JP2010111949A - Thin-film forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin-film forming apparatus which is used in a thin-film forming method for forming a titanium nitride thin film on the surface of a substance heated by supplying a raw material gas obtained by vaporizing an organic titanium compound and an added gas reactive therewith and by a chemical vapor deposition technique and which is used in the thin-film forming method by the chemical vapor deposition technique capable of obtaining a practical film-forming speed and good coatability in a case when the temperature of a substrate (for example, a semiconductor base plate such as a CMOS substrate) is set at a low-temperature region of 150-230°C being an upper temperature limit of various functional materials. <P>SOLUTION: In the thin-film forming apparatus, the substrate is heated to a temperature range of 150 to 230°C, and a partial pressure P<SB>addedgas</SB>of an added gas and a partial pressure P<SB>organometallicgas</SB>of a raw material gas prepared by evaporating the organic titanium compound are set in a range of 10≤P<SB>addedgas</SB>/P<SB>organometallicgas</SB>. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  In the present invention, a titanium nitride thin film is formed on a substrate heated to a low temperature region of 150 ° C. to 230 ° C. by a chemical vapor deposition method (hereinafter sometimes referred to as “CVD method” in this specification), or The present invention relates to a thin film forming apparatus used in a thin film forming method in which a thin film different from titanium nitride is laminated on a titanium nitride thin film or a titanium nitride thin film is laminated on a thin film different from titanium nitride.

  In recent years, functional organic materials have undergone remarkable development, and have been actively introduced into the field of optoelectronics by utilizing their flexible processability and excellent economic efficiency. One such technique is a micromachined optical switching device with a micron or even smaller sub-micron microstructure.

  Japanese Patent Laid-Open No. 2003-136499 discloses a method for manufacturing a switching device that can control light on and off and that can operate at high speed. However, in the manufacturing process of these optical switching devices, microfabrication in units of μm is required. Semiconductor process technology is usually used. In addition, a process of forming a structure made of resin instead of metal or in addition to metal on a semiconductor substrate such as a CMOS substrate has been adopted.

  Specifically, in the case of a method for manufacturing an optical switching device, a photolithography technique, a chemical vapor deposition method, and a film forming technique such as sputtering or spin coating are used to divide the structure into a plurality of structural layers constituting the device. By forming the sacrificial layer with a plurality of structural layers (the sacrificial layer is finally removed by etching), for example, a space or the like for driving the actuator is created on the semiconductor substrate. In this case, a resin-based material such as polyimide may be used for the structural layer constituting the device.

  In these devices, a process of forming a film with good coverage on a fine uneven surface on the order of nanometers to micrometers is often required.

  As a method for realizing good coverage, a thermal CVD method is known. This thermal CVD method is a method of attaching a film to a target surface by heating a substrate (base) on which a film is formed and thermally decomposing a predetermined source gas.

  However, in this thermal CVD method, it is essential to raise the substrate temperature, and a material having a problem with heat resistance is incorporated in the substrate (base) or a structure with a problem with heat resistance (thermal expansion coefficient is low). In the case of a material in which different materials are laminated, a problem occurs by heating the substrate (base).

  Therefore, functional organic materials and magnetic materials used as materials for substrates (substrates) or materials formed in semiconductor devices, various electronic components, various sensors, MEMS (Micro Electro Mechanical System), etc. Although it has undergone remarkably diverse development, it cannot be used in the temperature range of 300 ° C to 500 ° C, which is usually used in the manufacturing process of semiconductors based on silicon, etc., because it exceeds the heat resistance temperature. It becomes.

  The problem of heat resistance is serious not only for functional organic materials but also for functional materials using magnetism such as plastic magnets. Specifically, in the case of a ferrite magnet, heating at 220 ° C. is the limit even if it has heat resistance. In the case of a samarium / cobalt magnet, the temperature rise up to 150 ° C. is usually the limit, but it can be heated to about 200 ° C. by imparting heat resistance.

  As described above, even in the manufacture of magnetic devices and magnetic MEMS incorporating various magnetic materials, the heat-resistant temperature is exceeded, so that film formation by chemical vapor deposition cannot be used.

  The present applicant has continued to intensively study a titanium nitride film forming technique by a chemical vapor deposition method using an organic titanium compound such as tetrakisdialkylaminotitanium (TDAAT) mainly for a mass production technique of a semiconductor device. -328246 proposed a film-forming condition that provides an extremely good coverage for a contact hole with an aspect ratio of 6 or more by appropriately determining the partial pressure ratio of tetrakisdialkylaminotitanium (TDAAT) and the additive gas ammonia gas. .

  The titanium nitride thin film is used as a layer (barrier film) for preventing diffusion of copper as a wiring material, for example, in a semiconductor wiring manufacturing process. In JP-A No. 2003-136499 relating to the above micromachine, it is used as a thin film that prevents peeling and improves adhesion. Thus, in the formation of a titanium nitride thin film used for various purposes, for example, when it is required to form a thin film on a fine uneven surface of the order of nanometers to micrometers such as semiconductors and micromachines, the coverage (coverage) is Chemical vapor deposition is often adopted because of its good quality.

JP 2003-136499 A JP 2000-328246 A

  However, the titanium nitride film formation method by CVD disclosed in JP-A-2000-328246 is intended for the semiconductor industry, particularly DRAMs that require mass productivity, and when the substrate temperature is 280 ° C. or lower. There is a problem that the film forming speed is not sufficient. Furthermore, when the substrate temperature is set to a low temperature range of 150 ° C. to 230 ° C., the amount of impurities such as carbon in the titanium nitride film increases, so that the film quality is not good and the coverage is not good. When it is sufficient and terrible, there is also a problem that the film does not become a solid but has a viscous liquid attached thereto.

  On the other hand, as described in Japanese Patent Application Laid-Open No. 2003-136499, a polymer material has entered a semiconductor substrate as a constituent element such as MEMS. There is a new demand for technology development that incorporates

  In the present invention, when the temperature of the substrate (for example, a semiconductor substrate such as a CMOS substrate) is set to a low temperature region of 150 ° C. to 230 ° C. which is the heat resistant temperature of various functional materials, a practical film formation rate can be obtained. An object of the present invention is to propose a thin film forming apparatus for use in a method of forming a titanium nitride thin film by chemical vapor deposition with sufficient coverage and good film quality. In addition, when a thin film other than titanium nitride is formed and laminated by a chemical vapor deposition method on a substrate on which a titanium nitride thin film is formed, or on a substrate on which a thin film other than titanium nitride is formed by a chemical vapor deposition method, An object of the present invention is to propose a thin film forming apparatus used for a thin film forming method by a chemical vapor deposition method that enables industrial production efficiency when a titanium nitride thin film is formed and laminated.

The inventors of the present invention supply a raw material gas obtained by vaporizing an organotitanium compound and an additive gas that reacts with the gas into a reaction vessel, and form a titanium nitride thin film on the surface of a heated substrate by chemical vapor deposition. In the manufacturing method, when the temperature of the heated substrate is set to a low temperature range of 150 ° C. to 230 ° C., which is the heat resistant temperature of various functional materials, the partial pressure P _{added gas} of the additive gas in the reaction vessel and the organic titanium compound are It has been found that the above problem can be solved by determining the relationship between the vaporized source gas partial pressure P and _{organometallic gas} within an appropriate range, and further, the coverage (coverage) characteristic of the chemical vapor deposition method has been found. The goodness was confirmed.

That is, the thin film forming method proposed by the inventors of the present invention is a method in which a source gas obtained by vaporizing an organotitanium compound and an additive gas that reacts with the gas are supplied into a reaction vessel and heated by chemical vapor deposition. In the thin film forming method for producing a titanium nitride thin film on the surface of the substrate, the substrate is heated to a temperature range of 150 ° C. to 230 ° C., and the partial pressure of the _{added gas} P _{added gas is set} to the fraction of the source gas vaporized from the organic titanium compound. For the pressure P _{organometallic gas} , the pressure is set in the range of 10 ≦ P _{added gas} / P _{organometallic gas} , and the pressure in the reaction vessel is set to 0.1 to 15 Pa.

  Thereby, a raw material gas obtained by vaporizing an organic titanium compound and an additive gas that reacts with the gas are supplied into a reaction vessel, and a thin film forming method for producing a titanium nitride thin film on the surface of a heated substrate by chemical vapor deposition In this case, even when the temperature of the substrate (for example, a semiconductor substrate such as a CMOS substrate) is set to a low temperature region that is a heat resistant temperature of a polymer material or the like, a film formation rate of about 9 nm or more per minute is achieved, Coverability can be obtained.

  In the above, the organic titanium compound may be tetrakis diethylamino titanium, and the additive gas may be ammonia gas.

  Further, the flow rate of the raw material gas obtained by vaporizing the organic titanium compound can be 0.005 to 0.2 g per minute.

  Another thin film formation method proposed by the inventors of the present invention is that a titanium nitride thin film is produced by any of the thin film formation methods of the present invention described above, and then a source gas vaporized from a copper complex is supplied into the reaction vessel. Then, a copper thin film is laminated on the titanium nitride thin film by chemical vapor deposition. In addition, after supplying a raw material gas in which the copper complex is vaporized into the reaction vessel, and forming a copper thin film on the surface of the substrate by chemical vapor deposition, the copper thin film is formed by any of the thin film forming methods of the present invention described above. A titanium nitride thin film is laminated on the thin film.

  In the above, the substrate may be made of an organic material.

  According to the method of the present invention in which the titanium nitride thin film and the thin film different from titanium nitride are laminated, the thin film different from titanium nitride is formed on the substrate on which the titanium nitride thin film is formed in the same vacuum and under the same temperature condition. Or a titanium nitride thin film can be laminated on a substrate on which a thin film different from titanium nitride is formed. Here, the lamination in the same vacuum refers to the continuous lamination on the same substrate on one substrate holder in one reaction vessel provided with an exhaust device capable of maintaining a predetermined pressure.

  In any of the thin film forming methods described above, a titanium nitride thin film is formed in a low temperature region of 150 ° C. to 230 ° C. which is a heat resistant temperature region of various functional materials, and a copper film for wiring is formed by a conventional chemical vapor deposition method. A titanium nitride thin film can be produced in the same film forming temperature region as that produced. That is, the titanium nitride thin film can be realized under the same temperature condition as the step of producing the titanium thin film and the step of laminating the copper thin film by chemical vapor deposition. Since it is used as a copper diffusion prevention film (barrier film) or an adhesion layer film as a material, it is possible to increase the efficiency of industrial production.

A thin film forming apparatus used in the above thin film forming method proposed by the present invention includes a reaction vessel capable of being evacuated, an exhaust device capable of evacuating the reaction vessel and maintaining the reaction vessel at a total pressure of 100 Pa or less. A source gas supply device for introducing a source gas into the reaction vessel, an additive gas supply device for introducing an additive gas that reacts with the source gas into the reaction vessel, and a thin film provided in the reaction vessel. A thin film forming apparatus comprising: a substrate holder that heats and holds a substrate to be deposited in a temperature range of 150 ° C. to 230 ° C .; and a heating device that heats the substrate. Provided with a raw material gas switching means for changing the kind of raw material gas introduced into the raw material gas, and the raw material gas supply device and the additive gas supply device are configured to supply the additive gas introduced into the reaction vessel. So that the partial pressure P _{Organometallic gas} of pressure P _{an added gas} and the raw material gas, fulfills the relation _{10 ≦ P added gas / P organometallic} gas, the pressure in the reaction vessel and 0.1～15Pa, the reaction vessel It has a flow rate control means for controlling the introduction amount of the additive gas and the raw material gas into the inside.

  In the thin film forming apparatus of the present invention, a thin film different from titanium nitride is laminated on a substrate on which a titanium nitride thin film is formed, or a thin film different from titanium nitride is formed in the same vacuum under the same temperature condition. Since the titanium nitride thin film can be laminated on the substrate, industrial production efficiency can be improved.

  According to this invention, a raw material gas obtained by vaporizing an organic titanium compound and an additive gas that reacts with the gas are supplied into a reaction vessel, and a titanium nitride thin film is formed on the surface of a heated substrate by chemical vapor deposition. In the thin film formation method, when the temperature of the substrate (for example, a semiconductor substrate such as a CMOS substrate) is set to a low temperature range of 150 ° C. to 230 ° C. which is the heat resistant temperature of various functional materials, a practical film formation rate is achieved. Good film quality and sufficient coverage can be obtained.

  Further, according to the present invention, a thin film different from titanium nitride can be laminated on a substrate on which a titanium nitride thin film is formed in the same vacuum under the same temperature condition, and a thin film different from titanium nitride is formed. Since a titanium nitride thin film can be laminated on the filmed substrate, for example, a titanium nitride thin film is formed in advance as a copper diffusion prevention film (barrier film) as a wiring material, and the copper thin film is chemically deposited thereon. It is possible to increase the efficiency of industrial production in the case of being manufactured and laminated by the method.

The block diagram of an example of the thin film forming apparatus which concerns on this invention. Sectional drawing of the shower head in the thin film forming apparatus shown in FIG.

The thin film forming method proposed by the inventors of the present invention is that a source gas obtained by vaporizing an organotitanium compound and an additive gas that reacts with the gas are supplied into a reaction vessel, and the surface of a heated substrate is formed by chemical vapor deposition. In the thin film forming method for producing a titanium nitride thin film on the substrate, the substrate is heated to a temperature range of 150 ° C. to 230 ° C., and the partial pressure P _{added gas} of the additive gas is changed to the partial pressure P of the source gas obtained by vaporizing the organic titanium compound. _{For the organometallic gas} , the range is set to 10 ≦ P _{added gas} / P _{organometallic gas} .

  Tetrakisdialkylaminotitanium (hereinafter sometimes referred to as “TDAAT”) can be used as the organic titanium compound as a raw material. For example, tetrakisdimethylaminotitanium in which eight alkyl groups in TDAAT are methyl groups. (Hereinafter, it may be expressed as “TDMAT” in the present specification.), Tetrakisdiethylaminotitanium (hereinafter, referred to as “TDEAT” in which eight alkyl groups in TDAAT are ethyl groups). ), Tetrakisethylmethylaminotitanium (hereinafter referred to as “TEMAT” in this specification) in which two alkyl groups bonded to the same nitrogen atom in TDAAT are converted into one methyl group and one ethyl group. ), But tetrakisdiethylaminotitanium ( DEAT) is preferable to use.

  The reason why the temperature range of the substrate for forming the titanium nitride thin film on the surface is 150 ° C. to 230 ° C. is that the film quality deteriorates when the substrate temperature is lower than 150 ° C., conversely, the substrate temperature is 230 ° C. This is because if the temperature is higher than 0 ° C., the temperature exceeds the heat resistance temperature of polyimide or other organic material (about 220 ° C. for polyimide), and the organic material is decomposed.

  It should be noted that the temperature range for heating the substrate is preferably 150 ° C. to 230 ° C. from the viewpoint of being compatible with functional materials such as various magnetic materials.

According to experiments by the inventors of the present invention, a gas obtained by vaporizing an organotitanium compound and an additive gas that reacts with the gas are supplied into a reaction vessel, and nitriding is performed on the surface of a heated substrate by chemical vapor deposition. In the thin film formation method for producing a titanium thin film, when the temperature range of the heated substrate is the low temperature region described above, the partial pressure P _{added gas} of the additive gas in the reaction vessel and the source gas vaporized from the organic titanium compound It was important to determine the relationship with the pressure P _{organometallic gas} within an appropriate range in order to achieve a practical film forming speed and to obtain good coverage.

That is, when the substrate is heated to a temperature range of 150 ° C. to 230 ° C., a film forming speed of about 9 nm per minute is achieved, and in order to obtain good coverage, the partial pressure P _{added gas} of the additive gas is It sets so that it may become the range of 10 <= P _{added gas} / P _{organometallic gas} with _respect to the partial pressure P _{organometallic gas} of the raw material gas which vaporized the organic titanium compound.

  The pressure (film formation pressure) in the reaction vessel when producing the titanium nitride thin film is preferably 0.1 Pa to 15 Pa. This is because when the pressure in the reaction vessel at the time of producing the titanium nitride thin film is less than 0.1 Pa, the film formation rate is 1 nm or less per minute, so the practicality is lost. This is because the spatial reaction starts and the number of particles increases.

  The flow rate of the raw material gas obtained by vaporizing the organic titanium compound is preferably 0.005 g to 0.2 g per minute. This is because if the flow rate of the raw material gas vaporizing the organic titanium compound is less than 0.005 g / min, the film forming speed is 1 nm / min or less, so the practicality is lost. This is because the maximum flow rate at which the titanium compound can be vaporized.

  In addition, in the thin film formation method proposed by the inventors of the present invention, the additive gas that reacts with the raw material gas obtained by vaporizing the organic titanium compound is a gas that exhibits high reactivity with the raw material gas obtained by vaporizing the organic titanium compound. The gas is not particularly limited as long as it is a gas having a large diffusion coefficient, but ammonia gas is preferable.

  The source gas vaporized from the organic titanium compound and the carrier gas of the additive gas may be used as long as they do not contribute to the chemical reaction between the source gas vaporized from the organic titanium compound and the additive gas. Although not particularly limited, it is optimal to use nitrogen gas in any case.

  Another thin film forming method proposed by the inventors of the present invention is that after a titanium nitride thin film is produced by any of the thin film forming methods described above, a thin film different from titanium nitride is formed on the titanium nitride thin film by chemical vapor deposition. It is to be laminated. In addition, after a thin film different from titanium nitride is formed on the surface of the substrate by chemical vapor deposition, the titanium nitride thin film is laminated on the thin film different from the titanium nitride by any of the thin film forming methods described above. .

  As a thin film different from titanium nitride, for example, a raw material gas obtained by vaporizing a copper thin film prepared by chemical vapor deposition, tantalum, hafnium, zirconium, or the like is supplied into a reaction vessel by vaporizing a copper complex. Examples include thin films of tantalum nitride, hafnium nitride, zirconium nitride, etc. produced by chemical vapor deposition by supplying gas into the reaction vessel, and polyimide thin films obtained by condensation polymerization of pyromellitic anhydride and diamine derivatives. A copper thin film produced by a chemical vapor deposition method by supplying a raw material gas obtained by vaporizing the complex into the reaction vessel is preferable.

  As the copper complex here, for example, a beta diketone copper (I) complex can be used, but trimethylvinylsilyl hexafluoroacetylacetonate copper (I) (hereinafter referred to as “Cu (hfac) (tmvs)). ), Allyltrimethylhexafluoroacetylacetonate copper (I) (Cu (hfac) (atms)), 3-hexanehexafluoroacetylacetonate copper (I) (Cu (hfac) (3 -Hexyne)) is more preferred, and Cu (hfac) (tmvs) is more preferred.

  For example, when a gas obtained by vaporizing a copper complex is used as the source gas, nitrogen gas, hydrogen gas, argon gas, or helium gas can be used as the carrier gas, but argon gas is preferably used.

  In the thin film formation method proposed by the inventors of the present invention, for example, a step of laminating a copper thin film on a titanium nitride thin film or a step of laminating a titanium nitride thin film on a copper thin film by chemical vapor deposition is performed at 150 ° C. to 230 ° C. Since it can be performed in the temperature range of ° C., for example, a process of forming a titanium nitride thin film by supplying a source gas vaporized with an organic titanium compound, and a copper thin film by supplying a source gas vaporized with a copper complex It is not necessary to change the temperature conditions in the reaction vessel in the process of forming the above. Therefore, for example, when a titanium nitride thin film is formed on the surface of the substrate by chemical vapor deposition, the source gas is switched from TDEAT gas to Cu (hfac) (tmvs) gas, purge gas is sent, and pressure adjustment is performed. The copper thin film can be laminated on the produced titanium nitride thin film. Also, when a copper thin film is produced on the surface of the substrate by chemical vapor deposition, the raw material gas is switched from Cu (hfac) (tmvs) gas to TDEAT gas, the purge gas is sent, and the pressure is adjusted. A titanium nitride thin film can be laminated on the produced copper thin film.

  In addition, a copper thin film is laminated | stacked on the process of producing a copper thin film on the surface of a base | substrate, or the titanium nitride thin film produced on the surface of a base | substrate by chemical vapor deposition using the source gas which vaporized the copper complex In the step, the pressure in the reaction vessel is preferably 10 Pa to 10 kPa.

The thin film forming apparatus proposed by the present invention includes a reaction vessel capable of being evacuated, an exhaust device capable of evacuating the inside of the reaction vessel and maintaining the total pressure within 100 Pa or less, and introducing a raw material gas into the reaction vessel. A raw material gas supply device, an additive gas supply device that introduces an additive gas that reacts with the raw material gas into the reaction vessel, and a substrate holder that is provided in the reaction vessel and holds a substrate on which a thin film is deposited. And a heating device for heating the substrate and a raw material gas switching means, and the raw material gas supply device and the additional gas supply device include a partial pressure P _{added gas} and a partial pressure of the raw material gas introduced into the reaction vessel. P _{organometallic gas} is provided with a flow rate control means for controlling the amount of additive gas and raw material gas introduced into the reaction vessel so as to satisfy the relationship of 10 ≦ P _{added gas} / P _{organometallic gas.} Also It is.

  The source gas switching means is for changing the source gas introduced into the reaction vessel from the source gas supply device into a different type, for example, a three-way valve or a switching valve in which two gate valves are combined, etc. Can be illustrated.

The source gas supply device and the additive gas supply device are provided with a flow rate control means for controlling the introduction amount of the additive gas and the source gas into the reaction vessel, and the exhaust device is provided with a pressure control means. The partial pressure P _{added gas} of the additive gas introduced into the reaction vessel and the partial pressure P _{organometallic gas} of the source gas introduced into the reaction vessel by the action of the control means or both of them _satisfy the relationship of 10 ≦ P _{added gas} / P _{organometallic gas} . Controlled to meet.

Example 1
FIG. 1 is a diagram showing a configuration of an example of a thin film forming apparatus of the present invention in which a thin film of titanium nitride or a thin film different from titanium nitride is stacked in the same vacuum by a chemical vapor deposition method, and the thin film forming method of the present invention is implemented. .

  Inside the reaction vessel 10 provided in this apparatus is a substrate holder 18. A substrate 20 is attached to the substrate holder 18. A titanium nitride thin film is formed on the surface of the substrate 20. There is a shower head 54 for gas introduction so as to face the substrate holder 18, and the source gas is introduced from the source gas introduction system 22 through the shower head 54 and the additive gas is introduced from the additive gas introduction system 24. Is done.

The reaction vessel 10 is made of an aluminum alloy and can be evacuated by the exhaust system 12 to keep the inside airtight. The exhaust system 12 includes a turbo molecular pump 26, a dry pump 28, and a pressure control valve 27 as pressure control means. With this exhaust system 12, the inside of the reaction vessel 10 can be exhausted to a pressure of 10 ⁻⁴ Pa and maintained at a desired pressure. That is, the inside of the reaction vessel 10 is kept at a low pressure by the exhaust system 12, and a titanium nitride thin film is produced by chemical vapor deposition.

As vacuum gauges for measuring the pressure in the reaction vessel 10, there are a first vacuum gauge 14 for low vacuum and a second vacuum gauge 16 for high vacuum. The first vacuum gauge 14 is a high-accuracy diaphragm vacuum gauge having a pressure measurement range of 0.1 Pa to 1333 Pa. The second vacuum gauge 16 is an ionization vacuum gauge having a pressure measurement range of 10 ⁻² Pa to 10 ⁻⁶ Pa.

  The substrate holder 18 includes a substrate heating device 30 for heating the substrate 20. The substrate heating apparatus 30 includes a thermocouple 32 that measures the temperature of the substrate 20, a heater 34, and a heating power source 35. The heating power source 35 performs PID control of the substrate temperature (or other control methods such as PI control, ON-OFF control, and fuzzy control) based on the measured temperature value.

The source gas introduction system 22 includes a first organic titanium source container 36 containing an organic titanium compound (for example, TDEAT) that is a liquid source and a flow rate of the organic titanium compound (for example, TDEAT) that is the liquid source. A flow controller 40, a vaporizer 38 for vaporizing an organic titanium compound (for example, TDEAT) as a liquid raw material, and a carrier gas (for example, N ₂ ) for a gas (for example, TDEAT gas) of the vaporized organic titanium compound ) Containing a gas cylinder 42, a second flow rate controller 41 that controls the flow rate of the carrier gas (for example, N ₂ ), and a copper complex (for example, Cu (hfac)) that is a liquid source (Tmvs)) and the flow rate of the copper complex (for example, Cu (hfac) (tmvs)) that is the liquid raw material. A fifth flow controller 43 to be controlled, a vaporizer 37 for vaporizing a copper complex (eg, Cu (hfac) (tmvs)) as a liquid source, and a vaporized copper complex gas (eg, Cu (hfac) ( (tmvs) gas) containing a gas cylinder 45 containing a carrier gas (for example, Ar) and a copper complex gas introduction system including a sixth flow rate controller 44 for controlling the flow rate of the carrier gas (for example, Ar). A three-way valve 23 is provided between the two.

  The raw material gas introduced from the raw material gas introduction system 22 is appropriately switched between the organic titanium gas and the copper complex gas by the three-way valve 23.

  The vaporized source gas is mixed with the carrier gas, passes through the three-way valve 23, and is supplied from the source gas introduction system 22 through the supply path 76 to the shower head 54.

The additive gas introduction system 24 includes an additive gas cylinder 46 containing an additive gas (for example, ammonia gas), a third flow rate controller 48 for controlling the flow rate of the additive gas (for example, ammonia gas), and an additive gas (for example, ammonia gas). , and a carrier gas (e.g., gas cylinders 50 accommodating the N ₂₎ for the ammonia gas), a carrier gas (e.g., the fourth flow rate controller 52 for controlling the flow rate of N _2).

The additive gas (for example, ammonia gas) is mixed with a carrier gas (for example, N ₂ ) and supplied to the shower head 54 via the supply path 78.

  In FIG. 2, the mixed gas 60 of the source gas and the carrier gas first enters the first diffusion chamber 62 of the shower head 54 through the supply path 76. Next, it enters the second diffusion chamber 68 through the dispersion hole 66 formed in the dispersion plate 64. Then, after being mixed evenly in these diffusion chambers 62 and 68, it enters the inside of the reaction vessel 10 through the first ejection holes 56.

  On the other hand, the mixed gas 70 of the additive gas and the carrier gas first enters the third diffusion chamber 72 of the shower head 54 through the supply path 78 and then enters the inside of the reaction vessel 10 through the second ejection hole 58.

  In the thin film forming apparatus shown in FIG. 1, the flow rate control means that is provided in the raw material gas supply device that introduces the raw material gas into the reaction vessel 10 and controls the introduction amount of the raw material gas into the reaction vessel 10 includes a three-way valve 23. The first flow rate controller 40 and the second flow rate controller 41 (organic titanium gas introduction system), and the fifth flow rate controller 43 and the sixth flow rate controller 44 (copper complex gas introduction system). The flow rate control means that is configured and is provided in the additive gas supply device that introduces the additive gas (ammonia gas) into the reaction vessel 10 and controls the introduction amount of the additive gas (ammonia gas) into the reaction vessel 10 is a third method. The flow rate controller 48 and the fourth flow rate controller 52 are configured.

  In the thin film forming apparatus shown in FIG. 1, the flow rate control means provided in the source gas supply device and the flow rate control means provided in the additive gas supply device, or these flow rate control means and pressure control means. The pressure control valve 27 is controlled so that the ratio of the partial pressure in the reaction vessel 10 between the source gas introduced into the reaction vessel 10 and the additive gas is within a predetermined range.

For example, a flow rate control means that is provided in a raw material gas supply device that introduces a raw material gas (TDEAT gas) into the reaction vessel 10 and controls the amount of the raw material gas (TDEAT gas) introduced into the reaction vessel 10 includes a first flow control means. The flow rate controller 40 and the second flow rate controller 41 are provided in an additive gas supply device that introduces an additive gas (ammonia gas) into the reaction vessel 10, and the additive gas (ammonia gas) into the reaction vessel 10 is provided. ) Is configured by the third flow rate controller 48 and the fourth flow rate controller 52, the partial pressure of the additive gas (ammonia gas) = The ratio of P _NH3 (= P _{added gas} ) to the partial pressure of the source gas (TDEAT gas) = P _TDEAT (= P _{organometallic gas} ) can be adjusted.

First, the pressure (total pressure) in the reaction vessel 10 is fixed to a constant value within a range of conditions. P _NH3 = (flow rate of ammonia gas / flow rate of total gas introduced into the reaction vessel 10) × pressure (total pressure) in the reaction vessel 10 and P _TDEAT = (flow rate of TDEAT gas / reaction vessel 10) The flow rate of the total gas introduced) × the pressure in the reaction vessel 10 (total pressure).

Therefore, as described above, the first flow rate controller 40 and the third flow rate controller 48 are controlled to control the flow rate of the TDEAT gas and the flow rate of the ammonia gas, and the second flow rate controller 41, the fourth flow rate controller 41, and the fourth flow rate controller 41. The flow rate controller 52 is controlled, the flow rate of the carrier gas is controlled, the flow rate of all the gases introduced into the reaction vessel 10 is controlled, and the ratio of P _NH3 to P _TDEAT is adjusted. Alternatively, the TDEAT gas flow rate and the ammonia flow rate are kept constant by the first flow rate controller 40 and the third flow rate controller 48, and the second flow rate controller 41 and the fourth flow rate controller 52 are changed. The flow rate of the carrier gas is controlled, and the flow rate of all the gases introduced into the reaction vessel 10 is controlled to adjust the ratio of P _NH3 to P _TDEAT .

  In order to fix the pressure (total pressure) in the reaction vessel 10 at a constant value, the pressure control valve 27 is controlled to adjust the pressure (total pressure) in the reaction vessel 10.

In the state where the inside of the reaction vessel 10 is maintained at a predetermined low pressure, as described above, the raw material gas supply device for introducing the raw material gas into the reaction vessel 10 is provided, and the raw material gas into the reaction vessel 10 is provided. And a flow rate control means for controlling the introduction amount of the additive gas, and a flow rate control means for controlling the introduction amount of the additive gas into the reaction vessel 10 provided in the additive gas supply device for introducing the additive gas into the reaction vessel 10. At the same time, in addition to the method of controlling the pressure (total pressure) in the reaction vessel 10 by controlling the pressure control valve 27, the P of _{NH 3} in the reaction vessel 10 can be controlled only by controlling the flow rate control means. _The ratio to _TDEAT can also be adjusted.

Example 2
Using the thin film forming apparatus shown in FIG. 1, a titanium nitride thin film was formed by chemical vapor deposition under the following process conditions.

(1) Organic titanium compound (liquid raw material): TDEAT, 0.055 g per minute
(2) Additive gas: Ammonia (NH ₃ )
a. 11 ml per minute (P _{added gas} / P _{organometallic gas} = 3)
b. 18.3 ml / min (P _{added gas} / P _{organometallic gas} = 5)
c. 36.7 ml / min (P _{added gas} / P _{organometallic gas} = 10)
d. 50 ml per minute (P _{added gas} / P _{organometallic gas} = 13.5)
e. 183 ml per minute (P _{added gas} / P _{organometallic gas} = 50)
(3) Carrier gas: TDEAT, ammonia, and nitrogen gas (N ₂ )
(4) Purge gas: Argon (Ar), 50 milliliters per minute (for preventing film adhesion to the back of the substrate, not shown)
(5) Substrate temperature (film formation temperature): 150 ° C. to 230 ° C.
(6) Pressure in the reaction vessel (film formation pressure): 10 Pa
(7) Film thickness (film formation time): 180 nm (20 minutes)

  The coverage (coverage) was confirmed with a trench having an opening width of 0.16 μm and an aspect ratio of 4.

  The experimental results are shown below.

a. P _{added gas} / P _{organometallic gas} = 3
In another experiment in which the temperature of the substrate was 300 ° C. or higher, good coverage (coverage) 100% was obtained, and the film formation rate was about 9 nm or more per minute. Here, when the film formation rate is, for example, about 4 nm or less per minute, the amount of impurities mixed is large and the film quality becomes poor, but a film formation rate of about 9 nm or more per minute is obtained. , You can have a margin on the process. However, when the substrate temperature in this experiment was 230 ° C. or lower, the film quality was poor, the film formation rate was about 4 nm per minute, and the deposit was not a solid but a highly viscous liquid film.

b. P _{added gas} / P _{organometallic gas} = 5
When the film was formed at a substrate temperature of 230 ° C., the coverage (coverage) was good at 100%, but the film formation rate was about 6 nm per minute and was insufficient. As the temperature of the substrate was lowered, the film formation rate tended to decrease from about 6 nm per minute. When the substrate temperature was 150 ° C., both the film quality and the film formation rate were poor.

c. P _{added gas} / P _{organometallic gas} = 10
When the film was formed at a substrate temperature of 230 ° C., a film formation rate of about 9 nm per minute was obtained and the coverage (coverage) was good at 100%. However, as the substrate temperature was lowered, the film formation rate was improved. The film speed tended to decrease. When the substrate temperature was 150 ° C., both the film quality and the film formation rate were poor.

d. P _{added gas} / P _{organometallic gas} = 13.5
When the film was formed at a substrate temperature of 230 ° C., a film formation rate of about 9 nm per minute was obtained. The coverage (coverage) at this time was also good at 100%. When the temperature of the substrate was lowered to 150 ° C., both the film quality and the film formation rate were poor.

e. P _{added gas} / P _{organometallic gas} = 50
When the film was formed at a substrate temperature of 150 ° C., the coverage (coverage) was good at 100% and the film formation rate was good at about 9 nm per minute. Furthermore, it was confirmed that when the film was formed at a lower substrate temperature, it was necessary to increase the ammonia flow rate in order to increase the film formation rate.

From the above results, in order to form a titanium nitride thin film by chemical vapor deposition in a low temperature region of 150 ° C. to 230 ° C. while obtaining a sufficient film formation rate and good coverage (coverage), It has been found that the partial pressure P _{added gas} needs to be set in the range of 10 ≦ P _{added gas} / P _{organometallic gas} with _respect to the partial pressure P _{organometallic gas} of the raw material gas.

Example 3
Using the thin film forming apparatus shown in FIG. 1 described in the first embodiment, a titanium nitride thin film is formed on the substrate by the chemical vapor deposition method under the following process conditions, and then the same temperature conditions are used in the same vacuum. Thus, an attempt was made to laminate a copper thin film on a titanium nitride thin film.

B) Preparation of titanium nitride thin film (1) Organic titanium compound (liquid raw material): TDEAT, 0.055 g / min
(2) Added gas: ammonia (NH ₃ ), 50 milliliters per minute (P _{added gas} / P _{organometallic gas} = 13.5)
(3) Carrier gas: TDEAT, ammonia, and nitrogen gas (N ₂ )
(4) Purge gas: Argon (Ar), 50 milliliters per minute (for preventing film adhesion to the back of the substrate, not shown)
(5) Substrate temperature (film formation temperature): 200 ° C.
(6) Pressure in the reaction vessel (film formation pressure): 10 Pa
(7) Film thickness (film formation time): 180 nm (20 minutes)

  As a result, a film formation rate of about 9 nm per minute was obtained. Further, when the coverage (coverage) was confirmed with a trench having an opening width of 0.16 μm and an aspect ratio of 4, the coverage was 100%. The specific resistance value after plasma modification was 650 μΩ · cm.

As a result, a source gas obtained by vaporizing the organic titanium compound (TDEAT) and an additive gas (ammonia (NH ₃ )) that reacts with the gas are supplied into the reaction vessel and heated by the chemical vapor deposition method. In a thin film forming method for producing a titanium nitride thin film on the substrate, a practical film forming speed is obtained even when the temperature of the substrate is in a low temperature region (200 ° C. in this embodiment) which is a heat resistant temperature of various functional materials. It was confirmed that the coverage was good.

B) Lamination of copper thin film (1) Copper complex (liquid raw material): Cu (hfac) (tmvs) Trimethylvinylsilyl hexafluoroacetylacetonate copper (I), 2.4 g per minute
(2) Additive gas: None (3) Carrier gas: Argon (Ar) 500 sccm
(4) Purge gas: Argon (Ar), 50 milliliters per minute (for preventing film adhesion to the back of the substrate, not shown)
(5) Substrate temperature (film formation temperature): 200 ° C.
(6) Pressure in the reaction vessel (film formation pressure): 0.5 KPa
(7) Film thickness (film formation time): 50 nm (10 seconds)

  The liquid Cu (hfac) (tmvs) supplied from the copper complex raw material container 39 is adjusted in flow rate by the fifth flow rate controller 43 and then vaporized in the vaporizer 37 to form Cu as a raw material gas. (Hfac) (tmvs) gas is mixed with Ar as a carrier gas whose flow rate is adjusted by the sixth flow rate controller 44, passes through the three-way valve 23, is sent to the source gas introduction system 22, and is supplied to the supply path 76. After that, it is supplied to the shower head 54.

  Lamination of the copper thin film is as follows: b) After the process of producing the titanium nitride thin film is completed, the temperature condition of the substrate is the same in the same vacuum, the source gas is switched, and the purge and pressure adjustment are performed. As described above, a 50 nm copper thin film could be laminated on the titanium nitride thin film obtained by the production of the titanium nitride thin film.

  The best mode and examples of the present invention have been described above with reference to the accompanying drawings. However, the present invention is not limited to such modes and examples, and can be understood from the description of the scope of claims. Various modifications can be made within the technical scope.

10 Vessel 12 Exhaust system 14 First vacuum gauge (for low vacuum)
16 Second vacuum gauge (for high vacuum)
18 Substrate holder 20 Substrate 22 Raw material gas introduction system 23 Three-way valve 24 Addition gas introduction system 26 Turbo molecular pump 27 Pressure control valve 28 Dry pump 30 Substrate heating device 32 Thermocouple 34 Heater 35 Heating power source 36 Organic titanium raw material container 37, 38 Vaporization Container 39 Copper complex raw material container 40 First flow controller 41 Second flow controller 42 Gas cylinder containing carrier gas 43 Fifth flow controller 44 Sixth flow controller 45 Carrier gas Gas cylinder 46 additive gas cylinder 48 third flow controller 50 gas cylinder containing carrier gas 52 fourth flow controller

Claims (1)

A reaction vessel capable of being evacuated, an exhaust device capable of exhausting the inside of the reaction vessel and maintaining the inside of the reaction vessel at a total pressure of 100 Pa or less, a raw material gas supply device for introducing a raw material gas into the reaction vessel, An additive gas supply device that introduces an additive gas that reacts with a source gas into the reaction vessel, and a substrate that is provided in the reaction vessel and on which a thin film is deposited is heated to a temperature range of 150 ° C. to 230 ° C. A thin film forming apparatus comprising a substrate holder for holding and a heating device for heating the substrate, comprising a raw material gas switching means for changing the type of raw material gas introduced from the raw material gas supply device into the reaction vessel The source gas supply device and the additive gas supply device are configured such that the partial pressure P _{added gas} of the additive gas introduced into the reaction vessel and the partial pressure P _{organometallic gas} of the _{source gas} are 10 ≦ P _{added g} provided with flow rate control means for controlling the introduction amount of the additive gas and the raw material gas into the reaction vessel so that the relationship of _as / P _{organometallic gas} is satisfied and the pressure in the reaction vessel is set to 0.1 to 15 Pa. A thin film forming apparatus.

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