JP2010269449A - Printer and manufacturing method of film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a printer for improving the productivity and a manufacturing method of a film for improving the productivity. <P>SOLUTION: The printer 100 includes a conveyance part 10 having a conveyance means for moving an object 1 to be printed to a constant direction, a printing part 20 provided above the object 1 to be printed, a heating part 40 provided above the object 1 to be printed and adjacent to the downstream side of the printing part 20, and an adsorption part 30 provided below the printing part 20 for adsorbing/fixing the object 1 to be printed from a first surface 1a of the object 1 to be printed facing to the printing part 20 and from a second surface 1b on the opposite side. The adsorption part 30 comprises a cooling function. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a printing apparatus and a film manufacturing method.

  For example, a method of forming a film pattern by printing a solder paste on a wiring board using a screen printer is known (Patent Document 1). For example, in a manufacturing process of a laminated ceramic piezoelectric element mounted on a droplet ejecting apparatus such as an ink jet printer, a metal film containing a volatile organic component is printed on a ceramic green sheet by a screen printing method, and then dried. The internal electrode of the piezoelectric element is formed by conveying to a furnace and drying the metal film formed on the ceramic green sheet. In such a manufacturing process, a printing apparatus and a film manufacturing method that can improve productivity by reducing the time of the manufacturing process are desired.

JP 7-285263 A

  One of the objects of the present invention is to provide a printing apparatus that improves productivity.

  One of the objects of the present invention is to provide a method for producing a film that improves productivity.

(1) A printing apparatus according to the present invention includes:
A transport unit having transport means for moving the substrate to be printed in a certain direction;
A printing unit provided above the substrate;
A heating unit provided above the substrate and adjacent to the downstream side of the printing unit;
An adsorbing unit that is provided below the printing unit and that adsorbs and fixes the printed material from a second surface side opposite to the first surface of the printed material facing the printing unit;
Including
The adsorption part has a cooling function.

  In the description of the present invention, the word “upper” is, for example, “forms another specific thing (hereinafter referred to as“ B ”)“ above ”a specific thing (hereinafter referred to as“ A ”)”. Etc. In the description according to the present invention, in the case of this example, the case where B is directly formed on A and the case where B is formed on A via another are included. The word “upward” is used. Similarly, the term “below” includes a case where B is directly formed under A and a case where B is formed under another through A.

  ADVANTAGE OF THE INVENTION According to this invention, the printing apparatus which improves productivity can be provided.

(2) In the printing apparatus according to the present invention,
The printing unit may include a screen printer having a squeegee and a screen mask.

(3) In the printing apparatus according to the present invention,
You may further have the cooling part which is provided under the said heating part and cools the said to-be-printed material from the said 2nd surface side of the to-be-printed material.

(4) In the printing apparatus according to the present invention,
The heating unit may be a halogen heater.

(5) In the printing apparatus according to the present invention,
The substrate may be composed of a resin sheet made of a resin film and a ceramic green sheet formed on the resin sheet.

(6) A method for producing a film according to the present invention includes:
A step of moving the printing material to a printing position of the printing unit by the transport unit;
A step of adsorbing and fixing the substrate to be printed at the printing position by an adsorption unit;
Forming a first film on the first surface of the substrate at the printing position by the printing unit;
Moving the substrate on which the first film is formed by the transport unit to a heating position of a heating unit adjacent to the printing unit;
Heating the first film of the substrate at the heating position by the heating unit to form a second film;
Including
The adsorption part has a cooling function,
The step of forming the first film further includes a step of cooling the substrate from the second surface side by the suction portion.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the film | membrane which improves productivity can be provided.

(7) In the method for producing a film according to the present invention,
The step of forming the second film may further include a step of cooling the substrate at the heating position from the second surface side by a cooling unit.

(8) In the method for producing a film according to the present invention,
The printed material includes a resin sheet made of a resin film, and a ceramic green sheet formed on the resin sheet,
The second film may be a metal film.

(9) In the method for producing a film according to the present invention,
The step of forming the second film may be performed at a temperature of 70 ° C. or higher and 130 ° C. or lower.

(10) In the method for producing a film according to the present invention,
The substrate may be kept at room temperature by the step of cooling the second surface.

FIG. 3 is a diagram schematically illustrating a configuration of a main part of the printing apparatus according to the embodiment. FIG. 3 is a perspective view schematically illustrating a main part of the printing apparatus according to the embodiment. The figure which shows typically the manufacturing method of the film | membrane which concerns on this embodiment. The figure which shows typically the manufacturing method of the film | membrane which concerns on this embodiment. The figure which shows typically the manufacturing method of the film | membrane which concerns on this embodiment.

  An example of an embodiment to which the present invention is applied will be described below with reference to the drawings. However, the present invention is not limited only to the following embodiments. The present invention includes any combination of the following embodiments and modifications thereof.

1. Hereinafter, a printing apparatus according to the present embodiment will be described with reference to the drawings.

  FIG. 1 is a diagram schematically illustrating a configuration of a main part of a printing apparatus according to the present embodiment. FIG. 2 is a perspective view schematically showing a main part of the printing apparatus according to the present embodiment.

  As shown in FIG. 1, a printing apparatus 100 according to the present embodiment (inside the broken line in FIG. 1) is provided above a substrate 1 and a conveyance unit 10 having a conveyance unit that moves the substrate 1 in a certain direction. The printing unit 20 is located above the substrate 1 and adjacent to the downstream side of the printing unit 20. The heating unit 40 is provided below the printing unit 20, and faces the printing unit 20 of the substrate 1. An adsorbing portion 30 that adsorbs and fixes the printing material 1 from the second surface 1b side opposite to the first surface 1a.

  The to-be-printed object 1 is a thing printed by the printing part 20 mentioned later. As shown in FIG. 1, the substrate 1 has a first surface 1 a facing the printing unit 20 and a second surface 1 b opposite to the first surface 1 a. The material and shape of the substrate 1 are not particularly limited as long as it can be printed by the printing unit 20. For example, the substrate 1 may be a sheet-like material or a plate-like substrate. Specifically, as shown in FIG. 1, the substrate 1 may have a ceramic green sheet 2 (hereinafter also referred to as “green sheet 2”) that is a film containing ceramic particles. As shown in FIG. 1, the substrate 1 may include a resin sheet 3 made of a resin below the green sheet 2. That is, the to-be-printed object 1 may have a laminated structure, or a single layer structure, although not shown. Further, the substrate 1 may be a printed wiring board. Further, the substrate 1 may be a silicon substrate. Although not shown, both ends of the substrate 1 may be connected to a take-up roll, and one end of the upstream substrate 1 is unwound from the take-up roll, and the downstream substrate 1 is printed. The other end of may be wound up.

  The green sheet 2 in the present invention may be a sheet-like material obtained by forming a slurry containing ceramic particles by a known film forming technique. The ceramic particles contained in the green sheet 2 may exhibit, for example, piezoelectric characteristics by being fired and crystallized. The slurry for producing the green sheet 2 may contain ceramic particles and a known binder, an organic solvent, a plasticizer, a dispersion medium, and the like that can disperse the ceramic particles.

  As shown in FIG. 1, the transport unit 10 includes a transport unit that moves the substrate 1 in a certain direction (for example, a direction indicated by an arrow A in FIG. 1). The conveyance part 10 will not be specifically limited if it has the above-mentioned conveyance means. For example, the conveyance unit 10 may be a tension roller as shown in FIG. Further, as illustrated in FIG. 1, the transport unit 10 may transport the substrate 1 by supporting the substrate 1 on the second surface 1 b of the substrate 1 and rotating, for example, by rotating.

  The printing unit 20 is provided above the substrate 1 as shown in FIG. The printing unit 20 is not particularly limited as long as a film can be formed on the substrate 1. FIG. 2 is a perspective view schematically showing the main part of the printing apparatus according to the present embodiment, and the configuration other than the main part of the printing unit 20 is omitted for convenience. For example, the printing unit 20 may be a known screen printer. When the printing unit 20 includes a known screen printing machine, as illustrated in FIG. 2, the printing unit 20 may include a squeegee 21 and a screen mask 22 made of, for example, metal. Although not shown in the drawing, members necessary for a known screen printing machine such as a support member and an elastic member may be included. When the printing unit 20 is a screen printing machine, the screen mask 22 has an opening pattern 22a that can form a film having a desired shape. The first surface 1 a of the substrate 1 is disposed on one surface side of the screen mask 22. By moving the squeegee 21 on the other surface side of the screen mask 22, a printing ink 60 described later can be pressed against the other surface of the screen mask 22. Thereby, a film having a desired shape can be formed on the first surface 1a of the substrate 1 through the opening pattern 22a. Although not shown, the printing unit 20 may be a known printing machine used for forming a circuit pattern or the like, for example. Specifically, a pad printing machine, a hot stamp printing machine, an inkjet printing machine, or the like may be used (not shown).

  The printing ink 60 printed on the substrate 1 by the printing unit 20 may be an ink containing an organic solvent. For example, a conductive paste for forming a metal film may be used. That is, the printing ink 60 may be a solder paste. The printing ink 60 may be a resin paste for forming a resin film. The printing ink 60 may be a ceramic paste for forming a ceramic film.

  As shown in FIG. 2, the first film 61 can be formed on the first surface 1 b of the substrate 1 by the printing unit 20 using the printing ink 60. Details will be described later.

  As illustrated in FIG. 1, the suction unit 30 is provided below the printing unit 20, and can fix the substrate 1 by suction from the second surface 1 b side of the substrate 1. The shape and configuration of the suction unit 30 are not particularly limited as long as the substrate 1 can be fixed by suction. As illustrated in FIG. 1, the suction unit 30 may include a stage 31 that faces the second surface 1 b of the substrate 1. For example, although not shown, the suction unit 30 may be formed of an air chuck device having a hole that is a suction tube on the stage surface 31 facing the second surface 1b.

  Moreover, the adsorption | suction part 30 may have a cooling function. For example, at least the surface of the stage 31 of the suction unit 30 is made of metal, and the stage 31 may be connected to a cooling mechanism (not shown). For example, at least the stage 31 may be connected to a known water-cooled cooling device capable of adjusting the temperature. As a result, the suction device 30 can cool the substrate 1 from the second surface 1 b of the substrate 1 while adsorbing and fixing the substrate 1. The green sheet 2 and the resin sheet 3 of the substrate 1 may be maintained at room temperature, for example, by the suction unit 30. Specifically, the green sheet 2 and the resin sheet 3 of the substrate 1 may be kept at 20 ° C. or higher and 30 ° C. or lower.

  As shown in FIG. 1, the heating unit 40 is provided above the substrate 1 and adjacent to the downstream side of the printing unit 20. The shape and configuration of the heating unit 40 are not particularly limited as long as heat energy can be applied to the first surface 1a of the substrate 1. The heating unit 40 provided adjacent to the printing unit 20 is not necessarily required to be in contact with the printing unit 20 and may be disposed apart from the heating unit 40. However, even if the heating unit 40 is separated, after the printing process in which the printing material 1 is printed in the printing unit 20, the printing material 1 on which ink is printed is substantially continuously from the printing process. It may be arranged so that it can be heated. In other words, the substrate 1 can be heated by the heating unit 40 substantially immediately after being printed by the printing unit 20. As shown in FIG. 2, the heating unit 40 includes a heat source 41 that can radiate heat energy. For example, the heat source 41 may be capable of emitting infrared rays, or may be capable of emitting ultraviolet rays. Specifically, the heat source 41 may be a halogen heater. When the heat source 41 is a halogen heater, infrared rays 42 can be emitted in one direction as shown in FIG. As shown in FIG. 2, by using a halogen heater as the heat source 41, it is possible to selectively heat only the region of the first surface 1a of the substrate 1 where the first film 61 is formed. As a result, the organic component contained in the first film 61 is volatilized, and the second film 62 can be formed. Details will be described later. In addition, although not illustrated, a heat blocking unit that can block heat may be provided between the printing unit 20 and the heating unit 40. This prevents the heat energy of the heating unit 40 from affecting the printing unit 20 disposed adjacent to the heating unit 40 and the printing ink 60 printed by the printing unit 20. Can stabilize the quality.

  As illustrated in FIG. 1, the cooling unit 50 may be provided below the heating unit 40, and may cool the substrate 1 from the second surface 1 b side of the substrate 1. The shape and configuration of the cooling unit 50 are not particularly limited as long as the substrate 1 can be cooled. The cooling unit 50 may be, for example, a known cold water type cooling device. The cooling unit 50 may be made of a metal and connected to a known water-cooled cooling device capable of adjusting the temperature. As a result, the cooling unit 50 can cool the substrate 1 from the second surface 1 b of the substrate 1. The green sheet 2 and the resin sheet 3 of the substrate 1 may be kept at room temperature by the cooling unit 50. Although not shown, the cooling unit 50 may be the adsorption unit 30. In other words, the suction unit 30 may be continuously arranged below the printing unit 20 and the heating unit 40, and the suction unit 30 may also be cooled below the heating unit 40 so as to keep the substrate 1 at room temperature. .

  With any one of the above configurations, the configuration of the printing apparatus 100 according to the present embodiment can be obtained.

  The printing apparatus 100 according to the present embodiment has the following features, for example.

  According to the printing apparatus 100 according to the present embodiment, since the substrate 1 is cooled by the suction unit 30 or the cooling unit 50 and is maintained at, for example, room temperature, the quality of the substrate 1 is stabilized in the printing process and the heating process. be able to. For example, when the substrate 1 includes a green sheet 2 made of a film containing ceramic particles and a resin sheet 3, the green sheet 2 and the resin sheet 3 may be denatured by heat, but the adsorbing portion 30 having a cooling function. Alternatively, since the green sheet 2 and the resin sheet 3 can be cooled by the cooling unit 50, denaturation due to heat can be prevented. Details will be described later.

  In addition, since the resin sheet 3 of the printing material 1 can be cooled by the cooling unit 50 even during the heating process by the heating unit 40, it becomes easy to wind up the printing material 1 after the heating process. The handleability of the substrate 1 immediately after printing is improved.

  Further, according to the printing apparatus 100 according to the present embodiment, since the printing unit 20 and the heating unit 40 are disposed adjacent to each other, the conveyance time between the printing process and the heating process is substantially minimized. It can be shortened. Thereby, productivity of a production line can be improved. In addition, according to the printing apparatus 100 according to the present embodiment, the first film 61 printed on the substrate 1 is cooled by the suction unit 30, so that the wettability of the first film 61 is kept constant. Can do. In other words, the volatilization of the organic component from the first film 61 is reduced by cooling the second surface of the substrate 1 by the adsorption unit 30, and the residual ratio of the organic solvent in the first film 61 is kept constant. Can keep. Thereby, the quality of the 2nd film | membrane 62 formed by drying the 1st film | membrane 61 is stabilized, and the yield of a manufacturing line can be improved. Details will be described below.

  In the case of a production line using a normal printing device, in order to volatilize the organic solvent contained in the first film 61 made of the printing ink 60 after printing the first film 61 on the substrate 1 on the printing line. For example, it is necessary to convey to the heating line of a drying furnace. In other words, a time for conveyance or the like is substantially required between the printing process and the heating process. In addition, when the printing process and the heating process are separate lines, it is difficult to standardize the time required for conveyance and set the time constant. Also, even if the printing process and heating process are the same line and are transported by a transport device at a constant speed, it is necessary to transport the normal production line because the line may be temporarily stopped due to various factors. It is difficult to standardize the time to be a fixed time. As described above, since the printing ink 60 contains an organic solvent, and the organic solvent volatilizes constantly, if the time until printing and heating is not constant, the printing ink 60 immediately before the heating step is used. The proportion of the organic solvent remaining in is not constant. However, in an actual production line, conditions such as the temperature of the drying furnace and the heating time are constant, so individual differences occur in the wettability of the printing ink 60 after the heating process, for example, excessively The yield of the production line is reduced, such as when heated.

  On the other hand, according to the printing apparatus 100 according to the present embodiment, since the printing unit 20 and the heating unit 40 provided adjacent to the printing unit 20 are included, the printing process and the heating process are performed. Transportation time is substantially minimized. That is, since the time from the printing process to the heating process can be shortened to a minimum, the productivity of the production line is improved.

  For example, since the process of conveying to another drying line is eliminated, the time from the printing process to the heating process can be normalized to a certain time. According to this, the residual ratio of the organic solvent in the first film 61 before the heating step can be made constant, and the case where the first film 61 is excessively heated can be prevented. The quality of the film 62 can be improved, and the yield of the production line can be improved.

  In addition, since the suction unit 30 has a cooling function, the first film 61 is cooled even when the production line stops due to some factor and heat treatment cannot be performed on the substrate 1. Therefore, volatilization of the organic component from the first film 61 during the stop time can be suppressed. As a result, the quality of the second film 62 can be stabilized, and the yield of the production line can be improved.

  As described above, the printing apparatus 100 according to the present embodiment can provide a printing apparatus that improves productivity.

2. Membrane Manufacturing Method A film manufacturing method according to this embodiment will be described below with reference to the drawings.

  3-5 is a figure for demonstrating the manufacturing method of the film | membrane which concerns on this embodiment.

  As shown in FIGS. 3 to 5, the film manufacturing method according to this embodiment includes a step of moving the substrate 1 to the printing position 20 a of the printing unit 20 by the transport unit 10 and a printing position by the suction unit 30. The step of adsorbing and fixing the substrate 1 at 20a, the step of forming the first film 61 on the first surface 1a of the substrate 1 at the printing position 20a by the printing unit 20, and the step of The substrate 1 on which the first film 61 is formed is moved to the heating position 40a of the heating unit 40 adjacent to the printing unit 20, and the heating unit 40 is used to move the first film 61 of the substrate 1 at the heating position 40a. And the step of forming the second film 62 includes the step of forming the second film 62, the adsorption unit 30 has a cooling function, and the step of forming the first film 61 is performed on the second surface 1 b side To cool the substrate 1 Further comprising a.

  First, as illustrated in FIG. 3, the substrate 1 is moved by the transport unit 20 to a printing position 20 a that is a position below the printing unit 20. The printing position 20a is not particularly limited as long as it is below the printing unit 20 and can be printed by the printing unit 20. The substrate 1 moved to the printing position 20a is sucked and fixed on the stage 31 by the sucking unit 30 arranged below the printing position 20a.

  Next, the first film 61 is formed on the first surface 1a of the substrate 1 at the printing position 20a. When the printing unit 20 is a known screen printing machine, as shown in FIG. 4A, an opening pattern is formed on the first surface 1a of the substrate 1 that is suction-fixed on the stage 31 of the suction unit 30. A screen mask 22 having 22a is arranged. As shown in FIG. 4A, the first surface 1a of the substrate 1 is disposed on one surface side of the screen mask 22. As shown in FIG. 4A, after the printing ink 60 is applied to the other side of the screen mask 22, the squeegee 21 is moved on the other side to move the printing ink 60 to the other side of the screen mask 22. Can be pressed against the surface. As a result, as shown in FIG. 4B, a first film 61 having a desired shape can be formed on the first surface 1a of the substrate 1 through the opening pattern 22a.

  Here, as shown in FIGS. 4A and 4B, the suction portion 30 has a cooling function as described above, and therefore the second surface of the substrate 1 at the printing position 20a. The substrate 1 can be cooled from the 1b side. The substrate 1 may be cooled by the suction unit 30 and kept at room temperature. Specifically, as shown in FIG. 4A and FIG. 4B, the first film 61 formed by the printed material 1 and the printing unit 20 is cooled and kept at room temperature, whereby the printed material 1 is printed. It is possible to prevent the influence of heat on the organic solvent and volatilization of the organic solvent contained in the first film 61 formed by the printing ink 60.

  Next, as shown in FIG. 3, the substrate 1 on which the first film 61 is formed by the transport unit 20 is heated below the heating unit 40 disposed adjacent to the downstream side of the printing unit 20. Move to 40a. The heating position 40a is a position adjacent to the downstream side of the printing position 20a.

  As shown in FIG. 5, the 1st film | membrane 61 of the to-be-printed material 1 in the heating position 40a is heated, and the 2nd film | membrane 62 is formed. For example, the first film 61 formed on the first surface 1 a of the substrate 1 at the heating position 40 a is heated by the infrared rays 42 from the heat source 41 (not shown), and the organic solvent contained in the first film 61 As a result of volatilization, the second film 62 may be formed. In the step of forming the second film 62, the heat source 41 may be a halogen lamp. Moreover, the halogen lamp of the heat source 41 may be set to a temperature of 70 ° C. or higher and 130 ° C. or lower. When the printing ink 60 is a conductive paste, the second film 62 may be a metal film. That is, it may be a wiring pattern formed on the first surface 1 a of the substrate 1 made of the green sheet 2 and the resin sheet 3. Suitably, the 2nd film | membrane 62 may be the internal electrode pattern which was formed on the green sheet 2 for laminated piezoelectric ceramics and had a desired shape, for example.

  Further, as shown in FIG. 5, in the step of forming the second film 62, the substrate 1 is cooled from the second surface 1 b side of the substrate 1 at the heating position 40 a by the cooling unit 50, and the substrate 1 is kept at room temperature. The process of keeping to may be included. For example, as illustrated in FIG. 5, the cooling unit 50 disposed below the heating position 40 a may cool the substrate 1 from the second surface 1 b of the substrate 1. Thereby, volatilization of the organic component remaining on the green sheet 2 can be reduced, and the influence of heating on the resin sheet 3 can be reduced. Although not shown, the cooling unit 50 may be the adsorption unit 30.

  The film manufacturing method according to the present embodiment has the following features, for example.

  According to the film manufacturing method according to the present embodiment, the substrate 1 is cooled by the adsorbing unit 30 or the cooling unit 50 and is kept at room temperature, for example. Therefore, the step of forming the first film 61 and the second film In the step of forming 62, it is possible to prevent the property of the substrate 1 from being modified by heat or the like. For example, when the substrate 1 includes a green sheet 2 and a resin sheet 3 for laminated piezoelectric ceramics, the green sheet 2 and the resin sheet 3 may be denatured by heat. However, according to the film manufacturing method according to the present embodiment, as described above, the green sheet 2 and the resin sheet 3 can be prevented from being denatured by heat.

  In addition, by cooling the substrate 1 during the heating process by the cooling unit 50, it becomes easier to wind up the substrate 1 when the substrate 1 is wound after the step of forming the second film 62. The handleability of the substrate 1 immediately after the step of forming 62 is improved.

  In addition, according to the film manufacturing method according to the present embodiment, since the heating unit 40 is disposed adjacent to the printing unit 20, the process of forming the first film 61 and the second film 62 are formed. The conveyance time between the steps to be performed is substantially minimized, and the productivity of the production line can be improved.

  Further, according to the film manufacturing method according to the present embodiment, in the step of forming the first film 61, the first film 61 formed by the adsorption unit 30 is cooled to wet the first film 61. Sex can be kept constant. As a result, the quality of the second film 62 formed from the first film 61 is improved, and the yield of the production line can be improved.

  In addition, since the printing position 20a and the heating position 40a are adjacent to each other, it is not necessary to transport the printing position 20a to a separate drying line, for example, and therefore the process of forming the second film 62 from the process of forming the first film 61. The process time up to can be standardized. According to this, since the residual ratio of the organic solvent in the first film 61 before the step of forming the second film 62 can be made constant, and the case where it is heated excessively can be prevented. The quality of the second film 62 can be improved and the yield of the production line can be improved.

  Further, since the suction unit 30 has a cooling function, the production line stops due to some factor, and even if the substrate 1 is transported to the heating position 40a and the heat treatment cannot be performed, the first process is performed. Therefore, the volatilization of the organic components from the first film 61 during the stop time can be suppressed. As a result, the quality of the second film 62 can be stabilized, and the yield of the production line can be improved.

  As described above, according to the film manufacturing method of the present embodiment, a film manufacturing method for improving productivity can be provided.

  Although the embodiments of the present invention have been described in detail as described above, it will be readily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Printed material, 1a 1st surface, 1b 2nd surface, 2 Ceramic green sheet, 3 Resin sheet, 10 Conveyance part, 20 Printing part, 20a Printing position, 21 Squeegee, 22 Screen mask, 22a Opening pattern, 30 Adsorption Part, 31 stage, 40 heating part, 40a heating position, 41 heat source, 42 infrared ray, 50 cooling part, 60 printing ink, 61 first film, 62 second film

Claims (10)

A transport unit having transport means for moving a printing material in a certain direction;
A printing unit provided above the substrate;
A heating unit provided above the substrate and adjacent to the downstream side of the printing unit;
An adsorbing unit that is provided below the printing unit and that adsorbs and fixes the printed material from a second surface side opposite to the first surface of the printed material facing the printing unit;
Including
The adsorption device has a cooling function. In claim 1,
The printing unit includes a screen printer having a squeegee and a screen mask. In claim 1 or 2,
A printing apparatus, further comprising a cooling unit that is provided below the heating unit and that cools the printing material from the second surface side of the printing material. In any one of Claims 1 thru | or 3,
The printing apparatus, wherein the heating unit is a halogen heater. In any one of Claims 1 thru | or 4,
The printing object is a printing apparatus including a resin sheet made of a resin film and a ceramic green sheet formed on the resin sheet. Manufacturing method of film The step of moving the substrate to the printing position of the printing unit by the transport unit,
A step of adsorbing and fixing the substrate to be printed at the printing position by an adsorption unit;
Forming a first film on the first surface of the substrate at the printing position by the printing unit;
Moving the substrate on which the first film is formed by the transport unit to a heating position of a heating unit adjacent to the printing unit;
Heating the first film of the substrate at the heating position by the heating unit to form a second film;
Including
The adsorption part has a cooling function,
The step of forming the first film further includes a step of cooling the substrate from the second surface side by the suction portion. In claim 6,
The step of forming the second film further includes a step of cooling the printed material at the heating position from the second surface side by a cooling unit. In claim 6 or 7,
The printed material includes a resin sheet made of a resin film, and a ceramic green sheet formed on the resin sheet,
The method for producing a film, wherein the second film is a metal film. In any one of claims 6 to 8,
The process of forming a said 2nd film | membrane is a manufacturing method of a film | membrane performed at the temperature of 70 to 130 degreeC. In any one of Claims 6 thru | or 9,
The method for producing a film, wherein the substrate is kept at room temperature by the step of cooling the second surface.

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