JP2010257499A - Magnetic head - Google Patents

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JP2010257499A
JP2010257499A JP2009102585A JP2009102585A JP2010257499A JP 2010257499 A JP2010257499 A JP 2010257499A JP 2009102585 A JP2009102585 A JP 2009102585A JP 2009102585 A JP2009102585 A JP 2009102585A JP 2010257499 A JP2010257499 A JP 2010257499A
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magnetic head
magnetic
groove
sliding surface
magnetic tape
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Osamu Kohama
修 小浜
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Panasonic Corp
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Panasonic Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the following problem: when recording and reproducing information on/from a thin high-performance magnetic tape by a high-speed rotation cylinder equipped with a magnetic head, an envelope is unstable, in particular, contact between the magnetic head and the thin high-performance magnetic tape at the beginning of sliding (entrance side) of the magnetic head and the magnetic tape is unstable, so that clogging and envelope deterioration hinders securement of a satisfactory error rate. <P>SOLUTION: In the magnetic head, magnetic head core half bodies having a coil window part 7 for winding a coil and joined to each other while the magnetic head core half bodies are arranged so that the end faces thereof face each other for forming a magnetic gap 3, are mounted on the cylinder recording and reproducing information to/from the magnetic tape helically. At the end of the sliding surface of the magnetic head core, a groove with a fluorine-containing hard carbon film deposited thereon is formed. The groove is deeper at the end of the sliding surface at the beginning of sliding (entrance side) than at the end of the sliding surface at the end of sliding (exit side). <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、高周波帯域で使用されるデバイス、例えばハイビジョンデジタルVTRやデーターストリーマーなどの高周波信号を記録再生するのに適した磁気ヘッドに関するものである。   The present invention relates to a magnetic head suitable for recording and reproducing a high-frequency signal such as a device used in a high-frequency band, such as a high-vision digital VTR and a data streamer.

近年、ハイビジョンデジタルVTRやデーターストリーマー等の高容量化や広帯域の信号を取り扱うシステムの開発が盛んに行われており、磁気ヘッドとしても、これら高抗磁力媒体に対応できるような高飽和磁束密度を有し、高容量化に伴う狭トラック化に対応し、50MHz以上の高周波帯域での特性の優れた磁気ヘッドの開発が望まれている。また、磁気ヘッドは、高周波帯域での再生効率を高めるため狭磁気ギャップ化されてきている。   In recent years, high-capacity high-definition digital VTRs, data streamers, and other systems that handle high-capacity and wide-band signals have been actively developed, and the magnetic head has a high saturation magnetic flux density that can handle these high coercive force media. Therefore, development of a magnetic head having excellent characteristics in a high frequency band of 50 MHz or more is desired in response to the narrowing of the track accompanying the increase in capacity. Further, the magnetic head has been narrowed to increase the reproduction efficiency in the high frequency band.

そこで、このような要求に対応するために、センダストやアモルファス磁性合金、FeTaN等の金属磁性膜と絶縁膜とを積層した金属磁性層の両側を非磁性基板で挟持した構造とし、高周波特性を向上させた磁気ヘッド、いわゆる積層型磁気ヘッドが開発されている。   Therefore, in order to meet such demands, both sides of the metal magnetic layer in which the metal magnetic film such as Sendust, amorphous magnetic alloy, FeTaN, etc. and the insulating film are laminated are sandwiched between non-magnetic substrates to improve high frequency characteristics. A so-called laminated magnetic head has been developed.

また、非磁性基板としてはチタン酸マグネシウム系やチタン酸カルシュウム系等のセラミックス材料が多く用いられている。磁気記録媒体である磁気テープも、このような大量の情報を記録するための高容量化及び高記録密度化に伴い、磁気テープの厚みを薄くし、また、従来の酸化鉄系から合金粉末媒体や金属蒸着媒体等の高抗磁力媒体へと変わってきた。   As the nonmagnetic substrate, a ceramic material such as magnesium titanate or calcium titanate is often used. The magnetic tape, which is a magnetic recording medium, is also reduced in thickness with the increase in capacity and recording density for recording such a large amount of information. And high coercive force media such as metal vapor deposition media.

また、高周波信号などを記録再生するドライブの磁気ヘッドを搭載したシリンダーにおいても、シリンダーの回転数を早くするなどした高転送レートが要求されている。   In addition, a cylinder equipped with a magnetic head of a drive that records and reproduces a high-frequency signal or the like is also required to have a high transfer rate by increasing the rotational speed of the cylinder.

しかし、磁気テープの薄型化やシリンダーの高回転においても安定した記録再生を行うために、良好なエンベロープが求められている。その為にドライブの磁気テープのテンションやシリンダーの溝などの形状や溝本数などの提案がなされている。磁気ヘッドにおいては、磁気ヘッドと磁気テープとのヘッドタッチを改善安定させるために、磁気ヘッドの摺動面端部に面取り(特許文献1)や摺動面中央部或いは長手方向に溝を設ける(特許文献2)などの提案がなされている。   However, in order to perform stable recording and reproduction even when the magnetic tape is thinned and the cylinder is rotated at a high speed, a good envelope is required. To that end, proposals have been made on the magnetic tape tension of the drive, the shape of the cylinder groove, the number of grooves, and the like. In the magnetic head, in order to improve and stabilize the head touch between the magnetic head and the magnetic tape, a chamfer (Patent Document 1) is provided at the end of the sliding surface of the magnetic head, or a groove is provided in the center of the sliding surface or in the longitudinal direction ( Proposals such as Patent Document 2) have been made.

特開平1−151019号公報JP-A-1-151019 特開平1−235012号公報Japanese Patent Laid-Open No. 1-235012

しかしながら、ヘリカルに薄手高性能磁気テープ(以降磁気テープと記す)上に記録再生する高容量、高転送レートのドライブにおいて、磁気ヘッドを搭載した高速回転シリンダーで磁気テープ上に記録再生する際に、磁気ヘッドの磁気テープ摺動痕の中心位置が磁気ヘッドの磁気テープ摺動終わり(出側)に移動し、記録再生時のエンベロープが安定しないという問題点がある。回転シリンダーの窓形状や溝本数、形状などで磁気テープの吸い込み量などの改善を図っているが、十分な改善効果が得ることができない。特に磁気テープの摺動始め(入り側)の磁気ヘッドと磁気テープとの接触が安定せず、入側のエンベロープが落ち込み、良好なエラーレートが確保できないという問題点がある。また、磁気ヘッドと磁気テープの当たりを改善する為に、磁気テープのテンションを強くすることで、ドライブの走行系において磁気テープにダメージを与える不具合があり、磁気ヘッド摺動面に粉付きによる目詰まりなどの影響でエラーレート不良になる問題点がある。   However, when recording and reproducing on a magnetic tape with a high-speed rotating cylinder equipped with a magnetic head in a high-capacity, high-transfer rate drive that records and reproduces on a thin, high-performance magnetic tape (hereinafter referred to as a magnetic tape) helically, There is a problem in that the center position of the magnetic tape sliding trace of the magnetic head moves to the magnetic tape sliding end (exit side) of the magnetic head, and the envelope during recording and reproduction is not stable. Although the amount of magnetic tape sucked in is improved by the window shape, the number of grooves, and the shape of the rotating cylinder, a sufficient improvement effect cannot be obtained. In particular, there is a problem that the contact between the magnetic head at the beginning of sliding (entry side) of the magnetic tape and the magnetic tape is not stable, the envelope on the incoming side falls, and a good error rate cannot be secured. In addition, in order to improve the contact between the magnetic head and the magnetic tape, the tension of the magnetic tape is increased to cause damage to the magnetic tape in the drive running system. There is a problem that the error rate becomes poor due to clogging.

本発明の磁気ヘッドは、ヘリカルに磁気テープ上に記録再生するシリンダーに搭載し、巻線コイルが巻回する巻線窓部を有する磁気ヘッドコア半体を、その端面同士が対向するように配置して磁気ギャップを形成し、磁気ヘッドコア半体を接合させた磁気ヘッドであって、磁気ヘッドコアは、摺動面端部に含フッ素硬質炭素膜を成膜した溝を有し、前記溝は、摺動始め(入り側)の摺動面端部において、摺動終り(出側)の摺動面端部より深いことを特徴とする。   The magnetic head of the present invention is helically mounted on a cylinder for recording / reproducing on a magnetic tape, and a magnetic head core half having a winding window around which a winding coil is wound is disposed so that the end faces thereof face each other. The magnetic head core has a groove formed by forming a fluorine-containing hard carbon film on the end of the sliding surface. It is characterized in that it is deeper at the end of the sliding surface at the beginning (entry side) than at the end of the sliding surface (outside).

本発明の磁気ヘッドは、上記構成により、シリンダー窓における磁気ヘッドの入り側の磁気テープの吸い込み量を抑制し、出側の吸い込み量とバランスがとれ、磁気ヘッドの摺動痕の中心位置が磁気テープの出側に移動する事を抑制し、磁気ヘッドの中心にある磁気ギャップと磁気テープとの接触が良好な状態となり、ドライブでの記録再生時のエンベロープの落ち込みや不安定を改善できるものであって、良好なエラーレートが確保出来る。また、磁気テープテンションを高くする必要がなく、ドライブの走行系による磁気テープへのダメージも改善できるものである。   The magnetic head according to the present invention has the above-described configuration, suppresses the suction amount of the magnetic tape on the entrance side of the magnetic head in the cylinder window, is balanced with the suction amount on the exit side, and the center position of the sliding mark of the magnetic head is magnetic. This prevents the tape from moving to the exit side of the tape and makes good contact between the magnetic gap at the center of the magnetic head and the magnetic tape, and can improve the drop and instability of the envelope during recording and playback in the drive. Therefore, a good error rate can be secured. Further, it is not necessary to increase the magnetic tape tension, and the damage to the magnetic tape by the drive running system can be improved.

本発明の実施の形態1に於ける磁気ヘッドの構成図1 is a configuration diagram of a magnetic head in Embodiment 1 of the present invention. 本発明の実施の形態1に於ける磁気ヘッドの摺動部と平面図Slide portion and plan view of magnetic head in Embodiment 1 of the present invention 本発明の実施の形態に於ける磁気ヘッドを搭載したドライブによる記録再生時の評価結果を表す図The figure showing the evaluation result at the time of the recording / reproducing by the drive carrying the magnetic head in embodiment of this invention エンベロープ平坦度を表す図Diagram showing envelope flatness 本発明の実施の形態に於ける磁気ヘッドを搭載したドライブによる連続運転時の評価結果を表す図The figure showing the evaluation result at the time of continuous operation by the drive carrying the magnetic head in embodiment of this invention

磁気ヘッドと磁気テープとの良好なヘッドタッチを確保し、磁気テープへのダメージもなく良好なエンベロープが得られ、高容量で高転送レートであるドライブを実現した。   A good head touch between the magnetic head and the magnetic tape was secured, a good envelope was obtained without damage to the magnetic tape, and a drive with high capacity and high transfer rate was realized.

(実施の形態1)
磁気ヘッドの実施の形態1について、図面を参照しながら詳細に説明する。
(Embodiment 1)
The first embodiment of the magnetic head will be described in detail with reference to the drawings.

図1は、本実施の形態1における積層型磁気ヘッドの構成図である。積層型磁気ヘッドは、入り側磁気ヘッドコア1と、出側磁気ヘッドコア2と、磁気ギャップ3と、金属薄膜と非磁性膜を積層してなる、トラックである金属磁性層4と、非磁性基板5と、モールドガラス6と、巻線窓7と、摺動面出側溝8と、摺動面入側溝9とを含む。図2は本実施の形態1における積層型磁気ヘッドの摺動面部と平面図である。本実施の形態1では磁気コアである金属磁性層の金属磁性膜には飽和磁束密度が大きいアモルファス磁性合金のFe−Ta−Nを用いる。金属磁性膜は、Si或いはZnなどの金属が含まれる物であっても良く、また、Co系のCo−Nb−Zr−Taなどの物であっても良い。絶縁膜はSi02膜で、基板には非磁性のNi−Ti−Mgセラミックスであっても良く、非磁性単結晶フェライト基板であっても良い。接着層にはホウ珪酸ガラスを用いており、磁気ヘッドの構造としては金属磁性層4の両端を一対の基板5で挟持する構造の積層型磁気ヘッドである。尚、磁気ヘッドの構造はメタルインギャップ(MIG)形、薄膜ヘッドであっても構わないものである。   FIG. 1 is a configuration diagram of the laminated magnetic head according to the first embodiment. The laminated magnetic head includes an entry-side magnetic head core 1, an exit-side magnetic head core 2, a magnetic gap 3, a metal magnetic layer 4 that is a track formed by laminating a metal thin film and a nonmagnetic film, and a nonmagnetic substrate 5. And a glass mold 6, a winding window 7, a sliding surface exit side groove 8, and a sliding surface entrance side groove 9. FIG. 2 is a plan view of the sliding surface portion of the laminated magnetic head according to the first embodiment. In the first embodiment, an amorphous magnetic alloy Fe—Ta—N having a high saturation magnetic flux density is used for the metal magnetic film of the metal magnetic layer that is a magnetic core. The metal magnetic film may be a material containing a metal such as Si or Zn, or may be a material such as Co-based Co—Nb—Zr—Ta. The insulating film is a Si02 film, and the substrate may be a nonmagnetic Ni—Ti—Mg ceramic, or a nonmagnetic single crystal ferrite substrate. Borosilicate glass is used for the adhesive layer, and the structure of the magnetic head is a laminated magnetic head having a structure in which both ends of the metal magnetic layer 4 are sandwiched between a pair of substrates 5. The structure of the magnetic head may be a metal in gap (MIG) type or a thin film head.

本実施の形態1では、Ni−Ti−Mgセラッミクス基板に公知のスパッタリングによりAl203膜を1.0μm成膜し、一対の金属磁性膜の磁化容易軸方向が磁気ギャップ面と層面内でほぼ平行であり、かつ一対の金属磁性膜以外の磁化容易軸方向が磁気ギャップ面とほぼ直交した金属磁性膜であるFe−Ta−Nを、同様に公知のスパッタリングにより0.4μm成膜し、非磁性膜であるSi02膜で0.005μm成膜した金属磁性膜を6層成膜した多層金属磁性膜に、絶縁膜であるSi02膜を0.15μm成膜した金属磁性層を3層積層した8.9μmのトラック幅で構成された磁気コア半体を準備し、それぞれの磁気コア半体に巻線部となる溝を設けた磁気コア半体を作成する。作成された磁気コア半体をその端面同士が対向するように配置して、実行GLが0.13μmになるようにホウ珪ガラスとパイレックス(登録商標)ガラスを用いて形成して、それぞれの磁気ヘッドコアを接合する。接合された磁気ヘッドの出側磁気ヘッドコア端部にθ2=60°で溝を入れ、入り側磁気ヘッドコア端部にθ1=30°で溝を入れ、それぞれの溝内壁にDVC法によりCF4ガスを用いて1μmの含フッ素硬質炭素膜を成膜する。含フッ素硬質炭素膜は公知のRF法、DC法でも成膜できるものであって、導入するCF系ガスはCF4ガス以外にC2F4ガス、C2F6ガスなどやCF系ガスとメタン、ブタン、エタンなどの炭素系ガスとの混合であっても良い。公知である円筒研削機を用いて磁気ヘッドコアの摺動曲率半径を6.5mmで加工して、磁気ヘッドコア厚み80μmに切断して磁気ヘッドコアを準備する。その磁気ヘッドコアに巻線を17ターン巻き、公知のテープ研磨装置によりギャップデプス11μmの積層型磁気ヘッドを作成する。   In the first embodiment, an Al203 film is formed to a thickness of 1.0 μm on a Ni—Ti—Mg ceramic substrate by known sputtering, and the magnetization easy axis directions of the pair of metal magnetic films are substantially parallel in the magnetic gap plane and the layer plane. Fe-Ta-N, which is a metal magnetic film in which the easy axis direction of magnetization other than the pair of metal magnetic films is substantially perpendicular to the magnetic gap surface, is similarly formed by sputtering to a thickness of 0.4 μm to form a nonmagnetic film A multilayer metal magnetic film in which six layers of a metal magnetic film having a thickness of 0.005 μm with a Si02 film of 8.9 μm are stacked on a multilayer metal magnetic film in which three layers of a metal magnetic layer having a thickness of 0.15 μm of an Si02 film as an insulating film are stacked. Magnetic core halves each having a track width of 1 mm are prepared, and magnetic core halves are prepared by providing grooves to be winding portions in the respective magnetic core halves. The prepared magnetic core halves are arranged so that their end faces face each other, and formed using borosilicate glass and Pyrex (registered trademark) glass so that the effective GL becomes 0.13 μm. Join the head core. A groove is formed at the end of the output magnetic head core of the bonded magnetic head at θ2 = 60 °, a groove is formed at the end of the input magnetic head core at θ1 = 30 °, and CF4 gas is used for the inner wall of each groove by the DVC method. A 1 μm fluorine-containing hard carbon film is formed. The fluorine-containing hard carbon film can be formed by a known RF method or DC method, and the introduced CF-based gas can be C2F4 gas, C2F6 gas, etc., CF-based gas and methane, butane, ethane, etc. It may be a mixture with a carbon-based gas. Using a known cylindrical grinding machine, the magnetic head core is processed with a sliding radius of curvature of 6.5 mm and cut into a magnetic head core thickness of 80 μm to prepare the magnetic head core. The magnetic head core is wound with 17 turns, and a laminated magnetic head having a gap depth of 11 μm is produced by a known tape polishing apparatus.

実施の形態2では、磁気ヘッドの出側磁気ヘッドコア端部にθ2=60°で溝を入れ、入り側磁気ヘッドコア端部にθ1=45°で溝を入れ、それ以外は実施の形態1と同仕様とする。尚、比較例として磁気ヘッドコア端部に溝を設けない以外は実施例1と同一仕様の磁気ヘッドを作成する(比較例1)。また、比較例2として出側磁気ヘッドコア端部にθ2=45°で溝を入れ、入り側磁気ヘッドコア端部にθ1=60°で溝を入れ、それ以外は実施例1と同一仕様の磁気ヘッドを作成する。   In the second embodiment, a groove is formed at the end of the magnetic head core of the magnetic head at θ2 = 60 °, and a groove is formed at the end of the magnetic head core at the input side at θ1 = 45 °. Spec. As a comparative example, a magnetic head having the same specifications as in Example 1 is prepared except that no groove is provided at the end of the magnetic head core (Comparative Example 1). Further, as Comparative Example 2, a magnetic head having the same specifications as in Example 1 except that a groove is formed at the end of the outgoing magnetic head core at θ2 = 45 ° and a groove is formed at the end of the incoming magnetic head core at θ1 = 60 °. Create

作成された積層型磁気ヘッドをデーターストリーマーであるDAT72のドライブに搭載して、実施の形態1、実施の形態2、比較例1、及び比較例2について、それぞれ10台準備し、59MHzの高周波での記録再生を行い、その時のC/Nとエンベロープの平坦度とエラーレートを評価する。   The prepared laminated magnetic head is mounted on the drive of DAT72, which is a data streamer, and 10 units are prepared for each of Embodiment 1, Embodiment 2, Comparative Example 1, and Comparative Example 2 at a high frequency of 59 MHz. The C / N, the flatness of the envelope, and the error rate at that time are evaluated.

その結果を図3に示す。尚、エンベロープ平坦度は図4に示す様にエンベロープ平均値A、エンベロープ落ち込み量Bにおいて、エンベロープ平坦度=B/A(%)で求めている。   The result is shown in FIG. As shown in FIG. 4, the envelope flatness is obtained by envelope flatness = B / A (%) in the envelope average value A and the envelope drop amount B.

図3の結果において、磁気ヘッドコア端部に含フッ素を有した溝を設け、その溝深さについて出側端部より入り側端部を深くすることにより、磁気テープの入り側の吸い込み量と出側の吸い込み量のバランスが取れ、磁気ヘッドの磁気テープ摺動痕が磁気ヘッドの中心位置に安定し、磁気ギャップと磁気テープが十分接触することができ、エンベロープの落ち込みもなく良好な結果が得られる。また、溝深さも入り側が出側より深くすることで安定したエンベロープを確保することができる。   In the result shown in FIG. 3, a groove having fluorine content is provided at the end of the magnetic head core, and the entrance end of the magnetic tape is made deeper than the exit end with respect to the groove depth. The suction amount on the side is balanced, the magnetic tape slide trace of the magnetic head is stable at the center position of the magnetic head, the magnetic gap and the magnetic tape can be in full contact, and good results are obtained without the envelope falling. It is done. Moreover, a stable envelope can be ensured by making the groove depth deeper on the entry side than on the exit side.

次に、上述の実施の形態1、実施の形態2、比較例1、及び比較例2の構成を用いて、50℃、20%の高温低湿環境下連続走行試験を1000h行い、1000h後のエンベロープ平坦度とエラーレートの評価の結果を図5に示す。   Next, using the configurations of the first embodiment, the second embodiment, the first comparative example, and the second comparative example, a continuous running test is performed for 1000 hours in a high-temperature, low-humidity environment at 50 ° C. and 20%, and the envelope after 1000 hours. The results of evaluation of flatness and error rate are shown in FIG.

図5において、連続走行試験後であっても、継続して良好な磁気ヘッドと磁気テープの摺動が得られ、良好なエンベロープを確保でき、より信頼性の高い磁気ヘッドを得ることができる。   In FIG. 5, even after the continuous running test, good sliding of the magnetic head and the magnetic tape can be continuously obtained, a good envelope can be secured, and a more reliable magnetic head can be obtained.

本発明にかかる磁気ヘッドは、高周波帯域で使用されるデバイス、例えばハイビジョンデジタルVTRやデーターストリーマーなどの高周波信号を記録再生するドライブなどに適用できる。   The magnetic head according to the present invention can be applied to a device used in a high frequency band, for example, a drive for recording and reproducing a high frequency signal such as a high-definition digital VTR and a data streamer.

1 入り側磁気ヘッドコア半体
2 出側磁気ヘッドコア半体
3 磁気ギャップ
4 金属磁性層
5 非磁性基板
6 モールドガラス
7 巻線窓
8 出側磁気ヘッドコア端部溝
9 入り側磁気ヘッドコア端部溝
DESCRIPTION OF SYMBOLS 1 Entrance side magnetic head core half 2 Exit side magnetic head core half 3 Magnetic gap 4 Metal magnetic layer 5 Nonmagnetic substrate 6 Mold glass 7 Winding window 8 Outgoing magnetic head core end groove 9 Entering side magnetic head core end groove

Claims (2)

ヘリカルに磁気テープ上に記録再生するシリンダーに搭載し、
巻線コイルが巻回する巻線窓部を有する磁気ヘッドコア半体を、その端面同士が対向するように配置して磁気ギャップを形成し、磁気ヘッドコア半体を接合させた磁気ヘッドであって、
磁気ヘッドコアの摺動面端部に含フッ素硬質炭素膜を成膜した溝を有し、
前記溝は、摺動始め(入り側)の摺動面端部において、摺動終り(出側)の摺動面端部より深いことを特徴とする磁気ヘッド。
Helically mounted on a cylinder that records and plays back on magnetic tape,
A magnetic head core half having a winding window around which a winding coil is wound is disposed so that the end faces thereof are opposed to each other to form a magnetic gap, and the magnetic head core half is joined,
It has a groove formed with a fluorine-containing hard carbon film at the end of the sliding surface of the magnetic head core,
The magnetic head is characterized in that the groove is deeper at the end of the sliding surface at the beginning (entry side) than at the end of the sliding surface (outward side).
磁気ヘッドコア入り側端面の溝切込み角度を20°〜45°で構成した
請求項1記載の磁気ヘッド。
The magnetic head according to claim 1, wherein the groove cutting angle of the end face on the side with the magnetic head core is 20 ° to 45 °.
JP2009102585A 2009-04-21 2009-04-21 Magnetic head Pending JP2010257499A (en)

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