JP2010159146A - Carrying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrying device for extremely reducing vibration, while carrying a work at a high speed with high accuracy. <P>SOLUTION: This carrying device has a first movable part 10, a first driving means 11 for linearly reciprocating the first movable part 10, a second movable part 12 and a second driving means 13 for linearly reciprocating the second movable part 12 in parallel to the moving direction of the first movable part 10. The first movable part 10 and the second movable part 12 are connected via a connecting mechanism 14, and the second movable part 12 is moved at a speed and/or acceleration of the second driving means 13. A control means 15 switches a first moving mode of moving the second movable part 12 at a high speed via the connecting mechanism 14 by driving the first movable part 10 by controlling the first driving means 11 and a second moving mode of moving the second movable part 12 at a low speed by controlling the second driving means 13. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a transport device.

  Many conveying devices are required to convey a workpiece to be conveyed to an arbitrarily determined position at high speed and with high accuracy. In order to transport the workpiece to the target position at high speed and with high accuracy in this way, the workpiece can be transported at a high speed to the vicinity of the target position, and transported to the target position at a low speed from the vicinity of the target position. Some drive sources are arranged in a so-called parent-child relationship.

  That is, the conveying device arranged in a parent-child relationship includes a high-speed drive source 1, a coarse positioning table 2 that moves at high speed by driving the drive source 1, and the coarse positioning table 2, as shown in FIG. Is provided with a low-speed drive source 3 and a high-precision table 4 that moves at a low speed by the drive of the drive source 3.

  The transport apparatus shown in FIG. 4 first drives the drive source 1 to move the coarse positioning table 2 to an arbitrarily determined position at a high speed, and then stops the table 2. Next, the driving source 3 is driven to move the high precision table 4 to the target position at a low speed.

  In addition, there is also proposed a transport device that does not constitute such a parent-child relationship, and transports at a high speed to the vicinity of the target position, and controls to transport from the vicinity of the target position to the target position at a low speed (Patent Document 1). ).

  That is, the apparatus described in Patent Document 1 moves the table at a high speed before the position where the detector is arranged, and then switches to a low speed. As a result, a specific position can be detected with high accuracy, and the time required for moving the table can be reduced.

JP 2001-87958 A

  As shown in FIG. 4, when the drive source is arranged in a parent-child relationship, the high precision table 4 and the drive source 3 that drives the high precision table 4 are driven by the drive source 1 that drives the coarse positioning table 2. Need to be moved. For this reason, it is necessary to use the drive source 1 with a high thrust, which increases the size and the cost. Further, the moving range of the high accuracy table 4 is limited to the coarse positioning table and is small.

  In the device described in Patent Document 1, it is possible to convey a work (a table in Patent Document 1) at high speed and with high accuracy by switching between high speed and low speed. However, there is only one drive source for the conveying means, and this drive source is only switched between high speed movement and low speed movement. For this reason, even if it is referred to as a high-speed movement, it cannot be moved at a high speed with a capacity higher than that of the drive source.

  Further, since there is only one drive source, the drive source needs to cope with high-speed movement and low-speed movement, and must be controllable with high accuracy, resulting in high cost.

  In view of the above-described problems, the present invention provides a transfer apparatus that can transfer a workpiece with high accuracy and high speed, has extremely small vibration, and is advantageous in terms of cost.

  The transport apparatus of the present invention includes a first movable part, a first driving unit that reciprocates the first movable part linearly, a second movable part, and a movement of the first movable part through the second movable part. A second driving means for reciprocating linearly in parallel with the direction; and the first movable part and the second movable part are connected, and the second movable part is moved by the movement of the first movable part by the first driving means. A connection mechanism that moves at the speed and / or acceleration of the second drive means, and a first drive means that controls the first drive means to drive the first movable part to move the second movable part at a high speed via the connection mechanism. Control means capable of switching control between the movement mode and the second movement mode in which the second driving means is controlled to move the second movable portion at a low speed is provided.

  According to the transport device of the present invention, the first movable part and the second movable part are connected by the connection mechanism, so that, for example, if the first movable part is moved, the second movable part is also movable. Conversely, if the second movable part is moved, the first movable part is also moved. Further, the second movable part can be moved at a speed exceeding the capability of the second driving means by the connecting mechanism. In other words, the second movable part can be moved by moving the first movable part, whereby the moving speed of the second movable part is faster than when the second movable part is moved by the second driving means. Thus, the second drive unit can be moved at an acceleration or speed exceeding the capability of the second drive means. For this reason, when positioning the second movable part at an arbitrarily determined position, first, after performing the high-speed movement of the second movable part by the movement of the first movable part, before the positioning position, The second movable part can be moved by the second driving means.

  The connection mechanism is configured by a link bar. One end side of this link bar is pivotally supported by the first movable part, the other end side is pivotally supported by the second movable part, and the link fulcrum is located on the first movable part side. In this connection mechanism, since the link fulcrum is located on the first movable part side, when the first movable part is moved and the second movable part is moved, the movable amount of the second movable part is the amount of the first movable part. It becomes larger than the movable amount. Moreover, since the movement time of the first movable part and the movement time of the second movable part are the same, the movement speed of the second movable part is faster than the movement speed of the first movable part. For this reason, this connection mechanism can be comprised with the link bar which is such a simple structure.

  Preferably, the control means is capable of switching to a third movement mode in which the first driving means and the second driving means are controlled to independently move the first movable part and the second movable part. .

  In the first movement mode, the first driving unit is controlled to drive the first movable unit to drive the second movable unit, and the second driving unit is controlled to not drive the second movable unit. . In the second movement mode, the second driving means is controlled to drive the second movable part, and the first driving means is controlled to not drive the first movable part. Further, in the third movement mode, it is performed only for a predetermined time until the first movable part and the second movable part are simultaneously stopped after switching from the first movement mode to the second movement mode.

  In the first movement mode, the second movable part is allowed to move in a state where the pivot shaft that pivotally supports the second movable part and the other end of the link bar is held, and the second movement mode to the third movement mode are allowed. In the movement mode, it is preferable to provide a support structure portion that allows the movement of the second movable portion while elastically supporting the pivot shaft.

  In the first movement mode, since the pivot shaft that pivotally supports the second movable portion and the other end of the link bar is held in a sandwiched manner by the support structure portion, the driving force of the first movable portion is supported by this link bar. Can be stably transmitted to the second movable part. Further, in the second movement mode to the third movement mode, the pivot shaft is elastically supported, or the gap is within a range that allows the amount of blurring in the interpolation control and the synchronous control. Therefore, even if the first movable unit is driven by the first drive unit while the second movable unit is driven by the second drive unit, the drive of the first movable unit is not affected. The second movable part moves. For this reason, the high-speed movement of the 2nd movable part in a 1st movement mode can be performed stably, and the movement of the 2nd movable part by a 2nd drive means can be performed with high precision.

  Each of the first driving means and the second driving means can be constituted by a linear motion device. Here, the linear motion device is a device that reciprocates a table or the like along a straight line, such as a device using a linear guideway, a device using a ball screw mechanism, a device using a linear actuator, a device using a linear motor, etc. is there. The linear guide way performs linear motion using rolling of a ball or a roller, and enables linear motion by using a circulating ball between a rail and a block (table). A ball screw is one in which a ball (steel ball) is inserted between a screw shaft and a nut attached to the outer periphery thereof, and the nut is smoothly moved by utilizing the rotation of the ball. By rotating the screw shaft with a motor and controlling the rotation speed, rotation speed, etc., the position where the nut stops and the moving speed can be freely adjusted. A linear actuator is an actuator that generates power in a linear direction in response to an electrical signal. As a type of linear actuator, a fixed electrode and an object to be driven are arranged in parallel and a voltage is applied to the fixed electrode. Examples include an electrostatic actuator that drives a driving target with an electrostatic force generated by the magnetic field, a magnetic actuator that drives a driving target with a magnetic field, and a piezoelectric actuator that uses a piezoelectric effect of a piezoelectric ceramic. A linear motor is a drive device that gives a linear motion (reciprocating motion) directly to an object by electromagnetic force. The structure is a structure in which a cylindrical rotary motor is developed linearly.

  Since the amount of movement of the second movable part by the first drive means in the first movement mode does not require high accuracy, a ball screw mechanism can be used for the linear motion device of the first drive means. Further, since the amount of movement of the second movable part by the second moving means in the second movement mode requires high accuracy, a linear motor can be used for the linear motion device of the second moving means.

  The first movable part position detecting means for detecting the position of the first movable part is provided, and the first movable part position detecting means is disposed along the reciprocating direction of the first movable part. It is preferable to have a scale and a coarse head for coarse accuracy attached to the first movable part. That is, the movement of the second movable part based on the movement of the first movable part does not have accuracy even at a high speed. For this reason, the position of the first movable part can be detected by the position detection means including the coarse accuracy linear scale and the coarse accuracy scale head.

  High-accuracy linear provided with second movable part position detecting means for detecting the position of the second movable part, the second movable part position detecting means being disposed along the reciprocating direction of the second movable part. It is preferable to have a scale and a coarse head for coarse accuracy and a high scale head attached to the second movable part. That is, the movement of the second movable part does not require a highly accurate position movement while moving by the first movable part. For this reason, in this movement, a relatively coarse position can be detected by the high-precision linear scale and the coarse-precision scale head. Further, since it is moved by the first driving means, the position may not be detected. Positioning just before the end of the high speed operation by the first driving means is performed with a high precision scale head. In addition, the movement of the second movable part by the second drive means needs to stop the second movable part at an arbitrarily determined position, and highly accurate position detection is required. For this reason, in the movement of the 2nd movable part by this 2nd drive means, a highly accurate position detection can be performed with a highly accurate linear scale and a highly accurate scale head.

  When the length from the link fulcrum to the pivot on the first movable part side is L1, and the length from the link fulcrum to the pivot on the second movable part side is L2, (L1: L2) is ( 1: n), where n can be greater than 1. As a result, the second movable part has a movement amount, a movement speed, and an acceleration n times that of the first movable part. At this time, if n = 2, the second movable part has twice the moving amount, the moving speed, and the acceleration with respect to the first movable part.

  The length from the link fulcrum to the pivot on the first movable part side is L1, the length from the link fulcrum to the pivot on the second movable part side is L2, the weight of the first movable part is W1, It is preferable that (L1 / L2) = (W2 / W1) when the weight of the second movable part is W2. Thereby, the first movable part and the second movable part can move in a balanced manner. That is, the inertial force at the time of acceleration and deceleration when the first movable part and the second movable part move is canceled, and the vibration (vibration) of the entire apparatus can be suppressed to a minute.

  In the present invention, when positioning the second movable part at an arbitrarily determined position, first, the second movable part is moved at a high speed by the movement of the first movable part, and then before the positioning position. The second movable part can be moved by the second driving means. As a result, the second movable unit is moved (operated) at an acceleration / speed higher than the capability of the second drive means (positioning drive source), and the second drive means (positioning drive source) has the capability at the time of positioning. Thus, positioning can be performed at low speed, and positioning at high speed and high accuracy is possible.

  In the case where the support structure portion is provided, the high-speed movement of the second movable portion in the first movement mode can be stably performed, and the movement of the second movable portion by the second driving means can be performed with high accuracy. Can do. For this reason, the movement of this article, that is, the movement of the article when the article to be conveyed is placed on the table by placing a table, a conveyance hand, etc. on the second movable part, is performed at high speed and with high accuracy. Can be done.

  Existing linear motion devices such as a linear guideway, a ball screw mechanism, a linear actuator, and a linear motor can be used for the first drive means and the second drive means, thereby simplifying assembly work and reducing costs. Can do. In particular, a ball screw mechanism can be used for the first driving means, and the configuration can be simplified and the cost can be further reduced. Further, a linear motor can be used as the second moving means, and the second movable portion can be moved with high accuracy, and the positioning of the second movable portion is stabilized.

  On the first movable part side, it is possible to easily detect the position of the first movable part with the coarse accuracy linear scale and the coarse accuracy scale head. On the second movable part side, the position of the second movable part can be easily detected by the high-precision linear scale and the coarse-precision scale head during high-speed movement. Alternatively, the position information during high-speed operation can be prevented from being read by control. During low-speed movement, the position of the second movable part can be detected with high accuracy by the high-accuracy linear scale and the high-accuracy scale head.

  By setting (L1: L2) to (1: n), the moving amount and moving speed of the second movable part are n times that of the first movable part, and controllability and adaptability to various devices are improved. Can be achieved. In particular, when n is 2, the amount of movement and the movement speed are doubled, and the controllability can be further improved.

  By setting (L1 / L2) = (W2 / W1), the inertial force at the time of acceleration and deceleration when the first movable part and the second movable part move is canceled out, and the entire apparatus shakes (vibrates). ) Can be suppressed to a very small level, and high accuracy and high quality of the transfer device can be achieved.

It is a simplified diagram of a conveying device showing an embodiment of the present invention. It is a principal part enlarged view of the link bar of the said conveying apparatus. It is a flowchart figure of conveyance operation using the said conveying apparatus. It is a simplified diagram of a conventional transport device.

  Embodiments of the present invention will be described below with reference to FIGS.

  FIG. 1 shows a simplified diagram of a transport apparatus according to the present invention. The transport device includes a first movable unit 10, a first driving unit 11 that linearly moves the first movable unit, a second movable unit 12, and the second movable unit. Second driving means 13 that reciprocates linearly in parallel with the moving direction, a connecting mechanism 14 that connects the first movable part 10 and the second movable part 12, and first and second driving means 11 and 13. And control means 15 for controlling.

  Each of the first driving means 11 and the second driving means 13 can be constituted by a linear motion device. Here, the linear motion device is a device that reciprocates a table or the like along a straight line, such as a device using a linear guideway, a device using a ball screw mechanism, a device using a linear actuator, a device using a linear motor, etc. is there. The linear guideway performs linear motion by using rolling of the ball, and enables linear motion by using a circulating ball between the rail and the block (table). A ball screw is one in which a ball (steel ball) is inserted between a screw shaft and a nut attached to the outer periphery thereof, and the nut is smoothly moved by utilizing the rotation of the ball. By rotating the screw shaft with a motor and controlling the rotation speed, rotation speed, etc., the position where the nut stops and the moving speed can be freely adjusted. A linear actuator is an actuator that generates power in a linear direction in response to an electrical signal. As a type of linear actuator, a fixed electrode and an object to be driven are arranged in parallel and a voltage is applied to the fixed electrode. Examples include an electrostatic actuator that drives a driving target with an electrostatic force generated by the magnetic field, a magnetic actuator that drives a driving target with a magnetic field, and a piezoelectric actuator that uses the piezoelectric effect of piezoelectric ceramic. A linear motor is a drive device that gives a linear motion (reciprocating motion) directly to an object by electromagnetic force. The structure is a structure in which a cylindrical rotary motor is developed linearly.

  The 1st movable part 10 is a rectangular flat plate shape, and the 1st drive means 11 is comprised with the linear motor among the linear motion apparatuses. That is, the guide rails 18 and 19 are disposed on the base 17 and the first driving means 11 is driven so that the first movable portion 10 reciprocates along the guide rails 18 and 19 on a straight line. ing.

  The position of the first movable part 10 is detected by the first movable part position detection means 20. The first movable portion position detecting means 20 includes a coarse accuracy linear scale 21 disposed on the base 17 along the reciprocating direction (arrow A, B direction) of the first movable portion 10, and a first movable portion. And a coarse scale head 22 attached to the unit 10. Therefore, as the first movable unit 10 moves, the coarse accuracy scale head 22 also moves together, and the position of the coarse accuracy scale head 22 can be detected by the coarse accuracy linear scale 21. Depending on the movement distance, the coarse accuracy linear scale 21 can be attached to the first movable portion 10 side, and the coarse accuracy scale head 22 can be attached to the base 17 side.

  The 2nd movable part 12 is a rectangular flat plate shape, and the 2nd drive means 13 is comprised with the linear motor among the linear motion apparatuses. That is, the guide rails 26 and 27 are disposed on the base 25 and the second driving unit 13 is driven so that the second movable portion 12 reciprocates along the guide rails 26 and 27 in a straight line. ing. In this case, a table 29 on which a transport article (not shown) is placed is disposed on the second movable portion 12. The table 29 is fixed to the second movable portion 12, but may be detachable from the second movable portion 12.

  The position of the second movable part 12 is detected by the second movable part position detection means 30. The second movable part position detecting means 30 includes a high-precision linear scale 31 disposed on the base 25 along the reciprocating direction (arrow C, D direction) of the second movable part 12, and a second movable part. A coarse precision scale head 32 and a high precision scale head 33 attached to the section 12 are provided. Therefore, along with the movement of the second movable portion 12, the coarse scale head 32 and the high precision scale head 33 are also moved together, and the positions of the coarse precision scale head 32 and the high precision scale head 33 are changed. It can be detected by the high-precision linear scale 31. That is, the coarse position of the second movable part 12 can be detected by the coarse precision scale head 32, and the highly accurate position of the second movable part 12 can be detected by the high precision scale head 33. it can.

  By the way, the position detection accuracy of the second movable portion 12 detected by the high-precision scale head 33 is an accuracy required for positioning of the second movable portion 12, and is called high accuracy in the present invention. Further, the position detection accuracy of the second movable portion 12 detected by the coarse accuracy scale head 32 and the first movable portion 10 detected by the coarse accuracy scale head 22 of the first movable portion position detection means 20. The position detection accuracy may be lower than the position detection accuracy of the second movable portion 12 detected by the high-precision scale head 33, and this accuracy is referred to as coarse accuracy in the present invention. This coarse accuracy is a roughness that can be read during high-speed movement.

  The connection mechanism 14 moves the second movable part 12 at a speed and / or acceleration exceeding the capability of the second drive means 13 by the movement of the first movable part 10 by the first drive means 11. The link bar 35 can be configured such that the side 35a is pivotally supported by the first movable portion 10 and the other end 35b side is pivotally supported by the second movable portion 12. That is, a long hole 36 is provided on one end 35 a side of the link bar 35, and a pivot shaft 37 protruding from the first movable portion 10 is fitted into the long hole 36. A long hole 38 is provided on the other end 35 b side of the link bar 35, and a pivot shaft 39 protruding from the second movable portion 12 is fitted in the long hole 38. In this case, the other end 35 b side of the link bar 35 is disposed between the first movable part 10 and the table 29 and is pivotally connected to the pivot shaft 39 protruding from the first movable part 10 and / or the table 29. The

  Moreover, as shown in FIG. 2, the support structure part 45 is provided in the both ends 35a and 35b side of the link bar 35. As shown in FIG. The support structure 45 has a gap in a state where the pivot shaft 39 is held in a sandwiched state, a state where the pivot shaft 39 is elastically supported, or a range in which the amount of shake in the interpolation control or the synchronous control can be allowed. It is possible to switch to a given state. That is, the support structure portion 45 includes a pair of sandwiching plates 46a and 46b, elastic members 47a and 47b that elastically press the sandwiching plates 46a and 46b toward each other, and the elastic members 47a and 47b. Displacement mechanism (not shown).

  In this case, by pressing the elastic members 47a and 47b in a compressing direction via a displacement mechanism (not shown), the clamping plates 46a and 46b are pressed in a direction approaching each other through the elastic members 47a and 47b. The pivot shaft 39 can be clamped by the clamping plates 46a and 46b. Further, by pulling the elastic members 47a and 47b in an extending direction via a displacement mechanism (not shown), the pivot shaft 39 can be elastically held between the holding plates 46a and 46b.

  A link bar support portion 40 is disposed between the base 17 and the base 25. The link bar support portion 40 includes a receiving plate 41 and a link fulcrum 42 protruding from the receiving plate 41, and the link bar 35 is pivotally supported by the link fulcrum 42. In this case, the link fulcrum 42 is located on the first movable part side (closer to the first movable part). Specifically, the length from the link fulcrum 42 to the pivot point (pivot shaft) 37 of the first movable part 10 is L1, and from the link pivot point 42 to the pivot point (pivot axis) 39 of the second movable part 12 (L1: L2) can be (1: n), where L2 is L2. In this case, this n can be set to a value larger than 1. In this embodiment, n is 2. When the weight of the first movable part 10 is W1 and the weight of the second movable part 12 is W2, (L1 / L2) = (W2 / W1).

  The control unit 15 includes a first control unit 51 that controls the first drive unit 11 and a second control unit 52 that controls the second drive unit 13. The control means 15 includes a first movement mode in which only the first movable part 10 is moved by the first control unit 51 and a second movement in which only the second movable part 12 is moved by the second control unit 52. There is a mode and a third movement mode in which the first movable unit 10 and the second movable unit 12 are moved independently by the first control unit 51 and the second control unit 52, respectively. The control means 15 can be constituted by a microcomputer or the like.

  Next, the operation of the transport apparatus configured as described above will be described with reference to the flowchart shown in FIG. As an initial stage, as shown in FIG. 1, the first movable part 10 is positioned on one end side (left side in the drawing) of the base 17, and the second movable part 12 is placed on the other end side (on the drawing). To the right).

  In this state, it is first determined whether the operation is high speed or low speed (step S1). If it is determined in step S1 that the operation is a high speed operation, movement in the first movement mode is performed (step S2). That is, the first control unit 51 of the control unit 15 controls and drives the first drive unit 11, thereby moving the first movable unit 10 linearly along the guide rails 18 and 19 in the direction of arrow A. Let By this movement, the second movable part 12 is coupled to the first movable part 10 via the link bar 35 constituting the coupling mechanism 14, so that the second movable part 12 extends along the rails 26 and 27 in the direction of arrow C. Move. When the second movable portion 12 is driven by driving the first movable portion 10, the support shaft 39 supports the pivot shaft 39 in a sandwiched manner. In this way, even if the pivot shaft 39 is supported in a sandwiched manner, the link bar 35 is allowed to swing and the second movable portion 12 is allowed to move.

  The movement of the second movable part 12 is such that the length from the link fulcrum 42 to the pivot point (pivot axis) 37 of the first movable part 10 is L1, and the pivot point (pivot point) of the second movable part 12 from the link fulcrum 42. (L1: L2) is set to (1: n) when the length to the support shaft 39 is L2, the movement amount and the movement speed of the second movable part 12 are set to n of the first movable part 10. It has doubled. That is, high speed movement is performed. In this embodiment, since n is set to 2, the moving amount and moving speed of the second movable portion 12 are twice that of the first movable portion 10.

  Next, it transfers to step S4 and it is judged whether the 2nd movable part 12 reached the speed displacement position. Here, the speed displacement position is a troublesome position of the stop position where the second movable portion 12 is positioned. The high-speed movement is changed to a low-speed movement, and a stop sequence (third movement mode) is entered (step S5). . The determination as to whether or not the speed displacement position has been reached can be made by detecting the position of the second movable portion 12 with the coarse-precision scale head 32 of the second movable portion position detecting means 30. That is, a speed displacement position is set in advance, and this set value is input to the control means 15 and compared with the position of the second movable portion 12 detected by the coarse accuracy scale head 32.

  If it is not the velocity displacement position, velocity, or acceleration in step S4, the movement in the first movement mode is continued. If the velocity displacement position, velocity, or acceleration has been reached in step S4, the flow proceeds to step S5.

  At this time, the pivot shaft 39 is elastically supported by the support structure portion 45. Thereafter, the process proceeds to step S6 to determine whether or not the stop position (positioning position) has been reached. That is, the position of the second movable part 12 detected by the high-precision scale head 33 is detected. If the position reaches the positioning position, the first movable part 10 and the second movable part 12 are stopped simultaneously. In this third movement mode, the first movable portion 10 is also movable, but the second support shaft 45 on the other end 35b side of the link bar 35 is elastically supported by the support structure portion 45. The movement of the movable part 12 is not affected by the movement of the first movable part 10.

  If the positioning position has not been reached in step S6, the third movement mode is continued until the positioning position is reached. As a result, the second movable portion 12 stops at an arbitrarily determined position. For this reason, this transported article can be transported to the target position by placing the transported article on the table 29 of the second movable portion 12. When the conveyance is completed, only the first driving unit 11, only the second driving unit 13, the first driving unit 11 and the second driving unit 13 are driven, and the first movable unit 10 is moved in the arrow B direction. At the same time, the second movable portion 12 is moved in the direction of arrow D to return to the initial state. When returning to this initial state, the support structure 45 may be in a state in which the pivot shaft 39 is supported in a sandwiched manner or in a state in which the pivot shaft 39 is elastically supported.

  Thus, when it is first moved in the first movement mode, it is usually stopped after the movement in the third movement mode. However, when positioning with high accuracy is not required or when positioning takes time, the positioning may be stopped without entering the third movement mode.

  If it is determined in step S1 that the operation is low speed, the process proceeds to step S3 to move in the second movement mode. Thereafter, the process proceeds to step S7, and it is determined whether or not the positioning position has been reached as in step S6. If the positioning position has not been reached, the second movement mode is continued until the positioning position is reached.

  By the way, the first drive means 11 drives (moves) the first movable part 10 and moves the second movable part 12 at a high speed. For this reason, it is not necessary to move the 1st movable part 10 with sufficient accuracy. Therefore, in the above-described embodiment, a linear motor is used as the linear motion device of the first drive unit 11, but a ball screw mechanism may be used instead of the linear motor.

  In the present invention, when the second movable part 12 is positioned at an arbitrarily determined position, first, the second movable part 12 is moved at a high speed by the movement of the first movable part 10 and then from the positioning position. The second movable unit 12 can be moved by the second driving means 13 before this. As a result, the second movable unit 12 is moved (operated) at an acceleration / speed higher than the capability of the second drive means (positioning drive source) 13, and the second drive means (positioning drive source) 13 is used during positioning. It is possible to perform positioning at low speed with the capability of the above, enabling high-speed and high-accuracy positioning.

  By providing the support structure 45, the high-speed movement of the second movable part 12 in the first movement mode can be stably performed, and the movement of the second movable part 12 by the second driving means 13 is highly accurate. Can be done. For this reason, the conveyance by this apparatus, that is, the movement of the article when the article to be conveyed is placed on the table by arranging the table on the second movable portion 12, can be performed at high speed and with high accuracy. it can.

  In the above embodiment, a linear motor is used for the first driving means 11. However, as described above, a ball screw mechanism can be used instead of this linear motor. By using the ball screw mechanism, there is an advantage that the configuration can be simplified and the cost can be reduced. Moreover, a linear motor can be used for the 2nd drive means 13, the highly accurate movement of the 2nd movable part 12 is enabled, and the positioning of the 2nd movable part 12 is stabilized.

  On the first movable unit 10 side, the position detection of the first movable unit 10 can be easily performed by the coarse accuracy linear scale 21 and the coarse accuracy scale head 22. On the second movable portion 12 side, the position of the second movable portion 12 can be easily detected by the high-precision linear scale 31 and the coarse accuracy scale head 32 during high-speed movement. At the time of low speed movement, the position of the second movable portion 12 can be detected with high accuracy by the high accuracy linear scale 31 and the high accuracy scale head 33.

  The length from the link fulcrum 42 to the pivot point (pivot shaft) 37 of the first movable part 10 is L1, and the length from the link fulcrum 42 to the pivot point (pivot axis) 39 of the second movable part 12 is L2. When (L1: L2) is set to (1: n), the moving amount and moving speed of the second movable portion 12 are n times that of the first movable portion 10, and controllability and various It is possible to improve the adaptability to other devices. In particular, when n is 2, the amount of movement and the movement speed are doubled, and the controllability can be further improved.

  By setting (L1 / L2) = (W2 / W1), the inertial force during acceleration and deceleration when the first movable unit 10 and the second movable unit 12 move is offset, and the entire apparatus shakes. (Vibration) can be suppressed to a minute level, and high accuracy and high quality of the transfer device can be achieved.

  As described above, the embodiment of the present invention has been described. However, the present invention is not limited to the above-described embodiment, and various modifications are possible. For example, the coupling mechanism 14 is not configured by the link bar 35, It is also possible to configure with other mechanisms such as a crank mechanism and a gear mechanism. When the link bar 35 is used, (L1: L2) is not limited to (1: 2), and n only needs to be larger than 1, so (1: 1.5), (1: 2.5), (1: 3) or the like may be used.

  The linear motion devices of the first drive means 11 and the second drive means 13 may be other linear motion devices such as an air slider other than those described in the above embodiment. Here, the air slider is a moving body that relatively moves in a non-contact manner by jetting compressed air between two surfaces that are close to each other with a very small gap. It is equipped with an air bearing. Since the amount of movement of the second movable portion 12 by the first drive means 11 of the first movable portion 10 does not require high accuracy, a hydraulic cylinder, an air cylinder or the like is used for the linear motion device of the first drive means 11. Can do. Further, the article conveyed by the conveying device may be any article that can be conveyed by the second movable unit 12, and may be an article such as an electronic component such as a semiconductor chip or other various mechanical elements. it can.

DESCRIPTION OF SYMBOLS 10 1st movable part 11 1st drive means 12 2nd movable part 13 2nd drive means 14 Connection mechanism 15 Control means 20 1st movable part position detection means 21 Coarse precision linear scale 22 Coarse precision scale head 30 2nd Position detecting means 31 for movable part High-precision linear scale 32 Coarse-accuracy scale head 33 High-accuracy scale head 35 Link bar 35a One end 35b The other end 45 Support structure

Claims (15)

A first movable part;
First driving means for reciprocating the first movable portion linearly;
A second movable part;
Second driving means for reciprocating the second movable part linearly in parallel with the moving direction of the first movable part;
A connection mechanism that connects the first movable part and the second movable part, and moves the second movable part at the speed and / or acceleration of the second drive means by the movement of the first movable part by the first drive means. When,
A first movement mode in which the first driving unit is controlled to drive the first movable unit to move the second movable unit at a high speed via the coupling mechanism, and the second driving unit is controlled to slow down the second movable unit. And a control unit capable of switching control with the second movement mode to be moved.   The connection mechanism is configured by a link bar whose one end is pivotally supported by the first movable portion, the other end is pivotally supported by the second movable portion, and the link fulcrum is located on the first movable portion side. The conveying apparatus according to claim 1.   The control means can control the first drive means and the second drive means to switch to a third movement mode in which the first movable part and the second movable part are independently moved. The transport apparatus according to claim 1, wherein the first movable unit and the second movable unit are stopped after the three movement modes.   In the first movement mode, the first driving unit is controlled to drive the first movable unit to drive the second movable unit, and the movement of the second movable unit by the second driving unit is stopped. The transport apparatus according to any one of claims 1 to 3.   In the second movement mode, the second driving unit is controlled to drive the second movable unit, and the movement of the first movable unit by the first driving unit is stopped. The transfer apparatus according to any one of the above.   4. The third movement mode is performed for a predetermined time until the first movable part and the second movable part are simultaneously stopped after switching from the first movement mode to the second movement mode. The conveying apparatus as described in.   In the first movement mode, the second movable part is allowed to move in a state where the pivot shaft that pivotally supports the second movable part and the other end of the link bar is held, and the second movement mode to the third movement mode are allowed. In the movement mode, the first movable part and / or the second movable part in a state in which the pivot shaft is elastically supported, or in a state in which a gap within a range in which the blurring amount in the interpolation control or the synchronous control is allowed is provided. A conveying device according to claim 1, further comprising a support structure that allows movement of the carrier.   The conveying device according to any one of claims 1 to 7, wherein each of the first driving unit and the second driving unit is configured by a linear motion device.   9. The conveying apparatus according to claim 8, wherein a ball screw mechanism or a linear motor is used for the linear motion device of the first driving means.   The conveying apparatus according to claim 8, wherein a linear motor is used for the linear motion device of the second driving means.   The first movable part position detecting means for detecting the position of the first movable part is provided, and the first movable part position detecting means is disposed along the reciprocating direction of the first movable part. It has a scale and the scale head for coarse precision attached to a 1st movable part, The conveying apparatus of any one of Claims 1-10 characterized by the above-mentioned.   High-accuracy linear provided with second movable part position detecting means for detecting the position of the second movable part, the second movable part position detecting means being disposed along the reciprocating direction of the second movable part. The transport apparatus according to claim 1, further comprising a scale and a coarse head for coarse accuracy and / or a scale head for high accuracy attached to the second movable portion.   When the length from the link fulcrum to the pivot on the first movable part side is L1, and the length from the link fulcrum to the pivot on the second movable part side is L2, (L1: L2) is ( The transport apparatus according to any one of claims 2 to 12, wherein 1: n) is set, and the value of n is larger than 1.   The transport apparatus according to claim 13, wherein the n is 2.   The length from the link fulcrum to the pivot on the first movable part side is L1, the length from the link fulcrum to the pivot on the second movable part side is L2, the weight of the first movable part is W1, The transport apparatus according to any one of claims 2 to 12, wherein (L1 / L2) = (W2 / W1) when the weight of the second movable portion is W2.

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