JP2010085507A - Exposure apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suitably keep the characteristic of an optical system by introducing a control system. <P>SOLUTION: An exposure apparatus includes a housing, having one optical element in an injection port; a first light quantity sensor 41, that is arranged near a light source and measures the optical quantity of the light source; a second light quantity sensor 45 for measuring the optical quantity having passed through an optical element around the substrate; an ambient temperature/humidity sensor (MT1) for measuring the temperature and the humidity outside the housing; internal temperature/humidity sensors (MT2 and MT3) for measuring the temperature and humidity inside the housing; an air-conditioning section 50 for conditioning air in the housing; a first determination section 97 for determining the lifetime period of the light source, based on the first light quantity sensor; a second determination section 98 for determining the quality of the characteristics of the optical element with the first determination section based on the second light quantity sensor, when the light source is within the lifetime period; and a third determination section 99 for determining whether setting change of the air conditioning section is required, based on the ambient temperature/humidity sensor and internal temperature/humidity sensors. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an exposure drawing apparatus that exposes and draws a pattern on a substrate such as an electronic circuit board, a glass substrate for a liquid crystal element, and a glass element substrate for a PDP, and maintains an exposure process stably by observing the state of an optical system. It relates to a control system.

  Electronic circuit boards (printed circuit boards) are mounted on electronic devices such as mobile phones, various mobile devices, and personal computers. Along with the miniaturization of these electronic devices, electronic circuit boards are required to have higher circuit integration, miniaturization of patterns such as wiring, connection lands, and vias, and thinner substrates. The exposure drawing apparatus for forming these thin and precise electronic circuit boards can form and evaluate a pattern stably and reliably while minimizing the change in the optical characteristics of the optical system in the apparatus. Equipment is required.

  As a cause of the change in the optical characteristics in the optical system, for example, there is a problem that the temperature of the sealed space rises due to thermal radiation of a light source installed in the sealed space in the exposure drawing apparatus, and the optical constant changes. In addition, there is a problem of dew condensation due to a temperature difference from the temperature outside the exposure drawing apparatus, and a problem of contamination of the optical system due to heat of the optical system and sublimation from the irradiated object. Furthermore, there is also a problem of temporal changes in optical characteristics depending on the usage time and environment of the exposure drawing apparatus.

  As shown in Patent Document 1, for the temperature management of the enclosed space, the refrigerant natural circulation heat exchange system is used, so that the surface of the evaporator can be adjusted to an appropriate temperature without condensation. As shown in Patent Document 2, the condensation due to the temperature difference from the outside air temperature is determined based on the measurement results of the temperature measuring resistor installed in the sealed chamber and the humidity measuring resistor installed in the open chamber. The dew condensation prevention device can be operated in anticipation of the dew condensation.

The contamination of the optical system is because the photosensitive material applied to the substrate reacts with the light emitted from the optical system, and a part of the photosensitive material sublimes and adheres to the optical system. In addition, depending on the environment where the optical system is installed, chemical foreign matters float by other processes, and these foreign matters adhere to the surface of the optical system, causing a decrease in light transmittance. Furthermore, a temporal change such as a decrease in the amount of light occurs depending on the usage time of the light source.
Japanese Patent Laid-Open No. 11-63561 JP-A-7-146268

  However, in practice, even if the optical characteristics change in the optical system of the exposure drawing apparatus or the optical system of the surface observation apparatus that forms a pattern on the electronic circuit board, the cause cannot be specified. In other words, it is difficult to determine whether the deterioration of the optical characteristics is due to contamination of the optical system, due to dew condensation, due to usage time, or whether these have been combined. There was a problem that it could not be maintained by control.

  As a means for solving the problem, an exposure drawing apparatus according to a first aspect includes a light source in a housing and a plurality of optical elements that guide light beams emitted from the light source to a substrate in a sealed space, and an outlet is provided in the housing. And one optical element is installed there. A first light amount sensor for measuring the light amount of the light source is installed in the vicinity of the light source inside the housing, and the amount of irradiation light is measured. A second light amount sensor is installed around the substrate outside the housing to measure the amount of exposure light via the optical element. An ambient temperature / humidity sensor that measures temperature and humidity is installed outside the housing, and an internal temperature / humidity sensor that measures temperature and humidity is installed inside the housing. The exposure drawing apparatus can perform exposure processing stably by monitoring these sensors. That is, the exposure drawing apparatus has a first determination unit that determines the lifetime of the light source by the first light amount sensor, and when the first determination unit determines that the lifetime is within the lifetime, the characteristics of the optical element are determined by the second light amount sensor. A second determination unit for determining whether the air conditioner is good or not, and a third determination for determining whether the setting of the air conditioning unit needs to be changed based on the ambient temperature / humidity sensor and the internal temperature / humidity sensor when the optical element is defective. Part.

  With this configuration, it can be determined whether the change in optical characteristics is due to contamination of the optical system, due to condensation, or due to usage time. For this reason, it can respond according to the change of an optical characteristic.

  In the exposure drawing apparatus of the second aspect, when the third determination unit described in the first aspect determines that the setting change of the air conditioning unit is unnecessary, the cause of the change in the optical characteristics is determined to be an optical element, It is characterized by displaying defective elements.

  In the exposure drawing apparatus of the third aspect, even if the third determination unit described in the first aspect determines that the setting of the air conditioning unit needs to be changed and the setting of the air conditioning unit is changed and a predetermined time elapses, the third determination unit When the determination unit determines that the setting of the air conditioning unit needs to be changed, the optical element is displayed as having the possibility of condensation.

  An exposure drawing apparatus according to a fourth aspect includes a first housing in which the housing according to the first aspect is divided into two and having a part of a plurality of optical elements, and a second housing having the remainder of the plurality of optical elements, And having a first internal temperature sensor in the first housing and a second internal temperature sensor in the second housing.

  In the exposure drawing apparatus according to the fifth aspect, an optical element is disposed at the exit of the first housing described in the fourth aspect, and similar optical elements are disposed at the entrance and exit of the second housing. It is characterized by. These optical elements are characterized by comprising an optical lens, an optical mirror, or an optical filter that transmits a specific wavelength.

  The exposure drawing apparatus of the present invention continuously monitors changes in optical characteristics of an optical system by a plurality of sensors during exposure drawing processing of a substrate, and monitors the installation environment of the exposure drawing apparatus and the temperature and humidity inside the optical system. Thus, exposure drawing processing can be performed stably in a state where the change in optical characteristics is kept within the minimum range.

<< First Embodiment >>
Hereinafter, embodiments of the exposure apparatus 100 and the main control unit 90 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing the overall configuration of the exposure apparatus 100.

<Configuration of exposure apparatus 100>
The exposure apparatus 100 is roughly divided into a housing 11, a gate-like structure 12, a first housing 20, a second housing 30, and a main control unit 90. On the housing 11, a gate-like structure 12 is installed and fixed. Two first housings 20 are installed on the gate-shaped structure 12, and one second housing 30 is installed inside the gate-shaped structure 12. The first housing 20 and the second housing 30 are each formed in a sealed box structure.

  A substrate placement table 15 is installed on the upper surface of the housing 11 to adsorb and fix the substrate SW. The substrate mounting table 15 is provided with a driving device (not shown) that can move in the horizontal direction of the XY plane, and moves in a space below the gate-like structure 12.

  The substrate mounting table 15 can be moved to the exposure position below the gate-like structure 12 to form a pattern on the substrate SW mounted on the substrate mounting table 15. Note that the driving device for the substrate mounting table 15 can move the substrate mounting table 15 to a precise position in the X-axis direction and the Y-axis direction of the housing by, for example, linear moving means. The driving device may use not only linear moving means but also moving means constituted by a ball screw, a slide way, a screw driving motor, and the like.

  The substrate SW to be placed on the substrate placement table 15 is about 600 mm in the X-axis direction and about 500 mm in the Y-axis direction, and the size of the substrate SW is not constant and various sizes of substrates SW can be used. A resist layer is formed on these substrates SW so that exposure drawing can be performed with ultraviolet light. The resist layer is formed on the substrate SW by applying a liquid resist to form a thin film and performing heat treatment, or attaching a photosensitive dry film.

  Alignment cameras AC are installed at two positions in front of the gate-like structure 12, and the position information of the substrate SW placed on the substrate placement table 15 is accurately read, and the main control unit 90 of the exposure apparatus 100 is read. I can tell you. The alignment camera AC may have a structure movable in the width direction (Y-axis direction) of the substrate SW, and the alignment camera AC can be moved to a desired position by linear driving or motor driving. In this embodiment, the alignment cameras AC are installed at two places. However, when the drawing pattern of the exposure image on the substrate SW is fine, the alignment camera AC may be increased to three places or more and the interval between the alignment marks may be narrowed. Absent.

  An external temperature / humidity sensor MT <b> 1 is installed on the outer periphery of the exposure apparatus 100. The external temperature / humidity sensor MT1 measures the temperature and humidity outside the exposure apparatus 100, and transmits the measurement result to the main controller 90. The external temperature / humidity sensor MT1 is attached to a location in the gate-like structure 12 that is not affected by the temperature of the first housing 20 and the second housing 30, and measures the temperature and humidity of the surrounding environment of the gate-like structure 12. ing. The external temperature / humidity sensor MT1 only needs to be able to transmit the temperature and humidity to the control means with electrical signals, and the structure of the detector or the measurement method is not particularly limited.

  The first housing 20 has an illumination optical system formed therein, and the first housing 20a and the first housing 20b having the same configuration are installed so that the substrate SW having a large area can be exposed. is doing. The first housing 20a and the first housing 20b are individually controlled by the main control unit 90. Since the 1st housing 20a and the 1st housing 20b are the same structures, when distinction is not required, it demonstrates as the 1st housing 20. FIG.

  A projection optical system including the first projection lens 33, the third reflection mirror 34, the DMD element 36, the second projection lens 37, and the like is disposed in the second housing 30. The eight light beams IL branched into four from the first housing 20a and the first housing 20b are formed into a pattern and projected onto the substrate SW. In the following description of the second housing 30, a case where four light beams IL from the first housing 20a are used as a representative is shown, but the first housing 20b has the same configuration.

  FIG. 2 is a configuration diagram showing details of the first housing 20. The first housing 20 is formed in a sealed box shape. The first housing 20 includes a light source 21, a first reflecting mirror 22, a first condenser lens 23, a second reflecting mirror 24, a fly-eye lens 25, and an elliptical mirror 26. And a shutter 27, a second condenser lens 28, an aperture 29, a first light quantity sensor 41, and an exit window 42.

  As the light source 21, a UV lamp that emits ultraviolet light in which various wavelengths from 365 nm to 440 nm are mixed is used. The UV lamp may be a high pressure mercury lamp, a xenon lamp, or a flash lamp.

  The light beam IL generated from the light source 21 travels in one direction by an elliptical mirror 26 that reflects in the irradiation direction, changes direction by the first reflecting mirror 22, and passes through the first condenser lens 23 and the shutter 27 to be a second reflecting mirror. The traveling direction is changed to the substrate SW by 24 and further corrected to parallel light by the fly-eye lens 25. The light beam IL corrected to parallel light is branched into four by the second condenser lens 28 and the aperture 29 and is emitted from the emission window 42. A first light quantity sensor 41 is installed between the first reflection mirror 22 and the first condenser lens 23 to measure the light quantity of the light beam IL generated from the light source 21. That is, the optical path from the generation of the light beam IL until it is emitted from the exit window 42 is the configuration of the first optical system and is in the sealed first housing 20. The exit window 42 may be formed of a transparent single plate or an optical element such as a lens.

  The shutter 27 has a role of shielding until the light amount is stabilized after a predetermined time has elapsed since the power of the UV lamp is turned on, and a role of shielding the period when the exposure of the substrate SW is unnecessary. The shielding of the light beam IL of the UV lamp also serves to prevent deterioration of the optical system and temperature rise due to ultraviolet rays.

  An internal temperature / humidity sensor MT2 is installed in the first housing 20. The internal temperature / humidity sensor MT2 measures the temperature and humidity inside the first housing 20, and transmits the measurement result to the main control unit 90. The internal temperature / humidity sensor MT2 is only required to be transmitted to the control means by an electrical signal, and the structure of the detector or the measurement method is not particularly limited.

  In addition, an air supply pipe 51 and an exhaust pipe 52 are connected to the first housing 20, and each is connected to an air conditioner 50 to keep the temperature and humidity inside the first housing 20 constant.

  FIG. 3 is a perspective view of the second housing 30, and representatively shows a case where four light beams IL from the first housing 20a are incident. In the second housing 30, the light beam IL branched into four systems by the first optical system of the first housing 20 is controlled by a plurality of lens groups, so that an accurate pattern can be formed and irradiated onto the substrate.

  The second housing 30 includes a first reflection mirror 31, a second reflection mirror 32, a first projection lens 33, a third reflection mirror 34, a composite mirror 35, a DMD (Digital Micro-mirror Device) element 36, a second projection lens 37, An entrance window 43 and an exit window 44 are included.

  Incident light from the first optical system enters the second housing 30 through the incident window 43 and is branched into four by the first reflecting mirror 31. The four light beams IL1 to IL4 light IL are expanded in the direction of the first projection lenses 33-1 to 33-4 by the second reflecting mirrors 32-1 to 32-4. Since the four light beams IL pass through the optical components of the same elements, the light path will be described as a representative with the light beam IL1. The light beam IL1 changes its optical path in the Y-axis direction by the second reflecting mirror 32-1, and then enters the first projection lens 33-1. Next, the traveling direction is changed to the ground direction (− by the third reflecting mirror 34-1). Expand in the Z-axis direction). The light beam IL1 is controlled by the DMD element 36-1 by the composite mirror 35-1, and reflects the light beam IL corresponding to a predetermined pattern. The light beam IL1 controlled by the DMD element 36-1 passes through the emission window 44 via the second projection lens 37-1, and is irradiated onto the substrate SW. That is, the optical path from the time when the light beam IL is incident from the incident window 43 to the time when it is emitted from the exit window 44 is the configuration of the second optical system and is in the sealed second housing 30. The entrance window 43 and the exit window 44 may be formed of a single plate made of a transparent material, or may be formed of an optical element such as a lens of the second projection lenses 37-1 to 37-4.

  An internal temperature / humidity sensor MT3 is installed inside the sealed second housing 30. The internal temperature / humidity sensor MT3 measures the temperature and humidity inside the second housing 30 in the same manner as the internal temperature / humidity sensor MT3, and transmits the measurement result to the main control unit 90. The second housing 30 in FIG. 3 shows four second optical systems in order to explain the second optical system of the light beam IL from the first housing 20a, but eight systems as shown in FIG. The second optical system may be installed in the second housing 30.

  Further, the air supply pipe 53 and the exhaust pipe 54 are connected to the second housing 30 in the same manner as the first housing 20, and are connected to the air conditioner 50 to keep the temperature and humidity inside the second housing 30 constant. The air conditioner 50 may use the same air conditioner 50 as long as the air supply pipe 51 and the exhaust pipe 52 of the first housing 20 and the air supply pipe 53 and the exhaust pipe 54 of the second housing 30 can be individually controlled. The air conditioner 50 may be prepared individually. An air conditioner that adjusts the temperature and humidity around the exposure apparatus 100 is generally an indoor air conditioner in a factory where the exposure apparatus 100 is installed.

  A second light quantity sensor 45 is installed at the front end of the substrate mounting table 15 in the Y-axis direction. The second light quantity sensor 45 can be disposed under the exit window 44 by moving the substrate mounting table 15, and the light quantity of the four light beams IL that have passed through the second optical system is measured by the second light quantity sensor 45-. 1 to the second light quantity sensor 45-4 can be measured. The light beam IL having an appropriate amount of light is irradiated onto the substrate SW by the movement of the substrate mounting table 15, and the resist on the substrate can be exposed.

<Main control unit 90>
FIG. 4 is a configuration diagram of an optical control system of the main control unit 90 that controls the exposure apparatus 100. The optical control system of the exposure apparatus 100 is controlled by the main control unit 90. The product data server 91 of the main control unit 90 stores product data of the substrate SW such as the shape, dimensions, pattern details, alignment mark positions, sizes, and numbers of the substrate SW to be loaded into the exposure apparatus 100. Yes. These product type data may be connected to an external server by communication. The main control unit 90 is connected to an operation display unit 92 for inputting and displaying the operation and control states. Further, the main control unit 90 includes an external temperature / humidity sensor MT1 that detects the temperature / humidity of the external environment around the alignment camera AC and the exposure apparatus 100, and an internal temperature / humidity sensor MT2 that detects the temperature / humidity inside the first housing 20. Information is communicated to the internal temperature / humidity sensor MT3 that detects the temperature and humidity inside the second housing 30.

  The first optical system controller 93 controls the switching of the light source 21 and records the usage time UT. The first optical system control unit 93 controls the shutter 27 to open the shutter only when necessary to suppress the exposure of excess exposure light. The second optical system control unit 94 can control the DMD element 36 to form the light beam IL in a desired pattern. The main controller 90 controls these optical controllers at a necessary timing to perform exposure drawing processing.

  Further, the main control unit 90 moves the substrate mounting table 15 to a predetermined position based on the position information of the alignment camera AC, thereby enabling exposure drawing processing at an accurate position.

  The air conditioning control unit 95 manages the air conditioner 50 and changes the set temperature or set humidity of the air conditioner 50 according to an instruction from the main control unit 90. Below, the main control part 90 which controls the specific air-conditioning control part 95 is demonstrated. An air conditioning control unit 95 is connected to the air conditioner 50 that supplies temperature-humidity controlled air to the first housing 20 and the second housing 30, and the main control unit 90 is connected to the air conditioning control unit 95 with a set temperature or set humidity. Has issued instructions. The main controller 90 acquires information of the external temperature / humidity sensor MT1, the internal temperature / humidity sensor MT2, and the internal temperature / humidity sensor MT3, and uses the humid air hx diagram shown in FIG. It is determined whether or not there is a possibility of condensation inside or outside the housing 30 and an instruction for the set temperature or set humidity of the air conditioner 50 is issued.

  For example, it is recommended that the exposure apparatus 100 equipped with the first optical system and the second optical system maintain the humidity of the room in which the first optical system and the second optical system are installed at 55% or 60% or less and the temperature between 20 ° C and 23 ° C. . As shown in FIG. 5, when the external temperature / humidity sensor MT1 becomes 30 ° C. due to an abnormality in the indoor air conditioner in which the exposure apparatus 100 is installed, if the humidity of the installation environment is 60%, the dry bulb In absolute humidity of temperature, 0.016 kg / kg D.D. A. Contains moisture. If the air temperature to the first housing 20 and the second housing 30 is simply maintained at 21 ° C. in that state, the humidity is almost saturated around the outer walls of the first optical system and the second optical system, The outer wall of the housing will be subject to condensation. That is, it means that the outside of the exit window 42 of the first housing 20 and the entrance window 43 and the exit window 44 of the second housing 30 are likely to be condensed.

  Conversely, the internal temperature / humidity sensor MT2 or the internal temperature / humidity sensor MT3 is heated to 30 ° C. due to an abnormality in the air conditioning controller 95 of the air conditioner 50 that blows air to the first housing 20 and the second housing 30. Nevertheless, when the external temperature / humidity sensor MT1 is maintained at 21 to 22 ° C. by the indoor air conditioner, the humidity is saturated around the inner walls of the first housing 20 and the second housing 30. Therefore, the dew condensation is likely to occur on the inner walls of the first housing 20 and the second housing 30. That is, the inside of the exit window 42 of the first housing 20 and the entrance window 43 and the exit window 44 of the second housing 30 is likely to be condensed.

  In particular, since the first housing 20 has the light source 21 as a heat generation source, it can easily become high temperature due to malfunction or failure of the air conditioner 50, so it is necessary to constantly monitor the internal temperature and humidity sensor MT2. Further, since the second housing 30 has the DMD element 36 that is easily affected by heat, it is necessary to always monitor the internal temperature / humidity sensor MT3.

  The main control unit 90 includes a first determination unit 97, a second determination unit 98, and a third determination unit 99. The first determination unit 97 determines the life characteristics of the UV lamp measured by the first light quantity sensor 41. The second determination unit 98 determines whether the light amount from the second light amount sensor 45 is within a threshold value. The third determination unit 99 determines whether there is a possibility of condensation based on the measurement results of the external temperature / humidity sensor MT1, the internal temperature / humidity sensor MT2, and the internal temperature / humidity sensor MT3.

Actually, when the external temperature / humidity sensor MT1 rises above a predetermined temperature, the sensitivity of the photosensitive material in the exposure apparatus 100 is affected, and the alignment camera AC has problems such as unstable observation accuracy. There is a fear. For this reason, it is desirable to issue warnings and warnings that prompt confirmation of the indoor air conditioner. Even if the temperature control is normal, if the humidity becomes 70% or more, for example, the possibility of condensation is displayed, and a warning and an alarm are issued so as to interrupt the environmental inspection and the exposure apparatus 100 operation. It is desirable. It is desirable that warnings and alarms are promptly urged to respond to the operator by sound, display on the operation display unit 92, lighting a warning indicator light, or the like.
<Change in optical system over time>

  Next, the change with time of the optical system will be described. The life of the UV lamp of the light source 21 of the first housing 20 is defined as the time during which the amount of light deteriorates to 70% from the amount of light when it is first turned on. For example, as shown in the graph of FIG. 6, it can be predicted that, for example, a UV lamp will reach the end of its life after 1600 hours have passed since its initial use. This change over time is not seen if the lamps are in the same lot, so that the state can be determined by periodically acquiring the light amount information with the first light amount sensor 41 from the time when the lamp is first turned on. It becomes. Note that the X axis in FIG. 6 is the usage time UT, and the Y axis is the relative illuminance RI of the light quantity of the first light quantity sensor 41.

  The short wavelength light beam IL, which uses the UV lamp of the light source 21 as the light source, transmits through the lenses, thereby changing the composition of the lens in sequence, and in particular, the transmittance of the UV light is deteriorated. It is also known that when a photosensitive material coated on the surface of the substrate SW is irradiated with a UV light beam IL, such as by exposing a pattern, some substances in the photosensitive material components are sublimated. This sublimated material often adheres to a member located above the substrate SW. For example, the sublimated material adheres to the exit window 44 of the second housing 30 of the present embodiment, and the transmittance of the optical system is increased. It is a cause of lowering. Therefore, by measuring the light amount of the light beam IL emitted by the second light amount sensor 45 installed on the substrate mounting table 15, it can be used as a guideline for maintenance of the second optical system. Since the second light quantity sensor 45 can individually measure the second optical system, it can determine whether some or all of the optical systems are malfunctioning.

  FIG. 7 is a graph showing the relative illuminance RI of the light amount detected by the second light amount sensor 45 from when the optical system of the exposure apparatus 100 is newly started. The X axis is the operating time OT, and the Y axis is the relative illuminance RI. For example, when the relative illuminance RI of the second light quantity sensor 45 decreases to 90%, for example, it is the timing for cleaning the optical system or replacing the optical system. In this case, the optical system is reviewed in 7500 hours from the initial use. Need to do.

  The main control unit 90 measures the light amount with the first light amount sensor 41 and the second light amount sensor 45 from the time when the exposure apparatus 100 is newly started to operate, and acquires the initial measurement value. Thereafter, by measuring at a predetermined time or each time the substrate SW is exchanged, it is possible to predict a change with time and life of the optical system by comparing with the data of the previous measurement. When the optical system changes with time or the predicted value of the lifetime changes suddenly, it indicates an abnormality of the apparatus, and it is possible to deal with the possibility of contamination, condensation, or failure of the optical system. That is, the main control unit 90 can determine the state of the lamp and the optical control system by analyzing the data of the first light amount sensor 41 and the second light amount sensor 45, and the operation display unit 92 of the exposure apparatus 100 is abnormal. Is displayed, and a warning light is turned on and an alarm sound is generated.

  FIG. 8 is a flowchart showing optical system control in the main control unit 90 of the exposure apparatus 100. Hereinafter, a description will be given according to the flowchart of FIG.

In step S11, the operator activates the exposure apparatus 100 and turns on the UV lamp.
In step S <b> 12, the main control unit 90 detects the light amount of the UV lamp by the first light amount sensor 41 after a predetermined warm-up time has elapsed. The main control unit 90 has a timing circuit that measures the usage time UT of the UV lamp, and measures and records the amount of light for each usage time UT.

  In step S <b> 13, the first determination unit 97 of the main control unit 90 determines whether the relative illuminance RI of the UV lamp measured by the first light quantity sensor 41 is a life characteristic. The main control unit 90 determines the relative illuminance RI of the UV lamp and the usage time UT. For example, if it is determined that the relative illuminance RI of the UV lamp is 70% or more and the usage time UT is within 1600 hours, the process proceeds to step S15. On the other hand, if it is determined that the relative illuminance RI of the UV lamp is 70% or less and the usage time UT has exceeded 1600 hours, the process proceeds to step S14. Further, the main control unit 90 moves to step S14 even when there is a movement deviating from the graph as compared with the graph shown in FIG.

  In step S14, when the relative illuminance RI of the UV lamp is 70% or less and the usage time UT has exceeded 1600 hours, the main control unit 90 displays “Replace UV lamp” on the operation display unit 92, which is necessary. If there is, the exposure apparatus 100 is stopped. Further, when the movement deviates from the graph of FIG. 6, “UV lamp check” is displayed to alert the operator. The main control unit 90 can predict the replacement time of the UV lamp.

  In step S <b> 15, the main control unit 90 moves the substrate placement table 15 and moves the second light quantity sensor 45 installed at the tip of the substrate placement table 15 below the emission window 44 of the second housing 30.

  In step S <b> 16, the main control unit 90 can measure the amount of light that has passed through the eight second optical systems by using the eight second light amount sensors 45. As described above, since the light beam IL travels from the first optical system of one system to the second optical system of the four systems, it is possible to identify an abnormal part based on the location where the abnormal value of the second light quantity sensor 45 is indicated. Is possible.

  In step S <b> 17, the second determination unit 98 of the main control unit 90 determines whether the relative illuminance RI of the second light quantity sensor 45 is within the threshold value. The main controller 90 determines the relative illuminance RI and the operation time OT of the light beam IL that has passed through the first optical system and the second optical system. For example, if the operating time OT of the optical system is within 8000 hours and the relative illuminance RI is 90% or more, the process moves to step S18. On the other hand, if the optical system operating time OT is within 8000 hours and the relative illuminance RI is 90% or less, the process moves to step S19. Further, the main control unit 90 proceeds to step S19 even when there is a movement deviating from the graph as compared with the graph shown in FIG.

  In step S18, the main controller 90 determines that the optical system is operating normally, and thus starts the exposure drawing process.

  In step S19, the main control unit 90 collects the measurement results of the external temperature / humidity sensor MT1, the internal temperature / humidity sensor MT2, and the internal temperature / humidity sensor MT3. Accordingly, the main control unit 90 can acquire information on the temperature and humidity of the installation environment of the exposure apparatus 100 and the temperature and humidity in the first housing 20 and the second housing 30.

  In step S20, the third determination unit 99 of the main control unit 90 determines whether the measurement results of the external temperature / humidity sensor MT1, the internal temperature / humidity sensor MT2, and the internal temperature / humidity sensor MT3 are normal values. Further, the third determination unit 99 compares the measured values of the external temperature / humidity sensor MT1 and the internal temperature / humidity sensor MT2 from the data of the humid air h-x diagram shown in FIG. By comparing the measured value with the humidity sensor MT3, it is determined whether there is a possibility of condensation. If the third determination unit 99 determines that there is no possibility of condensation, the process proceeds to step S24. If the third determination unit 99 determines that condensation is possible, the process proceeds to step S21. .

  In step S <b> 21, the main control unit 90 instructs the air conditioning control unit 95 to change the set temperature and humidity, and adjusts the air conditioner 50 that blows air to the first housing 20 or the second housing 30. The air conditioner 50 prevents condensation by changing the air flow rate of the air conditioner, supplying dry air, changing the set temperature, and the like. For example, if the humidity in the first housing 20 and the second housing 30 is 60% and the temperature is 30 degrees, the humidity of the installation environment of the exposure apparatus 100 is 60% and the temperature is around 25 degrees, the main control unit 90 is. The temperature in the first housing 20 and the second housing 30 is lowered.

  In step S22, the main control unit 90 changes the setting of the air conditioner 50, and compares whether the elapsed time since the start of air adjustment in the first housing 20 and the second housing 30 is within the time required for air adjustment. If it is within the time required for air adjustment, the process proceeds to step S23. On the other hand, if the time required for air adjustment is exceeded, the process returns to step S16, and the second light quantity sensor measures the amount of light that has passed through the optical system.

  In step S <b> 23, the main control unit 90 displays “possibility of condensation” on the operation display unit 92 and urges the operator to pay attention. If there is an abnormality in the measured value of the external temperature / humidity sensor MT1, the cause may be in the indoor air conditioner that is the installation environment of the exposure apparatus 100. Call attention.

  In step S24, the main control unit 90 displays “dirt in the optical system” on the operation display unit 92, and prompts the operator to pay attention to the inspection or cleaning of the optical system. For example, contamination of the optical system may occur when sublimates adhere to the exit window 42 of the first optical system, the entrance window 43 of the second optical system, or the exit window 44, or when the first optical system and the first 2 Deterioration of the optical system can be considered. For example, the main control unit 90 refers to the operation time of the optical system shown in FIG. 7 and urges attention to cleaning if it is within 7500 hours from the initial use, and checks and checks the optical system if it is 7500 hours or more from the initial use. Encourage exchange.

  The result of the main control unit 90 described above can be displayed on the operation display unit 92, and a means for transmitting information to the maintenance station via an external network can be taken. Further, since the change in the optical characteristics in the exposure apparatus 100 of the present invention depends on the deterioration of the optical system over time, the contamination, and the change in the indoor environment, the main controller 90 described above stably performs the exposure drawing process. Can be done.

  In the optical system of the present embodiment, the first optical system is housed in the first housing 20 and the second optical system is housed in the second housing 30, but the first optical system and the second optical system are housed in the same housing. Can be stored. In the optical system in this case, the number of parts of the optical system is reduced, and not only inspection and cleaning of the optical system are simplified, but also temperature and humidity control in the housing is simplified.

1 is a perspective view showing an overall configuration of an exposure apparatus 100. FIG. The block diagram which showed the detail of the 1st housing 20 is shown. 4 is a perspective view of a second housing 30. FIG. 2 is a configuration diagram of an optical control system of a main control unit 90 that controls the exposure apparatus 100. It is a humid air hx diagram. It is the graph which showed the time-dependent change of relative illumination intensity RI of a UV lamp. It is the graph showing relative illuminance RI of the 2nd light quantity sensor 45 from the time of newly starting operation of an optical system. 3 is a flowchart of optical system control in a main control unit 90.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Housing | casing 12 ... Gate-like structure 15 ... Board | substrate mounting table 20 ... 1st housing 21 ... Light source 22 ... 1st reflective mirror, 24 ... 2nd reflective mirror 23 ... 1st condenser lens, 28 ... 2nd condenser Lens 25 ... Fly-eye lens 26 ... Elliptical mirror 27 ... Shutter 29 ... Aperture 30 ... Second housing 31 ... First reflection mirror, 32 ... Second reflection mirror, 34 ... Third reflection mirror 33 ... First projection lens, 37 ... Second projection lens 35 ... Composite mirror 36 ... DMD element 41 ... First light quantity sensor 42, 44 ... Outgoing window 43 ... Incident window 45 ... Second light quantity sensor 50 ... Air conditioner 51, 53 ... Air supply pipe 52, 54 ... Exhaust pipe 90 ... Main control unit 91 ... Product data server 92 ... Operation display unit 93 ... First optical system control unit, 94 ... Second optical system Control unit 95 ... Air conditioning control unit 97 ... First determination unit, 98 ... Second determination unit, 99 ... Third determination unit 100 ... Exposure apparatus AC ... Alignment camera IL ... Light beam MT1 ... External temperature and humidity sensors MT2, MT3 ... Internal temperature Humidity sensor OT… Operating time RI… Relative illuminance SW… Substrate UT… Usage time

Claims (6)

In an exposure apparatus that forms a pattern on a substrate with light emitted from a light source,
A housing having the light source and a plurality of optical elements that guide the light beam emitted from the light source to the substrate;
A first light amount sensor disposed in the vicinity of the light source and measuring the light amount of the light source;
A second light amount sensor that measures the amount of light that has passed through the optical element outside the housing and around the substrate;
An ambient temperature and humidity sensor for measuring temperature and humidity outside the housing;
An internal temperature and humidity sensor for measuring the temperature and humidity in the housing;
An air conditioning unit for performing air conditioning in the housing;
A first determination unit that determines a lifetime of the light source based on the first light quantity sensor;
A second determination unit that determines whether the characteristics of the optical element are good or not based on the second light quantity sensor when the light source is within a lifetime;
A third determination unit that determines whether or not setting change of the air-conditioning unit is necessary based on the ambient temperature and humidity sensor and the internal temperature and humidity sensor when the optical element is defective;
An exposure apparatus comprising:   2. The exposure apparatus according to claim 1, wherein when the third determination unit determines that setting change of the air conditioning unit is unnecessary, the optical element is displayed as defective.   The third determination unit determines that the setting change of the air-conditioning unit is necessary, and the third determination unit needs to change the setting of the air-conditioning unit even if a predetermined time elapses in a state where the setting of the air-conditioning unit is changed. 3. The exposure apparatus according to claim 1, wherein if it is determined, the optical element is displayed as having a possibility of condensation. The housing has a first housing having the light source and a part of the plurality of optical elements, and a second housing having the rest of the plurality of optical elements,
4. The internal temperature / humidity sensor includes a first internal temperature sensor in the first housing and a second internal temperature sensor in the second housing. 5. The exposure apparatus described in 1. The exposure apparatus according to claim 4, wherein the optical element is disposed at an exit of the first housing, and the optical element is disposed at an entrance and an exit of the second housing. The exposure apparatus according to any one of claims 1 to 5, wherein the optical element includes an optical lens, an optical mirror, or an optical filter that transmits a specific wavelength.