JP2010224425A - Display panel with built-in optical sensor and display device using the same - Google Patents

Display panel with built-in optical sensor and display device using the same Download PDF

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JP2010224425A
JP2010224425A JP2009074072A JP2009074072A JP2010224425A JP 2010224425 A JP2010224425 A JP 2010224425A JP 2009074072 A JP2009074072 A JP 2009074072A JP 2009074072 A JP2009074072 A JP 2009074072A JP 2010224425 A JP2010224425 A JP 2010224425A
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light
opening surface
region
shielding
optical sensor
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Mitsunobu Miyamoto
光伸 宮本
Atsushi Nakazawa
淳 中澤
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Sharp Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a display panel with a built-in optical sensor by which exact sensing corresponding to light at various incident angles or a display device using the same. <P>SOLUTION: The display panel with the built-in optical sensor has an active matrix substrate 100 having a pixel area in which pixels are arranged like a matrix, and at least a part of the pixel area, an optical sensor part 4 is formed. The optical sensor part 4 includes: an opening surface 7 provided on the surface of at least a part of the pixel area; a photosensitive part 6 which detects light penetrating the opening surface 7 to be made incident; and a light shielding part 5 which is provided at a part of an area between the opening surface 7 and the photosensitive part 6 and formed by extending in a direction perpendicular to the opening surface 7. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本願の開示は、フォトダイオード等の光検出素子を画素内に有し、スキャナやタッチパネルとして利用可能な光センサ内蔵表示パネルと、それを用いた表示装置に関する。   The disclosure of the present application relates to a display panel with a built-in photosensor that includes a photodetection element such as a photodiode in a pixel and can be used as a scanner or a touch panel, and a display device using the display panel.

従来、例えばフォトダイオード等の光検出素子を画素領域内に備えたことにより、ディスプレイに近接した物体の画像を取り込むことが可能な、画像取り込み機能付きの表示装置が提案されている(例えば、特許文献1参照)。画素領域内の光検出素子は、アクティブマトリクス基板上に、信号線および走査線、TFT(Thin Film Transistor)、画素電極等の周知の構成要素を周知の半導体プロセスによって形成する際に、同時に形成される。このような画像取り込み機能付き表示装置は、例えば、双方向通信用表示装置や、タッチパネル機能付き表示装置としての利用が想定されている。   2. Description of the Related Art Conventionally, a display device with an image capturing function that can capture an image of an object close to a display by providing a photodetection element such as a photodiode in a pixel region has been proposed (for example, patents). Reference 1). The light detection elements in the pixel region are formed at the same time when well-known components such as signal lines, scanning lines, TFTs (Thin Film Transistors), and pixel electrodes are formed on the active matrix substrate by a well-known semiconductor process. The Such a display device with an image capturing function is assumed to be used as, for example, a display device for bidirectional communication or a display device with a touch panel function.

画素領域内の光検出素子は、様々な入射角の光を検出する可能性がある。そのため、画像取り込み機能付き表示装置に内蔵される光センサは、垂直に入射する光だけでなく、斜めに入射する光も正確に検出できることが好ましい。そのため、光検出器の光源側に集光レンズを設けた光センサが提案されている(例えば、特許文献1参照)。この光センサにおいては、集光レンズの一部にレンズ中心を通る光軸にほぼ平行な円筒面が設けられている。これにより、光センサによる検出光量の入射角依存性が小さくなる。   The light detection element in the pixel region may detect light having various incident angles. For this reason, it is preferable that the optical sensor incorporated in the display device with an image capturing function can accurately detect not only light incident vertically but also light incident obliquely. Therefore, an optical sensor in which a condensing lens is provided on the light source side of the photodetector has been proposed (see, for example, Patent Document 1). In this optical sensor, a cylindrical surface substantially parallel to the optical axis passing through the center of the lens is provided in a part of the condenser lens. As a result, the incident angle dependency of the amount of light detected by the optical sensor is reduced.

特開平2−112735号公報Japanese Patent Laid-Open No. 2-112735

しかしながら、上記集光レンズを用いた構成は、入射角の大きな光を捕らえることには向いているが、例えば、指やペン等によって感光部への光が遮蔽されたことを検知するための光センサには向いていない。ゆえに、本発明は、光の遮蔽を感知することができる光センサにおいても、様々な入射角の光に対応した正確な感知が可能な光センサ内蔵表示パネルまたはこれを用いた表示装置を提供することを目的とする。   However, the configuration using the condensing lens is suitable for capturing light having a large incident angle. For example, the light for detecting that the light to the photosensitive portion is shielded by a finger or a pen. Not suitable for sensors. Therefore, the present invention provides a display panel with a built-in photosensor or a display device using the photosensor capable of accurate sensing corresponding to light of various incident angles even in a photosensor capable of sensing light shielding. For the purpose.

本願に開示の光センサ内蔵表示パネルは、マトリクス状に画素が配置された画素領域を有し、前記画素領域の少なくとも一部に光センサ部が形成された光センサ内蔵表示パネルである。前記光センサ部は、前記画素領域の少なくとも一部の表面に設けられた開口面と、前記開口面を透過して入射する光を検出する感光部と、前記開口面と感光部との間に設けられ、前記開口面から入射した光の一部を遮る遮光部とを備える。   The display panel with a built-in photosensor disclosed in the present application is a display panel with a built-in photosensor having a pixel region in which pixels are arranged in a matrix and having a photosensor portion formed in at least a part of the pixel region. The optical sensor unit includes an opening surface provided on at least a part of the surface of the pixel region, a photosensitive unit that detects light incident through the opening surface, and a gap between the opening surface and the photosensitive unit. And a light shielding portion that blocks a part of the light incident from the opening surface.

上記構成において、開口面と感光部との間に設けられる遮光部により、開口面から垂直に入射した光の一部を遮られて、感光部に達しない。そのため、開口面が例えば指やペン等の遮蔽物でふさがれた場合、遮蔽物の隙間から開口面へ斜めに入射して感光部に達する漏れ光が感光部の全面に渡って照射されにくくなる。そのため、感光部で検出される漏れ光が光量が抑えられる。その結果、開口面が遮蔽された場合に感光部に達する光量と、開口面が遮蔽されていない場合に感光部に達する光量の差を大きくすることができる。ひいては、光の遮蔽を感知することができる光センサにおいても、明暗の区別がつけやすくなり、様々な入射角の光に対応した正確な感知が可能になる。   In the above-described configuration, a part of light perpendicularly incident from the opening surface is blocked by the light shielding portion provided between the opening surface and the photosensitive portion and does not reach the photosensitive portion. For this reason, when the opening surface is blocked by a shielding object such as a finger or a pen, leakage light that enters the opening surface obliquely from the gap of the shielding object and reaches the photosensitive portion is less likely to be irradiated over the entire surface of the photosensitive portion. . For this reason, the amount of leakage light detected by the photosensitive portion is suppressed. As a result, the difference between the amount of light reaching the photosensitive portion when the aperture surface is shielded and the amount of light reaching the photosensitive portion when the aperture surface is not shielded can be increased. As a result, even in an optical sensor capable of detecting light shielding, it becomes easy to distinguish between light and dark, and accurate detection corresponding to light of various incident angles becomes possible.

本発明の実施形態において、前記遮光部は、前記感光部の中央部分上方の空間を囲むように設けられてもよい。これにより、開口面がふさがれていない場合、開口面から入射した光が感光部中央部分に達するが、感光部の中央部分上方の開口面がふさがれた場合、開口面から斜めに入射する漏れ光は、遮光部によって遮られ、感光部の中央部に達しない。そのため、開口面に垂直に入射する光の感光量を大幅に落とすことなく、斜めに入射する光の感光量を抑えることができる。感光部の中央部分は、光を検知する領域の中央部分である。   In an embodiment of the present invention, the light shielding portion may be provided so as to surround a space above a central portion of the photosensitive portion. As a result, when the aperture surface is not blocked, the light incident from the aperture surface reaches the central portion of the photosensitive portion. However, when the aperture surface above the central portion of the photosensitive portion is blocked, the leak incident obliquely from the aperture surface. The light is blocked by the light blocking portion and does not reach the central portion of the photosensitive portion. Therefore, the amount of light incident obliquely can be suppressed without significantly reducing the amount of light incident perpendicularly to the aperture surface. The central part of the photosensitive part is the central part of the area where light is detected.

本発明の実施形態において、前記遮光部は、前記開口面に対して垂直な方向に延びる側面と、前記開口面に平行な上面を有することが好ましい。上記構成により、開口面に斜めに入射した光(入射角0度でない光)は、遮光部に遮られやすくなる。そのため、入射角が0度より大きい光は、感光部に達しにくくなる。すなわち、感光部が検知する光の入射角をより効果的に制限することができる。   In an embodiment of the present invention, it is preferable that the light shielding portion has a side surface extending in a direction perpendicular to the opening surface and an upper surface parallel to the opening surface. With the above configuration, light that is incident obliquely on the opening surface (light that is not incident at 0 degrees) is easily blocked by the light shielding portion. For this reason, light having an incident angle larger than 0 degrees is difficult to reach the photosensitive portion. That is, the incident angle of light detected by the photosensitive portion can be more effectively limited.

本発明の実施形態において、前記感光部と前記遮光部の前記上面との距離が、前記開口面と前記上面との距離よりも短くなる位置に、前記遮光部が配置されることが好ましい。これにより、開口面に対して斜めに入射して感光部に達する光を効果的に遮断することができる。   In an embodiment of the present invention, it is preferable that the light shielding portion is disposed at a position where a distance between the photosensitive portion and the upper surface of the light shielding portion is shorter than a distance between the opening surface and the upper surface. As a result, it is possible to effectively block light that is incident on the opening surface at an angle and reaches the photosensitive portion.

本発明の実施形態において、前記感光部は、光を検知する矩形平面を有し、前記開口面に垂直であり、かつ、前記矩形平面の少なくとも一辺に平行な面における断面において、前記遮光部は、前記感光部の中央上方の中央領域を挟んで隣り合う第1の遮光領域と第2の遮光領域を有し、前記第1の遮光領域および前記第2の遮光領域は、前記開口面に垂直な方向に延びる側面境界と、当該側面に垂直な上面境界とを有し、前記第1の遮光領域は、前記断面における前記開口面の一方の端と、前記感光部の両端のうち、当該開口面の一方の端からの距離が長い方の端とを通る線と重なる位置に形成され、前記第2の遮光領域は、前記断面における前記開口面の他方の端部と、前記感光部の両端のうち、当該開口面の他方の端部からの距離が長い方の端とを通る線と重なる位置に形成され、前記第1の遮光領域の前記中央領域側の側面境界は、前記開口面の一方の端と、前記第2の遮光領域の上面境界の前記中央領域側の端とを結ぶ線と交わる位置に形成され、前記第2の遮光領域の前記中央領域側の側面境界は、前記開口面の一方の端と、前記第2の遮光領域の上面境界の前記中央領域側の端とを結ぶ線と交わる位置に形成されることが好ましい。これにより、遮光部は、開口面の縁から斜めに入射した光が感光部に達することを、より確実に遮ることができる。   In an embodiment of the present invention, the light-sensitive portion has a rectangular plane that detects light, is perpendicular to the opening surface, and is a cross section in a plane parallel to at least one side of the rectangular plane. , Having a first light-shielding region and a second light-shielding region adjacent to each other across a central region above the center of the photosensitive portion, and the first light-shielding region and the second light-shielding region are perpendicular to the opening surface. The first light-shielding region includes one end of the opening surface in the cross-section and both ends of the photosensitive portion. The second light-shielding region is formed at a position overlapping with a line passing through the longer end from one end of the surface, and the second light-shielding region includes the other end of the opening surface in the cross section and both ends of the photosensitive portion. Among them, the distance from the other end of the opening surface is long The side boundary on the central region side of the first light-shielding region is formed at a position overlapping with a line passing through the end of the first light-shielding region, and the center of the upper-surface boundary of one end of the opening surface and the second light-shielding region The side boundary on the central region side of the second light-shielding region is formed between the one end of the opening surface and the upper surface boundary of the second light-shielding region. It is preferably formed at a position intersecting with a line connecting the end on the central region side. As a result, the light shielding portion can more reliably block light incident obliquely from the edge of the opening surface from reaching the photosensitive portion.

本発明の実施形態において、前記アクティブマトリクス基板と、液晶層を介して対向する対向基板を備え、前記開口面は前記対向基板側に設けられ、前記感光部および前記遮光部は前記アクティブマトリクス基板側に設けられることが好ましい。これにより、光センサ内蔵の液晶表示パネルが得られる。なお、上記光センサ内蔵表示パネルを含む表示装置も本発明の実施形態に含まれる。   In an embodiment of the present invention, a counter substrate facing the active matrix substrate with a liquid crystal layer interposed therebetween is provided, the opening surface is provided on the counter substrate side, and the photosensitive portion and the light shielding portion are on the active matrix substrate side. It is preferable to be provided. Thereby, a liquid crystal display panel with a built-in optical sensor is obtained. Note that a display device including the above-described display panel with a built-in optical sensor is also included in the embodiment of the present invention.

本発明によれば、光の遮蔽を感知するための光センサにおいても、様々な入射角の光に対応した正確な感知が可能になる。   According to the present invention, even in an optical sensor for detecting light shielding, accurate detection corresponding to light of various incident angles can be performed.

図1は、本実施形態にかかる光センサ内蔵表示パネルのアクティブマトリクス基板における1画素分の画素領域の上面図である。FIG. 1 is a top view of a pixel region for one pixel in an active matrix substrate of the display panel with a built-in photosensor according to the present embodiment. 図2は、図1に示す画素領域における光センサ部の拡大図である。FIG. 2 is an enlarged view of the photosensor portion in the pixel region shown in FIG. 図3は、図2におけるA−A’矢視断面図である。FIG. 3 is a cross-sectional view taken along the line A-A ′ in FIG. 2. 図4は、遮光部の好ましい配置について説明するための図である。FIG. 4 is a diagram for explaining a preferred arrangement of the light shielding portions. 図5は、遮光部を設けない場合の漏れ光の入射状態を示す図である。FIG. 5 is a diagram illustrating an incident state of leakage light when no light shielding unit is provided. 図6は、遮光部を設けた場合の漏れ光の入射状態を示す図である。FIG. 6 is a diagram illustrating an incident state of leakage light when a light shielding portion is provided. (a)〜(e)は、図3に示す遮光部の製造工程を説明するための図である。(A)-(e) is a figure for demonstrating the manufacturing process of the light-shielding part shown in FIG. 遮光部の変形例を示す断面図である。It is sectional drawing which shows the modification of a light-shielding part. 図9は、図8に示す変形例の上面図である。FIG. 9 is a top view of the modification shown in FIG. 図10は、遮光部の他の変形例を示す上面図である。FIG. 10 is a top view showing another modification of the light shielding portion. 図11は、遮光部のさらに他の変形例を示す上面図である。FIG. 11 is a top view showing still another modified example of the light shielding portion. 図12は、遮光部のさらなる他の変形例を示す上面図である。FIG. 12 is a top view showing still another modification of the light shielding portion.

以下、本発明のより具体的な実施形態について、図面を参照しながら説明する。なお、以下の実施形態は、本発明にかかる表示装置を液晶表示装置として実施する場合の構成例を示したものであるが、本発明にかかる表示装置は液晶表示装置に限定されず、マトリクス状に画素が配置された基板を用いる任意の表示装置(例えば、EL表示装置等)に適用可能である。また、本発明にかかる表示装置は、画像取り込み機能を有することにより、画面に近接する物体を検知して入力操作を行うタッチパネル付き表示装置、画面に載置された書類等の画像を読み取るスキャナ、あるいは、表示機能と撮像機能とを具備した双方向通信用表示装置等としての利用が想定される。   Hereinafter, more specific embodiments of the present invention will be described with reference to the drawings. The following embodiment shows a configuration example when the display device according to the present invention is implemented as a liquid crystal display device. However, the display device according to the present invention is not limited to the liquid crystal display device, and is in a matrix form. The present invention can be applied to an arbitrary display device (for example, an EL display device) using a substrate on which pixels are arranged. Further, the display device according to the present invention has an image capturing function, thereby detecting an object close to the screen and performing an input operation, a scanner for reading an image of a document or the like placed on the screen, Alternatively, it can be used as a bidirectional communication display device having a display function and an imaging function.

また、以下で参照する各図は、説明の便宜上、本発明の実施形態の構成部材のうち、本発明を説明するために必要な主要部材のみを簡略化して示したものである。従って、本発明にかかる表示装置は、本明細書が参照する各図に示されていない任意の構成部材を備え得る。また、各図中の部材の寸法は、実際の構成部材の寸法および各部材の寸法比率等を忠実に表したものではない。   For convenience of explanation, the drawings referred to below show only the main members necessary for explaining the present invention in a simplified manner among the constituent members of the embodiment of the present invention. Therefore, the display device according to the present invention can include arbitrary constituent members that are not shown in the drawings referred to in this specification. Moreover, the dimension of the member in each figure does not represent the dimension of an actual structural member, the dimension ratio of each member, etc. faithfully.

[光センサ内蔵表示パネルの構成]
最初に、図1〜図3を参照しながら、本発明の実施形態にかかる液晶表示装置が備える光センサ内蔵表示パネルの構成について説明する。
[Configuration of display panel with built-in optical sensor]
First, the configuration of the display panel with a built-in optical sensor included in the liquid crystal display device according to the embodiment of the present invention will be described with reference to FIGS.

図1は、本実施形態にかかる光センサ内蔵表示パネルにおける1画素分の画素領域1の上面図である。図2は、図1に示す画素領域1における光センサ部の拡大図である。図3は、図2におけるA−A’矢視断面図である。   FIG. 1 is a top view of a pixel region 1 for one pixel in the display panel with a built-in optical sensor according to the present embodiment. FIG. 2 is an enlarged view of the photosensor portion in the pixel region 1 shown in FIG. FIG. 3 is a cross-sectional view taken along the line A-A ′ in FIG. 2.

図1に示すように、1画素分の画素領域1は、画素開口部2および光センサ部4を含む。本実施形態では、各画素内に、光センサ部4が1つずつ設けられている。図1に示すような画素が、光センサ内蔵表示パネルにおいてマトリクス状に複数配置される。   As shown in FIG. 1, the pixel region 1 for one pixel includes a pixel opening 2 and an optical sensor unit 4. In the present embodiment, one photosensor unit 4 is provided in each pixel. A plurality of pixels as shown in FIG. 1 are arranged in a matrix in the display panel with a built-in photosensor.

光センサ内蔵表示パネル上面において、画素開口部2および光センサ部4の開口面はブラックマトリクス3で囲まれている。画素開口部2および光センサ部4の開口面は、例えば、カラーフィルタ等の光を透過させる層で形成されている。すなわち、光センサ部4においては、上面に形成されたこの光を透過させる層が開口面となる。   On the upper surface of the photosensor built-in display panel, the pixel aperture 2 and the aperture surface of the photosensor unit 4 are surrounded by a black matrix 3. The aperture surfaces of the pixel aperture 2 and the optical sensor unit 4 are formed of a layer that transmits light, such as a color filter, for example. That is, in the optical sensor unit 4, the layer formed on the upper surface that transmits this light is the opening surface.

図2を参照して、光センサ部4を上方から見た場合、ブラックマトリクス3に囲まれた領域が光を透過させる開口面7となっている。開口面7に垂直な方向において重なる位置に感光部6が設けられる。そして、開口面7と感光部6との間の空間の一部には、遮光部5が形成される。   Referring to FIG. 2, when the optical sensor unit 4 is viewed from above, an area surrounded by the black matrix 3 is an opening surface 7 through which light is transmitted. The photosensitive portion 6 is provided at a position overlapping in the direction perpendicular to the opening surface 7. A light shielding portion 5 is formed in a part of the space between the opening surface 7 and the photosensitive portion 6.

図3を参照して、光センサ内蔵表示パネルは、アクティブマトリクス基板100と、対向基板200と、これらの間に挟まれた液晶10とを備える。すなわち、アクティブマトリクス基板100は、全面に対向基板200と貼り合わされ、その間隙に液晶10が封入される。   Referring to FIG. 3, the display panel with a built-in optical sensor includes an active matrix substrate 100, a counter substrate 200, and a liquid crystal 10 sandwiched therebetween. That is, the active matrix substrate 100 is bonded to the counter substrate 200 on the entire surface, and the liquid crystal 10 is sealed in the gap.

対向基板200では、ガラス基板(図示省略)上に、ブラックマトリクス3とカラーフィルタ8を含むカラーフィルタ層、およびITO等の対向電極9等が形成される。アクティブマトリクス基板100では、ガラス基板(図示省略)上に、シリコン膜17、絶縁膜15、16、平坦化膜12および画素電極11等が形成される。画素電極11もITOで形成することができる。なお、図3においては、配向膜の図示を省略している。図3に示す膜の他にも、適宜膜が形成されてもよい。   In the counter substrate 200, a color filter layer including the black matrix 3 and the color filter 8, a counter electrode 9 such as ITO, and the like are formed on a glass substrate (not shown). In the active matrix substrate 100, the silicon film 17, the insulating films 15 and 16, the planarization film 12, the pixel electrode 11, and the like are formed on a glass substrate (not shown). The pixel electrode 11 can also be formed of ITO. In FIG. 3, the alignment film is not shown. In addition to the film shown in FIG. 3, a film may be appropriately formed.

画素電極11は、例えば、TFT(図示せず)によって駆動される。TFTを介して画素電極11を駆動するための信号を伝送するためのゲートエレクトロード(ゲート配線)14およびソース配線(ソースエレクトロード)13が、絶縁膜15、16の上に、それぞれ設けられる。   The pixel electrode 11 is driven by, for example, a TFT (not shown). A gate electrode (gate wiring) 14 and a source wiring (source electrode) 13 for transmitting a signal for driving the pixel electrode 11 via the TFT are provided on the insulating films 15 and 16, respectively.

平坦化膜12は、液晶10を挟む領域(液晶10に接する面)を平坦にするための膜である。液晶10を挟む領域を平坦化することにより、液晶の視野角を広げることができる。平坦化膜12には、遮光部5が埋め込まれている。   The flattening film 12 is a film for flattening a region (a surface in contact with the liquid crystal 10) sandwiching the liquid crystal 10. By flattening the region sandwiching the liquid crystal 10, the viewing angle of the liquid crystal can be widened. The light shielding part 5 is embedded in the planarizing film 12.

遮光部5は、光が透過しにくく、かつ、反射もしにくい材料で形成されることが好ましい。例えば、OD(Optical Density,光学濃度)値の高い有機膜で遮光部5を形成することが好ましいが、遮光部5を金属膜で形成することもできる。   The light-shielding part 5 is preferably formed of a material that hardly transmits light and is also difficult to reflect. For example, it is preferable to form the light shielding portion 5 with an organic film having a high OD (Optical Density) value, but the light shielding portion 5 can also be formed with a metal film.

また、遮光部5は、開口面7と感光部6との間に設けられ、開口面から入射した光の一部を遮る。図2および図3に示す例では、遮光部5は、感光部6の中央部6a上方の中央空間20を囲むように形成される。遮光部5により囲まれる中央空間20では、光が透過可能である。感光部6の中央部6aは、光を検知する領域における中央付近である。   The light shielding portion 5 is provided between the opening surface 7 and the photosensitive portion 6 and blocks a part of light incident from the opening surface. In the example shown in FIGS. 2 and 3, the light shielding portion 5 is formed so as to surround the central space 20 above the central portion 6 a of the photosensitive portion 6. In the central space 20 surrounded by the light shielding portion 5, light can be transmitted. The central portion 6a of the photosensitive portion 6 is near the center in the light detection region.

また、遮光部5は、開口面7に垂直な側面と、開口面7に水平な上面および底面を備えている。さらに、遮光部5の上面と開口面7との距離よりも、遮光部5の上面と感光部6との距離の方が短くなる位置に、遮光部5は設けられることが好ましい。本実施形態では、遮光部5を感光部6との距離を短くするためアクティブマトリクス基板100側に遮光部5が設けられる。   The light shielding portion 5 includes a side surface perpendicular to the opening surface 7 and a top surface and a bottom surface horizontal to the opening surface 7. Furthermore, it is preferable that the light shielding unit 5 is provided at a position where the distance between the upper surface of the light shielding unit 5 and the photosensitive unit 6 is shorter than the distance between the upper surface of the light shielding unit 5 and the opening surface 7. In the present embodiment, the light shielding unit 5 is provided on the active matrix substrate 100 side in order to shorten the distance between the light shielding unit 5 and the photosensitive unit 6.

アクティブマトリクス基板100の光センサ部4においては、シリコン膜17によって、光センサ部4の光検出素子であるフォトダイオードが形成されている。図3に示す例では、フォトダイオードは、ラテラル構造のPINダイオードであり、面方向に沿って順に配置された、p型の半導体領域(p層)17aと、真性半導体領域(i層)17bと、n型の半導体領域(n層)17cとを備えている。本実施形態では、p-i接合部からn-i接合部が感光部6となっている。すなわち、感光部は、光検出素子において光を検知する部分である。なお、本実施形態で、「真性半導体領域」は、隣接するp型の半導体領域およびn型の半導体領域に比べて電気的に中性に近い領域であれば良く、例えば、不純物を全く含まない領域や、伝導電子密度と正孔密度とが等しい領域であるのが好ましい。   In the photosensor unit 4 of the active matrix substrate 100, a photodiode that is a photodetection element of the photosensor unit 4 is formed by the silicon film 17. In the example shown in FIG. 3, the photodiode is a lateral structure PIN diode, and is arranged in order along the surface direction, a p-type semiconductor region (p layer) 17a, an intrinsic semiconductor region (i layer) 17b, And an n-type semiconductor region (n layer) 17c. In the present embodiment, the photosensitive region 6 is formed from the p-i junction to the n-i junction. In other words, the photosensitive portion is a portion that detects light in the light detection element. In the present embodiment, the “intrinsic semiconductor region” may be a region that is electrically neutral compared to the adjacent p-type semiconductor region and n-type semiconductor region, and does not contain any impurities, for example. It is preferable that the region or the region where the conduction electron density and the hole density are equal.

開口面7からの入射光が感光部6に達すると、入射光の光量に応じてフォトダイオードのアノード、カソード間に電流が流れる。アノード、カソード間を流れた電荷の量を、後段の回路で検出することにより、光センサの機能が実現する。例えば、フォトダイオードのアノード、カソード間の導通による電荷を取り出して出力する出力回路(図示せず)が画素ごとに形成される。   When incident light from the opening surface 7 reaches the photosensitive portion 6, a current flows between the anode and cathode of the photodiode in accordance with the amount of incident light. The function of the optical sensor is realized by detecting the amount of electric charge flowing between the anode and the cathode by a circuit in the subsequent stage. For example, an output circuit (not shown) that extracts and outputs electric charges due to conduction between the anode and cathode of a photodiode is formed for each pixel.

後段の回路においては、例えば、一定時間にアノード、カソード間に流れた電荷の量が閾値を超えたか否かにより、開口面の遮蔽の有無を判断することができる。具体的には、開口面7が全面開放されている場合のフォトダイオードのアノード、カソード間に流れる電荷の量を基準として、電荷の量が所定量減った場合に、開口面7が遮蔽されたと判断することができる。   In the subsequent circuit, for example, whether or not the opening surface is shielded can be determined based on whether or not the amount of electric charge flowing between the anode and the cathode exceeds a threshold value in a certain time. Specifically, the opening surface 7 is shielded when the amount of charge is reduced by a predetermined amount on the basis of the amount of charge flowing between the anode and cathode of the photodiode when the opening surface 7 is fully open. Judgment can be made.

図1〜3に示す画素領域を有する光センサ内蔵表示パネルの背面にバックライト(図示せず)を設置することにより、透過型の液晶表示装置が構成される。ここでは図示しないが、光センサ内蔵表示パネルの両面には、偏光子および検光子として機能する一対の偏光板や、種々の光学補償フィルム等が配置されてもよい。なお、図3においては、構造をわかりやすく示すために、光センサ内蔵表示パネルの内部構成を拡大して図示している。   A transmissive liquid crystal display device is configured by installing a backlight (not shown) on the back of the display panel with a built-in optical sensor having the pixel region shown in FIGS. Although not shown here, a pair of polarizing plates functioning as a polarizer and an analyzer, various optical compensation films, and the like may be disposed on both surfaces of the display panel with a built-in optical sensor. In FIG. 3, the internal structure of the display panel with a built-in optical sensor is enlarged to show the structure in an easy-to-understand manner.

[遮光部の構成例]
図4は、遮光部の好ましい配置について説明するための図である。図4は、開口面7に垂直な面であって、かつ、フォトダイオードのp層(第1半導体領域)とi層(真性半導体領域)との境界線およびn層(前記第2半導体領域)とi層との境界線外に垂直な面における断面図である。
[Configuration example of light-shielding part]
FIG. 4 is a diagram for explaining a preferred arrangement of the light shielding portions. FIG. 4 shows a plane perpendicular to the opening surface 7 and the boundary line between the p layer (first semiconductor region) and the i layer (intrinsic semiconductor region) and the n layer (second semiconductor region) of the photodiode. It is sectional drawing in a surface perpendicular | vertical outside the boundary line of i and i layer.

なお、図4に示す断面は、開口面7に垂直で、フォトダイオードの順方向に平行な面の断面と言うこともできる。また、感光部6(i層)は矩形であり、上記断面は、この矩形の一辺に平行な断面と言うこともできる。図4に示す断面では、開口面7の端C、Dは、カラーマトリクス8とブラックマトリクス3との境界となっている。感光部6の一方の端Aは、i層17bとn層17cとの境界であり、感光部6の他方の端Bは、i層17bとn層17cとの境界である。   Note that the cross section shown in FIG. 4 can be said to be a cross section of a plane perpendicular to the opening surface 7 and parallel to the forward direction of the photodiode. Further, the photosensitive portion 6 (i layer) is rectangular, and the cross section can be said to be a cross section parallel to one side of the rectangle. In the cross section shown in FIG. 4, the ends C and D of the opening surface 7 are boundaries between the color matrix 8 and the black matrix 3. One end A of the photosensitive portion 6 is a boundary between the i layer 17b and the n layer 17c, and the other end B of the photosensitive portion 6 is a boundary between the i layer 17b and the n layer 17c.

本実施形態において遮光部は、感光部6の中央部分6aの上方の中央空間20を囲むように形成されているので、図4に示す断面においては、遮光部5は、2つの遮光領域5−1、5−2となる。また、遮光部5は、開口面7に垂直な側面と、開口面7に水平な上面および底面を有するので、図4に示す断面においては、遮光領域5−1および遮光領域5−2は、開口面7に平行な上面境界および底面境界境界、並びに開口面7に垂直な側面境界を有している。   In the present embodiment, since the light shielding portion is formed so as to surround the central space 20 above the central portion 6a of the photosensitive portion 6, in the cross section shown in FIG. 1, 5-2. Moreover, since the light shielding part 5 has a side surface perpendicular to the opening surface 7 and a top surface and a bottom surface horizontal to the opening surface 7, the light shielding region 5-1 and the light shielding region 5-2 in the cross section shown in FIG. An upper surface boundary and a bottom surface boundary boundary parallel to the opening surface 7 and a side surface boundary perpendicular to the opening surface 7 are provided.

図4に示す例では、開口面7のp層17a側の端Cと、感光部6の両端ABのうち、開口面7の端Cから遠い方の端Bとを通る線に重なる位置に、遮光領域5−2が配置される。同様に、遮光領域5−1は、開口面7のn層17c側の端Dと、感光部6の両端ABのうち、端Dから遠い方の端Aとを通る線に重なる位置に配置される。   In the example shown in FIG. 4, at the position overlapping the line passing through the end C on the p-layer 17 a side of the opening surface 7 and the end B far from the end C of the opening surface 7 among the both ends AB of the photosensitive portion 6. A light shielding region 5-2 is arranged. Similarly, the light shielding region 5-1 is disposed at a position overlapping with a line passing through the end D on the n layer 17c side of the opening surface 7 and the end A far from the end D among both ends AB of the photosensitive portion 6. The

このように、開口部7の端と、反対側の感光部6の端とを通る線に遮光領域が重なるように、遮光領域の位置を決めることで、開口部7から斜めに入射した光が、感光部6の全面に渡って当ることを効果的に避けることができる。また、直線CBが遮光領域5−2の上面境界IJに交わり、かつ、直線DAが遮光領域5−1の上面境界EFと交わるように、遮光領域5−1、5−2の上面境界を配置することによっても、開口部7から斜めに入射した光を効果的に遮断することができる。   Thus, by determining the position of the light shielding region so that the light shielding region overlaps the line passing through the end of the opening 7 and the end of the photosensitive portion 6 on the opposite side, light incident obliquely from the opening 7 can be obtained. It is possible to effectively avoid hitting the entire surface of the photosensitive portion 6. Further, the upper surface boundaries of the light shielding regions 5-1 and 5-2 are arranged so that the straight line CB intersects with the upper surface boundary IJ of the light shielding region 5-2 and the straight line DA intersects with the upper surface boundary EF of the light shielding region 5-1. By doing so, the light incident obliquely from the opening 7 can be effectively blocked.

さらに、図4に示す例では、遮光領域5−2の中央空間20に接する側面境界IKは、開口部7のp層17a側の端Cと、遮光領域5−1の上面の中央空間20側の端Fとを通る線CFと交わる位置に形成される。遮光領域5−1の中央空間20に接する側面境界FHは、開口部7のn層17c側の端Dと、遮光領域5−2の上面の中央空間20側の端Iとを通る線DIと交わる位置に形成される。このように、一方の遮光領域の中央空間20に接する側面境界の位置を、他方の遮光領域側の開口部の端と、当該他方の遮光領域の上面の中央領域側の端とを通る線が上記側面境界と交わる位置に配置することができる。これにより、開口部7の端から、中央領域に斜めに入射した光が感光部6に当るのを効果的に遮ることができる。   Furthermore, in the example shown in FIG. 4, the side boundary IK in contact with the central space 20 of the light shielding region 5-2 is the end C on the p layer 17a side of the opening 7 and the central space 20 side of the upper surface of the light shielding region 5-1. Is formed at a position that intersects the line CF passing through the end F of the. The side boundary FH in contact with the central space 20 of the light shielding region 5-1 is a line DI passing through the end D of the opening 7 on the n layer 17c side and the end I of the upper surface of the light shielding region 5-2 on the central space 20 side. It is formed at the intersecting position. In this way, the position of the side boundary in contact with the central space 20 of one light shielding region is a line passing through the end of the opening on the other light shielding region side and the end on the central region side of the upper surface of the other light shielding region. It can arrange | position in the position which cross | intersects the said side surface boundary. Thereby, it is possible to effectively block the light incident obliquely on the central region from the end of the opening 7 from hitting the photosensitive portion 6.

図5は、遮光部5を設けない場合の漏れ光の入射状態を示す図であり、図6は、遮光部5を設けた場合の漏れ光の入射状態を示す図である。図5および図6は、指やペン等の遮蔽物18で開口面7が塞がれた場合の例を示している。図5に示す例では、開口面7において遮蔽物18で覆われていない部分から入射した漏れ光は感光部6全体に当たっている。これに対して、図6に示す例では、漏れ光の一部は、遮光部5に遮られて感光部6に達しない。そのため、感光部6の一部Mにのみ、漏れ光が当たることになる。このように、遮光部5を設けることによって、漏れ光の感光部6への照射範囲が狭くなる。また、遮光部5がない場合(図5に示す場合)の感光部6へ達しうる入射光の範囲N1に比べて、遮光部5がある場合(図6に示す場合)の感光部6へ達し得る入射光の範囲N2は、より狭くなっている。   FIG. 5 is a diagram illustrating an incident state of leakage light when the light shielding unit 5 is not provided, and FIG. 6 is a diagram illustrating an incident state of leakage light when the light shielding unit 5 is provided. 5 and 6 show an example in which the opening surface 7 is blocked by a shield 18 such as a finger or a pen. In the example shown in FIG. 5, the leaked light that has entered from the portion of the opening surface 7 that is not covered with the shield 18 hits the entire photosensitive portion 6. On the other hand, in the example shown in FIG. 6, part of the leaked light is blocked by the light blocking portion 5 and does not reach the photosensitive portion 6. Therefore, only the part M of the photosensitive portion 6 is exposed to leaked light. As described above, by providing the light shielding portion 5, the irradiation range of the leaked light to the photosensitive portion 6 is narrowed. Further, compared to the range N1 of incident light that can reach the photosensitive portion 6 when there is no light shielding portion 5 (in the case shown in FIG. 5), it reaches the photosensitive portion 6 when there is the light shielding portion 5 (in the case shown in FIG. 6). The range of incident light N2 to be obtained is narrower.

このように、感光部6への達する入射光の入射角の範囲が制限されることで、遮蔽物18で塞がれた状態と、塞がれていない状態とで、感光部6が感光する光量の差が拡大する。その結果、例えば、遮蔽物がない通常状態(明)に対して、遮蔽物18の遮蔽による暗を検知する場合に、明暗の区別をつけやすくなるので、漏れ光による光センサの誤動作が抑制される。   As described above, the range of the incident angle of the incident light reaching the photosensitive unit 6 is limited, so that the photosensitive unit 6 is exposed in a state where it is blocked by the shielding object 18 and in a state where it is not blocked. The difference in light intensity increases. As a result, for example, when detecting darkness due to the shielding of the shielding object 18 with respect to a normal state (bright) where there is no shielding object, it becomes easy to distinguish between light and dark, so that the malfunction of the optical sensor due to leakage light is suppressed. The

例えば、ユーザが指などで完全に開口面7を遮蔽したつもりでも、隙間があいている場合が少なくない。このような開口面7の不完全な遮蔽がなされた場合、遮光部5がないと、フォトダイオードの光感度等の特性や入射光の光量によっては、漏れ光が感光部6に当ってフォトダイオードに電流が流れて、遮蔽なしと判断されてしまう。すなわち、光センサとして遮蔽状態を検知をするべきところが、通常状態のままとなる。これは、主に、開口面7の不完全な遮蔽時と、開口面7の全面開放時とで、感光部6における感光量の差が小さくなることに起因する。   For example, even if the user intends to completely cover the opening surface 7 with a finger or the like, there are many cases where there is a gap. When such an incomplete shielding of the opening surface 7 is made, if there is no light shielding portion 5, depending on the characteristics such as the photosensitivity of the photodiode and the amount of incident light, the leaked light hits the photosensitive portion 6 and the photodiode. A current flows through and it is determined that there is no shielding. That is, the place where the shielding state should be detected as an optical sensor remains in the normal state. This is mainly due to the difference in the amount of light exposure in the photosensitive portion 6 between the incomplete shielding of the opening surface 7 and the opening of the entire opening surface 7.

これに対して、本実施形態のように、開口面7と感光部6の間の平坦化膜12に遮光部5を設けることで、不完全遮蔽時の漏れ光がフォトダイオードの感光部6に達しにくくなる。そのため、開口面7の不完全遮蔽時と全面開放時とで、感光部6における感光量の差が大きくなる。その結果、光センサの誤動作を抑制することができる。   On the other hand, as in the present embodiment, by providing the light-shielding portion 5 on the planarizing film 12 between the opening surface 7 and the photosensitive portion 6, leakage light at the time of incomplete shielding is applied to the photosensitive portion 6 of the photodiode. It becomes difficult to reach. For this reason, the difference in the amount of light in the photosensitive portion 6 becomes large when the opening surface 7 is incompletely shielded and when the entire surface is opened. As a result, malfunction of the optical sensor can be suppressed.

なお、全面開放時と、不完全遮蔽時との感光量の差を大きくするためには、開口面7の全面開放時の感光量は多い方が好ましい。そのため、遮光部5は、全面開放時は感光部6への光をなるべく遮らず、不完全遮蔽時には、感光部6への光をなるべく遮るように配置されることが好ましい。そのための適切な配置の一例として、本実施形態では、遮光部5は、感光部5の中央部分上方の空間を囲むように設けられ、開口面7に垂直な方向に延びる側面と開口面7に平行な上面を有している。また、不完全遮蔽時の漏れ光を効率よく遮断する観点から、遮光部5は、なるべく感光部6に近い位置に設けることが好ましい。さらに、開口部7の両端の位置、および感光部6の両端の位置とを考慮して、遮光部5を配置することで、適切な配置が可能になる。   In order to increase the difference in the amount of exposure between when the entire surface is opened and when it is incompletely shielded, it is preferable that the amount of exposure when the opening surface 7 is fully opened is large. Therefore, it is preferable that the light shielding unit 5 is arranged so as not to block the light to the photosensitive unit 6 as much as possible when the entire surface is opened, and to block the light to the photosensitive unit 6 as much as possible when incompletely blocked. As an example of an appropriate arrangement for that purpose, in the present embodiment, the light shielding portion 5 is provided so as to surround the space above the central portion of the photosensitive portion 5, and extends to the side surface and the opening surface 7 extending in a direction perpendicular to the opening surface 7. It has a parallel upper surface. Moreover, it is preferable to provide the light shielding part 5 at a position as close to the photosensitive part 6 as possible from the viewpoint of efficiently blocking light leaking during incomplete shielding. Furthermore, the arrangement of the light-shielding part 5 in consideration of the positions of both ends of the opening 7 and the positions of both ends of the photosensitive part 6 enables appropriate arrangement.

なお、図4の断面において示した上記遮光領域5−1、5−2の配置は、好適な一例であり、必ずしも、上記の条件を満たす配置である必要はない。例えば、開口部7の全面開放時に感光部5で検出される光量の確保を重視する場合は、遮光領域5−1、5−2の上面は狭くし、中央空間20を広くすることができる。   In addition, arrangement | positioning of the said light shielding area | region 5-1 and 5-2 shown in the cross section of FIG. 4 is a suitable example, and does not necessarily need to be the arrangement | positioning which satisfy | fills said conditions. For example, when emphasis is placed on securing the amount of light detected by the photosensitive unit 5 when the opening 7 is fully opened, the upper surfaces of the light shielding regions 5-1 and 5-2 can be narrowed and the central space 20 can be widened.

また、遮光部5により、不完全遮蔽時の光の入射角をどの程度制限するかは、例えば、感光部6の感度やその他の条件に応じて決定することができる。例えば、遮光部5の上面または底面の断面積や、開口面7に垂直な方向の長さ、または中央空間の広さ等を、感光部6の感度等に応じて決定することができる。なお、感光部6がフォトダイオードであれば、感光部の感度は、例えば、アノードとカソードとを導通させるに至る光エネルギーと考えることができる。   In addition, how much the incident angle of light at the time of incomplete shielding is limited by the light shielding unit 5 can be determined according to the sensitivity of the photosensitive unit 6 and other conditions, for example. For example, the cross-sectional area of the top surface or the bottom surface of the light shielding portion 5, the length in the direction perpendicular to the opening surface 7, the width of the central space, or the like can be determined according to the sensitivity of the photosensitive portion 6. If the photosensitive portion 6 is a photodiode, the sensitivity of the photosensitive portion can be considered as, for example, light energy that leads to conduction between the anode and the cathode.

[製造工程]
図7は、図3に示す遮光部5の製造工程を説明するための図である。図7に示す例は、平坦化膜12形成時に凹形状を形成し、そこに樹脂材を流し込み、表面をアルカリ洗浄することで、遮光部5を形成するものである。なお、遮光部5の製造工程は図7の例に限られない。
[Manufacturing process]
FIG. 7 is a diagram for explaining a manufacturing process of the light shielding portion 5 shown in FIG. In the example shown in FIG. 7, a concave shape is formed when the planarizing film 12 is formed, a resin material is poured therein, and the surface is washed with alkali to form the light shielding portion 5. In addition, the manufacturing process of the light-shielding part 5 is not restricted to the example of FIG.

図7に示す例では、まず、シリコン膜17、絶縁膜16、ゲート配線14、絶縁膜15、ソース配線13が下から順に形成され、その上に平坦化膜12が塗布される(図7(a))。次に、平坦化膜12が加工される(図7(b))。すなわち、遮光部5を形成するための凹部12a、12bが平坦化膜12に形成される。ここでは、一例として、断面矩形の凹部12a、12bが形成される。この凹部12a、12bに、遮光部5を形成する樹脂材が流し込まれる(図7(c))。その後、平坦化膜12表面についた余分な樹脂材が、アルカリ洗浄により除去される(図7(d))。平坦化膜12内に残った樹脂材が遮光部5となる。平坦化膜12の上には、画素電極11としてITOが形成される(図7(e))。さらに、配向膜(図示せず)などその他必要な膜を形成することにより、アクティブマトリクス基板100(TFT側基板)が完成する。   In the example shown in FIG. 7, first, a silicon film 17, an insulating film 16, a gate wiring 14, an insulating film 15, and a source wiring 13 are formed in order from the bottom, and a planarizing film 12 is applied thereon (FIG. 7 ( a)). Next, the planarizing film 12 is processed (FIG. 7B). That is, the concave portions 12 a and 12 b for forming the light shielding portion 5 are formed in the planarizing film 12. Here, as an example, recesses 12a and 12b having a rectangular cross section are formed. A resin material for forming the light shielding portion 5 is poured into the recesses 12a and 12b (FIG. 7C). Thereafter, excess resin material on the surface of the planarizing film 12 is removed by alkali cleaning (FIG. 7D). The resin material remaining in the planarizing film 12 becomes the light shielding portion 5. On the planarizing film 12, ITO is formed as the pixel electrode 11 (FIG. 7E). Further, by forming other necessary films such as an alignment film (not shown), the active matrix substrate 100 (TFT side substrate) is completed.

(遮光部の変形例1)
図8は、遮光部の変形例を示す断面図である。図9は、当該変形例を示す平面図である。図8および図9に示す遮光部50a、50bは、図2および図3に示す遮光部5が空間19によって2つに分割された形状である。遮光部50aは、開口面7に垂直な壁で中央空間20を囲むよう形成される。遮光部50bは、開口面7に垂直な壁で遮光部50bおよびその外側の空間19を囲むように形成される。すなわち、本変形例の遮光部は、中央空間20を、二重に取り囲むように形成される。これにより、開口面7の開放時に垂直に入射して感光部6に達する光の量を多くしながらも、開口面7の不完全遮蔽時に斜めに入射して感光部6に達する光の量を少なくすることができる。
(Modification 1 of light shielding part)
FIG. 8 is a cross-sectional view showing a modification of the light shielding portion. FIG. 9 is a plan view showing the modification. The light shielding parts 50a and 50b shown in FIGS. 8 and 9 have a shape in which the light shielding part 5 shown in FIGS. The light shielding part 50 a is formed so as to surround the central space 20 with a wall perpendicular to the opening surface 7. The light shielding part 50 b is formed so as to surround the light shielding part 50 b and the outer space 19 with a wall perpendicular to the opening surface 7. That is, the light shielding part of the present modification is formed so as to surround the central space 20 twice. Thus, while increasing the amount of light that vertically enters and reaches the photosensitive portion 6 when the aperture surface 7 is opened, the amount of light that enters obliquely and reaches the photosensitive portion 6 when the aperture surface 7 is incompletely shielded is reduced. Can be reduced.

(遮光部の変形例2)
図10は、遮光部の他の変形例を示す上面図である。図10に示す遮光部51は開口面7に垂直な方向に延びる円筒形に形成されている。すなわち、遮光部51は、円柱上の中央領域20を囲む壁(円角柱)として形成される。なお、図10に示す例では、遮光部51の開口面7に平行な面における断面形状は、真円ではなく楕円である。この楕円の扁平率は、例えば、開口面7(ブラックマトリクス3)の縦と横の比率に応じて決定されてもよい。なお、遮光部51の断面形状は、図3とほぼ同様となる。
(Modification 2 of light shielding part)
FIG. 10 is a top view showing another modification of the light shielding portion. The light shielding portion 51 shown in FIG. 10 is formed in a cylindrical shape extending in a direction perpendicular to the opening surface 7. That is, the light shielding part 51 is formed as a wall (circular prism) surrounding the central region 20 on the cylinder. In the example shown in FIG. 10, the cross-sectional shape in the plane parallel to the opening surface 7 of the light shielding portion 51 is not a perfect circle but an ellipse. The oblateness of the ellipse may be determined according to, for example, the ratio between the vertical and horizontal dimensions of the opening surface 7 (black matrix 3). Note that the cross-sectional shape of the light shielding portion 51 is substantially the same as that in FIG.

(遮光部の変形例3)
図11は、遮光部のさらに他の変形例を示す上面図である。図11に示す遮光部52は、開口面7に垂直な方向に延びる複数の四角柱によって光を透過する領域を囲むように形成されている。このように、複数の柱の組み合わせにより遮光部を形成することもできる。図11に示す遮光部52の断面形状も、図3とほぼ同様となる。また、複数の柱それぞれの中央部に光透過可能な材料を埋め込んでもよい。これにより、開口面7の全面開放時に垂直に入射して感光部6に達する光の量を増やすことができるとともに、不完全遮蔽時に斜めに入射する光が感光部6に達するのを遮ることができる。
(Modification 3 of light shielding part)
FIG. 11 is a top view showing still another modified example of the light shielding portion. The light shielding portion 52 shown in FIG. 11 is formed so as to surround an area where light is transmitted by a plurality of square pillars extending in a direction perpendicular to the opening surface 7. In this way, the light shielding portion can be formed by a combination of a plurality of columns. The cross-sectional shape of the light shielding portion 52 shown in FIG. 11 is also substantially the same as that in FIG. In addition, a light transmissive material may be embedded in the center of each of the plurality of pillars. This can increase the amount of light that enters perpendicularly when the opening surface 7 is fully open and reaches the photosensitive portion 6, and can block light incident obliquely from reaching the photosensitive portion 6 during incomplete shielding. it can.

(遮光部の変形例4)
図12は、遮光部のさらなる他の変形例を示す上面図である。当該変形例では、遮光部53a、中央空間20、遮光部53bが開口面7に平行な面上に1列に並ぶように形成される。すなわち、開口面7に垂直な方向に延びる四角柱の遮光部53a、53bが、中央空間20を両側から挟む位置に設けられる。このように、1つの方向において中央空間を挟むように遮光部を配置することによっても、開口面7の不完全遮蔽時の漏れ光を感光部6に届きにくくすることができる。なお、遮光部53a、53bの断面形状も、図3と同様になる。
(Modification 4 of light shielding part)
FIG. 12 is a top view showing still another modification of the light shielding portion. In the modification, the light shielding portions 53 a, the central space 20, and the light shielding portions 53 b are formed so as to be arranged in a line on a plane parallel to the opening surface 7. That is, quadrangular prism light-shielding portions 53 a and 53 b extending in a direction perpendicular to the opening surface 7 are provided at positions sandwiching the central space 20 from both sides. As described above, by arranging the light shielding portion so as to sandwich the central space in one direction, it is possible to make it difficult for light leaked when the opening surface 7 is incompletely shielded to reach the photosensitive portion 6. The cross-sectional shapes of the light shielding portions 53a and 53b are the same as those in FIG.

以上、本発明についての一実施形態を説明したが、本発明は上述の具体例にのみ限定されず、発明の範囲内で種々の変更が可能である。   As mentioned above, although one Embodiment about this invention was described, this invention is not limited only to the above-mentioned specific example, A various change is possible within the scope of the invention.

例えば、上記の実施形態においては、平坦化膜12に遮光部5が設けられているが、遮光部5を設ける位置は平坦化膜12に限られない。例えば、絶縁膜15、16に遮光部5が設けられてよい。   For example, in the above embodiment, the light shielding part 5 is provided in the planarizing film 12, but the position where the light shielding part 5 is provided is not limited to the planarizing film 12. For example, the light shielding portion 5 may be provided in the insulating films 15 and 16.

また、上記実施形態では、遮光部は平坦化膜12を貫通するように設けられているが、必ずしも貫通する必要はない。例えば、平坦化膜12を貫通しない穴を形成し、その穴に樹脂材を流し込むことによって遮光部を形成することもできる。また、遮光部は、必ずしもアクティブマトリクス基板100に設けられる必要はなく、例えば、対向基板200に設けられてもよい。また、遮光部の配置は、中央空間を囲む場合に限られず、例えば、中央部に遮光部が設けられる構成であってもよい。   Moreover, in the said embodiment, although the light-shielding part is provided so that it may penetrate the planarization film | membrane 12, it does not necessarily need to penetrate. For example, the light shielding portion can be formed by forming a hole that does not penetrate the planarizing film 12 and pouring a resin material into the hole. Further, the light shielding portion is not necessarily provided on the active matrix substrate 100, and may be provided on the counter substrate 200, for example. Further, the arrangement of the light shielding portion is not limited to the case of surrounding the central space, and for example, a configuration in which the light shielding portion is provided in the central portion may be employed.

また、光センサ部4は、必ずしも全画素に設けられている必要はない。例えば、1行おき、あるいは1列おきに光センサ部が形成されてもよい。   Further, the optical sensor unit 4 is not necessarily provided in all pixels. For example, the optical sensor unit may be formed every other row or every other column.

また、フォトダイオードは、上記実施形態に示したラテラル構造のPINダイオードに限られない。例えば、PNダイオード、アバランシェフォトダイオード、GaAsPフォトダイオード、InPフォトダイオード等を、上記フォトダイオードの代わりに用いても、同様の効果を得ることができる。   The photodiode is not limited to the lateral structure PIN diode shown in the above embodiment. For example, the same effect can be obtained even when a PN diode, an avalanche photodiode, a GaAsP photodiode, an InP photodiode, or the like is used instead of the photodiode.

1 画素領域
2 画素開口部
3 ブラックマトリクス
4 光センサ部
5、50、51、52 遮光部
6 感光部
7 開口面
8 カラーフィルタ
9 対向電極
10 液晶
11 画素電極
12 平坦化膜
12a、12b 凹部
13 ソース配線
14 ゲート配線
15 絶縁膜
16 絶縁膜
17 シリコン膜
18 遮蔽物
100 アクティブマトリクス基板
200 対向基板
DESCRIPTION OF SYMBOLS 1 Pixel region 2 Pixel opening part 3 Black matrix 4 Optical sensor part 5, 50, 51, 52 Light-shielding part 6 Photosensitive part 7 Opening surface 8 Color filter 9 Counter electrode 10 Liquid crystal 11 Pixel electrode 12 Flattening film 12a, 12b Recessed part 13 Source Wiring 14 Gate wiring 15 Insulating film 16 Insulating film 17 Silicon film 18 Shielding object 100 Active matrix substrate 200 Counter substrate

Claims (7)

マトリクス状に画素が配置された画素領域を有し、前記画素領域の少なくとも一部に光センサ部が形成された光センサ内蔵表示パネルであって、
前記光センサ部は、
前記画素領域の少なくとも一部の表面に設けられた開口面と、
前記開口面を透過して入射する光を検出する感光部と、
前記開口面と感光部との間に設けられ、前記開口面から入射した光の一部を遮る遮光部とを備える、光センサ内蔵表示パネル。
A display panel with a built-in photosensor having a pixel region in which pixels are arranged in a matrix, and having a photosensor portion formed in at least a part of the pixel region,
The optical sensor unit is
An opening surface provided on at least a part of the surface of the pixel region;
A photosensitive part that detects light incident through the aperture;
A display panel with a built-in optical sensor, comprising: a light-shielding portion that is provided between the opening surface and the photosensitive portion and blocks a part of light incident from the opening surface.
前記遮光部は、前記感光部の中央部分上方の空間を囲むように設けられる、請求項1に記載の光センサ内蔵表示パネル。   The display panel with a built-in optical sensor according to claim 1, wherein the light shielding portion is provided so as to surround a space above a central portion of the photosensitive portion. 前記遮光部は、前記開口面に対して垂直な方向に延びる側面と、前記開口面に平行な上面を有する、請求項1または2に記載の光センサ内蔵表示パネル。   3. The display panel with a built-in optical sensor according to claim 1, wherein the light shielding portion has a side surface extending in a direction perpendicular to the opening surface and an upper surface parallel to the opening surface. 前記感光部と前記遮光部の前記上面との距離が、前記開口面と前記上面との距離よりも短くなる位置に、前記遮光部が配置される、請求項1〜3のいずれか2項に記載の光センサ内蔵表示パネル。   The said light-shielding part is arrange | positioned in the position in which the distance of the said photosensitive part and the said upper surface of the said light-shielding part becomes shorter than the distance of the said opening surface and the said upper surface. The display panel with a built-in optical sensor. 前記感光部は、光を検知する矩形平面を有し、
前記開口面に垂直であり、かつ、前記矩形平面の少なくとも一辺に平行な面における断面において、
前記遮光部は、前記感光部の中央上方の中央領域を挟んで隣り合う第1の遮光領域と第2の遮光領域を有し、
前記第1の遮光領域および前記第2の遮光領域は、前記開口面に垂直な方向に延びる側面境界と、当該側面に垂直な上面境界とを有し、
前記第1の遮光領域は、前記断面における前記開口面の一方の端と、前記感光部の両端のうち、当該開口面の一方の端からの距離が長い方の端とを通る線と重なる位置に形成され、
前記第2の遮光領域は、前記断面における前記開口面の他方の端部と、前記感光部の両端のうち、当該開口面の他方の端部からの距離が長い方の端とを通る線と重なる位置に形成され、
前記第1の遮光領域の前記中央領域側の側面境界は、前記開口面の一方の端と、前記第2の遮光領域の上面境界の前記中央領域側の端とを結ぶ線と交わる位置に形成され、
前記第2の遮光領域の前記中央領域側の側面境界は、前記開口面の一方の端と、前記第2の遮光領域の上面境界の前記中央領域側の端とを結ぶ線と交わる位置に形成される、請求項1〜4のいずれか1項に記載の光センサ内蔵表示パネル。
The photosensitive part has a rectangular plane for detecting light,
In a cross section in a plane perpendicular to the opening surface and parallel to at least one side of the rectangular plane,
The light-shielding portion has a first light-shielding region and a second light-shielding region that are adjacent to each other with a central region above the center of the photosensitive portion interposed therebetween,
The first light-shielding region and the second light-shielding region have a side surface boundary extending in a direction perpendicular to the opening surface, and an upper surface boundary perpendicular to the side surface,
The first light-shielding region overlaps with a line passing through one end of the opening surface in the cross section and an end of the photosensitive portion having a longer distance from one end of the opening surface. Formed into
The second light-shielding region includes a line passing through the other end of the opening surface in the cross section and an end of the photosensitive portion having a longer distance from the other end of the opening surface. Formed in overlapping positions,
The side boundary on the central region side of the first light shielding region is formed at a position that intersects a line connecting one end of the opening surface and the end on the central region side of the upper surface boundary of the second light shielding region. And
The side boundary on the central region side of the second light shielding region is formed at a position where a line connecting one end of the opening surface and the end on the central region side of the upper surface boundary of the second light shielding region is formed. The display panel with a built-in optical sensor according to any one of claims 1 to 4.
前記アクティブマトリクス基板と、液晶層を介して対向する対向基板を備え、
前記開口面は前記対向基板側に設けられ、
前記感光部および前記遮光部は前記アクティブマトリクス基板側に設けられる、請求項1〜5のいずれか1項に記載の光センサ内蔵表示パネル。
A counter substrate facing the active matrix substrate via a liquid crystal layer;
The opening surface is provided on the counter substrate side,
The display panel with a built-in photosensor according to claim 1, wherein the photosensitive portion and the light shielding portion are provided on the active matrix substrate side.
請求項1〜6のいずれか1項に記載の光センサ内蔵表示パネルを含む表示装置。   The display apparatus containing the display panel with a built-in optical sensor of any one of Claims 1-6.
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Cited By (1)

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Publication number Priority date Publication date Assignee Title
JP2021527235A (en) * 2018-06-04 2021-10-11 イソルグ Device with image sensor and display screen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021527235A (en) * 2018-06-04 2021-10-11 イソルグ Device with image sensor and display screen
JP7320006B2 (en) 2018-06-04 2023-08-02 イソルグ Device with image sensor and display screen

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