JP2010145441A - Method for mounting member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the following problem: in a process for bringing a member-containing liquid into contact with water arranged in a hydrophilic area in a conventional method, a member may not be easily transferred into the water arranged in the hydrophilic area and probability that the member may be arranged on a substrate is reduced; and the member may agglutinate in the member-containing liquid, a plurality of members may be arranged in one hydrophilic area, adverse effects (defective electric connection, etc.) may be exerted on the device characteristics of a device to be produced, and reproducibility may be poor. <P>SOLUTION: A mixed solvent of at least one organic solvents selected from an alkane group, a cycloalkane group and aromatic hydrocarbon group and a chlorine based solvent is used as a solvent of the member-containing liquid 5, and a molecular ratio of the chlorine-based solvent in the mixed solvent is set in a range of 0.28 to 0.84 to prevent the agglutination of the member 4 in the member-containing liquid 5 and to arrange the member 4 on the substrate 1 at high probability. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a member mounting method.

  Active liquid crystal display elements and organic electroluminescence display elements are formed on a glass substrate. Pixels arranged in a matrix on the substrate are controlled by transistors arranged in the vicinity of the pixels. With current technology, a transistor of a crystalline semiconductor cannot be formed on a glass substrate. Therefore, thin film transistors made of amorphous silicon or polysilicon thin films are used for pixel control. Thin film transistors have the advantage that they can be manufactured on a large-area substrate at low cost. However, there is a problem that the mobility is smaller than that of crystalline silicon and high-speed operation is not possible. In order to solve this problem, there has conventionally been proposed a method in which a number of transistors are manufactured in advance on a silicon wafer and then cut out from the wafer and placed on a substrate.

  In Patent Document 1, first, as shown in FIG. 3A, a substrate 1 including a plurality of hydrophilic regions 11 and a water-repellent region 12 formed so as to surround the plurality of hydrophilic regions 11 is prepared. Next, as shown in FIG. 3B, the member 4 disposed on the substrate is dispersed in a solvent 33 that does not substantially dissolve in water to prepare a member-containing liquid 35. One surface of the member 4 is hydrophilic and is bonded to the substrate 1, and the surface of the member 4 other than the bonded surface is water repellent.

Next, as shown in FIG. 3C, the first squeegee 41 is used to dispose water 2 in the plurality of hydrophilic regions 11, and then the second squeegee 42 is used as shown in FIG. 3D. 4 is applied, and the member-containing liquid 35 is brought into contact with the water 21 arranged in the hydrophilic region 11. In this process, the member 4 moves into the water 21 arranged in the hydrophilic region 11, and then the member 4 is fixed on the substrate 1 by removing the water and the solvent contained in the member-containing liquid 35. .
Japanese Patent No. 4149507

  The method described in Patent Document 1 is an excellent method for disposing the member 4 on the substrate 1. However, in the process of bringing the member-containing liquid 5 produced using the solvent 3 described in Patent Document 1 into contact with the water 21 disposed in the hydrophilic region 11, the water 21 in which the member 4 is disposed in the hydrophilic region 11. There is a problem that the probability that the member 4 is arranged on the substrate 1 is low. Further, the member 4 may be aggregated in the member-containing liquid 5 produced using the solvent 3, and a plurality of members 4 are disposed in one hydrophilic region 11 on the substrate 1. There is a problem that the device characteristics to be manufactured are adversely affected (such as poor electrical connection).

  The present invention solves the above-mentioned problem, and when the member 4 is mounted on the substrate 1, the member 4 easily moves into the water 21 disposed in the hydrophilic region 11, and the member It is an object of the present invention to provide a method for mounting a member at a predetermined position with high reproducibility without the member 4 in the containing liquid 5.

A method of mounting a plurality of members on a substrate,
Here, the substrate includes a plurality of first regions and second regions,
The second region surrounds the plurality of first regions;
Each of the first regions has the same shape and size as the surface of the member mounted on the substrate,
The method
(1) preparing a first liquid;
(2) preparing a member-containing liquid containing the member and the second liquid;
Here, the first liquid does not dissolve in the second liquid, and has a wettability higher than that of the second liquid with respect to the surface of the member and the first region. ,
(3) disposing the first liquid in the first region;
(4) The second squeegee for supplying the member-containing liquid to the substrate is scanned from one end side to the other end side of the substrate so as to straddle the first region. Contacting the member-containing liquid with the first liquid disposed in the region of
(5) a step of disposing the respective members in the respective first regions by removing the first liquid and the second liquid from the substrate;
And
The second liquid is a mixed solvent of at least one organic solvent selected from alkanes, cycloalkanes, and aromatic hydrocarbons and a chlorinated solvent,
The member mounting method, wherein a molar fraction of the chlorinated solvent in the mixed solvent is in a range of 0.28 to 0.84.

  In this specification, the term “mount” is a term including “mounting”. Examples of the “member” in the present specification include electronic components.

  According to the method of the present invention, in the process of bringing the member-containing liquid into contact with water arranged in the hydrophilic region, the interfacial tension acting on the member increases, and the member moves into the water arranged in the hydrophilic region. It becomes easy to do. For this reason, the probability that a member will be arrange | positioned on the board | substrate 1 becomes high. Further, in the member-containing liquid, the member does not aggregate, and the member can be mounted at a predetermined position accurately with high reproducibility.

  Embodiments of the mounting method of the present invention will be described below in detail with reference to the drawings. In the drawings used in the following description, hatching may be omitted for easy viewing. Moreover, in the following description, the same code | symbol may be attached | subjected to the same part and the overlapping description may be abbreviate | omitted.

  FIG. 1A is a perspective view showing an example of the first region 11 and the second region 12 in the mounting method of the present invention. In the following description, water will be described as a specific example of the first liquid. First, a substrate 1 as shown in FIG. 1A is prepared. The substrate 1 is provided with a first region 11 and a second region 12. The second area 12 surrounds the first area 11. The first region 11 and the second region 12 are formed so that the wettability to water in the first region 11 is higher than that in the second region 12. Specifically, the first region 11 is hydrophilic and the second region 12 is hydrophobic.

  FIG. 1B is a cross-sectional view schematically showing a member-containing liquid in the mounting method of the present invention. FIG. 1B shows the member-containing liquid 5 placed in the container 6. The member-containing liquid 5 includes a second liquid 3 and a member 4 dispersed in the second liquid 3. The second liquid 3 is a liquid in which water is not substantially dissolved.

  The term “dispersion” in this specification refers to a state in which the member 4 is not aggregated in the second liquid 3. In order to disperse the member 4, the member-containing liquid 6 may be stirred.

  FIG. 1C is a perspective view schematically showing the configuration and operation of a mounting apparatus for carrying out the mounting method of the present invention. As shown in FIG. 1C, the mounting device of the present invention includes a first squeegee 41 for exposing water to the substrate 1 and a second squeegee 42 for exposing the member-containing liquid 5 to the substrate 1. The squeegees are arranged in a state where the distance is maintained, and the two squeegees are moved while maintaining the distance. The squeegee fixing means and moving means are not shown.

  In the mounting method of the present invention, first, the substrate 1 comes into contact with water by the movement of the first squeegee 41, and the water is arranged in the first region 11. In addition, the arrow in a figure has shown the scanning direction of the squeegee. In the present embodiment, as shown in FIG. 1C, water is arranged on the first region 11 by the first squeegee 41, but the substrate 1 is dipped in a container holding the water inside and pulled up. Thus, water may be disposed on the first region 11.

  Since the first region 11 is surrounded by the second region 12 having low wettability with respect to water, the water 21 disposed in the first region 11 is difficult to protrude from the first region 11. Accordingly, the shape of the contact surface between water and the substrate 1 is substantially the same as the shape of the first region 11.

  Next, as shown in FIG. 1D, the second squeegee 42 moves from one end side (the back side in FIG. 1D) to the other end side (the near side in FIG. 1D), so that the substrate 1 becomes a member-containing liquid. 5 exposure. Since water does not substantially dissolve in the second liquid 3, the water 21 disposed in the first region 11 remains stable in the first region 11. In this process, the member 4 moves to the inside of the water 21 arranged in the first region 11 by the interfacial tension acting on the member 4.

  Next, water and the member-containing liquid 5 (second liquid 3 in which the member 4 is dispersed) are removed from one main surface of the substrate 1. As shown in FIG. 2, the member 4 is disposed in the first region 11.

  As described above, by forming the first region 11 surrounded by the second region 12, water can be accurately arranged in the first region 11. As a result, the member 4 can be accurately arranged in the first region 11.

  Hereinafter, the second liquid 3 will be described in detail.

  The second liquid 3 in the present invention needs to be a solvent in which water is not substantially dissolved in the second liquid 3. Note that substantially not dissolving means that the solubility of water in the second liquid 3 (weight of water dissolved in 100 ml of the second liquid) is 10 g or less, more preferably 1 g or less. When water does not substantially dissolve in the second liquid 3, the water remains stably in the first region 11 even when the second liquid 3 (member-containing liquid 5) is in contact with the water, and the interface The member 4 can be moved into the water by tension.

  In the method of the present invention, the member 4 moves into the water due to the interfacial tension acting between the water and the second liquid 3. Therefore, in order to move the member 4 into the water with high probability, the second liquid 3 may be selected so that the interfacial tension between the water and the second liquid 3 is increased. Examples of the second liquid 3 having high interfacial tension with water include nonpolar or low-polar organic solvents such as alkanes, cycloalkanes, and aromatic hydrocarbons.

When a liquid having a high polarity such as water is used for the first liquid 2, the surface energy of the member 4 is preferably as high as possible, as described later, and preferably 40 mJ / m ² or more. Therefore, when the member-containing liquid 5 is prepared using only a nonpolar or low-polar organic solvent such as alkanes, cycloalkanes, and aromatic hydrocarbons, the member 4 may be aggregated, A plurality of members 4 are arranged in one hydrophilic region 11 on 1, which adversely affects device characteristics to be produced (such as poor electrical connection).

  Moreover, chlorine-based solvents, such as 1, 4- dichlorobutane, are mentioned as a solvent in which the member 4 does not aggregate and water does not melt | dissolve substantially. Chlorine solvents are slightly polar due to the chlorine atoms present in the molecular structure. Due to the slight polarity, even the member 4 with high surface energy can prevent aggregation. However, when the member-containing liquid 5 is prepared with the chlorinated solvent alone and the member 4 is disposed on the substrate 1, the detailed mechanism is unknown, but the probability that the member 4 is disposed on the substrate 1 is considerably low. There is a case.

  The present invention has been made in view of these problems, and the second liquid 3 of the present invention includes at least one organic solvent selected from alkanes, cycloalkanes, and aromatic hydrocarbons, chlorine, It is a mixed solvent with a system solvent, and the molar fraction of the chlorinated solvent in the mixed solvent is in the range of 0.28 to 0.84.

  By using the second liquid 3 as a mixed solvent of at least one organic solvent selected from alkanes, cycloalkanes, and aromatic hydrocarbons and a chlorinated solvent, the member-containing liquid 5 , The member 4 can be prevented from aggregating and the member 4 can be disposed on the substrate 1 with high probability.

  Furthermore, when the molar fraction of the chlorinated solvent in the mixed solvent is in the range of 0.28 to 0.84, the above-described effects become more prominent. By setting the molar fraction of the chlorinated solvent in the range of 0.28 to 0.84, one member 4 can be disposed in one hydrophilic region 11 on the substrate 1. Further, the probability that the member 4 is disposed in the hydrophilic region 11 is significantly higher than that in the case of out of the range of the molar fraction of the chlorinated solvent of the present invention. Further, the member 4 can be disposed with high accuracy with the one main surface facing the hydrophilic region 11. Further, the aggregate of the plurality of members 4 is not arranged on the second region 12 formed so as to surround the hydrophilic region 11.

  The molar fraction of the chlorinated solvent is more preferably 0.40 to 0.80.

  When the molar fraction of the chlorinated solvent is smaller than 0.28, the member 4 is intensively aggregated in the member-containing liquid 5. If an element is to be arranged on the substrate 1 using the member-containing liquid 5, a plurality of members 4 are arranged in one hydrophilic region 11 on the substrate 1. In addition, an aggregate of the plurality of members 4 is disposed on the second region where the members are not originally disposed.

  When the molar fraction of the chlorinated solvent is larger than 0.84, the member 4 is present in the member-containing liquid 5 in an extremely stable manner. The probability that the member 4 is disposed in the hydrophilic region 11 is reduced.

  As a combination of the first liquid 2 and the second liquid 3, for example, a liquid having a large polarity is used for the first liquid 2, and a liquid having a smaller polarity than the first liquid is used for the second liquid 3. be able to.

  A specific example of the first liquid 2 is water. Moreover, alcohols, such as methanol, ethanol, ethylene glycol, and glycerol, or the liquid mixture of water and alcohol etc. are mentioned. Water is more suitable because it has a large surface tension and can hold the member 4 firmly in the first region 11.

  Specific examples of the organic solvent selected from at least one of alkanes, cycloalkanes, and aromatic hydrocarbons include hexane, heptane, octane, nonane, decane, undecane, dodecane, tridecane, tetradecane, pentadecane, Examples include alkanes such as hexadecane, cycloalkanes such as cyclohexane, cycloheptane, and cyclooctane, and aromatic hydrocarbons such as toluene, benzene, and xylene.

  Specific examples of the chlorinated solvent include chloromethane, dichloromethane, chloroform, carbon tetrachloride, monochlorobutane, dichlorobutane, monochloropentane and dichloropentane.

  Until now, water has been described as a specific example of the first liquid 2, but the first liquid 2 and the second liquid 3 are interposed between the first liquid 2 and the second liquid 3. An appropriate selection may be made in consideration of the interfacial tension acting on the interface and the wettability of the first liquid 2 and the second liquid 3 with respect to the surface of the member 4.

  Next, the movement of the squeegee in the mounting method of the present invention will be described in detail.

  In the mounting method of the present embodiment, first, a first squeegee 41 that supplies water to the substrate 1 is scanned on the substrate 1, and water is disposed in the first region 11. Thereafter, the second squeegee 42 for supplying the member-containing liquid 5 to the substrate 1 starts from one end on the substrate 1 and crosses the first region 11 so as to straddle the first region 11 (the back side in FIG. 1D). ) To the other end side (front side in FIG. 1D). By causing the second squeegee 42 to scan in this manner, the member-containing liquid 5 comes into contact with the water 21 disposed on the first region.

  At this time, interfacial tension acts on the member 4 in the direction in which the member 4 is drawn into the water 21, and the member 4 moves into the water 21. The member 4 is disposed in the first region 11 on the substrate 1.

  Here, the squeegees 41 and 42 are moved and the substrate 1 is not moved. However, the squeegees 41 and 42 may not be moved, and the substrate 1 may be moved. Further, the squeegees 41 and 42 and the substrate 1 may be moved. Such relative movement between the squeegees 41 and 42 and the substrate 1 is all included in “the squeegee scans the substrate”.

  As shown in FIG. 1C and FIG. 1D, the first squeegee 41 and the second squeegee 42 are arranged in a state where a predetermined distance is maintained, and the two squeegees 41 and 42 are moved while maintaining the distance. It is a structure to let you. Accordingly, the first squeegee 41 moves in the same manner as the second squeegee 42.

  In the present embodiment, as shown in FIG. 1A, in the substrate 1, the first region 11 having high water wettability is surrounded by the second region 12 having low water wettability. In order to realize the first region 11 and the second region exhibiting such wettability, the first region 11 has a surface energy that is lower than the surface energy of the first region 11. The region 11 and the second region 12 may be formed.

  Since the first region 11 and the second region 12 are provided in this way, the water disposed in the first region 11 does not protrude from the first region 11, and the first region 11. It is arranged in the part.

  Moreover, in order to arrange water in the first region 11 more stably, it is preferable that the difference in water wettability between the first region 11 and the second region 12 is large.

  In the following description, high water wettability may be referred to as “lyophilic”, and low water wettability may be referred to as “liquid repellency”.

Since the wettability of water with respect to the solid surface is related not only to the surface energy of the solid but also to the surface tension of the water, the value of the surface energy of the solid exhibiting “lyophilic” and “liquid repellency” is not particularly limited. In the case of “lyophilic”, the surface energy is preferably 40 mJ / m ² or more (preferably 60 to 1000 mJ / m ² ), and in the case of “liquid repellency”, the surface energy is 5 mJ / m ^2. It is preferably less than 40 mJ / m ² (preferably in the range of 5 to 25 mJ / m ² ).

  The first region 11 surrounded by the second region 12 is a portion that becomes a second region 12 by preparing a lyophilic substrate or a substrate that has been treated to have lyophilic properties in advance. It can be produced by forming a liquid-repellent film. For example, first, a portion to be made lyophilic is covered with a protective film such as a resist. Next, after the entire substrate is covered with a liquid repellent film, the liquid repellent film formed in the first region 11 may be removed by removing the protective film. This method can be applied to a film formed using a silane coupling agent or a sol-gel method. Alternatively, a surface on which only the liquid repellent film specifically adheres may be formed in a portion to be the second region 12, and the liquid repellent film may be formed only in this portion. For example, by forming a metal pattern that reacts with thiol only in a portion where liquid repellency is desired and immersing the substrate in an organic solvent in which thiol is dissolved, only the metal region can be made liquid repellant.

  Further, the liquid repellent film may be directly formed in a predetermined region by an ink jet method, a screen printing method, a relief printing method, an intaglio printing method, a micro contact printing method, or the like.

  The lyophilic first region 11 may be formed using an inorganic material. For example, a silicon substrate has higher liquid repellency than silicon oxide. Therefore, a silicon oxide film pattern may be formed on the surface of the silicon substrate, and the silicon oxide film portion may be used as the first region 11. In this configuration, the first liquid 2 can be disposed only in the pattern portion of the silicon oxide film. The silicon oxide film may be formed, for example, by depositing a silicon oxide film by plasma CVD, or may be formed by oxidizing the surface of the silicon substrate by corona discharge treatment or plasma treatment in an oxygen-existing atmosphere. Also good.

  The shape of the first region 11 provided on the substrate 1 may be determined according to the shape of the member 4 mounted on the first region 11. For example, the shape of the first region 11 is a predetermined surface of the member 4 to be mounted (a surface facing the substrate when mounted on the substrate) such as a triangle, a quadrangle, a polygon such as a hexagon, a circle or an ellipse. It is preferable to have the same shape as this shape. The “same shape” means a congruent or similar relationship in the mathematical concept between the shape of the first region 11 and the predetermined surface of the member 4 to be mounted (the surface facing the substrate when mounted on the substrate). It means that there is.

  When the area of the predetermined surface of the member 4 to be mounted is S1, and the area of one first region is S2, the value of S2 / S1 is preferably in the range of 0.64 to 1.44. When the value of S2 / S1 is smaller than 0.64, the amount of water arranged in the first region 11 becomes too small, and the probability that the member is arranged becomes small. Moreover, when larger than 1.44, the quantity of the water arrange | positioned in the 1st area | region 11 will increase too much, and a some member will be arrange | positioned in one 1st area | region.

  As an example of a method for forming the second region 12, an organic film (hereinafter, referred to as a liquid repellent film) in which the wettability of water is lower than that of the first region 11 is formed in at least a part of the second region 12. And the like are formed on a substrate. Examples of such an organic film include a polymer film having a fluoroalkyl chain, a film formed of a silane coupling agent or a thiol molecule having a fluoroalkyl chain, and a fluoroalkyl chain formed by a sol-gel method. An organic / inorganic hybrid film containing can be used.

  Examples of the polymer film having a fluoroalkyl chain include polytetrafluoroethylene, polydifluoroethylene, and derivatives thereof. In the case of forming a liquid repellent film with a silane coupling agent, the substrate may be immersed in chloroform, alkane, alcohol, or silicone oil in which a silane coupling agent having a fluoroalkyl chain is dissolved at a concentration of several vol% for a certain period of time. . In this case, it is possible to form a monomolecular film by washing the substrate with a solvent after immersion. The substrate on which these liquid repellent films can be formed is preferably a substrate having active hydrogen on the surface, and examples thereof include silicon oxide, silicon nitride, stainless steel, copper, nickel, and a resin whose surface has been activated.

  When a lyophobic film is formed using thiol molecules, the substrate is immersed in an ethanol or propanol solution in which a thiol molecule having a fluoroalkyl chain is dissolved at a concentration of several vol% for a certain period of time, and then the substrate is washed with alcohol. Good. Thereby, a liquid repellent monomolecular film is formed. Examples of the substrate on which these monomolecular films can be formed include a substrate made of a metal such as gold, silver, and copper.

  When a lyophobic film is formed by a sol-gel method, for example, tetraethoxysilane that is a precursor of silicon oxide, alkoxysilane having a fluoroalkyl chain, an acid catalyst, and an alcohol solution in which water is dissolved are spin-coated. Or by dipping, and then heat treatment at 100 ° C. or higher. This liquid repellent film can be formed on almost any substrate.

  In the step (5), water and the second liquid 3 are removed from one main surface of the substrate. Regardless of the order in which the water and the second liquid 3 are removed, the member 4 is placed in place.

  The method for removing water and the second liquid 3 is not particularly limited, and a known drying method can be used. For example, it can be selected from known drying methods such as natural drying, drying with a vacuum desiccator, drying by blowing air or gas, drying by heating and / or reduced pressure. Moreover, you may wash | clean before drying.

  The material of the substrate 1 on which the member 4 is mounted is not particularly limited, and a substrate formed of an inorganic material, a polymer resin material, or a composite material of an inorganic material and a polymer resin material can be used. As the inorganic material, ceramics such as alumina, silicon and glass can be used. As the polymer resin material, polyimide resin, polyamide resin, epoxy resin, polycarbonate resin and the like can be used. As a composite material of an inorganic material and a polymer resin material, for example, a composite material including a fiber made of glass, ceramics, or metal and a polymer resin material can be used. It is also possible to use an SOI substrate or a compound semiconductor substrate.

  The manufacturing method of the member 4 is not specifically limited, A well-known method is applicable. For example, the manufacturing method of the member 4 described in the specification of patent document 1 is applicable.

When a highly polar liquid such as water is used for the first liquid 2, the higher the surface energy of the member 4, the better, and 40 mJ / m ² or more is preferable. When the surface energy of the member 4 is small, it is preferable to increase the surface energy by treating the surface of the member 4. When silicon is present on the surface of the member 4, the surface energy can be increased by irradiating ultraviolet rays in an ozone atmosphere. This method is also effective for electrode materials such as platinum, gold, copper, and nickel. The surface of the member 4 can also be formed by forming a thin film having lyophilicity with respect to the first liquid 2 on the surface of the member 4 (for example, a hydrophilic film when water is used for the first liquid 2). It is possible to increase energy. For example, a thin film such as silicon oxide, silicon nitride, or titanium oxide may be formed on the surface of the member 4 by a vacuum sputtering method or a thermal CVD method. It is also effective to irradiate ultraviolet rays in an ozone atmosphere after forming these thin films. It is also possible to increase the surface energy by modifying the surface of the member 4 with a silane coupling agent having an amino group, a carboxyl group or a hydroxyl group at the terminal. When surface-treating only a metal, the surface may be modified with a thiol having an amino group, a carboxyl group or a hydroxyl group at the terminal.

  When the first liquid 2 is an organic solution containing hydrocarbon chains, a thin film having hydrocarbon chains is preferably formed on the surface of the member 4. Such an organic film can be formed, for example, by treating the member 4 with a silane coupling agent having a hydrocarbon chain. As a result, the surface of the member 4 becomes non-polar, easily wetted by the organic solution containing hydrocarbon chains, and easily drawn into the first liquid 2.

  Thus, by forming the lyophilic first region 11 surrounded by the liquid repellent second region 12, the first liquid 2 can be accurately arranged in the first region 11. Can do. As a result, the member 4 can be accurately arranged in the first region 11.

(Example)
Next, the mounting method of the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.

  In Examples 1-7, silicon oxide was mounted on a substrate using the mounting method of the present invention.

<Preparation of substrate for mounting member>
First, a hydrophilic region (first region) pattern surrounded by a water-repellent region (second region) was formed on a silicon substrate by a method similar to the method described in the embodiment.

A silicon substrate having a thickness of 525 μm was subjected to plasma treatment in an oxygen-existing atmosphere to oxidize the substrate surface, thereby rendering the entire surface of the substrate hydrophilic. Subsequently, a resist pattern corresponding to a first region having a size described later was formed by using a photolithography method. Next, the substrate on which the resist pattern was formed was immersed in a perfluorooctane solution in which 1 vol% CF ₃ (CF ₂ ) ₇ C ₂ H ₄ SiCl ₃ was dissolved in a dry atmosphere for 20 minutes. Thereafter, the substrate was washed in pure perfluorooctane, and then the solvent was removed. Further, the resist film was removed with acetone, and a pattern of the hydrophilic region (first region) surrounded by the water-repellent region (second region) was formed on the silicon substrate.

  The size of the substrate on which the silicon oxide was placed was 20 mm long × 60 mm wide.

<First region for mounting a member>
As a pattern of a hydrophilic region serving as a first region for mounting a member, a rectangular region having a length of 10 μm and a width of 50 μm was arranged in a lattice pattern on the entire substrate at intervals of 100 μm and a length of 100 μm. The first region was formed so that the longitudinal direction of the first region coincided with the longitudinal direction of the substrate.
<Component-containing liquid>
The member-containing liquid containing silicon oxide used as a member to be mounted was produced by the method described in the embodiment.

  First, an aluminum thin film having a thickness of 100 nm was formed on a silicon substrate having a thickness of 525 μm by electron beam evaporation. Subsequently, a 200 nm thick silicon oxide thin film was formed by plasma CVD. A 10 μm × 50 μm rectangular resist pattern was formed on this substrate by photolithography. A part of silicon oxide was removed by dry etching using the resist pattern as a mask. The resist film was peeled off by an oxygen plasma ashing process to form a silicon oxide pattern (hereinafter referred to as a silicon oxide plate) having a length of 10 μm × width of 50 μm × height of 0.3 μm. Subsequently, the aluminum thin film was etched with a mixed solution of phosphoric acid and nitric acid at 47 ° C. (hereinafter referred to as hot phosphoric acid), and the silicon oxide plate was lifted off.

  Next, the silicon oxide plate dispersed in hot phosphoric acid was suction filtered with a filter. The filter to which the silicon oxide plate was attached was dried overnight in a dry atmosphere, and then the filter was immersed in a 1,4-dichlorobutane solution in which 1 vol% of 1-chloroethyltrichlorosilane was dissolved for 2 hours. Suction filtration was performed in a dry nitrogen atmosphere to remove unreacted 1-chloroethyltrichlorosilane, and a silicon oxide plate whose surface was chemically modified was obtained on the filter.

  This filter is immersed in a mixed solvent of a chlorinated solvent / organic solvent mixed at the molar fraction shown in Table 1, and an ultrasonic wave is applied to disperse the silicon oxide plate attached to the filter in the mixed solvent. The member-containing liquids used in Examples 1 to 7 were obtained.

<Squeegee>
The squeegee 41 for arranging the first liquid (water was used in this embodiment) on the substrate was a slit type made of SUS304. A slit (groove) having a length of 20 mm and a width of 0.5 mm was provided at the tip of the squeegee. Moreover, in order to hold | maintain water stably, absorbent cotton was put in the inside of a slit.

  As the squeegee 42 for arranging the second liquid (the above-described member-containing liquid was used in this example) on the substrate, a knife-shaped squeegee made of polyethylene was used.

<Mounting method>
The squeegee 41 and the squeegee 42 are arranged at the edge of the substrate with the edge surface of the squeegee parallel to the short direction of the substrate. In addition, the squeegee was arranged so that it could move on the substrate with a distance of about 0.2 mm between the edge surface of the squeegee and the substrate. The distance between the squeegee 41 and the squeegee 42 was 1 mm.

  Next, about 50 μL of the silicon oxide plate dispersion was placed between the squeegee 42 and the substrate with a glass pipette, and the squeegee was moved at a scanning speed of 10 mm / second. This operation was repeated 10 times.

(Comparative example)
Comparative example 1 and comparative example 2 performed the same operation as Examples 1-7 except having produced member content liquid with the solvent indicated in Table 1.

  The evaluation of each method of Examples and Comparative Examples was performed by confirming the state of arrangement of the silicon oxide plate on the substrate. Specifically, 100 arbitrary hydrophilic regions on the substrate were selected, the number Np of hydrophilic regions where the silicon oxide plates were arranged was counted, and Np was divided by 100 to calculate the arrangement ratio. The results are shown in Table 1.

  In addition, the presence or absence of aggregation of the silicon oxide plate in the member-containing liquid was observed with an inverted microscope. The results are shown in Table 1. In Table 1, “◯” indicates that there is no aggregation, and “x” indicates that there is aggregation.

  In Examples 1 to 7 using the method of the present invention, after 10 cycles, silicon oxide plates were arranged in 49 to 99 regions in 100 hydrophilic regions, respectively. In any of the examples, aggregation of the silicon oxide plate was not observed.

  On the other hand, when the method of Comparative Example 1 was used, the silicon oxide plate was disposed only in 8 regions out of 100 hydrophilic regions after the 10th cycle. Further, in Comparative Example 2, it was observed that the silicon oxide plate was intensively aggregated in the member-containing liquid. For this reason, the placement experiment using the member-containing liquid could not be carried out.

  From the above results, the mounting method of the present invention is significantly superior to the method of the comparative example as a method of arranging the members on the substrate with high probability without causing the members to aggregate in the member-containing liquid. It can be said that.

  The member mounting method of the present invention can be applied when a member including an electronic element is mounted or when a minute columnar member is mounted. This method can be applied to a method for manufacturing an electronic device or an electronic element. For example, the present invention can be applied to a method for manufacturing a circuit board and an electronic device including the circuit board, and a method for repairing the circuit board and an electronic device including the circuit board.

FIG. 1A is a perspective view illustrating an example of a first region and a second region in the mounting method of the present invention. FIG. 1B is a cross-sectional view schematically illustrating a member-containing liquid. FIG. 1C is a first liquid disposed. FIG. 1D is a perspective view schematically showing a step of arranging members. FIG. 2 is a perspective view showing the member 4 arranged on the substrate 1. The figure which shows the conventional member mounting method

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate 11 which mounts a member 1st area | region 12 2nd area | region 2 1st liquid 21 1st liquid arrange | positioned in 1st area | region 3 2nd liquid 33 of this invention 33 2nd liquid of a prior art 35 Prior Art Member Containing Liquid 351 Prior Art Member Containing Liquid 4 Member 41 First Squeegee 42 Second Squeegee 5 Member Containing Liquid 51 Arranged in the First Region Component-containing liquid 6 Container

Claims (10)

A method of mounting a plurality of members on a substrate,
Here, the substrate includes a plurality of first regions and second regions,
The second region surrounds the plurality of first regions;
Each of the first regions has the same shape and size as the surface of the member mounted on the substrate,
The method
(1) preparing a first liquid;
(2) preparing a member-containing liquid containing the member and the second liquid;
Here, the first liquid does not dissolve in the second liquid, and has a wettability higher than that of the second liquid with respect to the surface of the member and the first region. ,
(3) disposing the first liquid in the first region;
(4) The second squeegee for supplying the member-containing liquid to the substrate is scanned from one end side to the other end side of the substrate so as to straddle the first region. Contacting the member-containing liquid with the first liquid disposed in the region of
(5) a step of disposing the respective members in the respective first regions by removing the first liquid and the second liquid from the substrate;
And
The second liquid is a mixed solvent of at least one organic solvent selected from alkanes, cycloalkanes, and aromatic hydrocarbons and a chlorinated solvent,
The member mounting method, wherein a molar fraction of the chlorinated solvent in the mixed solvent is in a range of 0.28 to 0.84.   The member mounting method according to claim 1, wherein the first liquid is a liquid containing water.   The member mounting method according to claim 2, wherein the first liquid is water.   The member mounting method according to claim 1, wherein the chlorinated solvent is 1,4-dichlorobutane.   The member mounting method according to claim 1, wherein wettability of the first liquid with respect to the first region is higher than wettability of the first liquid with respect to the second region.   Before the step (3), the surface of the member is wetted so that the wettability of the first liquid with respect to the surface of the member is higher than the wettability of the second liquid with respect to the surface of the member. The member mounting method according to claim 1, further comprising a step of performing a treatment.   The member mounting method according to claim 1, wherein a polarity of the second liquid is smaller than a polarity of the first liquid. The first region has a shape corresponding to a shape of a predetermined surface of the member;
2. The member mounting method according to claim 1, wherein, in the step (5), the member is disposed on the one principal surface such that the predetermined surface faces one principal surface of the substrate. The member has a rectangular parallelepiped shape including two surfaces (P1), two surfaces (P2) having an area equal to or larger than the surface (P1), and two surfaces (P3) having an area equal to or larger than the surface (P2). Yes,
The shape of the surface (P3) and the shape of the first region are substantially equal,
The said process WHEREIN: The said member is arrange | positioned on the said 1 main surface so that one surface of the said 2 surfaces (P3) may oppose the said 1 main surface. How to mount a member.   The member mounting method according to claim 8, wherein a length of a short side of the surface (P3) of the member is 10 μm or more, and a length of the long side is 1000 μm or less.

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