JP2010187263A - Surface mount crystal oscillator - Google Patents

Surface mount crystal oscillator Download PDF

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JP2010187263A
JP2010187263A JP2009030926A JP2009030926A JP2010187263A JP 2010187263 A JP2010187263 A JP 2010187263A JP 2009030926 A JP2009030926 A JP 2009030926A JP 2009030926 A JP2009030926 A JP 2009030926A JP 2010187263 A JP2010187263 A JP 2010187263A
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crystal
container body
terminal
crystal piece
electrode
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JP5371469B2 (en
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Motoi Uno
基 宇野
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface mount oscillator which prevents frequency variation during power-on. <P>SOLUTION: A surface mount crystal oscillator comprises: a container body 1 which has concave parts on both principal surfaces by layering frame walls 1 (bc) on the both principal surfaces of a bottom wall 1a; a crystal piece 2 whose one end having both sides where lead electrodes 10 (ab) are drawn out, is fixed to a pair of crystal holding terminals 5 (ab) provided on the inner bottom surface of one concave part of the container body 1; a metal cover 4 which is bonded to the end face of an opening of the one concave part to seal the crystal piece 2; and an IC chip 3 having an IC terminal electrically and mechanically connected to a circuit terminal 7 provided on the inner bottom surface of the other concave part of the container body 1. In the surface mount crystal oscillator, the crystal holding terminals 5 (ab) have an electrode for heat dissipation 14 extending to the inner bottom surface of the container body 1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は表面実装用の水晶発振器(以下、表面実装発振器とする)を技術分野とし、特に水晶片とともに収容されたICチップの発熱による発振周波数の変化を防止した表面実装発振器に関する。   The present invention relates to a surface mount crystal oscillator (hereinafter referred to as a surface mount oscillator), and more particularly to a surface mount oscillator that prevents a change in oscillation frequency due to heat generation of an IC chip housed together with a crystal piece.

(発明の背景)
表面実装発振器は小型・軽量であることから、特に携帯電話に代表される携帯型の電子機器に内蔵される。このようなものの一つに、容器本体を両主面に凹部を有する断面H状として、一方の凹部に水晶片を、他方の凹部にICチップを収容したものがある。
(Background of the Invention)
Since the surface-mounted oscillator is small and light, it is particularly built in a portable electronic device represented by a mobile phone. As one of such devices, there is one in which a container body has a cross-sectional H shape having recesses on both main surfaces, a crystal piece is accommodated in one recess, and an IC chip is accommodated in the other recess.

第4図は一従来例を説明する表面実装発振器の図で、同図(a)は断面図、同図(b)は金属カバー等を除く平面図である。   FIG. 4 is a view of a surface-mount oscillator for explaining a conventional example, in which FIG. 4 (a) is a sectional view and FIG. 4 (b) is a plan view excluding a metal cover and the like.

表面実装発振器は容器本体1、水晶片2、ICチップ3及び金属カバー4を備えてなる。容器本体1は積層セラミックからなり、底壁1a及び両主面に枠壁1(bc)を有し、前述のように両主面に凹部を有する断面H状とする。容器本体1の一方の凹部内底面には一対の水晶保持端子5(ab)を、他方の凹部内底面には複数の回路端子7を有する。   The surface-mount oscillator includes a container body 1, a crystal piece 2, an IC chip 3, and a metal cover 4. The container body 1 is made of a laminated ceramic, has a bottom wall 1a and frame walls 1 (bc) on both main surfaces, and has a cross-sectional H shape with recesses on both main surfaces as described above. The container body 1 has a pair of crystal holding terminals 5 (ab) on the bottom surface in one recess, and a plurality of circuit terminals 7 on the bottom surface in the other recess.

一対の水晶保持端子5(ab)は、底壁1aに設けたビアホール等による配線路6によって、回路端子7中の一対の水晶端子7(xy)に電気的に接続する。回路端子7中の電源、出力、アース及び例えばAFC端子は容器本体1の外底面(4角部)に設けた実装端子8に図示しない配線路によって電気的に接続する。   The pair of crystal holding terminals 5 (ab) are electrically connected to the pair of crystal terminals 7 (xy) in the circuit terminals 7 by a wiring path 6 by a via hole or the like provided in the bottom wall 1a. The power supply, output, ground, and, for example, the AFC terminal in the circuit terminal 7 are electrically connected to the mounting terminal 8 provided on the outer bottom surface (four corners) of the container body 1 through a wiring path (not shown).

水晶片2は例えばATカットとし、両主面の励振電極9(ab)から一端部両側に引出電極10(ab)を延出する。各引出電極10(ab)は例えばそれぞれ反対面に折り返して形成される。引出電極10(ab)の延出した水晶片2の一端部両側は内底面の水晶保持端子5(ab)に導電性接着剤11等によって固着され、電気的・機械的に接続する。   The crystal piece 2 is, for example, an AT cut, and the extraction electrode 10 (ab) extends from the excitation electrode 9 (ab) on both main surfaces to both sides of one end. Each extraction electrode 10 (ab) is formed, for example, by being folded back on the opposite surface. Both ends of one end of the crystal piece 2 from which the extraction electrode 10 (ab) extends are fixed to the crystal holding terminal 5 (ab) on the inner bottom surface by a conductive adhesive 11 or the like, and are electrically and mechanically connected.

ICチップ3は少なくとも発振回路を有し、この例では水晶振動子に起因した周波数温度特性を補償する温度補償機構を有する。そして、回路機能面(回路形成面)となる一主面のIC端子が例えばバンプ12を用いた超音波熱圧着によって、他方の凹部内底面の回路端子7に固着され(所謂フリップチップボンディング)、電気的・機械的に接続する。なお、図中の符号13は金属リングであり、金属カバー4がシーム溶接によって接合される。   The IC chip 3 includes at least an oscillation circuit. In this example, the IC chip 3 includes a temperature compensation mechanism that compensates for a frequency temperature characteristic caused by the crystal resonator. Then, an IC terminal on one main surface serving as a circuit function surface (circuit forming surface) is fixed to the circuit terminal 7 on the bottom surface in the other recess by, for example, ultrasonic thermocompression using a bump 12 (so-called flip chip bonding). Connect electrically and mechanically. In addition, the code | symbol 13 in a figure is a metal ring, and the metal cover 4 is joined by seam welding.

このようなものでは、周波数温度特性は水晶振動子に基づいて、第5図(曲線イ)に示したように常温25℃に変曲点を、高温側に極小値を、低温側に極大値を有する3次曲線となる。そして、温度補償機構からの温度に依存した温度補償電圧が、発振回路内に挿入された電圧可変容量素子に印加され、水晶振動子から見た直列等価容量(負荷容量)を変化させる。これにより、温度補償電圧に依存した周波数電圧特性(第5図の曲線ロ)によって、周波数温度特性を相殺して温度補償する。   In such a case, the frequency-temperature characteristic is based on a crystal resonator, as shown in FIG. 5 (curve A), the inflection point at room temperature 25 ° C., the minimum value on the high temperature side, and the maximum value on the low temperature side. Becomes a cubic curve. Then, a temperature compensation voltage depending on the temperature from the temperature compensation mechanism is applied to the voltage variable capacitance element inserted in the oscillation circuit, and the series equivalent capacitance (load capacitance) seen from the crystal resonator is changed. Thus, the temperature compensation is performed by canceling the frequency temperature characteristic by the frequency voltage characteristic (curve (b) in FIG. 5) depending on the temperature compensation voltage.

特開2008-311826号公報JP2008-311826

(従来技術の問題点)
しかしながら、上記構成の表面実装発振器では、電源投入時のICチップ3の特に能動素子の発熱によって温度が急激に上昇する。そして、特に、IC端子中の水晶端子、回路端子7(xy)、配線路6及び水晶保持端子5(ab)を経て水晶片2に伝熱する。さらに、導電性接着剤11によって水晶保持端子5(ab)と直接に接続する引出電極10(ab)から励振電極9(ab)に伝熱され、言わば、ICチップ3の発熱温度が水晶片2の振動領域「励振電極9(ab)部」に直接的に伝熱する。また、底壁1aからの熱も空間を経て振動領域に伝熱する。
(Problems of conventional technology)
However, in the surface mount oscillator having the above configuration, the temperature rapidly rises due to heat generation of the active element of the IC chip 3 when the power is turned on. In particular, heat is transferred to the crystal piece 2 through the crystal terminal in the IC terminal, the circuit terminal 7 (xy), the wiring path 6 and the crystal holding terminal 5 (ab). Furthermore, heat is transferred from the extraction electrode 10 (ab) directly connected to the crystal holding terminal 5 (ab) to the excitation electrode 9 (ab) by the conductive adhesive 11. In other words, the heat generation temperature of the IC chip 3 is changed to the crystal piece 2. Heat is transferred directly to the vibration region “excitation electrode 9 (ab)”. Further, heat from the bottom wall 1a is also transferred to the vibration region through the space.

このとき、ICチップ3と水晶片2の温度状態が熱平衡状態に達するまでには時間を要する。熱平衡に達するまでの間、温度が変化することが主な原因で周波数変化(変動)を悪化させる問題があった。   At this time, it takes time for the temperature state of the IC chip 3 and the crystal piece 2 to reach the thermal equilibrium state. There is a problem that the frequency change (fluctuation) is worsened mainly due to the temperature change until the thermal equilibrium is reached.

(発明の目的)
本発明は電源投入時の周波数変動を防止する表面実装発振器を提供することを目的とする。
(Object of invention)
It is an object of the present invention to provide a surface mount oscillator that prevents frequency fluctuations when power is turned on.

本発明は、特許請求の範囲(請求項1)に記載したように、底壁の両主面に枠壁を積層して両主面に凹部を有する容器本体と、前記容器本体の一方の凹部内底面に設けられた一対の水晶保持端子に引出電極の延出した一端部両側が固着された水晶片と、前記一方の凹部の開口端面に接合して前記水晶片を密閉封入する金属カバーと、前記容器本体の他方の凹部内底面に設けられた回路端子にIC端子が電気的・機械的に接続したICチップとを備えた表面実装用の水晶発振器において、前記ICチップの水晶端子と電気的に接続する水晶保持端子は前記容器本体の内底面に延出した放熱用電極を有する構成とする。   According to the present invention, as described in the claims (Claim 1), a container body having frame walls laminated on both main surfaces of a bottom wall and having recesses on both main surfaces, and one recess of the container body A crystal piece in which both ends of the extraction electrode are fixed to a pair of crystal holding terminals provided on the inner bottom surface, and a metal cover that seals and encloses the crystal piece by bonding to the opening end face of the one recess. A surface-mount crystal oscillator comprising an IC chip having an IC terminal electrically and mechanically connected to a circuit terminal provided on the bottom surface of the other concave portion of the container body. The crystal holding terminals to be connected to each other have a heat radiation electrode extending to the inner bottom surface of the container body.

このような構成であれば、特に、IC端子の水晶端子と電気的に接続した水晶保持端子は放熱用電極を容器本体の内底面に延出する。したがって、ICチップの発熱温度は、IC端子の水晶端子と電気的に接続する配線路によって直接的に水晶保持端子に伝熱され、さらに放熱用電極に伝熱される。これにより、ICチップの発熱温度は放熱用電極から放熱されて水晶片の急激な温度上昇を抑制するので、電源投入時の周波数変動を防止できる。   With such a configuration, in particular, the crystal holding terminal electrically connected to the crystal terminal of the IC terminal extends the heat radiation electrode to the inner bottom surface of the container body. Therefore, the heat generation temperature of the IC chip is directly transferred to the crystal holding terminal through a wiring path electrically connected to the crystal terminal of the IC terminal, and further transferred to the heat radiation electrode. As a result, the heat generation temperature of the IC chip is radiated from the heat radiation electrode and suppresses a rapid temperature rise of the crystal piece, so that it is possible to prevent frequency fluctuations when the power is turned on.

(実施態様項)
本発明の請求項2では、請求項1において、前記放熱用電極は前記水晶片の外側領域に設けられる。これにより、放熱用電極からの輻射熱が水晶片には直接に伝熱しないので、急激な温度上昇をさらに抑止する。
(Embodiment section)
According to a second aspect of the present invention, in the first aspect, the heat radiation electrode is provided in an outer region of the crystal piece. Thereby, since the radiant heat from the electrode for heat dissipation does not directly transfer to the crystal piece, a rapid temperature rise is further suppressed.

同請求項3では、請求項1において、前記放熱用電極は前記水晶片の励振電極の外側領域に設けられる。この場合では、放熱用電極からの輻射熱が水晶片の振動領域励振電極部には直接に伝熱しないので、同様に急激な温度上昇を抑止する。   In the third aspect of the present invention, in the first aspect, the heat radiation electrode is provided in an outer region of the excitation electrode of the crystal piece. In this case, since the radiant heat from the heat radiation electrode does not directly transfer to the vibration region excitation electrode portion of the crystal piece, a rapid temperature rise is similarly suppressed.

本発明の第1実施形態を説明する表面実装発振器の図で、同図(a)は断面図、同図(b)は金属カバーを除く平面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure of the surface mount oscillator explaining 1st Embodiment of this invention, The figure (a) is sectional drawing, The figure (b) is a top view except a metal cover. 本発明の第1実施形態の他例を説明する図で、同図(ab)ともに表面実装発振器の金属カバーを除く平面図である。It is a figure explaining other examples of a 1st embodiment of the present invention, and the figure (ab) is a top view except a metal cover of a surface mount oscillator. 本発明の第2実施形態を説明する表面実装発振器の金属カバーを除く平面図である。It is a top view except the metal cover of the surface mount oscillator explaining 2nd Embodiment of this invention. 一従来例を説明する図で、同図(a)は表面実装発振器の断面図、同図(b)は金属カバーを除く平面図である。It is a figure explaining a prior art example, The figure (a) is sectional drawing of a surface mount oscillator, The figure (b) is a top view except a metal cover. 一従来例を説明する表面実装発振器の周波数温度及び電圧特性である。It is a frequency temperature of a surface mount oscillator explaining a prior art example, and a voltage characteristic.

以下、本発明の表面実装発振器に係る第1実施形態を第1図(断面図及び平面図)によって説明する。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。   Hereinafter, a first embodiment of a surface-mount oscillator according to the present invention will be described with reference to FIG. 1 (cross-sectional view and plan view). In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

表面実装発振器は、前述したように、底壁1aと両主面の枠壁1(bc)とからなる断面H状とした容器本体1の一方の凹部に水晶片2を収容し、他方の凹部にICチップ3を収容する。そして、水晶片2は励振電極9(ab)から引出電極10(ab)の延出した一端部両側が内底面の水晶保持端子5(ab)に導電性接着剤11によって固着され、金属カバー4を接合して密閉封入される。また、ICチップ3はバンプ12を用いた超音波熱圧着によって一主面のIC端子が固着される。   As described above, the surface-mount oscillator accommodates the crystal piece 2 in one concave portion of the container body 1 having an H-shaped cross section composed of the bottom wall 1a and the frame walls 1 (bc) of both main surfaces, and the other concave portion. The IC chip 3 is accommodated in the. The crystal piece 2 is fixed to the crystal holding terminal 5 (ab) on the inner bottom surface by the conductive adhesive 11 at both ends of the lead electrode 10 (ab) extending from the excitation electrode 9 (ab), and the metal cover 4 Are sealed and sealed. In addition, the IC terminal of the main surface of the IC chip 3 is fixed by ultrasonic thermocompression using the bumps 12.

そして、第1実施形態では、一方の凹部内底面の水晶保持端子5(ab)は水晶片2の内底面に放熱用電極14(ab)を延出する。放熱用電極14(ab)は例えば水晶片2の各長辺の外側領域に延出する「第1図(b)」。これらの放熱用電極14(ab)は水晶保持端子5(ab)の形成時に一体的に形成される。例えば下地電極をWやMoとして、表面にNi及びAuを順次にメッキして形成される。   In the first embodiment, the crystal holding terminal 5 (ab) on the inner bottom surface of one recess extends the heat radiation electrode 14 (ab) on the inner bottom surface of the crystal piece 2. The heat radiation electrode 14 (ab) extends, for example, to the outer region of each long side of the crystal piece 2 (FIG. 1B). These heat radiation electrodes 14 (ab) are integrally formed when the crystal holding terminals 5 (ab) are formed. For example, the base electrode is W or Mo, and Ni and Au are sequentially plated on the surface.

これらの場合、第2図(ab)に示したように、放熱用電極14(ab)は水晶片2の長辺の外側から他端部の外側に延出しても、あるいは、放熱用電極14は水晶片2の一方の長辺の外側から他端部を経て他方の長辺の外側に延出してもよい。但し、各放熱用電極14(ab)の先端間、あるいは放熱用電極14の先端と水晶保持端子5aとの間は、一対の水晶保持端子5(ab)の間に対して同等以上の間とする。これにより、浮遊容量を最小限にする。   In these cases, as shown in FIG. 2 (ab), the heat radiation electrode 14 (ab) may extend from the outside of the long side of the crystal piece 2 to the outside of the other end, or alternatively, the heat radiation electrode 14 May extend from the outside of one long side of the crystal piece 2 to the outside of the other long side via the other end. However, between the tips of the heat radiation electrodes 14 (ab) or between the tips of the heat radiation electrodes 14 and the crystal holding terminals 5a is equal to or greater than that between the pair of crystal holding terminals 5 (ab). To do. This minimizes stray capacitance.

このような構成であれば、発明の効果の欄に記載するように、特に、IC端子の水晶端子と電気的に接続した水晶保持端子5(ab)は放熱用電極14を容器本体1の内底面に延出する。ここでは、放熱用電極14は水晶片2の外側領域に延出する。したがって、ICチップ3の発熱温度は、IC端子の水晶端子と電気的に接続する配線路によって直接的に水晶保持端子5(ab)に伝熱され、さらに水晶片2の外側となる放熱用電極14に伝熱される。   With such a configuration, as described in the column of the effect of the invention, in particular, the crystal holding terminal 5 (ab) electrically connected to the crystal terminal of the IC terminal has the heat radiation electrode 14 in the container body 1. Extend to the bottom. Here, the heat radiation electrode 14 extends to the outer region of the crystal piece 2. Therefore, the heat generation temperature of the IC chip 3 is directly transferred to the crystal holding terminal 5 (ab) through the wiring path electrically connected to the crystal terminal of the IC terminal, and further, the heat dissipation electrode that is outside the crystal piece 2. Heat is transferred to 14.

これにより、放熱用電極14からの輻射熱が水晶片2に直接には伝熱しないで、ICチップ3の発熱温度は放熱用電極14から放熱されて水晶片2の急激な温度上昇を抑制するので、電源投入時の周波数変動を防止できる。   As a result, the radiant heat from the heat radiation electrode 14 is not directly transferred to the crystal piece 2, and the heat generation temperature of the IC chip 3 is radiated from the heat radiation electrode 14 and suppresses a rapid temperature rise of the crystal piece 2. The frequency fluctuation at power-on can be prevented.

これらの場合、容器本体1は金属カバー4によって封止されるので、放熱用電極14からの熱は特に金属カバー4(例えばNiメッキのコバール材)や、これが接合する金属リング(Auメッキのコバール材)から放熱される。   In these cases, since the container body 1 is sealed by the metal cover 4, the heat from the heat radiation electrode 14 is particularly generated by the metal cover 4 (for example, Ni-plated Kovar material) or the metal ring (Au-plated Kovar) to which it is joined. Material).

本発明の第2実施形態(第3図の平面図)では、一対の水晶保持端子5(ab)から延出した放熱用電極14(ab)は水晶片2の下面であって励振電極9(ab)の外側となる領域にまたがって延出する。このようなものでは、振動領域となる励振電極9(ab)には輻射熱が直接に及ばないとともに、放熱用電極14(ab)の面積が増加するので、放熱効果を高める。したがって、水晶片2の急激な温度上昇を抑制して、電源投入時の周波数変動を防止できる。   In the second embodiment of the present invention (plan view of FIG. 3), the heat radiation electrode 14 (ab) extending from the pair of crystal holding terminals 5 (ab) is the lower surface of the crystal piece 2 and the excitation electrode 9 ( ab) extends across the region outside. In such a case, since the radiant heat does not directly reach the excitation electrode 9 (ab) serving as the vibration region and the area of the heat radiation electrode 14 (ab) increases, the heat radiation effect is enhanced. Therefore, it is possible to suppress a rapid temperature rise of the crystal piece 2 and prevent frequency fluctuations when the power is turned on.

1 容器本体、2 水晶片、3 ICチップ、4 金属カバー、5 水晶保持端子、
6 配線路、7 回路端子、7(xy)水晶端子、8 実装端子、9 励振電極、
10 引出電極、11 導電性接着剤、12 バンプ、13 金属リング、14 放熱用電極。
1 container body, 2 crystal piece, 3 IC chip, 4 metal cover, 5 crystal holding terminal,
6 wiring path, 7 circuit terminal, 7 (xy) crystal terminal, 8 mounting terminal, 9 excitation electrode,
10 Lead electrode, 11 Conductive adhesive, 12 Bump, 13 Metal ring, 14 Heat dissipation electrode.

Claims (3)

底壁の両主面に枠壁を積層して両主面に凹部を有する容器本体と、前記容器本体の一方の凹部内底面に設けられた一対の水晶保持端子に引出電極の延出した一端部両側が固着された水晶片と、前記一方の凹部の開口端面に接合して前記水晶片を密閉封入する金属カバーと、前記容器本体の他方の凹部内底面に設けられた回路端子にIC端子が電気的・機械的に接続したICチップとを備えた表面実装用の水晶発振器において、前記水晶保持端子は前記容器本体の内底面に延出した放熱用電極を有する表面実装用の水晶発振器。   A container main body having frame walls stacked on both main surfaces of the bottom wall and having recesses on both main surfaces, and one end of the lead electrode extended to a pair of crystal holding terminals provided on one bottom surface of the recess of the container main body A crystal piece to which both sides are fixed, a metal cover that seals and encloses the crystal piece by joining to the opening end face of the one recess, and an IC terminal to a circuit terminal provided on the bottom surface of the other recess of the container body A crystal oscillator for surface mounting comprising an IC chip electrically and mechanically connected, wherein the crystal holding terminal has a heat radiation electrode extending to the inner bottom surface of the container body. 請求項1において、前記放熱用電極は前記水晶片の外側領域に設けられた表面実装用の水晶発振器。   2. The surface-mount crystal oscillator according to claim 1, wherein the heat radiation electrode is provided in an outer region of the crystal piece. 請求項1において、前記放熱用電極は前記水晶片の励振電極の外側領域に設けられた表面実装用の水晶発振器。   2. The surface-mount crystal oscillator according to claim 1, wherein the heat radiation electrode is provided in an outer region of the excitation electrode of the crystal piece.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012209691A (en) * 2011-03-29 2012-10-25 Seiko Instruments Inc Electronic component package
JP2015076634A (en) * 2013-10-04 2015-04-20 株式会社大真空 Piezoelectric device
US9468105B2 (en) 2014-03-25 2016-10-11 Seiko Epson Corporation Electronic component, electronic apparatus, and moving object

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008294585A (en) * 2007-05-22 2008-12-04 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008294585A (en) * 2007-05-22 2008-12-04 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012209691A (en) * 2011-03-29 2012-10-25 Seiko Instruments Inc Electronic component package
JP2015076634A (en) * 2013-10-04 2015-04-20 株式会社大真空 Piezoelectric device
US9468105B2 (en) 2014-03-25 2016-10-11 Seiko Epson Corporation Electronic component, electronic apparatus, and moving object

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