JP2010223561A - Method of controlling dew point for baking furnace - Google Patents

Method of controlling dew point for baking furnace Download PDF

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JP2010223561A
JP2010223561A JP2009074569A JP2009074569A JP2010223561A JP 2010223561 A JP2010223561 A JP 2010223561A JP 2009074569 A JP2009074569 A JP 2009074569A JP 2009074569 A JP2009074569 A JP 2009074569A JP 2010223561 A JP2010223561 A JP 2010223561A
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dew point
furnace
control
gas
meter
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JP5455406B2 (en
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Tatsuya Kinoshita
達也 木下
Yuji Okuda
雄二 奥田
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NGK Insulators Ltd
NGK Ceramic Device Co Ltd
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NGK Ceramic Device Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of controlling a dew point capable of controlling a dew point with high accuracy while preventing attachment of a binder-derived organic decomposed matter to a dew point measuring means for a gas in a furnace in baking ceramics in the baking furnace. <P>SOLUTION: In a binder removing process, the dew-point control is performed by sampling a furnace supply gas supplied into the baking furnace 1, measuring the dew point by a dew-point meter 3 for control, and performing feedback adjustment of error to a set dew point, and in a sintering process, the dew-point control is performed by sampling the furnace gas, measuring the dew point by the dew-point meter 3 for control, and performing feedback adjustment of the error to the set dew point. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明はセラミックの焼成炉に最適な露点制御方法に関するものである。   The present invention relates to a dew point control method optimum for a ceramic firing furnace.

一般に、セラミックの焼成工程は、原料成形のために添加されたバインダーを除去する脱バイ工程と、前記工程でバインダーが除去された原料粒子同士を結合させて成形体を焼結させる焼結工程と、焼結後に製品を冷却させる冷却工程とからなる。   In general, the ceramic firing step includes a debuy step for removing the binder added for forming the raw material, a sintering step for bonding the raw material particles from which the binder has been removed in the step, and sintering the formed body. And a cooling step of cooling the product after sintering.

各製品に求められる特性を発揮するためには、各特性に応じた焼成条件下での焼成が必要となる。   In order to exhibit the properties required for each product, firing under firing conditions corresponding to each property is required.

また、所定の特性を備える製品を均質かつ歩留まりの良く生産する為には、最適な焼成条件を高精度に実現する焼成設備が必要となる。   In addition, in order to produce a product having predetermined characteristics uniformly and with a high yield, a firing facility that realizes optimum firing conditions with high accuracy is required.

従来より、焼成炉内の露点がセラミック原料粒子の焼結具合に影響することが知られている。   Conventionally, it is known that the dew point in the firing furnace affects the degree of sintering of ceramic raw material particles.

焼成炉内の露点制御に関し、例えば、炉内の露点を測定しながら、PID制御により低露点の乾燥ガスと高露点の湿りガス流量を最適に制御する技術が開示されている(特許文献1)。   Regarding dew point control in a firing furnace, for example, a technique for optimally controlling a low dew point dry gas and a high dew point wet gas flow rate by PID control while measuring the dew point in the furnace (Patent Document 1) is disclosed. .

しかし、従来の焼成炉の脱バイ工程では成形体から発生するバインダー由来の有機性分解物が、炉内ガスサンプリング配管、炉内ガスサンプリング制御機構及び制御用露点計から構成される炉内ガスの露点測定手段に付着する現象が観察され、該有機物の付着した露点測定手段では精密な露点制御が行えない問題があった。具体的には、炉内サンプリング用配管及び炉内ガスサンプリング制御機構にバインダー由来の有機性分解物が付着した場合、付着物が水分を吸収や放出する性質をもつため、制御用露点計が測定する露点と焼成炉内の露点との間にズレが生じ、精密な制御が不可能となる。また、該有機性分解物が制御用露点計を劣化させるため、頻繁に制御用露点計の交換作業を行うことが必要となる問題があった。   However, the organic decomposition product derived from the binder generated from the molded body in the debaking process of the conventional firing furnace is caused by the in-furnace gas composed of the in-furnace gas sampling pipe, the in-furnace gas sampling control mechanism, and the control dew point meter. A phenomenon of adhesion to the dew point measuring means was observed, and there was a problem that precise dew point control could not be performed with the dew point measuring means to which the organic matter adhered. Specifically, when an organic decomposition product derived from a binder adheres to the furnace sampling pipe and the furnace gas sampling control mechanism, the control dew point meter measures because the deposit has the property of absorbing and releasing moisture. Deviation occurs between the dew point and the dew point in the firing furnace, making precise control impossible. Further, since the organic decomposition product deteriorates the control dew point meter, there is a problem that it is necessary to frequently replace the control dew point meter.

炉内ガスの替わりに炉内供給するガスの露点を制御した場合には、炉材から発生する水分の影響により、炉内の露点は変動し、制御精度が±5℃程度まで悪化する問題があった。具体的には、露点制御は特に高温となる焼結工程において重要となるが、焼成開始前の大気中の水分や、脱バイ工程で成形体のバインダー由来の水分が一旦炉材に吸着すると、昇温工程を含む高温の焼結工程においても、炉材内部の昇温が遅れるため、水分の放出が続き、露点制御に問題が生じる。   When the dew point of the gas supplied in the furnace is controlled instead of the furnace gas, the dew point in the furnace fluctuates due to the influence of moisture generated from the furnace material, and the control accuracy deteriorates to about ± 5 ° C. there were. Specifically, dew point control is particularly important in the sintering process at a high temperature, but once moisture in the atmosphere before the start of firing and moisture derived from the binder of the molded body in the debuy process are once adsorbed to the furnace material, Even in a high-temperature sintering process including a temperature raising process, the temperature rise inside the furnace material is delayed, so that moisture is continuously released, which causes a problem in dew point control.

特開平1−316417号公報JP-A-1-316417

本発明の課題は、前記問題を解決し、焼成炉でセラミック焼成を行う際、バインダー由来の有機性分解物が炉内ガスの露点測定手段に付着することのなく、かつ、高精度の露点の制御が可能な露点制御方法を提供することである。   The object of the present invention is to solve the above problems, and when performing ceramic firing in a firing furnace, the organic decomposition product derived from the binder does not adhere to the dew point measuring means of the furnace gas, and the dew point of high accuracy is achieved. It is to provide a dew point control method that can be controlled.

上記課題を解決するためになされた本発明の焼成炉の露点制御方法は、原料成形のために添加されたバインダーを除去する脱バイ工程と、前記工程でバインダーが除去された原料粒子同士を結合させて成形体を焼結させる焼結工程を有するセラミック焼成工程の露点制御方法であって、脱バイ工程では、焼成炉内へ供給される炉内供給ガスをサンプリングして制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行い、焼結工程では、炉内ガスをサンプリングして前記制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行うことを特徴とするものである。   The dew point control method of the firing furnace of the present invention made to solve the above problems is a debuy process for removing the binder added for raw material molding, and the raw material particles from which the binder has been removed in the above process are combined. A dew point control method for a ceramic firing process having a sintering process for sintering a formed body, and in the debuy process, the dew point is sampled by sampling the furnace supply gas supplied into the firing furnace. The dew point is controlled by feeding back and adjusting the error from the set dew point. In the sintering process, the gas in the furnace is sampled, the dew point is measured by the control dew point meter, and the error from the set dew point is feedback adjusted. It is characterized by performing dew point control.

請求項2記載の発明は、請求項1記載の焼成炉の露点制御方法において、焼成炉がバッチ炉であって、脱バイ工程では炉内供給ガスを炉内ガスサンプリング用配管にパージすることを特徴とするものである。   The invention according to claim 2 is the dew point control method for a firing furnace according to claim 1, wherein the firing furnace is a batch furnace, and in the debuy process, the furnace supply gas is purged into the furnace gas sampling pipe. It is a feature.

請求項3記載の発明は、請求項1または2記載の焼成炉の露点制御方法において、炉内供給ガスをサンプリングしてモニタ用露点計により露点を測定し、脱バイ工程の該モニタ用露点計による露点測定値と、同工程の制御用露点計による露点測定値とを対比することにより制御用露点計の機能劣化を検出することを特徴とするものである。   According to a third aspect of the present invention, in the dew point control method for a firing furnace according to the first or second aspect, the dew point is measured by sampling the supply gas in the furnace and measuring the dew point with a monitor dew point meter. By comparing the measured dew point value with the measured dew point value measured by the control dew point meter in the same process, the functional deterioration of the control dew point meter is detected.

本発明に係る焼成炉の露点制御方法は、炉内ガス中にバインダー由来の分解ガスが含まれる脱バイ工程では焼成炉内へ供給される炉内供給ガスをサンプリングして制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行い、脱バイ工程が終了して炉内ガス中にバインダー由来の分解ガスが含まれなくなった焼結工程では、炉内ガスをサンプリングして制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行う。これにより、バインダー由来の有機性分解物が、炉内ガスの露点測定手段に付着する現象を回避しつつ、高精度の露点制御をすることができる。   The dew point control method for a firing furnace according to the present invention is based on a dew point that is obtained by sampling the furnace supply gas supplied to the firing furnace in the debuy process in which the cracked gas derived from the binder is contained in the furnace gas. The dew point is controlled by feedback and adjusting the error from the set dew point, and the furnace gas is sampled in the sintering process when the debuy process is completed and the cracked gas derived from the binder is no longer contained in the furnace gas. Then, the dew point is measured by the control dew point meter, and dew point control is performed to feedback and adjust the error from the set dew point. Thereby, highly accurate dew point control can be performed, avoiding the phenomenon that the organic decomposition product derived from the binder adheres to the dew point measuring means of the in-furnace gas.

請求項2記載の焼成炉の露点制御方法では、焼成炉をバッチ炉とし、脱バイ工程では、炉内供給ガスを炉内ガスサンプリング用配管にパージする。これにより、脱バイ工程で、バインダー由来の有機性分解物が炉内から炉内ガスサンプリング用配管へ拡散により侵入することを防ぐことができ、炉内ガスの露点測定手段に付着することをより厳密に防止することができる。   In the dew point control method for a firing furnace according to claim 2, the firing furnace is a batch furnace, and in the de-bye step, the furnace supply gas is purged into the furnace gas sampling pipe. Thereby, it is possible to prevent the organic decomposition product derived from the binder from entering from the inside of the furnace into the piping for sampling the gas in the furnace by diffusion in the debuy process, and to adhere to the dew point measuring means of the furnace gas. It can be strictly prevented.

請求項3記載の焼成炉の露点制御方法では、脱バイ工程において制御用露点計とモニタ用露点計で、同一サンプル(炉内供給ガス)を測定し、互いの測定値を対比することにより制御用露点計の機能劣化を検知することができる。   In the dew point control method for a firing furnace according to claim 3, control is performed by measuring the same sample (in-furnace supply gas) with a control dew point meter and a monitor dew point meter in a debuy process, and comparing each measured value. It is possible to detect functional deterioration of the dew point meter.

実施形態1の脱バイ工程説明図である。FIG. 3 is an explanatory diagram of a debuying process according to the first embodiment. 実施形態1の焼結工程説明図である。FIG. 3 is an explanatory view of a sintering process of the first embodiment. 実施形態2の脱バイ工程説明図である。FIG. 6 is an explanatory diagram of a debuying process according to the second embodiment. 実施形態2の焼結工程説明図である。FIG. 10 is an explanatory diagram of a sintering process of Embodiment 2. 実施形態3の脱バイ工程説明図である。FIG. 10 is an explanatory diagram of a debuying process according to a third embodiment. 実施形態3の焼結工程説明図である。FIG. 10 is an explanatory view of a sintering process of Embodiment 3. 実施形態4の脱バイ工程説明図である。FIG. 10 is an explanatory diagram of a debuying process according to a fourth embodiment. 実施形態4の焼結工程説明図である。FIG. 10 is an explanatory diagram of a sintering process of Embodiment 4.

以下に本発明の好ましい実施形態を示す。本発明の露点制御方法は、原料成形のために添加されたバインダーを除去する脱バイ工程と、前記工程でバインダーが除去された原料粒子同士を結合させて成形体を焼結させる焼結工程とを有するセラミック焼成工程の露点制御に好適な露点制御方法である。以下に、本発明に係る露点制御方法を、実施形態1〜4の各形態で説明する。   Preferred embodiments of the present invention are shown below. The dew point control method of the present invention includes a debuy process for removing a binder added for forming a raw material, and a sintering process for bonding the raw material particles from which the binder has been removed in the above process to sinter the compact. It is a dew point control method suitable for dew point control in a ceramic firing process having Below, the dew point control method which concerns on this invention is demonstrated with each form of Embodiment 1-4.

(実施形態1)
図1は脱バイ工程説明図を示し、図2は焼結工程説明図を示している。
(Embodiment 1)
FIG. 1 is an explanatory view of a debuying process, and FIG. 2 is an explanatory view of a sintering process.

図1および図2において、1は焼成炉本体、2は炉内供給ガス調整手段、3は制御用露点計、4は炉内ガスサンプリング用配管、5は炉内ガスサンプリング制御機構、6は炉内供給ガス配管、7は炉内供給ガスサンプリング用配管、8は炉内供給ガスサンプリング制御機構、9は露点制御手段、12はガスサンプリングポンプを示している。炉内供給ガス調整手段2は、乾燥ガス供給手段2aと、湿りガス供給手段2bと、各ガス流量を調整する乾燥ガス流量調整手段2c、湿りガス流量調整手段2dから構成されている。   1 and 2, reference numeral 1 denotes a firing furnace body, 2 denotes furnace supply gas adjusting means, 3 denotes a control dew point meter, 4 denotes furnace gas sampling piping, 5 denotes a furnace gas sampling control mechanism, and 6 denotes a furnace. An internal supply gas pipe, 7 is an internal furnace gas sampling pipe, 8 is an internal furnace gas sampling control mechanism, 9 is a dew point control means, and 12 is a gas sampling pump. The furnace supply gas adjusting means 2 includes a dry gas supply means 2a, a wet gas supply means 2b, a dry gas flow rate adjusting means 2c for adjusting each gas flow rate, and a wet gas flow rate adjusting means 2d.

本実施形態では、焼成炉1内の露点を制御範囲−3〜13℃、制御精度±1℃に保つことを目標としている。露点制御手段9には該目標露点が設定値として入力されている。また、露点制御手段9は制御用露点計3の出力データを受け取り、PID制御により、前記乾燥ガス流量調整手段2c、湿りガス流量調整手段2dのマスフローコントロールを行い、乾燥ガス供給手段2aから供給される乾燥ガスと湿りガス供給手段2bから供給される湿りガスとの流量制御を行っている。本実施形態では、焼成炉1内へ脱バイ工程では1000L/min、焼結工程では100L/minの流量でガス供給を行っている。   In this embodiment, it is aimed to keep the dew point in the firing furnace 1 within a control range of −3 to 13 ° C. and a control accuracy of ± 1 ° C. The target dew point is input to the dew point control means 9 as a set value. The dew point control means 9 receives the output data of the control dew point meter 3, performs mass flow control of the dry gas flow rate adjusting means 2c and the wet gas flow rate adjusting means 2d by PID control, and is supplied from the dry gas supply means 2a. The flow rate control between the dry gas and the wet gas supplied from the wet gas supply means 2b is performed. In this embodiment, gas is supplied into the firing furnace 1 at a flow rate of 1000 L / min in the debuy process and 100 L / min in the sintering process.

炉内ガスサンプリング制御機構5は炉内ガスサンプリング用配管4の開閉を行う開閉バルブであり、炉内供給ガスサンプリング制御機構8は炉内供給ガスサンプリング用配管7の開閉を行う開閉バルブである。   The in-furnace gas sampling control mechanism 5 is an on-off valve that opens and closes the in-furnace gas sampling pipe 4, and the in-furnace supply gas sampling control mechanism 8 is an on-off valve that opens and closes the in-furnace supply gas sampling pipe 7.

図1に示す脱バイ工程では、炉内ガスサンプリング制御機構5を閉状態として炉内ガス中に含まれるバインダー由来の有機性分解物が制御用露点計3、炉内ガスサンプリング配管4、炉内ガスサンプリング制御機構5に付着する現象を回避している。また、炉内供給ガスサンプリング制御機構8を開状態として炉内供給ガスを制御用露点計3に導き、露点制御を行っている。   In the debuy process shown in FIG. 1, the in-furnace gas sampling control mechanism 5 is closed, and the organic decomposition product derived from the binder contained in the in-furnace gas contains the control dew point meter 3, the in-furnace gas sampling pipe 4, The phenomenon of adhering to the gas sampling control mechanism 5 is avoided. Further, the in-furnace supply gas sampling control mechanism 8 is opened, and the in-furnace supply gas is guided to the control dew point meter 3 to perform dew point control.

図2に示す焼結工程では、炉内ガスサンプリング制御機構5を開状態として炉内ガスを制御用露点計3に導き、露点制御を行っている。このとき炉内供給ガスサンプリング制御機構8は閉状態とする。   In the sintering step shown in FIG. 2, the in-furnace gas sampling control mechanism 5 is opened, and the in-furnace gas is guided to the control dew point meter 3 to perform dew point control. At this time, the furnace supply gas sampling control mechanism 8 is closed.

このように、炉内ガス中にバインダー由来の有機性分解物が含まれる脱バイ工程では焼成炉内へ供給される炉内供給ガスをサンプリングして制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行い、脱バイ工程が終了して炉内ガス中にバインダー由来の有機性分解物が含まれなくなった焼結工程では、炉内ガスをサンプリングして制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行うことにより、バインダー由来の有機性分解物が制御用露点計3、炉内ガスサンプリング配管4、炉内ガスサンプリング制御機構5に付着する現象を回避することができる。具体的には、炉内サンプリング用配管及び炉内ガスサンプリング制御機構にバインダー由来の有機性分解物が付着した場合、付着物が水分を吸収や放出する性質をもつため、制御用露点計が測定する露点と焼成炉内の露点との間にズレが生じ、精密な制御が不可能となるが、本構成によれば露点の制御を脱バイ工程や焼成工程に於いて±1℃レベルに向上させることができる。   In this way, in the debuy process in which the organic gas derived from the binder is contained in the furnace gas, the furnace supply gas supplied to the firing furnace is sampled, the dew point is measured by the control dew point meter, and the set dew point is determined. The dew point is controlled by feedback adjustment of the error, and in the sintering process when the debuy process is completed and the organic gas decomposed from the binder is not contained in the furnace gas, the furnace gas is sampled for control. By measuring the dew point with a dew point meter and performing dew point control to feedback and adjust the error from the set dew point, the organic degradation products derived from the binder are controlled by the dew point meter for control 3, the gas sampling pipe 4 in the furnace, and the gas sampling control in the furnace. The phenomenon of adhering to the mechanism 5 can be avoided. Specifically, when an organic decomposition product derived from a binder adheres to the furnace sampling pipe and the furnace gas sampling control mechanism, the control dew point meter measures because the deposit has the property of absorbing and releasing moisture. Deviation occurs between the dew point and the dew point in the firing furnace, making precise control impossible. However, according to this configuration, the dew point control is improved to ± 1 ° C level in the de-buy process and firing process. Can be made.

また、バインダー由来の有機性分解物による制御用露点計の劣化も生じないため、従来は8カ月ごとに必要とされていた制御用露点計の交換作業頻度を大幅に減ずることができる。   Further, since the control dew point meter is not deteriorated by the organic decomposition product derived from the binder, the frequency of exchanging the control dew point meter, which was conventionally required every 8 months, can be greatly reduced.

(実施形態2)
図3は脱バイ工程説明図を示し、図4は焼結工程説明図を示している。
(Embodiment 2)
FIG. 3 is an explanatory view of a debuy process, and FIG. 4 is an explanatory view of a sintering process.

本実施形態は、実施形態1の露点制御装置に、更に炉内ガスサンプリング用配管4のパージ手段を備えたものである。該パージ手段は、炉内供給ガス配管6から分岐したパージガス供給配管9と、パージ制御機構10から構成されている。パージ制御機構10は、パージガス供給配管9の開閉を行う開閉バルブである。   In the present embodiment, the dew point control apparatus of the first embodiment is further provided with a purge means for the furnace gas sampling pipe 4. The purge means includes a purge gas supply pipe 9 branched from the furnace supply gas pipe 6 and a purge control mechanism 10. The purge control mechanism 10 is an open / close valve that opens and closes the purge gas supply pipe 9.

図3に示す脱バイ工程では、パージ制御機構10を開状態として炉内供給ガスを用いて炉内ガスサンプリング用配管4をパージしている。   In the debuy process shown in FIG. 3, the purge control mechanism 10 is opened to purge the furnace gas sampling pipe 4 using the furnace supply gas.

図4に示す焼結工程では、前記のように炉内ガスサンプリング制御機構5を開状態として炉内ガスを制御用露点計3に導き、露点制御を行っているため、パージ制御機構10は閉状態としてパージを停止している。   In the sintering process shown in FIG. 4, since the in-furnace gas sampling control mechanism 5 is opened and the in-furnace gas is guided to the control dew point meter 3 and dew point control is performed as described above, the purge control mechanism 10 is closed. The purge is stopped as a state.

このように、脱バイ工程では、炉内供給ガスを炉内ガスサンプリング用配管にパージすることにより、脱バイ工程で、バインダー由来の有機性分解物が炉内から炉内ガスサンプリング用配管へ拡散により侵入することを防ぐことができ、炉内ガス採取用配管内炉内ガスの露点測定手段に付着することをより厳密に防止することができる。   In this way, in the debuy process, the furnace supply gas is purged into the furnace gas sampling pipe, so that the organic decomposition products derived from the binder diffuse from the furnace into the furnace gas sampling pipe in the debuy process. It is possible to prevent the penetration of the gas and to adhere to the dew point measuring means of the in-furnace gas in the furnace gas collecting pipe.

(実施形態3)
図5は脱バイ工程説明図を示し、図6は焼結工程説明図を示している。
(Embodiment 3)
FIG. 5 is an explanatory view of the debuy process, and FIG. 6 is an explanatory view of the sintering process.

本実施形態は、実施形態1の露点制御装置に、更に供給ガスのモニタ用露点計11を備えたものである。モニタ用露点計11は、常時、炉内供給ガスの露点測定を行うものである。   In this embodiment, the dew point control device of the first embodiment is further provided with a dew point meter 11 for monitoring supply gas. The monitor dew point meter 11 always measures the dew point of the in-furnace supply gas.

図5に示す脱バイ工程では、前記のように炉内供給ガスサンプリング制御機構8を開状態として炉内供給ガスを制御用露点計3に導き制御用露点測定を行っているため、制御用露点計3とモニタ用露点計11は、ともに炉内供給ガスの露点測定を行うこととなる。   In the debuy process shown in FIG. 5, since the in-furnace supply gas sampling control mechanism 8 is opened and the in-furnace supply gas is guided to the control dew point meter 3 and the control dew point is measured. Both the meter 3 and the monitor dew point meter 11 measure the dew point of the in-furnace supply gas.

図6に示す焼結工程では、前記のように炉内ガスサンプリング制御機構5を開状態として炉内ガスを制御用露点計3に導き、露点制御を行い、炉内供給ガスサンプリング制御機構8は閉状態としている。   In the sintering process shown in FIG. 6, the furnace gas sampling control mechanism 5 is opened as described above, the furnace gas is guided to the control dew point meter 3 to perform dew point control, and the furnace supply gas sampling control mechanism 8 is Closed.

モニタ用露点計11は、常時、炉内供給ガスの露点測定を行うものであるため、炉内で発生するバインダー由来の有機性分解物による劣化が生じることはない。これに対し、制御用露点計3は、前記のように、脱バイ工程では炉内供給ガスの露点測定を行うが、焼結工程では炉内ガスの露点測定を行うため、脱バイ工程で分解しきれなかった微量のバインダーが焼結工程で分解した場合には制御用露点計の劣化が生じる可能性がある。   Since the dew point meter 11 for monitoring always measures the dew point of the in-furnace supply gas, the monitor dew point meter 11 does not deteriorate due to the organic decomposition product derived from the binder generated in the furnace. On the other hand, as described above, the control dew point meter 3 measures the dew point of the gas supplied in the furnace in the debuy process, but the dew point of the gas in the furnace is measured in the sintering process. When a trace amount of binder that cannot be completely decomposed is decomposed in the sintering process, the control dew point meter may be deteriorated.

露点制御精度を良好に維持するためには、制御用露点計3の劣化を即座に検知して対処することが求められる。本実施形態の構成によれば、脱バイ工程において、制御用露点計とモニタ用露点計で、同一サンプル(炉内供給ガス)を測定し、互いの測定値を対比することにより制御用露点計の機能劣化を検知可能としている。又、炉が複数台存在する場合には、モニタ用露点計を共有できる。   In order to maintain the dew point control accuracy satisfactorily, it is required to immediately detect and deal with the deterioration of the control dew point meter 3. According to the configuration of the present embodiment, the dew point meter for control uses the control dew point meter and the monitor dew point meter to measure the same sample (in-furnace supply gas) and compare the measured values with each other. It is possible to detect the deterioration of the function. In addition, when there are a plurality of furnaces, a monitor dew point meter can be shared.

(実施形態4)
図7は脱バイ工程説明図を示し、図8は焼結工程説明図を示している。
(Embodiment 4)
FIG. 7 shows an explanatory view of the debuy process, and FIG. 8 shows an explanatory view of the sintering process.

本実施形態は、実施形態2と実施形態3の構成要素を共に備えるものである。   This embodiment includes both the constituent elements of the second embodiment and the third embodiment.

1 焼成炉本体
2 炉内供給ガス調整手段
2a 乾燥ガス供給手段
2b 湿りガス供給手段
2c 乾燥ガス流量調整手段
2d 湿りガス流量調整手段
3 制御用露点計
4 炉内ガスサンプリング用配管
5 炉内ガスサンプリング制御機構
6 炉内供給ガス配管
7 炉内供給ガスサンプリング用配管
8 炉内供給ガスサンプリング制御機構
9 露点制御手段
10 パージ制御機構
11 供給ガスのモニタ用露点計
12 ガスサンプリングポンプ
1 Firing furnace body 2 Furnace supply gas adjustment means 2a Dry gas supply means 2b Wet gas supply means 2c Dry gas flow rate adjustment means 2d Wet gas flow rate adjustment means 3 Control dew point meter 4 Furnace gas sampling pipe 5 Furnace gas sampling Control mechanism 6 Furnace supply gas pipe 7 Furnace supply gas sampling pipe 8 Furnace supply gas sampling control mechanism 9 Dew point control means 10 Purge control mechanism 11 Supply gas monitoring dew point meter 12 Gas sampling pump

Claims (3)

原料成形のために添加されたバインダーを除去する脱バイ工程と、前記工程でバインダーが除去された原料粒子同士を結合させて成形体を焼結させる焼結工程を有するセラミック焼成工程の露点制御方法であって、
脱バイ工程では、焼成炉内へ供給される炉内供給ガスをサンプリングして制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行い、
焼結工程では、炉内ガスをサンプリングして前記制御用露点計により露点を測定し、設定露点との誤差をフィードバック調整する露点制御を行うことを特徴とする焼成炉の露点制御方法。
A dew point control method for a ceramic firing process, which includes a debuy process for removing a binder added for forming a raw material, and a sintering process for bonding raw material particles from which the binder has been removed in the above process to sinter a formed body. Because
In the debuy process, the dew point is measured by sampling the furnace supply gas supplied into the firing furnace, measuring the dew point with a control dew point meter, and feedback adjusting the error from the set dew point.
In the sintering step, a dew point control method for a firing furnace is characterized in that the dew point is controlled by sampling an in-furnace gas, measuring the dew point with the control dew point meter, and feedback adjusting an error from the set dew point.
焼成炉がバッチ炉であって、脱バイ工程では炉内供給ガスを炉内ガスサンプリング用配管にパージすることを特徴とする請求項1記載の焼成炉の露点制御方法。   2. The dew point control method for a firing furnace according to claim 1, wherein the firing furnace is a batch furnace, and the furnace supply gas is purged into the furnace gas sampling pipe in the debuy process. 焼成炉がバッチ炉であって、炉内供給ガスをサンプリングしてモニタ用露点計による露点測定を行い、
脱バイ工程の該モニタ用露点計による露点測定値と、同工程の制御用露点計による露点測定値とを対比することにより制御用露点計の機能劣化を検出することを特徴とする請求項1または2記載の焼成炉の露点制御方法。
The firing furnace is a batch furnace, the supply gas in the furnace is sampled, and the dew point is measured with a dew point monitor.
2. The functional deterioration of the control dew point meter is detected by comparing the dew point measured value by the monitor dew point meter in the debuy process with the dew point measured value by the control dew point meter in the same process. Or the dew point control method of the baking furnace of 2.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013098506A1 (en) * 2011-12-28 2013-07-04 Total Raffinage Marketing System for measuring the dew point temperature of a gas flow
JP7318086B1 (en) 2022-09-22 2023-07-31 株式会社ノリタケカンパニーリミテド Continuous heating furnace

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316417A (en) * 1988-06-16 1989-12-21 Ngk Spark Plug Co Ltd Device for controlling dew point in atmospheric furnace
JPH07315910A (en) * 1994-05-30 1995-12-05 Takasago Ind Co Ltd Drying furnace of ceramic green product
JPH10274486A (en) * 1997-03-31 1998-10-13 Ngk Insulators Ltd Burning apparatus for ceramic
JP2003247784A (en) * 2003-01-23 2003-09-05 Nichia Chem Ind Ltd Manufacturing method of iron powder for powder metallurgy

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316417A (en) * 1988-06-16 1989-12-21 Ngk Spark Plug Co Ltd Device for controlling dew point in atmospheric furnace
JPH07315910A (en) * 1994-05-30 1995-12-05 Takasago Ind Co Ltd Drying furnace of ceramic green product
JPH10274486A (en) * 1997-03-31 1998-10-13 Ngk Insulators Ltd Burning apparatus for ceramic
JP2003247784A (en) * 2003-01-23 2003-09-05 Nichia Chem Ind Ltd Manufacturing method of iron powder for powder metallurgy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013098506A1 (en) * 2011-12-28 2013-07-04 Total Raffinage Marketing System for measuring the dew point temperature of a gas flow
FR2985313A1 (en) * 2011-12-28 2013-07-05 Total Raffinage Marketing SYSTEM FOR MEASURING THE DETECTION TEMPERATURE OF A GAS FLOW.
JP7318086B1 (en) 2022-09-22 2023-07-31 株式会社ノリタケカンパニーリミテド Continuous heating furnace

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