JP2010084674A - Check valve for vacuum pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a check valve for a vacuum pump used as a power source of a brake servo unit for a vehicle or the like such as an automobile, which has a minimum number of part items, which is made up of the smallest number of parts and constructed highly compactly as a whole, and can generate a high vacuum state. <P>SOLUTION: The check valve for the vacuum pump includes a valve member A and a pump housing B. The valve member A comprises a nearly disc-shaped valve flat-shaped part 1 and a flat-shaped elastic connection flat-shaped part 2 having a nearly arc-shaped flexible part and formed around the valve flat-shaped part 1 at nearly regular spacings in the same shape, wherein at least the outer periphery of the valve flat-shaped part 1 is covered with a non-metallic elastic seal member 51. The pump housing B is connected to a pump chamber by an intake path 61, and has a valve chamber 7 in which an intake opening 72a is formed. The outer end part of the connection flat-shaped part 2 is fixed to the interior of the valve chamber 7, and the elastic seal member 51 is brought into contact with the circumference of the intake opening 72a and closes it. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is mainly used as a power source for a brake booster for a vehicle such as an automobile and the like, and has a minimum number of parts, makes the entire configuration extremely compact and creates a high vacuum state. The present invention relates to a check valve for a vacuum pump.

  Conventionally, as a power source for a vehicle brake booster or the like, a vacuum pump that generates a negative pressure source lower than the atmospheric pressure has been used. The following patent document 1 is mentioned as an example of the check valve of such a vacuum pump. In Patent Document 1, the check valve of the vacuum pump is constituted by a first valve casing, a valve element, an elastic member, and a second valve casing. By using the check valve configured as described above, it is possible to prevent the backflow of air and maintain a negative pressure state of a certain value or more.

JP-A-7-305682

  However, the check valve in Patent Document 1 has the following problems. First, the number of components has increased with the first valve casing, the valve element, the elastic member, the second valve casing, and the like. Next, it is difficult to improve the ultimate vacuum as a pump function. In detail, whether it is a piston type vacuum pump or a vane type vacuum pump, in the vacuum pump, the volume of the pump chamber is divided by the piston or the vane, and the maximum volume and the minimum volume in the operation of the pump. The volume of air of the difference is discharged.

  That is, the air in the pump chamber can be discharged by the operation of the pump, but the air in the volume of the check valve chamber adjacent to the pump chamber cannot be discharged regardless of the operation of the pump. The larger the volume of the check valve chamber, the lower the ultimate vacuum. To explain more clearly, even if the vacuum pump exhausts air, the air flows into the pump chamber from the check valve chamber adjacent to the pump chamber, which increases the pressure in the pump chamber. . Therefore, the larger the volume of the check valve chamber, the greater the amount of air flowing into the pump chamber, so that the ultimate vacuum becomes lower.

  And the elastic member (compression coil spring) of patent document 1 needs to ensure an elastic range, and since it has predetermined | prescribed height, the volume of a non-return valve chamber has also become large as it is. . Therefore, the ultimate vacuum cannot be increased, and a larger vacuum pump must be used to obtain a desired (same) ultimate vacuum. Next, although it is the same as the content mentioned above, the size (volume) of an elastic member (compression coil spring) and a valve has become large.

  Next, the air passage (gap) is a very narrow passage from the disclosed figure, and is a resistance to the entry and exit of air. Furthermore, if the gap is too large, the valve will tilt and normal operation as a check valve cannot be expected. As described above, there is a problem whether the gap G is narrowed or widened, and the check valve itself becomes the resistance of air, so that a larger vacuum pump is required.

  Next, since the valve element itself needs to support the load of the elastic member (compression coil spring), the valve element itself is required to have a certain degree of strength (hardness). That is, a soft material such as rubber is not formed because the valve is deformed, and a material having a certain degree of strength (hardness) such as a synthetic resin is essential. For this reason, the annular seal protrusion cannot be made of a soft material and must be made of a material having a certain degree of hardness. Therefore, a slight air leak occurs from the material, and the sealing performance is not perfect. The purpose (technical problem) of the present invention is to construct a check valve structure with a minimum number of parts, make the check valve itself extremely compact, greatly reduce the volume of the check valve chamber and achieve a high vacuum state Is to create.

  In view of the above, the inventors have intensively and intensively studied to solve the above-mentioned problems. As a result, the invention according to claim 1 has a substantially disc-shaped valve flat plate portion and a substantially arc-shaped bent portion and the valve flat plate portion. A valve member in which a non-metallic elastic seal member is coated on at least the outer periphery of the valve flat plate portion, and a pump. And a pump housing having a valve chamber in which a suction opening is formed, the outer end portion of the connecting flat plate portion is fixed in the valve chamber, and the elastic seal member is The above problem has been solved by providing a check valve for a vacuum pump that is closed in contact with the peripheral portion of the suction opening.

  According to a second aspect of the present invention, in the above-described configuration, a fixed end portion having a fixed hole is formed at an outer end portion of the connection flat plate portion, and the connection is made on the valve chamber side while penetrating the fixed hole. The above problem has been solved by providing a check valve for a vacuum pump provided with a fixing pin for fixing the flat plate portion in the valve chamber. According to a third aspect of the present invention, the above problem is solved by using a vacuum pump check valve in which the fixing pin is crimped and the fixed end portion of the valve member is fixed in the configuration described above.

  According to a fourth aspect of the present invention, in the above-described configuration, the fixing hole is a vacuum pump check valve in which a part of the fixing hole is opened outward. According to a fifth aspect of the present invention, in the above-described configuration, an annular flat plate portion is formed at an outer end portion of the connecting flat plate portion, and the valve flat plate portion serves as a center in the diameter direction of the annular flat plate portion. By using a valve, the above problems were solved. According to a sixth aspect of the present invention, in the above-described structure, an elastic fixing member is formed on the outer peripheral portion of the annular flat plate portion, and the elastic fixing member is fixed in the valve chamber in a substantially clamped state. The above-mentioned problem was solved by using a check valve.

  In the present invention, the valve member includes a flat plate-shaped valve flat plate portion, and a flat connecting plate portion having a substantially arc-shaped bent portion and formed in the same shape at substantially equal intervals around the valve flat plate portion. It is constructed, and at least the outer periphery of the valve flat plate portion is covered with a nonmetallic elastic seal member. An outer end of the connecting flat plate portion is fixed in the valve chamber, and the elastic seal member is elastically biased so as to abut on a peripheral portion of the suction opening portion and close.

  The elastic seal member is formed by covering the valve flat plate portion, and the valve flat plate portion is supported in the valve chamber by a plurality of elastic connecting flat plate portions. Therefore, when the vacuum pump is operated, the valve chamber becomes negative pressure, and the valve plate portion supported by the connecting plate portions having a plurality of elasticity is sucked to the pump chamber side (suction passage side), and the valve plate The elastic seal member is separated from the periphery of the suction opening together with the portion. This opens the suction opening and creates a vacuum in a device that requires a vacuum, such as a vacuum tank connected to a vacuum pump, for example.

  As described above, the valve member includes the valve flat plate portion, the connecting flat plate portion, the elastic seal member, and the like, and is combined into one. In particular, the connecting flat plate portion has elasticity, and also serves as a spring. Therefore, the valve member itself can be opened and closed, and the elastic seal member once separated from the periphery of the suction opening together with the valve flat plate portion is connected to the plurality of connecting flat plate portions at the same time as the vacuum pump is stopped. Therefore, the valve flat plate portion is operated to return to the original position. Thus, the suction opening can be closed by the elastic sealing member together with the valve flat plate portion, and the connecting flat plate portion also serves as a spring for this purpose.

  The connecting flat plate portion has a bent portion and is elastically very flexible, that is, easily deformed. In addition, when the elastic seal member closes the suction opening, the valve member is extremely thin and has a substantially single plate shape or a substantially flat plate shape. For this reason, the valve chamber for storing the valve member can be made into a small space with a very small depth including the space due to the movement of the valve plate portion of the valve member. Space can be realized.

  In the past, the return operation of the valve was often performed by a coil spring. However, in the present invention, the valve member itself has a connecting flat plate portion serving as a spring. The number of points can be reduced, and it is not necessary to secure a stretchable region of the coil spring in the valve chamber, so that the valve chamber can be made thinner.

  In the invention of claim 2, a fixed end portion having a fixing hole is formed at an outer end portion of the connecting flat plate portion, and the connecting flat plate portion is provided on the valve chamber side while penetrating the fixing hole. By providing the fixing pin for fixing in the valve chamber, the mounting of the valve member to the valve chamber can be simplified. In the invention of claim 3, the fixed pin is caulked and the fixed end portion of the valve member is fixed, so that the valve member can be mounted more firmly from the fixed pin. In addition, a dedicated mounting member can be eliminated. In the invention of claim 4, since the fixing hole is partially opened outward, the valve member can be mounted more easily by the fixing pin.

  According to a fifth aspect of the present invention, an annular flat plate portion is formed at an outer end portion of the connecting flat plate portion, and the valve flat plate portion is centered in the diameter direction so that the annular flat plate portion is fixed at an appropriate position in the valve chamber. Thus, the valve member can be installed in the valve chamber in a very stable state. The plurality of connecting flat plate portions are connected to the inner peripheral side of the annular flat plate portion, and the valve flat plate portion is located at the diameter center of the annular flat plate portion. Therefore, the valve flat plate portion is further accurately translated relative to the annular flat plate portion, and the opening / closing operation at the suction opening by the valve flat plate portion and the elastic seal member can be performed accurately and quickly.

  According to a sixth aspect of the invention, an elastic fixing member is formed on the outer peripheral portion of the annular flat plate portion, and the elastic fixing member is fixed in a substantially clamped state in the valve chamber so that the vacuum pump is operated. Can be prevented from being transmitted to the valve member. That is, the elastic fixing member covered with the annular flat plate portion is interposed between the valve chamber and the annular flat plate portion. Therefore, vibration during the operation of the vacuum pump is almost absorbed by the elastic fixing member, and vibration transmission to the annular flat plate portion can be minimized, and the valve flat plate portion and the elastic seal member operate stably. It serves as a check valve that can be used.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, a pump chamber 6 and a valve chamber 7 are formed in the pump housing B, and a valve member A is accommodated in the valve chamber 7. The valve member A is used as a check valve, and prevents back flow of air in the pump chamber 6. A vacuum tank 8 or the like is provided upstream of the suction port of the vacuum pump, and air in the vacuum tank is discharged by operating the vacuum pump. The valve member A as the check valve is provided for the purpose of preventing air from flowing backward from the vacuum pump toward the vacuum tank 8 when the vacuum pump is stopped.

  The valve member A has a plurality of embodiments. In any of the embodiments, the valve member A mainly includes a main member A1 and an elastic seal member 51. First, in the first embodiment, the main member A1 is composed of the valve flat plate portion 1, the connecting flat plate portion 2, and the fixed end portion 3, and is made of metal and integrally formed (FIGS. 2B and 3). (See (B)). The valve flat plate portion 1 is formed in a substantially disc shape, and the connecting flat plate portion 2 is substantially radial from the circular outer periphery of the valve flat plate portion 1, and each connecting flat plate portion 2 is the valve flat plate portion. 1 is formed so as to have a substantially spiral shape. [Refer FIG. 2 (B) and FIG. 3 (B)].

  The connecting flat plate portion 2 has at least one bent portion 21 that is bent in an arc shape or a curved shape. The arc shape is an arc shape such as a semicircle and an approximately (1/4) circle. Specifically, the connecting flat plate portion 2 has two bent portions 21 and 21, and the two bent portions 21 and 21 are substantially “S” -shaped in plan view. It is formed in a shape [see FIGS. 8B and 9B]. Moreover, it is preferable that the base part with the connection flat plate part 2 with respect to the said valve flat plate part 1 is made into the shape which continues so that it may orthogonally cross to the tangent of the said valve flat plate part 1. FIG.

  The plurality of connecting flat plate portions 2 have the same shape, and are formed at equal intervals from the outer periphery of the valve flat plate portion 1. The number of the connecting flat plate portions 2 is usually three. However, the number of connecting flat plate portions 2 may be two or more as long as the number is four or more. In the embodiment of the present invention, it is preferable to use three in consideration of the stability of the operation of the valve plate portion 1 and the optimum air flow rate. As described above, the connecting flat plate portion 2 is formed in an “S” shape, so that it has elasticity, is easy to bend (or easily deforms), and easily returns to its original shape. In particular, since the plurality of connecting flat plate portions 2, 2,... Are formed on the outer periphery of the valve flat plate portion 1 at the same interval and at the same shape, the valve flat plate portion 1 is easy to move in parallel along its central axis. It has a structure (see FIG. 9C).

  A substantially ring-shaped fixed end portion 3 is formed on the outer ends of the plurality of connecting flat plate portions 2, 2,..., That is, on the side opposite to the base portion with the valve flat plate portion 1 [FIG. FIG. 3 (B)]. The fixed end 3 is composed of a fixed plate portion 31 and a fixed hole 32. The valve plate portion 1 is equipped with the elastic seal member 51. The fixed plate portion 31 is a small area portion that swells flatly and partially around the outer end portion of the connecting flat plate portion 2. The fixed plate portion 31 is formed to be flush with the valve flat plate portion 1 and the connecting flat plate portion 2 in a state where no external force is applied.

  An elastic seal member 51 is mounted on the valve plate portion 1 [see FIGS. 2A, 2C to 2E, FIG. 3A]. The elastic seal member 51 has elasticity. It is a non-metallic material, such as rubber or elastic synthetic resin. There are two types of the elastic seal member 51. First, in the first type, the elastic seal member 51 is covered only on the outer periphery of the valve flat plate portion 1, and the central portion of the valve flat plate portion 1 is elastic. The seal member 51 is not covered and is referred to as a partial seal 51a. The partial seal 51a has a substantially donut shape (see FIGS. 2A and 3A).

  Next, the second type of the elastic seal member 51 is one in which the entire valve plate portion 1, that is, the entire front and back surfaces of the valve plate portion 1 is covered with the elastic seal member 51, and is referred to as an overall seal 51 b (see FIG. 4). ). In any type, a part of the base portion of the connecting flat plate portion 2 to the valve flat plate portion 1 is covered with the elastic seal member 51. However, the substantially whole portion of the connecting flat plate portion 2 is the elastic seal member. 51 is not covered. As a means for attaching the elastic seal member 51 to the valve flat plate portion 1, a covering means called a metal gasket is used in which rubber is baked on and covered with a metal plate. In particular, in the case where the elastic seal member 51 is a partial seal 51a, the cross-sectional shape is circular or elliptical (see FIGS. 2C to 2D).

  In the fixing hole 32, there is a type in which a cutting opening 32 a is formed so that a part of the fixing hole 32 communicates with the outside of the fixing plate portion 31. The fixing hole 32 is formed in a substantially U shape or C shape by the cut opening 32a. Further, the projecting pieces 32b and 32b may be formed from both end portions of the cutout opening 32a so that the cutout opening 32a is slightly narrower than the diameter of the fixing hole 32.

  As shown in FIG. 5, the pump housing B in the first embodiment includes a pump chamber 6 and a valve chamber 7. In the pump chamber 6, the vane 63 mounted inside is rotated by the rotation driving unit 62. At this time, the vane 63 rotates while sliding in the axial direction with respect to the rotation driving unit 62. The valve chamber 7 communicates with the pump chamber 6 through a suction path 61. Further, the vacuum pump communicates with the vacuum tank 8. Specifically, the valve chamber 7 and the vacuum tank 8 communicate with each other via the suction pipe 9 outside the vacuum pump.

  As shown in FIG. 1, the valve chamber 7 includes a valve chamber main body 71 and a valve chamber cover 72. The valve chamber cover portion 72 is detachable from the valve chamber 7, and a valve movable space 74 is formed between the valve chamber cover portion 72 and the valve chamber 7. The valve chamber cover portion 72 is formed with a connecting hook portion 72d so that it can be engaged with the valve chamber body portion 71 (see FIG. 5).

  The outer shape of the valve chamber cover portion 72 is formed in a cylindrical shape, and is configured to be inserted and connected to the valve chamber main body portion 71. A flange portion 72e is formed in the valve chamber cover portion 72, and closes the opening of the valve chamber main body portion 71. Furthermore, a circumferential groove 72f is formed along the outer periphery of the valve chamber cover portion 72, and a sealing material Sa is attached thereto, and the valve chamber main body portion 71 and the valve chamber cover portion 72 are sealed by the sealing material Sa. Can be joined. The valve movable space 74 is a gap in which the valve flat plate portion 1 of the valve member A can move along the central axis direction (see FIG. 6).

  The valve chamber cover portion 72 is formed with a communication passage 72 c that communicates the indoor side of the valve chamber 7 with the outdoor side, and a suction opening 72 a is formed on the indoor side of the valve chamber 7. A contact wall surface 72b with which the elastic seal member 51 of the valve member A contacts is formed around the outside of the range where the suction opening 72a is formed (see FIG. 1B). The abutting wall surface 72b is a flat surface, and the elastic seal member 51 formed in the valve chamber main body 71 of the valve member A can abut in a good state. Therefore, the periphery of the suction opening 72a is completely sealed, and the suction opening 72a can be closed in an airtight manner (see FIGS. 1A and 6B). Naturally, the inner diameter of the suction opening 72 a is smaller than the diameter of the contact circle with which the elastic seal member 51 of the valve member A abuts the valve chamber cover 72.

  In the valve member A of the first embodiment, a fixing pin 75 is formed on a valve chamber cover portion 72 of the valve chamber 7 as shown in FIGS. The fixing pin 75 serves to fix the fixed end 3 of the valve member A and attach the valve member A to the valve chamber 7. Specifically, the fixing pin 75 is a substantially cylindrical portion formed on the abutting wall surface 72b around the suction opening 72a at equal intervals along the circumference. The number of fixed pins 75 is the same as the number of fixed end portions 3 of the valve member A, and three are formed in the embodiment of the present invention (see FIG. 1A).

  The outer diameter of the fixing pin 75 is initially smaller than the inner diameter of the fixing hole 32 of the valve member A, and the fixing pin 75 can be easily inserted into the fixing hole 32 with a margin. (See FIG. 7A). Then, after the fixing pin 75 is inserted into the fixing hole 32 of the fixed end 3, the fixing pin 75 is caulked, and plastic deformation is performed so that the outer diameter of the fixing pin 75 is larger than the inner diameter of the fixing hole 32. [Refer to FIG. 7B]. The same caulking is applied to all the fixing pins 75, and the valve member A is attached and fixed to the valve chamber 7. Thus, in a state where the valve member A is mounted on the valve chamber 7 by the fixing pin 75, the elastic seal member 51 is in close contact with the contact wall surface 72b, and the valve flat plate portion 1 and the elastic seal member 51, the suction opening 72a is hermetically sealed (see FIG. 7B).

  Further, when the fixing pin 75 has a shape after being plastically deformed by caulking, a large-diameter cylindrical portion 75a and a neck portion 75b are formed, and the outer diameter of the neck portion 75b is smaller than the inner diameter of the fixing hole 32. In addition, the outer diameter of the large-diameter cylindrical portion 75a is larger than the inner diameter of the fixed hole 32, and the axial dimension of the neck portion 75b is larger than the plate thickness of the fixed end portion 3 of the valve member A. In addition, the fixed end portion 3 of the valve member A can have a slight degree of freedom of operation, and the operation of the valve member A can be further improved [FIG. 6A]. reference〕. Although not particularly illustrated, the fixing pin 75 may fix the valve member A to the valve chamber 7 by using a fastener such as a bolt or a screw.

  In the case of the type in which the excision opening 32a is formed in the fixing hole 32, as shown in FIG. 7C, each fixing hole 32 of the valve member A is arranged in the vicinity of the corresponding fixing pin 75. The valve member A is rotated as it is, and the fixing pin 75 is slid into the fixing hole 32 to be engaged. In the case where both the projecting pieces 32b and 32b are formed at the location of the cutout opening 32a, the fixing pin 75 is difficult to be removed from the fixing pin 75, and the fixing pin 75 can be more firmly fixed (see FIG. 7D).

  Next, a second embodiment of the valve member A will be described with reference to FIGS. The main member A1 includes the valve flat plate portion 1, the connecting flat plate portion 2, and the annular flat plate portion 4, and is made of metal and integrally formed (see FIGS. 8B and 9B). About the said valve flat plate part 1 and the said connection flat plate part 2, it has the same shape structure as 1st Embodiment. A substantially ring-shaped annular flat plate portion 4 is formed on the outer ends of the plurality of connecting flat plate portions 2, 2,..., That is, on the side opposite to the root portion with the valve flat plate portion 1 [FIG. ), FIG. 9B].

  The annular flat plate portion 4 is formed in a circular ring shape having a plane along the diametrical direction, and the valve flat plate portion 1 is located at the diametrical center position of the annular flat plate portion 4. That is, a plurality of connecting flat plate portions 2, 2,... Are formed on the inner peripheral side of the annular flat plate portion 4, and the valve flat plate portion 1 and the annular flat plate portion 4 are formed to be concentric. Moreover, it is preferable that the base part with the connection flat plate part 2 with respect to the said cyclic | annular flat plate part 4 is made into the shape which follows so that it may orthogonally cross to the tangent of the inner periphery circle | round | yen of the said cyclic flat plate part 4. Then, the plurality of connecting flat plate portions 2, 2,... Are formed between the valve flat plate portion 1 and the annular flat plate portion 4 so as to be equally divided into two equal parts, three equal parts or four equal parts in the rotational direction. The shape is formed by pulling out (see FIGS. 8B and 9B). Each connecting flat plate portion 2 functions as a spring and functions as a leaf spring that returns to its original shape in the elastic range.

  The annular flat plate portion 4 is fixed at a predetermined location in the valve chamber 7, and the air pressure is applied to the valve flat plate portion 1 so that the plurality of connecting flat plate portions 2, 2,. The position of the valve flat plate portion 1 moves along the central axis of the main member A1. When the air pressure disappears, the connecting flat plate portions 2, 2,... Return to the original shape, and the valve flat plate portion 1 returns to the original position. However, it is preferable that the valve flat plate portion 1 moves in parallel, and therefore, the plurality of connecting flat plate portions 2, 2,... Have the same shape and preferably about three or four. As in the first embodiment, the valve flat plate portion 1 is covered with an elastic seal member 51 at least on the outer periphery. There are two types of the elastic seal member 51 as in the first embodiment, that is, there are a partial seal 51a and an overall seal 51b. The configuration of the elastic seal member 51 and the mounting structure to the valve flat plate portion 1 are the same as those in the first embodiment, and the details are omitted.

  As shown in FIGS. 8 to 10, the outer peripheral portion of the annular flat plate portion 4 is covered with an elastic fixing member 52. Like the elastic seal member 51, the elastic fixing member 52 is a non-metallic material having elasticity, and rubber, elastic synthetic resin, or the like is used. As with the elastic seal member 51, the elastic fixing member 52 is attached to the annular flat plate portion 4 by baking. The cross-sectional shape orthogonal to the diameter direction of the elastic fixing member 52 is a substantially circular shape or a substantially elliptical shape.

  The valve member A can be installed in the valve chamber 7 in a very stable state by fixing the annular flat plate portion 4 at an appropriate position in the valve chamber 7 described later. Further, the valve flat plate portion 1 is positioned at the diametrical center of the annular flat plate portion 4 and is connected to the annular flat plate portion 4 by a plurality of connecting flat plate portions 2, 2,. 1 can be accurately translated relative to the annular flat plate portion 4, and the valve flat plate portion 1 and the elastic seal member 51 can accurately and quickly perform the opening / closing operation at the suction opening 72 a of the valve chamber 7. Further, since the elastic fixing member 52 is mounted on the annular flat plate portion 4, vibration during operation of the vacuum pump is almost absorbed by the elastic fixing member 52, and vibration transmission to the annular flat plate portion 4 is minimized. The valve flat plate portion 1 and the elastic seal member 51 serve as a stable check valve.

  The basic structure of the pump housing B in the second embodiment is substantially the same as in the first embodiment, and as shown in FIG. 11, a pump chamber 6 and a valve chamber 7 are provided. The configuration of the pump chamber 6 is as described in the first embodiment, and includes the vane 63 and the rotation drive unit 62. Further, the vacuum pump communicates with the vacuum tank 8, and specifically, The valve chamber 7 and the vacuum tank 8 are communicated with each other by a suction pipe 9 outside the vacuum pump.

  As shown in FIG. 12, the valve chamber 7 includes a valve chamber body 71 and a valve chamber cover 72. The valve chamber cover portion 72 is configured to be detachable from the valve chamber 7, and a valve member mounting space 73 and a valve movable space 74 are formed between the valve chamber 7 and the valve chamber 7. The valve movable space 74 is a gap formed in the shape of the inner circumferential wall, and the valve member mounting space 73 is formed as a gap in the shape of a circumferential inner wall having a larger inner diameter than the valve movable space 74. In particular, the valve member mounting space 73 is a portion configured in a circumferential groove shape by a joint portion between the valve chamber main body portion 71 and the valve chamber cover portion 72. The annular flat plate portion 4 of the valve member A is housed and fixed in the valve member mounting space 73 together with the elastic fixing member 52 (see FIG. 12B). The valve movable space 74 is a gap through which the valve flat plate portion 1 of the valve member A can move along the central axis direction (see FIG. 12A).

  The valve chamber cover portion 72 is formed with a communication passage 72 c that communicates the indoor side of the valve chamber 7 with the outdoor side, and a suction opening 72 a is formed on the indoor side of the valve chamber 7. A contact wall surface 72b with which the elastic seal member 51 of the valve member A contacts is formed around the outside of the range where the suction opening 72a is formed (see FIG. 12). The abutting wall surface 72b is a flat surface, and the elastic seal member 51 formed in the valve chamber main body 71 of the valve member A can abut in a good state. Therefore, the periphery of the suction opening 72a is completely sealed, and the suction opening 72a can be closed in an airtight manner. Naturally, the inner diameter of the suction opening 72 a is smaller than the diameter of the contact circle with which the elastic seal member 51 of the valve member A abuts the valve chamber cover 72.

  Next, the operation of the valve member A in the first and second embodiments will be described. In 1st and 2nd embodiment, the effect | action of the valve member A is substantially equivalent. First, when the vacuum pump is not operating, the vacuum tank 8 disposed upstream of the suction port of the vacuum pump is close to vacuum and the air pressure is low. And since the vacuum pump has stopped, the inside of the pump chamber 6 of a vacuum pump is in the state of substantially atmospheric pressure. At this time, the valve member A is in a state where the elastic sealing member 51 together with the valve flat plate portion 1 closes the suction opening 72a. This state is shown in FIG. 6B in the first embodiment, and shown in FIG. 12B in the second embodiment. This is because the elastic seal member 51 is pressed against the abutting wall surface 72b mainly by the elasticity of the connecting flat plate portions 2, 2,.

  The elastic seal member 51 of the valve member A is also affected by the pressures p, p,... Is pressed against the abutting wall surface 72b (see FIGS. 6B and 12B). In this state, the valve member A does not elastically deform (do not bend) outside the valve chamber 7, that is, in the direction toward the suction pipe 9. This state is shown in FIG. 6B in the first embodiment, and shown in FIG. 12B in the second embodiment.

  During the vacuum pump operation, the air flow is in the opposite direction to that described above, and the air moves along the route of the vacuum tank 8, the suction pipe 9, the valve member A, the suction path 61, and the pump chamber 6. At this time, the valve flat plate portion 1 of the valve member A is subjected to a negative pressure by the suction pressure from the pump chamber 6 and is sucked to the pump chamber 6 side, so that the elastic seal member 51 is separated from the contact wall surface 72b. Then, the suction opening 72a is opened, and air is sucked from the vacuum tank 8, and the vacuum tank 8 is evacuated. This state is shown in FIG. 6A in the first embodiment, and shown in FIG. 12A in the second embodiment.

  As described above, the valve member A is provided with the valve flat plate portion 1, the connecting flat plate portions 2, 2,..., The elastic seal member 51 and the like, and the valve member A itself is put together so as to have all functions. It is what was done. In particular, the connecting flat plate portions 2, 2,... Serve as springs by having elasticity. Therefore, the valve member A itself mounted in the valve chamber 7 opens the suction opening 72a by separating the valve plate portion 1 and the elastic seal member 51 from the contact wall surface 72b around the suction opening 72a, or Due to the recoverability of the connecting flat plate portions 2, 2,..., The suction opening 72a can be closed by the elastic seal member 51 together with the valve flat plate portion 1.

  When the elastic seal member 51 is in the state of closing the suction opening 72a, the valve member A is extremely thin in both the first and second embodiments, and has a substantially single plate shape. Or it becomes a substantially flat plate shape. For this reason, the valve chamber 7 in which the valve member A is accommodated can be made extremely shallow, including the space due to the movement of the valve plate 1 of the valve member A, and the valve chamber 7 can be made compact. .

  Conventionally, the return operation of the valve is often performed by a coil spring, but the plurality of connecting flat plate portions 2, 2,... Of the valve member A in the first and second embodiments of the present invention itself. Plays the role of a spring. Therefore, a separate coil spring is not required for the valve member A, and the valve chamber 7 does not require a storage space including the expansion and contraction region of the coil spring as a separate member. As a result, the valve chamber 7 can be made compact, and as a result, the overall size can be reduced. FIG. 13 shows a type in which the elastic fixing member 52 is not attached to the annular flat plate portion 4 of the valve member A in the second embodiment (see FIGS. 13A and 13B). In this type, the annular flat plate portion 4 is mounted with a sealing material Sb such as a gasket in the valve member mounting space 73 (see FIG. 13C).

(A) is a perspective view of the valve chamber cover part which comprises the valve chamber in 1st Embodiment of this invention, and the valve member with which this valve chamber cover part was mounted | worn, (B) is a valve chamber cover part in a valve chamber main-body part. It is the vertical side view with which the valve member was mounted | worn with it. (A) is a front view of the valve member of 1st Embodiment in this invention, (B) is a front view of the state which remove | excluded the elastic seal member from the valve member, (C) is an end surface seen from the Xa-Xa arrow of (A). (D) is an end view taken along the line Xb-Xb of (A), and (E) is a state diagram in which the valve plate is bent and moved along the central axis. (A) is a perspective view of the valve member of 1st Embodiment in this invention, (B) is a perspective view of the state which remove | excluded the elastic sealing member from the valve member, (C) is a valve flat plate part bent, and along a central axis FIG. (A) is a front view of another type of valve member according to the first embodiment of the present invention, (B) is an end view taken along arrow Xc-Xc of (A), and (C) is a central axis with the valve plate portion bent. The state figure which moved along (D) is a perspective view of (A). 1 is an overall view showing a configuration of a first embodiment in the present invention. (A) is an action figure in the state where the valve member opened in the valve chamber in a 1st embodiment, and (B) is an action figure in the state where the valve member closed in the valve chamber. (A), (B) is principal part sectional drawing which shows the process of mounting | wearing with the cyclic | annular flat plate part in 1st Embodiment, (C) is another type top view in 1st Embodiment of this invention, (D) is It is a principal part top view of another type. (A) is a front view of the valve member according to the second embodiment of the present invention, (B) is a front view of the valve member with the elastic seal member removed, and (C) is an end view as viewed from the arrow Xd-Xd in (A). (D) is an end view as viewed from the arrow Xe-Xe in (A), and (E) is a state diagram in which the valve plate is bent and moved along the central axis. (A) is a perspective view of a valve member according to a second embodiment of the present invention, (B) is a perspective view of a state in which the elastic seal member is removed from the valve member, and (C) is along the central axis as the valve plate is bent. FIG. (A) is a front view of another type of valve member according to the second embodiment of the present invention, (B) is an end view taken along arrow Xf-Xf of (A), and (C) is a central axis when the valve plate portion is bent. The state figure which moved along (D) is a perspective view of (A). It is a general view which shows the structure of 2nd Embodiment in this invention. (A) is an action figure in the state where the valve member opened in the valve chamber in a 2nd embodiment, and (B) is an action figure in the state where the valve member closed in the valve chamber. (A) is a front view of a valve member of a type in which an elastic fixing member is not attached to the annular flat plate portion in the second embodiment, (B) is a cross-sectional view taken along the arrow Xg-Xg in (A), and (C) is (A). It is a vertical side view of the state which mounted | wore the valve chamber with the valve member of this type.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Valve flat plate part 1,21 ... Bending part, 2 ... Connection flat plate part, 3 ... Fixed end part, 32 ... Fixed hole,
4 ... annular flat plate portion, 51 ... elastic sealing member, 52 ... elastic fixing member, A ... valve member,
6 ... Pump chamber, 61 ... Suction passage, 7 ... Hand valve chamber, 72 ... Suction opening.

Claims (6)

  A substantially disc-shaped valve flat plate portion, and a flat plate-like and elastic connecting flat plate portion having a substantially arc-shaped bent portion and formed around the valve flat plate portion at substantially equal intervals and in the same shape. A valve member in which a metal elastic seal member is covered on at least the outer periphery of the valve flat plate portion, and a pump housing having a valve chamber in communication with the pump chamber and the suction passage and having a suction opening formed therein; A check valve for a vacuum pump, wherein an outer end portion of the connecting flat plate portion is fixed in the valve chamber, and the elastic seal member is closed in contact with a peripheral portion of the suction opening portion.   2. The fixed end portion having a fixing hole is formed at an outer end portion of the connecting flat plate portion, and the connecting flat plate portion is fixed in the valve chamber while penetrating the fixing hole on the valve chamber side. A check valve for a vacuum pump, characterized in that a fixing pin is provided.   The check valve for a vacuum pump according to claim 2, wherein the fixing pin is crimped to fix a fixed end portion of the valve member.   The vacuum pump check valve according to claim 2 or 3, wherein a part of the fixing hole is opened outward.   2. The check valve for a vacuum pump according to claim 1, wherein an annular flat plate portion is formed at an outer end portion of the connecting flat plate portion, and the valve flat plate portion serves as a diametrical center of the annular flat plate portion.   6. The reverse of a vacuum pump according to claim 5, wherein an elastic fixing member is formed on the outer peripheral portion of the annular flat plate portion, and the elastic fixing member is fixed in a substantially clamped state in the valve chamber. Stop valve.

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