JP2010160006A - Substrate inspection apparatus equipped with lighting system for substrate inspection camera - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus equipped with a lighting system for a substrate inspection camera which accurately reads a real position coordinate of a fiducial mark. <P>SOLUTION: The substrate inspection apparatus is configured of at least a first inspection unit 12, a second inspection unit 22, and a third inspection unit 32. Each of the inspection units 12, 22, 32 includes movable bodies 13, 23, 33 moving to the X-Y axis direction and contact probes 15, 25, 35 moving forward and backward to the direction of the surface of a substrate P to be inspected. The substrate inspection camera 18 equipped with the lighting system 19 with a light source 19b is disposed on the contact probe 15 side of the first inspection unit 12, and around the axes of each of the contact probes 25, 35 of the second inspection unit 22 and the third inspection unit 22, the lighting systems 28, 38 having light sources 28b, 38b having light axes of the advancing direction obliquely downward of each of the contact probes 25, 35, are disposed. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention provides a substrate inspection camera capable of acquiring current position information necessary for position correction from its fiducial mark (base point mark) prior to performing an actual probing inspection for each substrate to be inspected. It is the technique regarding a board | substrate inspection apparatus provided with the illuminating device for.

  Usually, a base mark called a fiducial mark is printed on the substrate to be inspected. The position of the fiducial mark is detected using a substrate inspection camera prior to the actual inspection by the substrate inspection apparatus, and the position of the substrate to be inspected is determined based on the positional deviation between the reference mark coordinates set in advance. The actual probing inspection is performed after pre-processing for calculating the correction state by calculating the contraction state and the inclination at the time of fixation.

  FIG. 2 is an explanatory view showing a conventional example of a substrate inspection apparatus provided with a substrate inspection camera for such an application. The substrate inspection apparatus 1 mainly uses a central inspection area of a stationary substrate P to be inspected. A first inspection unit 2 that moves to the right, and a second inspection unit 5 that moves to the right or left of the first inspection unit 2 and mainly moves in a necessary inspection area of the substrate P to be inspected. It is configured.

  In addition, the first inspection unit 2 includes a movable body 3 that is arranged to be controlled to move in the XY axis direction, and a Z-axis direction that is a surface direction of the substrate P to be inspected with respect to the movable body 3. And a contact probe 4 attached so as to be able to move forward and backward.

  In addition, the substrate inspection camera 5 is arranged with the lens surface 5a in a positional relationship toward the advance direction of the contact probe 4, and a plurality of LEDs 6a are attached to the substrate 6b around the lens surface 5a. A lighting device 6 is provided.

  In this case, the position of the fiducial mark must be accurately read by the board inspection camera 5 in consideration of the influence of the position, angle, light color, etc. of the illumination without being affected by ambient light. .

  The second inspection unit 7 includes a movable body 8 that is arranged to be controlled to move in the XY axis direction, and a Z axis direction that is a surface direction of the substrate P to be inspected with respect to the movable body 8. The contact probe 9 is attached so as to be able to move forward and backward, and is arranged so as to be as close as possible to the first inspection unit 2 so that a narrow inspection point can be probed.

  Incidentally, since the first inspection unit 2 and the second inspection unit 7 need to have such an arrangement relationship, as shown in FIG. 2, the substrate inspection with the illumination device 6 having a large work distance is provided. There was no method other than attaching the camera 5 side to the first inspection unit 2 side.

  On the other hand, the applicant of the present application has already proposed an illumination device for a substrate inspection camera that can reduce unevenness in illuminance on a substrate to be inspected, as shown in Patent Document 1 below.

Japanese Patent Laid-Open No. 10-332792

  In the illumination device for a substrate inspection camera disclosed in Patent Document 1, a light source shadow is formed in which the spot-like strong light emitted from the LED of the conventional illumination device is slightly larger than the planar shape of the LED, Since the light source shadow is brighter than other parts, unevenness in illuminance occurs in the field of view of the substrate inspection camera, and the position detection of the fiducial mark becomes inaccurate.

  According to the illumination device for a substrate inspection camera, direct light emitted in a direction perpendicular to the substrate to be inspected is shielded, and direct light emitted in an oblique direction with respect to the substrate to be inspected can pass. By providing the light shielding means, it is possible to prevent illuminance unevenness from occurring within the visual field range of the substrate inspection camera.

  However, in the case of the board inspection apparatus 1 shown in FIG. 2, when the board to be inspected is a mounting board, the soldering part is irradiated with light from directly above, and this irradiation light is emitted from the soldering part. There is a disadvantage that the reflected image cannot be accurately captured by the substrate inspection camera 5.

  Further, in the case of the illumination device for the substrate inspection camera disclosed in Patent Document 1, the substrate inspection device shown in FIG. 2 can be irradiated evenly so as not to cause illuminance unevenness within the visual field range of the substrate inspection camera. As in the case of No. 1, it was not provided with a structure capable of effectively preventing the reflection of irradiation light at the soldering portion of the mounting board.

  In view of the above-mentioned problems of the prior art, the present invention irradiates the fiducial mark with illumination light from an obliquely upward direction in a state where it is as close as possible to a stationary substrate to be inspected. It is an object of the present invention to provide a substrate inspection apparatus including an illumination device for a substrate inspection camera that can read an accurate actual position coordinate of a fiducial mark in advance.

  The present invention has been made to achieve the above-described object, and is provided with a first inspection unit that moves mainly in a central inspection region of a stationary substrate to be inspected, and is positioned below the first inspection unit. A second inspection unit that moves mainly on the left inspection area of the substrate to be inspected, and a third inspection unit that moves below the first inspection unit and moves mainly on the right inspection area of the substrate to be inspected. Each of these inspection units includes a moving body arranged to be controlled to be controlled in the XY axis direction, and a Z axis that is a surface direction of the substrate to be inspected with respect to the moving body. A contact probe attached so as to be capable of moving back and forth in a direction, and on the contact probe side of the first inspection unit, the lens surface thereof is directed in the advancing direction of the contact probe, and the periphery of the lens surface A substrate inspection camera provided with an illumination device to which a plurality of light sources are attached is provided, and each of the contact probe of the second inspection unit and the contact probe of the third inspection unit is arranged around each axis. The most important feature is that an illuminating device including a plurality of light sources having an illuminating optical axis in a diagonally downward advance direction at an appropriate angle toward each of these contact probes is disposed.

  In this case, it is preferable that at least one of the illumination devices includes the light source that can be switched to a different emission color.

  According to the present invention, the illumination light can be applied to the fiducial mark from an obliquely upward direction while being as close as possible to the stationary substrate to be inspected. Without being affected, the actual position coordinates of the fiducial mark are read by the board inspection camera prior to the actual inspection while taking into account the influence of the position and angle of the illumination, and the position is corrected based on the data. In addition, it is possible to shift to actual probing inspection.

Explanatory drawing which shows the structural example of this invention. Explanatory drawing which shows the prior art example of a board | substrate inspection apparatus provided with the camera for board | substrate inspection.

  FIG. 1 is an explanatory view showing a configuration example of the present invention. The entire substrate inspection apparatus 11 includes a first inspection unit 12 that mainly moves in a central inspection area of a substrate P to be inspected placed on the apparatus body. The second inspection unit 22 which is located below the first inspection unit 12 and mainly moves in the left inspection region of the substrate P to be inspected, and is also located below the first inspection unit 12 and inspected. And at least a third inspection unit 32 that mainly moves in the right inspection region of the substrate P, and these components are driven and controlled by control means (not shown).

  Among these, the first inspection unit 12 includes a movable body 13 that is arranged to be controlled in the XY axis direction, and a Z-axis that is a surface direction of the substrate P to be inspected with respect to the movable body 13. And a contact probe 15 attached so as to be capable of moving forward and backward in the direction.

  In this case, the movable body 13 is movably mounted on one X-axis guide 14 configured to be movable in the Y direction of the substrate P to be inspected, and the X-Y axis direction is passed through the X-axis guide 14. Controlled movement to is possible.

  Further, the contact probe 15 is fixed to the endless belt 17 that is rotationally driven by the motor 16, so that it can be controlled to move back and forth in the Z-axis direction, for example, in the direct downward direction. In addition, the contact probe 15 is arrange | positioned through the air cylinder 20 with the motor 16 so that adjustment of a contact angle is possible.

  In addition, a substrate inspection camera 18 such as a CCD camera having a large work distance is attached to the contact probe 15 side with its lens surface 18a facing the advancing direction of the contact end 15a of the contact probe 15. Further, around the lens surface 18a, an illuminating device 19 in which a plurality of light sources 19b made of LEDs or the like are attached to the substrate 19a is disposed with its irradiation optical axis directed toward the inspection point of the substrate P to be inspected. ing.

  In this case, the plurality of light sources 19b are mixed so that, for example, white LEDs, red LEDs, and blue LEDs having different emission colors are mixed, and only the light source 19b having the same color can emit light as desired. It can be arranged.

  The second inspection unit 22 includes a moving body 23 that is arranged to be controlled in the XY axis direction, and a Z axis direction that is a surface direction of the substrate P to be inspected with respect to the moving body 23. The contact probe 25 is attached so as to be able to move forward and backward.

  In this case, the moving body 23 is movably mounted on one X-axis guide 24 configured to be movable in the Y direction of the substrate P to be inspected, and the X-Y axis direction is passed through the X-axis guide 24. Controlled movement to is possible.

  Further, the contact probe 25 is fixed to the endless belt 27 that is rotationally driven by the motor 26, and with the motor 26 via the air cylinder 30, the contact angle of the contact probe 25 can be varied and the Z-axis direction heads diagonally downward to the right. Controlled advance / retreat movement is possible.

  Moreover, around the axis of the contact probe 25, an illuminating device 28 in which a plurality of light sources 28b made of LEDs or the like are attached to the substrate 28a has its irradiation optical axis in the same direction as the advancing direction of the contact probe 25. It is arranged toward the inspection point direction of the substrate P.

  In this case, the plurality of light sources 28b are mixed so that, for example, white LEDs, red LEDs, and blue LEDs having different emission colors are mixed, and only the light source 28b of the same color can be emitted as desired. It can be arranged.

  The third inspection unit 32 includes a movable body 33 arranged to be controlled to move in the XY axis direction, and a Z axis direction that is a surface direction of the substrate P to be inspected with respect to the movable body 33. The contact probe 35 is attached so as to be able to move forward and backward.

  In this case, the movable body 33 is movably mounted on one X-axis guide 34 configured to be movable in the Y direction of the substrate P to be inspected, and the X-Y axis direction is passed through the X-axis guide 34. Controlled movement to is possible.

  The contact probe 35 is fixed to the endless belt 37 that is rotationally driven by the motor 36, and with the motor 36 via the air cylinder 40, the contact angle of the contact probe 35 is variable, and the Z-axis direction heads diagonally downward to the left. Controlled advance / retreat movement is possible.

  In addition, around the axis of the contact probe 35, an illuminating device 38 having a plurality of light sources 38b attached to the substrate 38a inspects the substrate P to be inspected in the same direction as the advancing direction of the contact probe 35. It is arranged toward the point direction.

  In this case, the plurality of light sources 38b are mixed so that, for example, white LEDs, red LEDs, and blue LEDs having different emission colors are mixed and only the light source 38b having the same color can emit light as desired. It can be arranged.

  Next, the operation and effect of the present invention will be described with reference to FIG. 1. First, a substrate P to be inspected on which electronic components and the like are mounted is placed on the apparatus body via a jig or the like not shown. The inspected substrate P includes a printed fiducial mark, and the first inspection unit 12 includes a first inspection unit 12 at a position where the fiducial mark can be copied prior to the actual probing inspection. A camera 18 is arranged.

  In this case, since the first inspection unit 12 includes the substrate inspection camera 18 having a large work distance, the second inspection unit 22 is in a state where the lens surface 18a is directed downward. Or the third inspection unit 32 is disposed above the position.

  Further, the second inspection unit 22 and the third inspection unit 32 are arranged at a position closer to the substrate to be inspected P, which is below the position of the first inspection unit 12.

  In this case, the second inspection unit 22 located on the left side in the illustrated example is arranged so that the contact end 25a is close to the fiducial mark side by causing the contact probe 25 to skew obliquely downward to the right. The

  Further, in the illustrated example, the third inspection unit 32 located on the right side is arranged so that the contact probe 35 is skewed toward the lower left and the contact end 35a is close to the fiducial mark side.

  In addition, since the contact probe 25 of the second inspection unit 22 includes the illumination device 28 and the contact probe 35 of the third inspection unit 32 includes the illumination device 38, the light sources 28b and 38b are caused to emit light. As a result, it is possible to irradiate the fiducial mark from the obliquely upward direction approaching as illumination light with no light diffusion.

  At this time, the second inspection unit 22 and the third inspection unit 32 select and switch the illumination light colors from the respective illumination devices 28 and 38 according to the mounting state of the board P to be measured and the like. By adjusting the skew angle of the probes 25 and 35, it is possible to perform illumination according to the specific situation of the substrate P to be measured.

  Therefore, the substrate inspection camera 18 included in the first inspection unit 12 includes the direct illumination from the illumination device 19 included in the first inspection unit 12, and the illumination devices 28 and 38 of the second inspection unit 22 and the third inspection unit 32. Even in the case where the flux is attached to the fiducial mark under the preferable lighting condition in which the oblique illumination of the three is integrated, the actual position coordinates of the fiducial mark are accurately determined. Since it can be read, position correction based on this can be performed and the process can proceed to actual probing inspection.

  The above is the description of the present invention based on the illustrated examples, and various modifications can be made to the specific contents without departing from the gist of the present invention. For example, although the substrate inspection apparatus 11 is shown as an example including a first inspection unit 12, a second inspection unit 22, and a third inspection unit 32, the substrate inspection apparatus 11 is covered under the same configuration as the first inspection unit 12. A fourth inspection unit that mainly moves in the central inspection area of the inspection substrate may be provided. Further, as the light sources 19b, 28b, and 38b, a small light bulb or an organic EL can be used instead of the LED. Note that an optimum image extraction can be performed by appropriately selecting the color and angle of the illumination device according to the state of the fiducial mark of the substrate to be inspected.

DESCRIPTION OF SYMBOLS 11 Board | substrate inspection apparatus 12 1st test | inspection unit 13 Moving body 14 X-axis guide 15 Contact probe 15a Contact end 16 Motor 17 Endless belt 18 Substrate inspection camera 18a Lens surface 19 Illuminating device 19a Substrate 19b Light source 20 Air cylinder 22 2nd Inspection unit 23 Moving body 24 X-axis guide 25 Contact probe 25a Contact end 26 Motor 27 Endless belt 28 Illumination device 28a Substrate 28b Light source 30 Air cylinder 32 Third inspection unit 33 Moving body 34 X-axis guide 35 Contact probe 35a Contact end 36 Motor 37 Endless belt 38 Illumination device 38a Substrate 38b Light source 40 Air cylinder

Claims (2)

A first inspection unit that moves mainly on the central inspection region of the fixed substrate to be inspected, and a second that moves below the first inspection unit and moves mainly on the left inspection region of the inspection substrate. An inspection unit and at least a third inspection unit that is positioned below the first inspection unit and moves mainly in the right inspection region of the substrate to be inspected;
Each of these inspection units has a movable body arranged so as to be able to perform controlled movement in the XY directions, and moves forward and backward in the Z-axis direction, which is the surface direction of the substrate to be inspected, with respect to the movable body. With a contact probe attached to it,
Substrate inspection provided with an illumination device on the contact probe side of the first inspection unit, the lens surface of which is directed in the advancing direction of the contact probe, and a plurality of light sources are attached around the lens surface. For the camera,
Around the respective axes of the contact probe of the second inspection unit and the contact probe of the third inspection unit, an illumination optical axis indicates a direction of advance obliquely downward at an appropriate angle toward which each of these contact probes is directed. The board | substrate inspection apparatus provided with the illuminating device for the camera for board | substrate inspection characterized by having arrange | positioned the illuminating device provided with several light source. The substrate inspection apparatus provided with the illumination apparatus for the substrate inspection camera according to claim 1, wherein at least one of the illumination apparatuses is provided with the light source so as to be capable of switching emission colors.

Images