JP2010217643A - Droplet discharge device, method for discharging droplets, and method for manufacturing color filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a droplet discharge device that can correct the amount of droplets discharged from respective nozzles by accurately measuring a dot area provided onto media, and to provide a method for discharging the droplets; and method for manufacturing a color filter. <P>SOLUTION: The droplet discharge device IJ includes a droplet discharge head 20 having a plurality of nozzles for discharging the droplets, wherein the discharge head discharges the droplets from the nozzle that corresponds to a discharge pattern; a dot-receiving unit arranged on a receiving layer, on the surface of which at least a plurality of dots are provided, wherein each dot is configured by the same number of droplets discharged from each nozzle, while the discharge operations of the droplet discharge head 20 are repeated, based on the plurality of discharge patterns; a measuring unit for measuring respective areas of dots arranged on the dot-receiving unit; a correction means for correcting the variation of the amount of droplets discharged from the plurality of nozzles, based on the measurement results of the measuring unit; and a control unit 10 for controlling the timing, when the droplets are discharged from the droplet discharge head, so that the intervals of the discharge operation in each nozzle are shorter than the time the impact diameter of the liquid droplets are changed due to the infiltration to the receiving layer, in arranging the plurality of dots onto the dot-receiving unit. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a droplet discharge device, a droplet discharge method, and a color filter manufacturing method.

  Inkjet heads (droplet ejection heads) of inkjet printers (droplet ejection devices) can eject minute ink droplets in the form of dots, and are extremely accurate in terms of ink droplet size and pitch uniformity. high. This technique has been applied to the manufacturing field of various products such as electro-optical devices. For example, it can be applied when forming a film such as a color filter layer of a liquid crystal device or a light emitting portion of an organic EL display device.

  When the color filter layer is formed by the inkjet method, variation in the ink amount from each nozzle appears as display unevenness. As a solution, there is a technique for measuring and correcting the color density of a colored portion of a medium to be colored drawn on a substrate (see, for example, Patent Document 1).

JP-A-10-260306

  However, with the technique of Patent Document 1, it has been difficult to perform accurate correction due to an absorbance measurement error. Therefore, for example, it is conceivable to measure the area of dots formed by ejecting a plurality of ink droplets onto a medium (dot receiving portion) such as ink jet printer paper and correct the ejection amount of each nozzle. However, if the shape of the dots arranged on the media varies, a stable dot area cannot be obtained, and there is a possibility that variations in the ejection amount cannot be corrected with high accuracy. Furthermore, there are cases where the ejection characteristics of the nozzles to be measured differ due to the mutual influence between the nozzles that occurs during the ejection of ink, and it is desirable to consider such cases.

  The present invention has been made in view of such circumstances, and a droplet discharge device capable of favorably correcting the discharge amount of each nozzle by accurately measuring the dot area arranged on the medium, An object of the present invention is to provide a droplet discharge method and a color filter manufacturing method.

  The droplet discharge device of the present invention includes a plurality of nozzles that discharge droplets, a droplet discharge head that discharges the droplets from the nozzles corresponding to the discharge pattern, and the liquid based on the plurality of discharge patterns. A dot receiving portion in which the discharge operation of the droplet discharge head is repeated, and a plurality of dots each formed by the same number of droplets discharged from each nozzle are disposed on a receiving layer provided at least on the surface; A measuring unit that measures the area of each of the dots arranged in the dot receiving unit; and a correction unit that corrects variations in the discharge amount of the droplets among the plurality of nozzles based on a measurement result of the measuring unit; When arranging the plurality of dots in the dot receiving portion, the interval between the ejection operations of the nozzles is shorter than the time during which the landing diameter of the droplet changes due to penetration into the receiving layer. So as to be characterized and the control unit, further comprising controlling the discharge timing of the liquid drop ejecting head.

  According to the droplet discharge device of the present invention, when droplets are overlaid based on a plurality of discharge patterns, the droplets are sequentially discharged while the landing diameter is maintained on the receptor layer. The dots arranged on the top can have a substantially circular shape in plan view. Therefore, the area of each dot can be accurately measured by the measurement unit, and the variation in the discharge amount of the droplets between the plurality of nozzles can be corrected well by the correction unit. Therefore, for example, a uniform film without unevenness can be formed by the dots arranged on the substrate.

In the droplet discharge device, it is preferable that the control unit controls the droplet discharge head so that the same type of the discharge pattern is continuous when the different discharge patterns are repeated the same number of times. .
In this case, for example, depending on the ejection pattern, a nozzle that does not continuously eject droplets is generated. However, according to the present invention, since the landing diameter of the droplet does not change due to penetration into the receiving layer, the dots arranged on the dot receiving portion Can be reliably stabilized.

In the droplet discharge device, it is preferable that the control unit drives the droplet discharge head so that an interval between the discharge operations of the nozzles is within 200 μsec.
If the droplets are ejected at such intervals, the droplets in a state where the landing diameter is maintained can be stacked on the receiving layer. Therefore, it is possible to reliably stabilize the area of the dots arranged on the dot receiving portion, and it is possible to accurately correct variations in the droplet discharge amount.

  The droplet discharge method of the present invention is a droplet discharge method for discharging the droplets onto a substrate from nozzles corresponding to a discharge pattern using a droplet discharge head having a plurality of nozzles for discharging droplets. Prior to the operation of discharging the liquid droplets onto the substrate, the liquid droplet discharge head is repeatedly operated based on the plurality of discharge patterns, and at least a plurality of dots each composed of the same number of liquid droplets are provided on the surface. A plurality of nozzles based on a disposing step disposed in a dot receiving portion provided with a receiving layer, a measuring step of measuring the area of each of the dots disposed in the dot receiving portion, and a measurement result of the measuring portion; A correction step of correcting variations in the discharge amount of the liquid droplets between the discharge operations. Tama径 As is shorter than the time to change, and performs the ejection operation of the liquid drop ejecting head.

  According to the droplet discharge method of the present invention, when droplets are overlaid based on a plurality of discharge patterns, the droplets are sequentially discharged in a state where the landing diameter is maintained on the receiving layer. The dots arranged in the can be made into a substantially circular shape in a plan view. Therefore, the area of each dot can be measured with high accuracy, and variations in the droplet discharge amount among a plurality of nozzles can be corrected well. Therefore, for example, a uniform film without unevenness can be formed by the dots arranged on the substrate.

In the droplet discharge method, it is preferable that in the arrangement step, the same type of the discharge patterns are continuous with each other when the different discharge patterns are repeated the same number of times.
In this case, for example, a nozzle that does not discharge droplets continuously is generated, but according to the present invention, the landing diameter of the droplet does not change due to penetration into the receiving layer, so that the area of the dots arranged on the dot receiving portion is ensured. Can be stabilized.

In the droplet discharge method, it is preferable that in the placement step, the discharge operation at each nozzle is performed at intervals of 200 μsec or less.
If the droplets are ejected at such intervals, the droplets in a state where the landing diameter is maintained can be stacked on the receiving layer. Therefore, it is possible to reliably stabilize the area of the dots arranged on the dot receiving portion, and it is possible to accurately correct variations in the droplet discharge amount.

  The method for producing a color filter of the present invention includes forming the color filter by disposing the functional liquid in a predetermined region provided on a substrate using the droplet discharge device or the droplet discharge method. It is characterized by.

  According to the color filter manufacturing method of the present invention, since the dots arranged by the droplet discharge head form a uniform film, it is possible to manufacture a high-quality color filter free from unevenness.

1 is a schematic configuration diagram of a droplet discharge device. FIG. 2 is a schematic configuration diagram of a droplet discharge head. The perspective view which shows schematic structure of a nozzle test | inspection part. The figure which shows the structure of a medium. The functional block diagram when a droplet discharge apparatus functions as a discharge characteristic acquisition apparatus. The figure which shows the principal part of the electrical structure in a droplet discharge apparatus. The timing diagram of a drive signal and each control signal. Explanatory drawing which showed the discharge nozzle and its discharge timing. The figure for demonstrating the state of the dot distribute | arranged on a medium. Explanatory drawing of the manufacturing process of a color filter.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the XYZ rectangular coordinate system shown in FIG. 1 is set, and each member will be described with reference to this XYZ rectangular coordinate system. The XYZ orthogonal coordinate system is set so that the X axis and the Y axis are parallel to the work stage 102, and the Z axis is set in a direction orthogonal to the work stage 102. In the XYZ coordinate system in FIG. 1, the XY plane is actually set to a plane parallel to the horizontal plane, and the Z axis is set to the vertically upward direction.

  FIG. 1 is a schematic configuration diagram of a droplet discharge device IJ according to the present embodiment. The droplet discharge device IJ is a device that forms a color filter layer by discharging droplets of a color filter material onto a predetermined region of a color filter substrate by, for example, an inkjet method, and performs the droplet discharge method of this embodiment. But there is.

  The droplet discharge device IJ includes an apparatus base 101, a work stage 102, a stage moving device 103, a carriage 104, a droplet discharge head 20, a carriage moving device 106, a tube 107, a first tank 108, a second tank 109, and a third tank. 110 and a control device 10.

  The apparatus base 101 is a support base for the work stage 102 and the stage moving apparatus 103. The work stage 102 is installed on the apparatus base 101 so as to be movable in the X-axis direction by a stage moving device 103, and a color filter substrate (base material) P transported from an upstream transport device (not shown). And held on the XY plane by a vacuum suction mechanism. The stage moving device 103 includes a bearing mechanism such as a ball screw or a linear guide, and moves the work stage 102 in the X-axis direction based on a stage position control signal indicating the X coordinate of the work stage 102 input from the control device 10. Let

  The carriage 104 holds the droplet discharge head 20 and is provided so as to be movable in the Y-axis direction and the Z-axis direction by the carriage moving device 106. The droplet discharge head 20 includes a plurality of nozzles (not shown), and discharges droplets of a color filter material based on drawing data and drive control signals input from the control device 10. The droplet discharge head 20 is connected to a tube 107 via a carriage 104. Then, the droplet discharge head 20 is supplied with the color filter material for R (red) from the first tank 108 via the tube 107 to the nozzle corresponding to R (red), and the nozzle corresponding to G (green). The color filter material for G (green) is supplied from the second tank 109 via the tube 107, and the color filter for B (blue) is supplied from the third tank 110 to the nozzle corresponding to B (blue) via the tube 107. Material is supplied.

  Here, the nozzles formed in the droplet discharge head 20 in the present embodiment will be described with reference to FIG. FIG. 2 is a schematic diagram showing the arrangement of the nozzles drilled in the droplet discharge head 20, and shows a state seen from the lower side of the carriage 104 in FIG. Here, the vertical direction of the drawing is shown as the Y-axis direction.

  In the present embodiment, as illustrated, the droplet discharge head 20 includes nozzle blocks 20R, 20G, and 20B that discharge color filter materials corresponding to R, G, and B. Specifically, the color filter material for R is supplied from the first tank 108 through the tube 107 to the nozzle block 20R. The nozzle block 20G is supplied with a G color filter material from the second tank 109 via the tube 107. Further, the color filter material for B is supplied from the third tank 110 to the nozzle block 20B through the tube 107. In each nozzle block 20R, 20G, and 20B, 12 nozzles 21 to 32 are arranged in a substantially straight line, and the arrangement direction thereof coincides with the X-axis direction.

  As described above, a discharge mechanism is formed for each nozzle in the droplet discharge head 20 as described above, and pressure is generated on each color liquid in the droplet discharge head 20 so that a predetermined amount is obtained. Each color liquid material is discharged from a nozzle. Of course, the discharge mechanism has the same structure for all nozzles.

  In the present embodiment, the discharge mechanism has the structure shown in the blow-out portion of FIG. 2, and uses the piezoelectric element 2 as a driving body (actuator). That is, when a voltage waveform is applied between the electrodes 2c at both ends of the piezoelectric element 2 and the ground line (GND), the piezoelectric element 2 contracts or expands due to electrostriction and deflects the diaphragm 3 in the direction of the arrow. Each color liquid material existing in the pressurizing chamber 4 formed in the middle of the liquid material flow path is pressurized. As a result, the pressurized liquid materials are ejected as droplets L from the nozzles 32 (21 to 31) drilled in the bottom surface member 8 of the droplet ejection head 20. The discharge mechanism may be, for example, a so-called thermal method using a heating element as a driver.

  By the way, in this embodiment, in order to simplify the description, it is assumed that 12 nozzles are formed in each nozzle block. Actually, however, tens to hundreds of nozzles are formed at a predetermined pitch. ing. In addition, each nozzle block may have a plurality of nozzle rows such as two rows. For example, in the case of two rows, the nozzle drilling positions are in a staggered arrangement in which the nozzle rows are shifted from each other by a half pitch. In some cases.

  Returning again to FIG. 1, the carriage moving device 106 has a bridge structure straddling the device base 101, and includes a bearing mechanism such as a ball screw or a linear guide in the Y-axis direction and the Z-axis direction, and is input from the control device 10. Based on the carriage position control signal indicating the Y and Z coordinates of the carriage 104, the carriage 104 is moved in the Y-axis direction and the Z-axis direction.

  The control device (control unit) 11 outputs a stage position control signal to the stage moving device 103, outputs a carriage position control signal to the carriage moving device 106, and outputs drawing data and a drive control signal to the droplet discharge head 20. By performing synchronous control of the droplet discharge operation by the droplet discharge head 20, the positioning operation of the color filter substrate P by the movement of the work stage 102, and the positioning operation of the droplet discharge head 20 by the movement of the carriage 104, color control is performed. A droplet of the color filter material is discharged to a predetermined position on the filter substrate P.

  Incidentally, in general, the droplet discharge head 5 has a variation in the discharge amount of the droplet L between the nozzles N. The reason for this is, for example, the structure of the flow path inside the head. Therefore, the droplet discharge device IJ of the present embodiment detects the discharge state of the droplet L at each nozzle N of the droplet discharge head 5 prior to the discharge operation to the color filter substrate P by the droplet discharge head 5, The variation between the nozzles N is adjusted.

  In addition, the droplet discharge head 20 may affect the discharge amount of each nozzle by discharging droplets from both adjacent nozzles. Therefore, although details will be described later in the present embodiment, the ejection characteristics of the nozzles are acquired in a state where the influence on the ejection characteristics between the nozzles is prevented by performing ejection based on the three ejection patterns. Furthermore, since the droplet discharge head 20 according to the present embodiment has a small amount of the droplet L based on one discharge operation, a plurality of (for example, six droplets in the present embodiment) discharged from each nozzle. One dot (liquid reservoir) is formed by the liquid droplets. Thereby, it is possible to form a sufficiently large dot, and it is possible to accurately correct the variation in the discharge amount between the nozzles based on the area of each dot as will be described later.

  Specifically, the droplet discharge device IJ includes a nozzle detection unit 50 that detects the discharge state of the droplet L at each nozzle of the droplet discharge head 20 prior to the discharge operation to the color filter substrate P by the droplet discharge head 20. It is provided in an area outside the work stage 102 in the movement area of the carriage 104.

  FIG. 3 is a perspective view showing a schematic configuration of the nozzle inspection unit 50. As shown in FIG. 3, the nozzle inspection unit 50 includes a medium (dot receiving unit) 51 in which a plurality of dots are arranged from the droplet discharge head 20, and a dot arranged on a medium 51 made of, for example, inkjet printer paper. And a measuring unit 55 for measuring each area. The measuring unit 55 is constituted by an imaging means such as a CCD camera. The media 51 can be taken up by the take-up mechanism 51a, and after the nozzle inspection is completed, the other nozzle inspection can be continuously performed by winding up the ink jet printer paper after the droplet discharge.

  As shown in FIG. 4, the medium 51 is composed of a sheet-like base material 54 in which a receiving layer 53 is provided on a base paper 52, and the surface of the receiving layer 53 forms a recording surface suitable for ink jet recording. The solvent of the color filter material discharged from each nozzle soaks into the receiving layer 53.

  Next, the nozzle discharge characteristic acquisition process performed by the droplet discharge device IJ of the present embodiment will be described with reference to FIG. FIG. 5 is a functional block diagram when the droplet discharge device IJ functions as a discharge characteristic acquisition device.

  As shown in FIG. 5, the control device 10 includes a CPU 11 and a memory 12, a drive control signal generation circuit 13, and a discharge amount measurement circuit 14 that are connected to each other via a bus line.

  Although not shown, the control device 10 includes a control circuit that controls the movement of the stage moving device 103 and a control circuit that controls the movement of the carriage moving device 106. When the CPU 11 discharges droplets onto the color filter substrate P, the CPU 11 performs calculations relating to the discharge start position, main scanning, and sub-scanning, and drives the linear motor and carriage moving device for the stage moving device 103 via the control circuit. Each drive linear motor 106 is configured to output a predetermined control signal and move. As a result, the nozzle and the color filter substrate P are moved relative to each other to function as a droplet discharge device IJ that draws a predetermined pattern or image on the color filter substrate P.

  In the control device 10, the CPU 11 performs the nozzle classification calculation and the discharge control calculation according to the discharge characteristic acquisition processing program stored in the memory 12. Based on the calculated ejection control data, the drive control signal generation circuit 13 is controlled to generate a predetermined drive control signal and output it to the droplet ejection head 20. In the droplet discharge head 20, a drive signal generated according to the output drive control signal is applied to the piezoelectric element 2 of each nozzle, and a liquid material (color filter material) is discharged from each nozzle. The discharged liquid is output to the discharge amount measuring circuit 14 by the nozzle inspection unit 50 described later, indicating the discharge amount discharged from each nozzle. The CPU 11 controls the discharge amount measuring circuit 14 to measure the actual discharge amount for each nozzle from the data representing the discharge amount. Then, a discharge characteristic acquisition calculation is performed using the drive signal generated according to the output drive control signal and the actual discharge amount, and the calculation data is stored in the memory 12 to acquire the discharge characteristic for each nozzle. To do.

  Next, how a drive signal to be applied to the piezoelectric element of each nozzle is generated from the discharge control data will be described with reference to FIGS. FIG. 6 is a diagram showing a main part of the electrical configuration of the droplet discharge device IJ. FIG. 7 is a timing chart of the drive signal and each control signal.

  As shown in FIG. 6, the droplet discharge head 20 includes a piezoelectric element 2 provided for each of the nozzles 21 to 32 (see FIG. 2) of the nozzle block 20 </ b> R (20 </ b> G, 20 </ b> B) and a drive signal to each piezoelectric element 2. A switching circuit 136 for switching supply / non-supply of COM, and a drive for selecting a supply line of drive signals related to supply to each piezoelectric element 2 (hereinafter referred to as COM lines (COM1 to COM4)). And a signal selection circuit 135. The droplet discharge head 20 is electrically connected to the drive control signal generation circuit 13.

  The drive control signal generation circuit 13 includes D / A converters (DACs) 133A, 133B, 133C, and 133D that generate independent drive signals COM, and waveform data WD1 of the drive signals COM generated by the D / A converters 133A to 133D. , WD2, WD3, WD4, a waveform data selection circuit 132 having a memory therein, and a data memory 131 for storing the discharge control data calculated by the CPU 11. The drive signals generated by the D / A converters 133A to 133D are output to the COM lines (COM1 to COM4), respectively.

  In the droplet discharge head 20, one GND electrode of the piezoelectric element 2 is connected to a ground line (GND) of the D / A converters 133A to 133D. The other electrode 2c of the piezoelectric element 2 is connected to the COM lines (COM1 to COM4) via the switching circuit 136 and the drive signal selection circuit 135. The switching circuit 136, the drive signal selection circuit 135, and the waveform data selection circuit 132 are inputted with a clock signal CLK and a latch signal LAT corresponding to each ejection timing.

  The data memory 131 stores the following data for each discharge timing of the liquid material from the droplet discharge head 20. That is, the ejection data SIA that defines switching of supply / non-supply (ON / OFF) of the drive signal COM to each piezoelectric element 2 and the drive signal that defines the COM lines (COM1 to COM4) corresponding to each piezoelectric element 2 Selection data SIB and waveform number data WN that defines the types of waveform data WD1 to WD4 input to D / A converters 133A to 133D. The ejection data SIA, the drive signal selection data SIB, and the waveform data WD1 to WD4 are each output as data having a predetermined number of bits. Incidentally, in this embodiment, the ejection data SIA is 1 bit (0, 1) per nozzle, the drive signal selection data SIB is 2 bits (0, 1, 2, 3) per nozzle, and the waveform number. The data WN is composed of 7 bits (0 to 127) per 1D / A converter. Of course, these data structures can be appropriately changed.

  Next, specific generation timings of these control signals, that is, ejection data SIA, drive signal selection data SIB, waveform data WD1 to WD4, and drive signals applied to the piezoelectric elements will be described with reference to FIG. .

  As shown in the figure, in the timing period from time t0 to t1, the ejection data SIA, drive signal selection data SIB, and waveform number data WN are converted into serial signals, respectively, and the switching circuit 136, drive signal selection circuit 135, waveform data selection are performed. It is output to the circuit 132. Then, at the timing of time t1, each data is latched in each circuit by the latch signal LAT, so that the electrodes 2c of each piezoelectric element 2 related to ejection (ON) are each designated by the drive signal selection data SIB. It will be in the state connected to a COM line (COM1-COM4). For example, when the drive signal selection data SIB is 0, 1, 2, 3, the corresponding electrode 2c of the piezoelectric element 2 is connected to COM1, COM2, COM3, COM4, respectively. In addition, waveform data WD1 to WD4 of drive signals related to the generation of the D / A converters 133A to 133D are set.

  In the subsequent timing period of time t1 to t2, the drive signals COM1 to COM4 are generated in a series of steps of increasing potential, holding potential, and decreasing potential according to the waveform data WD1 to WD4 set at the timing of time t1, respectively. The Then, any one of the generated COM1 to COM4 drive signals COM is supplied to the piezoelectric element 2 connected to the COM line, and the piezoelectric element 2 is driven to be deformed.

  Similarly, in the timing period from time t1 to time t2, the ejection data SIA, the drive signal selection data SIB, and the waveform number data WN are converted into serial signals, and the switching circuit 136, the drive signal selection circuit 135, and the waveform data selection circuit 132, respectively. Is output. Each data is latched in each circuit at the timing of time t2, so that the electrode 2c of each piezoelectric element 2 related to ejection (ON) is connected to each COM line (COM1 to COM1) designated by the drive signal selection data SIB. COM4) is connected.

  In the timing period from time t2 to t3, the drive signals COM for COM1 to COM4 are generated according to the waveform data WD1 to WD4 set at the timing of time t2, and the piezoelectric element 2 in a state connected to the COM line Any one of the drive signals COM is supplied, and the piezoelectric element 2 is driven to be deformed.

  Thus, based on the output data in the timing period from time t (n−1) to t (n) (n = 1, 2, 3...), The timing from time t (n) to t (n + 1). The generation of the drive signal COM and the supply to the piezoelectric element 2 are repeatedly performed during the period, and the liquid material is discharged from each nozzle.

  Here, the potential increasing component in the drive signal COM plays a role of expanding the pressurizing chamber 4 (see FIG. 2) and drawing the liquid into the nozzle. In addition, the potential drop component plays a role of contracting the pressurizing chamber 4 to push the liquid material out of the nozzle and eject it.

  The time component and the voltage component related to the potential increase, potential retention, and potential decrease in the drive signal COM closely depend on the discharge amount of the liquid material discharged by the supply. In particular, in a piezoelectric head, since the discharge amount exhibits a good linearity with respect to a change in voltage component, the maximum and minimum potential difference is defined as the drive voltage Vh, and this is a drive signal for obtaining the discharge characteristics. Use as

  The drive signal COM to be generated is not limited to a simple trapezoidal wave as shown in the present embodiment, and it is possible to appropriately adopt various known shapes. It is also possible to use other components such as a time component related to a potential drop as a drive signal when acquiring ejection characteristics. This may be effective even when a different driving method (for example, a thermal method) is adopted.

  In the present embodiment, a plurality of waveform data having different drive voltages Vh are prepared, and independent waveform data WD1 to WD4 are input to the D / A converters 133A to 133D, respectively. The drive signal COM having the voltage waveform is generated. Therefore, it is possible to output drive signals COM having different drive voltages Vh to the COM lines (COM1 to COM4). The types of waveform data that can be prepared are the types corresponding to the information amount of the waveform number data WN (here, 7 bits, 128 types), and the drive voltage Vh of the voltage value used for obtaining the ejection characteristics is generated. It has become.

  Thus, the droplet discharge device IJ includes the drive signal selection data (SIB) that defines the correspondence between each piezoelectric element 2 (that is, each nozzle) and the COM line (COM1 to COM4), and each COM line (COM1 to COM4). By appropriately setting the waveform number data (WN) that defines the correspondence between the drive signal COM and the type of drive signal COM (drive voltage Vh), an appropriate drive signal COM is supplied to each nozzle to discharge the liquid material. It is possible.

  Next, specific processing performed by the nozzle inspection unit 50 will be described. The procedure is defined in the processing program (see FIG. 3) stored in the memory 12, and the CPU 11 reads this processing program and executes the processing using the memory 12 as a working memory as appropriate.

  When using the nozzle inspection unit 50, the droplet discharge device IJ moves the carriage 104 by the carriage moving device 106 so that the droplet discharge head 20 and the medium 51 (see FIG. 4) face each other.

  First, the nozzle block and the number of nozzles are acquired. In the present embodiment, it is assumed that the nozzle block and the number of nozzles formed in the droplet discharge head 20 from which discharge characteristics are acquired are stored in the memory 12 in advance. Therefore, the CPU 11 reads the stored nozzle block and the number of nozzles, and acquires each nozzle block and the number of nozzles. Note that an identification number may be assigned to the droplet discharge head 20 provided in the carriage 104, and the identification number, the corresponding nozzle block, and the number of nozzles may be stored in the memory 12 of the control device 10 in advance. . In this case, the CPU 11 may read this identification number by reading means (not shown) and read the nozzle block and the number of nozzles corresponding to the identification number stored in the memory 12.

  Next, the nozzles are divided into predetermined numbers of three or more continuous, and the nozzles to be discharged and the discharge timing are set. In this embodiment, it is assumed that a predetermined number of 3 or more is stored in the memory 12 in advance. Therefore, the CPU 11 reads the predetermined number stored, and classifies the nozzles in each nozzle block as a nozzle group for each predetermined number.

In the present embodiment, the predetermined number stored in the memory 12 is three, and the predetermined number is divided every three. In addition, all the nozzles that are arranged in the same arrangement order in all the divided nozzle groups and that can be taken under the condition that three nozzles do not continue across all the nozzle groups are arranged together with the discharge timing thereof. Is set as a discharge nozzle that discharges water.
In the present embodiment, since the same processing is performed for the nozzle blocks 20R, 20G, and 20B, the nozzle block 20B will be described as a representative.

  FIG. 8 is an explanatory diagram showing the nozzles 21 to 32 in the nozzle block 20B into nozzle groups, and the discharge nozzles and their discharge timings in each of the divided nozzle groups. The discharge timing indicates each timing period from time t (n) to t (n + 1) in FIG.

  As illustrated, the nozzle block 20B is divided into four nozzle groups of nozzles 21 to 23, nozzles 24 to 26, nozzles 27 to 29, and nozzles 30 to 32 for every three nozzles. As shown on the right side of the drawing, all the discharge nozzles that can be taken in the same arrangement order for each divided nozzle group, that is, all three nozzles that can be taken on the condition that the three nozzles 21 to 32 are not continuous. A combination of (dotted circles in the figure) and its discharge timing are set.

  Specifically, in the present embodiment, ejection based on three ejection patterns is performed. In the first ejection pattern P1, nozzles 21, 22, 24, 25, 27, 28, 30, and 31 are ejection nozzles. In the second ejection pattern P2, the nozzles 21, 23, 24, 26, 27, 29, 30, and 32 are ejection nozzles. In the third ejection pattern P3, the nozzles 22, 23, 25, 26, 28, 29, 31, and 32 are ejection nozzles.

  As shown in FIG. 8, in the timing period from t1 to t2, the timing period from t2 to t3, and the timing period from t3 to t4, ejection based on the first ejection pattern P1 is performed. In the timing period from t4 to t5, the timing period from t5 to t6, and the timing period from t6 to t7, ejection based on the second ejection pattern P2 is performed. In the timing period from t7 to t8, the timing period from t8 to t9, and the timing period from t9 to t10, ejection based on the third ejection pattern P3 is performed. As described above, in this embodiment, when the same number of different ejection patterns are repeated, the droplet ejection head 20 is controlled so that the same type of ejection pattern is continuous.

  In each of the nozzles 21 to 32, in the timing period from time t1 to t10, the discharge timing that is the timing period for discharging the liquid material is six times, and the non-discharge timing that is the timing period that the liquid material is not discharged is three times. Set for the nozzle. All the nozzles except the nozzle 21 and the nozzle 32 at both ends of the nozzle block 20B only have the nozzles before and after the arrangement order alternately as the discharge nozzles at each discharge timing. Never become. As described above, in the droplet discharge head 20 according to the present embodiment, each dot arranged on the medium 51 by the discharge operation from each nozzle is configured by the same number (six in this embodiment) of droplets. .

  Subsequently, ejection control data is generated and output processing is performed. The CPU 11 generates ejection control data for determining the drive signal COM supplied to the piezoelectric element 2 and its supply timing, and performs output processing on the drive control signal generation circuit 13. Specifically, four drive signals COM1 to COM4 are generated by the D / A converters 133A to 133D (see FIG. 4) by the discharge control data output process, and the drive signal selection circuit 135 in the droplet discharge head 20 is generated. And the switching circuit 136 supply one of the four drive signals COM1 to COM4 to the piezoelectric element 2 of the selected discharge nozzle for each timing period based on the LAT signal, and to the three discharge patterns P1 to P3 described above. By repeating the ejection operation based on this, dots composed of the same number of droplets (6 droplets in the present embodiment) can be arranged on the medium 51.

In the present embodiment, as described above, one dot is configured based on a plurality of (six) droplet ejection operations at each nozzle.
By the way, the shape of the dots configured in this manner is not stable due to the influence of the penetration of the droplets continuously ejected onto the medium 51 into the receiving layer 53, and the variation becomes large. Specifically, when the droplet L penetrates into the receiving layer 53, the landing shape changes. Dots constructed by overlapping droplets in such a state may not be stabilized in shape and may vary. If the dots arranged on the receiving layer 53 vary, the reliability of the measured value of the dot area measured by the measuring unit 55 is lowered, and the reliability of the data output to the discharge amount measuring circuit 14 is reduced. descend. Then, there is a possibility that the variation correction of the discharge amount between the nozzles as described later cannot be performed satisfactorily.

  Therefore, in the present embodiment, the control device 10 controls the timing at which the droplets L are ejected from each of the plurality of nozzles in the dot arrangement process on the medium 51. Specifically, the ejection timing of the droplet ejection head 20 is controlled so that the droplets L are sequentially ejected from each of the plurality of nozzles at intervals at which the landing diameter of the droplet L does not change due to penetration into the receiving layer 53. ing.

  In the present embodiment, each dot is formed by repeating the same ejection pattern three times as described above. For example, in the nozzles 22, 25, 28, and 31, at time t3 as shown in FIG. After the droplet is ejected, the droplet is not ejected until time t7. Therefore, in the present embodiment, the control device 10 sets the driving condition of the droplet discharge head 20 so that the timing period from time t4 to t7 is 200 μsec or less.

  As a result, as shown in FIG. 9A, the droplet L1 disposed on the receiving layer 53 from the nozzles 22, 25, 28, 31 in the timing period of time t1 to t4 slightly permeates the receiving layer 53. However, the landing diameter of the droplet L1 does not change greatly. Therefore, the droplet L2 can be ejected in an overlapping manner in the timing period from time t7 to t8 with respect to the droplet L1 holding a constant landing diameter A on the receiving layer 53. As a result, the droplet L1 ejected first and the droplet L2 ejected later are integrated in a state of maintaining a stable shape, specifically, a substantially circular shape in plan view. Accordingly, the finally formed dots 60 have a stable shape as shown in FIG. 9B, that is, a substantially perfect circle shape in plan view.

  Accordingly, the area of each dot 60 arranged on the medium 51 can be accurately measured by the nozzle inspection unit 50 (measurement unit 55), and a highly reliable measurement result can be output to the discharge amount measuring circuit 14. it can. Accordingly, the discharge amount variation is corrected by correcting the drive voltage based on highly reliable data, and the color filter material can be appropriately discharged from each nozzle to the color filter substrate P. Specifically, the drive control signal generation circuit (correction unit) 13 generates a drive signal to be applied to the piezoelectric element 2 corresponding to the nozzle having a relatively large dot area (a relatively large droplet discharge amount). The voltage between the nozzles can be reduced by lowering the voltage or by increasing the voltage of the drive signal applied to the piezoelectric element 2 corresponding to the nozzle having a relatively small dot area (relatively small ejection amount of the droplet L). Dispersion of the discharge amount can be corrected.

  Furthermore, according to the present embodiment, in order to perform the discharge operation based on the first, second, and third discharge patterns P1, P2, and P3, the number of nozzles that discharge continuously between adjacent nozzles is two or less, The liquid material can be discharged so that there are no three or more continuous discharge nozzles. This eliminates the influence of the discharge amount that occurs when three or more nozzles are discharged continuously, so that the discharge amount of the measurement target nozzle by discharging droplets from the nozzles on both sides of the discharge characteristic acquisition target nozzle is reduced. (The influence on the discharge characteristics due to the mutual influence between nozzles) does not occur. Therefore, as described above, the area of each dot arranged on the medium 51 can be further stabilized, and the area measurement with high reliability is possible.

  FIG. 10 is an explanatory diagram of a method for forming a color filter on the color filter substrate P using the droplet discharge head 20 of the droplet discharge device IJ. FIG. 10A is a schematic plan view of a color filter substrate P that is a functional liquid discharge target. FIG. 10B is a partially enlarged plan view of the color filter substrate P. FIG.

  In FIG. 10A, a plurality of panel areas CA are set on the surface of a large-area color filter substrate P formed of glass, plastic or the like. Each panel area CA is separated (cut) from each other and provided as an individual color filter substrate. Within each panel area CA, as shown in FIG. 10B, a plurality of pixels PX (predetermined areas) arranged in a dot shape are provided. The pixels PX are arranged in a matrix in each panel area CA, and a color filter layer (colored layer) CF is formed for each pixel PX.

  In the present embodiment, the vertical direction (the direction indicated by arrows A1 and A2) in FIG. 10B is the main scanning direction, and the direction orthogonal to the main scanning direction (the horizontal direction in the drawing) is the sub-scanning direction. The ejection head 20 is disposed on the color filter substrate P. Then, while moving (scanning) the color filter substrate P relative to the droplet discharge head 20 in the main scanning direction and the sub-scanning direction, the liquid of the color filter material is discharged from each of the plurality of nozzles of the droplet discharge head 20. By discharging the droplet L a plurality of times (six times), each dot is arranged on the color filter substrate P, and thereby the color filter layer CF is formed on each pixel PX.

  The droplet discharge head 20 is scanned a plurality of times for one panel area CA. For example, after the droplet discharge head 20 is scanned in the main scanning direction, the droplet discharge head 20 is moved (scanned) in the sub-scanning direction, and scanning is performed again in the main scanning direction. After moving (sub-scanning) from the left end to the right end of one panel area CA, it returns to the left end of the panel area CA again, and scans in the main scanning direction at a position slightly different from the position where the ejection has already been performed. Then, by performing such scanning a plurality of times, the color filter layer CF having a desired film thickness is formed on all the pixels PX in the panel area CA.

  In FIG. 10B, the droplet discharge head 20 is inclined with respect to the sub-scanning direction in order to match the pitch of the nozzles of the droplet discharge head 20 with the pitch of the pixels PX. If the pitch of the nozzles and the pitch of the pixels PX are set so as to satisfy a predetermined correspondence relationship, it is not necessary to tilt the droplet discharge head 20 obliquely.

  The color filter layer CF is formed by arranging R (red), G (green), and B (blue) colors in an appropriate arrangement form such as a so-called stripe arrangement, delta arrangement, mosaic arrangement, or the like. Therefore, in the functional liquid ejection step shown in FIG. 10B, the droplet ejection heads 20 that sequentially eject the R, G, and B color filter materials are sequentially used to form R, G, and B on one color filter substrate P. An array of color filter layers CF of three colors G and B is formed.

  According to the present embodiment, each dot arranged on the color filter substrate P by the droplet discharge head 20 as described above is composed of a uniform amount of droplets. A high quality color filter layer CF can be produced.

  In the above-described embodiment, the case where the droplet discharge device IJ using the droplet discharge device IJ in which the variation in the discharge amount between the nozzles is adjusted is used in the method of manufacturing the color filter has been described. The present invention can be applied not only to the manufacture of a filter but also to a film forming process in which a uniform film thickness is required and the formation of uneven stripes is a problem.

DESCRIPTION OF SYMBOLS IJ ... Droplet discharge apparatus, P ... Color filter board | substrate, PX ... Pixel (predetermined area | region), L ... Droplet, 10 ... Control apparatus (control part), 13 ... Drive control signal generation circuit (correction means), 20 ... Liquid Drop ejection head, 21 to 32... Nozzle, 51... Medium (dot receiving portion), 53... Receiving layer, 55.

Claims (7)

A plurality of nozzles for discharging droplets, and a droplet discharge head for discharging the droplets from the nozzles corresponding to a discharge pattern;
The receiving layer in which the discharging operation of the droplet discharging head based on the plurality of discharging patterns is repeated, and a plurality of dots each formed by the same number of the droplets discharged from each nozzle are provided on the surface A dot receiver arranged in the
A measuring unit for measuring the area of each of the dots arranged in the dot receiving unit;
Correction means for correcting variations in the discharge amount of the droplets among the plurality of nozzles based on the measurement result of the measurement unit;
When arranging the plurality of dots in the dot receiver, the droplets are discharged so that the interval between the ejection operations of the nozzles is shorter than the time during which the droplet diameter changes due to penetration into the receiving layer. A liquid droplet ejection apparatus comprising: a control unit that controls ejection timing of the ejection head.   2. The droplet according to claim 1, wherein the control unit controls the droplet discharge head so that the same type of the discharge pattern is in a continuous state when the different discharge patterns are repeated the same number of times. Discharge device.   3. The liquid droplet ejection apparatus according to claim 1, wherein the control unit drives the liquid droplet ejection head so that an interval between the ejection operations of the nozzles is within 200 μsec. A droplet discharge method for discharging the droplets from a nozzle corresponding to a discharge pattern using a droplet discharge head having a plurality of nozzles for discharging droplets,
Prior to the operation of discharging the droplet onto the substrate,
Based on the plurality of ejection patterns, the ejection operation of the droplet ejection head is repeated, and a plurality of dots each composed of the same number of the droplets are arranged at least on a dot receiving portion provided with a receiving layer on the surface. Placement process;
A measuring step of measuring the area of each of the dots arranged in the dot receiver;
A correction step of correcting variations in the discharge amount of the droplets between the plurality of nozzles based on the measurement result of the measurement unit,
In the arranging step, the ejection operation of the droplet ejection head is performed such that the interval between ejection operations of the nozzles is shorter than the time during which the droplet landing diameter changes due to penetration into the receiving layer. A method for ejecting liquid droplets.   2. The droplet discharge apparatus according to claim 1, wherein, in the arranging step, when the different discharge patterns are repeated the same number of times, the same type of the discharge patterns are in a continuous state.   4. The droplet discharge method according to claim 3, wherein in the arranging step, the discharge operation of each nozzle is performed at intervals of 200 μsec or less.   Using the droplet discharge device according to any one of claims 1 to 3 or the droplet discharge method according to any one of claims 4 to 6, to a predetermined region provided on a substrate. A color filter manufacturing method, wherein the functional liquid is disposed to form a color filter.

Images