JP2007048539A - Ionized gas flow control device of static electricity removing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ionized gas flow control device of a static electricity removing device used for an ionized gas discharge type static electricity removing device. <P>SOLUTION: On the static electricity removing device removing the static electricity by discharging ionized gas flow on an electrified substance, an ion discharging slit 53 or a plurality of air discharging ports 54 is formed at a position surrounding an ion discharging port 3. Compressed air 38 as a guide flow is made to discharge from the ion discharging slit 53 or a plurality of air discharging ports 54 in a manner of surrounding ionized air 19 by supplying the compressed air 38 to the ion discharging slit 53 or a plurality of air discharging ports 54, aside from the ionized air 19. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to an ionized airflow control device, and in particular, is used in an ionized air ejection type electrostatic removal device that removes static electricity on a substrate surface of a semiconductor, liquid crystal, and organic EL in a manufacturing process of a semiconductor, liquid crystal, and organic EL. The present invention relates to an ionized airflow control device in an electrostatic removal device.

Conventionally, in semiconductor and liquid crystal manufacturing processes, static charges are charged on the cost of the substrate in processing and handling processes of semiconductor substrates, liquid crystal substrates, and organic EL substrates, and the semiconductor, liquid crystal, and organic EL circuits are damaged by the static electricity. Has occurred frequently.

As a countermeasure against the trouble, in a semiconductor, liquid crystal, and organic EL manufacturing apparatus, an electrostatic removal apparatus for removing static electricity is installed on the substrate surface. As the electrostatic removal device, a soft X-ray electrostatic removal device that ionizes air by irradiating soft X-rays onto the air and an electric electrostatic removal device that ionizes air at a high voltage are put into practical use. Yes.

The soft X-ray type electrostatic eliminator used for practical use will be described with reference to FIGS. FIG. 7 is a perspective view of a soft X-ray static eliminator conventionally used for practical use, and FIG. 8 is a longitudinal sectional view of the main part. A soft X-ray electrostatic elimination device 1 that has been put to practical use in the past is formed by connecting and fixing an ionization vessel 4 having an ion outlet 3 at the center on the downstream side of a soft X-ray transmission device 2. .

In the soft X-ray transmission device 2, a soft X-ray transmission tube 6 is attached to the wall surface 5 on the side where the ionization container 4 is connected and fixed, and soft X-ray radiation is provided downstream of the soft X-ray transmission tube 6. A window 7 is opened. In the figure, 8 is a power source for supplying power to the soft X-ray transmission tube 6 via a cable 9.

The ionization container 4 includes an ionization chamber 11 for introducing soft X-rays 10 transmitted from the soft X-ray transmitter tube 6 in the soft X-ray transmitter 2 from the soft X-ray emission window 7, and A downstream side of an air supply pipe 13 that supplies compressed air 12 from the outside into the ionization chamber 11 communicates with the ionization chamber 11 by opening an air supply port 14, and further, a downstream side of the ion ejection port 3 is soft. A soft X-ray shielding core 15 is disposed so as to prevent the X-ray 10 from going straight and prevent the soft X-ray 10 from leaking from the ion ejection port 3.

As shown in FIG. 8, the soft X-ray shielding core 15 includes a blocking portion 16 formed in a spherical shape that blocks the straight traveling property of the soft X-ray 10 to the ion ejection port 3. A small diameter portion 17 having a diameter smaller than that of the ion ejection port 3 is provided on the downstream side, and an annular ventilation portion 18 is formed between the small diameter portion 17 and the inner peripheral surface portion of the ion ejection port 3. Note that the soft X-ray shielding core 15 is not limited to the form shown in FIG. 8, for example, as described in Japanese Patent Application No. 2005-93509 relating to the application of the present patent applicant. Forms can also be used.

The operation of the soft X-ray transmitter 2 shown in FIGS. 7 and 8 will be described. The soft X-ray 10 is transmitted from the soft X-ray transmitter tube 6 and the soft X-ray 10 is introduced into the ionization chamber 11 of the ionization vessel 4 through the soft X-ray emission window 7 and air is introduced into the ionization chamber 11. When compressed air 12 is supplied from an air supply port 14 via a supply pipe 13, the compressed air 12 is ionized by contacting with the soft X-ray 10 in the ionization chamber 11 or in the vicinity of the ion ejection port 3. The soft X-ray shielding core 15 prevents ionization of the soft X-ray 10 that is dangerous to the human body, and only the ionized air 19 passes through the ventilation portion 18 from the ion ejection port 3. In the state as shown in FIG. 8, it is ejected as an ionized air stream 20 and sprayed on a charged object to remove static electricity.

Further, an electric static eliminator conventionally used in practice will be described with reference to FIGS. FIG. 9 is a schematic perspective view of a main part of an electric static eliminator that has been put to practical use in the past, and FIG. 10 is a longitudinal sectional view of the main part.

An electric electrostatic removing device 31 that has been put to practical use in the past is provided with an electrode support 34 in an ionization chamber 33 of an ionization vessel 32, a discharge electrode 35 on the downstream side of the electrode support 34, and An ion outlet 37 is provided on the wall surface 36 facing the discharge electrode 35, while the downstream side of the air supply pipe 39 that supplies compressed air 38 from the outside into the ionization chamber 33 has an air supply port 40 into the ionization chamber 33. Open and communicated. In the figure, reference numeral 41 denotes a high-voltage power supply that supplies power via a cable 42, and 42a denotes a ground.

The operation of the electric electrostatic removing device 31 shown in FIGS. 9 and 10 will be described. When a high-voltage current is applied to the discharge electrode 35 to discharge from the sharp tip 35a of the discharge electrode 35 and the compressed air 38 is supplied into the ionization chamber 33 through the air supply pipe 39, the compressed air 38 Is ionized in the ionization chamber 33 or in the vicinity of the ion outlet 37 to become ionized air 43, and the ionized air flow 44 is ejected from the ion outlet 37 in the state shown in FIG. Spray on to remove static electricity.

Further, when the past patent document is searched retrospectively with respect to the static eliminator, the soft X-ray static eliminator disclosed in Patent Document 1 is known, and the electric static eliminator About this, what was disclosed by patent document 2 is well-known.

Japanese Patent No. 2749202 JP 2001-15293 A

According to the soft X-ray electrostatic removal device 1, as shown in FIG. 8, when the ionized air flow 20 is ejected from the ion ejection port 3, outside the ionized air flow 20, the external retained air 21 There was a problem that turbulent flow 22 occurred in the meantime and it was difficult to fly the entire ionized air flow 20 far. In addition, the turbulent flow 22 accelerates the attenuation of the ion density of the ionized air flow 20, resulting in a problem that the electrostatic removal performance is deteriorated. Furthermore, there is a problem that a sound wave 23 is generated due to the turbulent flow separation at the ion ejection port 3 and becomes a noise source.

Then, according to the electrical electrostatic removal device 31, as in the soft X-ray electrostatic removal device 1, as shown in FIG. 10, when the ionized air flow 44 is ejected from the ion ejection port 37, On the outside of the ionized air flow 44, a turbulent flow 46 is generated between the ionized air flow 44 and the external staying air 45, and it is difficult to fly the entire ionized air flow 44 far. In addition, the turbulent flow 46 accelerates the attenuation of the ion density of the ionized air flow 44, leading to a decrease in electrostatic removal performance. Furthermore, there is a problem that a sound wave 47 is generated due to the turbulent flow separation at the ion ejection port 37 and becomes a noise source.

Further, in the soft X-ray static eliminator and the electric static eliminator disclosed in Patent Documents 1 and 2, as in the static eliminator as shown in FIGS. There is a problem that it is difficult to fly the entire air flow far away, the attenuation of ion density is accelerated by turbulent flow, leading to a decrease in electrostatic removal performance, and further, sound waves are generated and become a noise source.

The present invention has been made to solve the above-mentioned problems. An air ejection slit or a plurality of air ejection ports are provided at a position surrounding the ion ejection port, and compressed air separates from the ionized air. The ionized air is ejected from the slit or a plurality of air outlets in the form of surrounding the ionized air and ejected to the outside. The turbulent flow that occurs between the air is less likely to occur, the ionized air flow does not attenuate the ion density, reaches far, and the guide flow suppresses the diffusion of sound waves generated by the separation of the air flow at the ion outlet, It is an object of the present invention to provide an ionized airflow control device in an electrostatic removal device that also has a silencing effect.

The present invention feeds compressed air to an ionization vessel, the compressed air is ionized in the ionization vessel or in the vicinity of the ionization outlet, and the ionized air is ejected from the ion outlet as an ionized air flow. In an electrostatic eliminator that discharges static electricity by blowing an air flow onto a charged object, an air ejection slit or a plurality of air ejection openings are opened at a position surrounding the ion ejection opening, and the air ejection slit or the plurality Adopting means for supplying compressed air separately from the ionized air to the individual air jets and ejecting the compressed air as a guide flow in a form surrounding the ionized air from the air jet slits or the plurality of air jets Thus, the above-mentioned problem has been solved.

An air ejection slit or a plurality of air ejection openings are provided at a position surrounding the ion ejection outlet, and compressed air separately from the ionized air surrounds the ionized air from the air ejection slit or the plurality of air ejection openings. As a guide flow, the jet flow is ejected to the outside, and the reach of ionized air can be adjusted by adjusting the flow velocity of the guide flow. In particular, by making the flow velocity of the guide flow substantially the same as that of the ionized air flow, turbulence generated between the externally retained air of the ionized air is less likely to occur, and the ionized air flow has no attenuation of ion density, It reaches far away. Further, the direction and spread of the ionized air flow can be controlled by the direction and spread angle of the guide flow. Furthermore, the ion diffusion can be weakened to prolong the life of the ions and suppress the attenuation of the static elimination performance. Furthermore, the guide flow that forms the weight air has a silencing effect because it can suppress the diffusion of sound waves generated by the separation of the air flow at the ion ejection port.

An ionized airflow control device when a soft X-ray electrostatic removal device is used as the electrostatic removal device will be described as a first embodiment. FIG. 1 is a perspective view of a main part of the soft X-ray electrostatic removal device of Example 1, FIG. 2 is a perspective view of the main part showing another embodiment, and FIG. 3 is a perspective view of FIG. 1 (FIG. 2). It is a longitudinal cross-sectional view of the principal part. In the first embodiment, the same reference numerals are used for the reference numerals that are common to the soft X-ray static eliminator used in the prior art shown in FIGS.

The soft X-ray static eliminator 51 provided with the ion control device in the first embodiment uses the soft X-ray static eliminator 1 that has been provided for practical use as shown in FIGS. That is, an air jet as shown in FIG. 1 is formed on the downstream side wall surface 52 which is a position surrounding the ion jet port 3 of the ionization container 4 constituting the soft X-ray electrostatic removal device 1 that has been put to practical use. A slit 53 is provided around the opening, or a plurality of air ejection ports 54 as shown in FIG. 2 are opened.

As shown in FIGS. 1 to 3, the soft X-ray electrostatic removal device 51 includes an air supply pipe 13 that supplies compressed air 12 in the soft X-ray electrostatic removal device 1 that has been practically used. On the downstream side, a branch pipe 55 is connected, and the downstream side of the branch pipe 55 is connected to communicate with an air ejection slit 53 (FIG. 1) or a plurality of air ejection ports 54 (FIG. 2). It is fixed. And since it is the same as that of the soft X-ray-type electrostatic removal apparatus 1 that has been put to practical use in the other respects, the description of the structure and operation of the same parts will be omitted.

An ion control apparatus in the soft X-ray electrostatic removal apparatus of Example 1 having the above-described configuration will be described. The soft X-ray 10 introduced into the ionization chamber 11 comes into contact with the compressed air 12 supplied from the air supply port 14 via the air supply pipe 13, and in the ionization chamber 11 or in the vicinity of the ion ejection port 3, It is ionized to become ionized air 19 and is ejected from the ion outlet 3 as an ionized air flow 20 in the state shown in FIG.

At the same time that the ionized air flow 20 is ejected from the ion ejection port 3, the compressed air 12 of the air supply pipe 13 is passed through the branch pipe 55 to the air ejection slit 53 or the plurality of air ejection ports 54. When air is supplied, the compressed air 12 is ejected as a guide flow 56 so as to surround the ionized air flow 20 from the outer peripheral surface.

When the flow velocity of the guide flow 56 is made almost the same as that of the ionized air flow 20, the turbulent flow 46 generated between the ionized air flow 20 and the external staying air 45 is hardly generated, and the ionized air flow 20 There is no attenuation of ion density and it reaches far. That is, the reach distance of the ionized air 19 can be adjusted by adjusting the flow rate of the guide flow 56. Further, the direction and spread of the ionized air flow 20 can be controlled by the direction and spread angle of the guide flow 56. Furthermore, the generation of turbulent flow between the ionized air 19 and the surrounding air can be prevented, the ion diffusion can be weakened, the life of the ions can be lengthened, and attenuation of the charge removal performance can be suppressed. Furthermore, the guide flow 56 has a silencing effect because it can suppress the diffusion of the sound wave 47 generated by the separation of the air flow at the ion ejection port 3.

An ionized airflow control device in the case where an electric electrostatic removal device is used as the electrostatic removal device will be described as a second embodiment. 4 is a perspective view of a main part of the electrical electrostatic eliminator of Example 2, FIG. 5 is a perspective view of the main part showing another embodiment, and FIG. 6 is a main part of FIG. 4 (FIG. 5). FIG. In the second embodiment, the same reference numerals are used for the same reference numerals as those of the electric static eliminator that is shown in FIGS.

The electric static eliminator 71 provided with the ion control device of the present invention in the second embodiment uses the electric static eliminator 31 that has been provided for practical use as shown in FIGS. That is, an air ejection slit 73 as shown in FIG. 4 is formed in the downstream side wall surface 72 which is a position surrounding the ion ejection port 37 of the ionization container 32 constituting the electric electrostatic removing device 31 which has been conventionally put into practical use. Or a plurality of air outlets 74 as shown in FIG. 5 are formed.

As shown in FIGS. 4 to 6, the electric electrostatic removing device 71 has a downstream side of an air supply pipe 39 that supplies compressed air 38 in an electric electrostatic removing device 31 that has been practically used. A branch pipe 75 is connected, and the downstream side of the branch pipe 75 is connected and fixed so as to communicate with the air ejection slit 73 (FIG. 4) or a plurality of air ejection ports 74 (FIG. 5). . And since it is the same as that of the electric electrostatic removal apparatus 31 that has been provided for practical use in the other respects, the description of the structure and operation of the same parts will be omitted.

An ion controller in the electric electrostatic eliminator of Example 2 having the above-described configuration will be described. In the ionization chamber 33, ions generated by discharging from the tip 35 a of the discharge electrode 35 come into contact with the compressed air 38 supplied from the air supply port 40 through the air supply pipe 39, and the ionization chamber 33 or In the vicinity of the ion outlet 37, it is ionized to become ionized air 43, and it is ejected from the ion outlet 37 as an ionized air flow 44 in the state shown in FIG. 6.

At the same time as the ionized air flow 44 is ejected from the ion ejection port 37, the compressed air 38 of the air supply pipe 39 is passed through the branch pipe 75 to the air ejection slit 73 or a plurality of air ejection ports 74. When the air is supplied, the compressed air 38 is ejected as a guide flow 76 so as to surround the ionized air flow 44 from the outer peripheral surface.

When the flow velocity of the guide flow 76 is made substantially the same as that of the ionized air flow 44, the turbulent flow 46 generated between the ionized air flow 44 and the external stagnant air 45 is hardly generated, and the ionized air flow 44 is extremely There is no attenuation of ion density and it reaches far. That is, the reach distance of the ionized air 43 can be adjusted by adjusting the flow velocity of the guide flow 76. Further, the direction and spread of the ionized air flow 44 can be controlled by the direction and spread angle of the guide flow 76. Furthermore, the generation of turbulent flow between the ionized air 43 and the surrounding air can be prevented, the ion diffusion can be weakened, the life of the ions can be lengthened, and the neutralization performance can be prevented from being attenuated. Furthermore, the guide flow 76 has a silencing effect because it can suppress the diffusion of the sound wave 47 generated by the separation of the air flow at the ion ejection port 37.

It is a perspective view of the principal part of the soft X ray type electrostatic removal apparatus in Example 1 of this invention. It is a perspective view of the principal part which shows the other form of the soft X ray type electrostatic removal apparatus in Example 1 of this invention. It is a longitudinal cross-sectional view of the principal part of FIG. 1 (FIG. 2). It is a perspective view of the principal part of the electrical electrostatic removal apparatus in Example 2 of this invention. It is a perspective view of the principal part which shows the other form of the electric electrostatic removal apparatus in Example 2 of this invention. It is a longitudinal cross-sectional view of the principal part of FIG. 4 (FIG. 5). It is a general | schematic perspective view of the soft X-ray-type electrostatic removal apparatus conventionally provided for practical use. It is a longitudinal cross-sectional view of the principal part. It is a schematic perspective view of the electric electrostatic removal apparatus conventionally used for practical use. It is a longitudinal cross-sectional view of the principal part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 Soft X-ray transmitter 3 Ion outlet 4 Ionization container 10 Soft X-ray 11 Ionization chamber 12 Compressed air 13 Air supply pipe 19 Ionized air 20 Ionized air flow 32 Ionization container 33 Ionization chamber 35 Discharge electrode 37 Ion outlet 38 Compressed air 43 Ionized air 44 Ionized air flow 51 Soft X-ray electrostatic removal device 53 Air ejection slit 54 Air ejection port 55 Branch pipe 56 Guide flow 71 Electric electrostatic removal device 73 Air ejection slit 74 Air ejection port 75 Branching pipe 76 Guide style

Claims (1)

Compressed air is supplied to the ionization vessel, the compressed air is ionized in the ionization vessel or in the vicinity of the ionization outlet, and the ionized air is ejected from the ion outlet as an ionized air flow to charge the ionized air flow. In the static eliminator for discharging static electricity by spraying on the object, an air ejection slit or a plurality of air ejection openings are opened at a position surrounding the ion ejection opening, and the air ejection slit or the plurality of air ejections are provided. Compressed air is supplied to the outlet separately from the ionized air, and the compressed air is ejected as a guide flow in a form surrounding the ionized air from the air ejection slit or a plurality of air ejection ports. An ionized airflow control device in an electric removal device.

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