JP2010284056A - Oscillating drive device - Google Patents

Oscillating drive device Download PDF

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JP2010284056A
JP2010284056A JP2009137068A JP2009137068A JP2010284056A JP 2010284056 A JP2010284056 A JP 2010284056A JP 2009137068 A JP2009137068 A JP 2009137068A JP 2009137068 A JP2009137068 A JP 2009137068A JP 2010284056 A JP2010284056 A JP 2010284056A
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vibration type
drive
receiving member
friction engagement
driving device
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Taketo Namikawa
威人 並川
Takashi Hashimoto
隆 橋本
Hidehiko Morimoto
英彦 森本
Kunihiro Nitta
晋裕 新田
Satoyuki Yuasa
智行 湯浅
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Konica Minolta Opto Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an oscillating drive device that prevents the increase of a starting voltage, while resin-molding a frictional engagement member. <P>SOLUTION: The oscillating drive device 1 includes a drive member 4 reciprocated by an electromechanical transducer 3, and the frictional engagement member 5 frictionally engaged with the drive member 4. The frictional engagement member 5 contains a receiving member 6 and a pressing member 7 for sandwiching the drive member 4. The receiving member 6 is resin-molded. The surface roughness of a sliding face, which abuts against the drive member 4 on the receiving member 6, is set to 0.9 μm or larger in center line average roughness. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、振動型駆動装置に関する。   The present invention relates to a vibration type driving device.

圧電素子のような電気機械変換素子によって軸状の駆動部材を軸方向に非対称に往復変位させ、駆動部材に摩擦係合する摩擦係合部材を駆動部材に対して滑り変位させる振動型駆動装置が公知である。   There is provided a vibration type driving device in which an axial drive member is reciprocally displaced in an axial direction asymmetrically by an electromechanical conversion element such as a piezoelectric element, and a friction engagement member frictionally engaged with the drive member is slidably displaced with respect to the drive member. It is known.

従来の振動型駆動装置では、駆動部材と摩擦係合部材との摩擦を安定させるために、駆動部材および摩擦係合部材の摺動面を可能な限り硬く、且つ、平滑にすることが重視されている。例えば、特許文献1には、振動型駆動装置の駆動速度を一定にするため、駆動部材および摩擦係合部材の表面粗さをRa(中心線平均粗さ)0.8μm以下にすべきことが記載されている。   In the conventional vibration type drive device, in order to stabilize the friction between the drive member and the friction engagement member, it is important to make the sliding surfaces of the drive member and the friction engagement member as hard and smooth as possible. ing. For example, in Patent Document 1, in order to make the driving speed of the vibration type driving device constant, the surface roughness of the driving member and the friction engagement member should be Ra (center line average roughness) 0.8 μm or less. Are listed.

このため、従来の振動型駆動装置では、駆動部材には炭素繊維を樹脂で固めたものを用い、摩擦係合部材には摺動面に金属部品をインサートした樹脂を用いることが多い。しかしながら、摩擦係合部材に金属部品を使用すると、生産コストが高くなってしまう。   For this reason, in the conventional vibration type drive device, a material obtained by solidifying carbon fiber with a resin is used for the drive member, and a resin in which a metal part is inserted on the sliding surface is often used for the friction engagement member. However, if a metal part is used for the friction engagement member, the production cost is increased.

特許文献2には、摩擦係合部材を炭素繊維で強化した液晶ポリマーで形成することが記載されている。また、特許文献3には、光学部材を保持する玉枠と一体に形成され、駆動部材に摩擦係合する移動体を、繊維強化したポリフェニレンサルファイドで形成することが記載されている。しかし、繊維強化したとしても液晶ポリマーやポリフェニレンサルファイドのような熱可塑性樹脂(エンジニアリングプラスチック)では、金属に比べて弾性率が低いため、振動型駆動装置の起動電圧が高くなってしまうという問題があった。   Patent Document 2 describes that the friction engagement member is formed of a liquid crystal polymer reinforced with carbon fiber. Patent Document 3 describes that a moving body that is formed integrally with a ball frame that holds an optical member and that frictionally engages with a driving member is formed of fiber-reinforced polyphenylene sulfide. However, even if the fibers are reinforced, thermoplastic resins (engineering plastics) such as liquid crystal polymers and polyphenylene sulfide have a problem that the starting voltage of the vibration type drive device becomes high because the elastic modulus is lower than that of metal. It was.

特開2005−86887号公報JP 2005-88687 A 特開2006−304529号公報JP 2006-304529 A 特開2007−121679号公報JP 2007-121679 A

前記問題点に鑑みて、本発明は、摩擦係合部材を樹脂で形成しながら起動電圧が高くならない振動型駆動装置を提供することを課題とする。   In view of the above problems, an object of the present invention is to provide a vibration type driving device in which a starting voltage is not increased while a friction engagement member is formed of resin.

前記課題を解決するために、本発明による振動型駆動装置は、電気機械変換素子によって往復変位させられる駆動部材と、前記駆動部材に摩擦係合する摩擦係合部材とを有し、
前記摩擦係合部材は、前記駆動部材を挟み込む受け部材と押さえ部材とを含む振動型駆動装置において、前記受け部材は、樹脂で形成され、且つ、前記駆動部材に当接する摺動面の表面粗さが中心線平均粗さ0.9μm以上としたものとする。
In order to solve the above problems, a vibration type driving apparatus according to the present invention includes a driving member that is reciprocally displaced by an electromechanical transducer, and a friction engagement member that frictionally engages the driving member.
In the vibration-type driving device, the friction engagement member includes a receiving member and a pressing member that sandwich the driving member. The receiving member is made of resin and has a rough surface on a sliding surface that contacts the driving member. The center line average roughness is 0.9 μm or more.

この構成によれば、摩擦係合部材の摺動面を平滑な樹脂で形成する場合よりも起動電圧を低くすることができ、十分な駆動速度を得ることができる。また、起動電圧が低いので、摩擦係合部材の固着に対しても強い。   According to this configuration, the starting voltage can be made lower than when the sliding surface of the friction engagement member is formed of a smooth resin, and a sufficient driving speed can be obtained. Moreover, since the starting voltage is low, it is strong against the sticking of the friction engagement member.

また、本発明の振動型駆動装置において、前記受け部材の前記摺動面の表面粗さを、中心線平均粗さ4.0μm以下とすることが好ましい。   In the vibration type driving device of the present invention, it is preferable that the surface roughness of the sliding surface of the receiving member is a center line average roughness of 4.0 μm or less.

表面粗さを大きくし過ぎると、摺動面の摩擦が大きくなり、却って起動電圧が高くなったり、固体間の駆動速度のばらつきが大きくなったりする。中心線平均粗さ4.0μm以下にすれば、これらの不具合を防止できる。   If the surface roughness is excessively increased, the friction on the sliding surface increases, and on the contrary, the starting voltage increases and the variation in the driving speed between the solids increases. If the center line average roughness is 4.0 μm or less, these problems can be prevented.

また、本発明の振動型駆動装置において、前記受け部材を、ポリフェニレンサルファイド、ポリカーボネートまたは液晶ポリマーで形成してもよい。   In the vibration type driving device of the present invention, the receiving member may be formed of polyphenylene sulfide, polycarbonate, or liquid crystal polymer.

この構成によれば、射出成形によって受け部材を形成できるので、振動型駆動装置を安価に提供できる。   According to this configuration, since the receiving member can be formed by injection molding, the vibration type driving device can be provided at low cost.

また、本発明の振動型駆動装置において、前記摺動面に、潤滑剤を塗布してもよい。   In the vibration type driving device of the present invention, a lubricant may be applied to the sliding surface.

この構成によれば、駆動部材と摩擦係合部材との間の摩擦力が安定するので、駆動速度が一定になる。   According to this configuration, the frictional force between the drive member and the friction engagement member is stabilized, so that the drive speed is constant.

本発明の駆動装置は、摩擦係合部材を構成する受け部材を樹脂で形成し、受け部材の摺動面の表面粗さを、中心線平均粗さ0.9μm以上としたので、安価な摩擦係合部材を使用しながら、十分な駆動速度を確保でき、且つ、起動電圧を低く抑えることができる。   In the driving device of the present invention, the receiving member constituting the friction engagement member is formed of resin, and the surface roughness of the sliding surface of the receiving member is set to a center line average roughness of 0.9 μm or more. While using the engaging member, a sufficient driving speed can be secured and the starting voltage can be kept low.

本発明の1つの実施形態の振動型駆動装置の図である。It is a figure of the vibration type drive device of one embodiment of the present invention.

これより、本発明の実施形態について、図面を参照しながら説明する。図1(A)は、本発明の1つの実施形態の振動型駆動装置1の側面図、図1(B)は、振動型駆動装置1の正面図である。   Embodiments of the present invention will now be described with reference to the drawings. FIG. 1A is a side view of the vibration type driving apparatus 1 according to one embodiment of the present invention, and FIG. 1B is a front view of the vibration type driving apparatus 1.

振動型駆動装置1は、筐体の固定した錘2に一端が固定された圧電素子(電気機械変換素子)3と、圧電素子3の他端に一端が固定された円柱状の駆動部材4と、駆動部材4に摩擦力によって係合する摩擦係合部材5とを有する。   The vibration type driving device 1 includes a piezoelectric element (electromechanical conversion element) 3 having one end fixed to a weight 2 fixed to a housing, and a columnar driving member 4 having one end fixed to the other end of the piezoelectric element 3. And a friction engagement member 5 engaged with the drive member 4 by friction force.

駆動部材4は、炭素繊維を樹脂で固めて形成したものである。摩擦係合部材5は、受け部材6と、押さえ部材7と、受け部材6に向かって押さえ部材7を押圧する板ばね8とからなり、受け部材6と押さえ部材7との間に駆動部材4を挟み込んでいる。受け部材6は、この振動型駆動装置1の駆動対象物、例えばレンズを保持した玉枠に設けられるものであり、熱可塑性プラスチックを射出成形してなる。受け部材6は単独で射出成形された後、駆動対象物に接着剤やネジなどで取り付けるようにしてもよいが、駆動対象物が樹脂品である場合には、受け部材と駆動対象物とが一体で射出成形するのが生産効率や組立精度の面で好ましい。受け部材6は、駆動部材4の中心軸に垂直な断面がV字状をなし、そのV字を構成する2つの斜面が、前記駆動部材の外周面に摺動する摺動面として機能する。その受け部材6の2つの摺動面は、例えばサンドブラスト加工によって、表面粗さが中心線平均粗さで0.9μm以上、4.0μm以下になるようにランダムな凹凸が形成されている。押さえ部材7は、金属(例えば、ステンレス鋼)を機械加工してなるまた、受け部材6の摺動面には、潤滑剤(例えば、ハーベス社製FT210)が塗布されている。   The drive member 4 is formed by solidifying carbon fiber with a resin. The friction engagement member 5 includes a receiving member 6, a pressing member 7, and a plate spring 8 that presses the pressing member 7 toward the receiving member 6, and the driving member 4 is interposed between the receiving member 6 and the pressing member 7. Is sandwiched. The receiving member 6 is provided on a driving object of the vibration type driving device 1, for example, a ball frame holding a lens, and is formed by injection molding a thermoplastic. The receiving member 6 may be individually injection-molded and then attached to the driving object with an adhesive or a screw. However, when the driving object is a resin product, the receiving member and the driving object are The integral injection molding is preferable in terms of production efficiency and assembly accuracy. The receiving member 6 has a V-shaped cross section perpendicular to the central axis of the driving member 4, and two inclined surfaces constituting the V-shape function as sliding surfaces that slide on the outer peripheral surface of the driving member. Random irregularities are formed on the two sliding surfaces of the receiving member 6 by, for example, sandblasting so that the surface roughness is 0.9 μm or more and 4.0 μm or less in terms of centerline average roughness. The pressing member 7 is formed by machining a metal (for example, stainless steel). A lubricant (for example, FT210 manufactured by Harves) is applied to the sliding surface of the receiving member 6.

振動型駆動装置1は、圧電素子3に、デューティ比0.3または0.7の矩形波電圧を印加することで、駆動部材4を軸方向に非対称に往復変位させ、摩擦係合部材5を駆動部材4上で滑り変位させる。   The vibration type driving device 1 applies a rectangular wave voltage with a duty ratio of 0.3 or 0.7 to the piezoelectric element 3 to cause the driving member 4 to reciprocate asymmetrically in the axial direction, thereby causing the friction engagement member 5 to move. A sliding displacement is performed on the driving member 4.

振動型駆動装置1では、摩擦係合部材5の受け部材6の摺動面に凹凸を形成しているので、駆動部材4と摩擦係合部材5との摩擦状態を安定化させ、摩擦係合部材5を滑り変位させるために必要な駆動部材4の加速度が大きくならない。これにより、振動型駆動装置1は、起動するために必要な電圧が高くならず、十分な駆動速度が得られる。また、振動型駆動装置1では、凹凸の中に潤滑剤が滞留していることによって、駆動部材4と摩擦係合部材5との摩擦状態が更に安定し、摩擦係合部材5が駆動部材4に固着する現象も発生しにくい。   In the vibration type driving device 1, since the unevenness is formed on the sliding surface of the receiving member 6 of the friction engagement member 5, the friction state between the drive member 4 and the friction engagement member 5 is stabilized, and the friction engagement is performed. The acceleration of the drive member 4 necessary for sliding the member 5 is not increased. Thereby, the voltage required for starting the vibration type drive apparatus 1 does not become high, and sufficient drive speed is obtained. Further, in the vibration type driving device 1, since the lubricant stays in the unevenness, the friction state between the driving member 4 and the friction engaging member 5 is further stabilized, and the friction engaging member 5 is driven by the driving member 4. The phenomenon of sticking to is difficult to occur.

振動型駆動装置1の実施例を示す。第1実施例として、錘2を直径1.8mm、厚さ0.3mmのタングステンで形成し、圧電素子3を□0.9mm、長さ1.2mmとし、駆動部材4を直径0.8mm、長さ2.5mmの円柱状に形成した。受け部材6は、チタン酸カリウム繊維配合ポリフェニレンサルファイド(大塚化学社製、ポチコンAM2)を射出成形して、サンドブラストによって摺動面の表面粗さ(Ra:中心線平均粗さ)の異なるものを形成した。   An embodiment of the vibration type driving device 1 will be described. As a first embodiment, the weight 2 is made of tungsten having a diameter of 1.8 mm and a thickness of 0.3 mm, the piezoelectric element 3 is □ 0.9 mm, the length is 1.2 mm, the drive member 4 is 0.8 mm in diameter, It formed in the column shape of length 2.5mm. The receiving member 6 is formed by injection molding of potassium titanate fiber-blended polyphenylene sulfide (Poticon AM2 manufactured by Otsuka Chemical Co., Ltd.) and forming the ones having different surface roughness (Ra: center line average roughness) by sandblasting. did.

表1に、第1実施例の振動型駆動装置1の起動電圧を示す。尚、振動型駆動装置1は、電源電圧が3Vの駆動回路で駆動することを想定しているため、起動電圧は、2V以下であれば理想的な評価○であり、2.3V以下であれば実用可能な評価△であり、2.3Vを超えると実用不可能な評価×であると判断した。   Table 1 shows the starting voltage of the vibration type driving device 1 of the first embodiment. Since the vibration type driving device 1 is assumed to be driven by a drive circuit with a power supply voltage of 3V, the evaluation is ideal if the starting voltage is 2V or less, and 2.3V or less. It was judged to be a practical evaluation Δ, and when it exceeded 2.3 V, it was judged to be a practical evaluation ×.

Figure 2010284056
Figure 2010284056

第2実施例として、錘2を直径1.8mm、厚さ0.3mmのタングステンで形成し、圧電素子3を□0.9mm、長さ1.2mmとし、駆動部材4を直径0.8mm、長さ2.5mmの円柱状に形成した。受け部材6は、液晶プラスチック(上野製薬社製、UENO LCP 2030G−M)を射出成形して、摺動面の表面粗さ(Ra:中心線平均粗さ)を変えて形成した。表2に、第2実施形態の振動型駆動装置1の起動電圧を示す。   As a second embodiment, the weight 2 is made of tungsten having a diameter of 1.8 mm and a thickness of 0.3 mm, the piezoelectric element 3 is □ 0.9 mm, the length is 1.2 mm, the drive member 4 is 0.8 mm in diameter, It formed in the column shape of length 2.5mm. The receiving member 6 was formed by injection molding liquid crystal plastic (UENO LCP 2030G-M, manufactured by Ueno Pharmaceutical Co., Ltd.) and changing the surface roughness (Ra: center line average roughness) of the sliding surface. Table 2 shows the starting voltage of the vibration type driving device 1 of the second embodiment.

Figure 2010284056
Figure 2010284056

第3実施例として、錘2を直径1.8mm、厚さ0.3mmのタングステンで形成し、圧電素子3を□0.9mm、長さ1.2mmとし、駆動部材4を直径0.8mm、長さ2.5mmの円柱状に形成した。受け部材6は、液晶プラスチック(新日本石油社製、ザイダーCM−321B)を射出成形して、摺動面の表面粗さ(Ra:中心線平均粗さ)を変えて形成した。表3に、第3実施形態の振動型駆動装置1の起動電圧を示す。   As a third embodiment, the weight 2 is formed of tungsten having a diameter of 1.8 mm and a thickness of 0.3 mm, the piezoelectric element 3 is □ 0.9 mm, the length is 1.2 mm, the drive member 4 is 0.8 mm in diameter, It formed in the column shape of length 2.5mm. The receiving member 6 was formed by injection molding liquid crystal plastic (manufactured by Nippon Oil Corporation, Zider CM-321B) and changing the surface roughness (Ra: center line average roughness) of the sliding surface. Table 3 shows the starting voltage of the vibration type driving device 1 of the third embodiment.

Figure 2010284056
Figure 2010284056

第4実施例として、錘2を直径1.8mm、厚さ0.3mmのタングステンで形成し、圧電素子3を□0.9mm、長さ1.5mmとし、駆動部材4を直径0.8mm、長さ2.5mmの円柱状に形成した。受け部材6は、エンジニアリングプラスチックを射出成形して、摺動面の表面粗さ(Ra:中心線平均粗さ)を変えて形成した。表4に、第4実施形態の振動型駆動装置1の起動電圧を示す。   As a fourth embodiment, the weight 2 is formed of tungsten having a diameter of 1.8 mm and a thickness of 0.3 mm, the piezoelectric element 3 is □ 0.9 mm, the length is 1.5 mm, the drive member 4 is 0.8 mm in diameter, It formed in the column shape of length 2.5mm. The receiving member 6 was formed by injection-molding engineering plastic and changing the surface roughness (Ra: centerline average roughness) of the sliding surface. Table 4 shows the starting voltage of the vibration type driving apparatus 1 of the fourth embodiment.

Figure 2010284056
Figure 2010284056

以上のように、実施例によって多少のばらつきはあるものの、概ね、摩擦係合部材5の受け部材6の摺動面の表面粗さを0.4μm以上、4.0μm以下にすれば、実用可能な起動電圧を達成することができた。   As described above, although there are some variations depending on the embodiment, it is generally practical if the surface roughness of the sliding surface of the receiving member 6 of the friction engagement member 5 is 0.4 μm or more and 4.0 μm or less. A good starting voltage could be achieved.

尚、上述の実施例の樹脂以外にも、適用可能な液晶プラスチック材料として、ポリプラスチック社製ベクトラ230、大塚化学社製ポチコンVT96HB、新日本石油社製ザイダーXW−321等が列挙される。また、摩擦係合部材5をポリカーボネートで形成してもよい。   In addition to the resins of the above-described embodiments, examples of applicable liquid crystal plastic materials include Vectra 230 manufactured by Polyplastics, Poticon VT96HB manufactured by Otsuka Chemical Co., and Xider-XW-321 manufactured by Nippon Oil Corporation. Further, the friction engagement member 5 may be formed of polycarbonate.

また、上記実施形態では、金属製の押さえ部材7を使用しているが、押さえ部材7も、受け部材6と同様に、熱可塑性プラスチックを射出成形して形成し、駆動部材4と当接する摺動面を、表面粗さが0.4μm以上、4.0μとなるようにサンドブラスト等で加工したものとしてもよい。   Further, in the above embodiment, the metal pressing member 7 is used, but the pressing member 7 is formed by injection molding of a thermoplastic plastic and is in contact with the driving member 4, similarly to the receiving member 6. The moving surface may be processed by sandblasting or the like so that the surface roughness is 0.4 μm or more and 4.0 μm.

また、上記実施形態では、摩擦係合部材5を受け部材6、押さえ部材7、板ばね8の3点で構成しているが、本発明はこれに限定されるものではない。例えば、摩擦係合部材を受け部材と板ばねとの2点で構成したり、受け部材と板ばねとコイルバネとの3点構成など、摩擦係合部材の構成は各種可能である。しかし、いずれの構成においても、駆動対象物に設けられる受け部材と駆動部材との摺動の安定性が重要であるので、受け部材の摺動面の表面粗さが重要なのである。   In the above embodiment, the friction engagement member 5 is constituted by the receiving member 6, the pressing member 7, and the leaf spring 8, but the present invention is not limited to this. For example, various configurations of the frictional engagement member are possible, such as a frictional engagement member configured with two points of a receiving member and a leaf spring, and a three-point configuration of a receiving member, a leaf spring, and a coil spring. However, in any configuration, since the stability of sliding between the receiving member provided on the driving object and the driving member is important, the surface roughness of the sliding surface of the receiving member is important.

なお、上記実施形態では、電気機械変換素子として圧電素子を用いているが、駆動電圧に応じて伸縮するという特性を有するものであればこれに限定されるものではなく、圧電素子の他、電歪素子等を用いることもできる。圧電素子の材料としては、チタン酸バリウムや、ジルコン酸チタン酸鉛(PZT)など、公知の材料を適宜選択して用いればよい。   In the above embodiment, a piezoelectric element is used as the electromechanical conversion element. However, the electromechanical conversion element is not limited to this as long as it has a characteristic of expanding and contracting according to the drive voltage. A strain element or the like can also be used. As a material of the piezoelectric element, a known material such as barium titanate or lead zirconate titanate (PZT) may be appropriately selected and used.

1…振動型駆動装置
2…錘
3…圧電素子(電気機械変換素子)
4…駆動部材
5…摩擦係合部材
6…受け部材
7…押さえ部材
DESCRIPTION OF SYMBOLS 1 ... Vibration type drive device 2 ... Weight 3 ... Piezoelectric element (electromechanical conversion element)
4 ... Driving member 5 ... Friction engagement member 6 ... Receiving member 7 ... Holding member

Claims (4)

電気機械変換素子によって往復変位させられる駆動部材と、
前記駆動部材に摩擦係合する摩擦係合部材とを有し、
前記摩擦係合部材は、前記駆動部材を挟み込む受け部材と押さえ部材とを含む振動型駆動装置において、
前記受け部材は、樹脂で形成され、且つ、前記駆動部材に当接する摺動面の表面粗さが中心線平均粗さ0.9μm以上であることを特徴とする振動型駆動装置。
A drive member that is reciprocally displaced by an electromechanical transducer;
A friction engagement member that frictionally engages the drive member;
The friction engagement member may be a vibration type drive device including a receiving member and a pressing member that sandwich the drive member.
The receiving member is made of resin, and the surface roughness of the sliding surface that comes into contact with the driving member is a center line average roughness of 0.9 μm or more.
前記受け部材の前記摺動面の表面粗さを、中心線平均粗さ4.0μm以下としたことを特徴とする請求項1に記載の振動型駆動装置。   2. The vibration type driving device according to claim 1, wherein a surface roughness of the sliding surface of the receiving member is a center line average roughness of 4.0 μm or less. 前記受け部材を、ポリフェニレンサルファイド、ポリカーボネートまたは液晶ポリマーで形成したことを特徴とする請求項1または2に記載の振動型駆動装置。   3. The vibration type driving device according to claim 1, wherein the receiving member is made of polyphenylene sulfide, polycarbonate, or liquid crystal polymer. 前記摺動面に、潤滑剤を塗布したことを特徴とする請求項1から3のいずれかに記載の振動型駆動装置。   4. The vibration type driving device according to claim 1, wherein a lubricant is applied to the sliding surface.
JP2009137068A 2009-06-08 2009-06-08 Oscillating drive device Pending JP2010284056A (en)

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WO2014061193A1 (en) * 2012-10-19 2014-04-24 コニカミノルタ株式会社 Drive device and imaging device
JP5572844B1 (en) * 2013-09-05 2014-08-20 新シコー科技株式会社 Vibration device, electronic device using vibration device, and body-wearable product

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JPH10225149A (en) * 1997-02-10 1998-08-21 Minolta Co Ltd Driver
JP2005086887A (en) * 2003-09-08 2005-03-31 Minolta Co Ltd Drive unit
JP2006304529A (en) * 2005-04-22 2006-11-02 Konica Minolta Opto Inc Drive device
JP2007121679A (en) * 2005-10-28 2007-05-17 Konica Minolta Opto Inc Optical member drive device

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JPH10225149A (en) * 1997-02-10 1998-08-21 Minolta Co Ltd Driver
JP2005086887A (en) * 2003-09-08 2005-03-31 Minolta Co Ltd Drive unit
JP2006304529A (en) * 2005-04-22 2006-11-02 Konica Minolta Opto Inc Drive device
JP2007121679A (en) * 2005-10-28 2007-05-17 Konica Minolta Opto Inc Optical member drive device

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Publication number Priority date Publication date Assignee Title
WO2014061193A1 (en) * 2012-10-19 2014-04-24 コニカミノルタ株式会社 Drive device and imaging device
JP5618028B2 (en) * 2012-10-19 2014-11-05 コニカミノルタ株式会社 Driving device and imaging device
JP5572844B1 (en) * 2013-09-05 2014-08-20 新シコー科技株式会社 Vibration device, electronic device using vibration device, and body-wearable product
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KR102240353B1 (en) 2013-09-05 2021-04-14 신시코 카기 가부시키가이샤 Vibration apparatus, electronic device and wearable device using the vibration apparatus

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