JP2010266750A - Observation device and observation system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an observation system capable of aligning a moving direction of a stage with a moving direction of an observation image by a simple method. <P>SOLUTION: The observation system includes: an X axis 21 extending in an X direction; a Y axis 22 extending in a Y direction; a stage 2 guided by the X axis 21 and the Y axis 22 to be movable, and provided with a level difference S in parallel with the X axis 21 on a placing surface on which a work is placed; and motors 41 and 42 moving the stage 2 in an optional direction. The observation system includes: a camera 71 imaging the work placed on the placing surface; a control drive unit 5 controlling the motors 41 and 42 so that the level difference S may be in visual field of the camera 71; an image processing unit 81 acquiring an index from the captured image; an arithmetic unit 82 obtaining the tilt of the index from the acquired index and calculating a correction coefficient; and a memory 83 storing the calculated correction coefficient. In the observation system, the control drive unit 5 controls the motors 41 and 42 by performing correction using the stored correction coefficient. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an observation apparatus and an observation system, for example, an observation apparatus typified by a microscope and an observation system typified by a microscope system.

  FIG. 10 is a conceptual diagram showing a known microscope system. As shown in FIG. 10, the microscope system includes a microscope gantry 101 configured to have a U-shape when viewed from the side, a stage 102 attached to the microscope gantry 101, and a specimen placed on the stage 102. An observation optical system 107 for observing the image is provided. The stage 102 described here is a two-axis electric type, and moves the stage 102 in the Y direction (front-rear direction) orthogonal to the X direction and the X axis 121 that moves the stage 102 in the X direction (left-right direction). Y axis 122. Motors 141 and 142 are connected to the X axis 121 and the Y axis 122, respectively, so that the X axis 121 and the Y axis 122 can be moved independently. Further, by moving the two axes (X axis 121 and Y axis 122) simultaneously, an arbitrary position of the specimen to be observed can be moved to the center of the observation image. A control drive unit 105 is connected to the motors 141 and 142, and an operation unit 106 is connected to the control drive unit 105. The operation unit 106 includes, for example, a switch box, a joystick, etc., and computer software. When an observer's intention is input to the operation unit 106, the operation unit 106 converts this into a control signal and performs control driving. This is sent to the unit 105. The control driving unit 105 controls and drives the motors 141 and 142 by a predetermined amount according to the control signal received from the operation unit. The observation optical system 107 described here includes a camera 171 and a monitor 172 connected to the camera 171. The imaging surface of the camera 172 is installed so as to coincide with the imaging surface of the observation optical system, and the observation image is acquired as an electrical signal. The acquired observation image is displayed on the monitor.

  In the above-described microscope system, the microscope gantry 101, the stage 102, the camera 171 and the like are configured by combining or combining a plurality of units. Therefore, there are many binding sites, and errors in the positional relationship at the binding sites tend to accumulate. For this reason, the camera 171 is coupled to the microscope gantry 101 by the round ant 108 so that the angle of the camera 171 can be adjusted around the optical axis. In addition, since the stage 102 may have a special case such as tilting the X axis 121 and the Y axis 122 by 45 degrees with respect to the observer, this is also coupled to the microscope gantry 101 by the round ant 103.

  For this reason, the moving direction of the stage can be set in any way with respect to the observation image captured by the camera, but in most cases, the moving direction of the stage and the moving direction of the observation image, that is, the stage It is more convenient to match the X direction (left and right direction) with the horizontal direction of the observation image, and the Y direction (front and rear direction) of the stage with the vertical direction of the observation image. However, it is difficult to adjust the moving direction of the stage and the moving direction of the observation image, and it is often used without adjustment.

  Thus, in order to solve the problem in the case where the moving direction of the stage does not match the moving direction of the observation image, map correction of the stage has been proposed. Map correction is to create a correction table that stores the correction amount when moving the stage over the entire range of movement of the stage. When moving the stage to a predetermined position, the correction amount at the predetermined position is obtained from the correction table. This is a stage control method for obtaining a driving amount for moving the stage to a predetermined position using the amount (see, for example, Patent Document 1). Specifically, the alignment mark whose coordinates are strictly controlled is precisely positioned and fixed on the stage after the reference wafer in which the alignment marks are arranged in a grid pattern is read, and then the alignment mark is read sequentially, thereby An error (difference between the read position and the position where it should be) is obtained, and a map is created in association with the coordinates. By using the map created in this way, it is possible to correct the X-axis and Y-axis tilts with respect to the moving direction of the observation image, the expansion / contraction error in the drive axis direction, and the orthogonality between the X-axis and the Y-axis.

  However, due to restrictions such as the need for an alignment mechanism to accurately place the specimen on the stage, and the complexity and cost of hardware and software, only some devices that require particularly high precision are required. Cannot be adopted. In addition, careful correction and know-how are required to acquire correct correction data, and only a dedicated staff who has received specialized education can operate.

  In addition, a stage that can rotate about the optical axis of the observation optical system, and two stages that can rotate together with the stage and slide the stage in a plane perpendicular to each other and perpendicular to the optical axis of the observation optical system. There has been proposed a stage driving apparatus including a guide, a linear motor that slides the stage along these two guides, and an operation lever for inputting an operation signal to the linear motor. The stage driving device includes an observation image of the sample on the stage generated by the rotation of the stage, and an operation signal for the linear motor input based on the observation image of the sample on the stage by the observation optical system. The angle difference relative to the two guides is converted into a corrected output signal. According to this stage driving device, when the operation signal for the stage input from the operation lever is converted, the relative angle between the observation image generated when the stage is rotated and the guide for moving the stage is changed. The deviation can be corrected (for example, see Patent Document 2).

JP 7-325623 A JP-A-8-194162

  However, in the initial state, the stage driving device described above, when the moving direction of the stage and the moving direction of the observation image do not coincide with each other, displays the observation image and the stage generated by rotating the stage. Even if the shift of the relative angle with the guide to be moved is corrected, the moving direction of the stage does not coincide with the moving direction of the observation image.

  The present invention has been made in view of the above, and an object of the present invention is to provide an observation apparatus and an observation system that can make the movement direction of the stage coincide with the movement direction of the observation image by a simple method.

  In order to solve the above-described problems and achieve the object, the present invention provides an observation apparatus including at least one or more rectilinear axes and a stage that moves while being guided by the rectilinear axes. An index for indicating a straight line is provided in parallel with the rectilinear axis.

  Further, the present invention provides at least one or more rectilinear axes and an index that is guided by the rectilinear axes and is movable and that indicates a straight line parallel to the rectilinear axes on the mounting surface on which the workpiece is placed. In the observation system comprising the provided stage, the observation optical system for observing the workpiece placed on the placement surface, and the drive control means for controlling the drive means for moving the stage in an arbitrary direction, the drive The control means controls the drive means so that the stage moves along the linear axis after controlling the drive means so that the index enters the field of view of the observation optical system.

  Two rectilinear axes extending in different directions, and can be guided and moved by the two rectilinear axes, and a straight line parallel to one rectilinear axis is indicated on the mounting surface on which the workpiece is placed In an observation system comprising a stage provided with an index to be moved, and a driving means for moving the stage in an arbitrary direction, an imaging means for imaging a workpiece placed on the placement surface, and the index in the field of view of the imaging means Index acquisition control means for controlling the drive means to enter, image processing means for acquiring an index from the captured image, calculation means for calculating an inclination of the index from the acquired index and calculating a correction coefficient, and the calculated correction Storage means for storing coefficients and correction drive control means for controlling the drive means by correcting with the stored correction coefficients are provided.

  A stage having two linear axes extending in different directions, a stage which is guided by the two linear axes and is movable, and which is provided with an index for indicating a point on the placement surface on which the workpiece is placed; In the observation system provided with the driving means for moving the stage in an arbitrary direction, the imaging means for imaging the work placed on the placement surface, and the driving means so that the index is in the field of view of the imaging means. Index obtaining control means for controlling, image processing means for obtaining the position of the index from the image taken at the second position moved from the first position while obtaining the position of the index from the image taken at the first position; Calculating means for calculating a correction coefficient from the position of the index acquired at the first position, the position of the index acquired at the second position, and the amount of movement, storage means for storing the calculated correction coefficient, and stored correction Correction by coefficient Characterized in that a correcting drive control means for controlling said drive means Te.

  The observation apparatus according to the present invention can adjust the moving direction of the stage and the movement of the observation image by adjusting the index indicating the straight line provided on the stage mounting surface and the upper or lower edge of the observation image to be parallel to each other. The direction can be matched.

  The observation system according to the present invention controls the drive unit so that the stage moves along the straight axis after controlling the drive unit so that the index enters the field of view of the observation optical system. It can be confirmed whether the moving direction of the image matches.

  The observation system according to the present invention obtains the inclination of the index from the index indicating the straight line acquired from the captured image, and corrects it with the calculated correction coefficient to control the driving means, so that it matches the moving direction of the observation image. You can move the stage.

  The observation system according to the present invention calculates a correction coefficient from the position of the index acquired at the first position, the position of the index acquired at the second position moved from the first position, and the amount of movement, and the calculated correction Since the driving unit is controlled by correcting with the coefficient, the stage can be moved to coincide with the moving direction of the observation image.

FIG. 1 is a conceptual diagram showing a microscope system that is Embodiment 1 of the present invention. FIG. 2A is a conceptual diagram illustrating an example of the stage illustrated in FIG. FIG. 2B is a conceptual diagram illustrating an example of the stage illustrated in FIG. FIG. 2-3 is a conceptual diagram illustrating an example of the stage illustrated in FIG. 1. FIG. 3A is a diagram illustrating an observation image in a state where the moving direction of the stage is shifted from the moving direction of the observation image. FIG. 3B is a diagram illustrating an observation image in a state where the moving direction of the stage matches the moving direction of the observation image. FIG. 4A is a diagram illustrating an observation image in a state where the moving direction of the stage is shifted from the moving direction of the observation image, and is a diagram illustrating a state where the stage is moved in the left direction. FIG. 4B is a diagram illustrating an observation image in a state where the moving direction of the stage is deviated from the moving direction of the observation image, and is a diagram illustrating a state where the stage is moved to the center. FIG. 4C is a diagram illustrating an observation image in a state where the moving direction of the stage is deviated from the moving direction of the observation image, and is a diagram illustrating a state where the stage is moved in the right direction. FIG. 5A is a diagram illustrating an observation image in a state where the moving direction of the stage matches the moving direction of the observation image, and is a diagram illustrating a state where the stage is moved in the left direction. FIG. 5B is a diagram illustrating an observation image in a state where the moving direction of the stage matches the moving direction of the observation image, and is a diagram illustrating a state where the stage is moved to the center. FIG. 5C is a diagram illustrating an observation image in a state where the moving direction of the stage matches the moving direction of the observation image, and is a diagram illustrating a state where the stage is moved rightward. FIG. 6 is a conceptual diagram showing a microscope system according to the third embodiment of the present invention. FIG. 7 is a conceptual diagram showing a procedure for recognizing a straight line as an index. FIG. 8 is a conceptual diagram showing a stage of a microscope system according to the fourth embodiment of the present invention. FIG. 9A is a conceptual diagram illustrating a procedure for calculating a deviation in the X direction of the stage. FIG. 9B is a conceptual diagram illustrating a procedure for calculating the deviation of the stage in the Y direction. It is a conceptual diagram which shows the microscope system already known.

  Hereinafter, embodiments of an observation apparatus and an observation system according to the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments. Here, a microscope and a microscope system will be described as typical examples of the observation apparatus and the observation system. However, a stepper, an exposure apparatus, and the like that operate while monitoring the surface of the workpiece (including an alignment mark) with an observation image. It can be applied to inspection equipment.

(Embodiment 1)
FIG. 1 is a conceptual diagram showing a microscope system according to Embodiment 1 of the present invention. As shown in FIG. 1, a microscope system according to an embodiment of the present invention includes a microscope gantry 1 configured to have a U-shape in a side view, a stage 2 attached to the microscope gantry 1, An observation optical system 7 for observing the specimen placed on the stage 2 is provided.

  FIG. 2 is a conceptual diagram showing an example of a stage. In the microscope system according to Embodiment 1 of the present invention, any of them can be attached to a microscope mount.

  As shown in FIG. 1, the stage 2 described here takes into account a special case such as tilting the X axis and the Y axis with respect to the observer by 45 degrees. It is attached to a gantry 1 (base portion 1a extending in front of the lower part). The stage 2 is a two-axis electric type, and an X axis 21 that moves the stage in the X direction (left and right direction) and a Y axis 22 that moves the stage in the Y direction (front and rear direction) orthogonal to the X direction. And. Motors 41 and 42 are connected to the X axis 21 and the Y axis 22, respectively, so that the X axis 21 and the Y axis 22 can be moved independently. In addition, by moving the two axes (X axis and Y axis) simultaneously, an arbitrary position of the specimen to be observed can be moved to the center of the observation image. A control drive unit 5 is connected to the motors 41 and 42, and an operation unit 6 is connected to the control drive unit 5. The operation unit 6 includes, for example, a switch box, a joystick, etc., and computer software. When an observer's intention is input to the operation unit, the operation unit 6 converts this into a control signal and converts it into a control drive unit. 5 to send. The control drive unit 5 controls and drives the motors 41 and 42 by a predetermined amount in accordance with the control signal received from the operation unit 6.

  In the stage shown in FIG. 2, the lower stage constitutes the Y axis 22 that moves the stage 2 in the front-rear direction, and the upper stage constitutes the X axis 21 that moves the stage 2 in the left-right direction. The uppermost surface is a mounting surface on which the specimen is mounted.

(Form 1)
FIG. 2-1 is a diagram illustrating a stage that is mode 1. FIG. The stage 2 which is the form 1 has a marking line L (index) indicating a straight line parallel to the X axis 21 on the uppermost surface (mounting surface). The parallelism between the X axis 21 and the marking line L is preferably 30 μm or less with respect to the stroke of the X axis 21 of 100 mm. This degree of parallelism can be processed without a significant increase in cost.

(Form 2)
FIG. 2-2 is a diagram illustrating a stage that is mode 2. FIG. The stage 2 which is the form 2 is provided with a step S (index) indicating a straight line parallel to the X axis on the uppermost surface (mounting surface). The parallelism between the X axis 21 and the step S is preferably 30 μm or less with respect to the stroke of 100 mm of the X axis 21. This degree of parallelism can be processed without a significant increase in cost.

(Form 3)
FIG. 2-3 is a diagram illustrating a stage that is mode 3. The stage 2 which is the form 3 includes a manually rotating sample table 23 for rotating and observing the sample, and a concave portion 21a into which the manual rotating sample table 23 is dropped. The recess 21 a has a rectangular shape in plan view, and is formed so that the reference contact surface 23 a (index) is parallel to the X axis 21 when the manually rotated sample base 23 is dropped. The parallelism between the reference contact surface 23a and the X axis 21 is desirably 30 μm or less with respect to the stroke of the X axis 21 of 100 mm. This degree of parallelism can be processed without a significant increase in cost. In addition, a simple plate-like member can be placed in the concave portion 21a as a specimen table that does not have a rotation function.

  As shown in FIG. 1, the observation optical system 7 described here includes a camera 71 and a monitor 72 connected to the camera 71. It is attached to the extended arm part 1b).

  Next, a procedure for adjusting the moving direction of the stage in the microscope system described above will be described with reference to FIGS. 3 to 5 are views showing observation images at the time of adjustment. Here, the stage 2 having the step S on the top surface described in the second embodiment will be described as an example.

  First, the top surface of the stage 2 is focused, the X axis 21 and the Y axis 22 are operated, the X axis 21 is moved to the center of the stroke, and the Y axis 22 is moved, as shown in FIG. Then, adjustment is performed so that the step S can be confirmed in the observation image. As shown in FIG. 3A, since the step S is inclined in the observation image, the moving direction (X direction) of the stage 2 is inclined with respect to the moving direction of the observation image. Therefore, the fixing of the round ant 3 of the stage 2 is loosened, and the stage 2 is rotated so that the step S is parallel to the upper edge or the lower edge of the observation image as shown in FIG. 3-2.

  As shown in FIG. 3A, when the step S is inclined in the observation image, when the stage 2 is moved leftward, the state shown in FIG. 4-2 is changed to the state shown in FIG. 4-1. The step S is lowered in the observation image. On the other hand, when the stage 2 is moved to the right, the state shown in FIG. 4-2 shifts to the state shown in FIG. 4-3, and the step S rises in the observation image. That is, when the step S is inclined in the observation image, the movement direction of the stage 2 and the movement direction of the observation image do not match, and thus the step S moves up and down.

  On the other hand, when the step S is parallel to the upper or lower edge of the observation image as shown in FIG. 3B, the stage 2 is moved to the left as shown in FIG. The state shifts from the state to the state shown in FIG. 5A, and the step S does not move up and down in the observation image. Further, even if the stage 2 is moved in the right direction, the state shown in FIG. 5-2 shifts to the state shown in FIG. 5-3, and the step does not move up and down in the observation image. That is, when the step S in the observation image is parallel to the upper or lower edge of the observation image, the movement direction of the stage matches the movement direction of the observation image, so the step S moves up and down. There is nothing to do.

  In the above-described microscope system, in order to make it easy to visually recognize the inclination with respect to the index (the marking line L, the step S, the reference contact surface 23a) indicating the straight line, a horizontal line to be compared is displayed at the center of the observation image, An optical index indicating the level may be embedded in the objective optical system.

  In addition, since the step S has a parallelism of 30 μm or less with respect to the stroke of 100 mm of the X-axis 21, if the full stroke is adjusted at the center of the stroke on the stage of 100 mm, the sample is moved 25 mm to one side. Will move up and down by a maximum of 7.5 μm. However, the size of the observation visual field varies depending on the focal length of the imaging lens built in the CCD or the camera tube constituting the image sensor of the camera 71. In a typical example in the narrowest case, a 100 × special objective lens is used. It is about 20 μm wide and 14 μm long. In other words, even if the index is suddenly adjusted in the field of view of the high-magnification objective lens, the index is not lost until about half of the full stroke. Therefore, if the angle of the stage 2 is further adjusted, the moving direction of the stage 2 matches the moving direction of the observation image over the entire stroke.

  According to the microscope system of the first embodiment described above, the moving direction of the stage 2 and the moving direction of the observation image can be easily matched. Further, since the indices such as the marking line L and the step S are sufficient with a tolerance that can be processed by a general machine tool, the cost does not increase.

(Embodiment 2)
The microscope system according to the second embodiment of the present invention includes a sequence for assisting manual adjustment in the microscope system according to the first embodiment described above. This sequence starts in response to an adjustment start instruction input from the operation unit 6. Hereinafter, the contents of the sequence will be described.

  First, in the sequence, the stage is moved so that an index, for example, a step S provided on the mounting surface of the stage 2 enters the field of view. At this time, the X-axis 21 has moved to the approximate center of the movable range. Here, as shown in FIG. 4B, the stage 2 is roughly adjusted so that the operator focuses on an index (for example, a step) and the index is parallel to the upper or lower edge of the observation image. .

  Next, the sequence moves the stage 2 in the left direction and the right direction. As described above, when the stage 2 is moved leftward and rightward, the step S swings up and down. Therefore, the mounting angle of the stage 2 is finely adjusted as shown in FIG. For confirmation, the stage 2 is again moved leftward and rightward to confirm that the step S does not swing up and down.

  In the microscope system described above, the index representing a straight line has a tolerance of 30 μm with respect to the X axis and 100 mm. Therefore, it is preferable to make fine adjustments by moving the stage 2 leftward and rightward with the specimen displayed in the observation image.

(Embodiment 3)
FIG. 6 is a diagram showing a microscope system according to the third embodiment of the present invention. The same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  The microscope system according to the third embodiment of the present invention further includes an image processing unit 81, a calculation unit 82, and a storage unit 83 in addition to the above-described microscope system according to the first embodiment, and a sequence for assisting adjustment. ing.

  The image processing unit 81 is connected to the camera 71 and captures an image captured by the camera 71. Further, the image processing unit 81 is configured to detect a plurality of positions of the index from the captured image.

  The calculation unit 82 is connected to the image processing unit 81 and receives a plurality of position information detected by the image processing unit 81. The calculation unit 82 calculates the inclination of the index with respect to the image and the correction coefficient for correcting the inclination from the received plurality of position information.

  The storage unit 83 is connected to the calculation unit 82 and the control drive unit 5, receives the coefficient calculated by the calculation unit 82, and stores the coefficient so that it can be referred to from the control drive unit 5.

  The control drive unit 5 refers to the coefficient stored in the storage unit 83 based on the sequence, corrects the control signal input from the operation unit 6, and based on the corrected control signal, the X axis 21 and the Y axis 22 is controlled in a coordinated manner. Hereinafter, the contents of the sequence will be described.

  First, when an instruction to start adjustment is given from the operation unit 6, the control driving unit 5 moves the stage 2 so that the index provided on the placement surface enters the field of view. At this time, the X-axis 21 moves so as to be approximately in the center in the movable range. Here, the operator focuses on an index (for example, a step). FIG. 7 is a diagram illustrating an observation image in which the operator has focused.

  The image processing unit 81 captures an observation image from the camera 71 and acquires a luminance profile along lines set at the left end and the right end of the observation image. When the index is a step, the brightness profile is bright above the step S and dark at the bottom (this is because the bottom is not in focus). Therefore, the position where the brightness profile rises rapidly may be set as the index position. The acquired luminance profile is sent to the calculation unit 82.

  The calculation unit 82 receives the luminance profile from the image processing unit 81 and calculates a correction coefficient. Specifically, as shown in FIG. 7, the correction coefficient is calculated from the interval X between the left end and the right end from which the luminance profile is acquired, and the index difference Y between the left end and the right end. Then, the calculated correction coefficient is sent to the storage unit 83. The storage unit 83 receives the correction coefficient from the calculation unit 82 and stores it so as to be referred to.

  In the microscope system adjusted as described above, when the operation unit 6 is operated so as to move the observation image to the right by Amm, the control drive unit 5 outputs a drive signal of Amm to the X axis and the Y axis. (AX-Y / X) drive signal is output. Thus, by correcting, the specimen moves Amm in the right direction.

  In the microscope system described above, the index representing a straight line has a tolerance of 30 μm with respect to the X axis and 100 mm. Therefore, it is preferable to make fine adjustments by moving the stage 2 leftward and rightward with the specimen displayed in the observation image.

  Since the above-described microscope system has a simple adjustment procedure, there is no need to educate the person in charge of the system about the adjustment procedure.

(Embodiment 4)
Since the microscope system according to the fourth embodiment is not different from the microscope system according to the third embodiment except for the stage and the sequence, the stage 2 and the sequence will be described, and the other description will be omitted.

  First, the stage 2 will be described with reference to FIG. FIG. 8 is a conceptual diagram showing a stage applied to the microscope system according to the fourth embodiment of the present invention. As shown in FIG. 8, the stage 2 applied to the microscope system according to the embodiment of the present invention has an index M at the corner of the mounting surface. The index M is, for example, a cross shape, and more preferably a cross shape formed by etching on a glass plate like an eyepiece index.

  Next, the contents of the sequence will be described with reference to FIG. 6 as necessary. First, when an instruction to start adjustment is given from the operation unit 6, the control driving unit 5 moves the stage so that the index M provided on the placement surface enters the left end of the visual field. Here, the operator focuses on the index M (for example, a cross-shaped mark). Then, the image processing unit 81 captures the observation image from the camera 71 and extracts the index M from the observation image. Next, the calculation unit 82 calculates the position of the index on the observation image.

  Next, the control drive unit 5 moves the index M along the X axis 21. Then, the index moved by the image processing unit 81 is extracted, and the position of the index M moved by the calculation unit 82 is calculated. When the position of the index M before movement, the amount of movement of the X axis 21, and the position of the index M after movement are obtained in this way, as shown in FIG. The direction deviation aY is obtained. The calculation unit 81 obtains a correction coefficient from the movement amount aX in the left-right direction and the deviation aY in the front-rear direction. And the memory | storage part 83 receives a correction coefficient from the calculating part 82, and memorize | stores it so that reference is possible.

  In the microscope system adjusted in this way, when the operation unit 6 is operated so as to move the observation image to the right by Amm, the control drive unit 5 outputs a drive signal of Amm to the motor 41 and the motor 42. (AX-Y / X) drive signal is output. Thus, by correcting, the specimen moves Amm in the right direction.

  According to the microscope system according to the present embodiment, if the correction coefficient is obtained for the X axis 21, the Y axis 22 is orthogonal to the X axis 21, so that it is not necessary to obtain the correction coefficient for the Y axis 22. If the correction coefficient is also obtained for the Y axis 22, the stage 2 can be moved more accurately.

  Specifically, when the start of adjustment of the Y axis is instructed from the operation unit, the control drive unit 5 moves the stage 2 so that the index M provided on the placement surface enters the upper end of the field of view. Then, the image processing unit 81 captures the observation image from the camera 71 and extracts an index from the observation image. Next, the calculation unit 82 calculates the position of the index on the observation image.

  Next, the control drive unit 5 moves the index M along the Y axis. Then, the index M moved by the image processing unit 81 is extracted, and the position of the index M moved by the calculation unit 82 is calculated. When the position of the index M before movement, the amount of movement of the Y-axis 22, and the position of the index M after movement are obtained in this way, as shown in FIG. The deviation bX is obtained. The calculation unit obtains a correction coefficient from the movement amount bY in the front-rear direction and the deviation bY in the left-right direction. And the memory | storage part 83 receives a correction coefficient from the calculating part 82, and memorize | stores it so that reference is possible.

  According to the microscope system according to the embodiment described above, if the first direction is moved to the second point while correcting the driving direction, the distance between any two points in the observation image can be easily obtained. Further, the moving distance in the horizontal and vertical orthogonal coordinate system with respect to the screen frame can also be obtained.

(Modification 1)
As described above, if the storage unit stores the correction coefficient in the X-axis direction and the correction coefficient in the Y-axis direction, the stage 2 can be moved while correcting in either direction. When driving the X-axis 21 and the Y-axis 22 at the same time, add the original drive amount for driving the X-axis 21 and the Y-axis 22 and the correction amounts for the X-axis 21 and the Y-axis 22 respectively. That's fine.

(Modification 2)
In the microscope system according to the above-described embodiment, the sequence is started by the operator and adjusted to calculate the correction coefficient. However, when a certain condition is satisfied, the sequence is executed. The correction coefficient may be calibrated. The case where a certain condition is satisfied is assumed to be, for example, at the time of initialization, a predetermined accumulated use time, or the like. If the calibration is performed in this way, the correction coefficient can be calibrated even if a knuckling in the mounting direction due to a change with time or an accidental knurl caused by hitting a hand or an instrument on the stage 2 occurs.

DESCRIPTION OF SYMBOLS 1 Microscope mount 1b Arm part 1a Base part 2 Stage 21 X-axis 21a Recessed part 22 Y-axis 23 Manual rotation sample stand 23a Reference contact surface 3 Round ant 41, 42 Motor (drive means)
5 Control Drive Unit 6 Operation Unit 7 Observation Optical System 71 Camera (Imaging Means)
72 Monitor 8 Round ant 81 Calculation unit 81 Image processing unit (image processing means)
82 Calculation unit (calculation means)
83 Storage section (storage means)
L Marking line (index)
S steps (index)
M mark (indicator)

Claims (4)

In a microscope provided with at least one or more rectilinear axes and a stage that is guided and moved by the rectilinear axes,
An observation apparatus characterized in that an indicator for indicating a straight line is provided on a stage mounting surface parallel to a straight axis. A stage having at least one linear axis, a stage that is guided by the linear axis and is movable, and an index that indicates a straight line parallel to the linear axis on the placement surface on which the workpiece is placed; In an observation system comprising an observation optical system for observing a workpiece placed on the placement surface, and a drive control means for controlling a drive means for moving the stage in an arbitrary direction,
The drive control means controls the drive means so that the stage moves along the rectilinear axis after controlling the drive means so that the index enters the field of view of the observation optical system. Two rectilinear axes extending in different directions, and can be guided and moved by the two rectilinear axes, and a straight line parallel to one rectilinear axis is indicated on the mounting surface on which the workpiece is placed In an observation system provided with a stage provided with an index to perform and a driving means for moving the stage in an arbitrary direction,
Imaging means for imaging the workpiece placed on the placement surface;
Index acquisition control means for controlling the drive means so that the index falls within the field of view of the imaging means;
Image processing means for obtaining an index from the captured image;
An arithmetic means for calculating an inclination of the index from the acquired index and calculating a correction coefficient;
Storage means for storing the calculated correction coefficient;
An observation system comprising: correction drive control means for controlling the drive means by correcting with a stored correction coefficient. A stage having two linear axes extending in different directions, a stage which is guided by the two linear axes and is movable, and which is provided with an index for indicating a point on the placement surface on which the workpiece is placed; In an observation system provided with a driving means for moving the stage in an arbitrary direction,
Imaging means for imaging the workpiece placed on the placement surface;
Index acquisition control means for controlling the drive means so that the index falls within the field of view of the imaging means;
Image processing means for acquiring the position of the index from the image captured at the first position and acquiring the position of the index from the image captured at the second position moved from the first position;
Calculating means for calculating a correction coefficient from the position of the index acquired at the first position, the position of the index acquired at the second position, and the movement amount;
Storage means for storing the calculated correction coefficient;
An observation system comprising: correction drive control means for controlling the drive means by correcting with a stored correction coefficient.

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