JP2010133717A5 - - Google Patents
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- JP2010133717A5 JP2010133717A5 JP2008307094A JP2008307094A JP2010133717A5 JP 2010133717 A5 JP2010133717 A5 JP 2010133717A5 JP 2008307094 A JP2008307094 A JP 2008307094A JP 2008307094 A JP2008307094 A JP 2008307094A JP 2010133717 A5 JP2010133717 A5 JP 2010133717A5
- Authority
- JP
- Japan
- Prior art keywords
- glass
- glass sealing
- image data
- ring illumination
- sealing part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 claims description 45
- 238000007789 sealing Methods 0.000 claims description 29
- 238000005286 illumination Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 9
- 230000003287 optical Effects 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000010191 image analysis Methods 0.000 claims 6
- 230000004069 differentiation Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
Description
アイレット１２のガラス封止部についての検査は、従来は目視によって行っている。したがって、ガラス封止部の検査は非効率であるとともに、検査結果にばらつきがあるという問題があった。
ガラス封止部のガラスの充填状態を目視によらずに検査する方法としては、たとえば、レーザフォーカス式変位センサといった、基準位置からの高さ方向の変位を測定する装置を用いる方法がある。しかしながら、レーザフォーカス式変位センサのような、特定点における高さを検知する方法の場合は、ガラス封止部内で複数ポイントを測定する必要があり、正確に高さ測定をすることができるものの、測定が煩雑になるという問題がある。また、マイクロレンズを使用して測定することも可能であるが、装置が高価であるという難点がある。
The inspection about the glass sealing part of the eyelet 12 is conventionally performed by visual observation. Therefore, there is a problem that the inspection of the glass sealing portion is inefficient and the inspection results vary.
As a method for inspecting the glass filling state of the glass sealing portion without visual observation, for example, there is a method using an apparatus for measuring a displacement in the height direction from a reference position, such as a laser focus type displacement sensor. However, in the case of a method for detecting the height at a specific point, such as a laser focus type displacement sensor, it is necessary to measure a plurality of points in the glass sealing portion, and the height can be measured accurately. There is a problem that the measurement becomes complicated. Although it is possible to perform measurement using a microlens, there is a problem that the apparatus is expensive.
（撮像光学系のセッティング）
被検査体であるガラス端子２０の上方にリング照明部２４を配置し、リング照明部２４の中心線位置と同芯に撮像光学系３０を配置する構成としているのは、リング照明部２４の中央の開口２４ｂを通して、ガラス端子２０のガラス封止部をCCDカメラ２８によって視認できるようにするためである。
本実施形態においては、ガラス端子２０のガラス封止部にリング照明部２４にリング状に配置されている光源の像が写り込むように、いいかえればガラス封止部によって反射した光源の像がCCDカメラ２８によって視認される配置に撮像光学系３０を配置する。
(Imaging optical system settings)
The ring illumination unit 24 is arranged above the glass terminal 20 that is the object to be inspected, and the imaging optical system 30 is arranged concentrically with the center line position of the ring illumination unit 24. This is because the glass sealing portion of the glass terminal 20 can be visually recognized by the CCD camera 28 through the opening 24b.
In this embodiment, an image of the light source to the glass sealing portion is arranged in a ring in the ring illumination unit 24 copies of the glass terminal 20 interrupt useless image of the light source reflected by the glass sealing portion in other words the CCD The imaging optical system 30 is arranged in an arrangement visually recognized by the camera 28.
Claims (8)
前記被検査体の上方に配置され、前記被検査体を照明する、リング状に光源が配置されたリング照明部と、
該リング照明部の開口を通して、前記ガラス封止部に写り込む前記リング照明部の光源の画像とともに前記ガラス封止部を撮影する撮像光学系と、
該撮像光学系により撮影された画像データを解析し、前記ガラス封止部におけるガラスの表面状態を解析する画像解析部と
を備え、
前記画像解析部は、前記画像データを微分処理し、画像データの明るさに変換する手段と、前記画像データの明るさの度数分布を計測する手段とを備えていることを特徴とするガラス封止部の検査装置。 A support part for supporting an object to be inspected with a glass sealing part at an inspection position;
A ring illumination unit disposed above the object to be inspected and illuminating the object to be inspected, wherein a light source is disposed in a ring shape;
An imaging optical system for photographing the glass sealing part together with an image of the light source of the ring illumination part reflected in the glass sealing part through the opening of the ring illumination part;
Analyzing the image data photographed by the imaging optical system, and comprising an image analysis unit for analyzing the surface state of the glass in the glass sealing unit ,
The image analysis unit, the image data and the differential processing, glass sealing of the means for converting the brightness of the image data, characterized that you have a means for measuring the brightness histogram of the image data Stop part inspection device.
リング照明部によりガラス封止部を備える被検査体を照明し、撮像光学系を用いて、前記ガラス封止部に写り込む前記リング照明部の光源の画像とともに前記ガラス封止部を撮影する工程と、
画像解析部により、前記撮像光学系により撮影された画像データを解析し、前記ガラス封止部におけるガラスの表面状態を解析する工程とを備え、
前記撮像光学系は、前記ガラス封止部におけるガラスの表面位置の変位が、前記ガラス封止部に写り込む前記リング照明部の光源の画像のピント状態の変化としてとらえられるように設定され、
前記ガラスの表面状態を解析する工程においては、前記画像データの明るさの度数分布を計測する工程を備え、前記画像データの明るさの度数分布に基づいて前記ガラスの表面の状態を検知することを特徴とするガラス封止部の検査方法。 It is an inspection method for inspecting the surface state of glass provided in the glass sealing portion of an object to be inspected having a glass sealing portion,
Illuminating an object to be inspected having a glass sealing part with a ring illumination part, and using the imaging optical system, photographing the glass sealing part together with an image of the light source of the ring illumination part reflected in the glass sealing part When,
Analyzing image data captured by the imaging optical system by an image analysis unit, and analyzing the surface state of the glass in the glass sealing unit,
The imaging optical system is set so that the displacement of the surface position of the glass in the glass sealing part is captured as a change in the focus state of the image of the light source of the ring illumination part reflected in the glass sealing part,
The step of analyzing the surface state of the glass includes a step of measuring the frequency distribution of the brightness of the image data, and detecting the state of the surface of the glass based on the frequency distribution of the brightness of the image data. A method for inspecting a glass sealing portion characterized by the above.
円環状に光源を配置したリング照明部を使用することを特徴とする請求項４記載のガラス封止部の検査方法。 In the step of illuminating the object to be inspected by the ring illumination unit,
The method for inspecting a glass sealing part according to claim 4, wherein a ring illumination part in which light sources are arranged in an annular shape is used.
前記画像データの明るさの度数分布を計測する工程においては、前記微分処理を施した画像データについて度数分布を計測することを特徴とする請求項４または５記載のガラス封止部の検査方法。 In the step of analyzing the surface state of the glass by the image analysis unit, the step of differential processing the image data,
6. The method for inspecting a glass sealing portion according to claim 4 , wherein in the step of measuring the brightness frequency distribution of the image data, the frequency distribution is measured for the image data subjected to the differentiation process.
画像データの不要部分を除去する工程を備えることを特徴とする請求項６記載のガラス封止部の検査方法。 In the step of analyzing the glass surface state by the image analysis unit,
The method for inspecting a glass sealing portion according to claim 6, further comprising a step of removing unnecessary portions of the image data.
前記リング照明部により前記被検査体を照明する工程においては、円環状に光源を配置したリング照明部を使用し、
前記画像解析部によりガラスの表面状態を解析する工程においては、前記画像データを微分処理する工程と、前記画像データから前記リード及び前記アイレットの不要部分を除去する工程と、前記微分処理を施した画像データについて度数分布を計測する工程を備えることを特徴とする請求項４記載のガラス封止部の検査方法。 It is a case where a glass terminal provided with a glass sealing part in which a lead is glass-sealed in an eyelet is an inspection object,
In the step of illuminating the object to be inspected by the ring illumination unit, a ring illumination unit in which a light source is arranged in an annular shape is used,
In the step of analyzing the surface state of the glass by the image analysis unit, the step of differentiating the image data, the step of removing unnecessary portions of the lead and the eyelet from the image data, and the differentiation process were performed. The method for inspecting a glass sealing portion according to claim 4, further comprising a step of measuring a frequency distribution for the image data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008307094A JP5161743B2 (en) | 2008-12-02 | 2008-12-02 | Inspection device and inspection method for glass sealing part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008307094A JP5161743B2 (en) | 2008-12-02 | 2008-12-02 | Inspection device and inspection method for glass sealing part |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010133717A JP2010133717A (en) | 2010-06-17 |
| JP2010133717A5 true JP2010133717A5 (en) | 2011-11-24 |
| JP5161743B2 JP5161743B2 (en) | 2013-03-13 |
Family
ID=42345159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008307094A Active JP5161743B2 (en) | 2008-12-02 | 2008-12-02 | Inspection device and inspection method for glass sealing part |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5161743B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112019007244T5 (en) * | 2019-04-23 | 2021-12-30 | Yamaha Hatsudoki Kabushiki Kaisha | Component mounter |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61283857A (en) * | 1985-06-10 | 1986-12-13 | Narumi China Corp | Surface defect detection |
| JPS63131A (en) * | 1986-06-19 | 1988-01-05 | Shinko Electric Ind Co Ltd | Airtight terminal |
| JPH0760906B2 (en) * | 1987-02-27 | 1995-06-28 | 住友電気工業株式会社 | Optical device package |
| JPH0711415B2 (en) * | 1987-11-16 | 1995-02-08 | 東洋製罐株式会社 | Method and device for inspecting shape of container mouth having convex curved surface with specular gloss |
| JP3259398B2 (en) * | 1993-01-22 | 2002-02-25 | ソニー株式会社 | Inspection equipment for wire bonding |
| JP3327002B2 (en) * | 1994-11-07 | 2002-09-24 | 株式会社村田製作所 | Method for measuring resin content of electronic components |
| JP4633245B2 (en) * | 2000-11-06 | 2011-02-16 | 住友化学株式会社 | Surface inspection apparatus and surface inspection method |
-
2008
- 2008-12-02 JP JP2008307094A patent/JP5161743B2/en active Active
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