JP2010169605A - Sensor with moving amount measuring function, and measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems, wherein when measuring a film thickness distribution of a film sheet, or the like, though a measuring position is input by fixing a prove and moving the film sheet, or by fixing the film sheet and moving the prove by a hand, measurement is complicated, because in the former case, a device for moving the film sheet becomes large, and in the latter case, position input is required at each measurement. <P>SOLUTION: A sensor and a moving amount measuring part for detecting a moving amount are fixed on a fixing stand, and an operation for moving the fixing stand to set the sensor on a measuring position, and performing measurement is repeated. A mouse is used as the moving amount measuring part. Since there is no requirement for a measuring object, such as the film sheet to be moved, the device is significantly simplified. Furthermore, since the measuring position can be calculated from the moving amount, the labor of inputting the measuring position can be omitted. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sensor and a measuring apparatus that can simultaneously measure both a physical quantity and a moving quantity, and in particular, a sensor with a moving quantity measuring function suitable for use in a measuring apparatus that measures a physical quantity distribution such as a film thickness distribution of a film sheet. And a measuring apparatus using the same.

  In FIG. 5, the structure of the measuring apparatus which measures the film thickness distribution of a film sheet is shown. In FIG. 5, 10 is a film sheet for measuring the film thickness distribution, and 11 is a motor for moving the film sheet 10 in the left-right direction. When the motor 11 is rotated, the roller 12 is rotated and the film sheet 10 can be moved in the left-right direction.

  13 is an encoder, and 14 is a roller. When the film sheet 10 moves, the roller 14 rotates and the encoder 13 rotates. The encoder 13 is a sensor that outputs a pulse signal corresponding to the number of rotations, and this pulse signal is integrated by the counter 15. Therefore, the integrated value of the counter 15 represents the moving distance of the film sheet 10. This integrated value is output to the measurement unit 18.

  Reference numeral 16 denotes a probe for measuring the film thickness of the film sheet 10, which irradiates the measurement light supplied from the light source / spectrometer 17 to the film sheet 10 and detects reflected light. This reflected light signal is output to the light source / spectrometer 17.

  The light source / spectrometer 17 calculates an interference spectrum from the reflected light signal sent from the probe 16 and outputs the interference spectrum to the measuring unit 18. The measuring unit 18 calculates the film thickness of the film sheet 10 from the interference spectrum, calculates the measurement position from the count value of the counter 15, and associates this measurement position with the film thickness measurement value.

  In such a configuration, the film 11 is moved by driving the motor 11, and the film thickness is measured. By repeating this operation, the film thickness distribution of the film sheet 10 can be measured.

  FIG. 6 shows the configuration of another film thickness distribution measuring apparatus. Note that the same reference numerals are given to the same elements as those in FIG. In this film thickness distribution measuring apparatus, the measurer manually moves the probe 16 to the measurement position and inputs the position to the position input unit 19. The measuring unit 18 calculates the film thickness of the film sheet 10 from the interference spectrum output from the light source / spectral unit 17, and associates the film thickness with the position information output from the position input unit 19.

  When only approximate values are required, the film thickness may be measured at several locations using a micro gauge without using a film thickness measuring device.

  Patent Document 1 describes an invention of a film thickness measuring apparatus that can easily set a calculation range for recalculating a film thickness. In the present invention, the interference spectrum and the calculation range setting bar are displayed on the same screen, and the calculation range is set and changed by operating the setting bar with a mouse.

Patent Document 2 describes an invention of a measurement method using screen display that can set a measurement position in correspondence with a screen. In the present invention, an image of an object to be measured and a measurement scale line that can move in the X-axis and Y-axis directions are displayed, and the measurement position is set by moving the scale line using a mouse.
Japanese Patent Application Laid-Open No. 09-325015 Japanese Patent Application Laid-Open No. 09-33231

  However, such a measuring apparatus and measuring method have the following problems. Although the film thickness measuring apparatus of FIG. 5 has an advantage that the film thickness distribution can be automatically measured, since an apparatus for moving the film sheet 10 is necessary, there is a problem that the apparatus becomes large and expensive.

  The film thickness measurement apparatus of FIG. 6 can be simplified in configuration as compared with the apparatus of FIG. was there. In addition, since the sensor is manually installed at the measurement position and the position is read, there is a problem that the accuracy and reproducibility of the measurement position deteriorates.

  If paper information is managed without inputting position information, the trouble of position input is reduced, but there is a problem that data cannot be shared.

  The simple measurement method using a micro gauge is the simplest method, but there are problems that it is difficult to obtain measurement accuracy and data cannot be shared. In addition, there is a problem that the measurement requires skill and training, and the measurement accuracy depends on the skill and experience.

  The inventions of Patent Literature 1 and Patent Literature 2 are common in that the range is specified on the screen, but they are not inventions that associate measurement values with measurement positions.

  Accordingly, an object of the present invention is to provide a sensor with a moving amount measuring function and a measuring apparatus that have a simple configuration and can automatically correspond to a measured value and a measuring position.

In order to solve such a problem, the invention according to claim 1 of the present invention,
A sensor for measuring physical quantities;
A movement amount measurement unit that outputs a signal related to the movement amount;
A fixing base for fixing the sensor and the movement amount measuring unit;
Is provided. The measurement position can be acquired automatically.

The invention according to claim 2 is the invention according to claim 1,
The movement amount measuring unit outputs a signal related to the movement amount in both the X direction and the Y direction. A two-dimensional position can be acquired.

The invention according to claim 3 is the invention according to claim 1 or claim 2,
A mouse is used as the movement amount measuring unit. Inexpensive general-purpose products can be used.

The invention according to claim 4
A sensor with a moving amount measuring function according to any one of claims 1 to 3,
A measurement unit that receives the output of the sensor with movement amount measurement function, calculates a measurement position from the output of the movement amount measurement unit, and stores the measurement position and a measurement value calculated from the output of the sensor that measures the physical quantity When,
Is provided. Both measurement values and measurement positions can be acquired automatically.

The invention according to claim 5 is the invention according to claim 4,
A display unit for displaying the measurement value and the measurement position is provided. The distribution of measured values can be grasped immediately.

The invention according to claim 6 is the invention according to claim 4 or claim 5,
A mouse is used as the movement amount measurement unit, and a personal computer is used as the measurement unit. Since a general-purpose product can be used, it becomes inexpensive.

The invention according to claim 7 is the invention according to any one of claims 4 to 6,
The measurement unit outputs an alarm when the position of the sensor that measures the physical quantity exceeds a region to be measured. Since unnecessary measurements can be reduced, efficiency can be improved.

The invention according to claim 8 is the invention according to any one of claims 4 to 7,
The said measuring apparatus is applied to the measuring apparatus which measures the film thickness of a film sheet. It is suitable for use in a measuring apparatus that measures the film thickness of a film sheet that requires a planar distribution.

As is apparent from the above description, the present invention has the following effects.
According to the first, second, third, fourth, fifth, sixth, seventh and eighth inventions, the sensor for measuring the physical quantity and the movement amount measuring unit for measuring the movement amount are fixed to the fixed base. In addition, using this sensor, the measurement value and the measurement position can be automatically acquired simultaneously.

  There is an effect that the measurement value and the measurement position can be automatically acquired by simply tracing the part whose physical quantity is to be measured. For this reason, there is no need to input measurement positions one by one, and there is an effect that efficient measurement can be performed. In particular, it is suitable for use where the accuracy of the measurement position is not so required.

  In addition, since there is no need to move the object to be measured, there is an effect that a large-scale moving device is not required. Furthermore, since the amount of movement can be detected with a simple device, the sensor configuration can be simplified and the cost can be greatly reduced.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing Embodiment 1 of a sensor with a movement amount measuring function according to the present invention. In FIG. 1, (A) is a side view of a sensor with a movement amount measuring function, and (B) is a top view.

  Reference numeral 20 denotes a sensor that measures a physical quantity, and the probe 16 corresponds to a measuring device that measures the film thickness of a film sheet. Reference numeral 21 denotes a movement amount measurement unit, which includes a ball 21a and rotation detection units 21b and 21c that detect the rotation amount and rotation direction of the ball 21a. Reference numeral 22 denotes an origin instruction button for instructing an origin, and reference numeral 23 denotes a measurement button for instructing measurement. The sensor 20, the movement amount measuring unit 21, and the buttons 22 and 23 are fixed to a fixed base 24.

  When the sensor with the position measuring function is placed on a plate or the like and the fixed base 24 is moved, the ball 21a rotates accordingly. Since the positional relationship between the sensor 20 and the movement amount measuring unit 21 is fixed, the movement amount of the sensor 20 can be measured by detecting the rotation amount and the rotation direction of the ball 21a. The rotation detection unit 21b detects the rotation amount and rotation direction of the ball 21a in the X direction (left and right direction), and the rotation detection unit 21c detects the rotation amount and rotation direction of the ball 21a in the Y direction (up and down direction).

  The rotation detectors 21b and 21c have a built-in roller that contacts the ball 21a, and the roller rotates as the ball 21a rotates. The rotation detectors 21b and 21c detect the amount and direction of rotation of the built-in rollers, and measure the amounts of movement in the X and Y directions, respectively. By combining the measurement values of the rotation detectors 21b and 21c, the amount of movement of the sensor 20 in the two-dimensional plane can be measured. When measuring a distribution along a straight line, the sensor with a position measuring function may be moved along a plate or the like.

  Next, the operation procedure of the sensor with the movement amount measuring function will be described based on the flowchart of FIG. The outputs of the sensor 20, the movement amount measurement unit 21, the origin instruction button 22, and the measurement button 23 are input to a measurement unit (not shown). The sensor with the movement amount measuring function is manually moved by the measurer.

  In FIG. 2, first, the sensor with the movement amount measuring function is moved so that the sensor 20 becomes the origin position in the step (P2-1), and the origin instruction button 22 is pressed in the step (P2-2). A measurement unit (not shown) knows that measurement is started by pressing the origin instruction button 22. Thereafter, the position of the measurement point is based on this origin.

  Next, the sensor with the movement amount measuring function is moved so that the sensor 20 is positioned at the measurement point in the step (P2-3), and the measurement button 23 is pressed in the step (P2-4). The measurement unit takes in the outputs of the sensor 20 and the movement amount measurement unit 21, calculates the current measurement position from the movement amount that is the output of the movement amount measurement unit 21 and the previous measurement position, and calculates this output as the output of the sensor 20. Save the measurement position in relation. In the first measurement, the movement amount becomes the measurement position.

  Next, it is determined whether or not the measurement of all measurement points is completed in the step (P2-5), and if not completed (NO), the process returns to the step (P2-3). When the measurement is completed (YES), the measurement unit transmits the stored measurement value and measurement position to the outside, and displays the measurement value and measurement position as necessary.

  Since the sensor with the moving amount measuring function is moved by hand and the object to be measured is not moved, a large-scale device is not required. Moreover, since the movement amount of the sensor 20 is measured by the movement amount measuring unit 21 and the position of the sensor 20 is calculated from the movement amount, there is no need to input the position of the sensor 20 for each measurement. Since the movement amount measuring unit 21 can be realized with a simple configuration as shown in FIG. 1, it can be manufactured at low cost.

  In the off-line measurement, the sample physical quantity distribution can be easily measured by cutting out the sample and fixing the sample on an appropriate table, and moving the sensor with a moving amount measuring function on the table.

  In the first embodiment, the movement amount measurement unit 21 calculates the movement amount and outputs it to the measurement unit. However, the movement amount is calculated, for example, the rotation amount and the rotation direction of the roller are output to the measurement unit. A configuration in which the movement amount is calculated by the measurement unit may be used.

  In the first embodiment, the movement amount measurement unit 21 is configured by the ball 21a and the rotation detection units 21b and 21c. However, another configuration may be used. For example, the structure which measures the amount of movement by detecting the unevenness | corrugation and pattern of the stand which move with an optical sensor may be sufficient. Further, the origin instruction button 22 and the measurement button 23 may not be on the fixed base 24 but may be in another place.

  In the first embodiment, the movement amount in the X direction and the Y direction is detected. However, when the measurement only needs to be performed in the length direction or the width direction, only the movement amount in the X direction or the Y direction is detected. It may be.

  Further, in the first embodiment, the measurement button 23 is pressed for each measurement, but the outputs of the sensor 20 and the movement amount measurement unit 21 may be captured at a constant cycle. In this way, the physical quantity of the trajectory can be measured simply by moving the sensor with the movement amount measuring function.

  As can be seen from FIG. 1, the structure and function of the movement amount measurement unit 21 is almost the same as that of a mouse used as a pointing device such as a personal computer. Therefore, this mouse can also be used as the movement amount measuring unit 21. Since several push buttons are attached to the mouse, these push buttons can be used as the origin indication button 22 and the measurement button 23.

  FIG. 3 shows the configuration of the second embodiment of the present invention. Example 2 is a measuring apparatus that measures the film thickness of a film sheet using the sensor with the movement amount measuring function of Example 1. The same elements as those in FIGS. 1 and 5 are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 3, reference numeral 30 denotes a sensor with a movement amount measuring function, and the sensor 20 and the movement amount measuring unit 21 are attached to the fixed base 24. The sensor 20 is the same as the probe 16 of FIG. 5, irradiates the film sheet 10 with measurement light supplied from the light source / spectral unit 17, detects the reflected light, and outputs it to the light source / spectral unit 17. The light source / spectrometer 17 calculates the interference spectrum of the reflected light transmitted from the sensor 20.

  Reference numeral 31 denotes a measurement unit which receives a movement amount from the movement amount measurement unit 21 and an interference spectrum from the light source / spectral unit 17. The measurement unit 31 calculates the film thickness of the film sheet 10 from the interference spectrum output from the light source / spectral unit 17, calculates the position of the measurement point from the movement amount output from the movement amount measurement unit 21, and determines the film thickness and position. save.

  The measurer performs measurement based on the flowchart of FIG. That is, the operation of determining the origin, moving the sensor 30 with the movement amount measuring function and positioning the sensor 20 at the measurement point is repeated.

  Reference numeral 32 denotes a display unit. When the measurement is completed, the measurement unit 31 outputs the film thickness and measurement position data to the display unit 32. The display unit 32 displays the film thickness measurement value and the measurement position in an easy-to-see form. Further, the measurement value and the measurement position may be graphically displayed in real time during the measurement.

  In addition, by dividing the movement of the sensor into the X direction and the Y direction, the distribution in the X direction and the Y direction can be taken out independently.

  The personal computer has a function to calculate the amount of movement from the output of the connected mouse. In Example 3, this mouse is used as the movement amount measurement unit, and a personal computer is used as the measurement unit. The same elements as those in FIGS. 1 and 3 are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 4, 40 is a sensor with a movement amount measuring function, and 41 is a mouse. The sensor 40 with a movement amount measuring function has a configuration in which the sensor 20 and the mouse 41 are fixed to a fixed base 24. A personal computer 42 is connected to a mouse 41 and receives interference spectrum data from the light source / spectral unit 17.

  The operation is the same as in Example 2. The measurer determines the origin based on the flowchart of FIG. 2, repeats the operation of measuring the film thickness by positioning the sensor 20 at the measurement point. The personal computer 42 calculates the film thickness from the interference spectrum data input from the light source / spectrometer 17, acquires the movement amount from the mouse 41, and calculates the measurement position.

  The film thickness and measurement position are stored in a memory in the personal computer 42. When the measurement is completed, the personal computer arranges the stored film thickness measurement values and measurement positions, and displays them in an easily viewable manner on a built-in or connected display unit.

  The personal computer 42 has a function of acquiring the amount of movement of the connected mouse. It also has advanced calculation functions. Furthermore, personal computers and mice are general-purpose products and are cheaper than their functions. By using such a personal computer and a mouse, a low-cost measuring device can be constructed.

  When the movement amount acquired by the personal computer 42 and the movement amount of the sensor 20 are different, the actual movement amount can be obtained by multiplying the movement amount of the mouse by an appropriate correction coefficient.

  Although Example 2 and Example 3 demonstrated the sensor which measures the film thickness of a film sheet, it is not limited to this Example. It can also be applied to sensors that measure other physical quantities. This is particularly effective when measuring the distribution of physical quantities.

  An alarm may be output when the position of the sensor 20 is out of the display range. In this way, since only the part that needs to be measured can be measured, the measurement time can be shortened.

It is a block diagram which shows Example 1 of this invention. 3 is a flowchart illustrating an operation procedure according to the first embodiment. It is a block diagram which shows Example 2 of this invention. It is a block diagram which shows Example 3 of this invention. It is a block diagram of the conventional film thickness measuring apparatus. It is a block diagram of the conventional film thickness measuring apparatus.

DESCRIPTION OF SYMBOLS 10 Object 17 Light source / spectral part 20 Sensor 21 Movement amount measurement part 21a Ball 21b, 21c Rotation detection part 22 Origin indication button 23 Measurement button 24 Fixing base 30, 40 Sensor 31 with movement amount measurement function Measurement part 32 Display part 41 Mouse 42 PC

Claims (8)

A sensor for measuring physical quantities;
A movement amount measurement unit that outputs a signal related to the movement amount;
A fixing base for fixing the sensor and the movement amount measuring unit;
A sensor with a moving amount measuring function.   2. The sensor with a movement amount measuring function according to claim 1, wherein the movement amount measurement unit outputs a signal related to movement amounts in both the X direction and the Y direction.   The sensor with a movement amount measuring function according to claim 1 or 2, wherein a mouse is used as the movement amount measuring unit. A sensor with a moving amount measuring function according to any one of claims 1 to 3,
A measurement unit that receives the output of the sensor with movement amount measurement function, calculates a measurement position from the output of the movement amount measurement unit, and stores the measurement position and a measurement value calculated from the output of the sensor that measures the physical quantity When,
A measuring apparatus comprising:   The measurement apparatus according to claim 4, further comprising a display unit that displays the measurement value and the measurement position.   6. The measuring apparatus according to claim 4, wherein a mouse is used as the moving amount measuring unit, and a personal computer is used as the measuring unit.   The measurement apparatus according to claim 4, wherein the measurement unit outputs an alarm when a position of a sensor that measures the physical quantity exceeds an area to be measured. .   The measurement apparatus according to claim 4, wherein the measurement apparatus is a measurement apparatus that measures a film thickness of a film sheet.

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