JP2010071871A5 - - Google Patents

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JP2010071871A5
JP2010071871A5 JP2008241151A JP2008241151A JP2010071871A5 JP 2010071871 A5 JP2010071871 A5 JP 2010071871A5 JP 2008241151 A JP2008241151 A JP 2008241151A JP 2008241151 A JP2008241151 A JP 2008241151A JP 2010071871 A5 JP2010071871 A5 JP 2010071871A5
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Japan
Prior art keywords
signal light
sample
signal
light
probe
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JP2008241151A
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Japanese (ja)
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JP5270280B2 (en
JP2010071871A (en
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Priority to JP2008241151A priority Critical patent/JP5270280B2/en
Priority claimed from JP2008241151A external-priority patent/JP5270280B2/en
Priority to PCT/JP2009/004588 priority patent/WO2010032429A1/en
Publication of JP2010071871A publication Critical patent/JP2010071871A/en
Publication of JP2010071871A5 publication Critical patent/JP2010071871A5/ja
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Claims (4)

先端が尖鋭なプローブを試料上で走査しつつ、前記プローブ近傍に生成される近接場光によって前記試料から放射される信号光を検出し当該試料のイメージングを行う近接場光学顕微鏡の信号光測定システムにおいて、
a) 前記プローブと試料との相対距離を周期的に変化させる振動付与機構と、
b) 前記プローブ近傍に近接場光を生成させるための光を照射する光照射機構と、
c) 前記プローブと前記試料との相対距離の変化に同期して、前記光照射機構が照射する光をON/OFFするためのON/OFF信号を、前記相対距離が異なる複数のタイミングで出力する光強度変調機構と、
d) 前記試料から放射される信号光を測定する信号光測定機構と、
を備えることを特徴とする近接場光学顕微鏡の信号光測定システム。 A signal light measurement system for a near-field optical microscope that detects signal light emitted from the sample by near-field light generated in the vicinity of the probe and scans the sample while scanning a probe having a sharp tip on the sample. In
a) a vibration applying mechanism that periodically changes a relative distance between the probe and the sample;
b) a light irradiation mechanism for irradiating light for generating near-field light in the vicinity of the probe;
c) In synchronization with the change in the relative distance between the probe and the sample, an ON / OFF signal for turning on / off the light emitted by the light irradiation mechanism is output at a plurality of timings with different relative distances. A light intensity modulation mechanism;
d) a signal light measurement mechanism for measuring the signal light emitted from the sample;
A signal light measurement system for a near-field optical microscope, comprising: 光強度変調機構は、ON/OFF信号の出力タイミングを変更可能に構成されていることを特徴とする請求項１に記載の近接場光学顕微鏡の信号光測定システム。 2. The signal light measurement system for a near-field optical microscope according to claim 1, wherein the light intensity modulation mechanism is configured to be capable of changing an output timing of the ON / OFF signal . 前記信号光測定機構が、異なる複数の出力タイミングで前記信号光が出力されたときにおける前記試料からの信号光からスペクトルを求め、該スペクトルの形状から前記試料の同定を行うことを特徴とする請求項１又は２に記載の近接場光学顕微鏡の信号光測定システム。The signal light measurement mechanism obtains a spectrum from signal light from the sample when the signal light is output at a plurality of different output timings, and identifies the sample from the shape of the spectrum. Item 3. A signal light measurement system for a near-field optical microscope according to Item 1 or 2. 信号光は、レーリー散乱、ラマン散乱、蛍光、非線形光学信号の中から選択されるいずれかであることを特徴とする請求項１〜３のいずれかに記載の近接場光学顕微鏡の信号光測定システム。 4. The signal light measurement system for a near-field optical microscope according to claim 1 , wherein the signal light is any one selected from Rayleigh scattering, Raman scattering, fluorescence, and nonlinear optical signal. .
JP2008241151A 2008-09-19 2008-09-19 Signal light measurement system for near-field optical microscope Active JP5270280B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008241151A JP5270280B2 (en) 2008-09-19 2008-09-19 Signal light measurement system for near-field optical microscope
PCT/JP2009/004588 WO2010032429A1 (en) 2008-09-19 2009-09-15 Signal light measurement system for near-field optical microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008241151A JP5270280B2 (en) 2008-09-19 2008-09-19 Signal light measurement system for near-field optical microscope

Publications (3)

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JP2010071871A JP2010071871A (en) 2010-04-02
JP2010071871A5 true JP2010071871A5 (en) 2011-09-15
JP5270280B2 JP5270280B2 (en) 2013-08-21

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Family Applications (1)

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JP2008241151A Active JP5270280B2 (en) 2008-09-19 2008-09-19 Signal light measurement system for near-field optical microscope

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JP (1) JP5270280B2 (en)
WO (1) WO2010032429A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
CN102439462B (en) 2008-11-13 2015-07-22 布鲁克纳米公司 Method and apparatus of operating a scanning probe microscope
CN105319396B (en) * 2008-11-13 2019-06-04 布鲁克纳米公司 The method and apparatus of the physical characteristic of sample is measured using peak force tapping-mode
SG181154A1 (en) 2009-12-01 2012-07-30 Bruker Nano Inc Method and apparatus of operating a scanning probe microscope
JP5802417B2 (en) * 2011-04-04 2015-10-28 株式会社日立製作所 Scanning probe microscope and measuring method using the same
WO2013051094A1 (en) * 2011-10-03 2013-04-11 株式会社日立製作所 Scanning probe microscope
WO2014033844A1 (en) * 2012-08-28 2014-03-06 株式会社日立製作所 Scanning probe microscope and measuring method using same
FR3001294B1 (en) * 2013-01-24 2015-03-20 Ecole Polytech MULTIMODE LOCAL PROBE MICROSCOPE, RAMAN EXTENDED RAMAN MICROSCOPE AND METHOD FOR CONTROLLING THE DISTANCE BETWEEN THE LOCAL PROBE AND THE SAMPLE
EP3500864A1 (en) 2016-08-22 2019-06-26 Bruker Nano, Inc. Infrared characterization of a sample using peak force tapping

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3425615B2 (en) * 1994-03-24 2003-07-14 科学技術庁長官官房会計課長 Scanning near-field atomic force microscope
JP4361221B2 (en) * 2001-02-15 2009-11-11 エスアイアイ・ナノテクノロジー株式会社 Measurement method of illumination reflection mode in scanning near-field microscope
EP1616157B1 (en) * 2003-04-04 2012-05-09 VP Holding, LLC Method and apparatus for enhanced nano-spectroscopic scanning

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