JP2005141844A - Magnetic head - Google Patents

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JP2005141844A
JP2005141844A JP2003378266A JP2003378266A JP2005141844A JP 2005141844 A JP2005141844 A JP 2005141844A JP 2003378266 A JP2003378266 A JP 2003378266A JP 2003378266 A JP2003378266 A JP 2003378266A JP 2005141844 A JP2005141844 A JP 2005141844A
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magnetic
film
metal
metal magnetic
layer
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Osamu Kohama
修 小浜
Tsutomu Moriwaki
力 森脇
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the nonconformity wherein deteriorated production yield or characteristics occurs, such as enlarged bending of a magnetic core half having a metal magnetic film stacked thereon, cracks generated due to peeling from a nonmagnetic substrate or a magnetic gap, or cracks in the mold glass of a winding window part, when a metal magnetic film haivng a easy axis magnetization direction substantially in parallel with a magnetic gap surface within a layer surface is used. <P>SOLUTION: This magnetic head is constructed, in such a manner that magnetic core halves having winding window parts, on which winding coils are wound are arranged with their end surfaces set to face each other to form a magnetic gap; a metal magnetic film and a nonmagnetic film, in which a magnetization easy axis direction is almost in parallel to the magnetic gap surface within a layer surface are stacked alternately by one or more layers; a multilayer metal magnetic film made of a metal magnetic layer, whose partial magnetic easy axis direction is substantially orthogonal to the magnetic gap surface; and an insulating film are alternately stacked to form a metal magnetic layer, thereby constituting a track width. Without arranging any mold glass in the inner surface part of the winding window, the magnetic core halves are bonded together. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、高周波帯域で使用されるデバイス、例えばハイビジョンデジタルVTRやデーターストリーマーなどの高周波信号を記録再生するのに適した磁気ヘッド、及びそれを用いた磁気記録再生装置に関するものである。   The present invention relates to a magnetic head suitable for recording and reproducing a high-frequency signal such as a device used in a high-frequency band, for example, a high-definition digital VTR and a data streamer, and a magnetic recording / reproducing apparatus using the magnetic head.

近年、ハイビジョンデジタルVTRやデーターストリーマー等の高容量化や広帯域の信号を取り扱うシステムの開発が盛んに行われており、磁気記録媒体もこのような大量の情報を記録するために、従来の酸化鉄系から合金粉末媒体や金属蒸着媒体等の高抗磁力媒体へと変わってきた。磁気ヘッドとしても、これら高抗磁力媒体に対応できるような高飽和磁束密度を有し、高容量化に伴い狭トラック化し、40MHz以上の高周波帯域での特性の優れた磁気ヘッドの開発が望まれてきた。そこで、このような要求に対応するために、センダストやアモルファス磁性合金、FeTaN等の金属磁性膜と絶縁膜とを積層した金属磁性層の両側を非磁性基板で挟持した構造にして高周波特性を向上させた磁気ヘッド、いわゆる積層型磁気ヘッドが開発されている。しかし、この様な積層型磁気ヘッドは金属磁性膜だけで磁路が構成されており、磁路全体にわたって高い透磁率が求められ、磁気困難軸方向だけで磁路を構成することが望まれるが、金属磁性膜面内の全ての方向をとるために、磁化困難軸方向だけで磁路を構成することは困難であり、よって金属磁性膜は異方性が小さく等方であることが要求されていた。そのために、金属磁性膜の高周波帯域における透磁率は自然共鳴のため低下し、磁気ヘッドの高周波特性が劣化するという問題があった。最近このような問題を解決する方法として、積層膜の絶縁膜を挟んで隣接する金属磁性膜の磁化容易軸方向をほぼ直交させたり、任意の角度にずらせるように異方性を付与した積層膜が提案されている。また、高周波帯域での再生効率を高めるため狭磁気ギャップ化されてきている(特許文献1参照。)。   In recent years, high-capacity and high-definition systems such as high-definition digital VTRs and data streamers have been developed, and magnetic recording media also use conventional iron oxide to record such a large amount of information. The system has changed to a high coercive force medium such as an alloy powder medium or a metal deposition medium. As a magnetic head, it is desired to develop a magnetic head having a high saturation magnetic flux density that can cope with these high coercive force media, narrowing a track with an increase in capacity, and having excellent characteristics in a high frequency band of 40 MHz or more. I came. Therefore, in order to meet such demands, high frequency characteristics are improved by adopting a structure in which both sides of a metal magnetic layer in which a metal magnetic film such as Sendust, amorphous magnetic alloy, FeTaN, etc. and an insulating film are laminated are sandwiched between nonmagnetic substrates. A so-called laminated magnetic head has been developed. However, such a laminated magnetic head has a magnetic path composed only of a metal magnetic film, and high magnetic permeability is required over the entire magnetic path, and it is desirable that the magnetic path be configured only in the hard magnetic axis direction. In order to take all directions in the plane of the metal magnetic film, it is difficult to form a magnetic path only in the direction of the hard axis, and therefore the metal magnetic film is required to be isotropic with small anisotropy. It was. Therefore, the magnetic permeability in the high frequency band of the metal magnetic film is lowered due to natural resonance, and there is a problem that the high frequency characteristics of the magnetic head are deteriorated. Recently, as a method for solving such a problem, a laminated film in which anisotropy is imparted so that the magnetization easy axis directions of adjacent metal magnetic films are almost orthogonal to each other with an insulating film sandwiched therebetween or shifted to an arbitrary angle. Membranes have been proposed. Further, a narrow magnetic gap has been made in order to increase the reproduction efficiency in a high frequency band (see Patent Document 1).

また、積層膜が積層された磁気コア半体同士の接合強度を向上させるために巻線窓の形状やモールドガラスなども提案されていた(特許文献2参照。)。
特開平5−54319号公報 特開平6−4826号公報
In addition, in order to improve the bonding strength between magnetic core halves laminated with laminated films, the shape of a winding window, molded glass, and the like have been proposed (see Patent Document 2).
JP-A-5-54319 Japanese Patent Laid-Open No. 6-4826

解決しようとする問題点は、積層型構造の磁気ヘッドにおいて磁気ギャップ面と層面内でほぼ平行に磁化容易軸方向を付与した金属磁性膜を用いた場合、積層される金属磁性膜の応力も大きくなり、金属磁性膜が積層された磁気コア半体のそりも大きくなる。このような磁気コア同士を接合させることにより、金属磁性膜への残留応力や巻線窓部のモールドガラスにも残留応力がかかる状態になっている。この積層型構造の磁気ヘッドを生産中において、磁気ギャップを形成する時の圧力がさらに残留応力となり、金属磁性層の特性が劣化する。磁気ギャップにおいても狭磁気ギャップ化するために磁気ギャップを形成する材料の厚みが薄くなり、さらに接合強度が低下や残留応力の影響で所望する磁気ギャップが形成されず、十分な特性が得られない。また、非磁性基板からの剥離や磁気ギャップから発生するセンタークラックや巻線窓部のモールドガラスにクラックが発生するなど生産歩留りや特性も悪化する。最悪の場合、磁気ヘッドが割れて記録再生するテープにダメージを与えるなどの課題があった。   The problem to be solved is that when a metal magnetic film having an easy axis direction of magnetization that is substantially parallel to the magnetic gap surface and the layer surface is used in a magnetic head having a laminated structure, the stress of the laminated metal magnetic film is also large. Therefore, the warp of the magnetic core half body on which the metal magnetic films are laminated is also increased. By joining such magnetic cores, the residual stress on the metal magnetic film and the residual stress are also applied to the mold glass at the winding window. During the production of the magnetic head having the laminated structure, the pressure when forming the magnetic gap further becomes a residual stress, and the characteristics of the metal magnetic layer are deteriorated. In order to narrow the magnetic gap, the thickness of the material forming the magnetic gap is reduced, and further, the desired magnetic gap is not formed due to the effect of the decrease in bonding strength or residual stress, and sufficient characteristics cannot be obtained. . In addition, the production yield and characteristics are deteriorated, for example, a center crack generated from a nonmagnetic substrate or a magnetic gap, or a crack occurs in the mold glass of the winding window. In the worst case, there were problems such as damage to the tape to be recorded / reproduced by cracking of the magnetic head.

本発明は、金属磁性層が一対の非磁性基板により挟み込まれてなり、巻線コイルが巻回する巻線窓部を有する磁気コア半体を、その端面同士が対向するように配置して磁気ギャップを形成し、磁気容易軸方向が磁気ギャップ面と層面内でほぼ平行である金属磁性膜と非磁性膜を交互に1層以上積層され、前記金属磁性膜の一部の磁気容易軸方向が磁気ギャップ面とほぼ直交した金属磁性膜で形成されてなる多層金属磁性膜と絶縁膜を交互に積層した前記金属磁性層が積層されてトラック幅を構成された磁気ヘッドにおいて、前記巻線窓部の内面部にモールドガラスを配せず、磁気コア半体同士を接合したことを特徴とする磁気ヘッド。   In the present invention, a magnetic core half having a winding window portion around which a metal magnetic layer is sandwiched between a pair of nonmagnetic substrates and wound by a winding coil is arranged so that the end faces thereof are opposed to each other. A gap is formed, and one or more layers of metal magnetic films and non-magnetic films whose magnetic easy axis directions are substantially parallel to the magnetic gap surface and the layer surface are alternately laminated. In the magnetic head having a track width formed by laminating the metal magnetic layers formed by alternately laminating multilayer metal magnetic films and insulating films formed of metal magnetic films substantially perpendicular to the magnetic gap surface, the winding window portion A magnetic head characterized in that no mold glass is disposed on the inner surface of each of the magnetic core halves and the magnetic core halves are joined together.

本発明の巻線窓部の内面部にモールドガラスを配せず、多層金属磁性膜と絶縁膜を交互に積層された磁気コア半体同士を接合することにより接着圧力を高めることが可能となり狭磁気ギャップ化の実現と磁気コア半体の接合時の残留応力の影響を低減し、磁気特性の劣化や磁性層と非磁性基板の剥離などが発生しない高周波特性の優れた磁気ヘッドを提供できる。また、センタークラックやモールドガラスのクラックなどによる生産性の歩留り悪化を改善し、生産性の高い磁気ヘッドが提供できる。   It is possible to increase the adhesive pressure by joining the magnetic core halves in which the multilayer metal magnetic film and the insulating film are alternately laminated without using the mold glass on the inner surface of the winding window of the present invention. Realizing a magnetic gap and reducing the influence of residual stress at the time of joining the magnetic core halves can provide a magnetic head with excellent high-frequency characteristics that does not cause deterioration of magnetic characteristics or separation of the magnetic layer and nonmagnetic substrate. In addition, it is possible to provide a high-productivity magnetic head by improving the deterioration of productivity due to center cracks and mold glass cracks.

また、テープとヘッドの相対速度が20m/s以上の系においても、40MHz以上の高周波信号を良好に記録再生できるハイビジョンデジタルVTRや大容量ストリーマが実現できる。   Further, even in a system in which the relative speed of the tape and the head is 20 m / s or higher, a high-definition digital VTR and a large-capacity streamer that can satisfactorily record and reproduce a high-frequency signal of 40 MHz or higher can be realized.

以下、本発明の磁気ヘッドの実施例について、図面を参照しながら詳細に説明する。また、各図においては同一構成要素のものには同一符号を付しその詳細な説明は省略する。図1は本発明の第1の実施例の磁気ヘッドの構成を示す図である。図1において、1は金属磁性層であって、金属磁性膜と絶縁膜を積層してなる、2は非磁性基板、3は磁気ギャップ、4は接着層、5は巻線窓部である。本実施例では磁気コアである金属磁性層の金属磁性膜には飽和磁束密度が大きいアモルファス磁性合金のFe−Ta−Nであって、Si或いはZnなどのの金属が含まれるものであってもよく、また、Co系のCoNbZrTaなどのものであっても良い、絶縁膜にはSi02膜で、基板には非磁性のNi−Ti−Caセラミックスであって、Ti−Ni―Mgセラミックスや非磁性単結晶フェライト基板であっても良い、接着層にはホウ珪酸ガラスを用いており、磁気ヘッドの構造としては金属磁性層1の両端を一対の基板2で挟持する構造の積層型磁気ヘッドである。 Hereinafter, embodiments of the magnetic head of the present invention will be described in detail with reference to the drawings. Moreover, in each figure, the same code | symbol is attached | subjected to the thing of the same component, and the detailed description is abbreviate | omitted. FIG. 1 is a diagram showing the configuration of a magnetic head according to a first embodiment of the present invention. In FIG. 1, 1 is a metal magnetic layer, which is formed by laminating a metal magnetic film and an insulating film, 2 is a nonmagnetic substrate, 3 is a magnetic gap, 4 is an adhesive layer, and 5 is a winding window. In this embodiment, the metal magnetic film of the metal magnetic layer, which is a magnetic core, is an amorphous magnetic alloy Fe—Ta—N having a high saturation magnetic flux density, and may contain a metal such as Si or Zn. well, it may also be of such CoNbZrTa of Co-based, the insulating film with Si0 2 film, the substrate to a Ni-Ti-Ca ceramics nonmagnetic, Ti-Ni-Mg ceramics and non A magnetic single crystal ferrite substrate may be used, and a borosilicate glass is used for the adhesive layer, and the magnetic head structure is a laminated magnetic head having a structure in which both ends of the metal magnetic layer 1 are sandwiched between a pair of substrates 2. is there.

また、図2は金属磁性層の構成を示す図である。1−aは磁気ギャップ面と層面内で平行な磁気容易軸方向の金属磁性膜、1−bは磁気ギャップ面とほぼ直交な磁気容易軸方向の金属磁性膜、1−cは非磁性膜で、それぞれを積層した金属磁性層を構成している
図3は本発明の比較例の磁気ヘッドの構成を示す図である。6が巻線窓部に配しているモールドガラスでその他構成は実施例と同一構成である。
FIG. 2 is a diagram showing the configuration of the metal magnetic layer. 1-a is a metal magnetic film in the direction of easy axis parallel to the magnetic gap surface and the layer surface, 1-b is a metal magnetic film in the direction of easy axis substantially perpendicular to the magnetic gap surface, and 1-c is a nonmagnetic film. FIGS. 3A and 3B, each of which constitutes a laminated metal magnetic layer, are diagrams showing the structure of a magnetic head according to a comparative example of the present invention. 6 is a mold glass disposed in the winding window, and the other configuration is the same as that of the embodiment.

(実施の形態1)
実施例1ではNi−Ti−Caセラッミクス基板に公知のスパッタリングによりAl23膜を1.0μm成膜し、一対の金属磁性膜の磁化容易軸方向が磁気ギャップ面と層面内でほぼ平行であり、かつ一対の金属磁性膜以外の磁化容易軸方向が磁気ギャップ面とほぼ直交した金属磁性膜であるFe−Ta−Nを同様に公知のスパッタリングにより0.395μm成膜し、非磁性膜であるSi02膜で0.005μm成膜した金属磁性膜を6層成膜した多層金属磁性膜に絶縁膜であるSi02膜を0.15μm成膜した金属磁性層を4層積層した9.6μmのトラック幅で構成された磁気コア半体を準備し。それぞれの磁気コア半体に巻線部をとなる溝を設け、モールドガラスを配せず磁気コア半体を作成した。作成された磁気コア半体をその端面同士が対向するように配置して実効GLが0.15μmになるようにホウ珪ガラスとパイレックス(R)ガラスを用いて、60kg、100kg、150kgの圧力をかけて形成して3種類の磁気ヘッドを作成した。
(Embodiment 1)
In Example 1, an Al 2 O 3 film having a thickness of 1.0 μm is formed on a Ni—Ti—Ca ceramics substrate by known sputtering, and the easy axis directions of the pair of metal magnetic films are substantially parallel in the magnetic gap plane and the layer plane. Fe-Ta-N, which is a metal magnetic film in which the easy axis direction of magnetization other than the pair of metal magnetic films is substantially perpendicular to the magnetic gap surface, is similarly formed by a known sputtering method to a thickness of 0.395 μm. there Si0 2 film 0.005μm deposited metal magnetic film 6 layer forming the multilayered metal magnetic film is an insulating film Si0 2 film was 4-layer laminated metal magnetic layer was 0.15μm deposited 9.6μm Prepare a magnetic core half with a track width of. Each magnetic core half was provided with a groove serving as a winding portion, and a magnetic core half was prepared without providing mold glass. The prepared magnetic core halves are arranged so that their end faces face each other, and borosilicate glass and Pyrex (R) glass are used so that the effective GL becomes 0.15 μm, and pressures of 60 kg, 100 kg, and 150 kg are applied. Three types of magnetic heads were produced by forming the film.

(実施の形態2)
実施例2では実施例1よりも金属磁性膜の膜厚を約半分とし高域特性が向上し、膜残留応力が大きくなる条件下で作成する。Ni−Ti−Caセラッミクス基板に公知のスパッタリングによりAl23膜を1.0μm成膜し、一対の金属磁性膜の磁化容易軸方向が磁気ギャップ面と層面内でほぼ平行であり、かつ一対の金属磁性膜以外の磁化容易軸方向が磁気ギャップ面とほぼ直交した金属磁性膜であるFe−Ta−Nを同様に公知のスパッタリングにより0.195μm成膜し、非磁性膜であるSi02膜で0.005μm成膜した金属磁性膜を12層成膜した多層金属磁性膜に絶縁膜であるSi02膜を0.15μm成膜した金属磁性層を4層積層した10.0μmのトラック幅で構成された磁気コア半体を準備し。それぞれの磁気コア半体に巻線部をとなる溝を設け、モールドガラスを配せず磁気コア半体を作成した。作成された磁気コア半体をその端面同士が対向するように配置して実効GLが0.15μmになるようにホウ珪ガラスとパイレックス(R)ガラスを用いて、ボンディング圧力を60kg、100kg、150kgをかけて形成して3種類の磁気ヘッドを作成した。
(Embodiment 2)
In Example 2, the thickness of the metal magnetic film is about half that of Example 1, and the high frequency characteristics are improved, and the film is produced under the condition that the film residual stress is increased. An Al 2 O 3 film having a thickness of 1.0 μm is formed on a Ni—Ti—Ca ceramics substrate by known sputtering, the easy axis directions of the pair of metal magnetic films are substantially parallel in the magnetic gap plane and the layer plane, and the pair the easy magnetization axis direction is 0.195μm deposited by a known sputtering similarly Fe-Ta-N is a metallic magnetic film which is substantially perpendicular to the magnetic gap surface, Si0 2 film which is a non-magnetic layer of non-magnetic metal film With a track width of 10.0 μm, four layers of metal magnetic layers formed by depositing 0.15 μm of SiO 2 film as an insulating film on a multilayer metal magnetic film formed of 12 layers of metal magnetic films formed by 0.005 μm Prepare a configured magnetic core half. Each magnetic core half was provided with a groove serving as a winding portion, and a magnetic core half was prepared without providing mold glass. The prepared magnetic core halves are arranged so that their end faces face each other, and borosilicate glass and Pyrex (R) glass are used so that the effective GL becomes 0.15 μm, and the bonding pressure is 60 kg, 100 kg, 150 kg. To form three types of magnetic heads.

比較例1として、実施例1の磁気コア半体の巻線窓部にB22−SiO2―Al23系モールドガラスを配し、実施例1と同様条件のボンディング圧力をかけて3種類の磁気ヘッドを作成した。比較例2としては、比較例1と同様に実施例2の巻線窓部のB22−SiO2―Al23系モールドガラスを配し、それ以外は同一構成とし、比較例2として磁気ヘッドを作成した。 As Comparative Example 1, B 2 O 2 —SiO 2 —Al 2 O 3 type mold glass was placed on the winding window of the magnetic core half of Example 1, and the bonding pressure under the same conditions as in Example 1 was applied. Three types of magnetic heads were created. As Comparative Example 2, B 2 O 2 —SiO 2 —Al 2 0 3 type molded glass of the winding window portion of Example 2 was arranged as in Comparative Example 1, and the rest of the configuration was the same, Comparative Example 2 As a magnetic head.

本発明の作成された磁気ヘッドの生産工程での歩留りついて説明する。本発明の実施例1〜2と比較例1〜2、それぞれ実施例及び比較例各700個の磁気ヘッドを試作した時の非磁性基板と金属磁性層のセンタークラック発生率及び生産工程での歩留り率を表1に示す。また、実効GLの平均値を表2に示す。   The yield in the production process of the magnetic head produced according to the present invention will be described. Examples 1 and 2 and Comparative Examples 1 and 2 of the present invention, each of Example and Comparative Example When 700 magnetic heads were prototyped, the incidence of center cracks in the nonmagnetic substrate and the metal magnetic layer and the yield in the production process The rates are shown in Table 1. Table 2 shows the average value of effective GL.

Figure 2005141844
Figure 2005141844

表1に示すように、本発明の実施例1.2は巻線窓部にモールドガラスを配せずボンディングすることによりセンタークラックの発生や磁気ヘッドのGL不良やオレなどの生産歩留りが比較例と比較しても良好な結果が得られた。   As shown in Table 1, Example 1.2 of the present invention is a comparative example in which the production yield such as the occurrence of center cracks, GL defects of magnetic heads, and I, is obtained by bonding without placing mold glass on the winding window. Even when compared with the above, good results were obtained.

Figure 2005141844
Figure 2005141844

表2に示すように、本発明の実施例1.2は巻線窓部にモールドガラスを配せずボンディングすることにより実行GLは狙い値である0.15μmができており、比較例と比較しても良好な結果が得られた。   As shown in Table 2, in Example 1.2 of the present invention, the effective GL is 0.15 μm which is the target value by bonding without placing mold glass on the winding window, and compared with the comparative example. Even so, good results were obtained.

次に、ベルデックス製ドラムテスターを用いて、それぞれ試作した磁気ヘッドの録再分離再生特性を評価した結果を表3に示す。測定条件はv=20.0m/s、テープはMPテープ、記録ヘッドは松下製MIGヘッドで行い、録再分離測定帯域は19.5MHz,26MHz,40MHz,78MHzで行い従来例ヘッドの再生特性を0dBとし、実施例1,2の再生特性を比較し、dB表示する。   Next, Table 3 shows the results of evaluation of the recording / playback separation / reproduction characteristics of each of the magnetic heads manufactured using a Verdex drum tester. The measurement conditions are v = 20.0 m / s, the tape is MP tape, the recording head is a Matsushita MIG head, and the recording / playback measurement bands are 19.5 MHz, 26 MHz, 40 MHz, and 78 MHz. The reproduction characteristics of Examples 1 and 2 are compared and displayed in dB.

Figure 2005141844
Figure 2005141844

表3に示すように、本発明の実施例はいずれの場合も従来例と比較しても良好な結果が得られた。これらの結果より生産性や特性において、本発明の品質が高く優れた磁気ヘッドであることを確認した。   As shown in Table 3, the results of the examples of the present invention were good in all cases as compared with the conventional examples. From these results, it was confirmed that the magnetic head of the present invention is high in productivity and characteristics and excellent in quality.

次に本発明の磁気ヘッドを用いた磁気記録再生装置の実施例について説明する。本実施例では記録再生ヘッドの本発明の実施例1〜2の磁気ヘッドを搭載した磁気記録再生装置を試作した。テープとヘッドの相対速度が20m/s以上の系においても、40MHz以上の高周波信号を良好に記録再生ができ、特性も品質も安定したハイビジョンデジタルVTRや大容量ストリーマが実現できた。特に、高周波特性の優れた積層型磁気ヘッドを安定に提供することにある   Next, an embodiment of a magnetic recording / reproducing apparatus using the magnetic head of the present invention will be described. In this example, a magnetic recording / reproducing apparatus equipped with the magnetic heads of Examples 1 and 2 of the invention as a recording / reproducing head was prototyped. Even in a system in which the relative speed of the tape and the head is 20 m / s or more, a high-definition digital VTR and a large-capacity streamer that can record and reproduce a high-frequency signal of 40 MHz or more satisfactorily and have stable characteristics and quality can be realized. In particular, it is to stably provide a laminated magnetic head having excellent high frequency characteristics.

本発明にかかる磁気ヘッドは、巻線窓部の内面部にモールドガラスを配せず、多層金属磁性膜と絶縁膜を交互に積層された磁気コア半体同士を接合することにより接着圧力を高めることが可能となり狭磁気ギャップ化の実現と磁気コア半体の接合時の残留応力の影響を低減し磁気特性の劣化や磁性層と非磁性基板の剥離などが発生しない高周波特性の優れた磁気ヘッドを提供できる。また、センタークラックやモールドガラスのクラックなどによる生産性の歩留り悪化を改善し、生産性の高い磁気ヘッドが提供できる。   The magnetic head according to the present invention increases the adhesion pressure by bonding the magnetic core halves in which the multilayer metal magnetic films and the insulating films are alternately laminated without arranging the mold glass on the inner surface of the winding window. Magnetic head with excellent high-frequency characteristics that can reduce the effect of residual stress when joining magnetic core halves and reduce magnetic characteristics and prevent separation of the magnetic layer and nonmagnetic substrate. Can provide. In addition, it is possible to provide a high-productivity magnetic head by improving the deterioration of productivity due to center cracks and mold glass cracks.

また、テープとヘッドの相対速度が20m/s以上の系においても、40MHz以上の高周波信号を良好に記録再生できるハイビジョンデジタルVTRや大容量ストリーマなどの用途にも適用できる。   Further, even in a system in which the relative speed of the tape and the head is 20 m / s or more, it can be applied to uses such as a high-vision digital VTR and a large-capacity streamer that can satisfactorily record and reproduce a high-frequency signal of 40 MHz or more.

本発明の磁気ヘッドの第1の実施例の磁気コアの構成を示す図The figure which shows the structure of the magnetic core of 1st Example of the magnetic head of this invention. 本発明の磁気ヘッドの第1の実施例の金属磁性層の1層拡大図One layer enlarged view of the metal magnetic layer of the first embodiment of the magnetic head of the present invention. 本発明の磁気ヘッドの比較例の磁気コアの構成を示す図The figure which shows the structure of the magnetic core of the comparative example of the magnetic head of this invention

符号の説明Explanation of symbols

1 金属磁性層
1−a 磁気ギャップ面と層面内で平行な磁化容易軸方向の金属磁性膜
1−b 磁気ギャップ面とほぼ直交な磁化容易軸方向の金属磁性膜
1−c 非磁性膜
2 非磁性基板
3 磁気ギャップ
4 接着層
5 巻線窓部
6 モールドガラス
DESCRIPTION OF SYMBOLS 1 Metal magnetic layer 1-a Metal magnetic film of the easy axis direction parallel to the magnetic gap surface in the layer surface 1-b Metal magnetic film of the easy axis direction almost orthogonal to the magnetic gap surface 1-c Nonmagnetic film 2 Non Magnetic substrate 3 Magnetic gap 4 Adhesive layer 5 Winding window 6 Mold glass

Claims (1)

金属磁性層が一対の非磁性基板により挟み込まれてなり、巻線コイルが巻回する巻線窓部を有する磁気コア半体を、その端面同士が対向するように配置して磁気ギャップを形成し、磁気容易軸方向が磁気ギャップ面と層面内でほぼ平行である金属磁性膜と非磁性膜を交互に1層以上積層され、前記金属磁性膜の一部の磁気容易軸方向が磁気ギャップ面とほぼ直交した金属磁性膜で形成されてなる多層金属磁性膜と絶縁膜を交互に積層した前記金属磁性層が積層されてトラック幅を構成された磁気ヘッドにおいて、前記巻線窓部の内面部にモールドガラスを配せず、磁気コア半体同士を接合したことを特徴とする磁気ヘッド。 A magnetic magnetic layer is sandwiched between a pair of nonmagnetic substrates, and a magnetic core half having a winding window around which a winding coil is wound is disposed so that the end faces face each other to form a magnetic gap. One or more layers of metal magnetic films and nonmagnetic films whose magnetic easy axis directions are substantially parallel to the magnetic gap surface and the layer surface are alternately laminated, and the magnetic easy axis direction of a part of the metal magnetic film is the magnetic gap surface. In a magnetic head having a track width configured by laminating the metal magnetic layers formed by alternately laminating multilayer metal magnetic films and insulating films formed of substantially perpendicular metal magnetic films, the inner surface of the winding window portion A magnetic head characterized in that magnetic core halves are joined to each other without molding glass.
JP2003378266A 2003-11-07 2003-11-07 Magnetic head Pending JP2005141844A (en)

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