JP2010080159A - Product removing device, exhaust system, ion implanting device, and method of removing product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily and quickly remove products produced in an exhaust system of an ion implanting device. <P>SOLUTION: This exhaust system 200 includes: a first vacuum pump 204; an exhaust line 219 for discharging exhaust of the first vacuum pump; and a second vacuum pump 218 for making the exhaust line 219 vacuum. A product removing device 100 includes: a bypass line 113 divided from the exhaust line 219 to move the gas, which is discharged from the first vacuum pump, to the second vacuum pump; a product sticking fitting 102 arranged in the exhaust line 219 on a side 204a closer to the first vacuum pump than a branch point of the bypass line 113 to stick the product in the gas, and provided freely to move to the bypass line 113; and shut-off means 104 and 106 for shutting off a position, to which the product sticking fitting 102 positioning in the bypass line 113 is moved, from the exhaust line 219. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a product removal device, an exhaust device, an ion implantation device, and a product removal method.

  An ion implantation apparatus is used when implanting impurity ions such as arsenic into a semiconductor substrate. A combination of an oil diffusion pump and a rotary pump 218 may be used as an exhaust device for an ion source chamber that generates ions with an ion implantation apparatus.

  FIG. 8 is a schematic diagram showing an example of the exhaust device 300 of the ion implantation apparatus. The exhaust device 300 includes an oil diffusion pump 204 and a rotary pump 218. The oil diffusion pump 204 has an exhaust pipe 204 a and communicates with the rotary pump 218 via the exhaust pipe 204 a and the exhaust pipe 220. A valve 222 is provided between the oil diffusion pump 204 and the rotary pump 218. By opening the valve 222, the oil diffusion pump 204 and the rotary pump 218 communicate with each other, and by closing the valve 222, the oil diffusion pump 204 and the rotary pump 218 are shut off. Here, the exhaust pipe 204a has an L shape with a tip extending upward. Further, the exhaust pipe 204a may be provided with a baffle (not shown).

  In the exhaust device 300 having such a configuration, the exhaust pipe 204a is cooled and has a temperature lower than the solidification temperature of impurity ions such as arsenic contained in the exhaust gas (about 320 ° C. in the case of arsenic). For this reason, a product such as a solid of impurity ions accumulates in the exhaust pipe 204a, and there is a problem that the exhaust capacity is reduced.

  Patent Document 1 (Japanese Patent Laid-Open No. 9-219172) discloses a turbo molecule in an exhaust system of an ion source chamber of an ion implantation apparatus that implants arsenic into a substrate to be processed using a gaseous arsenic compound such as solid arsenic or arsine as a source material. An exhaust system using a pump and a dry pump is described. In this exhaust system, by providing a cooling trap between the turbo molecular pump and the dry pump, arsenic in the exhaust is captured as a solid, and further, an inert gas is introduced into the dry pump and its atmospheric discharge pipe, so that the solid state It is configured to reduce arsenic adhesion.

Patent Document 2 (Japanese Patent Laid-Open No. 10-317147) includes a main exhaust line, a drag pump and a dry pump provided in the main exhaust line, a bypass line that bypasses the drug pump from the main exhaust line, and a bypass line. An exhaust system is described that includes a trap provided, a heating device that heats a portion up to the trap of the bypass line, and a switching valve that switches an exhaust path between the main exhaust line side and the bypass line side.
JP-A-9-219172 JP 10-317147 A

  However, as described below, there has been a problem that it takes time to remove accumulated products.

  Referring to FIG. 8, such products accumulate particularly in the corners of the exhaust pipe 204a. Therefore, when a product accumulates in the exhaust pipe 204a, the product must be removed. When performing the removal, the oil diffusion pump 204 is first stopped to perform cooling, and then the rotary pump 218 is stopped. Subsequently, the oil diffusion pump 204 and the exhaust pipe 220 are released to the atmosphere, piping such as the exhaust pipe 220 is removed, and the product is removed from the exhaust pipe 204a. Thereafter, in order to restart the apparatus, piping such as the exhaust pipe 220 is attached, the oil diffusion pump 204 and the exhaust pipe 220 are exhausted, and after the exhaust is completed, the heater of the oil diffusion pump 204 is turned on. For this reason, it takes a lot of time to shut down and start up the apparatus.

  In the techniques described in Patent Document 1 and Patent Document 2, accumulation of products or the like is reduced, or products or the like are generated on the bypass line side. However, the problem that it takes time to remove the product has not been solved.

According to the present invention,
A first vacuum pump; an exhaust line connected to the first vacuum pump for exhausting exhaust gas of the first vacuum pump; and a second connected to the exhaust line for evacuating the exhaust line. A product removal device for removing product from an exhaust device comprising a vacuum pump,
A bypass line branched from the exhaust line and moving the gas discharged from the first vacuum pump to the second vacuum pump;
A product that is disposed closer to the first vacuum pump than a branch point with the bypass line in the exhaust line, adheres a product in the gas, and is movably provided in the bypass line An attachment jig;
Blocking means for blocking from the exhaust line the place where the product adhering jig of the bypass line is moved;
A product removal device is provided.

Moreover, according to the present invention,
A first vacuum pump;
An exhaust line connected to the first vacuum pump and exhausting exhaust gas of the first vacuum pump;
A second vacuum pump connected to the exhaust line and evacuating the exhaust line;
A product removal device as described above;
An exhaust device is provided.

Moreover, according to the present invention,
An ion implantation apparatus for generating impurity ions and implanting the impurity ions into a substrate to be processed,
An ion source chamber provided with an ion generation source for generating the impurity ions;
An exhaust apparatus for exhausting exhaust gas from the ion source chamber,
Is provided.

Furthermore, according to the present invention,
Using the product removal device,
Operating the first vacuum pump and the second vacuum pump to evacuate the exhaust line and the bypass line; and
Moving the product attachment jig from the exhaust line to the bypass line;
Shutting off the place where the product adhering jig of the bypass line is moved from the exhaust line by the shut-off means while keeping the exhaust line in a vacuum;
Releasing the bypass line to the atmosphere;
Removing the product attachment jig from the bypass line;
A product removal method is provided.

  According to the above configuration, the product adhering jig to which the product in the exhaust line is adhered while keeping the exhaust line in a vacuum without stopping the first vacuum pump and the second vacuum pump. It can be taken out from the exhaust line to the bypass line. Next, the location where the product adhering jig of the bypass line has been moved can be blocked from the exhaust line by the shut-off state of the manual valve or the like, and only the bypass line can be released to the atmosphere. Thereby, a product adhesion jig | tool can be taken out from a bypass line, and a product etc. can be removed. During this time, since the inside of the exhaust line can be kept in vacuum, it is not necessary to stop the first vacuum pump and the second vacuum pump, and the time required for the pump to be lowered and started can be reduced.

  It should be noted that any combination of the above-described constituent elements and a conversion of the expression of the present invention between methods, apparatuses, and the like are also effective as an aspect of the present invention.

  ADVANTAGE OF THE INVENTION According to this invention, the product produced | generated with the exhaust apparatus of an ion implantation apparatus can be removed simply and rapidly.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.

  FIG. 1 is a schematic diagram showing a configuration of an ion implantation apparatus according to the present embodiment. FIG. 2 is a block diagram showing in detail the location indicated by the dashed line in FIG. In this Embodiment, it differs from the conventional ion implantation apparatus by the point by which the product removal apparatus 100 is provided.

  The ion implantation apparatus 250 uses, for example, solid source metal arsenic and the like, and implants impurity ions such as arsenic into a silicon substrate to be processed. As shown in FIG. 1, an ion implantation apparatus 250 includes an ion source chamber in which an ion generation source 202 is provided, an oil diffusion pump 204 (first vacuum pump), a beam line 206, a processing chamber 208, a wafer. A replacement unit 210. The ion generation source 202 generates impurity ions. A substrate to be processed is placed in the processing chamber 208. Impurity ions generated by the ion generation source 202 are implanted into a substrate to be processed disposed in the processing chamber 208 through the beam line 206. The wafer replacement unit 210 aligns the substrate to be processed.

  As shown in FIG. 2, the ion implantation apparatus 250 further includes a cryopump 212, a cryopump 214, a rotary pump 216, a rotary pump 218 (second vacuum pump), an exhaust line 219, a valve 222 (FORE valve (air valve)). )), And a product removal device 100. The oil diffusion pump 204 and the rotary pump 218 constitute an exhaust device 200 that is an exhaust system of an ion source chamber in which the ion generation source 202 is provided. The product removal device 100 removes the product accumulated in the exhaust device 200.

  The exhaust line 219 is connected to the oil diffusion pump 204 and discharges the exhaust gas from the oil diffusion pump 204. The exhaust line 219 is also connected to the rotary pump 218 and is evacuated by the rotary pump 218. Exhaust gas in the exhaust line 219 is discharged to the outside by a rotary pump 218.

  The product removal apparatus 100 is provided between the oil diffusion pump 204 and the rotary pump 218. The product removal apparatus 100 includes a bypass line 113 that branches from the exhaust line 219 and is connected to the rotary pump 218 to be evacuated.

  3 and 4 are diagrams showing the configuration of the product removing apparatus 100 in detail. 3 and 4 show the same configuration, but FIG. 4 schematically shows the oil diffusion pump 204.

  As shown in FIG. 3, the oil diffusion pump 204 includes an exhaust pipe 204a. The exhaust pipe 204a can be configured to have an L shape with the tip extending upward. Further, the exhaust pipe 204a may be provided with a baffle (not shown). The exhaust device 200 further includes an exhaust pipe 220 that connects the exhaust pipe 204 a and the rotary pump 218. In this embodiment, the exhaust pipe 204a and the exhaust pipe 220 constitute an exhaust line 219.

  The product removal apparatus 100 includes a product attachment jig 102, a chamber 110, a cap 110a, a bypass pipe 114, a valve 104 (first valve, manual valve), a valve 106 (second valve, roughing valve), a valve. 108 (third valve, vent valve), and pulling shaft 112 (shaft). In the present embodiment, the bypass line 113 is configured by the chamber 110 and the bypass pipe 114. The chamber 110 is provided in connection with the exhaust pipe 204a. The bypass pipe 114 is provided in connection with the chamber 110. Further, a cap 110 a is provided on the upper portion of the chamber 110. The chamber 110 is sealed with a cap 110a. A pulling shaft 112 passes through the cap 110a, and the pulling shaft 112 moves up and down in the chamber 110. The cap 110a can be made of an elastic material such as rubber.

  The product attachment jig 102 attaches a product in the gas moving through the exhaust line 219. The product attachment jig 102 is disposed closer to the oil diffusion pump 204 than the branch point of the bypass line 113 in the exhaust line 219. In the present embodiment, the product attachment jig 102 is disposed in the exhaust pipe 204a. The product attachment jig 102 is movably provided on the bypass line 113. In the present embodiment, the product attachment jig 102 is configured to be movable to the chamber 110 of the bypass line 113. That is, the chamber 110 is formed in a size that can accommodate the product attachment jig 102. When the product removal apparatus 100 is used for the exhaust apparatus 200 of the ion implantation apparatus 250, the product 120 is a clay-like soft substance. FIG. 7 is an enlarged view showing an example of the configuration of the product attachment jig 102. The product attachment jig 102 includes a central shaft 130, a plurality of traps 132 attached to the central shaft 130, and an engaging portion 134 that engages with the pulling shaft 112. The trap 132 can be plate-shaped. In addition, the traps 132 are provided in different directions at different distances so that the product 120 is efficiently attached. The engaging part 134 can use the pulling shaft 112 as a liner.

  FIG. 3 shows a state before the product 120 adheres to the product attachment jig 102, and FIG. 4 shows a state after the product 120 adheres to the product attachment jig 102. The pulling shaft 112 is movably provided between the chamber 110 and the exhaust pipe 204a. The product attachment jig 102 is configured to be engageable with the pulling shaft 112. The product attaching jig 102 moves between the exhaust pipe 204a and the chamber 110 by hooking the pulling shaft 112 on the liner which is the engaging portion 134 of the product attaching jig 102 and moving the pulling shaft 112 up and down. To do.

  The valve 104 is provided between the exhaust pipe 204 a and the chamber 110, and releases and shields between the exhaust pipe 204 a and the chamber 110. The valve 106 is provided in the bypass pipe 114 and opens and shields between the bypass pipe 114 and the exhaust pipe 220. In the present embodiment, the blocking means includes a valve 104 and a valve 106. In other words, the valve 110 and the valve 106 block the chamber 110, which is the location where the product attachment jig 102 is moved, in the bypass line 113 from the exhaust line 219.

  The valve 108 is provided in the bypass pipe 114 closer to the chamber 110 than the valve 106. The valve 108 opens the chamber 110 to the atmosphere and blocks it from the atmosphere.

  The valve 222 is provided closer to the exhaust pipe 204a than the reconnection point of the exhaust pipe 220 with the bypass pipe 114. The valve 222 is provided between the oil diffusion pump 204 and the rotary pump 218, and releases and shields between the oil diffusion pump 204 and the rotary pump 218.

FIG. 5 and FIG. 6 are diagrams showing a procedure for taking out the product attachment jig 102 from the exhaust pipe 204a and setting the product attachment jig 102 in the exhaust pipe 204a again.
In the present embodiment, when the oil diffusion pump 204 and the rotary pump 218 are in operation, the valve 222 is opened and the valve 108 is closed. Valve 104 and valve 106 are also closed. In such a state, when the oil diffusion pump 204 and the rotary pump 218 are operated and the gas discharged from the oil diffusion pump 204 is moved to the rotary pump 218, the product 120 adheres to the product adhesion jig 102. Come (Fig. 5 (a)). At this time, the exhaust pipe 204a and the exhaust pipe 220 are in a vacuum.

  When the product 120 adheres to the product attachment jig 102 to some extent, the product attachment jig 102 is taken out in the following procedure. First, the valve 222 is closed. Next, the valve 106 is opened. As a result, the chamber 110 and the bypass pipe 114 are evacuated. Subsequently, the valve 104 is opened. Thereafter, the pulling shaft 112 is moved downward, and the liner of the product attachment jig 102 is hooked on the pulling shaft 112 (FIG. 5B).

  Subsequently, the pulling shaft 112 is moved upward. As a result, the product attachment jig 102 moves into the chamber 110. Next, the valve 104 and the valve 106 are closed in order (FIG. 5C).

  Thereafter, the valve 222 is opened. Next, the valve 108 is opened. Thereby, the chamber 110 is released to the atmosphere. Then, the cap 110a is removed from the chamber 110, and the pulling shaft 112 and the product attachment jig 102 are taken out (FIG. 6A). Subsequently, the product attachment jig 102 is cleaned to remove the product 120. Next, the product attachment jig 102 is attached to the pulling shaft 112 again, introduced into the chamber 110, and the cap 110 a is attached to the chamber 110. Here, the product attachment jig 102 may be replaced with another product attachment jig 102 that has been cleaned.

  Subsequently, the valve 108 is closed. Next, the valve 222 is also closed. Thereafter, the valve 106 is opened. Thereby, the chamber 110 and the bypass pipe 114 are evacuated. Subsequently, the valve 104 is opened (FIG. 6B). Next, the pulling shaft 112 is moved downward, and the product attachment jig 102 is set in the exhaust pipe 204a (FIG. 6C).

  Thereafter, the pulling shaft 112 is removed from the liner of the product attachment jig 102, and the pulling shaft 112 is moved upward. Next, the valve 104 is closed. Subsequently, the valve 106 is also closed, and then the valve 222 is opened. Accordingly, the state returns to the state shown in FIG. 5A and the oil diffusion pump 204 and the rotary pump 218 are operated until the product 120 adheres to the product attachment jig 102.

  According to the product removal apparatus 100 in the present embodiment, the product attachment jig 102 is disposed in the exhaust line 219 between the vacuum pumps, and the bypass line 113 is provided in the exhaust line 219, so that the product attachment jig 102 is The product was moved to the bypass line 113, and only the bypass line 113 was released to the atmosphere while keeping the exhaust line 219 exhaust pipe in a vacuum so that the product adhesion jig 102 could be taken out. Since the product adhering jig 102 can be taken out from the exhaust pipe 204a while maintaining the vacuum state of the exhaust pipe 204a and the exhaust pipe 220, it is necessary to stop the operation of the oil diffusion pump 204 and the rotary pump 218 in order to remove the product. Absent. Therefore, the time for removing the product can be greatly shortened.

  In particular, when the exhaust pipe 204a is formed integrally with the oil diffusion pump 204, it is difficult to remove the product attached to the exhaust pipe 204a. In addition, when the exhaust pipe 204a has an L shape, the product tends to adhere to the corner portion of the exhaust pipe 204a. In the present embodiment, the product attachment jig 102 is disposed in the exhaust pipe 204a where the product is most likely to accumulate. As a result, the product can adhere to the product attachment jig 102. Further, a chamber 110 that extends straight from the exhaust pipe 204 a in the vertical direction is attached to the tip of the exhaust pipe 204 a so that the product attachment jig 102 can move to the chamber 110. Further, only the chamber 110 can be released to the atmosphere while the exhaust pipe 204a and the exhaust pipe 220 are kept in a vacuum state. As a result, the product adhering jig 102 was removed from the exhaust pipe 204a while the oil diffusion pump 204 and the rotary pump 218 were operating, and after cleaning, the product could be returned to the exhaust pipe 204a again.

  This eliminates the need for waiting for the heater temperature to rise when the heater of the oil diffusion pump 204 is stopped, cooled, and started up, which was conventionally required when removing the product. Therefore, the product can be removed from the exhaust device 200 quickly and easily. For example, conventionally, in order to remove the product, it took about 2.5 hours for the oil diffusion pump 204 to be lowered and started. However, by using the product removing apparatus 100 according to the present embodiment, 15 minutes are required. It became possible to do with degree. Thereby, the operating rate of the exhaust device 200 can be improved.

  As mentioned above, although embodiment of this invention was described with reference to drawings, these are the illustrations of this invention, Various structures other than the above are also employable.

  In the above embodiment, an example in which the exhaust pipe 204a is configured integrally with the oil diffusion pump 204 is shown. However, in the product removal apparatus 100 of the present invention, the exhaust pipe 204a is attached to the oil diffusion pump 204. It is also possible to apply to such a configuration.

It is a schematic diagram which shows the structure of the ion implantation apparatus in embodiment of this invention. It is a block diagram which shows the location shown with the dashed-dotted line of FIG. 1 in detail. It is a figure which shows the structure of the product removal apparatus in embodiment of this invention in detail. It is a figure which shows the structure of the product removal apparatus in embodiment of this invention in detail. It is a figure which shows the procedure which takes out a product adhesion jig | tool from an exhaust pipe, and sets a product adhesion jig | tool in an exhaust pipe again. It is a figure which shows the procedure which takes out a product adhesion jig | tool from an exhaust pipe, and sets a product adhesion jig | tool in an exhaust pipe again. It is an enlarged view which shows an example of a structure of a product adhesion jig | tool. It is a figure which shows the structure of the conventional exhaust apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Product removal apparatus 102 Product attachment jig | tool 104 Valve 106 Valve 108 Valve 110 Chamber 110a Cap 112 Shaft 113 Bypass line 114 Bypass pipe 120 Product 130 Center axis 132 Trap 134 Engagement unit 200 Exhaust device 202 Ion generation source 204 Oil Diffusion pump 204a Exhaust pipe 206 Beam line 208 Processing chamber 210 Wafer replacement part 212 Cryo pump 214 Cryo pump 216 Rotary pump 218 Rotary pump 219 Exhaust line 220 Exhaust pipe 222 Valve 250 Ion implantation apparatus 300 Exhaust apparatus

Claims (10)

A first vacuum pump; an exhaust line connected to the first vacuum pump for exhausting exhaust gas of the first vacuum pump; and a second connected to the exhaust line for evacuating the exhaust line. A product removal device for removing product from an exhaust device comprising a vacuum pump,
A bypass line branched from the exhaust line and connected to the second vacuum pump to be evacuated;
A product that is disposed closer to the first vacuum pump than a branch point with the bypass line in the exhaust line, adheres a product in the gas, and is movably provided in the bypass line An attachment jig;
Blocking means for blocking from the exhaust line the place where the product adhering jig of the bypass line is moved;
A product removal device comprising: The product removal apparatus according to claim 1, wherein
The bypass line is configured to reconnect to the exhaust line on a side near the second vacuum pump;
The shut-off means is provided at the branch point, and the first valve that releases and shuts off between the exhaust line and the bypass line, and the second connection point than the reconnection point of the bypass line to the exhaust line. And a second valve provided at a location far from the vacuum pump for releasing and blocking between the exhaust line and the bypass line. The product removal apparatus according to claim 1 or 2,
A product removal apparatus further comprising a third valve that opens the bypass line to the atmosphere and blocks the atmosphere from the atmosphere. In the product removal apparatus in any one of Claim 1 to 3,
The bypass line is provided at the branch point, and is a bypass for reconnecting the chamber provided to be able to accommodate the product attachment jig, and the chamber and the exhaust line on the side close to the second vacuum pump. A product removal device comprising: a tube; In the product removal apparatus in any one of Claim 1 to 4,
A shaft further movably provided between a location where the product adhesion jig in the exhaust line is disposed and a location where the product adhesion jig of the bypass line is moved;
The product attachment jig is configured to be engageable with the shaft,
A product removal device for moving the product attachment jig between the exhaust line and the bypass line by moving the shaft by engaging the shaft with the product attachment treatment. In the product removal apparatus in any one of Claim 1 to 5,
The first vacuum pump is an oil diffusion pump, and the second vacuum pump is a rotary pump. A first vacuum pump;
An exhaust line connected to the first vacuum pump and exhausting exhaust gas of the first vacuum pump;
A second vacuum pump connected to the exhaust line and evacuating the exhaust line;
The product removal device according to any one of claims 1 to 6;
Including exhaust system. An ion implantation apparatus for generating impurity ions and implanting the impurity ions into a substrate to be processed,
An ion source chamber provided with an ion generation source for generating the impurity ions;
The exhaust device according to claim 7, wherein the exhaust device exhausts exhaust gas from the ion source chamber;
An ion implanter. Using the product removing device according to any one of claims 1 to 6,
Operating the first vacuum pump and the second vacuum pump to evacuate the exhaust line and the bypass line; and
Moving the product attachment jig from the exhaust line to the bypass line;
Shutting off the place where the product adhering jig of the bypass line is moved from the exhaust line by the shut-off means while keeping the exhaust line in a vacuum;
Releasing the bypass line to the atmosphere;
Removing the product attachment jig from the bypass line;
A product removal method comprising: The product removal method according to claim 9.
The product adhesion jig is connected to the bypass line in a state where the exhaust line is kept in a vacuum and the location where the product adhesion jig of the bypass line is moved by the blocking means is blocked from the exhaust line. A process of introducing
Shutting off the bypass line from the atmosphere;
Vacuuming the bypass line;
Releasing the space between the exhaust line and the place where the product adhering jig of the bypass line is moved by the blocking means;
Moving the product attachment jig from the bypass line to the exhaust line;
A product removal method comprising:

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