JP2010164107A - Support device for installation platform - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a support device for an installation platform inhibiting vibration due to impact force generated associated with the operation of installed apparatuses or the like. <P>SOLUTION: A recessed part 28 is formed on an upper surface of a pedestal 22. An arc shape support plate 12 is slidably disposed on a bottom surface of the recessed part 28. An actuator piezoelectric element 14 deforming according to applied voltage is bonded on one side surface of a folded part. The installation platform 26 is mounted on the actuator piezoelectric element 14, and the installation platform 26 is supported by the arc shape support plate 12. Operation information is output to an operation timing output means 16 from the apparatuses 27 on the installation platform 26, and operation timing is output to a control means 18 from the operation timing output means 16. The operation means 18 outputs control signal for reducing vibration of the installation platform 26 to a piezoelectricity generation means 20. The piezoelectricity generation means 20 applies generated voltage on the actuator piezoelectric element 14. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a support device for a mounting table.

  An anti-vibration table that isolates vibration isolators (hereinafter referred to as “equipment”) from ambient vibrations, for example, an air spring to prevent floor vibrations from peripheral devices from being transmitted to the mounting table on which the devices are mounted. The mounting table is supported by using a soft support material. The soft support material absorbs floor vibration above a certain frequency, and vibration of the mounting table is suppressed.

  In addition, an active vibration isolation table is also used in which the pressure of the air filled in the air spring is variable and the vibration transmitted to the mounting table is more effectively suppressed by using the air spring as an actuator (patent) Reference 1).

  That is, as shown in FIG. 25, the active vibration isolation base 80 of Patent Document 1 starts up a support member 85 formed in a U shape from a base plate 81 installed on the floor, and is provided on the inner upper portion of the support member 85. The suspended material 83 is suspended below the first air tank 90 so as to be movable in the horizontal direction.

  A first air spring 84 is provided on the upper portion of the first air tank 90. An upper part of the first air spring 84 supports the second air tank 92, and a second air spring 86 is provided on the upper part of the second air tank 92. Further, the upper part of the second air spring 86 supports the third air tank 94. A third air spring 88 is provided above the third air tank 94. A mounting table 82 is placed on the upper part of the third air spring 88.

  As a result, even if the base plate 81 vibrates in the horizontal direction during an earthquake, the vibrations are alleviated sequentially by the air springs 84, 86, 88 stacked in three stages, and at the same time, the vibrations have a long period. This long cycle vibration is detected by a vibration sensor (not shown) attached to the mounting table 82, and a linear motor (not shown) detects a damping force in a direction to suppress vibration based on the detection result. Add to 82. Thereby, the horizontal vibration of the mounting table 82 is suppressed.

  However, since the active vibration isolation table 80 of Patent Document 1 uses soft air springs 84, 86, and 88 stacked in three stages, the active vibration isolation table 80 is generated with the operation of the devices installed on the mounting table 82. It is not possible to prevent the mounting table 82 from vibrating due to the impact force.

JP-A-1-307539

  In view of the above-described facts, an object of the present invention is to provide a support device for a mounting table that suppresses vibration due to an impact force generated with the operation of a mounted device.

  The support device for the mounting table according to the first aspect of the present invention has an arch shape, and is joined to an arch-shaped support plate that supports the mounting table on which equipment is mounted at the top, and one side surface of the arch-shaped support plate. A piezoelectric actuator for a membrane actuator that changes the curvature of the arch-shaped support plate by being deformed by an applied voltage, information output means for outputting vibration information of the mounting table, and information from the information output means. And a control means for generating a control signal for controlling the deformation amount of the actuator piezoelectric element and applying the voltage from the voltage generating means to the actuator piezoelectric element.

  According to the first aspect of the present invention, the arch-shaped support plate to which the piezoelectric element for actuator is joined supports the mounting table at the top. The information output means outputs the vibration information of the mounting table to the control means, and the control means generates a control signal for controlling the deformation amount of the actuator piezoelectric element based on the vibration information, and outputs it to the voltage generation means. The voltage generating means generates a voltage and applies it to the actuator piezoelectric element. The piezoelectric element for actuator is deformed according to the applied voltage, and changes the curvature of the arch-shaped support plate.

  That is, based on the vibration information of the mounting table, the curvature of the arch-shaped support plate is changed by the piezoelectric element for actuator, and the support rigidity for supporting the mounting table is changed. Specifically, the curvature of the arch-shaped support plate is reduced and supported at an angle close to vertical to increase the support rigidity, and the curvature is increased and supported at an angle close to horizontal to lower the support rigidity.

  Thereby, when the mounting table vibrates due to the impact force generated by the operation of the devices, it is possible to suppress the mounting table from vibrating by increasing the support rigidity. On the other hand, when the equipment is not in operation, the support rigidity can be lowered to suppress vibration transmitted from the floor to the mounting table.

  A mounting device for a mounting table according to a second aspect of the present invention includes a pair of inclined support plates that are attached to the mounting table on which equipment is mounted with an inclination angle with respect to the vertical direction and support the mounting table. A membrane-type actuator piezoelectric element that is bridged between a pair of the inclined support plates and is deformed by an applied voltage to change the inclination angle of the inclined support plates, and information output means for outputting vibration information of the mounting table And a control means for generating a control signal for controlling the amount of deformation of the actuator piezoelectric element based on information from the information output means, and for applying the voltage to the actuator piezoelectric element from the voltage generating means. It is characterized by that.

  According to the second aspect of the invention, the pair of inclined support plates support the mounting table with an inclination angle with respect to the vertical direction. The information output means outputs the vibration information of the mounting table to the control means, and the control means generates a control signal for controlling the deformation amount of the piezoelectric element for actuator based on the vibration information, and outputs it to the voltage generation means. The voltage generating means generates a voltage and applies it to the actuator piezoelectric element. The piezoelectric element for actuator is deformed according to the applied voltage, and changes the inclination angle of the inclined support plate.

  That is, based on the vibration information of the mounting table, the inclination angle of the pair of inclined support plates is changed by the piezoelectric element for actuator to change the support rigidity for supporting the mounting table. Specifically, the pair of inclined support plates are supported at an angle close to vertical to increase the support rigidity, and are supported at an angle close to horizontal to lower the support rigidity.

  Thereby, when the mounting table vibrates due to the impact force generated by the operation of the devices, it is possible to suppress the mounting table from vibrating by increasing the support rigidity. On the other hand, when the devices are not operating, the support rigidity can be lowered to suppress the vibration transmitted from the floor to the mounting table.

  According to a third aspect of the present invention, in the support device for the mounting table according to the second aspect, the pair of inclined support plates have a C shape in a side view, and an upper end portion is pin-joined with the mounting table. It is characterized by being.

According to invention of Claim 3, the upper end part of a pair of inclination support plate made into the letter C shape is pin-joined with the mounting base.
Thereby, the position of the upper end part of an inclination support plate and a mounting base is kept constant. In this state, the tilt angle of the tilt support plate can be changed by moving the lower end portions of the pair of tilt support plates symmetrically with respect to the vertical axis and changing the distance between the lower end portions of the pair of tilt support plates. .

  According to a fourth aspect of the present invention, in the mounting device support device according to any one of the first to third aspects, lower ends of the arch-shaped support plate and the inclined support plate are supported by a concave portion of the pedestal. The shape of the bottom surface of the concave portion is when the height of the mounting table is maintained constant, the locus drawn by the lower end portion of the arch-shaped support plate when the curvature is changed, or the inclination angle is changed The trajectory is drawn by the lower end of the inclined support plate.

  According to invention of Claim 4, the recessed part of a base supports the lower end part of an arch-shaped support plate or an inclination support plate. At this time, the shape of the bottom surface of the concave portion for the arch-shaped support plate is a locus drawn by the lower end portion of the arch-shaped support plate when the curvature is changed. Thereby, the curvature of an arch-shaped support plate can be changed and the support rigidity of an arch-shaped support plate can be changed, maintaining the height of a mounting base constant.

  On the other hand, the shape of the bottom surface of the concave portion for the inclined support plate is a locus drawn by the lower end portion of the inclined support plate when the inclination angle is changed when the height of the mounting table is kept constant. As a result, it is possible to change the support rigidity of the inclined support plate by changing the inclination angle of the inclined support plate while maintaining the height of the mounting table constant.

  According to a fifth aspect of the present invention, in the mounting table support device according to any one of the first to fourth aspects, the concave portion of the base is provided with a groove portion in which a ball bearing is disposed along the concave portion. In the groove portion, a leg portion provided at a lower end portion of the arched support plate or the inclined support plate is inserted.

According to invention of Claim 5, the ball bearing of the groove part provided in the recessed part of the base and the leg part provided in the lower end part of the arch-shaped support plate or the inclination support plate are slidable inside the groove part. It is said that.
Accordingly, the bottom surface of the recess and the leg portion of the arch-shaped support plate, or the bottom surface of the recess and the leg portion of the inclined support plate can slide smoothly.

  A support device for a mounting table according to the invention of claim 6 is provided in parallel with the air spring that supports the mounting table on which equipment is mounted, and the upper end portion is pin-joined with the mounting table, A support plate supporting the mounting table with a lower end pin-bonded to the pedestal of the air spring, a membrane-type actuator bonded to the plate surface of the support plate, deformed by an applied voltage, and displaced the support plate Generating a control signal for controlling the amount of deformation of the actuator piezoelectric element based on the information from the information output means, the information output means for outputting the vibration information of the mounting table, and the information output means; Control means for applying the voltage to the actuator piezoelectric element.

  According to the sixth aspect of the present invention, the air spring and the support plate to which the actuator piezoelectric element is joined are provided in parallel to support the mounting table. The information output means outputs the vibration information of the mounting table to the control means, and the control means outputs a control signal for controlling the deformation amount of the actuator piezoelectric element to the voltage generation means based on the vibration information. The voltage generating means generates a voltage and applies it to the actuator piezoelectric element. The piezoelectric element for actuator is deformed according to the applied voltage to displace the support plate.

That is, based on the vibration information of the mounting table, the support plate is displaced by the piezoelectric element for actuator to change the support rigidity of the mounting table.
Thereby, when the mounting table vibrates due to the impact force generated by the operation of the devices, it is possible to increase the support rigidity of the support plate and suppress the vibration of the mounting table. On the other hand, when the devices are not in operation, the support rigidity of the support plate is lowered to suppress vibration transmitted from the floor to the mounting table via the support plate. At this time, the mounting table is supported by air springs provided in parallel.

  According to a seventh aspect of the present invention, in the support device for the mounting table according to the sixth aspect, the actuator piezoelectric element supports the mounting table by increasing rigidity without buckling the support plate. The piezoelectric element for actuator is characterized in that the support plate is supported by buckling the support plate to reduce its rigidity.

According to the seventh aspect of the present invention, the piezoelectric element for actuator causes the support plate that is not buckled to be in a buckled state or returns the buckled support plate to a state that is not buckled.
That is, when the support plate is not buckled, the support plate supports the mounting table with high rigidity. On the other hand, in the state where the support plate is buckled, the rigidity of the support plate is lowered, and the air spring supports the mounting table.

  As a result, when the mounting table vibrates due to the impact force generated by the operation of the devices, it is possible to suppress the mounting table from vibrating by increasing the support rigidity of the support plate, as the support plate is not buckled. On the other hand, when the equipment is not in operation, the support plate is buckled, the support rigidity of the support plate is lowered, the mounting table is softly supported by the air spring, and from the floor to the mounting table via the support plate Propagated vibration can be suppressed.

  According to an eighth aspect of the present invention, in the mounting table support device according to any one of the first to seventh aspects, the information output means outputs operation timing information that causes the devices to vibrate the mounting table. It is the operation timing output means to perform.

According to the invention described in claim 8, the operation timing output means outputs the operation timing information for causing the devices to vibrate the mounting table.
Thereby, the control means generates a control signal for controlling the deformation amount of the piezoelectric element for actuator based on the operation timing information, and outputs it to the voltage generation means. The voltage generating means generates a voltage and applies it to the actuator piezoelectric element. The piezoelectric element for actuator is deformed according to the applied voltage, and changes the rigidity of the arch-shaped support plate, the inclined support plate, or the support plate.

  As a result, the rigidity of the arch-shaped support plate, the inclined support plate, or the support plate can be increased before the mounting table vibrates due to the operation of the devices. That is, since the mounting table can be controlled without vibrating, the mounted devices can be operated efficiently. Moreover, the vibration sensor which detects the vibration of a mounting base and a floor surface becomes unnecessary.

  The invention described in claim 9 is the mounting table support device according to any one of claims 1 to 7, wherein the information output means is provided in the mounting table and outputs vibration information of the mounting table. A first vibration sensor and a second vibration sensor that is provided on the pedestal and outputs vibration information of the floor surface.

According to invention of Claim 9, a 1st vibration sensor is provided in a mounting base, and outputs the vibration information of a mounting base. A second vibration sensor is provided on the pedestal, and outputs floor vibration information.
Thereby, based on the vibration information detected by the 1st vibration sensor, the rigidity of an arch-shaped support plate, an inclination support plate, or a support plate can be raised, and the vibration of a mounting base can be suppressed.

  At this time, since the vibration information transmitted from the floor surface to the mounting table is included in the vibration information of the first vibration sensor, the vibration information detected by the second vibration sensor is used to obtain the vibration information of the first vibration sensor. By subtracting the vibration component transmitted from the floor surface to the mounting table from the vibration information, it is possible to accurately grasp the vibration of the mounting table caused by the equipment.

  By using the corrected vibration information, the rigidity of the arch-shaped support plate, the inclined support plate, and the support plate can be adjusted more accurately, and the vibration of the mounting table can be effectively suppressed.

  According to a tenth aspect of the present invention, in the support device for the mounting table according to the first or fourth aspect, the information output means is a surface opposite to a joint surface to which the actuator piezoelectric element of the arch-shaped support plate is joined. Is a film-type sensor piezoelectric element that detects displacement of the arch-shaped support plate, and the sensor piezoelectric element detects a displacement amount due to vibration propagated from the mounting table. And a second sensor piezoelectric element that detects a displacement amount due to vibration propagated from a support portion that supports the arch-shaped support plate.

  According to the invention of claim 10, the sensor piezoelectric element detects the displacement of the arch-shaped support plate. At this time, the piezoelectric element for the first sensor is provided near the mounting table, and the displacement amount due to the vibration propagated from the mounting table is detected. In addition, the second sensor piezoelectric element is provided in the vicinity of the support portion that supports the arch-shaped support plate, and detects the amount of displacement due to vibration propagated from the support portion that supports the arch-shaped support plate.

  Thereby, based on the displacement amount detected with the piezoelectric element for 1st sensors, the curvature of an arch-shaped support plate can be made small, rigidity can be raised, and the vibration of a mounting base can be suppressed.

At this time, since the vibration information transmitted from the floor surface to the mounting table is included in the vibration information of the first sensor piezoelectric element, the vibration information detected by the second sensor piezoelectric element is used to By subtracting the vibration component propagated from the floor surface to the mounting table from the vibration information of the one-sensor piezoelectric element, it is possible to accurately grasp the vibration of the mounting table by the devices.
By using this corrected vibration information, the rigidity of the arch-shaped support plate can be adjusted more accurately, and the vibration of the mounting table can be effectively suppressed.

  According to an eleventh aspect of the present invention, in the mounting table support device according to any of the second to fourth aspects, the information output means is provided on a surface opposite to a joint surface of the inclined support plate to which the piezoelectric element for actuator is joined. A film-type sensor piezoelectric element that is bonded and detects a deflection amount of the inclined support plate, and the sensor piezoelectric element detects a deflection amount due to vibration propagated from the mounting table. And a fourth sensor piezoelectric element for detecting the amount of deflection caused by the vibration propagated from the support portion supporting the inclined support plate.

  According to the eleventh aspect of the invention, the sensor piezoelectric element detects the amount of deflection of the inclined support plate to which the actuator piezoelectric element is joined. At this time, the third sensor piezoelectric element is provided near the mounting table, and detects the amount of deflection due to the vibration propagated from the mounting table. On the other hand, the fourth sensor piezoelectric element is provided near the support portion that supports the inclined support plate, and detects the amount of deflection due to the vibration propagated from the support portion that supports the inclined support plate.

  Thereby, based on the deflection amount detected by the piezoelectric element for 3rd sensors, the inclination angle of an inclination support plate is brought close to perpendicular | vertical, rigidity is raised, and the vibration of a mounting base can be suppressed.

At this time, since the vibration information transmitted from the floor surface to the mounting table is also included in the vibration information of the third sensor piezoelectric element, using the vibration information detected by the fourth sensor piezoelectric element, By subtracting the vibration component propagated from the floor surface to the mounting table from the vibration information of the three-sensor piezoelectric element, it is possible to accurately grasp the vibration of the mounting table by the devices.
By using this corrected vibration information, the rigidity of the inclined support plate can be adjusted more accurately, and the vibration of the mounting table can be effectively suppressed.

  According to a twelfth aspect of the present invention, in the support device for the mounting table according to the sixth or seventh aspect, the information output means is bonded to a surface opposite to a bonding surface to which the piezoelectric element for actuator of the support plate is bonded. A piezoelectric sensor for a film type sensor that detects the amount of deflection of the support plate, the sensor piezoelectric element comprising: a fifth sensor piezoelectric element that detects the amount of deflection caused by vibration propagated from the mounting table; And a sixth sensor piezoelectric element that detects a deflection amount due to vibration propagated from a support portion that supports the support plate.

  According to the twelfth aspect of the present invention, the sensor piezoelectric element detects the amount of deflection of the support plate. At this time, the fifth sensor piezoelectric element is provided near the mounting table, and detects the amount of deflection due to the vibration propagated from the mounting table. In addition, the sixth sensor piezoelectric element is provided in the vicinity of the support portion that supports the support plate, and detects the amount of deflection due to vibration propagated from the support portion that supports the support plate.

Thereby, based on the deflection amount detected by the piezoelectric element for 5th sensors, rigidity can be raised without buckling a support plate and the vibration of a mounting base can be suppressed.
At this time, since the vibration information of the fifth sensor piezoelectric element includes vibration propagated from the floor surface to the mounting table, the vibration information detected by the sixth sensor piezoelectric element is used to By subtracting the vibration component propagated from the floor surface to the mounting table from the vibration information of the five-sensor piezoelectric element, it is possible to accurately grasp the vibration of the mounting table by the devices.
By using this corrected vibration information, the rigidity of the support plate can be adjusted more accurately, and the vibration of the mounting table can be effectively suppressed.

  A thirteenth aspect of the present invention is the mounting table support device according to any one of the first to twelfth aspects, wherein the sensor piezoelectric element and the actuator piezoelectric element are rectangular piezoelectric elements formed into a sheet shape. A piezoelectric element in which polyimide film printed electrodes are bonded to both surfaces of a ceramic fiber, wherein the arched support plate, the inclined support plate, and the support plate are leaf springs.

  As a result, the piezoelectric element used for the sensor piezoelectric element and the actuator piezoelectric element can be made thin. In addition, by using leaf springs for the arch-shaped support plate, the inclined support plate, and the support plate, the piezoelectric element is soft and resistant to impact. As a result, the sensor function and the actuator function are exhibited.

  Since the present invention has the above-described configuration, it is possible to provide a mounting table support device that suppresses vibration due to an impact force generated when the mounted devices are operated.

It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 1st Embodiment of this invention. It is a figure which shows the basic composition of the piezoelectric element for actuators concerning the 1st Embodiment of this invention. It is a figure which shows the basic composition of the arch-shaped support plate which concerns on the 1st Embodiment of this invention. It is a figure which shows the shape of the recessed part of the base 22 which concerns on the 1st Embodiment of this invention. It is a figure which shows the control flow which deform | transforms the arch-shaped support plate which concerns on the 1st Embodiment of this invention. It is a figure which shows the trial calculation conditions of the support rigidity of the arch-shaped support plate which concerns on the 1st Embodiment of this invention. It is a figure which shows the trial calculation result of the support rigidity of the arch-shaped support plate which concerns on the 1st Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 2nd Embodiment of this invention. It is a figure which shows the control flow which deform | transforms the arch-shaped support plate which concerns on the 2nd Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 3rd Embodiment of this invention. It is a figure which shows the control flow which deform | transforms the arch-shaped support plate which concerns on the 3rd Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 4th Embodiment of this invention. It is a figure which shows the basic composition of the inclination support plate which concerns on the 4th Embodiment of this invention. It is a figure which shows the shape of the recessed part of the base 22 which concerns on the 4th Embodiment of this invention. It is a figure which shows the trial calculation conditions of the support rigidity of the inclination supporting plate which concerns on the 4th Embodiment of this invention, and a trial calculation result. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 5th Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 6th Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 7th Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 8th Embodiment of this invention. It is a figure which shows a structure when a support plate is buckled in the support apparatus of the mounting base which concerns on the 8th Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 9th Embodiment of this invention. It is a figure which shows a structure when a support plate is buckled in the support apparatus of the mounting base which concerns on the 9th Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base which concerns on the 10th Embodiment of this invention. It is a figure which shows a structure when a support plate is buckled in the support apparatus of the mounting base which concerns on the 10th Embodiment of this invention. It is a figure which shows the basic composition of the support apparatus of the mounting base of a prior art example.

(First embodiment)
As shown in FIG. 1, the mounting table support device 10 according to the first embodiment is provided with a pedestal 22 on a floor surface 24, and a concave portion 28 is formed on the upper surface of the pedestal 22 so as to target the vertical axis y <b> 1. Has been.
The arch-shaped support plate 12 is disposed on the bottom surface of the recess 28, and the bottom surface of the recess 28 and the lower end portion of the arch-shaped support plate 12 are slidable.

  The arch-shaped support plate 12 is formed by bending a leaf spring into an arch shape, and on one side surface of the bent portion, a piezoelectric element for an actuator that is large enough to cover the arch portion and deforms in response to an applied voltage. 14 is joined. The actuator piezoelectric element 14 is connected to a lead wire 21 for applying a voltage.

  Here, in the piezoelectric element 14 for actuator, as shown in FIG. 2A, a polyimide film 78 having electrodes printed on both sides of a fibrous piezoelectric ceramic 76 formed into a film is bonded with an epoxy resin 77. This is the structure.

  As a result, as shown in FIG. 2B, when a voltage is applied to both sides of the piezoelectric ceramic 76 via the lead wire 21, distortion according to the voltage value applied to the piezoelectric ceramic 76 occurs, and the actuator is used. The piezoelectric element 14 is deformed in the direction of the arrow W1 or W2.

As shown in FIG. 3A, the actuator piezoelectric element 14 is joined to one side of the arch-shaped support plate 12 where it becomes a bent portion.
In this state, the arch-shaped support plate 12 can be obtained by bending with a predetermined curvature around the top position. The arch-shaped support plate 12 can change the support rigidity when the load P is received at the top of the bent portion by changing the curvature of the bent portion.

  Specifically, as shown in FIG. 3B, when the load P is supported by increasing the curvature of the arch portion, the support rigidity is a small value. On the other hand, as shown in FIG. 3C, when the curvature of the arch-shaped support plate 12 is reduced to support the load P, the support rigidity is a large value. The relationship between the curvature of the bent portion and the support rigidity will be described later in detail.

  Further, as shown in FIG. 4, the shape of the bottom surface of the concave portion 28 of the pedestal 22 is a locus drawn by the lower end portion of the arch-shaped support plate 12 when the curvature of the arch-shaped support plate 12 is changed. That is, the arch-shaped support plate 12A indicated by the solid line is an example of a shape when the curvature of the bent portion is increased and the arch-shaped support plate 12B indicated by the two-dot chain line is decreased.

Thereby, the curvature of the arch-shaped support plate 12 can be changed while the height of the mounting table 26 is kept constant, and the support rigidity of the arch-shaped support plate 12 can be changed.
As shown in FIG. 1, a mounting table 26 is mounted on the top of the actuator piezoelectric element 14, and the mounting table 26 is supported by the arch-shaped support plate 12.

  On the mounting table 26, devices 27 for performing precision processing are mounted, and the devices 27 and the operation timing output means 16 are connected by lead wires 96. As a result, the operation information of the devices 27 is output from the devices 27 to the operation timing output means 16.

  The operation timing output unit 16 is connected to the control unit 18, detects operation timing information from the operation information of the devices 27, and outputs the operation timing information to the control unit 18.

The control unit 18 is connected to the voltage generation unit 20, and outputs a control signal for reducing the vibration of the mounting table 26 to the voltage generation unit 20 based on the operation timing information from the operation timing output unit 16. The voltage generating means 20 is connected to the actuator piezoelectric element 14 by a lead wire 21 and applies the generated voltage.
By setting it as such a structure, the vibration of the mounting base 26 can be suppressed in the procedure shown in FIG.

  That is, the equipment 27 outputs operation information to the operation timing output means 16, and the operation timing output means 16 detects the operation timing information of the equipment 27 from the operation information and outputs it to the control means 18. When the operating time of the equipment 27 approaches, the control means 18 outputs a control output to the voltage generating means 20 so as to reduce the curvature of the arch-shaped support plate 12 and increase the support rigidity in accordance with the operation timing. The voltage generating means 20 generates a voltage to be applied according to the control output and outputs it to the actuator piezoelectric element 14. Thereby, the curvature of the arch-shaped support plate 12 becomes small, and the vibration of the mounting table 26 is suppressed.

  On the other hand, when the time until the next operation of the devices 27 is equal to or greater than a predetermined value, the control means 18 increases the voltage of the arch-shaped support plate 12 to reduce the support rigidity for supporting the mounting table 26. A control signal is output to the generating means 20. The voltage generating means 20 generates an applied voltage according to the control output and outputs it to the actuator piezoelectric element 14. Thereby, the curvature of the arch-shaped support plate 12 becomes large, and the vibration propagated from the floor surface 24 to the mounting table 26 is suppressed.

Next, a trial calculation result of the relationship between the curvature of the arch-shaped support plate 12 and the support rigidity will be described.
As shown in FIG. 6A, the trial calculation method determines a trial calculation model of the arch-shaped support plate 12, applies a load P to the top of the arch-shaped support plate 12 assuming the mounting table 26, and the arch-shaped support plate. The vertical rigidity generated at 12 was determined.

  Specifically, the material of the arch-shaped support plate 12 was an iron plate, and the plate thickness of the iron plate was two types of 1.0 mm and 0.5 mm. For convenience of calculation processing, the arch shape is approximated by a bent shape of a plurality of flat plates. The width of the arch-shaped support plate 12 was 150 mm, and the height (h) from the floor surface to the top of the arch portion was 80 mm, 90 mm, and 100 mm without a load P.

  In addition, the boundary condition between the lower end of the arch-shaped support plate 12 and the floor surface was a pin connection at both lower ends, and the pin 11 was free to rotate. Further, the load P was a single point concentrated load of 1000 kg.

As an example of the result, as shown in FIG. 6B, the shape of the arch-shaped support plate 12A indicated by the two-dot chain line before the load P is applied is the same as that of the arch-shaped support plate 12B indicated by the solid line deformed by the load P. Become.
As shown in FIG. 7A, the value of the vertical rigidity at this time is 2.0 × 10 ⁶ (N / m) when the thickness of the iron plate is 1.0 mm, and 2.5 × when the thickness is 0.5 mm. 10 ⁵ (N / m).

  FIG. 7B shows the results under all the estimated conditions. The horizontal axis is rise, and the vertical axis is vertical rigidity. Here, the rise is the amount of rising of the arch-shaped support plate 12 before applying the load P from the floor surface of the lowermost flat portion (height when the reference position of the floor surface is 1). That is, if the curvature of the arch-shaped support plate 12 is reduced, the rise is increased.

  From the results, it can be said that if the rise is increased (the curvature is decreased), the vertical rigidity increases. At this time, the increase in the plate thickness of 1.0 mm is significantly larger than the increase in the plate thickness of 0.5 mm, and the rise is about 8 times when the rise is 8 (mm / mm).

From the above calculation, it can be said that if the curvature of the arched support plate 12 is changed, the support rigidity can be changed.
In the above description, the pedestal 22 is installed on the floor surface 24. However, the pedestal 22 may be used in combination with a conventional vibration isolation table, for example, on a conventional vibration isolation table.

(Second Embodiment)
As shown in FIG. 8, in the mounting table support device 40 according to the second embodiment, the first vibration sensor 32 that detects the vibration of the mounting table 26 is mounted on the mounting table 26, and the floor surface 24. A second vibration sensor 33 is mounted on the pedestal 22 to detect this vibration.

  Both the first vibration sensor 32 and the second vibration sensor 33 are connected to the control means 18, and vibration information is output to the control means 18.

  The control means 18 is connected to the voltage generation means 20 and outputs a control signal to the voltage generation means 20. The voltage generating means 20 is connected to the actuator piezoelectric element 14 via the lead wire 21 and outputs the generated applied voltage to the actuator piezoelectric element 14.

  Other configurations are the same as those of the mounting table support device 10 according to the first embodiment, and a description thereof will be omitted.

  As a result, as shown in FIG. 9, the first vibration sensor 32 detects the vibration of the mounting table 26, so that the control unit 18 supports the arch-shaped support based on the vibration information detected by the first vibration sensor 32. The vibration of the mounting table 26 can be suppressed by increasing the rigidity of the plate 12. Moreover, when the vibration of the mounting table 26 is not detected, the rigidity of the arch-shaped support plate 12 can be lowered and the vibration transmitted from the floor surface to the mounting table 26 can be suppressed.

  The vibration information of the first vibration sensor 32 includes vibration (broken line 36) propagated from the floor surface 24 to the mounting table 26, and the vibration information detected by the second vibration sensor 33 includes the mounting table 26. Vibration (broken line 37) propagated from the floor to the floor surface 24 is included. For this reason, by using the vibration information detected by the second vibration sensor 33, the vibration component propagated from the floor surface 24 to the mounting table 26 is subtracted from the vibration component of the first vibration sensor 32. The vibration (linear motion disturbance) of the mounting table 26 caused by the class 27 can be accurately grasped.

  By using this corrected vibration information (linear disturbance), the rigidity of the arch-shaped support plate 12 can be adjusted more accurately, and the vibration of the mounting table 26 can be effectively suppressed.

(Third embodiment)
As shown in FIG. 10, the mounting device support device 44 according to the third embodiment has a piezoelectric element for the first sensor on the surface opposite to the joint surface to which the actuator piezoelectric element 14 of the arch-shaped support plate 12 is joined. The element 38 and the second sensor piezoelectric element 34 are joined.

  The first sensor piezoelectric element 38 and the second sensor piezoelectric element 34 are both connected to the control means 18 and output vibration information to the control means 18. The control means 18 is connected to the voltage generation means 20 and outputs a control signal to the voltage generation means 20. The voltage generating means 20 is connected to the actuator piezoelectric element 14 via the lead wire 21 and outputs the generated applied voltage to the actuator piezoelectric element 14.

  Here, the first sensor piezoelectric element 38 is joined to a bent portion near the mounting table 26, detects a displacement amount due to vibration propagated from the mounting table 26, and the second sensor piezoelectric element 34 It is provided in the vicinity of the support portion that supports the arch-shaped support plate 12 and detects the amount of displacement caused by vibration propagated from the support portion that supports the arch-shaped support plate 12.

  Other configurations are the same as those of the mounting table support device 10 according to the first embodiment, and a description thereof will be omitted.

  As a result, as shown in FIG. 11, the first sensor piezoelectric element 38 detects the displacement amount due to the vibration of the mounting table 26, so that the control means 18 detects the vibration information detected by the first sensor piezoelectric element 38. Based on the above, the rigidity of the arch-shaped support plate 12 is increased and the vibration of the mounting table 26 is suppressed.

  Further, when the vibration of the mounting table 26 is not detected, the rigidity of the arch-shaped support plate 12 is lowered to suppress the vibration of the mounting table 26 due to the vibration propagated from the floor surface.

  The vibration information of the first sensor piezoelectric element 38 includes vibration (broken line 36) propagated from the floor surface 24 to the mounting table 26, and the vibration information detected by the second sensor piezoelectric element 34 includes The vibration (broken line 37) transmitted from the mounting table 26 to the floor surface 24 is included. Therefore, using the vibration information detected by the second sensor piezoelectric element 34, the vibration component propagated from the floor surface 24 to the mounting table 26 is subtracted from the vibration components of the first sensor piezoelectric element 38. Thus, the vibration (linear motion disturbance) of the mounting table 26 caused by the devices 27 can be accurately grasped.

  By using this corrected vibration information (linear disturbance), the rigidity of the arch-shaped support plate 12 can be adjusted more accurately, and the vibration of the mounting table 26 can be effectively suppressed.

(Fourth embodiment)
As illustrated in FIG. 12, the mounting table support device 60 according to the fourth embodiment includes a pedestal 62 provided on the floor surface 24, and a concave portion 64 is formed on the upper surface of the pedestal 62 so as to target the vertical axis y <b> 2. Has been.

  A pair of inclined support plates 66 are arranged on the bottom surface of the concave portion 64 in a side view, and the bottom surface of the concave portion 64 and the lower end portion of the inclined support plate 66 are slidable.

  The inclined support plate 66 is formed in a flat plate shape with a leaf spring, is provided on the object with respect to the vertical axis y2, and supports the mounting table 26 at an inclination angle α with respect to the vertical axis y2. The upper end portions 70 of the pair of inclined support plates 66 are pin-bonded 70 to the lower surface of the mounting table 26.

A film-type actuator piezoelectric element 68 that deforms by an applied voltage and changes the tilt angle of the tilt support plate 66 is formed in an arc shape below the tilt support plate 66.
The actuator piezoelectric element 68 has the same structure as the actuator piezoelectric element 14 described in the first embodiment. A lead wire 21 for applying a voltage is connected to the actuator piezoelectric element 68.

  As shown in FIG. 13A, the inclined support plate 66 and the actuator piezoelectric element 68 are joined to one end of the actuator piezoelectric element 68 with the end portions of the pair of inclined support plates 66 being connected to the actuator piezoelectric element 68. The joining surface 69 of the outer end is joined with an adhesive.

  Thus, the structure shown in FIG. 12 can be obtained by bending at the center portion with the inclined support plate 66 side up, lowering the end portions on both sides joined by the adhesive, and disposing it in the recess 64 of the pedestal 62.

At this time, as shown in FIG. 13B, the shape of the bottom surface of the concave portion 64 of the pedestal 62 is a locus drawn by the lower end portion of the inclined support plate 66 when the inclination angle of the inclined support plate 66 is changed. ing.
Accordingly, the support rigidity of the inclined support plate 66 can be changed by changing the inclination angle of the inclined support plate 66 while maintaining the height of the mounting table 26 constant.

  That is, as shown in FIG. 14A, it is possible to support the mounting table 26 by increasing the inclination angle α of the inclined support plate 66 and lowering the support rigidity. On the other hand, as shown in FIG. 14B, the mounting table 26 can be supported by reducing the inclination angle α and increasing the support rigidity. The relationship between the inclination angle α of the inclined support plate 66 and the support rigidity will be described later.

As shown in FIG. 12, devices 27 are mounted on the mounting table 26, and the operation of the devices 27 is controlled by the information output means 16.
On the mounting table 26, devices 27 for performing precision processing are mounted, and the devices 27 and the operation timing output means 16 are connected by lead wires 96. As a result, the operation information of the devices 27 is output from the devices 27 to the operation timing output means 16.

  The operation timing output unit 16 is connected to the control unit 18, detects operation timing information from the operation information of the devices 27, and outputs the operation timing information to the control unit 18.

The control unit 18 is connected to the piezoelectric generation unit 20 and outputs a control signal for reducing the vibration of the mounting table 26 to the voltage generation unit 20 before the vibration based on the operation timing information from the operation timing output unit 16. The piezoelectric generating means 20 is connected to the actuator piezoelectric element 68 by the lead wire 21 and applies the generated voltage.
By setting it as such a structure, the vibration of the mounting base 26 can be suppressed in the following procedure.

That is, the equipment 27 outputs operation information to the operation timing output means 16, and the operation timing output means 16 detects the operation timing information of the equipment 27 from the operation information and outputs it to the control means 18. When the operation time of the equipment 27 approaches, the control means 18 outputs a control output to the voltage generation means 20 so as to decrease the inclination angle α of the inclined support plate 66 and increase the support rigidity in accordance with the operation timing. . The voltage generating means 20 generates a voltage to be applied according to the control output and outputs it to the actuator piezoelectric element 69. The actuator piezoelectric element 68 is deformed based on the applied voltage to reduce the inclination angle α of the inclined support plate 66.
Thereby, the support rigidity of the inclined support plate 66 increases, and the vibration of the mounting table 26 is suppressed.

  On the other hand, when the time until the equipment 27 operates next is a predetermined value or more, the control means 18 increases the inclination angle α of the inclined support plate 12 so as to reduce the support rigidity for supporting the mounting table 26. A control output is output to the voltage generating means 20. The voltage generation means 20 generates an applied voltage according to the control output and outputs it to the actuator piezoelectric element 68. The actuator piezoelectric element 68 is deformed based on the applied voltage to increase the inclination angle α of the inclined support plate 66.

  Thereby, the support rigidity of the inclined support plate 66 is increased, and vibration from the floor surface 24 to the mounting table 26 is suppressed.

Next, a trial calculation result of the relationship between the inclination angle of the inclined support plate 66 and the support rigidity will be described.
As shown in FIG. 15A, the trial calculation method determined a trial calculation model of the inclined support plate 66 and applied a load P to the lifted end of the inclined support plate 66 assuming the mounting table 26. In this state, the vertical rigidity generated in the inclined support plate 66 was calculated.

  Specifically, the material of the inclined support plate 66 was an iron plate, and the plate thickness of the iron plate was two types of 1.0 mm and 0.5 mm. The width of the inclined support plate 12 is 150 mm, and the inclination angle θ between the floor surface 24 and the inclined support plate 66 is three types of 30 degrees, 45 degrees, and 60 degrees without the load P. Note that the inclination angle θ in the trial calculation is represented by an angle formed by the floor 24 and the inclined support plate 66.

In addition, the boundary condition between the lower end portion of the inclined support plate 66 and the floor surface was a pin connection at the lower end portion, and the pin connection portion (not shown) was free to rotate. The load P was a one-point concentrated load of 1000 kg.
The results under all the trial conditions are shown in FIG. The horizontal axis is the inclination angle θ (degrees), and the vertical axis is the vertical rigidity (N / m).

  From the result, it is possible to grasp the tendency that the vertical rigidity increases when the inclination angle θ is increased. At this time, the rate of increase in the vertical rigidity is greater for the plate thickness of 1.0 mm than for the plate thickness of 0.5 mm.

  From the above calculation results, it can be said that the support rigidity of the inclined support plate 66 can be changed by changing the inclination angle θ.

(Fifth embodiment)
As shown in FIG. 16, in the mounting table support device 72 according to the fifth embodiment, the first vibration sensor 32 that detects the vibration of the mounting table 26 is mounted on the mounting table 26, and the floor surface 24. A second vibration sensor 33 for detecting the vibration is attached on the pedestal 62.

Both the first vibration sensor 32 and the second vibration sensor 33 are connected to the control means 18, and vibration information is output to the control means 18.
The control means 18 is connected to the voltage generation means 20 and outputs a control signal to the voltage generation means 20. The voltage generating means 20 is connected to the actuator piezoelectric element 14 via the lead wire 21 and outputs the generated applied voltage to the actuator piezoelectric element 14.

  Other configurations are the same as those of the mounting table support device 10 in the fourth embodiment, and a description thereof will be omitted.

  Thereby, since the first vibration sensor 32 detects the vibration of the mounting table 26, the control unit 18 increases the rigidity of the inclined support plate 66 based on the vibration information detected by the first vibration sensor 32. The vibration of the mounting table 26 can be suppressed. Moreover, when the vibration of the mounting table 26 is not detected, the rigidity of the inclined support plate 66 can be lowered to suppress the vibration propagated from the floor surface to the mounting table 26.

  The vibration information of the first vibration sensor 32 includes vibration propagated from the floor surface 24 to the mounting table 26, and therefore the first vibration sensor 32 uses the vibration information detected by the second vibration sensor 33. By subtracting the vibration component propagated from the floor surface 24 to the mounting table 26 from the vibration components of the vibration sensor 32, the vibration (linear disturbance) of the mounting table 26 by the devices 27 can be accurately grasped.

  By using the corrected vibration information (linear disturbance), the rigidity of the inclined support plate 66 can be adjusted more accurately, and the vibration of the mounting table 26 can be effectively suppressed.

(Sixth embodiment)
As shown in FIG. 17, the mounting device support device 74 according to the sixth embodiment has a third sensor piezoelectric element on the opposite surface of the inclined support plate 66 to which the actuator piezoelectric element 68 is bonded. 100 and the fourth sensor piezoelectric element 102 are joined.

  The third sensor piezoelectric element 100 and the fourth sensor piezoelectric element 102 are both connected to the control means 18 and output vibration information to the control means 18. The control means 18 is connected to the voltage generation means 20 and outputs a control signal to the voltage generation means 20. The voltage generating means 20 is connected to the actuator piezoelectric element 68 by the lead wire 21 and outputs the generated applied voltage to the actuator piezoelectric element 68.

  Here, the third sensor piezoelectric element 100 is joined to an upper portion near the mounting table 26 to detect a displacement amount due to vibration propagated from the mounting table 26, and the fourth sensor piezoelectric element 102 includes an inclined support plate. It is provided in the vicinity of the support portion that supports 66 and detects the amount of displacement due to vibration propagated from the support portion that supports the inclined support plate 66.

  Other configurations are the same as those of the mounting table support device 60 according to the fourth embodiment, and a description thereof will be omitted.

  As a result, the third sensor piezoelectric element 100 detects the amount of displacement due to the vibration of the mounting table 26, so that the control means 18 is based on the vibration information detected by the first sensor piezoelectric element 100. The rigidity of 66 is increased to suppress the vibration of the mounting table 26.

  Further, when vibration of the mounting table 26 is not detected, the rigidity of the inclined support plate 66 is lowered to suppress the vibration of the mounting table 26 due to the vibration propagated from the floor surface 24.

  The information on the amount of displacement due to the vibration of the third sensor piezoelectric element 100 includes the vibration propagated from the floor surface 24 to the mounting table 26, and therefore the vibration detected by the fourth sensor piezoelectric element 102. By subtracting the vibration component transmitted from the floor surface 24 to the mounting table 26 from the vibration components of the third sensor piezoelectric element 100 using the displacement amount information obtained by the Vibration (linear motion disturbance) can be accurately grasped.

  By using the corrected vibration information (linear disturbance), the rigidity of the inclined support plate 66 can be adjusted more accurately, and the vibration of the mounting table 26 can be effectively suppressed.

(Seventh embodiment)
As shown in FIG. 18A, the mounting table support device 50 according to the seventh embodiment has a groove 56 in which a ball bearing 52 is disposed along the bottom surface 28 of the recess in the recess 28 of the base 22. Is provided.

  As shown in FIG. 18B, the groove portion 56 has a rectangular shape in cross section, and the width W1 of the deep groove portion 56 is wider than the width W2 of the inlet portion 58. A plurality of ball bearings 52 are embedded in the bottom wall, the side wall, and the top wall of the groove portion 56 over the entire length.

  As shown in FIG. 18C, the lower end portion 12E of the arch-shaped support plate 12 is narrowed so that it can be inserted into the groove portion 56, and a leg portion 54 is attached to the tip of the lower end portion 12E. Moreover, the leg part 54 is made into the curved surface along the inclination of a recessed part.

  Thereby, the leg part 54 can be inserted from the upper surface of the groove part 56, and the leg part 54 and the ball bearing 52 slide smoothly. At this time, the leg portion 54 does not come off the groove portion 56 at the bottom surface 28 of the recess.

  In the above description, the mounting table support device 10 according to the first embodiment has been described as an example. However, the mounting table support devices 40 and 44 according to the second to sixth embodiments. You may apply to 60,72,74.

(Eighth embodiment)
As shown in FIG. 19, the mounting table support device 104 according to the eighth embodiment includes a pedestal 110 provided on the floor surface 24, and an air spring 106 provided on the pedestal 110.

The air spring 106 is filled with air and softly supports the mounting table 26. A mounting member 108 is provided between the lower portion of the air spring 106 and the pedestal 110. An attachment member 109 is provided between the upper portion of the air spring 28 and the mounting table 26.
Thereby, the air spring 28 softly supports the mounting table 26 between the pedestal 110 and the mounting table 26.

  A support plate 112 is arranged in the vertical direction in parallel with the air spring 28. The support plate 112 is a straight plate spring and has pin joints 114 at the upper and lower ends. By this pin joint portion 114, the upper surface of the base 110 and the lower end portion of the support plate 112, the lower surface of the mounting table 26, and the upper end portion of the support plate 112 can be rotated.

  An actuator piezoelectric element 14 that is deformed in accordance with an applied voltage is joined to one side surface of the support plate 112. The actuator piezoelectric element 14 has the same structure as that described in the first embodiment. A lead wire 21 for applying a voltage is connected to the actuator piezoelectric element 14.

  In this configuration, if a voltage is applied to the actuator piezoelectric element 14 to deform it, the support plate 112 can be buckled from a state in which it is not buckled. On the other hand, it is possible to return from the buckled state to the unbuckled state.

  Specifically, as shown in FIG. 19, it is possible to support the mounting table 26 by increasing the support rigidity by making the support plate 112 straight without buckling. On the other hand, as shown in FIG. 20, the support plate 12 can be deformed and buckled to reduce the support rigidity for supporting the mounting table 26. At this time, the air spring 106 softly supports the mounting table 26 as much as the support rigidity of the support plate 112 is lowered.

  On the mounting table 26, devices 27 for performing precision processing are mounted, and the devices 27 and the operation timing output means 16 are connected by lead wires 96. As a result, the operation information of the devices 27 is output from the devices 27 to the operation timing output means 16.

  The operation timing output unit 16 is connected to the control unit 18, detects operation timing information from the operation information of the devices 27, and outputs the operation timing information to the control unit 18.

The control unit 18 is connected to the piezoelectric generation unit 20 and outputs a control signal for reducing the vibration of the mounting table 26 to the voltage generation unit 20 before the vibration based on the operation timing information from the operation timing output unit 16. The piezoelectric generating means 20 is connected to the actuator piezoelectric element 14 by a lead wire 21 and applies the generated voltage.
By setting it as such a structure, the vibration of the mounting base 26 can be suppressed in the following procedure.

That is, the equipment 27 outputs operation information to the operation timing output means 16, and the operation timing output means 16 detects the operation timing information of the equipment 27 from the operation information and outputs it to the control means 18. When the operation time of the equipment 27 approaches, the control means 18 controls the voltage generation means 20 to make the buckled support plate 112 unbuckled in accordance with the operation timing and increase the support rigidity. Output. The voltage generating means 20 generates a voltage to be applied according to the control output and outputs it to the actuator piezoelectric element 14. The support plate 112 is not buckled by the deformation of the actuator piezoelectric element 14, and the support table 26 is supported by increasing the support rigidity.
Thereby, the vibration of the mounting table 26 can be suppressed.

On the other hand, when the time until the next operation of the devices 27 is a predetermined value or more, the control means 18 buckles the support plate 112 and reduces the support rigidity for supporting the mounting table 26 so that the voltage generation means 20 is reduced. Control output. The voltage generating means 20 generates an applied voltage according to the control output and outputs it to the actuator piezoelectric element 14. The support plate 112 is buckled by the deformation of the actuator piezoelectric element 14 to lower the support rigidity, and the air spring 106 softly supports the mounting table 26.
Thereby, the vibration propagated from the floor surface 24 to the mounting table 26 can be suppressed.

(Ninth embodiment)
As shown in FIG. 21, in the mounting table support device 120 according to the ninth embodiment, a first vibration sensor 122 that detects the vibration of the mounting table 26 is attached on the mounting table 26, and A second vibration sensor 124 for detecting the vibration of the floor surface 24 is attached on the top.

  Both the first vibration sensor 122 and the second vibration sensor 124 are connected to the control means 18, and vibration information is output to the control means 18.

The control means 18 is connected to the voltage generation means 20 and outputs a control signal to the voltage generation means 20. The voltage generating means 20 is connected to the actuator piezoelectric element 14 via the lead wire 21 and outputs the generated applied voltage to the actuator piezoelectric element 14.
Other configurations are the same as those of the mounting table support device 104 according to the eighth embodiment, and a description thereof will be omitted.

  As a result, the first vibration sensor 122 detects the vibration of the mounting table 26, so that the control means 18 increases the rigidity of the support plate 112 based on the vibration information detected by the first vibration sensor 122 to mount the mounting plate 26. The vibration of the mounting table 26 can be suppressed.

  As shown in FIG. 22, when vibration of the mounting table 26 is not detected, the rigidity of the support plate 112 is lowered and supported by the air spring 106, and vibration transmitted from the floor surface 24 to the mounting table 26 can be suppressed. .

  The vibration information of the first vibration sensor 122 includes vibration propagated from the floor surface 24 to the mounting table 26. Therefore, the first vibration sensor 122 uses the vibration information detected by the second vibration sensor 124 to perform the first operation. By subtracting the vibration component propagated from the floor surface 24 to the mounting table 26 from the vibration components of the vibration sensor 122, it is possible to accurately grasp the vibration (linear disturbance) of the mounting table 26 by the devices 27.

  By using the corrected vibration information (linear disturbance), the rigidity of the support plate 112 can be adjusted more accurately, and the vibration of the mounting table 26 can be effectively suppressed.

(Tenth embodiment)
As shown in FIG. 23, the mounting device support device 130 according to the tenth embodiment has the fifth sensor piezoelectric element 132 on the opposite surface of the support plate 112 to the joint surface where the actuator piezoelectric element 14 is joined. The sixth sensor piezoelectric element 134 is joined.

  The fifth sensor piezoelectric element 132 and the sixth sensor piezoelectric element 134 are both connected to the control means 18 and output vibration information to the control means 18. The control means 18 is connected to the voltage generation means 20 and outputs a control signal to the voltage generation means 20. The voltage generating means 20 is connected to the actuator piezoelectric element 14 via the lead wire 21 and outputs the generated applied voltage to the actuator piezoelectric element 14.

Here, the fifth sensor piezoelectric element 132 is joined to an upper portion near the mounting table 26 to detect a displacement amount due to vibration propagated from the mounting table 26, and the sixth sensor piezoelectric element 134 is supported by the support plate 112. A displacement amount due to vibration propagated from the support portion that is provided near the support portion supporting the support plate 112 and supports the support plate 112 is detected.
Other configurations are the same as those of the mounting table support device 104 according to the eighth embodiment, and a description thereof will be omitted.

  As a result, the fifth sensor piezoelectric element 132 detects the displacement amount due to the vibration of the mounting table 26, so that the control means 18 is based on the vibration information detected by the fifth sensor piezoelectric element 132. Thus, the vibration of the mounting table 26 can be suppressed.

  When the vibration of the mounting table 26 is not detected, the control means 18 reduces the rigidity of the support plate 112 and softly supports it with the air spring 106 to suppress the vibration transmitted from the floor surface 24 to the mounting table 26. .

  The information on the amount of displacement due to the vibration of the fifth sensor piezoelectric element 132 includes the vibration propagated from the floor surface 24 to the mounting table 26, and thus the vibration detected by the sixth sensor piezoelectric element 134. By subtracting the vibration component propagated from the floor surface 24 to the mounting table 26 from the vibration components of the fifth sensor piezoelectric element 132 using the displacement amount information obtained by the Vibration (linear motion disturbance) can be accurately grasped.

  By using the corrected vibration information (linear disturbance), the rigidity of the support plate 112 can be adjusted more accurately, and the vibration of the mounting table 26 can be effectively suppressed.

DESCRIPTION OF SYMBOLS 10 Support apparatus of mounting base 12 Arch-shaped support plate 14 Piezoelectric element for actuator 16 Information output means 18 Control means 20 Voltage generating means 22 Base 26 Mounting base 28 Recessed part 31 First vibration sensor 32 Second vibration sensor 34 Second sensor piezoelectric Element 38 Piezoelectric element for first sensor 52 Ball bearing 56 Groove 66 Inclined support plate 106 Air spring 112 Support plate

Claims (13)

An arch-shaped support plate that supports the mounting table that is arch-shaped and on which equipment is mounted;
A piezoelectric actuator for a membrane actuator that is bonded to one side surface of the arch-shaped support plate, is deformed by an applied voltage, and changes the curvature of the arch-shaped support plate;
Information output means for outputting vibration information of the mounting table,
Control means for generating a control signal for controlling a deformation amount of the actuator piezoelectric element based on information from the information output means, and for applying the voltage from the voltage generating means to the actuator piezoelectric element;
A support device for the mounting table. It is attached to the mounting table on which equipment is placed with an inclination angle with respect to the vertical direction,
A pair of inclined support plates for supporting the mounting table;
A membrane-type actuator piezoelectric element that is bridged between a pair of the inclined support plates, is deformed by an applied voltage, and changes the inclination angle of the inclined support plates;
Information output means for outputting vibration information of the mounting table,
Control means for generating a control signal for controlling a deformation amount of the actuator piezoelectric element based on information from the information output means, and for applying the voltage from the voltage generating means to the actuator piezoelectric element;
A support device for the mounting table.   3. The mounting table support device according to claim 2, wherein the pair of inclined support plates have a C shape in a side view and an upper end portion is pin-joined with the mounting table. The lower ends of the arch-shaped support plate and the inclined support plate are supported by the recesses of the pedestal,
The shape of the bottom surface of the concave portion is a trajectory drawn by a lower end portion of the arch-shaped support plate when the curvature is changed when the height of the mounting table is kept constant, or when the inclination angle is changed. The support device for the mounting table according to any one of claims 1 to 3, wherein the trajectory is drawn by a lower end portion of the inclined support plate.   The recessed portion of the pedestal is provided with a groove portion in which a ball bearing is disposed along the recessed portion, and the leg portion provided at the lower end portion of the arched support plate or the inclined support plate is inserted into the groove portion. The mounting device support device according to any one of claims 1 to 4. An air spring that supports a mounting table on which equipment is placed;
A support plate provided in parallel with the air spring, the upper end of which is pin-joined with the mounting table, and the lower end of which is pin-bonded with the base of the air spring to support the mounting table;
A membrane-type actuator piezoelectric element that is bonded to the plate surface of the support plate, deforms with an applied voltage, and displaces the support plate;
Information output means for outputting vibration information of the mounting table,
Control means for generating a control signal for controlling a deformation amount of the actuator piezoelectric element based on information from the information output means, and for applying the voltage from the voltage generating means to the actuator piezoelectric element;
A support device for the mounting table. The piezoelectric element for the actuator increases the rigidity without buckling the support plate, and supports the mounting table.
The mounting device support device according to claim 6, wherein the piezoelectric element for actuator supports the mounting table by buckling the supporting plate to reduce rigidity.   The mounting device support device according to any one of claims 1 to 7, wherein the information output unit is an operation timing output unit that outputs operation timing information for causing the devices to vibrate the mounting table.   2. The information output means is a first vibration sensor that is provided in the mounting table and outputs vibration information of the mounting table, and a second vibration sensor that is provided in the base and outputs vibration information of the floor surface. The support apparatus of the mounting base of any one of -7. The information output means is a membrane-type sensor piezoelectric element that is bonded to a surface opposite to a bonding surface of the arch-shaped support plate to which the actuator piezoelectric element is bonded, and detects a displacement of the arch-shaped support plate.
The sensor piezoelectric element includes a first sensor piezoelectric element that detects a displacement amount due to vibration propagated from the mounting table;
A piezoelectric element for a second sensor for detecting a displacement amount due to vibration propagated from a support portion supporting the arch-shaped support plate;
The supporting device for a mounting table according to claim 1, comprising: The information output means is a membrane-type sensor piezoelectric element that is bonded to a surface opposite to a bonding surface to which the actuator piezoelectric element of the inclined support plate is bonded, and detects a deflection amount of the inclined support plate.
The sensor piezoelectric element includes a third sensor piezoelectric element for detecting a deflection amount due to vibration propagated from the mounting table,
A piezoelectric element for a fourth sensor for detecting a deflection amount due to vibration propagated from a support portion supporting the support plate;
The mounting device according to claim 2, comprising: The information output means is a film-type sensor piezoelectric element that is bonded to a surface opposite to a bonding surface of the support plate to which the actuator piezoelectric element is bonded, and detects a deflection amount of the support plate.
The sensor piezoelectric element includes a fifth sensor piezoelectric element for detecting a deflection amount due to vibration propagated from the mounting table,
A sixth sensor piezoelectric element for detecting a deflection amount due to vibration propagated from a support portion supporting the support plate;
The mounting device according to claim 6 or 7, wherein:   The sensor piezoelectric element and the actuator piezoelectric element are piezoelectric elements in which polyimide film print electrodes are bonded to both surfaces of a rectangular piezoelectric ceramic fiber formed into a sheet shape, and the arch-shaped support plate, the inclined support plate, The support device for a mounting table according to claim 1, wherein the support plate is a leaf spring.

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