JP2010074906A - Method of manufacturing oscillatory actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an oscillatory actuator, which controls variations in resonance frequency even if a component size is varied to thereby obtain stable characteristics, in manufacturing the oscillatory actuator. <P>SOLUTION: In the method of manufacturing the oscillatory actuator, the characteristics of an adhesive for adhering an electro-mechanical conversion element to a shaft-like member are changed to adjust the resonance frequency of the oscillatory actuator. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a vibration actuator using an electromechanical transducer that is displaced based on application of a voltage.

  A shaft-like member is bonded and fixed to an electromechanical transducer that is displaced based on the application of voltage, a moving body is frictionally engaged with the shaft-like member, and an asymmetrical fluctuation voltage is applied to the electrode of the electromechanical transducer. 2. Description of the Related Art A vibration type actuator that moves a moving body by making accelerations in the expansion direction and contraction direction of a conversion element different is known.

In the vibration type actuator as described above, the drive efficiency is improved by setting the ratio between the thickness of the adhesive for fixing the electromechanical conversion element and the shaft-shaped member and the longitudinal elastic modulus of the adhesive within a predetermined range. Those are known (for example, see Patent Document 1).
JP 2008-48479 A

  In recent years, drive devices using vibration type actuators have been rapidly reduced in size, and accordingly, vibration type actuators themselves are desired to be smaller.

  Further, as a characteristic of the vibration type actuator, it is desired to be stable with little variation in the amount of movement of the moving body with respect to an input of a predetermined frequency voltage.

  FIG. 11 is a diagram schematically showing changes in the resonance frequency of the vibration type actuator and the moving speed of the moving body when a voltage of a predetermined frequency is input when the longitudinal dimensions of the electromechanical transducer are different. is there.

  As shown in the figure, when the component dimensions (in this figure, the dimensions in the longitudinal direction of the electromechanical transducer) are different, the resonance frequency of the actuator changes. When the resonance frequency changes, the moving speed of the moving body also changes with the resonance frequency. Further, when the resonance frequency increases, the moving body speed decreases, and the moving characteristics of the moving body of the vibration type actuator are reduced. There is a problem that becomes unstable.

  That is, in order to stabilize the characteristics of the vibration type actuator, it is necessary to manufacture so that the resonance frequency becomes a substantially constant value with respect to a predetermined frequency input.

  On the other hand, since the vibration type actuator has a simple configuration, when it is attempted to reduce the size of the vibration type actuator, it is necessary to reduce the size of the electromechanical conversion element, the shaft member, and the like, which are parts. However, when each component is reduced in size, the ratio of the dimensional tolerance to the reference dimension of each component is increased, and only the management of the ratio between the thickness of the adhesive and the longitudinal elastic modulus as in the above-mentioned Patent Document 1 causes vibration It may be difficult to sufficiently stabilize the characteristics of the mold actuator. On the other hand, if the dimensional tolerance is set to be extremely small in order to reduce the variation in characteristics, the cost of parts will be significantly increased, which is not preferable.

  In view of the above problems, an object of the present invention is to provide a method for manufacturing a vibration type actuator that can suppress variations in resonance frequency even when component dimensions vary, and can provide stable characteristics. is there.

  The above object is achieved by the invention described below.

  (1) In a method of manufacturing a vibration type actuator having an electromechanical transducer that is displaced based on application of a voltage, and a shaft-like member that is bonded and fixed to the electromechanical transducer, the electromechanical transducer and the shaft A method of manufacturing a vibration type actuator, comprising adjusting a resonance frequency of the vibration type actuator by changing a characteristic of an adhesive for adhering the shaped member.

  (2) A vibration type including: an electromechanical conversion element that is displaced based on application of voltage; a shaft-like member that is bonded and fixed to the electromechanical conversion element; and a fixed body that is bonded and fixed to the electromechanical conversion element. In the method for manufacturing an actuator, at least a step in which the manufacturing order is later among the step of bonding the electromechanical conversion element and the shaft-shaped member and the step of bonding the electromechanical conversion element and the fixed body. A method for manufacturing a vibration type actuator, comprising adjusting a resonance frequency of the vibration type actuator by changing a characteristic of the vibration type actuator.

  (3) In a method of manufacturing a vibration type actuator having an electromechanical transducer that is displaced based on application of a voltage and a shaft-like member that is bonded and fixed to the electromechanical transducer, a predetermined number of the vibrations that are manufactured Measuring the resonance frequency of the actuator and determining statistical data of the resonance frequency; determining whether the statistical data of the resonance frequency is within a desired range; and statistical data of the resonance frequency is desired And a step of manufacturing the adhesive by changing the characteristics of the adhesive when it is determined to be out of the range.

  (4) A vibration type having an electromechanical transducer that is displaced based on application of a voltage, a shaft-like member that is bonded and fixed to the electromechanical transducer, and a fixed body that is bonded and fixed to the electromechanical transducer. In the method for manufacturing an actuator, a step of measuring resonance frequencies of a predetermined number of the manufactured vibration type actuators to obtain statistical data of the resonance frequency, and whether the statistical data of the resonance frequency is within a desired range A step of bonding the electromechanical conversion element and the shaft-shaped member when the statistical data of the resonance frequency is determined to be outside a desired range, and the electromechanical conversion element and the fixed body. Manufacturing a vibration type actuator characterized by having a process of changing the characteristics of the adhesive at least in a process in which the manufacturing order is later in the bonding process Law.

  (5) The method for manufacturing a vibration type actuator according to (1) or (3), wherein the shaft-like member is fixed to an end portion in a displacement direction of the electromechanical transducer.

  (6) The shaft-like member is fixed to one end portion in the displacement direction of the electromechanical conversion element, and the fixed body is fixed to the other end portion in the displacement direction of the electromechanical conversion element. (2) or the manufacturing method of the vibration type actuator according to (4).

  (7) The method for manufacturing a vibration type actuator according to any one of (1) to (6), wherein the characteristics of the adhesive are changed by changing the volume of the fine particles mixed in the adhesive. .

  (8) The method for manufacturing a vibration type actuator according to (7), wherein the fine particles are spherical.

  (9) The vibration actuator according to any one of (1) to (6), wherein characteristics of the adhesive are changed by changing at least one of an elastic modulus or density of the adhesive. Production method.

  According to the present invention, it is possible to obtain a method of manufacturing a vibration type actuator that can obtain stable characteristics in which variation in resonance frequency is suppressed even when component dimensions vary.

  Hereinafter, the present invention will be described in detail by embodiments, but the present invention is not limited thereto.

(First embodiment)
FIG. 1 is a schematic diagram showing a vibration type actuator 1 according to the first embodiment.

  The vibration type actuator 1 shown in the figure includes an electromechanical transducer 4, a shaft-like member 6 fixed to one end of the electromechanical transducer 4 with an adhesive 5, and a frictional force acting on the shaft-like member 6. It is composed of a moving body 7 that is combined.

  A flexible printed circuit board 8 for applying a variable voltage to the two electrodes is connected to the electromechanical conversion element 4 by a conductive adhesive 9.

  The electromechanical conversion element 4 is displaced according to the applied voltage pulse (in this example, a displacement that expands and contracts) to reciprocate the axial member 6 in the axial direction. Such an operation can be achieved, for example, by appropriately setting the drive frequency of the voltage pulse with respect to the resonance frequency of the electromechanical transducer 4 and applying it to the electromechanical transducer 4. When the shaft-like member 6 moves slowly, the moving body 7 moves together with the shaft-like member 6 while being frictionally engaged with the shaft-like member 6, but when the shaft-like member 6 moves steeply, It slides with respect to the shaft-like member 6 in an attempt to stay in place due to inertia. The moving body 7 is moved in the axial direction by repeating sliding movement in one direction with respect to the shaft-like member 6.

  The vibration type actuator formed of the shaft-like member fixed by the electromechanical conversion element and the adhesive as described above is based on the passing time of the longitudinal wave passing through the adhesive portion between the electromechanical conversion element and the shaft-like member. The resonance frequency changes when a fluctuation voltage having a predetermined frequency is input.

When the thickness L, the elastic modulus E, and the density ρ of the adhesive between the electromechanical transducer and the shaft-like member are given, the velocity V of the longitudinal wave that passes through the bonded portion is expressed by V = (E / ρ) ^0.5 The time t passing through the bonded portion is t = L / V. Increasing t decreases the resonance frequency, and decreasing t increases the resonance frequency. That is, when any one of the thickness L, the elastic modulus E, and the density ρ of the adhesive is changed, the time t that passes through the bonded portion can be changed.

  Using this property, it is created by mixing fine particles into the adhesive, pressing the electromechanical conversion element and the shaft-like member with appropriate strength at the time of bonding, and controlling the thickness L of the adhesive by the diameter of the fine particles. The vibration type actuator can be set to a desired resonance frequency.

  FIG. 2 is an enlarged schematic view showing a state in which the electromechanical conversion element and the shaft-like member are bonded with an adhesive mixed with fine particles.

  As shown in the figure, the thickness L of the adhesive 5 can be made substantially equal to the diameter of the fine particles R by pressing the electromechanical conversion element 4 and the shaft-like member 6 with an appropriate strength during bonding. That is, by appropriately using the adhesive 5 in which various fine particles R having different diameters are mixed, the thickness L of the adhesive 5 can be controlled, whereby the vibration type actuator can be set to a desired resonance frequency.

  This will be described in more detail below.

  As the adhesive 5, for example, an insulating epoxy adhesive is used. The adhesive 5 is mixed with spherical fine particles. The fine particles are mixed with, for example, 10% by volume of inorganic insulating fine particles such as silica. The adhesive in which the fine particles are mixed is not a single type, but a plurality of types having different diameters of the mixed fine particles, for example, an adhesive in which fine particles having a diameter of 3 μm are mixed, or a fine particle having a diameter of 5 μm is mixed. Adhesives mixed with fine particles with a diameter of 7 μm, adhesives mixed with fine particles with a diameter of 10 μm, and adhesives mixed with fine particles with a diameter of 20 μm are prepared. Select to be used. The material of fine particles, the diameter, the type of adhesive to be prepared, and the like are merely examples, and are not limited thereto.

  Hereinafter, an outline of a method for manufacturing the vibration type actuator according to the first embodiment will be described with reference to flowcharts.

  FIG. 3 is a flowchart showing a flow of a process before the start of full-scale mass production of the vibration actuator according to the first embodiment, and any of the plural types of adhesives exemplified above is used. This is a flow for deciding whether to start mass production.

  As shown in FIG. 3, first, a plurality of types of adhesives are used, respectively, and the electromechanical conversion element and the shaft-like member are bonded to each other to create a small-lot vibration actuator for each adhesive (step S101). . Specifically, taking the case of the above-described adhesive as an example, for example, using an adhesive mixed with fine particles having a diameter of 3 μm, for example, using an adhesive mixed with fine particles having a diameter of 5 μm, for example, 100 adhesives mixed with fine particles having a diameter of 3 μm, for example 100 adhesives mixed with fine particles having a diameter of 7 μm, for example, 100 using an adhesive mixed with fine particles with a diameter of 7 μm 100, for example, and 100, for example, using an adhesive mixed with fine particles having a diameter of 20 μm.

  Next, all the resonance frequencies of the created vibration actuators are measured (step S102). The resonance frequency is measured by inputting a fluctuating voltage having a frequency determined in advance based on specifications and the like.

  Thereafter, the value of the measured resonance frequency is calculated as statistical data such as an average value and dispersion for each adhesive (step S103), and the most suitable adhesive for determining the predetermined resonance frequency range is determined. (Step S104). The predetermined resonance frequency range is a range determined in advance based on specifications and the like.

  As described above, at the start of mass production, it is determined which diameter of the fine particle mixed adhesive is used.

  FIG. 4 is a flowchart showing a schematic process flow during mass production of the vibration type actuator according to the first embodiment.

  First, the electromechanical transducer and the shaft-like member are bonded using the adhesive determined in step S104 in FIG. 3 to create a vibration type actuator (step S111). Next, the resonance frequency of the created vibration type actuator is measured (step S112). Steps S111 and S112 are repeated until a predetermined number is reached (step S113). In this case, the predetermined number is, for example, about 10,000, but is not limited thereto.

  Next, statistical data such as an average value and variance is calculated using the predetermined number of resonance frequency values obtained above (step S114). Further, it is determined whether, for example, the average value is within a predetermined range among the obtained statistical data (step S115). Here, an example of the determination method in step S115 will be described.

  FIG. 5 is a diagram illustrating an example of the determination method in step S115. In the graph shown in the figure, the vertical axis represents the resonance frequency, and the horizontal axis represents the manufacturing order.

  A is an allowable lower limit value of the resonance frequency, and B is an allowable upper limit value of the resonance frequency. Further, a is an allowable lower limit value of the average resonance frequency calculated in step S114, and b is an allowable upper limit value of the average resonance frequency calculated in step S114. The difference between a and A and the difference between B and b are preferably set to a degree slightly exceeding 3σ of the variance of statistical data.

  In the figure, if the average value of the resonance frequency calculated in step S114 is between the above a and b, it is determined in step S115 that it is within a predetermined range, and the average value of the resonance frequency is If the distance is between a and A or b and B, it is determined in step S115 that it is not within the predetermined range.

  Returning to FIG. 4, if it is determined that the calculated average value of the resonance frequencies is within the predetermined range (step S115; Yes), it is determined whether or not the production of the planned quantity is completed (step S116). . When the production of the planned quantity is not completed (step S116; No), the process returns to step S111 and the above-described flow is repeated. Moreover, when the production of the planned quantity is completed (step S116; Yes), the process ends.

  On the other hand, if it is determined in step S115 that the average value of the resonance frequencies is not within the predetermined range, the flow proceeds to the flow shown in FIG.

  FIG. 6 is a flowchart showing a flow of steps performed when it is determined in step S115 that the average value of the resonance frequencies is not within the predetermined range. Hereinafter, the flowchart of FIG. 6 will be described.

  If it is determined that the average value of the resonance frequency is not within the predetermined range (step S115 in FIG. 4; No), whether to increase the resonance frequency based on the statistical data when creating the number of small lots before mass production, An adhesive mixed with fine particles having different diameters is selected according to whether it is desired to be lowered (step S151), and a vibration type actuator with a small lot number is created (step S152).

  Specifically, the resonance frequency decreases when the particle diameter is large, and the resonance frequency increases when the particle diameter is small. For this reason, when the average value is lower than the allowable lower limit value a of the average value of the resonance frequency as shown in FIG. 5, an adhesive mixed with fine particles having a smaller diameter is selected, and the average value is allowed. If the upper limit value b is exceeded, an adhesive in which fine particles having a larger diameter are mixed is selected. This means that a small number of vibration type actuators are created with the selected adhesive.

  All the resonance frequencies of the vibration type actuators of a small number of lots created using the adhesive mixed with fine particles having different diameters are measured (step S153). Thereafter, the value of the measured resonance frequency is calculated as statistical data such as an average value and variance (step S154), and it is determined whether or not the average value is within a predetermined range (step S155). When it is determined that the average value is not within the predetermined range (step S155; No), the process returns to step S151, further selects an adhesive mixed with fine particles having different diameters, and repeats steps S151 to S154. .

  Specifically, even if an adhesive mixed with fine particles having a smaller diameter is selected, if the average value falls below the allowable lower limit a, the adhesive further mixed with fine particles having a smaller diameter Select. Even if an adhesive mixed with fine particles of larger diameter is selected, if the average upper limit b is exceeded, an adhesive mixed with fine particles of larger diameter is further selected. It is.

  When it is determined that the average value of the resonance frequencies of the small-lot vibration type actuators is within a predetermined range (step S155; Yes), this adhesive is determined as an adhesive to be used in the subsequent steps ( Step S156), the process returns to Step S111 shown in FIG. 4, and the production is continued using the adhesive determined by the method shown in FIG.

  As described above, the shape of the electromechanical conversion element and the shaft-like member generally has a slight variation between lots, and a process using an adhesive in which fine particles having a single diameter are mixed. Then, the resonance frequency of the created vibration type actuator may gradually shift from a desired value. This deviation is used by changing the thickness L of the adhesive 5 by using an adhesive having different characteristics, that is, an adhesive in which fine particles having different diameters are mixed, and even if the shape dimension varies, the resonance frequency is changed. It becomes possible to produce by adjusting to a desired value. As a result, it is possible to provide a manufacturing method for obtaining a vibration type actuator having stable characteristics at low cost without setting the dimensional tolerance extremely small.

  In the above example, the thickness L of the adhesive between the electromechanical transducer and the shaft-like member is changed by adjusting the fine particles mixed in the adhesive to those having different diameters, and the resonance frequency is adjusted. Although the case has been described, the time t passing through the bonded portion can be changed even if the elastic modulus E and / or the density ρ or both of them are changed.

  That is, even if the elastic modulus, which is a characteristic of the adhesive, is changed, the resonance frequency can be adjusted to a desired value and produced using the same process. For example, the elastic modulus of the adhesive can be changed by changing the material of the mixed fine particles, and the same effect as described above can be obtained. For example, the elastic modulus can be increased by mixing silica fine particles into the adhesive, and the elastic modulus can be decreased by mixing divinylbenzene or acrylic fine particles into the adhesive.

  Further, even if the density, which is a characteristic of the adhesive, is changed, the resonance frequency can be adjusted to a desired value and produced using the same process. For example, the density of the adhesive can be changed by changing the material or mixing ratio of the mixed fine particles, and the same effect as described above can be obtained.

  From the above equation, the resonance frequency can be increased by increasing the elastic modulus, and the resonance frequency can be decreased by decreasing the elastic modulus. Further, when the density is increased, the resonance frequency can be decreased, and when the density is decreased, the resonance frequency can be increased.

(Second Embodiment)
FIG. 7 is a schematic diagram showing the vibration type actuator 1 according to the second embodiment.

  The vibration type actuator 1 shown in the figure includes an electromechanical transducer 4, a shaft-like member 6 fixed to one end of the electromechanical transducer 4 with an adhesive 5, and a frictional force acting on the shaft-like member 6. The movable body 7 and the fixed body 2 fixed to the other end of the electromechanical conversion element 4 by the adhesive 3 are formed. Others are the same as those of the vibration type actuator 1 shown in FIG.

  The outline of the method for manufacturing the vibration type actuator according to the second embodiment will be described below with reference to flowcharts.

  FIG. 8 is a flowchart showing a schematic process flow before the start of full-scale mass production of the vibration type actuator according to the second embodiment, and any of the plural types of adhesives exemplified above is used. This is a flow for determining whether to start mass production.

  As shown in FIG. 8, first, the fixed body and the electromechanical transducer are bonded (step S200). In this step, bonding is performed using a predetermined adhesive. For example, only an insulating epoxy adhesive or an adhesive mixed with fine particles having a diameter of 7 μm is used. That is, the bonding conditions between the fixed body and the electromechanical conversion element are all the same.

  Next, using a plurality of types of adhesives, the electromechanical conversion element and the shaft-like member are bonded to each other, and a small number of vibration type actuators are created for each adhesive (step S201). Specifically, for example, 100 adhesives mixed with fine particles having different diameters described with reference to FIG.

  Next, all the resonance frequencies of the created vibration actuators are measured (step S202).

  Thereafter, the value of the measured resonance frequency is calculated as statistical data such as an average value and dispersion for each adhesive (step S203), and the most suitable adhesive for determining the predetermined resonance frequency range is determined. (Step S204).

  As described above, at the start of mass production, it is determined which adhesive of which diameter fine particles are mixed is used for bonding the electromechanical transducer and the shaft-shaped member.

  FIG. 9 is a flowchart showing a schematic process flow during mass production of the vibration type actuator according to the second embodiment.

  First, the fixed body and the electromechanical conversion element are bonded (step S210). This bonding condition is the same as step S200 in FIG.

  Next, the electromechanical transducer and the shaft-like member are bonded using the adhesive determined in step S204 in FIG. 8 to create a vibration type actuator (step S211). Next, the resonance frequency of the created vibration type actuator is measured (step S212). Steps S210 to S212 are repeated until a predetermined number is reached (step S213). In this case, the predetermined number is, for example, about 10,000, but is not limited thereto.

  Next, statistical data such as an average value and variance is calculated using the predetermined number of resonance frequency values obtained above (step S214). Further, it is determined whether, for example, the average value is within a predetermined range among the obtained statistical data (step S215). Here, the determination method in step S215 is the same as that described in FIG.

  When it is determined that the calculated average value of the resonance frequencies is within a predetermined range (step S215; Yes), it is determined whether or not the production of the planned quantity is completed (step S216). When the production of the planned quantity is not completed (step S216; No), the process returns to step S210 and the above-described flow is repeated. Further, when the production of the planned quantity is completed (step S216; Yes), the process ends.

  On the other hand, if it is determined in step S215 that the average value of the resonance frequencies is not within the predetermined range, the flow proceeds to the flow shown in FIG.

  FIG. 10 is a flowchart showing a flow of steps performed when it is determined in step S215 that the average value of the resonance frequencies is not within the predetermined range. Hereinafter, the flowchart of FIG. 10 will be described.

  When it is determined that the average value of the resonance frequency is not within the predetermined range (step S215 in FIG. 9; No), the fixed body and the electromechanical transducer are bonded under the same bonding conditions as in step S200 in FIG. S250). Next, based on the statistical data at the time of preparation of the number of small lots before mass production, an adhesive mixed with fine particles having different diameters is selected according to whether the resonance frequency is to be increased or decreased (step S251). Is created (step S252).

  Next, all the resonance frequencies of the small-lot vibration type actuators created using the adhesive mixed with fine particles having different diameters are measured (step S253). Thereafter, the measured value of the resonance frequency is calculated as statistical data such as an average value and variance (step S254), and it is determined whether or not the average value is within a predetermined range (step S255). When it is determined that the average value is not within the predetermined range (step S255; No), the process returns to step S250, further selects an adhesive mixed with fine particles having different diameters, and repeats steps S250 to S254. .

  When it is determined that the average value of the resonance frequencies of the small-lot vibration type actuators is within a predetermined range (step S255; Yes), this adhesive is used in the subsequent steps to form the shaft and the electromechanical transducer. The adhesive used for adhering the members is determined (step S256), the process returns to step S210 shown in FIG. 9, and the production is continued using the adhesive determined by the method shown in FIG.

  In the second embodiment, the bonding condition between the fixed body and the electromechanical conversion element, which is the previous process, is fixed, and the characteristics of the adhesive are applied when bonding the electromechanical conversion element and the shaft member in the subsequent process. However, if the bonding process between the electromechanical conversion element and the shaft-shaped member is first and the bonding process between the stationary body and the electromechanical conversion element is later, The resonance frequency may be adjusted by fixing the bonding condition between the mechanical conversion element and the shaft-shaped member and changing the characteristics of the adhesive when bonding the fixed body and the electromechanical conversion element.

  That is, when there are two bonding steps, it is preferable to manufacture by changing the properties of the adhesive at least in the step where the manufacturing order is later.

  In the second embodiment, the method of adjusting the resonance frequency by changing the diameter of the fine particles mixed in the adhesive has been described. However, the elasticity of the adhesive is the same as in the first embodiment. The resonance frequency may be adjusted by changing the rate and density.

  Moreover, in said 1st and 2nd embodiment, although it determined by determining whether the characteristic of an adhesive should be changed using an average value among statistical data, it is not restricted to this. Alternatively, the determination may be made in consideration of dispersion and the like.

  The vibration type actuator used in the present invention is not limited to the configuration described above. For example, two disk-shaped ceramic-type piezoelectric elements are stacked on top of each other with a metal plate sandwiched between them. The shaft-shaped member that is bonded and fixed to the bonding portion on one piezoelectric element is engaged by the frictional force of the shaft-shaped member. It may be a vibration type actuator configured with a moving body. In this case, it can also be used in a type in which a moving body is moved by applying a driving voltage to the piezoelectric element so that the disk-shaped piezoelectric element is displaced unevenly.

It is a schematic diagram which shows the vibration type actuator which concerns on 1st Embodiment. It is an expansion schematic diagram which shows the state which the electromechanical conversion element and the shaft-shaped member were adhere | attached with the adhesive agent which mixed microparticles | fine-particles. It is a flowchart which shows the flow of the process before the start of full-scale mass production of the vibration type actuator which concerns on 1st Embodiment. It is a flowchart which shows the flow of the outline process at the time of mass production of the vibration type actuator which concerns on 1st Embodiment. It is a figure which shows an example of the judgment method in step S115. It is a flowchart which shows the flow of the process performed when it is judged in step S115 that the average value of a resonant frequency is not in a predetermined range. It is a schematic diagram which shows the vibration type actuator which concerns on 2nd Embodiment. It is a flowchart which shows the flow of the outline process before the start of full-scale mass production of the vibration type actuator which concerns on 2nd Embodiment. It is a flowchart which shows the flow of the outline process at the time of mass production of the vibration type actuator which concerns on 2nd Embodiment. It is a flowchart which shows the flow of the process performed when it is judged in step S215 that the average value of a resonant frequency is not in a predetermined range. It is a figure which shows typically the change of the resonant frequency of the vibration type actuator at the time of inputting the voltage of a predetermined frequency, and the moving speed of a moving body when the dimension of the longitudinal direction of an electromechanical conversion element differs.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vibration type actuator 2 Fixed body 3 Adhesive 4 Electromechanical conversion element 5 Adhesive 6 Shaft-shaped member 7 Moving body 9 Conductive adhesive R Fine particle

Claims (9)

In a manufacturing method of a vibration type actuator having an electromechanical transducer that is displaced based on application of a voltage, and a shaft-like member that is bonded and fixed to the electromechanical transducer,
A method of manufacturing a vibration type actuator, comprising adjusting a resonance frequency of the vibration type actuator by changing a characteristic of an adhesive that bonds the electromechanical transducer and the shaft member. Manufacture of a vibration type actuator having an electromechanical transducer that is displaced based on application of a voltage, a shaft-like member that is bonded and fixed to the electromechanical transducer, and a fixed body that is bonded and fixed to the electromechanical transducer In the method
Of the step of bonding the electromechanical conversion element and the shaft-shaped member and the step of bonding the electromechanical conversion element and the fixed body, the characteristics of the adhesive are changed at least in a step after the manufacturing order. The method of manufacturing a vibration type actuator characterized by adjusting the resonance frequency of the vibration type actuator. In a manufacturing method of a vibration type actuator having an electromechanical transducer that is displaced based on application of a voltage, and a shaft-like member that is bonded and fixed to the electromechanical transducer,
Measuring the resonance frequency of a predetermined number of the manufactured vibration type actuators to obtain statistical data of the resonance frequency;
Determining whether the resonance frequency statistical data is within a desired range;
When the statistical data of the resonance frequency is determined to be out of a desired range, changing the characteristics of the adhesive and manufacturing,
A manufacturing method of a vibration type actuator characterized by comprising: Manufacture of a vibration type actuator having an electromechanical transducer that is displaced based on application of a voltage, a shaft-like member that is bonded and fixed to the electromechanical transducer, and a fixed body that is bonded and fixed to the electromechanical transducer In the method
Measuring the resonance frequency of a predetermined number of the manufactured vibration type actuators to obtain statistical data of the resonance frequency;
Determining whether the resonance frequency statistical data is within a desired range;
When it is determined that the statistical data of the resonance frequency is outside the desired range,
Among the steps of bonding the electromechanical conversion element and the shaft-shaped member, and bonding the electromechanical conversion element and the fixed body, at least in the process in which the manufacturing order is later, the characteristics of the adhesive are changed and manufactured And a process of
A manufacturing method of a vibration type actuator characterized by comprising: The method for manufacturing a vibration type actuator according to claim 1, wherein the shaft-like member is fixed to an end portion in a displacement direction of the electromechanical transducer. The shaft-like member is fixed to one end portion in the displacement direction of the electromechanical conversion element, and the fixed body is fixed to the other end portion in the displacement direction of the electromechanical conversion element. The manufacturing method of the vibration type actuator according to claim 2 or 4. The method for manufacturing a vibration type actuator according to any one of claims 1 to 6, wherein the characteristics of the adhesive are changed by changing the volume of the fine particles mixed in the adhesive. The method for manufacturing a vibration type actuator according to claim 7, wherein the fine particles are spherical. The method for manufacturing a vibration type actuator according to claim 1, wherein characteristics of the adhesive are changed by changing at least one of an elastic modulus or a density of the adhesive.

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