JP2010105251A - Liquid delivering head and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid delivering head capable of remarkably decreasing a manufacturing cost by simplifying the manufacturing process, and to provide a method for manufacturing the same. <P>SOLUTION: When an ink delivering head 10 is manufactured as a liquid delivering head, (a) by forming a plurality of nozzle holes 56 and a plurality of filter holes 48 in a sheet of a hole-less plate (the figure is eliminated), a composite plate 38 is prepared, and a head base material 80 having a plurality of pressure rooms 52 and ink flow paths R is prepared, and (b) the composite plate 38 is bent so that a plurality of the nozzle holes 56 and a plurality of the filter holes 48 may be arranged on different regions partitioned by a bending line, and the composite plate 38 is joined to the head base material 80. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a liquid discharge head configured to discharge liquid from a nozzle hole communicating with a pressure chamber by applying pressure to the liquid in the pressure chamber, and a method for manufacturing such a liquid discharge head.

  As a conventional “liquid ejection head”, an “ink ejection head” of an ink jet printer is well known, and an example thereof is disclosed in Patent Document 1. The “ink discharge head”, that is, “inkjet printer head (1)” of Patent Document 1 is a flow path unit having an ink supply port (22) for taking ink and a pressure chamber (21) communicating with a nozzle hole (9). (18), a nozzle unit (10) having a plurality of nozzle holes (9) is joined to the lower surface of the flow path unit (18), and the upper surface of the flow path unit (18) is The actuator (30) is joined. Further, a filter (26) having a filtration part (26a) composed of a plurality of filter holes (not shown) is attached to the ink supply port (22) of the flow path unit (18).

  And when manufacturing an inkjet printer head (1), a flow-path unit (18), a nozzle unit (10), an actuator (30), and a filter (26) are created separately, and these are adhesives etc. after that. Were used to join each other.

The numbers in parentheses correspond to the reference numbers used in Patent Document 1.
JP 2007-245394 A (FIG. 3)

  According to the “inkjet printer head (1)” as the conventional “ink discharge head”, the nozzle unit (10) and the filter (26) are separately formed and then joined to the flow path unit (18). Thus, the plurality of nozzle holes (9) constituting the nozzle unit (10) and the plurality of filter holes (not shown) constituting the filter (26) must be formed in separate steps. In addition, there is a problem that the manufacturing process becomes high because the manufacturing process becomes complicated.

  The present invention has been made to solve the above-described problems, and provides a liquid discharge head capable of greatly reducing the manufacturing cost by simplifying the manufacturing process and a method for manufacturing the same. Objective.

  In order to solve the above-described problems, a liquid discharge head according to the present invention includes at least a plurality of nozzle holes for discharging liquid, a plurality of pressure chambers individually connected to the nozzle holes, Pressure applying means for applying pressure to the liquid, a liquid channel for supplying the liquid to the nozzle hole via the pressure chamber, and a plurality of filter holes provided so as to correspond to the inlets of the liquid channel. A liquid discharge head provided as a component, wherein the plurality of filter holes and at least one other component are formed in different regions separated by a folding line in one bent plate. It is characterized by.

  In this configuration, a plurality of filter holes and at least one other component can be simultaneously formed on one plate (the plate corresponds to a “holeless plate” described later). The number of steps for creating these components can be reduced, and the manufacturing process can be simplified. Further, even when the filter region is arranged away from a desired position, the liquid region can be supplied to the liquid channel if it is disposed so as to overlap the inlet of the liquid channel. As long as it is within a region overlapping with the entrance of the lens, it is possible to allow a positional shift with respect to a desired position. Therefore, even when priority is given to the positioning accuracy of other components (for example, nozzle holes, etc.) built into the plate (the plate corresponds to a “composite plate” described later), the positioning accuracy of the filter hole Can be absorbed in the filter region.

  A plurality of the nozzle holes may be formed in the plate as the other component.

  In this configuration, a plurality of nozzle holes and a plurality of filter holes can be formed in the same process with respect to one plate (that is, a plate without holes). Moreover, since the difference in diameter is small, the nozzle hole and the filter hole can be formed using the same processing apparatus.

  A liquid repellent treatment may be applied to the surface of the filter region in the plate where the plurality of filter holes are formed.

  In this configuration, since the surface of the filter region (that is, the upstream surface with respect to the ink flow) is subjected to liquid repellent treatment, bubbles mixed in the liquid can be captured on the surface. .

  A groove may be formed in the bent portion of the plate along the folding line.

  In this configuration, since the groove is formed in the bent portion of the plate (that is, the composite plate), the plate can be easily bent.

  The area of the filter region may be designed to be larger than the opening area of the inlet of the liquid channel.

  In this configuration, since the area of the filter region is designed to be larger than the opening area of the inlet of the liquid flow path, the aperture ratio of the filter hole at the inlet is designed even when the position of the filter region with respect to the inlet is slightly shifted. Therefore, it is possible to prevent a decrease in performance due to a reduction in the aperture ratio. Since the inlet of the liquid flow path is usually formed at the end of the ink discharge head, it is easy to design a large area for the filter region disposed at the inlet.

  In order to solve the above problems, a method of manufacturing a liquid discharge head according to the present invention includes a plurality of nozzle holes for discharging liquid, a plurality of pressure chambers individually connected to the nozzle holes, and the pressure chambers. A liquid ejection device comprising: a pressure applying unit that applies pressure to the liquid; a liquid channel that supplies the liquid to the nozzle hole via the pressure chamber; and a plurality of filter holes provided at an inlet of the liquid channel. A method for manufacturing a head, comprising: (a) forming a plurality of nozzle holes and a plurality of filter holes in a single holeless plate, creating a composite plate, and a plurality of the pressure chambers and the liquid And (b) bending the composite plate in such a manner that the plurality of nozzle holes and the plurality of filter holes are arranged in different regions separated by folding lines. Rutotomoni is for joining the composite plate to the head substrate.

  In this configuration, since the plurality of nozzle holes and the plurality of filter holes can be formed in the same process with respect to one plate without holes, the manufacturing process of the liquid discharge head can be simplified.

  In the step (b), the nozzle region in which the plurality of nozzle holes in the composite plate are formed may be joined to the head base material before the filter region in which the plurality of filter holes are formed. Good.

  In this configuration, since the nozzle area is joined to the head base material before the filter area, the nozzle hole can be positioned with high accuracy with respect to the head base material and desired liquid ejection performance is ensured. can do.

  In the step (a), a groove for bending may be formed on the surface of the holeless plate.

  In this configuration, since the groove for bending is formed on the surface of the plate without holes in the step (a), the bending of the composite plate in the step (b) can be easily performed.

  Before the step (a), (c) a liquid repellent treatment may be applied to the surface of the holeless plate.

  In this configuration, the liquid-repellent treatment is performed on the surface of the holeless plate before forming the plurality of nozzle holes and the plurality of filter holes in the holeless plate. It is possible to prevent adverse effects caused by the liquid repellent treatment on the inner peripheral surface. For example, it is possible to prevent the liquid surface (meniscus) from retreating due to the liquid repellent treatment on the inner peripheral surface of the nozzle hole, and it is possible to prevent the liquid discharge operation from becoming unstable. In addition, it is possible to prevent a decrease in liquid permeability due to the liquid repellent treatment on the inner peripheral surface of the filter hole.

  Since the liquid-repellent treatment is performed on the surface of the holeless plate before the step (b) (that is, the step of bending the composite plate), the region requiring the liquid-repellent treatment (that is, the nozzle region and The liquid repellent treatment can be easily performed on the region to be a filter region.

  In the step (b), the composite plate is bent so that a connecting portion is interposed between the nozzle region in which the plurality of nozzle holes are formed and the filter region in which the plurality of filter holes are formed. A connecting portion may be disposed on the side of the head base material, and in the step (c), the surface of the portion to be the connecting portion in the holeless plate may not be subjected to liquid repellent treatment.

  In this configuration, since the liquid repellent treatment is not performed on the surface of the portion to be the connecting portion, the adhesion of the potting agent to the surface of the connecting portion is not impaired. Therefore, even if the potting agent is filled in the gap formed between the head holder and the connecting portion after the liquid discharge head is mounted on the carriage head holder, the “sealing function” of the potting agent is impaired. Can be prevented.

  The present invention is configured as described above and can be manufactured simultaneously with a plurality of filter holes and at least one other component on a single plate (ie, a holeless plate). The process can be simplified and the manufacturing cost can be greatly reduced.

  Further, even when the filter region is arranged away from a desired position, the liquid region can be supplied to the liquid channel if it is disposed so as to overlap the inlet of the liquid channel. As long as it is within a region overlapping with the entrance of the lens, it is possible to allow a positional shift with respect to a desired position. Therefore, even when priority is given to the positioning accuracy of other components (for example, nozzle holes, etc.) built in the plate (that is, the composite plate), the error in the positioning accuracy of the filter hole is absorbed in the filter region. Can do.

  Hereinafter, a “liquid discharge head” and a “method of manufacturing a liquid discharge head” according to a preferred embodiment of the present invention will be described with reference to the drawings.

  In each of the following embodiments, the present invention is applied to an “ink ejection head” that ejects ink (liquid) using an “actuator”. However, the present invention relates to “when heated by a heating element”. "Ink discharge head" that discharges ink (liquid) using "pressure", a "colored liquid discharge head" that discharges colored liquid (liquid) in a color filter manufacturing apparatus, and a conductive liquid ( The present invention can also be applied to other “liquid discharge heads” such as “conductive liquid discharge heads” that discharge (liquid).

  Further, “lower” used in the following description means the direction in which ink is ejected, “upper” means the opposite direction, and “plan view” means viewing from above. Shall. “Side” means a direction orthogonal to the vertical direction. Furthermore, “component” means “component of the ink ejection head”.

(First embodiment)
[Configuration of ink discharge head]
FIG. 1 is a perspective view showing a usage state of an ink discharge head 10 as a “liquid discharge head” according to the first embodiment of the present invention, and FIG. 2 is a plan view showing a configuration of the ink discharge head 10. 3 is a cross-sectional view showing the configuration of the ink discharge head 10, and FIG. 4 is a partially enlarged cross-sectional view showing the main part of the ink discharge head 10. FIG. 5A is a partially enlarged plan view showing the configuration of the ink ejection head 10, and FIG. 5B is a cross-sectional view taken along the line VB-VB in FIG.

  As shown in FIG. 1, the ink ejection head 10 is mounted on a carriage 14 of the inkjet printer 12 and is in a direction (that is, main scanning direction) orthogonal to the conveyance direction (that is, sub-scanning direction) Y of the paper 16. The ink as a “liquid” supplied from the ink sub-tank 18 is ejected toward the paper 16 in accordance with a driving voltage applied from a flexible printed wiring board (FPC: not shown). As shown in FIGS. 2 and 3, a flow path unit 20 constituting an ink flow path R as a “liquid flow path” and an actuator unit 22 as a “pressure applying means” are provided.

[Configuration of channel unit]
As shown in FIG. 3, the flow path unit 20 is configured by stacking a filter plate 24, a cavity plate 26, a base plate 28, a manifold plate 30 and a nozzle plate 32 in this order from the upper side. An ink flow path R through which ink flows is configured by communicating the “holes” formed in 32 with each other.

  Of the five plates constituting the flow path unit 20, the cavity plate 26, the base plate 28, and the manifold plate 30 are plate-like members having a substantially rectangular shape in plan view made of a metal material having excellent corrosion resistance such as stainless steel. The plate 24 and the nozzle plate 32 are plate-like members having a substantially square shape in a plan view made of a synthetic resin material such as polyimide, and the filter plate 24 and the nozzle plate 32 are integrated with each other via a connecting portion 34 made of the same material. Is formed. And the laminated body 36 (FIG. 3, FIG. 6) obtained by laminating | stacking the cavity plate 26, the base plate 28, and the manifold plate 30, and the composite plate 38 (FIG. 3) which has the filter plate 24, the nozzle plate 32, and the connection part 34. 3 and FIG. 6) are bonded using an adhesive or the like.

  In addition, the material of the filter plate 24, the nozzle plate 32, and the connection part 34 (namely, composite plate 38) is not limited to a synthetic resin, A metal like stainless steel etc. may be sufficient.

  As shown in FIGS. 2 and 3, the ink flow path R includes one ink introduction flow path 40 and a plurality (two in this embodiment) of common ink chambers 42 (two in the present embodiment) communicated with the ink introduction flow path 40. 2) and a plurality of (in this embodiment, a total of 12) individual ink flow paths 44 communicating with the common ink chamber 42.

  As shown in FIG. 4, the ink introduction flow path 40 includes holes 26 a and 28 a formed in the cavity plate 26 and the base plate 28 at one end in the sub-scanning direction Y in the flow path unit 20, and the manifold plate 30. The upper opening of the ink introduction channel 40 serves as the inlet 46 of the ink channel R. The filter plate 24 is joined to the upper surface of the cavity plate 26 so as to cover the inlet 46, and a plurality of filter holes 48 formed in the filter plate 24 are arranged so as to correspond to the inlet 46. Yes.

  The filter holes 48 are through holes having a substantially circular shape in a plan view for capturing foreign matters or bubbles in the ink taken into the ink flow path R at the inlet 46, and the plurality of filter holes 48 are distributed almost uniformly throughout the inlet 46. It is arranged like this. The area of the region (hereinafter referred to as “filter region”) A in which a plurality of filter holes 48 are formed is designed to be larger than the opening area of the inlet 46, and the shape of the filter region A is the shape of the inlet 46 ( In this embodiment, it is designed to have a substantially similar shape. Therefore, even if an error occurs in the “machining accuracy” or “positioning accuracy” of the filter plate 24, the error can be absorbed in the filter region A, and the aperture ratio of the filter hole 48 at the inlet 46 varies undesirably. Can be prevented.

  However, even if the aperture ratio of the filter hole 48 at the inlet 46 fluctuates undesirably, as long as a part of the filter region A is disposed so as to overlap the inlet 46 of the ink flow path R, the ink flows into the ink flow path R. Therefore, unless the inflow of the ink into the ink flow path R is completely blocked, the change in the aperture ratio does not become a fatal defect.

  The diameter of the filter hole 48 is not particularly limited, but is desirably sufficiently smaller than the diameter of the nozzle hole 56 in order to prevent clogging of the nozzle hole 56 due to foreign matter or the like, and is mixed into the ink. In consideration of allowing trapped bubbles to be trapped, it is preferably about 7 to 15 μm. The shape of the filter hole 48 in plan view is not particularly limited, and may be “substantially circular”, “substantially square”, “substantially oval”, or the like. The shape may be “cylindrical” or “tapered with a diameter reduced from the upstream side toward the downstream side”.

  2 and 5B, the common ink chamber 42 is configured by a long hole 30a formed in the manifold plate 30 so as to extend long in the sub-scanning direction Y. The cross section of the common ink chamber 42 The shape is designed to be a rectangle extending long in the main scanning direction X. Further, as shown in FIG. 2, one end portion 42 a in the sub scanning direction Y in the common ink chamber 42 is connected to a side portion in the main scanning direction X in the ink introduction channel 40, and the sub end in the common ink chamber 42. As shown in FIG. 2, the other end portion 42b in the scanning direction Y is closed at an end surface that is substantially semicircular in plan view. A plurality of individual ink channels 44 are arranged in a staggered manner in two rows so as to cover each of the common ink chambers 42.

  The individual ink flow path 44 is a flow path for selectively discharging the ink in the common ink chamber 42 to the outside, and as shown in FIG. 5B, the connection flow path 50, the pressure chamber 52, the discharge flow The passage 54 and the nozzle hole 56 are configured to communicate in this order from the upstream side.

  The connection channel 50 is formed above the common ink chamber 42 by a hole 28 b formed in the base plate 28, and the pressure chamber 52 is a long hole 26 b formed to extend in the main scanning direction X in the cavity plate 26. Thus, the upstream end of the pressure chamber 52 and the common ink chamber 42 are communicated with each other via the connection channel 50. The discharge channel 54 is configured below the pressure chamber 52 by a hole 28 c formed in the base plate 28 and a hole 30 b formed in the manifold plate 30, and the nozzle hole 56 is formed in the nozzle plate 32. The tapered hole 32 a is configured below the discharge channel 54, and the downstream end of the pressure chamber 52 and the nozzle hole 56 are communicated with each other via the discharge channel 54. An opening 52 a that is opened on the upper surface of the flow path unit 20 is formed in the upper portion of the pressure chamber 52, and the opening 52 a is closed by the lower surface of the actuator unit 22.

  The nozzle hole 56 is a hole for discharging the ink pressurized in the pressure chamber 52, and the shape of the inner peripheral surface of the nozzle hole 56 is “the diameter is reduced from the upstream side toward the downstream side (that is, the discharge port side). Designed to be “tapered”. The minimum diameter of the nozzle hole 56 (that is, the diameter of the discharge port) is designed to be about 15 to 30 μm, like an ink discharge head in a general ink jet printer. As described above, the diameter of the filter hole 48 is designed in relation to the minimum diameter of the nozzle hole 56.

[Configuration of actuator unit]
The actuator unit 22 constitutes the inner upper surface of the pressure chamber 52 and selectively applies ejection pressure to the ink in the pressure chamber 52. As shown in FIG. 5B, the first piezoelectric sheet 58 is provided. The second piezoelectric sheet 60 and the third piezoelectric sheet 62 are laminated in this order from the upper side.

  Each of the piezoelectric sheets 58, 60 and 62 is a sheet member made of a lead zirconate titanate (PZT) ceramic material having ferroelectricity and having a thickness of about 10 to 30 μm. On the upper surface of the first piezoelectric sheet 58, as shown in FIGS. 5A and 5B, a plurality of individual electrodes 64 individually corresponding to the pressure chambers 52 are formed at positions facing the pressure chambers 52. A first common electrode 66 corresponding to each of the pressure chambers 52 is formed on the upper surface of the second piezoelectric sheet 60 serving as an intermediate layer at a position corresponding to each of the pressure chambers 52. A second common electrode 68 corresponding to each of the pressure chambers 52 is formed across all the pressure chambers 52 on the upper surface of the lower third piezoelectric sheet 62. Therefore, in the actuator unit 22, the portion sandwiched between the individual electrode 64 and the first common electrode 66 in the first piezoelectric sheet 58, and the first common electrode 66 and the second common electrode 68 in the second piezoelectric sheet 60. The sandwiched portion is the “first active portion”, and the portion sandwiched between the individual electrode 64 and the second common electrode 68 in the first piezoelectric sheet 58 and the second piezoelectric sheet 60 (that is, the first common portion). A portion excluding a region where the electrode 66 is disposed) is a “second active portion”.

  Then, on the upper surface of the first piezoelectric sheet 58 which is the uppermost layer, as shown in FIGS. 2 and 5A, the individual electrode terminal 70, the first common electrode terminal 72, the second common electrode terminal 74, The individual electrode terminal 70 and the individual electrode 64 are electrically connected. In addition, the first common electrode terminal 72 and the first common electrode 66 are electrically connected via a conductor (not shown) disposed through the first piezoelectric sheet 58, and the second common electrode terminal 72 and the first common electrode 66 are electrically connected to each other. The electrode terminal 74 and the second common electrode 68 are electrically connected via a conductor (not shown) disposed through the first piezoelectric sheet 58 and the second piezoelectric sheet 60.

  The method for producing the laminate of the piezoelectric sheets 58, 60, 62 is not particularly limited, and “green sheet method”, “aerosol deposition method”, “chemical vapor deposition method” or the like is arbitrarily selected. In this embodiment, the “conductive pattern” that constitutes each of the individual electrode 64, the individual electrode terminal 70, the first common electrode terminal 72, and the second common electrode terminal 74 is an upper surface. The “first green sheet” formed on the substrate, the “second green sheet” formed on the upper surface with the “conductive pattern” forming the first common electrode 66, and the “conductive layer” forming the second common electrode 68. A “green sheet method” is employed in which a “third green sheet” having a “pattern” formed on the upper surface is laminated and fired. As a method for forming each of the “conductive patterns”, a “screen printing method” in which a “conductive paste” made of a metal material containing Ag—Pd or the like is screen-printed on the upper surface of the “green sheet” is employed. ing.

  Further, in this embodiment, the actuator unit 22 provided with two common electrodes 66 and 68 for one individual electrode 64 is used, but this actuator unit 22 is only an example of “pressure applying means”. For example, an actuator provided with one common electrode for one individual electrode may be used, or a bubble contained in ink in the pressure chamber is heated and expanded by a heating resistor to discharge pressure to the ink. May be given.

[Method of manufacturing ink discharge head]
When manufacturing the ink discharge head 10 (FIGS. 2 and 3), first, as shown in FIG. 6, the laminate 36 and the actuator unit 22 constituting a part of the flow path unit 20 are integrally joined. The head base member 80 and the composite plate 38 constituting another part of the flow path unit 20 are manufactured separately, and then the composite plate 38 is attached to the head base member 80 as shown in FIG. Join using an adhesive or the like.

  Hereinafter, the “manufacturing process of the head substrate 80”, “manufacturing process of the composite plate 38”, and “joining process of the composite plate 38 to the head substrate 80” will be described.

<Manufacturing process of head substrate 80>
When manufacturing the head substrate 80 (FIG. 6), first, “holes” are formed by etching in each of three holeless plates (not shown) made of a metal material such as stainless steel. A cavity plate 26, a base plate 28, and a manifold plate 30 are formed, and these are joined with an adhesive to form a laminate 36. Then, the actuator unit 22 is bonded to the upper surface of the laminate 36 with an adhesive.

  The cavity plate 26, the base plate 28, and the manifold plate 30 can be bonded to each other by “diffusion bonding” in which, in addition to “adhesion bonding”, metal molecules of each plate are bonded to each adjacent plate by thermal diffusion. You may make it use.

<Manufacturing process of composite plate 38>
When the composite plate 38 (FIGS. 3 and 6) is manufactured, first, as shown in FIG. 8, it is made of a synthetic resin material such as polyimide, and is substantially the same as the shape when the composite plate 38 is developed on a plane. A substantially square holeless plate 82 having the same shape is prepared. The holeless plate 82 is a flat member having a filter plate region 84 corresponding to the filter plate 24, a nozzle plate region 86 corresponding to the nozzle plate 32, and a connecting portion region 88 corresponding to the connecting portion 34. In FIG. 8, the “boundary lines” of these regions 84, 86, and 88 are indicated by alternate long and short dash lines L1 and L2.

  The holeless plate 82 means a plate in which neither the filter hole 48 nor the nozzle hole 56 is formed. When the filter hole 48 and the nozzle hole 56 are formed in the holeless plate 82, the holeless plate 82 The no plate 82 changes to the composite plate 38 (FIG. 6). Therefore, in FIG. 8, the filter holes 48 and the nozzle holes 56 are indicated by “two-dot chain lines” as “virtual lines”.

  When the preparation of the holeless plate 82 is completed, the holeless plate 82 is placed on a support base of a laser processing apparatus (not shown), and a plurality of filter holes 48 as “components” are provided at predetermined positions of the holeless plate 82. The plurality of nozzle holes 56 as “components” are laser processed. Since the diameter of the filter hole 48 formed in this step is about 7 to 15 μm and the diameter of the nozzle hole 56 is about 15 to 30 μm, these can be formed in the same process using the same processing apparatus. it can. Therefore, compared with the case where the plurality of filter holes 48 and the plurality of nozzle holes 56 are formed in separate steps, the manufacturing process can be simplified and the manufacturing cost can be greatly reduced.

  The method of forming the filter holes 48 and the nozzle holes 56 is not limited to the “laser processing method”, but depends on the material of the holeless plate 82 (FIG. 8). “Method” or the like may be appropriately selected and used. However, it is preferable to use the “laser processing method” in terms of obtaining high processing accuracy, and it is particularly preferable to use the “excimer laser processing method”.

In this embodiment, the filter hole 48 and the nozzle hole 56 corresponding to one ink discharge head 10 are formed on one plate 82 without holes. By forming a filter hole 48 and a nozzle hole 56 corresponding to each of the plurality of ink ejection heads 10 and cutting and dividing the assembly of composite plates obtained thereby, a plurality of composite plates 38 are formed simultaneously. It may be.
<Joint Process of Composite Plate 38 to Head Base Material 80>
When the composite plate 38 is bonded to the head substrate 80, an adhesive is applied to at least one of these bonding surfaces, and then a plurality of nozzle holes 56 of the nozzle plate 32 are formed as shown in FIG. The formed region (hereinafter referred to as “nozzle region”) B is bonded to the lower surface of the head substrate 80. At this time, in order to obtain the “discharge performance” as designed, it is necessary to accurately determine the position of the nozzle hole 56 with respect to the discharge flow path 54. Therefore, it is desirable to use a dedicated positioning jig (not shown). .

  When the joining of the nozzle plate 32 (including the nozzle region B) to the lower surface of the head base member 80 is completed, the composite plate 38 is moved in two stages along two “folding curves” as indicated by arrows in FIG. The filter plate 24 (including the filter region A) is bonded to the upper surface of the head substrate 80 while the filter hole 48 of the filter plate 24 is positioned at the inlet 46 of the ink flow path R. At this time, since the positioning of the nozzle hole 56 with respect to the discharge channel 54 is performed first, there is a possibility that an error may occur in the positioning accuracy of the filter hole 48 with respect to the inlet 46, but the area of the filter region A is the inlet 46. Therefore, the error can be absorbed in the filter region A, and the aperture ratio of the filter hole 48 at the inlet 46 can be ensured as designed regardless of some errors. .

  In FIG. 7, two “folding curves” are indicated by alternate long and short dash lines L <b> 1 and L <b> 2.

[How to use ink discharge head]
When using the ink discharge head 10, as shown in FIG. 9, the ink discharge head 10 is mounted in the head mounting hole 92 of the head holder 90 constituting the carriage 14 (FIG. 1), and the outer periphery of the ink discharge head 10 is A potting agent 94 is filled into a gap S formed between the surface and the inner peripheral surface of the head mounting hole 92. In addition, an ink supply pipe 96 is attached to the inlet 46 of the ink flow path R in the ink discharge head 10, and a flexible printed wiring board (not shown) on which a driver IC is mounted is disposed on the surface of the actuator unit 22. The corresponding conductive wiring of the flexible printed wiring board is electrically connected to each of the terminal 70, the first common electrode terminal 72, and the second common electrode terminal 74 (FIG. 2). The ink sub-tank 18 (FIG. 1) is connected to the ink supply pipe 96, and the flexible printed wiring board is connected to a control unit (not shown) of the printer main body.

  When the ink sub tank 18 (FIG. 1) is connected to the ink supply pipe 96, the ink in the ink sub tank 18 is supplied from the inlet 46 to the ink flow path R through the ink supply pipe 96. At this time, since the ink passes through a plurality of filter holes 48 provided so as to correspond to the inlet 46, foreign matter or bubbles in the ink can be captured by the filter hole 48. It is possible to prevent “clogging” and “decrease in discharge performance due to bubbles”.

  When printing an image, a driving voltage is selectively applied from the flexible printed wiring board to the plurality of individual electrodes 64 to generate a potential between the individual electrode 64 and the common electrodes 66 and 68. Then, an electric field acts on the “first active portion” sandwiched between the individual electrode 64 to which the drive voltage is applied and the common electrodes 66 and 68, and the “first active portion” is in the thickness direction (that is, the polarization direction). The piezoelectric sheets 58, 60, 62 are deformed so as to be convex downward. At this time, since the lower surface of the third piezoelectric sheet 62 which is the lowermost layer constitutes the inner upper surface of the pressure chamber 52, the lower surface is deformed so as to protrude to the inside of the pressure chamber 52. Is reduced. Therefore, a pressure is applied to the ink existing inside the pressure chamber 52 at a timing according to the driving voltage, and the ink pressurized by the pressure is ejected from the nozzle hole 56. When ink is ejected from the nozzle hole 56, a negative pressure is generated in the ink flow path R, so that the ink in the ink supply pipe 96 is drawn into the ink flow path R through the filter hole 48 and the inlet 46.

(Second Embodiment)
[Configuration of ink discharge head]
FIG. 10 is a front view showing the configuration of the composite plate 100 used in the ink ejection head (not shown) according to the second embodiment of the present invention.

  The ink ejection head according to the second embodiment is different from the ink ejection head 10 according to the first embodiment in the configuration of the composite plate 100, and the other configuration is the same as that of the ink ejection head 10. That is, in the ink ejection head according to the second embodiment, as shown in FIG. 10, the surface of the filter area A in the filter plate 24 (that is, the upstream surface with respect to the ink flow) and the nozzle in the nozzle plate 32. The surface of the region B (that is, the surface on the side where the discharge port of the nozzle hole 56 is opened) is subjected to liquid repellent treatment and is positioned at the boundary between the filter plate 24 and the nozzle plate 32 and the connecting portion 34. Folding grooves 102a and 102b are formed in the “folding portion” along the “folding lines (alternate chain lines L1 and L2 in FIG. 10)”.

  According to this ink discharge head (not shown), the surface of the filter region A is subjected to a liquid repellent treatment, and therefore ink (water-based ink, oil-based ink, or solvent-based ink) may be used on the surface. ) Can be repelled, and air bubbles mixed in the ink can be trapped efficiently by strongly adhering to the surface. Further, since the liquid repellent treatment is performed on the surface of the nozzle region B, it is possible to prevent ink ejected from the nozzle hole 56 from adhering to the surface as “dirt”. Since the composite plate 100 can be easily and accurately bent in the grooves 102a and 102b, the “workability” and “processing accuracy” of the bending process can be improved.

  The “liquid repellency treatment on the surface of the filter area A”, the “liquid repellency treatment on the surface of the nozzle area B”, and the “processing of the grooves 102 a and 102 b” have different effects. Need not be employed at the same time, and either one or two may be selectively employed.

[Method of manufacturing ink discharge head]
When manufacturing the ink ejection head according to the second embodiment, a substantially square holeless plate (not shown) having substantially the same shape as that obtained when the composite plate 100 is developed on a plane is prepared. A liquid repellent treatment is applied to one surface of the plate. That is, at least the surface of the portion that becomes the filter region A and the surface of the portion that becomes the nozzle region B are subjected to a liquid repellent treatment such as “silicone treatment” or “fluorine treatment”. At this time, if the surface of the portion that becomes the connecting portion 34 is subjected to a liquid repellent treatment, the adhesion of the potting agent 94 filled in the gap S (FIG. 9) deteriorates. "Function" may be impaired. Therefore, in this embodiment, the surface of the portion that becomes the connecting portion 34 is not subjected to the liquid repellent treatment.

  After the liquid-repellent treatment is performed on the surface of the holeless plate, the composite plate 100 (FIG. 10) is formed by forming the filter hole 48, the nozzle hole 56, and the grooves 102a and 102b on the holeless plate. The method for forming the filter hole 48, the nozzle hole 56, and the grooves 102a and 102b is appropriately selected from “laser processing method”, “etching method”, “electroforming method”, etc., as in the first embodiment. Can be used. In addition, since the process of joining the composite plate 100 (FIG. 10) to the head base material 80 (FIG. 6) is the same as the process (FIG. 7) in 1st Embodiment, description here is abbreviate | omitted.

  According to this manufacturing method, since the filter holes 48 and the nozzle holes 56 are formed after the liquid-repellent treatment is performed on the surface of the holeless plate, the inner peripheral surfaces of the filter holes 48 and the nozzle holes 56 are repelled. Liquid treatment is not performed, and adverse effects due to the liquid repellent treatment can be prevented. For example, it is possible to prevent the liquid surface (meniscus) from retreating due to the liquid repellent treatment on the inner peripheral surface of the nozzle hole 56, and it is possible to prevent the ink ejection operation from becoming unstable. Further, it is possible to prevent a decrease in liquid permeability due to the liquid repellent treatment on the inner peripheral surface of the filter hole 48.

(Third embodiment)
[Configuration of ink discharge head]
FIG. 11 is a front view showing the configuration of the composite plate 104 used in the ink ejection head (not shown) according to the third embodiment of the present invention.

  The ink ejection head according to the third embodiment has four ink flow paths corresponding to four colors of ink of black (BK), magenta (M), yellow (Y), and cyan (C). This is different from the ink discharge head 10 according to the first embodiment having one ink flow path R corresponding to one color ink, and the other configuration is the same as that of the ink discharge head 10. That is, in the ink ejection head according to the third embodiment, as shown in FIG. 11, each of the filter plate 24, the nozzle plate 32, and the connecting portion 34 is formed corresponding to each of the four ink flow paths, The filter plate 24 is formed with the filter holes 48 of the four ink flow paths, and the nozzle plate 32 is formed with the nozzle holes 56 of the four ink flow paths.

[Method of manufacturing ink discharge head]
When manufacturing the ink ejection head according to the third embodiment, a substantially square holeless plate (not shown) having substantially the same shape as that obtained when the composite plate 104 is developed on a plane is prepared. The composite plate 104 (FIG. 11) is created by forming the filter holes 48 and the nozzle holes 56 of the four ink flow paths in the same manner as in the first embodiment.

  In the third embodiment, the number of filter holes 48 and nozzle holes 56 is four times that in the first embodiment, but these can be formed in the same process using the same processing apparatus. The process is not complicated.

(Fourth embodiment)
[Configuration of ink discharge head]
FIG. 12 is a cross-sectional view illustrating a state where the ink discharge head 110 according to the fourth embodiment of the present invention is mounted on the head holder 112, and FIG. 13 illustrates the configuration of the composite plate 114 used in the ink discharge head 110. It is a front view.

  In the ink discharge head 110 according to the fourth embodiment, the inlet 46 of the ink flow path R is provided “on the side” of the ink introduction flow path 40. The ink discharge head 10 is different from the ink discharge head 10 according to the first embodiment, and the other configuration is the same as that of the ink discharge head 10. That is, in the ink ejection head 110 according to the fourth embodiment, as shown in FIG. 12, the holes 28a and 30a formed in the base plate 28 and the manifold plate 30 are communicated in the thickness direction, thereby causing the ink introduction flow. A path 40 is configured, and an inner upper surface of the ink introduction channel 40 is configured by the cavity plate 26, and an inner lower surface of the ink introduction channel 40 is disposed between the manifold plate 30 and the nozzle plate 32. The lower surface configuration plate 116 is formed. An inlet 46 for the ink flow path R is provided on the side of the ink introduction flow path 40, and a plurality of filter holes 48 formed in the filter plate 24 are disposed so as to correspond to the inlet 46. Further, a joining plate 118 formed continuously with the filter plate 24 is joined to the upper surface of the cavity plate 26. In the state where the ink discharge head 110 is mounted on the head holder 112, the ink supply pipe 120 is attached to the inlet 46 of the ink flow path R.

[Method of manufacturing ink discharge head]
When manufacturing the ink ejection head 110 according to the fourth embodiment, a substantially square holeless plate (not shown) having substantially the same shape as that obtained when the composite plate 114 is developed on a plane is prepared. The composite plate 114 (FIG. 13) is created by forming the filter hole 48 and the nozzle hole 56 in the same manner as in the first embodiment with respect to the non-existing plate.

  In the fourth embodiment, as shown in FIG. 13, since the filter plate 24 is provided between the joining plate 118 and the nozzle plate 32, the position where the filter hole 48 is formed is different from that of the first embodiment (FIG. 8). Although different, the filter hole 48 and the nozzle hole 56 can be formed in the same process using the same processing apparatus, and the manufacturing process can be simplified as in the first embodiment.

(Fifth embodiment)
[Configuration of ink discharge head]
FIG. 14 is a cross-sectional view showing a state where the ink discharge head 130 according to the fifth embodiment of the present invention is mounted on the head holder 132, and FIG. 15 shows the configuration of the composite plate 134 used in the ink discharge head 130. It is a front view.

  The ink ejection head 130 according to the fifth embodiment has the ink introduction channel 40 disposed at both ends in the sub-scanning direction Y in the common ink chamber 42 (FIG. 2). This is different from the ink ejection head 10 according to the first embodiment disposed at one end, and the other configuration is the same as that of the ink ejection head 10. That is, in the ink ejection head 130 according to the fifth embodiment, as shown in FIG. 14, one ink introduction channel 40 is provided at each end of the common ink chamber 42 in the sub-scanning direction Y. An inlet 46 of the ink flow path R is formed in the upper part of each of the two ink introduction channels 40, and a plurality of filter holes 48 formed in the filter plate 24 are arranged so as to correspond to the two inlets 46, respectively. Has been. In the state where the ink discharge head 130 is attached to the head holder 132, the ink supply pipe 96 is attached to each of the two inlets 46.

[Method of manufacturing ink discharge head]
When manufacturing the ink ejection head 130 according to the fifth embodiment, a substantially square holeless plate (not shown) having substantially the same shape as when the composite plate 134 is developed on a plane is prepared. Then, the composite plate 134 (FIG. 15) is formed by forming the nozzle hole 56 and the filter hole 48 corresponding to each of the two inlets 46 with respect to the plate without holes by the same method as in the first embodiment. Create

  In the fifth embodiment, as shown in FIG. 15, since the filter plates 24 are provided on both sides of the nozzle plate 32, the number of filter holes 48 is twice that of the first embodiment. Since the nozzle hole 56 can be formed in the same process using the same processing apparatus, the manufacturing process is not complicated.

(Sixth embodiment)
[Configuration of ink discharge head]
FIG. 16 is a cross-sectional view showing a state where the ink discharge head 140 according to the sixth embodiment of the present invention is mounted on the head holder 142, and FIG. 17 shows the configuration of the composite plate 144 used in the ink discharge head 140. It is a front view.

  The ink ejection head 140 according to the sixth embodiment is different from the ink ejection head 10 according to the first embodiment that does not have the nozzle protection plate 146 in that the nozzle protection plate 146 is joined to the lower surface of the nozzle plate 32. Other configurations are the same as those of the ink discharge head 10. That is, in the ink ejection head 140 according to the sixth embodiment, as shown in FIGS. 16 and 17, the nozzle protection plate 146 having the nozzle protection part 146 a as a “component” is connected to the filter plate via the connection part 34. The nozzle protection plate 146 is joined to the lower surface of the nozzle plate 32 (FIG. 16). The nozzle protection part 146 a is a part that protrudes downward from the discharge port of the nozzle hole 56 around the nozzle hole 56, and is a peripheral part of the protection part formation hole 146 b that is formed in the nozzle protection plate 146 and is substantially circular in plan view Is the nozzle protection part 146a.

  When a jam occurs in the conveyance path for conveying the paper 16 (FIG. 1) when the ink ejection head 140 (FIG. 16) is used, the curved paper 16 between the conveyance rollers contacts the lower surface of the ink ejection head 140. Since the lower surface of the ink discharge head 140 is composed of the nozzle protection plate 146, the paper 16 comes into contact with the nozzle protection portion 146 a around the nozzle hole 56. Therefore, the nozzle hole 56 is not damaged by the paper 16, and the discharge performance can be prevented from being lowered due to the damage of the nozzle hole 56.

[Method of manufacturing ink discharge head]
When manufacturing the ink ejection head 140 according to the sixth embodiment, a substantially square holeless plate (not shown) having substantially the same shape as when the composite plate 144 is developed on a plane is prepared. By forming the filter hole 48 and the protective part forming hole 146b on the non-plate by the “laser processing method”, the “etching method”, the “electrocasting method”, the “press processing method” or the like, the nozzle protective part 146a is formed. A composite plate 144 (FIG. 17) is prepared. Then, an area (hereinafter referred to as “protection part area”) C in which the nozzle protection part 146a of the nozzle protection plate 146 is formed is joined to the lower surface of the nozzle plate 32 in the head substrate 148 (FIG. 16), and then the composite plate 144 Is folded in two stages along two “folding curves (dashed lines L1 and L2 in FIG. 17)”, while the filter hole 48 is positioned at the inlet 46 of the ink flow path R, the filter plate 24 is moved to the head. The substrate 148 is bonded to the upper surface of the cavity plate 26.

  In the sixth embodiment, the “components” formed in different regions partitioned by the “folding curve” in the composite plate 144 are the “filter hole 48” and the “nozzle protection part 146a”, and the “component” Is different from the first to fifth embodiments in which the “filter hole 48” and the “nozzle hole 56”, the two “components” can be formed in the same process using the same processing apparatus, The manufacturing process can be simplified as in the first to fifth embodiments.

  In addition, the planar view shape of the protection part formation hole 146b which comprises the nozzle protection part 146a is not specifically limited, In addition to a substantially circular shape, a substantially elliptical shape or a substantially rectangular shape may be used. Alternatively, one protective part forming hole 146b that accommodates all the nozzle holes 56 may be provided, and the peripheral part of the protective part forming hole 146b may be used as the nozzle protective part 146a.

FIG. 3 is a perspective view illustrating a usage state of the ink ejection head according to the first embodiment. FIG. 3 is a plan view illustrating a configuration of an ink discharge head according to the first embodiment. FIG. 3 is a cross-sectional view illustrating the configuration of the ink ejection head according to the first embodiment. FIG. 3 is a partial enlarged cross-sectional view illustrating a main part of the ink ejection head according to the first embodiment. (A) is the elements on larger scale which show the structure of the ink discharge head concerning 1st Embodiment, (B) is the VB-VB sectional view taken on the line in (A). It is sectional drawing which shows the structure of the composite plate used for manufacture of the ink discharge head which concerns on 1st Embodiment, and a head base material. It is process drawing which shows the process of joining a composite plate with respect to a head base material. It is a front view which shows the structure of the holeless plate used for manufacture of the ink discharge head which concerns on 1st Embodiment. FIG. 3 is a cross-sectional view illustrating a state where the ink discharge head according to the first embodiment is mounted on a head holder. It is a front view which shows the structure of the composite plate used for manufacture of the ink discharge head which concerns on 2nd Embodiment. It is a front view which shows the structure of the composite plate used for manufacture of the ink discharge head which concerns on 3rd Embodiment. It is sectional drawing which shows the state which mounted | wore the head holder with the ink discharge head which concerns on 4th Embodiment. It is a front view which shows the structure of the composite plate used for manufacture of the ink discharge head which concerns on 4th Embodiment. It is sectional drawing which shows the state which mounted | wore the head holder with the ink discharge head which concerns on 5th Embodiment. It is a front view which shows the structure of the composite plate used for manufacture of the ink discharge head which concerns on 5th Embodiment. It is sectional drawing which shows the state which mounted | wore the head holder with the ink discharge head which concerns on 6th Embodiment. It is a front view which shows the structure of the composite plate used for manufacture of the ink discharge head which concerns on 6th Embodiment.

Explanation of symbols

A ... Filter area B ... Nozzle area R ... Ink flow path 10 ... Ink discharge head (liquid discharge head)
20 ... Channel unit 22 ... Actuator unit 24 ... Filter plate 32 ... Nozzle plate 34 ... Connection part 36 ... Laminate 38 ... Composite plate 40 ... Ink introduction channel 46 ... Ink channel inlet port 48 ... Filter hole 52 ... Pressure chamber 54 ... Discharge flow channel 56 ... Nozzle hole 80 ... Head base material 82 ... Plate without hole 100 ... Composite plate 102a, 102b ... Groove 104 ... Composite plate 110 ... Ink discharge head 114 ... Composite plate 130 ... Ink discharge head 134 ... Composite plate 140 ... Ink discharge head 144 ... Composite plate 146 ... Nozzle protection plate 146a ... Nozzle protection part 146b ... Protection part formation hole 148 ... Head base material

Claims (10)

At least a plurality of nozzle holes for discharging liquid, a plurality of pressure chambers individually connected to each of the nozzle holes, a pressure applying means for applying pressure to the liquid in the pressure chamber, and the pressure chamber A liquid discharge head comprising, as constituent elements, a liquid flow path for supplying a liquid to the nozzle holes and a plurality of filter holes provided so as to correspond to the inlets of the liquid flow paths,
The liquid discharge head, wherein the plurality of filter holes and at least one other component are formed in different regions separated by a folding line in one bent plate.   The liquid ejection head according to claim 1, wherein a plurality of the nozzle holes are formed in the plate as the other component.   3. The liquid ejection head according to claim 1, wherein a liquid repellent treatment is applied to a surface of a filter region in the plate where a plurality of filter holes are formed.   4. The liquid ejection head according to claim 1, wherein a groove is formed in the bent portion of the plate along a folding line. 5.   5. The liquid ejection head according to claim 1, wherein an area of the filter region is designed to be larger than an opening area of an inlet of the liquid channel. A plurality of nozzle holes for discharging liquid; a plurality of pressure chambers individually connected to the nozzle holes; a pressure applying means for applying pressure to the liquid in the pressure chamber; and the nozzles via the pressure chambers A liquid discharge head manufacturing method comprising: a liquid flow path for supplying a liquid to a hole; and a plurality of filter holes provided at an inlet of the liquid flow path,
(A) A head base material having a plurality of nozzles and a plurality of filter holes in a single holeless plate to form a composite plate, and a plurality of pressure chambers and liquid channels. Create
(B) bending the composite plate such that the plurality of nozzle holes and the plurality of filter holes are arranged in different regions partitioned by folding lines, and joining the composite plate to the head substrate; Manufacturing method of liquid discharge head.   In the step (b), the nozzle region where the plurality of nozzle holes are formed in the composite plate is joined to the head base material before the filter region where the plurality of filter holes are formed. A method for manufacturing a liquid discharge head according to claim 6.   8. The method of manufacturing a liquid discharge head according to claim 6, wherein in the step (a), a groove for bending is formed on the surface of the holeless plate. Prior to the step (a),
(C) The method of manufacturing a liquid discharge head according to any one of claims 6 to 8, wherein a liquid repellent treatment is performed on a surface of the holeless plate. In the step (b), the composite plate is bent so that a connecting portion is interposed between the nozzle region in which the plurality of nozzle holes are formed and the filter region in which the plurality of filter holes are formed. A connecting part is disposed on the side of the head base material,
The method of manufacturing a liquid ejection head according to claim 9, wherein in the step (c), a liquid repellent treatment is not performed on a surface of a portion serving as the connection portion in the holeless plate.

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