JP2010127118A - Dry vacuum pump unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dry vacuum pump unit which has a compact and lightweight structure allowing the movement to a required place manually and which can efficiently dissipate heat from electrical components, pump modules or the like to be cooled. <P>SOLUTION: A dry vacuum pump unit including a booster pump module 4 arranged on a vacuum side and a main pump module 5 arranged on an outside air pressure side, includes a heat dissipation plate 2 equipped with heat dissipation fins 11, mounts electrical components 3 on the heat dissipation plate 2, and installs the booster pump module 4 and main pump module 5 by interposing a pump module mounting base 14 constituted of materials excellent in heat conductivity on the heat dissipation plate 2 or the pump module on the heat dissipation plate 2 directly. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a small and lightweight dry vacuum pump unit that can be moved by handling at an ultimate vacuum of about 0.5 Pa.

  A vacuum pump having the above-described exhaust capability is used for applications such as a sputtering apparatus, a helium leak detector, and an analysis apparatus such as an SEM. In addition, vacuum pumps with the above exhaust capability are used as rough vacuum pumps for high vacuum pumps such as turbo molecular pumps, and for the purpose of sucking gas such as water vapor as in vacuum drying / vacuum laminating devices. It is used.

  Oil rotary pumps are the mainstream as small-capacity, light-weight vacuum pumps. However, the reverse diffusion of oil vapor into the vacuum chamber (vacuum chamber, oil contamination of the workpiece), oil contamination of the exhaust line (fire hazard), environmental contamination, oil reduction due to oil splashing, oil deterioration due to moisture mixing, There are problems such as fouling and regular oil replenishment and oil exchange. In particular, fluorinated oil for vacuum pumps is expensive, and replacement work is troublesome.

  Thus, in recent years, scroll-type dry vacuum pumps have emerged as vacuum pumps that replace oil rotary pumps. The scroll-type dry vacuum pump is oil-free and continuously compresses from vacuum to atmospheric pressure by the rocking motion of the scroll, so it has features such as low power during vacuum operation and relatively good vacuum performance. . However, since a tip seal (contact seal) is used at the end of the scroll, there is a problem that the tip seal is worn and particles are generated to contaminate the inside of the vacuum chamber. In addition, since the chip seal is worn, the vacuum performance deteriorates over time, and the chip seal or the like must be replaced after about one year of continuous operation. Furthermore, when exchanging the tip seal, the vacuum pump must be disassembled, resulting in high replacement costs. In addition, there are problems such as large size and high cost compared to an oil rotary pump of the same capacity.

  As a vacuum pump unit corresponding to the above problem, there is a vacuum pump unit using a screw type vacuum pump as shown in Patent Document 1. This vacuum pump unit includes a main pump arranged on the external pressure side and a booster pump arranged on the vacuum side. The booster pump and the main pump are connected in series, and the booster pump has a higher pumping speed than the main pump. The main pump and the booster pump each include a pair of pump rotors, a pump casing having an intake port and an exhaust port, and a pair of magnet rotors that rotate integrally with the pair of pump rotors.

The vacuum pump unit described in Patent Literature 1 can synchronously reverse the pump rotor by the magnet coupling action of the pair of magnet rotors, which eliminates the need for using a timing gear and is oil-free. In this vacuum pump unit, it is necessary to rotate the vacuum pump at a high speed in order to reduce the size and weight so that the vacuum reaching performance can be maintained and moved by handling. When the vacuum pump is rotated at a high speed, a large amount of heat is generated in the pump module, electrical parts, motor, etc., and it is necessary to efficiently dissipate the generated heat and cool it to reduce the temperature.
JP 2007-231935 A

  The present invention has been made in view of the above points, and is small and light that can be moved to a necessary place by handling, and efficiently generates heat from electrical components, pump modules, etc. without using cooling water. It aims at providing the dry vacuum pump unit which can cool by radiating heat.

  In order to solve the above problems, a phon invention includes a heat dissipation plate including a heat dissipation fin in a dry vacuum pump unit including a booster pump module disposed on a vacuum side and a main pump module disposed on an external air pressure side. In addition to mounting electrical parts on the heat sink and mounting the booster pump module and the main pump module on the heat sink by interposing a pump module mounting base made of a material having good heat conduction, or on the heat sink Characterized by mounting the pump module directly

  Further, according to the present invention, in the dry vacuum pump unit described above, a cover is attached to the side where the radiation fin is exposed, a first air flow path is formed, and an electrical component, a booster pump module, and a main pump module are arranged with the pump outer cover. A second air flow path is formed, and a cooling fan that guides cooling air from the outside to the first air flow path and the second air flow path is provided.

  Further, the present invention is characterized in that, in the dry vacuum pump unit described above, a heat radiating plate provided with heat radiating fins is attached to the outer surfaces of the booster pump module and the main pump module. .

  In the dry vacuum pump unit according to the present invention, the pump module mounting base is made of aluminum or an aluminum alloy.

  Further, the present invention is characterized in that, in the dry vacuum pump unit, the booster pump module is disposed upstream of the air flow in the second air flow path, and the main pump module is disposed downstream.

  Further, according to the present invention, in the above dry vacuum pump unit, the booster pump module and the main pump module each include a motor unit and a pump unit, and the pump unit includes a pump casing having a pair of pump rotors, an intake port, and an exhaust port. The motor unit is a magnet coupling type DC brushless motor including a pair of magnet rotors that rotate integrally with a pair of pump rotors.

  According to the present invention, in the dry vacuum pump unit, the exterior cover is provided with an air intake hood that takes air into the second air flow path and an air discharge hood that discharges the first and second air flow paths. A sound absorbing layer made of a sound absorbing material is provided on the inner surfaces of the air intake hood and the air discharge hood, respectively.

  The present invention also provides a control means for operating / stopping the cooling fan in the dry vacuum pump unit, wherein the control means starts the operation of the cooling fan simultaneously with the activation of the dry vacuum pump unit. It is characterized in that it has a function of stopping the cooling fan when a predetermined time elapses after the unit is stopped or when the temperature after the dry vacuum pump unit is stopped is a predetermined value or less.

  According to the present invention, the heat generated in the electrical components, the booster pump module, and the main pump module mounted on the heat sink and transferred to the heat sink is efficiently radiated and cooled by the air flowing through the first air flow path. In addition, since the heat of the outer surfaces of the electrical parts, the booster pump module, and the main pump module is efficiently radiated and cooled by the air flowing through the second air flow path, the electrical parts, the booster pump module, and the main pump module Reliability is improved.

  In addition, according to the present invention, since the heat sink having the heat radiating fins is attached to the outer surfaces of the booster pump module and the main pump module, the generated air is in contact with the heat radiating fins of the heat radiating plate. Heat is efficiently radiated by the air flowing through.

  According to the present invention, since the pump module mounting base is made of aluminum or an aluminum alloy, the heat generated by the booster pump module and the main pump module is collected on the heat sink through the pump module mounting base with good thermal conductivity. Therefore, heat is efficiently radiated by the air flowing through the first air flow path.

  Further, according to the present invention, since the booster pump module is disposed upstream of the air flow in the second air flow path and the main pump module is disposed downstream, the amount of heat generated from the booster pump module is generated in the main pump module. Since it is less than the amount of heat, the air flows from the low temperature portion to the high temperature portion, and efficiently dissipates heat and is cooled.

  Further, according to the present invention, the motor parts of the booster pump module and the main pump module are magnet coupling type DC brushless motors having a pair of magnet rotors that rotate integrally with the pair of pump rotors. This eliminates the need for a lubricating oil and a lubricating system for lubricating the timing gear, thereby reducing the weight.

  In addition, according to the present invention, the sound absorbing layer made of the sound absorbing material is provided on the inner surfaces of the air intake hood and the air exhaust hood, respectively, thereby suppressing the noise generated when the dry vacuum pump unit is operated from being released to the outside. it can.

  Further, according to the present invention, the control means has a function of stopping the cooling fan after a predetermined time has elapsed since the stop of the dry vacuum pump unit or when the temperature after the stop of the dry vacuum pump unit becomes a predetermined value or less. Therefore, it is possible to prevent noise caused by the cooling fan operation after the dry vacuum pump unit is stopped.

  Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 are diagrams showing the configuration of a dry vacuum pump unit according to the present invention. FIG. 1 is a front view, FIG. 2 is a top view, FIG. 3 is a left side view, and FIG. As shown in the figure, this dry vacuum pump unit 1 includes a heat radiating plate 2, and an electrical component 3, a booster pump module 4, and a main pump module 5 are mounted on the heat radiating plate 2. The dry vacuum pump unit 1 is entirely covered with an exterior cover 6, and can be moved to a predetermined position on the upper surface of the exterior cover 6 with both hands and moved to a place where the dry vacuum pump unit 1 is used. In addition, two handles 7 are attached.

  The heat radiating plate 2 is provided with a large number of heat radiating fins 11 projecting downward, and is mounted on the bottom cover 2a, and the lower sides of the exterior cover 6 are mounted on both sides thereof. An air flow path 13 (first air flow path) through which cooling air passes is formed by the heat radiating plate 2 and the bottom cover 2a, and the plurality of heat radiating fins 11 are air flowing in the air flow path 13 in the longitudinal direction. It is arranged toward the flow of. The electrical components 3 are various electrical and electronic components such as a rectifier and an inverter that constitute a drive unit that drives the booster pump module 4 and the main pump module 5 and a control unit that controls the electrical components. The electrical components are mounted on the heat sink 2. Has been. Reference numeral 14 denotes a mounting base for mounting the booster pump module 4 and the main pump module 5 to the heat radiating plate 2. The booster pump module 4 is mounted horizontally via the mounting base 14, and the main pump module 5 is connected via the mounting base 14. Are installed vertically.

  As shown in FIG. 5, an air intake hood 16 is attached to the left outer surface of the outer cover 6 of the dry vacuum pump unit 1, and a fan hood 17 is attached to the right outer surface of the outer cover 6. A cooling fan 18 is attached to the right inner surface of the. By rotating the cooling fan 18, the cooling air flowing from the air intake port 16 a at the lower end of the air intake hood 16 passes through the space 19 (second air flow path) in the exterior cover 6 as indicated by an arrow A. It flows through and flows into the fan hood 17 from a discharge port (not shown) provided on the right inner surface of the exterior cover 6 and is exhausted to the outside through the air discharge port 17a at the lower end.

  By disposing the electrical component 3, the booster pump module 4, and the main pump module 5 in the space 19 formed by the exterior cover 6 above the heat radiating plate 2 as described above, the amount of heat generated on the upstream side of the air flow flowing through the space. The electrical component 3 and the booster pump module 4 with a small amount are arranged, and the main pump module 5 with a large calorific value is arranged on the downstream side. That is, the arrangement structure is such that the air flowing through the space 19 flows from a low temperature region to a high temperature region. Note that sound absorbing layers 16b and 17b made of a sound absorbing material such as sponge are provided on the inner surface of the air intake hood 16 and the inner surface of the fan hood 17, and noise generated during the operation of the dry vacuum pump unit 1 is externally provided. To avoid divergence.

  In addition, by rotating the cooling fan 18, the cooling air flowing in from the air intake port 13 a at the left end of the air flow path 13 flows through the heat sink 2 located in the air flow path 13 as indicated by an arrow B. The air flows in contact with the radiating fins 11 and flows into the space 19 in the exterior cover 6 from an air discharge port (not shown) at the right end of the air flow path 13, and the main pump module 5 is moved to the side of the pump unit 21. It passes through the fan hood 17 and is exhausted to the outside through an air discharge port 17a at the lower end thereof.

  As shown in FIGS. 1, 2, and 4, a heat radiating plate 24 having heat radiating fins 24 a is attached to the outer wall side surface of the motor portion 20 of the booster pump module 4, and heat radiating fins 25 a are attached to the outer wall side surface of the pump portion 21. The heat sink 25 which has is attached. A heat radiating plate 24 having heat radiating fins 24 a is attached to the outer wall side surface of the motor unit 20 of the main pump module 5, and a heat radiating plate 25 having heat radiating fins 25 a is attached to the outer wall side surface of the pump portion 21.

  The bottom cover 2a is made of a rigid steel plate, and the radiator plate 2 on which the electrical component 3, the booster pump module 4 and the main pump module 5 are mounted is made of an aluminum alloy having good thermal conductivity. The pump casing of the pump section 21 of the pump module 5 is made of an aluminum alloy with good heat conductivity, and the mounting base 14 for mounting the booster pump module 4 and the main pump module 5 is made of an aluminum alloy with good heat conductivity. . Further, the heat radiating plate 24 and the heat radiating plate 25 are also made of aluminum or aluminum alloy having good thermal conductivity. Moreover, you may comprise the heat sink 2, the mounting base 14, and the pump modules 4 and 5 with an integral material. In this case, the thermal resistance of the contact portion is reduced, and heat conduction from the module portion to the heat radiating plate is good, which is preferable.

  In the dry vacuum pump unit 1 configured as described above, the heat generated in the electrical component 3, the booster pump module 4, and the main pump module 5 during the pump operation moves as indicated by an arrow C in FIG. Heat is transferred. Here, the cooling air that has flowed in from the air intake port 13a of the air flow path 13 by the cooling fan 18 flows as indicated by an arrow B, while contacting the heat radiating fins 11 of the heat radiating plate 2 exposed in the air flow path 13. The heat collected in the heat sink 2 is efficiently radiated. Furthermore, it contacts the heat radiation fins 25a of the heat radiation plate 25 attached to the outer wall surface of the pump part 21 of the main pump module 5, and the pump part 21 is cooled. Further, the cooling air flowing in from the air intake port 16a at the lower end of the air intake hood 16 flows into the space 19 in the exterior cover 6 as shown by the arrow A, and the outer walls of the motor unit 20 and the pump unit 21 of the booster pump module 4. The heat radiation fins 24 a and 25 a of the heat radiation plates 24 and 25 attached to the side surfaces are brought into contact with each other, the motor unit 20 and the pump unit 21 are cooled, and further, the heat radiation of the heat radiation plate 24 attached to the outer wall surface of the motor unit 20 of the main pump module 5. The motor unit 20 is cooled by contacting the fins 24a. The air flow indicated by the arrows A and B thereafter flows into the fan hood 17 and is exhausted to the outside through the air discharge port 17a at the lower end.

  As described above, by the operation of one cooling fan 18, a flow of air flowing in the air flow path 13 and a flow of air flowing in the space 19 in the exterior cover 6 are formed. In this air flow, the calorific value of the electrical component 3 arranged on the upstream side, the motor unit 20 of the booster pump module 4 and the pump unit 21 is the motor unit 20 of the main pump module 5 arranged on the downstream side. Less than the amount of heat generated by the pump unit 21. Accordingly, since the temperature rise on the upstream side of the air flow is lower than that on the downstream side, the cooling air flows from the portion with the low temperature rise (the portion with the low temperature) to the portion with the high temperature rise (the portion with the high temperature). As a result, the cooling efficiency is improved. That is, the electrical component 3 having a low temperature rise and the motor unit 20 and the pump unit 21 of the booster pump module 4 are arranged on the upstream side of the cooling air flow, and the air compression ratio of the dry vacuum pump unit 1 is the largest on the downstream side. By arranging the motor part 20 and the pump part 21 of the main pump module 5 that generate a large amount of heat, an arrangement structure is obtained in which an efficient cooling effect is obtained.

  As shown in FIG. 6, the exhaust port 21 b of the pump unit 21 of the booster pump module 4 and the intake port 21 a of the pump unit 21 of the main pump module 5 are communicated with each other through a communication passage 14 a formed in the mounting base 14. An intake pipe 22 is connected to the intake port 21a of the pump unit 21 of the booster pump module 4 (see FIGS. 1 to 4), and the exhaust port 21b of the pump unit 21 of the main pump module 5 is a check valve (pressure release valve) V1. Is connected to a pressure release passage 14b formed in the mounting base 14. An exhaust pipe 23 is connected to the pressure release passage 14b.

  The mounting base 14 is formed with a flow path 14c that connects the communication passage 14a and the pressure release path 14b, and a hollow check valve V2 is provided in the flow path 14c. That is, as shown in FIG. 7, a hollow is formed between the communication passage 14a connecting the exhaust port 21b of the pump unit 21 of the booster pump module 4 and the intake port 21a of the pump unit 21 of the main pump module 5 and the pressure release passage 14b. A check valve V2 is provided. A DC pulse current is supplied from a motor driver 27 of the control unit 26 to the motor unit 20 of the booster pump module 4 and the motor unit 20 of the main pump module 5 to be driven. The cooling fan 18 is also controlled by the control unit 26.

  When the dry vacuum pump unit 1 is activated, the control unit 26 supplies a DC pulse current from the motor driver 27 to the motor unit 20 of the booster pump module 4 disposed on the vacuum side, and first activates the booster pump module 4. Thereafter (several seconds later), a DC pulse current is supplied to the motor unit 20 of the main pump module 5 to start the main pump module 5. The gas flow generated by the activation of the booster pump module 4 flows into the pressure release passage 14b through the hollow check valve V2. Thereby, even if the booster pump module 4 is started first, the main pump module 5 does not rotate idly due to the generated gas flow, so that there is no possibility that step-out occurs. That is, since there is no idling of the booster pump module 5 caused by starting the main pump module 5 first as in the prior art, no step-out occurs. In FIG. 7, reference numeral 28 denotes a circuit protector (circuit protection unit).

  Further, in the dry vacuum pump unit 1 having the above-described configuration, when the cooling fan 18 is in an operation state in a pump standby state, operation noise is generated and power is consumed at the same time. Further, when the dry vacuum pump unit 1 is stopped and the cooling fan 18 is stopped at the same time, much heat remains in the dry vacuum pump unit 1. Therefore, a timer is provided in the control unit 26, and the cooling fan 18 is activated simultaneously with the activation of the dry vacuum pump unit 1. The timer is activated when the pump is stopped, and after a predetermined set time (for example, 15 minutes to 30 minutes later). In other words, the cooling fan 18 is stopped after the heat in the pump module (particularly the main pump module 5) is sufficiently dissipated and the temperature drops. Thereby, fan operation noise and power consumption due to cooling fan operation when the dry vacuum pump unit 1 is stopped can be reduced. Further, the present invention is not limited to stopping the cooling fan 18 after elapse of a set time by the timer, but sensors for detecting the temperature of each part of the dry vacuum pump unit 1, for example, the temperature in the main pump module 5 having a high temperature rise. A temperature sensor for detection may be provided, and the output of the sensor may be output to the control unit 26, and the control unit 26 may stop the cooling fan 18 when the temperature falls below a predetermined temperature.

  Next, FIGS. 8 and 9 are diagrams showing the configurations of the booster pump module 4 and the main pump module 5 of the dry vacuum pump unit 1. Since the booster pump module 4 and the main pump module 5 have the same configuration, only the main pump module 5 will be described here. The booster pump module 4 and the main pump module 5 do not have to have the same configuration. The main pump module 5 includes a motor unit 20 and a pump unit 21, and the motor unit 20 is a magnet coupling type DC brushless resin mold motor. The pump unit 21 synchronously reverses a pair of screw rotors to transfer gas. This is a vacuum pump and a volumetric transfer type twin screw pump.

  Two rotary shafts 31 a and 31 b are arranged in parallel inside the pump casing 30, and the rotary shafts 31 a and 31 b are supported by bearings 33. A right-handed screw rotor (pump rotor) 32a is fixed to the rotating shaft 31a, and a left-handed screw rotor (pump rotor) 32b is fixed to the rotating shaft 31b. A fluid flow path 36 is formed between the screw rotors 32 a and 32 b and the inner surface of the casing 30, and an inlet 21 a is provided at the upstream end of the fluid flow path 36. Is provided with an exhaust port 21b. The screw rotors 32a and 32b reverse each other in a non-contact manner while maintaining a slight clearance C, and transfer the gas sucked from the intake port 21a to the exhaust port 21b. In addition, as a screw rotor 32a, 32b, you may use a pair of screw rotor which has an axial cross-sectional shape which contacts only on a pitch line.

  The rotating shafts 31a and 31b are made of SUS material, the screw rotors 32a and 32b are made of an aluminum alloy, and the screw rotors 32a and 32b are shrink-fitted to the rotating shafts 31a and 31b to form a pair of screw rotors. ing. The surface of the screw rotors 32a and 32b is subjected to nickel plating. Further, the screw rotors 32a and 32b may be formed on the outer periphery of the rotary shafts 31a and 31b with a resin material. Thereby, screw rotor 32a, 32b can be manufactured at low cost.

  A pair of magnet rotors 34 and 34 having the same configuration are arranged at the shaft ends on the intake side of the rotary shafts 31a and 31b, respectively, and the rotary shafts 31a and 31b are driven in reverse as brushless DC motors, and by magnet coupling. Synchronous inversion of the rotating shafts 31a and 31b is ensured. As shown in FIG. 9, each magnet rotor 34 is provided with a ring-shaped magnet 34a around the outer periphery of a magnetic material yoke 34b. In the present embodiment, a magnetized magnet 34 a is provided on the outer periphery of the magnet rotor 34, facing each other so that the different magnetic poles of the magnet rotors 34 and 34 attract each other, and arranged with a clearance C maintained. ing. The number of poles of the magnet rotor 34 is an even number such as 4, 6, 8,...

The screw rotors 32a and 32b are rotated in opposite directions in synchronization by the magnet coupling action of the magnet rotors 34 and 34. Thereby, a screw pump capable of stable two-axis synchronous reversal without a timing gear is configured. Further, the absence of the timing gear means that no lubricating oil is required, non-contact rotation including a safe biaxial synchronization mechanism is possible, and high speed operation of the screw pump is possible. That is, a contact-type synchronous mechanism using timing gears, synchronous reversing speed rotation of 10000～30000Min ^-1 using magnetic coupling of the rotation is the speed but the 6-pole magnet rotor 34, 34 6000～7000Min ^-1 Thus, even if the vacuum pump is made small, it is possible to achieve an improvement in exhaust performance such as a high ultimate vacuum. In the present embodiment, the booster pump module 4 has a rated rotational speed of 21000 min ⁻¹ (rpm), and the main pump module 5 has a rated rotational speed of 13000 min ⁻¹ (rpm) or 15000 min ⁻¹ (rpm).

  A three-phase (U, V, W) motor stator 37 including an iron core 37a and a winding 37b is disposed in the vicinity of a part of the outer peripheral surface of each magnet rotor 34. The three-phase motor stator 37 is disposed on the side opposite to the side where the magnet rotors 34 are coupled with each other with respect to the rotation axis. Thereby, the magnet coupling force that the magnet rotors 34 attract each other can be canceled by the attraction force acting on the magnet rotor 34 and the motor stator core 37a. The three-phase motor stator magnetic poles correspond to the number of magnetic poles of the magnet rotor 34, and a magnetic field is applied to the four poles of the magnet rotor 34 as indicated by arrows D and E in FIG. By supplying a direct current of a required rectangular pulse waveform to the three-phase winding 37b, the two rotary shafts 31a and 31b can be synchronously inverted and driven at an arbitrary rotational speed.

  Since the dry vacuum pump unit 1 is cooled by the single cooling fan 18 as described above, the cooling mechanism can be simplified and the weight can be reduced accordingly. In addition, since no cooling water is used, there is no need for cooling water equipment, and if there is a drive power supply (AC100V, AC200V), it can be operated simply by moving, installing and connecting the power supply. it can. In addition, since the timing gear is not used, it is possible to further reduce the weight (20 kg or less) without using a lubricating oil, without needing a lubricating system for lubricating oil and replacement of the lubricating oil.

  In addition, although the example using a screw type vacuum pump was demonstrated in the said embodiment, this invention is applicable also to other types of volume transfer type biaxial vacuum pumps, such as a roots type.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Can be modified. Note that any shape or structure not directly described in the specification and drawings is within the technical scope of the present invention as long as the effects of the present invention are achieved.

It is a front view which shows the structural example of the dry vacuum pump unit which concerns on this invention. It is a top view which shows the structural example of the dry vacuum pump unit which concerns on this invention. It is a left view which shows the structural example of the dry vacuum pump unit which concerns on this invention. It is a right view which shows the structural example of the dry vacuum pump unit which concerns on this invention. It is a schematic diagram for demonstrating the flow and heat-transfer state of the cooling air of the dry vacuum pump unit which concerns on this invention. It is a model diagram which shows the arrangement | positioning state of the booster pump module and main pump module of the dry vacuum pump unit which concerns on this invention. It is a figure which shows the flow of the exhaust gas at the time of the driving | operation of the dry vacuum pump unit which concerns on this invention. It is sectional drawing which shows the structural example of the main pump module of the dry vacuum pump unit which concerns on this invention. It is sectional drawing which shows the structural example of the motor part of the main pump module of the dry vacuum pump unit which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Dry vacuum pump unit 2 Heat sink 2a Bottom cover 3 Electrical component 4 Booster pump module 5 Main pump module 6 Exterior cover 7 Handle 11 Radiation fin 13 Air flow path 14 Mounting base 16 Air intake hood 17 Fan hood 18 Cooling fan 19 Space 20 Motor part 21 Pump part 22 Intake pipe 23 Exhaust pipe 24 Heat sink 25 Heat sink 26 Control part 27 Motor driver 28 Circuit protector 30 Pump casing 31a Rotating shaft 31b Rotating shaft 32a Screw rotor (pump rotor)
32b Screw rotor (pump rotor)
33 Bearing 34 Magnet rotor 34a Magnet 34b Yoke V1 Check valve (pressure release valve)
V2 check valve for hollowing out

Claims (8)

In a dry vacuum pump unit comprising a booster pump module arranged on the vacuum side and a main pump module arranged on the external pressure side,
A heat sink having a heat dissipating fin, and mounting electrical components on the heat sink, and interposing a pump module mounting base made of a material having good heat conductivity on the heat sink, the booster pump module and the main A dry vacuum pump unit, wherein a pump module is mounted or a pump module is mounted directly on the heat sink. In the dry vacuum pump unit according to claim 1,
A cover is attached to the side where the heat dissipating fin is exposed, and a first air flow path is formed,
Forming a second air flow path covering the electrical component, booster pump module, and main pump module with a pump exterior cover;
A dry vacuum pump unit comprising a cooling fan for guiding cooling air from the outside to the first air channel and the second air channel. In the dry vacuum pump unit according to claim 1 or 2,
A dry vacuum pump unit, characterized in that a heat radiating plate provided with heat radiating fins is attached to the outer surfaces of the booster pump module and the main pump module. In the dry vacuum pump unit according to any one of claims 1 to 3,
The dry vacuum pump unit, wherein the pump module mounting base is made of aluminum or an aluminum alloy. In the dry vacuum pump unit according to any one of claims 1 to 4,
The dry vacuum pump unit, wherein the booster pump module is disposed upstream of the air flow of the second air flow path and the main pump module is disposed downstream. In the dry vacuum pump unit according to any one of claims 1 to 5,
The booster pump module and the main pump module each include a motor part and a pump part,
The pump unit includes a pair of pump rotors, a pump casing having an intake port and an exhaust port,
The dry vacuum pump unit, wherein the motor unit is a magnet coupling type DC brushless motor including a pair of magnet rotors that rotate integrally with the pair of pump rotors. In the dry vacuum pump unit according to any one of claims 1 to 6,
The exterior cover is provided with an air intake hood that takes air into the second air flow path, and an air discharge hood that discharges the first and second air flow paths,
A dry vacuum pump unit characterized in that sound absorbing layers made of a sound absorbing material are provided on the inner surfaces of the air intake hood and the air discharge hood, respectively. In the dry vacuum pump unit according to any one of claims 1 to 7,
A control means for operating / stopping the cooling fan is provided,
The control means starts the operation of the cooling fan simultaneously with the activation of the dry vacuum pump unit, and the temperature after the predetermined time elapses after the dry vacuum pump unit is stopped or after the dry vacuum pump unit is stopped becomes a predetermined value or less. A dry vacuum pump unit having a function of stopping the cooling fan.

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