JP2010203422A - Roots type vacuum pump - Google Patents

Roots type vacuum pump Download PDF

Info

Publication number
JP2010203422A
JP2010203422A JP2009053046A JP2009053046A JP2010203422A JP 2010203422 A JP2010203422 A JP 2010203422A JP 2009053046 A JP2009053046 A JP 2009053046A JP 2009053046 A JP2009053046 A JP 2009053046A JP 2010203422 A JP2010203422 A JP 2010203422A
Authority
JP
Japan
Prior art keywords
roots
housing
casing
collar
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009053046A
Other languages
Japanese (ja)
Other versions
JP4911790B2 (en
Inventor
Komei Yokoi
康名 横井
Yoshinobu Ito
義展 伊藤
Toshiaki Kato
利明 加藤
Masami Kato
雅美 加藤
Ikuto Yokoi
郁人 横井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anlet Co Ltd
Original Assignee
Anlet Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anlet Co Ltd filed Critical Anlet Co Ltd
Priority to JP2009053046A priority Critical patent/JP4911790B2/en
Publication of JP2010203422A publication Critical patent/JP2010203422A/en
Application granted granted Critical
Publication of JP4911790B2 publication Critical patent/JP4911790B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a roots type vacuum pump that prevents the generation of an abnormal sound by a confining phenomenon of liquid between root rotors and prevents the shortening of a bearing service life caused by the infiltration of moisture into a shaft seal part. <P>SOLUTION: A clearance groove 17 of a cross-sectional shape such as a shape for expanding a clearance with an inner peripheral surface 1a of a casing 1 toward the rotational direction is formed over the total length of respective lobes on a peripheral surface of a position separated by a predetermined dimension to a side in the rotational direction from the center line of the respective lobes 16 of the root rotor 15. The shaft seal part 8 fixes a moisture shake-off ring 30 arranged between a collar 26 and a bearing 9 to a rotary shaft 18 of the root rotor 15 by installing one or a plurality of housing oil seals 25 and the collar 26 in order from a place near to an installation surface 7b to the casing 1 in an inner diameter part of the housing 7. A clearance formed on an opposed surface between the collar 26 and the ring 30 is formed so as to form a labyrinth seal, and a passage 7c for returning the liquid stored in the shaft seal part 8 to a vacuum chamber is arranged at the discharge port side of the housing 7. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、封水又は真空室への液の流入を可能とした単段又は多段ルーツ式真空ポンプに関する。   The present invention relates to a single-stage or multi-stage roots type vacuum pump that enables inflow of liquid into sealed water or a vacuum chamber.

従来の3葉ルーツ式真空ポンプにおけるルーツロータは、周面が凸円弧曲線で回転軸の中心から等角度間隔に配置された3個のローブと、各ローブ同士を接続する周面が凹円弧曲線の谷部からなる形状とされ、2本のルーツロータは、ケーシングの内面とローブの外面とのクリアランス及び相互のクリアランスを0.1〜0.3mm程度に保ってケーシングに挿入されている。   The roots rotor in the conventional three-leaf roots vacuum pump has three lobes arranged at equiangular intervals from the center of the rotation axis, and the circumferential surface connecting the lobes is a concave arc curve. The root rotor is formed into a shape, and the two roots rotors are inserted into the casing while maintaining a clearance between the inner surface of the casing and the outer surface of the lobe and a mutual clearance of about 0.1 to 0.3 mm.

湿式仕様で真空室に毎分1〜5&#8467;の水を封入する場合又は真空室に流入するガスから液が発生する場合には、前記クリアランスを約0.5〜1mmと大きく設けるが、封入する水の量的変化によりポンプ性能にバラツキを生じ、ルーツロータ間に液体が閉じ込まれてしまう閉じ込み現象(いわゆる液ガミ)による異常音・異常振動を発生する。また、ルーツロータの回転軸を支持するハウジング内の軸封部へ水分が勢いよく浸入した場合には、軸受けのオイルを洗い流して潤滑不良を生じ、軸受けの寿命を低下させる等のトラブルがあった。   When the wet chamber is filled with 1-5 &#8467; of water per minute in the vacuum chamber or when liquid is generated from the gas flowing into the vacuum chamber, the clearance is set as large as about 0.5 to 1 mm. Variations in the pump performance due to changes in the quantity of water to be enclosed cause abnormal noise and vibration due to a confinement phenomenon (so-called liquid smear) in which the liquid is confined between the root rotors. In addition, when water has vigorously entered the shaft sealing portion in the housing that supports the rotation shaft of the roots rotor, there has been a problem that the oil in the bearing is washed away, resulting in poor lubrication and shortening the life of the bearing.

特許文献1には、ローブの中心線を回転方向に少し越えた周面に、ほぼV形の切込溝を軸方向に形成したルーツロータが開示されている。その出願考案は、圧送液体、気体中に固形粒子が混入する場合において、ローブの外面とケーシングの内周面との間に該粒子が噛み込んで摩耗を生ずることを目的としたものである。この文献には、前述した軸封部への水分の浸入による軸受けの寿命低下に関する事項について何も記載されていない。   Patent Document 1 discloses a roots rotor in which a substantially V-shaped cut groove is formed in the axial direction on a circumferential surface slightly beyond the center line of the lobe in the rotational direction. The object of the application is to cause wear when solid particles are mixed in a pumping liquid or gas, and the particles are caught between the outer surface of the lobe and the inner peripheral surface of the casing. This document does not describe anything related to the bearing life reduction due to the ingress of moisture into the shaft seal described above.

実開昭54−58605号公報Japanese Utility Model Publication No. 54-58605

本発明の目的は、ルーツロータ間での液体の閉じ込み現象による異常音・異常振動の発生や軸封部への水分の浸入による軸受け寿命の低下を防止するルーツ式真空ポンプを提供することにある。   An object of the present invention is to provide a roots-type vacuum pump that prevents occurrence of abnormal noise and vibration due to a liquid confinement phenomenon between roots rotors and a decrease in bearing life due to moisture intrusion into a shaft seal. .

前記目的を達成するために請求項1に記載した発明は、吸込口と吐出口を形成したケーシング内に一対の3葉ルーツロータを設け、そのケーシングの側方の開口部を塞ぐように取り付けられたハウジングに装着した軸受けによりルーツロータの回転軸を支持すると共に該ロータ側と該軸受けとの間における空気の出入りを防止する軸封部を設け、その吸込口と吐出口の間が連通することのないように両ルーツロータを回転させることにより吸込口から吸引した空気を吐出口から吐出するルーツ式真空ポンプにおいて、
前記ルーツロータの各ローブの中心線から回転方向側に所定寸法だけ離れた位置の周面に、前記ケーシングの内周面との隙間が回転方向に向かって広がるような断面形状の逃し溝を各ローブの全長にわたって形成し、
前記軸封部は、前記ハウジングの内径部に1又は複数のハウジングオイルシールとカラーとを前記ケーシングへの取付け面に近い箇所から順に装着し、そのカラーと前記軸受けとの間に配置した水分振り切り用リングを前記回転軸に固定すると共に該カラーと該リングとの対向面に生ずる隙間をラビリンスシールが形成されるように設けられ、その軸封部に溜まる液を真空室に戻す通路を当該ハウジングの吐出口側に設けたことを特徴とする。
In order to achieve the object, the invention described in claim 1 is provided with a pair of three-leaf root rotors in a casing in which a suction port and a discharge port are formed, and is attached so as to close a side opening of the casing. A shaft seal is provided to support the rotating shaft of the roots rotor by a bearing mounted on the housing and prevent air from entering and exiting between the rotor side and the bearing so that the suction port and the discharge port do not communicate with each other. In the roots-type vacuum pump that discharges air sucked from the suction port by rotating both roots rotors from the discharge port,
Each lobe is provided with a relief groove having a cross-sectional shape on the circumferential surface at a position away from the center line of each lobe of the roots rotor by a predetermined dimension in the rotational direction so that a gap with the inner circumferential surface of the casing widens in the rotational direction. Formed over the entire length of
The shaft seal portion is provided with one or more housing oil seals and a collar on the inner diameter portion of the housing in order from a position close to the mounting surface to the casing, and a water shaker disposed between the collar and the bearing. The housing is provided with a passage for returning the liquid accumulated in the shaft seal portion to the vacuum chamber, in which a labyrinth seal is formed so that a clearance formed between the collar and the ring is fixed to the rotating shaft. It is characterized in that it is provided on the discharge port side.

同様の目的を達成するために請求項2に記載した発明は、吸込口と吐出口を形成したケーシング内に一対の3葉ルーツロータを設け、そのケーシングの側方の開口部を塞ぐように取り付けられたハウジングに装着した軸受けによりルーツロータの回転軸を支持すると共に該ロータ側と該軸受けとの間における空気の出入りを防止する軸封部を設け、その吸込口と吐出口の間が連通することのないように両ルーツロータを回転させることにより吸込口から吸引した空気を吐出口から吐出するルーツ式真空ポンプにおいて、
前記ルーツロータの各ローブの中心線から回転方向側に所定寸法だけ離れた位置の周面に、前記ケーシングの内周面との隙間が回転方向に向かって広がるような断面形状の逃し溝を各ローブの全長にわたって形成し、
前記軸封部は、前記ハウジングの内径部に1又は複数のハウジングオイルシールとカラーとを前記ケーシングへの取付け面に近い箇所から順に装着し、そのカラーと前記軸受けとの間に配置した水分振り切り用リングを前記回転軸に固定すると共に該カラーと該リングとの対向面に生ずる隙間をラビリンスシールが形成されるように設けられ、
その軸封部に溜まる液をドレンとして外部に排出するドレン通路を当該ハウジングに設けると共に該ドレン通路の出口側にドレン排出用バルブを設けたことを特徴とする。
In order to achieve the same object, the invention described in claim 2 is provided so that a pair of three-leaf root rotors are provided in a casing in which a suction port and a discharge port are formed, and a side opening of the casing is closed. A shaft seal is provided to support the rotating shaft of the roots rotor by a bearing mounted on the housing and prevent air from entering and exiting between the rotor side and the bearing, and the suction port and the discharge port communicate with each other. In a roots-type vacuum pump that discharges air sucked from the suction port by rotating both roots rotors so that there is no discharge from the discharge port,
Each lobe is provided with a relief groove having a cross-sectional shape on the circumferential surface at a position away from the center line of each lobe of the roots rotor by a predetermined dimension in the rotational direction so that a gap with the inner circumferential surface of the casing widens in the rotational direction. Formed over the entire length of
The shaft seal portion is provided with one or more housing oil seals and a collar on the inner diameter portion of the housing in order from a position close to the mounting surface to the casing, and a water shaker disposed between the collar and the bearing. A ring for fixing the ring to the rotary shaft and a gap formed on the facing surface of the collar and the ring so that a labyrinth seal is formed,
A drain passage for discharging the liquid accumulated in the shaft seal portion as a drain to the outside is provided in the housing, and a drain discharge valve is provided on the outlet side of the drain passage.

同様の目的を達成するために請求項3に記載した発明は、請求項1又は2に記載のルーツ式真空ポンプにおいて、前記逃し溝が、三角形状の断面に形成されていることを特徴とするものである。   In order to achieve the same object, the invention described in claim 3 is the Roots-type vacuum pump according to claim 1 or 2, wherein the relief groove is formed in a triangular cross section. Is.

(請求項1の発明)
このルーツ式真空ポンプによれば、ルーツロータ間における液体の閉じ込み現象による異常音・異常振動の発生を防止することができる。さらに、ハウジングの軸封部へ浸入した水分・液は、水分振り切り用リングによって吹き飛ばされて軸封部内に溜まり、通路を介して真空室に戻されるため軸受け寿命の低下を防止することができる。
(Invention of Claim 1)
According to this Roots type vacuum pump, it is possible to prevent the occurrence of abnormal noise and vibration due to the confinement phenomenon of the liquid between the Roots rotors. Furthermore, since the moisture / liquid that has entered the shaft seal portion of the housing is blown off by the moisture swing-off ring and collected in the shaft seal portion and returned to the vacuum chamber through the passage, it is possible to prevent the bearing life from being reduced.

(請求項2の発明)
このルーツ式真空ポンプによれば、ルーツロータ間における液体の閉じ込み現象による異常音・異常振動の発生を防止することができる。さらに、ハウジングの軸封部へ浸入した水分・液は、水分振り切り用リングによって吹き飛ばされて軸封部内に溜まり、ドレンとしてドレン排出用バルブにより適時に外部に排出することができる。
(Invention of Claim 2)
According to this Roots type vacuum pump, it is possible to prevent the occurrence of abnormal noise and vibration due to the confinement phenomenon of the liquid between the Roots rotors. Furthermore, the moisture / liquid that has entered the shaft seal portion of the housing is blown off by the water swing ring and collected in the shaft seal portion, and can be discharged outside as a drain by a drain discharge valve at an appropriate time.

(請求項3の発明)
このルーツ式真空ポンプでは、逃し溝を三角形状の断面に形成しており、ルーツロータ間に閉じ込められる液体が逃し溝に進入して該液体の圧力が異常に高くなることが抑制されるため、異常音・異常振動の発生が生じなく円滑な回転作動が得られる。
(Invention of Claim 3)
In this Roots-type vacuum pump, the escape groove is formed in a triangular cross section, and it is possible to prevent the liquid confined between the Roots rotor from entering the escape groove and abnormally increasing the pressure of the liquid. Smooth rotation operation can be obtained without generating sound and abnormal vibration.

本発明にかかる3葉ルーツ式真空ポンプの縦断側面図Longitudinal side view of a three-leaf roots vacuum pump according to the present invention 同、要部の縦断正面図Same vertical section front view 軸封部の要部を示す断面図Sectional drawing which shows the principal part of a shaft seal part ハウジングを取付け面側から見た説明図Illustration of the housing as seen from the mounting surface 本発明にかかる他の実施例の3葉ルーツ式真空ポンプの縦断側面図Vertical side view of a three-leaf roots vacuum pump according to another embodiment of the present invention

以下に、本発明の最良の形態例を図面に基づいて説明する。   The best mode of the present invention will be described below with reference to the drawings.

本発明にかかる3段式3葉ルーツ式真空ポンプPを図1に示す。なお、この発明は、多段式3葉ルーツ式真空ポンプに限定されることなく、単段式3葉ルーツ式真空ポンプにも適用可能である。   A three-stage three-leaf roots vacuum pump P according to the present invention is shown in FIG. The present invention is not limited to a multi-stage three-leaf roots vacuum pump, but can also be applied to a single-stage three-leaf roots vacuum pump.

このルーツ式真空ポンプPは、吸込口4と吐出口5を形成したケーシング1内に上下一対の3葉ルーツロータ(以下、「ルーツロータ」という)15を設けている。図1に示すように、ケーシング1には、第1真空室2a、第2真空室2b、第3真空室2cが形成されていて、第1真空室2から後段の真空室2b,2cに向かうに従い容積が小さくなるように設けられている。そして、ルーツロータ15については、上記各真空室2a〜2cの大きさに合わせてロータ部15a〜15cの軸方向の長さが異なるように設けられている。7,7はケーシング1の側方の開口部を塞ぐように取り付けられたハウジングであり、ハウジング7,7に装着した軸受け9,9によりルーツロータ15の回転軸18を両端支持している。8はルーツロータ15側と軸受け9との間における空気の出入りを防止するためにハウジング7に設けた軸封部である。10は軸受け9の抜け止めを施すスナップリングである。   This roots type vacuum pump P is provided with a pair of upper and lower three-leaf root rotors (hereinafter referred to as “roots rotor”) 15 in a casing 1 in which a suction port 4 and a discharge port 5 are formed. As shown in FIG. 1, a first vacuum chamber 2 a, a second vacuum chamber 2 b, and a third vacuum chamber 2 c are formed in the casing 1, and are directed from the first vacuum chamber 2 to the subsequent vacuum chambers 2 b and 2 c. Accordingly, the volume is reduced. The roots rotor 15 is provided so that the axial lengths of the rotor portions 15a to 15c are different according to the sizes of the vacuum chambers 2a to 2c. Reference numerals 7 and 7 denote housings attached so as to close the side openings of the casing 1. The bearings 9 and 9 attached to the housings 7 and 7 support the rotating shaft 18 of the roots rotor 15 at both ends. Reference numeral 8 denotes a shaft seal provided in the housing 7 in order to prevent air from entering and leaving between the root rotor 15 side and the bearing 9. Reference numeral 10 denotes a snap ring for preventing the bearing 9 from coming off.

ルーツロータ15,15の回転軸18,18の一方端には、タイミングギヤ19,19が噛み合うように取り付けられてナット20,20により夫々固定されている。11はハウジング7に取り付けられたギヤカバーである。ギヤカバー11内には、下方のタイミングギヤ19の下部が浸る程度に潤滑用オイルが収容されている。他方のハウジング7には、上側のルーツロータ15の駆動軸としての回転軸18を挿入するシール13が装着されたカバー12を取り付けている。その回転軸18に取り付けたカップリング21は、図示しない電動モータにより駆動されるように設けられている。   Timing gears 19 and 19 are attached to one end of the rotation shafts 18 and 18 of the roots rotors 15 and 15 and are fixed by nuts 20 and 20, respectively. A gear cover 11 is attached to the housing 7. Lubricating oil is contained in the gear cover 11 to such an extent that the lower portion of the lower timing gear 19 is immersed. A cover 12 to which a seal 13 for inserting a rotary shaft 18 as a drive shaft of the upper roots rotor 15 is attached is attached to the other housing 7. The coupling 21 attached to the rotating shaft 18 is provided so as to be driven by an electric motor (not shown).

図2において、前記ロータ部15a〜15cの各ローブ16には、その中心線oから回転方向側に所定寸法だけ離れた位置の周面16aに、ケーシング1の内周面1aとの隙間が回転方向に向かって広がるような三角形状の断面の逃し溝17をローブの全長にわたって形成している。この逃し溝17は、湿式仕様時などにケーシング1内に封入される水による前記閉じ込み現象を防止するために設けている。   In FIG. 2, in each lobe 16 of the rotor portions 15a to 15c, a gap with the inner peripheral surface 1a of the casing 1 is rotated on a peripheral surface 16a at a position away from the center line o by a predetermined dimension in the rotational direction. A relief groove 17 having a triangular cross section extending in the direction is formed over the entire length of the lobe. The escape groove 17 is provided in order to prevent the above-described confinement phenomenon due to water sealed in the casing 1 during wet specifications.

なお、逃し溝17をローブ16の先端から離れた位置に設けているのは、ローブ16の先端からの空気の漏れを防止するためである。逃し溝17の容積については、ロータ部15a〜15cの外周面とケーシング1の内周面1aとにより囲まれる容積の約1〜3パーセントが適当である。また、ケーシング1内に封入される水量については、ルーツ式真空ポンプPの理論容積の約0.2〜0.5パーセントが妥当である。   The reason why the escape groove 17 is provided at a position away from the tip of the lobe 16 is to prevent air leakage from the tip of the lobe 16. As for the volume of the escape groove 17, about 1 to 3 percent of the volume surrounded by the outer peripheral surface of the rotor portions 15a to 15c and the inner peripheral surface 1a of the casing 1 is appropriate. Moreover, about 0.2 to 0.5 percent of the theoretical volume of the roots type vacuum pump P is appropriate for the amount of water sealed in the casing 1.

図3において、前記軸封部8については、ハウジング7の内径部7aに1又は複数、この実施例では2個のハウジングオイルシール25とカラー26とをケーシング1への取付け面7bに近い箇所(奥)から順に装着している。詳しくは、一方のハウジングオイルシール25は、カラー26のシール固定用穴26aに装着されている。そして、ハウジングオイルシール25のシール部25aは、ルーツロータ15の回転軸18に嵌着されたスリーブ23の外周面に弾接されている。24はスリーブ23の内部に装着されたoリングである。27はカラー26の外側に装着されたoリングである。28はハウジング7に装着されたグランドパッキンであり、グランドパッキン28の内周部は、ルーツロータ15の回転軸18に接触するように設けられている。   In FIG. 3, with respect to the shaft seal portion 8, one or a plurality of inner diameter portions 7 a of the housing 7, in this embodiment, two housing oil seals 25 and collars 26 are located close to the mounting surface 7 b to the casing 1 ( It is worn in order from the back. Specifically, one housing oil seal 25 is mounted in the seal fixing hole 26 a of the collar 26. The seal portion 25 a of the housing oil seal 25 is elastically contacted with the outer peripheral surface of the sleeve 23 fitted to the rotating shaft 18 of the roots rotor 15. Reference numeral 24 denotes an o-ring mounted inside the sleeve 23. Reference numeral 27 denotes an o-ring attached to the outside of the collar 26. Reference numeral 28 denotes a gland packing attached to the housing 7, and an inner peripheral portion of the gland packing 28 is provided so as to contact the rotating shaft 18 of the roots rotor 15.

30はカラー26と軸受け9との間に配置されていて、回転軸18に固定された水分振り切り用リングである。この水分振り切り用リング30とカラー26については、両者の対向面に生ずる隙間を公知のラビリンスシールが形成されるように設けられている。   Reference numeral 30 denotes a moisture swinging ring which is disposed between the collar 26 and the bearing 9 and is fixed to the rotating shaft 18. The moisture swing-off ring 30 and the collar 26 are provided so that a known labyrinth seal is formed in a gap formed on the opposed surfaces of both.

図3、図4に示すように、水分振り切り用リング30の位置するハウジング7の内径部7aの箇所と、同ハウジング7の前記吐出口5側の取付け面7bに至る間には、第1真空室2a、第3真空室2cから軸封部8に浸入する水分・液を各真空室2a、2cに戻すための通路7cが設けられている。   As shown in FIGS. 3 and 4, a first vacuum is formed between the location of the inner diameter portion 7 a of the housing 7 where the moisture swing-off ring 30 is located and the mounting surface 7 b of the housing 7 on the discharge port 5 side. A passage 7c is provided for returning the moisture / liquid entering the shaft seal 8 from the chamber 2a and the third vacuum chamber 2c to the vacuum chambers 2a and 2c.

また、ハウジング7には、タイミングギヤ19の回転作動により軸受け9に降りかかった潤滑用オイルの一部が軸封部8へ浸入しないようにギヤ室19aに戻すための通路7dを設けている。   The housing 7 is provided with a passage 7 d for returning to the gear chamber 19 a so that a part of the lubricating oil that has fallen on the bearing 9 due to the rotation operation of the timing gear 19 does not enter the shaft seal portion 8.

しかして、吸込口4と吐出口5の間が連通することのないように両ルーツロータ15,15を回転させることにより吸込口4から吸引した空気を第1真空室2aに吸い込んで圧縮し、ついで、第2真空室2b、第3真空室2cの順に吸い込んで圧縮しつつ吐出口5から吐出する本発明にかかる3段式3葉ルーツ式真空ポンプPが構成される。   Thus, by rotating both roots rotors 15 and 15 so that the suction port 4 and the discharge port 5 do not communicate with each other, the air sucked from the suction port 4 is sucked into the first vacuum chamber 2a and compressed. A three-stage three-leaf roots vacuum pump P according to the present invention is constructed which discharges from the discharge port 5 while sucking and compressing in the order of the second vacuum chamber 2b and the third vacuum chamber 2c.

つぎに、本発明にかかる3段式3葉ルーツ式真空ポンプPの特有な作用について説明する。
(1)ルーツ式真空ポンプPを湿式仕様でケーシング1内に水を封入する場合や洗浄機の乾燥用に使用されて水分の混入がある場合において、ケーシング1内に吸い込まれて圧縮された空気中の水分は逃し溝17に流入するので、ルーツロータ15のロータ部15a〜15cの間で閉じ込み現象が生ぜず、閉じ込み現象に起因する異常音や異常振動が発生しない。
(2)上記(1)の場合において、第1真空室2a、第3真空室2cから軸封部8に水分・液が浸入したとしても、水分振り切り用リングによって吹き飛ばされて軸封部内に溜まる。そして、それらは通路7cを介して各真空室2a、2cに戻されることから、軸受け9の潤滑用オイルが洗い流されることなく軸受け9の潤滑が良好に維持される。
Next, a specific action of the three-stage three-leaf roots vacuum pump P according to the present invention will be described.
(1) When the roots type vacuum pump P is wet-type and water is enclosed in the casing 1 or when the water is mixed by being used for drying the washing machine, the compressed air sucked into the casing 1 Since the moisture inside flows into the escape groove 17, a closing phenomenon does not occur between the rotor portions 15 a to 15 c of the roots rotor 15, and abnormal noise and abnormal vibration due to the closing phenomenon do not occur.
(2) In the case of (1) above, even if moisture or liquid enters the shaft seal portion 8 from the first vacuum chamber 2a or the third vacuum chamber 2c, it is blown off by the moisture swing-off ring and collected in the shaft seal portion. . Since they are returned to the vacuum chambers 2a and 2c via the passages 7c, the lubricating oil of the bearings 9 is maintained well without being washed away.

ところで、前述した3段式3葉ルーツ式真空ポンプPでは、軸封部に溜まる液を真空室に戻す構成としているところ(請求項1の発明に対応)、軸封部に溜まる液をドレンとして外部に排出する構成にすることもできる(請求項2の発明に対応)。   By the way, in the above-described three-stage three-leaf root type vacuum pump P, the liquid collected in the shaft seal part is returned to the vacuum chamber (corresponding to the invention of claim 1), and the liquid collected in the shaft seal part is used as a drain. It can also be configured to discharge to the outside (corresponding to the invention of claim 2).

即ち、図5に示す本発明に係る他の実施例の3段式3葉ルーツ式真空ポンプP′は、軸封部8に溜まる液をドレンとして外部に排出するドレン通路7eをハウジング7に設けている。そして、そのドレン通路7eの出口側に接続したドレンパイプ32にドレン排出用バルブ33を設けている。   That is, a three-stage three-leaf roots type vacuum pump P ′ according to another embodiment of the present invention shown in FIG. 5 is provided with a drain passage 7e in the housing 7 for discharging the liquid accumulated in the shaft seal portion 8 as a drain. ing. A drain discharge valve 33 is provided in the drain pipe 32 connected to the outlet side of the drain passage 7e.

なお、この3段式3葉ルーツ式真空ポンプP′は、軸封部に溜まる液をドレンとして外部に排出する構成以外については前記3段式3葉ルーツ式真空ポンプPの構成と同じ構成とされているので、それと同じ構成部分については符号を流用して図面に記入して説明を省略する。また、ドレン通路7eについては、図3に二点鎖線にて表した。   The three-stage three-leaf roots vacuum pump P ′ has the same configuration as that of the three-stage three-leaf roots vacuum pump P except that the liquid accumulated in the shaft seal is discharged to the outside as a drain. Therefore, the same components as those are denoted by reference numerals and are described in the drawings, and the description thereof is omitted. Further, the drain passage 7e is represented by a two-dot chain line in FIG.

上述した3葉ルーツ式真空ポンプP及び3葉ルーツ式真空ポンプP′では、何れも一対の3葉ルーツロータ15を上下方向に配置する縦型構造としているが、これに代えてルーツロータを横方向に平行に配置する横型構造とすることも可能である。横型構造の場合における他の構成部分については、縦型構造に準じた構成とするものとする。   In the above-described three-leaf root type vacuum pump P and three-leaf root type vacuum pump P ′, each has a vertical structure in which a pair of three-leaf root rotors 15 are arranged in the vertical direction. It is also possible to adopt a horizontal structure arranged in parallel. The other components in the case of the horizontal structure are configured according to the vertical structure.

P・・・本発明にかかる3段式3葉ルーツ式真空ポンプ
1・・・ケーシング
4・・・吸入口
5・・・吐出口
7・・・ハウジング
7c・・・通路
7e・・・ドレン通路
8・・・軸封部
9・・・軸受け
15・・・3葉ルーツロータ
16・・・ローブ
17・・・逃し溝
18・・・回転軸
25・・・ハウジングオイルシール
26・・・カラー
30・・・水分振り切り用リング
33・・・ドレン排出用バルブ
P: Three-stage three-leaf root vacuum pump 1 according to the present invention ... Casing 4 ... Suction port 5 ... Discharge port 7 ... Housing 7c ... Passage 7e ... Drain passage 8 ... Shaft seal 9 ... Bearing 15 ... 3-leaf root rotor 16 ... Robe 17 ... Relief groove 18 ... Rotating shaft 25 ... Housing oil seal 26 ... Collar 30 ..Moisture swing ring 33 ... Drain discharge valve

Claims (3)

吸込口と吐出口を形成したケーシング内に一対の3葉ルーツロータを設け、そのケーシングの側方の開口部を塞ぐように取り付けられたハウジングに装着した軸受けによりルーツロータの回転軸を支持すると共に該ロータ側と該軸受けとの間における空気の出入りを防止する軸封部を設け、その吸込口と吐出口の間が連通することのないように両ルーツロータを回転させることにより吸込口から吸引した空気を吐出口から吐出するルーツ式真空ポンプにおいて、
前記ルーツロータの各ローブの中心線から回転方向側に所定寸法だけ離れた位置の周面に、前記ケーシングの内周面との隙間が回転方向に向かって広がるような断面形状の逃し溝を各ローブの全長にわたって形成し、
前記軸封部は、前記ハウジングの内径部に1又は複数のハウジングオイルシールとカラーとを前記ケーシングへの取付け面に近い箇所から順に装着し、そのカラーと前記軸受けとの間に配置した水分振り切り用リングを前記回転軸に固定すると共に該カラーと該リングとの対向面に生ずる隙間をラビリンスシールが形成されるように設けられ、その軸封部に溜まる液を真空室に戻す通路を当該ハウジングの吐出口側に設けたことを特徴とするルーツ式真空ポンプ。
A pair of three-leaf root rotors are provided in a casing in which a suction port and a discharge port are formed, and the rotation shaft of the roots rotor is supported by a bearing mounted on a housing that is mounted so as to close an opening on the side of the casing. A shaft seal is provided to prevent air from entering and exiting between the side and the bearing, and the air sucked from the suction port is rotated by rotating both roots rotors so that the suction port and the discharge port do not communicate with each other. In the roots type vacuum pump that discharges from the discharge port,
Each lobe is provided with a relief groove having a cross-sectional shape on the circumferential surface at a position away from the center line of each lobe of the roots rotor by a predetermined dimension in the rotational direction so that a gap with the inner circumferential surface of the casing widens in the rotational direction. Formed over the entire length of
The shaft seal portion is provided with one or more housing oil seals and a collar on the inner diameter portion of the housing in order from a position close to the mounting surface to the casing, and a water shaker disposed between the collar and the bearing. The housing is provided with a passage for returning the liquid accumulated in the shaft seal portion to the vacuum chamber, in which a labyrinth seal is formed so that a clearance formed between the collar and the ring is fixed to the rotating shaft. A roots type vacuum pump characterized by being provided on the discharge port side.
吸込口と吐出口を形成したケーシング内に一対の3葉ルーツロータを設け、そのケーシングの側方の開口部を塞ぐように取り付けられたハウジングに装着した軸受けによりルーツロータの回転軸を支持すると共に該ロータ側と該軸受けとの間における空気の出入りを防止する軸封部を設け、その吸込口と吐出口の間が連通することのないように両ルーツロータを回転させることにより吸込口から吸引した空気を吐出口から吐出するルーツ式真空ポンプにおいて、
前記ルーツロータの各ローブの中心線から回転方向側に所定寸法だけ離れた位置の周面に、前記ケーシングの内周面との隙間が回転方向に向かって広がるような断面形状の逃し溝を各ローブの全長にわたって形成し、
前記軸封部は、前記ハウジングの内径部に1又は複数のハウジングオイルシールとカラーとを前記ケーシングへの取付け面に近い箇所から順に装着し、そのカラーと前記軸受けとの間に配置した水分振り切り用リングを前記回転軸に固定すると共に該カラーと該リングとの対向面に生ずる隙間をラビリンスシールが形成されるように設けられ、
その軸封部に溜まる液をドレンとして外部に排出するドレン通路を当該ハウジングに設けると共に該ドレン通路の出口側にドレン排出用バルブを設けたことを特徴とするルーツ式真空ポンプ。
A pair of three-leaf root rotors are provided in a casing in which a suction port and a discharge port are formed, and the rotation shaft of the roots rotor is supported by a bearing mounted on a housing that is mounted so as to close an opening on the side of the casing. A shaft seal is provided to prevent air from entering and exiting between the side and the bearing, and the air sucked from the suction port is rotated by rotating both roots rotors so that the suction port and the discharge port do not communicate with each other. In the roots type vacuum pump that discharges from the discharge port,
Each lobe is provided with a relief groove having a cross-sectional shape on the circumferential surface at a position away from the center line of each lobe of the roots rotor by a predetermined dimension in the rotational direction so that a gap with the inner circumferential surface of the casing widens in the rotational direction. Formed over the entire length of
The shaft seal portion is provided with one or more housing oil seals and a collar on the inner diameter portion of the housing in order from a position close to the mounting surface to the casing, and a water shaker disposed between the collar and the bearing. A ring for fixing the ring to the rotary shaft and a gap formed on the facing surface of the collar and the ring so that a labyrinth seal is formed,
A roots-type vacuum pump characterized in that a drain passage for discharging the liquid accumulated in the shaft seal portion to the outside as a drain is provided in the housing and a drain discharge valve is provided on the outlet side of the drain passage.
前記逃し溝が、三角形状の断面に形成されていることを特徴とする請求項1又は2に記載のルーツ式真空ポンプ。   The roots type vacuum pump according to claim 1 or 2, wherein the escape groove is formed in a triangular cross section.
JP2009053046A 2009-03-06 2009-03-06 Roots type vacuum pump Active JP4911790B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009053046A JP4911790B2 (en) 2009-03-06 2009-03-06 Roots type vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009053046A JP4911790B2 (en) 2009-03-06 2009-03-06 Roots type vacuum pump

Publications (2)

Publication Number Publication Date
JP2010203422A true JP2010203422A (en) 2010-09-16
JP4911790B2 JP4911790B2 (en) 2012-04-04

Family

ID=42965145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009053046A Active JP4911790B2 (en) 2009-03-06 2009-03-06 Roots type vacuum pump

Country Status (1)

Country Link
JP (1) JP4911790B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101985939A (en) * 2010-11-30 2011-03-16 东北大学 Dry vacuum pump with shaft end dynamic seal structure
CN104454542A (en) * 2014-11-25 2015-03-25 江苏泰隆减速机股份有限公司 Sealing Roots blower
CN104747723A (en) * 2015-03-04 2015-07-01 苏州通润驱动设备股份有限公司 Efficient shaft sealing structure of screw compressor
JP6120468B1 (en) * 2016-06-29 2017-04-26 Osセミテック株式会社 Gas transfer body for vacuum pump and vacuum pump using the same
CN116221110A (en) * 2023-03-31 2023-06-06 北京通嘉宏瑞科技有限公司 Roots pump rotor with pneumatic sealing groove and Roots pump
JP7436050B2 (en) 2021-12-15 2024-02-21 株式会社アンレット Multi-stage roots vacuum pump
CN117803567A (en) * 2024-02-27 2024-04-02 江苏天丰真空泵有限公司 Multistage Roots vacuum pump convenient to flowing back

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458605A (en) * 1977-10-20 1979-05-11 Hitachi Metals Ltd Cooling tank for induction furnace of crucible type
JPS55106389A (en) * 1979-02-09 1980-08-15 Seiko Epson Corp Crystal watch
JPS627991A (en) * 1985-06-27 1987-01-14 Anretsuto:Kk Water sealing type roots blower
JPH03130592A (en) * 1989-10-12 1991-06-04 Anlet Co Ltd Multi-stage roots vacuum pump of which inside can be cleaned
JPH0450492A (en) * 1990-06-18 1992-02-19 Anlet Co Ltd Cocoon type two-shaft multi-stage vacuum pump capable of cleaning inside
JPH0571487A (en) * 1991-09-11 1993-03-23 Anlet Co Ltd Seal constitution for cocoon type two-shaft positive displacement pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458605A (en) * 1977-10-20 1979-05-11 Hitachi Metals Ltd Cooling tank for induction furnace of crucible type
JPS55106389A (en) * 1979-02-09 1980-08-15 Seiko Epson Corp Crystal watch
JPS627991A (en) * 1985-06-27 1987-01-14 Anretsuto:Kk Water sealing type roots blower
JPH03130592A (en) * 1989-10-12 1991-06-04 Anlet Co Ltd Multi-stage roots vacuum pump of which inside can be cleaned
JPH0450492A (en) * 1990-06-18 1992-02-19 Anlet Co Ltd Cocoon type two-shaft multi-stage vacuum pump capable of cleaning inside
JPH0571487A (en) * 1991-09-11 1993-03-23 Anlet Co Ltd Seal constitution for cocoon type two-shaft positive displacement pump

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101985939A (en) * 2010-11-30 2011-03-16 东北大学 Dry vacuum pump with shaft end dynamic seal structure
CN104454542A (en) * 2014-11-25 2015-03-25 江苏泰隆减速机股份有限公司 Sealing Roots blower
CN104747723A (en) * 2015-03-04 2015-07-01 苏州通润驱动设备股份有限公司 Efficient shaft sealing structure of screw compressor
JP6120468B1 (en) * 2016-06-29 2017-04-26 Osセミテック株式会社 Gas transfer body for vacuum pump and vacuum pump using the same
JP2018003646A (en) * 2016-06-29 2018-01-11 Osセミテック株式会社 Gas transfer body for vacuum pump, and vacuum pump using the same
JP7436050B2 (en) 2021-12-15 2024-02-21 株式会社アンレット Multi-stage roots vacuum pump
CN116221110A (en) * 2023-03-31 2023-06-06 北京通嘉宏瑞科技有限公司 Roots pump rotor with pneumatic sealing groove and Roots pump
CN116221110B (en) * 2023-03-31 2023-09-12 北京通嘉宏瑞科技有限公司 Roots pump rotor with pneumatic sealing groove and Roots pump
CN117803567A (en) * 2024-02-27 2024-04-02 江苏天丰真空泵有限公司 Multistage Roots vacuum pump convenient to flowing back

Also Published As

Publication number Publication date
JP4911790B2 (en) 2012-04-04

Similar Documents

Publication Publication Date Title
JP4911790B2 (en) Roots type vacuum pump
JP4559343B2 (en) Screw compressor
JP2011137422A (en) Pump impeller, and submerged pump equipped therewith
CZ2013251A3 (en) Centrifugal compressor
WO2013011658A1 (en) Compressor
JP6842148B2 (en) Multi-stage roots vacuum pump device
JP4167456B2 (en) Electric compressor
JP3085539U (en) Shaft seal structure of vacuum pump
JP6785488B2 (en) Roots blower
JP2011001899A (en) Gear box internal pressure relaxation device
JP5999922B2 (en) Scroll compressor
JP2009091913A (en) Hermetically-sealed compressor
JP5136878B2 (en) Scroll fluid machinery
KR101413694B1 (en) micro gear-pump with sheet spring
KR20140004906U (en) Gear pump having enhanced lubricating ability
CN213684501U (en) Oil pump
JP7014940B2 (en) Rotary pump
KR100558814B1 (en) Eccentric bush with the function of exhausting a oil in scroll compressor
JP4524202B2 (en) Open type scroll compressor
JP6778126B2 (en) Vertical refueling screw compressor
JP4310102B2 (en) Oil discharge mechanism for rotating machinery
JP5166965B2 (en) Fluid pump
JP2006029295A (en) Oil pump
KR20040023069A (en) Hermetic rotary compressor
KR20000002878A (en) Cocentric typed roller pump

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111017

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111020

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111202

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120113

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120116

R150 Certificate of patent or registration of utility model

Ref document number: 4911790

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150127

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250