JP2010142739A - Spray nozzle and gas cleaning apparatus using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spray nozzle having a structure for spraying a cleaning liquid on the whole space of 360° and a gas cleaning apparatus for efficiently removing dust or the like with a simple structure using the spray nozzle. <P>SOLUTION: The spray nozzle comprises an introducing block 2 connected to a supply side of a fluid, an intermediate block 3 connected to the introducing block and a terminal block 4 forming a final stage, wherein spray mechanisms for spraying the fluid in a skirt state on the whole space of 360° are formed on respective abutting parts of the blocks. The spray nozzle carrying out multistage spray is formed by connecting the plurality of intermediate blocks 3. Impurities are surely removed from the gas by providing the spray nozzle in the flow-in side of a gas containing impurities and bringing the gas into contact with the fluid sprayed from the spray mechanism of the spray nozzle. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a spray nozzle having a configuration in which the number of stages can be changed and capable of spraying a liquid in a 360-degree skirt shape, and a gas purification apparatus using the spray nozzle.

  Patent Document 1 introduces purification water into a purification chamber in a pressurized state, sprays this water into the chamber from a nozzle, and introduces contaminated air into the chamber in a pressurized or reduced pressure suction state. By contacting the sprayed water droplet particles, the contaminant is absorbed to the droplet particle side, and the cleaned air is blown out from the chamber, and the water droplet particles that have absorbed the contaminant are collected and discharged from the chamber as contaminated water. Disclosed is a contaminated air purification method and apparatus. In Patent Document 1, it is disclosed that tap water is diffused and sprayed downward in a circular arc shape or a reverse arc shape by a nozzle and diffused and dropped as fine water droplet particles as a whole.

  Patent Document 2 discloses a fibrous filter formed of activated carbon fiber (ACF) that collects dust or mist such as sulfur oxide in exhaust gas, and sulfuric acid generation from above the fibrous filter to the fibrous filter. The apparatus main body comprises a spray nozzle for supplying water, and has a bubble mixing part for mixing microbubbles into the water, so that fine particles such as soot dust such as sulfur oxide or water in the exhaust gas are removed. A gas purification device that can be efficiently removed is disclosed. Moreover, patent document 2 discloses that a water supply part is a spray nozzle, a rectilinear advance nozzle, or a rotary nozzle.

Patent Document 3 includes a septic tank made of activated carbon fiber that collects SO ₃ mist in exhaust gas and removes SO ₂ , and a watering nozzle that supplies water for sulfuric acid generation to the septic tank from above the septic tank. In the gas purification apparatus, the purification tank comprises three stages of the first purification tank, the second purification tank, and the third purification tank in the longitudinal direction in the main body of the gas purification apparatus, The septic tanks to the third septic tanks are provided above each of the septic tanks, and the gas introduction side lower end surfaces of the first septic tank to the third septic tank are all inclined in the same direction. In this patent document 3, the watering nozzle sprays mist-like water (water mist), and discloses that the limit particle diameter of the water mist is set corresponding to the flow velocity of the gas to be purified.
Japanese Patent Laid-Open No. 06-238120 JP 2007-222824 A JP 2008-62205 A

At present, the gases used in the plasma processing apparatus are methane (CH ₄ ), carbon tetrafluoride (CF ₄ ), C ₂ F ₆ gas, C ₃ F ₈ gas, CHF ₃ gas, C ₄ F ₈ gas, C ₅ F ₈ gas, CH ₃ F gas, _CH 2 _{F 2} gas and _C 4 _{F 6} gas, COF _2, ozone _(O 3), an argon (Ar) or the like, the gas discharged after the plasma treatment such as etching Contains dust after plasma processing and the like, and therefore needs to be purified by a gas purification device in order to be discarded or reused.

  In the apparatus of Patent Document 1, the spray water diffused and sprayed from the nozzle is diffused and dropped as fine water droplet particles, and the object is to remove pollutants such as harmful gas components and soot and other dust from the contaminated air in the process. However, since the spray water discharged from the nozzle is one-stage and the spray water is fine water droplet particles, the contact area between the spray water and the contaminated air, the contact time is not sufficient, and sufficient purification cannot be performed. Have

Further, in the apparatuses of Patent Document 2 and Patent Document 3, harmful substances such as fine particles (dust, SO ₃ mist) can be stably removed from the contaminated air, but the apparatus is large and the cost increases. There is a bug.

  Further, in order to ensure that the contaminated gas is brought into contact with the purifying liquid (for example, water), it is necessary to diffuse the purifying liquid without a gap of 360 ° and to ensure that the contaminated gas and the purifying liquid are brought into contact with each other.

  Therefore, the present invention provides a spray nozzle having a structure capable of spraying the cleaning liquid without a gap of 360 °, and a gas purification capable of efficiently removing dust and the like from gas with a simple structure by using the spray nozzle. Providing equipment.

  Accordingly, the spray nozzle of the present invention is constituted by the introduction block, the intermediate block, and the terminal block, and forms an injection mechanism for injecting fluid in a skirt shape without a 360 ° gap at each contact portion.

  Specifically, the present invention has an introduction hole that communicates with the fluid supply side and penetrates the center, and a mounting portion is formed on the inner peripheral surface of the introduction hole, and a skirt shape is formed on the discharge side. A mounting block formed with a concave injection mechanism forming portion that expands in diameter, and a mounting portion that is mounted on a mounting portion of an introduction hole of the mounting block, the mounting corresponding to the concave injection mechanism forming portion; The convex side injection mechanism forming part that expands in a skirt shape from the base of the part and defines the injection mechanism between the concave side injection mechanism forming part and the connection hole that communicates with the introduction hole is formed in the center A mounting portion is formed on the inner peripheral surface of the connection hole, and a concave-side injection mechanism forming portion that expands in a skirt shape is similarly formed on the discharge side, and the injection A plurality of communication holes communicating between the mechanism and the introduction hole or the connection hole are formed in the mounting portion. An intermediate block, and a closing portion that is attached to the attachment portion of the connection hole of the intermediate block and closes the connection hole, and has a skirt shape from the base of the closing portion corresponding to the concave injection mechanism forming portion A convex injection mechanism forming portion that defines an injection mechanism between the injection hole and the concave injection mechanism forming portion, and a plurality of communication between the injection hole and the introduction hole or the connection hole. This communication hole is constituted by a terminal block formed in the closed portion.

  As described above, the intermediate block includes the mounting portion that is mounted on the mounted portion of the introduction hole of the mounting block, and expands in a skirt shape from the base of the mounting portion corresponding to the concave injection mechanism forming portion. And a convex injection mechanism forming portion that defines an injection mechanism between the concave injection mechanism forming portion and the concave injection mechanism forming portion, and a connection hole communicating with the introduction hole is formed through the center, A mounting portion is formed on the inner peripheral surface of the tongue, and a concave injection mechanism forming portion that is defined in a skirt shape is similarly formed on the discharge side thereof, and the injection mechanism and the introduction hole or connection hole Since the plurality of communication holes that communicate with each other are formed in the mounting portion, the mounting portion of the intermediate block can be mounted on the mounting portion of the intermediate block. And multiple end blocks can be connected A. Also, the concave injection mechanism forming part of the mounting block, the convex injection hole forming part of the intermediate block, the concave injection hole forming part of the intermediate block and the convex injection mechanism forming part of the next intermediate block, the intermediate block and the concave injection. A skirt-like injection mechanism can be formed by each of the mechanism formation portion and the convex injection mechanism formation portion of the terminal block. In addition, this allows fluid (for example, water) to be ejected over a plurality of stages without gaps in a skirt shape over 360 °.

  In addition, a male screw portion is formed on the peripheral side surface of the mounting portion or the closing portion, and a female screw portion into which the male screw is screwed to the inner peripheral side surface of the communication hole or connection hole into which each is inserted. It is desirable to form.

  This makes it possible to form a spray nozzle with a predetermined width simply by screwing the end block into the mounting block, the next intermediate block into the previous intermediate block, and the intermediate block into the intermediate block. Is something that can be done.

  Furthermore, it is desirable that the communication holes formed in the intermediate block or the terminal block are formed at a predetermined interval between the male screw portion of the mounting portion and the connection hole or inside the male screw portion of the closing portion. . Accordingly, the fluid can be reliably supplied to the ejection mechanism while maintaining the strength of the male screw portion.

  Furthermore, the injection mechanism defined by the concave injection mechanism forming portion and the convex injection mechanism forming portion opposite to the concave injection mechanism forming portion includes a skirt-like injection port that opens at a predetermined width over 360 °, and the injection port. And a buffer space formed as a space of a predetermined size between the communication hole and the communication hole.

  Thereby, the jet port formed in a skirt shape with a predetermined width over 360 ° allows the fluid to incline downward at a predetermined angle and spread without a gap of 360 °, and between the jet port and the communication hole. By defining a predetermined buffer space, the injection from the injection port can be made more uniform.

  Furthermore, the intermediate block can be omitted and the end block can be directly attached to the introduction block. Thereby, one-stage injection can be obtained.

  In addition, a suction pipe to which the gas to be purified is supplied, a discharge pipe for discharging the purified gas, a container including these suction pipe and the discharge pipe, and a spray nozzle for spraying a liquid on the gas sucked into the suction pipe And a supply pump for supplying fluid to the spray nozzle, the above-described spray nozzle is provided in the suction pipe, and the liquid supplied to the spray nozzle is at least one of the spray nozzles. It is desirable to radiate in a conical shape to the inner wall of the suction pipe without any gap by 360 ° by two injection mechanisms.

  When a fluid such as water is radiated in a conical shape to the inner wall of the suction pipe without a gap of 360 ° by the injection mechanism, the polluted gas sucked into the suction pipe comes into contact with the fluid such as water and flows along the inner wall with the fluid Be struck. At this time, since the fluid and the gas are in vigorous contact, the contaminant contained in the contaminated gas is taken into the fluid and falls downward in the container. Since this operation can be repeated a plurality of stages, it is possible to efficiently remove contaminants. Incidentally, it is desirable to supply the contaminated gas from above the spray nozzle of the present invention.

  According to the present invention, after the intermediate block is screwed into the introduction block and the intermediate block is formed in a plurality of stages, the spray nozzle of a plurality of stages can be formed simply by screwing the terminal block, and it can be easily assembled at a low cost. A spray nozzle can be obtained. In addition, since it is easy to reduce the size of the nozzle and no filter medium is required, the size of the device itself can be reduced.

  In addition, by using this spray nozzle, a gas purification device that is simple and has a high contaminant removal efficiency can be obtained.

  Embodiments of the present invention will be described below with reference to the drawings.

  As shown in FIG. 1, the spray nozzle 1 according to the first embodiment of the present invention includes at least an introduction block 2, an intermediate block 3, and a terminal block 4.

  As shown in FIGS. 1 and 2, the introduction block 2 includes a connection portion 21 connected to a pipe for supplying a purification liquid such as water, and an introduction main body portion 22 to which the intermediate block 3 or the end block 4 described below is attached. And an introduction hole 23 penetrating the inside is formed. A concave-side injection mechanism forming portion 24 formed in a skirt shape with an enlarged diameter is formed at the discharge-side end portion of the introduction hole 23, and a mounted portion is formed by a female screw 25 at the back.

  As shown in FIGS. 1 and 3, the intermediate block 3 includes a mounting portion 31 in which a male screw 32 that engages with the female screw 25 of the mounted portion is formed on a peripheral side surface, and a base portion 33 of the mounting portion 31. A convex side injection mechanism forming part 34 that is expanded in a skirt shape and defines an injection mechanism 50 between the concave side injection mechanism forming part 24 and the concave side injection mechanism forming part 24 is formed in the intermediate main body part 35 of the intermediate block 3. A connection hole 36 is formed through the mounting portion 31 and the intermediate main body 35, and a concave side injection mechanism forming portion 37 that expands in a skirt shape is formed on the discharge side of the connection hole 36. The concave injection mechanism forming portion 37 formed in the connection hole 36 has the same shape as the concave injection mechanism forming portion 24 formed in the introduction hole 23 of the introduction block 2. Similarly to the introduction hole 23, a mounting portion is formed in the connection hole 36 by a female screw 38 at the back of the concave injection mechanism forming portion 37. Further, as shown in FIG. 5, a plurality of communication holes 39 arranged at predetermined intervals in the circumferential direction are formed inside the external thread 32 formed on the peripheral side surface of the mounting portion 31. And the base 33 from which the convex injection mechanism forming portion 34 extends communicate with each other.

  As shown in FIGS. 1 and 4, the end block 4 includes a mounting portion 41 in which a male screw 42 that is screwed into a mounting portion of either the introduction block 2 or the intermediate block 3 is formed on the peripheral side surface, and the mounting block 41. A convex side injection mechanism forming portion 44 that expands in a skirt shape from the base portion 43 of the portion 41 and defines the injection mechanism 50 between the concave side injection mechanism forming portion 24 or 37 is a terminal main body portion of the terminal block 4. 45. In addition, a plurality of communication holes 46 are formed on the inner side of the male screw 42 formed on the peripheral side surface of the mounting portion 41, and a plurality of communication holes 46 are formed at predetermined intervals in the circumferential direction, like the communication holes of the intermediate block 3. The front end portion 41 communicates with the base 43 from which the convex injection mechanism forming portion 44 extends. The end block 4 closes the discharge side of the introduction hole 23 or the connection hole 36 when connected to the introduction block 2 or the intermediate block 3.

  With the above configuration, the intermediate block 3 is screwed and attached to the introduction block 2, and a plurality of intermediate blocks 3 are sequentially screwed to the intermediate block 3, and finally the terminal block 4 is attached to form the spray nozzle 1. It is. Thereby, as shown in FIG. 1, the spray nozzle 1 having the four-stage injection mechanism 50 can be configured.

  The first stage injection mechanism 50 is defined by the concave injection mechanism forming portion 24 of the introduction block 2 and the convex injection mechanism forming portion 34 of the first intermediate block 3 attached to the introduction block 2, The second-stage and third-stage injection mechanisms 50 are respectively defined by the concave injection mechanism forming part 37 of the upper intermediate block 3 and the convex injection mechanism forming part 34 of the lower intermediate block 3. The fourth-stage injection mechanism 50 is defined by the concave injection mechanism forming portion 37 of the intermediate block 3 and the convex injection mechanism forming portion 44 of the terminal block 4. Each injection mechanism 50 includes a buffer space 51 that communicates with the communication holes 39 and 46, and an injection unit 52 that extends in a skirt shape with a gap of about 0.2 mm. As a result, the buffer space 51 communicates with any one of the communication holes 39 and 46, and the fluid flowing through the introduction hole 23 or the connection hole 36 flows in through the communication holes 39 and 46. It is made uniform in the buffer space 51 and spreads through the injection part 52 without a 360 ° conical (skirt-like) gap.

  Further, as shown in FIG. 6, the spray nozzle 1 according to the present invention can be configured such that the intermediate block 3 is omitted and the terminal block 4 is directly attached to the introduction block 2 to form a single-stage injection mechanism 50. It is.

  The gas purification apparatus 100 using the spray nozzle 1 according to the present invention includes a suction pipe 101 that is supplied with a gas to be purified, a discharge pipe 102 that discharges the purified gas, and the suction pipe 101 and the discharge pipe 102 communicate with each other. A container 103 for spraying, a spray nozzle 1 for spraying a fluid (purified liquid) to the gas sucked into the suction pipe 101, and a supply pump 104 for supplying fluid to the spray nozzle 1.

  In addition, the container 103 requires a supply line 105 for supplying a purification liquid as a fluid into the container 103, an overflow line 106 for discharging the purification liquid when the purification liquid exceeds a predetermined level, and a purification liquid. A discharge line 107 for discharging is provided according to the above, and on-off valves 108, 109, 110 are provided in the respective lines 105, 106, 107. Reference numeral 114 denotes a mist separator for removing the purification liquid from the discharged gas. Further, a filter may be provided instead of the mist separator 114, and a filter may be provided together with the mist separator 114.

  Further, the supply pump 104 sucks the cleaning liquid stored in the container 103 and supplies it to the spray nozzle 1. Thus, four stages of the cleaning liquid 120 are formed from the spray nozzle 1 in a conical shape (skirt shape) that extends 360 ° to the inner wall of the suction pipe 101 without a gap. Reference numeral 111 denotes a filter that removes impurities from the cleaning liquid sucked by the supply pump 104, and reference numeral 112 denotes an on-off valve.

In the gas purification apparatus 100 having the above configuration, the contaminated gas supplied to the suction pipe 101, particularly a gas containing impurities discharged after plasma treatment such as etching, specifically methane (CH ₄ ), carbon tetrafluoride. (CF ₄ ), C ₂ F ₆ gas, C ₃ F ₈ gas, CHF ₃ gas, C ₄ F ₈ gas, C ₅ F ₈ gas, CH ₃ F gas, CH ₂ F ₂ gas and C ₄ F ₆ gas, A gas such as COF ₂ , ozone (O ₃ ), and argon (Ar) comes into contact with the purification liquid 120 that is sprayed from the spray nozzle 1 and spreads in a skirt shape without a gap of 360 °. Collide with. At this time, impurities contained in the gas are dissolved and purified in the purification liquid, and the purification liquid containing the impurities is dropped into the liquid reservoir 113 of the container 103. In this embodiment, this purification action is performed four times. Further, since the purifying liquid staying in the liquid reservoir 113 is contaminated, in order to improve the waste liquid treatment, the valve 108 is always opened to keep the purifying liquid clean. Further, a flow meter is incorporated in the supply line 105, and the operation is performed while adjusting the flow rate according to the degree of contamination of the cleaning liquid staying in the liquid reservoir 113.

  Thereafter, the purified air is discharged through the mist separator 114 of the discharge pipe 102 through the inside of the container 103, and is recirculated or reused.

It is a schematic structure sectional view of a spray nozzle which has a multistage injection mechanism concerning the present invention. It is a front view of the introduction block of the spray nozzle concerning the present invention. It is a front view of the intermediate block of the spray nozzle concerning the present invention. It is a front view of the termination block of the spray nozzle concerning the present invention. It is a top view of the spray nozzle concerning the present invention. It is a schematic structure sectional view of a spray nozzle which has a one-stage injection mechanism. It is explanatory drawing of the gas purification apparatus using the spray nozzle which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Spray nozzle 2 Introduction block 3 Intermediate block 4 Terminal block 21 Connection part 22 Introduction body part 23 Introduction hole 24 Concave injection mechanism formation part 25 Female screw 31 Mounting part 32 Male screw 33 Base part 34 Convex side injection mechanism formation part 35 Intermediate body Part 36 Connection hole 37 Concave injection mechanism forming part 38 Female screw 39 Communication hole 41 Mounting part 42 Male screw 43 Base 44 Convex injection mechanism forming part 45 Termination body part 46 Communication hole 50 Injection mechanism 51 Buffer space 52 Injection part 100 Vaporization Purification device 101 Suction pipe 102 Discharge pipe 103 Container 104 Supply pump 105 Supply line 106 Overflow line 107 Discharge line 108, 109.110 On-off valve 111 Filter 112 On-off valve 113 Liquid reservoir 114 Filter

Claims (6)

A concave injection mechanism is formed which has an introduction hole communicating with the fluid supply side and penetrating through the center, and a mounting portion is formed on the inner peripheral surface of the introduction hole, and the discharge side is enlarged in a skirt shape. A mounting block on which a part is formed;
The mounting block includes a mounting portion that is mounted on the mounting portion of the introduction hole of the mounting block, and the diameter of the mounting portion is increased from the base of the mounting portion in a skirt shape corresponding to the concave injection mechanism forming portion, thereby forming the concave injection mechanism. A convex injection mechanism forming portion that defines an injection mechanism is formed between the connecting hole and a connection hole that communicates with the introduction hole. A mounting portion is formed, and a concave side injection mechanism forming portion having a skirt-like diameter is similarly formed on the discharge side thereof, and a plurality of communication portions communicate between the injection mechanism and the introduction hole or the connection hole. An intermediate block in which a hole is formed in the mounting portion;
It includes a closing portion that is attached to the attached portion of the connection hole of the intermediate block and closes the connection hole, and expands from the base of the closing portion into a skirt shape corresponding to the concave injection mechanism forming portion, A convex injection mechanism forming portion that defines an injection mechanism is formed between the concave injection mechanism forming portion and a plurality of communication holes that communicate between the injection hole and the introduction hole or connection hole. A spray nozzle comprising: a terminal block formed in the closing portion.   A male screw portion is formed on the peripheral side surface of the mounting portion or the closing portion, and a female screw portion into which the male screw is screwed is formed on the inner peripheral side surface of the communication hole or connection hole into which each is inserted. The spray nozzle according to claim 1, wherein:   The communication holes formed in the intermediate block or the terminal block are formed at a predetermined interval between the male screw part of the mounting part and the connection hole or inside the male screw part of the closing part. The spray nozzle according to claim 2.   The injection mechanism defined by the concave injection mechanism forming portion and the convex injection mechanism forming portion opposite to the concave injection mechanism forming portion includes a skirt-like injection port that opens at a predetermined width over 360 °, the communication port and the communication port. The spray nozzle according to any one of claims 1 to 3, wherein the spray nozzle is configured by a buffer space formed as a space of a predetermined size between the holes.   The spray nozzle according to any one of claims 1 to 4, wherein the intermediate block is omitted and the end block is directly attached to the introduction block. A suction pipe to which a gas to be purified is supplied, a discharge pipe for discharging the purified gas, a container having these suction pipe and a discharge pipe, a spray nozzle for spraying a liquid on the gas sucked into the suction pipe, In a gas purification device constituted at least by a supply pump for supplying fluid to the spray nozzle,
The spray nozzle according to any one of claims 1 to 5 is provided in the suction pipe, and the fluid supplied to the spray nozzle is conically formed by at least one spray mechanism of the spray nozzle. A gas purifying apparatus characterized in that the gas is radiated to the inner wall without a gap of 360 °.

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