JP2010071971A - Ultrasonic measuring instrument and ultrasonic measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance the detection resolving power of an internal flaw in flaw inspection using a converging type ultrasonic probe wherein an ultrasonic vibrator is large and a focal distance is short. <P>SOLUTION: This ultrasonic measuring instrument includes a transmission-reception means (11 and 12) for transmitting an ultrasonic wave to an inspection target and receiving the reflected wave from the internal flaw of the inspection target while the inspection target is relatively scanned with focus points formed by an ultrasonic probe 10 and an aperture synthesizing processing means (14) for performing the aperture synthesizing processing of the signals received at respective measuring positions using a reference propagation time calculated by dealing with the waveform of the ultrasonic wave propagated across the ultrasonic probe and the internal flaw as the waveform of the ultrasonic wave synthesized on the whole of a transmitting at receiving surface. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ultrasonic measurement apparatus and an ultrasonic measurement method, and in particular, subjects having various shapes such as plates, tubes, and cylinders made of metal, resin, etc. using an ultrasonic flaw detection method which is a kind of nondestructive inspection method. It relates to the measurement of internal defects that exist inside.

  Conventionally, the ultrasonic flaw detection method, which is a kind of non-destructive inspection method, has been widely used for flaw detection of internal defects such as steel. In this internal defect inspection, in order to obtain more detailed information on internal defects, it is required to increase the resolution of the ultrasonic image. As a method for increasing the resolution of the ultrasonic image, the following conventional techniques are available. is there.

(1) C-scan ultrasonic flaw detection method There is a C-scan ultrasonic flaw detection method (for example, see Non-Patent Document 1) in which an ultrasonic transmitter / receiver that transmits and receives a focused beam is two-dimensionally scanned with respect to a subject. This flaw detection method is frequently used for detecting internal defects.

(2) Aperture Synthesis Method In addition to the above-described C-scan ultrasonic flaw detection method, there is an aperture synthesis method as a technique aiming at high-resolution imaging (see, for example, Patent Document 1 and Patent Document 2). The principle of the aperture synthesis method will be described by taking as an example a case where defect imaging is performed by bringing the transducer array 120 shown in FIG. 30 into contact with the surface of the subject 110. An ultrasonic wave is transmitted from each transducer of the transducer array 120 to detect a defect echo, and the beam path of the defective echo in the subject 110 is measured from the time from the transmission of the ultrasonic wave to the reception of the echo. Since the ultrasonic waves transmitted and received from the individual transducers 120p (p = 1, 2,...) Have a spatial spread, the beam path of the echo detected by the transducer 120p is Wp (p = 1, 2,..., Of the hollow sphere Sp (p = 1, 2,...) Having a radius Wp, a reflection source somewhere in the directivity angle range of the ultrasonic wave transmitted and received by the transducer 120p. Exists. When echoes are detected using all the transducers and the intersection of the hollow spheres Sp is obtained, this intersection becomes a defect image. In the example of FIG. 30, a defect image is synthesized from the beam path length of echoes detected by A, B, C, D, and E in the transducer array 120.

  In such an aperture synthesis method using an array-type ultrasonic probe, it is possible to synthesize a defect image in a certain area corresponding to the arrangement and shape of the array transducer, and mechanical scanning of the ultrasonic probe is unnecessary. Yes, ultrasonic testing can be performed at high speed. Then, if aperture synthesis processing is performed with the focus set at a certain depth position, flaw detection equivalent to the C-scan ultrasonic flaw detection method using the focused beam of (1) is possible.

(3) Aperture Synthesis Method Using Focused Beam There is an aperture synthesis method using a focused beam as a method combining (1) and (2) (see, for example, Patent Document 3). In this method, a focused ultrasonic probe is scanned, and a signal received at each measurement point is subjected to aperture synthesis processing to further increase the resolution. As shown in FIG. The constituent image is divided into minute elements of the same size, and minute elements PF _{k, l, m} that can be a defect echo source are selected from the beam path W _{i, j} measured at each measurement point P _{i, j.} This method can improve the resolution in flaw detection using a focused beam.

  In addition, using an array type ultrasonic probe, the waveform obtained by setting the focus at a certain position and performing the aperture synthesis of the above (2) using the signal of each transducer, the waveform of the focusing type ultrasonic probe is obtained. If the waveform is equivalent to that obtained by flaw detection using a focused beam, it can be combined with an aperture synthesis method using an array-type ultrasonic probe.

JP-A-8-62191 JP 2000-65808 A JP 2004-150875 A

Edited by Japan Nondestructive Inspection Association, “Ultrasonic Flaw Test II”, Japan Nondestructive Inspection Association (2000), p. 151-152

The flaw detection methods (1) to (3) have the following problems.
(1) C-scan ultrasonic flaw detection The resolution of flaw detection using a focused beam can be expressed by the beam diameter dw at the focal point. The beam diameter dw can be approximately expressed by the equation (1) using the focal length F of the ultrasonic beam, the wavelength λ, and the diameter D of the transducer (ultrasound transceiver).
dw = (Fλ) / D (1)
Therefore, to increase the resolution,
(a) Shorten the focal length.
(b) Shorten the wavelength.
(c) Increase the diameter of the ultrasonic transducer.
There are three methods.
However, the method (a) has a problem that only a portion close to the surface of the subject can be detected. In the method (b), there is a problem that the attenuation of the ultrasonic wave becomes large and it becomes difficult to detect the defect. In the method (c), the electrical impedance of the ultrasonic transmitter / receiver becomes too low, which causes a problem that it cannot be used. Therefore, there is a limit to increasing the resolution by using a focused beam.

(2) Aperture Synthesis Method As shown in FIG. 30, this aperture synthesis method requires a wide directivity angle for the ultrasonic transceiver in order to detect defect echoes over a wide range. It has been regarded as a technology that is incompatible with the C-scan flaw detection method in which a beam is focused in a narrow area and measurement is performed.

(3) Aperture synthesis method using a focused beam This method also has a problem in that the resolution is not improved when a highly focused ultrasonic beam is used. Specifically, a focused ultrasonic probe with a large ultrasonic transducer or an array type ultrasonic probe with a large area of the ultrasonic transducer array array used for aperture synthesis processing, a focal length, and a distance to the subject are used. There is a problem when the contact medium equivalent distance from the probe is not sufficiently long with respect to the size of the ultrasonic probe.
The reason is shown below.
In this method, it is assumed that transmission / reception of ultrasonic waves is performed at a single point in the center of the ultrasonic transducer, and the round-trip propagation time from the ultrasonic probe to the microelement is minute from the transmission / reception point as shown in FIG. The calculation is based on the assumption that ultrasonic waves propagate on the only path to the element. However, actually, transmission / reception of ultrasonic waves is performed on the entire surface of the ultrasonic transducer. For this reason, in particular, when a focused ultrasonic probe having a large ultrasonic transducer and a short focal length is used, it is far from the assumption of transmission / reception at one point. It was difficult to increase the resolution of internal defect imaging.

  The present invention has been made in view of such a situation, and the focal length of the ultrasonic transducer array and the ultrasonic transducer array array used for aperture synthesis processing is large and the focal length is large. An object of the present invention is to provide an ultrasonic measurement apparatus and an ultrasonic measurement method capable of improving the measurement resolution of internal defects in flaw detection using short aperture synthesis.

  The ultrasonic measurement apparatus according to the present invention transmits an ultrasonic wave toward the subject while scanning the focal point formed by the ultrasonic probe relative to the subject, and detects an internal defect of the subject. The reference propagation time obtained by treating the transmission / reception means for receiving the reflected wave and the waveform of the ultrasonic wave propagating between the ultrasonic probe and the internal defect as an ultrasonic waveform synthesized on the entire surface of the transmission / reception surface. And aperture synthesis processing means for performing aperture synthesis processing of the signal received at each measurement position.

  The ultrasonic measurement apparatus according to the present invention further includes a propagation time measurement unit that measures a propagation time to an internal defect based on the reflected wave at each measurement position, and the aperture synthesis processing unit includes the reference propagation time. Are extracted corresponding to the propagation time measured by the propagation time measuring means, and the position of the equal propagation time surface is defined as a defect position.

  Further, the ultrasonic measurement apparatus according to the present invention calculates the number of times extracted during the scanning for each defect candidate position obtained by the aperture synthesis processing unit, and the calculated number of times is calculated as the defect candidate. Display means for performing display corresponding to the position is provided.

  In the ultrasonic measurement apparatus according to the present invention, the aperture synthesis processing unit delays the reflected wave received by the transmission / reception unit by a delay time calculated based on the reference propagation time, and then adds the delayed wave. Generate a signal.

  In addition, the ultrasonic measurement apparatus according to the present invention includes display means for displaying the signal data generated by the aperture synthesis processing means.

  Moreover, in the ultrasonic measurement apparatus according to the present invention, the reference propagation time is divided into a plurality of regions over the entire transmission / reception surface of the ultrasonic probe, and is transmitted / received between the divided regions and internal defects. An ultrasonic waveform is obtained, and the waveform is calculated from a synthesized waveform for the entire surface of the ultrasonic probe.

  In the ultrasonic measurement apparatus according to the present invention, the reference propagation time may be determined by using a subject having an internal defect that has been artificially created in advance, and a relative focus between the focal point formed by the ultrasonic probe and the subject. This is obtained by transmitting an ultrasonic wave toward the subject while scanning the target and receiving a reflected wave from an internal defect of the subject.

  In the ultrasonic measurement apparatus according to the present invention, the ultrasonic probe is a focused ultrasonic probe.

  The ultrasonic measurement apparatus according to the present invention is an array-type ultrasonic probe in which a plurality of transducers are arranged, and a focus is formed on the signals of the transducers by aperture synthesis processing at each measurement point. Signal processing means for receiving the received signal is provided.

  The ultrasonic measurement apparatus according to the present invention includes defect determination means for performing defect determination using a signal subjected to the aperture synthesis processing by the aperture synthesis processing means.

  The ultrasonic measurement method according to the present invention includes a transmission / reception step of transmitting an ultrasonic wave toward the subject and receiving a reflected wave from an internal defect of the subject, and the ultrasonic probe and the internal defect. Aperture synthesis that performs aperture synthesis processing of signals received at each measurement point using the reference propagation time obtained by treating the waveform of the ultrasonic wave propagating between the two as the ultrasonic waveform synthesized on the entire transmission / reception surface And a processing step.

  In the present invention, as described above, the ultrasonic wave is transmitted toward the subject while scanning the focal point formed by the ultrasound probe relative to the subject, and from the internal defect of the subject. Reference propagation time obtained by treating the waveform of the ultrasonic wave propagating between the ultrasonic probe and the internal defect as an ultrasonic waveform synthesized on the entire surface of the transmission / reception surface And aperture synthesis processing means for performing aperture synthesis processing of the signal received at each measurement point. Therefore, the measurement resolution of internal defects can be improved.

It is a block diagram of the imaging device of the internal defect by the ultrasonic wave which concerns on Embodiment 1 of this invention. It is explanatory drawing of the equal propagation time surface of this invention. It is the flowchart which showed the processing method for obtaining ultrasonic propagation time by ultrasonic propagation analysis. It is explanatory drawing which showed the procedure of the method of obtaining propagation time. It is the flowchart which showed the processing method at the time of preparing an equal propagation time surface. It is explanatory drawing which showed the relationship between the variation | change_quantity of propagation time, and an equal propagation time surface. It is an example of the data of an equal propagation time surface. It is the flowchart which showed the process at the time of synthesize | combining a defect image. It is explanatory drawing of water propagation time and to-be-inspected object propagation time. It is explanatory drawing of the method of drawing the equal propagation time surface in a different propagation time using one equal propagation time surface. It is explanatory drawing of an imaging process. It is the figure which showed the effect of the Example of this invention in contrast with the result of the conventional method. It is explanatory drawing of the aperture synthesis | combination in Embodiment 2 of this invention. It is a block diagram of the imaging device of the internal defect by the ultrasonic wave concerning Embodiment 3 of this invention. It is explanatory drawing of the equal propagation time surface of this invention. It is the flowchart which showed the processing method for obtaining ultrasonic propagation time by ultrasonic propagation analysis. It is the flowchart which showed the processing method for acquiring the ultrasonic waveform in a defect position. It is the flowchart which showed the processing method for receiving with an array type ultrasonic probe and performing an aperture synthesis process and acquiring an output waveform. It is explanatory drawing which showed the procedure of the method of obtaining propagation time. It is the flowchart which showed the processing method at the time of preparing an equal propagation time surface. It is explanatory drawing which showed the relationship between the variation | change_quantity of propagation time, and an equal propagation time surface. It is an example of the data of an equal propagation time surface. It is the flowchart which showed the process at the time of synthesize | combining a defect image. It is explanatory drawing of water propagation time and to-be-inspected object propagation time. It is explanatory drawing of the method of drawing the equal propagation time surface in a different propagation time using one equal propagation time surface. It is explanatory drawing of an imaging process. It is the figure which showed the effect of the Example of this invention in contrast with the result of the conventional method. In Embodiment 4 of this invention, it is explanatory drawing of the method of comprising a delay time from the profile of propagation time variation | change_quantity, and performing a waveform resynthesis. It is the figure which showed the line focusing type linear array type ultrasonic probe. It is principle explanatory drawing of the conventional opening synthetic | combination method. It is explanatory drawing of the defect image synthesis method in a prior art (patent document 3). It is explanatory drawing which shows the path | route of the ultrasonic probe and microelement in a prior art.

In order to measure internal defects with a high resolution, in particular, to measure a defect shape with a resolution of several tens to several hundreds of μm, a focused ultrasonic probe or an aperture synthesis process with a large measurement ultrasonic transducer is used. Using an ultrasonic transducer array with a large array of ultrasonic transducer arrays, the focal length, the distance to the subject, and the contact medium equivalent distance from the ultrasonic probe transmit and receive the ultrasonic probe. When the size is not long enough, it has been found that the conventional technology cannot measure with high resolution. Specifically, the conditions shown in the example of Patent Document 3 (the focal length, the subject distance, and the contact medium equivalent distance are about eight times the transducer region (the size of the transducer region that performs transmission and reception)) Then, even with the technique of Patent Document 3, there is no problem in terms of resolution, but if the ratio of the focal length, the subject distance, and the contact medium conversion distance to the transducer area becomes smaller than the conditions, the resolution is reduced. I found it worse.
The contact medium conversion distance L is expressed by the following formula, and when an ultrasonic wave propagates through a plurality of media, an actual distance between the ultrasonic probe and an arbitrary position (for example, a distance to an internal defect). Is a distance expressed in terms of a distance in the medium with which the transducer of the probe is in contact, and the conversion is performed geometrically in consideration of refraction. The value is substantially equal to the focal length.

However, the actual propagation distance in L1, L2, L3, ...; Medium 1, 2, 3, ... (medium 1 is a contact medium),
C1, C2, C3, ...; speed of sound in medium 1,2,3, ... (medium 1 is contact medium)

  As a cause of this, in the conventional method, it is assumed that the transmission / reception of ultrasonic waves is performed at one point in the center of the region where transmission / reception is performed in the ultrasonic probe, and the propagation time from the center of the region to the minute element is calculated. Originally, the propagation distance is calculated, and aperture synthesis is performed on the assumption that a reflection source (internal defect) may exist on the spherical surface having the propagation distance as a radius. However, as the ratio of the focal length, subject distance, and contact medium distance to the transducer area becomes smaller, the distance between the internal defect and the center of the ultrasonic probe, and a point other than the internal defect and the center of the ultrasonic probe. The difference in the case where the distance to the (region from the center periphery to the end) is different becomes larger in proportion to the propagation distance.

In addition, transmission / reception of ultrasonic waves is performed on the entire surface of the ultrasonic probe, and it is considered that a combination of signals received in each region on the entire surface is a reception signal. In other words, in the conventional aperture synthesis process, a spherical surface is drawn from one point in the center of the ultrasonic probe with the propagation time itself as the propagation distance and the propagation distance as the radius. Therefore, since the influence of transmission / reception in the peripheral region other than the center of the ultrasonic probe is ignored, high-resolution measurement becomes difficult under the above conditions.
Therefore, in order to perform high-resolution measurement under the condition that the ratio of the focal length, the subject distance, and the contact medium distance to the transducer area is small, the area from the periphery to the end other than the center of the ultrasonic probe They obtained the knowledge that it is necessary to consider the influence of transmission and reception in Japan.

  As described above, the present invention pays attention to the fact that ultrasonic waves are transmitted and received over the entire surface of the ultrasonic probe, and the reflected wave from the internal defect depends on the position of the ultrasonic probe and the position of the internal defect. The aperture synthesis method is combined with flaw detection using a large-diameter, short-focus ultrasonic probe by analyzing in advance how the propagation time of the laser changes and performing signal processing using the analysis results. It is based on the knowledge that is possible. Specific examples thereof will be described as Embodiment 1 and Embodiment 2, respectively.

Embodiment 1. FIG.
FIG. 1 is a block diagram illustrating a configuration of an ultrasonic imaging apparatus, which is an example of an ultrasonic measurement apparatus according to Embodiment 1 of the present invention.
In FIG. 1, reference numeral 1 denotes a subject to be examined. In this example, the subject 1 is a stationary subject, water is used as a medium, and an internal defect is imaged using an immersion method. Reference numeral 10 denotes a focused ultrasonic probe (hereinafter also simply referred to as an ultrasonic probe) that transmits and receives a focused beam, and transmits the ultrasonic focused beam toward the subject 1 by an electric pulse of a fixed period from the transmission circuit 11. A reflected wave (echo) from the surface and inside of the subject 1 is received. The received signal is amplified by the receiving amplifier 12 to an appropriate level convenient for later signal processing.
The transmission circuit 11 and the reception amplifier 12 correspond to the transmission / reception means of the present invention. The ultrasonic probe 10 is two-dimensionally scanned (xy scanning) on the subject 1 by an appropriate scanning unit, and the position thereof is detected by the x-direction position detection unit 21 and the y-direction position detection unit 22, respectively, and the reflected waveform. It is sent to the data part 13. The ultrasonic probe 10 for transmitting and receiving a focused beam may be configured to form a focused beam by one ultrasonic transducer having a curved transmission / reception surface, or a plurality of ultrasonic transducers may have a curvature. It is good also as a structure which arranges and forms a focused beam by it.

The reflected waveform data section 13 detects reflected waveform data corresponding to each position P _{i, j} based on the outputs of the receiving amplifier 12, the x direction position detecting means 21 and the y direction position detecting means 22, and the output is a defect image. It is sent to the composition processing unit 14. The defect image synthesis processing unit 14 corresponds to the aperture synthesis means of the present invention, and measures the propagation time of ultrasonic waves. The difference in timing until the transmission pulse and the reflected surface echo 51 on the object surface are received, that is, the water propagation time, and the difference in reception timing between the surface echo 51 and the defect echo 52, that is, the object propagation time of the ultrasonic wave. measure. If the surface of the subject and the scanning surface of the ultrasonic probe 10 are substantially parallel, the water propagation time may be considered constant, so the water propagation time is measured once (or may be determined from the arrangement relationship). In this case, only the subject propagation time, which is the difference in reception timing between the surface echo 51 and the defect echo 52, may be measured thereafter. Each measured propagation time (hereinafter referred to as measurement propagation time) is associated with the center position P _{i, j} (i: position in the x direction, j: position in the y direction) of the ultrasonic probe 10 at this time. To be recorded.

  Further, the equal propagation time plane data unit 15 includes a storage device, and stores, for example, data of the equal propagation time plane obtained in advance by ultrasonic propagation analysis. As shown in FIG. 2, the equal propagation time plane is a plane formed by connecting points where the round trip propagation time from the probe surface to the minute defect at the point becomes equal. Since this equal propagation time plane varies depending on the distance of the ultrasonic probe 10 to the subject surface and the depth of the defect from the subject surface, data of a plurality of equal propagation time surfaces for each defect depth is prepared. .

In the first embodiment, an equal propagation time plane is created by ultrasonic propagation analysis prior to the defect image synthesis process. Note that the present invention is not limited to this, and the creation of the equal propagation time plane may be performed during defect image synthesis.
The creation of the equal propagation time plane as shown in FIG. 2 is necessary. As an example, the procedure for calculating the propagation time by ultrasonic propagation analysis will be described based on the flowchart of FIG. 3 and the explanatory diagram of FIG.

FIG. 3 is a flowchart of a method for obtaining an ultrasonic propagation time (hereinafter referred to as a reference propagation time) by ultrasonic propagation analysis, and FIG. 4 is an explanatory diagram showing a procedure of a method for obtaining a reference propagation time. Here, in FIG. 4, for simplicity, the probe and the path are represented in two dimensions, but in the first embodiment, the analysis is performed assuming that the probe and the path are in a three-dimensional space. However, the present invention is not limited to this, and the processing may be performed in two dimensions.
(S1) The surface of the ultrasonic probe is divided into regions having a minute area (hereinafter referred to as minute elements).
(S2) An ultrasonic waveform transmitted from a minute element is set.
(S3) A path from each region on the surface of the ultrasonic probe to a preset minute defect (corresponding to the set internal defect of the present invention) is obtained. In the upper part of FIG. 4, the paths for the four areas A to D are shown. Here, the path is obtained assuming that transmission / reception is performed at a point at the center of the minute element. In addition, AD shows a part of microelement for description.
(S4) A waveform obtained when an ultrasonic wave transmitted from one region propagates along a path and reaches a minute defect is obtained. At this time, the propagation time and attenuation when propagating on the path are considered.
(S5) As shown in the middle of FIG. 4, the calculation of (S4) is sequentially performed on all the microelements (A to D in the figure in order), and the obtained waveforms are added together. .
(S6) The above processes (S4) and (S5) are repeated until calculation is performed for all areas. When calculation is completed for all areas, the process proceeds to process (S7).

(S7) The ultrasonic wave having the waveform obtained in (S5) is emitted from the minute defect.
(S8) At this time, a waveform received in one area is obtained.
(S9) The obtained ultrasonic waveforms are added together.
(S10) As shown in the lower part of FIG. 4, the above calculations (S8) and (S9) are repeated until all the regions are calculated.
(S11) The arrival time is read from the combined waveform obtained in (S9) above. At this time, methods for reading the time include obtaining a rise time by setting a threshold, similarly obtaining a fall time by obtaining a threshold, and obtaining a time at which the waveform has a peak value. Choose the appropriate method.
(S12) The propagation time is obtained from the difference between the emission time from the probe and the arrival time. At this time, the method of reading the time includes acquiring a rise time by setting a threshold value, acquiring a fall time by acquiring the threshold value in the same manner, and acquiring a time at which the waveform has a peak value. Choose the appropriate method.

Next, a method for preparing data of the equal propagation time plane using the above method will be described. FIG. 5 is a flowchart showing the method. This procedure is shown below.
(S21) The water distance (see the upper part of FIG. 4) is set.
(S22) A subject distance (see the upper part of FIG. 4) is set.
(S23) A deviation (see the upper part of FIG. 4) between the internal defect of the subject and the central axis of the probe is set.
(S24) The reference propagation time is calculated (see the flowchart in FIG. 3).
(S25) The above operations (S23) and (S24) are repeated until sufficient data is obtained to change the deviation from the center axis of the probe within a range in which a defect signal can be received and to create an equal propagation time plane. . It should be noted that the amount (movement pitch) for changing the deviation between the subject and the probe central axis at one time is preferably less than or equal to the spatial resolution required for the measurement, and the range in which the signal from the internal defect can be obtained. What is necessary is just to move a probe to.

(S26) From the relationship between the deviation from the probe center axis obtained in the above (S23), (S24), and (S25) and the amount of change in the reference propagation time, the reference propagation time becomes equal using the ultrasonic wave propagation speed. The position is obtained, and the data of the equal propagation time plane is created by connecting the positions. For example, on the basis that the deviation between the internal defect of the subject and the probe central axis is 0, the difference in the distance in the depth direction is obtained using the propagation velocity from the difference in the reference propagation time at each position of the probe central axis, What is necessary is just to obtain | require a depth position from the difference of the distance. As shown in FIG. 6, the data of the equal propagation time plane is obtained by adjusting the depth of the minute defect so as to cancel the increase / decrease in the reference propagation time as a result. At this time, in the first embodiment, the reference propagation time and the equal propagation time plane are obtained as a difference from the value when the deviation from the probe central axis is zero. The above-described procedure for calculating the equal propagation time plane is an example, and the present invention is not limited to this. For example, in addition to the position of the probe center axis, the internal defect depth is also a variable, the reference propagation time is obtained at a plurality of internal defect depths, and the positions where the reference propagation times are equal are connected from the results, the equal propagation time plane It is good. Moreover, you may obtain | require by calculation and may obtain | require by experiment.
(S27) The operations from (S21) to (S26) described above are repeated until the equal propagation time planes corresponding to all water distances and subject distances that can be required (for example, can be assumed in the measurement target) are obtained.

  By the above method, it is possible to prepare equal propagation time planes at all water distances and subject distances that may be required. However, the creation method of the equal propagation time plane in the present invention is not limited to the creation method of the equal propagation time plane using the ultrasonic propagation analysis described above, and other analysis methods may be used or may be obtained by experiments. good.

  FIG. 7 is an example of the data of the equal propagation time plane obtained as described above, and this is stored in the uniform propagation time plane data unit 15 of FIG. 1 and the defect image synthesis processing unit 14 synthesizes the defect image. Used when In FIG. 7, the reference propagation time to be compared with the propagation time measured at the time of measurement is the propagation time corresponding to the column in which the deviation from the probe center is zero.

Next, the operation of the ultrasonic imaging apparatus of FIG. 1 that performs measurement using the equal propagation time plane obtained as described above will be described.
FIG. 8 is a flowchart showing processing when a defect image is synthesized in the ultrasonic imaging apparatus of FIG.
(S31) The ultrasonic probe 10 is operated to perform C-scan flaw detection, and the reflected waveform data unit 13 determines each position P based on the outputs of the reception amplifier 12, the x-direction position detection means 21, and the y-direction position detection means 22. _The reflected waveform data corresponding to _{i and j} is detected.
(S32) The defect image composition processing unit 14 detects the water propagation time and the subject propagation time from the reflected waveform at P _{i, j} having the largest defect echo in the reflected waveform data, as shown in FIG. Then, the water distance and the object distance (defect depth) are acquired from these measurement propagation times.

(S33) The defect image composition processing unit 14 has the water distance and the subject distance described above in the data of the equal propagation time plane stored in the equal propagation time plane data unit 15 (see FIG. 7). A distance close to the water distance / subject distance obtained in S32) is selected. In the first embodiment, as shown in FIG. 10, the subsequent processing is performed using only the one equal propagation time plane shape data selected here. FIG. 10 shows a method of drawing (determining) an equal propagation time plane at different reference propagation times using one equal propagation time plane data, and the equal propagation time plane data of the reference propagation time T2. On the other hand, even when the reference propagation times are different (T1, T3), if the error is not large, the equal propagation time having the same shape as the uniform propagation time surface of the reference propagation time T2 can be obtained by changing the depth position. A plane can be used (in this case, it is sufficient to have data of one equal propagation time plane). If the depth range where the internal defect to be detected exists is wide and the equal propagation time plane cannot be handled as the same shape, refer to the reference propagation time corresponding to the measured propagation time and the corresponding equal propagation The time plane data may be used.

(S34) The defect image composition processing unit 14 performs an imaging process using the data on the equal propagation time plane selected in (S33) above. FIG. 11 shows an imaging processing method according to the first embodiment. Here, in FIG. 11, the description is made in two dimensions for simplicity, but in the first embodiment, the processing is performed in three dimensions. However, the present invention is not limited to this, and the processing may be performed in two dimensions. The procedure of the imaging processing method in the first embodiment is shown below. It is assumed that the defect image composition processing unit 14 has an image memory corresponding to the configuration of FIG.
(A) A propagation time (hereinafter also referred to as a measurement propagation time) is detected as shown in FIG. 11 for the probe center position P _{i, j from} which a defect echo can be detected in each position P _{i, j} .
(B) A region where a defect may exist in the subject 1 is divided into minute volume elements, and each of the minute volume elements has a three-dimensional address Pf _{k, l, m} (k: position in the x direction, l: in the y direction) Position, m: position in the Z direction).
(C) The water distance and the subject distance are calculated from the measurement propagation time at each position P _{i, j} , the defect position (depth) is calculated when the defect is assumed to be on the probe center axis, and the defect Pf _{k, l, m} corresponding to the position is set as the center of the equal propagation time plane corresponding to the measurement propagation time as shown in FIG.
(D) above (c) equal propagation time plane from the center of equal propagation time surface set (see FIG. 10) is formed, each microelement Pf k corresponding to the position of equal propagation time surface _{thereof, l, For m} , count 1 is added to the counter C _{k, l, m} provided in Pf _{k, l, m} .
(E) The above operations (c) and (d) are performed for all positions P _{i, j at} which defect echoes can be detected.

(S35) The data obtained in (S34) is visualized. The imaging method in the first embodiment is as follows.
(A) For all (k, l) _, the maximum value C _max (k, l) of C _{k, l, m} when (k, l) is fixed is obtained.
(B) For each (k, l) where C _max (k, l) is greater than or equal to the threshold value, a different threshold value is determined and the counter C _{k, l, m} is checked from the smaller m side. Let m (k, l) be m for the first time.
(C) Using m (k, l) obtained in (b) above, connecting adjacent centers of each microelement corresponding to each (k, l, m (k, l)) with a line Constructs a polygon.
(D) The polygon obtained in the above (c) is three-dimensionally displayed.

  The imaging method is not limited to the three-dimensional polygon display method as described above, and may be another three-dimensional display method or a two-dimensional display method.

Here, using an ultrasonic probe having a frequency of 50 MHz, a transmitter / receiver diameter of 6 mm, and an underwater focal length of 15 mm, an artificial hole having a diameter of 300 μm was made in a steel piece sample, and the hole was subjected to C-scan flaw detection as shown in FIG. FIG. 12B shows an example in which the defect image synthesizing method is visualized and displayed on the defect image display device 16. FIG. 12C is a diagram in which the imaging process is performed by the method described in Patent Document 3 and three-dimensional display is performed by the defect image synthesis method (S35). In this embodiment, the underwater focal length and the contact medium conversion distance L are about 2.5 of the transducer region (vibrator diameter). In FIG. 12C, the image of the artificial hole is flattened in the z direction, whereas in FIG. 12B, the curved surface of the artificial hole is reproduced, and the shape resolution is improved. Recognize.
In the above description, an example in which an image is displayed by the defect image synthesis method and displayed on the defect image display device 16 has been described. However, in the first embodiment, the defect determination device 17 additionally includes a defect image synthesis processing unit. Defect determination is performed on the basis of the above-mentioned signal subjected to the aperture processing in step 14. Further, if only the defect determination is performed, the defect image display device 16 for visualizing and displaying the combined result may not be necessarily provided. The defect determining device 17 inputs the combined result from the defect image combining processing unit 14, and It may be configured to output only the determination result. On the contrary, if the automatic defect determination is not performed, the defect determination device 17 may be omitted.

  As described above, in the first embodiment, water is interposed between the focused ultrasound probe 10 and the subject 1, and the focused ultrasound probe 10 is scanned relative to the subject 1. A transmitter circuit 11 and a reception amplifier 12 (transmission / reception means) that transmit ultrasonic waves toward the subject 1 and receive reflected waves from internal defects of the subject 1, and at each measurement point based on the reflected waves A reflection waveform data unit 13 (propagation time measuring means) that measures the propagation time to the defect, and a defect image composition processing unit 14 that extracts the position of the defect candidate using the equal propagation time plane data corresponding to the measured propagation time. (Defect position extracting means), and for each of the positions, the number of times extracted during scanning is calculated, and the calculated number of times is written at an address corresponding to the position of the display image memory to display an image. Defect image display device 16 to perform An internal defect ultrasonic imaging device including a display unit), and in the defect image composition processing unit 14 (defect position extraction unit), the equal propagation time plane data is set with the focused ultrasonic probe 10. The propagation time of the ultrasonic wave propagating between the internal defects is divided into a plurality of areas on the entire transmission / reception surface of the focusing ultrasonic probe 10, and transmission / reception is performed between each divided area and the set internal defect. The waveform of the ultrasonic wave to be obtained is calculated, and the waveform is calculated from the signal waveform synthesized for the entire surface of the focused ultrasonic probe 10 so that the propagation time relative to the relative position between the focused ultrasonic probe 10 and the set internal defect is calculated. The amount of change is obtained, and the data formed by connecting the positions where the propagation times are equal based on the amount of change in the propagation time is obtained. Using this data, the shape of the internal defect can be visualized with high resolution. It has become possible.

Embodiment 2. FIG.
The second embodiment is an example in which the defect image composition processing unit 14 in FIG. 1 performs processing different from the above-described arithmetic processing. The defect image composition processing unit 14 according to the second embodiment uses delay time data instead of the above equal propagation time plane data. Therefore, a storage device (not shown) for storing delay time data is provided in place of the equal propagation time plane data unit 15. This delay time data (delay time group) is obtained from propagation time change amount data (data before the conversion of FIG. 6), and as shown in the conceptual diagram of FIG. 13, the propagation time change amount. The longer the data, the shorter the delay time, and the shorter the variation data, the larger the delay time. Similarly to the equal propagation time plane data, it is obtained corresponding to each value of water distance and defect depth and stored in the storage device.

In the flowchart shown in FIG. 8, the defect image composition processing unit 14 differs in the specific contents of the equal propagation time plane selection process (S33) and the data visualization process (S34), but the other processes are the same. is there.
The equal propagation time plane selection process (S33) is a delay time data selection process. Specifically, processing for selecting delay time data (delay time group) corresponding to the water distance and defect depth of the received waveform measured by the ultrasonic probe is performed.
In the data visualization process (S34), the aperture synthesis process is performed as shown in FIG. 13 using the delay time data selected in the delay time data selection process.

  Specifically, a predetermined number of adjacent probe positions (10 points in the example of FIG. 29) are selected from a number of probe-scanned points, and the selected delay time data with respect to the reflected waveform data measured at the 10 points. Corresponding to (delay time group), the waveform is delayed at each probe position. In the case shown in FIG. 13, the delay time is reduced for the signal on the outer probe and the delay time is increased for the inner probe. As a result, if there is a defect under the probe located at the center of the predetermined number of probes, the defect signal is emphasized by detecting the defect waveform and the presence of the defect can be detected. On the other hand, if there is no defect under the probe located at the center, for example, if there is a defect directly under the outer probe, the signal of the defect received by each probe will be out of phase even if delayed, so it will cancel out. The defect signal cannot be detected without being emphasized. That is, there is no defect immediately below the probe located at the center.

An aperture synthesis waveform is obtained by selecting and repeating a predetermined number of data in order while moving the selection range with respect to data obtained by measuring such a process at a number of points. Then, when selecting the delay time data (delay time group), the delay time data (delay time group) corresponding to a plurality of depths is selected, and the above arithmetic processing is repeated. Then, the obtained waveform is displayed by an appropriate method (A scope, B scope, C scope, three-dimensional display).
In the second embodiment, the example in which the defect image synthesizing method is used to image and display on the defect image display device 16 has been described. In addition, the defect determination device 17 is subjected to the opening process by the defect image synthesis processing unit 14. Defect determination is performed based on the above signal. Further, if only the defect determination is performed, the defect image display device 16 for visualizing and displaying the combined result may not be necessarily provided. The defect determining device 17 inputs the combined result from the defect image combining processing unit 14, and It may be configured to output only the determination result. On the contrary, if the automatic defect determination is not performed, the defect determination device 17 may be omitted.

  As described above, in the second embodiment, water is interposed between the focused ultrasound probe 10 and the subject 1 and the focused ultrasound probe 10 is scanned relative to the subject 1. The transmission circuit 11 and the reception amplifier 12 (transmission / reception means) for transmitting the ultrasonic wave toward the subject 1 and receiving the reflected wave from the internal defect of the subject 1 are added after delaying the received reflected wave. An internal defect including a defect image synthesis processing unit 14 (signal generation unit) that generates a signal and a defect image synthesis processing unit 14 (display unit) that outputs the generated signal data to an image memory for display. In the ultrasonic imaging apparatus, the defect image synthesis processing unit 14 (signal generation means) determines the propagation time of the ultrasonic wave propagating between the focused ultrasonic probe 10 and the set internal defect as the focused ultrasonic wave. Multiple transmission / reception surfaces of the probe 10 An ultrasonic waveform transmitted and received between each divided region and the set internal defect is obtained, and the waveform is calculated from a signal waveform synthesized for the entire surface of the focusing ultrasonic probe 10. Then, the amount of change in the propagation time with respect to the relative position between the focused ultrasonic probe 10 and the set internal defect is obtained, the delay time is obtained from the amount of change in the propagation time, and the reflected wave is delayed by the delay time to internally By generating the video signal of the defect, the internal defect can be imaged with high resolution.

Next, an embodiment in which the present invention is applied to an array type ultrasonic probe will be described.
In the following Embodiments 3 and 4, instead of obtaining the received signal at each measurement point by scanning the focused ultrasound probes 1 and 2 of the embodiment, the signals of the transducers of the array ultrasound probe Are formed as a received signal at each measurement point by forming a focal point by aperture synthesis processing. The received signal at each measurement point is further subjected to aperture synthesis processing. That is, as in the first and second embodiments, focusing on the fact that the ultrasonic transmission / reception is performed by the array row of a plurality of transducers in the array ultrasonic probe, the array ultrasonic probe is formed by aperture synthesis or focusing. By analyzing in advance how the propagation time of the reflected wave from the internal defect changes depending on the position of the focal point and the position of the internal defect, and by performing signal processing using the analysis result, ultrasonic vibration This is based on the knowledge that it is possible to improve the resolution of flaw detection using a probe with a large area of the entire array array and a short focal length, and an aperture synthesis setting. Specific examples will be described as Embodiment 3 and Embodiment 4, respectively.

Embodiment 3. FIG.
FIG. 14 is a block diagram showing a configuration of an ultrasonic imaging apparatus which is an example of an ultrasonic measurement apparatus according to Embodiment 3 of the present invention. In FIG. 14, reference numeral 1 denotes a subject to be examined. In this example, the subject 1 is a stationary subject, water is used as a medium, and an internal defect is imaged using an immersion method. Reference numeral 10 denotes an array-type ultrasonic probe that transmits and receives ultrasonic waves, and an ultrasonic beam is transmitted to the subject 1 by an electric signal transmitted from the transmission circuit 111 to each transducer through the drive element selection circuit 112 through a drive element selection circuit 112. And a reflected wave (echo) from the surface and inside of the subject 1 is received. The received signal is subjected to aperture synthesis processing by the receiving circuit 113 and the array signal processing circuit 114, and is amplified to an appropriate level convenient for later signal processing. The array-type ultrasonic probe 10a is two-dimensionally scanned (xy scanning) or one-dimensionally scanned (y-scanned) on the subject 1 by appropriate scanning means, and the position thereof is the x-direction position detecting means 21 and the y-direction position. Each is detected by the detection means 22 and sent to the output waveform data section 115.

  The output waveform data section 115 is based on the outputs of the array signal processing circuit 114, the x-direction position detection means 21 and the y-direction position detection means 22, and the focal point Pi, j formed by aperture synthesis at this time by the array-type ultrasonic probe 10a. Output waveform data corresponding to (i: position in the x direction, j: position in the y direction) (corresponding to the output waveform data of the focused ultrasonic probe in the first and second embodiments) is detected, and the output is a defect image synthesis. It is sent to the processing unit 116. The defect image composition processing unit 116 measures the difference between the transmission time and the reception time of the defect echo 52, that is, the ultrasonic propagation time. The propagation time measured here is the difference between the transmission time and the reception time of the reflected surface echo 51 on the subject surface, that is, the difference between the water propagation time and the reception timing between the surface echo 51 and the defect echo 52, that is, It is the object propagation time of the sound wave. If the surface of the subject and the scanning surface of the array-type ultrasonic probe 10a are substantially parallel, the water propagation time may be considered to be constant. Therefore, the water propagation time is measured once (or may be determined from the arrangement relationship). ), The object propagation time, which is the difference in reception timing between the surface echo 51 and the defect echo 52, need only be measured thereafter. Each measured propagation time (hereinafter also referred to as measured propagation time) is recorded in association with each position Pi, j.

  In addition, the equal propagation time plane data unit 117 is a storage device, and stores data of the equal propagation time plane that has been obtained in advance by ultrasonic propagation analysis, for example. As shown in FIG. 15, the equal propagation time plane is a plane formed by connecting points that are obtained by aperture synthesis so that the round trip propagation times to the minute defect at that point are equal. Since this equal propagation time plane changes depending on the depth of the defect with respect to the focal point of the array-type ultrasonic probe 10a, data of a plurality of equal propagation time planes for each defect depth is prepared. The output waveform data unit 115, the defect image composition processing unit 116, and the equal propagation time plane data unit 117 constitute a defect image reconstruction signal processing unit 200.

  The array signal processing circuit 114 and the defect image synthesis processing unit 116 have the same function in that both perform aperture synthesis processing. However, the array signal processing circuit 114 performs each vibration of the array type ultrasonic probe at each measurement point. The signal received by the child is subjected to aperture synthesis processing, thereby obtaining the signal received by the focused beam at each measurement point. Corresponding to signal processing means) which forms a focal point of the signal of the vibrator by aperture synthesis processing and uses it as a signal received at each measurement point. On the other hand, the defect image synthesis processing unit 116 performs aperture synthesis processing on the signals subjected to aperture synthesis processing by the array signal processing circuit 114 at each measurement point to synthesize a defect image. In this defect image synthesis processing unit 116, the equal propagation time plane data of the present invention is essential, but in the array signal processing circuit 114, since the vibrator is small, even if the equal propagation time plane data of the present invention is not used, A conventional synthetic aperture process (a reflection source is present at an equal distance from the center of the transducer) may be used.

  Further, the array-type ultrasonic probe 10a has been described as performing all the transducers included in the transmission / reception region range. However, if not all, the array-type ultrasonic probe 10a performs transmission / reception with a gap at one or two intervals. You may make it transmit / receive using the vibrator | oscillator selected.

In the third embodiment, the equal propagation time plane is created by ultrasonic propagation analysis prior to the defect image synthesis process. Note that the present invention is not limited to this, and the creation of the equal propagation time plane may be performed during defect image synthesis.
The creation of an equal propagation time plane as shown in FIG. 15 can be performed by calculating a propagation time W (referred to as a reference propagation time) by ultrasonic propagation analysis. This will be described based on the flowcharts of FIGS. 16, 17, and 18 and the explanatory diagram of FIG.

  FIG. 16 is a flowchart of the entire method for obtaining the reference propagation time by ultrasonic propagation analysis, and FIG. 17 is a flowchart showing details of the process S43 (acquisition of ultrasonic waveform at the defect position) in FIG. FIG. 19 is a flowchart showing details of processing S44 (acquisition of an ultrasonic waveform received by an array probe and subjected to aperture synthesis processing) in FIG. 16, and FIG. 19 is an explanatory diagram showing a procedure of a method for obtaining a reference propagation time It is. Here, FIG. 19 shows a two-dimensional analysis in the linear array probe. However, the present invention is not limited to this, and the shape of the array probe may not be linear, and the analysis may be performed in three dimensions.

(S41) An ultrasonic waveform transmitted from the transducer is set.
(S42) A path from each transducer of the ultrasonic probe to a preset minute defect (corresponding to the set internal defect of the present invention) is obtained. In the upper part of FIG. 19, the paths of the two vibrators are shown.

(S43) An ultrasonic waveform at the defect position is acquired.
As detailed processing of (S43), the following processing is performed as shown in the flowchart of FIG.
(S43-1) Initialization of ultrasonic waveform data for output (S43-2) Determination of a transducer to be calculated (S43-3) An ultrasonic waveform at a minute defect position by the calculated transducer is calculated. At this time, if the transmission timing is different depending on the vibrator, the transmission is set at a time corresponding to the vibrator as shown in FIG. Also consider the propagation time and attenuation when propagating on the path. (See Figure 19)
(S43-4) The obtained ultrasonic waveforms are sequentially added to the output ultrasonic waveform data.
(S43-5) The processes from (S43-2) to (S43-4) are repeated until calculation is performed for all the transducers used for transmission.
(S43-6) The output ultrasonic waveform data is output as the ultrasonic waveform at the defect position. After the processing of FIG. 17, the process proceeds to processing (S44) of FIG.

(S44) An output waveform received by the array probe and subjected to aperture synthesis processing is acquired.
As the details of (S44), the following processing is performed as shown in the flowchart of FIG.
(S44-1) The ultrasonic waveform at the defect position is emitted from the minute defect position (S44-2) The reception waveform data of all the transducers used for reception is initialized (S44-3) and the transducer for calculation is determined (S44) -4) Calculate the ultrasonic waveform received by the transducer being calculated (see FIG. 19)
(S44-5) Steps (S44-3) to (S44-4) are repeated until calculation is performed for all the transducers used for reception.
(S44-6) The output waveform data after the focused beam processing is initialized (S44-7). Delay processing corresponding to the actual focused beam processing is performed on the received waveform data of all the transducers (see FIG. 19).
(S44-8) The received waveform data of all the transducers subjected to the delay process are added to the output waveform data, respectively (see FIG. 19).
After such processing in FIG. 18, the processing shifts to processing in FIG. 16 (S45).

(S45) The arrival time is read from the output waveform obtained in (S44) above. At this time, there are methods for reading the time, such as setting the threshold value to acquire the rising time, setting the threshold value to acquire the falling time, and acquiring the time when the waveform reaches the peak value, but are particularly limited. An appropriate method is appropriately used according to the obtained waveform.
(S46) The reference propagation time is obtained from the difference between the emission time from the probe and the arrival time. At this time, the method of reading the time includes acquiring a rise time by setting a threshold value, acquiring a fall time by acquiring the threshold value in the same manner, and acquiring a time at which the waveform has a peak value. Choose the appropriate method.

Next, a method for preparing data of the equal propagation time plane using the above method will be described.
FIG. 20 is a flowchart showing the method. This procedure is shown below.
(S51) A water distance (see the upper part of FIG. 19) is set.
(S52) A subject distance (see the upper part of FIG. 19) is set.
(S53) The aperture synthetic focus depth (for example, the depth position in the subject, see the upper part of FIG. 19) is set.
(S54) A deviation (in a plane orthogonal to the depth direction) between the internal defect of the subject and the aperture synthetic focus is set.
(S55) The reference propagation time is calculated from the waveform subjected to aperture synthesis processing (see the flowcharts of FIGS. 16, 17, and 18).
(S56) The above processing is performed until sufficient data is obtained to change the in-plane deviation perpendicular to the depth direction from the aperture synthetic focus within a range in which the defect signal can be received, and to create an equal propagation time plane. (S54) The operation of (S55) is repeated. Note that the amount (movement pitch) for changing the deviation between the subject and the aperture synthetic focus at one time is preferably less than or equal to the spatial resolution required for the measurement, and the range in which a signal from an internal defect is obtained. What is necessary is just to move a probe to.

(S57) From the relationship of the amount of change in the reference propagation time with respect to the in-plane deviation perpendicular to the depth direction between the subject and the aperture synthetic focus obtained in the above processing (S54) (S55) (S56), ultrasonic waves The positions where the reference propagation times are equal to each other are obtained using the propagation speeds of these, and the data of the equal propagation time plane is created by connecting the positions. For example, on the basis of when the deviation between the internal defect of the subject and the aperture synthetic focus is 0, the difference in the distance in the depth direction is obtained using the propagation velocity from the difference in the reference propagation time at each position of the probe central axis, What is necessary is just to obtain | require a depth position from the difference of the distance. As shown in FIG. 21, the data on the equal propagation time plane is obtained by adjusting the depth of the minute defect so as to cancel the increase / decrease in the reference propagation time as a result. At this time, in the third embodiment, the reference propagation time and the equal propagation time plane are obtained as a difference from the value when the deviation from the aperture synthetic focal axis is zero. The above-described procedure for calculating the equal propagation time plane is an example, and the present invention is not limited to this. For example, in addition to the position of the aperture synthetic focus, the internal defect depth is also used as a variable, the reference propagation time is obtained at a plurality of internal defect depths, and the positions where the reference propagation times are equal are connected from the results, and the equal propagation time surface It is good.
(S58) From the above (S51) to (S57) until the equal propagation time planes corresponding to all the water distances, the object distances, and the aperture synthetic focal depths that can be necessary (for example, can be assumed in the measurement target) are obtained. Repeat the operation.

By the above method, an equal propagation time plane can be prepared for all water distances, subject distances, and aperture synthetic focus depths that may be required. However, the creation method of the equal propagation time plane in the present invention is not limited to the above method, and data by actual measurement or ultrasonic propagation simulation may be used. Further, the calculation method of the reference propagation time is not limited to the method shown in FIG. 16, FIG. 17, FIG. 18, and FIG.
If the area of each transducer is sufficiently large for the subject, the transducer can be further divided into a plurality of microregions, and processing can be performed by adding the signals of each microregion in units of each transducer. It ’s fine.
Further, even when the area is large in the direction orthogonal to the array column direction (the depth direction in FIG. 20), the area may be divided into small regions in the orthogonal direction. (For example, a probe as shown in FIG.
Further, although the example in which the vibrators are arranged only in the one-dimensional direction has been described, the present invention can also be applied to an array type probe arranged in two dimensions.

  FIG. 22 is an example of the data of the equal propagation time plane obtained as described above, which is stored in the uniform propagation time plane data unit 117 of FIG. 14 and synthesizes the defect image in the defect image composition processing unit 116. Used when In FIG. 22, the reference propagation time to be compared with the measured propagation time is the propagation time corresponding to the column in which the deviation from the aperture synthetic focus is zero.

Next, the operation of the ultrasonic imaging apparatus of FIG. 14 that performs measurement using the data on the equal propagation time plane obtained as described above will be described.
FIG. 23 is a flowchart showing processing when a defect image is synthesized in the ultrasonic imaging apparatus of FIG.
(S61) The array-type ultrasonic probe 10a, the drive element selection circuit, and the array signal processing circuit are operated to scan the focal point formed by aperture synthesis, and the output waveform data unit 115 includes the drive element selection circuit 112, Based on the outputs of the receiving circuit 113, the array signal processing circuit 114, the x-direction position detection means 21 and the y-direction position detection means 22, output waveform data corresponding to each position Pi, j is detected.
(S62) As shown in FIG. 24, the array signal processing circuit 114 or the defect image synthesizing processing unit 116 calculates the water propagation time and the subject from the reflected waveform at Pi, j having the largest defect echo in the output waveform data. The specimen propagation time is detected, and the water distance and subject distance (defect depth) are acquired from the propagation times.
(S63) The defect image composition processing unit 116 stores the water distance / subject distance and the aperture synthetic focus in the data of the uniform propagation time plane stored in the uniform propagation time plane data section 117 (see FIG. 22). A depth setting value close to the water distance / subject distance and aperture synthetic focus depth obtained in (S62) is selected. In the third embodiment, as shown in FIG. 25, the subsequent processing is performed using only the one equal propagation time plane shape selected here. FIG. 25 shows a method of drawing (determining) an equal propagation time plane with different reference propagation times using one equal propagation time plane. Even when the reference propagation times are different (T1, T3), if the difference in propagation times is not large, the same propagation with the same shape as the uniform propagation time surface of the reference propagation time T2 can be obtained by changing the depth position. A time plane can be used (in this case, one piece of data on the equal propagation time plane is sufficient). If the depth range where the internal defect to be detected exists is wide and the equal propagation time plane cannot be handled as the same shape, refer to the reference propagation time corresponding to the measured propagation time and the corresponding equal propagation The time plane data may be used.

(S64) The defect image composition processing unit 116 performs an imaging process using the data on the equal propagation time plane selected in (S63) above. FIG. 26 shows an imaging processing method according to the third embodiment. Here, in FIG. 26, the description is made in two dimensions for simplicity, but in the third embodiment, the processing is performed in three dimensions. However, the present invention is not limited to this, and the processing may be performed in two dimensions. The procedure of the imaging processing method in the first embodiment is shown below.
(A) The focal position Pi, j in which the defect echo can be detected in each focal position Pi, j (coordinate in the plane orthogonal to the depth direction and corresponding to the center position of the transducer group to be transmitted / received) For j, a propagation time (hereinafter also referred to as measurement propagation time) is detected as shown in FIG. The measurement propagation time may be detected by the array signal processing circuit 114 in FIG. 14 or by the defect image composition processing unit 116. In this embodiment, the detection is performed by the array signal processing circuit 114.
(B) A region where a defect may exist in the subject 1 is divided into minute volume elements, and each of the minute volume elements has a three-dimensional address Pfk, l, m (k: position in the x direction, l: position in the y direction) , M: position in the Z direction).
(C) The water distance and the subject distance are calculated from the measurement propagation time at each position Pi, j, and the coordinates on the central axis (in the plane orthogonal to the depth direction) of the transducer group that the defect transmits and receives are Pi. , j), the defect position (depth) is calculated, and Pfk, l, m corresponding to the defect position is calculated as the center of the equal propagation time plane corresponding to the measured propagation time as shown in FIG. Set.
(D) An equal propagation time plane (see FIG. 25) is formed from the center of the equal propagation time plane set in (c) above, and each minute region Pfk, l, m corresponding to the position of the equal propagation time plane is formed. On the other hand, count 1 is added to the counter Ck, l, m provided in Pfk, l, m.
(E) The above operations (c) and (d) are performed for all the positions Pi, j where the defect echo can be detected.

(S65) The data obtained in (S64) is visualized. The imaging method in the third embodiment is as follows.
(A) The maximum value Cmax (k, l) of Ck, l, m when (k, l) is fixed for all (k, l).
(B) For each (k, l) for which Cmax (k, l) is greater than or equal to the threshold, another threshold is determined and the counter Ck, l, m is checked from the smaller m side. The above m is m (k, l).
(C) Using m (k, l) obtained in (b) above, connecting adjacent centers of each minute region corresponding to each (k, l, m (k, l)) with a line Constructs a polygon.
(D) The polygon obtained in the above (c) is three-dimensionally displayed.
The imaging method is not limited to the three-dimensional polygon display method as described above, and may be another three-dimensional display method or a two-dimensional display method.

Here, an ultrasonic beam focusing array probe having a frequency of 50 MHz, an array pitch of 100 μm, 32 channels used for aperture synthesis, and an underwater focal length of 15 mm of the line focusing beam (size in the direction orthogonal to the array arrangement direction as shown in FIG. 29). 10 mm vibrator surface has a curvature and is focused in that direction.), An artificial hole having a diameter of 300 μm is made in a steel slab sample, and the hole is inspected as shown in FIG. FIG. 27 (b) shows an example of imaging by the synthesis method. Note that FIG. 27B uses an equal propagation time plane created by dividing each vibrator into fine regions. FIG. 27C is a diagram in which the imaging process is performed by the method described in Patent Document 3 and three-dimensionally displayed by the defect image synthesis method (S65). In this embodiment, the underwater focal length and the contact medium equivalent distance L are about 1.5 of the transducer region (vibrator diameter). In FIG. 27 (c), the image of the artificial hole is flat in the z direction, whereas in FIG. 27 (b), the curved surface of the artificial hole is reproduced, and the shape resolution is improved. Recognize.
In the third embodiment, the example in which the defect image synthesizing method is used to image and display on the defect image display device 16 has been described. In addition, the defect determination device 17 is subjected to opening processing by the defect image synthesis processing unit 116. Defect determination is performed based on the above signal. In addition, if only the defect determination is performed, the defect image display device 16 that images and displays the combined result may not be necessarily provided. The defect determination device 17 inputs the combined result from the defect image combining processing unit 116, It may be configured to output only the determination result. On the contrary, if the automatic defect determination is not performed, the defect determination device 17 may be omitted.

  As described above, in the third embodiment, the focus is formed by interposing water between the array-type ultrasonic probe 10a and the subject 1 and performing aperture synthesis processing on the reception signal of the array-type ultrasonic probe 10a. Are transmitted relative to the subject 1 while transmitting ultrasonic waves toward the subject 1 and receiving a reflected wave from an internal defect of the subject 1, and an array type ultrasonic probe 10a. A signal processing step of performing aperture synthesis processing on the signal received by each of the transducers, a signal generation step of generating a signal by delaying the obtained aperture synthesis waveform by a set delay time, and generating a signal; An ultrasonic imaging method of an internal defect including a display step of displaying a generated signal, wherein the delay time is calculated by calculating a propagation time based on an aperture synthetic waveform, and the array-type ultrasonic probe 10a. Each The amount of change in the propagation time with respect to the relative position between the focus of the aperture synthesis process performed on the received signal of the moving element and the set internal defect is obtained, and an imaging signal of the internal defect is generated from the amount of change in the propagation time. Internal defects can be visualized with high resolution.

Embodiment 4 FIG.
The fourth embodiment is an example in which the defect image composition processing unit 116 in FIG. 14 performs processing different from the above arithmetic processing. The defect image composition processing unit 116 according to the fourth embodiment uses delay time data instead of the above equal propagation time plane data. For this reason, a storage device (not shown) for storing delay time data is provided in place of the equal propagation time plane data portion 117. This delay time data (delay time group) is obtained from propagation time change amount data (data before the conversion of FIG. 21), and as shown in the conceptual diagram of FIG. 28, the propagation time change amount. This is data in which the delay time is reduced as the value is larger and the delay time is increased as the change amount is smaller. Similarly to the equal propagation time plane data, it is obtained corresponding to each value of water distance, subject distance, and aperture synthetic focal depth, and stored in the storage device.

In the flowchart shown in FIG. 23, the defect image composition processing unit 116 differs in the specific contents of the equal propagation time plane selection process (S63) and the data visualization process (S64), but the other processes are the same. is there.
The equal propagation time plane selection process (S63) is a delay time data selection process. Specifically, processing for selecting delay time data (delay time group) corresponding to the water distance and defect depth of the received waveform measured by the array type ultrasonic probe is performed.
In the data visualization process (S64), the waveform resynthesis process is performed as shown in FIG. 28 using the delay time data selected in the delay time data selection process.

  Specifically, a predetermined number of adjacent focal positions (10 points in the example of FIG. 28) are selected from a number of focally scanned points, and reflected waveform data measured at the 10 points (each of the array type ultrasonic probe). Delay signal data (delay time group) selected with respect to the output waveform data of the focusing ultrasonic probe in the first and second embodiments, which is a signal obtained by performing aperture synthesis processing for forming a focal point of the signal of the transducer. ), The waveform is delayed at each probe position. As shown in FIG. 28, the delay time is reduced for the signal at the outer focus, and the delay time is increased for the inner focus. As a result, if there is a defect above and below the focal point located at the center of the predetermined number of focal positions, the defect signal is emphasized and the presence of the defect can be detected by aligning the defect waveforms. On the other hand, if there is no defect above and below the focal point located at the center, for example, if there is a defect directly above or below the outer focal point, the signal of the defect received at each focal point is not aligned even if delayed, The defect signal cannot be detected without being offset and emphasized. That is, there is no defect directly above or below the focal point located at the center.

An aperture synthesis waveform is obtained by selecting and repeating a predetermined number of data in order while moving the selection range with respect to data obtained by measuring such a process at a number of points. Then, when selecting the delay time data (delay time group), the delay time data (delay time group) corresponding to a plurality of depths is selected, and the above arithmetic processing is repeated. Then, the obtained waveform is displayed by an appropriate method (A scope, B scope, C scope, three-dimensional display).
In the fourth embodiment, the example in which the defect image is synthesized and displayed on the defect image display device 16 has been described. In addition, the defect determination device 17 is subjected to opening processing by the defect image composition processing unit 116. Defect determination is performed based on the above signal. In addition, if only the defect determination is performed, the defect image display device 16 that images and displays the combined result may not be necessarily provided. The defect determination device 17 inputs the combined result from the defect image combining processing unit 116, It may be configured to output only the determination result. On the contrary, if the automatic defect determination is not performed, the defect determination device 17 may be omitted.

  As described above, in the fourth embodiment, the focus is formed by interposing water between the array-type ultrasonic probe 10a and the subject 1 and performing aperture synthesis processing on the reception signal of the array-type ultrasonic probe 10a. Are transmitted relative to the subject 1 while transmitting ultrasonic waves toward the subject 1 and receiving a reflected wave from an internal defect of the subject. The circuit 113 (transmission / reception means), the array signal processing circuit 114 (signal processing means) for performing aperture synthesis processing on the signals received by each transducer of the array-type ultrasonic probe 10a, and the obtained aperture synthesis waveform are set. A defect image composition processing unit 116 (signal generation means) that generates a signal after being delayed by the delay time data, and a defect image display device that outputs and displays the generated signal data on an image memory 16 (display means), in which the delay time data is calculated based on the aperture synthetic waveform, and the delay time data is calculated as each transducer of the array-type ultrasonic probe 10a. Is determined from the amount of change in propagation time with respect to the relative position between the focus of the aperture synthesis processing performed on the received signal and the set internal defect, and a video signal of the internal defect is generated from the amount of change in the propagation time. Can be visualized with high resolution.

The present invention described in the first to fourth embodiments may be applied even when the ratio of the focal length, the subject distance, and the contact medium distance to the transducer region is sufficiently large. The effect becomes significant under the condition that the ratio of the subject distance and the contact medium distance to the transducer region is small. Specifically, the ratio of the focal length to the size of the transducer for transmitting / receiving is applicable in a range larger than 0.5 and smaller than 8, preferably in a range larger than 0.5 and smaller than 6. Is preferably in the range of more than 0.5 and less than 3. The range of the ratio of the subject distance and the contact medium distance to the size of the transducer that performs transmission and reception to which the present invention is applied is also the same as the focal length.
In the above description of the first to fourth embodiments, the imaging apparatus is described as one form of the ultrasonic measurement apparatus. However, the application of the present invention is not limited thereto, and the synthesis is performed based on the obtained counter value and delay time. The present invention is also applicable to a defect detection apparatus that inputs detected waveform data and determines the type and degree of defects using the data to detect defects.

DESCRIPTION OF SYMBOLS 10 Ultrasonic probe, 11 Transmitter circuit, 12 Receiving amplifier, 13 Reflection waveform data part, 14 Defect image composition processing part, 15 Equal propagation time surface data part, 16 Defect image display apparatus, 17 Judgment apparatus, 21 X direction position detection means 22 y-direction position detection means.
10a array type ultrasonic probe, 111 transmission circuit, 112 drive element selection circuit, 13 reception circuit, 114 array signal processing circuit, 115 output waveform data section, 116 defect image synthesis processing section, 117 propagation time plane data section, 200 defect An image reconstruction signal processing unit.

Claims (11)

Transmitting / receiving means for transmitting an ultrasonic wave toward the subject while scanning a focal point formed by an ultrasonic probe relative to the subject, and receiving a reflected wave from an internal defect of the subject;
The waveform of the ultrasonic wave propagating between the ultrasonic probe and the internal defect was received at each measurement position using the reference propagation time obtained by treating it as the ultrasonic waveform synthesized on the entire transmission / reception surface. An ultrasonic measurement apparatus comprising: aperture synthesis processing means for performing signal aperture synthesis processing. Propagation time measuring means for measuring the propagation time to the internal defect based on the reflected wave at each measurement position,
The aperture synthesis processing means extracts the equal propagation time plane formed by connecting the positions inside the subject where the reference propagation times are equal, corresponding to the propagation time measured by the propagation time measuring means, etc. The ultrasonic measurement apparatus according to claim 1, wherein the position of the propagation time plane is set as a defect candidate position. For each defect candidate position obtained by the aperture synthesis processing means, calculate the number of times extracted during the scan,
The ultrasonic measurement apparatus according to claim 2, further comprising display means for displaying the calculated number of times corresponding to the position.   2. The aperture synthesis processing unit delays the reflected wave received by the transmission / reception unit by a delay time calculated based on the reference propagation time, and adds the delayed wave to generate a signal. The ultrasonic measurement apparatus described in 1.   The ultrasonic measurement apparatus according to claim 4, further comprising display means for displaying the signal data generated by the aperture synthesis processing means.   The reference propagation time is obtained by dividing the entire transmission / reception surface of the ultrasonic probe into a plurality of regions, obtaining waveforms of ultrasonic waves transmitted / received between the divided regions and internal defects, 6. The ultrasonic measurement apparatus according to claim 1, wherein the ultrasonic measurement apparatus is calculated from a waveform synthesized for the entire surface of the acoustic probe.   The reference propagation time is obtained by using an object having an internal defect that has been artificially created in advance, while relatively scanning the focal point formed by the ultrasonic probe and the object, and applying ultrasonic waves to the object. 6. The ultrasonic measurement apparatus according to claim 1, wherein the ultrasonic measurement apparatus is obtained by transmitting toward the object and receiving a reflected wave from an internal defect of the subject.   The ultrasonic measurement apparatus according to claim 1, wherein the ultrasonic probe is a focused ultrasonic probe. The ultrasonic probe is an array type ultrasonic probe in which a plurality of transducers are arranged,
8. The super processing apparatus according to claim 1, further comprising a signal processing unit that forms a focal point of the signal of each transducer by aperture synthesis processing and uses the signal as a signal received at each measurement point. Sound wave measuring device.   The ultrasonic measurement apparatus according to claim 1, further comprising a defect determination unit that performs defect determination using a signal that has been subjected to aperture synthesis processing by the aperture synthesis processing unit. A transmission / reception step of transmitting an ultrasonic wave toward the subject and receiving a reflected wave from an internal defect of the subject;
The waveform of the ultrasonic wave propagating between the ultrasonic probe and the internal defect was received at each measurement point by using the reference propagation time obtained by treating it as the waveform of the ultrasonic wave synthesized on the entire surface of the transmission / reception surface. An ultrasonic measurement method comprising: an aperture synthesis processing step for performing aperture synthesis processing of a signal.

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