JP2010264339A - Ultrasonic cleaning apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning apparatus allowing improvement of the joint strength between a square vibration surface and a joint surface and the joint strength between an ultrasonic vibrator and a vibration plate. <P>SOLUTION: The ultrasonic cleaning apparatus 100 includes the ultrasonic vibrator 110 having the square vibration surface 111a and the vibration plate 130 having a joint surface 130b including the joint area 130bg joined with the square vibration surface 111a. The square vibration surface 111a of the ultrasonic vibrator 110 and the joint area 130bg of the vibration plate 130 are joined together with an adhesive 140 without use of stud bolts, and recessed grooves 111av and 130bv each having a specified pattern are formed in the square vibration surface 111a and the joint area 130bg. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an ultrasonic transducer having a vibration surface that vibrates ultrasonically, a bonding surface to which the vibration surface of the ultrasonic transducer is bonded, and a radiation surface that emits ultrasonic waves transmitted from the ultrasonic transducer. The present invention relates to an ultrasonic cleaning apparatus including a diaphragm having

  Conventionally, an ultrasonic transducer having a vibration surface that vibrates ultrasonically, a bonding surface to which the vibration surface of the ultrasonic transducer is bonded, and a radiation surface that emits ultrasonic waves transmitted from the ultrasonic transducer are provided. 2. Description of the Related Art An ultrasonic cleaning device that includes a diaphragm having the same is known. For example, Patent Document 1 discloses such an ultrasonic cleaning apparatus.

  The ultrasonic cleaning apparatus described in Patent Literature 1 is fastened through a front mass, a rear mass, a piezoelectric element and an electrode plate disposed between the front mass and the rear mass, and a central portion of these components. A bolt-clamped Langevin type transducer (ultrasonic transducer). Among these, the front mass has a circular vibration surface (round vibration surface) that vibrates ultrasonically at its tip, and a female screw hole is provided at the center thereof. A stud bolt welded to the diaphragm is screwed into the female screw hole via a bonding material, whereby the ultrasonic vibrator and the diaphragm are integrated (patent document 1). Refer to the claims and FIGS.

  In addition, a groove extending from the threaded portion to the outer peripheral edge of the round vibration surface is provided on at least one of the round vibration surface of the ultrasonic vibrator and the contact surface of the vibration plate in contact therewith. This groove is formed to facilitate air bleeding during the thermosetting of the bonding material for bonding the round vibration surface of the ultrasonic vibrator and the contact surface of the vibration plate.

JP-A-10-200995

  However, when the ultrasonic vibrator and the diaphragm are fixed using the stud bolt as described above, the diaphragm is bent, and a gap is formed between the round vibration surface of the ultrasonic vibrator and the contact surface of the diaphragm. Prone to occur. In particular, when the vibration surface of the ultrasonic transducer is a rectangular vibration surface having a rectangular shape, a gap is likely to be formed between the corner portion of the rectangular vibration surface and the contact surface of the diaphragm. When such a gap occurs, there are fewer portions that transmit ultrasonic waves from the ultrasonic vibrator to the diaphragm, unevenness occurs in the ultrasonic waves emitted from the radiation surface of the diaphragm, and ultrasonic waves can be transmitted to the diaphragm. Therefore, the ultrasonic vibrator may generate heat.

  Therefore, when the vibration surface of the ultrasonic vibrator is a square vibration surface, the inventor adheres the square vibration surface and the contact surface (joint surface) of the vibration plate without using a stud bolt. It was devised to join with an agent. However, when the rectangular vibration surface of the ultrasonic vibrator and the contact surface (bonding surface) of the diaphragm are bonded only by the adhesive, the bonding strength between the two tends to decrease.

  The present invention has been made in view of the present situation, and the vibration surface of the ultrasonic vibrator is a square vibration surface, and the joint surface of the square vibration surface and the vibration plate does not use a stud bolt. An object of the present invention is to provide an ultrasonic cleaning apparatus capable of improving the bonding strength between an ultrasonic vibrator and a diaphragm in an ultrasonic cleaning apparatus bonded with an adhesive.

  The solution includes: an ultrasonic vibrator having a vibration surface that vibrates ultrasonically; a bonding surface including a bonding region where the vibration surface of the ultrasonic vibrator is bonded; and the ultrasonic vibrator through the bonding surface. A vibration plate having a radiation surface that emits ultrasonic waves transmitted from the ultrasonic vibration device, wherein the vibration surface of the ultrasonic vibrator is a rectangular vibration surface having a rectangular shape, The square vibration surface and the joining region of the joining surface of the diaphragm are joined by an adhesive without using a stud bolt, and at least one of the square vibration surface and the joining region is predetermined. It is an ultrasonic cleaning apparatus in which concave grooves of a pattern are formed.

  In the ultrasonic cleaning apparatus of the present invention, the vibration surface of the ultrasonic vibrator is a square vibration surface. The square vibration surface and the joining region of the joining surface of the diaphragm are joined by an adhesive without using a stud bolt. In addition, a groove having a predetermined pattern is formed in at least one of the square vibration surface and the joining region. This concave groove increases the bonding area between the square vibration surface and the bonding region, so that the bonding strength between the square vibration surface and the bonding region can be improved, and the bonding strength between the ultrasonic vibrator and the vibration plate can be improved. Can be improved.

  Furthermore, in the ultrasonic cleaning device, the concave groove is formed in at least the square vibration surface of the square vibration surface and the bonding region, and the groove is formed on the square vibration surface. The concave groove may be an ultrasonic cleaning device configured to be uniformly distributed over the entire surface of the square vibration surface.

  In the ultrasonic cleaning apparatus of the present invention, the concave grooves formed on the square vibration surface of the ultrasonic vibrator are uniformly distributed over the entire surface of the square vibration surface. For this reason, since the adhesion area can be increased uniformly over the entire surface of the square vibration surface, the bonding strength between the square vibration surface and the bonding region can be improved uniformly within the square vibration surface. The vibrator and the diaphragm can be joined more uniformly.

  Further, in the above ultrasonic cleaning apparatus, the concave groove formed in the square vibration surface may be an ultrasonic cleaning apparatus configured to reach the outer peripheral edge of the square vibration surface.

When bonding the rectangular vibration surface of the ultrasonic vibrator to the bonding region of the diaphragm, bubbles may be involved in the adhesive. Then, in this bubble part, since an ultrasonic wave is not transmitted, it is unpreferable. In addition, the adhesive strength between the ultrasonic vibrator and the diaphragm may be reduced.
On the other hand, in the ultrasonic cleaning apparatus of the present invention, the concave groove formed on the square vibration surface of the ultrasonic vibrator reaches the outer peripheral edge of the square vibration surface. For this reason, when hardening an adhesive agent, a bubble can be discharged | emitted outside from the outer periphery of a square-shaped vibration surface through a ditch | groove. Thus, the bonding between the square vibration surface and the bonding region can be made more reliable, and the bonding reliability between the ultrasonic vibrator and the vibration plate can be increased.

  Furthermore, in the ultrasonic cleaning device described above, it is preferable that the concave groove formed on the square vibration surface is an ultrasonic cleaning device having a lattice shape reaching the outer peripheral edge of the square vibration surface.

  In the ultrasonic cleaning apparatus of the present invention, the concave grooves formed on the square vibration surface of the ultrasonic vibrator are in a lattice shape reaching the outer peripheral edge of the square vibration surface. Thus, if it is set as a grid | lattice-like ditch | groove, a ditch | groove can be uniformly distributed over the whole surface of a square-shaped vibration surface, and formation of a ditch | groove is easy.

  Furthermore, in the ultrasonic cleaning apparatus according to any one of the above, the concave groove is formed at least in the bonding region of the square vibration surface and the bonding region, and is formed in the bonding region. In addition, the concave groove may be an ultrasonic cleaning device that is uniformly distributed over the entire surface of the joining region.

  In the ultrasonic cleaning apparatus of the present invention, the concave grooves formed in the bonding region of the diaphragm are configured to be uniformly distributed over the entire surface of the bonding region. For this reason, since the bonding area can be increased uniformly over the entire surface of the bonding region, the bonding strength between the square vibration surface and the bonding region can be improved uniformly within the bonding region, and the ultrasonic transducer and vibration The plate can be joined more uniformly.

  Further, in the ultrasonic cleaning device described above, the concave groove formed in the joining region may be an ultrasonic cleaning device configured to reach the outer peripheral edge of the joining region.

As described above, when the rectangular vibration surface of the ultrasonic vibrator is bonded to the bonding region of the diaphragm, bubbles may be involved in the adhesive. Then, in this bubble part, since an ultrasonic wave is not transmitted, it is unpreferable. In addition, the adhesive strength between the ultrasonic vibrator and the diaphragm may be reduced.
On the other hand, in the ultrasonic cleaning apparatus of the present invention, the groove formed in the joining region of the diaphragm is configured to reach the outer peripheral edge of the joining region. For this reason, when hardening an adhesive agent, a bubble can be discharged | emitted outside from the outer periphery of a joining area | region through a ditch | groove. Thus, the bonding between the square vibration surface and the bonding region can be made more reliable, and the bonding reliability between the ultrasonic vibrator and the vibration plate can be increased.

  Furthermore, in the above ultrasonic cleaning apparatus, the concave groove formed in the joining region may be an ultrasonic cleaning device having a lattice shape reaching the outer peripheral edge of the joining region.

  In the ultrasonic cleaning apparatus of the present invention, the concave grooves formed in the bonding region of the diaphragm are formed in a lattice shape that reaches the outer peripheral edge of the bonding region. Such a lattice shape facilitates the formation of the concave grooves, and can sufficiently improve the bonding strength between the square vibration surface and the bonding region, and the bonding between the ultrasonic vibrator and the vibration plate. The strength can be sufficiently improved.

  Furthermore, the ultrasonic cleaning apparatus according to any one of the above, preferably the ultrasonic cleaning apparatus in which the concave groove is formed in each of the square vibration surface and the bonding region.

  In the ultrasonic cleaning apparatus of the present invention, concave grooves are respectively formed in the joining region between the square vibration surface of the ultrasonic vibrator and the vibration plate. For this reason, since the bonding area between the square vibration surface and the bonding region is further increased, the bonding strength between the square vibration surface and the bonding region is further improved, and the bonding strength between the ultrasonic vibrator and the vibration plate is improved. This can be further improved.

1 is a side view of an ultrasonic cleaning apparatus according to Embodiment 1. FIG. 1 is a perspective view of an ultrasonic transducer according to Embodiment 1. FIG. FIG. 4 is a perspective view of the diaphragm according to the first embodiment. FIG. 10 is a perspective view of an ultrasonic transducer according to the second embodiment. FIG. 10 is a perspective view of a diaphragm according to the third embodiment. FIG. 10 is a perspective view of a diaphragm according to the fourth embodiment.

(Embodiment 1)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows an ultrasonic cleaning apparatus 100 according to the first embodiment. 2 shows an ultrasonic transducer 110 that constitutes the ultrasonic cleaning apparatus 100, and FIG. The ultrasonic cleaning apparatus 100 according to the first embodiment includes an ultrasonic vibrator 110 and a diaphragm 130 to which the ultrasonic vibrator 110 is bonded (adhered).

Among them, the ultrasonic transducer 110 includes a front mass 111, a rear mass 115, two piezoelectric elements (first piezoelectric element 121 and second piezoelectric element 122), and two electrode plates (first electrode plate 125 and second piezoelectric element). This is a Langevin type vibrator composed of an electrode plate 126), a bolt 129, a hex nut 128, and the like.
Among these, the front mass 111 is a member that transmits ultrasonic waves generated by piezoelectric elements 121 and 122 described later to the diaphragm 130 and is made of metal. The front mass 111 is located on the front end side (upward in FIGS. 1 and 2) and has a front end side portion 112 having a substantially quadrangular prism shape, and a rear end side of the front end side portion 112 (in FIGS. 1 and 2). And is formed integrally with a columnar rear end side portion 113. A screw hole (not shown) into which the bolt 129 is screwed is provided at the center of the rear end side of the front mass 111.

  The front mass 111 is joined to the vibration plate 130 by the adhesive 140 without using a stud bolt at the front end side, and the bolt 129 is screwed at the rear end side so that the first piezoelectric element 121 described later. Abut. That is, in the front mass 111, the front end surface 111a having a rectangular shape located at the front end is not formed with a screw hole into which the stud bolt is screwed, and the entire surface is joined to the diaphragm 130 by the adhesive 140. is doing. In addition, a rear end surface 111 b of the front mass 111 that is located at the rear end and has an annular shape is in contact with the first piezoelectric element 121.

  The front end surface 111a of the front mass 111 is a vibration surface (square vibration surface) that vibrates ultrasonically, and has a square shape of 45 mm × 45 mm. A plurality of first concave grooves 111av, 111av,... Forming a predetermined pattern are formed on the front end surface (square vibration surface) 111a. The pattern of these first concave grooves 111av, 111av,... Is uniformly distributed over the entire surface of the square vibration surface 111a. Further, the first concave grooves 111av, 111av,... Reach the outer peripheral edges 111af, 111af,.

  Specifically, four first concave grooves 111av, 111av,... Having a width of 1.5 mm and a depth of 1 mm are formed on the square vibration surface 111a. Among these, the two first concave grooves 111av and 111av extend linearly in parallel with each other from one outer peripheral edge 111af of the square vibration surface 111a to the outer peripheral edge 111af opposite to the outer peripheral edge 111af. Further, the remaining two first concave grooves 111av and 111av are orthogonal to the first concave grooves 111av and 111av described above, respectively, from the outer peripheral edge 111af of the square vibration surface 111a to the outer side facing this. It extends linearly in parallel to each other up to the peripheral edge 111af. Accordingly, the first concave grooves 111av, 111av,... Formed in the square vibration surface 111a reach the outer peripheral edges 111af, 111af,... Of the square vibration surface 111a, and the square vibration surface 111a is equally divided into nine. It has a lattice shape.

Next, other members constituting the ultrasonic transducer 110 will be described.
The first piezoelectric element 121 is made of piezoelectric ceramic and has a cylindrical shape having a shaft hole (not shown) through which the bolt 129 is inserted. Of the first piezoelectric element 121, the annular front end surface 121a is in contact with the rear end surface 111b of the front mass 111 as described above. On the other hand, an annular rear end surface 121b of the first piezoelectric element 121 is in contact with a first electrode plate 125 described below.

  The first electrode plate 125 is made of metal and has an annular plate-shaped first electrode body portion 125i having a shaft hole (not shown) through which the bolt 129 is inserted, and extends radially outward from the first electrode body portion 125i. And a terminal portion 125j extending out. As described above, the first electrode main body 125i is in contact with the rear end surface 121b of the first piezoelectric element 121 at the annular front end surface 125ia. On the other hand, the first electrode main body 125i is in contact with the second piezoelectric element 122 described below at the annular rear end face 125ib.

  The second piezoelectric element 122 is also made of piezoelectric ceramic and has a cylindrical shape having a shaft hole (not shown) through which the bolt 129 is inserted. Of the second piezoelectric element 122, the annular front end surface 122a is in contact with the rear end surface 125ib of the first electrode body 125i of the first electrode plate 125 as described above. On the other hand, an annular rear end surface 122b of the second piezoelectric element 122 is in contact with a second electrode plate 126 described below.

  The second electrode plate 126 is made of metal and has an annular plate-shaped second electrode body 126i having a shaft hole (not shown) through which the bolt 129 is inserted, and extends radially outward from the second electrode body 126i. And a terminal portion 126j extending out. As described above, the second electrode main body 126i is in contact with the rear end surface 122b of the second piezoelectric element 122 at the annular front end surface 126ia. On the other hand, the second electrode main body 126i is in contact with a rear mass 115 described below at an annular rear end surface 126ib.

  The rear mass 115 is made of metal and has a cylindrical shape having a shaft hole (not shown) through which the bolt 129 is inserted. The annular front end surface 115a of the rear mass 115 is in contact with the rear end surface 126ib of the second electrode body 126i of the second electrode plate 126 as described above. On the other hand, a hexagon nut 128 described below is in contact with the rear end surface 115b of the rear mass 115.

  The bolt 129 is inserted into the rear mass 115, the second electrode plate 126, the second piezoelectric element 122, the first electrode plate 125, and the first piezoelectric element 121, and is screwed into a screw hole provided in the front mass 111, while the rear mass 115 projects from the rear end side and is screwed to the hexagon nut 128 to fasten the members 111, 115, 121, 122, 125, 126. Thereby, each member 111,115,121,122,125,126,129,128 which comprises the ultrasonic transducer | vibrator 110 is mutually fixed and integrated.

  Next, the diaphragm 130 will be described. The diaphragm 130 is made of metal, and is positioned on the radiation surface 130a located on the front end side (upper in FIG. 1, lower in FIG. 3) and on the rear end side (lower in FIG. 1, lower in FIG. 3). It is the rectangular plate shape which has the joining surface 130b to do. The radiation surface 130a is a surface that radiates ultrasonic waves transmitted from the ultrasonic transducer 110 through the bonding surface 130b. On the other hand, the bonding surface 130b is a surface for bonding the ultrasonic transducer 110 with the adhesive 140 as described above, and has a rectangular shape for bonding the vibration surface 111a of the ultrasonic transducer 110 (in the first embodiment, a square shape). ) In the center.

  A plurality of second concave grooves 130bv, 130bv,... Having a predetermined pattern are formed in and around the bonding region 130bg in the bonding surface 130b. The pattern of these second concave grooves 130bv, 130bv,... Is uniformly distributed over the entire joining region 130bg. Further, these second concave grooves 130bv, 130bv,... Reach the outer peripheral edges 130bgf, 130bgf,... Of the joining region 130bg indicated by broken lines in FIG.

  Specifically, twelve second concave grooves 130bv, 130bv,... Having a width of 1.5 mm and a depth of 0.5 mm are formed on the joint surface 130b. Among these, the six second concave grooves 130bv, 130bv,... Linearly extend in parallel at equal intervals from one outer peripheral edge 130bgf of the joining region 130bg to the outer peripheral edge 130bgf opposed thereto. . Further, the remaining six second concave grooves 130bv, 130bv,... Are orthogonal to the six second concave grooves 130bv, 130bv,... Described above from one outer peripheral edge 130bgf of the joining region 130bg. The outer peripheral edge 130bgf facing this is linearly extended in parallel at equal intervals. Accordingly, the second concave grooves 130bv, 130bv,... Formed in the joint surface 130b reach the outer peripheral edges 130bgf, 130bgf,... Of the joint region 130bg, and have a lattice shape that equally divides the joint region 130bg. .

  As described above, in the ultrasonic cleaning apparatus 100 according to the first embodiment, the ultrasonic vibrator 110 whose vibration surface 111a is a square vibration surface is used. The square vibration surface 111a and the joining region 130bg of the joining surface 130b of the diaphragm 130 are joined by an adhesive 140 without using a stud bolt. However, a concave groove (first concave groove 111av and second concave groove 130bv) having a predetermined pattern is formed in each of the square vibration surface 111a and the joining region 130bg. Since the first concave groove 111av and the second concave groove 130bv increase the bonding area between the square vibration surface 111a and the bonding region 130bg, the bonding strength between the square vibration surface 111a and the bonding region 130bg can be improved. In addition, the bonding strength between the ultrasonic vibrator 110 and the diaphragm 130 can be improved.

Furthermore, in the first embodiment, the first concave grooves 111av formed on the square vibration surface 111a are uniformly distributed over the entire surface of the square vibration surface 111a. For this reason, since the adhesion area can be increased uniformly over the entire surface of the square vibration surface 111a, the bonding strength between the square vibration surface 111a and the bonding region 130bg can be improved uniformly within the square vibration surface 111a. In addition, the ultrasonic vibrator 110 and the diaphragm 130 can be joined more uniformly.
Further, the second concave grooves 130bv formed in the joining region 130bg are uniformly distributed over the entire surface of the joining region 130bg. For this reason, since the adhesion area can be increased uniformly over the entire surface of the bonding region 130bg, the bonding strength between the square vibration surface 111a and the bonding region 130bg can be improved uniformly in the bonding region 130bg, and the ultrasonic wave The vibrator 110 and the diaphragm 130 can be joined more uniformly.

Furthermore, in the first embodiment, the first concave groove 111av formed in the square vibration surface 111a reaches the outer peripheral edge 111af of the square vibration surface 111a. For this reason, when hardening the adhesive agent 140, air bubbles can be discharged | emitted outside from the outer periphery 111af of the square-shaped vibration surface 111a through the 1st ditch | groove 111av. Thus, the bonding between the square vibration surface 111a and the bonding region 130bg can be made more reliable, and the bonding reliability between the ultrasonic vibrator 110 and the vibration plate 130 can be increased.
Further, the second concave groove 130bv formed in the joining region 130bg reaches the outer peripheral edge 130bgf of the joining region 130bg. For this reason, when the adhesive 140 is cured, the bubbles can be discharged to the outside from the outer peripheral edge 130bgf of the joining region 130bg through the second concave groove 130bv. Thus, the bonding between the square vibration surface 111a and the bonding region 130bg can be made more reliable, and the bonding reliability between the ultrasonic vibrator 110 and the vibration plate 130 can be increased.

Further, in the first embodiment, the first concave grooves 111av formed on the square vibration surface 111a are formed in a lattice shape that reaches the outer peripheral edge 111af of the square vibration surface 111a. Thus, if it is set as the grid | lattice-like 1st ditch | groove 111av, 1st ditch | groove 111av can be uniformly distributed over the whole surface of the square-shaped vibration surface 111a, and formation of the 1st ditch | groove 111av is easy.
Further, the second concave grooves 130bv formed in the joining region 130bg are formed in a lattice shape that reaches the outer peripheral edge 130bgf of the joining region 130bg. As described above, when the lattice-shaped second groove 130bv is used, the second groove 130bv can be uniformly distributed over the entire surface of the bonding region 130bg, and the second groove 130bv can be easily formed.

(Embodiment 2)
Next, a second embodiment will be described. In the ultrasonic cleaning apparatus 200 of the second embodiment, the first concave groove 211av formed on the vibration surface 211a of the ultrasonic vibrator 210 is the first concave groove 111av of the ultrasonic cleaning apparatus 100 of the first embodiment. The form is different. Other than that, it is basically the same as in the first embodiment, and therefore the description of the same parts as in the first embodiment is omitted or simplified. FIG. 4 shows an ultrasonic transducer 210 that constitutes the ultrasonic cleaning apparatus 200 of the second embodiment.

  The ultrasonic cleaning apparatus 200 according to the second embodiment includes an ultrasonic transducer 210 having a front mass 211 that is different from the first embodiment in the form of the first concave groove 211av. The front mass 211 is also joined to the diaphragm 130 by the adhesive 140 without using a stud bolt on the tip side (upward in FIG. 4). That is, in the front mass 211, the front end surface (square vibration surface) 211 a that is positioned at the front end and has a rectangular shape is not formed with a screw hole into which the stud bolt is screwed, and the entire surface thereof is the adhesive 140. To the diaphragm 130.

  A plurality of first concave grooves 211av, 211av,... Forming a predetermined pattern are formed on the tip surface (square vibration surface) 211a. The pattern of these first concave grooves 211av, 211av,... Is uniformly distributed over the entire surface of the square vibration surface 211a. Moreover, these 1st ditch | groove 211av, 211av, ... reaches each outer periphery 211af, 211af, ... of the square-shaped vibration surface 211a, respectively.

  Specifically, a total of eight first concave grooves 211av, 211av,... Are formed on the square vibration surface 211a. Among these, the four first concave grooves 211av, 211av,... Linearly extend in parallel at equal intervals from one outer peripheral edge 211af of the square vibration surface 211a to the outer peripheral edge 211af opposed thereto. ing. The remaining four first concave grooves 211av, 211av,... Are orthogonal to the four first concave grooves 211av, 211av,... Described above, and one outer peripheral edge of the square vibration surface 211a. From 211af to the outer peripheral edge 211af opposite to the outer peripheral edge 211af, they extend linearly in parallel with each other at equal intervals. Accordingly, the first concave grooves 211av, 211av,... Formed in the square vibration surface 211a reach the outer peripheral edges 211af, 211af,... Of the square vibration surface 211a, and the square vibration surface 211a is equally divided into 25. It has a lattice shape.

  Also in the ultrasonic cleaning apparatus 200 of the second embodiment, the rectangular vibration surface 211a of the ultrasonic vibrator 210 and the bonding region 130bg of the bonding surface 130b of the vibration plate 130 are bonded by the adhesive 140 without using a stud bolt. It is. However, a concave groove (first concave groove 211av and second concave groove 130bv) having a predetermined pattern is formed in each of the square vibration surface 211a and the joining region 130bg. As a result, the bonding area between the square vibration surface 211a and the bonding region 130bg increases, so that the bonding strength between the square vibration surface 211a and the bonding region 130bg can be improved, and the ultrasonic vibrator 210 and the vibration plate 130 can be improved. The joint strength can be improved. In addition, the same parts as those of the first embodiment have the same effects as those of the first embodiment.

(Embodiment 3)
Next, a third embodiment will be described. In the ultrasonic cleaning apparatus 300 of the third embodiment, the second concave groove 330bv formed in the joint surface 330b of the diaphragm 330 is the second concave of the ultrasonic cleaning apparatuses 100 and 200 of the first and second embodiments. Different from the shape of the groove 130bv. Other than that, it is basically the same as in the first or second embodiment, so the description of the same parts as in the first or second embodiment will be omitted or simplified. FIG. 5 shows a diaphragm 330 constituting the ultrasonic cleaning apparatus 300 of the third embodiment.

  The ultrasonic cleaning apparatus 300 according to the third embodiment includes a diaphragm 330 that is different from the first and second embodiments in the form of the second concave groove 330bv. The diaphragm 330 is also a rectangular plate having a radiation surface 330a located on the front end side (downward in FIG. 5) and a joint surface 330b located on the rear end side (upward in FIG. 5). The joint surface 330b has a rectangular joint region 330bg to which the vibration surface 111a of the ultrasonic transducer 110 is joined at the center.

  A plurality of second concave grooves 330bv, 330bv,... Forming a predetermined pattern are formed in the joint region 330bg of the joint surface 330b. These patterns of the second concave grooves 330bv, 330bv,... Are uniformly distributed over the entire joining region 330bg. Specifically, five second concave grooves 330bv, 330bv,... Are formed on the joint surface 330b (joint region 330bg). These second concave grooves 330bv, 330bv,... Are formed in a rectangular shape in plan view having different sizes, and are arranged concentrically at equal intervals.

  Also in the ultrasonic cleaning apparatus 300 of the third embodiment, the rectangular vibration surface 111a of the ultrasonic vibrator 110 and the bonding region 330bg of the bonding surface 330b of the vibration plate 330 are bonded by the adhesive 140 without using a stud bolt. It is. However, a predetermined pattern of concave grooves (first concave groove 111av and second concave groove 330bv) is formed in each of the square vibration surface 111a and the joining region 330bg. As a result, the bonding area between the square vibration surface 111a and the bonding region 330bg is increased, so that the bonding strength between the square vibration surface 111a and the bonding region 330bg can be improved, and the ultrasonic vibrator 110 and the vibration plate 330 are improved. The joint strength can be improved. In addition, the same parts as those of the first embodiment have the same effects as those of the first embodiment.

(Embodiment 4)
Next, a fourth embodiment will be described. In the ultrasonic cleaning apparatus 400 of the fourth embodiment, the second concave groove 430bv formed in the joint surface 430b of the diaphragm 430 is the same as that of the ultrasonic cleaning apparatuses 100, 200, and 300 of the first to third embodiments. Different from the two concave grooves 130bv and 330bv. Other than that, it is basically the same as that of any of the first to third embodiments, and therefore, the description of the same part as that of the first to third embodiments will be omitted or simplified. FIG. 6 shows a diaphragm 430 constituting the ultrasonic cleaning apparatus 400 of the fourth embodiment.

  The ultrasonic cleaning device 400 according to the fourth embodiment includes a diaphragm 430 having a second groove 430bv different from the first to third embodiments. The diaphragm 430 is also a rectangular plate having a radiation surface 430a located on the front end side (downward in FIG. 6) and a joint surface 430b located on the rear end side (upward in FIG. 6). The joint surface 430b has a rectangular joint region 430bg at the center where the vibration surface 111a of the ultrasonic transducer 110 is joined.

  A plurality of second concave grooves 430bv, 430bv,... Having a predetermined pattern are formed in the joint region 430bg of the joint surface 430b. Specifically, four second grooves 430bv, 430bv,... Are formed on the bonding surface 430b (bonding region 430bg). These second concave grooves 430bv, 430bv,... Are formed in an annular shape in plan view having different sizes, and are arranged concentrically at equal intervals.

  Also in the ultrasonic cleaning apparatus 400 of the fourth embodiment, the rectangular vibration surface 111a of the ultrasonic vibrator 110 and the bonding region 430bg of the bonding surface 430b of the vibration plate 430 are bonded by the adhesive 140 without using a stud bolt. It is. However, a predetermined pattern of concave grooves (first concave groove 111av and second concave groove 430bv) is formed in each of the square vibration surface 111a and the joining region 430bg. As a result, the bonding area between the square vibration surface 111a and the bonding region 430bg increases, so that the bonding strength between the square vibration surface 111a and the bonding region 430bg can be improved, and the ultrasonic vibrator 110 and the vibration plate 430 can be improved. The joint strength can be improved. In addition, the same parts as those of the first embodiment have the same effects as those of the first embodiment.

In the above, the present invention has been described with reference to the embodiments. However, the present invention is not limited to the above-described first to fourth embodiments, and it is needless to say that the present invention can be appropriately modified and applied without departing from the gist thereof. Yes.
For example, in the first to fourth embodiments, the ultrasonic cleaning apparatuses 100, 200, 300, and 400 in which one ultrasonic vibrator 110 and 210 is bonded to the vibration plates 130, 330, and 430 are shown. A plurality of ultrasonic transducers 110 and 210 may be aligned and joined to 330 and 430. Since the vibration surfaces 111a and 211a of the ultrasonic vibrators 110 and 210 are square vibration surfaces, when the plurality of ultrasonic vibrators 110 and 210 are joined side by side, the vibration surface is a round vibration surface. As compared with the above, there is an advantage that the vibration surfaces 111a and 211a can be arranged with a small gap.

  In the first to fourth embodiments, the plurality of first concave grooves 111av and 211av are formed in the square vibration surfaces 111a and 211a of the ultrasonic transducers 110 and 210. However, for example, a spiral shape or a zigzag shape is used. By adopting a one-stroke drawing form, the first groove can be made singular. Similarly, in the first to fourth embodiments, a plurality of second concave grooves 130bv, 330bv, 430bv are formed on the joint surfaces 130b, 330b, 430b of the diaphragms 130, 330, 430. By adopting a one-stroke drawing form such as a shape, the second concave groove can be made singular.

100, 200, 300, 400 Ultrasonic cleaning device 110, 210 Ultrasonic vibrator 111, 211 Front mass 111a, 211a Tip surface (vibration surface, square vibration surface)
111af, 211af Outer peripheral edge 111av, 211av First concave groove 115 Rear mass 121 First piezoelectric element 122 Second piezoelectric element 125 First electrode plate 126 Second electrode plate 129 Bolts 130, 330, 430 Vibration plates 130a, 330a, 430a Radiating surface 130b, 330b, 430b Joining surface 130bg, 330bg, 430bg Joining region 130bgf, 330bgf, 430bg Outer peripheral edge 130bv, 330bv, 430bv Second concave groove 140 Adhesive

Claims (8)

An ultrasonic vibrator having a vibrating surface for ultrasonic vibration;
A vibration plate having a bonding surface including a bonding region where the vibration surfaces of the ultrasonic vibrator are bonded, and a radiation surface that emits ultrasonic waves transmitted from the ultrasonic vibrator through the bonding surface. An ultrasonic cleaning device,
The vibration surface of the ultrasonic vibrator is a rectangular vibration surface having a rectangular shape,
The square vibration surface and the joining region of the joining surface of the diaphragm are joined by an adhesive without using a stud bolt,
An ultrasonic cleaning apparatus in which a concave groove having a predetermined pattern is formed in at least one of the square vibration surface and the joining region. The ultrasonic cleaning apparatus according to claim 1,
Of the square vibration surface and the joint region, at least the square vibration surface is formed with the concave groove,
The ultrasonic cleaning apparatus, wherein the concave grooves formed on the square vibration surface are uniformly distributed over the entire surface of the square vibration surface. The ultrasonic cleaning apparatus according to claim 2,
The ultrasonic cleaning apparatus, wherein the concave groove formed on the square vibration surface reaches a peripheral edge of the square vibration surface. The ultrasonic cleaning apparatus according to claim 3,
The ultrasonic cleaning apparatus, wherein the concave grooves formed in the square vibration surface are formed in a lattice shape reaching the outer peripheral edge of the square vibration surface. The ultrasonic cleaning device according to any one of claims 1 to 4,
Of the square vibration surface and the bonding region, at least the bonding region is formed with the concave groove,
The ultrasonic cleaning apparatus, wherein the concave grooves formed in the bonding region are uniformly distributed over the entire surface of the bonding region. The ultrasonic cleaning apparatus according to claim 5,
The ultrasonic cleaning apparatus, wherein the concave groove formed in the joining region is configured to reach the outer peripheral edge of the joining region. The ultrasonic cleaning apparatus according to claim 6,
The ultrasonic cleaning apparatus in which the concave grooves formed in the joining region are formed in a lattice shape reaching the outer peripheral edge of the joining region. It is an ultrasonic cleaning device according to any one of claims 1 to 7,
An ultrasonic cleaning apparatus in which the concave groove is formed in each of the square vibration surface and the joining region.

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