JP2010146927A5 - - Google Patents

Download PDF

Info

Publication number
JP2010146927A5
JP2010146927A5 JP2008324894A JP2008324894A JP2010146927A5 JP 2010146927 A5 JP2010146927 A5 JP 2010146927A5 JP 2008324894 A JP2008324894 A JP 2008324894A JP 2008324894 A JP2008324894 A JP 2008324894A JP 2010146927 A5 JP2010146927 A5 JP 2010146927A5
Authority
JP
Japan
Prior art keywords
sample
closed space
contact
adsorption
adsorption mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008324894A
Other languages
Japanese (ja)
Other versions
JP2010146927A (en
JP5178495B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2008324894A priority Critical patent/JP5178495B2/en
Priority claimed from JP2008324894A external-priority patent/JP5178495B2/en
Publication of JP2010146927A publication Critical patent/JP2010146927A/en
Publication of JP2010146927A5 publication Critical patent/JP2010146927A5/ja
Application granted granted Critical
Publication of JP5178495B2 publication Critical patent/JP5178495B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (4)

試料を吸着する吸着機構と、当該吸着機構によって吸着された試料を搬送する搬送ロボットを備えた試料搬送装置であって、前記吸着機構が設けられ、当該吸着機構による試料の吸着によって、前記試料との間に閉空間が形成される形状を有するハンドを備え、当該ハンドには、前記閉空間内で前記試料に気体を吹付けるための吹付口と、当該閉空間内の気体を吸引するための吸引口が設けられていることを特徴とする試料搬送装置。 A sample transport device comprising an adsorption mechanism for adsorbing a sample and a conveyance robot for conveying the sample adsorbed by the adsorption mechanism, wherein the adsorption mechanism is provided, and the sample is adsorbed by the adsorption mechanism by the adsorption mechanism. with handheld having a shape closed space is formed between, on the hand, a spray opening for Keru spray gas to the sample in the closed space, for sucking the gas in the closed space A sample transporting device, wherein a suction port is provided. 請求項１において、
前記ハンドには、前記試料の吸着によって、前記試料に接する接触面が設けられ、当該接触面と、前記試料の接触によって、前記吹付口と前記吸引口を内在する閉空間が形成されることを特徴とする試料搬送装置。 In claim 1,
The hand is provided with a contact surface in contact with the sample by adsorption of the sample, and a closed space containing the spray port and the suction port is formed by contact of the contact surface and the sample. Characteristic sample transport device. 請求項１において、
前記閉空間内での気体の吹付け及び吸引は、前記吸着機構による試料の吸着後に行われることを特徴とする試料搬送装置。 In claim 1,
The sample transport apparatus according to claim 1, wherein the gas is blown and sucked in the closed space after the sample is adsorbed by the adsorption mechanism. 試料カセット内に保持される試料を搬送する搬送機構と、
当該搬送機構によって搬送された試料に電子ビームを照射する電子顕微鏡鏡体を備えた走査電子顕微鏡において、
当該電子ビームが照射される試料に電圧を印加するための接触端子を備え、
前記試料に対する当該接触端子の接触個所に付着する異物を除去するための異物除去機構が、前記搬送機構に設けられると共に、当該異物除去機構は、前記試料カセットに向かって搬送される試料に付着した異物を除去するように動作することを特徴とする走査電子顕微鏡。 A transport mechanism for transporting the sample held in the sample cassette;
In a scanning electron microscope equipped with an electron microscope body that irradiates an electron beam onto a sample conveyed by the conveyance mechanism,
A contact terminal for applying a voltage to the sample irradiated with the electron beam;
A foreign matter removal mechanism for removing foreign matter adhering to the contact portion of the contact terminal with respect to the sample is provided in the transport mechanism, and the foreign matter removal mechanism is attached to the sample transported toward the sample cassette. A scanning electron microscope which operates to remove foreign substances.
JP2008324894A 2008-12-22 2008-12-22 Sample transport mechanism and scanning electron microscope equipped with sample transport mechanism Expired - Fee Related JP5178495B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008324894A JP5178495B2 (en) 2008-12-22 2008-12-22 Sample transport mechanism and scanning electron microscope equipped with sample transport mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008324894A JP5178495B2 (en) 2008-12-22 2008-12-22 Sample transport mechanism and scanning electron microscope equipped with sample transport mechanism

Publications (3)

Publication Number Publication Date
JP2010146927A JP2010146927A (en) 2010-07-01
JP2010146927A5 true JP2010146927A5 (en) 2011-05-12
JP5178495B2 JP5178495B2 (en) 2013-04-10

Family

ID=42567103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008324894A Expired - Fee Related JP5178495B2 (en) 2008-12-22 2008-12-22 Sample transport mechanism and scanning electron microscope equipped with sample transport mechanism

Country Status (1)

Country Link
JP (1) JP5178495B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10825705B2 (en) * 2015-05-15 2020-11-03 Suss Microtec Lithography Gmbh Apparatus, system, and method for handling aligned wafer pairs
JP6609448B2 (en) * 2015-09-30 2019-11-20 株式会社日立ハイテクマニファクチャ＆サービス Sample transport device
CN111710628B (en) * 2020-06-03 2023-04-28 西安交通大学 Multifunctional sample stage in ultrahigh vacuum environment and sample in-situ patterning method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58141536A (en) * 1982-02-17 1983-08-22 Sanyo Electric Co Ltd Attracting head of semiconductor wafer
JPH0650987Y2 (en) * 1985-07-02 1994-12-21 東京エレクトロン株式会社 Wafer suction holding device
JPS6371141U (en) * 1986-10-24 1988-05-13
JPH0750336A (en) * 1993-08-04 1995-02-21 Hitachi Ltd Differential suction type vacuum chuck
JP4642787B2 (en) * 2006-05-09 2011-03-02 東京エレクトロン株式会社 Substrate transfer device and vertical heat treatment device

Similar Documents

Publication Publication Date Title
JP2010509600A5 (en)
JP2005166970A5 (en)
PL1952427T3 (en) Apparatus and method for wet-chemical processing of flat, thin substrates in a continuous method
JP2010146927A5 (en)
JP2012504865A5 (en)
TWI657901B (en) Film suction mechanism
KR101794875B1 (en) Inspection apparatus for transparent plate, and inspection system including the same
TWI816945B (en) Wafer splitting device
JP6028993B2 (en) Transport device
JP2007131942A5 (en) Substrate unloading apparatus and substrate unloading method
JP2006228808A (en) Apparatus and method of transporting substrate, and semiconductor fabrication apparatus
JP2014225582A5 (en)
JP2011168020A5 (en)
JP5398495B2 (en) Can cleaning apparatus and can cleaning method
JP5178495B2 (en) Sample transport mechanism and scanning electron microscope equipped with sample transport mechanism
EP1864927A3 (en) Plate feeding apparatus and plate feeding method
JP2014083622A (en) Vacuum pad device and suction conveyance method
JP6609448B2 (en) Sample transport device
JP2004331395A5 (en)
JP2009183949A5 (en)
JP4573919B2 (en) Inner and outer surface inspection method and apparatus for lightweight container
EP2368820A3 (en) Method of removing spacers off a sheet of glass, pickup assembly for implementing the method, and sheet glass pickup and handling device equipped with such a pickup assembly
JP4965510B2 (en) Transport device
TWM491528U (en) Automatic cleaning device
TWI376002B (en)