around the Y axis at a low speed, and the horizontal scanning of the display device is performed by rotating the mirror around the X axis at a high speed. Done. In addition, since a display apparatus and the structure and structure of itself can be made into a known structure and structure, detailed description is abbreviate | omitted.

  As mentioned above, although this invention was demonstrated based on the preferable Example, this invention is not limited to these Examples. The photonic crystal, light reflecting device, light reflecting device assembly, head mounted display, configuration of mirror structure, structure, shape of each part, material used, and manufacturing method described in the examples are examples, and may be changed as appropriate. can do. In some cases, instead of the mirror structure, an electro-optic element or an acousto-optic element and a light reflecting device may be combined to form a light reflecting device assembly. The light incident on the photonic crystal, the light reflecting device, and the light reflecting device assembly can be not only visible light but also electromagnetic waves such as infrared rays and millimeter waves.

  In the head-mounted display described in Examples 12 to 15, for example, a surface relief hologram (see US 20040062505A1) may be arranged on the light guide plate. In the light guide means 320 of the sixth embodiment, the seventh embodiment, and the fifteenth embodiment, the diffraction grating element can be formed of a transmission type diffraction grating element, or the first deflection means and the second deflection means. Any one of the above may be configured by a reflection type diffraction grating element, and the other may be configured by a transmission type diffraction grating element. Alternatively, the diffraction grating element can be a reflective blazed diffraction grating element. Further, in the embodiment, the binocular type is provided exclusively with two image display devices, but may be a single eye type including one image display device.

DESCRIPTION OF SYMBOLS 10 ... Photonic crystal, 11 ... Hole, 12 ... Light reflecting device, 13 ... Light incident surface, 14 ... Light reflecting surface, 15 ... Light reflecting film, 16 ... Light emitting surface, 17, 18 ... light reflecting device assembly, 20, 20B ... mirror structure, 21, 121 ... mirror, 22 ... light reflecting layer, 22 '... aluminum layer , 23, 123 ... mirror body, 24 ... back, 30, 130 ... support, 30A, 130A ... upper end, 30B, 130B ... lower end, 31, 131 ... first 1 support, 32, 132 ... second support, 33, 133 ... third support, 34, 134 ... fourth support, 40, 140 ... displacement members, 40A, 140A .... One end, 40B, 140B ... the other end, 40C ... isosceles triangle, 40D ... Output part, 41, 141 ... 1st displacement member, 42, 142 ... 2nd displacement member, 43, 143 ... 3rd displacement member, 44, 144 ... 4th displacement member , 45 ... groove, 46 ... hinge, 47 ... torsion bar, 48 ... separation groove, 51 ... silicon layer (active layer), 52 ... silicon oxide layer (box layer) 53 ... piezoelectric material thin film, 60 ... support portion, 61 ... spacer, 80 ... support layer, 81 ... resist layer, 82 ... oxide film, 83 ... substrate, 84 ... Silicon oxide layer, 85 ... Silicon layer, 210 ... Frame, 210A ... One end of frame, 210B ... Front part, 210C ... Center part of frame, 211 ... Hinges , 212 ... Temple part, 313 ... Modern part, 214 Nose pads, 215 ... wiring (signal lines, power supply lines, etc.), 216 ... headphone part, 217 ... headphone part wiring, 218 ... imaging device, 220, 230 ... coupling member, 240 ... observer, 241 ... pupil, 300, 400 ... image display device, 310 ... image generation device, 313 ... housing, 320, 420 ... light guide means, 321, 421: Light guide plate, 322, 422: First surface of light guide plate, 323, 423: Second surface of light guide plate, 324, 325: Part of light guide plate, 330: First Deflection means, 340 ... second deflection means, 430 ... first deflection means (first diffraction grating member), 440 ... second deflection means (second diffraction grating member), 352 ... collimating optics System, 353 ... scanning means, 354 ... relay optical system, 355 ... Cross prism, 356 ... Total reflection mirror, 520 ... Transflective mirror, 521 ... Member

Claims (17)

(A) a light reflection device, and
(B) Mirror structure,
A light reflector assembly comprising:
The light reflection device
A light incident surface, a light reflecting film is formed, a light reflecting surface on which light incident from the light incident surface is reflected, and a light emitting surface from which light reflected by the light reflecting surface is emitted,
It consists of two or more dimensional photonic crystals with vacancies whose cross-sectional shape is elliptical,
The arrangement of the holes is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal is different from the arrangement pitch PT _{y of the} holes along the y-axis direction. The shape of the dispersion surface in the wave number space is a rectangle with an aspect ratio of 4 or more,
The mirror structure is
(A) Mirror main body, and a mirror provided with a light reflecting layer provided on the surface of the mirror main body,
(B) A plurality of support columns whose upper ends are fixed to the back surface of the mirror main body,
(C) a displacement member having one end fixed to the lower end of each column, and
(D) a support portion for fixing the other end of the displacement member;
A light reflector assembly comprising: PT _y > PT _x
The light incident surface of the light reflecting device is parallel to the y-axis,
The light exit surface of the light reflecting device is parallel to the x-axis,
The light reflected from the light source according to claim 1, wherein the light emitted from the light source is reflected by the light reflecting layer of the mirror, enters the light incident surface of the light reflecting device, is reflected by the light reflecting surface, and is emitted from the light emitting surface. Device assembly. PT _y > PT _x
The light incident surface of the light reflecting device is parallel to the x-axis,
The light exit surface of the light reflecting device is parallel to the y-axis,
The light emitted from the light source enters the light incident surface of the light reflecting device, is reflected by the light reflecting surface, is emitted from the light emitting surface, is reflected by the light reflecting layer of the mirror, and is emitted by the light reflecting device. The light reflecting device assembly according to claim 1, wherein the light reflecting device assembly is incident again from the surface, reflected by the light reflecting surface, and emitted from the light incident surface in a direction different from an incident direction from the light source to the light incident surface. PT _y > PT _x
The magnitude of the wave vector in the x-axis direction of the incident light k _x, the magnitude of the wave vector and k _y in the y-axis direction, the value of _{(PT x · k x) /} (PT y · k y) m ( However, m is an integer of 2 or more), and when the angle formed by the x-axis direction and the light reflecting surface is θ,
tan (θ) = m
The light reflecting device assembly according to claim 1, wherein: 2. The light reflecting device assembly according to claim 1, wherein the length of the long side of the dispersion surface is not less than (1/2) ^1/2 of the diameter of the dispersion surface in vacuum. The mirror structure has four columns and four displacement members,
The upper end of each column is fixed around the center of gravity of the mirror,
Opposing first and third struts are disposed on the X axis in the mirror structure, and the remaining second and fourth struts are disposed on the Y axis in the mirror structure.
The lower end of the first column is fixed to one end of the first displacement member, the lower end of the second column is fixed to one end of the second displacement member, and the lower end of the third column The light reflecting device assembly according to claim 1, wherein the portion is fixed to one end of the third displacement member, and the lower end of the fourth support column is fixed to one end of the fourth displacement member. Along the X axis in the mirror structure, the other end of the third displacement member, one end of the third displacement member, one end of the first displacement member, and the other end of the first displacement member are Are arranged in this order,
Along the Y axis in the mirror structure, the other end of the fourth displacement member, one end of the fourth displacement member, one end of the second displacement member, and the other end of the second displacement member are The light reflecting device assembly according to claim 6, arranged in this order. The first displacement member and the third displacement member have a meander structure,
The light reflecting device assembly according to claim 7, wherein the second displacement member and the fourth displacement member have a cantilever structure. Along the X axis in the mirror structure, the other end of the third displacement member, one end of the first displacement member, one end of the third displacement member, and the other end of the first displacement member are Are arranged in this order,
Along the Y axis in the mirror structure, the other end of the fourth displacement member, one end of the second displacement member, one end of the fourth displacement member, and the other end of the second displacement member are The light reflecting device assembly according to claim 6, arranged in this order. The mirror structure has four columns and four displacement members,
The upper end of each column is fixed to the outer periphery of the mirror body,
The lower end of the first support column is fixed to one end of the first displacement member, the lower end of the second support column is fixed to one end of the second displacement member, and the lower end of the third support column. The light reflecting device assembly according to claim 1, wherein the portion is fixed to one end of the third displacement member, and the lower end of the fourth support column is fixed to one end of the fourth displacement member.   The light reflecting device assembly according to claim 1, wherein the displacement member is a bimorph type, unimorph type, or stacked type piezoelectric actuator. (A) a spectacle-type frame to be worn on the observer's head; and
(B) an image display device,
A head-mounted display comprising:
The image display device
(B-1) an image generation device, and
(B-2) Light guide means attached to the image generation apparatus, in which light emitted from the image generation apparatus is incident, guided, and emitted toward the observer's pupil;
Consists of
The image generating device includes a light reflector assembly;
The light reflector assembly is
(A) a light reflection device, and
(B) Mirror structure,
With
The light reflection device
A light incident surface, a light reflecting film is formed, a light reflecting surface on which light incident from the light incident surface is reflected, and a light emitting surface from which light reflected by the light reflecting surface is emitted,
It consists of two or more dimensional photonic crystals with vacancies whose cross-sectional shape is elliptical,
The arrangement of the holes is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal is different from the arrangement pitch PT _{y of the} holes along the y-axis direction. The shape of the dispersion surface in the wave number space is a rectangle with an aspect ratio of 4 or more,
The mirror structure is
(A) Mirror main body, and a mirror provided with a light reflecting layer provided on the surface of the mirror main body,
(B) A plurality of support columns whose upper ends are fixed to the back surface of the mirror main body,
(C) a displacement member having one end fixed to the lower end of each column, and
(D) a support portion for fixing the other end of the displacement member;
Head mounted display consisting of A light incident surface, a light reflecting film is formed, a light reflecting surface on which light incident from the light incident surface is reflected, and a light emitting surface from which light reflected by the light reflecting surface is emitted,
It consists of two or more dimensional photonic crystals with vacancies whose cross-sectional shape is elliptical,
The arrangement of the holes is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal is different from the arrangement pitch PT _{y of the} holes along the y-axis direction. A light reflecting device in which the shape of the dispersion surface in the wave number space is a rectangle having an aspect ratio of 4 or more. PT _y > PT _x
The magnitude of the wave vector in the x-axis direction of the incident light k _x, the magnitude of the wave vector and k _y in the y-axis direction, the value of _{(PT x · k x) /} (PT y · k y) m ( However, m is an integer of 2 or more), and when the angle formed by the x-axis direction and the light reflecting surface is θ,
tan (θ) = m
The light reflecting device according to claim 13, wherein: The light reflecting device according to claim 13, wherein the length of the long side of the dispersion surface is not less than (1/2) ^1/2 of the diameter of the dispersion surface in vacuum. A photonic crystal of two or more dimensions in which pores having an elliptical cross-sectional shape are arranged inside,
The arrangement of the holes is a face-centered arrangement, and the arrangement pitch PT _{x of the} holes along the x-axis direction of the photonic crystal is different from the arrangement pitch PT _{y of the} holes along the y-axis direction.
A photonic crystal in which the shape of the dispersion surface in the wave number space is a rectangle with an aspect ratio of 4 or more. The photonic crystal according to claim 16, wherein the length of the long side of the dispersion surface is (1/2) ^1/2 or more of the diameter of the dispersion surface in vacuum.