JP2010117330A - Method of diagnosing air operation valve, air operation valve diagnosis device, and air operation valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To check an operation state of an air operation valve. <P>SOLUTION: A method of diagnosing an air operation valve to check an operation state of the air operation valve 10 includes: a prior process for measuring and recording sound generated in opening/closing when an AE sensor 2 is brought into contact with the air operation valve 10 for supplying an operation fluid to an operation port 7 of the air operation valve 10 in an initial state of the air operation valve 10, or when the operation fluid is exhausted; a first process for measuring and recording sound generated in opening/closing when the AE sensor 2 is brought into contact with the air operation valve 10 for supplying the operation fluid to the operation port 7 of the air operation valve 10 after repetitive operation of the air operation valve 10, or when the operation fluid is exhausted; and a checking process for checking a change in the operation state of the air operation valve 10 by comparing the value measured in the first process with the value measured in the prior process. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an air operated valve diagnostic method, an air operated valve diagnostic device, and an air operated valve for confirming an operating state of an air operated valve.

In the semiconductor production line, when a liquid valve failure occurs, the line must be stopped and the liquid valve must be replaced. In order to prevent damage caused by line stoppage due to the replacement of the liquid valve, it was necessary to periodically replace the liquid valve. In many cases, an air operated valve is used as a liquid valve instead of a solenoid valve.
Conventionally, as a life diagnosis in maintenance of a liquid valve, there has been a diagnosis method by observing and recording an AE waveform and an AE spectrum pattern with an AE (Acoustic Emission, hereinafter referred to as AE) sensor as in Patent Document 1. Here, AE refers to a phenomenon in which strain energy stored in the material is released as an elastic wave when the material is deformed or cracked. The AE method is a method in which the elastic wave is detected by a transducer, that is, an AE sensor installed on the surface of the material, and the destruction process of the material is evaluated by performing signal processing.
Specifically, the configuration of the invention of Patent Document 1 includes an AE sensor provided in the vicinity of the valve seat, an AE sensor provided in the vicinity of the valve seat, and an AE measuring device that measures the output from the AE sensor. It is composed of
The action of Patent Document 1 is that the oscillator generates vibration. This vibration is detected by the AE sensor, analyzed by the signal analyzer, and the result is recorded in the AE measuring device. Subsequently, when a certain period of time has elapsed, the vibration is detected by the AE sensor by the same means, and this is recorded by the AE measuring device. In the AE recording apparatus, the previous vibration and the current vibration are compared, and when the vibration is significantly different, the liquid valve is replaced as having a life.

JP-A 1-124739

However, in the invention described in Patent Document 1, vibration could not be detected unless an oscillating body is provided in the air operated valve. Since the installation of the oscillator in the air operated valve is not a normal air operated valve but a special order, there is a problem in that its production is expensive.
Further, in the invention described in Patent Document 1, since AE sensors are installed in all the air operated valves, there is a problem that a large number of wirings are required, the production line is crowded, and cannot be simplified. Furthermore, there is a problem that a lot of cost is required for the AE sensor.
In addition, when the invention described in Patent Document 1 is used, since specific determination criteria are unknown, there are individual differences regarding the determination results by the person in charge of maintenance.

From the above problems, there is a demand for a diagnostic method and a portable diagnostic device that do not require an oscillating body, can grasp the operating state of an air operated valve that is a liquid valve, and can determine the replacement time.
The present invention has been made to solve the above problems, and an object thereof is to provide a diagnostic method, a diagnostic device, and an air operated valve in maintenance of an air operated valve.

In order to achieve the above object, an air operated valve diagnostic method, an air operated valve diagnostic device, and an air operated valve for confirming the operating state of an air operated valve according to the present invention have the following configurations.
(1) An air operated valve diagnosis method for confirming an operating state of an air operated valve, wherein an AE sensor is brought into contact with the air operated valve in an initial state of the air operated valve, and the operation port of the air operated valve is When operating fluid is supplied or when operating fluid is exhausted, the sound generated during opening and closing is measured and recorded, and after the air operated valve is repeatedly operated, the AE sensor is brought into contact with the air operated valve, A first step of measuring and recording a sound generated at the time of opening and closing when operating fluid is supplied to the operating port of the air operated valve or exhausting the operating fluid, a value measured in the first step, and a preliminary step And a confirmation process for confirming a change in the operating state of the air operated valve by comparing with the value measured in And features.
(2) The air operated valve diagnosis method according to (1), wherein the air operated valve is a liquid valve, and the first step is to compare the change in sound and to change the air operating valve by changing the operating state of the air operated valve. It is characterized by predicting the failure of the operating valve and determining the necessity of replacement.
(3) In the air operated valve diagnostic method described in (1) or (2), the value measured and recorded in the first step is the value when the valve is opened or closed when the operation port supplies the operation fluid or exhausts the operation fluid. It is characterized by being the average value of the maximum value of the sound to be emitted, and comparing the value measured and recorded in the confirmation process with the average value of the maximum value. Here, the sound generated when the operating port supplies or exhausts the operating fluid is the sound generated when the valve of the air operated valve collides with the stopper. This includes expansion and contraction sounds, frictional sounds of O-rings, etc.
(4) In the air operated valve diagnosis method described in (1) or (2), the value measured and recorded in the first step is from when the sound of the air operated valve is generated until the sound of the air operated valve is finished. It is characterized in that it is an occurrence time average value, which is an average value of the time, and a value measured and recorded in the confirmation step is compared with the occurrence time average value.

(5) A diagnostic device for monitoring the operating state of the air operated valve and confirming the change in the operating state of the air operated valve. The air operating valve opens and closes by contacting the air operated valve with the AE sensor. Measuring means for measuring sounds emitted from time to time, recording means for recording measurement results measured by the measuring means, values recorded in the recording means measured by installing an air operated valve in the manufacturing apparatus, and measurement thereafter And a means for confirming a change in the operating state of the air operated valve by comparing with the measured value.
(6) The air operated valve diagnostic device according to (5), wherein the air operated valve diagnostic device is portable.
The air operated valve diagnostic device according to (7), wherein the recording means can identify a target air operated valve for which the necessity of replacement of the air operated valve is determined, and records the identified air operated valve in the recording means. And a communication means for transmitting the measurement result to the outside.
(8) In the air operated valve used in any one of the air operated valve diagnosis methods used in (1) to (4), a contact portion for bringing the AE sensor into contact with the side surface of the air operated valve. It is formed.

Failure of the air operated valve is likely to result in production stoppage. Conventionally, the maintenance of the production line has performed the diagnosis of the air operated valve. However, since the person in charge of maintenance on the production line is not an expert of the air operated valve, it is difficult to accurately diagnose the air operated valve. For this reason, the maintenance staff cannot judge the failure of the air operated valve, and the production may be stopped, resulting in a great damage.
Therefore, the present applicants who are experts in air operated valves are considering performing regular maintenance. Since we are an expert on air operated valves, we can diagnose their condition accurately, so we developed and invented the air operated valve diagnostic method and air operated valve diagnostic device of this application that ensure uniqueness and reliability. is there.

Next, the operation and effect of the air operated valve diagnostic method, the air operated valve diagnostic device, and the air operated valve for confirming the operating state of the air operated valve will be described.
After the air operated valve is attached to the manufacturing apparatus, an AE sensor is attached to the contact portion of the air operated valve and a test is performed. For the test, the operation fluid is fed into the operation port of the air operated valve. When the operation fluid is fed, the operation fluid adjusted by the pressure reducing valve is stopped by the electromagnetic valve before entering the operation port. The solenoid valve sends the operation fluid to the operation port at a predetermined timing. The operation fluid entered from the operation port enters the operation chamber and raises the piston in the air operated valve. When the piston rises, the piston hits the stopper and stops rising. When the piston hits the stopper, an operation sound including a collision sound (hereinafter referred to as “operation sound”) is generated. The AE sensor measures the operation sound. The test is until the AE sensor measures the operation sound.
The memory of the control unit records the measured operation sound, and calculates and records the average value of the maximum sound, which is the maximum value of the operation sound. Similarly, the average value of the time until the sound generated by the air operated valve ends is calculated and recorded. The average value is obtained by performing the above test a plurality of times.
Next, the above test is performed when the air operated valve is used repeatedly, for example, when it is used continuously several tens of thousands of times.
The memory of the control unit records the measured operation sound. Further, the memory of the control unit records the time until the sound generated by the air operated valve ends.

The CPU compares the average value of the maximum operating sound measured after the air operated valve is installed in the manufacturing equipment and the operating sound measured when the air operated valve is repeatedly used, and an abnormality occurs in the air operated valve. Check if it is not.
In addition, the average value of the time until the sound generated from the air operated valve is measured after the air operated valve is installed in the manufacturing apparatus and the air operated valve measured when the air operated valve is repeatedly used are generated. Compare with the time until the sound ends to check if there is any abnormality in the air operated valve. If an abnormality is found in the air operated valve, the air operated valve is replaced.
For example, by comparing AE measurement, the average value of the maximum operating sound measured after the air operated valve is attached to the manufacturing apparatus and the maximum value of the operating sound measured when the air operated valve is repeatedly used. When the operation sound is low, it is determined that there is a symptom that the piston does not open and close full stroke. From this, problems such as spring corrosion, piston galling, and O-ring deformation of the air operated valve are assumed.
As described above, according to the present applicants who are experts in air operated valves, it is possible to diagnose a failed air operated valve and to predict a failure of the air operated valve. As a result, a malfunctioning air operated valve can be found and replaced, and therefore a malfunction of the air operated valve can be discovered, so that the production line can be prevented from being stopped. In addition, since the failure of the air operated valve can be predicted, the air operated valve that does not need to be replaced can be used continuously without being replaced. Therefore, the air operated valve can be replaced wastefully. Absent.
As described above, by grasping a sign of malfunction of the air operated valve, it is possible to prevent a situation in which the manufacturing apparatus is stopped or the line is stopped due to the failure of the air operated valve.
The operation and effect of the invention have been compared based on the operation sound when the air operated valve is opened, but the same operation and effect can be obtained even when the operation sound of the piston hitting the valve body when the valve is closed. .
The failure prediction is performed by obtaining the relationship between the AE measurement value and the failure as data by performing a durability test on a large number of air operated valves millions of times. Furthermore, the accuracy of failure prediction can be improved by accumulating data related to failure through periodic inspections at the customer site.
In the present invention, the determination criteria are digitized in the determination. For this reason, it is possible to eliminate an error in the determination result that has caused individual differences by the maintenance staff.

  Next, an embodiment of an air operated valve diagnostic method, an air operated valve diagnostic device, and an air operated valve according to the present invention will be described with reference to the drawings.

(First embodiment)
<Overall configuration of air operated valve diagnostic device>
FIG. 1 is a block diagram showing a configuration of an air operated valve diagnostic apparatus. FIG. 2 is a block diagram showing a control unit of the air operated valve diagnostic apparatus. FIG. 6 is an external view of an air operated valve diagnosis / measurement device 40 used for air operated valve diagnosis.
As shown in FIG. 1, the control unit 1 is connected to an AE sensor 2, a solenoid valve 5, and an AC outlet 9. As a power source, in addition to the AC outlet 9, a battery or a battery may be used. The AE sensor 2 is a transducer that detects AE. Here, AE refers to a phenomenon in which strain energy stored in the material is released as an elastic wave when the material is deformed or cracked. The AE method is a method in which the elastic wave is detected by a transducer installed on the surface of the material, that is, an AE sensor, and the destruction process of the material is evaluated by signal processing.
The pressure reducing valve 6 is connected to the electromagnetic valve 5 via the operation port side air pipe 11B. An operation port side air pipe 11 </ b> A extending from the electromagnetic valve 5 is connected to the operation port 7 of the air operated valve 10.
As shown in FIG. 2, the control unit 1 includes a CPU 31, a ROM 32, and a memory 33. An AE sensor 2, a solenoid valve 5, and an AC outlet 9 are connected to the control unit 1.
As shown in FIG. 6, there is a liquid crystal screen 41 in the upper part of the air operated valve diagnostic measuring device 40 and a numeric keypad 42 in the lower part. A connection terminal 43 connected to the AE sensor 2 is provided at the upper end of the air operated valve diagnostic measurement device 40. In the lower right portion of the liquid crystal screen 41, an air operated valve identification number 45 and a date 46 are displayed. The output data 47 of the AE sensor 2 is displayed in the center portion. Since the air operated valve diagnostic measuring device 40 is compact, it can be carried. Therefore, since it is only necessary to install it in the air operated valve 10 when it is desired to use it, power is not consumed as compared with a state in which the air operated valve diagnostic measuring device 40 is always on as in the prior art. Therefore, energy saving can be realized.

<Configuration of air operated valve>
FIG. 3 is an external front view of the air operated valve 10. FIG. 4 is an external side view of the air operated valve 10. FIG. 5 is a cross-sectional view showing the structure of the air operated valve 10 to be diagnosed.
As shown in FIG. 5, the air operated valve 10 includes an actuator portion 23 and a main body body 24. An input port 17 and an output port 18 are formed in the main body body 24.
An operation port 7 and an exhaust port 8 are formed in the actuator portion 23. The left end portion of the operation port 7 communicates with the operation chamber 22. Further, the left end portion of the exhaust port 8 communicates with the exhaust chamber 21. Inside the actuator portion 23, a substantially cylindrical piston 13 is held so as to be slidable in the vertical direction. An indicator 27 is engaged with the piston 13. The indicator 27 passes through the cover 28. The piston 13 is divided into an operation chamber 22 and an exhaust chamber 21. A first O-ring 20 is attached to the portion of the maximum outer periphery of the piston 13. A second O-ring 25 is attached to the central portion of the lower portion of the piston 13. A stopper 26 is formed on the exhaust port 8 side in the exhaust chamber 21 to abut when the piston 13 slides upward. On the exhaust port 8 side of the piston 13, there is an actuator portion 23 and a spring 14 in contact with the piston 13.
A diaphragm valve body 15 is engaged with the opposite side of the piston 13 engaged with the indicator 27. The diaphragm valve body 15 is in contact with the valve seat 16 when the valve shown in FIG. 5 is closed.
As shown in FIGS. 3 and 4, a contact portion 23 a that contacts the AE sensor 2 is formed on the side surface of the actuator portion 23 in a shape that matches the shape of the AE sensor 2.

<Diagnosis method for air operated valve>
The life diagnosis by the air operated valve diagnostic device is performed by the person in charge of the company (hereinafter, simply referred to as “person in charge”) who undertakes periodic diagnosis of the air operated valve.
The preliminary process is performed after the air operated valve 10 is installed in the factory. In the preliminary process, M ₀ and T ₀ of the air operated valve 10 are measured, and the average value M ₀ of the maximum value and the generation time average value T ₀ are calculated and recorded. The maximum value of the waveform of the operation sound generated when the piston 13 of the air operate valve 10 collides with the stopper 26 and M _0. The time until the sound generated by the air operated valve 10 ends is T ₀ .
In the preliminary process, in order to measure M ₀ and T ₀ of the air operated valve 10, after attaching the main body 24 of the air operated valve 10, the person in charge has a connection terminal 43 of the air operated valve diagnostic measuring device 40 of FIG. The AE sensor 2 connected to is attached to the contact portion 23a of the air operated valve 10.
The AE sensor 2 includes a sound when the piston 13 collides with the stopper 26 when the air operated valve 10 opens and closes, a sound when the diaphragm valve body 15 comes into contact with the valve seat 16, a sound of air intake and exhaust, This is a device that detects sound such as expansion / contraction sound of the spring 14 and friction sound of the first O-ring 20 and processes the generated sound signal. In the first embodiment, the sound when the piston 13 collides with the stopper 26 and the sound when the diaphragm valve body 15 contacts the valve seat 16 are detected, and the sound signal is processed.
Since there is the contact portion 23a of the air operated valve 10, the AE sensor 2 can always be installed at the same location. Therefore, even when there is some cause of failure in the air operated valve 10, the cause of the failure of the air operated valve 10 can be grasped by the change in sound. This is because the sound can be detected stably and the change in the sound can be easily grasped if the contact can always be made at the same location.
Further, since the contact portion 23a is cut inward and is close to the portion where the piston 13 and the stopper 26 collide, it is possible to recognize the sound generated until the piston 13 and the stopper 26 collide. For this reason, sound can be recognized by the AE sensor 2 without installing a conventionally used oscillator in the air operated valve 10.

In order to supply the operation fluid, the electromagnetic valve 5 is opened as appropriate. The solenoid valve 5 can be opened by operating a manual button. The electromagnetic valve 5 is opened, and the operating fluid is supplied to the operating port 7 through the operating port side air pipe 11A. The operation fluid entered from the operation port 7 enters the operation chamber 22. The operation fluid that has entered the operation chamber 22 pushes the piston 13 upward. When the piston 13 is pushed upward, the air in the exhaust chamber 21 is compressed. The air compressed in the exhaust chamber 21 is pushed out from the exhaust port 8.
At this time, the waveform state such as the operation sound in which the piston 13 collides with the stopper 26 when the air operated valve 10 is opened is recorded as M ₀ and T ₀ . The calculation and recording method of the average value M ₀ of the maximum values and the occurrence time average value T ₀ will be described in the calculation method of M ₀ and T ₀ described later.
M ₀ and T ₀ are displayed as graphs on the liquid crystal screen 41 of the air operated valve diagnostic measuring device 40. Further, the identification number 45 and the date 46 of the air operated valve 10 that has flowed the operation fluid are displayed on the liquid crystal screen 41. By connecting a PC or the like to the air operated valve diagnostic device 40, it is possible to communicate records such as M ₀ and T ₀ from the memory 33. By transferring a large amount of statistical values of M ₀ and T ₀ to a PC or the like, information on M ₀ and T ₀ can be accumulated, further analyzed and researched, and more accurate determination can be made.

The sound at the time of valve closing is also measured and recorded by the AE sensor 2 in the same manner as the sound at the time of valve opening. The sound at the time of closing the valve is a sound generated until the diaphragm valve body 15 contacts the valve seat 16. The measurement and recording operations performed by the AE sensor 2 when the valve is closed do not change between when the valve is opened and when the valve is closed.
M ₀ and T ₀ are analyzed and recorded, and the above opening / closing operation is repeated 5 to 10 times in order to calculate the maximum average value M ₀ and the generation time average value T ₀ .
The preliminary process is performed by the person in charge after the air operated valve 10 is installed in the factory, but the manufacturer of the air operated valve 10 or the like can also perform the above process in advance before shipping.

<Analysis and calculation method of M ₀ and T ₀ >
The analysis and recording method of M ₀ and T ₀ is shown in the flowchart of FIG. The analysis and recording method performed in FIG.
The maximum value of the waveform of the operation sound generated when the piston 13 of the air operate valve 10 is operated until the stopper 26 and M _0. The time until the sound generated by the air operated valve 10 ends is T ₀ .
Specific examples of M ₀ and T ₀ for the air operated valve 10 of model A are shown in FIG.
As shown in FIG. 13, in the preliminary process, M ₀ is analyzed, and then the maximum average value M ₀ is obtained by calculation, and the maximum average value M ₀ is recorded (S1, S2, S3, S6). ).
The average value M ₀ of the maximum values is calculated by omitting the lowest M ₀ and the highest M ₀ . This is because the lowest M ₀ and the highest M ₀ are not suitable for obtaining an average value because of large noise. In FIG. 7, the calculation is performed by omitting the lowest (4) M ₀ of 3.49 × 10 ⁶ and the highest (6) M ₀ of 4.58 × 10 ⁶ . Thus, the average value M ₀ of the maximum values is 3.91 × 10 ⁶ . The maximum average value M ₀ is recorded in the memory 33.

As shown in FIG. 13, the analysis of T ₀ is performed, and thereafter the occurrence time average value T ₀ is obtained by calculation, and the occurrence time average value T ₀ is recorded (S1, S4, S5, S6).
T ₀ as an actual measurement value is short, and the waveform measurement time is from several milliseconds to several seconds. Therefore, FIG. 8 shows an enlarged version of the waveform (1) of M ₀ in FIG. The time when the waveform starts is assumed to be T ₀ (a). The time when the waveform ends is assumed to be T ₀ (b). The time T ₀ until the operation sound generated by the air operated valve 10 is completed can be obtained by the equation T ₀ = T ₀ (a) −T ₀ (b).
Next, determine the occurrence time average value T ₀ is an average value of T _0. The generation time average value T ₀ is calculated by omitting the shortest T ₀ and the longest T ₀ . This is because the shortest T ₀ and the longest T ₀ are not suitable for obtaining an average value because they are noisy. In FIG. 7, the calculation is performed by omitting the shortest (9) T ₀ of 0.385 and the longest (1) T ₀ of 0.362. Thus, the generated occurrence time average value T ₀ is 0.367. The generation time average value T ₀ is recorded in the memory 33.

<Effects of Air Operated Valve Diagnosis Device and Method according to First Embodiment>
FIG. 14 shows a flowchart of a diagnostic method for the air operated valve 10 according to the first embodiment.
The method for diagnosing the air operated valve 10 is a method in which a determination method by AE measurement is performed, and determinations A to C are comprehensively performed based on the result.

A determination method based on AE measurement will be described.
M ₁ and T ₁ are analyzed in the first step, and thereafter, the maximum value average value M ₀ and the occurrence time average value T ₀ recorded in the memory 33 in the confirmation step are expressed as <Expression 1> to <Expression 6>. To determine M ₁ and T ₁ (S10, S11, S12, S13, S14, S15, S16).
The first step is performed after the air operated valve 10 is attached to the manufacturing apparatus, for example, after operating several tens of thousands of times. Also in the first step, M ₀ and T ₀ are analyzed by the same method as the above-described analysis and calculation method of M ₀ and T ₀ (S10, S11, S14).

Determination method of M ₁ performs the following method in the confirmation process.
First analysis, the average value M ₀ of M ₁ and the maximum value obtained by calculation to calculate a mean value M ₀ of M _{1 /} maximum value.
Next, M ₁ / average value M ₀ of maximum values is applied to <Expression 1> to <Expression 3> shown below, and determinations A, B, and C are determined (S13). Determination A is a case where all the determination results of M ₁ are determination A. Determination B is a result of the determination of M _1, a case where the determination C is not determined B there is at least 1. Determination C is a result of the determination of M _1, a case where the judgment C is even one.

<Formula 1>

a ₁ <M ₁ / average value of maximum values M ₀ <a ₂

If the value of M ₁ / average value M ₀ of the maximum values is within the range of <Expression 1>, it is determined as A.

<Formula 2>

a ₃ <M ₁ / average value of maximum values M ₀ ≦ a ₁ ,
a ₂ ≦ M ₁ / average value of maximum values M ₀ <a ₄

If the value of M ₁ / average value M ₀ of the maximum values is within the range of <Expression 2>, it is determined as “B”.

<Formula 3>

M ₁ / average value of maximum values M ₀ ≦ a ₃ , a ₄ ≦ M ₁ / average value of maximum values M ₀

If the value of M ₁ / average value M ₀ of the maximum values is within the range of <Expression 3>, it is determined as C.

a ₃ <a _{a 1 <a 2 <a 4} . ax (x = 1 to 4) is a numerical value that varies depending on various factors. The factors include, for example, differences in the types of air operated valves, differences in operating air pressure, and cases where an air operated valve is installed.
As a standard of ax, for example, a ₁ = 0.20 to 1.00, a ₂ = 1.00 to 5.00, a ₃ = 0 to 0.50, and a ₄ = 2.00 or more. However, it is only a guideline, and the numerical value varies depending on various factors.

Method for determining T ₁ performs the following method in the confirmation process.
First, T ₁ / occurrence time average value T ₀ is calculated from T ₁ and T ₀ obtained by analysis and calculation.
Next, T ₁ / generation time average value T ₀ is applied to <Expression 4> to <Expression 6> shown below, and determinations A, B, and C are determined (S16). Determination A is a case where all the determination results of T ₁ are determination A. Determination B is a result of the determination of T _1, a case where the determination C is not determined B there is at least 1. Judgment result C is determined in T _1, a case where the judgment C is even one.

<Formula 4>

b ₁ <T ₁ / occurrence time average value T ₀ <b ₂

If the value of T ₁ / occurrence time average value T ₀ is within the range of <Expression 4>, it is determined as A.

<Formula 5>

b ₃ <T ₁ / average generation time T ₀ ≦ b ₁ ,
b ₂ ≦ T ₁ / occurrence time average value T ₀ <b ₄

If the value of T ₁ / occurrence time average value T ₀ is within the range of <Expression 5>, it is determined as “B”.

<Formula 6>

T ₁ / average generation time T ₀ ≦ b ₃ , b ₄ ≦ T ₁ / average generation time T ₀

If the value of T ₁ / occurrence time average value T ₀ is within the range of <Expression 6>, it is determined as C.

b ₃ <a _{b 1 <b 2 <b 4} . bx (x = 1 to 4) is a numerical value that changes due to various factors. The factors include, for example, differences in the types of air operated valves, differences in operating air pressure, and cases where an air operated valve is installed.

AE measurement is performed in the confirmation process, and the result is comprehensively considered and comprehensively determined (S20).
The judgment criteria for comprehensive judgment are recorded as comprehensive judgment A when all are judgment A as a result of AE measurement, since there is no abnormality (S21, S24). As a result of AE measurement, if there is no judgment C and there is even one judgment B, it is necessary to observe the progress, and it is necessary to check at the time of subsequent diagnosis, or check again after one or two months. It records as a certain comprehensive judgment B (S22, S25). If there is even one determination C as a result of the AE measurement, it is recorded as an overall determination C that there is an abnormality and the air operated valve 10 needs to be replaced (S23, S26).

Based on the AE measurement of M ₀ and T ₀ performed in the first step, the maximum average value M ₀ is obtained by calculation, the maximum average value M ₀ is recorded, and the occurrence time average value T ₀ is calculated. asked to record the occurrence time average value _{T 0 (S27, S28, S29} ). The steps S27, S28, and S29 are the same as S3, S5, and S6 described in the above-described analysis and calculation methods of M ₀ and T ₀ , and thus the description thereof is omitted.

A determination method by appearance observation in FIG. 14 will be described (S30, S31). The determination method by appearance observation is not necessarily a method necessary for the diagnosis method of the air operated valve 10, but can be performed together with the determination method of the AE measurement.
After the air operated valve 10 is attached to the manufacturing apparatus, determinations A, B, and C are determined by observing the appearance of the air operated valve 10 at the time of diagnosis of the air operated valve 10 after, for example, operating several tens of thousands of times.
Appearance observation is performed by observing and judging the entire air operated valve 10 where it can be seen.
When it is considered that there is almost no change in the air operated valve 10 by appearance observation, the determination is A. When the characters and background color of the nameplate of the air operated valve 10 disappear, or when a small amount of foreign matter such as crystals adheres to the surface of the air operated valve, the judgment is A or B. When the cover of the air operated valve 10 is discolored, when the cylinder is discolored, when the mounting plate is discolored, when the appearance of rust is found on the metal parts that can be seen from the exterior, abnormal sounds that can be heard by the ear when the valve opens and closes When it is generated, when a large amount of crystals are attached to the valve surface, or when any other abnormality occurs, the judgment is B or C. When the cover of the air operated valve 10 is cracked, the cylinder is cracked, or the indicator does not move smoothly, the judgment is C.
As a determination criterion, if there is only determination A as a confirmation item, determination A is obtained. If there is no determination C in the confirmation item and there is a determination B, the determination is B. When there is even one determination C in the confirmation item, the determination is C.

(System certification)
In order to reproduce the main cause of failure, how the air operated valve 10 fails, a failure sample was created, and it was verified that the determination by the above determination method was practical.
The system verification confirmed that the air operated valve 10 that has failed due to O-ring wear, piston rod tilt, galling, and the like can be diagnosed by the determination by the above-described determination method.
In the first embodiment, the following failure can be specifically determined.
For example, in FIG. 9, the corrosion of the spring 14 of the air operated valve 10, the galling of the piston 13, and the deformation of the O-ring 20 can be determined. This is because T ₁ , which is the time of the operating sound that the piston 13 strikes against the stopper 26, is shorter than the average value of T ₁ in FIG. The T ₁ is short is because the piston 13 is not full stroke opening and closing, as the cause of the piston 13 is not full stroke opening and closing, the corrosion of the spring 14 of the air operated valves 10, galling of the piston 13, the O-ring 20 This is because a deformation defect is assumed.
In the air operated valve 10 in FIG. 9, in order to cause a symptom that the piston 13 does not open and close in full stroke, the indicator 27 of the piston 13 is pressed from the top so that the piston 13 does not move.
If M _{1 in} FIG. 9 is determined by the above-described determination method, all are determined to be determination B, and thus determination B. Is the highest value among the M ₁ measured (7), and the lowest value (10) is not included in the calculations and determined from that there is a blur in the measurement.
As a result of FIG. 9, in the air operated valve 10, the piston 13 does not hit the stopper 26 because the piston 13 does not open and close in full stroke. Therefore, M ₁ piston 13 is the operation sound emanating hits the stopper 26 is reduced. Therefore, M ₁ is smaller than M ₀ in FIG.

When T _{1 in} FIG. 9 is determined by the above-described determination method, all are determined to be determination C, and since there is one or more determinations C, determination C is determined. If there is one or more determinations C, the overall determination is C. Therefore, it may be considered that the measurement may be terminated when the determination C is obtained. However, since there is fluctuation in measurement, the determination reliability is improved by performing the measurement a plurality of times instead of ending the measurement once the determination C is issued.
As a result of FIG. 9, the air operated valve 10 does not reach the stopper 26 completely because the piston 13 does not open and close in full stroke. Therefore, T ₁ operation sound piston 13 emitted strikes the stopper 26 is the time until the completion is shortened. For this reason, T ₁ is shorter than T ₀ in FIG.

For example, in FIG. 10, wear of the O-ring 20 and scratches on the O-ring 20 can be determined. Because, M ₁ of the operation sound piston 13 emitted strikes the stopper, whereas no different from Fig. 7, T ₁ of T ₁ is 7 is a time until the piston 13 operation sound emanating hits the stopper is completed This is because it is shorter than the average value. Although M ₁ does not change, T ₁ is long because the operation port air leaks into the exhaust port 8 and is considered to be due to the measurement of air leakage sound. The reason why the operation port air leaks to the exhaust port 8 is that the O-ring 20 is worn and the O-ring 20 is damaged.
In the air operated valve 10 in FIG. 10, the O-ring 20 is damaged so that the operation port air leaks to the exhaust port 8 in order to cause a symptom that the operation port air leaks to the exhaust port 8.
For M ₁ in FIG. 10, when the determination by the determination method, since all judgment A, it is determined A. Among the measured M ₁ , the highest value (3) and the lowest value (9) are not included in the calculation or determination because there is fluctuation in measurement. Even if the operation port air leaks to the exhaust port 8, there is no effect when the piston 13 hits the stopper 26.

When T _{1 in} FIG. 10 is determined by the above determination method, all are determined to be determination C, and determination C is determined because there is one or more determinations C. If there is at least one judgment C, it will be judged C overall, so it can be considered that there is no problem even if the measurement is terminated when judgment C is issued. However, since there is fluctuation in the measurement, the determination reliability is improved by performing the measurement a plurality of times instead of ending the measurement when the determination C is once issued.
As a result of FIG. 9, since the operation port air leaks to the exhaust port 8, the air operated valve 10 detects the leak sound that the operation port air leaks from the exhaust port 8 even after the piston 13 hits the stopper 26. 2 measures. Therefore, as compared to T ₁ of the FIG. 7, since T ₁ is longer.

(Second Embodiment)
The air operated valve 10 in the second embodiment is a model B different from the model A shown in FIG. Since the model of the air operated valve 10 used in FIGS. 7 and 11 is different, M ₀ and T ₀ are also different. Therefore, also in the second embodiment, _M 0 similar to the first embodiment, the analysis of the _{T 0,} obtaining the _M 0, _{T 0} using the calculation method.
FIG. 12 shows the analysis result of the air operated valve 10 in which the operation port air leaks to the exhaust port 8 for the model A shown in FIG.
Note that the overall configuration of the air operated valve 10 and the diagnostic method for the air operated valve 10 are the same as those in the first embodiment, and thus the description thereof is omitted.
FIG. 11 shows the results obtained using the same analysis and calculation method of M ₀ and T ₀ as in the first embodiment.
In FIG. 11, the calculation is performed by omitting the lowest (6) M ₀ and the highest (9) M ₀ . Thus, the average value M ₀ of the maximum values is 3.73 × 10 ⁵ .
In FIG. 11, the calculation is performed by omitting 0.9329, which is the shortest (4) T ₀ , and 2.198, which is the longest T ₀ (9). Thus, the generated occurrence time average value T ₀ is 1.047.

Since the air operated valve 10 in FIG. 11 is different in model from the air operated valve 10 in FIG. 7, an experiment was conducted.
For example, in FIG. 12, it is possible to determine whether the piston 13 is galling. This is because the time T ₁ until the operation sound generated by the piston 13 hitting the stopper 26 is not different from that in FIG. 11, whereas the operation sound M ₁ generated by the piston 13 hitting the stopper 26 is T ₁ in FIG. _This is because it is shorter than the average value of ₁ . The reason why M ₁ is short although T ₁ does not change is that the piston 13 is not operating smoothly, and the cause of the piston 13 not operating smoothly is that the piston 13 is galling. It is.
In the air operated valve 10 in FIG. 12, in order to cause a symptom that the operation port air leaks to the exhaust port 8, the O-ring 20 is damaged and the operation port air leaks to the exhaust port 8.
When M _{1 in} FIG. 12 is determined by the above-described determination method, all are determined to be determination C. Therefore, since there is one or more determinations C, determination C is determined. Is the highest value among the M ₁ measured (5), and the lowest value (7) is not included in the calculations and determined from that there is a variation in the measurement.

When T _{1 in} FIG. 12 is determined by the above-described determination method, it becomes determination A and determination B, and determination B is determined because there is at least one determination B.
As a result of FIG. 12, in the air operated valve 10, since the piston 13 is not operating smoothly, the operation sound generated when the piston 13 hits the stopper 26 is small. T ₁ is short. Therefore, as compared to T ₁ of the FIG. 7, since T ₁ is shortened.

(Third embodiment)
In the first embodiment and the second embodiment, this method is effective when measurement is possible in the initial stage of use of the air operated valve 10, but when there is no initial data with existing equipment, the following preliminary process is performed. The method of the third embodiment that does not perform is performed.
FIG. 15 shows a flowchart for performing comprehensive determination when the air operated valve 10 is already installed.
As shown in FIG. 15, the third embodiment differs from the first embodiment of FIG. 14 in that the initial data of the maximum average value M ₀ and the generation time average value T ₀ measured by existing facilities and the like are It is not. In the third embodiment, the maximum average value M ₀ and the generation time average value T ₀ obtained by experiments are input as the maximum average value M ₀ and the generation time average value T ₀ (S40, S41).
Thereby, even when there is no initial data in the existing equipment or the like, the comprehensive determination S20 can be performed by the AE measurement S10.

(1) As explained in detail above, according to the air operated valve diagnosis method for confirming the operating state of the air operated valve 10 of the present embodiment, the air operated for confirming the operating state of the air operated valve 10. In the valve diagnosis method, in the initial state of the air operated valve 10, when the AE sensor 2 is brought into contact with the air operated valve 10 and the operating fluid is supplied to the operating port 7 of the air operated valve 10, or the operating fluid is The pre-process of measuring and recording the sound generated when the exhaust is opened and closed, and after the air operated valve 10 is repeatedly operated, the AE sensor 2 is brought into contact with the air operated valve 10 to operate the operation port 7 of the air operated valve 10. Occurs when opening and closing when operating fluid is supplied to or exhausted A first step of measuring and recording the value, and a confirmation step of comparing the value measured in the first step with the value measured in the preliminary step to confirm the change in the operating state of the air operated valve 10 Therefore, by grasping a sign of the malfunction of the air operated valve 10, it is possible to prevent a situation in which the manufacturing apparatus is stopped or the line is stopped due to the failure of the air operated valve 10.
(2) The air operated valve diagnosis method according to (1), wherein the air operated valve is a liquid valve, and the first step is based on a change in the operating state of the air operated valve 10 by comparing changes in sound. Since the failure of the air operated valve 10 is predicted and the necessity of replacement is judged, the situation of the stop of the manufacturing apparatus or the line stop due to the failure of the air operated valve 10 by grasping the precursor of the malfunction of the air operated valve 10 Can be prevented in advance.
Moreover, the present applicant who is an expert of the air operated valve 10 can practice performing periodic maintenance.
(3) In the air operated valve diagnosis method described in (1) or (2), the value measured and recorded in the first step is the valve opening / closing value when the operation port 7 supplies or exhausts the operation fluid. Since the average value of the maximum value of the sound that is sometimes generated and the value measured and recorded in the confirmation process are compared with the average value of the maximum value, the air operated valve 10 is obtained by grasping the precursor of the malfunction of the air operated valve 10. It is possible to prevent a situation where the manufacturing apparatus is stopped or a line is stopped due to 10 failures.
(4) In the air operated valve diagnosis method described in (1) or (2), the value measured and recorded in the first step is the end of the sound of the air operated valve 10 after the sound of the operated valve 10 is generated. Since it is the occurrence time average value, which is the average value of the time until it is done, and the value measured and recorded in the confirmation process is compared with the occurrence time average value, by grasping the precursor of the malfunction of the air operated valve 10, It is possible to prevent a situation in which the manufacturing apparatus is stopped or the line is stopped due to a failure of the air operated valve 10.

(5) A diagnostic device for monitoring the operating state of the air operated valve 10 and confirming a change in the operating state of the air operated valve 10. When the AE sensor 2 is brought into contact with the air operated valve 10 and is opened and closed Measuring means for measuring the sound emitted, recording means for recording the measurement results measured by the measuring means, values recorded in the recording means measured by installing the air operated valve 10 in the manufacturing apparatus, and measurement thereafter And a means for confirming a change in the operating state of the air operated valve 10. Therefore, it is possible to grasp a precursor of the malfunction of the air operated valve 10, and to detect the failure of the air operated valve 10. A situation such as a stop or a line stop can be prevented in advance.
(6) The air operated valve diagnostic device according to (5), which can be carried, so that the sensor only needs to be installed on the air operated valve when desired. Compared to the state where the sensor is always on, power is not consumed. Therefore, energy saving can be realized.
(7) In the air operated valve diagnosis device described in (5), the recording unit can identify the target air operated valve 10 for which the necessity of replacement of the air operated valve 10 is determined, and the identified air operated valve 10 Since the communication means for transmitting the measurement result recorded in the recording means to the outside is provided, a sign of malfunction of the air operated valve 10 is grasped, and the production apparatus is stopped or the line is stopped due to the failure of the air operated valve 10 Can be prevented in advance.
In addition, by transferring a large amount of statistical values of M ₀ and T ₀ to a PC or the like, information on M ₀ and T ₀ can be accumulated, further analyzed and researched, and more accurate determination can be made.
(8) In the air operated valve 10 used in any one of the air operated valve diagnosis methods used in (1) to (4), the AE sensor 2 is brought into contact with the side surface of the air operated valve 10. Since the contact portion 23a is formed, the AE sensor 2 can always be in contact with the same location. Therefore, even when there is some cause of failure in the air operated valve 10, the cause of the failure of the air operated valve 10 can be grasped by the change in sound. This is because if it can be always installed in the same state, the sound can be detected stably and the change of the sound can be easily grasped.
Moreover, since the contact part 23a is cut inward and is close to the part where the piston 13 and the stopper 26 collide, the sound generated when the piston 13 and the stopper 26 are operated can be recognized. Therefore, it is possible to recognize sound by the AE sensor 2 without installing a conventionally used oscillator in the air operated valve 10.

Note that the present invention is not limited to the above-described embodiment, and various applications are possible.
For example, the operation fluid is not limited to air but can be nitrogen gas.
Further, in the first to third embodiments, specifically, “a sound generated when the operation port supplies or exhausts the operation fluid when the valve is opened / closed”, the piston of the air operated valve acts as a stopper. The operation sound generated when the vehicle collides has been described, but the air operated valve 10 can also be diagnosed by air supply / exhaust sound, spring expansion / contraction sound, O-ring friction sound, and the like.
In addition, as with the sound when the valve is closed, the air operated valve 10 can be diagnosed by measuring and recording the sound when the valve is closed by the AE sensor 2.
In the first to third embodiments, the AE sensor 2 is brought into contact with the contact portion 23a of the air operated valve 10 to detect the sound. However, if the sound can be measured, the AE sensor 2 is turned on. You can touch anywhere.
In the first to third embodiments, the diagnosis is performed only when the air operated valve 10 is attached to the manufacturing apparatus. However, even after the diagnosis, the air operated valve 10 is removed. Diagnosis can be made. In other words, by diagnosing the air operated valve 10 after diagnosis, a detailed analysis of the cause of the failure can be performed. By performing a detailed analysis of the cause of the failure, the accuracy of diagnosis by the AE sensor can be increased.

It is a block diagram which shows the structure of an air operated valve diagnostic apparatus. It is a block diagram which shows the control part of an air operated valve diagnostic apparatus. It is a front view of the air operated valve 10 which is the object of diagnosis. It is a right view of the air operated valve 10 which is the object of diagnosis. It is sectional drawing which shows the structure of the air operated valve 10 which is the object of a diagnosis. It is an external view of the air operated valve diagnostic measuring device 40 used for air operated valve diagnosis. It is the figure which showed the AE waveform of the normal state of the model A. It is an enlarged view of _{M 0} (1) in FIG. It is the figure which showed the AE waveform of the symptom which the piston 13 of the model A does not carry out a full stroke. 6 is a diagram showing an AE waveform of a symptom in which operation port air of model A leaks to an exhaust port 8. FIG. It is the figure which showed the AE waveform of the normal state of the model B. It is the figure which showed the AE waveform of the symptom that the air operated valve 10 of the model B does not operate | move smoothly. The flowchart in case AE measurement is possible when attaching to the manufacturing apparatus of the air operated valve 10 is shown. The flowchart at the time of performing the comprehensive determination after using the air operated valve 10 repeatedly is shown. The flowchart at the time of performing the comprehensive determination in case the air operated valve 10 is already installed is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Control part 2 AE sensor 5 Solenoid valve 6 Pressure reducing valve 7 Operation port 8 Exhaust port 10 Air operated valve 23a Contact part

Claims (8)

An air operated valve diagnostic method for confirming an operating state of an air operated valve,
In the initial state of the air operated valve, an AE sensor is brought into contact with the air operated valve, and when operating fluid is supplied to the operating port of the air operated valve, or when the operating fluid is exhausted, a sound generated at the time of opening and closing A pre-process for measuring and recording
Issued when the air operated valve is opened or closed after the air operated valve is repeatedly operated, when an AE sensor is brought into contact with the air operated valve to supply the operating fluid to the operating port of the air operated valve or when the operating fluid is exhausted. A first step of measuring and recording sound;
A confirmation step of comparing the value measured in the first step with the value measured in the preliminary step to confirm a change in the operating state of the air operated valve;
An air operated valve diagnostic method comprising: An air operated valve diagnostic method according to claim 1,
The air operated valve is a liquid valve;
The first step compares the change in sound and predicts a failure of the air operated valve based on a change in the operating state of the air operated valve to determine whether or not replacement is necessary.
An air operated valve diagnostic method characterized by the above. In the air operated valve diagnostic method according to claim 1 or 2,
The value measured and recorded in the first step is an average value of the maximum value of the sound generated when the valve is opened or closed when the operation port supplies the operation fluid or exhausts the operation fluid;
Comparing the value measured and recorded in the confirmation step with the average of the maximum values;
An air operated valve diagnostic method characterized by the above. In the air operated valve diagnostic method according to claim 1 or 2,
The value measured and recorded in the first step is an occurrence time average value that is an average value of the time from when the sound of the operated valve is generated until the sound of the air operated valve is ended,
Comparing the value measured and recorded in the confirmation step with the average value of the occurrence time;
An air operated valve diagnostic method characterized by the above. A diagnostic device for monitoring an operating state of an air operated valve and confirming a change in the operating state of the air operated valve,
A measuring means for contacting the air operated valve with an AE sensor and measuring a sound generated when the air operated valve is opened and closed;
Recording means for recording measurement results measured by the measuring means;
Means for confirming a change in the operating state of the air operated valve by comparing the value recorded in the recording means measured by installing the air operated valve in the manufacturing apparatus and the value measured thereafter; ,
An air operated valve diagnostic device comprising: An air operated valve diagnostic device according to claim 5,
The air operated valve diagnostic device is portable;
An air operated valve diagnostic device characterized by An air operated valve diagnostic device according to claim 5,
Communication means for specifying the target air operated valve for which the recording means has judged whether or not the air operated valve needs to be replaced, and for transmitting the measurement result recorded in the recording means regarding the specified air operated valve to the outside. Providing
An air operated valve diagnostic device characterized by In the air operated valve used in any one of the air operated valve diagnostic methods used in claim 1 to claim 4,
A contact portion for contacting the AE sensor is formed on a side surface of the air operated valve;
Air operated valve characterized by.

Images