JP2010227857A - Method for operating dehumidifier and operating system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a system for operating a dehumidifier. <P>SOLUTION: In the method for operating the dehumidifier in which the low dew point air is generated by absorbing the moisture in the outside air through feeding the outside air while an absorbing rotor 26 which absorbs the moisture is rotated, and in which the low dew point air is fed to a chamber 12 used by heating the low dew point air from the dehumidifier 24 continuously dehumidifying by desorbing the absorbed moisture feeding the regenerated air and by cooling a region where the moisture is desorbed by feeding the cooling air, the regenerated air heats a mixture made by jointing the discharged air of the air for cooling and the discharged air from the chamber 12. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an operating system for a dehumidifier that supplies low dew point air to a low dew point chamber.

  Conventionally, as a method for producing low dew point air, for example, a method using an adsorption tower called a pressure swing method is known. This is a method in which the raw air is compressed by a compressor to remove the drain in the air, and then is passed through an adsorption tower containing an adsorbent. Since the low dew point air produced by this method has a high pressure, it can be supplied to a production apparatus or the like as it is. On the other hand, the pressure swing method requires a large amount of power required for air compression, and the compressed air is used for regeneration, which increases the running cost.

  In order to improve these, a method of producing ultra-low dew point air by arranging a plurality of dry dehumidifiers using an adsorption rotor in the middle of a supply duct for supplying low dew point air to a low dew point chamber has been proposed. The dry dehumidifier is equipped with a honeycomb rotor that absorbs lithium chloride, calcium chloride, etc., and a rotor composed of adsorbents such as silica gel and zeolite, and the air passage area located on the end face of this rotor is dehumidified. By dividing the zone into a zone, a regeneration zone, and a purge zone, passing the process air through the rotor in the dehumidification zone while rotating the rotor to create low dew point air, and passing hot regeneration air through the rotor in the regeneration zone, Moisture in the adsorbent is desorbed into the regeneration air to recover the adsorption capacity, and the adsorption rotor is cooled by passing cooling air in the purge area so that the dehumidification process can be performed continuously. It is configured. By using a plurality of such dry dehumidifiers, the running cost can be considerably reduced (see Patent Document 1).

Japanese Patent No. 3485161

  On the other hand, the organic thin film manufacturing process has a plurality of chambers to which dry air corresponding to each manufacturing process is supplied. In particular, during the cleaning of the substrate with the solvent and the organic material coating process, the solvent and the organic material are dried. A process is required, and heating is necessary before each chamber. However, if the dry air is supplied to the plurality of chambers for the organic thin film manufacturing process by the dry dehumidifier, the air is heated in each chamber for performing the drying process and the regeneration area of the dry dehumidifier. The heated dry air used in each chamber is exhausted out of the system after being used in the drying process once, so that energy is wasted.

  Then, this invention pays attention to the said problem, and it aims at providing the dehumidifier operating method and dehumidifier operating system which reduce a running cost by suppressing the energy consumption in a reproduction | regeneration area.

  In order to achieve the above-mentioned object, the dehumidifier operating method according to the present invention is, firstly, supplied with the outside air while rotating the adsorption rotor that adsorbs moisture to adsorb the moisture in the outside air, thereby reducing the low dew point air. Dehumidification is performed by supplying the regenerated air to desorb the adsorbed moisture and cooling air to cool the region from which the moisture has been desorbed. A dehumidifier operating method for supplying the low dew point air to a chamber used by heating the low dew point air from a machine, wherein the regeneration air combines the exhaust of the cooling air and the exhaust from the chamber It is characterized by heating.

  Second, a plurality of the chambers are provided, and control is performed such that the exhaust from the chamber having a higher temperature than the exhaust of the cooling air is selected and merged with the exhaust of the cooling air.

  Third, it is possible to control the air volume of the cooling air to be merged with the exhaust from the chamber so that the differential pressure between the supply side and the exhaust side of the regeneration air is constant. It is said.

  Fourth, part or all of the exhaust of the regeneration air can be returned to the supply side of the regeneration air so that the differential pressure between the supply side and the exhaust side of the regeneration air becomes constant. Further, it is possible to control the return air volume of the exhaust air of the regeneration air.

  Fifthly, the dehumidifier supplies the low dew point air also to the second chamber that uses the low dew point air without heating, and causes the exhaust of the second chamber to merge with the cooling air. Yes.

  On the other hand, the operating system of the dehumidifier according to the present invention is, firstly, an operating system of the dehumidifier that supplies the low dew point air to a chamber that heats and uses the low dew point air. The dehumidifying area that supplies the low-dew point air by supplying outside air by adsorbing the outside air while rotating the air, and desorbing the adsorbed moisture by supplying the regeneration air A dehumidifier that continuously performs a dehumidification process by passing through a regeneration zone to be recovered and a purge zone in which cooling water is supplied and cooled to remove the moisture; and A heater provided on the supply side for heating the regeneration air, wherein the exhaust side of the purge zone and the exhaust side of the chamber are connected to the supply side of the regeneration zone.

  Second, a plurality of the chambers are provided, and the upstream side is connected to the chamber side between the exhaust side of the chamber and the supply side of the regeneration zone, and one of the downstream sides is connected to the regeneration zone side. A three-way valve is provided which can be connected and opened to the outside and the downstream side can be switched and connected, and the temperature of the exhaust gas in the chamber and the temperature of the exhaust gas in the purge area are measured. When the temperature is higher than the temperature of the exhaust, the controller has a controller for switching the three-way valve related to the chamber to the regeneration zone side.

  Third, between the exhaust side of the purge zone and the supply side of the regeneration zone, an upstream side is connected to the purge zone side, and one downstream side is opened to the regeneration zone side and the other is opened to the outside. A second three-way valve capable of controlling the air flow ratio on the downstream side is provided, and the differential pressure between the supply side and the exhaust side in the regeneration zone is measured, and the second three-way valve is set so that the differential pressure becomes constant. It has the 2nd controller which controls the air volume ratio.

  Fourthly, the exhaust side of the regeneration zone is branched into a first path that opens one side to the outside, and the other is branched to a second path that connects the regeneration zone to the air supply side. A damper is interposed, a second damper is interposed on the second path, and the second controller measures a differential pressure between the supply side and the exhaust side of the regeneration zone, and the differential pressure is constant. As described above, control is performed to release the air volume of the second damper while reducing the air volume of the first damper.

  Fifth, the exhaust side of the dehumidification zone is connected to a second chamber that uses the low dew point air without heating, and the exhaust side of the second chamber is connected to the supply side of the purge zone. It is characterized by that.

  According to the operation method and the operation system of the dehumidifier according to the present invention, firstly, since the exhaust gas heated from the chamber is sent to the supply side of the regeneration zone, the heating amount by the heater is suppressed. Running costs can be reduced. Also. The exhaust from the purge zone is also heated by contacting the heated adsorption rotor through the regeneration zone. Therefore, by combining and heating the exhaust from the purge zone and the exhaust from the chamber, the heating amount can be suppressed and the differential pressure between the supply side and the exhaust side in the regeneration zone can be increased, and the regeneration efficiency of the adsorption rotor can be increased. Can be increased. Secondly, the amount of heating can be further suppressed by selecting the exhaust from the chamber that joins the exhaust from the purge zone that is higher than the temperature of the exhaust from the purge zone. Third, by controlling the amount of exhaust from the purge zone so that the differential pressure between the supply side and exhaust side of the regeneration zone is constant, the regeneration efficiency of the adsorption rotor and the humidity of the low dew point air are stabilized. Can be made. Fourth, by returning a part or all of the exhaust gas in the regeneration zone to the supply side of the regeneration zone, the reduction in the differential pressure between the supply side and the exhaust side of the regeneration zone is suppressed, and the regeneration efficiency of the adsorption rotor is reduced. In addition, the humidity of the low dew point air can be stabilized. Fifth, the low dew point air that has been used without heating is joined to the supply side of the purge area, so that the power required to introduce cooling air to the supply side of the purge area can be reduced.

It is a schematic diagram of the operating method and operating system of the dehumidifier according to the first embodiment. It is a flowchart of the operating method and operating system of a dehumidifier concerning a 1st embodiment. It is a schematic diagram of the operating method and operating system of the dehumidifier according to the second embodiment. It is a flowchart of the operating method and operating system of a dehumidifier concerning a 2nd embodiment. It is a schematic diagram of the operating method and operating system of the dehumidifier according to the third embodiment. It is a flowchart of the operating method and operating system of a dehumidifier concerning a 3rd embodiment.

  Hereinafter, the present invention will be described in detail with reference to embodiments shown in the drawings. However, the components, types, combinations, shapes, relative arrangements, and the like described in this embodiment are merely illustrative examples and not intended to limit the scope of the present invention only unless otherwise specified. .

  FIG. 1 shows an operation method and an operation system of the dehumidifier according to the first embodiment. The operation method of the dehumidifier according to the first embodiment is to supply the outside air while rotating the adsorption rotor that adsorbs moisture, to adsorb moisture in the outside air, generate low dew point air, and supply regeneration air. The low dew point air is heated from a dehumidifier that continuously dehumidifies by desorbing the adsorbed moisture and supplying cooling air to cool the area from which the moisture has been desorbed. A dehumidifier operating method for supplying the low dew point air to a chamber to be used, wherein the regeneration air is heated by combining the exhaust of the cooling air and the exhaust from the chamber, and the chamber Are provided, and control is performed to select the exhaust from the chamber having a temperature higher than that of the cooling air and to merge the exhaust with the cooling air.

  In order to embody this, the dehumidifier operating system 10 according to the first embodiment includes a chamber 12, a second chamber 16, a dehumidifier, a controller, and the like. The dehumidifier is connected to the chamber 12 and the second chamber 16 by an air supply duct 20 and an exhaust duct 22. Low-dew point air supply (SA) passes through the air supply duct 20, and the exhaust duct 22 has a chamber. Exhaust gas (RA) from 12 passes.

  The chamber 12 and the second chamber 16 are used, for example, in an organic thin film manufacturing process. Each of the chambers 12 and the second chamber 16 has a configuration in which a plurality of samples are prepared and arranged in a line and a sample such as an organic thin film can be transferred between adjacent chambers. It shall be. In each chamber, an apparatus corresponding to each process in the manufacturing process is installed, and a sample processed in the preceding chamber 12 or the second chamber 16 is carried to a sample stage (not shown) of the apparatus, and a predetermined process is performed. When the process is completed, the processed sample is conveyed to the subsequent chamber 12 or the second chamber 16. Low dew point air is introduced into the chamber 12 and the second chamber 16 through the filters 12a and 16a. The chamber 12 is premised on a sample drying process, and the low dew point air is introduced into the chamber 12. Therefore, a heater 14 is attached to the supply side of the chamber 12.

  A three-way valve 18 is attached to the exhaust side of the chamber 12. The three-way valve 18 is connected to the exhaust side of the chamber 12 on the upstream side, one on the downstream side is open to the outside, and the other is connected to the air supply side of the regeneration zone 30 of the dehumidifier 24 via the exhaust duct 22. Switching connection can be made between one and the other. This switching connection can be made by the controller 42 and is made by outputting a current for switching control to an actuator (not shown) that drives an on-off valve (not shown) in the three-way valve 18. Although not shown in the drawing, the exhaust from the second chamber 16 is discharged to the outside through another path.

  Note that the exhaust duct connecting the three-way valve 18 and the air supply side of the regeneration zone desirably covers the outside with a heat insulating material or the like in order to prevent the temperature of the exhaust from the chamber 12 flowing inside.

  The dehumidifier 24 is a dry dehumidifier using a honeycomb-shaped adsorption rotor impregnated with an adsorption liquid such as lithium chloride or calcium chloride, or an adsorption rotor composed of an adsorbent such as silica gel or zeolite. The suction rotor 26 has a disk-shaped outer shape, and is arranged so as to rotate about the center of the disk as a rotation axis and to allow air to pass perpendicularly to the disk-shaped surface.

  The dehumidifier 24 divides an air passage area into a dehumidifying area 28, a regeneration area 30, and a purge area 32. By rotating the adsorption rotor 26, the disk-like adsorption surface is reduced in the reduced area 28 and the regeneration area 30. , And the purge zone 32.

  An air supply fan 36 that introduces outside air 34 (OA) is provided on the air supply side of the dehumidified area 28, and an air supply duct 20 that supplies low dew point air is connected to the exhaust side of the dehumidified area 28.

  An exhaust fan 46 is attached to the exhaust side of the regeneration zone. When the exhaust fan 46 applies a negative pressure to the exhaust side of the regeneration zone 30, a differential pressure is generated between the supply side and the exhaust side of the regeneration zone 30. . By maintaining this differential pressure at an appropriate level, the adsorption capacity of the adsorption rotor 26 can be effectively recovered in the regeneration zone 30. A damper 48 for adjusting exhaust efficiency is provided on the exhaust side of the exhaust fan 46.

  A heater 38 is provided on the supply side of the regeneration zone 30, and the temperature on the supply side of the regeneration zone 30 is measured by a thermometer 38a, and the supply air to the regeneration zone 30 is kept at a constant temperature using PID control or the like. It is controlled to become. The exhaust side of the purge zone 32 and the exhaust duct 22 are connected, and are connected to the air supply side of the regeneration zone 30. Therefore, outside air 34 (OA) is introduced to the supply side of the purge section 32 by the suction force of the exhaust fan 46.

  Here, the exhaust from the exhaust duct 22 is heated by the heater 14. On the other hand, cooling air 34 a is introduced to the supply side of the purge section 32, but the exhaust from the purge section 32 passes through the adsorption rotor 26 heated by the regeneration section 30, so that the exhaust is heated. Accordingly, the exhaust from the purged area 32 and the exhaust from the exhaust duct 22 flow into the heater 38. Then, the regeneration air supplied to the regeneration zone 30 is generated by heating by the heater 38. At this time, if the temperature of the air supplied to the supply side of the regeneration zone 30 is low, the heating amount increases, and conversely if it is high, the heating amount decreases.

  With the above configuration, the dehumidifier 24 first causes the outside air 34 to pass through the adsorption rotor 26 in the dehumidified area 28 while rotating the adsorption rotor 26, thereby generating low dew point air. Next, high-temperature regeneration air is passed through the adsorption rotor 26 in the regeneration zone 30, whereby the moisture in the adsorbent is desorbed into the regeneration air to recover the adsorption capacity. Then, the cooling air 34a is allowed to pass through the purge zone 32 to cool the adsorption rotor 26, whereby the dehumidification process can be performed continuously.

The controller 42 is an application installed in a personal computer (not shown), for example, and selects only the exhaust of the chamber 12 having an exhaust temperature higher than a certain temperature from the plurality of chambers 12 to regenerate the dehumidifier 24. It controls to send out to the air supply side of the area. The controller 42 is connected to a thermometer 40 attached to the exhaust side of the purge section 32, a thermometer 44 attached to the exhaust side of each chamber 12, and the three-way valve 18 connected to the rear stage of each chamber 12. The controller 42 corresponds to a thermometer 44 (T (N)) (N = 1 to Nmax) attached to the exhaust side of each chamber 12 and the three-way valve 18 (B (N)) (N = 1 to Nmax). In addition, switching control of the three-way valve 18 (B (N)) attached to the rear stage of the same chamber 12 is performed according to the temperature indicated by the thermometer 44 (T _k ).

  The operation method of the dehumidifier according to the first embodiment and the control flow of the operation system 10 are shown in FIG. The controller 42 measures the temperature (Tpout) on the exhaust side of the purge section 32. When the number of chambers 12 (Nmax) is input by key operation or the like, the temperature (T (N)) on the exhaust side of each chamber 12 is measured. ) (N = 1 to Nmax) is measured, and the downstream side of the three-way valve 18 (B (N)) at the rear stage of the chamber 12 having the exhaust gas having a temperature higher than Tpout is switched to the supply side of the regeneration zone 30. Control is performed to open the downstream side of the three-way valve 18 at the rear stage of the chamber 12 having a lower temperature exhaust to the outside, and this is applied to all thermometers (T (N)) and three-way valves (B (N)). Do. This control may be started manually or automatically at regular intervals. By performing such control, the temperature of the air introduced to the supply side of the regeneration zone 30 does not become lower than that of the exhaust side of the purge zone 32, so that the heating amount of the heater 38 can be kept low.

  FIG. 3 shows a dehumidifier operating method and operating system 50 according to the second embodiment. The operating method and operating system 50 of the dehumidifier according to the second embodiment are basically the same as those of the first embodiment, but are configured to control the differential pressure between the supply side and the exhaust side of the regeneration zone 30 to be constant. Is added. That is, a pressure gauge 52 for measuring a differential pressure between the supply side and the exhaust side of the regeneration zone 30 and a second three-way valve interposed between the exhaust side of the purge zone 32 and the supply side of the regeneration zone 30 54, and a second controller 56 connected to the pressure gauge 52 and the second three-way valve 54. The second three-way valve 54 has an upstream side connected to the exhaust side of the purge zone 32, a downstream side connected to the air supply side of the regeneration zone 30, and the other downstream side opened to the outside. In addition, the air volume ratio of the exhaust gas discharged from the purge section 32 can be adjusted between the one side and the other side.

  The second controller 70 is an application installed in, for example, a personal computer (not shown), and obtains a difference between a measured differential pressure obtained from the pressure gauge 52 and a design differential pressure input in advance by a key operation or the like. When the differential pressure is lower (higher) than the design differential pressure, the second three-way valve 54 has an inner volume that increases (decreases) the air volume on the regeneration zone 30 side at a predetermined rate (for example, 5%). A signal for driving the opening / closing valve for adjusting the opening / closing degree of the opening / closing valve (not shown) is output to an actuator (not shown). By performing this at predetermined time intervals, the air pressure to the regeneration zone 30 is adjusted to control the differential pressure between the supply side and the exhaust side of the regeneration zone 30 within a certain range centered on the design differential pressure. The adsorption efficiency of the adsorption rotor 26 to be recovered in the regeneration zone 30 can be stabilized, and the humidity of the low dew point air supplied to the chamber 12 and the second chamber 16 can be stabilized.

  FIG. 4 shows a flowchart of the operation method and the operation system 50 of the dehumidifier according to the second embodiment. Since the operation of the controller in the previous stage of the flow is the same as that of the first embodiment, description thereof is omitted. After the operation of the controller is completed, the second controller reads the measured differential pressure between the supply side and the exhaust side of the regeneration zone from the pressure gauge as described above, and the difference between the measured differential pressure and the design differential pressure input in advance. A signal for changing the air volume ratio of the second three-way valve at a constant rate (5% in the present embodiment) is output to the second three-way valve until is within a certain range. This control may be started manually as in the first embodiment, or may be automatically performed periodically.

  The operating method and operating system 60 of the dehumidifier according to the third embodiment are shown in FIG. The operating method and operating system 60 of the dehumidifier according to the third embodiment are basically the same as those of the second embodiment. However, a return path 62 that connects the exhaust fan 46 to the air supply side is provided, and the regeneration zone is provided. A first damper 66 and a second damper 68 are provided on the position immediately before the 30 exhaust ports 64 and on the return path 62, respectively. The opening / closing amounts of the first damper 66 and the second damper 68 can be controlled by the second controller 70. The first damper 66 and the second damper 68 are provided with actuators (not shown) for driving the opening / closing valves (not shown). The first damper 66 and the second damper 68 are used when a sufficient differential pressure cannot be obtained even when the downstream side of the second three-way valve 54 is completely opened to the regeneration zone 30 side. Is open and the second damper 68 is closed. The second controller not only outputs a signal for controlling the air volume ratio of the second three-way valve 54, but also opens / closes the first damper 66 and the second damper 68 to increase or decrease the air volume at a certain rate (for example, 5%). A signal for adjusting the degree of opening and closing of a valve (not shown) can be output, and when the air volume of the first damper 66 decreases at a constant rate, the return air volume passing through the second damper 68 increases at a constant rate. To be controlled. Then, as the amount of return air due to the exhaust from the exhaust fan 46 flowing in the return path 62 increases, the pressure (air amount) on the supply side of the regeneration zone 30 increases, so that the difference between the supply side and the exhaust side of the regeneration zone 30 is increased. The pressure will increase.

  FIG. 6 shows a flowchart of the operation method and the operation system 60 of the dehumidifier according to the third embodiment. The control of the three-way valve 18 by the controller 42 is the same as in the first embodiment. When the measured differential pressure falls within a certain range centered on the design differential pressure by the control of the second three-way valve 54 by the second controller 70, the first control is performed. This is the same as in the second embodiment. However, when a sufficient differential pressure cannot be obtained even by controlling the second three-way valve 54, the air volume of the first damper 66 and the return air volume of the second damper 68 are controlled by the second controller 70 as in this embodiment. become. In this case, the air volume of the first damper 66 is decreased at a certain rate (for example, 5%), the return air volume of the second damper 68 is increased, and this is continued until the measured differential pressure falls within a certain range around the design differential pressure. Will repeat.

  In any embodiment, the exhaust side of the second chamber 16 can be connected to the supply side of the dehumidification zone 28 or the supply side of the purge region 32. The exhaust from the second chamber 16 is unheated low dew point air supplied from the dehumidifying zone 28. Therefore, the low dew point air discharged from the second chamber 16 can be reused by merging the exhaust from the second chamber 16 with the outside air 34 introduced into the dehumidifying zone 28, so The running cost can be reduced by reducing the burden. Further, the exhaust air from the second chamber 16 is joined to the cooling outside air 34 introduced to the supply side of the purge area 32 to thereby introduce the cooling air into the supply side of the purge area (the power of the exhaust fan 46). Electric power) can be reduced.

  As described above, according to the operation method of the dehumidifier and the operation systems 10, 50, 60 according to the present embodiment, first, the exhaust gas heated from the chamber 12 is supplied to the supply side of the regeneration zone 30. Therefore, the amount of heating by the heater 38 can be suppressed, and the running cost can be reduced. Also. The exhaust from the purge section 32 is also heated by contacting the adsorption rotor 26 that has been heated through the regeneration section 30. Therefore, by heating the exhaust from the purge section 32 and the exhaust from the chamber 12 to be heated, the heating amount of the heater 38 can be suppressed, and the differential pressure between the supply side and the exhaust side of the regeneration section 30 can be increased. The regeneration efficiency of the suction rotor 26 can be increased. Second, the amount of heating can be further suppressed by selecting the exhaust from the chamber 12 that joins the exhaust from the purge section 32 that is higher than the temperature of the exhaust from the purge section 32. Third, by controlling the exhaust amount from the purge section 32 so that the differential pressure between the supply side and the exhaust side of the regeneration section 30 is constant, the regeneration efficiency of the adsorption rotor 26 and the low dew point air Humidity can be stabilized. Fourth, by returning a part or all of the exhaust gas in the regeneration zone 30 to the air supply side of the regeneration zone 30, the decrease in the differential pressure between the air supply side and the exhaust side of the regeneration zone 30 is suppressed, and the adsorption rotor 26 regeneration efficiency and low dew point air humidity can be stabilized. Fifth, the power to introduce cooling air to the supply side of the purge section 32 can be reduced by joining the low dew point air that has been used without heating to the supply side of the purge section 32. .

  It can be used as a dehumidifier operating method and operating system with reduced running costs.

10 ......... Operating system, 12 ......... Chamber, 14 ... Heater, 16 ......... Second chamber, 18 ......... Three-way valve, 20 ...... Air supply duct, 22 ...... Exhaust duct, 24 ......... Dehumidifier, 26 ......... Adsorption rotor, 28 ......... Dehumidification zone, 30 ......... Regeneration zone, 32 ......... Purge zone, 34 ......... Outside air, 36 ......... Air supply fan, 38 ......... Heating heater, 40 ...... thermometer, 42 ......... controller, 44 ......... thermometer, 46 ......... exhaust fan, 48 ...... damper, 50 ...... operating system, 52 ... ... pressure gauge, 54 ... ... second three-way valve, 56 ... ... second controller, 60 ... ... operating system, 62 ... ... return path, 64 ... ... exhaust port, 66 ... ... first damper, 68 ......... Second damper, 70 ......... Second controller.

Claims (10)

While rotating the adsorption rotor that adsorbs moisture, the outside air is supplied to adsorb the moisture in the outside air to generate low dew point air, and the regenerated air is supplied to desorb the adsorbed moisture, thereby cooling air A dehumidifier that supplies the low dew point air to a chamber that heats the low dew point air from a dehumidifier that continuously dehumidifies by cooling the region from which the moisture has been desorbed by supplying air Driving method,
The method of operating a dehumidifier, wherein the regeneration air is heated by joining the exhaust of the cooling air and the exhaust from the chamber. The said chamber is provided with two or more, The exhaust from the chamber whose temperature is higher than the exhaust of the said cooling air is selected, and control which merges with the exhaust of the said cooling air is performed. How to operate the dehumidifier. 2. The air volume of the cooling air exhaust combined with the exhaust from the chamber can be controlled so that the differential pressure between the supply side and the exhaust side of the regeneration air is constant. Or the operating method of the dehumidifier of 2. It is possible to return part or all of the exhaust of the regeneration air to the supply side of the regeneration air, and the regeneration air has a constant differential pressure between the supply side and the exhaust side of the regeneration air. The method of operating a dehumidifier according to any one of claims 1 to 3, wherein a return air volume of the exhaust gas can be controlled. The dehumidifier supplies the low dew point air also to a second chamber that uses the low dew point air without heating, and causes the exhaust of the second chamber to merge with the cooling air. The operating method of the dehumidifier of any one of 4. An operating system of a dehumidifier that supplies the low dew point air to a chamber that heats and uses the low dew point air,
While rotating the adsorption rotor that adsorbs moisture, the outside air is supplied and the moisture in the outside air is adsorbed to supply the low dew point air, and the regeneration air is supplied to remove the adsorbed moisture. A dehumidifier that continuously performs the dehumidification process by passing through a regeneration zone that recovers the adsorption capacity by separating it and a purge zone that cools the area from which the moisture is desorbed by supplying cooling air. When,
A heater provided on the air supply side of the regeneration zone for heating the regeneration air,
An operating system of a dehumidifier, wherein an exhaust side of the purge zone and an exhaust side of the chamber are connected to an air supply side of the regeneration zone. A plurality of the chambers are provided, and between the exhaust side of the chamber and the supply side of the regeneration zone, the upstream side is connected to the chamber side, one of the downstream sides is connected to the regeneration zone side, and the other is external Is provided with a three-way valve that can be opened and switched to connect the downstream side,
The exhaust temperature of the chamber and the exhaust temperature of the purge area are measured, and when the temperature of the chamber is higher than the temperature of the exhaust of the purge area, the three-way valve related to the chamber is switched to the regeneration area side. It has a controller, The operating system of the dehumidifier of Claim 6 characterized by the above-mentioned. Between the exhaust side of the purge zone and the supply side of the regeneration zone, the upstream side is connected to the purge zone side, one downstream is opened to the regeneration zone side and the other is opened to the outside, and the downstream air volume ratio A second three-way valve capable of controlling
The apparatus further comprises a second controller that measures a differential pressure between an air supply side and an exhaust side in the regeneration zone and controls an air volume ratio of the second three-way valve so that the differential pressure becomes constant. The operating system of a dehumidifier according to 6 or 7. The exhaust side of the regeneration zone is branched into a first path that opens one side to the outside, and the other is branched to a second path that connects the regeneration zone to the air supply side, and a first damper is interposed on the first path. , Interposing a second damper on the second path,
The second controller measures the pressure difference between the supply side and the exhaust side of the regeneration zone, and reduces the air volume of the second damper while reducing the air volume of the first damper so that the differential pressure becomes constant. The operation system of the dehumidifier according to any one of claims 6 to 8, wherein the opening control is performed. The exhaust side of the dehumidification zone is connected to a second chamber that uses the low dew point air without heating, and the exhaust side of the second chamber is connected to the supply side of the purge zone. The operating system of a dehumidifier according to any one of claims 6 to 9.

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