JP2010142092A - Ultrasonic motor - Google Patents

Ultrasonic motor Download PDF

Info

Publication number
JP2010142092A
JP2010142092A JP2008318923A JP2008318923A JP2010142092A JP 2010142092 A JP2010142092 A JP 2010142092A JP 2008318923 A JP2008318923 A JP 2008318923A JP 2008318923 A JP2008318923 A JP 2008318923A JP 2010142092 A JP2010142092 A JP 2010142092A
Authority
JP
Japan
Prior art keywords
vibration
elastic body
rod
ultrasonic motor
shaped elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008318923A
Other languages
Japanese (ja)
Inventor
Junji Okada
淳二 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2008318923A priority Critical patent/JP2010142092A/en
Publication of JP2010142092A publication Critical patent/JP2010142092A/en
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor which can attains an improvement in efficiency of a motor by removing unnecessary bending vibration components other than torsional vibration thereby materializing appearance of stable elliptic vibration and achieving an improvement in sliding property, in simple structure. <P>SOLUTION: This ultrasonic motor is so structurized as to achieve matching between longitudinal vibration resonance frequency and torsional vibration resonance frequency by providing the flank of a bar-shaped elastic body 10 with a recess 9, corresponding to a stacked piezoelectric element 11, and reducing, with this recess 9, the displacement due to unnecessary bending vibration other than the torsional vibration by excitement of the torsional vibration of the bar-shaped elastic body 10. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

この発明は、例えばデジタルカメラの手振れ補正ユニットやAFレンズ等のアクチュエータとして用いられている超音波モータに関する。   The present invention relates to an ultrasonic motor used as an actuator such as a camera shake correction unit or an AF lens of a digital camera.

一般に、この種の超音波モータには、振動子である圧電素子に電圧を印加して棒状弾性体に縦振動と捻り振動を励起させて楕円振動を発生させ、この楕円振動を利用して回転体である被駆動体を回転駆動する構成のものがある。   In general, in this type of ultrasonic motor, a piezoelectric element, which is a vibrator, is applied with a voltage to excite longitudinal vibrations and torsional vibrations in a rod-like elastic body to generate elliptical vibrations. There is a configuration that rotationally drives a driven body that is a body.

このような超音波モータは、ステータを構成する棒状弾性体の側面に対向させて2個の積層型圧電素子が軸方向に対して傾斜されて配置され、この積層型圧電素子に対して電圧を印加することで、該棒状弾性体に縦振動と捻り振動を励起させ、棒状弾性体の端面に配した環状の駆動子に楕円振動を励起させる。   In such an ultrasonic motor, two stacked piezoelectric elements are arranged to be inclined with respect to the axial direction so as to face the side surface of the rod-shaped elastic body constituting the stator, and voltage is applied to the stacked piezoelectric element. By applying this, longitudinal vibration and torsional vibration are excited in the rod-shaped elastic body, and elliptical vibration is excited in the annular driver arranged on the end surface of the rod-shaped elastic body.

上記棒状弾性体には、回転軸が同軸的に設けられ、この回転軸の先端部には、上記被駆動体がばね部材を介して回転自在に組付けられ、この被駆動体がばね部材により、駆動子に対して回転自在に圧接配置される。これにより、被駆動体は、駆動子に楕円振動が励起されると、この駆動子に発生した楕円振動を駆動力として回転軸回りに回転駆動される(例えば、特許文献1参照。)。
特開平8−317669号公報
The rod-like elastic body is provided with a rotating shaft coaxially, and the driven body is rotatably mounted on the tip of the rotating shaft via a spring member. The driven body is supported by the spring member. The presser is disposed so as to be rotatable with respect to the driver. As a result, when elliptical vibration is excited in the driver, the driven body is rotated around the rotation axis using the elliptical vibration generated in the driver as a driving force (see, for example, Patent Document 1).
JP-A-8-317669

上記超音波モータは、左右の圧電素子に同位相の交番電圧を印加すると縦振動のみが、また、逆位相の交番電圧を印加すると捻り振動をのみが発生する。そこで、90度位相差の交番電圧を印加して縦振動と捻り振動を同時に発生するようにしている。   The ultrasonic motor generates only longitudinal vibration when an alternating voltage having the same phase is applied to the left and right piezoelectric elements, and generates only torsional vibration when an alternating voltage having an opposite phase is applied. Therefore, an alternating voltage having a phase difference of 90 degrees is applied to generate longitudinal vibration and torsional vibration at the same time.

しかしながら、上記超音波モータの左右の積層型圧電素子で棒状弾性体を挟持する構造では、左右の積層型圧電素子の位相差を持った伸縮動作により、棒状弾性体には曲げモードの屈曲共振振動が発生しやすい。更に、棒状弾性体の構造によっては、棒状弾性体に捻り共振モードと屈曲共振モードの固有共振周波数が近くに存在することもありうる。このような状態で、積層型圧電素子と棒状弾性体との間で振動が漏れ、あるいは、振動は伝わるが振動の位相遅れが発生するなど積層型圧電素子と棒状弾性体との振動的一体性が弱いと、積層型圧電素子の伸縮動作にあわせ捻り振動の共振周波数帯域に屈曲振動の周波数成分が混入し、駆動子には均一な楕円振動が発生しないという不都合を有する。これによると、モータ摺動特性が低下され、モータ効率が低下されるという問題を有する。   However, in the structure in which the rod-shaped elastic body is sandwiched between the left and right laminated piezoelectric elements of the ultrasonic motor, the rod-shaped elastic body has a bending resonance vibration in a bending mode due to an expansion / contraction operation having a phase difference between the left and right laminated piezoelectric elements. Is likely to occur. Furthermore, depending on the structure of the rod-shaped elastic body, the natural resonance frequencies of the torsional resonance mode and the bending resonance mode may exist in the vicinity of the rod-shaped elastic body. In such a state, vibration is leaked between the laminated piezoelectric element and the rod-shaped elastic body, or vibration is transmitted, but a phase delay of the vibration is generated. If it is weak, the frequency component of the bending vibration is mixed in the resonance frequency band of the torsional vibration in accordance with the expansion / contraction operation of the multilayer piezoelectric element, and there is a disadvantage that uniform elliptical vibration does not occur in the driver. According to this, there is a problem that the motor sliding characteristic is lowered and the motor efficiency is lowered.

この発明は上記の事情に鑑みてなされたもので、簡易な構成で、捻り振動以外の不要な屈曲振動成分の除去を図って安定した楕円振動の発生を実現して、摺動特性の向上を図り、モータ効率の向上を実現し得るようにした超音波モータを提供することを目的とする。   The present invention has been made in view of the above circumstances, and with a simple configuration, unnecessary bending vibration components other than torsional vibrations are removed to realize stable elliptical vibration, thereby improving sliding characteristics. An object of the present invention is to provide an ultrasonic motor that can improve motor efficiency.

この発明による棒状弾性体の側面に対向して配置された2個の積層型圧電素子の伸縮振動により、前記棒状弾性体に縦振動と捻り振動とを励起し、前記棒状弾性体の端面に設けられた駆動子に楕円振動を励起させて、該駆動子に対して前記棒状弾性体の端面に回転自在に支持された被駆動体を圧接配置して摩擦駆動する超音波モータは、前記棒状弾性体の側面に振動緩衝部を前記積層型圧電素子に対応して設けて構成した。   Longitudinal and torsional vibrations are excited in the rod-like elastic body by stretching vibration of two stacked piezoelectric elements arranged opposite to the side surfaces of the rod-like elastic body according to the present invention, and provided on the end surface of the rod-like elastic body. The ultrasonic motor which excites elliptical vibration to the driven element and presses and arranges the driven body rotatably supported on the end surface of the rod-shaped elastic body with respect to the driver is friction-driven. A vibration buffer portion was provided on the side surface of the body corresponding to the laminated piezoelectric element.

上記構成によれば、振動緩衝部は、棒状弾性体の捻り振動を伝達し、捻り振動以外の不要な屈曲振動による変位を低減して、縦振動共振周波数と捻り振動共振周波数との一致が図れて、駆動子の接触面に励起される楕円振動を安定化させる。これにより、高効率な摺動特性が得られて、モータ効率の向上が図れる。   According to the above configuration, the vibration buffer transmits the torsional vibration of the rod-like elastic body, reduces displacement due to unnecessary bending vibration other than torsional vibration, and matches the longitudinal vibration resonance frequency and the torsional vibration resonance frequency. Thus, the elliptical vibration excited on the contact surface of the driver is stabilized. Thereby, highly efficient sliding characteristics can be obtained, and motor efficiency can be improved.

以上述べたように、この発明によれば、簡易な構成で、捻り振動以外の不要な屈曲振動成分の除去を図って安定した楕円振動の発生を実現して、摺動特性の向上を図り、モータ効率の向上を実現し得るようにした超音波モータを提供することができる。   As described above, according to the present invention, with a simple configuration, it is possible to remove unnecessary bending vibration components other than torsional vibrations and to generate stable elliptical vibrations, thereby improving sliding characteristics. An ultrasonic motor capable of improving motor efficiency can be provided.

以下、この発明の実施の形態について、図面を参照して詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図1及び図2は、この発明の一実施の形態に係る超音波モータを示すもので、図1は、正面側から見た状態を示し、図2は、棒状弾性体10を側面側から見た状態を示す。   1 and 2 show an ultrasonic motor according to an embodiment of the present invention. FIG. 1 shows a state seen from the front side, and FIG. 2 shows the rod-like elastic body 10 seen from the side. Indicates the state.

即ち、上記棒状弾性体10は、金属材料、例えば黄銅で円柱状に形成され、第1の弾性部101と第2の弾性部102とが溝部103を挟んで括れ形状に連設されている。この棒状弾性体10は、その全長が、例えば縦振動振幅に対応され、その第1の弾性部101の長さ寸法が捻り振動振幅に対応される(図3参照)。そして、第1の弾性部101には、その側面に、例えば2個の積層型圧電素子11が軸方向に対して所定の傾斜角を有して対向して設けられる。   That is, the rod-like elastic body 10 is formed in a cylindrical shape with a metal material, for example, brass, and the first elastic portion 101 and the second elastic portion 102 are connected in a constricted shape with the groove portion 103 interposed therebetween. The full length of the rod-shaped elastic body 10 corresponds to, for example, the longitudinal vibration amplitude, and the length dimension of the first elastic portion 101 corresponds to the torsional vibration amplitude (see FIG. 3). Then, for example, two stacked piezoelectric elements 11 are provided on the side surface of the first elastic portion 101 so as to face each other with a predetermined inclination angle with respect to the axial direction.

また、棒状弾性体10の第1の弾性部には、その側面における2個の積層型圧電素子11に対応する捻り振動の腹近傍(屈曲振動の節位置近傍)に振動緩衝部を構成する凹部9が柱状弾性体10の縦振動方向と直交する方向に延設されてそれぞれ設けられる。この凹部9は、少なくとも積層型圧電素子11を棒状弾性体10の第1の弾性部101の端面(駆動子面)に向けて投影した領域が含まれる。   Further, the first elastic portion of the rod-shaped elastic body 10 includes a concave portion that constitutes a vibration buffering portion in the vicinity of the antinode of torsional vibration (near the position of the bending vibration) corresponding to the two laminated piezoelectric elements 11 on the side surface. 9 are respectively provided extending in a direction orthogonal to the longitudinal vibration direction of the columnar elastic body 10. The concave portion 9 includes at least a region in which the multilayer piezoelectric element 11 is projected toward the end surface (driver element surface) of the first elastic portion 101 of the rod-shaped elastic body 10.

これにより、棒状弾性体10の第1の弾性部101の凹部9は、捻り振動周波数領域において、例えば図4に示す不要な屈曲振動成分が発生すると、該不要な屈曲振動成分を縦振動方向と垂直な方向に減衰し、棒状弾性体10の第1の弾性部101の端面に安定した楕円振動を励起させる。   Thereby, if the unnecessary bending vibration component shown in FIG. 4, for example, is generated in the recess 9 of the first elastic portion 101 of the rod-shaped elastic body 10 in the torsional vibration frequency region, the unnecessary bending vibration component is set as the longitudinal vibration direction. It attenuates in the vertical direction and excites stable elliptical vibration on the end face of the first elastic part 101 of the rod-like elastic body 10.

さらに、上記棒状弾性体10には、その第1の弾性部101の端面の略中心部に回転軸12の基端が同軸的に突設される。そして、この棒状弾性体10の第1の弾性部101の端面には、例えばセラミック材料、樹脂材料等で形成されたリング状の駆動子13が取付けられる。   Further, the rod-shaped elastic body 10 has a proximal end of the rotating shaft 12 coaxially protruding at a substantially central portion of the end surface of the first elastic portion 101. A ring-shaped driver 13 made of, for example, a ceramic material or a resin material is attached to the end surface of the first elastic portion 101 of the rod-shaped elastic body 10.

この駆動子13は、2個の積層型圧電素子11に位相の異なる交番電圧が印加されて棒状弾性体10に縦振動及び捻り振動が同時に励起されると、その縦振動以外の不要な屈曲振動成分が取除かれた状態で楕円振動が励起される。   When an alternating voltage having a different phase is applied to the two laminated piezoelectric elements 11 to simultaneously excite longitudinal vibrations and torsional vibrations in the bar-shaped elastic body 10, the driver 13 generates unnecessary bending vibrations other than the longitudinal vibrations. Elliptical vibrations are excited with the components removed.

この積層型圧電素子11は、例えば内部電極が焼結時の温度に耐えうる銀パラジウム等の高融点な導電性材料を、例えばスクリーン印刷等の手法により形成され、厚さ寸法が10〜200μm程度の圧電材料が10mm程度の寸法に積層されて形成される。   The multilayer piezoelectric element 11 is formed of a high melting point conductive material such as silver palladium that can withstand the temperature at which the internal electrode is sintered, for example, by a technique such as screen printing, and has a thickness of about 10 to 200 μm. The piezoelectric material is laminated to a size of about 10 mm.

また、上記回転軸12には、ロータを構成する被駆動体14が回転自在に挿通された後、ばね部材15、ばね押さえ部材16が順に挿着され、例えば先端部に設けた螺子部(図示せず)にナット部材17が螺着される。これにより、被駆動体14は、ナット部材17の螺合調整により、ばね押さえ部材16がばね部材15のばね力を可変させることで、2個の駆動子13の各接触面に対する圧接力が調整される。   Further, after the driven body 14 constituting the rotor is rotatably inserted into the rotary shaft 12, a spring member 15 and a spring pressing member 16 are sequentially inserted, and for example, a screw portion (see FIG. The nut member 17 is screwed to the not shown. Thereby, the driven body 14 adjusts the pressure contact force with respect to each contact surface of the two drive elements 13 by the spring pressing member 16 changing the spring force of the spring member 15 by adjusting the screwing of the nut member 17. Is done.

上記構成において、棒状弾性体10は、その2個の積層型圧電素子11に対して位相の異なる交番電圧が印加されると、縦振動と捻り振動が同時に励起され、駆動子13に楕円振動が励起される。この際、棒状弾性体10は、捻り振動周波数領域に屈曲振動が発生すると、その凹部9が、図5に示すように振動緩衝作用を奏して屈曲振動による変位を低減させて、捻り振動共振周波数と縦振動共振周波数の一致を図る。   In the above configuration, when an alternating voltage having a different phase is applied to the two laminated piezoelectric elements 11, the rod-shaped elastic body 10 is excited simultaneously with longitudinal vibration and torsional vibration, and elliptical vibration is generated in the driver 13. Excited. At this time, when the flexural vibration is generated in the torsional vibration frequency region, the bar-like elastic body 10 has its concave portion 9 exerts a vibration buffering action to reduce displacement due to the flexural vibration as shown in FIG. And longitudinal vibration resonance frequency.

これにより、棒状弾性体10の第1の弾性部101の端面に配した駆動子13は、不要な屈曲振動の影響を受けることなく、安定した楕円振動が励起され、該楕円振動を駆動力として圧接配置される被駆動体14を所望の摺動特性で回転駆動する。これにより、高効率な摺動特性が得られて、高いモータ効率を得ることができる。   As a result, the driver element 13 disposed on the end face of the first elastic portion 101 of the rod-shaped elastic body 10 is excited by stable elliptic vibration without being affected by unnecessary bending vibration, and the elliptic vibration is used as a driving force. The driven body 14 arranged in pressure contact is rotationally driven with desired sliding characteristics. Thereby, highly efficient sliding characteristics can be obtained, and high motor efficiency can be obtained.

このように、上記超音波モータは、棒状弾性体10の側面に凹部9を積層型圧電素子11に対応して設け、この凹部9で棒状弾性体10の捻り振動の励起による捻り振動以外の不要な屈曲振動による変位を低減して、縦振動共振周波数と捻り振動共振周波数との一致を図るように構成した。   As described above, the ultrasonic motor is provided with the concave portion 9 corresponding to the laminated piezoelectric element 11 on the side surface of the rod-shaped elastic body 10, and the concave portion 9 is unnecessary other than torsional vibration due to excitation of torsional vibration of the rod-shaped elastic body 10. The displacement due to the bending vibration is reduced, and the longitudinal vibration resonance frequency and the torsion vibration resonance frequency are matched.

これによれば、棒状弾性体10の第1の弾性部101の端面の駆動子13に高精度で安定した楕円振動を励起することができることにより、高効率な摺動特性が得られるため、モータ効率の向上が図れる。   According to this, since the highly accurate and stable elliptical vibration can be excited on the driver 13 on the end surface of the first elastic portion 101 of the rod-like elastic body 10, a highly efficient sliding characteristic can be obtained. Efficiency can be improved.

また、上記実施の形態では、棒状弾性体10の第1の弾性部101に配した凹部9を一つの溝構造として構成した場合について説明したが、この発明は、これに限ることなく、その他、例えば図6乃至図10に示すように凹部91〜95を構成するようにしてもよく、同様の効果が期待される。但し、この図6乃至図10に示す各実施の形態においては、上記図1乃至図5に示す構成と同一部分について同一符号を付して、その詳細な説明を省略する。   Moreover, although the said embodiment demonstrated the case where the recessed part 9 distribute | arranged to the 1st elastic part 101 of the rod-shaped elastic body 10 was comprised as one groove structure, this invention is not restricted to this, others, For example, as shown in FIGS. 6 to 10, the recesses 91 to 95 may be configured, and the same effect is expected. However, in each embodiment shown in FIGS. 6 to 10, the same components as those shown in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

図6に示す凹部91は、複数個の溝911を、隔壁912を用いて幅間隔を有して並設して構成した。   The recess 91 shown in FIG. 6 is configured by arranging a plurality of grooves 911 in parallel with each other using a partition wall 912 with a width interval.

図7に示す凹部92は、複数個の溝921を、隔壁922を用いて異なる幅間隔を有して並設して構成した。   The recess 92 shown in FIG. 7 is configured by arranging a plurality of grooves 921 in parallel with different width intervals using partition walls 922.

図8に示す凹部93は、複数個の溝931を、例えば両面が先端方向に傾斜されて、先端方向に尖った隔壁932を用いて所定の幅間隔に並設して構成した。   The concave portion 93 shown in FIG. 8 is formed by arranging a plurality of grooves 931 in parallel at a predetermined width interval using, for example, partition walls 932 whose both surfaces are inclined in the distal direction and sharpened in the distal direction.

図9に示す凹部94は、複数個の溝941を、例えば両面が先端方向に傾斜されて、先端方向に尖った隔壁942を用いて異なる幅間隔に並設して構成した。   The concave portion 94 shown in FIG. 9 is configured by arranging a plurality of grooves 941 in parallel at different width intervals using, for example, partition walls 942 whose both surfaces are inclined in the distal direction and sharpened in the distal direction.

図10に示す凹部95は、複数個の溝951を、例えば一方面のみが先端方向に傾斜されて、先端方向に尖った隔壁952を用いて異なる幅間隔に並設して構成した。   The concave portion 95 shown in FIG. 10 is configured by arranging a plurality of grooves 951 in parallel with different width intervals using partition walls 952 that are inclined in the tip direction, for example, only on one surface.

なお、この図10に示す凹部95の複数個の溝951を構成する隔壁952の隔壁構造は、上記図8及ぶ図9に示す凹部93,94における隔壁932,942おいても適用してもよい。   10 may be applied to the partition walls 932 and 942 in the recesses 93 and 94 shown in FIG. 8 and FIG. 9 described above. .

また、上記各実施の形態では、棒状弾性体10を円柱状に形成して構成した場合について説明したが、これに限ることなく、角柱形状に形成して構成することも可能で、同様に有効な効果が期待される。   In each of the above embodiments, the case where the rod-like elastic body 10 is formed in a columnar shape has been described. However, the present invention is not limited to this, and the rod-like elastic body 10 can be formed in a prismatic shape and is also effective. Expected.

さらに、この発明は、上記実施の形態に限ることなく、その他、例えば上記棒状弾性体10の第1の弾性部101に形成した凹部9(91,92,93,94,95)にゴム材や樹脂材等の緩衝機能を奏する振動減衰材を埋設するようにしてもよい。これによれば、さらに良好な緩衝効果を期待することができる。   Furthermore, the present invention is not limited to the above-described embodiment, and, for example, a rubber material or the like is provided in the concave portion 9 (91, 92, 93, 94, 95) formed in the first elastic portion 101 of the rod-shaped elastic body 10, for example. A vibration damping material having a buffer function such as a resin material may be embedded. According to this, a better buffering effect can be expected.

よって、この発明は、上記実施の形態に限ることなく、その他、実施段階ではその要旨を逸脱しない範囲で種々の変形を実施し得ることが可能である。さらに、上記実施の形態には、種々の段階の発明が含まれており、開示される複数の構成要件における適宜な組合せにより種々の発明が抽出され得る。   Therefore, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention at the stage of implementation. Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements.

例えば実施の形態に示される全構成要件から幾つかの構成要件が削除されても、発明が解決しようとする課題の欄で述べた課題が解決でき、発明の効果で述べられている効果が得られる場合には、この構成要件が削除された構成が発明として抽出され得る。   For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and the effect described in the effect of the invention can be obtained. In such a case, a configuration in which this configuration requirement is deleted can be extracted as an invention.

この発明の一実施の形態に係る超音波モータの要部構成を説明するために示した平面図である。It is the top view shown in order to demonstrate the principal part structure of the ultrasonic motor which concerns on one embodiment of this invention. 図1を側面側から見た状態を示した平面図である。It is the top view which showed the state which looked at FIG. 1 from the side surface side. 図1の棒状弾性体に励起される縦振動及び捻り振動モードを説明するために示した平面図である。It is the top view shown in order to demonstrate the longitudinal vibration and torsional vibration mode excited by the rod-shaped elastic body of FIG. 図1の棒状弾性体に発生する屈曲振動を説明するために示した平面図である。It is the top view shown in order to demonstrate the bending vibration generate | occur | produced in the rod-shaped elastic body of FIG. 図1の凹部の作用を説明するために要部を拡大して示した平面図である。It is the top view which expanded and showed the principal part in order to demonstrate the effect | action of the recessed part of FIG. この発明の他の実施の形態に係る超音波モータの要部構成を拡大して示した一部断面図である。It is the partial cross section figure which expanded and showed the principal part structure of the ultrasonic motor which concerns on other embodiment of this invention. この発明の他の実施の形態に係る超音波モータの要部構成を拡大して示した一部断面図である。It is the partial cross section figure which expanded and showed the principal part structure of the ultrasonic motor which concerns on other embodiment of this invention. この発明の他の実施の形態に係る超音波モータの要部構成を拡大して示した一部断面図である。It is the partial cross section figure which expanded and showed the principal part structure of the ultrasonic motor which concerns on other embodiment of this invention. この発明の他の実施の形態に係る超音波モータの要部構成を拡大して示した一部断面図である。It is the partial cross section figure which expanded and showed the principal part structure of the ultrasonic motor which concerns on other embodiment of this invention. この発明の他の実施の形態に係る超音波モータの要部構成を拡大して示した一部断面図である。It is the partial cross section figure which expanded and showed the principal part structure of the ultrasonic motor which concerns on other embodiment of this invention.

符号の説明Explanation of symbols

9…凹部、10…棒状弾性体、101…第1の弾性部、102…第2の弾性部、103…溝部、11…積層型圧電素子、12…回転軸、13…駆動子、14…被駆動体、15…ばね部材、16…ばね押さえ部材、17…ナット部材、91,92,93,94,95…凹部、911,921,931,941,951…溝、912,922,932,942,952…隔壁。   DESCRIPTION OF SYMBOLS 9 ... Concave part 10 ... Rod-shaped elastic body 101 ... 1st elastic part 102 ... 2nd elastic part 103 ... Groove part, 11 ... Laminated piezoelectric element, 12 ... Rotary shaft, 13 ... Driver, 14 ... Covered Drive unit, 15 ... spring member, 16 ... spring pressing member, 17 ... nut member, 91, 92, 93, 94, 95 ... recess, 911, 921, 931, 941, 951 ... groove, 912, 922, 932, 942 , 952 ... Septum.

Claims (7)

棒状弾性体の側面に対向して配置された2個の積層型圧電素子の伸縮振動により、前記棒状弾性体に縦振動と捻り振動とを励起し、前記棒状弾性体の端面に設けられた駆動子に楕円振動を励起させて、該駆動子に対して前記棒状弾性体の端面に回転自在に支持された被駆動体を圧接配置して摩擦駆動する超音波モータであって、
前記棒状弾性体の側面に振動緩衝部を前記積層型圧電素子に対応して設けたことを特徴とする超音波モータ。
The longitudinal vibration and the torsional vibration are excited in the rod-like elastic body by the stretching vibration of the two laminated piezoelectric elements arranged facing the side surfaces of the rod-like elastic body, and the drive provided on the end surface of the rod-like elastic body An ultrasonic motor that excites elliptical vibration in a child and frictionally drives a driven member that is rotatably supported on an end face of the rod-like elastic body with respect to the driver;
An ultrasonic motor characterized in that a vibration buffer portion is provided on a side surface of the rod-shaped elastic body so as to correspond to the laminated piezoelectric element.
前記振動緩衝部は、前記棒状弾性体の前記積層型圧電素子を駆動子面に向けて投影した領域を含む位置に設けたことを特徴とする請求項1記載の超音波モータ。   2. The ultrasonic motor according to claim 1, wherein the vibration buffering portion is provided at a position including a region where the laminated piezoelectric element of the rod-shaped elastic body is projected toward a driver surface. 前記振動緩衝部は、前記棒状弾性体の捻り振動の腹を含む領域に設けたことを特徴とする請求項1記載の超音波モータ。   2. The ultrasonic motor according to claim 1, wherein the vibration buffer portion is provided in a region including an antinode of torsional vibration of the rod-like elastic body. 前記振動緩衝領域は、1個以上の凹部で形成されることを特徴とする請求項1乃至3のいずれか記載の超音波モータ。   The ultrasonic motor according to claim 1, wherein the vibration buffer region is formed by one or more recesses. 前記振動緩衝部は、複数の凹部が等間隔に形成されていることを特徴とする請求項1乃至4のいずれか記載の超音波モータ。   The ultrasonic motor according to claim 1, wherein the vibration buffer portion has a plurality of recesses formed at equal intervals. 前記振動緩衝部は、複数の凹部が不等間隔に形成されていることを特徴とする請求項1乃至4のいずれか記載の超音波モータ。   The ultrasonic motor according to claim 1, wherein the vibration buffer portion has a plurality of recesses formed at unequal intervals. 前記振動緩衝部を構成する凹部には、振動減衰材を埋設することを特徴とする請求項4乃至6のいずれか記載の超音波モータ。   The ultrasonic motor according to any one of claims 4 to 6, wherein a vibration damping material is embedded in the concave portion constituting the vibration buffer portion.
JP2008318923A 2008-12-15 2008-12-15 Ultrasonic motor Withdrawn JP2010142092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008318923A JP2010142092A (en) 2008-12-15 2008-12-15 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008318923A JP2010142092A (en) 2008-12-15 2008-12-15 Ultrasonic motor

Publications (1)

Publication Number Publication Date
JP2010142092A true JP2010142092A (en) 2010-06-24

Family

ID=42351703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008318923A Withdrawn JP2010142092A (en) 2008-12-15 2008-12-15 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JP2010142092A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109951103A (en) * 2019-04-09 2019-06-28 哈尔滨工业大学 A kind of the ultraprecise movement hexapod robot and its motivational techniques of Piezoelectric Driving

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109951103A (en) * 2019-04-09 2019-06-28 哈尔滨工业大学 A kind of the ultraprecise movement hexapod robot and its motivational techniques of Piezoelectric Driving

Similar Documents

Publication Publication Date Title
US5200665A (en) Ultrasonic actuator
US7911112B2 (en) Ultrasonic actuator
JP5184811B2 (en) Vibration type actuator
KR20070075307A (en) Exciting method for elastic vibration member and vibratory driving device
JP2009142014A (en) Ultrasonic motor
US8299682B2 (en) Ultrasonic motor
JP4119903B2 (en) Flat plate piezoelectric ultrasonic motor
JP5185716B2 (en) Ultrasonic motor
JP2007325466A (en) Driving apparatus
JPH099656A (en) Ultrasonic vibrator and ultrasonic motor
JP5290781B2 (en) Temporary fixing jig for ultrasonic motor, case unit, and preload adjustment method for ultrasonic motor
JP2010142092A (en) Ultrasonic motor
JP2011061894A (en) Ultrasonic motor
JP2011097702A (en) Ultrasonic motor
JP2010142091A (en) Ultrasonic motor
JPH09117168A (en) Supersonic motor
JP2008022662A (en) Ultrasonic motor drive unit
JP4565850B2 (en) Ultrasonic motor and lens device
JP5129184B2 (en) Ultrasonic motor
JP2010193591A (en) Ultrasonic motor
JP2011067001A (en) Ultrasonic motor
JP2011067002A (en) Ultrasonic motor
JP2007135267A (en) Ultrasonic motor
JP2009148068A (en) Ultrasonic motor
JP2010141996A (en) Ultrasonic motor

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20120306