JP2010223911A - Inspection analysis device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection analysis device for reducing a time required for detecting/removing a contamination on a substrate. <P>SOLUTION: The inspection analysis device for detecting the contamination deposited on the substrate, removing and analyzing the contamination includes: a detection unit 22 for detecting the contamination on the substrate; a memory 12 for storing an image data of the contamination detected by the detection unit 22; a classification unit 13 for classifying/organizing the contamination into its shape based on the image data; a contamination capturing unit 23 for capturing/removing the contamination deposited on the substrate; and an analysis unit 11 for identifying the contamination captured by the contamination capturing unit 23. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an inspection / analysis apparatus, and more particularly, to an inspection / analysis apparatus that detects foreign matter adhering to a substrate and removes and analyzes the foreign matter.

  Liquid crystal display devices are widely used mainly for applications requiring small size and light weight. The liquid crystal display device has, for example, a configuration in which an array substrate on which TFTs for driving pixel electrodes are formed and a color filter substrate are opposed to each other, and liquid crystal is sealed between the substrates. When a foreign substance adheres on the substrate constituting the liquid crystal display device, display defects such as alignment failure may occur.

  Therefore, a foreign matter removing apparatus that removes foreign matter on a substrate has been proposed. The foreign matter removing apparatuses described in Patent Documents 1 and 2 have foreign matter removing means provided with an adhesive member that adheres and removes foreign matter attached to the substrate.

JP-A-6-260464 JP 58-182826 A

  However, in the conventional foreign matter removing apparatus, some foreign matters are removed by the foreign matter removing means, although some types of foreign matter do not cause display defects. For this reason, there is a problem that the time required for manufacturing the display device becomes long.

  The present invention has been made against the background of such problems, and an object of the present invention is to provide an inspection analyzer capable of shortening the time taken to detect and remove foreign matter on a substrate.

  An inspection analyzer according to a first aspect of the present invention is an inspection analyzer that detects foreign matter adhering to a substrate, analyzes the foreign matter, and illuminates the foreign matter on the substrate with light. A detecting unit for detecting, a recording unit for recording the address and imaging data of the foreign object detected on the substrate, a classifying unit for classifying and organizing the foreign material according to its form based on the imaging data, and on the substrate A capture unit that captures and removes the attached foreign matter, and an analysis unit that identifies the composition and structure of the foreign matter captured by the capture unit. With such a configuration, it is possible to remove only foreign matters that cause defects by classifying and identifying foreign matters according to their forms.

  The inspection analyzer according to a second aspect of the present invention is the above-described inspection analyzer, wherein the substrate is a display device configuration substrate, the display device is manufactured by bonding the substrates, and the display device is electrically connected. And a display abnormality detecting unit that detects a display abnormality and identifies an address of the ideographic abnormality, and a comparison unit that compares the display abnormality and the address of the foreign object. With such a configuration, it is possible to remove foreign substances that cause defects by classifying and identifying foreign substances according to their forms, and it is possible to shorten the time required for manufacturing a display device. In addition, it is possible to determine whether or not the foreign matter identified by the analysis unit causes the display failure, and the cause of the failure can be specified more accurately.

  The inspection analyzer according to the third aspect of the present invention is the above-described inspection analyzer, wherein the capture unit includes a capture jig in which a polymer material is installed at the tip of a rod. Thereby, the capture jig can be brought into contact with only the local region where the foreign object is detected, and the foreign object can be captured.

  The inspection analyzer according to the fourth aspect of the present invention is characterized in that, in the above-described inspection analyzer, a wavelength of the illuminating light is 400 nm or less. Thereby, even if the polymer material of the capture jig is transferred onto the substrate, the transferred polymer material can be removed by irradiation with ultraviolet light having a wavelength of 400 nm or less.

  ADVANTAGE OF THE INVENTION According to this invention, the test | inspection analyzer which can shorten the time concerning the detection and removal of the foreign material on a board | substrate can be provided.

It is a figure which shows typically the structure of the test | inspection analyzer based on Embodiment 1. FIG. It is a figure which shows the structure of the capture jig used for the test | inspection analyzer based on Embodiment 1. FIG. It is a figure which shows typically the structure of the test | inspection analyzer based on Embodiment 2. FIG.

  Embodiments of the present invention will be described below with reference to the drawings. The following description shows preferred examples of the present invention, and the scope of the present invention is not limited to the following examples. In the following description, the same reference numerals denote the same contents.

Embodiment 1 FIG.
The configuration of the test analyzer according to Embodiment 1 of the present invention will be described with reference to FIG. FIG. 1 is a diagram showing a configuration of a test analyzer 100 according to the present embodiment. As shown in FIG. 1, the inspection analysis apparatus 10 includes an analysis unit 11, a storage unit 12, a classification unit 13, and a foreign substance inspection removal device 20. The foreign matter inspection / removal device 20 includes a stage 21, a detection unit 22, a foreign matter capture unit 23, and a movable mechanism 24.

  In the present embodiment, a glass substrate (hereinafter referred to as a substrate) that constitutes a liquid crystal display device is used as an object to be inspected. The liquid crystal display device has a configuration in which an array substrate on which TFTs for driving pixel electrodes are formed and a color filter substrate are opposed to each other, and liquid crystal is sealed between the substrates. Therefore, the array substrate and the color filter substrate are inspected. In addition, it is not restricted to a liquid crystal display device, It can apply similarly to another display device structure board | substrate.

  When a liquid crystal display device is manufactured using a substrate to which foreign substances that cause ionic impurities are attached, when the voltage of either the pixel electrode or the counter electrode continues to be high when an electric field is applied to the liquid crystal, There is a problem in that a small amount of ionic impurities contained in the liquid crystal agglomerates on either the pixel electrode side or the counter electrode side to cause display defects.

  On the other hand, for example, the fiber of the rubbing cloth used when performing the alignment treatment of the alignment film for aligning the liquid crystal is a degreased fiber and does not become a foreign matter that causes a display defect. The present invention classifies the foreign matter according to its shape, identifies the composition, structure, etc. of the foreign matter, and improves the inspection efficiency, thereby shortening the time required for manufacturing the liquid crystal display device.

  The foreign matter inspection and removal device 20 is a device that detects foreign matter on a substrate and removes the foreign matter. On the stage 21, a substrate which is an object to be inspected is placed. A movable mechanism 24 is provided on the upper and side portions of the stage 21. The movable mechanism 24 includes an upper movable portion 24a disposed on the stage 21 and a side movable portion 24b disposed on the side portion.

  A detection unit 22 is provided on the upper movable unit 24 a provided on the upper part of the stage 21. As the detection unit 22, for example, a microscope including a light source, an optical system, a photodetector, and the like is used. In addition, it is preferable that the detection part 22 is a confocal microscope provided with a confocal optical system. Thereby, it is possible to detect the three-dimensional shape of the foreign matter on the substrate with high resolution.

  As the illumination optical system that irradiates light on the substrate with light from the light source, an illumination optical system that irradiates incident illumination light from above the substrate can be used. It is also possible to use one that irradiates transmitted illumination light from below the substrate. Furthermore, these may be used in combination. The wavelength of light emitted from the light source is preferably 400 nm or less. Thereby, the resolution can be improved. Moreover, when the polymer material which is the adhesion part 25b of the capture jig | tool 25 mentioned later is transcribe | transferred on a board | substrate, it can be decomposed | disassembled and removed by irradiating the ultraviolet light with a wavelength of 400 nm or less. The light source may be one that emits light having a wavelength of 400 nm or less alone, or may be a combination of light of other wavelengths.

  A mercury lamp is used as the light source, and ultraviolet light can be obtained by splitting the emitted light. Alternatively, a harmonic of a YAG laser, an excimer laser, or the like may be used. The light emitted from the light source is condensed on the foreign matter attached to the substrate by the optical system. Reflected light or transmitted light from the substrate is detected by a photodetector through an optical system, and imaging data of a foreign object is obtained.

  The movable mechanism 24 is provided with an actuator such as a servo motor. By driving the movable mechanism 24, the detection unit 22 can freely move in the space on the substrate placed on the stage 21. Specifically, the detection unit 22 can move on the substrate in the x direction shown in FIG. 1 by the upper movable unit 24a, and can move in the y direction by the side movable unit 24b. Thereby, an arbitrary point on the substrate placed on the stage 21 can be inspected.

  In addition, the movable mechanism 24 is provided with a foreign substance capturing portion 23. As with the detection unit 22, the foreign body capture unit 23 can freely move in the space on the substrate placed on the stage 21 by the movable mechanism 24. The foreign matter capture unit 23 captures and removes foreign matter that has adhered to the substrate. FIG. 2 shows a configuration example of the foreign substance capturing unit 23. As shown in FIG. 2, the foreign material capturing part 23 has a capturing jig 25 including a rod 25 a and an adhesive part 25 b.

  An adhesive portion 25b is provided at the tip of the rod 25a. The adhesive portion 25b is made of a polymer material. In particular, the adhesive part 25b is preferably polyurethane. Thereby, the capture efficiency of a foreign material can be improved. The tip of the adhesive portion 25b is preferably substantially spherical. Thereby, the capture jig can be brought into contact with only the local region where the foreign object is detected, and the foreign object can be captured. In addition, the shape of the adhesion part 25b is not restricted to this, A triangular pyramid etc. may be sufficient.

When the angle between the substrate and the bar is smaller than 20 degrees, it is difficult to capture the foreign matter because the tip of the polymer material is substantially spherical. In this case, the mechanism for capturing the foreign matter is complicated, and the apparatus becomes too expensive. When the angle between the substrate and the bar is larger than 80 degrees, the foreign substance removal efficiency is lowered. For this reason, it is preferable that the angle between the substrate and the rod 25a when the foreign matter is removed using the foreign matter catching portion 23 is 20 to 80 degrees.
Further, when removing a plurality of foreign substances, after the foreign substances are captured, the rod 25a can be rotated in the axial direction to further capture the foreign substances. Thereby, a plurality of foreign matters can be captured by one capture jig, and work efficiency can be improved. Further, when capturing the foreign matter, the stick 25a may be rotated in the axial direction within a range of 0 to 10 degrees when the adhesive portion 25b comes into contact with the foreign matter. As a result, it is possible to reliably capture foreign matter.

  When the rod 25a is rotated in the axial direction to capture foreign matter, it is preferable to correct the relative distance between the adhesive portion 25b made of the polymer material and the substrate against the displacement of the contact position due to the eccentricity of the rod 25a. For example, the stage 21 can be driven in the z direction so that the distance between the adhesive portion 25b and the substrate can be reduced or increased. In addition, you may make it drive the capture jig | tool 25 and change the distance of the adhesion part 25b and a board | substrate. Thereby, a foreign material can be reliably captured without increasing the contact area between the substrate and the capture jig.

  In addition, it is also possible to hold the angle between the substrate and the rod 25a at approximately 90 degrees and capture foreign matter near the apex of the adhesive portion 25b. Thereby, alignment with the detected foreign material becomes easy. Further, when identifying the foreign matter captured by the analysis unit 11 described later, it becomes easy to perform alignment. As described above, when the adhesive portion 25b of the capture jig 25 adheres to the substrate, it can be decomposed and removed by irradiating with ultraviolet light having a wavelength of 400 nm or less.

  In the present embodiment, the detection unit 22 and the foreign matter capturing unit 23 are moved by the same movable mechanism 24 including the upper movable unit 24a and the side movable unit 24b. However, the present invention is not limited to this. is not. For example, separate arms may be provided for the detection unit 22 and the foreign matter capturing unit 23 so that the stage 21 can be moved. It is also possible to make the stage 21 movable.

  The analysis unit 11 identifies the foreign matter captured by the foreign matter capture unit 23. As the analysis unit 11, an infrared spectroscopic microscope that identifies foreign matters by infrared spectroscopy can be used. In infrared spectroscopy, a foreign object to be measured is irradiated with infrared rays and a transmitted light (or reflected light) is dispersed to obtain a spectrum, thereby identifying the molecular structure of the foreign substance.

As the analysis part 11, you may use what identifies a foreign material by a Raman scattering spectroscopy. A foreign substance can be identified by obtaining a Raman spectrum by detecting Raman scattered light generated by irradiating the foreign substance with monochromatic laser light with a spectroscope or an interferometer. Moreover, as the analysis part 11, an electron beam microanalyzer (EPMA: Electron Probe Micro Analyzer) can also be used. An electron beam microanalyzer is a device that analyzes constituent elements, their concentrations, and the like from the wavelength or energy from X-rays generated by irradiating a foreign object with an electron beam.

  Moreover, the analysis part 11 may measure the base sequence of the deoxyribonucleic acid (DNA: Deoxyribonucleic acid) of the captured foreign material. Furthermore, it is preferable to identify a living body that generates the captured foreign matter based on the information on the base sequence of the deoxyribonucleic acid. As a result, it is possible to identify the source of the foreign matter and take measures.

  The storage unit 12 stores the imaging data of the foreign matter obtained by the detection unit 22. The classification unit 13 classifies and arranges foreign objects according to their forms based on the imaging data stored in the storage unit 12. The form of the foreign matter is, for example, a linear shape when the foreign matter is a fiber of a rubbing cloth, and a non-linear shape when the foreign matter is human skin. In this case, the classification unit 13 can divide the foreign matter detected by the detection unit 22 into two groups depending on whether or not it is linear.

  The classified foreign matter is identified by the analysis unit 11, and it is determined whether or not it causes a display defect of the liquid crystal display device. Then, for each classified shape, whether or not it is a foreign object to be captured and removed is stored in the storage unit 12. For example, the linear foreign matter on the rubbing cloth does not cause a display defect even if it is not removed, so it is not necessary to remove it from the substrate. In addition, foreign matters other than linear shapes are removed from the substrate because they may cause display defects if they are not removed.

  Thereafter, when a linear foreign matter is detected by the detection unit 22, the foreign matter is not removed. Further, when a foreign matter other than a linear shape is detected by the detection unit 22, the foreign matter is captured and removed by the foreign matter capturing unit 23. In this way, it is possible to remove only foreign matters that cause defects. Thereby, the time concerning the inspection of the substrate can be shortened.

  The trapped foreign matter is transported from the foreign matter inspection / removal device 20 to the analysis unit 11 with the foreign matter attached to the adhesive portion 25b. In addition, in FIG. 1, illustration of this conveyance part is abbreviate | omitted. Moreover, it is preferable that the capture jig 25 has a cover that covers the adhesive portion 25b. The cover is opened when capturing foreign matter, and the cover is closed when transporting the capture jig 25 to the analysis unit 11. Thereby, it can prevent that a foreign material adheres to a capture jig | tool further, and it becomes possible to identify a foreign material correctly.

Embodiment 2. FIG.
A test analyzer according to Embodiment 2 of the present invention will be described with reference to FIG. FIG. 3 is a diagram showing the configuration of the test analyzer 10 ′ according to the present embodiment. The present embodiment is different from the first embodiment in that a display abnormality specifying unit 14 is provided. 3, the same components as those in FIG. 1 are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 2, the inspection analyzer 10 ′ includes an analysis unit 11, a storage unit 12, a classification unit 13, and a foreign matter inspection and removal apparatus 20. 14 is provided. In the present embodiment, an inspection target is a liquid crystal display device in which an array substrate and a color filter substrate are arranged to face each other and liquid crystal is sealed between the substrates.

  In the present embodiment, the storage unit 12 further stores the position of the foreign matter detected by the detection unit 22 on the substrate. The display abnormality specifying unit 14 drives the liquid crystal display device and performs a lighting test. Thereby, a display abnormality location is specified. Specifically, the address of the abnormal display location is specified by driving the scanning line and the signal line of the liquid crystal display device, respectively.

  The display abnormality specifying unit 14 compares the address of the foreign object stored in the storage unit 12 with the address of the location where the display abnormality has occurred. Thereby, it can be determined whether or not the foreign matter identified by the analysis unit 11 causes the display failure, and the cause of the failure can be specified more accurately.

  As described above, according to the present invention, it is possible to remove only foreign matters that cause defects by classifying and identifying foreign matters according to their forms. In addition, it is possible to determine whether or not the foreign matter identified by the analysis unit causes the display failure, and the cause of the failure can be specified more accurately. Furthermore, productivity can be improved by incorporating the inspection method using the above-described inspection analyzer into the manufacturing process of the display device.

  It is obvious that the present invention is applicable not only to the glass substrate described above but also to a semiconductor wafer, semiconductor mask, liquid crystal device mask, metal plate, polymer film, ceramic substrate, and the like.

  The inspection analyzer according to another aspect of the present invention is the inspection analyzer according to claim 1 or 2, wherein the detection unit includes a confocal optical system. Thereby, it is possible to detect foreign matter with high resolution.

  The inspection analyzer according to another aspect of the present invention is the above-described inspection analyzer, wherein the detection unit includes an illumination optical system that irradiates at least one of incident illumination light and transmitted illumination light onto the substrate. Is included.

  A test analyzer according to another aspect of the present invention is characterized in that, in the test analyzer, the polymer material is polyurethane. Thereby, the capture efficiency of a foreign material can be improved.

  A test analyzer according to another aspect of the present invention is characterized in that, in the test analyzer, the tip of the polymer material has a substantially spherical shape. Thereby, the capture jig can be brought into contact with only the local region where the foreign object is detected, and the foreign object can be captured.

  The inspection / analysis apparatus according to another aspect of the present invention is the above-described inspection / analysis apparatus, wherein the angle between the substrate and the rod is 20 to 80 degrees when the foreign matter is removed using the capture jig. It is characterized by this. Thereby, it becomes possible to capture foreign substances efficiently.

  When the inspection analyzer according to another aspect of the present invention removes a plurality of foreign matters using the capture jig in the above-described inspection analyzer, the foreign matter is captured, and then the rod is rotated in the axial direction. Furthermore, it is characterized by capturing foreign matter. Thereby, a plurality of foreign matters can be captured by one capture jig, and work efficiency can be improved.

  In the inspection analyzer according to another aspect of the present invention, in the above-described inspection analyzer, when the foreign matter is captured by rotating the rod in the axial direction, the displacement of the contact position due to eccentricity of the rod is The relative distance between the polymer material and the substrate is corrected. Thereby, a foreign material can be reliably captured without increasing the contact area between the substrate and the capture jig.

  In the inspection analyzer according to another aspect of the present invention, when the foreign material is captured, the rod is pivoted in a range of 0 to 10 degrees when the polymer material comes into contact with the foreign material. It is characterized by rotating in the direction. As a result, it is possible to reliably capture foreign matter.

  The inspection analyzer according to another aspect of the present invention is the above-described inspection analyzer, wherein the angle between the substrate and the rod is maintained at approximately 90 degrees, and foreign matter is captured in the vicinity of the apex of the polymer material. It is a feature. Thereby, alignment with the detected foreign material becomes easy.

  The inspection analyzer according to another aspect of the present invention further includes a transport unit that transports the capture jig to the analysis unit in a state where the captured foreign matter is attached to the polymer material. Prepare.

  The inspection analyzer according to another aspect of the present invention is the above-described inspection analyzer, wherein the capture jig further includes a cover that covers the polymer material, and the cover is in an open state when capturing foreign matter. When the capture jig is transported to the analysis unit, the cover is in a closed state. Thereby, it can prevent that a foreign material adheres to a capture jig | tool further, and it becomes possible to identify a foreign material correctly.

The inspection analyzer according to another aspect of the present invention is characterized in that, in the above-described inspection analyzer, the analysis unit identifies the foreign matter by infrared spectroscopy.
The inspection analyzer according to another aspect of the present invention is characterized in that, in the above-described inspection analyzer, the analysis unit identifies the foreign matter by Raman scattering spectroscopy.

The inspection analyzer according to another aspect of the present invention is characterized in that in the above-described inspection analyzer, the analysis unit is an electron beam microanalyzer.
A test analysis apparatus according to another aspect of the present invention is characterized in that, in the test analysis apparatus, the analysis unit measures a base sequence of deoxyribonucleic acid as a captured foreign substance.

  A test analysis apparatus according to another aspect of the present invention is characterized in that, in the test analysis apparatus described above, a living body generating a captured foreign substance is identified based on information on a base sequence of the deoxyribonucleic acid. is there. As a result, it is possible to identify the source of the foreign matter and take measures.

  Note that the present invention is not limited to the above-described embodiment, and can be changed as appropriate without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 10 Test | inspection analyzer 11 Analysis part 12 Memory | storage part 13 Classification | category part 14 Display abnormality specific | specification part 20 Foreign substance inspection removal apparatus 21 Stage 22 Detection part 23 Foreign substance capture part 24 Movable mechanism 24a Upper movable part 24b Side movable part 25 Capture jig 25a Bar 25b Adhesive part

Claims (4)

An inspection analyzer that detects foreign matter adhering to a substrate and removes and analyzes the foreign matter,
A detector for illuminating and detecting the foreign matter on the substrate;
A recording unit for recording the address and imaging data of the foreign matter detected on the substrate;
Based on the imaging data, a classification unit that classifies and organizes foreign objects according to their form;
A capture unit that captures and removes the foreign matter adhering to the substrate;
An analysis unit for identifying the composition and structure of the foreign matter captured by the capture unit;
A test analyzer comprising: The substrate is a display device configuration substrate, a display device is manufactured by bonding the substrates,
A display abnormality detection unit that electrically drives the display device to detect a display abnormality and identifies an address of the display abnormality;
A comparison unit for comparing the display abnormality and the address of the foreign object;
An inspection analyzer further comprising:   The inspection / analysis apparatus according to claim 1, wherein the capture unit includes a capture jig in which a polymer material is installed at a tip of a rod.   The inspection analyzer according to any one of claims 1 to 3, wherein the wavelength of the illuminating light is 400 nm or less.

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