JP2010114021A - Nozzle for static eliminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nozzle for a static eliminator capable of uniform static elimination without greatly reducing an ion discharge amount per unit time even in the case the size of an object to be statically eliminated is large. <P>SOLUTION: This nozzle is used for the static eliminator to eject ions discharged from a discharge electrode by application of a high frequency voltage together with a compressed gas. A plurality of opening parts are interposed in an inner face of an outer shell to form an airflow part extending in a flow direction of an ionized gas. The longer (shorter) the distance from the discharge electrode the opening part has, the more (less) a coupling passage to link an ejection port to eject the ionized gas outside and the opening part is inclined from a direction orthogonal to the airflow passing-through part. A shape of the ejection port is made to be nearly round. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a static eliminator nozzle that discharges ions by applying a high-frequency voltage to a discharge electrode, and discharges and applies the gas as an ionized gas toward the static elimination object.

  Conventionally, a static eliminator that injects an ionized gas containing charged ions is used for preventing static charge in the air in a clean room or the like or neutralizing a static elimination object. In a static eliminator that uses an ionized gas, a high voltage is applied to a discharge electrode to cause corona discharge to generate ions. Then, the generated ions can be neutralized by spraying the generated ions together with the compressed gas or the like as an ionized gas onto the neutralization target, etc., and neutralizing them electrically.

  When a DC high voltage is applied to the discharge electrode, it is necessary to provide both a positive discharge electrode and a negative discharge electrode, and when the positive / negative balance is lost, charging is promoted. Therefore, normally, an alternating high voltage is applied between the discharge electrode and the counter electrode to generate positive and negative air ions alternately.

  For example, Patent Document 1 discloses an ion generating apparatus used for a static eliminator in which an alternating high voltage is applied to a discharge electrode and an ionized gas is induced to a static elimination target by a conduit. In Patent Document 1, by applying a high-frequency AC high voltage to the discharge electrode, when ionized gas is supplied into a pipe or the like, the rate at which ions in the ionized gas recombine and disappear is reduced. Can do. In addition, the transformer of the high-voltage power supply can be reduced in size and weight, which can contribute to reducing the overall size and weight of the static eliminator.

Further, in Patent Document 2, even when the discharge tube is long, the cross-sectional shape of the flow path of the ionization gas discharge hole extends in the extension direction of the discharge tube so as not to reduce the amount of ion discharge per unit time. A static elimination device having a long hole is disclosed. Thereby, even if a static elimination object exists in the position away from the discharge electrode, it can discharge | emit, without reducing the ion emission amount per unit time.
JP 2000-138090 A JP 2004-296200 A

  However, in the ion generating apparatus disclosed in Patent Document 1, when ionized gas is supplied into the pipe, it is possible to reduce the rate at which ions disappear, compared to when a low-frequency AC high voltage is applied. Even if it is possible, it is impossible to prevent an increase in the rate at which ions disappear when the piping is lengthened. Therefore, when the size of the static elimination object is large, or when it is necessary to dispose the static eliminator body away from the static elimination object, the tube length from the discharge electrode to the discharge port for releasing the ionized gas becomes long. However, there was a problem that it could not be neutralized.

  Even if the tube length from the discharge electrode to the discharge port for discharging the ionized gas is long, in order to maintain the static elimination capability, the pressure of the compressed gas to be supplied can be increased and the flow rate of the generated ionized gas can be increased. It ’s fine. However, when the pressure of the compressed gas is increased, the atmospheric pressure around the discharge electrode increases, so that the minimum value of the voltage at which the discharge electrode starts corona discharge also increases. Therefore, it is difficult to stably generate ions from the discharge electrode unless the voltage applied to the discharge electrode is increased, and it is necessary to increase the capacity of the power source in order to increase the applied voltage. As a result, it becomes an obstacle to miniaturization and weight reduction and also a cost increase factor.

  Further, since the consumption of the compressed gas to be supplied also increases, the operation cost of the compressor that generates the compressed gas increases, and problems such as an increase in the cost of the static eliminator as a whole also arise.

  The present invention has been made in view of the above circumstances, and even if the size of the object to be neutralized is large, the nozzle for static eliminator that can uniformly eliminate static electricity without greatly reducing the amount of ion emission per unit time The purpose is to provide.

  In order to achieve the above object, a static eliminator nozzle according to a first aspect of the present invention is a static eliminator nozzle that discharges ions discharged from a discharge electrode together with an air current by applying a high-frequency voltage. A plurality of openings are arranged in parallel on the inner surface of the outer shell forming the portion, and the opening having a longer (shorter) distance from the discharge electrode discharges an airflow containing ions to the outside and the opening. The connecting passage that connects to the portion is inclined largely (smallly) from the direction orthogonal to the airflow passage portion, and the shape of the discharge port is substantially circular.

  In the first invention, a plurality of openings are arranged in parallel on the inner surface of the outer shell that forms an airflow passage that extends in the direction in which the ionized gas flows as an airflow, and an opening having a longer (shorter) distance from the discharge electrode. The connecting passage that connects the discharge port for discharging ionized gas to the outside and the opening portion is greatly (smallly) inclined from the direction perpendicular to the airflow passage portion. Thereby, the further away from the discharge electrode, the more the connection passage connecting the discharge port and the opening is inclined, and the ionized gas that reaches farther from the discharge port can be discharged. Therefore, it is not necessary to lengthen the tube length of the nozzle, the rate at which ions disappear due to ion recombination within the nozzle is reduced, and it becomes possible to reach an ionized gas with a uniform ion residual amount farther. In addition, since the shape of the discharge port is substantially circular, vortex flow, turbulence, and the like hardly occur in the vicinity of the discharge port, and the ionized gas can reach farther.

  Further, the static eliminator nozzle according to the second invention is characterized in that, in the first invention, the connection passage is longer (shorter) as the opening is longer (shorter) from the discharge electrode. And

  In the second invention, the longer the distance from the discharge electrode, the longer the length of the connecting passage, so that the discharge port is further away from the discharge electrode, that is, closer to the larger static elimination object. The ionized gas can be more reliably discharged toward the static elimination object.

  Further, the static eliminator nozzle according to the third invention is the connection passage of the other discharge port corresponding to the opening having a long distance from the discharge electrode adjacent to the one discharge port in the first or second invention. The outer surface of the outer shell forming the angle of inclination is larger than the angle of inclination of the center line of the one discharge port.

  In the third aspect of the invention, the inclination angle of the outer surface of the outer shell that forms the connecting passage of the other discharge port corresponding to the opening that is adjacent to the one discharge port and has a long distance from the discharge electrode is the center of the one discharge port. By forming so as to be larger than the inclination angle of the line, the ionized gas discharged from the discharge port is not interfered with the outer peripheral portion of the adjacent connecting passage, and the rate at which ions disappear is increased. It becomes possible to make the ionized gas reach far.

  Further, in the static eliminator nozzle according to the fourth invention, in any one of the first to third inventions, the plurality of discharge ports are arranged linearly along the axis of the airflow passage portion. It is characterized by that.

  In the fourth invention, since the plurality of discharge ports are arranged linearly along the axis of the airflow passage portion, vortex flow, turbulence, etc. are hardly generated inside the airflow passage portion, and ions disappear. It becomes possible to make the ionized gas reach farther while keeping the ratio to a minimum.

  Further, the static eliminator nozzle according to a fifth aspect of the present invention is the discharge nozzle according to any one of the first to fourth aspects of the present invention, wherein the air flow passage portion faces the discharge electrode from the discharge port farthest from the discharge electrode. An air flow path that is largely inclined from a direction orthogonal to the air flow passage portion is provided rather than the connection passage that discharges an air flow containing ions.

  A range narrower than the range in which the ionized gas is estimated to reach due to the Venturi effect because the flow velocity of the ionized gas discharged from a plurality of discharge ports arranged in parallel with the outer shell forming the airflow passage portion differs depending on the discharge ports. The ionized gas can reach only up to. This is because when the airflow is injected, the pressure in the region where the airflow exists decreases (Bernoulli's theorem) and the airflow is pushed back by the atmospheric pressure of the surrounding air. In order to allow the ionized gas to reach the estimated range, in the fifth aspect of the invention, the air flow passes more than the connecting passage that forms the discharge port farthest from the discharge electrode on the surface facing the discharge electrode of the air flow passage. The air flow path is greatly inclined from the direction orthogonal to the section. Thus, by setting the inclination angle so that the ionized gas discharged through the air flow path reaches the range that was initially estimated to reach the ionized gas, It is possible to reliably reach it.

  The static eliminator nozzle according to a sixth aspect of the present invention is the static discharge nozzle according to any one of the first to fifth aspects, wherein the connection passage has a cross-sectional shape that is substantially the same and substantially the same size as the discharge port. It has a predetermined length from the discharge port.

  In the sixth aspect of the invention, since the connecting passage has a cross-sectional shape that is substantially the same as and substantially the same size as the shape of the discharge port, the ionized gas flows in the vicinity of the discharge port in a laminar flow. Thus, eddy currents, turbulences, and the like are less likely to occur near the discharge port, and the ionized gas can reach farther.

  According to the above configuration, as the distance from the discharge electrode increases, the connecting passage connecting the discharge port and the opening is inclined, and the ionized gas that reaches farther from the discharge port can be discharged. Therefore, it is not necessary to lengthen the tube length of the nozzle, the rate at which ions disappear due to ion recombination within the nozzle is reduced, and it becomes possible to reach an ionized gas with a uniform ion residual amount farther. In addition, since the shape of the discharge port is substantially circular, vortex flow, turbulence, and the like hardly occur in the vicinity of the discharge port, and the ionized gas can reach farther.

  Hereinafter, a nozzle for a static eliminator according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view taken along a plane parallel to the direction in which an ionized gas flows, schematically showing the configuration of the static eliminator according to the embodiment of the present invention.

  As shown in FIG. 1, the static eliminator 1 according to the present embodiment includes a chamber in which a discharge electrode 6 is disposed in a main body 3 to which a gas supply pipe 2 that receives supply of compressed gas from a gas supply mechanism (not shown) is connected. And an airflow passage portion 4 extending in the direction in which the ionized gas flows is connected to the chamber of the main body portion 3. A nozzle (static discharge nozzle) 5 that determines the injection direction of the ionized gas is attached to the tip of the airflow passage 4. In the example of FIG. 1, the gas supply pipe 2 is attached at an angle substantially orthogonal to the airflow passage 4 extending from the main body 3, but the gas supply pipe 2 is attached to the airflow passage 4. Can be mounted at any angle.

  The main body 3 includes a high-frequency AC power source 7 that applies a high-frequency voltage and a needle-like discharge electrode 6 that performs corona discharge. The discharge electrode 6 is connected to a high frequency AC power source 7 by a high voltage cable.

  FIG. 2 is a schematic diagram showing the configuration of the high-frequency AC power supply 7 of the static eliminator according to the embodiment of the present invention. The high-frequency AC power source 7 is supplied with a DC voltage from a DC power source circuit 72 that uses a commercial power source 71 as a power source, and an oscillation circuit 73 that outputs a high-frequency AC (for example, 68 kHz), and boosts the output from the oscillation circuit 73 to generate a high-frequency AC power source 7. A step-up transformer 75 that outputs from the output terminal 74 as a high voltage is provided. A piezoelectric element may be used instead of the step-up transformer 75. Further, by connecting the output terminal 74 to the discharge electrode 6, a high-frequency AC high voltage is applied to the discharge electrode 6.

  A counter electrode 8 is disposed on the distal end side of the discharge electrode 6, and an AC high voltage is applied between the discharge electrode 6 and the counter electrode 8 by a high frequency AC power source 7. The high-frequency AC power source 7 is a power source having an AC frequency between 1 kHz and several hundred kHz, and can reduce the rate at which generated ions recombine and disappear, and a step-up transformer 75 provided in the high-frequency AC power source 7 is provided. It can be reduced in size and weight. In addition, it is preferable to form at least one part of the tubular member which forms the gas passage part 4 located between the discharge electrode 6 and the counter electrode 8 with an insulating member, for example, a ceramic. Moreover, about the other part of a tubular member, you may form with an insulator and may form with a conductor.

  The discharge electrode 6 corona discharges by applying an alternating high voltage, and generates positive and negative ions periodically. Ions generated by corona discharge of the discharge electrode 6 are guided into the airflow passage 4 as an ionized gas together with the compressed gas received by the gas supply pipe 2. In the case where the size of the static elimination object is large, in order to reach the ions without disappearing further, conventionally, the air flow passage portion 4 is formed as a long straight pipe portion, so that the ionized gas is induced farther, The ionized gas was jetted in the vicinity of.

  FIG. 3 is a cross-sectional view in a plane parallel to the direction in which the ionized gas flows, schematically showing the configuration of the static eliminator having a different length of the airflow passage portion 4. FIG. 3A is a cross-sectional view taken along a plane parallel to the direction in which the ionized gas flows, schematically showing the configuration of the static eliminator in which the airflow passage 4 is a straight pipe portion approximately equal to the length of the static elimination object. FIG. 3B is a cross-sectional view in a plane parallel to the direction in which the ionized gas flows, schematically showing the configuration of the static eliminator in which the airflow passage portion 4 hardly exists.

  In either case, an airflow passage 4 extending in a direction in which ionized gas flows is connected to a main body 3 to which a gas supply pipe 2 that receives supply of compressed gas from a gas supply mechanism (not shown) is connected. In FIG. 3A, a straight pipe portion 4a substantially equal to the length of the static elimination object is connected as the airflow passage portion 4, and in FIG. 3B, a short straight pipe portion 4b is connected as the airflow passage portion 4, respectively. It is.

  The main body 3 includes a high-frequency AC power source 7 that applies a high-frequency voltage and a needle-like discharge electrode 6 that performs corona discharge. The discharge electrode 6 is connected to a high frequency AC power source 7 by a high voltage cable. A counter electrode 8 is disposed on the distal end side of the discharge electrode 6, and an AC high voltage is applied between the discharge electrode 6 and the counter electrode 8 by a high frequency AC power source 7.

  The discharge electrode 6 corona discharges by applying an alternating high voltage, and generates positive and negative ions periodically. Ions generated by corona discharge of the discharge electrode 6 are guided to the airflow passage 4 as a stream of ionized gas together with the compressed gas received by the gas supply pipe 2. In FIG. 3A, the airflow passage portion 4 is a straight tube portion 4a having a length L, and ionization gas is injected from the tip of the straight tube portion 4a, and the charge removal is performed by a distance D from the tip of the straight tube portion 4a. The CPM (charge plate monitor) that is the object 10 is neutralized. In FIG.3 (b), the airflow passage part 4 is the straight pipe part 4b very short with respect to the length L, ionized gas is injected from the front-end | tip of the straight pipe part 4b, and distance (from a front-end | tip of the straight pipe part 4b ( CPM (charge plate monitor), which is the object 10 to be removed, is separated by L + D).

  The static elimination effects of the two static eliminators were compared under the following conditions. The discharge electrode 6 is supplied with compressed gas by applying 2 kV at a frequency of 70 kHz as an alternating high voltage. The CPM 10 which is a static elimination object was a 150 mm square plate, the CPM 10 was charged to 1 kV, and the time for the absolute value of the charge amount to decay to 0.1 kV was measured. The polarity charged in the CPM 10 is measured by both positive and negative, and the average values are compared. The distance D from the straight pipe portion 4a to the CPM 10 is 50 mm, and the average value is obtained by measuring the static elimination time when the length L of the straight pipe portion 4a is changed to 300 mm, 500 mm, 1000 mm, and 1300 mm.

  In the case of the straight pipe portion 4b, the distance to the CPM 10 is (L + D), and the static elimination time when changing to 350 mm, 550 mm, 1050 mm, and 1350 mm, respectively, is measured to obtain the average value.

  FIG. 4 is a graph showing an average value of the static elimination time corresponding to the length of the straight pipe portion. In FIG. 4, “x” indicates an average value of the static elimination time in the static eliminator of FIG. In addition, rhombus marks, square marks, and triangle marks are plotted for the average value of the static elimination time in the static eliminator of FIG. 3A when the gas flow rate is 30 liters, 60 liters, and 90 liters per minute, respectively. is there. In addition, the gas flow rate by x mark is 30 liters per minute.

  As is clear from the comparison of the static elimination time averages indicated by the X mark and the diamond mark in FIG. 4, when the gas flow rate is the same, the straight pipe part is more suitable when the airflow passage part 4 is the straight pipe part 4 b. The static elimination time is much shorter than in the case of 4a. Therefore, it can be determined that the rate of ion disappearance is smaller when the ionized gas is injected into the air than when the ionized gas is injected from the straight pipe portion 4a, and the charge eliminating effect is high.

  FIG. 5 is a schematic diagram showing an image of static elimination when a static eliminator provided with a straight pipe portion is used. As shown in FIG. 5, when the static elimination object 10 is large in size and needs to be neutralized over a wide range, conventionally, the length of the straight pipe portion 4a is approximately equal to the length of the static elimination object, and is substantially equidistant over the entire area. A plurality of openings 4c, 4c,... Are provided. However, when the straight tube portion 4a is provided as described above, the rate of ion annihilation in the straight tube portion 4a increases, and the amount of ions emitted from the opening 4d located at a position away from the discharge electrode 6 is particularly large. May be reduced.

  Returning to FIG. 4, when the straight pipe portion 4 a is used as the air flow passage portion 4, in order to obtain a charge removal effect equivalent to the case where the air flow passage portion 4 is the straight pipe portion 4 b, the static elimination time average indicated by a triangle mark As is clear from the above, it is necessary to supply a large amount of compressed gas until the gas flow rate becomes 90 liters per minute, which is tripled. For this reason, it is necessary to increase the capacity of the compressor for injecting the compressed gas, and it cannot be denied that the cost is increased. Therefore, when the size of the static elimination object is large, it is more effective to eject the ionized gas into the air at a wide angle using the nozzle than to extend the straight pipe portion as the airflow passage portion 4.

  Therefore, in the embodiment of the present invention, the configuration of the nozzle for the static eliminator is devised so that the straight tube portion of the airflow passage portion 4 is stopped to a minimum length, and the substantially uniform ion amount from each discharge port of the nozzle. This is characterized in that an ionized gas having a gas is injected at a wide angle. FIG. 6 is a schematic diagram showing an image of static elimination when the static eliminator according to the embodiment of the present invention is used.

  When the size of the static elimination object is large, a nozzle 5 that can inject ionized gas at a wide angle without extending the straight pipe portion from the static eliminator 1 is provided. When compressed gas is supplied from the gas supply pipe 2 in the direction of arrow 11, ionized gas is injected from the nozzle 5 at a wide angle as indicated by arrow 12. It is preferable that the ionization gas injection angle at the nozzle 5 is an angle at which the ionization gas can reach the position farthest from the position closest to the nozzle 5 of the static elimination object 10.

  FIG. 7 is a perspective view of the nozzle 5 according to the embodiment of the present invention, and FIG. 8 is a cross-sectional view and a front view of the nozzle 5 according to the embodiment of the present invention. FIG. 8A is a cross-sectional view of the nozzle 5 according to the embodiment of the present invention in a plane substantially parallel to the direction in which the ionized gas flows, and FIG. 8B according to the embodiment of the present invention. It is the front view seen from the discharge outlet side which discharges the ionized gas of the nozzle 5 outside.

  As shown in FIGS. 7 and 8 (b), the nozzle 5 according to the present embodiment is arranged in a line in one direction on the outer surface of the outer shell, that is, in the direction in which the airflow passage portion 4 extends. Discharge ports 65, 62, 63, 63, ..., 64 are provided. The mounting portion 51 has a thread formed on the inner surface, and can be screwed to the airflow passage portion 4 of the static eliminator 1.

As shown in FIG. 8 (a), openings 55, 52, 53, 53,..., 54 are formed in a line on the inner surface of the outer shell of the nozzle 5, and connection passages 45, 42, .., And the air flow path 44 are formed toward the outer surface of the outer shell of the nozzle 5 to form discharge ports 65, 62, 63, 63,. The connecting passage 42 is formed in a direction orthogonal to the central axis 50 of the nozzle 5, and the opening 55 and the discharge port 65 have substantially the same circular shape.

  The other connecting passages 43, 43,... Are formed so that the inclination increases from the direction orthogonal to the central axis 50 as the distance from the discharge electrode 6, that is, the distance from the direction in which the ionized gas is supplied increases. Yes. Since the inclination increases from the direction orthogonal to the central axis 50, the degree of changing the direction in which the supplied ionized gas is ejected is reduced, and the ionized gas can be discharged to the outside with less air resistance. Therefore, it is possible to reach an ionized gas having a high ion residual rate farther without increasing the tube length of the nozzle 5 while reducing the rate of disappearance due to recombination of ions. In the example of FIG. 8A, the inclination angle of the connection passages 43, 43,... Increases in steps of 15 degrees as the distance from the discharge electrode 6 increases. The degree of increase in the tilt angle is not particularly limited to this.

  Further, the shape of the openings 53, 53,... Is an ellipse having a long side that increases with distance from the opening 52, but the shape of the discharge ports 63, 63,. The discharge ports 63, 63,... Are formed on the surfaces orthogonal to the central axis of the connecting passages 43, 43,. By making the shape of the discharge ports 63, 63,... Substantially circular, eddy currents, turbulence, etc. are unlikely to occur in the vicinity of the discharge ports 63, 63,. It becomes possible.

  In addition, the length of the connecting passages 43, 43,... Becomes longer as the openings 53, 53,. As a result, the longer the discharge port 63 away from the discharge electrode 6, the ionized gas must be discharged toward the portion of the static elimination object 10 located farther from the nozzle 5, and the longer the connecting passage 53 becomes. Since it can ensure, ionized gas with strong directivity can be discharged with respect to the static elimination object 10. FIG.

  Further, the connecting passages 43, 43,... Have a substantially circular cross-sectional shape that is the same and the same size as the discharge ports 63, 63,. Have a length of As a result, the ionized gas flow easily forms a laminar flow in the vicinity of the discharge ports 63, 63,... The straightness of the ionized gas discharged can be improved. Therefore, the rate at which ions disappear due to ion collision, recombination, and the like can be reduced, and the ionized gas can reach farther.

  Further, of the connecting passages 43, 43,... Corresponding to the openings 53, 53,... Away from the discharge electrode 6 than the inclination angle of the central axis of the connecting passages 43, 43,. The connecting passages 43, 43,... Are formed so that the inclination angle of the outer surface of the outer shell forming the adjacent connecting passages 43, 43,. FIG. 9 is a partially enlarged cross-sectional view showing the configuration of adjacent connecting passages 43, 43,...

  9 (a) shows that the inclination angle of the outer surface of the outer shell forming the adjacent connection passages 43, 43,... Is the inclination angle of the center line of the connection passage 43, 43,. FIG. 9B is a partial enlarged cross-sectional view in the case where they are the same, and FIG. 9B is a diagram in which the inclination angle of the outer surface of the outer shell forming the adjacent connecting passages 43, 43,. It is a partial expanded sectional view in the case of being larger than the inclination angle of the center line of the connecting passages 43, 43,.

  In FIG. 9A, the inclination angle of the outer surface 80 of the outer shell that forms the connection passage 43b adjacent to the connection passage 43a and further away from the discharge electrode 6 than the connection passage 43a is the inclination angle of the center line of the connection passage 43a. Is the same. In this case, the ionized gas discharged from the discharge port 63a is interfered by a turbulent flow or the like generated along the outer surface 80 of the adjacent outer shell, and there is a risk of promoting the disappearance of ions due to recombination of ions.

  In FIG. 9B, the inclination angle of the outer surface 81 of the outer shell forming the connection passage 43b adjacent to the connection passage 43a and further away from the discharge electrode 6 than the connection passage 43a is the inclination angle of the center line of the connection passage 43a. Bigger than. In this case, the ionized gas discharged from the discharge port 63a is less likely to cause turbulence or the like due to the outer surface 81 of the adjacent outer shell, and can suppress the disappearance of ions due to recombination of ions.

  In addition, the air flow path 44 that is greatly inclined from the direction orthogonal to the air flow passage 4 than the connection passage 43 that forms the discharge port 63 farthest from the discharge electrode 6 on the surface of the air flow passage 4 that faces the discharge electrode 6. May be provided. By adding an ionized gas flow (secondary flow) discharged from the air flow path 44 to an ionized gas flow (mainstream) discharged from the discharge port 63 located farthest from the discharge electrode 6, a venturi is obtained. It is possible to suppress the change in the direction of the air flow of the ionized gas discharged due to the effect, and by forming a highly directional air flow, the ionized gas can surely reach a large static elimination object. it can.

  FIG. 10 is a schematic diagram showing the direction in which the ionized gas ejected from the nozzle 5 according to the present embodiment flows. The connecting passage 42 formed in a direction orthogonal to the central axis 50 (FIG. 8) of the nozzle 5 preferably has the largest discharge port 62 (opening 52). This is because dynamic pressure is unlikely to occur in the direction orthogonal to the central axis 50 of the nozzle 5, and a certain amount of opening area is required to discharge the ionized gas to the outside. Accordingly, the ionized gas flow 91 has the maximum flow velocity.

  Adjacent airflows are attracted to airflows with higher flow rates by the so-called Venturi effect. This is because the air flow having a higher flow velocity attracts adjacent air flows because the pressure in the area where the air flow exists decreases (Bernoulli's theorem) and the pressure of the surrounding air increases.

  Therefore, at the discharge ports 63, 63,... Disposed at a position farther from the discharge port 62, the ionized gas air flow 92, 92,. The ionized gas air flow 92 ejected at an inclination angle that reaches the position P farthest from the discharge electrode 6 side of the large static elimination object 10 cannot reach the position P. Therefore, the air flow path 44 that is largely inclined from the direction orthogonal to the air flow passage 4 rather than the connecting passage 43 that forms the discharge port 63 farthest from the discharge electrode 6 on the surface of the air flow passage 4 facing the discharge electrode 6. With this, the ionized gas air flow 93 ejected from the discharge port 64 can be attracted to the other air flow 92 and reach the position P, and it is possible to perform static elimination without reducing the static elimination efficiency. Become.

  Similarly to the function of the air flow path 44 described above, a discharge port 65 (opening 55) may be provided on the discharge electrode 6 side of the connection passage 52 formed in a direction orthogonal to the central axis 50 of the nozzle 5. good. Due to the venturi effect, at the discharge port 65 disposed on the discharge electrode 6 side with respect to the discharge port 62, the air flow 94 of the ionized gas ejected is drawn toward the air flow 91 side, and as a result, the straightness of the air flow 91 is maintained. By doing so, it is possible to adjust so as to reach the position Q that is closest to the discharge electrode 6 side of the large static elimination object 10, and it is possible to eliminate static electricity without reducing the static elimination efficiency.

  As described above, according to the present embodiment, as the distance from the discharge electrode increases, the connecting passage connecting the discharge port and the opening is inclined, and the ionized gas that reaches farther from the discharge port can be discharged. . Therefore, it is not necessary to lengthen the tube length of the nozzle, the rate at which ions disappear due to ion recombination within the nozzle is reduced, and it becomes possible to reach an ionized gas with a uniform ion residual amount farther. In addition, since the shape of the discharge port is substantially circular, vortex flow, turbulence, etc. are unlikely to occur in the vicinity of the discharge port, allowing ionized gas to reach farther. It is possible to maintain the static elimination effect.

  It should be noted that the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications and replacements are possible within the scope of the gist of the present invention. For example, in the above-described embodiment, the discharge ports on the nozzles are arranged in a row, but the ionized gas may be ejected more evenly in a plurality of rows.

It is sectional drawing in the surface parallel to the direction where the ionization gas flows which show typically the structure of the static elimination apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows the structure of the high frequency alternating current power supply of the static eliminator which concerns on embodiment of this invention. It is sectional drawing in the surface parallel to the direction through which ionized gas flows which show typically the structure of the static elimination device from which the length of an airflow passage part differs. It is a graph which shows the average value of the static elimination time corresponding to the length of a straight pipe part. It is a schematic diagram which shows the static elimination image in the case of using the static eliminator provided with the straight pipe part. It is a schematic diagram which shows the static elimination image in the case of using the static eliminator which concerns on embodiment of this invention. It is a perspective view of a nozzle concerning an embodiment of the invention. It is sectional drawing and the front view of the nozzle which concern on embodiment of this invention. It is a partial expanded sectional view which shows the structure of an adjacent connection channel | path. It is a schematic diagram which shows the direction through which the ionized gas injected from the nozzle which concerns on this Embodiment flows.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Static elimination device 2 Gas supply pipe 4 Airflow passage part 5 Nozzle (Nozzle for static elimination device)
6 Discharge electrode 7 High frequency AC power supply 8 Counter electrode 10 Object to be removed (CPM)
42, 43, 45 Connecting passage 44 Air passage 52, 53, 54, 55 Opening 62, 63, 64, 65 Outlet 80, 81 Outer surface of outer shell

Claims (6)

In the nozzle for the static eliminator that discharges the ions released from the discharge electrode together with the air flow by the application of the high frequency voltage,
A plurality of openings are juxtaposed on the inner surface of the outer shell forming an airflow passage extending in the direction in which the airflow flows,
The longer (shorter) the opening from the discharge electrode, the larger (smaller) the connecting passage that connects the discharge port that discharges an airflow containing ions to the outside and the opening is perpendicular to the airflow passage. ) Inclined,
A static eliminator nozzle, wherein the discharge port has a substantially circular shape.   The neutralizing nozzle according to claim 1, wherein the connection path is longer (shorter) as the opening is longer (shorter) from the discharge electrode.   The inclination angle of the outer surface of the outer shell that forms the connection passage of the other discharge port that is adjacent to the one discharge port and that corresponds to the opening having a long distance from the discharge electrode is the center line of the one discharge port. 3. The static eliminator nozzle according to claim 1, wherein the static eliminator nozzle is larger than an inclination angle.   The discharge nozzle according to any one of claims 1 to 3, wherein the plurality of discharge ports are arranged linearly along the axis of the airflow passage portion.   An airflow that is greatly inclined from a direction orthogonal to the airflow passage portion to the surface of the airflow passage portion that faces the discharge electrode, rather than the connecting passage that discharges airflow containing ions from an outlet that is farthest from the discharge electrode. The nozzle for static eliminators according to claim 1, further comprising a path.   6. The connecting passage according to claim 1, wherein the connecting passage has a predetermined length from the discharge port having a cross-sectional shape that is substantially the same as and substantially the same as the shape of the discharge port. The nozzle for static eliminators described in the paragraph.

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