JP2010066570A - Position adjusting device and apparatus for manufacturing optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a position adjusting device capable of reducing the size and cost of the device and to provide an apparatus for manufacturing an optical device. <P>SOLUTION: A 6-axis position adjusting device positionally adjusting a plurality of reflection type optical modulation devices 442 modulating an incident luminous flux, according to image information with respect to a cross dichroic prism 443 synthesizing the luminous flux modulated by the reflection type optical modulation devices 442 includes: a plurality of clamping members 1143 extending in predetermined directions respectively and clamping the reflection type optical modulation devices 442 respectively; a drive part provided with the plurality of clamping members 1143 and moving them in the same direction; and a controller controlling the operation of the drive part. Therefore, the reflection type optical modulation devices 442 are positionally adjusted individually, so that the plurality of reflection type optical modulation devices 442 can be positionally adjusted by one 6-axis position adjusting device. Thus, it is unnecessary that the 6-axis position adjusting device is provided according to the number of the reflection type optical modulation devices 442. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a position adjusting device and an optical device manufacturing apparatus, and more particularly, to a position adjusting device that adjusts the position of a plurality of light modulation devices with respect to a combining optical device such as a prism, and the combining optical device and a plurality of the combining optical devices. The present invention relates to an apparatus for manufacturing an optical device including the above light modulation device.

  Conventionally, a light source device, a plurality of light modulation devices that modulate a light beam emitted from the light source device according to image information, and a combining optical that combines the light beams modulated by each light modulation device to form image light A projector is known that includes an optical device having a device and a projection lens that magnifies and projects formed image light. As such a projector, three liquid crystal panels as light modulation devices provided for each of three color lights of red (R), green (G), and blue (B), and each color light modulated by each liquid crystal panel. A so-called three-plate color projector having a cross dichroic prism as a synthesizing optical device for synthesizing is known.

In such a projector, in order to appropriately form and project image light, it is necessary to adjust the focus of each liquid crystal panel so that each liquid crystal panel is arranged at the back focus position of the projection lens. Further, in order to obtain a clearer image, it is necessary to adjust the alignment of each liquid crystal panel so that there is no pixel shift between the liquid crystal panels.
On the other hand, an optical device manufacturing apparatus that manufactures an optical device by performing the above-described adjustments is known (see, for example, Patent Document 1).

  In the optical device manufacturing apparatus described in Patent Document 1, a light source device that introduces a light beam into three liquid crystal panels, a light beam detection device that detects a light beam via a liquid crystal panel and a cross dichroic prism, And three position adjusting devices for performing focus / alignment adjustment. In such a manufacturing apparatus, each position adjustment device adjusts the position of each liquid crystal panel with respect to the cross dichroic prism to the optimum position based on the light beam detected by the light beam detection device.

JP 2003-107395 A

  However, in the manufacturing apparatus described in Patent Document 1, since it is necessary to provide position adjustment devices according to the number of liquid crystal panels, there is a problem that the entire manufacturing apparatus becomes large and it is difficult to reduce the size of the manufacturing apparatus. Moreover, there is a problem that it is difficult to reduce the manufacturing cost of the manufacturing apparatus because of the need to manufacture three position adjusting apparatuses. Therefore, there has been a demand for a position adjusting device that can reduce the size and cost of the manufacturing apparatus.

  An object of the present invention is to provide a position adjusting device and an optical device manufacturing apparatus that can be reduced in size and cost.

  The position adjustment device of the present invention adjusts the position of a plurality of light modulation devices that modulate incident light beams according to image information with respect to a combining optical device that combines the light beams modulated by the light modulation devices. A plurality of gripping members each extending along a predetermined direction and gripping each of the light modulation devices, and the plurality of gripping members, and the plurality of gripping members are respectively the same. A moving means for moving in the direction and a control means for controlling the operation of the moving means are provided.

  According to the present invention, the position adjustment device that adjusts the position of the plurality of light modulation devices includes a plurality of gripping members that respectively grip the light modulation device, and a moving unit that moves the plurality of gripping members in the same direction. And a control means for controlling the operation of these gripping members. According to this, for example, by individually adjusting the position of each light modulation device, the position of a plurality of light modulation devices can be adjusted by one position adjustment device, so the position adjustment is performed according to the number of light modulation devices. There is no need to provide a device. Therefore, by adopting the position adjusting device of the present invention in a manufacturing device that manufactures an optical device in which the position of a plurality of light modulation devices is adjusted with respect to the composite optical device, the manufacturing device can be reduced in size and cost. Can be planned.

  In the present invention, the control means may be configured to adjust the position of each of the light modulation devices so that the light modulation devices are moved in the same direction with respect to the combining optical device. It is preferable to change the direction of movement and move it.

  Here, when each light modulation device is directed in a different direction, the direction of the light modulation device adjusted with respect to the combining optical device when each gripping member is moved in one direction is Each modulation device is different. On the other hand, in the present invention, when adjusting the position of each light modulation device, the control means adjusts each holding member so that the position of each light modulation device is adjusted in the same direction with respect to the combining optical device. Move. For example, in the above-described case, after moving one of the plurality of light modulation devices in the direction approaching the combining optical device, the other light modulation device is moved in the direction approaching the combining optical device. In this case, the gripping member grips the other light modulation device by changing the movement direction and the movement amount in a direction different from the movement direction of each gripping member moved when the position of the one light modulation device is adjusted. Move the member. According to this, since the moving direction of each gripping member is controlled by the control means in accordance with the light modulation device whose position is to be adjusted, the position of each light modulation device can be appropriately adjusted.

  In the present invention, the plurality of light modulation devices include at least a first light modulation device and a second light modulation device, and the combining optical device has the light beam modulated by the at least two light modulation devices. Each of the plurality of gripping members has a first gripping member and a second gripping member for gripping the first light modulation device and the second light modulation device, respectively. The moving means includes the first gripping member and the second gripping member in a first direction that is the predetermined direction, and perpendicular to the first direction, and the at least two The light modulation device is moved in a second direction, which is an adjacent direction, and the control means adjusts the position of the first light modulation device along the direction approaching the combining optical device, and moves each gripping member. Said Moved back and forth along the direction, the second light modulation device when the positional adjustment along the direction toward the combining optical device, it is preferable to advance and retreat along the respective gripping member in the second direction.

  According to the present invention, there are provided the first gripping member and the second gripping member for gripping the first light modulation device and the second light modulation device, which are respectively disposed to face the two light beam incident side end faces of the combining optical device, The moving means moves the gripping members simultaneously in the first direction or the second direction under the control of the control means. According to this, it is possible to adjust the position of the first light modulation device along the direction approaching the combining optical device by moving each gripping member forward and backward along the first direction that is the extending direction of each gripping member. it can. Further, by moving each gripping member back and forth along a second direction that is orthogonal to the first direction and in which each light modulation device is adjacent, the second light modulation device is moved closer to the combining optical device. The position can be adjusted along. Therefore, even when the direction of each light modulation device is different, the position of each light modulation device can be appropriately adjusted by changing the moving direction of the gripping member when adjusting the position of each light modulation device. it can.

  An optical device manufacturing apparatus according to the present invention includes a plurality of light modulation devices that modulate incident light beams according to image information, and a combining optical device that combines light beams modulated by the light modulation devices. 4. An optical device manufacturing apparatus, comprising: the position adjusting device according to claim 1; a light source device that irradiates each of the light modulation devices with a light beam; and a light beam emitted by the combining optical device. And detecting means for detecting the position of the moving means, wherein the control means moves the moving means based on a detection result by the detecting means.

According to the present invention, according to the present invention, the same effects as those of the above-described position adjusting device can be obtained, and the size and cost of the manufacturing device can be reduced.
In addition, the control unit can appropriately adjust the position of each light modulation device by adjusting the moving direction of each gripping member by the moving unit based on the detection result of the detecting unit.

Hereinafter, an embodiment according to the present invention will be described with reference to the drawings.
[Projector structure]
FIG. 1 is a diagram illustrating a structure of a projector 1 including an optical device to be manufactured.
The projector 1 modulates a light beam emitted from a light source according to image information to form a color image, and enlarges and projects the formed color image on a screen (not shown). The projector 1 includes an exterior housing 2, a projection lens 3, and an optical unit 4. Although not shown in FIG. 1, the exterior housing 2 is provided with a cooling fan or the like that cools each component in the projector 1 in addition to the projection lens 3 and the optical unit 4. A unit and a control device for controlling each component in the projector 1 are arranged.

The exterior casing 2 is a synthetic resin product by injection molding or the like, and is formed in a substantially rectangular parallelepiped shape that accommodates and arranges the optical unit 4 therein. The exterior casing 2 includes an upper case that configures the top, front, back, and side surfaces of the projector 1 and a lower case that configures the bottom, front, side, and back surfaces of the projector 1, respectively. The case and the lower case are fixed to each other with screws or the like.
The projection lens 3 is configured as a combined lens in which a plurality of lenses are combined, and enlarges and projects the color image formed by the optical unit 4 on the screen.

The optical unit 4 is a unit that forms a color image by modulating a light beam emitted from a light source according to image information under the control of the control device. The optical unit 4 includes a light source device 41, an illumination optical device 42, a color separation optical device 43, an optical device 44, and the like.
The light source device 41 includes a light source lamp 411, a reflector 412, a UV-IR filter 413, and the like. The luminous flux emitted from the light source lamp 411 has its emission direction aligned by the reflector 412 and is emitted toward the illumination optical device 42 via the UV-IR filter 413. The UV-IR filter 413 absorbs or reflects light beams in the ultraviolet region and the infrared region and transmits other light beams.

  The illumination optical device 42 includes a first lens array 421, a second lens array 422, a polarization conversion element 423, and a superimposing lens 424. The light beam emitted from the light source device 41 is divided into a plurality of partial light beams by the first lens array 421 and forms an image in the vicinity of the second lens array 422. Each partial light beam emitted from the second lens array 422 is incident so that its central axis (principal ray) is perpendicular to the incident surface of the polarization conversion element 423, and the polarization conversion element 423 emits approximately one type of linearly polarized light. Injected as light. A plurality of partial light beams emitted from the polarization conversion element 423 as linearly polarized light and passed through the superimposing lens 424 are superimposed on the respective reflected light modulation devices 442 as three light modulation devices described later of the optical device 44.

In the color separation optical device 43, a B light reflecting dichroic mirror 431A that reflects blue light (B light) and a GR light reflecting dichroic mirror 431B that reflects green light (G light) and red light (R light) are in an X shape. A cross dichroic mirror 431, a G light reflecting dichroic mirror 432 that reflects green light, and two reflecting mirrors 433 and 434 are provided. The color separation optical device 43 separates the plurality of partial light beams emitted from the illumination optical device 42 into red (R), green (G), and blue (B) color lights.
Specifically, the plurality of partial light beams emitted from the illumination optical device 42 enter the cross dichroic mirror 431, the blue light component is reflected by the B light reflecting dichroic mirror 431A, and the green light component and the red light component are separated. The light is reflected by the GR light reflecting dichroic mirror 431B and separated into a blue light component, a green light component, and a red light component.

The blue light separated by the cross dichroic mirror 431 is reflected by the reflection mirror 433 and enters a later-described wire grid 441B constituting the optical device 44.
Further, the green light and red light separated by the cross dichroic mirror 431 are reflected by the reflection mirror 434 and then enter the G light reflection dichroic mirror 432. Of the green light and red light incident on the G light reflecting dichroic mirror 432, the green light is reflected by the G light reflecting dichroic mirror 432 and enters a later-described wire grid 441 </ b> G constituting the optical device 44. On the other hand, the red light is transmitted through the G light reflecting dichroic mirror 432 and is incident on a wire grid 441 </ b> R (described later) constituting the optical device 44.

  The optical device 44 modulates an incident light beam according to image information to form a color image. This optical device 44 includes three wire grids 441 as reflection type polarizing plates (red light side wire grid 441R, green light side wire grid 441G, blue light side wire grid 441B), 3 Two reflective light modulators 442 (similar to the wire grid 441, the reflective light modulators on the respective color light sides are 442R, 442G, and 442B), a cross dichroic prism 443 as a combining optical device, and an optical element And three polarizing plates 444 (the polarizing plates on each color light side are referred to as 444R, 444G, and 444B). Here, the reflection light modulation device 442G on the green light side constitutes the first light modulation device of the present invention, and the reflection light modulation device 442R on the red light side and the reflection light modulation device 442B on the blue light side include This constitutes the second light modulation device of the present invention. The optical device 44 includes a head body 445, three attachment members 446, and three adjustment members 447 (see FIGS. 5 and 6), which will be described in detail later.

The three wire grids 441 polarization separate the incident light beam by diffraction based on the grating structure. Each wire grid 441 is arranged in a state inclined approximately 45 ° with respect to the optical axis of the incident light beam. Each wire grid 441 transmits polarized light having a polarization direction substantially the same as the polarization direction aligned by the polarization conversion element 423 out of the incident light flux, and polarized light having a polarization direction orthogonal to the polarization direction. The incident light beam is polarized and separated.
Each reflection type light modulation device 442 is arranged in a state substantially orthogonal to the optical axis of the light beam transmitted through each wire grid 441.

  Each polarizing plate 444 is disposed opposite to each light beam incident side end surface 4431 of the cross dichroic prism 443, and transmits linearly polarized light having the same polarization direction as that reflected by each wire grid 441. . That is, by using both the wire grid 441 and the polarizing plate 444, the polarizing component 444 removes the polarizing component even when the wire grid 441 reflects a polarization component other than the desired linearly polarized light. The structure to be adopted is adopted.

  The cross dichroic prism 443 (hereinafter may be abbreviated as “prism 443”) has a light beam incident side end surface 4431 on which each color light reflected by each wire grid 441 is incident (the light beam incident side end surface of each color light side is 4431R). , 4431G, 4431B) and a light beam emission side end face 4432, a color image is formed by combining the incident color lights and emitted from the light beam emission side end face 4432. This prism 443 has a substantially rectangular parallelepiped shape in which four right-angle prisms are bonded together, and two dielectric multilayer films are formed at the interface where the right-angle prisms are bonded together. These dielectric multilayer films transmit green light reflected by the wire grid 441G and reflect red and blue light reflected by the wire grids 441R and 441B, respectively. In this way, the color lights are combined to form a color image. The color image formed by the prism 443 is emitted from the light beam emission side end surface 4432 and enlarged and projected onto the screen by the projection lens 3 described above.

[Structure of optical device manufacturing equipment]
2 and 3 are diagrams showing the manufacturing apparatus 10 of the optical device 44. FIG. Specifically, FIG. 2 is a side view of the manufacturing apparatus 10, and FIG. 3 is a plan view of the manufacturing apparatus 10 as viewed from above. 2 and 3, for convenience of explanation, the optical axis direction of the image light emitted from the optical device 44 is defined as the Z axis as the first direction, and the two axes orthogonal to the Z axis are defined as the second direction. The X axis (horizontal axis) and the Y axis (vertical axis) are used.
The manufacturing apparatus 10 manufactures the optical device 44 described above. As shown in FIGS. 2 and 3, the manufacturing apparatus main body 10A, the screen unit 10B, and the manufacturing apparatus main body 10A and the screen unit 10B are placed. 10C to be mounted, and a control device 10D as a control means for performing operation control and image processing of the manufacturing apparatus 10 as a whole.
The manufacturing apparatus main body 10A and the screen unit 10B are disposed in the dark room, and the optical device 44 is manufactured in the dark room.

[Manufacturing equipment body structure]
In the manufacturing apparatus main body 10A, the optical device 44 to be manufactured is placed, and each reflection type light modulation device 442 (more precisely, a mounting member 446 described later) is provided so as to face each light beam incident side end surface 4431 of the prism 443. ). As shown in FIGS. 2 and 3, the manufacturing apparatus main body 10 </ b> A includes a 6-axis position adjusting device 11, a projection optical device 12, and a mounting on which the 6-axis position adjusting device 11 and the projection optical device 12 are placed. The light source device 60 for adjustment (refer FIG. 7) and the light source device 70 for fixation (refer FIG. 7) are provided.

FIG. 4 is a side view of the 6-axis position adjusting device 11. In FIG. 4, for the sake of simplicity, the direction orthogonal to the plane of FIG. 4 is defined as the X axis, the horizontal direction in FIG. 4 is the Z axis, and the vertical direction in FIG.
The 6-axis position adjustment device 11 constitutes the position adjustment device of the present invention together with the control device 10D described later, and adjusts the arrangement position of each reflection type light modulation device 442 with respect to each light beam incident side end surface 4431 of the prism 443. To do. The six-axis position adjusting device 11 is centered on the Z-axis, the direction in which the light-incident-side end surface 4431 approaches and separates (Z-axis direction), the two-axis directions (X-axis direction and Y-axis direction) perpendicular to the Z-axis. It is configured to be movable in a rotation direction (hereinafter referred to as Zθ direction), a rotation direction centered on the X axis (hereinafter referred to as Xθ direction), and a rotation direction centered on the Y axis (hereinafter referred to as Yθ direction).

[Configuration of 6-axis position adjustment device]
As shown in FIG. 4, the six-axis position adjusting device 11 is provided at a planar position adjusting unit 111 that is movably installed along a rail 131 on the mounting unit 13, and at a tip portion of the planar position adjusting unit 111. The in-plane rotation position adjusting unit 112, the out-of-plane rotation position adjusting unit 113 provided at the tip of the in-plane rotation position adjusting unit 112, and a plurality of holdings provided at the tip of the out-of-plane rotation position adjusting unit 113 Member 114.

The plane position adjustment unit 111 adjusts the advance / retreat position and the plane position of each reflective light modulation device 442 relative to the light beam incident side end face 4431 of the prism 443. The planar position adjusting unit 111 is provided at a base 1111 slidably provided on the mounting unit 13, a leg 1112 erected on the base 1111, and an upper tip portion of the leg 1112. And a connection portion 1113 to which the in-plane rotation position adjustment unit 112 is connected.
The base 1111 moves in the Z-axis direction of the placement unit 13 by a driving unit 521 (see FIG. 7) as a moving unit. The leg part 1112 moves in the X-axis direction with respect to the base part 1111 by a driving part 521 (see FIG. 7) provided on the side part. The connecting portion 1113 is moved in the Y-axis direction with respect to the leg portion 1112 by the driving portion 521 (see FIG. 7).

The in-plane rotation position adjusting unit 112 adjusts the in-plane rotation position of each reflective light modulation device 442 relative to the light beam incident side end surface 4431 of the prism 443. The in-plane rotation position adjustment unit 112 includes a columnar base 1121 fixed to the tip portion of the planar position adjustment unit 111 and a rotation adjustment unit 1122 provided to be rotatable in the circumferential direction of the base 1111.
Among them, the rotation adjusting unit 1122 is rotated in the Zθ direction in the XY plane with respect to the base 1121 by a driving unit 521 (see FIG. 7) provided on the side, and each reflection with respect to the light incident side end surface of the cross dichroic prism 443. The in-plane rotational position of the mold light modulator 442 is adjusted.

The out-of-plane rotation position adjustment unit 113 adjusts the out-of-plane rotation position of each reflective light modulation device 442 relative to the light beam incident side end surface 4431 of the prism 443. The out-of-plane rotation position adjustment unit 113 is fixed to the tip portion of the in-plane rotation position adjustment unit 112, and has a base portion 1131 in which a concave curved surface that is a circular arc in the horizontal direction is formed at the tip portion, and a concave portion of the base portion 1131. A first adjustment portion 1132 provided on the tip portion with a concave curved surface that is slidable on the curved surface along an arc, and that forms a circular arc in the vertical direction, and on the concave curved surface of the first adjustment portion 1132 along the arc. And a second adjustment portion 1133 slidably provided.
When the drive unit 521 (see FIG. 7) provided on the side portion of the base 1131 is driven, the first adjustment unit 1132 slides, and the drive unit 521 (see FIG. 7) provided on the top of the first adjustment unit 1132. Is driven, the second adjustment unit 1133 slides and adjusts the rotational position in the out-of-plane direction of each reflection type light modulation device 442 relative to the light beam incident side end surface 4431 of the prism 443. That is, when the out-of-plane rotation position adjustment unit 113 is driven, the second adjustment unit 1133 rotates in at least one of the Xθ direction and the Yθ direction.

The holding member 114 holds each reflective light modulation device 442. The manner in which the holding member 114 holds each reflective light modulation device 442 will be described later.
The holding member 114 includes a base material 1142 that is fixed via a column member 1141 that protrudes from the tip of the second adjustment unit 1133, and three gripping members 1143 that are screwed to the tip side of the base material 1142.
Each gripping member 1143 (the gripping portions that grip the light incident side end surface 4431 on each color light side are referred to as 1143R, 1143G, and 1143B) are two plate-like bodies extending along the Z-axis direction, that is, the right grip It is comprised by the member 11431 (refer FIG. 6) and the left holding member 11432 (refer FIG. 6). Rubber pads (not shown) are attached to the tips of the right gripping member 11431 and the left gripping member 11432. Here, the gripping member 1143G that grips the light beam incident side end surface 4431G on the green light side constitutes the first gripping member of the present invention, and the gripping member 1143R that grips the light beam incident side end surface 4431R on the red light side and the blue light. The holding member 1143G that holds the side light incident side end surface 4431G on the side constitutes the second holding member of the present invention.
Although not shown in FIG. 4, each holding member 1143 has an adjustment light source device 60 (FIG. 7) for supplying a position adjusting light beam and a fixing light beam to each reflection type light modulation device 442 via an optical fiber. And a fixing light source device 70 (see FIG. 7) are connected.

5 and 6 are views showing a state where the gripping member 1143 of the holding member 114 of the six-axis position adjusting device 11 is gripping the optical device 44. FIG. Specifically, FIG. 5 is a side view of the gripping state seen from the side, and FIG. 6 is a plan view of the gripping state viewed from above. The directions of Z, X, and Y shown in FIGS. 5 and 6 are the same as the directions of Z, X, and Y described above. The optical device 44 shown in FIG. 5 is shown on the bottom side.
Here, the configuration of the optical device 44 held by the holding member 1143 will be described.
As described above, the optical device 44 includes the three wire grids 441, the three reflective light modulators 442, the cross dichroic prism 443, and the three polarizing plates 444, as well as the head as shown in FIGS. A body 445, three attachment members 446, and three adjustment members 447 are provided.
The head body 445 is fixed to the exterior casing 2 to position the integrated optical device 44 and the projection lens 3 with respect to the illumination optical axis A (FIG. 1) set inside the exterior casing 2. Fix it.

The attachment member 446 (the attachment members on each color light side are referred to as 446R, 446G, and 446B) are synthetic resin members that integrally support the wire grid 441, each reflection type light modulation device 442, and the polarizing plate 444. Each member 441, 442, 444 is fixed to the corresponding light beam incident side end surface 4431 of the cross dichroic prism 443.
The top surface 4461 (FIG. 6) and the bottom surface 4462 (FIG. 6) of the mounting member 446 are gripped by the right gripping member 11431 and the left gripping member 11432, respectively. That is, the gripping member 1143R grips the top surface 4461 and the bottom surface 4462 of the mounting member 446R, and the gripping members 1143G and 1143B similarly grip the mounting members 446G and 446B.

  The adjustment member 447 (adjustment members on the respective color light sides are set to 447R, 447G, and 447B) are formed by processing a metal plate into a sheet metal. These adjustment members 447 are attached to the light incident side end surface 4431 of the cross dichroic prism 443 by adhesion, and fix the attachment member 446 to the cross dichroic prism 443, and thus each reflection type light modulation device attached to the attachment member 446. 442 is fixed to the cross dichroic prism 443. The adjustment member 447 is fixed to the light beam incident side end surface 4431 with an adhesive by ultraviolet irradiation by a fixing light source device 70 described later.

[Configuration of Projection Optical Device]
As shown in FIGS. 2 and 3, the projection optical device 12 projects the color image formed by the optical device 44 at a short angle and a wide angle, and includes a reflection mirror 121 and an aspherical mirror 122. Prepare.
The aspherical mirror 122 has a free-form reflecting surface 122A that is not rotationally symmetric. The aspherical mirror 122 is disposed at the last stage of the optical path in the projection optical device 12 so that the reflecting surface 122A faces the upper front side, and the color image guided from the front side to the back side by the reflecting mirror 121 is displayed. Reflects the upper front side to widen the angle.
By adopting the projection optical device 12 described above, the optical device 44 can be disposed at a position close to the screen 14 to be described later, and the downsizing of the manufacturing apparatus is improved.

The adjustment light source device 60 is a light source of a position adjusting light beam used for adjusting the position of the reflection type light modulation device 442 in the six-axis position adjustment device 11. For example, a discharge light emitting lamp such as a metal halide lamp, LED ( It includes a solid light emitting element such as a light emitting diode) and is driven by a driving unit 521 (FIG. 7) such as a light source driving circuit.
The fixing light source device 70 is a light source of a fixing light beam (ultraviolet light) that cures the ultraviolet curable adhesive when fixing each reflection type light modulation device 442 to the cross dichroic prism 443 side. It drives by the part 521 (FIG. 7).

[Structure of screen unit]
The screen unit 10B is a part that projects the light beam emitted from the optical device 44 and enlarged and projected by the reflection mirror 121, and detects the projected light beam, and corresponds to the detection means of the present invention. As shown in FIGS. 2 and 3, the screen unit 10 </ b> B is mounted on a mounting table 10 </ b> C on which the manufacturing apparatus main body 10 </ b> A is mounted. The screen unit 10 </ b> B includes a screen 14 and a light flux detection device 15. .

The screen 14 is mounted on the mounting table 10 </ b> C via a plurality of frame members 141, and image light is enlarged and projected by the aspherical mirror 122 of the projection optical device 12. In addition, the movement of the screen 14 is implemented by driving the driving unit 521 (see FIG. 7).
The light flux detection device 15 is disposed on the back surface of the screen 14 and detects a projection image formed on the back surface side of the screen 14. The light beam detection device 15 includes a 3CCD camera 151 and a moving mechanism 152.

The 3CCD camera 151 detects a projection image formed on the back side of the screen 14, and outputs the detection result as an electrical signal to the control device 10D (see FIG. 7). Four 3CCD cameras 151 are arranged in the vicinity of the rectangular four corners of the screen 14 via a moving mechanism 152.
The moving mechanism 152 moves the 3CCD camera 151 in the vertical direction. Two moving mechanisms 152 are installed in the vertical direction, and two 3CCD cameras 151 are attached to each moving mechanism 152.

[Configuration of light source device for adjustment and light source device for fixing]
FIG. 7 is a block diagram illustrating a configuration of the manufacturing apparatus 10.
As described above, as illustrated in FIG. 7, the manufacturing apparatus 10 includes the control device 10 </ b> D, and the manufacturing apparatus body 10 </ b> A includes the adjustment light source device 60 and the fixing light source device 70.
Among these, the adjustment light source device 60 corresponds to the light source device of the present invention, and is a light source of a position adjusting light beam used when adjusting the position of the reflective light modulation device 442 in the six-axis position adjustment device 11. The adjustment light source device 60 includes, for example, a discharge light emitting lamp such as a metal halide lamp, a solid light emitting element such as an LED (Light Emitting Diode), and the like, and is driven by a driving unit 521 (FIG. 7) such as a light source driving circuit. To do.
The fixing light source device 70 is a light source of a fixing light beam (ultraviolet light) that cures the ultraviolet curable adhesive when fixing each reflection type light modulation device 442 to the cross dichroic prism 443 side. It drives by the part 521 (FIG. 7).

[Configuration of control device]
The control device 10D is configured by a computer including a CPU (Central Processing Unit) and the like, and executes various programs to control the entire manufacturing device 10. The control device 10D includes an operation unit 51 and a drive control unit 52.
The operation unit 51 includes, for example, a keyboard and a pointing device, and has various operation buttons (not shown) that are input and operated.
The drive control unit 52 executes a predetermined program in response to the input of the operation signal from the operation unit 51, outputs a control signal to the drive unit 521 as a moving unit, and outputs the control signal to the drive unit 521. The adjustment light source device 60, the fixing light source device 70, the screen 14, and the light beam detection device 15 are driven. As described above, the drive unit 521 includes a motor, a light source drive circuit, and the like.

[Operation direction of gripping part of 6-axis position adjusting device]
FIG. 8 shows the operation direction of the reflective light modulator 442R gripped by the grip member 1143R with reference to the motion direction of the reflective light modulator 442G held by the grip member 1143G of the six-axis position adjusting device 11. FIG. The operation direction of the gripping member 1143R with reference to the operation direction of the gripping member 1143G is shown in parentheses in FIG. The reflection type light modulation device 442B on the B color light side of the gripping member 1143B is the same as the reflection type light modulation device 442R, and is not shown.
Further, as shown in FIG. 8, the drive control unit 52 adjusts the position of the reflection light modulation device 442G on the G color light side and then adjusts the reflection light modulation devices 442R and 442B on the R color light side or the B color side. When performing the position adjustment, a control signal is output to the drive unit 521 to change the operation direction of each gripping member 1143 that operates by driving the drive unit 521.

Specifically, when adjusting the position of the reflection type light modulation device 442G in the direction approaching the light beam incident side end surface 4431G, the drive control unit 52 moves the holding member 1143G forward and backward in the Z-axis direction. When the positions of the devices 442R and 442B are adjusted in the direction close to the light incident side end surfaces 4431R and 4431B, the gripping members 1143R and 1143B are moved forward and backward in the Y-axis direction.
In addition, the drive control unit 52 moves the gripping member 1143G forward and backward in the X-axis direction and the Y-axis direction when adjusting the position of the reflective light modulator 442G substantially parallel to the light beam incident side end surface 4431G. When adjusting the position of the type light modulators 442R and 442B substantially parallel to the light incident side end surfaces 4431R and 4431B, the gripping members 1143R and 1143B are advanced and retracted in the Z-axis direction and the X-axis direction. At this time, since the X-axis direction is the same in each reflection type light modulation device 442, the drive control unit 52 does not change the operation direction of each gripping member 1143.

On the other hand, when adjusting the rotational position of the reflection type light modulation device 442G in the direction approaching the light beam incident side end surface 4431G, the drive control unit 52 moves the holding member 1143G forward and backward in the Zθ-axis direction. When the rotational positions of the devices 442R and 442B are adjusted in the direction close to the light incident side end faces 4431R and 4431B, the gripping members 1143R and 1143B are moved forward and backward in the Yθ-axis direction.
Further, when the drive control unit 52 adjusts the rotational position of the reflection type light modulation device 442G approximately parallel to the light incident side end surface 4431G, the drive control unit 52 advances and retracts the gripping member 1143G in the Xθ axis direction and the Yθ axis direction. When adjusting the rotational position of the reflection type light modulators 442R and 442B approximately parallel to the light incident side end faces 4431R and 4431B, the gripping members 1143R and 1143B are advanced and retracted in the Zθ axis direction and the Xθ axis direction. At this time, since the Xθ-axis direction is the same in each reflection type light modulation device 442, the drive control unit 52 does not change the operation direction of each gripping member 1143.

[Operation of optical manufacturing equipment]
Hereinafter, the position adjustment of each reflective light modulator 442 will be described.
First, the operator fixes and integrates the projection lens 3 and the cross dichroic prism 443 to the head body 445. Further, the wire grid 441, the reflection type light modulation device 442, and the polarizing plate 444 are integrated by the mounting member 446.
Next, the adjustment member 447 and the attachment member 446 to which the ultraviolet curable adhesive is applied are installed on the cross dichroic prism 443 while the attachment member 446 is held by the holding member 1143. In the optical device 44 in such a state, first, the position of the reflection type light modulation device 442G with respect to the cross dichroic prism 443 is adjusted.

  In the focus adjustment in which the position of the reflective light modulation device 442G for G color light is positioned at the back focus position of the projection lens 3, first, the light beam for inspection is supplied from the adjustment light source device 60 toward the wire grid 441G from the vicinity of the gripping member 1143G. Inject. Then, the projection image enlarged and projected via the projection lens 3 is detected by the light beam detection device 15, and based on this detection result, the drive member 521 uses the gripping member 1143 G to attach the mounting member 446 G to the cross dichroic prism. The light beam incident side end surface 4431G of 443 is moved in the Z-axis direction, and the mounting member 446G is moved along the central axis A (Z axis direction) of the light beam incident on the light beam incident side end surface 4431G of the prism 443.

  On the other hand, in the alignment adjustment for matching the pixels of the reflective light modulation device 442G, similarly, a light beam for inspection is emitted from the light source device 60 for adjustment. Then, the projection image enlarged and projected via the projection lens 3 is detected by the light beam detection device 15, and based on the detection result, the gripping member 1143G is moved by the drive unit 521 to the X axis direction and the Y axis direction, and Zθ, Move in Xθ and Yθ directions.

Next, the focus / alignment adjustment of the reflection type light modulation device 442R is performed. At this time, the holding member 1143G holding the attachment member 446G of the reflection type light modulation device 442G for G color light is moved to the six-axis position adjustment device 11. And the gripping member 1143R is gripped by the mounting member 446R of the reflection type light modulation device 442R for the R color light.
Thereafter, the drive control unit 52 changes the moving direction of the gripping member 1143R as described above and advances and retracts the gripping member 1143R in the Y-axis direction, thereby approaching the light beam incident side end surface 4431R of the reflective light modulation device 442R. The position adjustment in the direction to be performed is performed.
Similarly, the alignment of the reflective light modulator 442R is adjusted by converting the moving direction of the gripping member 1143R as described above and moving the gripping member 1143R back and forth in the Yθ-axis direction.
The focus / alignment adjustment of the reflection type light modulation device 442B is the same as that of the reflection type light modulation device 442R, and the description thereof will be omitted.

  Finally, the position adjustment of the mounting member 446B is performed in the same manner by the method described above. Also in this case, the gripping member 1143R that has gripped the mounting member 446R of the reflection light modulation device 442R for R color light is removed from the mounting member 446R, and is gripped by the mounting member 446B of the reflection light modulation device 442B for B color light. The member 1143B is held and the position of the attachment member 446B is adjusted.

  Then, after positioning the adjustment member 447 at a position where there is no pixel shift with respect to the projection image of each reflection type light modulation device 442, the fixing light source device 70 irradiates ultraviolet rays. As a result, the adhesive applied to the prism 443 and the like is cured, and the attachment member 446 and the adjustment member 447 are fixed to the cross dichroic prism 443. Thus, the optical device 44 is assembled.

According to the 6-axis position adjusting device 11 and the manufacturing apparatus 10 of the optical device 44 of the present embodiment described above, the following effects are obtained.
The six-axis position adjusting device 11 that adjusts the position of each reflection type light modulation device 442 includes three holding members 1143 that hold the reflection type light modulation device 442, and a control device that controls the operation of these holding members 1143. 10D, the position of each of the reflective light modulators 442 can be adjusted by the single 6-axis position adjuster 11 by individually adjusting the position of each of the reflective light modulators 442. Therefore, it is not necessary to provide a plurality of 6-axis position adjusting devices 11, and only one 6-axis position adjusting device 11 may be provided, and the manufacturing apparatus 10 can be downsized and the manufacturing cost can be suppressed.

  Further, the drive unit 521 can move the gripping member 1143G in the Z-axis direction and move the gripping member 1143R in the Y-axis direction, for example, under the control of the control device 10D. According to this, by moving the gripping member 1143G forward and backward along the Z-axis direction, the position of the reflective light modulation device 442G can be adjusted along the direction approaching the prism 443. Further, the drive unit 521 can adjust the position of the reflective light modulation device 442R along the direction approaching the prism 443 by moving the gripping member 1143R forward and backward along the Y-axis direction. Therefore, according to the manufacturing apparatus 10, even when the orientations of the respective reflective light modulators 442 are different, when the position of each reflective light modulator 442 is adjusted, the moving direction of the gripping member 1143 is changed, The position adjustment of each reflection type light modulation device 442 can be appropriately performed.

[Modification of Embodiment]
The best configuration, method, and the like for carrying out the present invention have been disclosed above, but the present invention is not limited to this. That is, the present invention has been illustrated and described with particular reference to particular embodiments, but it is not intended to depart from the technical idea and scope of the invention, Various modifications can be made by those skilled in the art in terms of quantity and other detailed configurations.
Therefore, the description limited to the shape, quantity and the like disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, in the above-described embodiment, the manufacturing apparatus 10 that manufactures the optical device 44 including the reflection type light modulation device 442 has been described. However, the present invention is not limited thereto, and the optical device including the transmission type light modulation device may be manufactured. Good.
In the above-described embodiment, the CCD of the 3CCD camera 151 is employed as the image sensor that constitutes the light flux detection device 15. However, the present invention is not limited to this, and an image sensor such as a MOS (Metal-Oxide Semiconductor) sensor may be employed. .

In the above embodiment, only the example of the front type projector that projects from the direction of observing the screen is given. However, the present invention is a rear type projector that projects from the opposite side to the direction of observing the screen. It is also applicable to.
In the previous embodiment, the operation direction of each gripping member 1143 was different. However, depending on the shape of the light modulation device gripped by the gripping member 1143 and the position of the light modulation device with respect to the prism 443, each gripping member 1143 has the same direction. It may be one that operates.

  The present invention can be used in a manufacturing apparatus for manufacturing an optical device.

FIG. 2 is a diagram schematically illustrating a configuration of a projector according to an embodiment of the invention. The side view of the manufacturing apparatus of the optical apparatus in the said embodiment. The top view of the manufacturing apparatus of the optical apparatus in the said embodiment. The side view of the 6-axis position adjustment apparatus in the said embodiment. The side view which shows a mode that the 6-axis position adjustment apparatus in the said embodiment is holding the optical apparatus. The top view which shows a mode that the 6-axis position adjustment apparatus in the said embodiment is holding the optical apparatus. The block diagram which shows the structure of the manufacturing apparatus in the said embodiment. Schematic which shows the operation | movement direction of the reflection type light modulation apparatus in the said embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Manufacturing apparatus, 10B ... Screen unit (detection means), 10D ... Control apparatus (control means), 11 ... 6-axis position adjustment apparatus (position adjustment apparatus), 41 ... Light source device, 44 ... Optical apparatus, 442 ... Reflective type Light modulation device (light modulation device), 442G: reflection type light modulation device (first light modulation device), 442R, 442B ... reflection type light modulation device (second light modulation device), 443 ... cross dichroic prism (synthesis optical device) ) 521... Driving unit (moving means), 1143 G... Gripping member (first gripping member), 1143 R, 1143 B... Gripping member (second gripping member), 4431.

Claims (4)

A position adjustment device that adjusts the position of a plurality of light modulation devices that modulate incident light beams according to image information with respect to a combining optical device that combines the light beams modulated by the light modulation devices.
A plurality of gripping members each extending along a predetermined direction and gripping each of the light modulation devices;
The plurality of gripping members are provided, and moving means for moving the plurality of gripping members in the same direction,
And a control means for controlling the operation of the moving means. The position adjusting device according to claim 1,
The control means includes
When adjusting the position of each of the light modulation devices, the movement direction of the plurality of gripping members is changed and moved so that the light modulation devices are moved in the same direction with respect to the combining optical device. A position adjusting device characterized by that. The position adjusting device according to claim 2,
The plurality of light modulation devices includes at least a first light modulation device and a second light modulation device,
The synthetic optical device includes:
The light beams modulated by the at least two light modulation devices respectively enter, and have at least two light beam incident side end surfaces orthogonal to each other;
The plurality of gripping members include a first gripping member and a second gripping member that grip the first light modulation device and the second light modulation device, respectively.
The moving means has the first gripping member and the second gripping member orthogonal to the first direction, which is the predetermined direction, and the at least two light modulation devices adjacent to each other. Move in the second direction,
The control means includes
When adjusting the position of the first light modulation device along the direction approaching the combining optical device, the holding members are advanced and retracted along the first direction,
The position adjusting device characterized in that, when the position of the second light modulation device is adjusted along the direction approaching the combining optical device, the gripping members are advanced and retracted along the second direction. An optical device manufacturing apparatus comprising: a plurality of light modulation devices that modulate incident light beams according to image information; and a combining optical device that combines light beams modulated by the light modulation devices.
The position adjusting device according to any one of claims 1 to 3,
A light source device for irradiating each light modulator with a light beam;
Detecting means for detecting the position of the light beam emitted by the combining optical device;
The apparatus for manufacturing an optical device, wherein the control means moves the moving means based on a detection result by the detection means.

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