JP2010186952A - Semiconductor light emitting device - Google Patents

Semiconductor light emitting device Download PDF

Info

Publication number
JP2010186952A
JP2010186952A JP2009031516A JP2009031516A JP2010186952A JP 2010186952 A JP2010186952 A JP 2010186952A JP 2009031516 A JP2009031516 A JP 2009031516A JP 2009031516 A JP2009031516 A JP 2009031516A JP 2010186952 A JP2010186952 A JP 2010186952A
Authority
JP
Japan
Prior art keywords
semiconductor light
light emitting
light
emitting device
reflecting layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009031516A
Other languages
Japanese (ja)
Other versions
JP5325597B2 (en
Inventor
Tsutomu Okubo
努 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP2009031516A priority Critical patent/JP5325597B2/en
Publication of JP2010186952A publication Critical patent/JP2010186952A/en
Application granted granted Critical
Publication of JP5325597B2 publication Critical patent/JP5325597B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor light emitting device maintaining an excellent optical characteristic and securing high reliability regardless of bright and long-term use and a use environment condition. <P>SOLUTION: In this semiconductor light emitting device, a light reflecting layer 6 made of a silver-based material and having high reflectivity is formed on a base material 2; a transparent silica glass film 7 is formed on the light reflecting layer 6; and a semiconductor light emitting element 9 having translucency is stuck and fixed to the silica glass film 7 through a silicone adhesive 8. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は半導体発光素子を発光源とする半導体発光装置に関する。   The present invention relates to a semiconductor light emitting device using a semiconductor light emitting element as a light source.

半導体発光素子は半導体材料を構成する元素とその組成及び該半導体材料による素子構造等により発光スペクトルが異なり、半導体材料は該半導体材料を構成する元素とその組成等により光透過率が異なる。   The light emission spectrum of a semiconductor light emitting element differs depending on the element constituting the semiconductor material and its composition, the element structure of the semiconductor material, and the like, and the semiconductor material has different light transmittance depending on the element constituting the semiconductor material and the composition thereof.

半導体発光素子が透光性を有する素子構造からなる場合、半導体発光素子内の発光部(PN接合部)から出射された光は素子内を導光されて発光部を挟んで対向する両面から素子外に出射される。   When the semiconductor light-emitting element has a light-transmitting element structure, light emitted from the light-emitting portion (PN junction portion) in the semiconductor light-emitting element is guided from both sides facing the light-emitting portion while being guided through the element. It is emitted outside.

ところで、半導体発光素子は一般的に、導体パターンが形成された基材上に接着部材あるいは接合部材を介して固定され、半導体発光素子の素子電極と導体パターンが何らかの接続手段によって電気的に導通される。これによる外部電源からの電力が導体パターン及び素子電極を介して半導体発光素子に供給される。   By the way, a semiconductor light emitting element is generally fixed on a base material on which a conductor pattern is formed via an adhesive member or a bonding member, and the element electrode of the semiconductor light emitting element and the conductor pattern are electrically connected by some connecting means. The As a result, electric power from the external power source is supplied to the semiconductor light emitting element via the conductor pattern and the element electrode.

そこで、基材上に透光性を有する半導体発光素子を上述の方法で実装して外部電源から電力を供給すると、半導体発光素子の発光部から出射された光のうち基材側に位置する面から出射された光は接着部材あるいは接合部材で遮光されて素子外には照射されず、片方の面からのみ素子外に向けて照射される。そのため、発光部からの出射光量のうち半分近くが素子外に照射されることがなく、極めて光利用効率の低いものとなってしまう。   Therefore, when the semiconductor light-emitting element having translucency is mounted on the base material by the above-described method and electric power is supplied from the external power source, the surface located on the base-side of the light emitted from the light-emitting portion of the semiconductor light-emitting element The light emitted from the light is shielded by the adhesive member or the joining member and is not irradiated outside the element, but is irradiated toward the outside of the element only from one surface. Therefore, almost half of the amount of light emitted from the light emitting unit is not irradiated outside the element, resulting in extremely low light utilization efficiency.

そこで、半導体発光素子から出射された光の利用効率の向上を目的として、図5に示す構成の半導体発光装置の提案がなされている。   Therefore, for the purpose of improving the utilization efficiency of the light emitted from the semiconductor light emitting element, a semiconductor light emitting device having the configuration shown in FIG. 5 has been proposed.

それは、基材50上の導体パターン51上に基材50よりも光反射率の高い材料からなる光反射層52を設け、光反射層52上に透明な接着剤53を介して透光性を有する半導体発光素子54を接着・固定し、該半導体発光素子54を封止樹脂55で樹脂封止するものである。   The light reflecting layer 52 made of a material having a light reflectance higher than that of the base material 50 is provided on the conductive pattern 51 on the base material 50, and the light transmitting layer 52 is made transparent through a transparent adhesive 53. The semiconductor light emitting element 54 is adhered and fixed, and the semiconductor light emitting element 54 is sealed with a sealing resin 55.

すると、半導体発光素子54の発光部から基材50と反対側に位置する面(上面)に向けて出射された光Lは半導体発光素子54内を導光されて上面から封止樹脂55内に入射し、封止樹脂55内を導光されて外部に向けて照射される。 Then, the semiconductor light L D emitted toward the surface located on the opposite side of the substrate 50 from the light emitting portion (upper surface) of the light emitting element 54 is a semiconductor light emitting element is guided sealing resin 55 in the top surface 54 , Is guided through the sealing resin 55 and irradiated toward the outside.

一方、半導体発光素子54の発光部から基材50側に位置する面(下面)に向けて出射された光Lは半導体発光素子54内を導光されて下面から出射し、透明な接着剤53を透過して光反射層52に至り、光反射層52で半導体発光素子54側に向けて反射されて再度半導体発光素子54内を導光されて上面から封止樹脂55内に入射し、封止樹脂55内を導光されて外部に向けて照射される。 On the other hand, the light L R emitted from the light emitting unit toward the surface (lower surface) located on the substrate 50 side of the semiconductor light emitting element 54 is emitted from the lower surface is guided to the semiconductor light emitting element 54, a transparent adhesive 53, reaches the light reflecting layer 52, is reflected toward the semiconductor light emitting element 54 side by the light reflecting layer 52, is again guided in the semiconductor light emitting element 54, and enters the sealing resin 55 from the upper surface, The inside of the sealing resin 55 is guided and irradiated to the outside.

これにより、半導体発光素子54の発光部から出射された直接光L及び発光部から出射されて光反射層52で反射された反射光Lを効率よく外部に照射することが可能となり、光の利用効率を高めることができるというものである(例えば、特許文献1参照。)。 Thus, it is possible to irradiate the reflected light L R reflected by the light reflecting layer 52 is emitted from the emitted light directly L D and the light emitting portion from the light emitting portion of the semiconductor light emitting element 54 to the outside efficiently, light The use efficiency can be increased (see, for example, Patent Document 1).

特開2007−311401号公報JP 2007-31401 A

ところで、上記構成の半導体発光装置56において、光反射層52は高反射率を確保するために銀メッキ層を用い、接着剤53は半導体発光素子54の出射光に対して光学安定性が良好な上述のシリコーン系接着剤を用いることが好ましい。   By the way, in the semiconductor light emitting device 56 having the above configuration, the light reflecting layer 52 uses a silver plating layer in order to ensure high reflectance, and the adhesive 53 has good optical stability with respect to the light emitted from the semiconductor light emitting element 54. It is preferable to use the above silicone-based adhesive.

但し、発明者が半導体発光素子54として青色光を出射する青色LED素子を使用して長時間の点灯試験を行ったところ、シリコーン系接着剤53に変色が生じて光の吸収が起こることが確認された。試験後に、変色したシリコーン系接着剤53を分析したところ銀の成分が検出されており、シリコーン系接着剤53は封止用シリコーン樹脂に比べて接着助剤などの種々の添加物が多く含まれる傾向にあるため、変色の原因はこれら添加物に起因するものと推測される。   However, when the inventor conducted a long-time lighting test using a blue LED element that emits blue light as the semiconductor light emitting element 54, it was confirmed that discoloration occurred in the silicone-based adhesive 53 and light absorption occurred. It was done. After the test, when the discolored silicone adhesive 53 was analyzed, a silver component was detected, and the silicone adhesive 53 contained more various additives such as an adhesion aid than the silicone resin for sealing. Because of this tendency, the cause of discoloration is presumed to be due to these additives.

また、シリコーン系接着剤53は金属に対する接着強度が比較的弱く、半導体発光素子54の点灯時の発熱による熱応力によって金属との間で界面剥離を生じる恐れがある。   In addition, the silicone-based adhesive 53 has a relatively low adhesive strength to metal, and there is a possibility that interface peeling with the metal may occur due to thermal stress due to heat generated when the semiconductor light emitting element 54 is turned on.

そこで、本発明は上記問題に鑑みて創案なされたもので、その目的とするところは、発光スペクトルのピーク波長を紫外〜可視の短波長領域とする透光性を有する半導体発光素子を紫外〜可視の短波長領域の光に対して光学安定性が良好なシリコーン系接着剤を介して光反射率の高い銀系層上に接着・固定してなる光利用効率の高い半導体発光装置であって、明るく且つ長期に亘る使用や使用環境条件に係らず良好な光学特性の維持及び高い信頼性の確保が可能な半導体発光装置を実現することにある。   Accordingly, the present invention was devised in view of the above problems, and an object of the present invention is to provide a semiconductor light-emitting element having translucency in which the peak wavelength of the emission spectrum is a short wavelength region of ultraviolet to visible. It is a semiconductor light emitting device with high light utilization efficiency, which is bonded and fixed on a silver-based layer with high light reflectivity through a silicone-based adhesive having good optical stability with respect to light in the short wavelength region, An object of the present invention is to realize a semiconductor light-emitting device that is bright and capable of maintaining good optical characteristics and ensuring high reliability regardless of long-term use and use environment conditions.

上記課題を解決するために、本発明の請求項1に記載された発明は、
基材と、
前記基材上に形成された、銀系材料からなる光反射層と、
前記光反射層の上に該光反射層を覆うように成膜されたシリカガラス膜と、
前記シリカガラス層にシリコーン接着剤を介して固定された、透光性を有し且つ発光スペクトルのピーク波長を紫外〜可視の短波長領域とする半導体発光素子と、
を備えたことを特徴とするものである。
In order to solve the above problems, the invention described in claim 1 of the present invention is:
A substrate;
A light reflecting layer made of a silver-based material formed on the substrate;
A silica glass film formed on the light reflecting layer so as to cover the light reflecting layer;
A semiconductor light-emitting element that is fixed to the silica glass layer via a silicone adhesive, has a light-transmitting property, and has a peak wavelength of an emission spectrum in a short wavelength region from ultraviolet to visible,
It is characterized by comprising.

また、本発明の請求項2に記載された発明は、請求項1において、
前記基材の前記光反射層が接する面に対して段差をもって導体パターンが設けられ、前記半導体発光素子の素子電極と前記導体パターンとがボンディングワイヤを介して電気的に接続されていることを特徴とするものである。
In addition, the invention described in claim 2 of the present invention is as follows.
A conductor pattern is provided with a step with respect to a surface of the substrate that contacts the light reflecting layer, and the element electrode of the semiconductor light emitting element and the conductor pattern are electrically connected via a bonding wire. It is what.

また、本発明の請求項3に記載された発明は、請求項1において、
前記基材は一面に開口を有する凹部と前記一面上に形成された導体パターンとを備え、前記光反射層及び前記シリカガラス膜が前記凹部内面の少なくとも底面に形成されると共に前記半導体発光素子が前記凹部内に位置し、前記半導体発光素子の素子電極と前記導体パターンとがボンディングワイヤを介して電気的に接続されていることを特徴とするものである。
In addition, the invention described in claim 3 of the present invention is as follows.
The substrate includes a recess having an opening on one surface and a conductor pattern formed on the one surface, and the light reflecting layer and the silica glass film are formed on at least the bottom surface of the inner surface of the recess, and the semiconductor light emitting element is It is located in the said recessed part, The element electrode of the said semiconductor light-emitting device and the said conductor pattern are electrically connected through the bonding wire, It is characterized by the above-mentioned.

また、本発明の請求項4に記載された発明は、請求項1〜3のいずれか1項において、前記半導体発光素子は青色光を発光する青色LED素子または紫外光を発光する紫外LED素子であり、且つ前記半導体発光素子は該半導体発光素子を覆うように1種以上の蛍光体を含有してなる封止樹脂で樹脂封止されていることを特徴とするものである。   According to a fourth aspect of the present invention, in any one of the first to third aspects, the semiconductor light emitting element is a blue LED element that emits blue light or an ultraviolet LED element that emits ultraviolet light. In addition, the semiconductor light emitting element is sealed with a sealing resin containing at least one phosphor so as to cover the semiconductor light emitting element.

本発明の半導体発光装置の構成を、基材上に銀系材料からなる高反射率を有する光反射層を形成して該光反射層の上に透明なシリカガラス膜を成膜し、該シリカガラス膜に透明なシリコーン接着剤を介して透光性を有する半導体発光素子を接着・固定するようにした。   In the structure of the semiconductor light emitting device of the present invention, a light reflecting layer made of a silver-based material having a high reflectance is formed on a base material, and a transparent silica glass film is formed on the light reflecting layer. A translucent semiconductor light emitting device is bonded and fixed to the glass film via a transparent silicone adhesive.

半導体発光装置をこのような構成とすることにより、半導体発光素子から出射された光の利用効率が高くなり、半導体発光素子の発光光によるシリコーン接着剤の変色が防止され、半導体発光素子の接着強度が向上した。   With such a configuration of the semiconductor light emitting device, the use efficiency of the light emitted from the semiconductor light emitting element is increased, the discoloration of the silicone adhesive due to the light emitted from the semiconductor light emitting element is prevented, and the adhesive strength of the semiconductor light emitting element Improved.

その結果、明るく且つ長期に亘る使用や使用環境条件に係らず良好な光学特性の維持及び高い信頼性の確保が可能な半導体発光装置が実現できた。   As a result, a semiconductor light emitting device capable of maintaining good optical characteristics and ensuring high reliability regardless of whether it is bright and used for a long period of time or in the environment of use has been realized.

本発明の実施形態に係る上面図である。It is a top view concerning the embodiment of the present invention. 図1のA−A断面図である。It is AA sectional drawing of FIG. 図1の部分図である。FIG. 2 is a partial view of FIG. 1. 本発明の他の実施形態に係る説明図である。It is explanatory drawing which concerns on other embodiment of this invention. 従来例の説明図である。It is explanatory drawing of a prior art example.

以下、この発明の好適な実施形態を図1〜図4を参照しながら、詳細に説明する(同一部分については同じ符号を付す)。尚、以下に述べる実施形態は、本発明の好適な具体例であるから、技術的に好ましい種々の限定が付されているが、本発明の範囲は、以下の説明において特に本発明を限定する旨の記載がない限り、これらの実施形態に限られるものではない。   Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to FIGS. 1 to 4 (the same reference numerals are given to the same parts). The embodiments described below are preferable specific examples of the present invention, and thus various technically preferable limitations are given. However, the scope of the present invention particularly limits the present invention in the following description. Unless stated to the effect, the present invention is not limited to these embodiments.

図1及び図2は本発明の半導体発光装置に係る実施形態の説明図であり、図1は上面図、図2は図1のA−A断面図である。   1 and 2 are explanatory views of an embodiment according to a semiconductor light emitting device of the present invention. FIG. 1 is a top view and FIG. 2 is a cross-sectional view taken along line AA of FIG.

本発明は、発光源を発光スペクトルのピーク波長を紫外〜可視の短波長領域とする透光性を有する半導体発光素子(以下、「LED素子」とする)とし、LED素子を該LED素子から発せられる紫外〜可視の短波長領域の光に対して光学安定性が良好で透明性を有するシリコーン系接着剤を介して光反射率の高い銀系層上に成膜されたシリカガラス膜に接着・固定してなる半導体発光装置である。   The present invention uses a light-emitting source as a semiconductor light-emitting element (hereinafter referred to as “LED element”) having a light-transmitting peak wavelength in the ultraviolet to visible short wavelength region, and emits the LED element from the LED element. Adhered to silica glass film formed on silver layer with high light reflectivity through silicone adhesive with good optical stability and transparency to ultraviolet to visible short wavelength region light This is a fixed semiconductor light emitting device.

半導体発光装置をこのような構成とすることにより、光利用効率が向上して照射光量が増大し、且つ長期に亘る使用や使用環境条件に係らず良好な光学特性の維持及び高い信頼性の確保を可能にするものである。   With such a configuration of the semiconductor light emitting device, the light use efficiency is improved, the amount of irradiation light is increased, and good optical characteristics are maintained and high reliability is ensured regardless of long-term use and use environment conditions. Is possible.

以下に具体的な構成例について説明する。凹部1を有する基材2の上部に前記凹部1よりも大きい中空部3を有するハウジング4が配設されている。基材2の凹部1を挟んで対向する両側には、互いに分離独立して夫々基材2の一方の面(上面)2aからハウジング4を貫通して外部に導出されて側面2bを経て他方の面(裏面)2cまで延長された導体パターン5a、5bが形成されている。   A specific configuration example will be described below. A housing 4 having a hollow portion 3 larger than the concave portion 1 is disposed on an upper portion of the base material 2 having the concave portion 1. On both sides of the base material 2 facing each other with the concave portion 1 interposed therebetween, the other side is separated and independent from one surface (upper surface) 2a of the base material 2 through the housing 4 and led out to the outside through the side surface 2b. Conductive patterns 5a and 5b extending to the surface (back surface) 2c are formed.

基材2の上面2aに位置する導体パターン5a、5bの先端部はハウジング4の中空部3内に露出しており、後述するボンディングワイヤのワイヤボンディングパッド部5aa、5baとなる。いずれの導体パターン5a、5bも、例えば銅(Cu)箔の上にニッケル(Ni)メッキ層が形成され更にその上に金(Au)メッキ層が形成された積層構造となっている。   The tip portions of the conductor patterns 5a and 5b located on the upper surface 2a of the substrate 2 are exposed in the hollow portion 3 of the housing 4 and become wire bonding pad portions 5aa and 5ba of bonding wires to be described later. Each of the conductor patterns 5a and 5b has a laminated structure in which, for example, a nickel (Ni) plating layer is formed on a copper (Cu) foil and a gold (Au) plating layer is further formed thereon.

基材2の凹部1の内面には上記各導体パターン5a、5bとは分離独立した光反射層6が形成され、この光反射層6は純銀や銀合金等の高光反射率を有する銀系材料からなっている。そして光反射層6の上には透明なシリカガラス膜7が形成されている。   A light reflecting layer 6 is formed on the inner surface of the concave portion 1 of the substrate 2 so as to be separated and independent from the conductor patterns 5a and 5b. The light reflecting layer 6 is a silver-based material having a high light reflectance such as pure silver or a silver alloy. It is made up of. A transparent silica glass film 7 is formed on the light reflecting layer 6.

このシリカガラス膜7は、ジブチルエーテルで希釈したパーヒドロポリシラザン((SiHNH))を光反射層6の上に塗布し、150℃で1時間加熱して大気中の水分と化学反応させてシリカ(二酸化ケイ素)に転位さることによりシリカガラス膜7としたものである。 This silica glass film 7 is obtained by applying perhydropolysilazane ((SiH 2 NH) n ) diluted with dibutyl ether on the light reflection layer 6 and heating it at 150 ° C. for 1 hour to cause chemical reaction with moisture in the atmosphere. Thus, the silica glass film 7 is obtained by dislocation to silica (silicon dioxide).

このとき、シリカガラス膜7は熱応力による亀裂や光反射層6との剥離を防止するために膜厚が1μm以下となるようにパーヒドロポリシラザンの濃度や塗布厚を最適化することが好ましい。   At this time, it is preferable to optimize the concentration of perhydropolysilazane and the coating thickness so that the silica glass film 7 has a thickness of 1 μm or less in order to prevent cracking due to thermal stress and peeling from the light reflecting layer 6.

なお、シリカガラス膜7の形成時に導体パターン5a、5bのワイヤボンディングパッド部5aa、5baにシリカガラス膜7が付着するとボンディングワイヤの接合強度が弱くなる或いは接合自体ができなくなる恐れがある。   If the silica glass film 7 adheres to the wire bonding pad portions 5aa and 5ba of the conductor patterns 5a and 5b when the silica glass film 7 is formed, the bonding strength of the bonding wire may be weakened or the bonding itself may not be performed.

そこで、導体パターン5a、5bのワイヤボンディングパッド部5aa、5baにシリカガラス膜7が付着しないようにするための対処方法として、シリカガラス膜7の形成工程あるいは半導体発光装置の構造等に配慮を施すことが考えられる。具体的には、基材2に対する導体パターン5a、5bの形成工程以前にシリカガラス膜7の形成工程を設けて工程上導体パターン5a、5bにシリカガラス膜7が付着しないようにする方法、あるいは図1及び図2のように、導体パターン5a、5bのワイヤボンディングパッド部5aa、5baとシリカガラス膜7に段差を設けて製造上シリカガラス膜7の成膜時に該シリカガラス膜7が導体パターン5a、5bのワイヤボンディングパッド部5aa、5baへ付着しにくい構造とする方法等が対処方法として好ましい。   Therefore, as a countermeasure for preventing the silica glass film 7 from adhering to the wire bonding pad portions 5aa and 5ba of the conductor patterns 5a and 5b, consideration is given to the formation process of the silica glass film 7 or the structure of the semiconductor light emitting device. It is possible. Specifically, a method of forming a silica glass film 7 before the formation of the conductor patterns 5a and 5b on the base material 2 so that the silica glass film 7 does not adhere to the conductor patterns 5a and 5b in the process, or As shown in FIG. 1 and FIG. 2, a step is provided in the wire bonding pad portions 5 aa and 5 ba of the conductor patterns 5 a and 5 b and the silica glass film 7 to manufacture the silica glass film 7. A method of making the structure difficult to adhere to the wire bonding pad portions 5aa and 5ba of 5a and 5b is preferable as a countermeasure.

シリカガラス膜7の上にはシリコーン接着剤8を介してLED素子9が接着・固定されている。シリコーン接着剤8は金属よりもガラスとの接着性が優れているため、シリコーン接着剤8を介するLED素子9の接着・固定は銀系材料からなる光反射層6に対するよりもシリカガラス膜7に対する方が高い接着強度を確保することができる。   An LED element 9 is bonded and fixed on the silica glass film 7 via a silicone adhesive 8. Since the silicone adhesive 8 has better adhesion to glass than metal, the adhesion / fixation of the LED element 9 via the silicone adhesive 8 is to the silica glass film 7 rather than to the light reflecting layer 6 made of a silver-based material. The higher adhesive strength can be ensured.

また、シリカガラス膜7は光反射層6を構成する銀系材料の硫化防止の役割を担う。そのため、光反射層6の全面をシリカガラス膜7で覆うことで良好な硫化防止効果を図ることが好ましい。   Further, the silica glass film 7 plays a role of preventing sulfidation of the silver-based material constituting the light reflecting layer 6. Therefore, it is preferable to achieve a good antisulfurization effect by covering the entire surface of the light reflecting layer 6 with the silica glass film 7.

なお、シリカガラス膜7の成膜は上記パーヒドロポリシラザンを用いる方法以外にもSiOをターゲット材とするスパッタ法等の種々の方法が可能である。 The silica glass film 7 can be formed by various methods such as sputtering using SiO 2 as a target material in addition to the method using perhydropolysilazane.

LED素子9は発光スペクトルのピーク波長を紫外〜可視の短波長領域とする透光性を有する素子が用いられ、例えば、InGaAl、InGaAlN、InGaN及びGaN系の組成材料からなり、いずれも高い光透過率を有している。   The LED element 9 is a light-transmitting element whose emission spectrum has a peak wavelength in the ultraviolet to visible short wavelength region, and is composed of, for example, InGaAl, InGaAlN, InGaN, and GaN-based composition materials, all of which have high light transmittance. Have a rate.

また、LED素子9の一対の電極(図示しないがアノード電極とカソード電極)はいずれも素子の一方の面側(上面側)に設けられ、夫々ボンディングワイヤ10の一方の端部が接合されて該ボンディングワイヤ10の他方の端部が導体パターン5a、5bのワイヤボンディングパッド部5aa、5baに接合されている。これにより、LED素子9の各電極と導体パターン5a、5bがボンディングワイヤ10を介して電気的に接続されている。   In addition, a pair of electrodes (not shown, an anode electrode and a cathode electrode) of the LED element 9 are both provided on one surface side (upper surface side) of the element, and one end of the bonding wire 10 is joined to each other. The other end of the bonding wire 10 is bonded to the wire bonding pad portions 5aa and 5ba of the conductor patterns 5a and 5b. Thereby, each electrode of the LED element 9 and the conductor patterns 5 a and 5 b are electrically connected via the bonding wires 10.

更に、連穿された、基材2の凹部1とハウジング4の中空部3には封止樹脂11が充填されてLED素子9及びボンディングワイヤ10を樹脂封止している。   Further, the recessed portion 1 of the base material 2 and the hollow portion 3 of the housing 4 which are continuously drilled are filled with a sealing resin 11 to seal the LED element 9 and the bonding wire 10 with resin.

封止樹脂11は透光性樹脂又は1種以上の蛍光体を分散してなる透光性樹脂が用いられる。このうち、封止樹脂11として透光性樹脂のみを用いる場合、LED素子9は発光スペクトルのピーク波長が可視領域となるものが主として用いられる。   As the sealing resin 11, a translucent resin or a translucent resin obtained by dispersing one or more phosphors is used. Among these, when only the translucent resin is used as the sealing resin 11, the LED element 9 is mainly used in which the peak wavelength of the emission spectrum is in the visible region.

それに対し、封止樹脂11としてバインダー樹脂となる透光性樹脂に1種以上の蛍光体を分散して用いる場合、LED素子9と封止樹脂11の組み合わせは以下のようになる。   On the other hand, when 1 or more types of fluorescent substance are disperse | distributed and used for translucent resin used as binder resin as the sealing resin 11, the combination of the LED element 9 and the sealing resin 11 is as follows.

例えば、LED素子9の発光光が可視の短波長領域の青色領域に発光スペクトルのピーク波長を有する青色LED素子の場合、青色LED素子が発する青色光に励起されて青色の補色となる黄色光に波長変換する黄色蛍光体を用いることによって、青色LED素子から発せられた青色光の一部が黄色蛍光体を励起することにより波長変換された黄色光と、青色LED素子から発せられた青色光の一部との加法混色によって白色光を得ることができる。   For example, in the case of a blue LED element in which the emitted light of the LED element 9 has a peak wavelength of the emission spectrum in the blue region of the visible short wavelength region, it is excited by the blue light emitted from the blue LED element and becomes yellow light that becomes a complementary color of blue By using the yellow phosphor for wavelength conversion, a part of the blue light emitted from the blue LED element is converted into the wavelength of the yellow light excited by exciting the yellow phosphor and the blue light emitted from the blue LED element. White light can be obtained by additive color mixing with a part.

同様に、LED素子9が青色LED素子の場合、青色LED素子が発する青色光に励起されて夫々緑色光及び赤色光に波長変換する緑色蛍光体及び赤色蛍光体の2種類の蛍光体からなる混合蛍光体を用いることによって、青色LED素子から発せられた青色光の一部が混合蛍光体を励起することにより波長変換された緑色光及び赤色光と、青色LED素子から発せられた青色光の一部との加法混色によって白色光を得ることができる。   Similarly, when the LED element 9 is a blue LED element, a mixture of two types of phosphors, a green phosphor and a red phosphor, which are excited by the blue light emitted from the blue LED element and convert the wavelength into green light and red light, respectively. By using the phosphor, a part of the blue light emitted from the blue LED element excites the mixed phosphor to convert the green light and red light, and one of the blue light emitted from the blue LED element. White light can be obtained by additive color mixing with the part.

また、LED素子9の発光光が紫外領域に発光スペクトルのピーク波長を有する紫外LED素子の場合、紫外LED素子が発する紫外光に励起されて夫々青色光、緑色光及び赤色光に波長変換する青色蛍光体、緑色蛍光体及び赤色蛍光体の3種類の蛍光体からなる混合蛍光体を用いることによって、紫外LED素子から発せられた紫外光が混合蛍光体を励起することにより波長変換された青色光、緑色光及び赤色光の加法混色によって白色光を得ることができる。   Further, in the case of an ultraviolet LED element in which the emitted light of the LED element 9 has a peak wavelength of the emission spectrum in the ultraviolet region, the blue light that is excited by the ultraviolet light emitted by the ultraviolet LED element and converts into wavelengths of blue light, green light, and red light, respectively. By using a mixed phosphor composed of three types of phosphors, a phosphor, a green phosphor and a red phosphor, ultraviolet light emitted from an ultraviolet LED element is wavelength-converted by exciting the mixed phosphor. White light can be obtained by additive color mixture of green light and red light.

更に、LED素子が発する種々の色調の光とその光で励起されて種々の波長に波長変換する蛍光体とを適宜に組み合わせることによって白色光以外の種々な色調の光を得ることができる。   Furthermore, light of various color tones other than white light can be obtained by appropriately combining light of various color tones emitted from the LED element and a phosphor that is excited by the light and converts the wavelength to various wavelengths.

そこで、上記構成の半導体発光装置20において、LED素子9から発せられた光の光路について図3を参照して説明する。   Therefore, in the semiconductor light emitting device 20 having the above-described configuration, the optical path of the light emitted from the LED element 9 will be described with reference to FIG.

LED素子9内の発光部(PN接合部)9aから基材2と反対側に位置する面(上面)9bに向けて出射された光Lは、透光性を有するLED素子9内を導光されて上面9bから封止樹脂11内に入射し、封止樹脂11内を導光されて外部に向けて照射される。 Light L D emitted toward the position plane (upper surface) 9b on the opposite side from the light emitting portion (PN junction) 9a and base 2 of the LED element 9, the electrically the LED element 9 having translucency The light is incident on the sealing resin 11 from the upper surface 9b, guided through the sealing resin 11, and irradiated outward.

一方、LED素子9の発光部9aから基材2側に位置する面(下面)9cに向けて出射された光LはLED素子9内を下面9cに向けて導光されて下面9cから出射し、透明なシリコーン接着剤8および透明なシリカガラス膜7を順次を透過して銀系材料からなり高光反射率を有する光反射層6に至り、光反射層6でLED素子9側に向けて効率よく反射されて再度シリカガラス膜7及びシリコーン接着剤8を順次透過してLED素子9内を導光されて発光部9aを経て上面9bから封止樹脂11内に入射し、封止樹脂11内を導光されて外部に向けて照射される。 On the other hand, the light L R from the light emitting portion 9a emitted toward the surface (lower surface) 9c located on the substrate 2 side of the LED element 9 emits the LED element 9 from the light that is led by the lower surface 9c toward the lower surface 9c Then, the transparent silicone adhesive 8 and the transparent silica glass film 7 are sequentially transmitted to the light reflecting layer 6 made of a silver material and having a high light reflectance, and the light reflecting layer 6 faces the LED element 9 side. Reflected efficiently, the silica glass film 7 and the silicone adhesive 8 are sequentially transmitted again, guided through the LED element 9, and incident on the sealing resin 11 from the upper surface 9b through the light emitting portion 9a. The light is guided inside and irradiated toward the outside.

これにより、LED素子9の発光部9aから出射された直接光L及び発光部9aから出射されて光反射層6で反射された反射光Lを効率よく外部に照射することが可能となり、光の利用効率が高まって照射光量の増大による明るい半導体発光装置20が実現できる。また、銀系材料を含む光反射層6とシリコーン接着剤8との間にシリカガラス膜7が存在することで、原因は不明ながらシリコーン接着剤8の光劣化による変色を抑制して半導体発光装置20の寿命を向上させることができる。なお、封止樹脂11に蛍光体が分散されている場合は、直接光L及び反射光LにはLED素子9から出射された光で励起された蛍光体による蛍光光が含まれている。 Thus, it is possible to irradiate the reflected light L R reflected is emitted from the emitted light directly L D and the light emitting portion 9a from the light emitting portion 9a by the light reflecting layer 6 of the LED element 9 to the outside efficiently, The utilization efficiency of light is increased, and the bright semiconductor light emitting device 20 can be realized by increasing the amount of irradiation light. Further, the presence of the silica glass film 7 between the light reflecting layer 6 containing the silver-based material and the silicone adhesive 8 suppresses discoloration due to photodegradation of the silicone adhesive 8 although the cause is unknown. The lifetime of 20 can be improved. Note that when a phosphor in the sealing resin 11 is dispersed, includes direct light L D and the fluorescent light by the excited fluorescent material in the light emitted from the LED element 9 in the reflected light L R .

図4は、本発明の半導体発光装置20に係る他の実施形態の説明図である。本実施形態は上述の実施形態が基材に凹部を設けて該凹部内にLED素子を配置しているのに対し、基材2に凹部を設けることなく導体パターン5a、5bのワイヤボンディングパッド部5aa、5baと光反射層6を基材2の同一平面上に形成し、光反射層6の上に成膜されたシリカガラス膜7に透明なシリコーン接着剤8を介してLED素子9を接着・固定した構成となっている点が異なる。   FIG. 4 is an explanatory diagram of another embodiment according to the semiconductor light emitting device 20 of the present invention. In the present embodiment, the above-described embodiment is provided with a recess in the substrate and the LED element is disposed in the recess, whereas the substrate 2 is not provided with a recess and the wire bonding pad portion of the conductor patterns 5a and 5b. 5aa, 5ba and the light reflecting layer 6 are formed on the same plane of the substrate 2, and the LED element 9 is bonded to the silica glass film 7 formed on the light reflecting layer 6 through the transparent silicone adhesive 8. -The difference is that it has a fixed configuration.

このような構成の半導体発光装置20において、導体パターン5a、5bのワイヤボンディングパッド部5aa、5baにシリカガラス膜7が付着しないようにするための対処方法として、基材2に対する導体パターン5a、5bの形成工程以前にシリカガラス膜7の形成工程を設ける方法をとるのが好ましい。   In the semiconductor light emitting device 20 having such a configuration, as a countermeasure for preventing the silica glass film 7 from adhering to the wire bonding pad portions 5aa and 5ba of the conductor patterns 5a and 5b, the conductor patterns 5a and 5b with respect to the substrate 2 are used. It is preferable to take a method of providing a forming step of the silica glass film 7 before the forming step.

なお、本実施形態の光学系は上述の実施形態と同様であるので説明は省略する。   Note that the optical system of this embodiment is the same as that of the above-described embodiment, and thus the description thereof is omitted.

以上説明したように、本発明の半導体発光装置は、基材上に銀系材料からなる高反射率を有する光反射層を形成して該光反射層の上に透明なシリカガラス膜を成膜し、該シリカガラス膜に透明なシリコーン接着剤を介して透光性を有する半導体発光素子を接着・固定するようにした。   As described above, in the semiconductor light emitting device of the present invention, a light reflecting layer made of a silver-based material having a high reflectance is formed on a base material, and a transparent silica glass film is formed on the light reflecting layer. Then, a translucent semiconductor light emitting device is bonded and fixed to the silica glass film through a transparent silicone adhesive.

その結果、半導体発光素子内の発光部から該発光部の両側に向けて出射された光はいずれも半導体発光素子外に出射されるまでの間に光損失が少なく、よって、高光利用効率による照射光量の増大が明るい半導体発光装置の実現を可能にした。   As a result, light emitted from the light emitting part in the semiconductor light emitting element toward both sides of the light emitting part has little light loss until it is emitted to the outside of the semiconductor light emitting element. It has become possible to realize a semiconductor light emitting device with a bright increase in light quantity.

また、光反射層とシリコーン接着剤の間にシリカガラス膜を介在させて光反射層とシリコーン接着剤を隔離することにより、光反射層を構成する銀系材料とシリコーン接着剤の添加物との反応に起因すると考えられるシリコーン接着剤の変色を防止することが可能となり、長期に亘る使用に係らず良好な光学特性を維持することが可能となった。   Further, by separating the light reflecting layer and the silicone adhesive by interposing a silica glass film between the light reflecting layer and the silicone adhesive, the silver-based material constituting the light reflecting layer and the additive of the silicone adhesive It became possible to prevent discoloration of the silicone adhesive considered to be caused by the reaction, and it was possible to maintain good optical properties regardless of long-term use.

更に、半導体発光素子がシリコーン接着剤を介して銀系材料からなる光反射層よりも接着強度が強いシリカガラス膜に接着・固定されるため、半導体発光素子のダイシェア強度が光反射層に接着・固定された場合よりも約1.5倍高くなり、使用環境条件に係らず高い信頼性の確保が可能となった。   Furthermore, since the semiconductor light emitting element is bonded and fixed to a silica glass film having a stronger adhesive strength than the light reflecting layer made of a silver-based material via a silicone adhesive, the die shear strength of the semiconductor light emitting element is bonded to the light reflecting layer. It is about 1.5 times higher than when fixed, and high reliability can be secured regardless of the environmental conditions of use.

換言すると、本発明の半導体発光装置は、明るく且つ長期に亘る使用や使用環境条件に係らず良好な光学特性の維持及び高い信頼性の確保が可能である。   In other words, the semiconductor light-emitting device of the present invention is bright and can maintain good optical characteristics and ensure high reliability irrespective of long-term use and use environment conditions.

1 凹部
2 基材
2a 上面
2b 側面
2c 裏面
3 中空部
4 ハウジング
5a、5b 導体パターン
5aa、5ba ワイヤボンディングパッド部
6 光反射層
7 シリカガラス膜
8 シリコーン接着剤
9 半導体発光素子(LED素子)
9a 発光部
9b 上面
9c 下面
10 ボンディングワイヤ
11 封止樹脂
20 半導体発光装置
DESCRIPTION OF SYMBOLS 1 Recessed part 2 Base material 2a Upper surface 2b Side surface 2c Back surface 3 Hollow part 4 Housing 5a, 5b Conductive pattern 5aa, 5ba Wire bonding pad part 6 Light reflection layer 7 Silica glass film 8 Silicone adhesive 9 Semiconductor light emitting element (LED element)
9a Light emitting portion 9b Upper surface 9c Lower surface 10 Bonding wire 11 Sealing resin 20 Semiconductor light emitting device

Claims (4)

基材と、
前記基材上に形成された、銀系材料からなる光反射層と、
前記光反射層の上に該光反射層を覆うように成膜されたシリカガラス膜と、
前記シリカガラス層にシリコーン接着剤を介して固定された、透光性を有し且つ発光スペクトルのピーク波長を紫外〜可視の短波長領域とする半導体発光素子と、
を備えたことを特徴とする半導体発光装置。
A substrate;
A light reflecting layer made of a silver-based material formed on the substrate;
A silica glass film formed on the light reflecting layer so as to cover the light reflecting layer;
A semiconductor light-emitting element that is fixed to the silica glass layer via a silicone adhesive, has a light-transmitting property, and has a peak wavelength of an emission spectrum in a short wavelength region from ultraviolet to visible,
A semiconductor light emitting device comprising:
前記基材の前記光反射層が接する面に対して段差をもって導体パターンが設けられ、前記半導体発光素子の素子電極と前記導体パターンとがボンディングワイヤを介して電気的に接続されていることを特徴とする請求項1に記載の半導体発光装置。   A conductor pattern is provided with a step with respect to a surface of the substrate that contacts the light reflecting layer, and the element electrode of the semiconductor light emitting element and the conductor pattern are electrically connected via a bonding wire. The semiconductor light emitting device according to claim 1. 前記基材は一面に開口を有する凹部と前記一面上に形成された導体パターンとを備え、前記光反射層及び前記シリカガラス膜が前記凹部内面の少なくとも底面に形成されると共に前記半導体発光素子が前記凹部内に位置し、前記半導体発光素子の素子電極と前記導体パターンとがボンディングワイヤを介して電気的に接続されていることを特徴とする請求項1に記載の半導体発光装置。   The substrate includes a recess having an opening on one surface and a conductor pattern formed on the one surface, and the light reflecting layer and the silica glass film are formed on at least the bottom surface of the inner surface of the recess, and the semiconductor light emitting element is 2. The semiconductor light emitting device according to claim 1, wherein the semiconductor light emitting device is located in the recess, and the element electrode of the semiconductor light emitting element and the conductor pattern are electrically connected via a bonding wire. 前記半導体発光素子は青色光を発光する青色LED素子または紫外光を発光する紫外LED素子であり、且つ前記半導体発光素子は該半導体発光素子を覆うように1種以上の蛍光体を含有してなる封止樹脂で樹脂封止されていることを特徴とする請求項1〜3のいずれか1項に記載の半導体発光装置。   The semiconductor light emitting element is a blue LED element that emits blue light or an ultraviolet LED element that emits ultraviolet light, and the semiconductor light emitting element contains one or more phosphors so as to cover the semiconductor light emitting element. The semiconductor light-emitting device according to claim 1, wherein the semiconductor light-emitting device is sealed with a sealing resin.
JP2009031516A 2009-02-13 2009-02-13 Semiconductor light emitting device Expired - Fee Related JP5325597B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009031516A JP5325597B2 (en) 2009-02-13 2009-02-13 Semiconductor light emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009031516A JP5325597B2 (en) 2009-02-13 2009-02-13 Semiconductor light emitting device

Publications (2)

Publication Number Publication Date
JP2010186952A true JP2010186952A (en) 2010-08-26
JP5325597B2 JP5325597B2 (en) 2013-10-23

Family

ID=42767408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009031516A Expired - Fee Related JP5325597B2 (en) 2009-02-13 2009-02-13 Semiconductor light emitting device

Country Status (1)

Country Link
JP (1) JP5325597B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012114142A (en) * 2010-11-22 2012-06-14 Panasonic Corp Led light-emitting device
JP2019165122A (en) * 2018-03-20 2019-09-26 日亜化学工業株式会社 Light-emitting device and method for manufacturing the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266356A (en) * 2006-03-29 2007-10-11 Kyocera Corp Light-emitting device and illuminator using the same
JP2007311401A (en) * 2006-05-16 2007-11-29 Idec Corp Led light emitting device and method of fabricating the same
JP2008078401A (en) * 2006-09-21 2008-04-03 Toshiba Lighting & Technology Corp Lighting device
JP2008130449A (en) * 2006-11-22 2008-06-05 Alps Electric Co Ltd Light-emitting device and its manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266356A (en) * 2006-03-29 2007-10-11 Kyocera Corp Light-emitting device and illuminator using the same
JP2007311401A (en) * 2006-05-16 2007-11-29 Idec Corp Led light emitting device and method of fabricating the same
JP2008078401A (en) * 2006-09-21 2008-04-03 Toshiba Lighting & Technology Corp Lighting device
JP2008130449A (en) * 2006-11-22 2008-06-05 Alps Electric Co Ltd Light-emitting device and its manufacturing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012114142A (en) * 2010-11-22 2012-06-14 Panasonic Corp Led light-emitting device
JP2019165122A (en) * 2018-03-20 2019-09-26 日亜化学工業株式会社 Light-emitting device and method for manufacturing the same
US10763403B2 (en) 2018-03-20 2020-09-01 Nichia Corporation Light emitting device and method of manufacturing light emitting device
US11316080B2 (en) 2018-03-20 2022-04-26 Nichia Corporation Light emitting device and method of manufacturing light emitting device
US11715819B2 (en) 2018-03-20 2023-08-01 Nichia Corporation Light emitting device and method of manufacturing light emitting device

Also Published As

Publication number Publication date
JP5325597B2 (en) 2013-10-23

Similar Documents

Publication Publication Date Title
JP5273486B2 (en) Lighting device
JP3979424B2 (en) Light emitting device
JP5245594B2 (en) Light emitting device and manufacturing method thereof
JP4678391B2 (en) Lighting equipment
JP6583764B2 (en) Light emitting device and lighting device
JP2009506527A (en) Electrical contact system for light emitting diodes and laser diodes with color converter
JP2008244357A (en) Semiconductor light-emitting device
JP2007180059A (en) Optical semiconductor device and manufacturing method therefor
JP2008028181A (en) Lighting device
JP2009283653A (en) Light-emitting device and production method therefor
JP2007180430A (en) Light-emitting diode device
JP5169185B2 (en) Light emitting device
JP2013012694A (en) Light emitting device and luminaire
JP2007280983A (en) Light-emitting device
JP2011159968A (en) Package for housing compound semiconductor device, and method of manufacturing the same
JP2004186309A (en) Semiconductor light emitting device equipped with metal package
JP5325597B2 (en) Semiconductor light emitting device
US10199597B2 (en) Light-emitting apparatus and illumination apparatus
JP3941826B2 (en) LED luminaire manufacturing method
JP2009049172A (en) Light-emitting apparatus
JP2005333014A (en) Led lamp
JPH1168169A (en) Light emitting diode device
JP4900374B2 (en) Semiconductor light emitting device with metal package
JP2018032692A (en) Light-emitting device, and illuminating device
JP2017163058A (en) LED module

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120116

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130123

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130129

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130321

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130423

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130607

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130625

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130722

R150 Certificate of patent or registration of utility model

Ref document number: 5325597

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees