JP2010117076A - Hot isotropic pressure device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hot isotropic pressure device capable of automatically stopping gas supply to the inside of a high-pressure container at an appropriate time only by setting target pressure and a target temperature. <P>SOLUTION: After the gas supply by a pressurizing means is stopped (S8), when a temperature in a heating region of the high-pressure container reaches a preset target temperature by heating by a heating means (S9-S12), the hot isotropic pressure device sets beforehand conditions related to the pressure and the temperature when the gas supply by the pressurizing means is stopped based on the target pressure and target temperature so as to achieve preset target pressure in the high-pressure container (S4). After at least gas supply by the pressurizing means is started (S5), on the condition that the detected pressure and the detected temperature satisfy the stop conditions set in Step S4 (Yes side in S7), gas supply by the pressurizing means is automatically stopped (S8). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a hot isostatic pressing device (HIP device) that applies high temperature and pressure to a high pressure vessel in which a processed product to be processed is accommodated, and particularly processes the processed product. The present invention relates to a technique for controlling the amount of gas charged into the slab.

Conventionally, a hot isostatic pressing device (hereinafter referred to as “HIP”) for processing a processed product by applying a high temperature of several hundred to 2,000 [° C.] and an isotropic pressure of several tens to 200 [MPa]. (Refer to Patent Documents 1 and 2, for example).
This HIP apparatus has a gas compressor that supplies a gas such as argon into a high-pressure vessel on which a processed product is placed, and a heater that heats the inside of the high-pressure vessel. In the HIP device, the inside of the high-pressure vessel is made to reach a preset target pressure and target temperature by forced gas supply by the gas compressor and thermal expansion of gas generated by heating by the heater.
At this time, as an operation method in the HIP apparatus, there are three patterns of the pressure advance method, the temperature increase method, and the pressure increase / temperature increase method depending on the operation procedure of the gas compressor and heater.
Specifically, in the pressurization preceding method, first, a predetermined amount of gas is supplied into the high-pressure vessel by a gas compressor, and then the inside of the high-pressure vessel is started by heating the inside of the high-pressure vessel by a heater to expand the gas. To reach a preset target pressure and target temperature.
On the other hand, in the temperature rising precedence method, heating in the high-pressure vessel is first started by a heater, and then gas supply is started by a gas compressor. Then, the gas supply by the gas compressor is stopped when the supply of the predetermined amount is completed, and only the heating by the heater is continued until the inside of the high-pressure vessel reaches the preset target pressure and target temperature.
In the simultaneous boosting and heating method, the gas supply by the gas compressor and the heating by the heater are started simultaneously, and the gas supply by the gas compressor is stopped when a predetermined amount of supply is completed, and the heating heater Only heating is continued until the inside of the high-pressure vessel reaches a preset target pressure and target temperature.
JP-A-8-178753 JP 2004-85134 A

However, if the amount of gas supplied into the high-pressure vessel by the gas compressor is insufficient, the pressure in the high-pressure vessel is reduced to the target pressure even if the high-pressure vessel reaches the target temperature by heating with a heater. The problem arises that it cannot be reached. In this case, it is necessary to replenish the gas in the high-pressure vessel at that time. For example, in such a configuration in which the gas must be supplied a plurality of times, there is a problem that an increase in the number of operations of the gas valve for supplying the gas causes a shortening of the life of the gas valve.
Conversely, if there is an excess amount of gas supplied into the high-pressure vessel by the gas compressor, the high-pressure vessel is caused by thermal expansion until the inside of the high-pressure vessel reaches the target temperature due to heating by the heater. Since the internal pressure exceeds the target pressure, it is necessary to discharge gas from the high-pressure vessel. For example, when the gas once supplied into the high-pressure vessel is released in this way, there is a problem that the time and energy required to supply the released gas into the high-pressure vessel is wasted.
Therefore, it is necessary to properly determine the timing to stop the gas supply by the gas compressor so that the pressure in the high-pressure vessel can be set to the target pressure when the heating by the heater is finished. The trouble of measuring the appropriate timing based on the detection results of the temperature sensor, the pressure sensor, etc. is very complicated. In particular, when the operation is performed by the above-described temperature rising advance method or pressure rising / heating simultaneous method, the pressure and temperature in the high-pressure vessel change at the same time. It is difficult to judge.
Therefore, the present invention has been made in view of the above circumstances, and the object of the present invention is to automatically stop the supply of gas into the high-pressure vessel at an appropriate time just by setting the target pressure and the target temperature. An object of the present invention is to provide a hot isostatic pressing device that can perform the above operation.

To achieve the above object, the present invention provides a pressurizing means for supplying a gas into a high-pressure vessel, a heating means for heating the inside of the high-pressure vessel, a heating area heated by the heating means, and the heating area. A heat insulating means for insulating the non-heated area to the inner wall of the high-pressure vessel; a pressure detecting means for detecting the pressure in the high-pressure vessel; and a heating area temperature detecting means for detecting the temperature of the heating area of the high-pressure vessel. The present invention is applied to a hot isostatic pressurizing device that isotropically pressurizes a processed product in the high pressure vessel by pressurizing the inside of the high pressure vessel by the pressurizing means and the heating means. .
The hot isostatic pressure pressurizing apparatus according to the present invention stops the supply of the gas by the pressurizing means, and then sets the temperature of the heating region of the high-pressure vessel to a preset target temperature by heating by the heating means. When the gas supply by the pressurizing means is stopped so that the inside of the high-pressure vessel reaches a preset target pressure, the conditions regarding the pressure and temperature are based on the target pressure and the target temperature. Stop condition setting means for setting in advance.
In addition, at least after the gas supply by the pressurizing unit is started, the detected pressure by the pressure detecting unit and the detected temperature by the heating region temperature detecting unit satisfy the stop condition set by the stop condition setting unit. And a pressurizing and heating control means for stopping the gas supply by the pressurizing means and executing the heating by the heating means until the temperature detected by the heating region temperature detecting means reaches the target temperature. Yes.
In other words, in the hot isostatic pressurizing apparatus according to the present invention, the gas supply by the pressurizing means can be stopped at an appropriate point of time simply by setting the target pressure and the target temperature.
Thereby, since it is not necessary for the user to measure the timing for stopping the gas supply by the pressurizing means by looking at the detection result by the pressure detecting means or the heating region temperature detecting means, the labor of the user can be remarkably reduced. .

More specifically, the stop condition setting means includes a current average temperature estimation means for estimating a current average temperature of the entire high-pressure vessel, and the high-pressure vessel when a heating region of the high-pressure vessel reaches the target temperature. It is conceivable to have a target average temperature estimating means for estimating the average temperature of the entire inside. In this case, the stop condition setting means sets the current pressure in the high pressure vessel detected by the pressure detection means to P1, the target pressure to P2, the current average temperature in the high pressure vessel to T1ave, and the high pressure vessel. The relationship of (P1 / T1ave) = (P2 / T2ave) when the average temperature of the entire high-pressure vessel when the heating area of the vessel reaches the target temperature is T2ave and the unit of temperature is Kelvin [k] It is conceivable to set that the above condition is satisfied as the stop condition.
Thus, by setting the stop condition based on the average temperature of the entire high-pressure vessel, the high-pressure vessel is compared with the case where the stop condition is set based on the temperature only in the heating region of the high-pressure vessel. When the temperature of the heating region reaches the target temperature, the inside of the high-pressure vessel can be matched with the target pressure with high accuracy.

Here, it is conceivable that the current average temperature estimation means includes current non-heating area temperature estimation means for estimating the current average temperature of the non-heating area of the high-pressure vessel. In this case, the current average temperature estimating means sets the current temperature of the heating region of the high-pressure vessel to T11, the current average temperature of the non-heating region of the high-pressure vessel to T12, the total volume in the high-pressure vessel to Vv, When the volume of the heating region is Vh and the volume of the non-heating region is Vo, it is possible to calculate the current average temperature T1ave in the entire high-pressure vessel according to the following equation (1).
T1ave = [(T11 ・ Vh) + (T12 ・ Vo)] / Vv (1)
At this time, the current non-heating region temperature estimation means is configured to determine the average temperature of the non-heating region based on the preset relationship between the heating region and the temperature of the non-heating region and the temperature detected by the heating region temperature detection means. It is also possible to estimate Thereby, the present average temperature T1ave of the entire inside of the high-pressure vessel can be estimated without providing a temperature detecting means in the non-heating region.

The target average temperature estimating means includes target non-heating area temperature estimating means for estimating an average temperature of the non-heating area of the high-pressure vessel when the heating area of the high-pressure vessel reaches the target temperature. Can be considered. In this case, the target temperature estimating means sets the target temperature to T21, the average temperature of the non-heating region of the high-pressure vessel when the heating region of the high-pressure vessel reaches the target temperature, T22, When the volume is Vv, the volume of the heating region is Vh, and the volume of the non-heating region is Vo, the inside of the high-pressure vessel when the heating region of the high-pressure vessel reaches the target temperature according to the following equation (2) It is possible to calculate the overall average temperature T2ave.
T2ave = [(T21 ・ Vh) ＋ (T22 ・ Vo)] / Vv (2)
At this time, the target non-heating region temperature estimation means is configured so that the heating region of the high-pressure vessel reaches the target temperature based on a preset relationship between the heating region and the temperature of the non-heating region and the target temperature. It is also conceivable that the average temperature of the non-heated region is estimated. Thereby, the average temperature T1ave of the whole high-pressure vessel can be estimated without providing a temperature detection means in the non-heating region.

By the way, although the accuracy is inferior compared with the case where the average temperature in the entire high-pressure vessel is used as a reference as described above, the stop condition setting means detects the current pressure in the high-pressure vessel detected by the pressure detection means. P1, the current temperature of the heating region detected by the heating region temperature detecting means is T1, the target pressure is P2, the target temperature is T2, and the temperature unit is Kelvin [k], (P1 It is also conceivable to set the stop condition that / T1) = (P2 / T2) is satisfied.
The pressurization and heating control means starts only the gas supply by the pressurization means, stops the gas supply by the pressurization means on the condition that the stop condition is satisfied, and then heats by the heating means. It is conceivable that heating by the heating means is continued until the temperature detected by the heating region temperature detecting means reaches the target temperature.
Further, the pressurization and heating control means starts the gas supply by the pressurization means after or simultaneously with the start of the heating by the heating means, and the gas supply by the pressurization means satisfies the stop condition. The present invention can also be applied to a case where the condition is satisfied and the heating by the heating means is continued until the temperature detected by the heating region temperature detecting means reaches the target temperature.

According to the present invention, since the gas supply by the pressurizing means can be stopped at an appropriate time just by setting the target pressure and the target temperature, the user can select the pressure detecting means or the heating region temperature. It is not necessary to measure the timing for stopping the gas supply by the pressurizing means by looking at the detection result by the detecting means, and the labor of the user can be significantly reduced.
Further, when the stop condition is set based on the average temperature of the entire high-pressure vessel, the stop condition of the high-pressure vessel is set as compared with the case where the stop condition is set based on the temperature only in the heating region of the high-pressure vessel. When the temperature of the heating region reaches the target temperature, the inside of the high-pressure vessel can be matched with the target pressure with high accuracy.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings so that the present invention can be understood. The following embodiment is an example embodying the present invention, and does not limit the technical scope of the present invention.
FIG. 1 is a schematic cross-sectional view showing a schematic configuration of a hot isostatic pressurizing apparatus X according to an embodiment of the present invention, and FIG. 2 shows a heat executed in the hot isostatic pressurizing apparatus X. It is a flowchart which shows an example of the procedure of an isostatic pressure pressurization process.
First, a schematic configuration of a hot isostatic pressing apparatus X (hereinafter referred to as “HIP apparatus X”) according to an embodiment of the present invention will be described with reference to FIG.
As shown in FIG. 1, the HIP device X includes a high-pressure vessel 1, a heater 2 (an example of a heating unit), a gas compressor 3 (an example of a pressurizing unit), a pressurizing and heating control device 4, and an operation display unit 5. , Pressure gauge 6 (an example of pressure detection means), thermometer 7 (an example of heating area temperature detection means), and the like.

The high-pressure vessel 1 is a cylindrical sealed vessel having an upper lid 1a, a bottom lid 1b, and a cylindrical side surface 1c, and is filled with a gas such as argon. On the upper surface of the bottom lid 1b, there is provided a mounting table 11 for mounting a processed product to be processed. The bottom lid 1b is attached and detached to place the processed product on the mounting table 11 described above.
Here, the mounting table 11 thermally partitions the heater 2 and the bottom lid 1b of the high-pressure vessel 1 from each other. The high-pressure vessel 1 is composed of a bottomed cylindrical heat insulating member arranged in an inverted manner so as to thermally partition the heater 2, the upper lid 1a of the high-pressure vessel 1 and the cylindrical side surface 1c (inner wall). A heat insulating structure 12 is provided. That is, the heat insulating structure 12 is an example of heat insulating means for insulating the heating region R1 heated by the heater 2 and the non-heating region R2 from the heating region R1 to the inner wall of the high-pressure vessel 1. Thereby, the high-pressure vessel 1 is protected from high-temperature heating by the heater 2 even if the heat-resistant temperature is low. Here, the non-heating region R2 is a region excluding the heating region R1 in the high-pressure vessel 1, and is only a space between the outside of the heat insulating structure 12 and the cylindrical side surface 1c of the high-pressure vessel 1. Instead, it refers to a region including the arrangement region of the heat insulating structure 12 and the mounting table 11 described above.

The heater 2 is an example of a heating unit that is disposed above the mounting table 11 and heats the heating region R <b> 1 in the high-pressure vessel 1. In the HIP device X, the pressure heating control device 4 heats the gas by the heater 2 and thermally expands the gas, whereby the pressure in the pressure vessel 1 is increased.
The gas compressor 3 is a pressurizing means for pressurizing the inside of the high-pressure vessel 1 by supplying a gas such as argon or nitrogen into the high-pressure vessel 1 from a gas supply pipe inserted into the upper lid 1a of the high-pressure vessel 1. It is an example. In the HIP apparatus X, the pressurized heating control device 4 forcibly fills the pressurized container 1 with gas by the gas compressor 3 to increase the pressure in the pressurized container 1.
As described above, in the HIP apparatus X, the pressurization and heating control device 4 controls the gas compressor 3 and the heater 2 to increase the pressure in the high-pressure vessel 1, whereby the processing in the high-pressure vessel 1 is performed. Processing for isotropically pressing the product is executed.

The pressurization and heating control device 4 includes control devices such as a CPU (Central Processing Unit), RAM, and ROM, and a control program stored in advance in the ROM is developed on the RAM by the CPU. Are executed to control the entire HIP apparatus X in an integrated manner.
Specifically, the pressurization and heating control device 4 controls the gas compressor 3 and the heater 2 by executing a hot isostatic pressurization process (see the flowchart of FIG. 2) described later, The inside of the high-pressure vessel 1 is made to reach a preset target pressure and target temperature. Here, the pressurizing and heating control device 4 when executing the hot isostatic pressing process corresponds to the pressurizing and heating control means. In the present embodiment, a configuration in which one pressure heating control device 4 controls both the gas compressor 3 and the heater 2 is described as an example. However, the gas compressor 3 And a pressurization control device and a heating control device for individually controlling the heater 2 are provided, and a hot isostatic pressurization process (see the flowchart of FIG. 2) described later is performed by the pressurization control device and the heating control device. Execution is also conceivable as another embodiment. In this case, the pressure control device and the heating control device correspond to the pressure heating control means.
Here, the target pressure and the target temperature are set in advance by an operation input to the operation display unit 5 by the user. The operation display unit 5 is controlled by the user interface such as a keyboard and a mouse for inputting various information to the pressurizing and heating control device 4 according to a user operation and the pressurizing and heating control device 4. And a display unit such as a liquid crystal panel for displaying information.

Further, the HIP device X includes a pressure gauge 6 and a thermometer for measuring the pressure and temperature in the high-pressure vessel 1 used as a determination index in a hot isostatic pressurization process (see the flowchart of FIG. 2) described later. 7 is provided.
The pressure gauge 6 is disposed in a gas discharge pipe used when discharging gas from the high-pressure vessel 1, detects the gas pressure in the high-pressure vessel 1, and inputs it to the pressurization and heating control device 4. . The pressure gauge 6 is not limited as long as it can measure the pressure in the high-pressure vessel 1 and the arrangement position thereof is not limited.
The thermometer 7 is a temperature sensor such as a thermocouple provided in the heating region R 1 of the high-pressure vessel 1, detects the gas temperature in the heating region R 1, and inputs it to the pressure heating control device 4. To do. The position of the thermometer 7 is, for example, near the center of the height (Hh) of the heating region R1 in the high-pressure vessel 1 as shown in FIG. The thermometer 7 only needs to be able to measure the temperature of the heating region R1, and its arrangement position and detection method are not limited. For example, the configuration is not limited to a thermocouple, and a configuration that converts measured light into temperature (for example, see Patent Document 1) may be employed. Since the temperature in the heating region R1 heated by the heater 2 is considered to be substantially uniform, the temperature detected by the thermometer 7 will be used as the temperature of the heating region R1 (T11 described later). However, of course, the thermometers 7 may be arranged at a plurality of locations in the heating region R1, the temperatures at the plurality of locations may be detected, and the average temperature may be used as the temperature of the heating region R1 (T11 described later). Moreover, you may estimate and use the average temperature of the said heating area | region R1 from the detected temperature of the said one thermometer 7. FIG.

Hereinafter, according to the flowchart of FIG. 2, an example of the hot isostatic pressing process executed by the pressurizing and heating control apparatus 4 in the HIP apparatus X will be described. In the figure, S1, S2,... Represent processing procedure (step) numbers. Here, a case where operation is performed by a so-called step-up advance method will be described as an example.
First, in step S1, the pressurization and heating control device 4 waits for a processing execution request in the HIP device X (No side of S1). Specifically, the pressurization and heating control device 4 determines whether or not an execution request operation is performed on the operation display unit 5 by the user. If it is determined that the execution request for the hot isostatic pressing process has been made (Yes side of S1), the process proceeds to step S2.
In step S2, the pressurization and heating control device 4 causes the operation display unit 5 to display a setting screen for setting a target pressure and a target temperature. In step S3, the target pressure from the operation display unit 5 is displayed. And it waits for input of target temperature (No side of S3). Thereby, the user performs an operation input for setting the target pressure and the target temperature according to the setting screen of the operation display unit 5.
And if the said pressurization heating control apparatus 4 judges that the target pressure and the target temperature were set in the said step S3 (Yes side of S3), it will transfer a process to step S4.

In step S4, the pressurization and heating control device 4 stops the supply of gas by the gas compressor 3 started in step S5 described later (S8), and then the heating by the heater 2 (S9) causes the high pressure. When the temperature of the heating region R1 of the container 1 reaches the target temperature set in step S3 (Yes side of S11), the inside of the high-pressure container 1 becomes the target pressure set in step S3. Conditions relating to pressure and temperature when the gas supply by the gas compressor 3 is stopped (hereinafter referred to as “stop conditions”) are set based on the target pressure and target temperature set in step S3.
That is, the stop condition is that the gas is supplied into the high-pressure vessel 1 after the gas supply by the gas compressor 3 is stopped and until the target pressure and the target temperature are achieved by the heating by the heater 2. This is a condition for determining the filling amount of the gas into the high-pressure vessel 1 so that the generated gas does not need to be extracted or does not need to be replenished in the high-pressure vessel 1. Here, the pressurization and heating control device 4 when executing the setting process of the stop condition corresponds to the stop condition setting means.

Here, a specific example of the stop condition setting process executed by the pressure heating control device 4 in step S4 will be described.
In the present embodiment, the following equations (3) to (5) are stored in advance in a storage memory such as a ROM provided in the pressurization and heating control device 4 as relational expressions for setting the stop condition. It shall be.
Here, the current temperature of the heating region R1 of the high-pressure vessel 1 is T11, the current average temperature of the non-heating region R2 of the high-pressure vessel 1 is T12, the current average temperature of the entire high-pressure vessel 1 is T1ave, T21 is the target temperature, T22 is the average temperature of the non-heating region R2 of the high-pressure vessel 1 when the heating region R1 of the high-pressure vessel 1 reaches the target temperature T21, and the heating region R1 of the high-pressure vessel 1 is the target temperature. The average temperature of the whole high-pressure vessel 1 when reaching T21 is defined as T2ave. Here, the unit of these temperatures is Kelvin [k]. The current pressure in the high-pressure vessel 1 detected by the pressure gauge 6 is P1 [kgf / cm2], and the target pressure is P2 [kgf / cm2]. Furthermore, the volume of the entire high-pressure vessel 1 is Vv, the volume of the heating region R1 is Vh, and the volume of the non-heating region R2 is Vo.
P1 / T1ave = P2 / T2ave (3)
T1ave = [(T11 ・ Vh) + (T12 ・ Vo)] / Vv (4)
T2ave = [(T21 ・ Vh) + (T22 ・ Vo)] / Vv (5)
Then, the pressurization and heating control device 4 reads the relationship of the equation (3) from the ROM, and the equation (3) is established when the target pressure and the target temperature set in step S3 are substituted. Is set as a stop condition. At this time, the pressurization and heating control device 4 calculates the average temperature T1ave and the average temperature T2ave according to the formulas (4) and (5).
Here, the pressurization and heating control device 4 for calculating the current average temperature T1ave of the entire high-pressure vessel 1 according to the equation (4) corresponds to the current average temperature estimation means. Further, according to the equation (5), the pressure heating control device 4 for calculating the average temperature T2ave of the entire high pressure vessel 1 when the heating region R1 of the high pressure vessel 1 reaches the target temperature T21 is as follows. This corresponds to target average temperature estimation means.

なお，前記（３）式はボイルシャルルの法則に基づいており，温度の単位が［℃］である場合には，前記（３）式又は（６）式を下記（７）式又は（８）式とすればよい。
P1／(T1ave＋273)=P2／(T2ave＋273) …（７）

例えば，前記目標圧力Ｐ２が２，０００［ｋｇｆ／ｃｍ²］，前記平均温度Ｔ２ａｖｅが７５０［℃］である場合には，前記（７）式に基づいて，現在の圧力Ｐ１＝｛２０００／（７５０＋２７３）｝・（Ｔ１ａｖｅ＋２７３）が成立することが前記停止条件として設定される。 Further, the equations (3) to (5) are not individually stored but may be stored as one relational expression as the following equation (6).

The equation (3) is based on Boyle Charles' law, and when the unit of temperature is [° C.], the equation (3) or (6) is changed to the following equation (7) or (8): An expression may be used.
P1 / (T1ave + 273) = P2 / (T2ave + 273) (7)

For example, when the target pressure P2 is 2,000 [kgf / cm ² ] and the average temperature T2ave is 750 [° C.], based on the equation (7), the current pressure P1 = {2000 / ( 750 + 273)} · (T1ave + 273) is established as the stop condition.

Here, the volumes Vv, Vh, Vo are as shown in FIG. 1 where the height in the high-pressure vessel 1 is Hv, the radius is Dv, the height of the heating region R1 is Hh, and the radius is Dh. It can be calculated by the following equations (7) to (9).
^{Vv = (Dv 2/4)} · π · Hv ... (7)
^{Vh = (Dh 2/4)} · π · Hh ... (8)
Vo = Vv−Vh (9)
Note that the volumes Vv, Vh, and Vo may be stored in advance in a ROM or the like provided in the pressure heating control device 4. Further, the volumes Vv, Vh, Vo may be set by inputting the dimensions of the pressurized container 1 when setting the target pressure and the target temperature in the step S2. Here, regarding the volume Vh of the non-heating region R2, the volume of the heat insulation structure 12 and the mounting table 11 is ignored, but of course these volumes and porosity (the heat insulation structure 12 is a porous structure). The volume Vh of the non-heated region R2 may be strictly calculated in consideration of (in the case of a porous body).

By the way, the pressurizing and heating control device 4 is configured so that the current average temperature T12 of the non-heating region R2 of the high-pressure vessel 1 or the high-pressure vessel 1 when the heating region R1 of the high-pressure vessel 1 reaches the target temperature T21. There are various methods for estimating the average temperature T22 of the non-heated region R2. Any method that can estimate the average temperature T12 and the average temperature T22 is not limited to the method described here, and may be employed.
First, the average temperature T12 can be calculated based on the current temperature T11 of the heating region R1 detected by the thermometer 7. Specifically, the temperature relationship between the heating region R1 and the non-heating region R2 is determined based on the actual data obtained through experiments or the estimated data obtained through simulation, and from the temperature T11 according to the relationship. It is conceivable to estimate the average temperature T12.
For example, a thermometer (hereinafter referred to as “non-heating region thermometer”) is also provided in the non-heating region R2 of the high-pressure vessel 1, and the pressure heating control device 4 adjusts the detected temperature of the non-heating region thermometer. Based on this, it is conceivable to estimate the average temperature T12 of the non-heating region R2. More specifically, the non-heating region thermometer is arranged at a position equivalent to the thermometer 7 on the cylindrical side surface 1c (the center of the height Hh of the heating region R1). It can be estimated that the average temperature T12 is about 1 / 1.5 to 1/3 of the total temperature of the temperature detected by the thermometer and the temperature detected by the thermometer 7 in the heating region R1. The relationship between the total temperature and the average temperature T12 is obtained from the structure of the high-pressure vessel 1, the structure of each component arranged in the high-pressure vessel 1, or actual data or simulation obtained in advance through experiments. What is necessary is just to set suitably based on the estimated data etc. which were given. Further, the non-heating region thermometers are arranged at a plurality of locations in the non-heating region R2, the average temperature of the plurality of non-heating region thermometers is calculated, and the average temperature is used for the non-heating region thermometer R2. It is also conceivable to estimate the average temperature T12.
Furthermore, without setting the non-heating region thermometer, it is simply set that the average temperature T12 of the non-heating region R2 is about 1 / 1.5 to 1/3 of the detected temperature of the heating region R1. It is also conceivable to estimate the average temperature T12 by setting it in advance.
Here, the pressurization heating control device 4 for estimating the current average temperature T12 of the non-heating region R2 of the high-pressure vessel 1 by these methods corresponds to the current non-heating region temperature estimating means.

On the other hand, the average temperature T22 can be calculated based on the target temperature T21. Specifically, the relationship between the temperature of the heating region R1 and the non-heating region R2 is determined based on performance data obtained by experiments in advance or estimated data obtained by simulation, and the target temperature T21 is determined according to the relationship. It is also conceivable to estimate the average temperature T22 from the above.
For example, the temperature (hereinafter referred to as “side surface temperature”) at the same height as the thermometer 7 on the cylindrical side surface 1c (the center of the height Hh of the heating region R1) and the heating region R1 by the thermometer 7 are described. It is conceivable to set a relationship with the detected temperature in advance. Then, the side surface temperature is estimated based on the temperature relationship and the target temperature T21, and about 1 / 1.5 to 1/3 of the total temperature of the target temperature T21 and the side surface temperature is the average temperature T22. It can be estimated that there is. The relationship between the side surface temperature and the temperature detected in the heating region R1 by the thermometer 7 and the relationship between the total temperature and the average temperature T22 are determined depending on the structure of the high-pressure vessel 1 and the high-pressure vessel 1. What is necessary is just to set suitably based on the structure of each component to be performed, the performance data obtained beforehand by experiment, the estimation data obtained by simulation, etc. FIG.
Furthermore, the average temperature T22 is estimated by simply setting that the average temperature T22 is about 1 / 1.5 to 1/3 of the target temperature T21 without estimating the side surface temperature. It is also possible to do.
Here, by such a method, the pressurization heating control when estimating the average temperature T22 of the non-heating region R2 of the high-pressure vessel 1 when the heating region R1 of the high-pressure vessel 1 reaches the target temperature T21. The apparatus 4 corresponds to a target non-heating region temperature estimation unit.

When the stop condition is set in step S4, in the subsequent step S5, the pressurizing and heating control device 4 starts supplying gas into the high-pressure vessel 1 by the gas compressor 3. As a result, the pressure inside the high-pressure vessel 1 is increased by forcibly filling with gas.
Thereafter, in step S6, the pressure heating control device 4 detects the current pressure in the high-pressure vessel 1 and the temperature in the heating region R1 by the pressure gauge 6 and the thermometer 7.
Subsequently, in step S7, the pressurization and heating control device 4 determines whether or not the relationship between the detected pressure and the detected temperature detected in step S6 satisfies the stop condition set in step S4. . That is, it is determined whether the expression (3) (or the expression (6)) is satisfied.
Here, the pressurization and heating control device 4 determines that the detected pressure and detected temperature detected in step S6 satisfy the stop condition (Yes side of S7), and the process proceeds to step S8. Transition. On the other hand, if it is determined that it is not satisfied (No side of S7), the process returns to step S6. Thereby, in the HIP device X, the gas supply by the gas compressor 3 is continued until the relationship between the pressure and temperature in the high-pressure vessel 1 satisfies the stop condition.

When the stop condition is satisfied, subsequently, in step S8, the pressurization and heating control device 4 stops the gas supply by the gas compressor 3. As a result, when the temperature of the heating region R1 reaches the target temperature, the high-pressure vessel 1 is filled with an amount of gas necessary to bring the pressure in the high-pressure vessel 1 to the target pressure at the same time. It will be done.
Next, in step S9, the pressure heating control device 4 starts heating by the heater 2. As a result, the temperature in the high-pressure vessel 1 rises, and the pressure in the high-pressure vessel 1 also rises due to thermal expansion due to the gas temperature rise. At this time, the temperature and pressure in the high-pressure vessel 1 change according to Boyle's law. In addition, when the inside of the high-pressure vessel 1 becomes high pressure, it is conceivable that a deviation occurs in the temperature and pressure change mode in the high-pressure vessel 1 and the Boyle Charles' law, but the deviation decreases the rate of increase in pressure. Deviation in direction. Therefore, even after the gas supply by the gas compressor 3 is stopped in the step S8, the pressurization and heating control device 4 supplies the gas by the gas compressor 3 as necessary, thereby causing the deviation. It is also conceivable as another embodiment to correct the above. At this time, since the pressurization and heating control device 4 only performs correction control in a direction to increase the amount of gas in the high-pressure vessel 1, after stopping the gas supply by the gas compressor 3 in step S8, There is no need to discharge gas from the high-pressure vessel 1.

In steps S10 to S11, the pressure heating control device 4 detects the temperature of the heating region R1 with the thermometer 7 (S10), and the detected temperature of the heating region R1 is the target temperature. It is determined whether or not the temperature has been reached (S11).
If it is determined that the target temperature has been reached (Yes in S11), the process proceeds to step S12. On the other hand, if it is determined that it has not been reached (No in S11), the process returns to step S10.
In step S12, the pressurization and heating control device 4 stops the heating by the heater 2 and ends the hot isostatic pressurization process.
When the heating of the heater 2 is automatically stopped in this way, the target pressure is realized together with the target temperature in the heating region R1 in the high-pressure vessel 1. Accordingly, during the period from when the gas supply by the gas compressor 3 is stopped until the temperature of the heating region R1 reaches the target temperature due to the heating by the heater 2, the release of gas from the high-pressure vessel 1 or There is no need to replenish gas by the gas compressor 3.
As described above, in the HIP device X, the gas supply into the high-pressure vessel 1 can be automatically stopped at an appropriate point of time simply by setting the target pressure and the target temperature. Thereby, the trouble of the user who operates the HIP device X is remarkably reduced.

By the way, in the present embodiment, the case where the HIP device X is operated by the so-called step-up advance method has been described as an example. Specifically, in the HIP apparatus X, first, only the gas supply by the gas compressor 3 is started, the gas supply by the gas compressor 3 is stopped on the condition that the stop condition is satisfied, and then the heating is performed. Heating by the heater 2 is started, and heating by the heater 2 is continued until the temperature detected by the thermometer 7 reaches the target temperature. That is, the heating by the heater 2 is not performed until the gas supply by the gas compressor 3 is stopped.
Therefore, in step S4, the value of the pressure (P1) at which the gas supply to the high pressure vessel 1 should be stopped is calculated assuming that the current average temperature (P1ave) in the high pressure vessel 1 is constant. Is also possible.
For example, a the average temperature (T1ave) is assumed 50 [° C.] in the high-pressure vessel 1 when the step S4 is executed, the target pressure (P2) is 2,000 [kgf / cm ^2], the average When the temperature (T2ave) is 750 [° C.], the stop condition may be that the current pressure (P1) reaches {2000 / (750 + 273)} · (50 + 273). Thereby, after the gas supply by the gas compressor 3 is stopped, the target pressure and the target temperature can be realized in the high-pressure vessel 1 when the target temperature is reached by the heating by the heater 2.

Furthermore, in the present embodiment, the case has been described in which the current temperature detected by the thermometer 7 is used when setting the stop condition in step S4 or when determining whether the stop condition is satisfied in step S7. , Not limited to this.
For example, when an operation is performed in which the temperature at the start of processing by the HIP device X is substantially the same, a predetermined temperature is stored in the ROM as the current temperature of the heating region R1. When the pressurization heating control device 4 sets the stop condition in step S4 or determines whether the stop condition is satisfied in step S7, the predetermined heating temperature stored in the ROM is set to the current heating area. A configuration for reading out the temperature of R1 is also conceivable. The predetermined temperature may be used as the temperature of the heating region R1 or as the average temperature of the entire high-pressure vessel 1. At this time, the pressure heating control device 4 for reading the predetermined value corresponds to a heating region temperature detecting means or a current average temperature estimating means.
According to this technique, the process for detecting the temperature of the heating region R1 by the thermometer 7 executed by the pressurization and heating control device 4, and the entire inside of the high-pressure vessel 1 based on the detected temperature. Processing for calculating the average temperature can be omitted.

On the other hand, the present invention is not limited to the preceding pressure increase method, and can also be applied to the case where the pressure and temperature in the high-pressure vessel 1 change at the same time, such as a temperature increase preceding method or a pressure increase temperature increase simultaneous method. In addition, after the temperature rising precedence system started the heating by the heater 2, the gas supply by the gas compressor 3 is started, and the gas supply by the gas compressor 3 satisfies the stop condition. The heating by the heater 2 is continued until the temperature detected by the thermometer 7 reaches the target temperature. Further, the simultaneous pressurization and temperature increase method simultaneously starts heating by the heater 2 and gas supply by the gas compressor 3, and the gas supply by the gas compressor 3 satisfies the stop condition. The heating by the heater 2 is continued until the temperature detected by the thermometer 7 reaches the target temperature.
When the operation is performed by these methods, the average temperature in the high-pressure vessel 1 is changed by the heating by the heater 2 while the gas is supplied by the gas compressor 3. Therefore, it is not possible to specify in advance the pressure value at which the gas supply to the high-pressure vessel 1 should be stopped in the step S4.
Accordingly, when the operation is performed by the temperature rise preceding method or the pressure increase / temperature rise simultaneous method, the pressurization and heating control device 4 performs the gas supply by the gas compressor 3 and the heating by the heater 2. , It is determined at any time whether or not the stop condition represented by the expression (3) (or expression (6)) used in step S4 is satisfied, and when the stop condition is satisfied, the gas compressor The gas supply by 3 is stopped first. Accordingly, even when the operation is performed by the temperature rise preceding method or the pressure increase / temperature rise simultaneous method, the gas supply by the gas compressor 3 can be automatically stopped at an appropriate timing according to the stop condition.

Hereinafter, in the first and second embodiments, another example of the stop condition setting process (step S4) in the hot isostatic pressurization process (see the flowchart of FIG. 2) executed by the pressurization and heating control device 4 will be described. Will be described. In addition, the same code | symbol is attached | subjected to the component similar to the said HIP apparatus X demonstrated in the said embodiment, and it uses for description of the present Examples 1,2.
In the embodiment, the stop condition is set based on the average temperature of the entire high-pressure vessel 1 in consideration of the difference in temperature distribution between the heating region R1 and the non-heating region R2 in the high-pressure vessel 1. Was.
On the other hand, although the accuracy is inferior compared with the configuration according to the embodiment, in order to easily set the stop condition, the influence of the non-heating region R2 in the high-pressure vessel 1 is ignored and the heating is performed. It is conceivable to set the stop condition based on the relational expression to which the Boyle Charles' law is applied in consideration of only the region R1.
Specifically, the pressurization and heating control device 4 sets that the following equation (10) is satisfied as a stop condition (S4), and satisfies that the stop condition is satisfied (Yes side of S7). It is conceivable to stop the gas supply by the gas compressor 3 (S8). Here, the current pressure in the high-pressure vessel 1 is P1, the current temperature of the heating region R1 is T1, the target pressure is P2, and the target temperature is T2. The unit of these temperatures is Kelvin [k].
(P1 / T1) = (P2 / T2) (10)
When the temperature unit is [° C.], the following equation (11) may be used.
P1 / (T1 + 273) = P2 / (T2 + 273) (11)
Thereby, compared with the method according to the embodiment, the degree of coincidence of the pressure in the high-pressure vessel 1 with the target pressure P2 when the temperature of the heating region R1 reaches the target temperature T2 is low. The gas supply by the gas compressor 3 can be automatically stopped so as not to require replenishment of gas by the gas compressor 3 or release of gas from the high-pressure vessel 1 as much as possible.

In the second embodiment, a case will be described in which the pressurization and heating control device 4 sets a stop condition based on performance data obtained in advance by experiments, estimated data obtained by simulation, or the like.
FIG. 3 is a graph for explaining another example of the stop condition setting process in the hot isostatic pressing process. In the graph of FIG. 3, the horizontal axis t indicates the temperature of the heating region R <b> 1, and the vertical axis p indicates the pressure in the high-pressure vessel 1.
As shown in FIG. 3, in the HIP apparatus X, after starting only heating by the heater 2 from the point A1 at an arbitrary temperature t1 and pressure p1, the pressure at the point A2 reaching the temperature t2 is p2. Assume that actual data (or estimated data) is obtained.
At this time, the pressurizing and heating control device 4 derives a point A0 where the pressure p becomes 0 by extending the straight line L1 connecting the point A1 and the point A2, and the coordinates of the point A0 are obtained as described above. It is stored in the ROM of the pressure heating control device 4 or the like. The temperature t0 at the point A0 varies depending on the structure of the HIP device X, the operating environment of the HIP device X, and the like.
In step S4, the pressurization and heating control device 4 sets a stop condition based on the coordinates of the point A0 and the target pressure and target temperature set in step S3.

For example, as shown in FIG. 3, when the target pressure and the target temperature are set at a point B2 of the pressure p3 and the temperature t3, the pressurization and heating control device 4 draws a straight line L2 from the point B2 to the point A0. Assuming that the detection results of the pressure gauge 6 and the thermometer 7 are on the straight line L2, the stop condition is set.
Thus, for example, when an operation from the point B0 at the temperature t1 to the point B2 is performed by the pressure advance method, the pressure in the high pressure vessel 1 is increased by the gas supply by the gas compressor 3, and the line L2 is increased. When the pressure reaches the point B1 of the pressure p4, the gas supply by the gas compressor 3 is stopped. Thereafter, the heating by the heater 2 is started, so that the pressure and temperature reach the point B2 along the straight line L2.
On the other hand, in the case of performing the operation from the point B0 of the temperature t1 to the point B2 by the simultaneous boosting and temperature raising method, the gas supply by the gas compressor 3 and the heating by the heater 2 are performed simultaneously. As shown by the curve L3 shown in FIG. When the pressure and temperature reach the intersection C1 between the curve L3 and the straight line L2, the gas supply by the gas compressor 3 is stopped. Thereafter, only the heating by the heater 2 is continued, so that the pressure and temperature reach the point B2 along the straight line L2. Similarly, when performing the operation from the point D0 of the temperature t4 to the point B2 by the simultaneous boosting and heating method, the pressure and temperature rise along the curve L4 and reach the intersection D1 with the straight line L2. At that time, the gas supply by the gas compressor 3 is stopped. Thereafter, only the heating by the heater 2 is continued, so that the pressure and temperature reach the point B2 along the straight line L2.

1 is a schematic cross-sectional view showing a schematic configuration of a hot isostatic pressing apparatus X according to an embodiment of the present invention. The flowchart which shows an example of the procedure of the hot isostatic pressing process performed in the hot isostatic pressing apparatus X which concerns on embodiment of this invention. The graph for demonstrating the other example of the setting process of the stop condition in a hot isostatic pressure pressurization process.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... High pressure vessel 1a ... Upper lid 1b ... Bottom lid 1c ... Cylindrical side surface 2 ... Heater (an example of a heating means)
3. Gas compressor (an example of pressurizing means)
4 ... Pressurization heating control device 5 ... Operation display unit 6 ... Pressure gauge (an example of pressure detection means)
7. Thermometer (an example of heating area temperature detection means)
11 ... mounting table 12 ... heat insulating structure (an example of heat insulating means)
S1, S2, ..., processing procedure (step) number

Claims (9)

A pressurizing means for supplying a gas into the high-pressure vessel, a heating means for heating the inside of the high-pressure vessel, a heating region heated by the heating means, and a non-heating region from the heating region to the inner wall of the high-pressure vessel. Insulating means for insulating, pressure detecting means for detecting the pressure in the high pressure vessel, and heating area temperature detecting means for detecting the temperature of the heating area of the high pressure vessel, the pressurizing means and the heating means A hot isostatic pressurizing device for isotropically pressurizing the processed product in the high-pressure vessel by pressurizing the inside of the high-pressure vessel by:
After stopping the gas supply by the pressurizing means, when the temperature of the heating region of the high-pressure vessel reaches a preset target temperature by heating by the heating means, the inside of the high-pressure vessel is set to a preset target. Stop condition setting means for preliminarily setting conditions relating to pressure and temperature when stopping gas supply by the pressurizing means so as to be a pressure based on the target pressure and the target temperature;
After at least gas supply by the pressurizing means is started, the detected pressure by the pressure detecting means and the detected temperature by the heating region temperature detecting means satisfy the stop condition set by the stop condition setting means. Pressure heating control means for stopping the supply of gas by the pressurizing means and executing the heating by the heating means until the temperature detected by the heating region temperature detecting means reaches the target temperature,
A hot isostatic pressing device characterized by comprising: The stop condition setting means is
Current average temperature estimating means for estimating the current average temperature of the entire high pressure vessel, and target average temperature estimation for estimating the average temperature of the entire high pressure vessel when the heating region of the high pressure vessel reaches the target temperature Means,
The current pressure in the high-pressure vessel detected by the pressure detection means is P1, the target pressure is P2, the current average temperature in the entire high-pressure vessel is T1ave, and the heating region of the high-pressure vessel reaches the target temperature. When the average temperature of the whole high-pressure vessel is T2ave and the unit of temperature is Kelvin [k], the condition that (P1 / T1ave) = (P2 / T2ave) is satisfied is set as the stop condition. The apparatus for hot isostatic pressing according to claim 1. The current average temperature estimating means is
A current non-heating region temperature estimating means for estimating an average temperature of the non-heating region of the current high-pressure vessel;
The current temperature of the heating area of the high-pressure vessel is T11, the current average temperature of the non-heating area of the high-pressure vessel is T12, the entire volume in the high-pressure vessel is Vv, the volume of the heating area is Vh, and the non-heating area The hot isostatic pressurization device according to claim 2, wherein the average temperature T1ave of the entire inside of the high-pressure vessel is calculated according to the following formula (1), where V
T1ave = [(T11 ・ Vh) + (T12 ・ Vo)] / Vv (1)   The current non-heating region temperature estimation means estimates an average temperature of the non-heating region based on a preset relationship between the heating region and the temperature of the non-heating region and a temperature detected by the heating region temperature detection means. The hot isostatic pressurization device according to claim 3 which is a thing. The target average temperature estimating means is
A target non-heating region temperature estimating means for estimating an average temperature of the non-heating region of the high-pressure vessel when the heating region of the high-pressure vessel reaches the target temperature,
T21 is the target temperature, T22 is the average temperature of the non-heating region of the high-pressure vessel when the heating region of the high-pressure vessel reaches the target temperature, Vv is the total volume in the high-pressure vessel, and the volume of the heating region is Vh, where the volume of the non-heated region is Vo, the average temperature T2ave of the entire high-pressure vessel when the heated region of the high-pressure vessel reaches the target temperature is calculated according to the following equation (2). The hot isostatic pressing apparatus according to any one of claims 2 to 4.
T2ave = [(T21 ・ Vh) ＋ (T22 ・ Vo)] / Vv (2)   When the target non-heating region temperature estimation means reaches the target temperature when the heating region of the high-pressure vessel reaches the target temperature based on a preset relationship between the heating region and the temperature of the non-heating region and the target temperature. The hot isostatic pressing device according to claim 5, which estimates an average temperature of the non-heated region. The current pressure in the high-pressure vessel detected by the pressure detection means is P1, the current temperature of the heating area detected by the heating area temperature detection means is T1, the target pressure is P2, and the target temperature is T2. And when the temperature unit is Kelvin [k],
The hot isostatic pressing device according to claim 1, wherein the stop condition setting means sets that (P1 / T1) = (P2 / T2) is satisfied as the stop condition.   The pressure heating control means starts only the gas supply by the pressure means, stops the gas supply by the pressure means on the condition that the stop condition is satisfied, and then starts heating by the heating means The hot isostatic pressing device according to any one of claims 1 to 7, wherein heating by the heating means is continued until the temperature detected by the heating region temperature detecting means reaches the target temperature.   After the pressure heating control means starts heating by the heating means or at the same time as starting, the gas supply by the pressure means is started, and the gas supply by the pressure means satisfies the stop condition The hot isotropy according to any one of claims 1 to 7, wherein the heating by the heating means is continued until the temperature detected by the heating region temperature detecting means reaches the target temperature. Pressurizing device.

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