JP2010176895A - Louver for static eliminator and static eliminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a louver for static eliminator for improving discharging straight advance of ions generated by corona discharge, and a static eliminator. <P>SOLUTION: The static eliminator 1 discharges ions generated by discharge to the outside by a blower, and the louver 3 for static eliminator includes a plurality of fins 23 which are arranged in front of the blower and are aligned in diameter direction going from the center to the outer circumference corresponding to the rotation axis of the blower, and the arrangement spacing of the fins in diameter direction becomes narrower in the outer circumference side portion than in the central side portion. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a fin structure of a louver of a static eliminator.

  A static eliminator, for example, in a production line of electronic equipment, sprays at least one of positive ions and negative ions onto a workpiece that is positively or negatively charged (for example, an electronic component such as a semiconductor element) to neutralize the charged potential of the workpiece. (Discharge). Among these static eliminators, there is a type with a built-in blower that incorporates a blower for discharging ions generated by discharge to the outside. Specifically, the static eliminator with a built-in blower has an ion discharge port formed in the main body case, a discharge electrode and a blower are arranged behind the discharge port, and ions generated from the discharge electrode are converted into air flow by the blower. It is discharged on the outside from the discharge port. And in order to prevent danger, such as a user putting a hand from a discharge port, it is common to attach a louver so that the discharge port may be covered. This louver has a structure in which a plurality of ventilation holes are formed by a plurality of fins intersecting in a lattice shape.

JP 2004-253192 A

  By the way, since the air flow from the blower is normally diffused, the straightness of the ions sent out from the discharge port is lowered, and there is a possibility that the ions are inadvertently released in a wide range.

  The present invention has been completed based on the above situation, and an object of the present invention is to provide a louver for a static eliminator and a static eliminator capable of improving the straightness of emitted ions.

  (1) As a means for achieving the above object, a louver for a static eliminator according to a first invention is a louver disposed in front of the blower in a static eliminator that discharges ions generated by corona discharge to the outside by a blower. In the air vent hole having fins and formed by the fins, the opening width along the radial direction from the center to the outer periphery corresponding to the rotation shaft of the blower is such that the outermost peripheral side portion is the innermost center side. It is narrower than the part.

  According to this invention, the opening width in the radial direction of the air vent is such that the outermost peripheral portion is narrower than the innermost portion. Of the air flow discharged by the blower, the air flow passing through the central portion of the louver is highly straight, and the air flow passing through the outermost peripheral portion is particularly diffusive. Therefore, it is possible to suppress the diffusion of the air flow that passes through at least the outermost portion and discharge ions having high straightness to the outside.

  (2) A second invention is a louver for a static eliminator according to the first invention, wherein the opening width of the air vent hole is gradually reduced from the center toward the outer periphery.

  According to this invention, the opening width of the air vent hole is gradually reduced from the central side toward the outer peripheral side. The air flow emitted by the blower and passing through the louver becomes more diffusible as it approaches the outer peripheral side from the center side of the louver. Therefore, it is possible to effectively suppress the diffusion of the air flow from the blower.

  (3) A third aspect of the present invention is the static eliminator louver of the first or second aspect, wherein the length of the air vent hole in the direction of the rotation axis of the blower is such that the outermost peripheral portion is the outermost portion. It is longer than the central part.

  According to the present invention, the length of the air vent hole in the direction of the rotation axis of the blower is larger at the outer peripheral portion than at the central portion. Thereby, it is possible to further improve the straightness of the air flow passing through the outermost peripheral portion of the louver.

  (4) A fourth aspect of the present invention is the neutralization device louver of any one of the first to third aspects, wherein the air vent is formed in a plurality of concentric circles.

  According to this invention, the air vent is formed in a plurality of concentric circles. Since the air flow from the blower flows so as to rotate around the rotation axis of the blower, it is possible to suppress the resistance of the fins to the air flow and improve the ion discharge power.

  (5) A static eliminator according to a fifth aspect of the present invention is a discharge electrode that generates ions, a blower that discharges ions generated by the discharge electrode to the outside, and any of first to fourth disposed in front of the blower A neutralizing device louver according to the invention.

  According to the present invention, it is possible to improve the straightness of emitted ions.

The front view of the static elimination apparatus which concerns on one Embodiment of this invention Front view of the static eliminator Front view of louver AA sectional view of FIG. Perspective view of the louver from the rear Schematic diagram showing the flow of airflow by the louver Wind velocity distribution map of the air flow passing through the louver Schematic showing the fin shape of the modified louver

  An embodiment of the present invention will be described with reference to FIGS. The static eliminator 1 according to the present embodiment is a blower built-in type, and is used, for example, in a manufacturing line of electronic equipment to neutralize (static charge) a charged potential of a work (an electronic component such as a semiconductor element not shown). The FIG. 1 is a front view of the static eliminator 1. FIG. 2 is a front view of the static eliminator body 5 with the louver 3 removed. 3 is a front view of the louver 3, FIG. 4 is a cross-sectional view taken along the line AA of FIG. 3, and FIG. 5 is a perspective view of the louver 3 as viewed from the rear.

(1) Structure of static elimination apparatus As shown in FIG. 1, the static elimination apparatus 1 has the static elimination apparatus main body 5, and is the structure by which the louver 3 was attached to the front surface so that attachment or detachment was possible.

(1-1) Static Charger Main Body As shown in FIG. 2, the static neutralizer main body 5 has a box shape as a whole, and a circular opening 5A is formed on the front surface facing the workpiece. Moreover, the static elimination apparatus main body 5 incorporates a plurality of (for example, eight) discharge electrodes 7 that generate ions and a blower (fan) 9 that discharges the ions generated by the discharge electrodes 7 to the outside. The static eliminator main body 5 is arranged at a predetermined installation position via the installation table 11. This installation base 11 has a pair of arms 11A and 11A sandwiching the left and right side surfaces of the static elimination device main body 5, and the pair of arms 11A and 11A tilts the static elimination device main body 5 about a rotation axis along the horizontal direction. Support as possible.

  The eight discharge electrodes 7 are arranged behind the opening 5 </ b> A of the static elimination apparatus main body 5. Specifically, a substantially disc-shaped holder 13 is provided behind the center position X of the opening 5A. The eight discharge electrodes 7 are fixed to the holder 13 at the base end, and the needle tips are on the outer peripheral side. It is arranged radially so as to face. The discharge electrode 7 causes corona discharge when a high voltage is applied from a high voltage power supply circuit (not shown), and generates positive or negative ions at the needle tip.

  The blower 9 has a plurality of (for example, four) wings, and is arranged behind the discharge electrode 7 in a state where the rotation axis thereof substantially coincides with the center position X. The blower 9 is driven to rotate by a drive circuit (not shown) to generate an air flow. Thereby, the ion produced | generated by the discharge electrode 7 is discharge | released outside from the opening part 5A of the static elimination apparatus main body 5 along an airflow. In addition, as shown in FIG. 2, the ventilation part 21 in which the several ventilation hole 21A was formed is formed in the back surface of the static elimination apparatus main body 5. As shown in FIG.

(1-2) Louver As shown in FIG. 3, the louver 3 has a substantially disk shape and is detachably attached to the opening 5 </ b> A of the static elimination device body 5. Specifically, a plurality of (for example, four) locking protrusions 15 are integrally formed on the louver 3, while the opening 5 </ b> A has a notch portion 17 into which each locking protrusion 15 can be inserted. A locking groove 19 that communicates with the cutout portion 17 and extends in the circumferential direction of the opening 5A is formed. Each of the locking protrusions 15 is inserted into each of the cutout portions 17 and the louver 3 is rotated in one direction, whereby each of the locking protrusions 15 is locked in the locking groove 19, whereby the louver 3 is neutralized. It can be attached to the apparatus body 5. On the other hand, the louver 3 can be removed from the static eliminator body 5 by rotating the louver 3 in the reverse direction.

  The louver 3 has a plurality of (for example, four) circular fins 23 (an example of the “fins” in the present invention) having different diameters from each other around the center position X ′ corresponding (substantially coincident) with the center position X of the blower 9. These circular fins 23 form a plurality of air vent holes H. The arrangement interval D between adjacent circular fins 21 (an example of the “pitch interval in the radial direction” of the present invention “an opening width along the radial direction of the air vent hole H”) increases from the center position X ′ of the louver 3 toward the outer periphery. Narrow in steps (D1> D2> D3> D4> D5).

  4 and 5, the thickness of the circular fin 23 in the direction of the rotation axis of the blower 9 (the front-rear direction of the static elimination device 1) ("the length of the air vent hole in the direction of the rotation axis of the blower" of the present invention). In an example), the outer peripheral portion of the louver 3 is larger than the central portion. More specifically, the thickness W of the circular fin 23 is the smallest at the circular fin 23 closest to the central position X ′ of the louver 3, and increases in a stepwise manner toward the circular fin 23 on the outer peripheral side. In addition, the louver 3 is formed such that the front side is formed in a flat shape and the rear side is formed in a concave shape so that the thickness of each circular fin 23 is different (W1 <W2 <W3...).

  Furthermore, the louver 3 has a plurality of divided fins 25 that divide the space formed by the adjacent circular fins 23 in the circumferential direction. The plurality of divided fins 25 are arranged at equal intervals in the circumferential direction. The number of the divided fins 25 is larger in the outer peripheral side portion of the louver 3 than in the central side portion. More specifically, the space formed by the circular fins 23 from the center position X ′ to the third is divided by, for example, 15 divided fins 25, and the fourth and subsequent circular fins 23 are formed. The space to be divided is divided by 24 divided fins 25.

  Here, if the number of the divided fins 25 is the same between the outer peripheral side portion and the central side portion of the louver 3, the space formed by the circular fins 23 increases toward the outer peripheral side of the louver 3. There is a risk that the air flow that diffuses to the side increases relatively. On the other hand, with the configuration of the present embodiment, the number of the divided fins 25 is increased on the outer peripheral side portion, thereby reducing the total opening area between the circular fins 23 and suppressing air flow diffusion. can do.

(2) Effect of this Embodiment FIG. 6 is a schematic diagram showing the flow of air flow by the louver 3. As shown in the figure, among the airflows discharged from the blower 9, the central airflow that passes through the central portion of the louver 3 has high straightness. On the other hand, the outer peripheral air flow passing through the outer peripheral portion of the louver 3 is highly diffusive. On the other hand, in the louver 3 of this embodiment, the arrangement | positioning space | interval D of circular fins 23 is narrower in the outer peripheral side part than the center side part. Therefore, the passage resistance in the louver 3 of the central side airflow having high straightness is reduced, and the decrease in the efficiency (momentum) of releasing the airflow from the blower 9 is suppressed.

  Note that no air flow is released from the holder 13 portion of the blower 9. For this reason, the airflow flowing near the central position X ′ of the louver 3 is small, but since the front of the central position X ′ becomes a negative pressure region, the surrounding airflow is drawn into the negative pressure region. To the side.

  On the other hand, the outer peripheral air flow having high diffusivity is radially spread toward the outer peripheral side of the louver 3, but the outer peripheral air flow follows the circular fins 23 because the outer peripheral circular fins 23 have a small arrangement interval D. Since the direction can be changed in the direction of the straight line, straightness is improved. As described above, the louver 3 can improve the straight traveling performance while suppressing a decrease in the efficiency of releasing the air flow from the blower 9.

  Moreover, the arrangement interval D of the circular fins 23 is gradually reduced from the central side toward the outer peripheral side. The air flow emitted by the blower 9 and passing through the louver 3 becomes more diffusive as it approaches the outer peripheral side from the center side of the louver. Therefore, it is possible to effectively suppress the diffusion of the air flow from the blower 9.

  Further, the thickness W of the circular fin 23 is larger at the outer peripheral side portion of the louver 3 than at the central side portion. The greater the thickness W of the circular fin 23, the higher the straightness of the airflow. Therefore, it is possible to further improve the straightness of the outer peripheral air flow.

  The louver 3 is configured to have concentric circular fins 23. Since the air flow from the blower 9 flows so as to rotate about the rotation axis of the blower 9, it is possible to suppress the resistance of the fins to the air flow and improve the ion discharge power.

  FIG. 7 is a wind speed distribution diagram of the air flow that has passed through the louver 3. This wind speed distribution map can be obtained, for example, by the following experiment. The louver 3 used in the experiment has a distance L (see FIG. 3) between the outermost vent holes of approximately 110 mm. Then, an anemometer (manufacturer: KANOMAX, model name: MODEL 6112) is arranged at a distance of 500 mm from the static eliminator 1 to which the louver 3 is mounted, and the wind speed is measured. The initial position of the anemometer at this time is a position facing the central position X ′ of the louver 3. Next, the wind speed at each point is measured while moving the anemometer from the initial position, and the measurement data is collected to create the wind speed distribution map. Also from this wind speed distribution diagram, it can be seen that the louver 3 suppresses the diffusion of the air flow from the blower 9 and discharges a substantially uniform air flow in the circumferential direction.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and the drawings, and for example, the following various aspects are also included in the technical scope of the present invention. In particular, among the constituent elements of each embodiment, constituent elements other than the constituent elements of the top-level invention can be omitted as appropriate because they are additional elements.
(1) In the above embodiment, the louver 3 has a configuration having a plurality of concentric circular fins 21, but the present invention is not limited to this. For example, a fin 27 such as a polygon such as a quadrangle as shown in FIG. 8 may be used.

  (2) In the above embodiment, the arrangement interval D of the circular fins 23 is gradually reduced from the center side to the outer periphery side of the louver 3, but the present invention is not limited to this. It suffices that at least the outermost peripheral part is narrower than the central part.

  (3) In the above-described embodiment, the louver 3 is formed such that the front surface side is formed in a flat shape and the rear surface side is formed in a concave shape, so that the thickness of each circular fin 23 is different, but the present invention is limited to this. Absent. For example, a configuration in which a concave shape is formed on the front surface side and a rear surface side is formed in a planar shape, or a configuration in which a concave shape is formed on both the front surface side and the rear surface side may be employed. However, the configuration of the above embodiment is particularly preferable in terms of design because the front side is flat.

DESCRIPTION OF SYMBOLS 1 ... Static elimination apparatus 3 ... Louver 7 ... Discharge electrode 9 ... Blower 23 ... Circular fin (fin)
D ... Space between circular fins H ... Air vents W ... Thickness of circular fins

Claims (5)

A louver disposed in front of the blower in a static eliminator that discharges ions generated by corona discharge to the outside by a blower,
Have fins,
For the air vent formed by the fin, the opening width along the radial direction from the center to the outer periphery corresponding to the rotating shaft of the blower is such that the outermost peripheral portion is narrower than the outermost central portion. Equipment louver. It is a louver for static elimination apparatuses of Claim 1, Comprising: The said opening width | variety of the said air vent hole becomes narrow gradually in steps toward the said outer periphery from the said center. It is a louver for static elimination apparatus of Claim 1 or Claim 2, Comprising:
The length of the air vent hole in the rotational axis direction of the blower is a louver for a static eliminator in which the outermost peripheral portion is longer than the innermost portion. It is the louver for static elimination apparatuses as described in any one of Claims 1-3,
The air vent is a louver for a static eliminator, wherein the air vent is formed in a plurality of concentric circles. A discharge electrode for generating ions;
A blower that discharges ions generated by the discharge electrode to the outside;
The static eliminator provided with the louver for static neutralizers as described in any one of Claims 1-4 arrange | positioned ahead of the said air blower.

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