JP2010225342A - Filament lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a filament lamp equipped with three filaments which are aligned in parallel in an arc tube in a tube axial direction and receive power each independently, in which uniformalization of a temperature distribution in superimposing of a central filament and filaments on both sides is aimed at. <P>SOLUTION: The central filament is composed of a plurality of divided coil segments and these are connected by a combining part. Moreover, a gap between the central filament and the filaments on both sides is made smaller than the gap of the coil segments composing the central filament. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

The present invention relates to a filament lamp, and more particularly, to a filament lamp used for heating a semiconductor wafer, heating in a solar cell manufacturing process, or heat treatment of liquid crystal.

  For example, a light irradiation type heating apparatus in a semiconductor manufacturing process is used over a wide range such as film formation, diffusion, annealing, etc., and any processing rapidly heats a semiconductor wafer such as a plate-shaped object, What is required to raise the temperature to 1000 ° C. or more in several seconds to several tens of seconds is required. In recent years, a further rapid increase in temperature has been required, and the electric power supplied to the lamp has been increased. In a process called spike annealing, the temperature is increased at a high speed exceeding 200 ° C./second, and is cooled immediately when the target temperature is reached. By this spike annealing, a very thin diffusion layer (shallow junction) can be formed, and the performance of the semiconductor element can be improved.

In addition, if the temperature distribution of the semiconductor wafer becomes non-uniform during heating, a phenomenon called slip, that is, a defect of crystal transition may occur in the semiconductor wafer, which may result in a defective product. Therefore, when a semiconductor wafer is heated using a light irradiation type heating device, it is an indispensable factor to make the temperature distribution of the semiconductor wafer uniform. As a proposal to make the temperature distribution uniform, Japanese Patent Application Laid-Open No. 2006-279008 proposes a filament lamp having a plurality of filaments that can be fed independently into a single arc tube, thereby partially forming a filament. The input electric power can be changed and can be adjusted so as to obtain a highly uniform temperature distribution.

FIG. 4 is a perspective view showing such a conventional filament lamp 1.
Coiled filaments 14, 15, and 16 are sequentially arranged so as to extend in the tube axis direction of the arc tube 2 in the straight tubular arc tube 2 that is hermetically sealed at both ends by the sealing portions 3 a and 3 b. In addition, power supply internal leads 14a, 14b, 15a, 15b, 16a, and 16b are connected to both ends of each filament 14, 15, and 16 and are connected to individual power supply devices (not shown).

  By adopting such a filament arrangement, each filament is supplied with power independently, so that it is possible to ensure the uniformity of the temperature distribution in the irradiated region.

However, in the prior art, the internal leads 14b and 15a and the internal leads 15b and 16a are wired between the filament 15 arranged in the center and the filaments 14 and 16 arranged on both sides thereof. These adjacent filaments 14, 15, 16 cannot be arranged closely, and a certain gap is inevitably formed.
Further, since there is no light emitting member in the gap and a non-light emitting portion, there is a problem in that a decrease in the superposition temperature at the filament ends on both sides of the gap is unavoidable and a local temperature drop occurs. .

  This temperature drop mainly originates from the temperature drop at both ends of the central filament 15. This heat distribution characteristic is shown in FIG. 5, and there is a large temperature drop at both ends 15c and 15d of the center filament 15 (A in FIG. 5). As a result, the overlapping temperature with the temperatures of the filaments 14 and 16 on both sides This is because a local temperature drop (FIG. B) can be achieved.

  5 is an example in which the total length of the central filament 15 is 300 mm, the total length of the filaments 14 and 16 on both sides is 50 mm, the gap between them is 7 mm, the power consumption is 280 W, and the irradiation distance is 40 mm.

JP 2006-279008 A

  The problem to be solved by the present invention is that a filament lamp having three filaments that are sequentially arranged in the direction of the tube axis inside the arc tube and each of which is fed independently, both sides adjacent to the central filament. It is intended to prevent local temperature drop between filaments.

  In order to solve the above-mentioned problems, a filament lamp according to the present invention is a filament lamp provided with three filaments that are sequentially arranged in the tube axis direction inside the arc tube, and each is independently fed. The filament disposed in the center is composed of a plurality of divided coil segments, and adjacent coil segments are connected by a connecting portion.

In addition, the gap between the end of the filament arranged in the center and the end of the filament arranged on both sides thereof is made smaller than the gap between adjacent coil segments constituting the filament arranged in the center. It is characterized by.

  According to the filament lamp of the present invention, since the filament arranged in the center is composed of a plurality of coil segments, the coil segment located at the end of the center filament suppresses the temperature drop at the end of the center filament. As a result, it is possible to suppress the local temperature drop that occurs between the central filament and the filaments located on both sides thereof.

  Further, since the gap between the ends of the filaments arranged on both sides and the ends of the filaments arranged in the center is made smaller than the gap between adjacent coil segments constituting the center filament, the coil segments of the center filament There is also an effect of contributing to the uniformity of the temperature distribution by compensating for the slight heat generation due to the wire existing between them and compensating for the temperature drop between the central filament and the both side filaments due to the absence of the wire.

The perspective view of the filament lamp of this invention Partial enlarged explanatory view of FIG. Heat distribution characteristic diagram of filament lamp of the present invention Prior art perspective view Conventional heat distribution characteristics

FIG. 1 is a perspective view showing a filament lamp of the present invention. Inside the arc tube 2, three filaments 24, 25 and 26 are arranged side by side in the tube axis direction. Internal leads 24a, 24b, 26a, and 26b are connected to both ends of the two side filaments 24 and 26 disposed in the immediate vicinity of the both end sealing portions 3a and 3b of the arc tube 2, and the two side filaments 24 and 26 are in close proximity. The inner leads 25a are extended in the same sealing portion direction, are held by the sealing portions 3a and 3b, and are connected to both ends of the filament 25 located at the center between the two filaments 24 and 26. , 25b extend in different directions in the axial direction of the arc tube 2 and are held by the sealing portions 3a, 3b at both ends.
On the other hand, the internal leads 25a and 25b of the central filament 25 extend in the direction of the sealing portions 3a and 3b at both ends, and are held so as to be connected to the metal foils 22a and 22b by the sealing portions 3a and 3b.

  The central filament 25 is composed of a plurality of coil segments 27a, 27b, 27c,..., And the coil segments 27a, 27b, 27c,.

  As shown in FIG. 2, the gap L1 between the end of the central filament 25 and the filaments 24, 26 on both sides thereof is made smaller than the interval L2 between the coil segments 27a, 27b of the central filament 25.

With such a configuration, a heat distribution characteristic as shown in FIG. 3 can be obtained.
That is, in the superposition temperature distribution 31 obtained from the heat distribution profiles 30a, 30b, 30c, ... by the coil segments 27a, 27b, 27c, ... of the central filament 25, the temperature at the end of the central filament 25 is determined. The decrease is suppressed to be smaller than the temperature decrease (A in FIG. 5) shown in FIG.
This is because, in the central filament 25, the heat distribution profile 30a is obtained due to the presence of the coil segment 27a located at the end thereof, and thereby the heat distribution in which the temperature drop at the end is suppressed to be small. This is because the profile 31 is obtained.
As a result, the superposition heat distribution 33 of the heat distribution profile 31 of the central filament 25 and the heat distribution profiles 32 of the filaments 24 and 26 on both sides is caused by the end temperature drop (B in FIG. 5) shown in FIG. In comparison, the temperature drop at both ends is suppressed to a small level and the level of uniformity is improved as a whole.

  The heat distribution characteristic shown in FIG. 3 is that the length of each coil segment 27a, 27b, 27c... Constituting the central filament 25 is 29 mm, and the gap between each coil segment 27 is 10 mm. The specifications are the same as the example of FIG.

  Further, as shown in FIG. 2, the gap L1 between the both-side filament 24 (26) and the central filament 25 is made smaller than the gap L2 between the coil segments 27 of the central filament 25. The temperature increase based on the heat distribution profile 35 by the connecting portion 28 that connects the coil segments 27 can be compensated, and the entire temperature is not disturbed.

<Example>
Arc tube: quartz glass, total length 560 mm, diameter 13-16 mm
Filament: Tungsten strand Central filament: Total length 50-320mm, coil segment 29m
m × 8, power 350-2100W, connecting part: 10
mm × 7 filaments on both sides: 50 to 150 mm in total length, 350 to 800 W in power
Gap between filaments: 7mm

DESCRIPTION OF SYMBOLS 1 Filament lamp 2 Light-emitting tube 24, 26 Both-side filament 25 Central filament 27 Coil segment 28 Connection part

Claims (2)

In a filament lamp having three filaments that are sequentially arranged in the tube axis direction inside the arc tube and each of which is fed independently, the filament arranged in the center is made up of a plurality of divided coil segments. A filament lamp characterized in that adjacent coil segments are connected by a connecting portion. The gap between the ends of the filaments arranged in the center and the ends of the filaments arranged on both sides thereof is smaller than the gap between adjacent coil segments constituting the filament arranged in the center. The filament lamp according to claim 1.

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