JP2010129499A - Ionizer and ionizer system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ionizer for uniformizing an ion-production quantity by decreasing a difference in an applied voltage irrespective of positions in a plurality of discharging electrodes and for uniformizing an ion-injection quantity by injecting ion together with a purifying gas containing the same degree of injection quantity, injection pressure, and injection rate, and further to provide an ionizer system equipped with a plurality of ionizers. <P>SOLUTION: A looped wiring 13 is included in the electric circuit of the ionizer to uniformize an applied voltage. Further, a channel unit branched from an upper channel portion and connected to a plurality of lower channel portions each with the same number is included in the fluid channel of the ionizer to uniformize the injection quantity, the injection pressure, and the injection rate. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ionizer that performs static elimination on a static elimination target using ions generated by corona discharge, and an ionizer system that combines a plurality of such ionizers.

  As a conventional bar-type ionizer, for example, a high voltage is applied to a plurality of needle-like discharge electrodes (needle-like electrodes) and only positive ions, only negative ions, or positive ions and negative ions are applied from air. (Hereinafter, these positive ions only, negative ions only, or both positive ions and negative ions). There is a corona discharge ionizer that discharges by discharging. As an example of the charge removal target, for example, a plate-shaped glass substrate can be cited. This glass substrate is used in, for example, a TFT (thin film transistor) liquid crystal panel, a PDP (plasma display panel), or an LCD (liquid crystal display).

Such corona discharge ionizers are further broadly classified into a DC ionizer that uses a DC power source as a high-voltage power source to be applied to the needle electrode and an AC ionizer that uses an AC power source. Each ionizer is unique and must be selected according to the intended use.
A direct current ionizer is provided with the same number of positive and negative needle electrodes alternately. The positive needle electrode generates positive ions and the negative needle electrode generates negative ions. . The needle electrode is arranged in the injection nozzle, and a plurality of electrode units each including the needle electrode and the injection nozzle are arranged. The generated positive ions and negative ions are placed on a clean gas to increase the movement speed of the positive ions and negative ions, thereby enhancing the static elimination effect.
The AC type ionizer mainly uses a power supply voltage obtained by boosting a commercial frequency AC power source with a step-up transformer, and positive ions and negative ions are alternately generated from one needle-like electrode. Such needle-like electrodes are arranged in the injection nozzle, and a plurality of electrode units each including the needle-like electrode and the injection nozzle are arranged. The generated positive ions and negative ions are placed on a clean gas to increase the movement speed of the positive ions and negative ions, thereby enhancing the static elimination effect.

  Now, in such an ionizer, it is necessary to configure an electric circuit and a fluid circuit. As a prior art of an ionizer including such an electric system circuit and a fluid system circuit, for example, Patent Document 1 (Japanese Patent Laid-Open No. 2007-141691, title of invention: ionization apparatus) is disclosed.

Japanese Patent Application Laid-Open No. 2007-141691 (FIGS. 15 to 18 for electrical circuits and FIGS. 20 to 22 for fluid circuits)

  In a conventional bar-type ionizer, a plurality of discharge electrodes and injection nozzles connected to an electric system circuit and a fluid system circuit are arranged at a predetermined interval, and the voltage applied or the clean gas is applied depending on the connection position. There is a problem that the injection amount, injection pressure, and injection speed are different, and as a result, ion balance is lost. This point will be described with reference to the drawings. FIG. 12 is an explanatory diagram of a conventional ionizer, FIG. 12 (a) is an internal block diagram of an electric system, and FIG. 12 (b) is an explanatory diagram for explaining a difference in applied voltage at the position of a needle electrode. FIG. 13 is an explanatory diagram of a prior art ionizer, FIG. 13 (a) is a block diagram of the internal structure of the fluid system, and FIG. 13 (b) is an explanatory diagram for explaining the difference in the amount of clean gas injected at the position of the injection nozzle. It is.

First, the collapse of ion balance caused by the conventional electric circuit will be described.
FIG. 12A shows only the electric circuit of the ionizer 100. The ionizer 100 includes an ionizer body 101, a high-voltage power generation unit 102, a case body 103, a wiring unit 104, a plurality (eight in this example) of branch wiring units 105, and a plurality (eight in this example) of needle-like electrodes 106. Prepare. A plurality (eight) of branch wiring portions 105 are connected in parallel to the wiring portion 104, and the needle electrode 106 is electrically connected to each branch wiring portion 105. The wiring unit 104 is supplied with a high voltage from the high-voltage power generation unit 102.

  In this case, looking at point A in FIG. 12A, the high voltage from the high-voltage power generation unit 102 is bifurcated and applied at point A. If the viewpoint is changed, the high-voltage power generation unit 102 It can be considered that one needle-like electrode 106 is connected on one side near, and seven needle-like electrodes 106 are connected on the other side far from the high-voltage power generation unit 102. Then, at one needle-like electrode 106 on one side close to the high-voltage power generation unit 102, the voltage drops due to ion generation, and the high voltage decreases to the seven needle-like electrodes 106 far from the high-voltage power generation unit 102. Is applied. At point B, one needle-like electrode 106 is connected on one side close to the high-voltage power generation unit 102, and six needle-like electrodes 106 are connected on the other side far from the high-voltage power generation unit 102. Can be considered.

  Hereinafter, similarly, the voltage decreases as the distance from the high-voltage power generation unit 102 increases, and the applied voltage decreases as the distance from the high-voltage power generation unit 102 increases, as illustrated in FIG. The present inventor has found that it has such a tendency. As a result, the amount of ions generated from the needle-like electrode 106 decreases as the distance from the high-voltage power generation unit 102 increases, and the ion balance becomes imbalanced at a location near and far from the high-voltage power generation unit 102. There was a fear.

Subsequently, the collapse of ion balance caused by the fluid system will be described.
FIG. 13A shows only the fluid circuit of the ionizer 100. The ionizer 100 includes an ionizer main body 101, a case body 103, a clean gas supply unit 107, a main flow channel unit 108, a plurality of (in this example, eight as many as the needle-like electrodes 106), a plurality of branch flow channel units 109, and a plurality (in this example). Eight nozzles 110 having the same number as the needle electrodes 106 are provided. The needle electrode 106 is disposed in each spray nozzle 110 to form an electrode unit.
A plurality (eight) of branch flow passage portions 109 are connected in parallel to the main flow passage portion 108, and the injection nozzle 110 is connected to each branch flow passage portion 109. When high-pressure clean gas is supplied from the clean gas supply unit 107 to the main flow path unit 108, clean gas is injected from all the injection nozzles 110. At the same time, the needle electrode 106 generates ions in the injection nozzle 110, and the ions are ejected from the injection nozzle 110 on the jet flow.

  In this case, when looking at the point C in FIG. 13A, the clean gas from the clean gas supply unit 107 flows in two branches at the point C. From a different viewpoint, the clean gas supply unit 107 is closer to the clean gas supply unit 107. One injection nozzle 110 is connected on this side, and seven injection nozzles 110 are connected on the other side far from the clean gas supply unit 107. Since one injection nozzle 110 on one side near the clean gas supply unit 107 consumes clean gas by injection, the seven injection nozzles 110 far from the clean gas supply unit 107 have a reduced flow rate. Gas flows.

  Similarly, the flow rate of the clean gas decreases as the distance from the clean gas supply unit 107 increases, and as shown in FIG. Injection speed decreases. The present inventor has found that it has such a tendency. For this reason, the ion arrival speed is different between a location close to the clean gas supply unit 107 and a location far from the clean gas supply unit 107. In particular, in the AC method or the like, the decrease in the injection rate is an event in which positive ions and negative ions are combined again (hereinafter referred to as recombination). ) May occur and the charge removal capability may be reduced, and the ion balance may be unbalanced.

In recent years, for example, in large-sized liquid crystal televisions and the like, there is a significant tendency for static elimination objects to increase in size, such as an increase in the size of a glass substrate as the screen size increases. For a large charge removal object, the ion balance of the prior art tends to be more prominent in the ion balance. There has been a demand for uniform ion balance so that the same amount of ions can be reached regardless of the location of the charge removal target.
Moreover, the ionization apparatus described in Patent Document 1 also has an electric circuit / fluid circuit that includes the problems described above, and the ion balance becomes unbalanced as the charge removal object becomes larger. The tendency was likely to increase.

Therefore, the present invention has been made to solve the above-mentioned problems, and its purpose is to reduce the difference in applied voltage regardless of the position of a plurality of discharge electrodes, and to uniformize the amount of generated ions. The purpose is to provide an ionizer that improves the static elimination capability.
Furthermore, in addition to the uniform ion generation amount, the ion injection amount is made uniform by spraying ions on a clean gas with the same injection amount, injection pressure, and injection speed, thereby improving the static elimination capability. To provide an ionizer.
It is another object of the present invention to provide an ionizer system that includes a plurality of ionizers as described above and performs static elimination on a larger static elimination target while uniformizing the amount of ions generated.

An ionizer according to claim 1 of the present invention is
An ionizer body formed as a long body,
An electric circuit including an annular wiring portion;
A discharge electrode electrically connected to the annular wiring portion;
With
A plurality of the discharge electrodes are arranged in a longitudinal direction with a predetermined electrode interval with respect to the ionizer body, and a voltage is applied through an annular wiring portion of an electric circuit to generate ions by corona discharge. And

An ionizer according to claim 2 of the present invention is
The ionizer according to claim 1, wherein
The electrical circuit includes a high-voltage power generation unit that generates a high voltage.

An ionizer according to claim 3 of the present invention is
An ionizer body formed as a long body,
An electric circuit including an annular wiring portion;
A fluid circuit for supplying clean gas through the flow path,
An electrode unit having a discharge electrode electrically connected to the annular wiring portion of the electric system circuit, and an injection nozzle connected to the flow path portion of the fluid system circuit and having the discharge electrode disposed therein;
With
The electrode unit is provided with a plurality of electrodes arranged in the longitudinal direction at a predetermined electrode interval with respect to the ionizer body, and the clean gas supplied through the flow path portion of the fluid system circuit is injected from the injection nozzle, and the electric circuit A voltage is applied to the discharge electrode through the annular wiring portion, and ions are generated by corona discharge.

An ionizer according to claim 4 of the present invention is
An ionizer body formed as a long body,
An electric circuit including a wiring portion;
Including a flow path portion branched from the upstream flow path section and connected to a plurality of downstream flow path sections so that the number of each of the downstream flow path sections is the same; Fluid system circuit for supplying
An electrode unit having a discharge electrode electrically connected to the wiring part of the electric system circuit, and an injection nozzle that is connected to the flow path part of the fluid system circuit and in which the discharge electrode is disposed;
With
The electrode unit is provided with a plurality of electrodes arranged in the longitudinal direction at a predetermined electrode interval with respect to the ionizer body, and the clean gas supplied through the flow path portion of the fluid system circuit is injected from the injection nozzle, and the electric circuit A voltage is applied to the discharge electrode through the wiring portion, and ions are generated by corona discharge.

An ionizer according to claim 5 of the present invention is
An ionizer body formed as a long body,
An electric circuit including an annular wiring portion;
A flow path section that is branched from the upstream flow path section and connected to a plurality of downstream flow path sections, each of which has the same number of downstream flow path sections, and is cleaned through the flow path section. A fluid circuit for supplying gas;
An electrode unit having a discharge electrode electrically connected to the annular wiring portion of the electric system circuit, and an injection nozzle connected to the flow path portion of the fluid system circuit and having the discharge electrode disposed therein;
With
The electrode unit is provided with a plurality of electrodes arranged in the longitudinal direction at a predetermined electrode interval with respect to the ionizer body, and the clean gas supplied through the flow path portion of the fluid system circuit is injected from the injection nozzle, and the electric circuit A voltage is applied to the discharge electrode through the annular wiring portion, and ions are generated by corona discharge.

An ionizer according to claim 6 of the present invention is
In the ionizer according to any one of claims 3 to 5,
The electrical circuit includes a high voltage power supply unit that generates a high voltage.

An ionizer system according to claim 7 of the present invention includes:
An ionizer system comprising a plurality of ionizers according to claim 1 or claim 2,
The electrical circuit of the plurality of ionizers is connected to a central power supply unit.

An ionizer system according to claim 8 of the present invention is
An ionizer system comprising a plurality of ionizers according to any one of claims 3 to 6,
The electrical circuit of a plurality of ionizers is connected to a central power supply unit,
The fluid circuit of a plurality of ionizers is connected to a clean gas supply unit;
It is characterized by that.

According to the present invention as described above, it is possible to provide an ionizer that reduces the difference in applied voltage regardless of the position of a plurality of discharge electrodes, makes the amount of ion generation uniform, and improves the charge removal capability. .
Furthermore, in addition to the uniform ion generation amount, the ion injection amount is made uniform by spraying ions on a clean gas with the same injection amount, injection pressure, and injection speed, thereby improving the static elimination capability. An ionizer can be provided.
Also, an ionizer system can be provided that includes a plurality of ionizers such as these, and performs static elimination on a larger static elimination target while uniformizing the amount of ions generated.

  Next, an ionizer in the best mode for carrying out the present invention will be described with reference to the drawings. In the present embodiment, description will be made assuming a DC-type ionizer / AC-type ionizer and a pulsed AC-type ionizer as described above. Moreover, it is set as the form which does not inject clean air. FIG. 1 is an external view of an ionizer of this embodiment. FIG. 2 is an explanatory diagram of the ionizer of this embodiment, FIG. 2 (a) is an internal block diagram of the electrical system of the ionizer, and FIG. 2 (b) is an explanatory diagram for explaining applied voltages according to connection positions of discharge electrodes. In describing the ionizer 1 here, the left-right direction of the ionizer 1 of FIGS. 1 and 2 will be described as the longitudinal direction of the ionizer 1, and the vertical direction will be described as the vertical direction.

  As shown in FIG. 1, the ionizer 1 includes an ionizer body 10, a high-voltage power generation unit 20, and a power supply line 30. As shown in FIGS. 1 and 2, the ionizer body 10 further includes a case body 11, a discharge electrode 12, an annular wiring portion 13, and a branch wiring portion 14.

As apparent from FIG. 1, the case body 11 is formed as a long body in the shape of a bar that is long in the longitudinal direction as the electrode arrangement direction and short in the vertical direction when viewed from the front.
A plurality of discharge electrodes 12 are arranged in a longitudinal direction with a predetermined electrode interval with respect to the case body 11 of the ionizer body 10. Each electrode interval is a constant interval. In the present embodiment, a needle-like electrode having a sharp point is particularly assumed as the discharge electrode 12, but various discharge electrodes such as a rod shape and a prismatic shape can be employed. As will be described later, ions are generated by corona discharge near the tip of the discharge electrode 12. In addition, the discharge electrode 12 is not in the form of projecting to the outside. For example, the discharge electrode 12 does not project from the case body 11 and is housed in a deep position inside, or the projecting from the case body 11 protects the periphery with a cylindrical body, etc. Can be adopted.

The annular wiring portion 13 is a wiring formed in a loop shape by making a round of the electric wire. The annular wiring part 13 is electrically connected to the high-voltage power generation part 20 through a power supply line 30. The connection location is connected between a and b in FIG.
A plurality of branch wiring portions 14 (eight in this embodiment) are prepared, one end of which is electrically connected to the annular wiring portion 13, and the other end is electrically connected to the discharge electrode 12.

  Then, the function of the ionizer of this form is demonstrated. For example, it is assumed that the ionizer is applied with a DC plus high voltage. The high-voltage power generation unit 20 generates a DC plus high voltage using the power supply voltage supplied from the power source, and the DC plus high voltage is applied to the annular wiring unit 13 via the power supply line 30. In this case, when the point a in FIG. 2A is seen, the DC plus high voltage from the high voltage power generation unit 20 is applied in two branches at the point a. In one discharge electrode 12, the voltage drops due to ion generation, and thus the reduced DC plus high voltage is applied to the seven discharge electrodes 12 far from the high-voltage power source generator 20. In the same manner, the DC plus high voltage decreases as the distance from the high-voltage power generation unit 20 approaches the point b (as shown by the broken line in FIG. 2B). Note that FIG. 2 (a) highlights the descent.

  On the other hand, the direct current plus high voltage is bypassed and applied directly to the point b in FIG. In this case, looking at the point b in FIG. 2A, the DC plus high voltage from the high voltage power source generation unit 20 is bifurcated and applied at the point b. Since the voltage is lowered by the generation of ions at the individual discharge electrodes 12, the reduced direct current plus high voltage is applied to the seven discharge electrodes 12 close to the high voltage power source generation unit 20. Similarly, as it approaches the high-voltage power generation unit 20 (approaches point a), the DC plus high voltage decreases as shown by the thin line in FIG.

  When the DC plus high voltage applied from both sides of the points a and b is added up, it is estimated that substantially the same DC plus high voltage is applied to all the discharge electrodes 12. In addition, it was also confirmed by experiments and the like that there is no difference in voltage between the outside and the inside as compared with the prior art. According to such an ionizer 1, it is possible to reduce the difference in voltage applied to all the discharge electrodes 12 and make the ion generation amount uniform.

  In this embodiment, the DC ionizer to which a DC plus high voltage is applied has been described for the sake of concrete explanation, but a DC ionizer to which a DC minus high voltage is applied may be used. Further, instead of direct current, an alternating current method ionizer in which an alternating high voltage is applied to the discharge electrode 12 or a pulse alternating current method ionizer in which a pulsed alternating high voltage is applied may be used. Further, the same effect can be obtained by connecting the power supply line 30 to the annular wiring portion 13 not only between a and b but also between the two discharge electrodes 12 in the center.

  According to these ionizers, it is possible to reduce the difference in the applied voltage regardless of the connection position of the plurality of discharge electrodes, to uniformize the amount of ion generation, and to improve the charge removal capability.

Next, another form of ionizer will be described with reference to the drawings. FIG. 3 is an internal block diagram of an electric system of another form of ionizer.
Such an ionizer 2 includes an ionizer body 10 and a power supply line 30 as shown in FIG. The ionizer body 10 further includes a case body 11, a discharge electrode 12, an annular wiring portion 13, a branch wiring portion 14, and a high-voltage power generation portion 15. This embodiment will also be described assuming a DC ionizer / AC type ionizer and a pulse AC type ionizer. Moreover, it is set as the form which does not inject clean air.

  Comparing the form described above with reference to FIGS. 1 and 2 and this form, in the previous form, the high-voltage power generation unit 20 is arranged on the outside. The difference is that 15 is housed inside the case body 11. Other configurations are the same as those described above, and the same reference numerals are given and redundant descriptions are omitted. In this embodiment, the installation property of the ionizer is particularly improved. In addition, convenience is enhanced by adopting a configuration that allows direct connection of commercial power.

Next, another form of ionizer will be described with reference to the drawings. This embodiment will also be described assuming a DC ionizer / AC type ionizer and a pulse AC type ionizer. Moreover, it is set as the form which does not inject clean air. FIG. 4 is an internal block diagram of an electric system of an ionizer of another form.
Such an ionizer 3 includes an ionizer body 10 and a power supply line 30 as shown in FIG. The ionizer body 10 further includes a case body 11, discharge electrodes 12a and 12b, annular wiring portions 13a and 13b, and branch wiring portions 14a and 14b. In this embodiment, a first circuit in which the discharge electrode 12a is connected to the annular wiring 13a through the branch connection portion 14a, and a first circuit in which the discharge electrode 12b is connected to the annular wiring 13b through the branch connection portion 14b. 2 circuit. In the following description, the discharge electrode 12a, the annular wiring 13a, and the branch connection portion 14a of the first circuit will be described, and the description of the discharge electrode 12b, the annular wiring 13b, and the branch connection portion 14b will be omitted because they have the same configuration. To do.

As is apparent from FIG. 4, the case body 11 is formed as a long body in a bar shape that is long in the longitudinal direction as the electrode arrangement direction and short in the vertical direction when viewed from the front.
A plurality of discharge electrodes 12a are arranged in a longitudinal direction at a predetermined electrode interval with respect to the case body 11 of the ionizer body 10. In this embodiment, a needle electrode having a sharp point is particularly assumed as the discharge electrode 12a, but various discharge electrodes such as a rod shape and a prismatic shape can be employed. As will be described later, ions are generated by corona discharge near the tip of the discharge electrode 12a. In addition, the discharge electrode 12a is not in the form of projecting to the outside. For example, the discharge electrode 12a does not project from the case body 11 and is housed in a deep position inside, or the projecting from the case body 11 protects the periphery with a cylindrical body. Can be adopted.

The annular wiring portion 13a is a wiring formed in a loop shape by making a round of the electric wire. The annular wiring portion 13 a is electrically connected to the high voltage power source generation portion 15. As described above, the connection position can be appropriately selected without limitation.
A plurality of branch wiring portions 14a (four in this embodiment) are prepared, one end of which is electrically connected to the annular wiring portion 13a, and the other end thereof is electrically connected to the discharge electrode 12a. In this way, the first circuit is formed. The second circuit is formed in the same manner. In these first and second circuits, the discharge electrodes 12a and the discharge electrodes 12b are alternately arranged at the same interval.

  Then, the function of the ionizer of this form is demonstrated. For example, assume that the ionizer is an ionizer in which a DC plus high voltage is applied to the first circuit and a DC minus high voltage is applied to the second circuit. As is clear from the above description, a DC plus high voltage of the same potential is applied to the discharge electrode 12a of the first circuit by the annular wiring portion 13a, and the discharge electrode of the second circuit is applied by the annular wiring portion 13b. The direct current minus high voltage of the same potential is applied to 12b. According to such an ionizer, the difference between the direct current plus high voltage applied to all the discharge electrodes 12a of the first circuit is reduced, and the direct current minus high voltage applied to all the discharge electrodes 12b of the second circuit. Since the difference is reduced, the amount of ion generation can be made uniform.

In this embodiment, the DC plus high voltage is applied to the first circuit and the DC minus high voltage is applied to the second circuit for the purpose of concrete description. For example, an AC type ionizer may be used in which a sine wave high voltage is applied to the first circuit and a sine wave high voltage having a phase shifted by 180 ° is applied to the second circuit. Furthermore, a pulse AC high voltage may be applied to the first circuit, and a pulse AC high voltage having a phase shifted by 180 ° is applied to the second circuit.
Further, the high-voltage power generation unit 15 may be externally attached as shown in FIG.

  According to such an ionizer, in the first circuit and the second circuit, the difference in applied voltage is reduced regardless of the position of each of the plurality of discharge electrodes, and the amount of generated ions is made uniform, thereby eliminating static electricity. Can be improved.

  In addition, it is good also as a form which added the fluid system circuit shown in FIG. 13 further to the ionizers 1, 2, and 3 demonstrated using FIGS. In this case, the amount of ion generation is made uniform in the electric circuit, and the charge removal capability can be improved as compared with the prior art.

  Next, another form of ionizer will be described with reference to the drawings. FIG. 5 is an internal block diagram of a fluid system of an ionizer of another form. FIG. 6 is an explanatory diagram of the connection relation of the fluid circuit. In this embodiment, clean gas is ejected from the periphery of the discharge electrode, and the fluid system circuit is characterized. The electric circuit is in the form of any of the ionizers 1, 2, and 3 described with reference to FIGS. Further, an effect can be expected as a configuration in which the electric circuit of the ionizer 100 described with reference to FIG. 12 is combined with the fluid circuit of this embodiment.

  Such ionizers 1, 2 and 3 are provided with an ionizer body 10 and a clean gas supply unit 40 as shown in FIG. The ionizer body 10 includes a case body 11, a main channel portion 16, a first branch channel portion 17 a, a second branch channel portion 17 b, a third branch channel portion 17 c, and an injection nozzle 18.

As is apparent from FIG. 5, the case body 11 is formed as a long bar in a bar shape that is long in the longitudinal direction, which is the spray nozzle arrangement direction, and short in the vertical direction when viewed from the front.
The main flow path portion 16 is connected so as to communicate with the clean gas supply portion 40.

The first branch channel portion 17a having two channels communicates with the main channel portion 16 at point c. Two first flow paths 17a are provided.
The second branch channel portion 17b of the two channels communicates with the first branch channel portion 17a at the point d. Similarly, at the point e, the second branch channel portion 17b of the other two channels communicates with the first branch channel portion 17a. The second branch channel portion 17b is provided with four channels.
The third branch channel portion 17c of the two channels communicates with the second branch channel portion 17b at the point f. Similarly, at the points g, h, and i, the third branch channel portion 17c of the other two channels communicates with the second branch channel portion 17b. The third branch channel portion 17c is provided with eight channels.
The main flow path section 16, the first branch flow path section 17a, the second branch flow path section 17b, and the third branch flow path section 17c form the flow path of the present invention. Intuitively, the fluid circuit is a bifurcated flow path that bifurcates as it goes downstream as shown in FIG.

  A plurality of injection nozzles 18 (eight in this embodiment) are prepared, and one ends thereof are connected so as to communicate with the third branch flow path portion 17c. The injection nozzle 18 injects clean air supplied through the third branch flow path portion 17c. The discharge electrode 12 is arranged in the injection nozzle 18 to constitute the electrode unit of the present invention, and the generated ions are transported and injected by clean air. As this clean air, air from which dust or the like has been removed or a rare gas such as argon can be used.

  Then, the function of the ionizer of this form is demonstrated. A high-pressure clean gas is supplied by the clean gas supply unit 40 and flows through the main flow path unit 16. In this case, when the point c in FIGS. 5 and 6 is viewed, it branches from the main flow path portion 16 that is the upstream flow path portion and flows to the first branch flow path portion 17a that is the two downstream flow path portions. . In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included downstream of each first branch flow path portion 17a is set to be the same number of four. ing. In this way, since the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to have the same number at the point c, the same flow rate is cleaned at the point c to the first branch flow path portion 17a of the two flow paths. Gas is distributed and flushed.

5 and 6, the second branch channel portion 17 b that is branched from the first branch channel portion 17 a that is the upstream channel portion and that is two downstream channel portions. To flow. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each second branch flow path portion 17b is set to two of the same number. ing. In this way, since the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to have the same number at the point d, the same flow rate is cleaned at the point d to the second branch flow path portion 17b of the two flow paths. Gas is distributed and flushed.
Similarly, when the point e in FIGS. 5 and 6 is seen, the second branch flow path section that is branched from the first branch flow path section 17a that is the upstream flow path section and is the two downstream flow path sections. It flows to 17b. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each second branch flow path portion 17b is set to two of the same number. ing. In this way, since the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to have the same number at the point e, the same flow rate is cleaned at the point e to the second branch flow path portion 17b of the two flow paths. Gas is distributed and flushed.

5 and 6, the third branch flow path portion 17c that is branched from the second branch flow path portion 17b that is the upstream flow path portion and is the two downstream flow path portions. To flow. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each third branch flow path portion 17c is set to the same number. ing. In this way, since the number of downstream injection nozzles 18 (third branch flow path portions 17c) is the same at the point f, the same flow rate is cleaned at the point f to the third branch flow path portion 17c of the two flow paths. Gas is distributed and flushed.
Similarly, when g point, h point, and i point in FIG. 5 and FIG. 6 are seen, the two branch channel portions are branched from the second branch channel portion 17b that is the upstream channel portion. It is connected to a certain third branch flow path portion 17c. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each third branch flow path portion 17c is set to the same number. ing. As described above, since the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to have the same number at the g point, the h point, and the i point, to the third branch flow path portion 17c having two flow paths. The clean gas having the same flow rate is distributed and flowed at the points g, h, and i.

  Clean gas having substantially the same flow rate is injected from all of these injection nozzles 18. According to such an ionizer, the injection amount, the injection pressure, and the injection speed of the clean gas are constant regardless of the location, so that the ion injection amount can be made uniform, and as a result, the ion balance can be made uniform. Further, as described above, an ionizer (see FIGS. 1, 2 and 3) in which a DC plus high voltage is applied to the annular wiring portion, and an ionizer (see FIGS. 1 and 2) in which a DC minus high voltage is applied to the annular wiring portion. 2, see Fig. 3), an ionizer (see Fig. 1, Fig. 2 and Fig. 3) in which an AC high voltage is applied to the annular wiring part, and a DC plus high voltage and a DC minus high voltage are applied to the two annular wiring parts, respectively. Ionizer (see FIG. 4), ionizer (see FIG. 4) to which an alternating high voltage is applied at each of the two annular wiring sections, or a pulse at which the phases are shifted at the two annular wiring sections. With an ionizer (see FIG. 4) to which an alternating high voltage is applied, the difference in voltage applied to all the discharge electrodes 12 can be reduced, and the amount of generated ions can be made uniform. These effects of synthesizing the ion generation amount and the ion injection amount synergistically combine to further uniform the ion balance and ensure a highly accurate charge removal capability. Further, the ionizer can be either an external type or an internal built-in type of high-voltage power source.

  According to such an ionizer, the difference in applied voltage is reduced regardless of the position of a plurality of discharge electrodes, the ion generation amount is made uniform, and furthermore, the clean gas is injected due to the injection amount, injection pressure, and injection speed. Since the amount of ion injection to be performed is also made uniform, the charge removal capability can be improved.

  Next, another form of ionizer will be described with reference to the drawings. FIG. 7 is an explanatory diagram of the connection relationship of another form of ionizer. In this embodiment, similar to the ionizer described with reference to FIGS. 5 and 6, ions are generated while jetting clean gas from the periphery of the discharge electrode, but only the fluid system circuit is changed. . The electric circuit is in the form of any of the ionizers 1, 2, and 3 described with reference to FIGS. Further, an effect can be expected as a configuration in which the electric circuit of the ionizer 100 described with reference to FIG. 12 is combined with the fluid circuit of this embodiment.

The flow path portion of the ionizer will be described.
The main flow path portion 16 is connected so as to communicate with the clean gas supply portion 40.
The first branch channel portion 17a having two channels communicates with the main channel portion 16 at a point j. Two first flow paths 17a are provided.
The second branch channel portion 17b of the two channels communicates with the first branch channel portion 17a at the point k. Similarly, at the point l, the second branch channel portion 17b of the other two channels communicates with the first branch channel portion 17a. The second branch channel portion 17b is provided with four channels.
The third branch channel portion 17c of the three channels communicates with the second branch channel portion 17b at the point m. Similarly, at the n point, the o point, and the p point, the third branch channel portion 17c of the other three channels communicates with the second branch channel portion 17b. The third branch channel portion 17c is provided with 12 channels.
The main flow path section 16, the first branch flow path section 17a, the second branch flow path section 17b, and the third branch flow path section 17c form the flow path of the present invention.

  Then, the function of the ionizer of this form is demonstrated. A high-pressure clean gas is supplied by the clean gas supply unit 40 and flows through the main flow path unit 16. In this case, when the point j in FIG. 7 is seen, it branches from the main flow path part 16 which is an upstream flow path part, and flows into the 1st branch flow path part 17a which is two downstream flow path parts. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included downstream of each first branch flow path portion 17a is set to be the same number of six. ing. In this way, since the number of downstream injection nozzles 18 (third branch flow path portions 17c) is the same at point j, the same flow rate is cleaned at point j to the first branch flow path portion 17a of the two flow paths. Gas is distributed and flushed.

Further, looking at a point k in FIG. 7, the first branch channel portion 17a that is the upstream channel portion is branched and flows to the second branch channel portion 17b that is the two downstream channel portions. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included downstream of each second branch flow path portion 17b is set to be the same number of three. ing. Thus, since consideration is given so that the number of the downstream injection nozzles 18 (third branch flow path portions 17c) is the same at the k point, the same flow rate is cleaned at the k point to the second branch flow path portions 17b of the two flow paths. Gas is distributed and flushed.
Similarly, when the point 1 in FIG. 7 is seen, it branches from the 1st branch flow path part 17a which is an upstream flow path part, and flows into the 2nd branch flow path part 17b which is two downstream flow path parts. . In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included downstream of each second branch flow path portion 17b is set to be the same number of three. ing. In this way, since the number of downstream injection nozzles 18 (third branch flow path portions 17c) is considered to be the same at point l, the same flow rate is cleaned at point l to the second branch flow path portion 17b of the two flow paths. Gas is distributed and flushed.

Further, looking at point m in FIG. 7, the flow branches from the second branch flow channel portion 17 b that is the upstream flow channel portion and flows to the third branch flow channel portion 17 c that is the three downstream flow channel portions. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each third branch flow path portion 17c is set to the same number. ing. Thus, since consideration is given so that the number of the downstream injection nozzles 18 (third branch flow path portions 17c) is the same at the m point, the same flow rate is cleaned at the m point to the third branch flow path portion 17c of the three flow paths. Gas is distributed and flushed.
Similarly, when the n point, the o point, and the p point in FIG. 7 are viewed, each of the third downstream channel portions is branched from the second branch channel portion 17b that is the upstream channel portion. It connects to the branch flow path part 17c. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each third branch flow path portion 17c is set to the same number. ing. As described above, since the number of downstream injection nozzles 18 (third branch flow path portions 17c) is the same at the n point, the o point, and the p point, to the third branch flow path portion 17c of the three flow paths. The clean gas having the same flow rate is distributed and flowed at the n point, the o point, and the p point.

  Even with this configuration, clean gas having substantially the same flow rate is injected from all of the injection nozzles. According to such an ionizer, it is possible to make the injection amount, injection pressure, and injection speed of the clean gas uniform, and the ion balance can be made uniform. Further, as described above, an ionizer (see FIGS. 1, 2 and 3) in which a DC plus high voltage is applied to the annular wiring portion, and an ionizer (see FIGS. 1 and 2) in which a DC minus high voltage is applied to the annular wiring portion. 2, see Fig. 3), an ionizer (see Fig. 1, Fig. 2 and Fig. 3) in which an AC high voltage is applied to the annular wiring part, and a DC plus high voltage and a DC minus high voltage are applied to the two annular wiring parts, respectively. Ionizer (see FIG. 4), ionizer (see FIG. 4) to which an alternating high voltage is applied at each of the two annular wiring sections, or a pulse at which the phases are shifted at the two annular wiring sections. With an ionizer (see FIG. 4) to which an alternating high voltage is applied, the difference in voltage applied to all the discharge electrodes 12 can be reduced, and the amount of generated ions can be made uniform. These effects of synthesizing the ion generation amount and the ion injection amount synergistically combine to further uniform the ion balance and ensure a highly accurate charge removal capability. Further, the ionizer can employ either an external type or an internal built-in type of high voltage power source.

  According to such an ionizer, the difference in applied voltage is reduced regardless of the positions of a plurality of discharge electrodes, the amount of generated ions is made uniform, and the amount of clean gas injected is made uniform, so that the charge removal capability is improved. Can be improved.

  Next, another form of ionizer will be described with reference to the drawings. FIG. 8 is an explanatory diagram of the connection relationship of another form of ionizer. In this embodiment, similar to the ionizer described with reference to FIGS. 5 and 6, ions are generated while jetting clean gas from the periphery of the discharge electrode, but only the fluid system circuit is changed. . The electric circuit is in the form of any of the ionizers 1, 2, and 3 described with reference to FIGS. Further, an effect can be expected as a configuration in which the electric circuit of the ionizer 100 described with reference to FIG. 12 is combined with the fluid circuit of this embodiment.

The flow path portion of the ionizer will be described.
The main flow path portion 16 is connected so as to communicate with the clean gas supply portion 40.
The first branch channel portion 17a having two channels communicates with the main channel portion 16 at the point q. Two first flow paths 17a are provided.
The third branch channel portion 17b of the three channels communicates with the first branch channel portion 17a at the point r. Similarly, at the point s, the second branch channel portion 17b of the other three channels communicates with the first branch channel portion 17a. Six second flow paths 17b are provided.
The third branch channel portion 17c having two channels communicates with the second branch channel portion 17b at the point t. Similarly, at the u point, the v point, the w point, the x point, and the y point, the third branch channel portion 17c of the other two channels communicates with the second branch channel portion 17b. The third branch channel portion 17c is provided with 12 channels.
The main flow path section 16, the first branch flow path section 17a, the second branch flow path section 17b, and the third branch flow path section 17c form the flow path of the present invention.

  Then, the function of the ionizer of this form is demonstrated. A high-pressure clean gas is supplied by the clean gas supply unit 40 and flows through the main flow path unit 16. In this case, looking at the point q in FIG. 8, the main flow path portion 16 that is the upstream flow path portion is branched and flows to the first branch flow path portion 17a that is the two downstream flow path portions. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included downstream of each first branch flow path portion 17a is set to be the same number of six. ing. Thus, since the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to be the same number at the point q, the same flow rate is cleaned at the q point to the first branch flow path portions 17a of the two flow paths. Gas is distributed and flushed.

Furthermore, looking at point r in FIG. 8, the first branch flow path portion 17a that is the upstream flow path portion is branched and flows to the second branch flow path portion 17b that is the three downstream flow path portions. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each second branch flow path portion 17b is set to two of the same number. ing. In this way, because the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to have the same number at the r point, the same flow rate is cleaned at the r point to the second branch flow path portion 17b of the three flow paths. Gas is distributed and flushed.
Similarly, looking at the point s in FIG. 8, the first branch flow path portion 17a that is the upstream flow path portion is branched and flows to the second branch flow path portion 17b that is the three downstream flow path portions. . In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each second branch flow path portion 17b is set to two of the same number. ing. In this way, because the number of downstream injection nozzles 18 (third branch flow path portions 17c) is the same at the point s, the same flow rate is cleaned at the point s to the second branch flow path portion 17b of the three flow paths. Gas is distributed and flushed.

Further, when viewing the point t in FIG. 8, the second branch flow path portion 17b that is the upstream flow path portion is branched and flows to the third branch flow path portion 17c that is the two downstream flow path portions. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each third branch flow path portion 17c is set to the same number. ing. Thus, since the downstream injection nozzles 18 (third branch flow path portions 17c) are considered to be the same number at the point t, the same flow rate is cleaned at the point t to the third branch flow path portions 17c of the two flow paths. Gas is distributed and flushed.
Similarly, when the points u, v, w, x, and y in FIG. 8 are seen, each of the two downstream flows is branched from the second branch channel portion 17b that is the upstream channel portion. It is connected to the third branch flow path part 17c which is a road part. In this case, the number of injection nozzles 18 (the number of third branch flow path portions 17c connected to the injection nozzles 18) included in the downstream of each third branch flow path portion 17c is set to the same number. ing. As described above, the u-point, the v-point, the w-point, the x-point, and the y-point are all considered to have the same number of downstream injection nozzles 18 (third branch flow path portions 17c). The clean gas having the same flow rate is distributed and supplied to the branch flow path portion 17c at the points u, v, w, x, and y.

  Even with this configuration, clean gas having substantially the same flow rate is injected from all of the injection nozzles. According to such an ionizer, it is possible to make the injection amount, injection pressure, and injection speed of the clean gas uniform, and the ion balance can be made uniform. Further, as described above, an ionizer (see FIGS. 1, 2 and 3) in which a DC plus high voltage is applied to the annular wiring portion, and an ionizer (see FIGS. 1 and 2) in which a DC minus high voltage is applied to the annular wiring portion. 2, see Fig. 3), an ionizer (see Fig. 1, Fig. 2 and Fig. 3) in which an AC high voltage is applied to the annular wiring part, and a DC plus high voltage and a DC minus high voltage are applied to the two annular wiring parts, respectively. Ionizer (see FIG. 4), ionizer (see FIG. 4) to which an alternating high voltage is applied at each of the two annular wiring sections, or a pulse at which the phases are shifted at the two annular wiring sections. With an ionizer (see FIG. 4) to which an alternating high voltage is applied, the difference in voltage applied to all the discharge electrodes 12 can be reduced, and the amount of generated ions can be made uniform. These effects of synthesizing the ion generation amount and the ion injection amount synergistically combine to further uniform the ion balance and ensure a highly accurate charge removal capability. Further, the ionizer can be either an external type or an internal built-in type of high-voltage power source.

  According to such an ionizer, the difference in applied voltage is reduced regardless of the positions of a plurality of discharge electrodes, the amount of generated ions is made uniform, and the amount of clean gas injected is made uniform, so that the charge removal capability is improved. Can be improved.

  In the fluid system circuit of the ionizer described with reference to FIGS. 4 to 8, the essence of the ionizer is that it is branched from the upstream flow path section and connected to a plurality of downstream flow path sections. If it is a fluid system circuit that includes the flow path portion so that the number of included injection nozzles is the same and supplies the clean gas through the flow path portion, the clean gas with the same flow rate will be distributed and flowed, Contributes to uniform ion balance. The number of discharge electrodes can also be selected as appropriate.

  Next, an ionizer system obtained by systemizing the above-described ionizer will be described with reference to the drawings. FIG. 9 is a system configuration diagram of the ionizer system of this embodiment. In this embodiment, a plurality of the above-described ionizers 1, 2 and 3 described with reference to FIGS. 1 to 4 are arranged, and the central power supply unit 50 is connected to the plurality of ionizers 1, 2 and 3 in a radiation manner. Even if the voltage supplied from the central power supply unit 50 fluctuates, if the high voltage power generation unit 30 of each of the ionizers 1, 2, 3 is set to a voltage having a predetermined amplitude and then supplied to the annular wiring unit 13, The ion balance can be made uniform by the ionizers 1, 2 and 3. Further, the central power supply unit 50 may supply power supply voltages having the same amplitude.

  According to such an ionizer system, it is possible to reduce the difference in applied voltage regardless of the positions of a plurality of ionizers and the discharge electrodes of the ionizer, to uniformize the amount of generated ions, and to improve the static elimination capability. .

  Subsequently, another ionizer system in which the above-described ionizer is systemized will be described with reference to the drawings. FIG. 10 is a system configuration diagram of an ionizer system according to another embodiment. In this embodiment, a plurality of the above-described ionizers 1, 2, 3 described with reference to FIGS. 1 to 4 are arranged, and the plurality of ionizers 1, 2, 3 are connected in parallel to the central power supply unit 50. Even in this case, even if the voltage supplied from the central power supply unit 50 fluctuates, all the ionizers can be obtained by changing the voltage to a voltage having a predetermined amplitude by the high voltage power generation unit 20 of each ionizer and supplying the voltage to the annular wiring unit 13. 1, 2, 3 can make the ion balance uniform.

  According to such an ionizer system, it is possible to reduce the difference in applied voltage regardless of the positions of a plurality of ionizers and the discharge electrodes of the ionizer, to uniformize the amount of generated ions, and to improve the static elimination capability. .

  Next, a system in which a fluid circuit is added to the above ionizer system will be described with reference to the drawings. FIG. 11 is a system configuration diagram of an ionizer system according to another embodiment. In this embodiment, the plurality of ionizers 1, 2 and 3 described with reference to FIGS. 9 and 10 are further provided with fluid circuits as described with reference to FIGS. In this configuration, fluid system circuits of a plurality of ionizers 1, 2 and 3 are connected in a radiation manner (in FIG. 11, four injection nozzles 18 are provided, but eight may be used as shown in FIGS. 5 to 8). By making the injection pressure uniform in the clean gas supplied from the clean gas supply unit 40, the ion balance can be made uniform in all ionizers.

  According to such an ionizer system, the difference in applied voltage is reduced regardless of the positions of a plurality of ionizers and the discharge electrodes of the ionizer, the ion generation amount is made uniform, and the clean gas injection amount is also uniform. Therefore, the static elimination ability can be improved.

  The ionizer and ionizer system of this embodiment have been described above with reference to the drawings. In the above description, it has been described that the number of discharge electrodes and electrode units is eight or twelve. However, the number of discharge electrodes can be appropriately selected at the time of design, and for example, an ionizer having an appropriately increased number of electrode units such as an ionizer having 16 or 18 electrode units can be employed.

  According to such an ionizer, the difference in applied voltage is reduced regardless of the position of the plurality of discharge electrodes, the ion generation amount is made uniform, and the clean gas injection amount is also made uniform, and the ion injection amount is made uniform. As a result, the charge removal capability can be improved.

1 is an external view of an ionizer of the best mode for carrying out the present invention. It is explanatory drawing of the ionizer of the best form for implementing this invention, Fig.2 (a) is an electrical system internal block diagram of an ionizer, FIG.2 (b) demonstrates the applied voltage according to the connection position of a discharge electrode. It is explanatory drawing. It is an internal block diagram of the electric system of the ionizer of another form. It is an internal block diagram of the electric system of the ionizer of another form. It is a fluid system internal block diagram of the ionizer of another form. It is explanatory drawing of the connection relation of a fluid system circuit. It is explanatory drawing of the connection relation of the fluid system circuit of the ionizer of another form. It is explanatory drawing of the connection relation of the fluid system circuit of the ionizer of another form. 1 is a system configuration diagram of an ionizer system of the best mode for carrying out the present invention. It is a system block diagram of the ionizer system of another form. It is a system block diagram of the ionizer system of another form. It is explanatory drawing of the ionizer of a prior art, Fig.12 (a) is an electrical system internal block diagram, FIG.12 (b) is explanatory drawing explaining the difference in the applied voltage in the position of a needle-shaped electrode. FIG. 13A is an explanatory diagram of a prior art ionizer, FIG. 13A is a fluid system internal block diagram, and FIG. 13B is an explanatory diagram illustrating a difference in the amount of clean gas injected at the position of the injection nozzle.

Explanation of symbols

1, 2, 3: Ionizer 10: Ionizer body 11: Case bodies 12, 12a, 12b: Discharge electrodes 13, 13a, 13b: Ring wiring parts 14, 14a, 14b: Branch wiring parts 15, 20: High voltage power generation part 16 : Main flow path part 17a: First branch flow path part 17b: Second branch flow path part 17c: Third branch flow path part 18: Injection nozzle 30: Power supply line 40: Clean gas supply part 50: Central power supply part

Claims (8)

An ionizer body formed as a long body,
An electric circuit including an annular wiring portion;
A discharge electrode electrically connected to the annular wiring portion;
With
A plurality of the discharge electrodes are arranged in a longitudinal direction with a predetermined electrode interval with respect to the ionizer body, and a voltage is applied through an annular wiring portion of an electric circuit to generate ions by corona discharge. Ionizer. The ionizer according to claim 1, wherein
The electric circuit includes an ionizer that includes a high-voltage power generation unit that generates a high voltage. An ionizer body formed as a long body,
An electric circuit including an annular wiring portion;
A fluid circuit for supplying clean gas through the flow path,
An electrode unit having a discharge electrode electrically connected to the annular wiring portion of the electric system circuit, and an injection nozzle connected to the flow path portion of the fluid system circuit and having the discharge electrode disposed therein;
With
The electrode unit is provided with a plurality of electrodes arranged in the longitudinal direction at a predetermined electrode interval with respect to the ionizer body, and the clean gas supplied through the flow path portion of the fluid system circuit is injected from the injection nozzle, and the electric circuit The ionizer is characterized in that a voltage is applied to the discharge electrode through the annular wiring portion and ions are generated by corona discharge. An ionizer body formed as a long body,
An electric circuit including a wiring portion;
Including a flow path portion branched from the upstream flow path section and connected to a plurality of downstream flow path sections so that the number of each of the downstream flow path sections is the same; Fluid system circuit for supplying
An electrode unit having a discharge electrode electrically connected to the wiring part of the electric system circuit, and an injection nozzle that is connected to the flow path part of the fluid system circuit and in which the discharge electrode is disposed;
With
The electrode unit is provided with a plurality of electrodes arranged in the longitudinal direction at a predetermined electrode interval with respect to the ionizer body, and the clean gas supplied through the flow path portion of the fluid system circuit is injected from the injection nozzle, and the electric circuit An ionizer is characterized in that a voltage is applied to the discharge electrode through the wiring portion and ions are generated by corona discharge. An ionizer body formed as a long body,
An electric circuit including an annular wiring portion;
A flow path section that is branched from the upstream flow path section and connected to a plurality of downstream flow path sections, each of which has the same number of downstream flow path sections, and is cleaned through the flow path section. A fluid circuit for supplying gas;
An electrode unit having a discharge electrode electrically connected to the annular wiring portion of the electric system circuit, and an injection nozzle connected to the flow path portion of the fluid system circuit and having the discharge electrode disposed therein;
With
The electrode unit is provided with a plurality of electrodes arranged in the longitudinal direction at a predetermined electrode interval with respect to the ionizer body, and the clean gas supplied through the flow path portion of the fluid system circuit is injected from the injection nozzle, and the electric circuit The ionizer is characterized in that a voltage is applied to the discharge electrode through the annular wiring portion and ions are generated by corona discharge. In the ionizer according to any one of claims 3 to 5,
The electric circuit includes an ionizer including a high-voltage power supply unit that generates a high voltage. An ionizer system comprising a plurality of ionizers according to claim 1 or claim 2,
The ionizer system characterized in that the electrical circuits of a plurality of ionizers are connected to a central power source. An ionizer system comprising a plurality of ionizers according to any one of claims 3 to 6,
The electrical circuit of a plurality of ionizers is connected to a central power supply unit,
The fluid circuit of a plurality of ionizers is connected to a clean gas supply unit;
Ionizer system characterized by this.

Images