JP2010133318A - Tube unit, control unit, and micropump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tube unit, a control unit, and a micropump composed of the detachable tube unit and control unit and achieving a reduction in thickness. <P>SOLUTION: This micropump 10 includes: the tube unit 11 having an elastic tube 50 partially disposed in an arcuate shape; and the control unit 12 having fingers 40-46 radially disposed from the center direction of the arcuate shape of the tube 50, a cam 20 pressing the fingers 40-46, a rotor 140 applying rotational force to the rotor 140, an oscillator 130 having a projection 133a abutting on the rotor 140, and a control circuit section 30. The tube unit 11 is detachably attached to the control unit 12 in a substantially horizontal direction with respect to the rotational plane of the cam 20. The oscillator 130 is oscillated by applying alternating voltage to the oscillator 130 from the control circuit section 30, rotational force is repeatedly applied from the projection 133a to the rotor 140, and the cam 20 sequentially presses the fingers 40-46 from the fluid inflow side of the tube 50 to the fluid outflow side thereof, thereby transporting fluid. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a tube unit, a control unit, and a micropump composed of these, in which the tube unit and the control unit are detachable.

  There is a peristaltic pump as a device for transporting liquid at low speed. As a peristaltic drive pump, a step motor is used as a drive source, a rotor with a plurality of rollers is rotated, and the rotor rotates along a flexible tube while rolling the plurality of rollers to suck and discharge liquid. There exists a structure which performs (for example, patent document 1).

  This pump is configured by stacking a motor module having a step motor and a pump module having a plurality of rollers, a motor, and a tube.

Japanese Patent No. 3177742

  Since the pump according to Patent Document 1 described above is configured by stacking a motor module and a pump module, it is difficult to reduce the thickness.

  Further, when the step motor is reduced in size, the driving torque is reduced. Therefore, it is necessary to increase the rotational torque of the rotor using a reduction mechanism (reduction gear mechanism) having a large reduction ratio. Therefore, a multi-stage reduction gear mechanism is used, resulting in an increase in size and a problem of increased loss due to deceleration.

  Further, it is known that the step motor generates electromagnetic noise, and it is considered that the step motor itself is affected by the electromagnetic noise of the surrounding equipment, in addition to the adverse influence on the surrounding equipment.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] A micropump according to this application example includes a tube unit having a tube partly arranged in an arc shape and having elasticity, a tube guide frame for holding the tube, and an arc shape of the tube. A plurality of fingers arranged radially from the center direction of the tube, a cam that sequentially presses the plurality of fingers from the fluid inflow side to the outflow side of the tube, a rotor that applies a rotational force to the cam, and a piezoelectric element. And a control unit having a projecting portion that abuts against the rotor at a longitudinal end, a reservoir that communicates with an inlet portion of the tube, and a control circuit that inputs a drive signal to the piezoelectric element And a power supply for supplying electric power to the control circuit unit, and the tube unit is substantially water with respect to the rotation plane of the cam. The vibrator is vibrated by applying an AC voltage to the piezoelectric element, and a rotational force is repeatedly applied to the rotor from the protrusion, and the cam causes the fingers to flow into the plurality of fingers. The fluid is transported by repeatedly pressing the tube from the side to the outflow side and repeatedly closing and releasing the tube.

  According to this application example, the rotor is rotated using the vibrating body as the rotational drive source of the cam. Although the details will be described in the embodiment, the rotor driven by the vibrating body has a large rotational torque, so that a reduction gear mechanism is not required as in the prior art, and a connection mechanism between the motor module and the pump module is also provided. It becomes unnecessary and the structure can be simplified.

  Further, by configuring the tube unit and the control unit so as to be mounted in a substantially horizontal direction with respect to the rotation surface of the cam, it is possible to reduce the thickness as compared with the stacked structure of the prior art.

  In addition, since the tube unit and the control unit are detachable, the low-cost tube unit with a small number of components, including the tube that comes in direct contact with the chemical solution, is used as a single-use unit. If used repeatedly, the running cost can be reduced.

  Also, if the tube unit is mounted in the horizontal direction with respect to the control unit, a plurality of fingers can be brought into the tube pressing state, so that a connecting mechanism is required between the motor module and the pump module as in the prior art. Therefore, the structure can be simplified and the assemblability can be improved.

  Furthermore, the vibrating body vibrates by applying an AC voltage to the piezoelectric element and rotates the rotor, so that no electromagnetic noise is generated and the surrounding devices are not adversely affected. In addition, it is not affected by electromagnetic noise generated by surrounding equipment. Therefore, it is possible to avoid the risk of electromagnetic noise, particularly in the medical field.

  Application Example 2 In the micropump according to the application example described above, it is preferable that the tube unit is inserted into a space provided in the control unit.

  According to such a configuration, since the outer shell of the control unit has a case function, a case for housing the tube unit and the control unit is not necessary, the structure can be simplified, and the thickness can be further reduced.

  Moreover, since the junction part of the outer periphery of a tube unit can be reduced, the airtightness (waterproofness) inside a tube unit and a control unit can be improved.

  Application Example 3 In the micropump according to the application example described above, it is preferable that the rotor has a disk shape, and the protruding portion is disposed so as to contact an outer peripheral side surface of the rotor.

  In this application example, the rotor is rotated by abutting the protrusion of the vibrating body on the outer peripheral surface of the rotor. Although details will be described in the embodiment, the vibration of the vibrating body can be converted into rotation with high efficiency, and the rotational torque of the rotor can be reduced when the same vibrating body is vibrated under the same conditions by contacting the rotor with a large diameter. Since it can be increased, stable driving can be continued.

  Application Example 4 In the micropump according to the application example described above, it is preferable that the rotor has a ring shape, and the protruding portion is disposed so as to abut on a ring-shaped inner peripheral side surface of the rotor.

  In this way, since the vibrating body is disposed inside the outer diameter of the rotor, the micropump can be reduced in size.

  Application Example 5 In the micropump according to the application example described above, the rotor is formed inside a ring-shaped recess formed in one plane of the cam, and the protrusion is an inner peripheral side surface of the recess. It is preferable that it is arrange | positioned so that it may contact | abut.

  According to such a configuration, the rotor and the cam can be integrally formed. Therefore, the structure can be simplified and the size can be reduced.

  Application Example 6 In the micropump according to the application example described above, it is preferable that the control circuit unit, the vibrating body, the cam, and the plurality of fingers are dispersedly arranged at positions that do not overlap each other in a planar manner.

  In this way, since the control circuit unit and the vibrating body do not overlap the cam and the finger in plan view, the control unit can be thinned, and the micropump can be further thinned.

  In addition, since the small-sized vibrating body is dispersedly arranged with the plurality of fingers and cams, the assembling property can be improved.

  Application Example 7 In the micropump according to the application example described above, it is preferable that a speed reduction mechanism or a speed increase mechanism is provided between the rotor and the cam.

  Thus, by providing the speed reduction mechanism or speed increasing mechanism, it is possible to change the rotational speed of the cam while keeping the rotational speed of the rotor constant. That is, the amount of fluid flow can be adjusted as appropriate.

  Application Example 8 In the micropump according to the application example described above, the tube guide frame includes a tube guide groove into which the tube is inserted and a tube holding portion for holding the tube in the tube guide groove. It is preferable.

  The micropump transports fluid by repeatedly closing and releasing the tube with a plurality of fingers. Therefore, in the range where the tube is pressed by the finger, the position of the tube must be accurately regulated.

  Most of the tube can regulate the position of the tube accurately by regulating the position in the plane direction by the tube guide groove and holding the range in which the tube is pressed by the finger with the tube holding part.

  Application Example 9 In the micropump according to the application example described above, it is preferable that the tube holding portion is a tube holding member provided along an arc shape of the tube.

  When it is difficult to form a continuous side wall on the finger side of the tube guide groove due to downsizing, the tube position can be regulated by providing a tube holding member.

  If the tube holding member is made of metal, it can be formed into a thin plate shape, and therefore can be disposed in a narrow space while having rigidity.

  Further, if the tube holding member is a sheet having spreadability, there is no load that extends when the tube is pressed by the finger and prevents movement of the finger, and follows the movement of the finger in the axial direction. Therefore, a continuous tube guide portion can be formed on the finger side.

  Application Example 10 In the micropump according to the application example described above, when the tube unit is mounted on the control unit, the guide portion that substantially matches the arc-shaped center of the tube and the rotation center of the cam is the tube. It is preferable that the unit and the control unit are provided on mutually opposing wall surfaces.

  The micropump of this application example is configured to press-close a tube by pressing a plurality of fingers by rotation of a cam. Therefore, it is necessary to match the arc center of the arc shape of the tube with the rotation center of the cam.

  Therefore, when the tube unit is mounted on the control unit, the center of the arcuate shape of the tube and the rotation center of the cam can be matched by providing the guide portions on both sides, and no dedicated position restricting member is provided. However, all of the plurality of fingers can reliably perform tube pressure closing.

  Application Example 11 In the micropump according to the application example described above, when the tube unit is mounted on the control unit, a detection unit that detects that the arc-shaped center of the tube and the rotation center of the cam substantially coincide with each other. Is preferably provided between the tube unit and the control unit.

  With such a configuration, the drive unit can be driven when the detector detects that the arc center of the arc shape of the tube coincides with the rotation center of the cam. Accordingly, since all of the plurality of fingers are driven in a state where they have the same pressure closing amount, the fluid can be discharged at a desired flow rate per unit time.

  Application Example 12 In the micropump according to the application example, the micropump includes a lid member for fixing the tube unit to the control unit, and the arc shape of the tube is between the lid member and the tube unit. It is preferable that an elastic member for biasing the tube unit to the control unit is provided so that the center and the rotation center of the cam substantially coincide with each other.

  When the tube unit is fixed to the control unit using a lid member, a horizontal gap may be generated between the tube unit and the control unit due to dimensional variations in the components, and the tube cannot be closed with fingers. .

  Therefore, by urging the tube unit toward the control unit by the elastic member, the guide unit of the tube unit is brought into contact with the guide unit of the control unit described above, and the arc-shaped center of the tube and the rotation center of the cam Are substantially matched, and the tube can be reliably closed by a plurality of fingers.

  Application Example 13 In the micropump according to the application example, the micropump includes finger guide holes for mounting each of the plurality of fingers, and each of the plurality of fingers is mounted in the finger guide hole. It is desirable to have a shaft portion and a tube-shaped tube pressing portion larger than the finger guide hole, and to include a drop prevention mechanism for preventing the plurality of fingers from dropping off from the finger guide hole in the axial direction.

  Since the finger guide hole penetrates and the finger can freely move back and forth, the finger may fall out of the finger guide hole before mounting the tube unit. Therefore, by providing a drop prevention mechanism, it is possible to prevent the fingers from falling off.

  Application Example 14 In the micropump according to the application example, the tube guide frame is provided with a tube restriction wall that restricts movement of the tube when pressed by the plurality of fingers, and the tube and the tube restriction. It is preferable that an elastic member is provided between the walls.

According to such a structure, when pressing a tube with a finger, an excessive pressing force is absorbed by an elastic member. Thereby, durability of a tube can be improved rather than the structure which presses a tube directly to a tube guide wall.
In addition, it is more effective if the friction coefficient of the elastic member is made small.

  Application Example 15 In the micropump according to the application example described above, it is preferable that a part or all of the outlines of the tube unit and the control unit are transparent.

By making the outer shells of the tube unit and the control unit transparent, it is possible to visually recognize the internal components or the engagement relationship between the components and the driving state. From this, it is possible to detect whether it is in a normal state or where there is a defect. Further, when the reservoir is housed inside, the amount of liquid in the reservoir can be visually confirmed.
In addition, the range to be transparent may be a range of a portion to be visually recognized.

  Application Example 16 In the micropump according to the application example described above, it is preferable that either one or both of the power source and the reservoir are accommodated in the tube unit.

  It is conceivable that the tube deteriorates when it is repeatedly closed and opened over a long period of time. Therefore, it is desirable to replace the tube when driven for a certain period. In addition, when a small button battery or the like is adopted as a power source, it may be considered that the battery capacity is insufficient during use. Therefore, when the tube is replaced after being used for a long period of time, if the battery is replaced with the tube as a tube unit, it is possible to prevent the battery capacity from being insufficient during the period of use.

  Further, it is conceivable that the chemical solution stored in the reservoir is insufficient when using the micropump. Therefore, by making the reservoir detachable from the tube, the micropump can be used for a long period of time if the reservoir containing the chemical solution is connected to the tube.

  In addition, by providing both the power supply and the reservoir in the tube unit, all the essential functions necessary for driving the micropump can be accommodated, and the size can be reduced, and there is no element protruding from the outer shell, so handling is easy. In addition, it is suitable for use in a living body.

  Furthermore, since the battery can be replaced as a tube unit in accordance with the replacement of the reservoir or the replacement of the tube, the reliability can be further improved.

  When the battery is provided outside the micropump, a long lead for connection and a battery case are required, but according to this application example, there is an advantage that they are not necessary.

Application Example 17 In the micropump according to the application example described above, it is desirable that the reservoir includes a port for inflowing or sealing a fluid therein.
Here, for example, a septum or the like can be adopted as the port.

  By providing a septum in the reservoir, it is possible to easily inject additional fluid into the reservoir while being connected to the tube.

  Application Example 18 In the micropump according to the application example described above, it is preferable that an air vent filter for blocking the passage of bubbles is provided in a communication portion between the reservoir and the tube.

  It is conceivable that air is dissolved in the liquid stored in the reservoir, and the dissolved air gathers with time and becomes bubbles. When a fluid is a chemical solution and is injected into a living body, if it is injected including bubbles, an influence that cannot be overlooked may occur.

  Therefore, by providing an air vent filter that allows liquid to pass through the communication part between the reservoir and the tube and blocks the passage of bubbles, it is possible to suppress the intrusion of bubbles into the living body, thereby improving safety. it can.

  Application Example 19 A control unit according to this application example is attachable to and detachable from any of the tube units of the above application example, and includes a plurality of fingers arranged radially from the center direction of the arc shape of the tube, A cam that sequentially presses a plurality of fingers from the fluid inflow side to the outflow side of the tube, a rotor that applies a rotational force to the cam, a piezoelectric element, and a protrusion that abuts against the rotor at a longitudinal end. And a vibrating body.

  The control unit is configured to include elements related to driving such as a vibrator as a driving source, a cam, a plurality of fingers, and a control circuit unit. Therefore, driving confirmation (inspection related to driving, etc.) can be performed in the state of the control unit. Moreover, the micropump can be immediately put into a use state by slidingly mounting the tube unit.

  [Application Example 20] A tube unit according to this application example is detachable from any of the control units of the above application examples, and a part of the tube unit is arranged in an arc shape and has elasticity, and holds the tube. And a tube guide frame.

  According to the configuration of this application example, since the tube is maintained in the open state in the tube unit state, it is possible to prevent the discharge accuracy from being lowered due to the deterioration of the restoring force accompanying the holding in the tube pressure closed state. it can.

  In addition, it is conceivable that the restoring force of the tube is deteriorated by repeating the capping and opening of the tube for a long time, but the tube can be easily replaced as a tube unit after use for a certain period of time.

  Further, since the tube unit is constituted by the tube and the tube guide frame, the cost can be made much lower than that of the control unit having the above-described configuration. Furthermore, when injecting a chemical solution into a living body, it is preferable to dispose a tube that comes into contact with blood, body fluid, or chemical solution. Therefore, if the tube unit including the tube is used disposable, the running cost can be reduced.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 10 show the micropump of Embodiment 1, FIGS. 11 and 12 are Embodiment 2, FIG. 13 is Embodiment 3, FIG. 14 is Embodiment 4, FIG. 15 is Embodiment 5, and FIG. 6, 17 and 18 show the seventh embodiment, FIG. 19 shows the eighth embodiment, and FIGS. 20 and 21 show the ninth embodiment.
Note that the drawings referred to in the following description are schematic views in which the vertical and horizontal scales of members or portions are different from actual ones for convenience of illustration.
(Embodiment 1)

  FIG. 1 is a schematic plan view showing the micropump according to the first embodiment, and FIG. 2 is a schematic front view. 1 and 2, the micropump 10 is slidably inserted into the tube unit 11 from the opening on the left side surface of the control unit 12 and fixed to the control unit 12 by a fixing screw 90 by a fixing frame 13 as a lid member. ing.

  The tube unit 11 includes a tube 50 that is partially arranged in an arc shape and has elasticity, a first tube guide frame 17 and a second tube guide frame 18 that serve as a tube guide frame for holding the tube 50, and the flow of the tube 50. The inlet portion 52 communicates with the reservoir 14 that contains the fluid. Hereinafter, the fluid will be described as a liquid such as a chemical solution.

  Moreover, the tube unit 11 has the fingers 40-46 arrange | positioned radially from the center direction of the circular arc shape of the tube 50 at equal intervals. The fingers 40 to 46 are held by the first tube guide frame 17 and the second tube guide frame 18 so as to be able to advance and retreat in the axial direction.

  The control unit 12 includes a cam 20, a rotor 140 that is coaxially fixed with the cam 20, a vibrating body 130 that applies a rotational force to the rotor 140, and a control circuit that performs driving control by inputting a driving signal to the vibrating body 130. It has the part 30 and the some finger 40-46, and is comprised.

  The cam 20, fingers 40 to 46, the vibrating body 130, and the control circuit unit 30 are supported in a space 100 formed by a first machine casing 15 and a second machine casing 16 as a machine casing.

  One end of the tube 50 is an outflow port 53 that protrudes outside through the fixed frame 13 and discharges liquid from the reservoir 14 to the outside.

  A part of the reservoir 14 is provided with a septum 95 as a port for injecting or sealing a liquid into the reservoir 14. The septum 95 protrudes from the reservoir 14 so as not to protrude from the fixed frame 13.

Then, the structure of the tube unit 11, the control unit 12, and the fixed frame 13 and an assembly method are demonstrated.
3 is an exploded plan view of the micropump, and FIG. 4 is an exploded front view. 3 and 4, (a) shows the fixed frame 13, (b) shows the tube unit 11, and (c) shows the control unit 12.

  As shown in FIGS. 3 and 4, in the control unit 12, spaces 100 and 110 are constituted by a first machine casing 15 and a second machine casing 16. In the closed space 100, the cam 20 (including the rotor 140), the vibrating body 130, and the control circuit unit 30 are disposed. A space 110 having an opening on one side is a space into which the tube unit 11 is inserted.

  The fingers 40 to 46 are attached to the finger guide holes 85 formed by the first machine frame 15 and the second machine frame 16 that penetrate through the walls partitioning the space 100 and the space 110, and one end thereof is on the space 100 side. It protrudes and contacts the cam 20. Further, the other end portion projects from the space 110 side, and the tube 50 is closed when the tube unit 11 is inserted.

  The tube unit 11 is inserted into the space 110 of the control unit 12 from the left side in the state in which the tube 50 and the reservoir 14 are communicated and held by the first tube guide frame 17 and the second tube guide frame 18. Is done.

  The cam 20 rotates about the rotation center P. Accordingly, the tube unit 11 is inserted into the control unit 12 in parallel with the rotation plane of the cam 20.

  Further, a packing 97 is fitted in the vicinity of the fixed frame 13 side of the tube unit 11 along the outer peripheral surface, and the space 110 is sealed in a state where the tube unit 11 is inserted into the control unit 12.

  The tube unit 11 is pushed into the control unit 12 (space 110) until the arc-shaped (concave) wall surface 17a comes into contact with the wall surface 15a protruding in the arc shape of the control unit 12. The wall surfaces 15a and 17a are formed in concentric circles with the rotation center P of the cam 20 as the center.

  Here, when the wall surface 15a and the wall surface 17a are in contact with each other, the control unit side end portions 17k and 17m of the tube unit 11 are dimensioned so that a gap is formed between the inner side walls 15b and 15c of the control unit 12. (See also FIG. 5).

  This is because the wall surface 15a and the wall surface 17a are reliably brought into contact with each other so that the arc center of the arc-shaped portion of the tube 50 (at least the range pressed by the fingers 40 to 46) coincides with the rotation center P of the cam 20.

  After the tube unit 11 is inserted into the control unit 12, the fixed frame 13 is attached from the tail direction of the tube unit 11. Specifically, a fixing screw 90 is inserted into the through holes 13 d and 13 e opened in the fixing frame 13 and screwed and fixed to a screw hole (not shown) provided in the first machine frame 15 of the control unit 12. .

  The outlet part 53 of the tube 50 and the septum 95 provided in the reservoir 14 protrude from the tube unit 11, and when the fixed frame 13 is fixed, the tube 50 is the tube insertion hole 13 a and the septum 95 is the septum insertion hole. 13b is inserted. The outflow port 53 extends to the outside of the fixed frame 13.

  A protrusion 96 is formed at the end of the first tube guide frame 17. The protrusion 96 is used when the tube unit 11 is extracted from the control unit 12. The protrusion 96 is accommodated in a recess 13 c formed in the fixed frame 13.

  Next, the configuration and operation of each element of the micropump 10 assembled as described above will be described with reference to the drawings.

5 to 7 show the micropump according to the present embodiment and a part thereof, FIG. 5 is a plan view, FIG. 6A is a cross-sectional view showing the A-P-A section of FIG. (B) is sectional drawing which shows the FF cut surface of (a), FIG. 7 is a fragmentary sectional view which shows the holding structure of a tube. First, the configuration of the control unit 12 will be described with reference to FIGS.
FIG. 5 is a perspective view of the second machine casing 16 and the second tube guide frame 18.

  The control unit 12 is a cam in which the center of the arc shape of the tube 50 and the rotation center P substantially coincide with each other when the tube unit 11 is inserted and attached to the tube unit 11 in a plan view. 20.

  A plurality of fingers 40 to 46 that are interposed between the arc-shaped portion of the tube 50 and the cam 20 and are radially arranged from the rotation center P at equal intervals, and a disk shape that transmits the rotational force to the cam 20. The rotor 140, the vibrating body 130 disposed so that the protrusion 133 a abuts on the outer peripheral side surface of the rotor 140, and the control circuit unit 30.

  The cam 20 and the rotor 140 are fixed to the cam shaft 75. Therefore, the cam 20 and the rotor 140 are configured to rotate integrally with the rotation center P as a common rotation axis.

  As shown in FIG. 5, the control circuit unit 30 and the vibrating body 130 are distributed and disposed at positions that do not overlap the cam 20 and the fingers 40 to 46 in a plan view.

  The cam 20 has irregularities in the outer peripheral direction, and finger pressing surfaces 21a to 21d are formed on the outermost peripheral portion. The finger pressing surfaces 21a to 21d are formed on concentric circles equidistant from the rotation center P.

  Moreover, the circumferential pitch and outer shape of the finger pressing surface 21a and the finger pressing surface 21b, the finger pressing surface 21b and the finger pressing surface 21c, the finger pressing surface 21c and the finger pressing surface 21d, and the finger pressing surface 21d and the finger pressing surface 21a Are equally formed. Moreover, the pitch between each finger pressing surface is equal.

  Each of the finger pressing surfaces 21 a to 21 d is formed with a concentric circular arc portion 23 centering on the finger pressing slope 22 and the rotation center P. The arc portion 23 is provided at a position where the fingers 40 to 46 are not pressed.

  In addition, one end of each of the finger pressing surfaces 21a, 21b, 21c, and 21d and the arc portion 23 are connected by a linear portion 24 that extends from the rotation center P.

  The fingers 40 to 46 can advance and retreat along finger guide holes 85 provided corresponding to the respective fingers, are pressed outward by the cam 20, and press the tube 50 to close the liquid flow portion 51. Occlude. The center positions of the fingers 40 to 46 in the cross-sectional direction substantially coincide with the center of the tube 50.

  Next, a cross-sectional configuration of the control unit 12 will be described with reference to FIG. The first machine casing 15 and the second machine casing 16 are stacked on each other, and their peripheral portions are closely fixed by a plurality of fixing screws 91 (see FIG. 5).

  In a state where the first machine casing 15 and the second machine casing 16 are fixed, a space 100 is formed therein, and the cam 20, the rotor 140, the vibrating body 130, and the control circuit unit 30 are disposed in the space 100. ing.

  The cam shaft 75 is pivotally supported by a bearing 114 provided on the second machine casing 16 and a bearing 115 provided on the first machine casing 15. The insertion holes of the bearings 114 and 115 of the first machine casing 15 and the second machine casing 16 do not penetrate.

  A groove 141 is formed along the rotational direction on the outer peripheral side surface of the rotor 140, and the inner side surface of the groove 141 is a contact surface 142 with the vibrating body 130.

  The vibrating body 130 is disposed substantially at the center in the cross-sectional direction of the groove 141 of the rotor 140, and the end of the reinforcing plate 133 is fixed to the fixed shaft 138 by a fixing screw 93. The configuration and operation of the vibrating body 130 will be described later with reference to FIGS.

  A circuit board 150 is provided on the inner surface of the first machine casing 15 (the bottom surface of the space 100), and a connection pattern (not shown) is formed on the surface thereof. The control circuit unit 30 is connected and fixed to the upper surface of the circuit board 150.

  The control circuit unit 30 includes a power supply circuit, an oscillation circuit, and the like (both not shown). The power supply circuit is connected to electrodes of a battery (not shown) as a power supply via the connection pattern, and the oscillation circuit is connected to a plurality of electrodes of the vibrating body 130.

  The fingers 40 to 46 are mounted in finger guide holes 85 that penetrate the space 100 and the space 110 (see FIG. 2) of the control unit 12 radially at equal intervals from the rotation center P direction. Since the fingers 40 to 46 are formed in the same shape, the finger 43 will be described as an example.

  As shown in FIG. 6B, the finger guide hole 85 is configured by forming a substantially U-shaped groove 15 h in the first machine frame 15 and sealing the upper opening in the figure with the second machine frame 16. Is done.

  After the shaft 43a is mounted in the groove 15h from above the opening, the finger 43 is mounted on the first machine frame 15 from above so that the position in the cross-sectional direction is regulated. In addition, in the state of the control unit 12, you may insert in the finger guide hole 85 from the tube unit 11 side (space 110 side).

  The finger 43 includes a cylindrical shaft portion 43a, a bowl-shaped tube pressing portion 43c provided at one end portion of the shaft portion 43a, a cam contact portion 43b whose other end portion is rounded into a hemisphere, It is composed of The fingers 40 to 46 can advance and retreat in the axial direction along the finger guide holes 85.

Next, the configuration of the tube unit 11 will be described with reference to FIGS.
The tube unit 11 includes a tube 50 that is partially arc-shaped and has elasticity, a first tube guide frame 17 and a second tube guide frame 18 that serve as a tube guide frame for holding the tube 50, and the flow of the tube 50. The inlet portion 52 is composed of a reservoir 14 that communicates with and contains a fluid.

  The tube 50 is mounted in a tube guide groove 17 c formed so that the range pressed by the fingers 40 to 46 is concentric with the rotation center P of the cam 20.

  The inlet portion 52 of the tube 50 communicates with the reservoir 14, and the other end is an outlet portion 53 that extends through the tube insertion hole 13 a of the fixed frame 13.

  The tube 50 is substantially entirely mounted in the tube guide groove 17c so that the planar shape and the planar position are regulated, and a protrusion as a tube holding portion is formed on a part of the inner side wall of the tube guide groove 17c. Regulates upward lifting.

  FIG. 7 is a partial cross-sectional view showing a part of the above-described protrusion. 7 exemplifies and explains the protrusions between the fingers 45 and 46 among the protrusions between the fingers 40 to 46 adjacent to each other (see also FIG. 5).

  In the tube guide groove 17c, it is difficult to form a continuous side wall on the finger side (cam 20 side) because the fingers 45 and 46 advance and retreat. Therefore, a tube guide side wall 17f is provided between the finger 45 and the finger 46 as a protrusion having a width that does not prevent the finger from advancing and retreating, and the protrusion protrudes to an upper part of the tube 50 above the tube guide side wall 17f. 17e is formed.

  Thus, by providing the tube guide side wall 17f and the protrusion 17e between the fingers, the position of the tube in the plane direction and the suppression of the floating are performed in the range where the fingers 40 to 46 are disposed.

  In the present embodiment, as shown in FIG. 5, a protrusion 17h similar to the protrusion 17e is provided at a position close to the outlet 53 of the tube 50 and a position close to the inlet 52, so that the second tube guide is provided. Until the frame 18 is mounted, the lifting of the tube 50 in a place other than the arc-shaped portion is restricted.

  In a state where the tube 50 and the reservoir 14 are mounted on the first tube guide frame 17, the first tube guide frame 17 and the second tube guide frame 18 are fixed using a fixing screw 92 by bringing their joint surfaces into close contact with each other. To do.

  The tube unit 11 configured as described above is slidably inserted into a space 110 (see FIG. 4) formed in the control unit 12.

  In the vicinity of the outlet portion 53 of the tube 50, the first tube guide frame 17 and the second tube guide frame 18 are fixed, and the space between the tube 50 is sealed using packing or adhesion. By doing in this way, the inside of the tube unit 11 becomes a sealed structure.

In addition, a packing 97 is fitted on the outer periphery of the tube unit 11 in the vicinity of the fixed frame 13, the inside of the tube unit 11 is inserted into the control unit 12, the inside is a sealed space, and the micropump 10 is waterproof. And it has a dustproof structure.
If the micropump 10 is not waterproof, the packing 97 is not necessary.

  Furthermore, a tube regulating wall 17d formed by a recess along the tube guide groove 17c is formed in at least a range where the fingers 40 to 46 press the tube 50 in the tube guide groove 17c.

  An elastic member 60 is provided in the recess. That is, the elastic member 60 is provided between the tube restriction wall 17d and the tube 50. The elastic member 60 serves as a damper when the tube 50 is closed by the fingers 40 to 46 so that the tube 50 does not deteriorate. In addition, the elastic member 60 has an elastic force necessary for tube closing. Moreover, it is more preferable to make the coefficient of friction with the tube 50 small.

  An air vent filter 65 as a communication member is provided at a communication portion between the tube 50 and the reservoir 14. Inside the air vent filter 65, a filter having a lyophilic property and forming fine holes is provided. This filter passes liquid and blocks the passage of bubbles.

  The pores formed in the filter are in the range of 0.1 to 1 μm and allow the liquid to pass therethrough and suppress the intrusion of bubbles of 0.1 μm or more or 1 μm or more generated in the reservoir 14 into the tube 50.

  As shown in FIGS. 5 and 6, a protrusion 17b is formed on the outer surface of the base portion (on the fixed frame 13 side) of the first tube guide frame 17, and a protrusion 17n is formed on the outer surface of the tip portion. . Further, protrusions 18 a and 18 b are formed on the outer surface of the base portion and the tip portion of the second tube guide frame 18.

  In a state where the first tube guide frame 17 and the second tube guide frame 18 are joined, the projections 17b and 18a become continuous ring-shaped projections, and the projections 17n and 18b become continuous ring-shaped projections. .

  The tube unit 11 is slid and attached to the control unit 12. At this time, by providing the projections 17b, 17n, 18a, and 18b, the positional accuracy of the control unit 12 and the tube unit 11 is improved, and at the time of insertion. Or the resistance at the time of extraction is reduced.

  In addition, a protrusion 96 having a groove 96a is formed on the tail portion (on the fixed frame 13 side) of the tube unit 11. The protrusion 96 is used when the tube unit 11 is extracted from the control unit 12.

  Subsequently, liquid transport of the micropump 10 according to the present embodiment will be described. First, the configuration and operation of the vibrating body 130 will be described with reference to FIGS.

  FIG. 8 is a perspective view showing the configuration of the vibrating body. As shown in FIG. 8, the vibrating body 130 has a substantially rectangular thin plate shape. In the vibrating body 130, a plate-like piezoelectric element 134 is formed on the surface of the reinforcing plate 133, and electrodes 131a, 131b, and 131c are laminated on the surface of the piezoelectric element 134.

  A plate-like piezoelectric element 135 is in close contact with the back surface of the reinforcing plate 133, and an electrode 132 is laminated on the surface of the piezoelectric element 135. The electrode 131a is formed at the center in the width direction of the piezoelectric element 134 over the entire length direction, and the electrodes 131b and 131c are disposed diagonally across the electrode 131a.

  In addition, although illustration is abbreviate | omitted, the electrode 132 is formed so that it may become plane symmetrical with respect to electrode 131a, 131b, 131c on both sides of the reinforcement board 133.

  The material of the piezoelectric elements 134 and 135 is not particularly limited, and lead zirconate titanate (PZT), crystal, lithium niobate, barium titanate, lead titanate, lead metaniobate, polyvinylidene fluoride, lead zinc niobate , Lead scandium niobate and the like can be used.

  The reinforcing plate 133 has a function as a common electrode for the piezoelectric elements 134 and 135 and a function to reinforce the entire vibrating body 130, and prevents the vibrating body 130 from being damaged by an excessive amplitude or an external force. Although it does not specifically limit as a material of the reinforcement board 133, For example, it is desirable that they are metal materials, such as stainless steel, aluminum or an aluminum alloy, titanium or a titanium alloy, copper or a copper-type alloy.

  The piezoelectric elements 134 and 135 are preferably thicker than the reinforcing plate 133. Thereby, the vibrating body 130 can be vibrated with higher efficiency.

  The piezoelectric elements 134 and 135 repeatedly expand and contract in the longitudinal direction when an AC voltage is applied, and accordingly, the reinforcing plate 133 repeatedly expands and contracts in the longitudinal direction.

A protrusion 133 a is integrally formed at the longitudinal end of the reinforcing plate 133. As shown in FIGS. 5 and 6, the vibrating body 130 is disposed such that the protrusion 133 a contacts the outer peripheral side surface (contact surface 142) of the rotor 140.
In addition, the protrusion part 133a is provided in the position (corner part in the structure of illustration) shifted | deviated from the center part (centerline G: refer FIG. 9) of the reinforcement board 133. FIG.

  In addition, a pair of arm portions 133b are provided on both sides of the center of the reinforcing plate 133 in the length direction, and a fixed portion 133c is formed at the tip of the arm portion 133b. The vibrating body 130 is fixed to the first machine casing 15 by using the fixing screw 93 on the fixing shaft 133 (see FIGS. 5 and 6). That is, the vibrating body 130 is supported by the arm portion 133b. Thereby, the vibrating body 130 can vibrate freely, and vibrates with a relatively large amplitude.

Next, the operation of the vibrating body 130 will be described with reference to the drawings.
FIG. 9 is a partial plan view schematically showing the action of the vibrating body, and FIG. 10 is an explanatory view schematically showing the movement of the protrusion. As shown in FIG. 8, when an AC voltage is applied between the electrodes 131a, 131b, and 131c and the reinforcing plate 133, the piezoelectric element 134 in the lower surface area of the electrode 131a expands and contracts in the longitudinal direction as indicated by an arrow X, Perform longitudinal vibration.

  The piezoelectric elements 134 in the lower surface range of the electrodes 131b and 131c also expand and contract in the longitudinal direction, but are arranged in the diagonal direction of the piezoelectric elements 134, and thus perform bending vibration as indicated by the arrow Y.

  In the piezoelectric element 135 as well, a similar alternating voltage is applied to the electrode 132 (formed symmetrically with the electrodes 131a, 131b, and 131c).

  Accordingly, the vibrating body 130 mainly vibrates longitudinally in the longitudinal direction, but resonates longitudinal vibration and bending vibration, and causes the protrusion 133a to elliptically vibrate. Hereinafter, this point will be described.

  As shown in FIG. 9, when the vibrating body 130 rotationally drives the rotor 140, the protrusion 133 a receives a reaction force f from the rotor 140. In the present embodiment, the protrusion 133 a is provided at a position shifted from the center line G of the vibrating body 130. Therefore, the vibrating body 130 is deformed and vibrated by the reaction force f so as to bend in the in-plane direction as shown in FIG. In FIG. 9, the deformation of the vibrating body 130 is exaggerated.

  By appropriately selecting the frequency of the applied voltage, the shape / size of the vibrating body 130, the position of the protrusion 133a, etc., the frequency of the bending vibration and the frequency of the longitudinal vibration resonate, the amplitude increases, and the protrusion 133a is displaced (ellipse vibration) substantially along an ellipse, as indicated by an arrow r in FIG.

  As a result, when the protrusion 133a extends and feeds the rotor 140 in the rotational direction with one amplitude of the vibrating body 130, the protrusion 133a is pressed against the rotor 140 with a strong force. Further, when the protrusion 133a contracts and returns, the frictional force with the rotor 140 can be reduced or eliminated, so that the vibration of the vibrating body 130 can be converted with high efficiency by the rotation of the rotor 140.

  The vibrating body 130 is disposed in a state where the protrusion 133 a is urged by the contact surface 142 on the outer peripheral side surface of the rotor 140 by the elasticity of the arm portion 133 b.

  Therefore, when the vibrating body 130 is vibrated by applying an AC voltage to the piezoelectric elements 134 and 135 in a state where the protruding portion 133 a is in contact with the contact surface 142 of the rotor 140, the protrusion is formed when the vibrating body 130 expands. The friction force (pressing force) is received from the portion 133a, and the rotor 140 rotates in the clockwise direction (arrow R) by repeating this pressing force.

  The vibrating body 130 is disposed in a posture substantially parallel to the rotor 140 in the cross-sectional direction, and is thinner than the thickness of the rotor 140. In addition, the thickness of the vibrating body 130 is more preferably made thinner than the width in the cross-sectional direction of the groove 141 formed on the outer peripheral surface of the rotor 140.

  The frequency applied to the piezoelectric elements 134 and 135 is not particularly limited, but is preferably approximately the same as the resonance frequency of vibration (longitudinal vibration) of the vibrating body 130. Thereby, the amplitude of the vibrating body 130 becomes large, and the rotor 140 can be rotationally driven with high efficiency and high torque.

  Next, the operation related to the transport of the liquid according to the present embodiment will be described with reference to FIG. The cam 20 is rotated from the vibrating body 130 via the rotor 140 (shown in the direction of arrow R). Then, the finger 44 is pressed by the finger pressing surface 21 d of the cam 20.

  The finger 45 is in contact with a joint portion between the finger pressing surface 21d and the finger pressing slope 22 and closes the tube 50. In addition, the finger 46 presses the tube 50 on the finger pressing slope 22, but the finger 46 is smaller than the pressing amount of the finger 44 and does not completely close the tube 50.

  The fingers 41 to 43 are in the range of the arc portion 23 of the cam 20 and are in an initial position where they are not pressed. In addition, the finger 40 is in contact with the finger pressing slope 22 of the cam 20, but the tube 50 is not yet closed at this position.

  When the cam 20 is further rotated in the direction of arrow R from this position, the fingers 50 and 46 are pressed in this order by the finger pressing surface 21d of the cam 20, and the tube 50 is closed. The finger 44 is released from the finger pressing surface 21d, and the tube 50 is opened. The liquid flows into the liquid flow portion 51 at a position where the pressure closure is released from the finger of the tube 50 or a position where the pressure closure is not yet performed.

  When the cam 20 is further rotated by the vibrating body 130, the finger pressing slope 22 sequentially presses the fingers 40, 41, 42, and 43 in this order, and when the finger pressing surface 21 c is reached, the tube 50 is closed.

  By repeating such an operation, the liquid flows from the inlet portion 52 side toward the outlet portion 53 side and is discharged from the outlet portion 53.

  At this time, two of the plurality of fingers come into contact with the finger pressing surface of the cam 20, and when moving to a position where the next finger is pressed, one of the fingers is pressed. In this way, by repeating the state in which two fingers are pressed and the state in which one finger is pressed, a state in which at least one finger always press-closes the tube 50 is formed. Such a structure of the micropump by the movement of a plurality of fingers is called a peristaltic drive system.

  In the present embodiment, the rotor 140 is rotated using a vibrating body 130 as a rotational drive source of the cam 20. Since the rotor 140 driven by the vibrating body 130 has a large rotational torque, it does not require a reduction gear mechanism as in the prior art, and a connection mechanism between the motor module and the pump module is not required, and the structure can be simplified. .

  In addition, the tube unit 11 and the control unit 12 are configured to be mounted in a substantially horizontal direction with respect to the rotation surface of the cam 20, so that the thickness can be reduced as compared with the stacked structure of the prior art.

  Moreover, the tube unit 11 and the control unit 12 are detachable structures. It is conceivable that the restoring force of the tube 50 is deteriorated due to deterioration by continuing the pressure-closed state, and a predetermined flow rate cannot be secured. Therefore, when the micropump 10 is not used, if the tube unit 11 is stored, the tube 50 is opened, so that it is possible to prevent the discharge accuracy from being deteriorated due to deterioration.

  Moreover, since the tube unit 11 is comprised by the tube 50, the 1st tube guide frame 17, and the 2nd tube guide frame 18, it can be made much cheaper with respect to the control unit 12 of the structure mentioned above. Furthermore, when injecting a chemical solution into a living body, it is preferable to dispose a tube that comes into contact with blood, body fluid, or chemical solution.

  Further, it is conceivable that the tube 50 deteriorates when it is repeatedly closed and released over a long period of time. Therefore, it is desirable to replace the tube 50 when driven for a certain period.

  Therefore, if the tube unit 11 including the tube 50 is disposable, the running cost can be reduced and the safety can be further increased.

  Further, if the tube unit 11 is mounted in the horizontal direction with respect to the control unit 12, the fingers 40 to 46 can be brought into a tube pressing state, so that a connecting mechanism is provided between the motor module and the pump module as in the prior art. The structure can be simplified and the assemblability can be improved.

  Further, the vibrating body 130 vibrates by applying an AC voltage to the piezoelectric elements 134 and 135, and rotates the rotor 140, so that no electromagnetic noise is generated and no adverse influence is exerted on the surrounding devices. It is not affected by electromagnetic noise. Therefore, it is possible to avoid the risk of electromagnetic noise, particularly in the medical field.

  In addition, since the tube unit 11 is mounted in the space 110 provided in the control unit 12, the outline of the control unit 12 (the first machine casing 15 and the second machine casing 16) has a function of a case. The case for housing the tube unit 11 and the control unit 12 becomes unnecessary, the structure can be simplified, and the thickness can be further reduced.

  Moreover, since the joint part of the outer shell (the 1st tube guide frame 17 and the 2nd tube guide frame 18) of the tube unit 11 can be reduced, the airtightness (waterproofness) inside the tube unit 11 and the control unit 12 is improved. be able to.

  In addition, when the rotor 140 has a disk shape, and the same vibrating body is vibrated under the same conditions by contacting the protrusion 133a formed on the reinforcing plate 133 with the contact surface 142 on the outer peripheral side surface of the rotor 140. In addition, since the rotational torque of the rotor can be increased, stable driving can be continued.

  In addition, the micropump 10 can be further reduced in thickness by dispersively arranging the control circuit unit 30 and the vibrating body 130 at positions that do not overlap the tube 50, the cam 20, and the fingers 40 to 46 in plan view. Assembling property can be improved.

  Further, the first tube guide frame 17 has a tube guide groove 17c into which the tube 50 is inserted, a projection 17e as a tube holding portion for holding the tube 50 in the tube guide groove 17c, and a tube guide side wall 17f. is doing.

  The micropump 10 transports the liquid by repeatedly closing and releasing the tube 50 with the plurality of fingers 40 to 46. Therefore, in the range where the tube 50 is pressed by the fingers 40 to 46, the position of the tube 50 must be accurately regulated.

  Therefore, the position of the tube 50 is accurately determined by restricting the position of the most part of the tube 50 in the planar direction by the tube guide groove 17c and holding the range in which the tube 50 is pressed by the fingers 40 to 46 by the tube holding portion. Can be regulated.

  Further, by providing the protrusions 17e and 17h, the tube 50 is prevented from being lifted and detached from the tube guide groove 17c in the state of the first tube guide frame 17 before the second tube guide frame 18 is mounted, Improve assembly.

  The micropump 10 of the present embodiment has a configuration in which the fingers 50 to 46 are pressed by the rotation of the cam 20 to press-close the tube 50. Therefore, it is necessary to make the arc center of the arc shape of the tube 50 coincide with the rotation center P of the cam 20.

  Therefore, when the tube unit 11 is mounted on the control unit 12, the tube unit 11 is provided with the positioning wall surface 15a, and the control unit 12 is provided with the positioning wall surface 17a, so that the arc-shaped center of the tube 50 and the rotation center P of the cam 20 are provided. Can be matched. Therefore, all of the fingers 40 to 46 can reliably perform tube pressure closing without providing a dedicated position regulating member.

  The first tube guide frame 17 is provided with a tube restriction wall 17d for restricting the movement of the tube 50 pressed by the fingers 40 to 46, and an elastic member 60 is provided between the tube 50 and the tube restriction wall 17d. .

  According to such a configuration, when pressing the tube 50 with the fingers 40 to 46, an excessive pressing force is absorbed by the elastic member 60. Thereby, durability of the tube 50 can be improved rather than the structure which presses the tube 50 directly to the tube control wall 17d. In addition, it is more effective if the friction coefficient of the elastic member is made small.

  The tube unit 11 houses a reservoir 14. When the micropump 10 is used, it is conceivable that the chemical solution stored in the reservoir 14 is insufficient. Therefore, by making the reservoir 14 detachable from the tube 50, the micropump 10 can be used for a long period of time if the reservoir 14 storing the chemical solution is replaced and connected to the tube 50.

  In addition, the reservoir 14 includes a septum 95 as a port for injecting and sealing liquid therein. Accordingly, it is possible to easily inject additional liquid into the reservoir 14 in a state where the reservoir 14 is connected to the tube 50.

  Furthermore, in this embodiment, an air vent filter 65 for blocking the passage of bubbles is provided at the communication portion between the reservoir 14 and the tube 50. It is conceivable that air is dissolved in the liquid stored in the reservoir 14, and that the dissolved air gathers with time and becomes bubbles. When the liquid is a chemical solution and is injected into a living body, if the liquid is injected including bubbles, an influence that cannot be overlooked may occur.

  Therefore, by providing the air vent filter 65, it is possible to suppress bubbles from entering the living body, and to improve safety.

  In addition, it is more preferable that part or all of the outlines of the tube unit 11 and the control unit 12 are transparent. By making the first tube guide frame 17, the second tube guide frame 18, the first machine frame 15, and the second machine frame 16 that constitute the outer shell of the tube unit 11 and the control unit 12 transparent, internal components or The engagement relationship and driving state of each component can be visually confirmed.

From this, it is possible to visually recognize and detect whether it is in a normal state or where there is a defect. Further, when the reservoir 14 is housed inside, the amount of liquid in the reservoir 14 can be visually confirmed.
In addition, the range to be transparent may be a range of a portion to be visually recognized.
(Embodiment 2)

  Next, the micro pump according to the second embodiment will be described with reference to the drawings. The second embodiment is characterized in that a plurality of fingers includes a drop-off preventing mechanism that does not drop off from the control unit 12. Therefore, the description will focus on the differences from the first embodiment. In addition, since the fingers 40-46 are the same shape, the finger 43 is illustrated and demonstrated.

  FIG. 11 is a partial cross-sectional view illustrating a part of a micropump according to a specific example 1 of the second embodiment, and FIG.

  First, Embodiment 1 will be described with reference to FIG. The first machine casing 15 has finger guide holes 85 through which the fingers 43 are inserted. The finger guide hole 85 is formed by sealing the upper opening of the groove 15h of the first machine frame 15 with the second machine frame 16 as shown in FIG.

  The finger 43 includes a shaft portion 43a to be attached to the finger guide hole 85, a bowl-shaped tube pressing portion 43c larger than the cross-sectional area of the finger guide hole 85, and a cam contact in which a tip portion that contacts the cam 20 is smoothly rounded. Part 43b.

  The opening on the cam 20 side of the finger guide hole 85 is formed with a flange 15j that projects from both the first machine frame 15 and the second machine frame 16 to the inside of the finger guide hole 85. On the other hand, a stopper groove 43d having a diameter smaller than that of the flange portion 15j is formed on the shaft portion 43a of the finger 43 in the circumferential direction.

  The finger 43 is mounted in the groove 15h constituting the finger guide hole 85 so that the flange portion 15j fits in the range of the stopper groove 43d, and then the second machine frame 16 is attached to the first machine frame 15 to obtain a cross section. The position in the direction and the axial direction is regulated. The stopper groove 43d is set to a dimension that allows the tube 50 to advance and retract from a position where the tube 50 is closed by the cam 20 (illustrated by fingers 43 ').

  Since the finger guide hole 85 penetrates and the fingers 40 to 46 can move forward and backward, the fingers 40 to 46 may fall out of the finger guide hole 85 before the tube unit 11 is mounted. Therefore, by providing the above-described drop-off prevention mechanism, it is possible to prevent the fingers from dropping off.

  In addition, if the collar part 15j is provided in either the 1st machine casing 15 or the 2nd machine casing 16, the objective of this embodiment is realizable.

  Next, Example 2 will be described. The second embodiment is characterized in that a stopper rod 43e for restricting the advance / retreat position is provided on the finger in the first embodiment described above. The description will focus on the differences from the first embodiment. In addition, since the fingers 40-46 are the same shape, the finger 43 is illustrated and demonstrated.

  In FIG. 12, the first machine casing 15 has finger guide holes 85 through which the fingers 43 are inserted. The finger 43 includes a shaft portion 43a that is inserted into the finger guide hole 85, a bowl-shaped tube pressing portion 43c that is larger than the finger guide hole 85, and a cam contact portion 43b that is smoothly rounded at the tip that contacts the cam 20. It is formed.

  The shaft portion 43 a is formed with a stopper rod 43 e that protrudes from the space in the cam 20 direction of the first machine casing 15 and is larger than the finger guide hole 85. The finger 43 is mounted so that the groove 15h constituting the finger guide hole 85 is within the range between the tube pressing portion 43c and the stopper rod 43e, and then the second machine frame 16 is mounted on the first machine frame 15. This restricts the position in the axial direction.

  The stopper rod 43e is set to such a dimension that it can advance and retract from a position where the tube 50 is closed by the cam 20 (illustrated by a finger 43 ') to a position where the tube 50 is opened.

  The finger 43 is set to a dimension capable of moving forward and backward from a position where the tube 50 is pressed and closed by the cam 20 (represented by the stopper rod 43e ′) between the tube pressing portion 43c and the stopper rod 43e. Yes.

  Even with such a configuration, the movement of the finger 43 in the axial direction between the tube pressing portion 43c and the stopper rod 43e can be restricted, and the finger can be prevented from dropping out of the finger guide hole 85.

In addition, it can be set as the structure which provides the recessed part which can accommodate the stopper rod 43e in the axial direction middle part (intermediate part) of the finger guide hole 85. FIG.
(Embodiment 3)

  Next, a micro pump according to Embodiment 3 will be described with reference to the drawings. The third embodiment is characterized in that the first tube guide frame 17 includes a tube guide groove 17 c into which the tube 50 is inserted and a tube holding member for holding the tube 50. Therefore, the description will focus on the differences from the first embodiment.

  FIG. 13: shows the micropump which concerns on Embodiment 3, (a) is a partial top view which shows the one part, (b) is sectional drawing which shows the BB cut surface of (a), (c) is ( It is sectional drawing which shows the DD cut surface of a). First, a specific example 1 will be described.

  As shown in FIGS. 13A and 13B, the first tube guide frame 17 is provided with a tube guide groove 17 c in which the tube 50 is mounted. In the direction in which the fingers 40 to 46 of the tube guide groove 17 c are arranged, it is difficult to form a continuous side wall along the tube 50 because the fingers 40 to 46 advance and retract.

  Therefore, a tube holding plate 98 as a tube holding member corresponding to the side wall is provided. The tube holding plate 98 is a thin metal plate and is formed along the tube 50. Then, the first tube guide frame 17 is fixed to a tube holding plate fixing surface 17j formed along the curved wall surface 17a.

  Here, as shown in FIG. 13B, the tube holding plate 98 is provided with an opening 98a through which the fingers 40 to 46 can be inserted. The opening 98a may have a structure in which one of all the fingers 40 to 46 is inserted or a structure in which seven through holes through which the fingers 40 to 46 can be inserted are provided.

  The tube holding plate 98 is fixed to the first tube guide frame 17 at a position away from the fingers 40 to 46. As the fixing structure, as shown in FIG. 13C, two guide shafts 17q are projected from the first tube guide frame 17, and the guide shaft 17q is inserted into a hole opened in the tube holding plate 98. Thereafter, the structure of crushing the tip of the guide shaft 17q is illustrated. The tube holding plate 98 may be bonded to the tube holding plate fixing surface 17j.

  With such a configuration, by providing the tube holding plate 98, the finger side direction position of the tube 50 can be regulated. Further, if the tube holding plate 98 is made of a metal, it can be made very thin, so that it can be disposed in a narrow space while having rigidity.

  Further, if the tube holding plate 98 is provided with an opening 98a for each finger, a part of the tube holding plate 98 remains between the openings, so that the tube holding portion can be configured between the fingers. .

  In such a structure using the tube holding plate 98, the protrusion of the tube 50 can be suppressed by providing the protrusion 17h at a position close to the outlet portion 53 of the tube 50 and a position close to the inlet portion 52. it can.

  Next, Example 2 of Embodiment 3 will be described. The second embodiment is characterized in that the tube holding plate 98 described in the first embodiment is a sheet having spreadability. Although not shown, the description will be given with reference to FIG.

  The tube holding plate 98 of the second embodiment is formed of, for example, a silicon wrap having extensibility, and an opening through which the fingers 40 to 46 are inserted is not opened. The silicon wrap is attached to a tube holding plate fixing surface 17j formed on the first tube guide frame 17.

When the tube 50 is pressed by the fingers 40 to 46, the silicon wrap stretches and does not impede the movement of the fingers 40 to 46, and follows the movement of the fingers 40 to 46. Therefore, a continuous tube guide portion can be formed on the finger side.
(Embodiment 4)

  Subsequently, Embodiment 4 will be described with reference to the drawings. The fourth embodiment is characterized in that an elastic member that biases the tube unit 11 toward the control unit 12 is provided. Therefore, the description will focus on the differences from the first embodiment.

  FIG. 14: shows the micropump which concerns on Embodiment 4, (a) is a fragmentary top view, (b) is sectional drawing which shows the EE cut surface of (a). In FIG. 14A, a plate spring 99 as an elastic member is provided between the tube unit 11 and the fixed frame 13.

  The plate spring 99 is fixed to a concave plate spring fixing portion 13 f provided on the tube unit 11 side of the fixed frame 13. The force point of the leaf spring 99 is on the center line F and urges the tube unit 11 toward the rotation center P of the cam 20.

  As a result, the wall surface 17a of the tube unit 11 and the wall surface 15a of the control unit 12 abut on the center line F.

  As shown in FIG. 14B, the plate spring 99 is fixed by fixing a guide shaft 13g protruding from the plate spring fixing portion 13f of the fixed frame 13 by fixing means such as heat welding. In addition, as long as the elasticity of the leaf spring 99 is not impaired, it is not always necessary to fix the fixing frame 13 because the fixing frame 13 is not dropped.

  When the tube unit 11 is fixed to the control unit 12 with the fixed frame 13, the horizontal direction (plane Direction)) and the tube 50 cannot be closed by the fingers 40 to 46.

  Therefore, the tube unit 11 is biased in the direction of the control unit 12 by the leaf spring 99 to bring the wall surfaces 15a and 17a into contact with each other so that the center of the arc shape of the tube 50 and the rotation center of the cam 20 are approximately. The fingers 40 to 46 can reliably close the tube 50.

  In addition, the elastic force of the leaf | plate spring 99 is set so that it may become larger than the tube pressing force of the fingers 40-46.

  In this way, when the fingers 40 to 46 close the tube 50, the tube unit 11 (that is, the tube 50) does not move away from the fingers 40 to 46, so that the tube is surely closed. Can do.

In the present embodiment, the leaf spring 99 is exemplified as the elastic member. However, the elastic member is not limited to the leaf spring, but may be a coil spring, a flat plate having elasticity in the thickness direction, or a structure using a plurality of these.
(Embodiment 5)

  Next, a micro pump according to Embodiment 5 will be described with reference to the drawings. Embodiment 5 is characterized in that the power source is accommodated in the tube unit. Therefore, the description will focus on the differences from the first embodiment.

  15A and 15B show a micropump according to a fifth embodiment, in which FIG. 15A is a partial plan view, and FIG. 15B is a cross-sectional view showing the HH cut surface of FIG. 15A and 15B, a small button type battery 120 (hereinafter simply referred to as a battery 120) as a power source is accommodated in the tube unit 11.

  The battery 120 is mounted together with the reservoir 14 in a recess formed in the first tube guide frame 17, and the upper part is sealed by the second tube guide frame 18. Here, when the illustrated lower surface of the battery 120 is a negative pole and the upper surface and side surfaces are positive poles, the lower surface is connected to the negative terminal 121 and the side surface is connected to the positive terminal 122.

  The minus terminal 121 and the plus terminal 122 are connected to connection terminals 123 and 124 that are planted at the end of the first tube guide frame 17 by leads (not shown).

  The connection terminals 123 and 124 protrude from the first tube guide frame 17 and extend to the inside of the control unit 12. The control unit 12 is provided with connection terminals (not shown) that are electrically connected to the connection terminals 123 and 124, and these connection terminals are connected to the control circuit unit 30 (see FIG. 5).

  With the tube unit 11 attached to the control unit 12, power is supplied from the battery 120 to the control circuit unit 30, and the micropump 10 can be driven.

  The battery 120 may be housed inside the tube unit 11 and the reservoir 14 may be provided outside the tube unit.

  By replacing the battery 120 together with the tube 50 as the tube unit 11 when the chemical solution to be used is changed or when the tube 50 is exchanged over a long period of time, the battery capacity is prevented from becoming insufficient during use. Can do.

  Further, the battery 120 is detachable from the tube unit 11. In the configuration shown in FIG. 15, an example in which the battery 120 is attached and detached by removing the fixing screw 92 (see FIG. 5) that joins the first tube guide frame 17 and the second tube guide frame 18 is shown.

  Here, as a structure for attaching and detaching the battery 120, a structure may be adopted in which a battery lid is provided on the second tube guide frame 18, and as a structure in which the battery 120 is slid and inserted from the tail portion (fixed frame 13 side) of the tube unit 11, A structure in which the fixed frame 13 is removed and the battery 120 is attached or detached may be employed.

In the present embodiment, a small button type battery is exemplified as the battery, but other secondary batteries such as a sheet battery and a lithium ion battery can be adopted. When these batteries are used, they can be disposed so as to overlap with the reservoir, and the configuration of accommodating in the tube unit has the advantage that the capacity of the reservoir can be increased.
(Embodiment 6)

  Next, a micro pump according to Embodiment 6 will be described with reference to the drawings. In the sixth embodiment, a detection unit including a connection terminal and a detection terminal for detecting whether the tube unit is inserted at an accurate position with respect to the control unit is provided between the tube unit and the control unit. Has characteristics. Therefore, the description will focus on the differences from the first embodiment.

  FIG. 16: shows the micropump which concerns on Embodiment 6, (a) is a fragmentary top view, (b) is sectional drawing which shows the JJ cut surface of (a). 16 (a) and 16 (b), the first connection terminal 66 and the second connection terminal are provided at the peninsular end portions on both sides of the wall surface 17a formed in the arc shape of the tube unit 11 (first tube guide frame 17). 67 are planted.

  One end of the first connection terminal 66 and the second connection terminal 67 is electrically connected by a connection lead 94. Further, the other end projects from the control unit side end 17k, 17m of the tube unit 11 so as to enter the inside of the control unit 12.

  The control unit 12 (first machine casing 15) includes a first detection terminal 68 and a second detection terminal 69 each having a substantially U-shaped spring shape. Since the first detection terminal 68 and the second detection terminal 69 have the same shape, the second detection terminal will be described as an example.

  The second detection terminal 69 is bent and mounted in a recess provided in the first machine casing 15. Here, the arm portions 69a and 69b of the second detection terminal 69 press opposite side walls in the recess.

  Therefore, the position of the arm portion 69a is regulated by the side wall 15g in the recess. The position of the side wall 15g is accurately regulated with respect to the rotation center P position of the cam 20. Further, the positions of the front end portions of the first connection terminal 66 and the second connection terminal 67 are also accurately regulated with respect to the rotation center P position of the cam 20.

  When the tube unit 11 is inserted into the control unit 12 until the arc-shaped wall surface 17a of the tube unit 11 and the arc-shaped wall surface 15a of the control unit 12 abut, the second connection terminal 67 is electrically connected to the second detection terminal 69. Connected to. At the same time, the first connection terminal 66 is also electrically connected to the first detection terminal 68.

  A lead 64 is connected to the second detection terminal 69, and the lead 64 is connected to a detection terminal A (not shown) of the control circuit unit 30. On the other hand, a lead 63 is connected to the first detection terminal 68, and the lead 63 is connected to a detection terminal B (not shown) of the control circuit unit 30.

  Here, when the detection terminal A and the detection terminal B detect that both the second connection terminal 67 and the second detection terminal 69, and the first connection terminal 66 and the first detection terminal 68 are electrically connected, Then, it is determined that the arc-shaped wall surface 17a of the tube unit 11 and the arc-shaped wall surface 15a of the control unit 12 are in contact with each other.

  In such a state, it is determined that the arc-shaped center of the tube 50 and the rotation center P of the cam 20 coincide with each other, and the vibrating body 130 (see FIG. 5) can be driven by the control circuit unit 30. To.

  Moreover, when both the 2nd connection terminal 67 and the 2nd detection terminal 69 and the 1st connection terminal 66 and the 1st detection terminal 68 are not electrically connected, it determines with the state which cannot drive, and a tube unit 11 to the control unit 12 again.

  In the present embodiment, the contact method is exemplified as the detection unit, but a light detection or magnetic detection structure can be employed.

With such a configuration, when it is detected that the arc-shaped center of the tube 50 and the rotation center P of the cam 20 coincide with each other, the vibrating body 130 is driven so that the tube 50 can be closed as set. Since it can be opened, the liquid can be transported at a desired flow rate per unit time.
(Embodiment 7)

  Next, a micro pump according to Embodiment 7 will be described with reference to the drawings. The seventh embodiment is characterized in that the rotor is formed in a ring shape, and the protruding portion of the vibrating body is disposed so as to contact the ring-shaped inner peripheral side surface of the rotor. Therefore, the description will focus on the differences from the first embodiment.

  FIG. 17 is a partial cross-sectional view showing a part of the control unit according to the seventh embodiment, and FIG. 18 is a plan view showing the rotor. 17 and 18, the rotor 170 has a ring shape with a circular recess formed in the lower surface direction in the figure. And the vibrating body 130 is arrange | positioned in this recessed part.

  A groove 171 is formed on the inner peripheral side surface of the rotor 170 along the rotational direction of the rotor 170. The inner peripheral side surface of the groove 171 is an abutting surface 172 with which a protrusion 133 a provided on the vibrating body 130 abuts.

  As in the first embodiment, the rotor 170 is configured so as to be pivoted together with the cam 20 on the cam shaft 75 and rotated integrally therewith.

  In addition, the vibrating body 130 is fixed to the fixed shaft 138 planted in the first machine frame 15 by a fixing screw 93 at the tip of the arm portion 133b (see FIG. 8). At this time, it is preferable that the arm portion 133b is composed of one piece in the rotation axis direction of the rotor 170 in the layout design.

  The configuration and driving action of the vibrating body 130 are the same as those of the first embodiment (see FIGS. 8 to 10), but the protrusion 133a contacts the contact surface 172 on the ring-shaped inner peripheral surface of the rotor 170, The rotor 170 is rotated clockwise (in the direction of arrow R in the figure).

According to such a configuration, the rotor 170 is formed in a ring shape, and the protrusion 133a of the vibrating body 130 is disposed so as to contact the contact surface 172 of the ring-shaped inner peripheral side surface of the rotor 170. Therefore, since the vibrating body 130 is disposed on the inner side of the outer diameter of the rotor 170, the size can be further reduced, and the layout design of the control circuit unit 30 (see also FIG. 5) can be facilitated. .
(Embodiment 8)

  Next, a micro pump according to Embodiment 8 will be described with reference to the drawings. In the eighth embodiment, the structure of the seventh embodiment described above is further simplified. The rotor is formed inside a circular recess formed in one plane of the cam, and the protrusion provided on the vibrating body is provided as follows. It is characterized in that it is disposed so as to contact the inner peripheral side surface of the recess. Therefore, the description will focus on the differences from the seventh embodiment.

  FIG. 19 is a partial cross-sectional view illustrating a part of the control unit according to the eighth embodiment. In FIG. 19, a recess is formed in the lower surface (the surface in the direction of the first machine casing 15) of the cam 20, and a vibrating body 130 is disposed in the recess. Therefore, the recess formed in the cam 20 corresponds to the rotor 170.

  A groove 171 is formed on the inner peripheral side surface of the rotor 170, and an abutting surface 172 on which the protrusion 133 a provided on the vibrating body 130 abuts is formed on the inner side surface of the groove 171. That is, the rotor function is formed integrally with the cam 20.

  Further, the vibrating body 130 is fixed to the fixed shaft 138 planted on the first machine casing 15 by the fixing screw 93 at the tip end portion (see FIG. 8) of the arm portion 133b.

  Note that the configuration and driving action of the vibrating body 130 are the same as those of the first embodiment (see FIGS. 8 to 10), but the protrusion 133a has the rotor 170 as in the seventh embodiment (see FIGS. 17 and 18). The ring 170 is brought into contact with the contact surface 172 on the inner peripheral side surface of the ring, and the rotor 170 is rotated in the clockwise direction.

Therefore, according to the above-described configuration, the rotor 170 is integrally formed with the cam 20 inside the cam 20, so that the structure can be simplified and the size can be reduced.
(Embodiment 9)

  Next, a micro pump according to Embodiment 9 will be described with reference to the drawings. The ninth embodiment is characterized in that a speed reduction mechanism or speed increasing mechanism is provided as a driving force transmission mechanism between the rotor and the cam. An example of the speed reduction mechanism will be described as an example.

  FIG. 20 is a plan view illustrating a control unit according to the ninth embodiment, and FIG. 21 is a partial cross-sectional view illustrating the LL cut surface of FIG. 20 and 21, the speed reduction mechanism of the present embodiment includes a cam gear 180 provided on the cam 20, a rotor gear 144 provided on the rotor 140, an intermediate wheel 190 that meshes with the cam gear 180 and the rotor gear 144. It is composed of

  The cam gear 180 is fixed to the cam shaft 75 together with the cam 20 and is supported by bearings 114 and 115. The intermediate wheel 190 has an intermediate gear 191 and is pivotally supported by a bearing 112 provided in the first machine casing 15 and an intermediate wheel receiver 210. The intermediate wheel receiver 210 is fixed to the first machine casing 15 with a fixing screw or the like.

  On the other hand, the rotor gear 144 is formed on a rotor shaft 143 that supports the rotor 140 and is supported by a bearing 113 provided on the first machine casing 15 and a bearing 116 provided on the second machine casing 16.

  In addition, since the shaft hole provided in the bearings 112 to 116 does not penetrate, the space 100 formed by the first machine casing 15 and the second machine casing 16 is in a state where the tube unit 11 is inserted into the control unit 12. It is sealed with.

  Further, the vibrating body 130 is fixed to the fixed shaft 138 planted on the first machine casing 15 by the fixing screw 93 at the tip end portion (see FIG. 8) of the arm portion 133b.

  The rotor 140 has the same shape as that of the first embodiment (see FIG. 6) described above. A groove 141 is formed in the outer peripheral portion of the rotor 140 along the rotation direction. Is the contact surface 142 with the protrusion 133a.

  The configuration and operation of the vibrating body 130 are the same as those in the first embodiment (see FIGS. 8 to 10), and the relationship between the vibrating body 130 and the rotor 140 is the same as that in the first embodiment, and thus the description thereof is omitted. .

  The rotor 140 is rotated by the vibration of the vibrating body 130, and the rotation of the rotor 140 is transmitted to the cam 20 via the rotor gear 144, the intermediate gear 191, and the cam gear 180. By providing the intermediate wheel 190, the cam 20 rotates in the same direction as in the first embodiment (see FIG. 5).

  Here, the gear ratio between the rotor gear 144 and the cam gear 180 is a reduction ratio, and the reduction ratio can be appropriately changed according to the gear ratio between the rotor gear 144 and the cam gear 180. Further, if the intermediate wheel 190 has a configuration of a large gear and a small gear, the reduction ratio can be adjusted further greatly. In addition, what is necessary is just to use the gear ratio of each gear as a speed-up gear mechanism when speeding up.

  Thus, by providing a speed reduction mechanism or speed increasing mechanism between the cam 20 and the rotor 140, the rotational speed of the cam 20 can be changed while the rotational speed of the rotor 140 is kept constant. That is, the amount of liquid flow can be adjusted as appropriate.

  In addition, by providing all the movable mechanisms such as the vibrating body 130, the rotor 140, the speed reduction mechanism, and the cam 20 in the control unit 12, an assembly mechanism is improved between the control unit 12 and the tube unit 11 without requiring a coupling mechanism. .

  In the present embodiment, the structure in which the protrusion 133a of the vibrating body 130 is in contact with the contact surface 142 on the outer peripheral side surface of the rotor 140 has been described as an example. However, in the above-described Embodiments 7 and 8 (FIGS. 17 to 19, It is also possible to adapt to a configuration in which the protrusion 133a is in contact with the contact surface 172 on the inner peripheral side surface of the rotor 170 shown in FIG.

  The micropump 10 according to Embodiments 1 to 9 described above can be reduced in size and thickness, and can stably flow continuously at a minute flow rate. It is suitable for medical use such as development of new drugs and drug delivery. Moreover, in various mechanical devices, it can be mounted in the device or outside the device and used for transporting fluids such as water, saline, chemicals, oils, fragrances, inks and gases. Furthermore, the micropump alone can be used for fluid flow and supply.

FIG. 2 is a schematic plan view showing the micropump according to the first embodiment. FIG. 2 is an overview front view showing the micropump according to the first embodiment. FIG. 3 is an exploded plan view of the micropump according to the first embodiment. FIG. 3 is an exploded front view of the micropump according to the first embodiment. FIG. 2 is a plan view showing the micropump according to the first embodiment. (A) is sectional drawing which shows the APA cut surface of FIG. 5, (b) is sectional drawing which shows the FF cut surface of (a). FIG. 3 is a partial cross-sectional view showing a tube holding structure according to the first embodiment. FIG. 3 is a perspective view illustrating a configuration of a vibrating body according to the first embodiment. The partial top view which shows typically the effect | action of a vibrating body. Explanatory drawing which shows the motion of a projection part typically. FIG. 6 is a partial cross-sectional view showing a part of a micropump according to Example 1 of Embodiment 2. FIG. 6 is a partial cross-sectional view showing a part of a micropump according to Example 2 of Embodiment 2. The micropump which concerns on Embodiment 3 is shown, (a) is a fragmentary top view which shows the one part, (b) is sectional drawing which shows the BB cut surface of (a), (c) is D of (a). Sectional drawing which shows -D cut surface. The micropump which concerns on Embodiment 4 is shown, (a) is a partial top view, (b) is sectional drawing which shows the EE cut surface of (a). The micropump which concerns on Embodiment 5 is shown, (a) is a partial top view, (b) is sectional drawing which shows the HH cut surface of (a). The micropump which concerns on Embodiment 6 is shown, (a) is a partial top view, (b) is sectional drawing which shows the JJ cut surface of (a). FIG. 10 is a partial cross-sectional view illustrating a part of a control unit according to a seventh embodiment. FIG. 10 is a plan view showing a rotor according to a seventh embodiment. FIG. 10 is a partial cross-sectional view illustrating a part of a control unit according to an eighth embodiment. FIG. 10 is a plan view showing a control unit according to a ninth embodiment. The fragmentary sectional view which shows the LL cut surface of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Micro pump, 11 ... Tube unit, 12 ... Control unit, 20 ... Cam, 30 ... Control circuit part, 40-46 ... Finger, 50 ... Tube, 130 ... Vibrating body, 133a ... Projection part, 140 ... Rotor.

Claims (20)

A tube unit having a tube partly arranged in an arc shape and having elasticity; and a tube guide frame for holding the tube;
A plurality of fingers arranged radially from the center of the arcuate shape of the tube; a cam that sequentially presses the plurality of fingers from the fluid inflow side to the outflow side of the tube; and a rotor that applies a rotational force to the cam. A control unit having a piezoelectric element and a vibrating body having a protrusion at the longitudinal end thereof that abuts against the rotor;
A reservoir with which the inlet portion of the tube communicates;
A control circuit unit for inputting a drive signal to the piezoelectric element;
A power source for supplying power to the control circuit unit;
Is provided,
The tube unit is detachably attached to the control unit in a substantially horizontal direction with respect to a rotation plane of the cam,
When the alternating current voltage is applied to the piezoelectric element, the vibrating body vibrates, the rotational force is repeatedly applied from the protrusion to the rotor, and the cam sequentially presses the plurality of fingers from the fluid inflow side to the outflow side. A micropump that transports fluid by repeatedly closing and releasing the tube. The micropump according to claim 1,
The micropump characterized by the said tube unit being inserted in the space provided in the said control unit. The micropump according to claim 1 or 2,
The rotor has a disk shape;
The micropump characterized in that the protrusion is disposed so as to contact the outer peripheral side surface of the rotor. The micropump according to claim 1 or 2,
The rotor has a ring shape;
The micropump characterized in that the protrusion is disposed so as to contact the ring-shaped inner peripheral side surface of the rotor. The micropump according to claim 1 or 2,
The rotor is formed inside a ring-shaped recess formed in one plane of the cam;
The micropump characterized in that the protrusion is disposed so as to contact an inner peripheral side surface of the recess. The micropump according to claim 1,
The micropump, wherein the control circuit unit, the vibrating body, the cam, and the plurality of fingers are dispersedly arranged at positions where they do not overlap each other in a plane. The micropump according to claim 1,
A micropump comprising a speed reduction mechanism or a speed increase mechanism between the rotor and the cam. The micropump according to claim 1,
The micropump characterized in that the tube guide frame has a tube guide groove into which the tube is inserted and a tube holding part for holding the tube in the tube guide groove. The micropump according to claim 8, wherein
The micropump characterized by the said tube holding part being a tube holding member provided along the circular arc shape of the said tube. The micropump according to claim 1,
When the tube unit is mounted on the control unit, a guide portion that substantially matches the arc-shaped center of the tube and the rotation center of the cam is provided on the mutually opposing wall surfaces of the tube unit and the control unit. A micropump characterized by having The micropump according to claim 10, wherein
When the tube unit is attached to the control unit, a detection unit that detects that the arc-shaped center of the tube and the rotation center of the cam substantially coincide is provided between the tube unit and the control unit. A micropump characterized by that. The micropump according to claim 1 or 2,
A lid member for fixing the tube unit to the control unit;
Between the lid member and the tube unit, there is provided an elastic member that biases the tube unit to the control unit so that the arc-shaped center of the tube and the rotation center of the cam substantially coincide with each other. A micro pump characterized by. The micropump according to claim 1,
A finger guide hole for mounting each of the plurality of fingers;
Each of the plurality of fingers has a shaft portion to be attached to the finger guide hole, and a bowl-shaped tube pressing portion larger than the finger guide hole,
A micropump comprising a drop-off prevention mechanism for preventing the plurality of fingers from dropping off from the finger guide holes in the axial direction. The micropump according to claim 1 or 2,
The tube guide frame is provided with a tube restriction wall that restricts movement of the tube by being pressed by the plurality of fingers.
An elastic member is provided between the tube and the tube regulating wall. The micropump according to claim 1,
A micropump characterized in that a part or all of the outline of the tube unit and the control unit is transparent. The micropump according to claim 1,
One or both of the power source and the reservoir are accommodated in the tube unit. The micropump according to claim 1,
The micropump characterized in that the reservoir includes a port for inflowing or sealing a fluid therein. The micropump according to claim 1,
A micropump comprising an air vent filter for blocking passage of bubbles at a communication portion between the reservoir and the tube. It is detachable from the tube unit according to claim 1,
A plurality of fingers arranged radially from the central direction of the arcuate shape of the tube, a cam that sequentially presses the plurality of fingers from the fluid inflow side to the outflow side of the tube, and a rotor that applies a rotational force to the cam; A control unit having a piezoelectric element and a vibrating body having a projecting portion that abuts against the rotor at an end in a longitudinal direction. It is detachable from the control unit according to claim 1,
A tube unit comprising: a tube having a part thereof arranged in an arc shape and having elasticity; and a tube guide frame for holding the tube.

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