JP2010212555A - Gas laser oscillation device, and gas laser processing machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve the cooling of a laser gas without using a blower means and a stabilized resonator enabling a high-quality laser beam to be extracted, compatibly. <P>SOLUTION: A discharge means including electrodes 5, 6 and a D.C. power source 7 is arranged in a chamber 2 of a laser gas passage 1 for circulating the laser gas; a magnetic field generation means 12 for applying a magnetic field in a direction orthogonal to a direct current direction 13 caused by the discharge means is arranged; the magnetic field is applied in the direction orthogonal to the current flow through the laser gas caused by the discharge means in the chamber 2, to the current flow, thereby the laser gas turned into plasma by discharge is moved by electromagnetic force and a blower means like a conventional one can be eliminated. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a gas laser oscillation device and a gas laser processing machine mainly used for processing a sheet metal or the like.

  FIG. 5 shows an example of a schematic configuration of a conventional axial flow type gas laser oscillation apparatus. Hereinafter, a conventional axial gas laser oscillator will be described with reference to FIG.

  In the conventional axial-flow type gas laser oscillation device shown in this figure, a discharge tube 101 made of a dielectric material such as glass is connected to ring-shaped electrodes 102 and 103 provided around the discharge tube 101, and the electrodes 102 and 103. The power supply 104, the portion sandwiched between the electrodes 102 and 103 in the discharge tube 101, and the discharge space 105, the total reflection mirror 106, and the partial reflection that discharges when the electrodes 102 and 103 are energized from the power supply 104. A mirror 107, a laser beam 108 output from the partial reflection mirror 107, an arrow 109 in the direction in which the laser gas flows, a laser gas flow path 110, a heat exchanger 111, a heat exchanger 112, a blower 113, and a laser gas introduction unit 114 are provided.

  The total reflection mirror 106 and the partial reflection mirror 107 are fixedly disposed on the constituent members that support the discharge tube 101 so as to be positioned at both ends of the discharge space 105, thereby forming an optical resonator.

  The laser gas flows through the laser gas flow path 110 in the direction of the arrow 109, and the axial flow of the laser gas introduction section 114, the discharge space 105 in the discharge tube 101, the heat exchanger 111, the air blowing means 113, the heat exchanger 112, and the laser gas flow path 110 in this order. It circulates in the mold gas laser oscillator.

  The heat exchangers 111 and 112 lower the temperature of the laser gas whose temperature has been raised by the discharge in the discharge space 105 and the operation of the blower disposed inside the blower means 113. The air blowing means 113 blows air so as to obtain a gas flow of about 100 m / sec in the discharge space 105. The laser gas channel 110 and the discharge tube 101 are connected by a laser gas introduction unit 114.

  FIG. 6 shows an example of a schematic configuration of the laser processing machine. Hereinafter, the laser processing machine will be described with reference to FIG.

  In this figure, the laser beam 108 output from the above-described conventional axial gas laser oscillator is changed by reflecting the traveling direction in the direction of the workpiece 116 by the reflecting mirror 115, and the condensing provided inside the torch 117. The laser beam 108 is condensed into a high-density energy beam by the lens 118 and irradiated onto the workpiece 116.

  The workpiece 116 is fixed on the machining table 119, and the torch 117 is moved relative to the workpiece 116 by the X-axis motor 120 or the Y-axis motor 121 so as to process a predetermined shape. It is configured.

  In such a conventional axial-flow type gas laser oscillation device, the laser gas sent out from the air blowing means 113 passes through the laser gas flow path 110 and is introduced into the discharge tube 101 from the laser gas introduction part 114. In this state, a discharge is generated in the discharge space 105 from the electrodes 102 and 103 connected to the power source 104. The laser gas in the discharge space 105 is excited by obtaining this discharge energy. The excited laser gas is brought into a resonance state by an optical resonator formed by the total reflection mirror 106 and the partial reflection mirror 107, and the laser is emitted from the partial reflection mirror 7. A beam 108 is output. This laser beam 108 is used for applications such as laser processing.

In general, in order to perform laser oscillation, the laser gas temperature in the discharge tube 101 needs to be a certain temperature or lower. For example, in the case of a CO ₂ gas laser, this temperature is 200 ° C., and if the gas temperature exceeds 200 ° C., the oscillation efficiency rapidly decreases and a predetermined laser output cannot be obtained.

  In the conventional axial flow type laser oscillation device, the air blowing means 110 and the heat exchangers 111 and 112 are components necessary for keeping the laser gas temperature at about 30 ° C. at all times. When the laser gas is fed into the discharge tube 101, the laser gas temperature is about 30 ° C.

  When the discharge is started, the laser gas temperature rises due to the discharge energy, and after passing through the discharge tube, the gas temperature rises to near 200 ° C. The temperature of the laser gas decreases to about 30 ° C. by passing through the heat exchanger 111. After passing through the air blowing means 113, the gas temperature rises again to near 150 ° C. due to the compression heat, but again passes through the heat exchanger 112 and falls to about 30 ° C.

This laser gas is again introduced into the discharge tube 101. In the case of a CO ₂ laser oscillation device with a laser beam output of several kw class, the gas flow rate passing through the discharge tube 101 is several hundred m / sec, and the time during which the laser gas stays in the discharge tube 101 is only a few msec. is there. If the laser gas stays in the discharge tube 101 for a longer time, the temperature rises above 200 ° C. due to the temperature rise, and a sudden decrease in oscillation efficiency occurs.

Thus, in the conventional axial flow type gas laser oscillating device and gas laser processing machine, particularly in the CO ₂ laser oscillating device in which the output of the laser beam can be several kw or more, it is essential to provide the blowing means 13. As the air blowing means 13, a roots blower or a turbo blower is generally used. For example, when explaining a turbo blower, a laser turbo blower has an oil mist generated from oil that lubricates a drive device, for example, an electric motor, in order to keep the impeller rotating portion that directly acts on the laser gas clean. A seal structure that aerodynamically separates the vehicle drive unit is used.

  The laser oscillation device having a configuration different from that of the axial-flow type laser oscillation device described above is configured to increase the output of the gas laser without performing gas circulation cooling by a blower. There is also a so-called slab laser in which a discharge space is provided between the electrodes and the gas temperature rise due to the discharge is suppressed by diffusion cooling due to contact with the parallel plate (for example, see Patent Documents 1 and 2).

  FIG. 7 shows an example of a schematic configuration of a conventional slab laser. Hereinafter, a conventional slab laser oscillation apparatus will be described with reference to FIG.

  The conventional slab laser shown in FIG. 7 has electrodes 102 and 103 made of parallel plates, and is provided with a pipe-shaped cooling water flow passage that is not shown but is internally insulated and connected to a cooling water circulation device (not shown). is doing.

  In addition, a power source 104 is connected to the electrodes 102 and 103, and when the electrodes 102 and 103 are energized, a space where the electrodes 102 and 103 face each other is used as a discharge space.

  The laser gas located in the discharge space is excited by obtaining discharge energy, and the excited laser gas is brought into a resonance state by an optical resonator formed by the total reflection mirror 106 and the partial reflection mirror 107, and the laser beam is emitted from the partial reflection mirror 107. 108 is output.

  Since this slab laser uses a diffusion cooling method, it is necessary to set the distance between the parallel electrodes 102 and 103 to the order of several mm in order to increase the cooling efficiency.

In this case, since the space of the optical resonator is also limited by the parallel plate of the order of several millimeters, the optical resonator becomes a waveguide type using reflection on the surface of the parallel plate, and impure light generation due to scattering in the waveguide This naturally reduces the quality of light. The laser beam 108 can be extracted only in a low-quality rectangle.
JP-A-63-192285 JP-A-8-97489

  Now, the seal structure used in the above-described axial-flow type laser oscillation device is required to be compatible with the air blowing capability by the high-speed and high-precision rotation of the impeller. Therefore, the laser turbo blower is naturally an expensive part, and the total material cost of the device is reduced. Since it accounts for several tens of percent, it has become a major impediment to reducing initial costs.

  The blower uses a motor for rotating the impeller, and its power consumption accounts for several tens of percent of the total power consumption of the gas laser oscillation device, which is great in reducing power consumption and running costs. It was an impediment.

  On the other hand, there is a so-called slab laser as a means for cooling the laser gas without using the seal structure, that is, without using the gas cooling method by the blowing means. There are some disadvantages.

  The ideal form of a laser resonator is a system that forms a standing wave of light by reflection on a pair of mirror surfaces that face each other, although it is partially reflected by a folding mirror. It is called a container and can extract the light of the highest quality.

  FIG. 8 is a diagram showing an optical resonator portion of the axial flow type gas laser oscillation device. As shown in FIG. 8, it is possible to take out a high-quality laser beam 108 having a conical shape.

  That is, it has been a big problem to achieve both a cooling of the laser gas without using a blowing means and a stable resonator capable of extracting a high-quality laser beam.

  In order to solve the above problems, the present invention includes a laser gas flow path for circulating a laser gas, a chamber disposed in the laser gas flow path, and a discharge means disposed in the chamber, and a current flows by the discharge means. Magnetic field generating means for applying a magnetic field in the direction perpendicular to the direction is provided.

  With this configuration, a current flowing in the laser gas by the discharge means in the chamber and a magnetic field applied to the current in a direction perpendicular to the current, the laser gas converted into plasma by the discharge moves by electromagnetic force.

  In addition, an electromagnet is used as the magnetic field generating means, and a magnetic field control device is provided that controls the power supplied to the electromagnet to vary the magnetic field strength.

  With this configuration, the moving speed of the laser gas can be varied.

  Further, a gas temperature detecting means and an electromagnetic force control device for inputting a signal from the gas temperature detecting means and outputting a signal to the magnetic field control device are provided in the vicinity of the discharging means.

  With this configuration, the moving speed of the laser gas according to the temperature of the laser gas can be controlled.

  Also, a second discharge means is provided at a position between the chamber and the heat exchanger in the laser gas circulation direction of the laser gas flow path, and a magnetic field is applied in the direction in which the current flows by the second discharge means and the direction perpendicular thereto. The second magnetic field generating means is provided.

  With this configuration, a current flowing in the laser gas by the second discharge means and a magnetic field applied to the current in a direction perpendicular to the current, the laser gas converted into plasma by the discharge moves by electromagnetic force.

  Further, an electromagnet is used as the second magnetic field generating means, and a second magnetic field control device is provided that controls the power supplied to the electromagnet to vary the magnetic field strength.

  With this configuration, the moving speed of the laser gas can be varied.

  Further, a gas temperature detection means and a second electromagnetic force control device for inputting a signal from the gas temperature detection means and outputting a signal to the second magnetic field control device are provided in the vicinity of the discharge means. is there.

  With this configuration, the moving speed of the laser gas according to the temperature of the laser gas can be controlled.

  According to the present invention, it is possible to provide a gas laser oscillation apparatus and a gas laser processing machine that can easily realize a large output and high light quality of a gas laser without performing gas circulation cooling by a blower, and achieve a large initial and running cost.

(Embodiment 1)
FIG. 1 is a configuration diagram of a laser oscillation apparatus according to Embodiment 1 of the present invention. FIG. 1A is a view showing a cross section of the apparatus perpendicular to the traveling direction of the laser beam, and FIG. 1B is a view showing a cross section of the apparatus in the A direction of FIG.

The laser oscillation apparatus according to the first embodiment of the present invention shown in the figure has a laser gas flow path 1 for circulating a laser gas composed of CO ₂ , nitrogen, and helium. The laser gas flow path 1 includes a chamber 2 and a heat exchanger. 3 is arranged in the direction of the laser gas flow 4 in the laser gas flow path 1, and the laser gas circulated in the heat exchanger 3 is cooled.

  Electrodes 5 and 6 are disposed in the chamber 2, respectively, and these electrodes 5 and 6 are connected to a power source 7 that can output a pulse with a direct current. The electrodes 5 and 6 and the power source 7 constitute a discharging means.

  Further, in the chamber 2, a discharge space 8 which is a space for discharging the laser gas by the discharge means is provided, and a total reflection mirror 9 and a partial reflection mirror 10 are arranged so as to optically sandwich the discharge space 8. Thus, an optical resonator is configured and the laser beam 11 is output.

  The chamber 2 is provided with a magnetic field generating means 12 and arranged so that the magnetic field direction 14 is perpendicular to the direct current direction 13 in the discharge space 8. The DC current direction 13, the magnetic field direction 14, and the direction of the laser gas flow 4 are orthogonal to each other in the triaxial direction, and the magnetic field direction 14 is determined according to the DC current direction 13 and the direction of the laser gas flow 4.

  Next, the operation will be described.

  A DC high voltage power is applied between the electrodes 5 and 6 from the power source 7 to discharge into the laser gas, a discharge space 8 is formed in the chamber 2, the laser gas is excited, and resonated by an optical resonator to resonate the laser beam 11. Is output. Then, a magnetic field is applied to the discharge space 8 in the direction of the magnetic field 14 by the magnetic field generating means 12. As described above, when a magnetic field in the magnetic field direction 14 is applied to the DC current direction 13 in the discharge space 8, an electromagnetic force is applied to the plasma-like laser gas in the discharge space 8 in a direction perpendicular to the DC current direction 13 and the magnetic field direction 14.

  By making the direction of the electromagnetic force coincide with the laser gas flow direction 4, the laser gas can be moved in the laser gas flow direction 4 by the electromagnetic force.

  By this electromagnetic force, the laser gas in the discharge space 8 flows through the laser gas flow path 1 to the heat exchanger 3, is cooled, and is then introduced into the chamber 2 again.

  In this way, the laser gas can be circulated in the laser gas flow path 1 by applying a DC discharge and a magnetic field to the laser gas introduced into the discharge space 8.

  The electromagnetic force F [N] is F = μ · H · I, where I is current [I], magnetic field is H [A / m], discharge space length is L [m], and magnetic permeability is μ.・ It is expressed by the expression L.

  Therefore, as the discharge current I increases, the electromagnetic force F increases and the gas moving speed also increases. As the discharge current increases, the temperature rise of the laser gas also increases, so that it is necessary to move the gas faster. From this point, it can be seen that the method of moving the laser gas by the electromagnetic force is a method that is in principle compatible with the discharge gas movement of the gas laser.

(Embodiment 2)
FIG. 2 is a configuration diagram of a laser oscillation apparatus according to Embodiment 2 of the present invention. FIG. 2A is a view showing a cross section of the apparatus in a direction perpendicular to the traveling direction of the laser beam, and FIG. 2B is a view showing a cross section of the apparatus in the direction A of FIG.

  In addition, the same code | symbol is provided about the same structure as the structure demonstrated in Embodiment 1, and the description is abbreviate | omitted.

  The difference between the second embodiment and the first embodiment is that the magnetic field generating means 12 is an electromagnet and the magnetic field intensity can be varied by the magnetic field control device 15 and the vicinity of the discharge space 8. A gas temperature detecting means 16 such as a thermocouple or a thermistor is installed in the sensor, and the detected temperature signal is output to the electromagnetic force control device 17. The electromagnetic force control device 17 is connected to the power supply 7 and the magnetic field control device 15. It has been done.

  With this configuration, the laser gas temperature is constantly monitored, and either or both of the discharge current value and the magnetic field are controlled to the optimum value so that the laser gas temperature is maintained at 200 ° C. or less suitable for laser oscillation, and the electromagnetic force is changed. I can do it.

  Specifically, when the laser gas temperature approaches 200 degrees, control is performed to increase the circulation speed of the laser gas. For example, the magnetic field control device 15 is controlled while controlling the DC power value from the power source 7 within a range in which the laser output is not varied, and the power supplied to the magnetic field generating means 12 is increased to increase the circulation speed of the laser gas.

  In the present embodiment, the laser gas temperature is detected by the gas temperature detecting means 16, but the output state of the power source 7 may be detected instead of the laser gas temperature, for example. In that case, the relationship between the output state of the power supply 7 and the temperature rise of the laser gas is measured in advance, and the database is used.

  Further, in this embodiment, the laser gas temperature is detected by the gas temperature detection means 16, but for example, a designated value of the laser output may be detected to replace the laser gas temperature. In that case, the relationship between the specified value of the laser output and the temperature rise of the laser gas is measured in advance, and the database is used.

(Embodiment 3)
FIG. 3 is a configuration diagram of a laser oscillation apparatus according to Embodiment 3 of the present invention. 3A is a view showing a cross section of the apparatus in a direction perpendicular to the traveling direction of the laser beam, FIG. 3B is a view showing a cross section of the apparatus in the direction A in FIG. 3A, and FIG. ) Is a view showing a cross section of the apparatus in the B direction of FIG. In addition, the same code | symbol is provided about the same structure as the structure demonstrated in Embodiment 1, 2, and the description is abbreviate | omitted.

  The difference between the third embodiment and the first embodiment is that the second electrodes 18 and 19 provided at a position between the chamber 2 and the heat exchanger 3 in the laser gas circulation direction of the laser gas flow path 1 and this A second discharge means is configured from a second power source 20 capable of outputting a pulse with a direct current to the second electrodes 18, 19, and flows into a second discharge space 21 sandwiched between the second electrodes 18, 19. The second magnetic field generator 24 is arranged so that the second magnetic field direction 23 is perpendicular to the direct current direction 22 of the current, and the direct current direction 22, the magnetic field direction 23, and the direction of the laser gas flow 4 are three axes. The magnetic field direction 23 is determined in accordance with the direct current direction 22 and the direction of the laser gas flow 4.

  In this configuration, the second discharge space 21 for generating the electromagnetic force for moving the laser gas is provided separately from the discharge space 8 for optical resonance, so that the discharge intensity for optical resonance and the generation of electromagnetic force are generated. Therefore, it is possible to separate the discharge intensity and the more flexible control with a high degree of freedom.

(Embodiment 4)
FIG. 4 is a configuration diagram of a laser oscillation apparatus according to Embodiment 4 of the present invention. 4A shows a cross section of the apparatus perpendicular to the direction of travel of the laser beam, FIG. 4B shows a cross section of the apparatus in the direction A in FIG. 4A, and FIG. ) Is a view showing a cross section of the apparatus in the B direction of FIG. In addition, the same code | symbol is provided about the same structure as the structure demonstrated in Embodiment 1, 2, 3, and the description is abbreviate | omitted.

  The difference between the fourth embodiment and the second embodiment is that the second electrodes 18 and 19 provided at positions between the chamber 2 and the heat exchanger 3 in the laser gas circulation direction of the laser gas channel 1 A second discharge means is configured from a second power source 20 capable of outputting a pulse with a direct current to the second electrodes 18, 19, and flows into a second discharge space 21 sandwiched between the second electrodes 18, 19. The second magnetic field generator 24 is arranged so that the second magnetic field direction 23 is perpendicular to the direct current direction 22 of the current, and the direct current direction 22, the magnetic field direction 23, and the direction of the laser gas flow 4 are three axes. The magnetic field direction 23 is determined in accordance with the direct current direction 22 and the direction of the laser gas flow 4.

  In this configuration, the second discharge space 21 for generating the electromagnetic force for moving the laser gas is provided separately from the discharge space 8 for optical resonance, so that the discharge intensity for optical resonance and the generation of electromagnetic force are generated. Therefore, it is possible to separate the discharge intensity and the more flexible control with a high degree of freedom.

  Also, the electromagnetic force can be changed by controlling either the discharge current value and / or the magnetic field to an optimum value so that the gas temperature is maintained at 200 ° C. or less suitable for laser oscillation.

  In the present embodiment, the laser gas temperature is detected by the gas temperature detecting means 16, but the output state of the power source 7 may be detected instead of the laser gas temperature, for example. In that case, the relation between the output state of the power source 7 and the temperature rise of the laser gas is measured in advance, and the database is used.

  Further, in this embodiment, the laser gas temperature is detected by the gas temperature detection means 16, but for example, a designated value of the laser output may be detected to replace the laser gas temperature. In that case, the relationship between the specified value of the laser output and the temperature rise of the laser gas is measured in advance, and the database is used.

  Furthermore, even if Embodiment 1 and Embodiment 4, Embodiment 2 and Embodiment 3 are combined, there is a further effect.

  The gas laser oscillation apparatus according to the embodiment of the present invention having the above configuration can be used in the gas laser processing machine shown in FIG. 6, and the schematic configuration will be described with reference to FIG.

  In this figure, a laser beam 108 (reference numeral 11 in the description of each embodiment) output from the gas laser oscillation apparatus according to the above-described embodiment of the present invention is reflected in the direction of the work 116 by the reflecting mirror 115. The laser beam 108 is condensed into a high-density energy beam by a condensing lens 118 provided inside the torch 117 and irradiated onto the workpiece 116.

  The workpiece 116 is fixed on the machining table 119, and the torch 117 is moved relative to the workpiece 116 by the X-axis motor 120 or the Y-axis motor 121 so as to process a predetermined shape. It is configured.

  INDUSTRIAL APPLICABILITY According to the present invention, it is possible to easily realize a large output of a gas laser without performing gas circulation cooling by a blower, and it is useful as a gas laser oscillation device and a gas laser processing machine capable of realizing a large initial and running cost.

Configuration diagram of a gas laser oscillation apparatus according to Embodiment 1 of the present invention Configuration diagram of gas laser oscillation apparatus according to Embodiment 2 of the present invention Configuration diagram of gas laser oscillation apparatus according to Embodiment 3 of the present invention Configuration diagram of gas laser oscillation apparatus according to Embodiment 4 of the present invention Configuration diagram of conventional gas laser oscillator Configuration diagram of gas laser processing machine Configuration diagram of optical resonator in conventional slab type diffusion cooling system Configuration diagram of optical resonator in axial flow gas laser oscillator

DESCRIPTION OF SYMBOLS 1 Laser gas flow path 2 Chamber 3 Heat exchanger 4 Laser gas flow direction 5, 6 Electrode 7 Power supply 8 Discharge space 9 Total reflection mirror 10 Partial reflection mirror 11 Laser beam 12 Magnetic field generation means 13 DC current direction 14 Magnetic field direction 15 Magnetic field control apparatus 16 Gas temperature detection means 17 Electromagnetic force control device

Claims (12)

A laser gas flow path for circulating a laser gas, a chamber disposed in the laser gas flow path, a discharge means disposed in the chamber, and a heat exchanger disposed in the laser gas flow path, and a direction of current flow by the discharge means And a gas laser oscillation device provided with magnetic field generating means for applying a magnetic field in the perpendicular direction. The gas laser oscillation apparatus according to claim 1, wherein an electromagnet is used as the magnetic field generating means, and a magnetic field control device is provided that controls electric power supplied to the electromagnet to vary the magnetic field intensity. 3. The gas laser oscillation device according to claim 2, further comprising: a gas temperature detection unit provided in the vicinity of the discharge unit; and an electromagnetic force control unit that inputs a signal from the gas temperature detection unit and outputs a signal to the magnetic field control unit. A laser gas flow path for circulating a laser gas, a chamber disposed in the laser gas flow path, discharge means disposed in the chamber, and a heat exchanger disposed in the laser gas flow path, and circulation of the laser gas in the laser gas flow path Second discharge means is provided at a position between the chamber and the heat exchanger in a direction, and second magnetic field generation means for applying a magnetic field in a direction perpendicular to the direction of current flow by the second discharge means. Gas laser oscillation device provided. The gas laser oscillation apparatus according to claim 4, wherein an electromagnet is used as the second magnetic field generating means, and a second magnetic field control device is provided that controls electric power supplied to the electromagnet to vary the magnetic field strength. 6. A gas temperature detection means and a second electromagnetic force control device for inputting a signal from the gas temperature detection means and outputting a signal to the second magnetic field control device in the vicinity of the discharge means. Gas laser oscillation device. A laser gas flow path for circulating a laser gas, a chamber disposed in the laser gas flow path, a discharge means disposed in the chamber, and a heat exchanger disposed in the laser gas flow path, and a direction of current flow by the discharge means And a gas laser oscillating device provided with a magnetic field generating means for applying a magnetic field in the orthogonal direction, and changing the traveling direction of the table on which the workpiece is placed and the laser beam output from the gas laser oscillating device in the direction of the workpiece A gas laser processing machine comprising: an optical means; a torch in which condensing means for condensing the laser beam into a high-density energy beam; and a driving means for moving the work and the torch relative to each other. 8. The gas laser processing machine according to claim 7, wherein an electromagnet is used as the magnetic field generating means, and a magnetic field control device is provided that controls electric power supplied to the electromagnet to vary the magnetic field strength. 3. A gas laser processing machine according to claim 2, further comprising: a gas temperature detecting means provided in the vicinity of the discharging means; and an electromagnetic force control device for inputting a signal from the gas temperature detecting means and outputting a signal to the magnetic field control device. A laser gas flow path for circulating laser gas, a chamber disposed in the laser gas flow path, discharge means disposed in the chamber, and a heat exchanger disposed in the laser gas flow path, other than the chamber of the laser gas flow path A gas laser oscillation apparatus provided with a second discharge means at a position and a second magnetic field generation means for applying a magnetic field in a direction perpendicular to the direction of current flow by the second discharge means is mounted. A table to be placed, an optical means for changing the traveling direction of the laser beam output from the gas laser oscillation device to the direction of the workpiece, and a condensing means for condensing the laser beam into a high-density energy beam. A gas laser processing machine comprising a torch and a driving means for relatively moving the workpiece and the torch. 11. The gas laser processing machine according to claim 10, wherein an electromagnet is used as the second magnetic field generating means, and a second magnetic field control device is provided that controls electric power supplied to the electromagnet to vary the magnetic field strength. 12. A gas temperature detection means and a second electromagnetic force control device for inputting a signal from the gas temperature detection means and outputting a signal to the second magnetic field control device in the vicinity of the discharge means. Gas laser processing machine.

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