JP2010203932A5 - - Google Patents

Claims (8)

A substrate that bends in the thickness direction by force ,
Both ends are supported by the base, a beam resulting thick Misuberi strain by the electric field,
The drive signal for generating the electric field is input, and is disposed on both surfaces defining the thickness of the beam so as to avoid the central region of the beam and sandwich the central region. including, physical quantity sensor and a collector electrode. In claim 1,
Said substrate has have a opening that surrounds the beam,
The beam is crosslinked with the inside of the front Symbol opening, the physical quantity sensor. In claim 2,
The base has a portion parallel to the beam of the frame portion ;
The part that the parallel and have a constricted portion constricted in the thickness direction, the physical quantity sensor. In claim 1,
It said substrate has have at least two projections on one side,
The beam is supported lifting the two said projections, are crosslinked between the two projections, the physical quantity sensor. In claim 4,
It said substrate, during the previous SL two collision portions, that have have a constricted portion that extends in a direction intersecting the direction connecting the both ends of the beam, the physical quantity sensor. In any one of Claims 1 thru | or 5,
Further, the extending into a central region side of the beam in parallel to the base side or et before Kihari beams, counters displaced in opposite phase with respect to the displacement of the bending vibration of the beam caused with the said sliding thickness strain A physical quantity sensor with a beam. In any one of Claims 1 thru | or 6,
The Doshu wavenumber vibration of thickness slip strain is a signal for detecting a physical quantity, the physical quantity sensor of the beam. A physical quantity sensor according to any one of claims 1 to 7 ,
A physical quantity measuring device comprising: a detection unit configured to detect a change in frequency of the bending vibration or the thickness shear vibration of the beam.